WO2018181004A1 - ガスバリア性積層体 - Google Patents
ガスバリア性積層体 Download PDFInfo
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- WO2018181004A1 WO2018181004A1 PCT/JP2018/011734 JP2018011734W WO2018181004A1 WO 2018181004 A1 WO2018181004 A1 WO 2018181004A1 JP 2018011734 W JP2018011734 W JP 2018011734W WO 2018181004 A1 WO2018181004 A1 WO 2018181004A1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B33/00—Layered products characterised by particular properties or particular surface features, e.g. particular surface coatings; Layered products designed for particular purposes not covered by another single class
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/36—Layered products comprising a layer of synthetic resin comprising polyesters
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/30—Adhesives in the form of films or foils characterised by the adhesive composition
- C09J7/38—Pressure-sensitive adhesives [PSA]
- C09J7/381—Pressure-sensitive adhesives [PSA] based on macromolecular compounds obtained by reactions involving only carbon-to-carbon unsaturated bonds
- C09J7/385—Acrylic polymers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/30—Layered products comprising a layer of synthetic resin comprising vinyl (co)polymers; comprising acrylic (co)polymers
- B32B27/302—Layered products comprising a layer of synthetic resin comprising vinyl (co)polymers; comprising acrylic (co)polymers comprising aromatic vinyl (co)polymers, e.g. styrenic (co)polymers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/32—Layered products comprising a layer of synthetic resin comprising polyolefins
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
- C08J7/04—Coating
- C08J7/048—Forming gas barrier coatings
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
- C08J7/12—Chemical modification
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- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J133/00—Adhesives based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Adhesives based on derivatives of such polymers
- C09J133/04—Homopolymers or copolymers of esters
- C09J133/06—Homopolymers or copolymers of esters of esters containing only carbon, hydrogen and oxygen, the oxygen atom being present only as part of the carboxyl radical
- C09J133/08—Homopolymers or copolymers of acrylic acid esters
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- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J133/00—Adhesives based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Adhesives based on derivatives of such polymers
- C09J133/04—Homopolymers or copolymers of esters
- C09J133/14—Homopolymers or copolymers of esters of esters containing halogen, nitrogen, sulfur or oxygen atoms in addition to the carboxy oxygen
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/20—Adhesives in the form of films or foils characterised by their carriers
- C09J7/22—Plastics; Metallised plastics
- C09J7/25—Plastics; Metallised plastics based on macromolecular compounds obtained otherwise than by reactions involving only carbon-to-carbon unsaturated bonds
- C09J7/255—Polyesters
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2255/00—Coating on the layer surface
- B32B2255/10—Coating on the layer surface on synthetic resin layer or on natural or synthetic rubber layer
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2255/00—Coating on the layer surface
- B32B2255/20—Inorganic coating
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2255/00—Coating on the layer surface
- B32B2255/20—Inorganic coating
- B32B2255/205—Metallic coating
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/50—Properties of the layers or laminate having particular mechanical properties
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/70—Other properties
- B32B2307/724—Permeability to gases, adsorption
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/70—Other properties
- B32B2307/724—Permeability to gases, adsorption
- B32B2307/7242—Non-permeable
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/70—Other properties
- B32B2307/724—Permeability to gases, adsorption
- B32B2307/7242—Non-permeable
- B32B2307/7246—Water vapor barrier
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/70—Other properties
- B32B2307/748—Releasability
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2457/00—Electrical equipment
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2551/00—Optical elements
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2433/00—Presence of (meth)acrylic polymer
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- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
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- C09J2467/00—Presence of polyester
- C09J2467/006—Presence of polyester in the substrate
Definitions
- the present invention is a gas barrier laminate having a base material layer, a gas barrier layer, and a protective film, and can peel and remove the protective film without adversely affecting the appearance of the exposed surface.
- the present invention relates to a gas barrier laminate in which the original water vapor barrier property is maintained in the remaining laminate even if it is removed.
- a gas barrier laminate having a base material layer and a gas barrier layer made of an inorganic film or the like has been widely used as a substrate material or a sealing material.
- a gas barrier laminate is industrially manufactured as a long product, and then wound into a roll, and is often stored and transported as a wound body.
- a protective film may be provided as the outermost layer on one side or both sides in order to protect the gas barrier layer and the like.
- a support, and an organic film and an inorganic film alternately arranged on one surface of the support, respectively, are provided on a functional layer including at least one layer, and on the other surface of the support.
- the first laminated film and the second laminated film disposed on the uppermost layer of the functional layer, and the adhesive force between the second laminated film and the uppermost layer is the first laminated film and the support
- a functional film (laminate) smaller than the adhesive strength of the body is described.
- JP2011-207125A (US2011 / 0106900 A1, US2013 / 0224435 A1)
- the protective film (laminate film) is peeled and removed, and the remaining laminate is subjected to predetermined processing and the like.
- the protective film is peeled and removed at a high speed in order to increase productivity, the exposed surface of the remaining laminate may be damaged.
- the exposed surface is a functional layer such as a gas barrier layer, the function may be greatly deteriorated due to generation of scratches.
- the organic film is an inorganic film. Since it functions as a protective layer, the inorganic film can be prevented from being damaged when the protective film is peeled off.
- the present inventors diligently studied a gas barrier laminate having a base material layer, a gas barrier layer, and a protective film.
- a base material layer, a gas barrier layer laminated directly or via another layer on one surface (A) of the base material layer, and a protective film laminated directly on the gas barrier layer A gas barrier laminate having ( ⁇ ) and a protective film ( ⁇ ) laminated directly or via another layer on the surface (B) opposite to the surface (A) of the base material layer
- the gas barrier laminate having an adhesive strength of not more than a specific value when the protective film ( ⁇ ) and the protective film ( ⁇ ) are peeled off under specific conditions adversely affects the appearance of the exposed surface. It was found that the protective film can be peeled and removed, and even if the protective film is peeled and removed, the original water vapor barrier property is maintained in the remaining laminate, and the present invention has been completed.
- the following gas barrier laminates [1] to [6] are provided.
- [1] A base material layer, a gas barrier layer laminated directly or via another layer on one surface (A) of the base material layer, and a protective film laminated directly on the gas barrier layer
- the adhesive strength when the protective film ( ⁇ ) is peeled off under conditions of a peeling speed of 10 m / min and a peeling angle of 180 ° is 0.1 N / 50 mm or less
- the protective film ( ⁇ ) is A gas barrier laminate having an adhesive strength of 1.5 N / 50 mm or less when peeled at a peeling speed of 10 m / min and a peeling angle of 180 °.
- [2] A composite compound in which the gas barrier layer contains silicon oxide, silicon nitride, silicon fluoride, silicon carbide, metal oxide, metal nitride, metal fluoride, metal carbide, and elements constituting these compounds The gas barrier laminate according to [1], which contains at least one selected from the group consisting of: [3] The gas barrier laminate according to [1] or [2], wherein the protective film ( ⁇ ) is a laminate film having a support ( ⁇ 1) and an adhesive layer ( ⁇ 2). [4] The gas barrier laminate according to any one of [1] to [3], wherein the protective film ( ⁇ ) is a laminate film having a support ( ⁇ 1) and an adhesive layer ( ⁇ 2).
- a gas barrier laminate having a base material layer, a gas barrier layer, and a protective film
- the protective film can be peeled and removed without adversely affecting the appearance of the exposed surface, and the protective film Even if it peels and removes, the gas-barrier laminated body in which the original water vapor
- the gas barrier laminate of the present invention comprises a base material layer, a gas barrier layer laminated directly or via another layer on one surface (A) of the base material layer, and directly on the gas barrier layer.
- the adhesive strength when the film ( ⁇ ) is peeled off under conditions of a peeling speed of 10 m / min and a peeling angle of 180 ° is 1.5 N / 50 mm or less.
- the base material layer constituting the gas barrier laminate of the present invention is not particularly limited as long as it is excellent in transparency and can carry a gas barrier layer or the like.
- Resin components of the resin film include polyimide, polyamide, polyamideimide, polyphenylene ether, polyether ketone, polyether ether ketone, polyolefin, polyester, polycarbonate, polysulfone, polyethersulfone, polyphenylene sulfide, acrylic resin, cycloolefin polymer And aromatic polymers.
