WO2015020332A1 - 전자기파의 직접 조사에 의한 도전성 패턴 형성 방법과, 도전성 패턴을 갖는 수지 구조체 - Google Patents
전자기파의 직접 조사에 의한 도전성 패턴 형성 방법과, 도전성 패턴을 갖는 수지 구조체 Download PDFInfo
- Publication number
- WO2015020332A1 WO2015020332A1 PCT/KR2014/006756 KR2014006756W WO2015020332A1 WO 2015020332 A1 WO2015020332 A1 WO 2015020332A1 KR 2014006756 W KR2014006756 W KR 2014006756W WO 2015020332 A1 WO2015020332 A1 WO 2015020332A1
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- WO
- WIPO (PCT)
- Prior art keywords
- region
- polymer resin
- resin substrate
- conductive pattern
- metal layer
- Prior art date
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- 238000000034 method Methods 0.000 title claims abstract description 82
- 229920005989 resin Polymers 0.000 title claims abstract description 50
- 239000011347 resin Substances 0.000 title claims abstract description 50
- 239000002952 polymeric resin Substances 0.000 claims abstract description 130
- 229920003002 synthetic resin Polymers 0.000 claims abstract description 130
- 229910052751 metal Inorganic materials 0.000 claims abstract description 103
- 239000002184 metal Substances 0.000 claims abstract description 103
- 230000003746 surface roughness Effects 0.000 claims abstract description 71
- 238000007747 plating Methods 0.000 claims abstract description 24
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- 239000004431 polycarbonate resin Substances 0.000 claims description 9
- 238000010561 standard procedure Methods 0.000 claims description 8
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 7
- 229910052802 copper Inorganic materials 0.000 claims description 7
- 238000007772 electroless plating Methods 0.000 claims description 7
- 239000007788 liquid Substances 0.000 claims description 7
- KDLHZDBZIXYQEI-UHFFFAOYSA-N palladium Substances [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 7
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 claims description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 6
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 6
- 239000011651 chromium Substances 0.000 claims description 6
- 239000002082 metal nanoparticle Substances 0.000 claims description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 6
- 229910052709 silver Inorganic materials 0.000 claims description 6
- 239000004332 silver Substances 0.000 claims description 6
- 239000002245 particle Substances 0.000 claims description 5
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 4
- 238000007664 blowing Methods 0.000 claims description 4
- 239000010931 gold Substances 0.000 claims description 4
- 150000002500 ions Chemical class 0.000 claims description 4
- 239000011777 magnesium Substances 0.000 claims description 4
- 239000011572 manganese Substances 0.000 claims description 4
- 239000010936 titanium Substances 0.000 claims description 4
- 230000001680 brushing effect Effects 0.000 claims description 3
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- 229920005992 thermoplastic resin Polymers 0.000 claims description 3
- 229920001187 thermosetting polymer Polymers 0.000 claims description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims description 2
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 claims description 2
- 229920001283 Polyalkylene terephthalate Polymers 0.000 claims description 2
- 239000004954 Polyphthalamide Substances 0.000 claims description 2
- 239000004743 Polypropylene Substances 0.000 claims description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 2
- 229920000122 acrylonitrile butadiene styrene Polymers 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 229910052804 chromium Inorganic materials 0.000 claims description 2
- 238000004140 cleaning Methods 0.000 claims description 2
- 125000002485 formyl group Chemical class [H]C(*)=O 0.000 claims description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
- 239000012280 lithium aluminium hydride Substances 0.000 claims description 2
- 229910052749 magnesium Inorganic materials 0.000 claims description 2
- 229910052748 manganese Inorganic materials 0.000 claims description 2
- 229910052759 nickel Inorganic materials 0.000 claims description 2
- 229910052697 platinum Inorganic materials 0.000 claims description 2
- 229920006375 polyphtalamide Polymers 0.000 claims description 2
- 229920001155 polypropylene Polymers 0.000 claims description 2
- 239000012279 sodium borohydride Substances 0.000 claims description 2
- 229910000033 sodium borohydride Inorganic materials 0.000 claims description 2
- 238000004381 surface treatment Methods 0.000 claims description 2
- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 2
- 229910052721 tungsten Inorganic materials 0.000 claims description 2
- 239000010937 tungsten Substances 0.000 claims description 2
- 239000004020 conductor Substances 0.000 claims 1
- WQOXQRCZOLPYPM-UHFFFAOYSA-N dimethyl disulfide Chemical compound CSSC WQOXQRCZOLPYPM-UHFFFAOYSA-N 0.000 claims 1
- 230000005670 electromagnetic radiation Effects 0.000 claims 1
- ACVYVLVWPXVTIT-UHFFFAOYSA-M phosphinate Chemical compound [O-][PH2]=O ACVYVLVWPXVTIT-UHFFFAOYSA-M 0.000 claims 1
- 230000001376 precipitating effect Effects 0.000 claims 1
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- 230000003287 optical effect Effects 0.000 description 7
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- 229910052596 spinel Inorganic materials 0.000 description 6
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- 239000008139 complexing agent Substances 0.000 description 4
- 150000004696 coordination complex Chemical class 0.000 description 4
- 238000011156 evaluation Methods 0.000 description 4
- 229920000642 polymer Polymers 0.000 description 4
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 230000008859 change Effects 0.000 description 3
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 239000012963 UV stabilizer Substances 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 239000008367 deionised water Substances 0.000 description 2
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- 238000011161 development Methods 0.000 description 2
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- 230000000694 effects Effects 0.000 description 2
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- 230000001788 irregular Effects 0.000 description 2
