WO2011125282A1 - シリコンエピタキシャルウェーハ及びその製造方法、並びに貼り合わせsoiウェーハ及びその製造方法 - Google Patents
シリコンエピタキシャルウェーハ及びその製造方法、並びに貼り合わせsoiウェーハ及びその製造方法 Download PDFInfo
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- WO2011125282A1 WO2011125282A1 PCT/JP2011/001175 JP2011001175W WO2011125282A1 WO 2011125282 A1 WO2011125282 A1 WO 2011125282A1 JP 2011001175 W JP2011001175 W JP 2011001175W WO 2011125282 A1 WO2011125282 A1 WO 2011125282A1
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 159
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 157
- 239000010703 silicon Substances 0.000 title claims abstract description 156
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 30
- 239000013078 crystal Substances 0.000 claims abstract description 72
- 239000000758 substrate Substances 0.000 claims abstract description 62
- 239000002019 doping agent Substances 0.000 claims abstract description 49
- 238000000034 method Methods 0.000 claims description 28
- 229910052698 phosphorus Inorganic materials 0.000 claims description 17
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical group [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 16
- 239000011574 phosphorus Substances 0.000 claims description 16
- 239000012808 vapor phase Substances 0.000 claims description 10
- 238000001947 vapour-phase growth Methods 0.000 claims description 10
- 235000012431 wafers Nutrition 0.000 description 170
- 230000000052 comparative effect Effects 0.000 description 20
- 230000007547 defect Effects 0.000 description 17
- 239000007789 gas Substances 0.000 description 13
- 238000010438 heat treatment Methods 0.000 description 7
- 238000005468 ion implantation Methods 0.000 description 6
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 5
- 239000012298 atmosphere Substances 0.000 description 4
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000005498 polishing Methods 0.000 description 4
- 125000004429 atom Chemical group 0.000 description 3
- 230000002950 deficient Effects 0.000 description 3
- 238000002513 implantation Methods 0.000 description 3
- 230000001590 oxidative effect Effects 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- 229910052787 antimony Inorganic materials 0.000 description 2
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 2
- 229910052785 arsenic Inorganic materials 0.000 description 2
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 230000003111 delayed effect Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- -1 hydrogen ions Chemical class 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 125000004437 phosphorous atom Chemical group 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 208000012766 Growth delay Diseases 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000032798 delamination Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000002050 diffraction method Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000007429 general method Methods 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 150000003017 phosphorus Chemical class 0.000 description 1
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02373—Group 14 semiconducting materials
- H01L21/02381—Silicon, silicon germanium, germanium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/02433—Crystal orientation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02524—Group 14 semiconducting materials
- H01L21/02532—Silicon, silicon germanium, germanium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/0257—Doping during depositing
- H01L21/02573—Conductivity type
- H01L21/02576—N-type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
- H01L21/76251—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques
- H01L21/76254—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques with separation/delamination along an ion implanted layer, e.g. Smart-cut, Unibond
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78603—Thin film transistors, i.e. transistors with a channel being at least partly a thin film characterised by the insulating substrate or support
Definitions
- the present invention relates to a silicon epitaxial wafer in which a silicon epitaxial layer is formed on the main surface of a silicon single crystal substrate, a manufacturing method thereof, a bonded SOI wafer, and a manufacturing method thereof.
- a silicon single crystal substrate used as a semiconductor substrate is manufactured by, for example, slicing, chamfering, lapping, etching, mirror polishing, and the like on a silicon single crystal ingot pulled up by a CZ (Czochralski) method.
- a method of vapor-phase growth of the silicon epitaxial layer by supplying silicon raw material to the main surface of the silicon single crystal substrate under a high temperature condition is also used.
- a silicon epitaxial wafer hereinafter sometimes simply referred to as an epitaxial wafer
- unevenness is formed on the surface depending on conditions, thereby deteriorating device characteristics.
- Patent Document 1 proposes a technique for controlling the crystallographic step density of the main surface of a silicon single crystal substrate to be epitaxially grown to about 10 10 pieces / cm 2 or less.
- Patent Document 2 proposes a method for reducing irregularities called haze by defining the angle range of the crystal axis with respect to the surface of the silicon single crystal substrate.
- Patent Document 3 when an epitaxial silicon layer is grown on a silicon single crystal substrate having a defect called COP (Crystal Originated Particle), in order to prevent unevenness called tear drop from occurring, A technique for defining an angle range of a crystal axis with respect to a crystal substrate surface has been proposed.
- COP Crystal Originated Particle
- the present invention has been made in view of the above problems, and is a case where an epitaxial layer having a high dopant concentration of 1 ⁇ 10 19 / cm 3 or more is formed on the main surface of a silicon single crystal substrate.
- Another object of the present invention is to provide a silicon epitaxial wafer in which striped irregularities on the surface of the epitaxial layer are suppressed, a manufacturing method thereof, a bonded SOI wafer using the silicon epitaxial wafer, and a manufacturing method thereof. .
