WO2014073530A1 - 導電性ペースト組成物 - Google Patents
導電性ペースト組成物 Download PDFInfo
- Publication number
- WO2014073530A1 WO2014073530A1 PCT/JP2013/079896 JP2013079896W WO2014073530A1 WO 2014073530 A1 WO2014073530 A1 WO 2014073530A1 JP 2013079896 W JP2013079896 W JP 2013079896W WO 2014073530 A1 WO2014073530 A1 WO 2014073530A1
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- WIPO (PCT)
- Prior art keywords
- conductive paste
- paste composition
- solvent
- group
- conductive
- Prior art date
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- 239000000203 mixture Substances 0.000 title claims abstract description 93
- 239000002904 solvent Substances 0.000 claims abstract description 56
- 239000000843 powder Substances 0.000 claims abstract description 39
- WWJLCYHYLZZXBE-UHFFFAOYSA-N 5-chloro-1,3-dihydroindol-2-one Chemical compound ClC1=CC=C2NC(=O)CC2=C1 WWJLCYHYLZZXBE-UHFFFAOYSA-N 0.000 claims abstract description 35
- KGEKLUUHTZCSIP-UHFFFAOYSA-N Isobornyl acetate Natural products C1CC2(C)C(OC(=O)C)CC1C2(C)C KGEKLUUHTZCSIP-UHFFFAOYSA-N 0.000 claims abstract description 35
- 239000001940 [(1R,4S,6R)-1,7,7-trimethyl-6-bicyclo[2.2.1]heptanyl] acetate Substances 0.000 claims abstract description 35
- 239000003960 organic solvent Substances 0.000 claims abstract description 33
- 239000011230 binding agent Substances 0.000 claims abstract description 23
- 238000007639 printing Methods 0.000 claims abstract description 23
- 238000000034 method Methods 0.000 claims description 19
- 238000007646 gravure printing Methods 0.000 claims description 13
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 12
- 125000000217 alkyl group Chemical group 0.000 claims description 12
- WUOACPNHFRMFPN-UHFFFAOYSA-N alpha-terpineol Chemical class CC1=CCC(C(C)(C)O)CC1 WUOACPNHFRMFPN-UHFFFAOYSA-N 0.000 claims description 12
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 12
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 11
- 125000004432 carbon atom Chemical group C* 0.000 claims description 9
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 9
- 239000003985 ceramic capacitor Substances 0.000 claims description 8
- 239000010949 copper Substances 0.000 claims description 7
- 229930195733 hydrocarbon Natural products 0.000 claims description 7
- 150000002430 hydrocarbons Chemical class 0.000 claims description 7
- 239000006184 cosolvent Substances 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 5
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 5
- 125000002777 acetyl group Chemical group [H]C([H])([H])C(*)=O 0.000 claims description 5
- 229910052802 copper Inorganic materials 0.000 claims description 5
- 229910052759 nickel Inorganic materials 0.000 claims description 5
- 229910052763 palladium Inorganic materials 0.000 claims description 5
- 238000007650 screen-printing Methods 0.000 claims description 5
- 229910052709 silver Inorganic materials 0.000 claims description 5
- 239000004332 silver Substances 0.000 claims description 5
- 150000001875 compounds Chemical class 0.000 claims description 4
- 229910052697 platinum Inorganic materials 0.000 claims description 4
- 125000002947 alkylene group Chemical group 0.000 claims description 3
- 238000007641 inkjet printing Methods 0.000 claims description 3
- 238000007645 offset printing Methods 0.000 claims description 3
- 238000007761 roller coating Methods 0.000 claims description 3
- 238000005507 spraying Methods 0.000 claims description 3
- 239000000919 ceramic Substances 0.000 abstract description 52
- 239000000126 substance Substances 0.000 abstract description 6
- 239000010408 film Substances 0.000 description 23
- -1 organic acid ester Chemical class 0.000 description 23
- 239000002245 particle Substances 0.000 description 17
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 14
- 238000011156 evaluation Methods 0.000 description 13
- MTHSVFCYNBDYFN-UHFFFAOYSA-N anhydrous diethylene glycol Natural products OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 10
- SQIFACVGCPWBQZ-UHFFFAOYSA-N delta-terpineol Natural products CC(C)(O)C1CCC(=C)CC1 SQIFACVGCPWBQZ-UHFFFAOYSA-N 0.000 description 10
- LYCAIKOWRPUZTN-UHFFFAOYSA-N ethylene glycol Natural products OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 10
- 239000011248 coating agent Substances 0.000 description 8
- 238000000576 coating method Methods 0.000 description 8
- DNIAPMSPPWPWGF-UHFFFAOYSA-N monopropylene glycol Natural products CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 8
- 229940116411 terpineol Drugs 0.000 description 8
- 239000000654 additive Substances 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 229920000178 Acrylic resin Polymers 0.000 description 6
- 229920005989 resin Polymers 0.000 description 6
- 239000011347 resin Substances 0.000 description 6
- 239000004925 Acrylic resin Substances 0.000 description 5
- 230000000996 additive effect Effects 0.000 description 5
- 125000000962 organic group Chemical group 0.000 description 5
- 239000002002 slurry Substances 0.000 description 5
- 230000003746 surface roughness Effects 0.000 description 5
- 125000003545 alkoxy group Chemical group 0.000 description 4
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 4
- 229910002113 barium titanate Inorganic materials 0.000 description 4
- UODXCYZDMHPIJE-UHFFFAOYSA-N menthanol Chemical compound CC1CCC(C(C)(C)O)CC1 UODXCYZDMHPIJE-UHFFFAOYSA-N 0.000 description 4
- 238000002156 mixing Methods 0.000 description 4
- 239000013598 vector Substances 0.000 description 4
- 239000004215 Carbon black (E152) Substances 0.000 description 3
- 239000000470 constituent Substances 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000010304 firing Methods 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- WUOACPNHFRMFPN-SECBINFHSA-N (S)-(-)-alpha-terpineol Chemical class CC1=CC[C@@H](C(C)(C)O)CC1 WUOACPNHFRMFPN-SECBINFHSA-N 0.000 description 2
- LCZVSXRMYJUNFX-UHFFFAOYSA-N 2-[2-(2-hydroxypropoxy)propoxy]propan-1-ol Chemical compound CC(O)COC(C)COC(C)CO LCZVSXRMYJUNFX-UHFFFAOYSA-N 0.000 description 2
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 2
- 239000001856 Ethyl cellulose Substances 0.000 description 2
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 125000002252 acyl group Chemical group 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
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- 229920001249 ethyl cellulose Polymers 0.000 description 2
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- 125000002485 formyl group Chemical group [H]C(*)=O 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 2
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 2
- 239000004014 plasticizer Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 239000010948 rhodium Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- DTGKSKDOIYIVQL-WEDXCCLWSA-N (+)-borneol Chemical group C1C[C@@]2(C)[C@@H](O)C[C@@H]1C2(C)C DTGKSKDOIYIVQL-WEDXCCLWSA-N 0.000 description 1
- LZDKZFUFMNSQCJ-UHFFFAOYSA-N 1,2-diethoxyethane Chemical compound CCOCCOCC LZDKZFUFMNSQCJ-UHFFFAOYSA-N 0.000 description 1
- GDXHBFHOEYVPED-UHFFFAOYSA-N 1-(2-butoxyethoxy)butane Chemical compound CCCCOCCOCCCC GDXHBFHOEYVPED-UHFFFAOYSA-N 0.000 description 1
- RRQYJINTUHWNHW-UHFFFAOYSA-N 1-ethoxy-2-(2-ethoxyethoxy)ethane Chemical compound CCOCCOCCOCC RRQYJINTUHWNHW-UHFFFAOYSA-N 0.000 description 1
- VXQBJTKSVGFQOL-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethyl acetate Chemical compound CCCCOCCOCCOC(C)=O VXQBJTKSVGFQOL-UHFFFAOYSA-N 0.000 description 1
- FPZWZCWUIYYYBU-UHFFFAOYSA-N 2-(2-ethoxyethoxy)ethyl acetate Chemical compound CCOCCOCCOC(C)=O FPZWZCWUIYYYBU-UHFFFAOYSA-N 0.000 description 1
- HBNHCGDYYBMKJN-UHFFFAOYSA-N 2-(4-methylcyclohexyl)propan-2-yl acetate Chemical compound CC1CCC(C(C)(C)OC(C)=O)CC1 HBNHCGDYYBMKJN-UHFFFAOYSA-N 0.000 description 1
- NQBXSWAWVZHKBZ-UHFFFAOYSA-N 2-butoxyethyl acetate Chemical compound CCCCOCCOC(C)=O NQBXSWAWVZHKBZ-UHFFFAOYSA-N 0.000 description 1
