TWI599015B - 半導體裝置及感測系統 - Google Patents
半導體裝置及感測系統 Download PDFInfo
- Publication number
- TWI599015B TWI599015B TW102118830A TW102118830A TWI599015B TW I599015 B TWI599015 B TW I599015B TW 102118830 A TW102118830 A TW 102118830A TW 102118830 A TW102118830 A TW 102118830A TW I599015 B TWI599015 B TW I599015B
- Authority
- TW
- Taiwan
- Prior art keywords
- substrate
- semiconductor device
- signal
- sensing
- output
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/803—Pixels having integrated switching, control, storage or amplification elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of semiconductor or other solid state devices
- H01L25/16—Assemblies consisting of a plurality of semiconductor or other solid state devices the devices being of types provided for in two or more different subclasses of H10B, H10D, H10F, H10H, H10K or H10N, e.g. forming hybrid circuits
- H01L25/167—Assemblies consisting of a plurality of semiconductor or other solid state devices the devices being of types provided for in two or more different subclasses of H10B, H10D, H10F, H10H, H10K or H10N, e.g. forming hybrid circuits comprising optoelectronic devices, e.g. LED, photodiodes
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/60—Noise processing, e.g. detecting, correcting, reducing or removing noise
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/60—Noise processing, e.g. detecting, correcting, reducing or removing noise
- H04N25/68—Noise processing, e.g. detecting, correcting, reducing or removing noise applied to defects
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/70—SSIS architectures; Circuits associated therewith
- H04N25/71—Charge-coupled device [CCD] sensors; Charge-transfer registers specially adapted for CCD sensors
- H04N25/75—Circuitry for providing, modifying or processing image signals from the pixel array
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/70—SSIS architectures; Circuits associated therewith
- H04N25/76—Addressed sensors, e.g. MOS or CMOS sensors
- H04N25/78—Readout circuits for addressed sensors, e.g. output amplifiers or A/D converters
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/70—SSIS architectures; Circuits associated therewith
- H04N25/79—Arrangements of circuitry being divided between different or multiple substrates, chips or circuit boards, e.g. stacked image sensors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/10—Integrated devices
- H10F39/12—Image sensors
- H10F39/18—Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
- H10F39/184—Infrared image sensors
- H10F39/1843—Infrared image sensors of the hybrid type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Semiconductor Integrated Circuits (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201261655237P | 2012-06-04 | 2012-06-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201351607A TW201351607A (zh) | 2013-12-16 |
| TWI599015B true TWI599015B (zh) | 2017-09-11 |
Family
ID=48614093
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW102118830A TWI599015B (zh) | 2012-06-04 | 2013-05-28 | 半導體裝置及感測系統 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US9607971B2 (enExample) |
| EP (1) | EP2856750A2 (enExample) |
| JP (1) | JP2015521390A (enExample) |
| KR (1) | KR20150027061A (enExample) |
| CN (1) | CN104471925B (enExample) |
| TW (1) | TWI599015B (enExample) |
| WO (1) | WO2013183266A2 (enExample) |