- the present invention provides a silicon epitaxial wafer obtained by vapor-phase growth of a silicon epitaxial layer on the main surface of a silicon single crystal substrate, the main surface of the silicon single crystal substrate having a [100] axis. With respect to the (100) plane, it is inclined by an angle ⁇ in the [011] direction or [0-1-1] direction, and is inclined by an angle ⁇ in the [01-1] direction or [0-11] direction.
- a silicon epitaxial wafer characterized in that ⁇ and angle ⁇ are less than 10 ′, and the dopant concentration of the silicon epitaxial layer is 1 ⁇ 10 19 / cm 3 or more.
- the main surface of the silicon single crystal substrate is tilted only in a specific direction substantially from the (100) plane (in the [011] direction or [0-1] from the (100) plane with respect to the [100] axis. -1] incline by an angle ⁇ , and incline by an angle ⁇ in the [01-1] direction or the [0-11] direction so that the angle ⁇ and the angle ⁇ are less than 10 ′)
- the dopant may be phosphorus.
- the silicon single crystal substrate has a main surface with respect to the [100] axis. Inclined from the (100) plane by the angle ⁇ in the [011] direction or the [0-1-1] direction, and inclined by the angle ⁇ in the [01-1] direction or the [0-11] direction.
- a silicon epitaxial characterized in that a silicon single crystal substrate having an angle ⁇ of less than 10 ′ is used, and an epitaxial layer having a dopant concentration of 1 ⁇ 10 19 / cm 3 or more is vapor-phase grown on the main surface of the silicon single crystal substrate.
- a method for manufacturing a wafer is provided.
- the dopant can be phosphorus.
- the silicon epitaxial wafer manufactured by the above method is used as the bond wafer and / or the base wafer.
- a method for manufacturing a bonded SOI wafer characterized by manufacturing a bonded SOI wafer.
- the silicon epitaxial wafer manufactured by the above method is used as a bond wafer, a bonded SOI wafer having an SOI layer having a high concentration (dopant concentration of 1 ⁇ 10 19 / cm 3 or more) can be manufactured. it can.
- a bonded SOI wafer having a high concentration layer (epitaxial layer) immediately below the insulating film (buried oxide film) can be manufactured.
- the silicon epitaxial wafer manufactured by the above method can be used for both the bond wafer and the base wafer.
- a bonded SOI wafer in which at least a buried oxide film and an SOI layer are sequentially formed on the base wafer, and the dopant concentration of the SOI layer is 1 ⁇ 10 19 / cm 3 or more.
- the SOI layer main surface is inclined by an angle ⁇ in the [011] direction or the [0-1-1] direction from the (100) plane with respect to the [100] axis, and the [01-1] direction or [
- the bonded SOI wafer is characterized in that it is inclined by an angle ⁇ in the 0-11] direction, and the angle ⁇ and the angle ⁇ are less than 10 ′.
- Such a bonded SOI wafer of the present invention is a bonded SOI wafer having a high-concentration SOI layer having a dopant concentration of 1 ⁇ 10 19 / cm 3 or more, and further improved adhesion at the bonding interface. As a result, a high-quality bonded SOI wafer in which the occurrence of defects due to poor bonding is suppressed is obtained.
- the base wafer is a silicon epitaxial wafer obtained by vapor-phase-growing a silicon epitaxial layer having a dopant concentration of 1 ⁇ 10 19 / cm 3 or more on a silicon single crystal substrate, and the main surface of the silicon epitaxial wafer is [ Inclined by the angle ⁇ in the [011] direction or [0-1-1] direction from the (100) plane with respect to the [100] axis, and inclined by the angle ⁇ in the [01-1] direction or [0-11] direction.
- the angle ⁇ and the angle ⁇ can be less than 10 ′.
- the base wafer is the silicon epitaxial wafer, it can have a high-concentration layer (epitaxial layer) immediately below the buried oxide film, and can further adhere to the bonding interface of the bonded SOI wafer.
- the occurrence of defects in the bonded SOI wafer is greatly suppressed.
- a bonded SOI wafer in which at least a buried oxide film and an SOI layer are sequentially formed on the base wafer, the base wafer having a dopant concentration of 1 ⁇ 10 19 on a silicon single crystal substrate.
- a silicon epitaxial wafer obtained by vapor phase growth and the main surface of the silicon epitaxial wafer has a [011] direction or [0-1-] from the (100) plane with respect to the [100] axis. 1) Inclined by an angle ⁇ in the direction, and inclined by an angle ⁇ in the [01-1] direction or the [0-11] direction, and the angle ⁇ and the angle ⁇ are less than 10 ′
- An SOI wafer is provided.
- Such a bonded SOI wafer of the present invention becomes a bonded SOI wafer having a high-concentration layer (epitaxial layer) directly under the buried oxide film, and the adhesion at the bonding interface is further improved. This results in a high-quality bonded SOI wafer in which the occurrence of defects due to poor alignment is suppressed.
- the dopant may be phosphorus.
