JP2010244600A - 光メディア用スパッタリングターゲット、その製造方法、ならびに、光メディア、およびその製造方法 - Google Patents
光メディア用スパッタリングターゲット、その製造方法、ならびに、光メディア、およびその製造方法 Download PDFInfo
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- JP2010244600A JP2010244600A JP2009090163A JP2009090163A JP2010244600A JP 2010244600 A JP2010244600 A JP 2010244600A JP 2009090163 A JP2009090163 A JP 2009090163A JP 2009090163 A JP2009090163 A JP 2009090163A JP 2010244600 A JP2010244600 A JP 2010244600A
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- B32B2307/40—Properties of the layers or laminate having particular optical properties
- B32B2307/412—Transparent
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/40—Properties of the layers or laminate having particular optical properties
- B32B2307/416—Reflective
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/40—Properties of the layers or laminate having particular optical properties
- B32B2307/418—Refractive
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/50—Properties of the layers or laminate having particular mechanical properties
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
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Abstract
【解決手段】Ta及びNbからなる群より選択される1又は2種の元素を0.1〜2at%、及び、Alを0.1〜1at%含み、残部がAg及び不可避的不純物である光メディア用スパッタリングターゲット、及び、基板上に上述の組成の反射膜を備える光メディアである。
【選択図】図1
Description
本実施形態に係る光メディア用スパッタリングターゲットは、Ta及びNbからなる群より選択される1又は2種の元素を0.1〜2at%、及び、Alを0.1〜1at%含み、残部がAg及び不可避的不純物である組成を有する。
続いて、上述の光メディア用スパッタリングターゲットの製造方法の一例について説明する。
Ag粉としては、電界銀粉等を利用できる。
Al粉、Ta粉、Nb粉、AgNbAl粉等としては、不活性雰囲気でアトマイズされた溶融アトマイズ粉等を利用できる。
続いて、光メディア用スパッタリングターゲットを用いて製造される光メディアの一例として光ディスク200の製造方法について説明する。
続いて、光ディスク100について説明する。図2に示す光ディスク100は、いわゆる、BD−ROMと言われる、書込みができない読み取り専用の光ディスクである。ここでは、光ディスク200と異なる点のみ説明する。
この第2の光ディスク100は、反射層20Aと中間層30との間に、保護層22、記録層24、保護層22を有しておらず、また、反射層20Bと透明カバー層40との間にも、保護層22、記録層24、保護層22が有していない。このような光ディスク100でも上述と同様の効果を奏する。
320メッシュ(粒径45μm)以下であり、かつ、純度99.9質量%の、Al粉、Ag粉、Ta粉、Nb粉、及び、Cr粉、さらに、平均粒径500μmであり純度99.9質量%のNd粉を用い、各粉を表1に示す原子組成となるように秤量し、乾式で混合し、各実施例及び比較例について混合粉体をそれぞれ得た。そして、各混合粉体を、真空中で焼結した。焼結条件は、圧力200kgf/cm2、温度プロファイルを、720℃まで30分で急速加熱し、720℃に30分維持し、その後、660℃に下げて、660℃に30分維持し、その後、室温まで徐冷することとした。
保護層22、記録層24形成前のディスク鏡面部分の反射膜20Aについて、AFMにて2μm2の領域について表面粗さRaを測定した。Ra<0.5nmを○、0.5≦Ra≦0.8nmを△、Ra>0.8nmを×とした。
光ディスク評価装置(商品名:DDU1000、パルステック工業社製:対物レンズ開口数=0.85、レーザ波長=405nm)を用い、9.84m/sec(2x相当)の線速度でBD−REディスクを回転させながら、記録パワー=6.2mW、消去パワー=3.7mWでマルチパルス発光パターンをディスクに照射して信号を記録し、その記録信号について、Time Interval Analyzer(商品名:TA−520、横河電機社製)を用いてジッターを測定した。ジッター6.8%未満を○、6.8%以上7.0%未満を△、7.0%以上を×とした。
80℃、80%RHの環境に1000時間保存した後、再びジッターを測定し、その変化量(増加分)が0.5%未満を○、0.5%以上1.0%未満を △、1.0%以上を ×とした。
Claims (5)
- Ta及びNbからなる群より選択される1又は2種の元素を0.1〜2at%、及び、Alを0.1〜1at%含み、残部がAg及び不可避的不純物である光メディア用スパッタリングターゲット。
- 基板と、
Ta及びNbからなる群より選択される1又は2種の元素を0.1〜2at%、及び、Alを0.1〜1at%含み、残部がAg及び不可避的不純物である組成を有し前記基板上に設けられた反射層と、
を備える光メディア。 - 前記反射層の成膜終了面側から読取用又は書込用のレーザビームが照射される請求項2に記載の光メディア。
- Ta及びNbからなる群より選択される1又は2種の元素を0.1〜2at%、及び、Alを0.1〜1at%含み、残部がAg及び不可避的不純物であるメディア用スパッタリングターゲットを用いて、反射層を成膜する工程を備える光メディアの製造方法。
- Ta及びNbからなる群より選択される1又は2種の元素を0.1〜2at%、及び、Alを0.1〜1at%含み、残部がAg及び不可避的不純物である組成を有する原料粉体を焼結する工程を備える光メディア用スパッタリングターゲットの製造方法。
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US12/723,237 US8105674B2 (en) | 2009-04-02 | 2010-03-12 | Sputtering target for making optical medium, method of making same, optical medium, and method of making same |
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KR20170010820A (ko) | 2014-05-23 | 2017-02-01 | 더 리젠츠 오브 더 유니버시티 오브 미시건 | 광전자 및 광자 공학 응용을 위한 도핑된 귀금속 초박막 |
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