JP4500945B2 - 反射率維持特性に優れた銀合金 - Google Patents
反射率維持特性に優れた銀合金 Download PDFInfo
- Publication number
- JP4500945B2 JP4500945B2 JP2005516164A JP2005516164A JP4500945B2 JP 4500945 B2 JP4500945 B2 JP 4500945B2 JP 2005516164 A JP2005516164 A JP 2005516164A JP 2005516164 A JP2005516164 A JP 2005516164A JP 4500945 B2 JP4500945 B2 JP 4500945B2
- Authority
- JP
- Japan
- Prior art keywords
- silver
- thin film
- silver alloy
- recording medium
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C5/00—Alloys based on noble metals
- C22C5/06—Alloys based on silver
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
- G11B7/258—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of reflective layers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
- G11B7/244—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising organic materials only
- G11B7/246—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising organic materials only containing dyes
- G11B7/2467—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising organic materials only containing dyes azo-dyes
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
- G11B7/244—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising organic materials only
- G11B7/246—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising organic materials only containing dyes
- G11B7/247—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising organic materials only containing dyes methine or polymethine dyes
- G11B7/2472—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising organic materials only containing dyes methine or polymethine dyes cyanine
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
- G11B7/258—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of reflective layers
- G11B7/259—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of reflective layers based on silver
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
- G11B7/266—Sputtering or spin-coating layers
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Optical Record Carriers And Manufacture Thereof (AREA)
- Manufacturing Optical Record Carriers (AREA)
- Physical Vapour Deposition (AREA)
Description
Claims (2)
- 主成分である銀と、第1の添加元素であるモリブデンと、第2の添加元素であるガリウムと、からなる反射膜用の銀合金であって、
第1の添加元素と第2の添加元素との濃度の合計が、0.01〜3.5原子%である反射膜用の銀合金。 - 請求項1記載の銀合金からなるスパッタリングターゲット。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003411717 | 2003-12-10 | ||
JP2003411717 | 2003-12-10 | ||
PCT/JP2004/018366 WO2005056849A1 (ja) | 2003-12-10 | 2004-12-09 | 反射率維持特性に優れた銀合金 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2005056849A1 JPWO2005056849A1 (ja) | 2007-12-13 |
JP4500945B2 true JP4500945B2 (ja) | 2010-07-14 |
Family
ID=34675000
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005516164A Expired - Fee Related JP4500945B2 (ja) | 2003-12-10 | 2004-12-09 | 反射率維持特性に優れた銀合金 |
Country Status (4)
Country | Link |
---|---|
US (1) | US20070020138A1 (ja) |
EP (1) | EP1736559A4 (ja) |
JP (1) | JP4500945B2 (ja) |
WO (1) | WO2005056849A1 (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7514037B2 (en) * | 2002-08-08 | 2009-04-07 | Kobe Steel, Ltd. | AG base alloy thin film and sputtering target for forming AG base alloy thin film |
EP1889931A4 (en) * | 2005-06-10 | 2011-09-07 | Tanaka Precious Metal Ind | SILVER ALLOY WITH EXCELLENT MAINTENANCE OF REFLEXIVITY AND TRANSMISSIVITY |
JP2007035104A (ja) | 2005-07-22 | 2007-02-08 | Kobe Steel Ltd | 光情報記録媒体用Ag合金反射膜、光情報記録媒体および光情報記録媒体用Ag合金反射膜の形成用のAg合金スパッタリングターゲット |
JP4201006B2 (ja) * | 2005-10-31 | 2008-12-24 | ソニー株式会社 | 光記録媒体 |
JP4735734B2 (ja) * | 2009-04-02 | 2011-07-27 | Tdk株式会社 | 光メディア用スパッタリングターゲット、その製造方法、ならびに、光メディア、およびその製造方法 |