- 150000002736 metal compounds Chemical class 0.000 description 2
- 239000002923 metal particle Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000000879 optical micrograph Methods 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- KWSLGOVYXMQPPX-UHFFFAOYSA-N 5-[3-(trifluoromethyl)phenyl]-2h-tetrazole Chemical compound FC(F)(F)C1=CC=CC(C2=NNN=N2)=C1 KWSLGOVYXMQPPX-UHFFFAOYSA-N 0.000 description 1
- KCXVZYZYPLLWCC-UHFFFAOYSA-N EDTA Chemical compound OC(=O)CN(CC(O)=O)CCN(CC(O)=O)CC(O)=O KCXVZYZYPLLWCC-UHFFFAOYSA-N 0.000 description 1
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 1
- 239000004609 Impact Modifier Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 229910000365 copper sulfate Inorganic materials 0.000 description 1
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 230000008570 general process Effects 0.000 description 1
- 150000004677 hydrates Chemical class 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 239000003002 pH adjusting agent Substances 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- OJMIONKXNSYLSR-UHFFFAOYSA-N phosphorous acid Chemical compound OP(O)O OJMIONKXNSYLSR-UHFFFAOYSA-N 0.000 description 1
- XNGIFLGASWRNHJ-UHFFFAOYSA-L phthalate(2-) Chemical compound [O-]C(=O)C1=CC=CC=C1C([O-])=O XNGIFLGASWRNHJ-UHFFFAOYSA-L 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 229920001748 polybutylene Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 239000001267 polyvinylpyrrolidone Substances 0.000 description 1
- 229920000036 polyvinylpyrrolidone Polymers 0.000 description 1
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- 229910001379 sodium hypophosphite Inorganic materials 0.000 description 1
- 238000000527 sonication Methods 0.000 description 1
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- 238000005507 spraying Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B5/00—Non-insulated conductors or conductive bodies characterised by their form
- H01B5/14—Non-insulated conductors or conductive bodies characterised by their form comprising conductive layers or films on insulating-supports
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D5/00—Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced; Filling pastes
- C09D5/24—Electrically-conducting paints
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
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- C23C18/1607—Process or apparatus coating on selected surface areas by direct patterning
- C23C18/1608—Process or apparatus coating on selected surface areas by direct patterning from pretreatment step, i.e. selective pre-treatment
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
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- C23C18/1601—Process or apparatus
- C23C18/1603—Process or apparatus coating on selected surface areas
- C23C18/1607—Process or apparatus coating on selected surface areas by direct patterning
- C23C18/1612—Process or apparatus coating on selected surface areas by direct patterning through irradiation means
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1635—Composition of the substrate
- C23C18/1639—Substrates other than metallic, e.g. inorganic or organic or non-conductive
- C23C18/1641—Organic substrates, e.g. resin, plastic
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
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- C23C18/1601—Process or apparatus
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/18—Pretreatment of the material to be coated
- C23C18/20—Pretreatment of the material to be coated of organic surfaces, e.g. resins
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- C23C18/2026—Pretreatment of the material to be coated of organic surfaces, e.g. resins by other methods than those of C23C18/22 - C23C18/30 by radiant energy
- C23C18/204—Radiation, e.g. UV, laser
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
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- C23C18/20—Pretreatment of the material to be coated of organic surfaces, e.g. resins
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- C23C18/2046—Pretreatment of the material to be coated of organic surfaces, e.g. resins by other methods than those of C23C18/22 - C23C18/30 by chemical pretreatment
- C23C18/2053—Pretreatment of the material to be coated of organic surfaces, e.g. resins by other methods than those of C23C18/22 - C23C18/30 by chemical pretreatment only one step pretreatment
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/18—Pretreatment of the material to be coated
- C23C18/20—Pretreatment of the material to be coated of organic surfaces, e.g. resins
- C23C18/2006—Pretreatment of the material to be coated of organic surfaces, e.g. resins by other methods than those of C23C18/22 - C23C18/30
- C23C18/2046—Pretreatment of the material to be coated of organic surfaces, e.g. resins by other methods than those of C23C18/22 - C23C18/30 by chemical pretreatment
- C23C18/2073—Multistep pretreatment
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/18—Pretreatment of the material to be coated
- C23C18/20—Pretreatment of the material to be coated of organic surfaces, e.g. resins
- C23C18/22—Roughening, e.g. by etching
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/18—Pretreatment of the material to be coated
- C23C18/20—Pretreatment of the material to be coated of organic surfaces, e.g. resins
- C23C18/28—Sensitising or activating
- C23C18/30—Activating or accelerating or sensitising with palladium or other noble metal
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/32—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/02—Electroplating of selected surface areas
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/54—Electroplating of non-metallic surfaces
- C25D5/56—Electroplating of non-metallic surfaces of plastics
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H01B1/20—Conductive material dispersed in non-conductive organic material
- H01B1/22—Conductive material dispersed in non-conductive organic material the conductive material comprising metals or alloys
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
- H01B13/012—Apparatus or processes specially adapted for manufacturing conductors or cables for manufacturing wire harnesses
