ATE517435T1 - Feldeffekttransistor - Google Patents
FeldeffekttransistorInfo
- Publication number
- ATE517435T1 ATE517435T1 AT08869339T AT08869339T ATE517435T1 AT E517435 T1 ATE517435 T1 AT E517435T1 AT 08869339 T AT08869339 T AT 08869339T AT 08869339 T AT08869339 T AT 08869339T AT E517435 T1 ATE517435 T1 AT E517435T1
- Authority
- AT
- Austria
- Prior art keywords
- field effect
- effect transistor
- atom
- amorphous oxide
- group
- Prior art date
Links
- 230000005669 field effect Effects 0.000 title 1
- 229910052738 indium Inorganic materials 0.000 abstract 1
- 229910052718 tin Inorganic materials 0.000 abstract 1
- 229910052725 zinc Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/7869—Thin film transistors, i.e. transistors with a channel being at least partly a thin film having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008001336A JP5213458B2 (ja) | 2008-01-08 | 2008-01-08 | アモルファス酸化物及び電界効果型トランジスタ |
PCT/JP2008/073924 WO2009087943A1 (en) | 2008-01-08 | 2008-12-25 | Amorphous oxide and field effect transistor |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE517435T1 true ATE517435T1 (de) | 2011-08-15 |
Family
ID=40503360
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT08869339T ATE517435T1 (de) | 2008-01-08 | 2008-12-25 | Feldeffekttransistor |
Country Status (7)
Country | Link |
---|---|
US (1) | US8212248B2 (de) |
EP (1) | EP2240965B1 (de) |
JP (1) | JP5213458B2 (de) |
CN (1) | CN101911304B (de) |
AT (1) | ATE517435T1 (de) |
TW (1) | TWI433312B (de) |
WO (1) | WO2009087943A1 (de) |
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JP5177954B2 (ja) | 2006-01-30 | 2013-04-10 | キヤノン株式会社 | 電界効果型トランジスタ |
JP5294565B2 (ja) | 2006-03-17 | 2013-09-18 | キヤノン株式会社 | 発光素子及び発光素子の製造方法 |
JP5110803B2 (ja) | 2006-03-17 | 2012-12-26 | キヤノン株式会社 | 酸化物膜をチャネルに用いた電界効果型トランジスタ及びその製造方法 |
JP5000937B2 (ja) * | 2006-06-30 | 2012-08-15 | 三菱電機株式会社 | 半導体デバイスの製造方法 |
JP4332545B2 (ja) | 2006-09-15 | 2009-09-16 | キヤノン株式会社 | 電界効果型トランジスタ及びその製造方法 |
JP5116290B2 (ja) | 2006-11-21 | 2013-01-09 | キヤノン株式会社 | 薄膜トランジスタの製造方法 |
KR100858088B1 (ko) | 2007-02-28 | 2008-09-10 | 삼성전자주식회사 | 박막 트랜지스터 및 그 제조 방법 |
CN101663762B (zh) | 2007-04-25 | 2011-09-21 | 佳能株式会社 | 氧氮化物半导体 |
KR100987840B1 (ko) * | 2007-04-25 | 2010-10-13 | 주식회사 엘지화학 | 박막 트랜지스터 및 이의 제조방법 |
JP2009123957A (ja) * | 2007-11-15 | 2009-06-04 | Sumitomo Chemical Co Ltd | 酸化物半導体材料及びその製造方法、電子デバイス及び電界効果トランジスタ |
CN101911303B (zh) * | 2007-12-25 | 2013-03-27 | 出光兴产株式会社 | 氧化物半导体场效应晶体管及其制造方法 |
JP5451280B2 (ja) | 2008-10-09 | 2014-03-26 | キヤノン株式会社 | ウルツ鉱型結晶成長用基板およびその製造方法ならびに半導体装置 |
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2008
- 2008-01-08 JP JP2008001336A patent/JP5213458B2/ja active Active
- 2008-12-25 US US12/742,977 patent/US8212248B2/en active Active
- 2008-12-25 EP EP08869339A patent/EP2240965B1/de not_active Not-in-force
- 2008-12-25 WO PCT/JP2008/073924 patent/WO2009087943A1/en active Application Filing
- 2008-12-25 CN CN2008801239690A patent/CN101911304B/zh active Active
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Also Published As
Publication number | Publication date |
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EP2240965B1 (de) | 2011-07-20 |
US20100276685A1 (en) | 2010-11-04 |
US8212248B2 (en) | 2012-07-03 |
CN101911304A (zh) | 2010-12-08 |
TWI433312B (zh) | 2014-04-01 |
JP2009164393A (ja) | 2009-07-23 |
CN101911304B (zh) | 2012-09-26 |
JP5213458B2 (ja) | 2013-06-19 |
EP2240965A1 (de) | 2010-10-20 |
WO2009087943A1 (en) | 2009-07-16 |
TW200945573A (en) | 2009-11-01 |
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