- RSWGJHLUYNHPMX-UHFFFAOYSA-N Abietic-Saeure Natural products C12CCC(C(C)C)=CC2=CCC2C1(C)CCCC2(C)C(O)=O RSWGJHLUYNHPMX-UHFFFAOYSA-N 0.000 description 1
- ZTQSAGDEMFDKMZ-UHFFFAOYSA-N Butyraldehyde Chemical group CCCC=O ZTQSAGDEMFDKMZ-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 229910017771 LaFeO Inorganic materials 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- XBDQKXXYIPTUBI-UHFFFAOYSA-M Propionate Chemical compound CCC([O-])=O XBDQKXXYIPTUBI-UHFFFAOYSA-M 0.000 description 1
- KHPCPRHQVVSZAH-HUOMCSJISA-N Rosin Natural products O(C/C=C/c1ccccc1)[C@H]1[C@H](O)[C@@H](O)[C@@H](O)[C@@H](CO)O1 KHPCPRHQVVSZAH-HUOMCSJISA-N 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- 238000005411 Van der Waals force Methods 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229920000180 alkyd Polymers 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 125000003236 benzoyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C(*)=O 0.000 description 1
- 230000000740 bleeding effect Effects 0.000 description 1
- 125000004106 butoxy group Chemical group [*]OC([H])([H])C([H])([H])C(C([H])([H])[H])([H])[H] 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 239000003575 carbonaceous material Substances 0.000 description 1
- 239000001913 cellulose Substances 0.000 description 1
- 229920002678 cellulose Polymers 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 150000001983 dialkylethers Chemical class 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 229940019778 diethylene glycol diethyl ether Drugs 0.000 description 1
- 238000002050 diffraction method Methods 0.000 description 1
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 1
- 150000002170 ethers Chemical class 0.000 description 1
- 125000001301 ethoxy group Chemical group [H]C([H])([H])C([H])([H])O* 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000004434 industrial solvent Substances 0.000 description 1
- 239000000976 ink Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 125000001972 isopentyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
- 238000004898 kneading Methods 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 description 1
- 229930003658 monoterpene Natural products 0.000 description 1
- 150000002773 monoterpene derivatives Chemical class 0.000 description 1
- 235000002577 monoterpenes Nutrition 0.000 description 1
- SYSQUGFVNFXIIT-UHFFFAOYSA-N n-[4-(1,3-benzoxazol-2-yl)phenyl]-4-nitrobenzenesulfonamide Chemical class C1=CC([N+](=O)[O-])=CC=C1S(=O)(=O)NC1=CC=C(C=2OC3=CC=CC=C3N=2)C=C1 SYSQUGFVNFXIIT-UHFFFAOYSA-N 0.000 description 1
- 125000004108 n-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000001280 n-hexyl group Chemical group C(CCCCC)* 0.000 description 1
- 125000000740 n-pentyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000004123 n-propyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000001971 neopentyl group Chemical group [H]C([*])([H])C(C([H])([H])[H])(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- 229910052762 osmium Inorganic materials 0.000 description 1
- SYQBFIAQOQZEGI-UHFFFAOYSA-N osmium atom Chemical compound [Os] SYQBFIAQOQZEGI-UHFFFAOYSA-N 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 125000001325 propanoyl group Chemical group O=C([*])C([H])([H])C([H])([H])[H] 0.000 description 1
- 125000001501 propionyl group Chemical group O=C([*])C([H])([H])C([H])([H])[H] 0.000 description 1
- 125000002572 propoxy group Chemical group [*]OC([H])([H])C(C([H])([H])[H])([H])[H] 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000011342 resin composition Substances 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 238000007665 sagging Methods 0.000 description 1
- 229930195734 saturated hydrocarbon Natural products 0.000 description 1
- 238000000790 scattering method Methods 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- KHPCPRHQVVSZAH-UHFFFAOYSA-N trans-cinnamyl beta-D-glucopyranoside Natural products OC1C(O)C(O)C(CO)OC1OCC=CC1=CC=CC=C1 KHPCPRHQVVSZAH-UHFFFAOYSA-N 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H01B1/20—Conductive material dispersed in non-conductive organic material
- H01B1/22—Conductive material dispersed in non-conductive organic material the conductive material comprising metals or alloys
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D5/00—Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced; Filling pastes
- C09D5/24—Electrically-conducting paints
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D7/00—Features of coating compositions, not provided for in group C09D5/00; Processes for incorporating ingredients in coating compositions
- C09D7/20—Diluents or solvents
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/005—Electrodes
- H01G4/008—Selection of materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/30—Stacked capacitors
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/09—Use of materials for the conductive, e.g. metallic pattern
- H05K1/092—Dispersed materials, e.g. conductive pastes or inks
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K3/00—Use of inorganic substances as compounding ingredients
- C08K3/02—Elements
- C08K3/08—Metals
Definitions
- the present invention relates to a conductive paste composition. More specifically, the present invention relates to a conductive paste composition that can be suitably used for forming internal electrodes of multilayer ceramic electronic components. Note that this application claims priority based on Japanese Patent Application No. 2012-244846 filed on November 6, 2012, the entire contents of which are incorporated herein by reference. .
- FIG. 1 is a diagram for explaining the structure of a multilayer ceramic capacitor (hereinafter sometimes simply referred to as “MLCC”).
- the MLCC 10 is a chip-type ceramic capacitor in which a large number of dielectric layers 20 made of ceramic such as titanium oxide and barium titanate and internal electrode layers 30 made of a conductive film such as nickel are stacked. It is used in a wide range of electronic circuits because it can realize downsizing and large capacity by taking advantage of high frequency characteristics.
- Such MLCC 10 is typically manufactured by the following procedure. That is, first, a ceramic powder for forming the dielectric layer 20 (hereinafter, simply referred to as “ceramic green sheet”) is prepared by adding a binder, an organic solvent, etc. Sometimes referred to as a “green sheet”). Then, a conductive paste composition containing a conductive powder, a binder, and an organic solvent is applied to the green sheet in a predetermined pattern by a printing method such as a screen printing method, and a conductive material for constituting the internal electrode layer 30. Forming an adhesive coating.
- a ceramic powder for forming the dielectric layer 20 hereinafter, simply referred to as “ceramic green sheet”
- a conductive paste composition containing a conductive powder, a binder, and an organic solvent is applied to the green sheet in a predetermined pattern by a printing method such as a screen printing method, and a conductive material for constituting the internal electrode layer 30. Forming an adhesive coating.
- a predetermined number for example, several tens to several hundreds
- green sheets with a conductive coating film prepared in this way are laminated, pressed, fired, and then the external electrode 40 is formed.
- the MLCC 10 in which the internal electrode layer 30 and the dielectric layer 20 are stacked can be obtained.
- a butyral resin or an acrylic resin excellent in binding property to ceramic particles is widely used as a binder to be blended with the slurry for the green sheet.
- the organic solvent blended in the conductive paste composition has an affinity for the green sheet, but erodes the green sheet by dissolving a binder such as butyral resin or acrylic resin in the green sheet. It is desired that the sheet attack to be suppressed (hereinafter also referred to as “sheet attack”) is suppressed.