- H01B13/01236—Apparatus or processes specially adapted for manufacturing conductors or cables for manufacturing wire harnesses the wires being disposed by machine
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
- H01B13/32—Filling or coating with impervious material
- H01B13/322—Filling or coating with impervious material the material being a liquid, jelly-like or viscous substance
- H01B13/327—Filling or coating with impervious material the material being a liquid, jelly-like or viscous substance using a filling or coating cone or die
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B5/00—Non-insulated conductors or conductive bodies characterised by their form
- H01B5/16—Non-insulated conductors or conductive bodies characterised by their form comprising conductive material in insulating or poorly conductive material, e.g. conductive rubber
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0296—Conductive pattern lay-out details not covered by sub groups H05K1/02 - H05K1/0295
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/09—Use of materials for the conductive, e.g. metallic pattern
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/09—Use of materials for the conductive, e.g. metallic pattern
- H05K1/092—Dispersed materials, e.g. conductive pastes or inks
- H05K1/097—Inks comprising nanoparticles and specially adapted for being sintered at low temperature
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/18—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
- H05K3/181—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/38—Coating with copper
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09009—Substrate related
Definitions
- Resin structure which has electroconductive pattern formation method by direct irradiation of electromagnetic wave and electroconductive pattern
- the present invention provides a method for forming a conductive pattern by direct irradiation of electromagnetic waves, which enables the formation of a fine conductive pattern in a simplified process on various polymer resin products or resin layers without including a special inorganic additive in the polymer resin itself. And a resin structure having a conductive pattern formed therefrom.
- the conductive patterns and structures on the surface of the polymer resin substrate may be applied to form various objects such as antennas, various sensors, MEMS structures, or RFID tags integrated in a mobile phone case.
- the polymer resin chip may be blended and molded with a special inorganic additive (for example, C U C r 2 O 4 having a spinel structure) containing a transition metalol such as copper or crème to form a polymer resin substrate,
- a special inorganic additive for example, C U C r 2 O 4 having a spinel structure
- a transition metalol such as copper or crème
- the present invention provides a method for forming a conductive pattern by direct irradiation of electromagnetic waves, which enables the formation of a fine conductive pattern in a simplified process on various polymer resin products or resin layers without including a special inorganic additive in the polymer resin itself. It is.
- the present invention also provides a resin structure having a conductive pattern obtained through the conductive pattern forming method.
- the present invention comprises the steps of selectively irradiating the polymer resin substrate with electromagnetic waves to form a first region having a predetermined surface roughness; Forming a conductive seed on the polymer resin substrate; Plating a polymer resin substrate on which a conductive seed is formed to form a metal layer; And removing the conductive seed and the metal layer from the second region of the polymer resin substrate having a surface roughness smaller than the first region.
- the first region of the polymer resin substrate is about It may have a surface roughness defined by a centerline surface roughness Ra of 500 nm or more, and the second region may have a centerline surface roughness Ra smaller than the first region.
- the surface roughness of the first and second regions may be defined by other methods.
- the first region of the polymer resin substrate may be formed by using a tape having an adhesive force of 4.0 to 6.0 N / 10 mm width.
- the peeling area of the metal layer may have a surface roughness defined by adhesion force of about 5% or less of the area of the metal layer to be tested, and the remaining second The area may have a surface roughness defined by the adhesive force such that when tested in the same manner, the peeling area of the metal layer is about 65% or more of the area of the metal object under test.
- the present invention also provides a polymer resin substrate in which a first region formed to have the predetermined surface roughness described above and a second region having a surface roughness smaller than the first region are defined; And it provides a resin structure having a conductive pattern comprising a conductive seed and a metal layer selectively formed in the first region of the polymer resin substrate.
- the surface of the region where the conductive pattern is to be formed by electromagnetic wave irradiation, such as a laser, is used.
- electromagnetic wave irradiation such as a laser
- the special inorganic additives may minimize the risk of deterioration of physical properties such as the mechanical properties of the polymer resin substrate or the product.
- the desired fine conductive pattern can be formed on the polymer resin substrate without the use of the special inorganic additive, it becomes easier to express the color of the polymer resin substrate or the product in the desired color by utilizing the color of the resin itself. .
- FIG. 1 is a schematic diagram schematically showing an example of a method of forming a conductive pattern.
- FIG. 2A is a photo (first photo) showing a state after forming a predetermined region to have a surface roughness by irradiating a laser to a polymer resin substrate in the conductive pattern forming method of Example 1, and by electroless plating after laser irradiation.
- Photograph (second picture) showing the state after forming the copper metal layer, and picture (third picture) after removing the plating layer of the remaining area not irradiated by the laser by selective peeling or removal after electroless plating.