JP5666156B2 (ja) * | 2010-03-25 | 2015-02-12 | 株式会社徳力本店 | 微量元素添加Ag合金およびその製造方法 |
JP5742615B2 (ja) * | 2011-09-15 | 2015-07-01 | 三菱マテリアル株式会社 | 導電性膜及びその製造方法並びに導電性膜形成用銀合金スパッタリングターゲット及びその製造方法 |
JP2013177667A (ja) * | 2012-02-02 | 2013-09-09 | Kobe Steel Ltd | 反射膜および/または透過膜、もしくは電気配線および/または電極に用いられるAg合金膜、並びにAg合金スパッタリングターゲットおよびAg合金フィラー |
US9121100B2 (en) * | 2012-12-14 | 2015-09-01 | Intermolecular, Inc. | Silver based conductive layer for flexible electronics |
EP3168325B1 (de) | 2015-11-10 | 2022-01-05 | Materion Advanced Materials Germany GmbH | Sputtertarget auf der basis einer silberlegierung |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2749080B2 (ja) * | 1988-11-09 | 1998-05-13 | 株式会社日立製作所 | 情報記録用部材 |
JPH07105575A (ja) * | 1993-10-07 | 1995-04-21 | Mitsubishi Chem Corp | 光記録媒体 |
US6852384B2 (en) * | 1998-06-22 | 2005-02-08 | Han H. Nee | Metal alloys for the reflective or the semi-reflective layer of an optical storage medium |
US6544616B2 (en) * | 2000-07-21 | 2003-04-08 | Target Technology Company, Llc | Metal alloys for the reflective or the semi-reflective layer of an optical storage medium |
US7384677B2 (en) * | 1998-06-22 | 2008-06-10 | Target Technology Company, Llc | Metal alloys for the reflective or semi-reflective layer of an optical storage medium |
JP3365762B2 (ja) * | 2000-04-28 | 2003-01-14 | 株式会社神戸製鋼所 | 光情報記録媒体用の反射層または半透明反射層、光情報記録媒体及び光情報記録媒体用スパッタリングターゲット |
JP4571741B2 (ja) * | 2000-10-31 | 2010-10-27 | 株式会社フルヤ金属 | 電子部品用金属材料、電子部品、電子機器、金属材料の加工方法及び電子光学部品 |
SG116432A1 (en) * | 2000-12-26 | 2005-11-28 | Kobe Steel Ltd | Reflective layer or semi-transparent reflective layer for use in optical information recording media, optical information recording media and sputtering target for use in the optical information recording media. |
JP2003034828A (ja) * | 2001-02-15 | 2003-02-07 | Kobe Steel Ltd | 電磁波シールド用のAg合金膜、電磁波シールド用Ag合金膜形成体及び電磁波シールド用Ag合金スパッタリングターゲット |
JP2002319185A (ja) * | 2001-04-23 | 2002-10-31 | Sumitomo Metal Mining Co Ltd | 光記録ディスク反射膜用銀合金 |
JP3915114B2 (ja) * | 2001-11-26 | 2007-05-16 | 三菱マテリアル株式会社 | 光記録媒体の反射膜形成用銀合金スパッタリングターゲット |
JP2003160827A (ja) * | 2001-11-26 | 2003-06-06 | Mitsubishi Materials Corp | 光記録媒体の反射層形成用銀合金スパッタリングターゲット |
JP2003160860A (ja) * | 2001-11-27 | 2003-06-06 | Mitsubishi Materials Corp | 光記録媒体の反射膜形成用銀合金スパッタリングターゲット |
CN1290106C (zh) * | 2002-03-07 | 2006-12-13 | 株式会社理光 | 光记录媒体及其制造方法 |
JP4001823B2 (ja) * | 2003-02-04 | 2007-10-31 | デプト株式会社 | 薄膜形成用スパッタリングターゲット材、薄膜、電極配線層、光学記録媒体、電子部品、電子光学部品及び電子機器 |
TWI368819B (en) * | 2003-04-18 | 2012-07-21 | Target Technology Co Llc | Metal alloys for the reflective or the semi-reflective layer of an optical storage medium |
WO2005056851A1 (ja) * | 2003-12-10 | 2005-06-23 | Tanaka Kikinzoku Kogyo K.K. | 反射率維持特性に優れた銀合金 |
EP1734139A4 (en) * | 2003-12-10 | 2009-03-18 | Tanaka Precious Metal Ind | SILVER ALLOY WITH EXCELLENT PERFORMANCE IN THE MAINTENANCE OF REFLECTANCE |
WO2005056848A1 (ja) * | 2003-12-10 | 2005-06-23 | Tanaka Kikinzoku Kogyo K.K. | 反射膜用の銀合金 |
-
2004
- 2004-12-09 US US10/575,332 patent/US20070020138A1/en not_active Abandoned
- 2004-12-09 EP EP04820256A patent/EP1736559A4/en not_active Withdrawn
- 2004-12-09 JP JP2005516164A patent/JP4500945B2/ja not_active Expired - Fee Related
- 2004-12-09 WO PCT/JP2004/018366 patent/WO2005056849A1/ja active Application Filing
Also Published As
Publication number | Publication date |
---|---|
EP1736559A1 (en) | 2006-12-27 |
WO2005056849A1 (ja) | 2005-06-23 |
US20070020138A1 (en) | 2007-01-25 |
JPWO2005056849A1 (ja) | 2007-12-13 |
EP1736559A4 (en) | 2009-04-08 |
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