Families Citing this family (32)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8427891B2 (en) * | 2007-04-17 | 2013-04-23 | Rambus Inc. | Hybrid volatile and non-volatile memory device with a shared interface circuit |
| US9478579B2 (en) * | 2012-10-16 | 2016-10-25 | Omnivision Technologies, Inc. | Stacked chip image sensor with light-sensitive circuit elements on the bottom chip |
| JP6494263B2 (ja) * | 2014-02-19 | 2019-04-03 | キヤノン株式会社 | 撮像素子及び電子機器 |
| TWI648986B (zh) | 2014-04-15 | 2019-01-21 | 日商新力股份有限公司 | 攝像元件、電子機器 |
| JP6539987B2 (ja) * | 2014-11-10 | 2019-07-10 | 株式会社ニコン | 撮像素子および撮像装置 |
| JP6218799B2 (ja) * | 2015-01-05 | 2017-10-25 | キヤノン株式会社 | 撮像素子及び撮像装置 |
| US10070088B2 (en) | 2015-01-05 | 2018-09-04 | Canon Kabushiki Kaisha | Image sensor and image capturing apparatus for simultaneously performing focus detection and image generation |
| US10145942B2 (en) | 2015-03-27 | 2018-12-04 | Intel Corporation | Techniques for spatio-temporal compressed time of flight imaging |
| JP6272387B2 (ja) * | 2015-05-29 | 2018-01-31 | キヤノン株式会社 | 撮像素子および撮像装置 |
| JP6652285B2 (ja) * | 2015-08-03 | 2020-02-19 | キヤノン株式会社 | 固体撮像装置 |
| JP6265962B2 (ja) * | 2015-11-27 | 2018-01-24 | キヤノン株式会社 | 撮像素子及び撮像装置 |
| KR102464716B1 (ko) | 2015-12-16 | 2022-11-07 | 삼성전자주식회사 | 반도체 장치 및 그 제조 방법 |
| JP2017174994A (ja) * | 2016-03-24 | 2017-09-28 | ソニー株式会社 | 撮像装置、電子機器 |
| JP2017175004A (ja) * | 2016-03-24 | 2017-09-28 | ソニー株式会社 | チップサイズパッケージ、製造方法、電子機器、および内視鏡 |
| JP6724980B2 (ja) * | 2016-03-29 | 2020-07-15 | 株式会社ニコン | 撮像素子および撮像装置 |
| JP6919154B2 (ja) * | 2016-03-31 | 2021-08-18 | ソニーグループ株式会社 | 固体撮像素子、撮像装置、および電子機器 |
| JP6779825B2 (ja) * | 2017-03-30 | 2020-11-04 | キヤノン株式会社 | 半導体装置および機器 |
| KR102275684B1 (ko) | 2017-04-18 | 2021-07-13 | 삼성전자주식회사 | 반도체 패키지 |
| JP7278209B2 (ja) * | 2017-04-25 | 2023-05-19 | ヌヴォトンテクノロジージャパン株式会社 | 固体撮像装置および撮像装置 |
| KR102477352B1 (ko) * | 2017-09-29 | 2022-12-15 | 삼성전자주식회사 | 반도체 패키지 및 이미지 센서 |
| JP6708620B2 (ja) * | 2017-12-15 | 2020-06-10 | キヤノン株式会社 | 撮像素子及び撮像装置 |
| JP7527755B2 (ja) * | 2018-02-09 | 2024-08-05 | キヤノン株式会社 | 光電変換装置および撮像システム |
| KR102598041B1 (ko) | 2018-02-28 | 2023-11-07 | 삼성전자주식회사 | 이미지 센서 칩 |
| KR102765858B1 (ko) | 2019-02-08 | 2025-02-12 | 삼성전자주식회사 | 이미지 센서 장치 |
| KR102661820B1 (ko) | 2019-02-11 | 2024-05-02 | 삼성전자주식회사 | 이미지 센서 및 그것의 구동 방법 |
| US10672101B1 (en) * | 2019-03-04 | 2020-06-02 | Omnivision Technologies, Inc. | DRAM with simultaneous read and write for multiwafer image sensors |
| TW202127637A (zh) * | 2019-11-19 | 2021-07-16 | 日商索尼半導體解決方案公司 | 受光元件、測距模組 |
| EP4099684A4 (en) * | 2020-01-31 | 2023-07-05 | Sony Semiconductor Solutions Corporation | Imaging device and imaging method |
| CN116075943A (zh) * | 2020-09-25 | 2023-05-05 | 株式会社半导体能源研究所 | 摄像装置及电子设备 |
| US20240276105A1 (en) * | 2021-05-24 | 2024-08-15 | Nikon Corporation | Imaging element and imaging device |
| TW202308372A (zh) * | 2021-06-22 | 2023-02-16 | 美商元平台技術有限公司 | 多層堆疊的相機影像感測電路 |
| TW202320535A (zh) * | 2021-10-08 | 2023-05-16 | 日商索尼半導體解決方案公司 | 攝像裝置 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| DE19732755A1 (de) | 1997-07-30 | 1998-02-05 | Sika Werke Gmbh | Mehrstufig reaktive Heißklebefolie zur Herstellung von flexiblen oder starren Mehrlagenschaltungen |
| US6177333B1 (en) * | 1999-01-14 | 2001-01-23 | Micron Technology, Inc. | Method for making a trench isolation for semiconductor devices |