- FIG. 2B is an optical micrograph of a laser irradiation area with surface roughness in Example 1
- FIG. 2C is a SEM photograph of a portion where a metal layer (conductive pattern) is formed in Example 1, showing that a conductive seed is grown in the portion and a metal layer by plating is formed on the conductive seed.
- FIG. 3 is a photograph showing a state after the conductive pattern is formed on the polymer resin substrate by selectively removing a metal layer or the like in a region not irradiated with laser in the conductive pattern forming method of Example 9.
- FIG. 3 is a photograph showing a state after the conductive pattern is formed on the polymer resin substrate by selectively removing a metal layer or the like in a region not irradiated with laser in the conductive pattern forming method of Example 9.
- FIG. 4A is a photograph showing a color change according to height using a optical profiler in a laser irradiation area of Example 6 (left), and a stereoscopic image (right) thereof.
- FIG. 4B is a photograph (left) showing a color change according to height using a optical profiler in the laser irradiation area of Example 8, and a stereoscopic image (on the right side) thereof.
- a method of forming a conductive pattern by direct irradiation of electromagnetic waves the method including removing the conductive seed and the metal layer in the second region of the polymer resin substrate having roughness.
- the method of the present invention first, by irradiating electromagnetic waves such as a laser to the first region to form a conductive pattern such that the polymer resin substrate of the first region has a predetermined surface roughness, irregular pattern shape Or an amorphous surface structure.
- electromagnetic waves such as a laser
- the first region adhesion between the surface of the polymer resin substrate and the metal layer to be formed by plating may be further improved due to a predetermined surface roughness.
- the second region not irradiated with electromagnetic waves such as a laser due to the original surface properties of the polymer resin substrate itself, it may exhibit poor adhesion with the metal layer.
- the metal layer having excellent adhesion to the polymer resin substrate is well formed in the first region, In the second region, a metal layer can be formed which is very easy to remove due to poor adhesion. Therefore, if the metal layer and the conductive seed of the second region are selectively removed by applying a weak physical force to the polymer resin substrate, a desired conductive pattern may be easily formed on the polymer resin substrate.
- electromagnetic wave irradiation such as a laser
- FIG. 1 is a diagram illustrating directly directing electromagnetic waves according to an embodiment of the present invention. It is a schematic diagram which showed schematically an example of the formation method of the conductive pattern by irradiation in order of process.
- the polymer resin substrate is selectively irradiated with electromagnetic waves to form a first region having a predetermined surface roughness.
- the polymeric resin substrate may be formed using any of the thermosetting resin or thermoplastic resin.
- the polymer resin such as a thermosetting resin or a thermoplastic resin capable of forming such a polymer resin substrate, ABS resin, polybutylene tere Polyalkylene terephthalate resins, such as a phthalate resin or a polyethylene terephthalate resin, a polycarbonate resin, a polypropylene resin, or a polyphthalamide resin, etc. are mentioned,
- a polymer resin base material can also be formed using various polymer resins.
- the polymer resin substrate may be formed only of the polymer resin described above, but may further include additives commonly used to form polymer resin products, for example, UV stabilizers, heat stabilizers, or impact modifiers, if necessary. have. These added agents may be included in an appropriate amount of by weight of the total polymer resin base material, from about 2 wt% or less, or about 0.01 in increase than two 0/0.
- the polymer resin substrate does not need to include special inorganic additives, for example, spinel structured C U Cr 2 O 4 , which have been previously used for the formation of conductive patterns by electromagnetic wave irradiation.
- the first region is irradiated with electromagnetic waves such as a laser to have a predetermined surface roughness
- the first region having such a surface roughness has a relatively standard pattern form such as a hole or a mesh pattern or A concave-convex form may be formed, or a black may form an amorphous surface structure in which a plurality of irregular holes, patterns, or concave-convexes are formed, and due to the various surface forms or structures, the polymer resin substrate of the first region may be formed. May have surface roughness.
- the first region of the polymer resin substrate is about 500 nm or more, or about 1 or more, or about, to secure excellent adhesion between the metal layer (conductive pattern) to be formed in the first region and the surface of the polymer resin substrate.
- centerline surface roughness (Ra) of 1 to 3
- the second region which may have a defined surface roughness and is not irradiated with an electromagnetic wave, has a centerline surface roughness Ra less than the first region, for example, about 400 nm or less, or about 100 nm or less, or about 0 to 90 nm. It may have a surface roughness defined by the centerline surface roughness Ra.
- the surface roughness described above may be defined in other ways.
- the surface roughness of the first and second regions may also be defined as the degree of adhesion to the metal layer measured in the cross-cut test according to the standard method of ISO 2409.
- the first region of the polymer resin substrate is subjected to a cross-cut test of a thickness of 2 mm or less by a standard method of ISO 2409 using a tape having an adhesive strength of about 4.0 to 6.0 N / 10 mm width, May have a surface roughness defined by an adhesion force (eg, ISO class 0 or 1) such that the peeled area is about 5% or less of the area of the metal layer under test, and the second region of the polymer resin substrate is cross-cut in the same manner.
