WO2005056848A1 - 反射膜用の銀合金 - Google Patents
反射膜用の銀合金 Download PDFInfo
- Publication number
- WO2005056848A1 WO2005056848A1 PCT/JP2004/016097 JP2004016097W WO2005056848A1 WO 2005056848 A1 WO2005056848 A1 WO 2005056848A1 JP 2004016097 W JP2004016097 W JP 2004016097W WO 2005056848 A1 WO2005056848 A1 WO 2005056848A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- reflective film
- silver alloy
- silver
- additive element
- film according
- Prior art date
Links
- 229910001316 Ag alloy Inorganic materials 0.000 title claims abstract description 34
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims abstract description 24
- 229910052709 silver Inorganic materials 0.000 claims abstract description 24
- 239000004332 silver Substances 0.000 claims abstract description 24
- 239000000654 additive Substances 0.000 claims abstract description 21
- 230000000996 additive effect Effects 0.000 claims abstract description 20
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims abstract description 12
- 229910052733 gallium Inorganic materials 0.000 claims abstract description 11
- 238000002844 melting Methods 0.000 claims abstract description 11
- 230000008018 melting Effects 0.000 claims abstract description 10
- 229910052751 metal Inorganic materials 0.000 claims abstract description 10
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims abstract description 10
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims abstract description 8
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims abstract description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims abstract description 6
- 229910052763 palladium Inorganic materials 0.000 claims abstract description 6
- 229910052692 Dysprosium Inorganic materials 0.000 claims abstract description 5
- 229910052775 Thulium Inorganic materials 0.000 claims abstract description 5
- KBQHZAAAGSGFKK-UHFFFAOYSA-N dysprosium atom Chemical compound [Dy] KBQHZAAAGSGFKK-UHFFFAOYSA-N 0.000 claims abstract description 5
- 229910052697 platinum Inorganic materials 0.000 claims abstract description 5
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 claims abstract description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims abstract description 4
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims abstract description 4
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical group [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 4
- 229910052797 bismuth Inorganic materials 0.000 claims abstract description 4
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 claims abstract description 4
- 229910052791 calcium Inorganic materials 0.000 claims abstract description 4
- 239000011575 calcium Substances 0.000 claims abstract description 4
- 229910052732 germanium Inorganic materials 0.000 claims abstract description 4
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims abstract description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims abstract description 4
- 229910052737 gold Inorganic materials 0.000 claims abstract description 4
- 239000010931 gold Substances 0.000 claims abstract description 4
- 229910052738 indium Inorganic materials 0.000 claims abstract description 4
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims abstract description 4
- 229910052712 strontium Inorganic materials 0.000 claims abstract description 4
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 claims abstract description 4
- 229910052715 tantalum Inorganic materials 0.000 claims abstract description 4
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims abstract description 4
- 229910052718 tin Inorganic materials 0.000 claims abstract description 4
- 229910052725 zinc Inorganic materials 0.000 claims abstract description 4
- 239000011701 zinc Substances 0.000 claims abstract description 4
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims abstract description 3
- 229910052684 Cerium Inorganic materials 0.000 claims abstract description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims abstract description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 3
- 229910052693 Europium Inorganic materials 0.000 claims abstract description 3
- 229910052688 Gadolinium Inorganic materials 0.000 claims abstract description 3
- 229910052689 Holmium Inorganic materials 0.000 claims abstract description 3
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims abstract description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims abstract description 3
- 229910052779 Neodymium Inorganic materials 0.000 claims abstract description 3
- 229910052777 Praseodymium Inorganic materials 0.000 claims abstract description 3
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims abstract description 3
- 229910052772 Samarium Inorganic materials 0.000 claims abstract description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 3
- 229910052771 Terbium Inorganic materials 0.000 claims abstract description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims abstract description 3
- 229910052769 Ytterbium Inorganic materials 0.000 claims abstract description 3
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims abstract description 3