- an epitaxial wafer in which an epitaxial layer having a high dopant concentration of 1 ⁇ 10 19 / cm 3 or more is formed on the main surface of a silicon single crystal substrate. It is possible to provide a silicon epitaxial wafer in which the striped unevenness is suppressed and a method for manufacturing the same.
- a bonded SOI wafer having a high-quality, high-concentration (dopant concentration of 1 ⁇ 10 19 / cm 3 or more) SOI layer in which generation of defects is suppressed, or an insulating film (buried oxide) It is possible to provide a bonded SOI wafer having a high concentration layer (epitaxial layer) directly under the film) and a method for manufacturing these.
- (A) is a display with the Miller index indicating the [0-1-1] direction
- (b) is a display with the Miller index indicating the [01-1] direction
- (c) is a display with the [0-11] direction. It is the display by the Miller index which shows.
- It is a longitudinal section showing a silicon epitaxial wafer concerning the present invention. It is a figure for demonstrating the inclination (off angle) of the main surface of a silicon single crystal substrate. It is a figure which shows the inclination range of the main surface of a silicon single crystal substrate. It is explanatory drawing of silicon epitaxial growth in case dopant concentration is low. It is explanatory drawing of silicon epitaxial growth in case dopant concentration is high.
- the main surface of the silicon single crystal substrate is substantially specified from the (100) plane. Even if the epitaxial layer is formed on the main surface of the silicon single crystal substrate under the condition that the dopant concentration is 1 ⁇ 10 19 / cm 3 or more by adjusting so as to have a certain inclination only in the direction, It was found that the unevenness was suppressed.
- the silicon epitaxial wafer of the present invention is a silicon epitaxial wafer obtained by vapor-phase growth of a silicon epitaxial layer on the main surface of a silicon single crystal substrate, and the main surface of the silicon single crystal substrate is in relation to the [100] axis.
- the angle ⁇ and the angle ⁇ is less than 10 ′, and the dopant concentration of the silicon epitaxial layer is 1 ⁇ 10 19 / cm 3 or more.
- the [0-1-1] direction, the [01-1] direction, and the [0-11] direction are directions shown in FIGS.
- the main surface of the silicon single crystal substrate is off-angled by an angle ⁇ from the (100) plane to the [011] direction or the [0-1-1] direction with respect to the [100] axis, and [ [01-1] or [0-11] direction is off-angled by an angle ⁇ , and the off-angle angle ⁇ and the off-angle angle ⁇ are less than 10 ′, so that silicon is formed on the main surface of the silicon single crystal substrate.
- the dopant concentration of the silicon epitaxial layer is 1 ⁇ 10 19 / cm 3 or more when the epitaxial layer is vapor-phase grown, unevenness on the surface of the epitaxial layer is greatly suppressed.
- FIG. 2 is a longitudinal sectional view showing the silicon epitaxial wafer of the present invention.
- a silicon epitaxial wafer W includes a silicon single crystal substrate 1 in which a silicon epitaxial layer 2 having a dopant concentration of 1 ⁇ 10 19 / cm 3 or more is vapor-grown on a main surface 1a. .
- the main surface 1a of the silicon single crystal substrate 1 is adjusted so as to have a constant inclination (off angle) substantially only in a specific direction from the (100) plane.
- the off-angle of the main surface 1a of the silicon single crystal substrate 1 will be described with reference to FIG.
- one point in the (100) plane 3 is defined as an O point. Further, crystal axes [011], [0-1-1], [01-1], and [0-11] passing through the O point are taken in the (100) plane 3. Further, a rectangular parallelepiped 4 is arranged in the (100) plane 3. More specifically, the rectangular parallelepiped 4 is placed by placing one vertex of the rectangular parallelepiped 4 at the point O and making the three sides gathered at this vertex coincide with the [011] [01-1] and [100] axes.
- the inclination angle (off-angle angle) between the diagonal lines OA and OB of the side faces 5 and 6 of the rectangular parallelepiped 4 and the [100] axis is the angle ⁇ and the angle ⁇
- the crystal substrate 1 has a main surface 1a inclined with respect to the [100] axis from the (100) plane in the [011] direction by an angle ⁇ and in the [01-1] direction by an angle ⁇ . These angles ⁇ and ⁇ are both less than 10 ′ as shown in FIG.
- a silicon atom layer is stacked by fixing silicon atoms at step positions as shown in FIG. In this case, as shown in FIG. 5B, the height of the step is maintained for one atom and does not become extremely large even when the lamination proceeds.
- the concentration of the dopant (for example, phosphorus) in the epitaxial layer is 1 ⁇ 10 19 / cm 3 or more
- the concentration of phosphorus is as high as 1 ⁇ 10 19 / cm 3 or more
- the probability that phosphorus atoms stick to the step position increases as shown in FIG.
- the sticking of silicon is inhibited and the growth is temporarily delayed.
- the density of steps is high, the next step catches up during this delay, and a step having a level difference of two atoms is formed.