- sheet attack organic solvents such as terpineol have been widely used in conductive paste compositions that have been widely used for electronic parts.
- terpineol is highly soluble in butyral resins or acrylic resins, it is difficult to say that it is suitable for use in a conductive paste composition used to form the internal electrode layer 30 of the MLCC 10. Therefore, in the conductive paste composition for forming the internal electrode layer 30 of the MLCC 10, it is proposed to use an organic solvent that is compatible with the green sheet and has the effect of suppressing the sheet attack, instead of terpineol. (See, for example, Patent Documents 1 to 5).
- the MLCC has a size of 1005 (outer dimensions: 1.0 mm ⁇ 0.5 mm ⁇ 0.5 mm), but a 0603 size (outer dimensions: 0.6 mm ⁇ 0.3 mm ⁇ 0.3 mm) , 0402 size (external dimensions: 0.4 mm ⁇ 0.2 mm ⁇ 0.2 mm), etc., and the thickness of the dielectric layer in such an ultra-small MLCC has a conventional thickness of 3 ⁇ m to 5 ⁇ m.
- the thickness is reduced to less than 3 ⁇ m and further to 1 ⁇ m or less.
- the number of internal layers is increased to increase the capacity while maintaining the dimension, and the thickness of one layer of the dielectric layer is still less than 1 ⁇ m. It is being thinned to the level. Therefore, in the production of MLCC, it is desired to obtain a conductive paste composition that obtains higher printing accuracy and does not cause a problem of sheet attack even with respect to a thinner ceramic green sheet.
- the present invention has been made against the background of the above circumstances, and its object is to obtain a high printing accuracy and to have a reduced sheet attack even for extremely thin ceramic green sheets. It is to provide a paste composition.
- the present invention provides a conductive paste composition containing conductive powder, a binder, and an organic solvent.
- the organic solvent contains isobornyl acetate as a main solvent and a solvent having a solubility parameter of Hansen lower than that of the isobornyl acetate as a sub-solvent.
- Isobornyl acetate used as the main solvent in the conductive paste composition of the present invention exhibits good solubility in the binder component of the conductive paste composition, but is a butyral type used for ceramic green sheets. It also shows solubility in resins. Therefore, for example, paragraph 0018 of Patent Document 5 points out that it is difficult to completely avoid the sheet attack phenomenon when the solvent component is isobornyl acetate. For this reason, isobornyl acetate is a material that cannot be said to be suitable as a main solvent of a conductive paste composition used for production of MLCC or the like.
- this isobornyl acetate is a main solvent, a solvent having a Hansen solubility parameter lower than that of the isobornyl acetate is used as a secondary solvent, By using together, the sheet attack with respect to the ceramic green sheet of isobornyl acetate is suppressed.
- the “butyral resin” is a term encompassing all polyvinyl butyral resins called so-called butyral resins used as a binder for forming ceramic green sheets in this kind of field. is there.
- Such polyvinyl butyral resin means a resin composition containing polyvinyl butyral in a proportion of 50% by mass or more (for example, 70% by mass or more).
- the paste coating film printed on the surface of the ceramic green sheet spreads and spreads on the contact surface with the ceramic green sheet, It is considered that the printing accuracy is lowered.
- the conductive paste composition of the present invention even when the size of the print pattern is reduced (particularly, the thickness is reduced), the sagging and bleeding of the paste coating shape with respect to the print pattern size is relatively Since it is suppressed to be small, the printing accuracy can be kept high.
- Hansen's solubility parameter is an index representing the solubility of how much a certain substance dissolves in another certain substance.
- This HSP has a different philosophy from the SP value of Hilde brand used in solvent handbooks (published by: Kodansha Scientific Co., Ltd.), and has a multi-dimensional (typically three-dimensional) solubility.
- This vector can typically be represented by a dispersion term, a polar term, and a hydrogen bond term.
- This dispersion term reflects van der Waals force
- the polarity term reflects the dipole moment
- the hydrogen bond term reflects the action of water, alcohol, and the like. And it can be judged that those having similar vectors by HSP have high solubility.
- HSP isobornyl acetate
- a solvent having an HSP of less than 19.0 (J / cm 3 ) 1/2 may be used as a secondary solvent. It can.
- HSPs are described, for example, in Wesley L. Reference may be made to the values disclosed by Archer, Industrial Solvents Handbook, et al.
- the organic solvent contains 60% by mass to 90% by mass of the isobornyl acetate and 40% by mass to 10% by mass of the auxiliary solvent. It is characterized by that. According to such a configuration, in the conductive paste composition using isobornyl acetate as the main solvent, the affinity for the ceramic green sheet and the effect of suppressing the sheet attack can be realized in a balanced manner.
- the co-solvent has a Hansen solubility parameter of less than 19, and (A) a terpineol derivative, (B) a compound represented by the following general formula (1), R 1 (OR 2 ) n OR 3 (1) (In the formula, R 1 is a hydrogen atom or a linear or branched alkyl group having 1 to 6 carbon atoms, R 2 is a linear or branched alkylene group having 2 to 4 carbon atoms, and R 3 is a hydrogen atom.
- (C) a hydrocarbon It is characterized by including any 1 type or 2 types or more.
- the solvents (A) to (C) those having an HSP of less than 19.0 (J / cm 3 ) 1/2 are those of isobornyl acetate, which is the main solvent, from the correlation of HSP vectors. It can be a solvent capable of effectively suppressing sheet attack on the ceramic green sheet. Therefore, by using the above-mentioned solvent as a secondary solvent, a conductive paste composition having an affinity for a ceramic green sheet and more effectively suppressing sheet attack is provided.
- the metal species constituting the conductive powder is any one or two selected from the group consisting of nickel, platinum, palladium, silver, and copper. It is characterized by the above. These nickel, platinum, palladium, silver and copper are all excellent in electrical conductivity, and are, for example, metal species having heat resistance at the firing temperature of the ceramic green sheet, and are suitable as conductive powders. In addition, alloys containing these metal species and various conductive metal compounds may also have characteristics suitable for conductive powder. According to such a configuration, for example, a conductive paste composition suitable for forming an internal electrode of a multilayer ceramic capacitor is provided.
- the conductive paste composition is used in any one printing method selected from the group consisting of spray coating, roller coating, screen printing, gravure printing, offset printing, and inkjet printing. It is characterized by being prepared.
- the conductive paste composition of the present invention is applicable to various printing methods because the sheet attack is suppressed while having a moderate familiarity with the sheet in printing using a ceramic green sheet as a printing medium. be able to.
- the present invention can be suitably applied to a gravure printing method capable of printing a thinner conductive coating film, which is difficult with a screen printing method, with higher accuracy and higher productivity.
- the conductive paste composition provided by the present invention is capable of producing a thin conductive film with high accuracy and high productivity by, for example, a gravure printing method in printing using a ceramic green sheet as a printing medium. Can be printed. Therefore, it is preferable to use it for forming the internal electrode of the multilayer ceramic capacitor because the advantages can be exhibited more clearly.
- FIG. 1 is a partially cutaway perspective sectional view schematically showing the structure of a multilayer ceramic capacitor.
- 2A and 2B are examples of cross-sectional shapes of electrode patterns obtained by printing the conductive paste compositions 1 and 2 produced in the examples.
- the conductive paste composition disclosed here essentially contains a conductive powder, a binder, and an organic solvent.
- the conductive powder is uniformly dispersed in a vehicle (organic medium) typically composed of a binder and an organic solvent.