- 229910052796 boron Inorganic materials 0.000 claims abstract description 3
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 claims abstract description 3
- 229910052804 chromium Inorganic materials 0.000 claims abstract description 3
- 239000011651 chromium Substances 0.000 claims abstract description 3
- 229910052802 copper Inorganic materials 0.000 claims abstract description 3
- 239000010949 copper Substances 0.000 claims abstract description 3
- OGPBJKLSAFTDLK-UHFFFAOYSA-N europium atom Chemical compound [Eu] OGPBJKLSAFTDLK-UHFFFAOYSA-N 0.000 claims abstract description 3
- UIWYJDYFSGRHKR-UHFFFAOYSA-N gadolinium atom Chemical compound [Gd] UIWYJDYFSGRHKR-UHFFFAOYSA-N 0.000 claims abstract description 3
- 229910052735 hafnium Inorganic materials 0.000 claims abstract description 3
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 claims abstract description 3
- KJZYNXUDTRRSPN-UHFFFAOYSA-N holmium atom Chemical compound [Ho] KJZYNXUDTRRSPN-UHFFFAOYSA-N 0.000 claims abstract description 3
- 229910052741 iridium Inorganic materials 0.000 claims abstract description 3
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 claims abstract description 3
- 229910052742 iron Inorganic materials 0.000 claims abstract description 3
- 229910052746 lanthanum Inorganic materials 0.000 claims abstract description 3
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 claims abstract description 3
- 239000011133 lead Substances 0.000 claims abstract description 3
- 229910052749 magnesium Inorganic materials 0.000 claims abstract description 3
- 239000011777 magnesium Substances 0.000 claims abstract description 3
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 claims abstract description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims abstract description 3
- 239000011733 molybdenum Substances 0.000 claims abstract description 3
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 claims abstract description 3
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 3
- 229910052758 niobium Inorganic materials 0.000 claims abstract description 3
- 239000010955 niobium Substances 0.000 claims abstract description 3
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims abstract description 3
- PUDIUYLPXJFUGB-UHFFFAOYSA-N praseodymium atom Chemical compound [Pr] PUDIUYLPXJFUGB-UHFFFAOYSA-N 0.000 claims abstract description 3
- 229910052703 rhodium Inorganic materials 0.000 claims abstract description 3
- 239000010948 rhodium Substances 0.000 claims abstract description 3
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 claims abstract description 3
- 229910052707 ruthenium Inorganic materials 0.000 claims abstract description 3
- KZUNJOHGWZRPMI-UHFFFAOYSA-N samarium atom Chemical compound [Sm] KZUNJOHGWZRPMI-UHFFFAOYSA-N 0.000 claims abstract description 3
- 229910052706 scandium Inorganic materials 0.000 claims abstract description 3
- SIXSYDAISGFNSX-UHFFFAOYSA-N scandium atom Chemical compound [Sc] SIXSYDAISGFNSX-UHFFFAOYSA-N 0.000 claims abstract description 3
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 3
- 239000010703 silicon Substances 0.000 claims abstract description 3
- GZCRRIHWUXGPOV-UHFFFAOYSA-N terbium atom Chemical compound [Tb] GZCRRIHWUXGPOV-UHFFFAOYSA-N 0.000 claims abstract description 3
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 3
- 239000010936 titanium Substances 0.000 claims abstract description 3
- NAWDYIZEMPQZHO-UHFFFAOYSA-N ytterbium Chemical compound [Yb] NAWDYIZEMPQZHO-UHFFFAOYSA-N 0.000 claims abstract description 3
- 229910052727 yttrium Inorganic materials 0.000 claims abstract description 3
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 claims abstract description 3
- 229910052726 zirconium Inorganic materials 0.000 claims abstract description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims abstract 2
- 229910052721 tungsten Inorganic materials 0.000 claims abstract 2
- 239000010937 tungsten Substances 0.000 claims abstract 2
- 239000002184 metal Substances 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 6
- 238000005477 sputtering target Methods 0.000 claims description 4
- -1 connorth Chemical compound 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 abstract description 18
- 229910017052 cobalt Inorganic materials 0.000 abstract 1
- 239000010941 cobalt Substances 0.000 abstract 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 abstract 1
- 239000010408 film Substances 0.000 description 38
- 238000012360 testing method Methods 0.000 description 28
- 239000010409 thin film Substances 0.000 description 27
- 238000002310 reflectometry Methods 0.000 description 21
- 239000000463 material Substances 0.000 description 16
- 230000007797 corrosion Effects 0.000 description 11
- 238000005260 corrosion Methods 0.000 description 11
- 238000004519 manufacturing process Methods 0.000 description 11
- 230000007423 decrease Effects 0.000 description 10
- 239000000758 substrate Substances 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 230000007774 longterm Effects 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 5
- 238000010025 steaming Methods 0.000 description 5
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 3
- 238000005245 sintering Methods 0.000 description 3