- the step for two atoms the number of silicon atoms required for growth is doubled as compared to the one-atom step, and the growth movement of the step is delayed. Therefore, when such an abnormal step is formed, as shown in FIG. 6C, one atomic step catches up one after another, and the step becomes larger. When this phenomenon occurs in a plurality of places, the irregularities on the main surface as shown in FIG. Such a phenomenon also occurs in dopants (antimony, arsenic, boron) other than phosphorus.
- dopants antimony, arsenic, boron
- the density of crystallographic atomic steps on the main surface of the silicon single crystal substrate for epitaxial growth is reduced.
- the effect in this case will be described with reference to FIG.
- the density of steps is low, as shown in FIG. 7 (a), even if a temporary growth delay of a step occurs due to phosphorus atoms, before the next atomic step arrives as shown in FIG. 7 (b). This increases the probability that silicon growth will resume.
- the atomic step interval slightly changes, the step difference of the atomic step remains one step as shown in FIGS. 7 (c) and 7 (d). Therefore, unevenness on the main surface of the silicon epitaxial wafer can be reduced even by epitaxial growth containing a high concentration of dopant.
- a method for manufacturing the silicon epitaxial wafer W of FIG. 2 according to the present invention will be described.
- a silicon single crystal ingot (not shown) is pulled up by the CZ method.
- block cutting is performed on the silicon single crystal ingot.
- the silicon single crystal ingot is sliced.
- the main surface 1a of the silicon single crystal substrate 1 to be generated is inclined by an angle ⁇ in the [011] direction or the [0-1-1] direction from the (100) plane with respect to the [100] axis.
- the silicon single crystal ingot is sliced so as to be inclined in the [01-1] direction or the [0-11] direction by an angle ⁇ , and so that these angles ⁇ and ⁇ are less than 10 ′.
- surface treatment such as chamfering, lapping, etching, mirror polishing and cleaning is performed to prepare the silicon single crystal substrate 1.
- a silicon epitaxial layer 2 having a dopant concentration of 1 ⁇ 10 19 / cm 3 or more is vapor-phase grown on the main surface 1 a of the silicon single crystal substrate 1.
- the vapor phase growth can be performed by a conventional general method.
- phosphine gas or the like is used as the dopant gas
- dichlorosilane gas or monosilane gas is used as the source gas
- the epitaxial layer 2 is vapor-phase grown under the condition that the dopant concentration is 1 ⁇ 10 19 / cm 3 or more.
- As the dopant antimony, arsenic, boron, etc. other than phosphorus can be employed.
- the surface of the epitaxial layer doped with a high concentration of dopants had a problem of unevenness, but the surface of the silicon epitaxial layer 2 of the present invention was greatly suppressed from such striped unevenness. It will be a thing.
- the bonded SOI wafer is manufactured using the silicon epitaxial wafer W obtained in this way as a bond wafer and / or a base wafer, the adhesion on the bonded surface is improved. Occurrence can be suppressed.
- the silicon epitaxial wafer of the present invention can be used for any of the methods.
- An example of a method for manufacturing a bonded SOI wafer (smart cut method (registered trademark)) according to the present invention is shown in FIG.
- a bond wafer 7 and a base wafer 8 are prepared.
- the epitaxial wafer W can be used as the bond wafer 7 and / or the base wafer 8.
- FIG. 8 the manufacturing method of the bonding SOI wafer at the time of using the said epitaxial wafer W as the bond wafer 7 is shown.
- various wafers such as a silicon single crystal polished wafer and a heat-treated wafer can be applied.
- An insulating film 9 is formed on both the bond wafer 7 and the base wafer 8 in advance or on one of them. Further, both wafers may not be formed. In FIG. 8A, an insulating film 9 is formed on the bond wafer 7. At this time, as the insulating film 9, for example, a thermal oxide film, a CVD oxide film, or the like can be formed.
- step (b) at least one kind of gas ions such as hydrogen ions and rare gas ions are ion-implanted from the surface of the insulating film 9 of the bond wafer 7 to ion-implant the layer 10 into the wafer (epitaxial layer).
- gas ions such as hydrogen ions and rare gas ions
- ion-implanted from the surface of the insulating film 9 of the bond wafer 7 to ion-implant the layer 10 into the wafer (epitaxial layer).
- other ion implantation conditions such as implantation energy, implantation amount, and implantation temperature can be appropriately selected so that an SOI layer having a predetermined thickness can be obtained.
- step (c) the insulating film 9 of the bond wafer 7 and the base wafer 8 are adhered and bonded together.
- the bond wafer 7 is peeled off by the ion implantation layer 10 and the SOI layer 11 is formed on the base wafer 8 via the buried oxide film (insulating film) 9.
- the formed bonded SOI wafer 12 is produced.
- the peeling heat treatment is not particularly limited, but the bond wafer 7 can be peeled by performing the heat treatment while raising the bonded wafer to 500 to 600 ° C. in a nitrogen atmosphere.
- the bonded SOI wafer 12 thus manufactured is subjected to, for example, a bonding heat treatment for increasing the bonding strength at the bonding interface in an oxidizing atmosphere or a non-oxidizing atmosphere at 1000 ° C. or higher, and then the SOI layer side is desired.
- the final bonded SOI wafer is completed by performing polishing or sacrificial oxidation treatment so as to reduce the film thickness to a thickness of 1 mm.
- the bonded SOI wafer 12 can be manufactured by using the silicon epitaxial wafer W of the present invention as the bond wafer 7.
- the SOI wafer 12 is a bonded SOI wafer 12 in which at least a buried oxide film 9 and an SOI layer 11 are sequentially formed on the base wafer 8, and the SOI layer 11 has a dopant concentration of 1 ⁇ 10 19 / cm 3 or more, and the main surface of this SOI layer 11 is in the [011] direction or [0-1-1] from the (100) plane with respect to the [100] axis.
- a bonded SOI wafer 12 that is inclined by an angle ⁇ in the direction and is inclined by an angle ⁇ in the [01-1] direction or the [0-11] direction, and the angle ⁇ and the angle ⁇ are less than 10 ′. can do.
- an SOI wafer 12 having a high-concentration SOI layer 11 can be provided. Further, such a bonded SOI wafer 12 has improved adhesion at the bonding interface, and becomes a high-quality bonded SOI wafer 12 in which generation of defects is suppressed.
- the silicon epitaxial wafer W of the present invention can be used as the base wafer 8. That is, according to the present invention, as shown in FIG. 9A, a silicon epitaxial wafer W obtained by vapor-phase growth of a silicon epitaxial layer 2 having a dopant concentration of 1 ⁇ 10 19 / cm 3 or more on a silicon single crystal substrate 1.
- the main surface of the silicon epitaxial wafer W is inclined by an angle ⁇ in the [011] direction or the [0-1-1] direction from the (100) plane with respect to the [100] axis, and in the [01-1] direction.
- the wafer 13 can be manufactured.
- the epitaxial wafer W having a high concentration epitaxial layer may be used for both the bond wafer 7 and the base wafer 8.
- the epitaxial wafer W having the high concentration epitaxial layer of the present invention can be used only for the base wafer 8. That is, according to the present invention, as shown in FIG. 9B, a silicon epitaxial wafer W in which a silicon epitaxial layer 2 having a dopant concentration of 1 ⁇ 10 19 / cm 3 or more is vapor-phase grown on a silicon single crystal substrate 1.
- the main surface of the silicon epitaxial wafer W is inclined with respect to the [100] axis from the (100) plane in the [011] direction or the [0-1-1] direction by an angle ⁇ , and [01-1] At least the buried oxide film 9 and the SOI layer 11 ′ are sequentially formed on the recon epitaxial wafer W inclined at an angle ⁇ in the direction or [0-11] direction and the angle ⁇ and the angle ⁇ are less than 10 ′.
- a bonded SOI wafer 14 can be provided. That is, the bonded SOI wafer 14 having the high-concentration epitaxial layer 2 immediately below the buried oxide film 9 can be manufactured.
- the selection of whether the silicon epitaxial wafer of the present invention is used as a bond wafer and / or a base wafer is determined based on the specifications of a device manufactured using a bonded SOI wafer.
- Such bonded SOI wafers 12, 13, and 14 of the present invention are those in which defects on the SOI surface due to defective bonding are greatly suppressed.
- PH 3 phosphine
- the phosphorus concentration in the epitaxial layer is 2 ⁇ 10 19 on the main surface of a plurality of silicon single crystal substrates (diameter 300 mm) satisfying the angles ⁇ and ⁇ of 10 ′ ⁇ ⁇ ⁇ 14 ′ and 1 ′ ⁇ ⁇ ⁇ 5 ′.
- An epitaxial layer of 3 ⁇ m was vapor-phase grown at a growth temperature of 1080 ° C. while introducing phosphine (PH 3 ) gas under the condition of / cm 3 . Dichlorosilane was used as the source gas.
- FIG. 10A shows a graph comparing the size of the step on the surface of the silicon epitaxial wafer obtained in Example 1, Comparative Example 1, and Comparative Example 2.
- the step was measured by using an AFM (Atomic Force Microscope) device, measuring a 30 ⁇ m square area, and setting the PV (Peak to Valley) value in the area as the step.
- An observation view of the surface of the epitaxial wafer obtained in Example 1 and Comparative Example 1 using an AFM apparatus is shown in FIG.
- Example 1 In Example 1 and Comparative Example 1, ⁇ was fixed to 5 ′ or less and ⁇ was changed. However, since ⁇ and ⁇ are equivalent in crystallography, the same applies to ⁇ . It is clear that there is an angle dependency. In Comparative Example 2, ⁇ was changed as in Comparative Example 1, but in this case, the step was suppressed to less than 0.5 nm regardless of ⁇ . This is probably because in Comparative Example 2, the level difference was not increased even when the dopant concentration was low and the angle ⁇ was large.