- the conductive powder is a substance responsible for the conductivity of a fired body (typically a conductive film) obtained after the conductive paste composition is fired. There is no restriction
- Such a conductive paste composition may be used in various applications such as for electrode layer formation, for printed circuits, for bonding, for resistors, for anisotropic conductive inks, etc., and an example of a material constituting such conductive powder As gold (Au), silver (Ag), copper (Cu), platinum (Pt), palladium (Pd), ruthenium (Ru), rhodium (Rh), iridium (Ir), osmium (Os), nickel ( Metals such as Ni) and aluminum (Al) and their alloys, carbonaceous materials such as carbon black, LaSrCoFeO 3 -based oxides (eg LaSrCoFeO 3 ), LaMnO 3 -based oxides (eg LaSrGaMgO 3 ), LaFeO 3 -based oxides (e.g.
- LaSrFeO 3 transition metal Perobusuka represented as LaCoO 3 type oxide (e.g., LaSrCoO 3) or the like
- Conductive ceramics typified by preparative oxide is exemplified.
- this conductive paste composition is used for the purpose of forming an internal electrode layer of, for example, MLL, it is not melted even at a firing temperature.
- Palladium (Pd), silver (Ag), and copper (Cu) and is preferably composed of one or more metal species.
- these electroconductive powder may contain an impurity in the range which does not impair the characteristic of the electroconductive paste composition of this invention.
- the average particle size of the particles is selected from the range of several nm to several ⁇ m, for example, about 10 nm to 10 ⁇ m, depending on the application. Particles having an average particle size can be used.
- the “average particle size” means an integrated value of 50% in the particle size distribution measured by a particle size distribution measuring apparatus based on the laser scattering / diffraction method in the range where the average particle size is approximately 0.5 ⁇ m or more. In the range where the average particle diameter is about 0.5 ⁇ m or less, it can be obtained by observation means such as an electron microscope.
- It can be determined as the particle diameter at an integrated value of 50% in the particle size distribution created based on the equivalent circle diameter of a plurality of particles in the observed image to be observed. Note that there is no strict criticality in the particle size range to which these average particle size calculation methods are applied, and the calculation method can be appropriately selected according to the accuracy of the apparatus to be employed.
- the electrode pattern when printing the electrode pattern as an internal electrode layer on the surface of the ceramic green sheet which comprises MLCC, application
- the conductive powder suitable for forming the internal electrode layer of MLCC is not particularly limited, but those having an average particle diameter of 1 ⁇ m or less are suitable.
- the thickness is typically 0.05 ⁇ m to 0.8 ⁇ m, preferably 0.05 ⁇ m to 0.4 ⁇ m.
- the content of the conductive powder in the entire conductive paste composition disclosed herein is not particularly limited, but when the total of the total conductive paste composition is 100% by mass, the conductive powder is 40% by mass. % To 95% by mass, more preferably 40% to 60% by mass. When the conductive powder content in the produced conductive paste composition is within the above range, a conductive film having high conductivity and improved denseness can be formed.
- binder Any binder can be used as long as it can impart good viscosity and coating film forming ability (adhesiveness to the substrate) to the conductive paste composition, and those used in this type of conventional conductive paste composition. Can be used without particular limitation. Examples thereof include those mainly composed of acrylic resin, epoxy resin, phenol resin, alkyd resin, cellulose polymer, polyvinyl alcohol, rosin resin and the like.
- the organic solvent which is a characteristic configuration in the conductive paste composition disclosed herein contains isobornyl acetate as a main solvent and has a lower solubility parameter (HSP) of Hansen than isobornyl acetate as a secondary solvent.
- HSP solubility parameter
- Isobornyl acetate is a monoterpene oxygen-containing compound having a molecular formula of C 12 H 20 O 2 and may be conventionally used as an organic solvent for a conductive paste composition.
- isobornyl acetate alone has high solubility in butyral resins, and it is difficult to completely suppress the sheet attack phenomenon against ceramic green sheets and the like using butyral resins.
- the sheet attack property of this isobornyl acetate is suppressed by using an appropriate auxiliary solvent in combination.
- a co-solvent one or two or more of various solvents having a lower HSP than isobornyl acetate can be used. Since the HSP of isobornyl acetate is 19, the auxiliary solvent is exemplified to have an HSP of less than 19, more preferably about 15-18. More specifically, the auxiliary solvent is preferably one or more of the following (A) to (C).
- Turpineol derivative As the terpineol derivative in the present invention, in addition to terpineol itself, it is considered to have a structure in which at least one of the terminal hydrogen or hydroxy group in the molecular structure of terpineol is substituted with an organic group. it can. It is known that terpineol has four types of isomers, ⁇ , ⁇ , ⁇ , ⁇ -terpineol, which are different from the hydroxy group and the position of the double bond, and any of these terpineol is a derivative. May be.
- the ⁇ -terpineol derivative includes an ⁇ -terpineol derivative represented by the following general formula (2).
- R 21 , R 22 and R 23 each independently represent a hydrogen atom or an organic group, and at least one of R 21 , R 22 and R 23 is not a hydrogen atom.
- R 21 and R 22 in the general formula (2) are each an independent organic group, and are typically a hydrogen atom, an alkyl group, or an alkoxy group.
- the alkyl group is not particularly limited, but is preferably a linear or branched alkyl group having 1 to 14 carbon atoms, and more specifically a linear or branched alkyl group having 1 to 10 carbon atoms. Is preferred. Specific examples include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, an n-pentyl group, an isopentyl group, a neopentyl group, and an n-hexyl group.
- R 21 and R 22 are preferably a hydrogen atom or an alkyl group, and more preferably a hydrogen atom or a methyl group.
- R 23 in the general formula (2) is an organic group, and is typically a hydrogen atom, an alkyl group, an alkoxy group, or an acyl group.
- the alkyl group and alkoxy group may be the same as described above.
- the acyl group is typically a formyl group, methanoyl group, acetyl group, ethanoyl group, propionyl group, propanoyl group, benzoyl group or the like.
- Any of R 21 , R 22 , and R 23 must be an organic group.
- an organic acid ester of terpineol is preferable, and specific examples thereof include dihydroterpineol acetate, dihydroterpinylpropionate and the like.
- R 1 is a linear or branched alkyl group having 1 to 6 carbon atoms
- R 2 is a linear or branched alkylene group having 2 to 4 carbon atoms
- R 3 is a hydrogen atom or an acetyl group N is 1 or 2.
- the alkylene glycol monoalkyl compound is not particularly limited, and examples thereof include ethylene glycol monoalkyl ethers, diethylene glycol monoalkyl ethers, propylene glycol monoalkyl ethers, dipropylene glycol monoalkyl ethers, and tripropylene.
- Glycol monoalkyl ethers ethylene glycol dialkyl ethers, diethylene glycol dialkyl ethers, propylene glycol dialkyl ethers, dipropylene glycol dialkyl ethers, tripropylene glycol dialkyl ethers, tripropylene glycol trialkyl ethers, ethylene glycol monoalkyl ether Acetates, diethylene glycol monoalkyl ester Teracetates, propylene glycol monoalkyl ether acetates, dipropylene glycol monoalkyl ether acetates, tripropylene glycol monoalkyl ether acetates, tripropylene glycol trialkyl ether acetates, ethylene glycol dialkyl ether acetates, diethylene glycol dialkyl ether acetate , Propylene glycol dialkyl ether acetates, dipropylene glycol dialkyl ether acetates, and tripropylene glycol dialkyl ether acetates.
- ethylene glycol diethyl ether diethylene glycol dimethyl ether, diethylene glycol diethyl ether, ethylene glycol dibutyl ether, diethylene glycol monoethyl ether acetate, ethylene glycol monobutyl ether acetate, diethylene glycol monobutyl ether acetate and the like are exemplified.
- hydrocarbons examples include various linear or branched hydrocarbons having an HSP of less than 19, more preferably a linear saturated hydrocarbon. Such hydrocarbons preferably have a boiling point of about 185 to 270 ° C. at normal pressure, and more preferably have a boiling point of about 200 to 260 ° C. at normal pressure. Although not particularly limited, hydrocarbons having such properties are generally contained within 50% or more of the carbon number of 20 or less, typically 10 to 16 carbon atoms. For example, C 10 H 22, C 11 H 24, C 12 H 26, C 13 H 28, C 14 H 30, C 15 H 32, C 16 H 34.