- polyesters are preferable because they are excellent in transparency and versatile.
- Polyester is more preferable from the viewpoint of versatility, and cycloolefin polymer is more preferable from the viewpoint of transparency.
- polyester examples include polyethylene terephthalate, polybutylene terephthalate, polyethylene naphthalate, polyarylate, and the like, and polyethylene terephthalate is preferable.
- Polycarbonates include 2,2-bis (4-hydroxyphenyl) propane (also known as bisphenol A), 2,2-bis (4-hydroxyphenyl) butane, 1,1-bis (4-hydroxyphenyl) cyclohexane, 1, Examples thereof include polymers obtained by reacting bisphenols such as 1-bis (4-hydroxyphenyl) isobutane and 1,1-bis (4-hydroxyphenyl) ethane with phosgene and diphenyl carbonate.
- cycloolefin polymers include norbornene polymers, monocyclic olefin polymers, cyclic conjugated diene polymers, vinyl alicyclic hydrocarbon polymers, and hydrides thereof. Specific examples thereof include Apel (an ethylene-cycloolefin copolymer manufactured by Mitsui Chemicals), Arton (a norbornene polymer manufactured by JSR), Zeonoa (a norbornene polymer manufactured by Nippon Zeon), and the like. .
- Apel an ethylene-cycloolefin copolymer manufactured by Mitsui Chemicals
- Arton a norbornene polymer manufactured by JSR
- Zeonoa a norbornene polymer manufactured by Nippon Zeon
- aromatic polymer examples include polystyrene.
- the resin film may contain various additives as long as the effects of the present invention are not hindered.
- the additive include an ultraviolet absorber, an antistatic agent, a stabilizer, an antioxidant, a plasticizer, a lubricant, and a coloring pigment. What is necessary is just to determine suitably content of these additives according to the objective.
- the resin film can be obtained by preparing a resin composition containing a resin component and optionally various additives, and molding the resin composition into a film.
- the molding method is not particularly limited, and a known method such as a casting method or a melt extrusion method can be used.
- the thickness of the base material layer is not particularly limited, and may be determined according to the purpose of the gas barrier laminate.
- the thickness of the base material layer is usually 0.5 to 500 ⁇ m, preferably 1 to 100 ⁇ m.
- the gas barrier layer constituting the gas barrier laminate of the present invention is a layer having a characteristic (gas barrier property) that suppresses permeation of gases such as oxygen and water vapor.
- This gas barrier layer is laminated on one surface (A) of the base material layer directly or via another layer.
- the thickness of the gas barrier layer is usually 1 to 2000 nm, more preferably 3 to 1000 nm, and more preferably 5 to 500 nm.
- the gas barrier layer contains silicon oxide, silicon nitride, silicon fluoride, silicon carbide, metal oxide, metal nitride, metal fluoride, metal carbide, and a composite compound containing elements constituting these compounds. Those are preferred.
- a gas barrier layer for example, an inorganic vapor-deposited film or a layer obtained by modifying the surface of a layer that can be changed to a layer containing an inorganic compound by undergoing a modification treatment [in this case, a gas barrier layer]
- the term “means a layer including a modified region”, not only a modified region. ] Etc. are mentioned.
- the inorganic vapor deposition film examples include vapor deposition films of inorganic compounds and metals.
- inorganic oxides such as silicon oxide, aluminum oxide, magnesium oxide, zinc oxide, indium oxide and tin oxide
- inorganic nitrides such as silicon nitride, aluminum nitride and titanium nitride
- inorganic carbides Inorganic sulfides
- inorganic oxynitrides such as silicon oxynitride
- Examples of the raw material for the metal vapor deposition film include aluminum, magnesium, zinc, and tin. These can be used singly or in combination of two or more. Among these, an inorganic vapor-deposited film using an inorganic oxide, inorganic nitride or metal as a raw material is preferable from the viewpoint of gas barrier properties, and further, an inorganic material using an inorganic oxide or inorganic nitride as a raw material from the viewpoint of transparency. A vapor deposition film is preferred.
- a PVD (physical vapor deposition) method such as a vacuum vapor deposition method, a sputtering method, or an ion plating method, a thermal CVD (chemical vapor deposition) method, a plasma CVD method, a photo CVD method, etc.
- the CVD method is mentioned.
- the thickness of the inorganic vapor-deposited film varies depending on the inorganic compound and metal used, but is preferably in the range of 1 to 2000 nm, more preferably 3 to 1000 nm, and more preferably 5 to 500 nm from the viewpoint of gas barrier properties and handling properties. .
- Examples of the layer that can be changed to a layer containing an inorganic compound by undergoing a modification treatment include a layer containing a silicon-containing polymer compound (hereinafter sometimes referred to as “polymer layer”).
- a layer that can be changed to a layer containing an inorganic compound by undergoing a modification treatment includes a layer containing an inorganic polymer compound such as inorganic polysilazane described later. In this case, by undergoing the modification treatment, at least a part of the layer containing the inorganic polymer compound is changed to a layer containing an inorganic compound having a different composition.
- the polymer layer may contain other components as long as the object of the present invention is not impaired.
- other components include a curing agent, an anti-aging agent, a light stabilizer, and a flame retardant.
- the content of the silicon-containing polymer compound in the polymer layer is preferably 50% by mass or more, and more preferably 70% by mass or more because a gas barrier layer having better gas barrier properties can be formed.
- the thickness of the polymer layer is not particularly limited, but is usually in the range of 1 to 2000 nm, more preferably 3 to 1000 nm, and more preferably 5 to 500 nm.
- the polymer layer is, for example, a coating film obtained by applying a solution obtained by dissolving or dispersing a silicon-containing polymer compound in an organic solvent directly or via another layer by a known coating method. Can be formed by drying.
- organic solvent examples include aromatic hydrocarbon solvents such as benzene and toluene; ester solvents such as ethyl acetate and butyl acetate; ketone solvents such as acetone, methyl ethyl ketone and methyl isobutyl ketone; n-pentane, n-hexane, n -An aliphatic hydrocarbon solvent such as heptane; an alicyclic hydrocarbon solvent such as cyclopentane or cyclohexane; These solvents can be used alone or in combination of two or more.
- aromatic hydrocarbon solvents such as benzene and toluene
- ester solvents such as ethyl acetate and butyl acetate
- ketone solvents such as acetone, methyl ethyl ketone and methyl isobutyl ketone
- n-pentane n-hexane
- Coating methods include bar coating, spin coating, dipping, roll coating, gravure coating, knife coating, air knife coating, roll knife coating, die coating, screen printing, spray coating, and gravure offset. Law.
- Examples of the method for drying the coating film include conventionally known drying methods such as hot air drying, hot roll drying, and infrared irradiation.
- the heating temperature is usually 80 to 150 ° C.
- the heating time is usually several tens of seconds to several tens of minutes.
- Examples of the method for modifying the surface of the polymer layer include ion implantation treatment, plasma treatment, ultraviolet irradiation treatment, and heat treatment.
- the ion implantation treatment is a method of injecting accelerated ions into the polymer layer to modify the polymer layer.
- the plasma treatment is a method for modifying the polymer layer by exposing the polymer layer to plasma.
- plasma treatment can be performed according to the method described in Japanese Patent Application Laid-Open No. 2012-106421.
- the ultraviolet irradiation treatment is a method for modifying the polymer layer by irradiating the polymer layer with ultraviolet rays.
- the ultraviolet modification treatment can be performed according to the method described in JP2013-226757A.
- silicon-containing polymer compounds examples include polysilazane compounds, polycarbosilane compounds, polysilane compounds, polyorganosiloxane compounds, poly (disilanylene phenylene) compounds, and poly (disilanylene ethynylene) compounds. And polysilazane compounds are more preferred.
- the polysilazane compound is a compound having a repeating unit containing a —Si—N— bond (silazane bond) in the molecule. Specifically, the formula (1)
- the compound which has a repeating unit represented by these is preferable.
- the number average molecular weight of the polysilazane compound to be used is not particularly limited, but is preferably 100 to 50,000.
- n represents an arbitrary natural number.