- the peeling area of the metal layer may have a surface roughness defined by an adhesive force (eg, ISO class 5 or more) that is about 65% or more of the area of the metal layer to be tested.
- the polymer resin substrate in the crab 1 region has the above-described surface roughness by electromagnetic wave irradiation such as the laser, if the metal layer is formed on the first region in a subsequent plating step, the metal layer is excellent on the polymer resin substrate. It can be formed and maintained with adhesive force to form a good conductive pattern.
- the polymer resin substrate of the second region which is not irradiated with electromagnetic waves, such as a laser, has the above-described surface roughness due to its own surface characteristics, so that the metal layer is formed in a subsequent plating process. Once formed, it exhibits very low adhesion in the second region and can be easily removed. As a result, the metal layer in the second region can be easily and selectively removed to form a conductive pattern on the polymer resin substrate in the first region.
- electromagnetic waves such as a laser can be irradiated under the predetermined conditions described below so that the polymer resin substrate of the first region can exhibit the above-described surface roughness.
- laser electromagnetic waves may be irradiated, for example, about 248 nm, about 308 nm, about 355 nm, about 532 ⁇ , about 585 nm, about 7 55 nm, about 1064 nm, about 1070 nm, about 1550 nm, about Laser electromagnetic waves having a wavelength of 2940 nm or about 10600 nm may be irradiated. In another example, laser electromagnetic waves having a wavelength in the infrared (IR) region may be irradiated.
- IR infrared
- the specific conditions during the laser electromagnetic wave irradiation may be adjusted or changed according to the resin type, physical properties, thickness of the polymer resin substrate, the type or thickness of the metal layer to be formed, or the level of appropriate adhesive force considering the same.
- the irradiation conditions of an average output of, for example, about 0.1 to 50 W, black to about 1 to 30 W, and black to about 5 to 25 W so that the polymer resin substrate of the first region may have the predetermined surface roughness described above. Underneath, it can proceed by irradiating laser electromagnetic waves.
- the laser electromagnetic wave irradiation may be irradiated once with relatively strong power, but may be irradiated twice or more with relatively low power.
- the surface roughness increases, and the structure such as the unevenness formed on the surface is changed from the hole-shaped pattern to the mesh pattern or the amorphous surface structure.
- a trace of electromagnetic wave irradiation may be formed in a hole shape or the like.
- the interval between the centers of the electromagnetic wave irradiation traces, the black and the electromagnetic wave irradiation interval is about 20 zm or more, or about It may be appropriate to irradiate the laser electromagnetic waves so as to be 20 to 70.
- the polymer resin substrate of the first region may have an appropriate surface roughness, and together with the polymer resin substrate and the metal layer may have an appropriate adhesion.
- a conductive seed (conductive seed) on the polymer resin substrate.
- a conductive seed may grow during plating on the polymer resin substrate and serve to promote formation of a metal layer by plating. Through this, a better metal layer and a conductive pattern may be appropriately formed on the polymer resin substrate of the first region.
- Such conductive seeds may comprise metal nanoparticles, metal ions or metal complex ions.
- metal silver or metal complex ions are not only by themselves, but also Of course, it may be used in the form of a metal-containing compound or a metal complex containing a metal complex to which the metal ion is included, and furthermore, in the form of particles of the metal-containing compound or the metal complex.
- the kind of metal element that can be included in such a conductive seed is not particularly limited as long as it can exhibit conductivity, for example, copper (Cu), platinum (Pt), palladium (Pd), silver (Ag), gold (Au) Nickel (Ni), Tungsten (W), Titanium (Ti), Chromium (Cr), Aluminum (A1), Zinc (Zn), Tin (Sn), Lead (Pb), Magnesium (Mg), Manganese (Mn) And one or more metals, ions or complex silvers thereof selected from the group consisting of iron (Fe).
- a dispersion or a solution containing the above-described conductive seed for example, metal nanoparticles, metal ions, or metal complex silver, is coated on the polymer resin substrate. Precipitation, drying and / or reduction may be carried out to form a conductive seed in the desired form, for example, in the form of particles.
- the dispersion when the dispersion contains metal nanoparticles, it may be precipitated using a difference in solubility and then dried to form conductive seeds in the form of particles, and the dispersion may be metal silver or metal complex ions (or Metal compounds or complexes containing them; for example, metal compounds or complexes such as AgN0 3 , Ag 2 S0 4 , KAg (CN) 2, etc.), and the like are reduced and dried to form conductive seeds in the form of particles. Can be appropriately formed.
- metal silver or metal complex ions or Metal compounds or complexes containing them; for example, metal compounds or complexes such as AgN0 3 , Ag 2 S0 4 , KAg (CN) 2, etc.
- the reduction of the metal ions or metal complex ions is a conventional reducing agent, for example, the difference between alcohol-based reducing agent, aldehyde-based reducing agent, sodium hypophosphite or its hydrate
- One or more reducing agents selected from the group consisting of phosphite-based reducing agents, hydrazine-based reducing agents such as hydrazine or hydrates thereof, sodium borohydride and lithium aluminum hydride can be used.