- the proportion of isobornyl acetate is preferably 60% by mass to 90% by mass, and the proportion of the auxiliary solvent is preferably 40% by mass to 10% by mass. More preferably, isobornyl acetate is 70% by mass to 90% by mass, and the balance is a secondary solvent.
- the proportion of the organic solvent in the entire conductive paste composition is suitably 5% by mass or more and 60% by mass or less, and preferably 20% by mass or more and 60% by mass or less.
- the amount of the binder can be adjusted depending on the use of the conductive paste composition, etc., but as a rough guide, it is about 1% by mass to 15% by mass, preferably 1% by mass or more of the entire conductive paste composition.
- Such a configuration is preferable because, for example, it is easy to form (apply and print) a coating film having a uniform thickness as a conductive film on a printing material such as a green sheet, and the handling becomes easy.
- the conductive paste composition of the present invention is not strictly limited with respect to the other components and the blending ratio (amount) thereof.
- Various constituent materials that can exhibit desired characteristics, and additives such as dispersants that can be generally used in this type of conductive paste composition may be included.
- typical components other than the conductive powder include ceramic powder and glass powder. More specifically, it may be a fine powder of a ceramic raw material that constitutes an unfired ceramic green sheet that is a printed material of the conductive paste composition, a glass powder, or the like.
- Such an additive may be added simultaneously when the conductive powder is mixed with a binder, an organic solvent, or the like.
- the conductive paste composition disclosed herein can be easily prepared typically by mixing the above-described constituent materials, as in the conventional case. For example, using a three-roll mill or other kneader, the conductive powder, the binder and the organic solvent having a predetermined composition may be mixed and stirred. In mixing the conductive powder with other constituent materials, a binder and an organic solvent are mixed in advance to prepare a vehicle, and the conductive powder and the like are dispersed in the vehicle to form a slurry (ink-like). It may also be provided as a composition.
- Such a conductive paste composition has, for example, a sheet attack property suppressed while having affinity for a green sheet, and can be printed on a green sheet by various printing methods by adjusting to an appropriate viscosity or the like. Can do. For example, it can print suitably by printing methods, such as spray coating, roller coating, screen printing, gravure printing, offset printing, and inkjet printing. In particular, by printing by a gravure printing method, a high-quality print pattern can be printed by high-speed printing, and can be suitably applied to, for example, forming an internal electrode of a multilayer ceramic capacitor.
- Such a green sheet is not necessarily limited.
- a green sheet formed by bonding dielectric powders such as various ceramics with a binder made of a butyral resin may be considered as a preferable target. it can.
- a dielectric slurry is prepared by mixing a polyvinyl butyral resin as a binder and an organic solvent with a ceramic powder such as titanium oxide (TiO 2 ) or barium titanate (BaTiO 3 ).
- a ceramic powder such as titanium oxide (TiO 2 ) or barium titanate (BaTiO 3 ).
- the one formed into a sheet (green sheet) can be targeted.
- Such ceramic powder is not limited to the above example, and dielectric materials having various compositions can be considered.
- the green sheet may contain various additives such as a dispersant and a plasticizer used in the formation of this type of green sheet.
- Example 1 [Preparation of conductive paste composition]
- Conductive paste compositions (Samples 1 to 8) were prepared by the following procedure. That is, first, ethyl cellulose (EC) as a binder and isobornyl acetate (IBA) as a main solvent were mixed and stirred at 70 ° C. for 24 hours to prepare a vehicle. Next, a conductive paste composition (samples 1 to 8) was obtained by adding conductive powder, an additive and a co-solvent to this vehicle and thoroughly kneading with a three-roll mill.
- EC ethyl cellulose
- IBA isobornyl acetate
- the combinations of solvents shown in Table 1 below were blended so that the mass ratio of main solvent: sub-solvent was 70:30, and the viscosity of the conductive paste composition was 0.1 to 3 Pa. -It was made to be in the range of s.
- the solubility parameter (HSP) of Hansen of each auxiliary solvent is shown in Table 2 below.
- barium titanate (BaTiO 3 ) powder constituting the green sheet to which the conductive paste composition was applied (printed) was used as the additive.
- the conductive powder and the additive were blended in such a ratio that the conductive powder was 40 to 60% by mass and the additive was 1 to 20 parts by mass with respect to the entire paste composition.
- blended the main solvent and the subsolvent with the ratio shown in Table 1 in the ratio of 70:30 (mass ratio) was prepared for evaluation of the sheet attack property performed later.
- a ceramic green sheet was prepared as an application target of the conductive paste composition.
- a green sheet for a dielectric layer of MLCC is assumed, and a polyvinyl butyral resin as a binder, a plasticizer and an organic solvent are mixed with a barium titanate (BaTiO 3 ) powder as a dielectric powder.
- a dielectric slurry was prepared, and the dielectric slurry was applied on a support film, and then dried to remove the organic solvent, thereby forming a sheet.
- the conductive paste composition (samples 1 to 8) prepared above was applied to the surface of the ceramic green sheet by a gravure printing method and dried to form an electrode film (electrode pattern).
- the cross-sectional shape characteristics (film thickness, surface roughness, shape index) of the formed electrode pattern were measured by a laser displacement meter (manufactured by Keyence Co., Ltd.) to evaluate the printability.
- the measurement contents and evaluation results are shown in Table 1 below.
- the film thickness is an average value of the thickness from the surface of the green sheet to the surface of the electrode pattern measured at nine or more arbitrary measurement points of the electrode pattern
- the surface roughness is an arithmetic average roughness. Ra.
- the shape index is the length of the portion (lower base) where the electrode pattern is in contact with the green sheet in the cross-section in the width direction of the thin line portion of the electrode pattern (which may be a substantially rectangular or substantially trapezoidal sectional shape). Is a value defined as (b / a), where a is the length of the upper surface portion of the electrode pattern, and b is the length.
- the cross-sectional shape analysis image of the electrode pattern obtained from the electrically conductive paste composition of the samples 1 and 2 was shown to Fig.2 (a) and (b), respectively.
- the conductive paste compositions of Samples 2 to 4 using (d) isobornyl acetate as the main solvent of the organic solvent and (d) a solvent having a lower HSP than isobornyl acetate as the secondary solvent were all good. For example, looking at the cross-sectional shape of the electrode pattern formed from the paste of sample 2 in FIG. 2B, the film thickness at both ends of the electrode pattern is thicker and the shape index is higher than the electrode pattern of sample 1 in FIG. I was able to confirm. From the above, it was confirmed that the conductive paste compositions of Samples 2 to 4 were excellent in printability by gravure printing.
- the sheet attack property Although some sheet attack property was confirmed for the conductive paste composition of sample 4, the ceramic green sheet was hardly dissolved in the conductive paste compositions of samples 2 and 3. I could't see it. From the above, the conductive paste compositions of Samples 2 to 4 were “ ⁇ ” in the overall evaluation of printability and sheet attack.
- the conductive paste compositions of Samples 5 to 8 using (d) isobornyl acetate as the main solvent of the organic solvent and (d) a solvent having a higher HSP than isobornyl acetate as the sub-solvent
- the shape index was good, it was confirmed that the surface roughness was extremely rough and the paste was not suitable for printability by gravure printing. Moreover, it was confirmed that the sheet attack property deteriorates as the HSP of the secondary solvent increases. Therefore, in the conductive paste compositions of Samples 5 to 8, the overall evaluation of printability and sheet attack property was “x”.
- a conductive paste composition (Sample 9) was prepared by changing both the main solvent and the sub-solvent of the organic solvent. That is, as shown in Table 3 below, (c) dihydroterpinyl propionate having a smaller HSP was used as the main solvent in place of (d) isobornyl acetate, and (d) isobornyl was used as the secondary solvent.