- Rx, Ry, and Rz each independently represent a hydrogen atom, an unsubstituted or substituted alkyl group, an unsubstituted or substituted cycloalkyl group, an unsubstituted or substituted alkenyl group, unsubstituted or substituted Represents a non-hydrolyzable group such as an aryl group having a group or an alkylsilyl group;
- alkyl group of the unsubstituted or substituted alkyl group examples include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, an isobutyl group, a sec-butyl group, a t-butyl group, Examples thereof include alkyl groups having 1 to 10 carbon atoms such as n-pentyl group, isopentyl group, neopentyl group, n-hexyl group, n-heptyl group and n-octyl group.
- Examples of the unsubstituted or substituted cycloalkyl group include cycloalkyl groups having 3 to 10 carbon atoms such as a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, and a cycloheptyl group.
- alkenyl group of an unsubstituted or substituted alkenyl group examples include, for example, a vinyl group, 1-propenyl group, 2-propenyl group, 1-butenyl group, 2-butenyl group, 3-butenyl group and the like having 2 to 2 carbon atoms. 10 alkenyl groups are mentioned.
- substituents for the alkyl group, cycloalkyl group and alkenyl group include halogen atoms such as fluorine atom, chlorine atom, bromine atom and iodine atom; hydroxyl group; thiol group; epoxy group; glycidoxy group; (meth) acryloyloxy group
- halogen atoms such as fluorine atom, chlorine atom, bromine atom and iodine atom
- hydroxyl group such as hydroxyl group; thiol group; epoxy group; glycidoxy group; (meth) acryloyloxy group
- An unsubstituted or substituted aryl group such as a phenyl group, a 4-methylphenyl group, and a 4-chlorophenyl group;
- aryl group of the unsubstituted or substituted aryl group examples include aryl groups having 6 to 15 carbon atoms such as a phenyl group, a 1-naphthyl group, and a 2-naphthyl group.
- substituent of the aryl group examples include halogen atoms such as fluorine atom, chlorine atom, bromine atom and iodine atom; alkyl groups having 1 to 6 carbon atoms such as methyl group and ethyl group; carbon numbers such as methoxy group and ethoxy group 1-6 alkoxy groups; nitro groups; cyano groups; hydroxyl groups; thiol groups; epoxy groups; glycidoxy groups; (meth) acryloyloxy groups; unsubstituted phenyl groups, 4-methylphenyl groups, 4-chlorophenyl groups, etc.
- alkylsilyl group examples include trimethylsilyl group, triethylsilyl group, triisopropylsilyl group, tri-t-butylsilyl group, methyldiethylsilyl group, dimethylsilyl group, diethylsilyl group, methylsilyl group, and ethylsilyl group.
- Rx, Ry, and Rz a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, or a phenyl group is preferable, and a hydrogen atom is particularly preferable.
- Examples of the polysilazane compound having a repeating unit represented by the formula (1) include inorganic polysilazanes in which Rx, Ry, and Rz are all hydrogen atoms, and organic polysilazanes in which at least one of Rx, Ry, and Rz is not a hydrogen atom. It may be.
- a modified polysilazane compound can also be used as the polysilazane compound.
- the modified polysilazane include, for example, JP-A-62-195024, JP-A-2-84437, JP-A-63-81122, JP-A-1-138108, and JP-A-2-175726.
- JP-A-5-238827, JP-A-5-238827, JP-A-6-122852, JP-A-6-306329, JP-A-6-299118, JP-A-9-31333 Examples thereof include those described in Kaihei 5-345826 and JP-A-4-63833.
- the polysilazane compound perhydropolysilazane in which Rx, Ry, and Rz are all hydrogen atoms is preferable from the viewpoint of easy availability and the ability to form an ion-implanted layer having excellent gas barrier properties.
- a polysilazane compound a commercially available product as a glass coating material or the like can be used as it is.
- the polysilazane compounds can be used alone or in combination of two or more.
- ions implanted into the polymer layer ions of rare gases such as argon, helium, neon, krypton, and xenon; ions of fluorocarbon, hydrogen, nitrogen, oxygen, carbon dioxide, chlorine, fluorine, sulfur, etc .; methane, ethane, etc.
- rare gases such as argon, helium, neon, krypton, and xenon
- fluorocarbon hydrogen, nitrogen, oxygen, carbon dioxide, chlorine, fluorine, sulfur, etc .
- Ion of alkane gases such as ethylene and propylene
- Ions of alkadiene gases such as pentadiene and butadiene
- Ions of alkyne gases such as acetylene
- Aromatic carbonization such as benzene and toluene
- Examples include ions of hydrogen-based gases; ions of cycloalkane-based gases such as cyclopropane; ions of cycloalkene-based gases such as cyclopentene; ions of metals; ions of organosilicon compounds. These ions can be used alone or in combination of two or more.
- ions of rare gases such as argon, helium, neon, krypton, and xenon are preferable because ions can be more easily implanted and a gas barrier layer having better gas barrier properties can be formed.
- the ion implantation amount can be appropriately determined according to the purpose of use of the gas barrier laminate (necessary gas barrier properties, transparency, etc.).
- Examples of the method of implanting ions include a method of irradiating ions accelerated by an electric field (ion beam), a method of implanting ions in plasma, and the like. Of these, the latter method of injecting ions in plasma (plasma ion implantation method) is preferable because the target gas barrier layer can be easily formed.
- plasma is generated in an atmosphere containing a plasma generation gas such as a rare gas, and a negative high voltage pulse is applied to the polymer layer to thereby remove ions (positive ions) in the plasma. It can be performed by injecting into the surface portion of the polymer layer. More specifically, the plasma ion implantation method can be carried out by a method described in WO2010 / 107018 pamphlet or the like.
- the thickness of the region into which ions are implanted can be controlled by implantation conditions such as ion type, applied voltage, and processing time, and is determined according to the thickness of the polymer layer and the purpose of use of the laminate. Usually, it is 10 to 400 nm.
- the ion implantation can be confirmed by performing an elemental analysis measurement in the vicinity of 10 nm from the surface of the polymer layer using X-ray photoelectron spectroscopy (XPS).
- XPS X-ray photoelectron spectroscopy
- the protective film ( ⁇ ) constituting the gas barrier laminate of the present invention is directly laminated on the gas barrier layer.
- the protective film ( ⁇ ) has a role of protecting the gas barrier layer while the gas barrier laminate is transported or stored.
- Examples of the protective film ( ⁇ ) include a laminated film having a support ( ⁇ 1) and an adhesive layer ( ⁇ 2).
- the support ( ⁇ 1) is not particularly limited as long as it can support the pressure-sensitive adhesive layer ( ⁇ 2), but a resin film is preferable.
- a resin film examples include those similar to those shown above as the resin film constituting the base material layer.
- a support body ((alpha) 1) a polyolefin-type film is preferable. Since the polyolefin film has an appropriate elastic modulus, the protective film ( ⁇ ) can be smoothly removed by using the polyolefin film as the support ( ⁇ 1).
- the polyolefin constituting the polyolefin film include polyethylene, polypropylene, and ethylene- ⁇ -olefin copolymers. Among these, polyethylene is preferable.
- the thickness of the support ( ⁇ 1) is not particularly limited, but is usually 1 to 500 ⁇ m, preferably 5 to 100 ⁇ m.
- Polymer components contained in the pressure-sensitive adhesive layer ( ⁇ 2) include acrylic polymers, natural rubber polymers, synthetic rubber polymers, ethylene-vinyl acetate copolymers, polyolefin polymers, and ethylene (meth). Acrylic ester copolymers, styrene-isoprene block copolymers, styrene-butadiene block copolymers and the like can be mentioned. Among these, as the polymer component contained in the pressure-sensitive adhesive layer ( ⁇ 2), an acrylic polymer or a polyolefin polymer is preferable.
- a protective film ( ⁇ ) having an adhesive strength of 0.1 N / 50 mm or less when peeled at a peeling speed of 10 m / min and a peeling angle of 180 °. ) Is easily obtained.
- the storage elastic modulus at 25 ° C. of the pressure-sensitive adhesive layer ( ⁇ 2) is preferably 1 ⁇ 10 4 to 1 ⁇ 10 6 Pa. When the storage elastic modulus at 25 ° C. of the pressure-sensitive adhesive layer ( ⁇ 2) is within this range, the adhesive layer can be smoothly peeled without any adhesive residue.
