WO2010026768A1 - 貼合装置及びその制御方法 - Google Patents

貼合装置及びその制御方法 Download PDF

Info

Publication number
WO2010026768A1
WO2010026768A1 PCT/JP2009/004373 JP2009004373W WO2010026768A1 WO 2010026768 A1 WO2010026768 A1 WO 2010026768A1 JP 2009004373 W JP2009004373 W JP 2009004373W WO 2010026768 A1 WO2010026768 A1 WO 2010026768A1
Authority
WO
WIPO (PCT)
Prior art keywords
unit
workpieces
workpiece
positioning
pair
Prior art date
Application number
PCT/JP2009/004373
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
白川義広
横田典之
井田琢也
Original Assignee
芝浦メカトロニクス株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 芝浦メカトロニクス株式会社 filed Critical 芝浦メカトロニクス株式会社
Priority to KR1020147021358A priority Critical patent/KR101545459B1/ko
Priority to KR1020147021357A priority patent/KR101545458B1/ko
Priority to JP2010527706A priority patent/JP5090535B2/ja
Priority to CN200980134458.3A priority patent/CN102144250B/zh
Publication of WO2010026768A1 publication Critical patent/WO2010026768A1/ja

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/133308—Support structures for LCD panels, e.g. frames or bezels
    • G02F1/133331—Cover glasses
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/133354—Arrangements for aligning or assembling substrates

Definitions

  • the present invention relates to, for example, a bonding apparatus in which a technique for bonding a flat plate work such as a liquid crystal module and a cover panel is improved, and a control method thereof.
  • a liquid crystal panel is configured by laminating a liquid crystal module, a protective sheet for protecting the surface, a touch panel for operation, and the like.
  • These liquid crystal modules, protective sheets, touch panels, etc. (hereinafter referred to as “workpieces”) are built into the housing of the liquid crystal module, and in order to avoid contact with the liquid crystal glass due to deformation of the protective panel or touch panel. There was a space.
  • a work if an air layer enters between a liquid crystal module, a protective sheet, a touch panel, etc. (hereinafter referred to as a work), the visibility of the display surface is reduced due to reflection of external light.
  • bonding is performed by using a bonding material such as a double-sided tape or an adhesive so that a layer filling the space between the workpieces is formed.
  • the manufacture of a liquid crystal panel requires a bonding apparatus that prepares the bonding material for at least one workpiece and performs bonding. Further, in order to prevent bubbles and the like from being mixed between the workpieces to be bonded, it is desirable that the bonding is performed in a vacuum. Therefore, it is necessary to provide the bonding apparatus with a vacuum chamber or the like.
  • Patent Documents 1 to 3 have been proposed as techniques for bonding workpieces in this way.
  • the techniques described in Patent Documents 1 and 2 are methods for bonding workpieces in a vacuum.
  • the technique described in Patent Document 3 is a technique in which an apparatus for holding a workpiece sequentially processes while moving by an intermittently rotating turntable in order to perform bonding efficiently.
  • the present invention has been proposed in order to solve the above-described problems of the prior art, and its main purpose is to efficiently perform positioning and bonding of a workpiece using a turntable.
  • An object of the present invention is to provide an inexpensive and small-sized bonding apparatus and a control method thereof.
  • Another object of the present invention is to provide a laminating apparatus that can realize a stable operation, does not contain air bubbles or dust, and can be bonded with high accuracy, and a control method thereof.
  • the present invention provides a bonding apparatus for bonding a pair of workpieces constituting a display device, a plurality of turntables that rotate intermittently according to a plurality of positions, and a plurality of the turntables, A holding device for holding the workpiece, a positioning portion provided in the holding device for positioning at least one of the pair of workpieces, and biasing at least one of the pair of workpieces in the holding device, And a pressing unit for bonding, and a driving unit for driving the positioning unit is provided independently of the turntable and detachably from the positioning unit.
  • the holding device when the turntable is rotated, the holding device can be separated from the drive unit and moved according to the rotation of the turntable. For this reason, it becomes unnecessary to mount a drive part in a turntable, and a power supply and a control line become unnecessary.
  • a plurality of holding devices can be mounted, high-speed and efficient bonding can be realized.
  • it since it is only necessary to provide the drive unit at one place, it can be configured at low cost.
  • the bonding can be performed on the holding device after positioning, the bonding can be performed with high accuracy.
  • Another aspect is characterized in that at least one position of the turntable is detachably provided with a peeling device for peeling the double-sided tape release paper affixed to at least one workpiece.
  • the peeling device is detachably provided to the turntable, for example, other types of devices for preparing the adhesive material, such as an adhesive application device, are provided. Since it can be exchanged, it can be used for various products.
  • At least one position of the turntable is provided with a peeling device for peeling the release paper of the double-sided tape affixed to at least one workpiece, and the peeling device presses the adhesive tape against the release paper.
  • the supply unit that feeds the adhesive tape to the peeling head, the winding unit that winds the adhesive tape from the peeling head, and the supply unit And a conversion unit that changes the supply direction of the adhesive tape so that the adhesive tape is supplied.
  • the apparatus space in the longitudinal direction can be reduced.
  • a guide member that guides the movement of the adhesive tape is provided between the supply unit and the peeling head and between the peeling head and the winding unit.
  • a plurality of units having different arrangements of the peeling head and the guide member corresponding to the positions are configured to be replaceable.
  • the supply unit can be arranged at a position different from the longitudinal direction of the adhesive tape in the peeling head by the conversion unit. For this reason, it is possible to cope with peeling of the release paper with respect to the workpieces at different positions by preparing a plurality of units having different arrangements of the peeling head and the guide member while replacing the supply unit and the winding unit.
  • At least one position of the turntable is provided with a detection device for detecting three corners of a square in a pair of workpieces, respectively, and the midpoints of two points constituting both ends of the diagonal of the square are
  • the control amount of the positioning unit is calculated based on the center of gravity and the tilt, the center of gravity calculating unit that calculates the center of gravity of the workpiece, the tilt calculating unit that calculates the tilt of the workpiece based on the two points that form the sides of the square.
  • a positioning calculation unit for calculating is provided with a detection device for detecting three corners of a square in a pair of workpieces, respectively, and the midpoints of two points constituting both ends of the diagonal of the square are
  • the control amount of the positioning unit is calculated based on the center of gravity and the tilt
  • the center of gravity calculating unit that calculates the center of gravity of the workpiece
  • the tilt calculating unit that calculates the tilt of the workpiece based on the two points that form the sides of the square.
  • Other aspects include a turntable that rotates intermittently according to a plurality of positions, a plurality of the turntables, a holding device that holds a pair of workpieces that constitute a display device, and a pair of holding devices that are provided in the holding device.
  • a computer or electronic circuit controls a laminating device having a positioning unit that positions at least one of the workpieces, and a pressing device that bonds the pair of workpieces by biasing at least one of the pair of workpieces in the holding device.
  • the computer or the electronic circuit includes a detection unit, a center of gravity calculation unit, an inclination calculation unit, and a positioning calculation unit, and the detection unit Detects three corners of a square in a pair of workpieces, and the center-of-gravity calculation unit configures both ends of a diagonal of the square
  • the midpoint of the two points is calculated as the center of gravity of the workpiece
  • the tilt calculation unit calculates the tilt of the workpiece based on the two points that form the side of the square
  • the positioning calculation unit includes the center of gravity and the The control amount of the positioning unit is calculated based on the inclination.
  • the center of gravity and the inclination of a pair of workpieces are calculated by detecting the three points of each square, and the positioning amount can be determined. It can be carried out.
  • At least one position of the turntable is provided with a detection device that detects a position of a pair of workpieces, and the detection device includes a first camera that images one workpiece and a pair of workpieces. And a second camera that picks up the image of the other workpiece, and a surface of the second camera that faces the first camera is provided with a reflecting portion. .
  • the irradiation light from the first camera side is reflected by the reflecting surface of the second camera and can be received by the first camera. Can be detected reliably.
  • the pressing device has a vacuum chamber capable of accommodating a part holding the workpiece in the positioning unit independently of the driving unit.
  • the vacuum chamber for performing the vacuum bonding accommodates a portion for holding the workpiece in the positioning portion of the holding device and does not need to accommodate the driving portion, and thus can be reduced in size.
  • Another aspect includes a suction path that has a ventilation path communicated with a vacuum source, vacuum-sucks one workpiece to the positioning section, and a valve that switches the ventilation path between a vacuum source side and a vacuum chamber side. It is characterized by having.
  • the ventilation path for vacuum-sucking the workpiece can be made the same pressure as in the vacuum chamber. Can be prevented from coming off.
  • a storage unit storing a vacuum gauge provided in the vacuum chamber, a voltage value, and a plurality of polynomial approximations for calculating a pressure corresponding to the voltage value, and storing the storage unit in the storage unit
  • An expression selecting unit that selects a polynomial approximate expression corresponding to the voltage value from the vacuum gauge based on a voltage value and a polynomial approximate expression; a pressure calculating unit that calculates a pressure based on the selected polynomial approximate expression; It is characterized by having.
  • Other aspects include a turntable that rotates intermittently according to a plurality of positions, a plurality of the turntables, a holding device that holds a pair of workpieces that constitute a display device, and a pair of holding devices that are provided in the holding device.
  • a positioning unit that positions at least one of the workpieces, a pressing device that bonds the pair of workpieces by urging at least one of the pair of workpieces in the holding device, and a workpiece that is provided in the pressing device,
  • a bonding apparatus having a vacuum chamber capable of accommodating a portion holding the sheet independently from the driving unit and a vacuum gauge provided in the vacuum chamber by a control device, a pair of workpieces
  • the control apparatus includes a storage unit, a formula selection unit, and a pressure calculation unit.
  • the storage unit stores a voltage value and a plurality of polynomial approximation equations for calculating a pressure corresponding to the voltage value, and the equation selection unit is based on the voltage value and the polynomial approximation equation stored in the storage unit.
  • the polynomial approximate expression corresponding to the voltage value from the vacuum gauge is selected, and the pressure calculation unit calculates the pressure based on the selected polynomial approximate expression.
  • Another aspect is characterized in that a protective member in which a porous sheet is attached to an elastic member is provided on a contact surface of at least one of the positioning portion and the pressing portion with the workpiece.
  • the protective member is configured by sticking the porous sheet to the elastic member, so that the work is stuck to the elastic member while absorbing the impact to the work at the time of bonding. Can be prevented.
  • Another aspect is characterized in that at least one position of the turntable is detachably provided with a coating device for applying an adhesive to at least one workpiece.
  • the coating device is detachably attached to the turntable, other types of devices for preparing the adhesive material can be exchanged, so that various products can be obtained. Can be supported.
  • FIG. 1 is a schematic plan view showing an overall configuration of an embodiment of the present invention. It is a longitudinal cross-sectional view which shows the holding
  • FIG. 8 is a plan view of FIG. 7. It is a longitudinal cross-sectional view which shows the time of adsorption
  • FIG. 14 is a plan view of FIG. 13.
  • FIG. 14 is a rear view of FIG. 13. It is a side view which shows the peeling apparatus (2nd unit) in embodiment of FIG.
  • FIG. 32 is an explanatory diagram in which the table of FIG. 31 is graphed. It is explanatory drawing which shows the graph showing the relationship between the detection voltage and pressure by the vacuum gauge in this embodiment.
  • FIG. 1 First, the whole structure of the bonding apparatus of this embodiment (henceforth this apparatus) is demonstrated. As shown in FIG. 1, this apparatus has four holding devices 2 mounted on a turntable 1. The turntable 1 is configured to rotate intermittently by the index mechanism 11 in accordance with the loading / unloading position 1A, the adhesive material preparation position 1B, the positioning position 1C, and the vacuum bonding position 1D.
  • the holding device 2 is a device that holds the workpiece S1 and the workpiece S2 facing each other up and down.
  • a rectangular substrate such as a liquid crystal module and a cover panel is used as the workpieces S1 and S2.
  • the workpieces S1 and S2 are provided with detection marks M1 and M2 corresponding to four vertices of a virtual rectangle or square.
  • the holding device 2 includes a positioning unit 300 that aligns the positions of the workpieces S1 and S2.
  • the peeling device 3 or the coating device is detachably provided at the adhesive material preparation position 1B.
  • the peeling device 3 is a device that peels off the release paper F (the release sheet or the like of any material) of the double-sided tape T1 that has been attached to the workpiece S1 in advance.
  • the coating device is a device that applies an adhesive to the workpiece S1.
  • As the coating apparatus a known apparatus can be used.
  • the positioning position 1 ⁇ / b> C is provided with a detection device 4 that detects the positions of the workpieces S ⁇ b> 1 and S ⁇ b> 2. Based on the value detected by the detection device 4, the positioning amount of the workpiece S1 with respect to the workpiece S2 in the positioning unit 300 is determined.
  • a pressing device 5 is provided.
  • the pressing device 5 can bond the workpiece S2 by pressing the workpiece S2 toward the workpiece S1 in the vacuum space in the vacuum chamber 51.
  • the holding device 2 includes a holding unit 100, a support column 200, a positioning unit 300, a driving unit 400, a suction unit 500, and a lock unit 600, as shown in FIGS.
  • the holding unit 100 is a substantially U-shaped frame that holds the left and right edges of the workpiece S2.
  • the column part 200 is two columnar members raised in the vertical direction.
  • the support part 100 supports the support part 100 so as to be movable up and down. In the initial position, the holding unit 100 is located above the workpiece S1 and holds the workpiece S2 in the horizontal direction. At the time of bonding, the holding device 100 is pressed downward together with the workpiece S2 by the pressing device 5, and the workpiece S1 and the workpiece S2 are bonded.
  • the positioning unit 300 includes a placement unit 310, an X-axis unit 320, a Y-axis unit 330, a ⁇ -axis unit 340, and the like that are supported by a gantry 1 a fixed to the turntable 1. .
  • the placement unit 310 includes an XY- ⁇ table 311, a shaft unit 312, a movable table 313, a bellows 314, a pulley 315, and the like.
  • the XY- ⁇ table 311 is a horizontal table for positioning the workpiece S1.
  • the XY- ⁇ table 311 is provided on a horizontal plane so as to be movable in orthogonal linear directions (X direction and Y direction) and to be rotatable about the shaft portion 312 ( ⁇ direction). .
  • the shaft portion 312 is a vertical columnar member.
  • the upper end of the shaft portion 312 is rotatably connected to an XY- ⁇ table 311.
  • the lower end of the shaft portion 312 passes through the turntable 1 and is fixed to the movable table 313.
  • the movable table 313 is provided so as to be movable in the X-axis and Y-axis directions by the X-axis part 320 and the Y-axis part 330.
  • a bellows 314 that covers the shaft portion 312 is attached between the movable table 313 and the turntable 1.
  • the attachment end of the bellows 314 is airtight. Further, since the bellows 314 has flexibility, the bellows 314 is flexibly displaced in accordance with the movement of the movable base 313 while maintaining airtightness.
  • the pulley 315 is fixed to an XY- ⁇ table 311. A timing belt 343 (described later) is hung on the pulley 315.
  • the X-axis part 320 has a rotating shaft 321, an eccentric roller 322, an armature 323, and the like.
  • the rotation shaft 321 is a vertical member that can be rotated by the driving unit 400.
  • the eccentric roller 322 is attached to the upper end of the rotating shaft 321. As shown in FIG. 5, the eccentric roller 322 is inserted into a Y-direction groove 313 a formed in the movable table 313.
  • the eccentric roller 322 can move the movable table 313 in the X direction by urging the inner wall of the groove 313a according to the rotation of the rotating shaft 321.
  • the shaft portion 312 and the XY- ⁇ table 311 move in the X direction together with the movable table 313.
  • the armature 323 is attached to the lower end of the rotating shaft 321.
  • the armature 323 is detachably provided on a clutch 420 described later. By connecting the armature 323 to the clutch 420, the driving shaft 400 can drive the rotating shaft 321.
  • the Y-axis part 330 has a rotating shaft 331, an eccentric roller 332, an armature 333, and the like.
  • the rotation shaft 331 is a vertical member that can be rotated by the driving unit 400.
  • the eccentric roller 332 is attached to the upper end of the rotating shaft 331. As shown in FIG. 5, the eccentric roller 332 is inserted into a groove 313 b in the X direction formed in the movable table 313.
  • the eccentric roller 332 can move the movable base 313 in the Y direction by urging the inner wall of the groove 313b according to the rotation of the rotating shaft 331.
  • the shaft portion 312 and the XY- ⁇ table 311 move in the Y direction together with the movable table 313.
  • the armature 333 is attached to the lower end of the rotating shaft 331.
  • the armature 333 is detachably provided on a clutch 430 described later. By connecting the armature 323 to the clutch 430, the drive shaft 400 can drive the rotating shaft 331.
  • the ⁇ shaft portion 340 includes an upper rotating shaft 341, a pulley 342, a timing belt 343, a bellows coupling 344, a lower rotating shaft 345, an armature 346, and the like.
  • the upper rotating shaft 341 is a vertical member, and a pulley 342 is fixed to the upper end thereof.
  • a timing belt 343 is hung on the pulley 342. Accordingly, as shown in FIG. 6, when the upper rotary shaft 341 rotates, the rotation is transmitted to the pulley 315 via the timing belt 343, so that the XY- ⁇ table 311 rotates.
  • the lower end of the upper rotating shaft 341 is connected to the upper end of the bellows coupling 344.
  • the bellows coupling 344 is a connecting member constituted by a flexible bellows that absorbs a deviation in the X direction and the Y direction.
  • a lower rotating shaft 345 is connected to the lower end of the bellows coupling 344.
  • the lower rotation shaft 345 is a vertical member, and the rotation is transmitted to the upper rotation shaft 341 via the bellows coupling 344.
  • the armature 346 is attached to the lower end of the lower rotating shaft 345.
  • the armature 346 is detachably provided on a clutch 440 described later. By connecting the armature 346 to the clutch 420, the driving unit 400 can drive the lower rotating shaft 345 and the upper rotating shaft 341.
  • the drive unit 400 includes a fixed table 410, clutches 420, 430, and 440, motors 450, 460, and 470.
  • the fixed table 410 is a table fixed to the lower part of the turntable 1.
  • Clutchs 420, 430, and 440 are fixed at positions corresponding to the X-axis part 320, the Y-axis part 330, and the ⁇ -axis part 340 in the fixed table 410.
  • the clutches 420, 430, and 440 are connected to motors 450, 460, and 470 that transmit rotation to the clutches 420, 430, and 440, respectively.
  • the clutches 420, 430, and 440 adsorb the armatures 323, 333, and 346 by the magnetic flux generated between the rotors 422, 432, and 442 and the armatures 323, 333, and 346.
  • the driving force of the motors 450, 460, 470 can be transmitted to the X-axis part 320, the Y-axis part 330, and the ⁇ -axis part 340.
  • the lock portion 350 includes a brake plate 351, a brake 352, a lifting shaft 353, a spring 354, a pressed portion 355, a cylinder 356, and the like, as shown in FIGS.
  • the brake plate 351 is, for example, a spring steel plate fixed to the movable table 313.
  • the brake 352 is a member that locks the movable base 313 by pressing the brake plate 351 with a part of the base 1a.
  • a contact surface of the brake 352 with the brake plate 351 is provided with a non-slip member such as a rubber lining, for example.
  • the elevating shaft 353 is provided so as to be able to move up and down through the gantry 1a.
  • a brake plate 351 is attached to the upper end of the lifting shaft 353.
  • the spring 354 is a biasing member such as a spring that biases the lifting shaft 353 downward.
  • the pressed portion 355 is attached to the lower end of the lifting shaft 353.
  • the cylinder 356 is a unit that is fixed to the fixed table 410 and releases the lock by urging the pressed portion 355 that comes to the upper part of the cylinder 356.
  • the illustrated lock portion 350 corresponds to the X-axis portion 320, and other lock portions having the same structure corresponding to the Y-axis portion 330 and the ⁇ -axis portion 340 are not shown. Is provided.
  • the suction unit 500 includes a suction plate 510, a three-way valve 520, a suction pump 530 (see FIG. 26), and the like.
  • the suction plate 510 is fixed on the XY- ⁇ table 311.
  • a protective member 511 in which a sheet made of a polyurethane porous film is attached to the surface of an elastic member such as rubber is attached.
  • a suction hole (not shown) is formed in the suction plate 510 and the protection member 511. The suction hole is connected to one end of the pipe 512 through a ventilation path formed in the suction plate 510.
  • the 3-way valve 520 is fixed to the turntable 1.
  • the three-way valve 520 includes an inner pipe portion 521, an upper valve 522, a lower valve 523, a rod 524, a pressed portion 525, and the like.
  • the inner pipe portion 521 is a pipe continuous in the vertical direction.
  • the inner pipe portion 521 penetrates the turntable 1 and projects to the upper surface side and the lower surface side.
  • the other end of the above-described pipe 512 is connected to the inner pipe portion 521 protruding to the upper surface side of the turntable 1.
  • the suction hole of the XY- ⁇ table 311 and the inner tube portion 521 communicate with each other through the ventilation path.
  • One end of a pipe 526 is connected to the side surface of the inner pipe portion 521 protruding to the lower surface side of the turntable 1.
  • the other end of the pipe 526 is connected to an adsorption pump 530 that is a vacuum source.
  • the adsorption pump 530 and the pipe 526 are connected via a rotary joint (not shown) so that the communication between the adsorption pump 530 and the pipe 526 is ensured.
  • the upper valve 522 is a valve that opens and closes the upper end of the inner pipe portion 521 by moving up and down.
  • the lower valve 523 is a valve that opens and closes communication with the adsorption pump 530 by moving up and down in the inner pipe portion 521.
  • the rod 524 is provided so as to be movable up and down in the inner pipe portion 521.
  • the rod 524 connects the upper valve 522 and the lower valve 523.
  • the pressed portion 525 is provided at the lower end of the rod 524.
  • the pressed portion 525 is urged upward by a pressing portion 527 configured by a cylinder or the like.
  • the pressing part 527 is fixed to the fixed table 410.
  • Such a three-way valve 520 connects the suction hole and a line connecting the suction pump 530 as shown in FIG. 12A when the workpiece S1 is sucked (see the black arrow line). Then, as shown in FIG. 12B, when the pressed portion 525 at the lower end is pushed up by the pressing portion 527, the upper valve 522 is opened and the lower valve 523 is closed, so that the suction hole and the surroundings have the same atmospheric pressure. At the same time, the communication with the suction pump 530 is closed (see the black arrow line).
  • the peeling device 3 is a device for sticking and peeling the release paper F of the double-sided tape T1 attached to the workpiece S1 or S2 to the adhesive tape T2. As shown in FIGS. 13 to 15, the peeling device 3 includes a supply unit 31, a conversion unit 32, a peeling unit 33, a winding unit 34, and the like.
  • the supply unit 31 includes a delivery reel 31a and a reel rotation mechanism 31b (see FIG. 26).
  • the delivery reel 31a is a reel around which the supplied adhesive tape T2 is wound.
  • the reel rotation mechanism 31b is a mechanism for controlling the brake of the delivery reel 31a (not shown).
  • the conversion unit 32 is a pin or a roller that converts the traveling direction of the adhesive tape T ⁇ b> 2 from the supply unit 31 to a right angle.
  • the peeling unit 33 includes a peeling head 33a, a cylinder 33b, guide rollers 33c to 33e, and the like.
  • the peeling head 33a is a roller that presses the adhesive tape T2 supplied from the supply unit 31 against the release paper F on the workpiece S1 by pressing the adhesive tape T2 from the back surface of the sticking surface.
  • the peeling head 33a is inclined so that the pressure bonding of the adhesive tape T2 starts from the end of the workpiece S1.
  • the cylinder 33b is a mechanism that moves the peeling head 33a forward (leftward in the figure). During this operation, the brake of the supply unit 31a can be released and the adhesive tape T2 can be pulled out.
  • the guide rollers 33c to 33e are rollers that guide the movement of the adhesive tape T2 from the converting unit 32 to the peeling head 33a and from the peeling head 33b to the winding unit 34 (guide member).
  • the winding unit 34 includes a winding reel 34a, a reel lifting mechanism 34b, a reel rotating mechanism 34c (see FIG. 26), and the like.
  • the take-up reel 34a is a reel that takes up the adhesive tape T2 from the peeling head 33a.
  • the axis of the take-up reel 34 a is provided in a direction orthogonal to the axis of the supply unit 31.
  • the reel elevating mechanism 34b is a mechanism for elevating the take-up reel 34a by, for example, rotation of a feed screw.
  • the reel rotation mechanism 34c has a drive source (not shown) and the like, and is a mechanism that controls rotation and braking of the take-up reel 34a.
  • said peeling apparatus 3 equips with the 1st unit U1 for peeling the peeling paper F from lower workpiece
  • the first unit U1 is provided in a replaceable manner with a second unit U2 for peeling the release paper F from the upper workpiece S2.
  • the adhesive tape T2 from the conversion unit 32 is supplied from the lower side of the peeling head 33a, passes through the upper side, and is guided to the take-up reel 34a.
  • guide rollers 33c to 33e are provided.
  • the guide roller 33e in the first unit U1 changes the traveling direction of the adhesive tape T2 that has passed through the peeling head 33a downward.
  • the adhesive tape T2 from the conversion unit 32 is supplied from the upper side of the peeling head 33a, passes through the lower side, and passes to the take-up reel 34a.
  • Guide rollers 33f and 33g are provided so as to be guided.
  • the guide roller 33g in the second unit U2 changes the traveling direction of the adhesive tape T2 that has passed through the peeling head 33a downward.
  • first unit U1 and the second unit U2 are provided by a cylinder 35 so as to be movable up and down.
  • the first unit U1 can press the adhesive tape T2 in the peeling head 33a against the release paper F of the workpiece S1 when descending.
  • the second unit U2 can press the adhesive tape T2 in the peeling head 33a against the release paper F of the workpiece S2 when ascending.
  • the peeling by the peeling device 3 is performed as follows. That is, as shown in FIGS. 17A and 18A, the peeling head 33a is moved forward by the cylinder 33b, the adhesive tape T2 is pulled out from the supply portion 31a, and the first unit U1 is moved by the cylinder 35. Reel raising / lowering mechanism in a state where the adhesive tape T2 is pressed against the release paper F by lowering or raising the second unit U2, and the reel rotation mechanisms 31b and 34c brake the rotation of the delivery reel 31a and the take-up reel 34a. The take-up reel 34a is lowered by 34b.
  • the detection device 4 includes two CCD cameras 41 and 42, arms 45 and 46 that support them, a camera drive mechanism 49 (see FIG. 26), and the like.
  • the CCD camera 41 disposed above is a camera (first camera) that images the corner or mark M2 of the upper workpiece S2 with the lens surface facing downward.
  • the CCD camera 42 disposed below is a camera (second camera) that images the corner or mark M1 of the lower workpiece S1 with the lens surface facing downward.
  • the camera drive mechanism 49 has a drive source (not shown) and the like, and is a mechanism that drives the arms 45 and 46 (for example, an XY axis drive mechanism).
  • the arm 45 is provided so that the CCD camera 41 can be taken in and out above the workpiece S ⁇ b> 2 by moving in the horizontal direction (front / rear / left / right direction) by the camera driving mechanism 49.
  • the arm 46 is also provided so that the CCD camera 42 can be taken in and out above the workpiece S1 by moving in the horizontal direction (front-rear and left-right directions) by the camera drive mechanism 49.
  • Each CCD camera 41, 42 is a camera that captures an image of a detection target by detecting the reflected light of a built-in light source (coaxial epi-illumination).
  • the imaging of each CCD camera 41, 42 is controlled by an imaging control unit 662, as will be described later.
  • a reflection surface 42 a for reflecting light from the upper CCD camera 41 is provided on the upper surface of the lower CCD camera 42.
  • the reflecting surface 42a can be a simple member such as an aluminum tape, for example.
  • the pressing device 5 includes a vacuum chamber 51, a pressure head 52, an elevating mechanism 53, a cylinder 54, and the like.
  • the vacuum chamber 51 is a chamber that covers and holds the holding device 2 on the turntable 1.
  • the pressurizing head 52 is a means that is provided in the vacuum chamber 51 and pressurizes the workpiece S2 downward.
  • the elevating mechanism 53 is a mechanism for elevating the vacuum chamber 51 together with the pressurizing head 52 by a driving source (not shown).
  • the cylinder 54 is a mechanism that moves the pressure head 52 up and down by a drive rod that moves forward and backward.
  • the pressure head 52 is provided with a protective member 52a in which a sheet made of a polyurethane porous film is attached to the rubber surface.
  • the vacuum chamber 51 is connected with a vacuum pump 55 as a vacuum source through a pipe and is provided with a vacuum gauge 56 for detecting the internal pressure (see FIG. 26).
  • control device The components such as the turntable 1, the holding device 2, the peeling device 3, the detection device 4, and the pressing device 5 are controlled by the respective driving sources, switches, power supplies, and the like operated by the control device 6 shown in FIG. Is done.
  • the control device 6 can be configured, for example, by realizing the following functions by a dedicated electronic circuit or a computer that operates with a predetermined program.
  • FIG. 26 is a virtual functional block diagram. It should be noted that an operator inputs an input device such as a switch, a touch panel, a keyboard, and a mouse for operating the control device 6, and an output device such as a display, a lamp, and a meter for checking the state of the control device 6. Omitted.
  • an input device such as a switch, a touch panel, a keyboard, and a mouse for operating the control device 6, and an output device such as a display, a lamp, and a meter for checking the state of the control device 6. Omitted.
  • control device 6 has functions such as a table control unit 610, a storage unit 620, a timing control unit 630, an input / output interface 640, a peeling control unit 650, a position detection unit 660, a positioning control unit 670, and a vacuum control unit 680. is doing.
  • the table control unit 610 is means for controlling the intermittent rotation operation of the index mechanism 11.
  • the storage unit 620 is a unit that stores various settings, data, and the like such as operation timing, arithmetic expressions, and calculation results.
  • the timing control unit 630 is means for controlling the operation timing of each unit at a preset timing.
  • the input / output interface 640 is a means for controlling signal conversion and input / output with each unit to be controlled.
  • the peeling control unit 650 is a means for controlling the operation of the peeling device 3.
  • the peeling control unit 650 includes a head control unit 651, a rotation control unit 652, a lift control unit 653, and the like.
  • the head controller 651 is a means for controlling the cylinder 33b for driving the peeling head 33a, the cylinder 35 for driving the first unit U1 or the second unit U2.
  • the rotation control unit 652 is a unit that controls the reel rotation mechanism 31 b of the supply unit 31 and the reel rotation mechanism 34 c of the winding unit 34.
  • the raising / lowering control part 653 is a means to control the reel raising / lowering mechanism 34b.
  • the position detection unit 660 is means for controlling the detection device 4.
  • the position detection unit 660 includes a camera drive unit 661, an imaging control unit 662, a three-point extraction unit 663, a centroid calculation unit 664, an inclination calculation unit 665, and the like.
  • the camera drive unit 661 is means for controlling the camera drive mechanism 49 that moves the arms 45 to 48.
  • the imaging control unit 662 is means for controlling imaging by the CCD cameras 41 to 44.
  • the three-point extraction unit 663 is a means for extracting the three points of the corners of the workpieces S1 and S2 or the marks M1 and M2 from the images captured by the CCD cameras 41 and 42.
  • the center-of-gravity calculation unit 664 is means for calculating the center of gravity from the points extracted by the three-point extraction unit 663.
  • the inclination calculation unit 665 is means for calculating an inclination from the points extracted by the three-point extraction unit 663.
  • the positioning control unit 670 is means for controlling the positioning unit 300.
  • the positioning control unit 670 includes a clutch control unit 671, a positioning calculation unit 672, a motor control unit 673, and the like.
  • the clutch control unit 671 is means for attaching and detaching the armatures 323, 333, 346 and the clutches 420, 430, 440 by controlling energization to the coils 421, 431, 441.
  • the clutch control unit 671 also performs locking by the lock unit 350 by operating the cylinder 356 in synchronization with the energization of the coils 421, 431, and 441.
  • the positioning calculation unit 672 is a means for calculating the movement amount of the XY- ⁇ table 311 based on the gravity center and inclination of the workpieces S1 and S2 calculated by the gravity center calculation unit 664 and the inclination calculation unit 665.
  • the vacuum control unit 680 is a unit that controls the suction unit 500 and the pressing device 5.
  • the vacuum control unit 680 includes a chamber control unit 681, a decompression control unit 682, a vacuum calculation unit 683, a valve control unit 684, a press control unit 685, an adsorption control unit 686, and the like.
  • the chamber controller 681 is means for controlling the elevating mechanism 53 that elevates and lowers the vacuum chamber 51.
  • the decompression control unit 682 is means for controlling the decompression pump 55 that decompresses the inside of the vacuum chamber 51.
  • the vacuum calculation unit 683 is means for calculating the pressure in the vacuum chamber 51 based on the detection value of the vacuum gauge.
  • the vacuum calculation unit 683 has a voltage determination unit 683a, an expression selection unit 683b, a pressure calculation unit 683c, and the like.
  • the voltage determination unit 683 a is a unit that determines which of the voltage ranges set in the storage unit 620 is the analog output (voltage value) from the vacuum gauge 56.
  • the expression selection unit 683b is means for selecting a polynomial approximation formula corresponding to the voltage range determined by the voltage determination unit 683a based on the voltage range set in the storage unit 620 and the corresponding polynomial approximation formula.
  • the pressure calculation unit 683c is a unit that calculates a pressure value based on the determined voltage value and the selected polynomial approximation.
  • the valve control unit 684 is a means for controlling the pressing unit 527 that switches opening and closing of the three-way valve 520 based on the calculation result of the vacuum calculation unit 683.
  • the pressing control unit 685 is a means for controlling the cylinder 54 that raises and lowers the pressure head 52.
  • the suction control unit 686 is means for controlling the suction pump 530 for sucking the workpiece S1 on the suction plate 510.
  • the table is divided into a plurality of arbitrary sections, and a polynomial approximate expression corresponding to each section is established. Then, according to the detected voltage value, one of the polynomial approximation formulas is selected, and the pressure calculation calculation is performed.
  • the voltage value range is divided into the following three ranges. (1) 0V to less than 3V (2) 3V to less than 8V (3) 8V to 10V
  • the storage unit 620 has a valve pressure value that is a threshold for the valve control unit 684 to switch the three-way valve 520, and the pressing control unit 685 lowers the pressure head 52.
  • a pressure value for pressing is set. For this reason, when the pressure value calculated by the pressure calculation unit 683c becomes the valve pressure value, the three-way valve 520 is switched, and when the pressure value becomes the pressure value for pressing, the pressure head 52 is lowered. To do.
  • the operator places the workpiece S1 on the protective member 511 of the suction plate 510 so that the surface to which the double-sided tape T1 is adhered is up as shown in FIGS. Put it on.
  • the suction control unit 686 operates the suction pump 530 to suck the workpiece S1 through the suction holes of the suction plate 510 and the protection member 511. Further, the worker sets the workpiece S2 on the holding unit 100. It is also possible to automatically load a handled workpiece by a supply mechanism such as an autoloader instead of manually loading the workpiece.
  • the holding device 2 that holds the workpieces S ⁇ b> 1 and S ⁇ b> 2 comes to the adhesive material preparation position 1 ⁇ / b> B by the rotation of the turntable 1.
  • the peeling apparatus 3 peels the release paper F of the workpiece S1. That is, as shown in FIGS. 13 and 17A, the head control unit 651 moves the peeling head 33a forward by driving the cylinder 33b, and drives the cylinder 35 to drive the first unit U1. Is raised, and the peeling adhesive tape T2 is brought into contact with the edge of the release paper F of the double-sided tape T1 of the workpiece S1.
  • the rotation control unit 652 controls the reel rotation mechanisms 31b and 34c, so that the lifting control unit 653 operates the reel lifting mechanism 34b in a state where the delivery reel 31a and the take-up reel 34a are braked, and the winding is performed.
  • the take reel 34a is lowered.
  • the peeling head 33a moves backward while the adhesive tape T2 is pulled downward.
  • the release paper F in contact with the adhesive tape T2 is attached to the double-sided tape T1 and peeled off.
  • the lift control unit 653 operates the reel lift mechanism 34b to raise the take-up reel 34a. To the state where the release paper F is peeled off from the workpiece S1.
  • the camera drive unit 661 moves the arms 45 and 46 by operating the camera drive mechanism 49. As a result, as shown in FIGS. 20 and 21, the CCD camera 41 moves above the workpiece S2, and the CCD camera 42 moves between the workpiece S1 and the workpiece S2 (step 101).
  • the CCD cameras 41 and 42 sequentially stop at the positions corresponding to the corners of the workpieces S1 and S2 or the marks M1 and M2 (step 102).
  • the imaging control unit 662 causes the CCD camera 41 to sequentially image the corners or marks M1 and M2 of the workpiece S1 and the workpiece S2 (step 103).
  • the captured image is input to the control device 6 (step 104).
  • the reflected light from the workpiece S2 by the coaxial incident illumination returns to the CCD camera 41 as shown in FIG. .
  • the workpiece S ⁇ b> 2 is not attracted to the suction plate 510 like the workpiece S ⁇ b> 1 but is held in the air by the holding unit 100.
  • the workpiece S2 is likely to be bent, distorted, etc. In this case, the reflected light from the workpiece S2 may not return to the CCD camera 41.
  • the illumination from the CCD camera 41 is reflected by the reflecting surface 42a attached to the CCD camera 42 to ensure the CCD camera 41.
  • imaging can be performed.
  • the portion corresponding to the marks M1 and M2 in the workpiece S2 has a portion that transmits light in order to receive reflected light.
  • the three-point extraction unit 663 After imaging at least three points as described above (step 105), the three-point extraction unit 663 extracts the three points of the corner of the workpiece S1 or the identification mark M1 from the captured image and responds to this. Three points of the corner of the workpiece S2 or the mark M2 are extracted (step 106). Note that the process of extracting points from an image can be realized by a conventional general image processing technique, and thus description thereof is omitted.
  • the center-of-gravity calculation unit 664 calculates the midpoint of two diagonal points among the three points of each of the workpieces S1 and S2 (the points surrounded by a one-dot chain line circle).
  • the center-of-gravity coordinates G1 and G2 of S2 are calculated (step 107).
  • the inclination calculation unit 665 calculates the inclination of a straight line connecting two points of the long side or the short side among the three points of the workpieces S1 and S2 as the inclination of the workpieces S1 and S2 (step 108).
  • the positioning calculation unit 672 in the positioning control unit 670 calculates the movement amount of the workpiece S1 so that the center of gravity and the inclination of both the workpieces S1 and S2 coincide (step 109).
  • the amount of movement in the XY direction (the amount of rotation of the rotation shafts 321 and 331) for adjusting the center of gravity is calculated
  • the amount of rotation in the ⁇ direction (the amount of rotation of the lower rotation shaft 345) for adjusting the inclination is calculated.
  • the clutch control unit 671 connects the rotors 422, 432, 442 and the armatures 323, 333, 346 by energizing the coils 421, 431, 441 (step 110). Then, the motor control unit 673 operates the motors 450, 460, and 470 to rotate the rotating shafts 321, 331, and 345 (step 111). The motors 450, 460, and 470 are stopped when the rotation shafts 321, 331, and 345 are rotated by the calculated rotation amount (step 112).
  • the clutch control unit 671 operates the cylinder 356 of the lock unit 350 to release the bias to the pressed portion 355, thereby lowering the brake 352 by the biasing force of the spring 354, and the brake plate 351. Lock with pinching (step 113). This is performed almost simultaneously for all of the X, Y, and ⁇ axes. Then, the clutch control unit 671 stops the energization of the coils 421, 431, and 441, and releases the connection between the X-axis part 320, the Y-axis part 330, the ⁇ -axis part 340, and the drive part 400 by the clutches 420 to 440. .
  • the position of the XY- ⁇ table 311 is adjusted so that the positions of the workpieces S1, S2 are aligned.
  • the centers of gravity G1 and G2 coincide with each other as shown in FIG.
  • the tilts can be matched by turning.
  • the center of gravity and the diagonal line can be aligned to match each other. Therefore, also in this embodiment, two diagonal points of the workpieces S1 and S2 are detected, and the respective gravity centers G1 and G2 are aligned by movement in the XY directions, and the diagonals are matched by rotation. You may let them. Thereby, the burden of calculation processing can be reduced.
  • the chamber controller 681 operates the elevating mechanism 53 to lower the vacuum chamber 51 and seal the periphery of the holding device 2 (step 201). Then, the decompression control unit 682 operates the decompression pump 55 to decompress the interior of the vacuum chamber 51 (step 202).
  • the vacuum gauge 56 outputs the detected voltage value to the control device (step 203).
  • the voltage determination unit 683a determines whether the voltage value detected by the vacuum gauge 56 is within the above range (1) to (3) (step 204).
  • the expression selection unit 683b selects a polynomial approximation expression (steps 205-1 to 20-3).
  • the pressure calculation unit 683c calculates a pressure based on the detected voltage value and the selected polynomial approximate expression (step 206).
  • valve control unit 684 determines that the calculated pressure value is equal to or lower than the predetermined valve pressure (step 207)
  • the valve control unit 684 raises the pressing unit 527 to move the pressed unit 525 of the three-way valve 520. Energize. Then, as shown in FIGS. 11 and 12B, the rod 524 of the three-way valve 520 rises, the upper valve 522 opens the upper end of the inner pipe portion 521, and the lower valve 523 is closed. (Step 208). Thereby, the inside of the suction plate 510 and the inside of the vacuum chamber 51 have the same pressure, and blowing out from the suction holes is prevented.
  • the pressure control unit 685 determines that the calculated pressure value is equal to or lower than the predetermined pressure for pressing (step 209), the pressure control unit 685 operates the cylinder 54 to pressurize as shown in FIG. The head 52 is lowered and the work S2 is pressed against the work S1 (step 210). Thereafter, the decompression control unit 682 stops the decompression pump 55 (step 211), and the chamber control unit 681 raises the pressurizing head 52 and the vacuum chamber 51 to release them to the atmosphere (steps 212 and 213).
  • the peeling head 33a in the peeling apparatus 3 Since the peeling head 33a in the peeling apparatus 3 is inclined, the pressure-sensitive adhesive tape T2 can be started to be pressed from the ends of the workpieces S1 and S2, and the release paper F can be reliably peeled off.
  • the peeling head 33a is inclined, the conversion unit 32 causes the supply unit 31 to be removed from the longitudinal direction of the adhesive tape T2 in the peeling unit 33, and the moving direction of the take-up reel 34a is up and down. Therefore, the required space in the depth direction can be reduced. For example, as shown in FIGS.
  • the advantage of such a peeling device 3 is that a take-up reel L1, a feed reel L2, and a peel head L3 are arranged, and the take-up reel L1 is attached to the adhesive tape T2. This is clear even when compared with the conventional example configured to move in the longitudinal direction.
  • the peeling device 3 can easily cope with peeling of the release paper F from the lower work S1 and peeling of the release paper F from the upper work S2 by exchanging the units U1 and U2.
  • Advantages of such a peeling device 3 include, for example, the conventional example for the lower work S1 shown in FIGS. 19A and 19B and the upper work S2 shown in FIGS. 19C and 19D.
  • the adhesive tape T2 is simply replaced as shown in FIG.
  • it can be used for upper side peeling and lower side peeling.
  • the peeling device 3 since the peeling device 3 has an independent configuration that can be attached to and detached from the laminating device, a transfer machine or the like is not necessary, and thus adhesion of dust and the like can be prevented. Furthermore, since the peeling device 3 and the coating device can be exchanged, various products can be handled.
  • the XY- ⁇ table 311 on the turntable 1 can be separated from the motors 450, 460, and 470 by the clutches 420, 430, and 440 and moved as it is. For this reason, it is not necessary to mount a drive source etc. in the turntable 1, a power supply and a control line become unnecessary, and stable operation
  • the drive source since the drive source only needs to be provided in one place, it can be configured at low cost. Further, since the XY- ⁇ table 311 can be small, it can be easily accommodated in a vacuum, and mixing of bubbles and the like can be easily realized. Furthermore, since the workpieces S1 and S2 can be bonded on the XY- ⁇ table 311 after positioning, it is possible to bond with high accuracy.
  • the detection device 4 detects the center of gravity and the inclination of the workpieces S1 and S2 at three points, accurate detection can be performed with a minimum processing load. Even when the workpieces S1 and S2 are curved or the like, the irradiation light from the CCD camera 41 is reflected by the reflecting surface 42a of the CCD camera 42, so that accurate detection can be performed. Therefore, highly accurate bonding based on accurate detection is possible.
  • Vacuum bonding can be performed at one position on the turntable 1, so that space can be saved. Moreover, since it is not necessary to position in the vacuum chamber 51, the apparatus can be made small and simplified. Further, when the pressure in the vacuum chamber 51 is reduced, the suction line in the suction portion 500 can be shut off simultaneously with the three-way valve 520 and at the same time as the pressure in the vacuum chamber 51. S1 can be prevented from coming off and stable operation can be realized. Moreover, since it switches with the single three-way valve
  • the protective member 511 of the suction portion 500 and the protective member 52a of the pressing device 5 are made of a porous sheet attached to an elastic member, the workpiece S1 is absorbed while absorbing the impact on the workpieces S1 and S2. , S2 can be prevented from sticking to the protective members 511 and 52a, and stable bonding can be realized. Further, compared to the case where the rubber surface is roughened by machining, the rubber is more slippery and less likely to be worn. Moreover, it is cheap compared with the case where the low energy irradiation process of rubber
  • the present invention is not limited to the embodiment as described above.
  • any material that can be used at present or in the future is applicable as the adhesive.
  • a material that is cured by externally radiating electromagnetic waves in a broad sense such as an ultraviolet curable resin or a radiation curable resin, or a temperature change, such as a thermosetting resin, can be applied.
  • a coating apparatus a well-known apparatus can be used as mentioned above.
  • an inkjet coating device, a screen printing device, a squeeze coating device, a dispensing nozzle coating device, and the like can be considered, but the invention is not limited to these.
  • an adhesive curing position 1E as the stop position of the turntable 1, as shown in FIG.
  • an electromagnetic wave irradiating device, a heating device, or the like at the curing position 1E, when the bonded workpiece comes to the curing position 1E, the electromagnetic wave is irradiated or heated. Is cured.
  • the detailed configuration of the peeling apparatus is not limited to that shown in the above embodiment.
  • the peeling head may be configured to be able to be pressed against the release paper while allowing the adhesive tape to move, and the drive mechanism may be configured to be able to contact and separate from the release paper.
  • the position and number of guide rollers can be freely set.
  • the conversion angle of the conversion unit is not limited to a right angle as long as the sending unit is removed from the longitudinal direction of the adhesive tape of the peeling head. Note that other well-known devices can be applied as the peeling device.
  • All known members can be applied to the attachment / detachment member for attaching / detaching the positioning unit and the drive unit.
  • a mechanical clutch that does not depend on coil excitation may be used.
  • any known connecting member having a structure that allows the displacement of the shaft can be used.
  • Protective material, thickness, hardness, etc. are also free.
  • a polyurethane porous film sheet adhered to urethane rubber with a hardness of 40 with a double-sided tape on the suction plate side, a polyurethane porous film sheet on urethane rubber with a hardness of 80
  • the number of cameras in the detection device is not limited to the above number. Only one unit, only two units in the horizontal direction, or only three to four units in the horizontal direction may be sequentially moved up and down. Alternatively, two units may be moved up and down, and moved back and forth. Further, the upper and lower three points may be taken at the same time, and the upper and lower three points may be imaged simultaneously. First, if two points on the diagonal are imaged and there is a point that cannot be extracted from this, another point may be imaged. After imaging four locations, three points may be extracted from three locations where extraction is possible or the image is good. As the number of cameras increases, the mechanism for driving the cameras can be simplified and imaging can be performed at high speed.
  • the lower CCD camera 42 is configured such that light from the light source can be vertically irradiated by the prism, and the upper CCD camera 41 receives the light irradiated upward. You may do it.
  • the lower CCD camera 42 may be configured to reflect the upper light by the reflecting surface 42a so that the upper and lower images can be imaged and the light from the light source can be irradiated vertically.
  • the material of the reflecting surface may be metal, glass, resin, etc., but any material can be used as long as it can reflect the irradiated light.
  • the reflection surface may be formed integrally with the camera casing.
  • the work to be bonded is typically a cover panel and a liquid crystal module (a laminate of a display panel and a backlight), but can be widely applied as an apparatus for bonding elements constituting a display device. . Therefore, for example, the present invention can also be applied to a case where a touch panel and a liquid crystal module are bonded together.
  • Detecting objects for positioning can be changed as appropriate according to the workpiece.
  • the workpiece S2 that is the cover panel is bonded to the work S1 that is the liquid crystal module
  • the side of the frame H is a portion visually recognized by the user who purchased the product, if the frame H is inclined with respect to the workpiece S1, there is a high possibility that the frame H becomes a defective product.
  • positioning by three-point detection is more effective than positioning by two-point detection for the following reasons. That is, since the size and shape of the frame H are formed by printing or the like, there are cases where variations occur for each workpiece S2. For example, as shown in FIG. 42 (A), when the shape of the workpiece S1 and the frame H do not match, even if the two diagonal points are detected and the gravity center and the inclination of the diagonal line are matched, As shown in FIG. 42B, the frame H is positioned with respect to the workpiece S1 in a tilted state.
  • protective member 53 lifting mechanism 55 ... decompression pump 56 ... vacuum gauge 100 ... holding part 200 ... post part 300 ... positioning part 310 ... Placement unit 311 ... XY- ⁇ tables 312, 320, 330, 340 ... Shaft unit 313 ... Movable bases 313a, 313b Groove 314 ... Bellows 315 ... Pulley 321, 331, 345 ... Rotating shaft 322, 332 ... Eccentric rollers 323, 333, 346 ... Armature 341 ... Upper rotating shaft 342 ... Pulley 343 ... Timing belt 344 ... Bellows coupling 345 ... Lower rotating shaft 350 ... Lock part 351 ... Brake plate 352 ... Brake 353 ...
  • Input / output interface 650 ... Separation control part 651 ... Head control part 652 ... Rotation control part 653 ... Elevation control part 660 ... Position detection part 661 ... Camera drive part 662 ... Imaging control unit 663 ... 3-point extraction unit 664 ... Center of gravity calculation unit 665 ... Inclination calculation unit 670 ... Positioning control unit 671 ... Clutch control unit 672 ... Positioning calculation unit 673 ... Motor control unit 680 ... Vacuum control unit 681 ... Chamber control unit 682 ... Depressurization control unit 683 ... Vacuum calculation unit 683a ... Voltage determination unit 683b ... Expression selection unit 683c ... Pressure calculation unit 684 ... Valve control unit 685 ... Press control unit

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mathematical Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Liquid Crystal (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
PCT/JP2009/004373 2008-09-04 2009-09-04 貼合装置及びその制御方法 WO2010026768A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR1020147021358A KR101545459B1 (ko) 2008-09-04 2009-09-04 접합 장치 및 그 제어 방법
KR1020147021357A KR101545458B1 (ko) 2008-09-04 2009-09-04 접합 장치 및 그 제어 방법
JP2010527706A JP5090535B2 (ja) 2008-09-04 2009-09-04 貼合装置
CN200980134458.3A CN102144250B (zh) 2008-09-04 2009-09-04 贴合装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2008-227579 2008-09-04
JP2008227579 2008-09-04

Publications (1)

Publication Number Publication Date
WO2010026768A1 true WO2010026768A1 (ja) 2010-03-11

Family

ID=41796948

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2009/004373 WO2010026768A1 (ja) 2008-09-04 2009-09-04 貼合装置及びその制御方法

Country Status (5)

Country Link
JP (3) JP5090535B2 (ko)
KR (3) KR101586111B1 (ko)
CN (3) CN102937755B (ko)
TW (3) TWI457876B (ko)
WO (1) WO2010026768A1 (ko)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010282099A (ja) * 2009-06-05 2010-12-16 Shibaura Mechatronics Corp 貼合装置及び貼合方法
WO2014109198A1 (ja) * 2013-01-10 2014-07-17 住友化学株式会社 光学表示デバイスの製造装置および光学表示デバイスの生産システム
WO2014208526A1 (ja) * 2013-06-24 2014-12-31 住友化学株式会社 光学表示デバイスの生産システム
CN104698694A (zh) * 2015-03-26 2015-06-10 合肥京东方光电科技有限公司 一种液晶面板对合设备及方法
JP2015535940A (ja) * 2012-08-13 2015-12-17 ヒ ハン、ドン パネル取り付け装置
WO2018003578A1 (ja) * 2016-06-30 2018-01-04 日本電産サンキョー株式会社 アライメント装置
CN107632420A (zh) * 2017-09-12 2018-01-26 合肥惠科金扬科技有限公司 一种用于贴合液晶显示屏和背光源的装置
US9904062B2 (en) 2014-03-06 2018-02-27 Nlt Technologies, Ltd. Substrate laminating apparatus, substrate laminating method, and stereoscopic display device

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI463180B (zh) * 2012-03-30 2014-12-01 Au Optronics Corp 立體成像膜貼合方法及其貼合裝置
CN104678612B (zh) * 2013-11-29 2018-12-14 芝浦机械电子装置株式会社 基板贴合装置、显示面板制造装置及显示面板制造方法
KR102114027B1 (ko) * 2013-12-02 2020-05-22 주식회사 탑 엔지니어링 합착장치
JP6244199B2 (ja) * 2013-12-25 2017-12-06 芝浦メカトロニクス株式会社 表示装置用部材の製造装置及び製造方法
JP6404586B2 (ja) * 2014-03-31 2018-10-10 平田機工株式会社 製造方法及び製造装置
CN104698660B (zh) * 2015-03-20 2017-07-18 昆山龙腾光电有限公司 基板标记位置的抓取装置与抓取方法
KR101708189B1 (ko) * 2015-07-01 2017-02-20 안성룡 진공 합착장치
CN107808595B (zh) * 2016-09-08 2020-04-21 名硕电脑(苏州)有限公司 显示屏幕的贴合装置
CN106292012B (zh) * 2016-10-27 2019-07-12 武汉华星光电技术有限公司 用于对反射片的边缘贴设单面胶的贴合装置
JP6941986B2 (ja) * 2017-06-28 2021-09-29 芝浦メカトロニクス株式会社 保持装置、位置決め装置及び貼合装置
JP2019110027A (ja) * 2017-12-18 2019-07-04 オムロン株式会社 面光源装置の製造システム及び面光源装置の製造方法
CN109001925A (zh) * 2018-08-22 2018-12-14 湖北优利迪显示科技股份有限公司 一种液晶玻璃片对位贴合机
CN108873416A (zh) * 2018-08-28 2018-11-23 深圳市创晟达科技有限公司 一种小型智能液晶贴合机
CN109250927B (zh) * 2018-12-05 2021-11-12 福建世高智能科技有限公司 一种视觉识别玻璃合片叠差的方法及装置
KR20200093099A (ko) * 2019-01-25 2020-08-05 삼성디스플레이 주식회사 표시장치 제조용 스테이지 얼라인먼트 장치 및 방법
CN111694175B (zh) * 2020-06-30 2022-06-17 苏州精濑光电有限公司 一种停驻机构及检测装置
CN112213936B (zh) * 2020-09-28 2022-05-10 深圳市深科达智能装备股份有限公司 一种应用于圆形产品贴合的定位装置及定位方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1192716A (ja) * 1997-09-19 1999-04-06 Nippon Avionics Co Ltd 貼着物の貼着装置
JP2000258746A (ja) * 1999-03-08 2000-09-22 Nec Kagoshima Ltd 液晶パネル製造用の基板貼り合わせ装置
JP2004170975A (ja) * 2002-11-15 2004-06-17 Lg Phillips Lcd Co Ltd 液晶表示素子製造装置及びこれを利用した製造方法
JP2004358888A (ja) * 2003-06-06 2004-12-24 Lintec Corp 貼合装置及び貼合方法
JP2006119286A (ja) * 2004-10-20 2006-05-11 Ran Technical Service Kk 基板の貼り合わせ装置及び貼り合わせ方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3113212B2 (ja) * 1996-05-09 2000-11-27 富士通株式会社 プラズマディスプレイパネルの蛍光体層形成装置および蛍光体塗布方法
JP3440906B2 (ja) * 2000-01-07 2003-08-25 日本電気株式会社 プラズマディスプレイパネルの製造装置とその製造方法
JP2002023851A (ja) * 2000-07-06 2002-01-25 Canon Inc 複数の部材の位置合わせ方法及び装置
JP2003066466A (ja) * 2001-08-23 2003-03-05 Internatl Business Mach Corp <Ibm> 基板重ね合わせ装置、基板の貼り合わせ方法、および液晶セルの製造方法
TWI257515B (en) 2002-11-16 2006-07-01 Lg Philips Lcd Co Ltd Substrate bonding apparatus for liquid crystal display device
JP2004273682A (ja) * 2003-03-07 2004-09-30 Sharp Corp 処理装置
JP2005062236A (ja) * 2003-08-12 2005-03-10 Sharp Corp 表示パネルの製造方法および検査装置
JP4598463B2 (ja) * 2004-09-21 2010-12-15 芝浦メカトロニクス株式会社 真空装置、基板貼り合わせ装置、及び基板貼り合わせ方法
JP4329738B2 (ja) * 2005-07-14 2009-09-09 セイコーエプソン株式会社 液晶装置の製造装置、液晶装置の製造方法
JP2007281073A (ja) * 2006-04-04 2007-10-25 Canon Inc 基板搬送装置
KR101281123B1 (ko) * 2006-08-21 2013-07-02 엘아이지에이디피 주식회사 평판 표시패널용 기판합착장치
JP4400628B2 (ja) * 2007-02-01 2010-01-20 ウシオ電機株式会社 液晶パネルの貼り合せ方法
TWM330713U (en) * 2007-09-21 2008-04-11 Easy Field Corp Laminating machine of LCD-related panel components

