JP2013132083A - 弾性表面波デバイス - Google Patents
弾性表面波デバイス Download PDFInfo
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- JP2013132083A JP2013132083A JP2013059509A JP2013059509A JP2013132083A JP 2013132083 A JP2013132083 A JP 2013132083A JP 2013059509 A JP2013059509 A JP 2013059509A JP 2013059509 A JP2013059509 A JP 2013059509A JP 2013132083 A JP2013132083 A JP 2013132083A
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- piezoelectric substrate
- comb
- acoustic wave
- side wall
- surface acoustic
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- 238000010897 surface acoustic wave method Methods 0.000 title claims abstract description 53
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
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- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 239000004593 Epoxy Substances 0.000 description 2
- 239000011889 copper foil Substances 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000010295 mobile communication Methods 0.000 description 2
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- 229920000647 polyepoxide Polymers 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
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- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
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- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
【解決手段】本発明の弾性表面波デバイスは、圧電基板12と、この圧電基板12の表面に設けられた複数の櫛形電極13と、この複数の櫛形電極13間を接続する配線15と、前記圧電基板12の上に設けられ、かつ櫛形電極13を囲む側壁16と、この側壁16の上に設けられ、かつ前記櫛形電極13の励振空間19を覆う天板17と、前記配線15と電気的に接続された外部端子22とを備え、前記側壁16に圧電基板12の垂直方向に貫通するダミーの抜き穴23を設けたものである。
【選択図】図1
Description
13 櫛形電極
13a 櫛形電極
13b 櫛形電極
15 配線
15a 配線
15b 配線
16 側壁
17 天板
19 励振空間
22 外部端子
23 抜き穴
27 抜き穴
Claims (5)
- 圧電基板と、
前記圧電基板の表面に設けられた複数の櫛形電極と、
前記複数の櫛形電極間を接続する配線と、
前記圧電基板の上に設けられ、かつ前記櫛形電極を囲む側壁と、
前記側壁の上に設けられ、かつ前記櫛形電極の励振空間を覆う天板と、
前記配線と電気的に接続された外部端子とを備え、
前記側壁に前記圧電基板の垂直方向に貫通するダミーの抜き穴を設け、
前記天板は金属からなる弾性表面波デバイス。 - 前記天板は前記ダミーの抜き穴の上面を覆う請求項1記載の弾性表面波デバイス。
- 圧電基板と、
前記圧電基板の表面に設けられた複数の櫛形電極と、
前記複数の櫛形電極間を接続する配線と、
前記圧電基板の上に設けられ、かつ前記櫛形電極を囲む側壁と、
前記側壁の上に設けられ、かつ前記櫛形電極の励振空間を覆う天板と、
前記配線と電気的に接続された外部端子とを備え、
前記側壁に前記圧電基板の垂直方向に貫通するダミーの抜き穴を設け、
前記圧電基板の表面に前記抜き穴の下面を覆う導体を設けた弾性表面波デバイス。 - 前記導体はグランド端子に接続された請求項3記載の弾性表面波デバイス。
- 前記抜き穴を複数個設け、かつ前記抜き孔は圧電基板の熱膨張率と側壁の熱膨張率との差が大きい方向よりも小さい方向の寸法を大きくした請求項1または請求項3記載の弾性表面波デバイス。
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JP2013059509A JP5467375B2 (ja) | 2013-03-22 | 2013-03-22 | 弾性表面波デバイス |
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JP2013059509A JP5467375B2 (ja) | 2013-03-22 | 2013-03-22 | 弾性表面波デバイス |
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JP2009000080A Division JP5277971B2 (ja) | 2009-01-05 | 2009-01-05 | 弾性表面波デバイス |
Publications (2)
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JP2013132083A true JP2013132083A (ja) | 2013-07-04 |
JP5467375B2 JP5467375B2 (ja) | 2014-04-09 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101568193B1 (ko) | 2013-08-20 | 2015-11-11 | (주)와이솔 | 표면 탄성파 웨이퍼 레벨 패키지 구조 및 그 제조 방법 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006333130A (ja) * | 2005-05-26 | 2006-12-07 | Alps Electric Co Ltd | 表面弾性波装置 |
WO2006134928A1 (ja) * | 2005-06-16 | 2006-12-21 | Murata Manufacturing Co., Ltd. | 圧電デバイス及びその製造方法 |
WO2009001650A1 (ja) * | 2007-06-28 | 2008-12-31 | Kyocera Corporation | 弾性表面波装置およびその製造方法 |
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- 2013-03-22 JP JP2013059509A patent/JP5467375B2/ja active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006333130A (ja) * | 2005-05-26 | 2006-12-07 | Alps Electric Co Ltd | 表面弾性波装置 |
WO2006134928A1 (ja) * | 2005-06-16 | 2006-12-21 | Murata Manufacturing Co., Ltd. | 圧電デバイス及びその製造方法 |
WO2009001650A1 (ja) * | 2007-06-28 | 2008-12-31 | Kyocera Corporation | 弾性表面波装置およびその製造方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101568193B1 (ko) | 2013-08-20 | 2015-11-11 | (주)와이솔 | 표면 탄성파 웨이퍼 레벨 패키지 구조 및 그 제조 방법 |
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