- a conductive paste composition was prepared using (e) dihydroterpineol, which has a slightly higher HSP than nyl acetate, and thereafter in the same manner as in Embodiment 1 above.
- the conductive paste composition of Sample 9 was good in printability.
- the sheet attack property is a problem in a thin film ceramic sheet having a thickness of about 1 ⁇ m or less because the sheet cannot be torn but is dissolved.
- the conductive paste composition of Sample 9 uses (d) dihydroterpinylpropionate having a lower HSP than (d) isobornyl acetate as a main solvent, and general-purpose (e) dihydroterpineol as a co-solvent.
- ⁇ the conductive paste composition of Sample 2 showed good printability even in a finer print pattern, and the overall evaluation was “ ⁇ ”.
- a ceramic green sheet As a ceramic green sheet, a ceramic green sheet similar to that of Embodiment 1 and a ceramic green sheet using an acrylic resin as a binder are prepared, and the conductivity of Sample 2 prepared in Embodiment 1 is formed on the surface of these green sheets.
- the paste composition was applied by a gravure printing method and dried to form an electrode film (electrode pattern). In this gravure printing, a plate making different from those in the first and second embodiments is used. About the formed electrode pattern, it carried out similarly to Embodiment 1, and evaluated printability and sheet attack property. The evaluation results are shown in Table 4 below.
- the conductive paste composition of Sample 2 is good in both printability and sheet attack, and is made of various plate-making and ceramic green sheets using acrylic and butyral resins. In any case, it was confirmed that the product had excellent quality.
- Multilayer Ceramic Capacitor 20 Ceramic Green Sheet 30 Internal Electrode Layer 40 External Electrode
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Abstract
Description
なお、本出願は2012年11月6日に出願された日本国特許出願2012-244846号に基づく優先権を主張しており、その出願の全内容は本明細書中に参照として組み入れられている。
図1は、積層セラミックコンデンサ(以下、単に「MLCC」という場合がある。)の構造を説明する図である。MLCC10は、酸化チタンやチタン酸バリウム等のセラミックからなる誘電体層20と、ニッケル等の導電膜からなる内部電極層30とが多数積み重ねられたチップタイプのセラミックコンデンサであり、セラミック材料が持つ優れた高周波特性等のメリットを活かして小型化および大容量化の実現が可能なため、電子回路の広い範囲で使用されている。
ここで、従来より電子部品に広く一般に使用されている導電性ペースト組成物においては、ターピネオール等の有機溶剤が汎用されている。しかしながら、かかるターピネオールはブチラール系樹脂またはアクリル系樹脂に対する溶解性が強いことから、MLCC10の内部電極層30を形成するために使用する導電性ペースト組成物に用いるのに適しているとは言い難い。そのため、MLCC10の内部電極層30を形成用の導電性ペースト組成物においては、ターピネオールに代えて、グリーンシートに対する親和性と、シートアタックの抑制効果とが両立された有機溶剤を使用することが提案されている(例えば、特許文献1~5等参照)。
例えば、MLCCの寸法は、1005サイズ(外形寸法:1.0mm×0.5mm×0.5mm)であったものが、0603サイズ(外形寸法:0.6mm×0.3mm×0.3mm)や、0402サイズ(外形寸法:0.4mm×0.2mm×0.2mm)等へと超小型化されてきており、かかる超小型のMLCCにおける誘電体層の一層の厚みは、従来の3μm~5μmのレベルから、例えば3μm未満、さらには1μm以下と、薄層化されている。また、従来の外形寸法の比較的大きいMLCCにおいても、その寸法を保ったまま内部の積層数を増加させて高容量化することがなされており、誘電体層の一層の厚みはやはり1μm未満のレベルまで薄層化されつつある。
したがって、MLCCの製造においては、より高い印刷精度を得ることと共に、より薄いセラミックグリーンシートに対してもシートアタック性の問題の生じない導電性ペースト組成物の実現が望まれている。
これに対し、本発明においては、導電性ペースト組成物の有機溶剤として、このイソボルニルアセテートを主溶剤とし、当該イソボルニルアセテートよりもハンセンの溶解度パラメータが低い溶剤を副溶剤とし、両者を併用することで、イソボルニルアセテートのセラミックグリーンシートに対するシートアタックを抑制するようにしている。
なお、上記「ブチラール系樹脂」とは、この種の分野でセラミックグリーンシートを形成するためのバインダとして用いられる、いわゆるブチラール系樹脂等と呼ばれている、ポリビニルブチラール系樹脂全般を包含する用語である。かかるポリビニルブチラール系樹脂とは、ポリビニルブチラールを50質量%以上(例えば、70質量%以上)の割合で含む樹脂組成物を意味する。
イソボルニルアセテートのHSPは19.0(J/cm3)1/2であり、本発明では、HSPが19.0(J/cm3)1/2未満の溶剤を副溶剤として用いることができる。このようなHSPは、例えば、Wesley L.Archer著、Industrial Solvents Handbook等に開示された値を参照することができる。
かかる構成によると、イソボルニルアセテートを主溶剤とした導電性ペースト組成物において、セラミックグリーンシートに対する親和性と、シートアタックの抑制効果とをバランスよく実現することができる。
(A)ターピネオール誘導体、
(B)下記の一般式(1)で示される化合物、
R1(OR2)nOR3・・・(1)
(ただし、式中、R1は水素原子または炭素数1~6の直鎖または分岐鎖のアルキル基、R2は炭素数2~4の直鎖若しくは分岐鎖のアルキレン基、R3は水素原子,アセチル基または直鎖若しくは分岐鎖のアルキル基を示し、nは1または2である。)
および、
(C)炭化水素、
のうちの何れか1種または2種以上を含むことを特徴としている。
上記の(A)~(C)の溶剤のうち、HSPが19.0(J/cm3)1/2未満のものは、HSPのベクトルの相関関係から、主溶剤であるイソボルニルアセテートのセラミックグリーンシートに対するシートアタック性を効果的に抑制できる溶剤であり得る。したがって、副溶剤として上記の溶剤を用いることで、セラミックグリーンシートとの親和性を備え、且つシートアタックがより効果的に抑制された導電性ペースト組成物が提供される。