- the dispersion or solution may be an aqueous polymer solution (eg, a solution of polyvinylpyrrolidone-based polymer, etc.) or a metal ion or metal complex ion which may improve the adhesion between the polymer resin substrate and the conductive seed as a liquid medium.
- Stabilizing aqueous complexing agents e.g., NH 3 , EDTA or roxal salt, etc.
- the application of the dispersion or the solution of the conductive seed may proceed to a general process for applying the liquid composition to the polymer resin substrate, for example, may be carried out by a method such as dipping, spin coating or spraying.
- the conductive seed formed by this method can be formed on the entire surface of the polymer resin substrate, including between the surface irregularities, patterns or surface structures formed in the first region, and promotes good formation of the metal layer in the plating process and promotes the plating rate or the metal layer. It can play a role in controlling the physical properties.
- the step of forming the conductive seed may proceed immediately, but optionally after the surface treatment of the polymer resin substrate with a surfactant having a lower surface tension than the dispersion or solution, the conductive The formation of the seed may also proceed.
- surfactants may be added to the dispersion or solution itself for the formation of conductive seeds and surface treated on the polymeric resin substrate. At this time, the surfactant is a dispersion before the addition of these components or May have a lower surface tension than the solution.
- Such surfactants allow the conductive seed to be more uniformly formed and maintained on the surface of the polymeric resin substrate, particularly between surface irregularities or patterns or surface structures. This seems to be because the surfactant removes air between the surface structures to assist the conductive seed to more easily penetrate therebetween.
- the conductive seeds are well adsorbed to the first region as a whole, so that the metal layer by the plating process can be formed more uniformly and satisfactorily.
- the surfactant treatment and the formation of the conductive seed the adhesion between the metal layer and the polymer resin substrate on the first region is further improved, so that a conductive pattern having excellent conductivity can be formed well.
- the type of surfactant may vary depending on the type of dispersion or solution of the conductive seed already described above, and any liquid medium having a lower surface tension than the dispersion or solution may be used.
- an organic solvent such as ethanol having a relatively low surface tension can be used.
- the surfactant may be treated by immersing the polymer resin substrate for a few seconds to several minutes.
- a metal layer may be formed by plating the polymer resin substrate on which the conductive seed is formed.
- the metal layer forming step may be performed by electroless plating a conductive metal on the polymer resin substrate, and the process and conditions of the electroless plating step are conventional. Depending on the method and conditions.
- the plating process may be performed using a plating solution containing a conductive metal constituting a metal layer, for example, a metal source such as copper, a complexing agent, a ⁇ regulator, and a reducing agent, and the first region and the crab region.
- a metal layer can be formed on this defined polymeric resin substrate.
- the metal layer may be formed on the conductive seed while the aforementioned conductive seed is grown.
- Such a metal layer can be well formed on the first region with good adhesion, whereas, on the second region, the metal layer is very easily removed due to poor adhesion to the polymer resin substrate (for example, shown in the second drawing of FIG. 2A). As shown, it may be formed in a state of excitation from the polymer resin substrate).
- the conductive seed and the metal layer may be selectively removed from the second region of the polymer resin substrate, and conductive patterns may be formed in the remaining first region as shown in 5 and 6 of FIG. 1.
- the metal layer and the conductive seed may be selectively removed from the second region by a simple method such as applying a pharmaceutical physical force to the polymer resin substrate. have.
- the metal layer may remain to form a conductive pattern.
- removing the conductive seed and metal layer in the second region may include, for example, sonication, liquid cleaning, liquid rinse, air blowing, It can proceed by any method of applying a weak physical force to the polymer resin substrate, such as taping, brushing, or using manpower, such as brushing or wiping directly with a human hand, by combining two or more methods selected from these. You can also go together.
- the conductive seed and the metal layer of the second region may be selectively removed by washing or rinsing in water under ultrasonic irradiation for a predetermined time, followed by gas blowing.
- the resin structure having the conductive pattern formed by the above-described method includes a polymer resin substrate having a first region defined with a predetermined surface roughness and a second region having a surface roughness smaller than the first region; And a conductive seed and a metal layer selectively formed in the first region of the polymer resin substrate.
- the first region can be applied to the electromagnetic wave irradiation region such as a laser.
- the resin structure described above may be various resin products or resin layers such as smartphone cases having conductive patterns for antennas, or various resin products or resin layers having conductive patterns such as other RFID tags, various sensors, or MEMS structures. have.
- the conductive pattern will be formed by electromagnetic wave irradiation such as laser.
- electromagnetic wave irradiation such as laser.
- the unit cost of the conductive pattern forming process and the unit cost of ' raw material ' may be lowered, and the special inorganic additive may minimize the risk of deterioration of physical properties such as the mechanical properties of the polymer resin substrate or the product.
- the desired fine conductive pattern can be formed on the polymer resin substrate without the use of the special inorganic additive, the color of the resin itself can be utilized and the color of the polymer resin substrate or the product can be easily expressed in the desired color. . Therefore, the embodiments of the present invention can form fine conductive patterns on various resin products or resin layers even at a lower cost and a simplified process, and thus more various colors, including new resin products which have not been proposed before. And a resin product in the form can be greatly contributed.
