WO2006123736A1 - アルミニウム又はアルミニウム合金の耐食処理方法 - Google Patents
アルミニウム又はアルミニウム合金の耐食処理方法 Download PDFInfo
- Publication number
- WO2006123736A1 WO2006123736A1 PCT/JP2006/309917 JP2006309917W WO2006123736A1 WO 2006123736 A1 WO2006123736 A1 WO 2006123736A1 JP 2006309917 W JP2006309917 W JP 2006309917W WO 2006123736 A1 WO2006123736 A1 WO 2006123736A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- aluminum
- aluminum alloy
- corrosion resistance
- acid
- treatment
- Prior art date
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
- C25D11/02—Anodisation
- C25D11/04—Anodisation of aluminium or alloys based thereon
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
- C25D11/02—Anodisation
- C25D11/04—Anodisation of aluminium or alloys based thereon
- C25D11/12—Anodising more than once, e.g. in different baths
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
- C25D11/02—Anodisation
- C25D11/04—Anodisation of aluminium or alloys based thereon
- C25D11/06—Anodisation of aluminium or alloys based thereon characterised by the electrolytes used
- C25D11/08—Anodisation of aluminium or alloys based thereon characterised by the electrolytes used containing inorganic acids
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D21/00—Processes for servicing or operating cells for electrolytic coating
- C25D21/02—Heating or cooling
Definitions
- the present invention relates to a corrosion resistance treatment method for aluminum or an aluminum alloy.
- Patent Document 1 Conventionally, as a method of applying corrosion resistance to aluminum or an aluminum alloy, for example, in Patent Document 1, a surface of an aluminum alloy is treated with a noble anodic acid soot and heated to be degassed. A method is disclosed.
- each of A1050 alloy, A5052 alloy and A6061 alloy is degreased with a weak alkaline degreasing solution and then desmutted in an aqueous nitric acid solution to obtain adipine.
- a barrier type anodizing treatment with acid ammonium was carried out, and when the form of the formed barrier type anodizing film was observed with a scanning electron microscope, a relatively continuous film was formed on the A1050 alloy.
- the films formed on the A5052 alloy and the A6061 alloy have a problem in the corrosion resistance with many defects and the gas release characteristics in a vacuum atmosphere.
- Patent Document 1 Japanese Patent No. 3506827
- the present invention provides a dense anodized anodized film for imparting corrosion resistance to aluminum or aluminum alloy. Accordingly, it is an object of the present invention to provide a corrosion resistance treatment method for aluminum or an aluminum alloy so as to have excellent gas release characteristics.
- a dense acid having a thickness of 5 to 20 nm is formed on the surface of aluminum or aluminum alloy. And forming a barrier layer and thereafter performing a barrier type anodizing treatment.
- the present invention according to claim 2 is characterized in that, in the method according to claim 1, the oxide layer is subjected to an acid solution treatment with an acidic solution.
- the acidic solution contains 50 to 80% by weight of phosphoric acid and 1 to 5% by weight of nitric acid.
- the aluminum or aluminum alloy is immersed in 1 to 10 minutes by heating to ⁇ 100 ° C.
- the present invention according to claim 4 is the method according to any one of claims 1 to 3, wherein the aluminum or aluminum alloy on which the oxide layer is formed is subjected to a vacuum, air or nitrogen atmosphere in the aluminum Alternatively, the barrier type anodizing treatment is performed after heat-treating the aluminum alloy at 150 to 300 ° C.
- the barrier type anodized film is formed by forming a dense oxide layer before forming the barrier type anodized film for imparting corrosion resistance to aluminum or an aluminum alloy. It is possible to obtain a barrier type anodized film that can be made dense and has excellent corrosion resistance and gas release characteristics.
- Aluminum or aluminum alloy that can be used in the present invention is not particularly limited.
- the present invention is effective for 2000 series, 30000 series, 5000 series, and 6000 series aluminum alloys.
- the dense oxide layer formed on the aluminum or aluminum alloy has a thickness of 5 to 20 nm.
- a dense acid-oxide film is a continuous film having no pores of nanometer order or more except for defects due to the presence of non-metallic inclusions.
- this acid layer is less than 5 nm, it becomes a non-uniform oxide film that is difficult to grow continuously in layers, and if it exceeds 20 nm, a dense oxide layer cannot be formed and a porous structure is formed. This is because if a noria-type anodic acid film is grown thereafter, the amount of outgassing increases.
- the method for forming the acid layer is not particularly limited, but it is preferably carried out with an acidic solution.
- the acidic solution contains 50 to 80% by weight of phosphoric acid and 1 to 5% by weight of nitric acid. It is preferable to heat the acidic solution to 80-100 ° C and soak aluminum or aluminum alloy for 1-10 minutes.
- the oxide layer after forming the oxide layer, it is preferable to heat-treat the aluminum or aluminum alloy at 150 to 300 ° C in a vacuum, air or nitrogen atmosphere. This is because acidity can be promoted.
- the noble anodic acid treatment of aluminum or aluminum alloy on which the acid oxide layer is formed is performed by electrolysis with an electrolyte solution.
- aqueous electrolyte solution examples include adipates such as ammonium adipate, borate such as a mixture of boric acid and ammonium borate, and phosphates such as ammonium dihydrogen phosphate. , Tartrate, caate, phthalates such as potassium hydrogen phthalate, carbonates such as sodium carbonate, forces using solutions such as citrate, sodium chromate, etc., or a mixed solution thereof Can be used.
