TWM366753U - Showerhead electrode - Google Patents

Showerhead electrode Download PDF

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Publication number
TWM366753U
TWM366753U TW097222708U TW97222708U TWM366753U TW M366753 U TWM366753 U TW M366753U TW 097222708 U TW097222708 U TW 097222708U TW 97222708 U TW97222708 U TW 97222708U TW M366753 U TWM366753 U TW M366753U
Authority
TW
Taiwan
Prior art keywords
distance
electrode
hole
gas
vertical distance
Prior art date
Application number
TW097222708U
Other languages
English (en)
Chinese (zh)
Inventor
Babak Kadkhodayan
Rajinder Dhindsa
La Llera Anthony De
Michael C Kellogg
Original Assignee
Lam Res Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lam Res Corp filed Critical Lam Res Corp
Publication of TWM366753U publication Critical patent/TWM366753U/zh

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32091—Radio frequency generated discharge the radio frequency energy being capacitively coupled to the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • H01J37/32449—Gas control, e.g. control of the gas flow
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
  • Chemical Vapour Deposition (AREA)
  • Plasma Technology (AREA)
TW097222708U 2008-07-07 2008-12-18 Showerhead electrode TWM366753U (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US12/216,525 US8206506B2 (en) 2008-07-07 2008-07-07 Showerhead electrode

Publications (1)

Publication Number Publication Date
TWM366753U true TWM366753U (en) 2009-10-11

Family

ID=41236811

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097222708U TWM366753U (en) 2008-07-07 2008-12-18 Showerhead electrode

Country Status (7)

Country Link
US (1) US8206506B2 (ko)
JP (1) JP3150053U (ko)
KR (1) KR200454710Y1 (ko)
CN (1) CN201341268Y (ko)
DE (1) DE202009009293U1 (ko)
MY (1) MY146761A (ko)
TW (1) TWM366753U (ko)

Families Citing this family (373)

* Cited by examiner, † Cited by third party
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JP3150053U (ja) 2009-04-30
CN201341268Y (zh) 2009-11-04
KR20100000514U (ko) 2010-01-15
US20100000683A1 (en) 2010-01-07
US8206506B2 (en) 2012-06-26
KR200454710Y1 (ko) 2011-07-21

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