- the size of the step on the surface was measured, it was suppressed to a step of less than 0.5 nm in any case. From this, it can be said that the present invention is effective when the phosphorus concentration of the epitaxial layer is 1 ⁇ 10 19 / cm 3 or more.
- Example 2 The epitaxial wafer obtained in Example 1 is used as a bond wafer (wafer for forming an SOI layer), and bonded SOI under the following conditions by the bonded SOI wafer manufacturing method (ion implantation separation method) shown in FIG. A wafer was produced.
- (Bond wafer) Epitaxial wafer (base wafer) produced in Example 1 Silicon single crystal substrate, diameter 300 mm, p-type (100), 10 ⁇ cm (Oxide film formation) Thermal oxide film formation of 150 nm on the bond wafer surface (ion implantation) Through the oxide film on the bond wafer surface, hydrogen ions, 50 keV, 6 ⁇ 10 16 / cm 2 (Peeling heat treatment) 500 ° C, 30 minutes
- a bonded heat treatment is performed on the peeled SOI wafer in an oxidizing atmosphere to remove the surface oxide film, and then a flat heat treatment is performed in an Ar atmosphere at 1200 ° C. for 1 hour, and the final SOI layer thickness is further increased.
- the sacrificial oxidation treatment was performed so that the thickness became 100 nm. Thereafter, the SOI surface was observed using a surface defect inspection apparatus SP2 (manufactured by KLA-Tencor), and defects having a size of 0.5 ⁇ m or more were counted as the number of defective defects.
- Comparative Example 3 Using the stepped epitaxial wafer obtained in Comparative Example 1 as a bond wafer (wafer for forming an SOI layer), a bonded SOI wafer was fabricated by an ion implantation delamination method under the same conditions as in Example 3, and the surface The defects were observed.
- FIG. 11 shows a graph comparing the number of defective bonding defects on the SOI wafer obtained in Example 2 and Comparative Example 3.
- the SOI wafer of Comparative Example 3 defects on the SOI surface due to poor bonding occurred frequently due to the unevenness of the epitaxial wafer as a material, whereas in Example 2, the generation of defects was suppressed.
- the present invention has any configuration substantially the same as the technical idea described in the claims of the present invention and exhibits the same function and effect.
- the main surface of the silicon single crystal substrate is the (100) plane, and the tilt direction from the main surface is [011] or [0-1-1], [01-1] or [0-11].
- the main surface and the inclined direction equivalent to these are provided, the same operational effects as those of the present invention can be obtained and included in the technical scope of the present invention.