- electrolysis is performed by connecting to a power source so that aluminum or an aluminum alloy material serves as an anode, and an insoluble conductive material is used for the cathode.
- the electrolysis current is not particularly limited, but in the case of a direct current, the direct current density can be about 0.2 to 5 A / cm 2 , and the electrolysis time is an electrolysis such as the thickness of the film to be formed. It can be selected appropriately according to the conditions.
- the applied voltage is not particularly limited, but can be 20 to 500V.
- a surface-cut A5052 alloy disc with a diameter of 45 mm and a thickness of 3 mm was prepared as the workpiece.
- the object to be treated was immersed in an 85 ° C. solution containing 80% by weight phosphoric acid and 3% by weight nitric acid, and then subjected to an acid treatment for 2 minutes while stirring. Next, the object to be treated was immersed in pure water and again immersed in pure water for cleaning.
- the object to be treated was immersed in a 10 wt% ammonium adipate solution at 40 ° C., and a barrier type anodic oxide film was formed at a direct voltage of 200 V for 1 hour.
- This object to be treated was immersed in a solution at 85 ° C. containing 80% by weight phosphoric acid and 3% by weight nitric acid, and then subjected to an acid soaking treatment for 2 minutes while stirring.
- the object to be treated was immersed in pure water, immersed in 50 ° C. pure water, and again immersed in pure water for cleaning.
- Example 1 The same workpiece used in Example 1 was prepared.
- This object to be treated is immersed in a solution at room temperature containing 15% by weight nitric acid and 1% by weight hydrofluoric acid solution for 3 minutes, immersed in pure water, immersed in pure water at 50 ° C, and purified again. It was immersed in water and washed. The washed object was immersed in a 35 wt% nitric acid solution for 1 minute and washed with pure water.
- a barrier type anodic oxide film was formed under the same conditions as in Example 1.
- Example 1 The same workpiece used in Example 1 was prepared.
- This object to be treated was degreased and washed with acetone.
- a barrier-type anodic oxide film was formed on the cleaned object under the same conditions as in Example 1.
- FIG. 1A is a surface SEM image of Example 1
- FIG. 1B is a surface SEM image of Comparative Example 1.
- Example 1 and 2 and Comparative Examples 1 and 2 with an adipate ammonium before forming a noria-type anodic acid husk film were analyzed in the depth direction by Auger electron spectroscopy, and the surface oxide layer was analyzed. Extract 8 points of thickness (nm) so that the measurement positions of each sample correspond to each other. Table 2 shows the results.
- the surface oxide layer thickness is half the value of the oxygen peak.
- the power of the present invention is effective for pure aluminum, 2000 series, 3000 series, 5000 series, and 6000 series anoroleum alloys using an A5052 series aluminum alloy.
- ammonium borate, ammonium phosphate, etc., using ammonium adipate can be used for the barrier type anodizing treatment.
- the corrosion resistance treatment method for aluminum or aluminum alloy of the present invention can be used for imparting corrosion resistance to a member placed in a vacuum atmosphere such as a semiconductor manufacturing apparatus or a thin film forming apparatus.
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Treatment Of Metals (AREA)
- Inorganic Chemistry (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2006800008721A CN101031674B (zh) | 2005-05-18 | 2006-05-18 | 铝或铝合金的耐腐蚀处理方法 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005146043A JP4716779B2 (ja) | 2005-05-18 | 2005-05-18 | アルミニウム又はアルミニウム合金の耐食処理方法 |
JP2005-146043 | 2005-05-18 |
Publications (1)
Publication Number | Publication Date |
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WO2006123736A1 true WO2006123736A1 (ja) | 2006-11-23 |
Family
ID=37431308
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2006/309917 WO2006123736A1 (ja) | 2005-05-18 | 2006-05-18 | アルミニウム又はアルミニウム合金の耐食処理方法 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP4716779B2 (zh) |
KR (1) | KR100935964B1 (zh) |
CN (1) | CN101031674B (zh) |
TW (1) | TWI421380B (zh) |
WO (1) | WO2006123736A1 (zh) |
Cited By (1)
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US9961765B2 (en) * | 2015-12-15 | 2018-05-01 | International Business Machines Corporation | Security mesh and method of making |
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2005
- 2005-05-18 JP JP2005146043A patent/JP4716779B2/ja active Active
-
2006
- 2006-05-18 CN CN2006800008721A patent/CN101031674B/zh active Active
- 2006-05-18 TW TW95117694A patent/TWI421380B/zh active
- 2006-05-18 WO PCT/JP2006/309917 patent/WO2006123736A1/ja active Application Filing
- 2006-05-18 KR KR20077006012A patent/KR100935964B1/ko active IP Right Grant
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US9961765B2 (en) * | 2015-12-15 | 2018-05-01 | International Business Machines Corporation | Security mesh and method of making |
Also Published As
Publication number | Publication date |
---|---|
KR20070088517A (ko) | 2007-08-29 |
CN101031674A (zh) | 2007-09-05 |
TW200710279A (en) | 2007-03-16 |
JP2006322040A (ja) | 2006-11-30 |
CN101031674B (zh) | 2010-05-19 |
KR100935964B1 (ko) | 2010-01-08 |
JP4716779B2 (ja) | 2011-07-06 |
TWI421380B (zh) | 2014-01-01 |
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