- the acrylic polymer is also suitably used as a polymer component contained in the pressure-sensitive adhesive layer ( ⁇ 2).
- the type of acrylic polymer used in order to express the desired adhesiveness It is preferable to consider addition of crosslink density, non-adhesive component, and the like.
- the pressure-sensitive adhesive strength tends to increase when the crosslinking density is appropriate, and the pressure-sensitive adhesive strength tends to decrease when the crosslinking density is low or excessively high.
- a pressure-sensitive adhesive layer such as the pressure-sensitive adhesive layer ( ⁇ 2) with a small adhesive force.
- the adhesive force tends to decrease as the pressure-sensitive adhesive layer becomes thinner, so by adjusting the thickness of the pressure-sensitive adhesive layer The target adhesiveness may be expressed.
- the pressure-sensitive adhesive layer ( ⁇ 2) may contain an additive.
- the additive include an antistatic agent, a slip agent, and a tackifier.
- the thickness of the pressure-sensitive adhesive layer ( ⁇ 2) is not particularly limited, but is usually 0.1 to 50 ⁇ m, preferably 0.5 to 20 ⁇ m.
- the laminated film having the support ( ⁇ 1) and the pressure-sensitive adhesive layer ( ⁇ 2) is efficiently produced by co-extrusion of the raw material resin for the support ( ⁇ 1) and the raw material resin for the pressure-sensitive adhesive layer ( ⁇ 2). be able to.
- the protective film ( ⁇ ) constituting the gas barrier laminate of the present invention is laminated on the surface (B) of the base material layer directly or via another layer.
- Examples of the protective film ( ⁇ ) include a laminated film having a support ( ⁇ 1) and an adhesive layer ( ⁇ 2).
- the support ( ⁇ 1) is not particularly limited as long as it can support the pressure-sensitive adhesive layer ( ⁇ 2), but a resin film is preferable.
- a resin film examples include those similar to those shown above as the resin film constituting the base material layer.
- a support body ((beta) 1) a polyester-type film is preferable.
- the thickness of the support ( ⁇ 1) is not particularly limited, but is usually 1 to 500 ⁇ m, preferably 10 to 200 ⁇ m.
- Polymer components contained in the adhesive layer ( ⁇ 2) include acrylic polymers, natural rubber polymers, synthetic rubber polymers, ethylene-vinyl acetate copolymers, polyolefin polymers, ethylene (meth) Acrylic ester copolymers, styrene-isoprene block copolymers, styrene-butadiene block copolymers and the like can be mentioned.
- an acrylic polymer is preferable as the polymer component contained in the pressure-sensitive adhesive layer ( ⁇ 2).
- the desired pressure-sensitive adhesiveness can be expressed by adjusting the type of the acrylic polymer, the crosslinking density, and the like.
- acrylic polymer examples include an acrylic copolymer having a repeating unit derived from a (meth) acrylic acid ester having a hydrocarbon group having 1 to 20 carbon atoms and a repeating unit derived from a functional group-containing monomer.
- Examples of the (meth) acrylic acid ester having a hydrocarbon group having 1 to 20 carbon atoms include methyl (meth) acrylate, ethyl (meth) acrylate, propyl (meth) acrylate, n-butyl (meth) acrylate, 2-ethylhexyl ( Examples include meth) acrylate, lauryl (meth) acrylate, tridecyl (meth) acrylate, and stearyl (meth) acrylate.
- Examples of the functional group-containing monomer include a hydroxy group-containing monomer, a carboxy group-containing monomer, an epoxy group-containing monomer, an amino group-containing monomer, a cyano group-containing monomer, a keto group-containing monomer, and an alkoxysilyl group-containing monomer.
- a hydroxy group-containing monomer and a carboxy group-containing monomer are preferable.
- Hydroxy group-containing monomers include 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, 2-hydroxybutyl (meth) acrylate, 3-hydroxybutyl (meth) acrylate, 4-hydroxybutyl (meth) An acrylate etc. are mentioned.
- Examples of the carboxy group-containing monomer include (meth) acrylic acid, maleic acid, fumaric acid, and itaconic acid.
- 2-ethylhexyl (meth) acrylate as a monomer because an adhesive layer having a desired adhesive force can be easily formed.
- a crosslinked structure may be formed in the pressure-sensitive adhesive layer ( ⁇ 2).
- the crosslinked structure can be formed by a known method using a crosslinking agent.
- an isocyanate crosslinking agent that is a compound having an isocyanate group as a crosslinking group
- an epoxy crosslinking agent that is a compound having an epoxy group as a crosslinking group
- an aziridine that is a compound having an aziridine group as a crosslinking group
- metal cross-linking agents and metal chelate cross-linking agents such as chelate compounds whose metal atoms are aluminum, zirconium, titanium, zinc, iron, tin and the like. These crosslinking agents can be used alone or in combination of two or more.
- the blending amount of the crosslinking agent is 0.1 to 10 parts by mass with respect to 100 parts by mass of the polymer component contained in the adhesive layer ( ⁇ 2) from the viewpoint of easily obtaining a protective film having the desired adhesive strength.
- 0.5 to 8 parts by mass is more preferable, and 1 to 5 parts by mass is particularly preferable.
- the pressure-sensitive adhesive layer ( ⁇ 2) may contain an additive.
- the additive include an antistatic agent, a slip agent, and a tackifier. Specific examples thereof include those listed as antistatic agents, slip agents, and tackifiers that may be added to the adhesive layer ( ⁇ 2).
- the thickness of the pressure-sensitive adhesive layer ( ⁇ 2) is not particularly limited, but is usually 0.5 to 30 ⁇ m, preferably 1 to 15 ⁇ m. When the thickness of the pressure-sensitive adhesive layer ( ⁇ 2) is within this range, a protective film ( ⁇ ) having an adhesive strength of 1.5 N / 50 mm or less when peeled at a peeling speed of 10 m / min and a peeling angle of 180 ° is obtained. It becomes easy to obtain.
- the storage elastic modulus of the pressure-sensitive adhesive layer ( ⁇ 2) at 25 ° C. is preferably 1 ⁇ 10 4 to 1 ⁇ 10 6 Pa.
- the storage elastic modulus at 25 ° C. of the pressure-sensitive adhesive layer ( ⁇ 2) is within this range, it is possible to smoothly peel the adhesive layer without leaving any adhesive.
- the laminated film having the support ( ⁇ 1) and the pressure-sensitive adhesive layer ( ⁇ 2) is coated on the support ( ⁇ 1) with a coating solution for forming the pressure-sensitive adhesive layer ( ⁇ 2), and the obtained coating film is dried. If necessary, it can be efficiently produced by generating a crosslinked structure.
- the gas barrier laminate of the present invention comprises a base material layer, the gas barrier layer laminated on one surface (A) of the base material layer directly or via another layer, and the gas barrier layer.
- examples of the other layers include a primer layer.
- the primer layer is not particularly limited and can be formed according to a known method.
- examples of the other layers include a hard coat layer.
- a gas barrier laminate (1) shown in FIG. 1 includes a base layer (2), a gas barrier layer (3) directly laminated on one surface (A) of the base layer (2), and a gas barrier.
- the protective film ( ⁇ ) (4) directly laminated on the layer (3) and the protective film directly laminated on the surface (B) opposite to the surface (A) of the base material layer (2) A gas barrier laminate having ( ⁇ ) and (5).
- the protective film ( ⁇ ) (4) has the pressure-sensitive adhesive layer ( ⁇ 2) (not shown)
- the protective film ( ⁇ ) (4) has the pressure-sensitive adhesive layer ( ⁇ 2) facing the gas barrier layer (3).
- the protective film ( ⁇ ) (5) has the pressure-sensitive adhesive layer ( ⁇ 2) (not shown)
- the gas barrier laminate (6) shown in FIG. 2 is laminated on the base layer (7) and one surface (A) of the base layer (7) via the other layer (8).
- the adhesive strength when the protective film ( ⁇ ) constituting the gas barrier laminate of the present invention is peeled off under conditions of a peeling speed of 10 m / min and a peeling angle of 180 ° is 0.1 N / 50 mm or less, preferably 0. 0.01 to 0.08 N / 50 mm.