| US6984571B1 (en) * | 1999-10-01 | 2006-01-10 | Ziptronix, Inc. | Three dimensional device integration method and integrated device |
| JP2001127302A (ja) * | 1999-10-28 | 2001-05-11 | Hitachi Ltd | 半導体薄膜基板、半導体装置、半導体装置の製造方法および電子装置 |
| JP2001251610A (ja) | 2000-03-06 | 2001-09-14 | Canon Inc | 撮像システム、画像処理装置及び方法並びに記憶媒体 |
| RU2190251C2 (ru) | 2000-03-21 | 2002-09-27 | Леонтьев Владимир Васильевич | Устройство накопления и обработки информации |
| US7170049B2 (en) * | 2003-12-30 | 2007-01-30 | Dxray, Inc. | Pixelated cadmium zinc telluride based photon counting mode detector |
| JP2005235825A (ja) * | 2004-02-17 | 2005-09-02 | Renesas Technology Corp | 電子回路モジュール |
| TW201101476A (en) | 2005-06-02 | 2011-01-01 | Sony Corp | Semiconductor image sensor module and method of manufacturing the same |
| US7362583B2 (en) * | 2005-12-30 | 2008-04-22 | Ati Technologies Inc. | Thermal management device for multiple heat producing devices |
| JP4289377B2 (ja) * | 2006-08-21 | 2009-07-01 | ソニー株式会社 | 物理量検出装置及び撮像装置 |
| US7400505B2 (en) * | 2006-10-10 | 2008-07-15 | International Business Machines Corporation | Hybrid cooling system and method for a multi-component electronics system |
| US7408776B2 (en) * | 2006-10-10 | 2008-08-05 | International Business Machines Corporation | Conductive heat transport cooling system and method for a multi-component electronics system |
| JP2008193359A (ja) | 2007-02-02 | 2008-08-21 | Olympus Imaging Corp | 撮像モジュール及び撮像素子パッケージ |
| JP2009005262A (ja) | 2007-06-25 | 2009-01-08 | Olympus Imaging Corp | 半導体装置および撮像装置 |
| US7884457B2 (en) | 2007-06-26 | 2011-02-08 | Stats Chippac Ltd. | Integrated circuit package system with dual side connection |
| JP2009134828A (ja) | 2007-11-30 | 2009-06-18 | Toshiba Corp | 半導体装置 |
| JP2010283787A (ja) | 2009-06-08 | 2010-12-16 | Panasonic Corp | 撮像装置 |
| JP5685898B2 (ja) | 2010-01-08 | 2015-03-18 | ソニー株式会社 | 半導体装置、固体撮像装置、およびカメラシステム |
| KR20110124065A (ko) | 2010-05-10 | 2011-11-16 | 하나 마이크론(주) | 적층형 반도체 패키지 |
| JP5974425B2 (ja) * | 2010-05-20 | 2016-08-23 | ソニー株式会社 | 固体撮像装置及びその製造方法並びに電子機器 |
| JP5633323B2 (ja) * | 2010-11-11 | 2014-12-03 | ソニー株式会社 | 固体撮像装置及び電子機器 |
| CN102158787B (zh) * | 2011-03-15 | 2015-01-28 | 迈尔森电子(天津)有限公司 | Mems麦克风与压力集成传感器及其制作方法 |
| JP5907687B2 (ja) * | 2011-09-14 | 2016-04-26 | オリンパス株式会社 | 撮像装置および信号転送装置 |
| US8890047B2 (en) * | 2011-09-21 | 2014-11-18 | Aptina Imaging Corporation | Stacked-chip imaging systems |
-
2013
- 2013-05-24 US US13/901,953 patent/US9607971B2/en not_active Expired - Fee Related
- 2013-05-28 TW TW102118830A patent/TWI599015B/zh not_active IP Right Cessation
- 2013-05-31 WO PCT/JP2013/003440 patent/WO2013183266A2/en not_active Ceased
- 2013-05-31 EP EP13728539.1A patent/EP2856750A2/en not_active Ceased
- 2013-05-31 CN CN201380027835.XA patent/CN104471925B/zh not_active Expired - Fee Related
- 2013-05-31 JP JP2014552415A patent/JP2015521390A/ja active Pending
- 2013-05-31 KR KR1020147033189A patent/KR20150027061A/ko not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| CN104471925A (zh) | 2015-03-25 |
| KR20150027061A (ko) | 2015-03-11 |
| WO2013183266A2 (en) | 2013-12-12 |
| EP2856750A2 (en) | 2015-04-08 |
| TW201351607A (zh) | 2013-12-16 |
| US9607971B2 (en) | 2017-03-28 |
| US20130320197A1 (en) | 2013-12-05 |
| WO2013183266A3 (en) | 2014-02-27 |
| JP2015521390A (ja) | 2015-07-27 |
| CN104471925B (zh) | 2017-12-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |