WO2015052763A1 - 基板搬送装置 - Google Patents
基板搬送装置 Download PDFInfo
- Publication number
- WO2015052763A1 WO2015052763A1 PCT/JP2013/077296 JP2013077296W WO2015052763A1 WO 2015052763 A1 WO2015052763 A1 WO 2015052763A1 JP 2013077296 W JP2013077296 W JP 2013077296W WO 2015052763 A1 WO2015052763 A1 WO 2015052763A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- substrate
- rail
- interval
- guide rail
- carry
- Prior art date
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/22—Devices influencing the relative position or the attitude of articles during transit by conveyors
- B65G47/24—Devices influencing the relative position or the attitude of articles during transit by conveyors orientating the articles
- B65G47/244—Devices influencing the relative position or the attitude of articles during transit by conveyors orientating the articles by turning them about an axis substantially perpendicular to the conveying plane
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67718—Changing orientation of the substrate, e.g. from a horizontal position to a vertical position
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0214—Articles of special size, shape or weigh
- B65G2201/022—Flat
Definitions
- the present invention relates to a substrate transfer device, and more particularly to a substrate transfer device that transfers an electronic circuit board along a guide rail.
- Japanese Patent No. 5084661 discloses a substrate provided with a pair of guide rails facing each other in the substrate width direction orthogonal to the transport direction, and a pair of conveyors provided on the pair of guide rails and transporting the substrate in the transport direction.
- a transport apparatus is disclosed.
- the pair of guide rails includes a fixed rail and a movable rail, and the movable rail is configured to be moved to the fixed rail side by an air cylinder.
- the substrate transfer apparatus disclosed in the above-mentioned Japanese Patent No. 5084661 corrects the tilt in the horizontal plane of the substrate and the positional deviation in the substrate width direction by sandwiching the substrate between the movable rail and the fixed rail. It is configured as follows.
- this substrate transport apparatus is provided with a plurality of air cylinders and a plurality of displacement sensors to enable the movable rail to press the side end surface of the substrate evenly (sandwich the substrate in parallel).
- the air pressure of each of the plurality of air cylinders is precisely adjusted based on the detection result of the displacement sensor.
- the present invention has been made to solve the above-described problems, and one object of the present invention is to provide a substrate that can easily correct the inclination of the substrate without complicating the apparatus configuration. It is to provide a transport device.
- a substrate transport apparatus in parallel to each other with a conveyer section that transports a substrate in the transport direction and a substrate width direction orthogonal to the transport direction.
- the board is conveyed by the conveyor unit with the rail interval set to a first interval larger than the width of the substrate, and the inclination of the substrate is corrected by setting the rail interval to a second interval smaller than the first interval based on the detected value of the motor.
- a control unit configured to perform control to move the first guide rail relative to the second guide rail.
- the rail interval between the first guide rail and the second guide rail is set to the first interval larger than the width of the substrate, and the substrate is transferred by the conveyor unit. And controlling the relative movement of the first guide rail with respect to the second guide rail so as to correct the inclination of the board by setting the rail interval to a second interval smaller than the first interval based on the detected value of the motor.
- the rail interval is set based on the detection value of the motor while the rail interval is set to the first transfer interval corresponding to the width of the substrate to be transferred.
- the tilt adjustment of the substrate can be carried out by controlling to adjust to the second interval.
- a motor (rail interval adjustment motor) and mechanism for adjusting the rail interval in accordance with the substrate width to be conveyed and a motor and mechanism for correcting the inclination of the substrate can be shared.
- the apparatus configuration is not complicated.
- the rail interval is controlled based on the detected value of the motor, unlike the configuration using the rail moving means in which precise position control such as air pressure is difficult, the board inclination is easily corrected. be able to.
- the motor is preferably a servo motor including an encoder
- the control unit is configured to determine a difference between the width dimension of the substrate and the first interval based on an output value of the encoder of the servo motor.
- the first guide rail is relatively moved so as to approach the second guide rail by an amount, so that the rail interval is set to the second interval. If comprised in this way, based on the position detection value (encoder output value) of a servomotor, the inclination of a board
- the control unit preferably moves the first guide rail relative to the second guide rail so that the motor current value is equal to or greater than the first threshold value.
- the rail interval is set to the second interval.
- the control unit preferably moves the first guide rail relative to the second guide rail so that the current value of the motor is changed between the first guide rail and the second guide rail.
- the substrate is controlled to be fixed by maintaining it in the vicinity of the second threshold for pressing the substrate with a predetermined pressure. If comprised in this way, by not only pinching a board
- the substrate can be easily fixed. As a result, when various operations (component mounting, appearance inspection, etc.) on the circuit board manufacturing process are performed on the substrate transport device, the fixing mechanism for fixing the substrate is not provided, and the substrate in operation Misalignment can be prevented.
- At least one of the first guide rail and the second guide rail has a rail interval in a predetermined work area in the transfer direction that is smaller than a rail interval outside the work area. And a projecting portion projecting inward in the substrate width direction in the work area. If comprised in this way, the rail space
- the rail interval in the carry-in region from the substrate carry-in position to the work region and the carry-out region from the work region to the substrate carry-out position is larger than the rail interval in the work region having the protrusions.
- the first guide rail preferably includes a predetermined work area in the transfer direction, and has a work rail portion provided separately from a portion other than the work area, and a motor.
- a work rail portion provided separately from a portion other than the work area, and a motor.
- the rail interval in the area other than the work area can be made larger than the second distance in a state where the inclination of the substrate is corrected by setting the rail distance in the work area to the second distance.
- the first guide rail further includes a carry-in rail portion including a carry-in region from the substrate carry-in position to the work region, and a carry-out rail portion including a carry-out region from the work region to the substrate carry-out position.
- the motor is provided in each of the work rail portion, the carry-in rail portion, and the carry-out rail portion, and moves the work rail portion, the carry-in rail portion, and the carry-out rail portion individually in the board width direction. It is configured. According to this configuration, it is possible to carry in and wait for a subsequent substrate until just before the work area while correcting the tilt of the substrate in the work area, and to correct the previous board while correcting the tilt of the substrate in the work area. Can be carried out.
- a substrate transport apparatus 100 As shown in FIG. 1, a substrate transport apparatus 100 according to the present embodiment is provided as a part of a substrate manufacturing line, and transports a printed circuit board (hereinafter referred to as “substrate”) CB being manufactured in a substrate manufacturing process. It is.
- substrate printed circuit board
- solder paste is printed (applied) in a predetermined pattern on a substrate CB on which a wiring pattern is formed by a solder printing apparatus (not shown) (solder printing step).
- electronic components are mounted (mounted) on the substrate CB after solder printing by a surface mounter (not shown) (mounting process).
- the mounted substrate CB is transported to a reflow furnace (not shown), and solder is melted and cured (cooled) (reflow process), whereby the terminal portion of the electronic component is connected to the wiring of the substrate CB. Soldered.
- the electronic component is fixed on the substrate CB in a state of being electrically connected to the wiring, and the substrate manufacturing is completed.
- the substrate CB may be inspected by a substrate inspection apparatus (not shown). For example, the inspection of the printed state of the solder on the substrate after the solder printing process, the inspection of the mounting state of the electronic component after the mounting process, the inspection of the mounting state of the electronic component after the reflow process, and the like.
- the substrate transfer device 100 is incorporated as a substrate transfer unit such as a solder printing device, a surface mounter, and a substrate inspection device in charge of each of the above steps, and carries in / out the substrate CB in each device, as well as work in each step ( It has a function of positioning and holding (fixing) the substrate CB in a predetermined work area when performing solder printing, component mounting, and inspection). That is, in these apparatuses, the substrate transport apparatus 100 sequentially transports the substrates CB supplied to the substrate production line in units of a series of operations including substrate carry-in, substrate holding (work execution by each device), and substrate unload. Fulfills the function.
- a substrate transfer unit such as a solder printing device, a surface mounter, and a substrate inspection device in charge of each of the above steps, and carries in / out the substrate CB in each device, as well as work in each step ( It has a function of positioning and holding (fixing) the substrate CB in a predetermined work area when performing solder
- the substrate transport apparatus 100 includes a conveyor unit 1 that transports a substrate CB in the transport direction X, a pair of guide rails (movable rail 2 and fixed rail 3) that guide the substrate transport, and a transport direction X.
- the motor 4 and the drive mechanism 5 that move the movable rail 2 in the substrate width direction Y orthogonal to the motor 4 and the control unit 6 that controls each part including the motor 4 are mainly provided.
- the substrate transport apparatus 100 includes a stopper mechanism 7 that stops the substrate CB in the work area A and a clamp mechanism 8 that fixes the substrate CB disposed in the work area A.
- the movable rail 2 and the fixed rail 3 are examples of the “first guide rail” and the “second guide rail” in the present invention, respectively.
- the conveyor unit 1 is composed of, for example, a motor (not shown) driven belt conveyor, and a pair of conveyor units 1 are provided so as to carry (support) both ends in the Y direction of the substrate CB in the carrying direction X.
- the pair of conveyor units 1 are provided on the movable rail 2 and the fixed rail 3, respectively.
- the conveyor unit 1 receives and carries in the substrate CB from a device on the upstream side of the substrate production line at the carry-in position at the upstream end (end in the X1 direction). And the conveyor part 1 carries out the board
- the movable rail 2 and the fixed rail 3 constituting the pair of guide rails are provided in parallel to each other with an interval in the substrate width direction Y orthogonal to the transport direction X. Both the movable rail 2 and the fixed rail 3 are formed to extend linearly along the transport direction X. As shown in FIG. 2, the movable rail 2 and the fixed rail 3 include not only a guide portion for guiding the substrate CB but also leg portions provided so as to stand upright with respect to the installation surface. The movable rail 2 and the fixed rail 3 are provided with the pair of conveyor sections 1 described above.
- the movable rail 2 is arranged on one side (Y1 direction side) of the substrate transport apparatus 100 and is configured to be movable in the substrate width direction Y (Y direction).
- the movable rail 2 is installed on a linear motion mechanism (on the slider 22) configured by a slide rail 21 and a slider 22 extending in the Y direction provided on the installation surface.
- the fixed rail 3 is disposed on the other side (Y2 direction side) of the substrate transport apparatus 100, and is fixedly installed on the installation surface.
- Each of the movable rail 2 and the fixed rail 3 is provided with a clamp mechanism 8.
- the clamp mechanism 8 includes an elevating unit 81 provided so as to extend along the conveyance direction, and a mechanism provided so as to protrude inward in the Y direction on the upper surface of the guide rail (the movable rail 2 and the fixed rail 3). And a stop portion 82.
- the raising / lowering part 81 is comprised so that raising / lowering is possible by an air cylinder (not shown) etc., and it is comprised so that the clamp operation which pushes up the both ends of the Y direction of the board
- the substrate CB pushed up by the elevating / lowering part 81 is clamped (fixed) so that the upper surface abuts on the engaging part 82 and is sandwiched between the elevating / lowering part 81 and the engaging part 82 in the vertical direction (Z direction). .
- the fixed rail 3 is provided with a stopper mechanism 7.
- the stopper mechanism 7 is configured to be moved up and down by an air cylinder (not shown) or the like.
- the stopper mechanism 7 is not in contact with the substrate CB conveyed on the conveyor unit 1 in the lowered position, and is a substrate conveyed on the conveyor unit 1 in the raised position. It is comprised so that CB may be contacted. Accordingly, when the stopper mechanism 7 is raised, the substrate CB comes into contact with the stopper mechanism 7 at the position on the fixed rail 3 side (Y2 direction side) of the end surface on the X2 direction side, and the position in the transport direction of the substrate CB is the work area A. Positioned within. In the first embodiment, the stopper mechanism 7 is not provided on the movable rail 2 but is provided only on the fixed rail 3.
- the motor 4 has a function of translating the movable rail 2 relative to the fixed rail 3 in the substrate width direction Y.
- the motor 4 is a servo motor having an encoder 41, and is configured such that position control based on the output value of the encoder 41 is performed by the control unit 6.
- the drive mechanism 5 includes a belt-pulley mechanism having a belt 51 and a pulley 52.
- the output shaft of the motor 4 is connected to a pair of ball screw shafts 53 via a belt 51 spanned between pulleys 52.
- the pair of ball screw shafts 53 are provided so as to extend in parallel to each other along the Y direction, and are screwed with a ball nut (not shown) fixed to the movable rail 2.
- the fixed rail 3 is formed so as to allow the ball screw shaft 53 to escape.
- the motor 4 rotationally drives the pair of ball screw shafts 53 via the drive mechanism 5 so that the movable rail 2 screwed with the ball screw shaft 53 is translated (linearly moved) in the Y direction. It is configured.
- the control unit 6 is a motor controller unit that performs drive control of the motor, performs drive control of the drive motor (conveyor shaft) of the conveyor unit 1, and drives the movable rail 2, the motor 4 (rail interval adjustment shaft).
- the control unit 6 controls the movable rail 2 to move in the Y direction so that the rail interval (interval in the Y direction) corresponds to the width dimension W (Y direction dimension) of the various substrates CB to be loaded.
- the movable rail 2 is configured to perform control for correcting the inclination in the horizontal plane (XY plane) of the substrate CB transferred to the work area A by the movement of the movable rail 2 in the Y direction. Therefore, the substrate transport apparatus 100 is configured to perform both the rail interval adjustment according to the width dimension W of the substrate CB and the inclination correction of the substrate CB by the common motor 4.
- the controller 6 sets the rail interval between the movable rail 2 and the fixed rail 3 to a first interval D1 larger than the width of the substrate CB, and conveys the substrate by the conveyor unit 1. It is comprised so that the movable rail 2 may be moved so that.
- the controller 6 moves the movable rail 2 so that the rail interval becomes the first interval D1 corresponding to the width dimension W to be transferred during substrate transfer.
- the size of the predetermined amount C is exaggerated for convenience.
- the stopper mechanism 7 since the stopper mechanism 7 is provided only on the fixed rail 3 side, when the substrate CB comes into contact with the stopper mechanism 7, the substrate CB rotates in the horizontal plane around the stopper mechanism 7. Tilt (see the two-dot chain line in FIG. 1). Since the rail interval is the first interval D1 when the substrate is transported and there is a margin in the Y direction, the substrate CB is inclined with respect to the state where it contacts the movable rail 2 and the fixed rail 3 in the state of the first interval D1, respectively. Will be able to.
- the control unit 6 sets the inclination of the substrate CB by setting the rail interval to the second interval D2 smaller than the first interval D1, based on the detected value of the motor 4. Control is made to move the movable rail 2 relative to the fixed rail 3 so as to correct. More specifically, in the first embodiment, the control unit 6 determines the difference amount (that is, the predetermined amount C) between the width dimension W of the substrate CB and the first interval D1 based on the output value of the encoder 41 of the motor 4. Only the movable rail 2 is moved closer to the fixed rail 3 so that the rail interval is set to the second interval D2.
- the substrate CB is placed between the movable rail 2 and the fixed rail 3 so that the substrate CB is substantially parallel to the rail.
- the inclination is corrected.
- step S2 the control unit 6 transports the substrate CB to the work area A and stops it. That is, the substrate CB is transported until it comes into contact with the stopper mechanism 7 in the raised position. Accordingly, the position in the transport direction of the substrate CB is positioned at a predetermined position in the work area A. Further, the substrate CB is rotated and tilted about the stopper mechanism 7 by the contact with the stopper mechanism 7 (see the two-dot chain line in FIG. 1).
- step S3 the controller 6 controls the movable rail 2 in the Y2 direction by a difference amount between the width dimension W of the substrate CB and the first interval D1 (ie, a predetermined amount C) by position control based on the output value of the encoder 41.
- the movable rail 2 is stopped in step S4 after being moved by a predetermined amount C.
- the rail interval becomes the second interval D2 substantially equal to the width dimension W of the substrate CB, and the inclination of the substrate CB is corrected.
- step S6 of FIG. 4 the clamp mechanism 8 is operated, and the substrate CB is fixed at a predetermined position in the work area A.
- the control unit 6 determines whether to start unloading. For example, when the substrate transport apparatus 100 is incorporated in a surface mounter or a substrate inspection apparatus, a control signal instructing the start of unloading is output to the control unit 6 after a predetermined operation (component mounting or inspection) is completed. Is done.
- the control unit 6 waits for a control signal to be input in step S6. When the control signal is received, the control unit 6 determines that unloading is started, and proceeds to the processes in and after step S7.
- step S7 fixing (clamping) by the clamp mechanism 8 is released.
- step S8 the substrate CB is unloaded from the unloading position at the downstream end in the conveying direction by the conveyor unit 1. As described above, a series of loading / unloading processing of the substrate transfer apparatus 100 is performed.
- the rail interval between the movable rail 2 and the fixed rail 3 is set to the first interval D1 larger than the width of the substrate CB, and the substrate CB is conveyed by the conveyor unit, and the motor 4 Based on the detected value, control is performed to move the movable rail 2 relative to the fixed rail 3 so as to correct the inclination of the substrate CB by setting the rail interval to the second interval D2 smaller than the first interval D1.
- the control unit 6 configured as described above, when the substrate is transported, while controlling the motor 4 so that the rail interval corresponds to the width dimension W of the substrate CB to be transported, the motor 4 is controlled.
- the servo motor including the encoder 41 constitutes the motor 4, and based on the output value of the encoder 41 of the motor 4, the width dimension W of the substrate CB and the first interval D1
- the control unit 6 is configured to set the rail interval to the second interval D2 by moving the movable rail 2 closer to the fixed rail 3 by the difference amount (predetermined amount C).
- the rail interval is easily adjusted to the width dimension W (second interval D2) of the substrate CB to correct the inclination of the substrate CB. It can be carried out.
- a substrate transport apparatus 200 according to a second embodiment of the present invention will be described with reference to FIGS. 1 to 3, FIG. 5, and FIG.
- the second embodiment unlike the first embodiment configured to change the rail interval to the second interval D2 by moving the movable rail 2 by a predetermined amount C based on the output value of the encoder 41, An example of a substrate transfer apparatus that performs control to change the rail interval to the second interval D2 based on the current value of the motor will be described.
- the apparatus configuration is the same as that of the first embodiment, the same reference numerals are used and the description thereof is omitted.
- the control unit 106 (see FIG. 1) of the substrate transport apparatus 200 monitors the current value when the motor 4 is driven, and based on the current value as the detected value of the motor 4, It is configured to control inclination correction. Specifically, the control unit 106 moves the movable rail 2 so as to approach the fixed rail 3 when performing tilt correction, and the movable rail is based on whether the current value of the motor 4 is equal to or greater than the first threshold Th1. By stopping the relative movement of 2, the rail interval is set to the second interval D2.
- the first threshold value Th1 of the current value is when the movable rail 2 is further moved to the fixed rail 3 side in a state where the substrate CB is sandwiched (contacted) between the movable rail 2 and the fixed rail 3. It is set as a value immediately after the start of rising of the generated current value.
- the first threshold Th1 will be described using the graph of FIG.
- the control unit 106 drives the motor 4 so that the movable rail 2 moves in the Y2 direction at a predetermined constant speed, for example. Since the load on the motor 4 when moving in the substrate width direction Y is substantially constant, the current value becomes substantially constant after reaching a predetermined speed. Thereafter, when the rail interval coincides with the substrate width W due to the movement of the movable rail 2, the substrate CB is sandwiched between the movable rail 2 and the fixed rail 3, so that the inclination of the substrate CB is completely corrected between the rails. At the same time, the movement of the movable rail 2 in the Y2 direction is hindered by the substrate CB (the load on the motor 4 increases).
- the current value of the motor 4 increases in order to generate a larger driving torque.
- the dotted line portion after the first threshold Th1 shows the change in the motor current value when the drive of the motor 4 is continued even after the current value reaches the first threshold Th1 as a reference. Yes.
- the substrate CB is sandwiched between the movable rail 2 and the fixed rail 3 based on the rise of the current value of the motor 4 after the substrate CB is sandwiched between the movable rail 2 and the fixed rail 3. It is possible to detect (the substrate tilt has been corrected).
- the first threshold value Th1 can be determined based on a test result or the like in which this control is actually performed, and is set as a current value that can surely correct the inclination of the substrate. Then, when the current value of the motor 4 becomes equal to or greater than the first threshold Th1, the control unit 106 determines that the rail interval has become the second interval D2, and moves the movable rail 2 (driving the motor 4). Is configured to stop.
- FIG. 6 a series of loading / unloading processes including an inclination correction operation of the substrate transfer apparatus 200 according to the second embodiment of the present invention will be described.
- FIG. 6 the description of the same processing as that of the first embodiment shown in FIG. 4 is omitted.
- step S12 the control unit 106 monitors the current value of the motor 4 and determines whether or not the current value is equal to or greater than the first threshold value Th1.
- the control unit 106 continues to move the movable rail 2 until the current value reaches the first threshold value Th1.
- the first threshold Th1 is reached.
- the control unit 106 determines that the rail interval has reached the second interval D2, and stops the movable rail 2 in step S13. Thereby, the inclination correction of the substrate CB is completed.
- the subsequent steps S5 to S8 are the same as those in the first embodiment.
- the control unit 106 is configured to set the rail interval to the second interval D2. This ensures that the substrate CB is sandwiched between the movable rail 2 and the fixed rail 3 (the inclination of the substrate CB is corrected) based on the motor current value reaching the first threshold value Th1. Can be detected. As a result, for example, even when the dimensions of the individual substrates CB vary due to manufacturing errors, the substrate CB can be reliably sandwiched between the rails to correct the inclination.
- the second configuration is such that the rail interval is set to the second interval D2 by stopping the movement of the movable rail 2 based on whether the current value of the motor 4 is equal to or greater than the first threshold Th1.
- the first threshold Th1 an example of a substrate transfer apparatus that performs control for fixing (clamping) the substrate CB with the movable rail 2 and the fixed rail 3 after the rail interval is set to the second interval D2.
- the same components as those in the first embodiment are denoted by the same reference numerals and description thereof is omitted.
- the substrate transport apparatus 300 according to the third embodiment is different from the substrate transport apparatus 100 (200) of the first (second) embodiment in the clamp mechanism 8 (see FIGS. 1 and 2). ) Is not provided.
- the substrate transport apparatus 300 according to the third embodiment is configured to fix (clamp) the substrate CB by the movable rail 2 and the fixed rail 3 instead of the clamp mechanism 8.
- control unit 206 performs control to fix the substrate CB by maintaining the current value of the motor 4 in the vicinity of the predetermined second threshold Th2 with the rail interval set to the second interval D2. It is configured. That is, the control unit 206 continues driving the movable rail 2 by the motor 4 even after the substrate CB is sandwiched between the rails with the second interval D2 between the rails, and the movable rail 2 moves the substrate CB to the fixed rail 3 side ( Y2 direction) is pressed.
- the substrate CB is fixed (clamped) in the work area A by being sandwiched between the movable rail 2 and the fixed rail 3 and pressed in the horizontal direction (Y direction). Therefore, in the third embodiment, clamping is performed by a method (edge clamp) in which the end surface of the substrate CB is sandwiched and clamped in the Y direction.
- the second threshold value Th2 is set as a predetermined value that allows the movable rail 2 and the fixed rail 3 to press the substrate CB with a predetermined pressure.
- the first threshold Th1 when the current value reaches the first threshold Th1 (when the rail interval becomes the second interval D2), if the movable rail 2 is further moved to the Y2 direction side, the motor 4 As the current value increases (increases in driving torque), the pressing force applied to the substrate CB via the movable rail 2 increases. Therefore, the pressing force can be continuously applied to the substrate CB by maintaining the current value of the motor 4 in the vicinity of the second threshold Th2 (the movable rail 2 is continuously driven in the Y2 direction). It is possible to fix (clamp) the substrate CB by
- step S22 the control unit 206 monitors the current value of the motor 4 and determines whether or not the current value has reached the second threshold Th2.
- the control unit 206 continues to move the movable rail 2 until the current value reaches the second threshold Th2. Therefore, after the substrate CB is sandwiched between the movable rail 2 and the fixed rail 3 (the rail interval becomes the second interval D2), the inclination of the substrate CB is corrected, and then a pressing force capable of fixing the substrate CB is applied.
- the current value of the motor 4 increases to the second threshold Th2 applied to the substrate CB, the process proceeds to step S23.
- a substrate transfer apparatus 400 according to a fourth embodiment of the present invention will be described with reference to FIG.
- the movable rail 2 is driven on the basis of the current value of the motor, so that the control for fixing (clamping) the substrate CB by the movable rail 2 and the fixed rail 3 is performed.
- an example of a substrate transfer apparatus that performs control for fixing (clamping) the substrate CB based on the detection value of the pressure detection unit will be described. Note that in the fourth embodiment, identical symbols are used for configurations similar to those in the third embodiment and descriptions thereof are omitted.
- a substrate transfer apparatus 500 according to a fifth embodiment of the present invention is described with reference to FIGS.
- the fifth embodiment unlike the first embodiment in which linear guide rails (the movable rail 2 and the fixed rail 3) are provided, an example in which a protruding portion that protrudes inward in the substrate width direction Y is provided in the guide rail. Will be described. Note that in the fifth embodiment, identical symbols are used for configurations similar to those in the first embodiment and description thereof is omitted.
- the protrusion 410 of the movable rail 402 and the fixed rail 403 is formed such that the inner surface of the protrusion 410 protrudes by a predetermined amount with respect to the inner surface 421 (431) other than the protrusion 410.
- the protruding amount of the protruding portion 410 is equal to a predetermined amount C added to the width dimension W of the substrate CB to be conveyed when the rail width is set to the first interval D1. That is, in the case of the fifth embodiment, the protruding amount of the protruding portion 410 is set so that the total protruding amount of the pair of protruding portions 410 is equal to the predetermined amount C. For this reason, as shown in FIG.
- the motor is provided in each of the work rail portion 521 and a portion other than the work rail portion, and is configured to individually move the work rail portion 521 and a portion other than the work rail portion in the board width direction Y.
- the motor 541, the motor 542, and the motor 543 are provided corresponding to the work rail portion 521, the carry-in rail portion 522, and the carry-out rail portion 523 of the movable rail 502, respectively.
- the work rail portion 521, the carry-in rail portion 522, and the carry-out rail portion 523 are configured to be individually moved in the substrate width direction Y.
- These motors 541 to 543 are individually controlled by the control unit 506.
- the substrate transport apparatus 600 is configured to be able to independently change the rail interval in each of the work area A, the carry-in area En, and the carry-out area Ex.
- the carry-in area En is performed in parallel with these.
- the carry-out area Ex it is possible to carry in and out the substrate with the rail interval set to the first interval D1.
- the next substrate CB following the substrate CB placed at the work position may be transported to a standby position in the carry-in area En and kept on standby. Is possible.
- the imaging head unit 603 includes an imaging unit 631 and an illumination unit (not shown).
- the imaging head unit 603 is configured to perform imaging for appearance inspection of the substrate CB and electronic components on the substrate CB. Accordingly, when the substrate transport unit 601 fixes (clamps) the substrate CB at a predetermined work position in the work area A, the image pickup operation of the substrate CB by the image pickup head unit 603 is performed as work on the substrate CB.
- the example of the substrate transport apparatus including the movable rail and the fixed rail is shown, but the present invention is not limited to this.
- a movable rail may be provided instead of the fixed rail.
- both movable rails may be moved simultaneously, or only one movable rail may be moved.
- it is sufficient that at least one guide rail is a movable rail.
- the movable rail may be divided into two parts in a work area and an area other than the work area.
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Supply And Installment Of Electrical Components (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Structure Of Belt Conveyors (AREA)
- Framework For Endless Conveyors (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
Abstract
Description
まず、図1~図3を参照して、本発明の第1実施形態による基板搬送装置100の構造について説明する。
次に、図1~3、図5および図6を参照して、本発明の第2実施形態による基板搬送装置200について説明する。第2実施形態では、エンコーダ41の出力値に基づいて所定量Cだけ可動レール2を移動させることにより、レール間隔を第2間隔D2に変更するように構成した上記第1実施形態とは異なり、モータの電流値に基づいてレール間隔を第2間隔D2に変更する制御を行う基板搬送装置の例について説明する。なお、第2実施形態において、装置構成は上記第1実施形態と同様であるので、同一の符号を用いるとともに説明を省略する。
次に、図7~図9を参照して、本発明の第3実施形態による基板搬送装置300について説明する。第3実施形態では、モータ4の電流値が第1閾値Th1以上か否かに基づいて可動レール2の移動を停止させることにより、レール間隔を第2間隔D2にするように構成した上記第2実施形態とは異なり、レール間隔を第2間隔D2にした後、さらに可動レール2と固定レール3とによって基板CBの固定(クランプ)を行う制御を行う基板搬送装置の例について説明する。なお、第3実施形態において、上記第1実施形態と同様の構成については、同一の符号を用いるとともに説明を省略する。
次に、図10を参照して、本発明の第4実施形態による基板搬送装置400について説明する。第4実施形態では、モータの電流値に基づき可動レール2を駆動することによって、可動レール2と固定レール3とによる基板CBの固定(クランプ)を行う制御を行うように構成した上記第3実施形態に加えて、さらに圧力検出部の検出値にも基づいて基板CBの固定(クランプ)を行う制御を行う基板搬送装置の例について説明する。なお、第4実施形態において、上記第3実施形態と同様の構成については、同一の符号を用いるとともに説明を省略する。
次に、図11~図13を参照して、本発明の第5実施形態による基板搬送装置500について説明する。第5実施形態では、直線状のガイドレール(可動レール2および固定レール3)を設けた上記第1実施形態とは異なり、基板幅方向Yの内側に突出する突出部をガイドレールに設けた例について説明する。なお、第5実施形態において、上記第1実施形態と同様の構成については、同一の符号を用いるとともに説明を省略する。
次に、図14を参照して、本発明の第6実施形態による基板搬送装置600について説明する。第6実施形態では、ガイドレール(可動レール402および固定レール403)に突出部410を設けることにより傾き矯正および基板固定中にも基板の搬入出を行えるように構成した上記第5実施形態とは異なり、可動レールおよび固定レールを分割することにより、傾き矯正および基板固定中の基板搬入出を可能にした例について説明する。なお、第6実施形態において、上記第1実施形態と同様の構成については、同一の符号を用いるとともに説明を省略する。
次に、図15を参照して、本発明の第7実施形態による外観検査装置700について説明する。第7実施形態では、基板搬送装置の適用例として、基板CBの検査を行う基板検査装置の一種である外観検査装置700の基板搬送部として、上記第1実施形態による基板搬送装置100を設けた例について説明する。なお、第7実施形態において、上記第1実施形態と同様の構成については、同一の符号を用いるとともに説明を省略する。
2、402、502 可動レール(第1ガイドレール)
3、403、503 固定レール(第2ガイドレール)
4、541、542、543 モータ
6、106、206、306、406、506 制御部
41 エンコーダ
100、200、300、400、500、600 基板搬送装置
310 圧力検出部
410 突出部
521 作業レール部
522 搬入レール部
523 搬出レール部
A 作業領域
CB 基板
D1 第1間隔
D2 第2間隔
En 搬入領域
Ex 搬出領域
Claims (10)
- 基板(CB)を搬送方向に搬送するコンベア部(1)と、
前記搬送方向と直交する基板幅方向に間隔を隔てて互いに平行に設けられた第1ガイドレール(2)および第2ガイドレール(3)と、
前記基板幅方向に、前記第1ガイドレールを前記第2ガイドレールに対して相対的に平行移動させるモータ(4)と、
前記第1ガイドレールと前記第2ガイドレールとの間のレール間隔を前記基板の幅よりも大きい第1間隔(D1)にして前記コンベア部により基板搬送を行うとともに、前記モータの検出値に基づいて、前記レール間隔を前記第1間隔よりも小さい第2間隔(D2)にして前記基板の傾きを矯正するように、前記第1ガイドレールを前記第2ガイドレールに対して相対移動させる制御を行うように構成された制御部(6)とを備える、基板搬送装置。 - 前記モータは、エンコーダ(41)を含むサーボモータであり、
前記制御部は、前記サーボモータの前記エンコーダの出力値に基づいて、前記基板の幅寸法と前記第1間隔との差分量だけ前記第1ガイドレールを前記第2ガイドレールに近づけるように相対移動させることにより、前記レール間隔を前記第2間隔にするように構成されている、請求項1に記載の基板搬送装置。 - 前記制御部は、前記第1ガイドレールを前記第2ガイドレールに近づけるように相対移動させ、前記モータの電流値が第1閾値(Th1)以上か否かに基づいて前記第1ガイドレールの相対移動を停止させることにより、前記レール間隔を前記第2間隔にするように構成されている、請求項1に記載の基板搬送装置。
- 前記制御部は、前記第1ガイドレールを前記第2ガイドレールに近づけるように相対移動させ、前記モータの電流値を、前記第1ガイドレールと前記第2ガイドレールとにより前記基板を所定圧力で押圧するための第2閾値(Th2)近傍に維持することにより、前記基板を固定する制御を行うように構成されている、請求項1に記載の基板搬送装置。
- 前記第1ガイドレールおよび前記第2ガイドレールの少なくとも一方に設けられ、前記基板との接触圧力を検出する圧力検出部(310)をさらに備え、
前記制御部は、前記第1ガイドレールを前記第2ガイドレールに近づけるように相対移動させ、前記モータの検出値および前記圧力検出部の検出値に基づいて、前記第1ガイドレールと前記第2ガイドレールとにより前記基板を所定圧力で押圧して固定する制御を行うように構成されている、請求項1に記載の基板搬送装置。 - 前記第1ガイドレールおよび前記第2ガイドレールの少なくとも一方は、前記搬送方向の所定の作業領域(A)における前記レール間隔が前記作業領域以外における前記レール間隔よりも小さくなるように、前記作業領域において前記基板幅方向内側に突出する突出部(410)を有する、請求項1に記載の基板搬送装置。
- 前記基板の搬入位置から前記作業領域までの搬入領域(En)と、前記作業領域から前記基板の搬出位置までの搬出領域(Ex)とにおけるレール間隔は、前記突出部を有する前記作業領域における前記レール間隔よりも大きい、請求項6に記載の基板搬送装置。
- 前記突出部は、前記突出部以外の部分との境界が滑らかに連続するように形成されている、請求項6に記載の基板搬送装置。
- 前記第1ガイドレールは、前記搬送方向の所定の作業領域を含むとともに、前記作業領域以外の部分とは別個に設けられた作業レール部(521)を有し、
前記モータは、前記作業レール部と前記作業レール部以外の部分とにそれぞれ設けられるとともに、前記作業レール部と前記作業レール部以外の部分とを前記基板幅方向に個別に移動させるように構成されている、請求項1に記載の基板搬送装置。 - 前記第1ガイドレールは、前記基板の搬入位置から前記作業領域までの搬入領域を含む搬入レール部(522)と、前記作業領域から前記基板の搬出位置までの搬出領域を含む搬出レール部(523)とをさらに有し、
前記モータ(541、542、543)は、前記作業レール部と、前記搬入レール部と、前記搬出レール部とにそれぞれ設けられるとともに、前記作業レール部と、前記搬入レール部と、前記搬出レール部とを前記基板幅方向に個別に移動させるように構成されている、請求項9に記載の基板搬送装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020187015297A KR101888383B1 (ko) | 2013-10-08 | 2013-10-08 | 기판 반송 장치 |
KR1020167000600A KR20160018783A (ko) | 2013-10-08 | 2013-10-08 | 기판 반송 장치 |
PCT/JP2013/077296 WO2015052763A1 (ja) | 2013-10-08 | 2013-10-08 | 基板搬送装置 |
JP2015541326A JP6126694B2 (ja) | 2013-10-08 | 2013-10-08 | 基板搬送装置 |
CN201380079410.3A CN105764820B (zh) | 2013-10-08 | 2013-10-08 | 基板搬运装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2013/077296 WO2015052763A1 (ja) | 2013-10-08 | 2013-10-08 | 基板搬送装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2015052763A1 true WO2015052763A1 (ja) | 2015-04-16 |
Family
ID=52812614
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2013/077296 WO2015052763A1 (ja) | 2013-10-08 | 2013-10-08 | 基板搬送装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP6126694B2 (ja) |
KR (2) | KR20160018783A (ja) |
CN (1) | CN105764820B (ja) |
WO (1) | WO2015052763A1 (ja) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016219528A (ja) * | 2015-05-18 | 2016-12-22 | 株式会社ディスコ | 加工装置 |
WO2017072858A1 (ja) * | 2015-10-27 | 2017-05-04 | 平田機工株式会社 | 移送ユニット、移載装置及び移載方法 |
JP2017157651A (ja) * | 2016-03-01 | 2017-09-07 | パナソニックIpマネジメント株式会社 | 部品実装用装置及び基板搬送方法 |
JP2017157652A (ja) * | 2016-03-01 | 2017-09-07 | パナソニックIpマネジメント株式会社 | 部品実装用装置及び基板搬送方法 |
CN107615897A (zh) * | 2015-05-25 | 2018-01-19 | 千住金属工业株式会社 | 锡焊装置以及焊剂涂敷装置 |
CN109250486A (zh) * | 2018-10-18 | 2019-01-22 | 李荣根 | 一种快速取放板装置及其取放设备和取放板方法 |
CN109702885A (zh) * | 2019-02-27 | 2019-05-03 | 鹰牌陶瓷实业(河源)有限公司 | 一种陶瓷大板的坯料矫正机构 |
CN114212472A (zh) * | 2021-12-23 | 2022-03-22 | 广州市德固制冷设备有限公司 | 一种冷库门生产线 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106249134B (zh) * | 2016-09-22 | 2019-10-25 | 英华达(上海)科技有限公司 | 电子产品测试生产线及其测试方法 |
KR102383305B1 (ko) * | 2018-05-25 | 2022-04-08 | 가부시키가이샤 후지 | 수납 장치 및 인쇄 시스템 |
CN113816098A (zh) * | 2021-08-25 | 2021-12-21 | 南京钢铁股份有限公司 | 一种实现钢板全自动转钢的方法 |
CN114348565A (zh) * | 2021-12-27 | 2022-04-15 | 北京京东乾石科技有限公司 | 一种轨道行走系统以及运输系统 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03211145A (ja) * | 1990-01-09 | 1991-09-13 | Mitsubishi Electric Corp | リードフレーム搬送方法および装置 |
JPH04368151A (ja) * | 1991-06-15 | 1992-12-21 | Fujitsu Ltd | ウエハの取り出し方法及びロボット |
JPH06252200A (ja) * | 1993-02-25 | 1994-09-09 | Kaijo Corp | 基板搬送装置及び基板搬送路調整方法 |
JP2008198755A (ja) * | 2007-02-13 | 2008-08-28 | Canon Inc | ステージ装置、露光装置及びデバイス製造方法 |
JP2013074106A (ja) * | 2011-09-28 | 2013-04-22 | Lintec Corp | シート貼付装置及び貼付方法、並びに、シート製造装置及び製造方法 |
JP2013145532A (ja) * | 2012-01-16 | 2013-07-25 | Yaskawa Electric Corp | 加工装置、ツール、加工方法および加工位置の設定方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5084661A (ja) | 1973-11-29 | 1975-07-08 | ||
JPH0680937B2 (ja) * | 1984-12-05 | 1994-10-12 | 松下電器産業株式会社 | 基板搬送装置 |
JP2614957B2 (ja) | 1991-09-26 | 1997-05-28 | 株式会社東京精密 | 自動抜取り検査方法及びその装置 |
JP4753313B2 (ja) * | 2006-12-27 | 2011-08-24 | 東京エレクトロン株式会社 | 基板処理装置 |
JP4785210B2 (ja) * | 2009-07-23 | 2011-10-05 | 東京エレクトロン株式会社 | 基板搬送装置 |
KR101510771B1 (ko) * | 2011-12-08 | 2015-04-10 | 최제학 | 기판 이송 가이드 장치 |
-
2013
- 2013-10-08 KR KR1020167000600A patent/KR20160018783A/ko active Search and Examination
- 2013-10-08 CN CN201380079410.3A patent/CN105764820B/zh active Active
- 2013-10-08 KR KR1020187015297A patent/KR101888383B1/ko active IP Right Grant
- 2013-10-08 WO PCT/JP2013/077296 patent/WO2015052763A1/ja active Application Filing
- 2013-10-08 JP JP2015541326A patent/JP6126694B2/ja active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03211145A (ja) * | 1990-01-09 | 1991-09-13 | Mitsubishi Electric Corp | リードフレーム搬送方法および装置 |
JPH04368151A (ja) * | 1991-06-15 | 1992-12-21 | Fujitsu Ltd | ウエハの取り出し方法及びロボット |
JPH06252200A (ja) * | 1993-02-25 | 1994-09-09 | Kaijo Corp | 基板搬送装置及び基板搬送路調整方法 |
JP2008198755A (ja) * | 2007-02-13 | 2008-08-28 | Canon Inc | ステージ装置、露光装置及びデバイス製造方法 |
JP2013074106A (ja) * | 2011-09-28 | 2013-04-22 | Lintec Corp | シート貼付装置及び貼付方法、並びに、シート製造装置及び製造方法 |
JP2013145532A (ja) * | 2012-01-16 | 2013-07-25 | Yaskawa Electric Corp | 加工装置、ツール、加工方法および加工位置の設定方法 |
Cited By (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016219528A (ja) * | 2015-05-18 | 2016-12-22 | 株式会社ディスコ | 加工装置 |
TWI672188B (zh) * | 2015-05-18 | 2019-09-21 | 日商迪思科股份有限公司 | 加工裝置 |
CN107615897A (zh) * | 2015-05-25 | 2018-01-19 | 千住金属工业株式会社 | 锡焊装置以及焊剂涂敷装置 |
US10293439B2 (en) | 2015-05-25 | 2019-05-21 | Senju Metal Industry Co., Ltd. | Soldering apparatus and flux-applying device |
KR102052667B1 (ko) * | 2015-10-27 | 2019-12-05 | 히라따기꼬오 가부시키가이샤 | 이송 유닛, 이동 탑재 장치 및 이동 탑재 방법 |
CN108137248A (zh) * | 2015-10-27 | 2018-06-08 | 平田机工株式会社 | 移送单元、移载装置及移载方法 |
KR20180067656A (ko) * | 2015-10-27 | 2018-06-20 | 히라따기꼬오 가부시키가이샤 | 이송 유닛, 이동 탑재 장치 및 이동 탑재 방법 |
JPWO2017072858A1 (ja) * | 2015-10-27 | 2018-09-27 | 平田機工株式会社 | 移送ユニット、移載装置及び移載方法 |
WO2017072858A1 (ja) * | 2015-10-27 | 2017-05-04 | 平田機工株式会社 | 移送ユニット、移載装置及び移載方法 |
US10919710B2 (en) | 2015-10-27 | 2021-02-16 | Hirata Corporation | Transport unit, transfer apparatus, and transfer method |
JP2017157652A (ja) * | 2016-03-01 | 2017-09-07 | パナソニックIpマネジメント株式会社 | 部品実装用装置及び基板搬送方法 |
JP2017157651A (ja) * | 2016-03-01 | 2017-09-07 | パナソニックIpマネジメント株式会社 | 部品実装用装置及び基板搬送方法 |
CN109250486A (zh) * | 2018-10-18 | 2019-01-22 | 李荣根 | 一种快速取放板装置及其取放设备和取放板方法 |
CN109250486B (zh) * | 2018-10-18 | 2024-03-26 | 李荣根 | 一种快速取放板装置及其取放设备和取放板方法 |
CN109702885A (zh) * | 2019-02-27 | 2019-05-03 | 鹰牌陶瓷实业(河源)有限公司 | 一种陶瓷大板的坯料矫正机构 |
CN114212472A (zh) * | 2021-12-23 | 2022-03-22 | 广州市德固制冷设备有限公司 | 一种冷库门生产线 |
Also Published As
Publication number | Publication date |
---|---|
KR20160018783A (ko) | 2016-02-17 |
CN105764820A (zh) | 2016-07-13 |
KR101888383B1 (ko) | 2018-08-14 |
JP6126694B2 (ja) | 2017-05-17 |
JPWO2015052763A1 (ja) | 2017-03-09 |
CN105764820B (zh) | 2019-01-22 |
KR20180063904A (ko) | 2018-06-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6126694B2 (ja) | 基板搬送装置 | |
JP5003350B2 (ja) | 電子部品実装装置および電子部品実装方法 | |
JP6151925B2 (ja) | 基板固定装置、基板作業装置および基板固定方法 | |
JP4957453B2 (ja) | 電子部品実装システムおよび電子部品実装方法 | |
US10660250B2 (en) | Mounting device and control method of mounting device | |
JP2011031588A (ja) | スクリーン印刷装置およびスクリーン印刷方法 | |
JP5358494B2 (ja) | 基板搬送装置、基板搬送方法および表面実装機 | |
JPWO2014136211A1 (ja) | 部品実装機 | |
JP2014078580A (ja) | 電子部品実装装置および電子部品実装装置における基板位置決め方法 | |
WO2015029209A1 (ja) | 部品実装装置、その制御方法および部品実装装置用プログラム | |
TW201409023A (zh) | 基板檢查裝置 | |
JP2010281984A (ja) | パネル基板搬送装置および表示パネルモジュール組立装置 | |
JP4922863B2 (ja) | 表面実装装置 | |
JP2009123984A (ja) | 処理機、および該処理機を管理する基板生産管理装置 | |
JP7220308B2 (ja) | 対基板作業機 | |
JP5616770B2 (ja) | 電子部品実装装置 | |
WO2013141388A1 (ja) | 電子部品の実装装置及び実装方法 | |
JP4833103B2 (ja) | 部品実装機 | |
JP4795263B2 (ja) | 部品実装機 | |
JP2017220633A (ja) | 基板クランプ装置及び基板処理装置 | |
JP5040808B2 (ja) | 電子部品実装用装置および電子部品実装用作業実行方法 | |
JP5536438B2 (ja) | スクリーン印刷装置 | |
JP5358479B2 (ja) | 部品実装基板搬送方法及び部品実装基板搬送システム | |
WO2022130444A1 (ja) | 部品実装機およびクランプ制御方法 | |
KR102336186B1 (ko) | 노광장치 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 13895278 Country of ref document: EP Kind code of ref document: A1 |
|
ENP | Entry into the national phase |
Ref document number: 2015541326 Country of ref document: JP Kind code of ref document: A |
|
ENP | Entry into the national phase |
Ref document number: 20167000600 Country of ref document: KR Kind code of ref document: A |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 13895278 Country of ref document: EP Kind code of ref document: A1 |