- 239000011593 sulfur Substances 0.000 description 3
- 229910052717 sulfur Inorganic materials 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000002776 aggregation Effects 0.000 description 2
- 238000004220 aggregation Methods 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 238000007429 general method Methods 0.000 description 2
- 229920000515 polycarbonate Polymers 0.000 description 2
- 239000004417 polycarbonate Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000005987 sulfurization reaction Methods 0.000 description 2
- 238000005303 weighing Methods 0.000 description 2
- 229910000807 Ga alloy Inorganic materials 0.000 description 1
- 206010039740 Screaming Diseases 0.000 description 1
- PMZURENOXWZQFD-UHFFFAOYSA-L Sodium Sulfate Chemical compound [Na+].[Na+].[O-]S([O-])(=O)=O PMZURENOXWZQFD-UHFFFAOYSA-L 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052938 sodium sulfate Inorganic materials 0.000 description 1
- 235000011152 sodium sulphate Nutrition 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 230000001502 supplementing effect Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C5/00—Alloys based on noble metals
- C22C5/06—Alloys based on silver
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C5/00—Alloys based on noble metals
- C22C5/06—Alloys based on silver
- C22C5/08—Alloys based on silver with copper as the next major constituent
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
- G11B7/258—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of reflective layers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
- G11B7/258—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of reflective layers
- G11B7/2585—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of reflective layers based on aluminium
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
- G11B7/258—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of reflective layers
- G11B7/259—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of reflective layers based on silver
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
- G11B7/268—Post-production operations, e.g. initialising phase-change recording layers, checking for defects
Definitions
- the present invention relates to a silver alloy suitable as a constituent material of a reflection film provided on an optical recording medium, a display, and the like.
- the present invention relates to a silver alloy for a reflective film that can maintain the reflectance even after long-term use.
- Silver is the most preferred material for a reflective film used in optical recording media, displays, and the like. Silver has a higher reflectivity and is less expensive than gold, which also has a higher reflectivity.
- the organic dye material is widely used as a constituent material of the recording layer of the rewritable medium, and the organic dye material has a large laser attenuation. By supplementing this decay.
- silver has a problem in that it changes color to black due to poor corrosion resistance and lowers reflectance.
- the cause of the corrosion of the reflective film differs depending on the apparatus to which the reflective film is applied.
- the organic dye material applied to the recording layer of the optical recording medium has poor corrosion resistance and has a high reflectance due to long-term use. There is a decrease.
- corrosion of the reflective film may occur due to humidity in the air or the like.
- the reflective film having a silver strength has a problem of deterioration of reflectance due to heat. Although the mechanism of the decrease in reflectivity due to this heating is not clear, it has been confirmed that when a silver thin film is heated, local aggregation of the thin film occurs, and a phenomenon that the underlying layer is exposed occurs. Therefore, since the reflective film of an optical recording medium, a plasma display or the like may be heated, heat resistance is also required.
- Patent Document 1 JP-A-2000-109943
- a red semiconductor laser (wavelength 650 nm) is currently used as a recording light source. Is standing. By applying this blue laser, it is possible to secure 5-6 times the storage capacity of current optical recording devices, and it is thought that the next generation of optical recording devices will use the blue laser. .
- the reflectivity of the reflective film varies depending on the wavelength of the incident laser light. It has been confirmed that the extent of the decrease in reflectivity due to corrosion is often greater than in the case of long-wavelength laser irradiation.
- the present invention has been made under the above background, and is a silver alloy constituting a reflective film of an optical recording medium or the like, which can function without reducing the reflectance even after long-term use. It is intended to provide a material that can be used. In addition, a material having a high reflectance with respect to short-wavelength laser light is provided.
- the inventors of the present invention desirably solve such a problem, as in the prior art, selected a suitable additive element while mainly using silver.
- a suitable additive element while mainly using silver.