- the adhesive force of a protective film ((alpha)) and a protective film ((beta)) can be measured by the method as described in an Example more specifically.
- the adhesive strength of the protective film ( ⁇ ) when peeled off under these conditions is 0.1 N / 50 mm or less, so that the protective film ( ⁇ ) is peeled and removed without scratching the exposed surface or causing adhesive residue. Even if the protective film ( ⁇ ) is peeled and removed, the original water vapor barrier property is maintained in the remaining laminate.
- the laminated film having the support ( ⁇ 1) and the pressure-sensitive adhesive layer ( ⁇ 2) is used as the protective film ( ⁇ )
- the laminated film having the above-mentioned adhesive strength is used as a polymer in the pressure-sensitive adhesive layer ( ⁇ 2). It can be efficiently obtained by using an acrylic polymer or a polyolefin polymer.
- the adhesive strength when the protective film ( ⁇ ) is peeled off under conditions of a peeling speed of 10 m / min and a peeling angle of 180 ° is 1.5 N / 50 mm or less, preferably 0.1 to 1.0 N / 50 mm. It is.
- the protective film ( ⁇ ) has a pressure-sensitive adhesive strength of 1.5 N / 50 mm or less when peeled off under these conditions. Even if the protective film ( ⁇ ) is peeled and removed, the original water vapor barrier property is maintained in the remaining laminate.
- the laminated film having the support ( ⁇ 1) and the pressure-sensitive adhesive layer ( ⁇ 2) is used as the protective film ( ⁇ )
- the laminated film having the above-mentioned adhesive force is used as a polymer in the pressure-sensitive adhesive layer ( ⁇ 2). It can be efficiently obtained by using an acrylic polymer having a repeating unit derived from 2-ethylhexyl (meth) acrylate.
- the storage elastic modulus of the adhesive layer ( ⁇ 2) is the storage elastic modulus of the adhesive layer ( ⁇ 2). Higher is preferred.
- the protective film ( ⁇ ) constituting the gas barrier laminate of the present invention is peeled off at a peeling speed of 10 m / min and a peeling angle of 180 °
- the protective film ( ⁇ ) is peeled off at a peeling speed of 10 m / min and a peeling angle of 180.
- the water vapor permeability of the remaining laminate is usually less than 0.2 g ⁇ m ⁇ 2 ⁇ day ⁇ 1 , preferably 1 ⁇ 10 ⁇ 6 to 1 ⁇ 10 ⁇ 2 g ⁇ m. -2 ⁇ day -1 .
- the water vapor transmission rate can be measured by the method described in the examples.
- the gas barrier laminate of the present invention has the above properties, it is suitably used as a material for producing sensor devices such as film-type sensors and optical devices such as organic EL light-emitting devices.
- the protective film ( ⁇ ) or ( ⁇ ) of the gas barrier laminate (width 50 mm) obtained in the examples or comparative examples was peeled off at 180 ° and peeled off at 0.3 m / min or 10 m according to JIS Z0237: 2000. It peeled on condition of / min, and the adhesive force (N / 50mm) in that case was measured.
- the protective film of the gas barrier laminate (width 500 mm) obtained in the examples or comparative examples was peeled off in the order of the protective film ( ⁇ ) and the protective film ( ⁇ ), respectively, at a peeling speed of 10 m / min.
- the appearance of the laminate was visually observed. As a result, the case where there was no abnormality in the appearance was rated as ⁇ , and the case where at least one of cracks, scratches or white turbidity occurred was rated as x.
- the water-vapor-permeation rate was measured in the environment of temperature 40 degreeC and relative humidity 90% using MOQUA AQUATRAN.
- the water vapor transmission rate was measured under the same conditions for the laminate (laminate having the structure of the base material layer / gas barrier layer) used in the appearance evaluation.
- a pressure-sensitive adhesive composition (3) was obtained by mixing 100 parts of a butyl acrylate-based resin (manufactured by Seiden Chemical Co., Ltd., LT-55) and 2 parts of an isocyanate-based cross-linking agent (manufactured by Seiden Chemical Co., Ltd., Kokazai K-315).
- Example 1 A perhydropolysilazane-containing liquid (Merck Performance Materials, Aquamica NL110-20, solvent: xylene, concentration: 10%) on a polyester film (Toyobo Co., Ltd., PET50A4300, thickness 50 ⁇ m) as a base material layer By applying and drying at 120 ° C. for 2 minutes, a perhydropolysilazane layer having a thickness of 200 nm was formed.
- Plasma ion implantation and forming a gas barrier layer to have a base material layer (polyester film) and a gas barrier layer directly laminated on one surface (A) of the base material layer A gas barrier film was obtained.
- Plasma generation gas Ar Gas flow rate: 100sccm Duty ratio: 0.5% Applied voltage: -6kV RF power supply: frequency 13.56 MHz, applied power 1000 W Chamber internal pressure: 0.2 Pa Pulse width: 5 ⁇ sec Processing time (ion implantation time): 200 seconds
- a polyolefin film (low density polyethylene base material, olefin pressure-sensitive adhesive, manufactured by Sanei Kaken Co., Ltd., Sanitect PAC-3-50THK) was attached as a protective film ( ⁇ ) to the gas barrier layer side of the obtained gas barrier film. Subsequently, the protective film ( ⁇ -i) obtained in Production Example 4 was applied as a protective film ( ⁇ ) to the base material layer side of the gas barrier film to obtain a gas barrier laminate.
- Example 2 In Example 1, a gas barrier laminate was used in the same manner as in Example 1, except that a cycloolefin polymer film (manufactured by Zeon Corporation, ZF14-040) was used instead of the polyester film as the base material layer. Got the body.
- a cycloolefin polymer film manufactured by Zeon Corporation, ZF14-040
- Example 3 In Example 1, a gas barrier laminate was used in the same manner as in Example 1 except that a polycarbonate film (Pure Ace C110-100, manufactured by Teijin Limited) was used instead of the polyester film as the base material layer. Got.
- a polycarbonate film Pure Ace C110-100, manufactured by Teijin Limited
- Example 4 In Example 1, a gas barrier laminate was used in the same manner as in Example 1 except that a polyethylene naphthalate film (PEN50Q65HW manufactured by Teijin Film Solutions Co., Ltd.) was used instead of the polyester film as the base material layer.
- PEN50Q65HW manufactured by Teijin Film Solutions Co., Ltd.
- Example 5 In Example 1, it replaced with the polyolefin-type film as a protective film ((alpha)), and Example 1 except having used the polypropylene-type film (The Toray Industries, Inc. make, a polypropylene base material, an acrylic adhesive, Tretec 7531). In the same manner as above, a gas barrier laminate was obtained.
- Example 6 In Example 1, a gas barrier laminate was obtained in the same manner as in Example 1 except that the protective film ( ⁇ -ii) obtained in Production Example 5 was used as the protective film ( ⁇ ).
- Example 7 On the polyester-type film (Toyobo Co., Ltd. make, PET50A4300, thickness 50micrometer) as a base material layer, the gas barrier layer was formed with the following method, and the gas barrier film was obtained.
- Method for forming gas barrier layer Using an electron beam heating vacuum deposition apparatus, a silicon oxide material (SiO2 manufactured by Canon Optron) is evaporated by electron beam heating, and a SiOx film having a cured film thickness of 50 nm under a pressure of 0.015 Pa during film formation. was formed.
- the deposition conditions are an acceleration voltage of 40 kV and an emission current of 0.2 A.
- a gas barrier laminate was obtained in the same manner as in Example 1 except that this gas barrier film was used.
- Example 1 a gas barrier laminate was obtained in the same manner as in Example 1 except that the protective film ( ⁇ -i) obtained in Production Example 4 was used as the protective film ( ⁇ ).
- Example 2 a gas barrier laminate was obtained in the same manner as in Example 1 except that the protective film ( ⁇ -iii) obtained in Production Example 6 was used as the protective film ( ⁇ ).
- Example 3 In Example 1, a gas barrier laminate was obtained in the same manner as in Example 1 except that the protective film ( ⁇ -iv) obtained in Production Example 7 was used as the protective film ( ⁇ ).
- the protective film can be peeled and removed at high speed without adversely affecting the appearance of the exposed surface. Furthermore, even if the protective film is peeled and removed at a high speed (peeling speed: 10 m / min), the original water vapor barrier property is maintained in the remaining laminate. On the other hand, the gas barrier laminate obtained in Comparative Example 1 has too high adhesive strength when the protective film ( ⁇ ) is peeled off under the conditions of a peeling speed of 10 m / min and a peeling angle of 180 °.
- the gas barrier laminates obtained in Comparative Examples 2 and 3 have too high adhesive strength when the protective film ( ⁇ ) is peeled off at a peeling speed of 10 m / min and a peeling angle of 180 °. For this reason, in the gas barrier laminates obtained in Comparative Examples 1 to 3, when the protective film is peeled and removed at a high speed, cracks, scratches, or cloudiness occurs on the exposed surface. In addition, the water vapor barrier property of the remaining laminate after the protective film is peeled and removed is lower than the water vapor barrier property of the gas barrier laminate before the protective film is peeled and removed.
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Abstract
Description
ガスバリア性積層体は、工業的には、長尺なものとして製造された後ロール状に巻かれ、巻回体として保管、輸送されることが多い。このようなガスバリア性積層体においては、ガスバリア層等を保護するために、片側又は両側の最外層として保護フィルムが設けられることがある。
しかしながら、生産性を上げるために保護フィルムを高速で剥離除去すると、残りの積層体の露出面が傷つくことがあった。そして、この露出面がガスバリア層等の機能層である場合、傷の発生によりその機能が大きく低下することがあった。
この点に関して、特許文献1の実施例で製造された積層体のように、無機膜の上に有機膜を有し、さらにその上に保護フィルムを有する積層体においては、有機膜が無機膜の保護層として機能するため、保護フィルムを剥離除去したときに無機膜が傷つくことを防止することができる。
したがって、ガスバリア層と保護フィルムが直接接するガスバリア性積層体であって、露出面の外観に悪影響を与えることなく保護フィルムを剥離除去することができ、かつ、保護フィルムを剥離除去しても、残りの積層体において、当初の水蒸気遮断性が維持されるガスバリア性積層体が要望されていた。
〔1〕基材層と、前記基材層の一方の面(A)上に、直接又はその他の層を介して積層されてなるガスバリア層と、前記ガスバリア層上に直接積層されてなる保護フィルム(α)と、前記基材層の面(A)とは逆の面(B)上に、直接又はその他の層を介して積層されてなる保護フィルム(β)と、を有するガスバリア性積層体であって、前記保護フィルム(α)を、剥離速度10m/分、剥離角度180°の条件で剥離したときの粘着力が、0.1N/50mm以下であり、前記保護フィルム(β)を、剥離速度10m/分、剥離角度180°の条件で剥離したときの粘着力が、1.5N/50mm以下であることを特徴とするガスバリア性積層体。
〔2〕前記ガスバリア層が、ケイ素酸化物、ケイ素窒化物、ケイ素フッ化物、ケイ素炭化物、金属酸化物、金属窒化物、金属フッ化物、金属炭化物、及びこれらの化合物を構成する元素を含む複合化合物からなる群から選択される少なくとも一種を含有するものである、〔1〕に記載のガスバリア性積層体。
〔3〕前記保護フィルム(α)が、支持体(α1)と粘着剤層(α2)を有する積層フィルムである、〔1〕又は〔2〕に記載のガスバリア性積層体。
〔4〕前記保護フィルム(β)が、支持体(β1)と粘着剤層(β2)を有する積層フィルムである、〔1〕~〔3〕のいずれかに記載のガスバリア性積層体。
〔5〕前記保護フィルム(α)を、剥離速度10m/分、剥離角度180°の条件で剥離した後、前記保護フィルム(β)を、剥離速度10m/分、剥離角度180°の条件で剥離したときに、残りの積層体の水蒸気透過率が0.2g・m-2・day-1未満である、〔1〕~〔4〕のいずれかに記載のガスバリア性積層体。
〔6〕前記ガスバリア層が、改質処理を受けることで無機化合物を含有する層に変化し得る層の表面を改質して得られたものである、〔1〕~〔5〕のいずれかに記載のガスバリア性積層体。
〔7〕センサーデバイス又は光学デバイスに用いられる、〔1〕~〔6〕のいずれかに記載のガスバリア性積層体。
本発明のガスバリア性積層体を構成する基材層は、透明性に優れ、かつ、ガスバリア層等を担持し得るものであれば特に制限されない。
樹脂フィルムの樹脂成分としては、ポリイミド、ポリアミド、ポリアミドイミド、ポリフェニレンエーテル、ポリエーテルケトン、ポリエーテルエーテルケトン、ポリオレフィン、ポリエステル、ポリカーボネート、ポリスルホン、ポリエーテルスルホン、ポリフェニレンスルフィド、アクリル系樹脂、シクロオレフィン系ポリマー、芳香族系重合体等が挙げられる。
本発明のガスバリア性積層体を構成するガスバリア層は、酸素や水蒸気等のガスの透過を抑制する特性(ガスバリア性)を有する層である。このガスバリア層は、前記基材層の一方の面(A)上に、直接又はその他の層を介して積層されてなるものである。
このようなガスバリア層としては、例えば、無機蒸着膜や、改質処理を受けることで無機化合物を含有する層に変化し得る層の表面を改質して得られたもの〔この場合、ガスバリア層とは、改質された領域のみを意味するのではなく、「改質された領域を含む層」を意味する。〕等が挙げられる。
無機化合物の蒸着膜の原料としては、酸化珪素、酸化アルミニウム、酸化マグネシウム、酸化亜鉛、酸化インジウム、酸化スズ等の無機酸化物;窒化ケイ素、窒化アルミニウム、窒化チタン等の無機窒化物;無機炭化物;無機硫化物;酸化窒化ケイ素等の無機酸化窒化物;無機酸化炭化物;無機窒化炭化物;無機酸化窒化炭化物等が挙げられる。
金属の蒸着膜の原料としては、アルミニウム、マグネシウム、亜鉛、及びスズ等が挙げられる。
これらは、1種単独で、あるいは2種以上を組み合わせて用いることができる。
これらの中では、ガスバリア性の観点から、無機酸化物、無機窒化物又は金属を原料とする無機蒸着膜が好ましく、さらに、透明性の観点から、無機酸化物又は無機窒化物を原料とする無機蒸着膜が好ましい。
高分子層中のケイ素含有高分子化合物の含有量は、よりガスバリア性に優れるガスバリア層を形成し得ることから、50質量%以上が好ましく、70質量%以上がより好ましい。
これらの溶媒は、1種単独で、あるいは2種以上を組み合わせて用いることができる。
イオン注入処理は、後述するように、加速させたイオンを高分子層に注入して、高分子層を改質する方法である。
プラズマ処理は、高分子層をプラズマ中に晒して、高分子層を改質する方法である。例えば、特開2012-106421号公報に記載の方法に従って、プラズマ処理を行うことができる。
紫外線照射処理は、高分子層に紫外線を照射して高分子層を改質する方法である。例えば、特開2013-226757号公報に記載の方法に従って、紫外線改質処理を行うことができる。
これらの中でも、ポリシラザン系化合物としては、入手容易性、及び優れたガスバリア性を有するイオン注入層を形成できる観点から、Rx、Ry、Rzが全て水素原子であるペルヒドロポリシラザンが好ましい。
また、ポリシラザン系化合物としては、ガラスコーティング材等として市販されている市販品をそのまま使用することもできる。
ポリシラザン系化合物は、1種単独で、あるいは2種以上を組み合わせて用いることができる。
これらのイオンは1種単独で、あるいは2種以上を組み合わせて用いることができる。
これらの中でも、より簡便にイオンを注入することができ、より優れたガスバリア性を有するガスバリア層を形成し得ることから、アルゴン、ヘリウム、ネオン、クリプトン、キセノン等の希ガスのイオンが好ましい。
本発明のガスバリア性積層体を構成する保護フィルム(α)は、前記ガスバリア層上に直接積層されるものである。保護フィルム(α)は、ガスバリア性積層体を運搬したり、保存したりする間に、ガスバリア層を保護する役割を有する。
保護フィルム(α)としては、支持体(α1)と粘着剤層(α2)を有する積層フィルムが挙げられる。
ポリオレフィン系フィルムは適切な弾性率を有しているため、ポリオレフィン系フィルムを支持体(α1)として用いることで、保護フィルム(α)を滑らかに剥離除去することができる。
ポリオレフィン系フィルムを構成するポリオレフィンとしては、ポリエチレン、ポリプロピレン、エチレン-α-オレフィン共重合体等が挙げられる。これらの中でもポリエチレンが好ましい。
支持体(α1)の厚みは特に限定されないが、通常、1~500μm、好ましくは5~100μmである。
これらの中でも、粘着剤層(α2)に含まれる重合体成分としては、アクリル系重合体や、ポリオレフィン系重合体が好ましい。
これらの重合体を含有する粘着剤層(α2)を形成することで、剥離速度10m/分、剥離角度180°の条件で剥離したときの粘着力が0.1N/50mm以下の保護フィルム(α)が得られ易くなる。
アクリル系重合体を含有する粘着剤層においては、適当な架橋密度の場合、粘着力が大きくなり、架橋密度が低い場合や過度に高い場合、粘着力が小さくなる傾向がある。このような知見を基にして、粘着剤層(α2)のような粘着力が小さい粘着剤層を効率よく形成することができる。
また、一般に、同じ粘着剤組成物を用いて形成された粘着剤層においては、粘着剤層が薄くなるにしたがって、粘着力が小さくなる傾向があるため、粘着剤層の厚みを調節することにより、目的の粘着性を発現させてもよい。
本発明のガスバリア性積層体を構成する保護フィルム(β)は、前記基材層の面(B)上に、直接又はその他の層を介して積層されてなるものである。
保護フィルム(β)としては、支持体(β1)と粘着剤層(β2)を有する積層フィルムが挙げられる。
支持体(β1)が、ポリエステル系フィルムであることで、適切な支持が可能であり、ハンドリング性に優れる。
支持体(β1)の厚みは特に限定されないが、通常、1~500μm、好ましくは10~200μmである。
これらの中でも、粘着剤層(β2)に含まれる重合体成分としては、アクリル系重合体が好ましい。
上記のように、アクリル系重合体を含有する粘着剤においては、アクリル系重合体の種類や、架橋密度等を調節することで、目的の粘着性を発現させることができる。
したがって、上記の知見に基づき、用いるアクリル系重合体等を適宜選択することで、剥離速度10m/分、剥離角度180°の条件で剥離したときの粘着力が1.5N/50mm以下の保護フィルム(β)が得られ易くなる。
ヒドロキシ基含有モノマーとしては、2-ヒドロキシエチル(メタ)アクリレート、2-ヒドロキシプロピル(メタ)アクリレート、2-ヒドロキシブチル(メタ)アクリレート、3-ヒドロキシブチル(メタ)アクリレート、4-ヒドロキシブチル(メタ)アクリレート等が挙げられる。
カルボキシ基含有モノマーとしては、(メタ)アクリル酸、マレイン酸、フマル酸、イタコン酸等が挙げられる。
これらの架橋剤は1種単独で、あるいは2種以上を組み合わせて用いることができる。
架橋剤の配合量は、目的とする粘着力を有する保護フィルムが得られ易い観点から、粘着剤層(β2)に含まれる重合体成分100質量部に対して、0.1~10質量部が好ましく、0.5~8質量部がより好ましく、1~5質量部が特に好ましい。
本発明のガスバリア性積層体は、基材層と、前記基材層の一方の面(A)上に、直接又はその他の層を介して積層されてなる前記ガスバリア層と、前記ガスバリア層上に直接積層されてなる保護フィルム(α)と、前記基材層の面(A)とは逆の面(B)上に、直接又はその他の層を介して積層されてなる保護フィルム(β)と、を有するガスバリア性積層体である。
本発明のガスバリア性積層体が、基材層と保護フィルム(β)との間にその他の層を有する場合、その他の層としては、ハードコート層等が挙げられる。
図1に示すガスバリア性積層体(1)は、基材層(2)と、基材層(2)の一方の面(A)上に、直接積層されてなるガスバリア層(3)と、ガスバリア層(3)上に直接積層されてなる保護フィルム(α)(4)と、基材層(2)の面(A)とは逆の面(B)上に、直接積層されてなる保護フィルム(β)(5)と、を有するガスバリア性積層体である。
保護フィルム(α)(4)が粘着剤層(α2)(図示せず)を有するとき、保護フィルム(α)(4)は、粘着剤層(α2)がガスバリア層(3)に対向するように配置される。
保護フィルム(β)(5)が粘着剤層(β2)(図示せず)を有するとき、保護フィルム(β)(5)は、粘着剤層(β2)が基材層(2)に対向するように配置される。
なお、保護フィルム(α)や保護フィルム(β)の粘着力は、より具体的には実施例に記載の方法により測定することができる。
この条件で剥離したときの保護フィルム(α)の粘着力が0.1N/50mm以下であることで、露出面に傷をつけたり、糊残りが生じたりすることなく保護フィルム(α)を剥離除去することができ、かつ、保護フィルム(α)を剥離除去しても、残りの積層体において、当初の水蒸気遮断性が維持される。
この条件で剥離したときの保護フィルム(β)の粘着力が1.5N/50mm以下であることで、露出面に傷をつけたり、糊残りが生じたりすることなく保護フィルム(β)を剥離除去することができ、かつ、保護フィルム(β)を剥離除去しても、残りの積層体において、当初の水蒸気遮断性が維持される。
水蒸気透過率は、実施例に記載の方法により測定することができる。
各例中の部及び%は、特に断りのない限り、質量基準である。
実施例又は比較例で得られたガスバリア性積層体(幅50mm)の保護フィルム(α)又は(β)を、JIS Z0237:2000に準じ、剥離角度180°、剥離速度0.3m/分又は10m/分の条件で剥離し、その際の粘着力(N/50mm)を測定した。
実施例又は比較例で得られたガスバリア性積層体(幅500mm)の保護フィルムを、保護フィルム(α)、保護フィルム(β)の順に、それぞれ剥離速度10m/分の条件で剥離し、残りの積層体の外観を目視で観察した。その結果、外観に異常がないものを○とし、クラック、キズ、又は白濁の少なくとも一つが発生したものを×とした。
実施例又は比較例で得られたガスバリア性積層体について、MOCON社製AQUATRANを用いて、温度40℃、相対湿度90%の環境下で水蒸気透過率を測定した。
また、外観評価で用いた積層体(基材層/ガスバリア層の構造の積層体)について、同様の条件で水蒸気透過率を測定した。
2-エチルヘキシルアクリレート系樹脂(日本合成化学社製、コーポニールN-4399)100部、イソシアネート系架橋剤(サイデン化学社製、コウカザイK-315)4部を混合し、粘着剤組成物(1)を得た。
2-ヒドロキシエチルアクリレート系樹脂(トーヨーケム社製、オリバインBPS6393-K)100部、イソシアネート系架橋剤(サイデン化学社製、コウカザイK-315)2部を混合し、粘着剤組成物(2)を得た。
ブチルアクリレート系樹脂(サイデン化学社製、LT-55)100部、イソシアネート系架橋剤(サイデン化学社製、コウカザイK-315)2部を混合し、粘着剤組成物(3)を得た。
ポリエステル系フィルム(東レ株式会社製、PET50-U40)上に、製造例1で得られた粘着剤組成物(1)を用いて、厚みが5μm、25℃における貯蔵弾性率が3.0x105Paの粘着剤層を形成し、保護フィルム(β-i)を得た。
ポリエステル系フィルム(東レ株式会社製、PET50-U40)上に、製造例2で得られた粘着剤組成物(2)を用いて、厚みが12μm、25℃における貯蔵弾性率が1.0x105Paの粘着剤層を形成し、保護フィルム(β-ii)を得た。
ポリエステル系フィルム(東レ株式会社製、PET50-U40)上に、製造例3で得られた粘着剤組成物(3)を用いて、厚みが20μm、25℃における貯蔵弾性率が8.0x105Paの粘着剤層を形成し、保護フィルム(β-iii)を得た。
ポリエステル系フィルム(東レ株式会社製、PET50-U40)上に、製造例1で得られた粘着剤組成物(1)を用いて、厚みが40μm、25℃における貯蔵弾性率が3.0x105Paの粘着剤層を形成し、保護フィルム(β-iv)を得た。
基材層としてのポリエステル系フィルム(東洋紡株式会社製、PET50A4300、厚み50μm)上に、ペルヒドロポリシラザン含有液(メルクパフォーマンスマテリアルズ社製、アクアミカNL110-20、溶媒:キシレン、濃度:10%)を塗布し、120℃で2分間乾燥することで、厚みが200nmのペルヒドロポリシラザン層を形成した。
次いで、プラズマイオン注入装置(RF電源:日本電子株式会社製、RF56000、高電圧パルス電源:株式会社栗田製作所製、PV-3-HSHV-0835)を用いて、ペルヒドロポリシラザン層に対し、下記条件にてプラズマイオン注入を行い、ガスバリア層を形成することで、基材層(ポリエステル系フィルム)と、前記基材層の一方の面(A)上に、直接積層されてなるガスバリア層とを有するガスバリアフィルムを得た。
ガス流量:100sccm
Duty比:0.5%
印加電圧:-6kV
RF電源:周波数 13.56MHz、印加電力 1000W
チャンバー内圧:0.2Pa
パルス幅:5μsec
処理時間(イオン注入時間):200秒
実施例1において、基材層としてのポリエステル系フィルムに代えて、シクロオレフィンポリマー系フィルム(日本ゼオン株式会社製、ZF14-040)を使用したこと以外は、実施例1と同様にしてガスバリア性積層体を得た。
実施例1において、基材層としてのポリエステル系フィルムに代えて、ポリカーボネート系フィルム(帝人株式会社製、ピュアエースC110-100)を使用したこと以外は、実施例1と同様にしてガスバリア性積層体を得た。
実施例1において、基材層としてのポリエステル系フィルムに代えて、ポリエチレンナフタレート系フィルム(帝人フィルムソリューション株式会社製、PEN50Q65HW)を使用したこと以外は、実施例1と同様にしてガスバリア性積層体を得た。
実施例1において、保護フィルム(α)としてのポリオレフィン系フィルムに代えて、ポリプロピレン系フィルム(東レ株式会社製、ポリプロピレン基材、アクリル系粘着剤、トレテック7531)を使用したこと以外は、実施例1と同様にしてガスバリア性積層体を得た。
実施例1において、保護フィルム(β)として、製造例5で得られた保護フィルム(β-ii)を使用したこと以外は、実施例1と同様にしてガスバリア性積層体を得た。
基材層としてのポリエステル系フィルム(東洋紡株式会社製、PET50A4300、厚み50μm)上に、以下の方法によりガスバリア層を形成し、ガスバリアフィルムを得た。
(ガスバリア層の形成方法)
電子ビーム加熱方式の真空蒸着装置を用いて、酸化ケイ素化材料(キヤノンオプトロン社製SiO)を電子ビーム加熱により蒸発させ、製膜中の圧力が0.015Paの条件で硬化膜厚50nmのSiOx膜を製膜した。蒸着条件は加速電圧40kV、エミッション電流0.2Aである。
実施例1において、保護フィルム(α)として、製造例4で得られた保護フィルム(β-i)を使用したことを除き、実施例1と同様にしてガスバリア性積層体を得た。
実施例1において、保護フィルム(β)として、製造例6で得られた保護フィルム(β-iii)を使用したことを除き、実施例1と同様にしてガスバリア性積層体を得た。
実施例1において、保護フィルム(β)として、製造例7で得られた保護フィルム(β-iv)を使用したことを除き、実施例1と同様にしてガスバリア性積層体を得た。
実施例1~7で得られたガスバリア性積層体においては、露出面の外観に悪影響を与えることなく保護フィルムを高速で剥離除去することができる。さらに、保護フィルムを高速で剥離除去(剥離速度:10m/分)しても、残りの積層体において、当初の水蒸気遮断性が維持される。
一方、比較例1で得られたガスバリア性積層体は、保護フィルム(α)を、剥離速度10m/分、剥離角度180°の条件で剥離したときの粘着力が大き過ぎる。
また、比較例2、3で得られたガスバリア性積層体は、保護フィルム(β)を、剥離速度10m/分、剥離角度180°の条件で剥離したときの粘着力が大き過ぎる。
このため、比較例1~3で得られたガスバリア性積層体においては、保護フィルムを高速で剥離除去すると、露出面に、クラック、キズ、又は白濁が発生する。また、保護フィルムを剥離除去した後の残りの積層体の水蒸気遮断性は、保護フィルムの剥離除去前のガスバリア性積層体の水蒸気遮断性に比べて低下する。
Claims (7)
- 基材層と、
前記基材層の一方の面(A)上に、直接又はその他の層を介して積層されてなるガスバリア層と、
前記ガスバリア層上に直接積層されてなる保護フィルム(α)と、
前記基材層の面(A)とは逆の面(B)上に、直接又はその他の層を介して積層されてなる保護フィルム(β)と、を有するガスバリア性積層体であって、
前記保護フィルム(α)を、剥離速度10m/分、剥離角度180°の条件で剥離したときの粘着力が、0.1N/50mm以下であり、
前記保護フィルム(β)を、剥離速度10m/分、剥離角度180°の条件で剥離したときの粘着力が、1.5N/50mm以下であることを特徴とするガスバリア性積層体。 - 前記ガスバリア層が、ケイ素酸化物、ケイ素窒化物、ケイ素フッ化物、ケイ素炭化物、金属酸化物、金属窒化物、金属フッ化物、金属炭化物、及びこれらの化合物を構成する元素を含む複合化合物からなる群から選択される少なくとも一種を含有するものである、請求項1に記載のガスバリア性積層体。
- 前記保護フィルム(α)が、支持体(α1)と粘着剤層(α2)を有する積層フィルムである、請求項1又は2に記載のガスバリア性積層体。
- 前記保護フィルム(β)が、支持体(β1)と粘着剤層(β2)を有する積層フィルムである、請求項1~3のいずれかに記載のガスバリア性積層体。
- 前記保護フィルム(α)を、剥離速度10m/分、剥離角度180°の条件で剥離した後、前記保護フィルム(β)を、剥離速度10m/分、剥離角度180°の条件で剥離したときに、残りの積層体の水蒸気透過率が0.2g・m-2・day-1未満である、請求項1~4のいずれかに記載のガスバリア性積層体。
- 前記ガスバリア層が、改質処理を受けることで無機化合物を含有する層に変化し得る層の表面を改質して得られたものである、請求項1~5のいずれかに記載のガスバリア性積層体。
- センサーデバイス又は光学デバイスに用いられる、請求項1~6のいずれかに記載のガスバリア性積層体。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US16/496,347 US11512231B2 (en) | 2017-03-28 | 2018-03-23 | Gas barrier laminate |
EP18774711.8A EP3603952B1 (en) | 2017-03-28 | 2018-03-23 | Gas barrier laminate |
KR1020197023089A KR102572921B1 (ko) | 2017-03-28 | 2018-03-23 | 가스 배리어성 적층체 |
JP2019509714A JP6995111B2 (ja) | 2017-03-28 | 2018-03-23 | ガスバリア性積層体 |
CN201880019121.7A CN110392630B (zh) | 2017-03-28 | 2018-03-23 | 阻气性层合体 |
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JP6995111B2 (ja) | 2022-01-14 |
JPWO2018181004A1 (ja) | 2020-02-06 |
US20200032115A1 (en) | 2020-01-30 |
CN110392630B (zh) | 2022-03-01 |
TW201902692A (zh) | 2019-01-16 |
EP3603952B1 (en) | 2023-11-15 |
EP3603952A4 (en) | 2020-12-30 |
KR20190132990A (ko) | 2019-11-29 |
EP3603952A1 (en) | 2020-02-05 |
US11512231B2 (en) | 2022-11-29 |
KR102572921B1 (ko) | 2023-08-30 |
CN110392630A (zh) | 2019-10-29 |
TWI749198B (zh) | 2021-12-11 |
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