これらニッケル、白金、パラジウム、銀および銅は、いずれも導電性に優れるとともに、例えばセラミックグリーンシートの焼成温度において耐熱性を有する金属種であり、導電性粉末として相応しい。また、これらの金属種を含む合金および各種導電性金属化合物も導電性粉末として相応しい特性を備えたものであり得る。かかる構成によると、例えば、積層セラミックコンデンサの内部電極を形成するに好適な導電性ペースト組成物が提供される。
本発明の導電性ペースト組成物は、セラミックグリーンシートを被印刷体とする印刷において、シートに対する適度な馴染みを有しながらも、シートアタック性が抑制されているため、各種の印刷法に適用することができる。例えば、スクリーン印刷法では困難とされる、より厚みの薄い導電性塗膜をより高精度で生産性良く印刷することができるグラビア印刷法に好適に適用することができる。
ここで開示される導電性ペースト組成物は、本質的に、導電性粉末と、バインダと、有機溶剤とを含んでいる。ここで導電性粉末は、典型的にはバインダと有機溶剤とで構成されるビヒクル(有機媒体)に均一に分散されている。
導電性粉末は、導電性ペースト組成物を焼成した後に得られる焼成体(典型的には導電性膜)の導電性を担う物質である。かかる導電性粉末の種類等について特に制限はなく、目的の導電性ペースト組成物に従来用いられている各種の導電性粉末を特に制限なく用いることができる。
かかる導電性ペースト組成物は、電極層形成用、印刷回路用、接合用、抵抗体用、異方導電性インク用等の様々な用途であってよく、かかる導電性粉末を構成する材料の一例としては、金(Au),銀(Ag),銅(Cu),白金(Pt),パラジウム(Pd),ルテニウム(Ru),ロジウム(Rh),イリジウム(Ir),オスミウム(Os),ニッケル(Ni)およびアルミニウム(Al)等の金属およびそれらの合金、カーボンブラック等の炭素質材料、LaSrCoFeO3系酸化物(例えばLaSrCoFeO3)、LaMnO3系酸化物(例えばLaSrGaMgO3)、LaFeO3系酸化物(例えばLaSrFeO3)、LaCoO3系酸化物(例えばLaSrCoO3)等として表わされる遷移金属ペロブスカイト型酸化物に代表される導電性セラミックス等が例示される。特に限定されるものではないが、この導電性ペースト組成物を例えばMCLLの内部電極層を形成する目的で用いる場合には、焼成温度においても溶融することが無い、ニッケル(Ni)、白金(Pt)、パラジウム(Pd)、銀(Ag)および銅(Cu)のいずれか1種または2種以上の金属種から構成されていることが好ましい。なお、これらの導電性粉末は、本発明の導電性ペースト組成物の特性を損ねない範囲で不純物を含むものであっても良いことは言うまでもない。
バインダとしては、導電性ペースト組成物に良好な粘性、塗膜形成能(基板に対する付着性)を付与し得るものであればよく、従来のこの種の導電性ペースト組成物に用いられているものを特に制限なく使用することができる。例えば、アクリル系樹脂、エポキシ系樹脂、フェノール系樹脂、アルキド系樹脂、セルロース系高分子、ポリビニルアルコール、ロジン系樹脂等を主体とするものが挙げられる。
ここに開示される導電性ペースト組成物において特徴的な構成である有機溶剤は、主溶剤としてイソボルニルアセテートを含むとともに、副溶剤としてイソボルニルアセテートよりもハンセンの溶解度パラメータ(HSP)が低い溶剤を含む。
イソボルニルアセテートは、分子式がC12H20O2のモノテルペンの含酸素化合物であって、従来より導電性ペースト組成物の有機溶剤として用いられることがある。しかしながら、かかるイソボルニルアセテートは単独ではブチラール系樹脂に対する溶解性が高く、ブチラール系樹脂を用いたセラミックグリーンシート等に対するシートアタック現象を完全に抑制することは困難であることが知られている。そこで、本発明では、このイソボルニルアセテートのシートアタック性を、適切な副溶剤を併用することで抑えるようにしている。
かかる副溶剤としては、イソボルニルアセテートよりもHSPが低い各種の溶剤の一種または二種以上を組み合わせて使用することができる。イソボルニルアセテートのHSPは19であることから、副溶剤としては、HSPが19未満、より好ましくは15~18程度であることが例示される。より具体的には、副溶剤としては、下記(A)~(C)のうちの何れか1種または2種以上であるのが好ましい。
本発明におけるターピネオール誘導体としては、ターピネオールそれ自体の他に、ターピネオールの分子構造における末端の水素あるいはヒドロキシ基の少なくとも一つが有機基に置換された構造を有するものを考慮することができる。ターピネオールにはヒドロキシ基と二重結合の位置が異なる4種類の異性体、α,β,γ,δ-ターピネオールが存在することが知られているが、これら何れのターピネオールを主体とする誘導体であっても良い。例えば、α-ターピネオールの誘導体については、下記一般式(2)で表されるα-ターピネオール誘導体が挙げられる。
アルキル基としては、特に制限されるものではないが、炭素数1~14の直鎖または分岐鎖のアルキル基が好ましく、より限定的には炭素数1~10の直鎖または分岐鎖のアルキル基が好ましい。具体的には、例えば、メチル基、エチル基、n-プロピル基、イソプロピル基、n-ブチル基、n-ペンチル基、イソペンチル基、ネオペンチル基、n-ヘキシル基等が挙げられる。
アルコキシ基としては、特に制限されるものではないが、例えば、メトキシ基、エトキシ基、プロポキシ基、ブトキシ基等が挙げられる。
これらのなかでも、R21,R22としては、水素原子またはアルキル基であるのが好ましく、水素原子またはメチル基であるのがより好ましい。
R21,R22,R23については、いずれかが有機基であることが必須である。
かかるターピネオール誘導体としては、ターピネオールの有機酸エステルが好ましく、例えば、具体的には、ジヒドロターピネオールアセテート、ジヒドロターピニルプロピオネート等が例示される。
副溶剤としては、下記の一般式(1)で示されるアルキレングリコール系化合物のうち、HSPが19未満のものが挙げられる。
R1(OR2)nOR3・・・(1)
ここで、式中、R1は炭素数1~6の直鎖または分岐鎖のアルキル基、R2は炭素数2~4の直鎖若しくは分岐鎖のアルキレン基、R3は水素原子またはアセチル基を示し、nは1または2である。
炭化水素としては、HSPが19未満の各種の直鎖または分岐の炭化水素が挙げられ、より好ましくは直鎖の飽和炭化水素である。かかる炭化水素としては、常圧での沸点が185~270℃程度であるものがより好ましく、さらに好ましくは常圧での沸点が200~260℃程度のものが例示される。特に限定されるものではないが、この様な性状の炭化水素は、概ね全体の50%以上のものの炭素数が20以下、典型的には炭素数が10~16の中に包含されている。例えば、C10H22、C11H24、C12H26、C13H28、C14H30、C15H32、C16H34が挙げられる。
かかる有機溶剤が導電性ペースト組成物全体に占める割合は、5質量%以上60質量%以下であるのが適当であり、好ましくは20質量%以上60質量%以下である。また、バインダは、導電性ペースト組成物の用途等によりその配合量が調整できるものの、おおよその目安として、導電性ペースト組成物全体の1質量%以上15質量%以下程度、好ましくは1質量%以上10質量%以下程度より好ましくは1質量%以上7質量%以下程度の割合で含むことができる。かかる構成とすることで、例えばグリーンシート等の被印刷体上に導電性膜として均一な厚さの塗膜を形成(塗布、印刷)し易く、取扱いが容易となるために好ましい。
導電性粉末以外に含まれる典型的な成分としては、セラミック粉末や、ガラス粉末などが例示される。より具体的には、導電性ペースト組成物の被印刷体である未焼成のセラミックグリーンシートを構成するセラミック原料の微粉末や、ガラス粉末等であり得る。このような添加物は、例えば、導体性粉末をバインダや有機溶剤等と混合する際に同時に添加すれば良い。
(実施態様1)
[導電性ペースト組成物の用意]
以下の手順で、導電性ペースト組成物(サンプル1~8)を作製した。
すなわち、まず、バインダとしてのエチルセルロース(EC)と主溶剤としてのイソボルニルアセテート(IBA)を混合し、70℃で24時間撹拌することでビヒクルを調製した。次いで、このビヒクルに、導電性粉末、添加剤および副溶剤を加え、三本ロールミルにて十分に混練することで導電性ペースト組成物(サンプル1~8)を得た。なお、副溶剤としては、下記の表1に示す組み合わせの溶剤を、質量比で主溶剤:副溶剤が70:30となるように配合し、導電性ペースト組成物の粘度が0.1~3Pa・sの範囲となるようにした。なお、各副溶剤のハンセンの溶解度パラメータ(HSP)を下記の表2に示した。
なお、後で行うシートアタック性の評価のために、表1に示す組み合わせで主溶剤と副溶剤とを70:30(質量比)の割合で配合した溶剤を用意した。
上記の導電性ペースト組成物の塗布対象として、セラミックグリーンシートを用意した。かかるセラミックグリーンシートとしてはMLCCの誘電体層用のグリーンシートを想定し、誘電体粉末としてのチタン酸バリウム(BaTiO3)粉末に、バインダとしてのポリビニルブチラール樹脂と、可塑剤および有機溶媒を混合した誘電体スラリーを調製し、この誘電体スラリーを支持フィルム上に塗布後、乾燥させて有機溶媒を除去することで、シート状に成形した。