- the addition of a metal element having a lower melting point than silver as an additional element has the effect of maintaining the reflectance, and is effective in improving heat resistance, moisture resistance, and sulfur resistance. And found that the present invention is useful.
- the present invention is a silver alloy for a reflection film of an optical recording medium, comprising silver as a main component and at least one metal element having a lower melting point than silver as a first additive element.
- the metal element having a lower melting point than silver which is the first additive element, it depends on which of the characteristics of the thin film is more important.
- aluminum, indium, tin, bismuth, gallium, zinc, strontium, calcium, and germanium are examples of low-melting metal elements useful for improving the performance of silver thin films.
- Aluminum, indium, and tin are particularly useful for improving the thin film's resistance to sulfur.
- bismuth, gallium, zinc, strontium, calcium, and germanium are useful for improving heat resistance and moisture resistance. Therefore, by including at least one of these metal elements, a silver thin film having high reflectance can be obtained.
- This silver-gallium alloy is suitable not only for a reflective layer for an optical recording medium but also for a reflective film for a display.
- a silver alloy to which platinum, palladium, thulium, and dysprosium are added as the second additive element can effectively suppress the aggregation phenomenon that occurs in the thin film material in a humid environment.
- Preferred alloy platinum, palladium, thulium, and dysprosium
- the concentration of the additional element that is, the sum of the concentration of the first additional element and the concentration of the second additional element is preferably 0.01 to 5.0 atomic%. At an addition amount of less than 0.01 atomic%, The effect of maintaining the reflectivity is lost. If the concentration of the added element exceeds 5.0 atomic%, the reflectivity decreases greatly depending on the operating environment and the wavelength of the incident laser light, and the reflectivity cannot be guaranteed. is there. A particularly preferred concentration is 0.01 to 1.5 atomic%. In this range, the reflectance can be maintained at a higher level regardless of the use environment and the wavelength of the laser beam.
- the silver alloy as a reflective film material according to the present invention described above can be manufactured by a melting method and a sintering method.
- a melting method it is possible to produce by a general method of weighing and melting and mixing each raw material, which is a particularly difficult point, and producing the mixture.
- the sintering method it is possible to produce by a general method of weighing and sintering each raw material, which is particularly difficult.
- the silver alloy according to the present invention is preferable as a reflective film, has characteristics, and suppresses a decrease in reflectance during use. In addition, as described later, even under irradiation with a short-wavelength laser beam, it shows a better reflectivity than a conventional reflective film material and maintains the same.
- the sputtering method is generally applied to the production of the reflection film of the optical recording medium. Therefore, the present invention can produce an optical recording medium, a display, and the like provided with a reflective film having preferable characteristics by using the silver alloy-powered snuttering target.
- the silver alloy according to the present invention exhibits better reflectance than the conventional reflective film material and maintains the same even under irradiation with short wavelength laser light. Therefore, it can be applied to a recording medium for an optical recording apparatus using a short wavelength laser as a light source, which will become a mainstream in the future.
- each metal is weighed so as to have a predetermined concentration and melted in a high-frequency melting furnace. And mixed to form an alloy. Then, this was poured into a mold and solidified to form an ingot, which was forged, rolled, and heat-treated, and then formed into a sputtering target.
- the manufactured thin film was first evaluated for heat resistance and moisture resistance. These properties are evaluated by exposing the thin film to the environment and measuring the reflectivity of the thin film after the test while changing the wavelength with a spectrophotometer. This was done by examining the change as a criterion.
- Each measured value is a reflectance at a wavelength of 400 nm, 550 nm, and 650 nm (corresponding to the wavelengths of blue, yellow, and red lasers, respectively).
- the table also shows the test results for thin films manufactured from a target of pure silver strength for comparison.
- Incident light wavelength 650nm
- the thin film produced from the silver alloy according to the present example showed a higher reflectance than silver in terms of the reflectance, confirming the effect of improving heat resistance and moisture resistance.
- the reflectance decreases as the wavelength of the incident light decreases.
- a DVD-R medium was manufactured using the silver-gallium-based silver alloy sputtering target manufactured in the present embodiment, and the characteristics of the optical recording medium as a reflection film were evaluated.