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Abstract
Description
このようなシリコンエピタキシャルウェーハ(以下、単にエピタキシャルウェーハと記載することがある。)の製造方法においては、条件によっては、表面に凹凸が形成され、デバイス特性を悪化させることが知られている。
また、特許文献2では、シリコン単結晶基板表面に対する結晶軸の角度範囲を規定することで、ヘイズと呼ばれる凹凸を低減する方法が提案されている。
また、特許文献3では、COP(Crystal Originated Particle)と呼ばれる欠陥が存在するシリコン単結晶基板上に、エピタキシャルシリコン層を成長させる場合に、ティアドロップと呼ばれる凹凸が発生するのを防ぐため、シリコン単結晶基板表面に対する結晶軸の角度範囲を規定する技術が提案されている。
ここで、ドーパントはリンとすることができる。
ここで、ドーパントをリンとすることができる。
前述のように、シリコン単結晶基板の主表面にシリコンエピタキシャル層を気相成長させたエピタキシャルウェーハにおいて、エピタキシャル層の成長時に高濃度のドーパントをドープした場合に縞状の凹凸が発生する問題が生じていた。
ここで、[0-1-1]方向、[01-1]方向、[0-11]方向とは、図1(a)~(c)に示す方向のことである。
まず、CZ法によってシリコン単結晶インゴット(不図示)を引上げる。次に、シリコン単結晶インゴットに対して、ブロック切断を行う。続いて、シリコン単結晶インゴットをスライスする。
ここで、生成されるべきシリコン単結晶基板1の主表面1aが、[100]軸に対して(100)面から[011]方向または[0-1-1]方向に角度θだけ傾斜するとともに、[01-1]方向または[0-11]方向に角度φだけ傾斜し、かつ、これらの角度θ及び角度φが10′未満になるように、シリコン単結晶インゴットをスライスする。更に、面取り、ラッピング、エッチング、鏡面研磨及び洗浄などの表面処理を行い、シリコン単結晶基板1を準備する。
尚、気相成長は従来の一般的な方法で行うことができる。本発明においては、ドーパントガスとしてホスフィンガス等、原料ガスとしてジクロロシランガスやモノシランガス等を用い、ドーパント濃度が1×1019/cm3以上となる条件で、エピタキシャル層2を気相成長させる。尚、ドーパントとしてはリン以外の、アンチモン、砒素、ボロン等を採用することもできる。
従来、高濃度のドーパントがドープされたエピタキシャル層の表面には凹凸が発生する問題が生じていたが、本発明のシリコンエピタキシャル層2の表面はこのような縞状の凹凸が大幅に抑制されたものとなる。
本発明に係る貼り合わせSOIウェーハの製造方法(スマートカット法(登録商標))の一例を図8に示す。
尚、上記エピタキシャルウェーハWを用いない方のウェーハとしては、例えば、シリコン単結晶のポリッシュドウェーハ、熱処理ウェーハ等、様々なウェーハを適用することができる。
そして、ドーパント濃度が1×1019/cm3以上という高濃度エピタキシャル層を有するエピタキシャルウェーハWをボンドウェーハ7として用いると、高濃度SOI層11を有するSOIウェーハ12を提供することができる。また、このような貼り合わせSOIウェーハ12は、貼り合わせ界面の密着性が改善されたものとなり、欠陥の発生が抑制された高品質な貼り合わせSOIウェーハ12となる。
即ち、本発明によれば、図9(a)に示すように、シリコン単結晶基板1にドーパント濃度が1×1019/cm3以上のシリコンエピタキシャル層2を気相成長させたシリコンエピタキシャルウェーハWであり、シリコンエピタキシャルウェーハWの主表面は、[100]軸に対し(100)面から[011]方向または[0-1-1]方向に角度θだけ傾斜するとともに、[01-1]方向または[0-11]方向に角度φだけ傾斜し、前記角度θ及び角度φが10′未満であるシリコンエピタキシャルウェーハWの上部に、埋め込み酸化膜9、SOI層11が順次形成された貼り合わせSOIウェーハ13を製造することができる。このように、高濃度エピタキシャル層を有するエピタキシャルウェーハWを、ボンドウェーハ7とベースウェーハ8の両方に用いてもよい。
すなわち、本発明によれば、図9(b)に示すように、シリコン単結晶基板1にドーパント濃度が1×1019/cm3以上のシリコンエピタキシャル層2を気相成長させたシリコンエピタキシャルウェーハWであり、該シリコンエピタキシャルウェーハWの主表面は、[100]軸に対し(100)面から[011]方向または[0-1-1]方向に角度θだけ傾斜するとともに、[01-1]方向または[0-11]方向に角度φだけ傾斜し、前記角度θ及び角度φが10′未満であるリコンエピタキシャルウェーハWの上部に、少なくとも、埋め込み酸化膜9、SOI層11’が順次形成された貼り合わせSOIウェーハ14を提供することができる。即ち、埋め込み酸化膜9直下に高濃度のエピタキシャル層2を有する貼り合わせSOIウェーハ14を作製することができる。
このような本発明の貼り合わせSOIウェーハ12、13、14は、貼り合わせ不良に起因するSOI表面の欠陥が大幅に抑制されたものとなる。
シリコン単結晶基板の主表面が、[100]軸に対して(100)面から[011]方向に角度θだけ傾斜するとともに、[01-1]方向に角度φだけ傾斜し、角度θとφが6′(0.1°)≦θ≦9′(0.15°)、φ=1′を満たす複数のシリコン単結晶基板(直径300mm)の主表面に、エピタキシャル層中のリンの濃度が2×1019/cm3となる条件で、ホスフィン(PH3)ガスを導入しながら、1080℃の成長温度で3μmのエピタキシャル層を気相成長させた。原料ガスはジクロロシランを用いた。
上記角度θとφが10′≦θ≦14′、1′≦φ≦5′を満たす複数のシリコン単結晶基板(直径300mm)の主表面に、エピタキシャル層中のリンの濃度が2×1019/cm3となる条件で、ホスフィン(PH3)ガスを導入しながら、1080℃の成長温度で3μmのエピタキシャル層を気相成長させた。原料ガスはジクロロシランを用いた。
上記の角度θとφが10′≦θ≦14′、1′≦φ≦5′を満たす複数のシリコン単結晶基板(直径300mm)の主表面に、エピタキシャル層中のリンの濃度が5×1018/cm3となる条件で、ホスフィン(PH3)ガスを導入しながら、1080℃の成長温度で3μmのエピタキシャル層を気相成長させた。原料ガスはジクロロシランを用いた。
