USD894137S1 - Target profile for a physical vapor deposition chamber target - Google Patents

Target profile for a physical vapor deposition chamber target Download PDF

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Publication number
USD894137S1
USD894137S1 US29/690,617 US201929690617F USD894137S US D894137 S1 USD894137 S1 US D894137S1 US 201929690617 F US201929690617 F US 201929690617F US D894137 S USD894137 S US D894137S
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Prior art keywords
target
vapor deposition
physical vapor
deposition chamber
profile
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US29/690,617
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William Johanson
Kirankumar Savandaiah
Anthony Chih-Tang Chan
Siew Kit Hoi
Prashant Prabhakar Prabhu
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Applied Materials Inc
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Applied Materials Inc
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Assigned to APPLIED MATERIALS, INC. reassignment APPLIED MATERIALS, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: CHAN, ANTHONY CHIH-TANG, JOHANSON, WILLIAM, PRABHU, PRASHANT PRABHAKAR, SAVANDAIAH, KIRANKUMAR
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FIG. 1 is a top perspective view of a target profile for a physical vapor deposition chamber target, according to the new design.
FIG. 2 is a bottom perspective view thereof.
FIG. 3 is a top plan view thereof.
FIG. 4 is a bottom plan view thereof.
FIG. 5 is a right side elevation view thereof.
FIG. 6 is a left side elevation view thereof.
FIG. 7 is a front elevation view thereof.
FIG. 8 is a back elevation view thereof; and,
FIG. 9 is an enlarged cross sectional view taken along line 9-9 in FIG. 4.
Dashed lines in FIGS. 1-9 represent features of the target profile for a physical vapor deposition chamber target that form no part of the claimed design.

Claims (1)

    CLAIM
  1. We claim the ornamental design for a target profile for a physical vapor deposition chamber target, as shown and described.
US29/690,617 2017-10-05 2019-05-09 Target profile for a physical vapor deposition chamber target Active USD894137S1 (en)

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US29/621,221 USD851613S1 (en) 2017-10-05 2017-10-05 Target profile for a physical vapor deposition chamber target
US29/690,617 USD894137S1 (en) 2017-10-05 2019-05-09 Target profile for a physical vapor deposition chamber target

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USD908645S1 (en) * 2019-08-26 2021-01-26 Applied Materials, Inc. Sputtering target for a physical vapor deposition chamber
USD933726S1 (en) * 2020-07-31 2021-10-19 Applied Materials, Inc. Deposition ring for a semiconductor processing chamber
USD933725S1 (en) * 2019-02-08 2021-10-19 Applied Materials, Inc. Deposition ring for a substrate processing chamber
USD937329S1 (en) 2020-03-23 2021-11-30 Applied Materials, Inc. Sputter target for a physical vapor deposition chamber
USD940765S1 (en) 2020-12-02 2022-01-11 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD946638S1 (en) 2017-12-11 2022-03-22 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
US11581166B2 (en) 2020-07-31 2023-02-14 Applied Materials, Inc. Low profile deposition ring for enhanced life
USD989012S1 (en) * 2020-09-17 2023-06-13 Ebara Corporation Elastic membrane
USD1006768S1 (en) * 2021-01-07 2023-12-05 Solaero Technologies Corp. Semiconductor wafer for mosaic solar cell fabrication
USD1007449S1 (en) 2021-05-07 2023-12-12 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD1010415S1 (en) * 2021-10-27 2024-01-09 Mirka Ltd Backing pad for sander
USD1012051S1 (en) * 2019-06-17 2024-01-23 Tokyo Electron Limited Electrostatic chuck for semiconductor manufacturing device
USD1029602S1 (en) * 2022-01-04 2024-06-04 Noritake Co., Limited Polishing pad dresser
USD1053230S1 (en) 2022-05-19 2024-12-03 Applied Materials, Inc. Sputter target for a physical vapor deposition chamber
USD1057675S1 (en) * 2021-04-12 2025-01-14 Lam Research Corporation Pedestal for a substrate processing system
USD1071103S1 (en) * 2022-04-11 2025-04-15 Applied Materials, Inc. Gas distribution plate
USD1072774S1 (en) * 2021-02-06 2025-04-29 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD1085029S1 (en) * 2022-07-19 2025-07-22 Applied Materials, Inc. Gas distribution plate
USD1104086S1 (en) * 2021-08-21 2025-12-02 Applied Materials, Inc. Gas distribution plate
USD1103948S1 (en) * 2021-08-21 2025-12-02 Applied Materials, Inc. Gas distribution plate
USD1110975S1 (en) 2022-01-12 2026-02-03 Applied Materials Inc. Collimator for a physical vapor deposition (PVD) chamber
USD1117121S1 (en) * 2023-07-07 2026-03-10 Lam Research Corporation Pedestal for a substrate processing system
USD1117120S1 (en) * 2023-07-07 2026-03-10 Lam Research Corporation Pedestal for a substrate processing system

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USD873782S1 (en) * 2016-05-17 2020-01-28 Electro Scientific Industries, Inc Component carrier plate
USD851613S1 (en) * 2017-10-05 2019-06-18 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
US10746511B2 (en) 2017-11-06 2020-08-18 JMA Outdoors, Inc. Apparatus for generating a vitals target
USD877101S1 (en) 2018-03-09 2020-03-03 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD917003S1 (en) * 2018-06-06 2021-04-20 JMA Outdoors, Inc. Simulating target
USD931372S1 (en) * 2020-12-15 2021-09-21 Shenzhen Lingtuowan Technology Co., Ltd. Target toy set
USD1066620S1 (en) * 2021-02-12 2025-03-11 Applied Materials, Inc. Patterned heater pedestal with groove extensions
USD1037778S1 (en) * 2022-07-19 2024-08-06 Applied Materials, Inc. Gas distribution plate

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