上記で用意した導電性ペースト組成物(サンプル1~8)を、上記のセラミックグリーンシートの表面にグラビア印刷法により塗布し、乾燥させることで、電極膜(電極パターン)を形成した。形成された電極パターンの断面形状特性(膜厚、表面粗さ、形状指数)をレーザー変位計((株)キーエンス社製)によって測定し、印刷性の評価を行った。測定内容と評価結果は、下記の表1に示した。
なお、表1において、膜厚は、電極パターンの9箇所以上の任意の測定点において測定したグリーンシートの表面から電極パターン表面までの厚さの平均値であり、表面粗さは、算術平均粗さRaである。また、形状指数とは、電極パターンの細線部の幅方向断面(略方形ないし略台形の断面形状であり得る。)における、電極パターンがグリーンシートと接触している部分(下底)の長さをa、電極パターンの上面部分の長さをbとしたときの、(b/a)として定義される値である。
また、サンプル1および2の導電性ペースト組成物から得られた電極パターンの断面形状解析像を、図2(a)および(b)にそれぞれ示した。
導電性ペースト組成物をセラミックグリーンシート上に印刷すると、導電性ペースト組成物に含まれる有機溶剤がセラミックグリーンシートに含まれるバインダを溶解するシートアタックと呼ばれる現象が生じ、電極パターンがセラミックグリーンシートに滲んだり、セラミックグリーンシートとの接触面を溶かしてしまうことがある。そこで、セラミックグリーンシートに、上記で用意したシートアタック性の評価のための溶剤を滴下し、乾燥後の滴下部を目視で観察することでシートアタック性を評価して、その結果を表1に併せて示した。表1における評価結果は、セラミックグリーンシートの表面が明らかに溶解しておりシートが破れたものを「×」、セラミックグリーンシートの表面に溶解が認められるもののシートは破れないものを「△」、セラミックグリーンシートの表面に溶解がほぼ認められないものを「○」とした。
また、シートアタック性については、サンプル4の導電性ペースト組成物については、若干のシートアタック性が確認されたものの、サンプル2および3の導電性ペースト組成物については、セラミックグリーンシートの溶解が殆ど見られなかった。以上のことから、サンプル2~4の導電性ペースト組成物は、印刷性およびシートアタック性の総合的な評価が「○」であった。
有機溶剤の主溶剤と副溶剤をいずれも変えて、導電性ペースト組成物(サンプル9)を作製した。すなわち、下記の表3に示したように、主溶剤として(d)イソボルニルアセテートに代えてHSPのより小さい(c)ジヒドロターピニルプロピオネートを用い、副溶剤として(d)イソボルニルアセテートよりもHSPがわずかに大きい(e)ジヒドロターピネオールを用い、後は上記の実施態様1の場合と同様にして、導電性ペースト組成物を調製した。
このサンプル9の導電性ペースト組成物と、実施態様1で作製したサンプル2の導電性ペースト組成物を、実施態様1と同様のセラミックグリーンシートの表面にグラビア印刷法により塗布し、乾燥させることで、電極膜(電極パターン)を形成した。このグラビア印刷においては実施態様1とは異なる製版を用いて形成された電極パターンについて、実施態様1と同様にして、印刷性およびシートアタック性の評価を行った。この実施態様2で用いた製版は、実施態様1の製版よりも、膜厚が薄く形状指数が高い印刷体が得られる製版である。評価結果を、下記の表3に示した。
これに対し、サンプル2の導電性ペースト組成物は、より微細な印刷パターンにおいても良好な印刷性を示し、総合的な評価は「○」であった。
セラミックグリーンシートとして、実施態様1と同様のセラミックグリーンシートと、バインダとしてアクリル系樹脂を用いたセラミックグリーンシートとを用意し、これらのグリーンシートの表面に実施態様1で作製したサンプル2の導電性ペースト組成物をグラビア印刷法により塗布し、乾燥させることで、電極膜(電極パターン)を形成した。このグラビア印刷においては実施態様1および2とは異なる製版を用いている。形成された電極パターンについて、実施態様1と同様にして、印刷性およびシートアタック性の評価を行った。評価結果を、下記の表4に示した。
20 セラミックグリーンシート
30 内部電極層
40 外部電極
Claims (6)
- 導電性粉末と、バインダと、有機溶剤とを含む導電性ペースト組成物であって、
前記有機溶剤は、
主溶剤としてイソボルニルアセテートと、
副溶剤として前記イソボルニルアセテートよりもハンセンの溶解度パラメータが低い溶剤と、
を含む、導電性ペースト組成物。 - 前記有機溶剤は、前記イソボルニルアセテートを60質量%~90質量%、前記副溶剤を40質量%~10質量%の割合で含む、請求項1に記載の導電性ペースト組成物。
- 前記副溶剤が、ハンセンの溶解度パラメータが19未満であって、かつ、
(A)ターピネオール誘導体、
(B)下記の一般式(1)で示される化合物、
R1(OR2)nOR3・・・(1)
(ただし、式中、R1は水素原子または炭素数1~6の直鎖または分岐鎖のアルキル基、R2は炭素数2~4の直鎖若しくは分岐鎖のアルキレン基、R3は水素原子,アセチル基または直鎖若しくは分岐鎖のアルキル基を示し、nは1または2である。)
および、
(C)炭化水素、のうちの何れか1種または2種以上を含む、請求項1または2に記載の導電性ペースト組成物。 - 前記導電性粉末を構成する金属種が、ニッケル、白金、パラジウム、銀および銅からなる群から選択されるいずれか1種または2種以上である、請求項1~3の何れか1項に記載の導電性ペースト組成物。
- スプレー塗布、ローラー塗布、スクリーン印刷、グラビア印刷、オフセット印刷およびインクジェット印刷からなる群から選択されるいずれか1つの印刷法に用いられるように調製されている、請求項1~4の何れか1項に記載の導電性ペースト組成物。
- 積層セラミックコンデンサの内部電極を形成するために用いられるように調製されている、請求項1~5の何れか1項に記載の導電性ペースト組成物。
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WO2021106470A1 (ja) * | 2019-11-29 | 2021-06-03 | 住友金属鉱山株式会社 | グラビア印刷用導電性ペースト、電子部品、及び積層セラミックコンデンサ |
WO2022255467A1 (ja) * | 2021-06-02 | 2022-12-08 | 住友金属鉱山株式会社 | グラビア印刷用導電性ペースト、電子部品、及び積層セラミックコンデンサ |
JP7567285B2 (ja) | 2020-08-25 | 2024-10-16 | artience株式会社 | 成形フィルム用導電性組成物、成形フィルムおよびその製造方法、成形体およびその製造方法 |
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JP6967845B2 (ja) * | 2016-09-27 | 2021-11-17 | 株式会社ノリタケカンパニーリミテド | 銀ペーストおよび電子素子 |
JP6939015B2 (ja) * | 2017-03-29 | 2021-09-22 | 住友金属鉱山株式会社 | 積層セラミックコンデンサ内部電極用のグラビア印刷用導電性ペースト |
JP6853606B2 (ja) * | 2017-08-10 | 2021-03-31 | 株式会社ノリタケカンパニーリミテド | 導電性ペースト |
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CN105321711B (zh) * | 2014-07-31 | 2018-11-16 | 住友金属矿山株式会社 | 导电浆料 |
CN111868841A (zh) * | 2018-04-19 | 2020-10-30 | 东洋油墨Sc控股株式会社 | 成形膜用导电性组合物、成形膜、成形体及其制造方法 |
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KR20150083097A (ko) | 2015-07-16 |
TWI601793B (zh) | 2017-10-11 |
KR102092990B1 (ko) | 2020-03-24 |
JP5890036B2 (ja) | 2016-03-22 |
CN104769044B (zh) | 2017-03-08 |
JPWO2014073530A1 (ja) | 2016-09-08 |
TW201431982A (zh) | 2014-08-16 |
CN104769044A (zh) | 2015-07-08 |
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