DK1239525T3 - Piezokeramiske, flerlagede aktuatorer samt en fremgangsmåde til fremstilling deraf - Google Patents

Piezokeramiske, flerlagede aktuatorer samt en fremgangsmåde til fremstilling deraf

Info

Publication number
DK1239525T3
DK1239525T3 DK02003957T DK02003957T DK1239525T3 DK 1239525 T3 DK1239525 T3 DK 1239525T3 DK 02003957 T DK02003957 T DK 02003957T DK 02003957 T DK02003957 T DK 02003957T DK 1239525 T3 DK1239525 T3 DK 1239525T3
Authority
DK
Denmark
Prior art keywords
actuator
piezo
ceramic
making
basic
Prior art date
Application number
DK02003957T
Other languages
English (en)
Inventor
Hans-Juergen Dr Schreiner
Reiner Bindig
Original Assignee
Ceram Tec Ag Innovative Cerami
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ceram Tec Ag Innovative Cerami filed Critical Ceram Tec Ag Innovative Cerami
Application granted granted Critical
Publication of DK1239525T3 publication Critical patent/DK1239525T3/da

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
    • H10N30/053—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by integrally sintering piezoelectric or electrostrictive bodies and electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
    • H10N30/085—Shaping or machining of piezoelectric or electrostrictive bodies by machining
    • H10N30/088—Shaping or machining of piezoelectric or electrostrictive bodies by machining by cutting or dicing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/508—Piezoelectric or electrostrictive devices having a stacked or multilayer structure adapted for alleviating internal stress, e.g. cracking control layers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
DK02003957T 2001-03-06 2002-02-22 Piezokeramiske, flerlagede aktuatorer samt en fremgangsmåde til fremstilling deraf DK1239525T3 (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10110617 2001-03-06
DE10206115A DE10206115A1 (de) 2001-03-06 2002-02-13 Piezokeramische Vielschichtaktoren sowie ein Verfahren zu ihrer Herstellung

Publications (1)

Publication Number Publication Date
DK1239525T3 true DK1239525T3 (da) 2008-01-07

Family

ID=26008683

Family Applications (1)

Application Number Title Priority Date Filing Date
DK02003957T DK1239525T3 (da) 2001-03-06 2002-02-22 Piezokeramiske, flerlagede aktuatorer samt en fremgangsmåde til fremstilling deraf

Country Status (6)

Country Link
US (1) US6731050B2 (da)
EP (1) EP1239525B1 (da)
JP (1) JP2002280630A (da)
AT (1) ATE373321T1 (da)
DE (2) DE10206115A1 (da)
DK (1) DK1239525T3 (da)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1008191A1 (de) * 1997-08-05 2000-06-14 Siemens Aktiengesellschaft Vorgespannter piezoelektrischer aktor
DE10055241A1 (de) * 2000-11-08 2002-05-29 Epcos Ag Piezoaktor
DE10205928A1 (de) * 2001-02-21 2002-08-22 Ceramtec Ag Verfahren zur Herstellung piezokeramischer Vielschichtaktoren
DE10207530A1 (de) 2002-02-22 2003-09-11 Epcos Ag Piezoaktor mit strukturierter Außenelektrode
DE10234787C1 (de) * 2002-06-07 2003-10-30 Pi Ceramic Gmbh Keramische Tec Verfahren zur Herstellung eines monolithischen Vielschichtaktors, monolithischer Vielschichtaktor aus einem piezokeramischen oder elektrostriktiven Material
US6988706B2 (en) * 2003-12-17 2006-01-24 General Electric Company Piezoelectric microvalve
ATE557426T1 (de) * 2003-12-26 2012-05-15 Murata Manufacturing Co Mehrschichtiges piezoelektrisches bauelement mit dickfilm-aussenelektrode
JP4847039B2 (ja) * 2004-05-28 2011-12-28 日本碍子株式会社 圧電／電歪構造体及び圧電／電歪構造体の製造方法
DE102004047105A1 (de) * 2004-09-29 2006-05-24 Robert Bosch Gmbh Piezoaktor mit spannungsabbauenden Strukturen
US7176602B2 (en) * 2004-10-18 2007-02-13 Ssi Technologies, Inc. Method and device for ensuring trandsducer bond line thickness
JP4723874B2 (ja) * 2005-02-18 2011-07-13 花王株式会社 染毛剤組成物
JP4936306B2 (ja) * 2006-01-13 2012-05-23 日本碍子株式会社 積層型圧電素子およびその製造方法
DE102006011293A1 (de) * 2006-03-10 2007-09-13 Siemens Ag Piezoaktor und Verfahren zum Herstellen eines Piezoaktors
DE102006018056A1 (de) * 2006-04-19 2007-10-31 Robert Bosch Gmbh Piezoaktor mit außen kontaktierten Innenelektroden eines Piezoelements
JP4911066B2 (ja) * 2007-02-26 2012-04-04 株式会社デンソー 積層型圧電素子
WO2009082006A1 (ja) * 2007-12-26 2009-07-02 Kyocera Corporation 積層型圧電素子、これを用いた噴射装置及び燃料噴射システム
DE102013224839A1 (de) * 2013-12-04 2015-06-11 Robert Bosch Gmbh Piezoaktor und Steuerventil mit einem solchen Piezoaktor
US11309481B2 (en) * 2018-01-30 2022-04-19 Taiyo Yuden Co., Ltd Multi-layer piezoelectric ceramic component-mounted piezoelectric device
JP7036604B2 (ja) * 2018-01-30 2022-03-15 太陽誘電株式会社 積層圧電セラミック部品及び圧電デバイス

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3041952B2 (ja) * 1990-02-23 2000-05-15 セイコーエプソン株式会社 インクジェット式記録ヘッド、圧電振動体、及びこれらの製造方法
JP2545639B2 (ja) * 1990-07-30 1996-10-23 富士通株式会社 積層型圧電素子
JPH04214686A (ja) * 1990-10-05 1992-08-05 Nec Corp 電歪効果素子
US5406164A (en) * 1993-06-10 1995-04-11 Brother Kogyo Kabushiki Kaisha Multilayer piezoelectric element
DE19648545B4 (de) * 1996-11-25 2009-05-07 Ceramtec Ag Monolithischer Vielschichtaktor mit Außenelektroden
DE19753930A1 (de) * 1997-12-05 1999-06-10 Ceramtec Ag Verfahren zur Anbringung von Außenelektroden an Festkörperaktoren
DE19856185A1 (de) * 1998-12-05 2000-06-15 Bosch Gmbh Robert Piezoelektrischer Antrieb
EP1061591A4 (en) * 1998-12-18 2007-05-02 Denso Corp PIEZOELECTRIC VELOCITY BODY
JP2002203999A (ja) * 2000-11-06 2002-07-19 Denso Corp 積層型圧電体素子とその製造方法

Also Published As

Publication number Publication date
DE50210865D1 (de) 2007-10-25
ATE373321T1 (de) 2007-09-15
EP1239525A2 (de) 2002-09-11
DE10206115A1 (de) 2002-09-19
US6731050B2 (en) 2004-05-04
JP2002280630A (ja) 2002-09-27
EP1239525A3 (de) 2005-08-31
US20020158551A1 (en) 2002-10-31
EP1239525B1 (de) 2007-09-12

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