TWI658168B - 用於含矽膜的沉積方法 - Google Patents

用於含矽膜的沉積方法 Download PDF

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TWI658168B
TWI658168B TW106103536A TW106103536A TWI658168B TW I658168 B TWI658168 B TW I658168B TW 106103536 A TW106103536 A TW 106103536A TW 106103536 A TW106103536 A TW 106103536A TW I658168 B TWI658168 B TW I658168B
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Taiwan
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plasma
branched
linear
group
film
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TW106103536A
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TW201720953A (zh
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李建恒
約翰 法蘭西斯 雷曼
新建 雷
雷蒙 尼克勞斯 孟提
羅伯特 戈登 瑞吉
威廉 羅伯特 恩特利
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美商慧盛材料美國責任有限公司
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