- the operation and effect of the invention will be described in more detail with reference to specific examples. However, this is presented as an example of the invention, whereby the scope of the invention is not limited in any sense.
- a UV stabilizer, a heat stabilizer and cheunggyeok polycarbonate resin substrate reinforcing agent containing a total of less than 2 parts by weight 0/0, and does not include other inorganic additives is was prepared.
- a laser of 1064 nm wavelength is applied to a predetermined region of the polycarbonate resin substrate. Irradiation was performed once under irradiation conditions of an average power of 21.4 W. At this time, by adjusting the laser irradiation interval, the interval between the center of the laser irradiation trace of the polycarbonate resin substrate
- the laser was formed to have a constant surface roughness on a predetermined region of the irradiated polycarbonate resin substrate.
- a photo of the polycarbonate resin substrate after this formation is shown in the first photo of FIG. 2A, and an optical micrograph of the laser irradiation area formed to have the surface roughness is shown in FIG. 2B.
- the polycarbonate resin substrate was immersed in an aqueous solution containing Pd ions for about 5 minutes to form a conductive seed including Pd on the substrate.
- the substrate was then washed with deionized water and electroless plating was carried out using copper as the conductive metal.
- the plating solution used was copper sulfate as a copper source, a lotel salt as a complexing agent, an aqueous solution of sodium hydroxide as a pH adjusting agent, and formaldehyde as a reducing agent. Formed.
- a photo showing the state after forming the metal layer is illustrated in the second photo of FIG. 2A. Referring to this, it is confirmed that such a metal layer was formed well in the laser irradiation area, but was formed in a very easy to be removed state as excited by poor adhesive force in the remaining areas.
- FIG. 2A shows the selective removal of the metal layer or the like from the unirradiated area.
- the photo shows the state after forming a conductive pattern on the said board
- FIG. 2C is a SEM photograph of the part in which the said conductive pattern was formed. Referring to Figure 2c, it is confirmed that the conductive seed is grown in the corresponding portion and the metal layer by plating is formed on the conductive sheet (conductive metal particles). Examples 2 to 9: Formation of Conductive Patterns by Laser Direct Irradiation
- Example 1 the interval between the irradiation conditions of the average power of the laser and the central portion of the laser irradiation trace was about 15.7 W and about 25 kW (Example 2), about 15.7 W and about 35 (Example 3), about 18.6 W and about 45 (Example 4), about 21.4 W and about 4 5 (Example 5), about 21.4 W and about 55 j m (Example 6), about 24.2 W and about 5 5 (Example 7), about A resin structure having a conductive pattern was prepared in the same manner as in Example 1, except that the irradiation was performed once at 28.5 W and about 5 5 (Example 8).
- Example 9 Formation of Conductive Patterns by Laser Direct Irradiation
- Example 1 Except that in Example 1, an aqueous complexed solution containing Ag complex ion instead of Pd (a solution containing AgN0 3 and the complexing agent ⁇ ⁇ ⁇ ) and a mixture of ethane was used as a solution for conducting seed formation. In the same manner as in Example 1, a resin structure having a conductive pattern was prepared. 3 is a photograph showing a state after the conductive layer is formed on the substrate by selectively removing a metal layer or the like in a region not irradiated with laser. Test Example 1: Evaluation of the surface roughness of the conductive pattern
- Example 1 to 9 surface roughness was measured on a region of a laser irradiated polycarbonate resin substrate. Surface roughness was measured by using an optical profiler (Nano view ⁇ Nanosystem, Korea) equipment to measure the centerline average roughness (Ra) of 0.2 mm x 0.3 mm.
- FIG. 4A a color change according to height is shown using an optical profiler in the laser irradiation area of Example 6 (left), and a picture showing three-dimensionalization (right) thereof is shown.
- the surface roughness measured at this time is also shown.
- 4B is a corresponding photograph of Example 8, showing surface states varying with changes in laser conditions and values of surface roughness at that time.
- Examples 1 to 9 after measuring the surface roughness of six different points of the laser irradiation area by this method, these measured values were averaged and summarized as Ra values in Table 1 below.
- FIGS. 4A and 4B show surface roughnesses measured at any one of the six point increases, and Table 1 shows the average values of the measured values at each of six points. evaluation
- the peeling area of the conductive pattern was evaluated under the following ISO class criteria.
- class 2 grade Peeling area of the conductive pattern is more than 5% and 15% or less of the conductive pattern area to be evaluated;
- class 4 grade The peeling area of the conductive pattern is more than 35% and 65% or less of the conductive pattern area to be evaluated;
- class 5 grade The peeling area of the conductive pattern is more than 65% of the conductive pattern area to be evaluated; In addition, after the conductive patterns were formed in Examples 1 to 9, the uniformity of this metal layer (conductive pattern) was evaluated under the following criteria.