- a polycarbonate substrate 120 mm in diameter, 0.6 mm in thickness, 0.17 ⁇ m in group depth, 0.37 ⁇ m in group depth, 0.3 m in gnolev width
- a stamper on which a preformat 'pattern is formed And a gnolev pitch of 0.74 ⁇ m
- a metal-containing azo-based recording ink was applied on the upper surface of the substrate by spin coating and dried, and then a reflective film was formed with a thickness of 1200 A using the sputtering target manufactured in the present embodiment. Then, a polycarbonate substrate having the same dimensions as the substrate was bonded to the substrate by using an ultraviolet-curing resin to manufacture a DVD-R medium.
- the jitter value, PI error (PI8 error), and PO error in the initial state after the production were measured by using an optical disk evaluation device (optical disk evaluation device ODU1000 manufactured by Pulstec Industrial) on the manufactured DVD-R medium. And confirmed that they were within the DVD standard. After confirmation, an accelerated environmental test was performed in which the DVD-R medium was exposed to an environment at a temperature of 80 ° C and a relative humidity of 85%. A measurement was made.
- FIG. 1 to FIG. 4 show the relationship between the humidification time, the jitter value, the PI error, the PI8 error value, and the PO error measured in this test. These figures also show the results of a similar test performed on a DVD-R medium using pure silver as a reflection film and a commercially available DVD-R medium.
- the recording medium according to the present embodiment which includes the reflective film made of the silver-gallium-based silver alloy, clears the respective values even after long-time humidification. And long-term stability.
- the recording medium provided with the pure silver reflective film was not recognized by the recording apparatus after 150 hours of humidification and could not be used. It was also confirmed that the jitter value of the commercially available product exceeded the standard, and that the error value could meet the standard, but the characteristics were inferior to those of the recording medium according to the present embodiment.
- FIG. 1 is a diagram showing a result (jitter value) of an accelerated environment test performed on a DVD-R medium provided with a reflective film according to the present embodiment.
- ⁇ 2] A diagram showing a result (PI error value) of an accelerated environment test performed on a DVD-R medium provided with the reflective film according to the present embodiment.
- ⁇ 3 A diagram showing a result (PI8 error value) of an accelerated environment test performed on a DVD-R medium provided with the reflective film according to the present embodiment.
- ⁇ 4 A diagram showing the results (PO error value) of an accelerated environment test performed on a DVD-R medium provided with the reflective film according to the present embodiment.
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- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Optical Record Carriers And Manufacture Thereof (AREA)
- Physical Vapour Deposition (AREA)
- Manufacturing Optical Record Carriers (AREA)
Abstract
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP04793205A EP1736558A4 (en) | 2003-12-10 | 2004-10-29 | SILVER ALLOY FOR REFLECTIVE FILM |
JP2005516066A JPWO2005056848A1 (ja) | 2003-12-10 | 2004-10-29 | 反射膜用の銀合金 |
US10/534,288 US7413618B2 (en) | 2003-12-10 | 2004-10-29 | Silver alloy for reflective film |
TW093137601A TWI288178B (en) | 2003-12-10 | 2004-12-06 | Silver alloy for reflective film |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003411718 | 2003-12-10 | ||
JP2003-411718 | 2003-12-10 |
Publications (1)
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WO2005056848A1 true WO2005056848A1 (ja) | 2005-06-23 |
Family
ID=34675001
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2004/016097 WO2005056848A1 (ja) | 2003-12-10 | 2004-10-29 | 反射膜用の銀合金 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7413618B2 (ja) |
EP (1) | EP1736558A4 (ja) |
JP (1) | JPWO2005056848A1 (ja) |
MY (1) | MY136711A (ja) |
TW (1) | TWI288178B (ja) |
WO (1) | WO2005056848A1 (ja) |
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Also Published As
Publication number | Publication date |
---|---|
US20060093510A1 (en) | 2006-05-04 |
TWI288178B (en) | 2007-10-11 |
US7413618B2 (en) | 2008-08-19 |
EP1736558A1 (en) | 2006-12-27 |
EP1736558A4 (en) | 2009-06-17 |
TW200530411A (en) | 2005-09-16 |
JPWO2005056848A1 (ja) | 2007-07-05 |
MY136711A (en) | 2008-11-28 |
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