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1192716A (ja) * 1997-09-19 1999-04-06 Nippon Avionics Co Ltd 貼着物の貼着装置
JP2000258746A (ja) * 1999-03-08 2000-09-22 Nec Kagoshima Ltd 液晶パネル製造用の基板貼り合わせ装置
JP2004170975A (ja) * 2002-11-15 2004-06-17 Lg Phillips Lcd Co Ltd 液晶表示素子製造装置及びこれを利用した製造方法
JP2004358888A (ja) * 2003-06-06 2004-12-24 Lintec Corp 貼合装置及び貼合方法
JP2006119286A (ja) * 2004-10-20 2006-05-11 Ran Technical Service Kk 基板の貼り合わせ装置及び貼り合わせ方法

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010282099A (ja) * 2009-06-05 2010-12-16 Shibaura Mechatronics Corp 貼合装置及び貼合方法
JP2015535940A (ja) * 2012-08-13 2015-12-17 ヒ ハン、ドン パネル取り付け装置
JP5828972B2 (ja) * 2013-01-10 2015-12-09 住友化学株式会社 光学表示デバイスの製造装置および光学表示デバイスの生産システム
WO2014109198A1 (ja) * 2013-01-10 2014-07-17 住友化学株式会社 光学表示デバイスの製造装置および光学表示デバイスの生産システム
KR101993029B1 (ko) 2013-01-10 2019-06-25 스미또모 가가꾸 가부시키가이샤 광학 표시 디바이스의 제조 장치 및 광학 표시 디바이스의 생산 시스템
KR20150104560A (ko) * 2013-01-10 2015-09-15 스미또모 가가꾸 가부시키가이샤 광학 표시 디바이스의 제조 장치 및 광학 표시 디바이스의 생산 시스템
JP2015006699A (ja) * 2013-06-24 2015-01-15 住友化学株式会社 光学表示デバイスの生産システム
WO2014208526A1 (ja) * 2013-06-24 2014-12-31 住友化学株式会社 光学表示デバイスの生産システム
US9904062B2 (en) 2014-03-06 2018-02-27 Nlt Technologies, Ltd. Substrate laminating apparatus, substrate laminating method, and stereoscopic display device
US10718953B2 (en) 2014-03-06 2020-07-21 Tianma Microelectronics Co., Ltd. Substrate laminating apparatus, substrate laminating method, and stereoscopic display device
CN104698694A (zh) * 2015-03-26 2015-06-10 合肥京东方光电科技有限公司 一种液晶面板对合设备及方法
CN104698694B (zh) * 2015-03-26 2018-03-13 合肥京东方光电科技有限公司 一种液晶面板对合设备及方法
WO2018003578A1 (ja) * 2016-06-30 2018-01-04 日本電産サンキョー株式会社 アライメント装置
CN107632420A (zh) * 2017-09-12 2018-01-26 合肥惠科金扬科技有限公司 一种用于贴合液晶显示屏和背光源的装置

Also Published As

Publication number Publication date
KR20140099559A (ko) 2014-08-12
TWI457876B (zh) 2014-10-21
CN102937754A (zh) 2013-02-20
CN102937755B (zh) 2015-04-15
KR20110065508A (ko) 2011-06-15
JP2012190047A (ja) 2012-10-04
TWI470595B (zh) 2015-01-21
JP5095876B2 (ja) 2012-12-12
CN102937755A (zh) 2013-02-20
JPWO2010026768A1 (ja) 2012-02-02
TW201303817A (zh) 2013-01-16
CN102937754B (zh) 2015-09-23
CN102144250B (zh) 2014-03-12
KR101545458B1 (ko) 2015-08-18
JP5095875B2 (ja) 2012-12-12
CN102144250A (zh) 2011-08-03
JP5090535B2 (ja) 2012-12-05
KR101586111B1 (ko) 2016-01-15
JP2012230389A (ja) 2012-11-22
TW201305989A (zh) 2013-02-01
KR20140107660A (ko) 2014-09-04
KR101545459B1 (ko) 2015-08-18
TWI493516B (zh) 2015-07-21
TW201027479A (en) 2010-07-16

Similar Documents

Publication Publication Date Title
JP5090535B2 (ja) 貼合装置
JP6941986B2 (ja) 保持装置、位置決め装置及び貼合装置
JP5523646B1 (ja) 貼合デバイスの製造装置
JPWO2012029110A1 (ja) 表示パネルの製造方法及びその製造システム
JP2012058417A (ja) タッチパネル付き３ｄ表示パネル装置の組立システム
JP2016008985A (ja) 表示装置用部材の製造装置及び表示装置用部材の製造方法
JP2007047304A (ja) 液晶表示装置の製造装置および製造方法ならびに液晶表示装置
JP2014194520A (ja) 基板貼り合わせ装置及び基板貼り合わせ用具
JP6244199B2 (ja) 表示装置用部材の製造装置及び製造方法
KR102213748B1 (ko) 디스플레이 패널 합착 시스템 및 이를 이용한 디스플레이 패널 합착 방법
TWI581866B (zh) 黏合劑塗布裝置及方法、顯示裝置用構件製造裝置及方法
JP7044228B2 (ja) 基板組立装置
JP2013097282A (ja) 基板組立装置
US10631416B2 (en) Compression bonding apparatus and compression bonding method
JP5510395B2 (ja) 部品実装装置及び部品実装方法
JP2013137450A (ja) 基板の貼り合せ装置及び基板の貼り合せ方法。
JP2005131993A (ja) シート貼付け装置
JP5507074B2 (ja) 基板の貼合わせ方法及び基板貼合わせ装置
KR20100063251A (ko) 구동용 회로기판 본딩 장치

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 200980134458.3

Country of ref document: CN

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 09811298

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 2010527706

Country of ref document: JP

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE

ENP Entry into the national phase

Ref document number: 20117007829

Country of ref document: KR

Kind code of ref document: A

122 Ep: pct application non-entry in european phase

Ref document number: 09811298

Country of ref document: EP

Kind code of ref document: A1