- the laser irradiation area is about
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JP2016533234A JP6316961B2 (ja) | 2013-08-09 | 2014-07-24 | 電磁波の直接照射による導電性パターン形成方法 |
US14/910,915 US20160212860A1 (en) | 2013-08-09 | 2014-07-24 | METHOD FOR FORMING CONDUCTIVE PATTERN BY DIRECT RADIATION OF ELECTROMAGNETIC WAVE, AND RESIN STRUCTURE HAVING CONDUCTIVE PATTERN THEREON (As Amended) |
CN201480044106.XA CN105474330B (zh) | 2013-08-09 | 2014-07-24 | 通过电磁波的直接辐射来形成导电图案的方法,以及具有导电图案的树脂结构 |
EP14834164.7A EP3032548A4 (en) | 2013-08-09 | 2014-07-24 | Method of forming conductive pattern through direct irradiation of electromagnetic waves, and resin structure having conductive pattern |
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PCT/KR2014/007325 WO2015020455A1 (ko) | 2013-08-09 | 2014-08-07 | 전자기파의 직접 조사에 의한 도전성 패턴 형성 방법과, 도전성 패턴을 갖는 수지 구조체 |
PCT/KR2014/007328 WO2015020456A1 (ko) | 2013-08-09 | 2014-08-07 | 전자기파의 직접 조사에 의한 도전성 패턴 형성 방법과, 도전성 패턴을 갖는 수지 구조체 |
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PCT/KR2014/007328 WO2015020456A1 (ko) | 2013-08-09 | 2014-08-07 | 전자기파의 직접 조사에 의한 도전성 패턴 형성 방법과, 도전성 패턴을 갖는 수지 구조체 |
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KR20150018368A (ko) * | 2013-08-09 | 2015-02-23 | 주식회사 엘지화학 | 전자기파의 직접 조사에 의한 도전성 패턴 형성 방법과, 도전성 패턴을 갖는 수지 구조체 |
KR102374414B1 (ko) * | 2015-04-24 | 2022-03-15 | 엘지이노텍 주식회사 | 전자파 차폐 구조물 |
KR102010472B1 (ko) * | 2015-07-20 | 2019-08-13 | 주식회사 엘지화학 | 전자기파의 직접 조사에 의한 도전성 패턴 형성 방법 |
US10103056B2 (en) * | 2017-03-08 | 2018-10-16 | Lam Research Corporation | Methods for wet metal seed deposition for bottom up gapfill of features |
US10892671B2 (en) * | 2017-07-25 | 2021-01-12 | GM Global Technology Operations LLC | Electrically conductive copper components and joining processes therefor |
CN110545635B (zh) * | 2018-05-29 | 2021-09-14 | 鹏鼎控股(深圳)股份有限公司 | 多层电路板的制作方法 |
US11465397B1 (en) * | 2018-08-21 | 2022-10-11 | Iowa State University Research Foundation, Inc. | Fabrication of high-resolution graphene-based flexible electronics via polymer casting |
KR102543186B1 (ko) * | 2018-11-23 | 2023-06-14 | 삼성전자주식회사 | 반도체 패키지 |
EP4286456A1 (en) * | 2021-08-13 | 2023-12-06 | LG Chem, Ltd. | Polymer composite and molded product comprising same |
JP2024511502A (ja) * | 2021-08-13 | 2024-03-13 | エルジー・ケム・リミテッド | 高分子複合体およびそれを含む成形品 |
EP4286457A1 (en) * | 2021-08-13 | 2023-12-06 | LG Chem, Ltd. | Polymer composite and molded product comprising same |
CN115066088A (zh) * | 2022-06-30 | 2022-09-16 | 浙江华正新材料股份有限公司 | 印制电路板及其制备方法 |
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2014
- 2014-07-01 KR KR1020140081915A patent/KR20150018368A/ko active Search and Examination
- 2014-07-01 KR KR1020140081917A patent/KR101823660B1/ko active IP Right Grant
- 2014-07-24 WO PCT/KR2014/006756 patent/WO2015020332A1/ko active Application Filing
- 2014-07-24 US US14/910,915 patent/US20160212860A1/en not_active Abandoned
- 2014-07-24 EP EP14834164.7A patent/EP3032548A4/en not_active Withdrawn
- 2014-07-24 JP JP2016533234A patent/JP6316961B2/ja active Active
- 2014-07-24 CN CN201480044106.XA patent/CN105474330B/zh active Active
- 2014-07-24 KR KR1020140093782A patent/KR20150018382A/ko active Application Filing
- 2014-08-07 JP JP2016533248A patent/JP6316962B2/ja active Active
- 2014-08-07 WO PCT/KR2014/007325 patent/WO2015020455A1/ko active Application Filing
- 2014-08-07 US US14/910,966 patent/US10344385B2/en active Active
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JPH09186432A (ja) * | 1995-12-28 | 1997-07-15 | Hitachi Aic Inc | プリント配線板の製造方法 |
JP2003243807A (ja) * | 2002-02-14 | 2003-08-29 | Nec Kansai Ltd | 配線基板及びその製造方法 |
KR20090060209A (ko) * | 2008-12-22 | 2009-06-11 | 현봉수 | 부분도금제품의 제조방법 |
KR20130018819A (ko) * | 2010-03-31 | 2013-02-25 | 이비덴 가부시키가이샤 | 배선판 및 그 제조 방법 |
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