また、比較例2では、比較例1と同様にθを変化させているが、この場合はθに関係なく0.5nm未満の段差に抑制された。これは、比較例2では、ドーパントの濃度が低く、θの角度が大きくても、段差が大きくならなかったものと思われる。
実施例1で得られたエピタキシャルウェーハをボンドウェーハ(SOI層を形成するウェーハ)として利用し、図8に示す貼り合わせSOIウェーハの製造方法(イオン注入剥離法)により、以下の条件で貼り合わせSOIウェーハを作製した。
(ボンドウェーハ)実施例1で作製したエピタキシャルウェーハ
(ベースウェーハ)シリコン単結晶基板、直径300mm 、p型(100)、10Ωcm
(酸化膜形成)ボンドウェーハの表面に150nmの熱酸化膜形成
(イオン注入)ボンドウェーハ表面の酸化膜を通して、水素イオン、50keV、6×1016/cm2
(剥離熱処理)500℃、30分
比較例1で得られた段差のあるエピタキシャルウェーハウェーハをボンドウェーハ(SOI層を形成するウェーハ)として利用し、実施例3と同様の条件でイオン注入剥離法により貼り合わせSOIウェーハを作製し、表面の欠陥を観察した。
例えば、本発明においては、シリコン単結晶基板の主表面として(100)面、主表面からの傾斜方向として[011]又は[0-1-1]、[01-1]又は[0-11]と開示しているが、これらと等価な主表面及び傾斜方向であれば本発明と同様な作用効果を奏するものであり、本発明の技術的範囲に包含される。
Claims (9)
- シリコン単結晶基板の主表面にシリコンエピタキシャル層を気相成長させたシリコンエピタキシャルウェーハであって、
前記シリコン単結晶基板の主表面は、[100]軸に対して(100)面から[011]方向または[0-1-1]方向に角度θだけ傾斜するとともに、[01-1]方向または[0-11]方向に角度φだけ傾斜し、前記角度θ及び角度φが10′未満であり、
前記シリコンエピタキシャル層のドーパント濃度が1×1019/cm3以上であることを特徴とするシリコンエピタキシャルウェーハ。
- 前記ドーパントがリンであることを特徴とする請求項1に記載のシリコンエピタキシャルウェーハ。
- シリコン単結晶基板の主表面に、シリコンエピタキシャル層を気相成長させる工程を有するシリコンエピタキシャルウェーハの製造方法において、
前記シリコン単結晶基板として、主表面が[100]軸に対し(100)面から[011]方向または[0-1-1]方向に角度θだけ傾斜するとともに、[01-1]方向または[0-11]方向に角度φだけ傾斜し、前記角度θ及び角度φが10′未満であるシリコン単結晶基板を用い、
該シリコン単結晶基板の主表面にドーパント濃度が1×1019/cm3以上のエピタキシャル層を気相成長させることを特徴とするシリコンエピタキシャルウェーハの製造方法。
- 前記ドーパントをリンとすることを特徴とする請求項3に記載のシリコンエピタキシャルウェーハの製造方法。
- ボンドウェーハとベースウェーハとを貼り合わせて貼り合わせSOIウェーハを製造する方法において、請求項3又は請求項4に記載の方法により製造されたシリコンエピタキシャルウェーハを、前記ボンドウェーハ及び/又は前記ベースウェーハとして用いて貼り合わせSOIウェーハを製造することを特徴とする貼り合わせSOIウェーハの製造方法。
- ベースウェーハの上部に、少なくとも、埋め込み酸化膜、SOI層が順次形成された貼り合わせSOIウェーハであって、
前記SOI層のドーパント濃度が1×1019/cm3以上であり、かつ、該SOI層主表面は、[100]軸に対し(100)面から[011]方向または[0-1-1]方向に角度θだけ傾斜するとともに、[01-1]方向または[0-11]方向に角度φだけ傾斜しており、前記角度θ及び角度φが10′未満であることを特徴とする貼り合わせSOIウェーハ。
- 前記ベースウェーハは、シリコン単結晶基板にドーパント濃度が1×1019/cm3以上のシリコンエピタキシャル層を気相成長させたシリコンエピタキシャルウェーハであり、該シリコンエピタキシャルウェーハの主表面は、[100]軸に対し(100)面から[011]方向または[0-1-1]方向に角度θだけ傾斜するとともに、[01-1]方向または[0-11]方向に角度φだけ傾斜し、前記角度θ及び角度φが10′未満であることを特徴とする請求項6に記載の貼り合わせSOIウェーハ。
- ベースウェーハの上部に、少なくとも、埋め込み酸化膜、SOI層が順次形成された貼り合わせSOIウェーハであって、
前記ベースウェーハは、シリコン単結晶基板にドーパント濃度が1×1019/cm3以上のシリコンエピタキシャル層を気相成長させたシリコンエピタキシャルウェーハであり、該シリコンエピタキシャルウェーハの主表面は、[100]軸に対し(100)面から[011]方向または[0-1-1]方向に角度θだけ傾斜するとともに、[01-1]方向または[0-11]方向に角度φだけ傾斜し、前記角度θ及び角度φが10′未満であることを特徴とする貼り合わせSOIウェーハ。
- 前記ドーパントがリンであることを特徴とする請求項6乃至請求項8のいずれか一項に記載の貼り合わせSOIウェーハ。
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US8823130B2 (en) | 2014-09-02 |
CN102859649A (zh) | 2013-01-02 |
US20120326268A1 (en) | 2012-12-27 |
KR20130023207A (ko) | 2013-03-07 |
JP5544986B2 (ja) | 2014-07-09 |
EP2555227A1 (en) | 2013-02-06 |
KR101729474B1 (ko) | 2017-04-24 |
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EP2555227A4 (en) | 2015-08-26 |
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