DE602006018214D1 - Piezoelektrischer Aktuator, Vorrichtung um Flüssigkeit zu transportieren, Verfahren um piezoelektrischen Aktuator herzustellen - Google Patents

Piezoelektrischer Aktuator, Vorrichtung um Flüssigkeit zu transportieren, Verfahren um piezoelektrischen Aktuator herzustellen

Info

Publication number
DE602006018214D1
DE602006018214D1 DE602006018214T DE602006018214T DE602006018214D1 DE 602006018214 D1 DE602006018214 D1 DE 602006018214D1 DE 602006018214 T DE602006018214 T DE 602006018214T DE 602006018214 T DE602006018214 T DE 602006018214T DE 602006018214 D1 DE602006018214 D1 DE 602006018214D1
Authority
DE
Germany
Prior art keywords
piezoelectric actuator
insulating layer
wirings
piezoelectric
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602006018214T
Other languages
English (en)
Inventor
Hiroto Sugahara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Brother Industries Ltd
Original Assignee
Brother Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Brother Industries Ltd filed Critical Brother Industries Ltd
Publication of DE602006018214D1 publication Critical patent/DE602006018214D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B41J2002/14266—Sheet-like thin film type piezoelectric element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14491—Electrical connection
DE602006018214T 2005-03-22 2006-03-21 Piezoelektrischer Aktuator, Vorrichtung um Flüssigkeit zu transportieren, Verfahren um piezoelektrischen Aktuator herzustellen Active DE602006018214D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005081009 2005-03-22

Publications (1)

Publication Number Publication Date
DE602006018214D1 true DE602006018214D1 (de) 2010-12-30

Family

ID=36577497

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602006018214T Active DE602006018214D1 (de) 2005-03-22 2006-03-21 Piezoelektrischer Aktuator, Vorrichtung um Flüssigkeit zu transportieren, Verfahren um piezoelektrischen Aktuator herzustellen

Country Status (5)

Country Link
US (1) US7512035B2 (de)
EP (1) EP1705012B1 (de)
JP (1) JP5637197B2 (de)
AT (1) ATE488369T1 (de)
DE (1) DE602006018214D1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1837181A3 (de) * 2006-03-20 2009-04-29 Brother Kogyo Kabushiki Kaisha Verfahren zur Herstellung eines piezoelektrischen Aktors, Verfahren zur Herstellung eines Flüssigkeitstropfenausstoßgerätes, piezoelektrischer Aktor und Flüssigkeitstropfenausstoßgerät
JP4404105B2 (ja) * 2007-03-30 2010-01-27 ブラザー工業株式会社 圧電アクチュエータ、及び、この圧電アクチュエータを備えた液体噴射装置
US7928323B2 (en) * 2007-07-18 2011-04-19 Brother Kogyo Kabushiki Kaisha Wiring unit, method for producing wiring unit, liquid jetting apparatus, and method for producing liquid jetting apparatus
JP5639738B2 (ja) * 2008-02-14 2014-12-10 日本碍子株式会社 圧電／電歪素子の製造方法
US7780266B2 (en) * 2008-08-04 2010-08-24 Xerox Corporation Micro-fluidic device having reduced mechanical cross-talk and method for making the micro-fluidic device
CN102972046B (zh) * 2010-06-30 2016-08-03 日本电气株式会社 振荡装置和电子设备
JP2012069548A (ja) * 2010-09-21 2012-04-05 Brother Ind Ltd 配線基板の接続構造及び接続方法
US20140063132A1 (en) * 2011-06-29 2014-03-06 Joseph E. Scheffelin Piezoelectric printhead trace layout

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0738599B1 (de) * 1995-04-19 2002-10-16 Seiko Epson Corporation Tintenstrahlaufzeichnungskopf und Verfahren zu dessen Herstellung
JPH09156099A (ja) 1995-12-12 1997-06-17 Seiko Epson Corp インクジェットプリントヘッド及びその製造方法
JPH09300636A (ja) * 1996-03-13 1997-11-25 Oki Data:Kk インクジェットヘッドの調整方法
DE69710240T2 (de) * 1996-04-10 2002-06-27 Seiko Epson Corp Tintenstrahlaufzeichnungskopf
JP3552013B2 (ja) 1996-12-09 2004-08-11 セイコーエプソン株式会社 インクジェット式記録ヘッド
JPH09327912A (ja) 1996-06-11 1997-12-22 Ricoh Co Ltd 記録ヘッド
JP3290897B2 (ja) * 1996-08-19 2002-06-10 ブラザー工業株式会社 インクジェットヘッド
JPH10211701A (ja) 1996-11-06 1998-08-11 Seiko Epson Corp 圧電体素子を備えたアクチュエータ及びインクジェット式記録ヘッド、並びにこれらの製造方法
JPH11291483A (ja) * 1998-04-07 1999-10-26 Minolta Co Ltd インクジェットヘッド
JPH11309858A (ja) * 1998-04-30 1999-11-09 Seiko Epson Corp インクジェット式記録ヘッド及びその駆動方法並びにインクジェット式記録装置
JP2000246888A (ja) * 1999-02-26 2000-09-12 Seiko Epson Corp インクジェット式記録ヘッド及びインクジェット式記録装置
JP2003165215A (ja) * 2001-11-30 2003-06-10 Brother Ind Ltd インクジェットプリンタヘッド
JP4110997B2 (ja) * 2002-02-21 2008-07-02 ブラザー工業株式会社 インクジェットヘッド、インクジェットヘッドの製造方法、および、インクジェットヘッドを有するインクジェットプリンタ
JP4539064B2 (ja) 2002-09-26 2010-09-08 ブラザー工業株式会社 インクジェットヘッド
US6969158B2 (en) 2002-09-26 2005-11-29 Brother Kogyo Kabushiki Kaisha Ink-jet head
JP3922151B2 (ja) * 2002-09-27 2007-05-30 ブラザー工業株式会社 フレキシブル配線基板の接続構造および接続方法
JP4603762B2 (ja) * 2002-11-15 2010-12-22 ブラザー工業株式会社 インクジェットヘッドの製造方法
JP2005032769A (ja) * 2003-07-07 2005-02-03 Seiko Epson Corp 多層配線の形成方法、配線基板の製造方法、デバイスの製造方法
JP3979360B2 (ja) * 2003-08-04 2007-09-19 ブラザー工業株式会社 液体移送装置
US7338152B2 (en) * 2003-08-13 2008-03-04 Brother Kogyo Kabushiki Kaisha Inkjet head
JP4419742B2 (ja) * 2004-07-28 2010-02-24 ブラザー工業株式会社 電子部品搭載基板及びインクジェットヘッド
US7540084B2 (en) * 2004-09-30 2009-06-02 Brother Kogyo Kabushiki Kaisha Method for manufacturing ink-jet heads

Also Published As

Publication number Publication date
EP1705012A3 (de) 2007-09-19
ATE488369T1 (de) 2010-12-15
JP2012257458A (ja) 2012-12-27
EP1705012A2 (de) 2006-09-27
EP1705012B1 (de) 2010-11-17
US20060214536A1 (en) 2006-09-28
US7512035B2 (en) 2009-03-31
JP5637197B2 (ja) 2014-12-10

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