TWI531015B - 形成導線互連結構的方法 - Google Patents

形成導線互連結構的方法 Download PDF

Info

Publication number
TWI531015B
TWI531015B TW102125018A TW102125018A TWI531015B TW I531015 B TWI531015 B TW I531015B TW 102125018 A TW102125018 A TW 102125018A TW 102125018 A TW102125018 A TW 102125018A TW I531015 B TWI531015 B TW I531015B
Authority
TW
Taiwan
Prior art keywords
wire
forming
solder ball
substrate
bonding
Prior art date
Application number
TW102125018A
Other languages
English (en)
Chinese (zh)
Other versions
TW201405683A (zh
Inventor
湯瑪斯Ｊ 科洛西莫
約翰Ｗ 布倫納
Original Assignee
庫利克和索夫工業公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 庫利克和索夫工業公司 filed Critical 庫利克和索夫工業公司
Publication of TW201405683A publication Critical patent/TW201405683A/zh
Application granted granted Critical
Publication of TWI531015B publication Critical patent/TWI531015B/zh

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/01—Manufacture or treatment
    • H10W72/0198—Manufacture or treatment batch processes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/0711—Apparatus therefor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/50—Bond wires
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/01—Manufacture or treatment
    • H10W72/015—Manufacture or treatment of bond wires
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/01—Manufacture or treatment
    • H10W72/015—Manufacture or treatment of bond wires
    • H10W72/01551—Changing the shapes of bond wires
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/0711—Apparatus therefor
    • H10W72/07141—Means for applying energy, e.g. ovens or lasers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/0711—Apparatus therefor
    • H10W72/07168—Means for storing or moving the material for the connector
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/075—Connecting or disconnecting of bond wires
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/075—Connecting or disconnecting of bond wires
    • H10W72/07502—Connecting or disconnecting of bond wires using an auxiliary member
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/075—Connecting or disconnecting of bond wires
    • H10W72/07511—Treating the bonding area before connecting, e.g. by applying flux or cleaning
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/075—Connecting or disconnecting of bond wires
    • H10W72/07521—Aligning
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/075—Connecting or disconnecting of bond wires
    • H10W72/07531—Techniques
    • H10W72/07532—Compression bonding, e.g. thermocompression bonding
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/075—Connecting or disconnecting of bond wires
    • H10W72/07531—Techniques
    • H10W72/07532—Compression bonding, e.g. thermocompression bonding
    • H10W72/07533—Ultrasonic bonding, e.g. thermosonic bonding
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/50—Bond wires
    • H10W72/531—Shapes of wire connectors
    • H10W72/536—Shapes of wire connectors the connected ends being ball-shaped
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/50—Bond wires
    • H10W72/531—Shapes of wire connectors
    • H10W72/5363—Shapes of wire connectors the connected ends being wedge-shaped
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/50—Bond wires
    • H10W72/551—Materials of bond wires
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/50—Bond wires
    • H10W72/551—Materials of bond wires
    • H10W72/552—Materials of bond wires comprising metals or metalloids, e.g. silver
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/90—Bond pads, in general
    • H10W72/931—Shapes of bond pads

Landscapes

  • Wire Bonding (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
TW102125018A 2012-07-17 2013-07-12 形成導線互連結構的方法 TWI531015B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US201261672449P 2012-07-17 2012-07-17

Publications (2)

Publication Number Publication Date
TW201405683A TW201405683A (zh) 2014-02-01
TWI531015B true TWI531015B (zh) 2016-04-21

Family

ID=49949169

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102125018A TWI531015B (zh) 2012-07-17 2013-07-12 形成導線互連結構的方法

Country Status (6)

Country Link
US (3) US9502371B2 (https=)
JP (1) JP6297553B2 (https=)
KR (1) KR102094563B1 (https=)
CN (1) CN104471693B (https=)
TW (1) TWI531015B (https=)
WO (1) WO2014014643A1 (https=)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102094563B1 (ko) * 2012-07-17 2020-03-27 쿨리케 앤드 소파 인더스트리즈, 인코포레이티드 와이어 상호접속 구조를 형성하는 방법
US9870946B2 (en) * 2013-12-31 2018-01-16 Taiwan Semiconductor Manufacturing Company, Ltd. Wafer level package structure and method of forming same
JP5686912B1 (ja) * 2014-02-20 2015-03-18 株式会社新川 バンプ形成方法、バンプ形成装置及び半導体装置の製造方法
KR20160055100A (ko) * 2014-10-03 2016-05-17 인텔 코포레이션 수직 기둥들을 갖는 오버랩핑 적층형 다이 패키지
US11145620B2 (en) * 2019-03-05 2021-10-12 Asm Technology Singapore Pte Ltd Formation of bonding wire vertical interconnects
US11543362B2 (en) * 2019-05-02 2023-01-03 Asmpt Singapore Pte. Ltd. Method for measuring the heights of wire interconnections
JP2022033633A (ja) 2020-08-17 2022-03-02 キオクシア株式会社 半導体装置
KR20220045684A (ko) 2020-10-06 2022-04-13 에스케이하이닉스 주식회사 지그재그 모양의 와이어를 포함하는 반도체 패키지
WO2022113193A1 (ja) * 2020-11-25 2022-06-02 株式会社新川 ワイヤ形成方法及び半導体装置の製造方法
US12057431B2 (en) * 2020-12-18 2024-08-06 Kulicke And Soffa Industries, Inc. Methods of forming wire interconnect structures and related wire bonding tools
WO2023042333A1 (ja) 2021-09-16 2023-03-23 株式会社新川 ピンワイヤ形成方法、及びワイヤボンディング装置
JP7741745B2 (ja) 2022-02-15 2025-09-18 キオクシア株式会社 半導体装置およびその製造方法
US12183711B2 (en) 2022-02-15 2024-12-31 Kulicke And Soffa Industries, Inc. Methods of determining a sequence for creating a plurality of wire loops in connection with a workpiece
WO2026024695A1 (en) * 2024-07-24 2026-01-29 Kulicke And Soffa Industries, Inc. Wire bonding systems and related methods of forming a vertical wire structure

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4213556A (en) * 1978-10-02 1980-07-22 General Motors Corporation Method and apparatus to detect automatic wire bonder failure
DE3536908A1 (de) * 1984-10-18 1986-04-24 Sanyo Electric Co., Ltd., Moriguchi, Osaka Induktivitaetselement und verfahren zur herstellung desselben
US5045975A (en) * 1987-05-21 1991-09-03 Cray Computer Corporation Three dimensionally interconnected module assembly
US5195237A (en) * 1987-05-21 1993-03-23 Cray Computer Corporation Flying leads for integrated circuits
US5172851A (en) * 1990-09-20 1992-12-22 Matsushita Electronics Corporation Method of forming a bump electrode and manufacturing a resin-encapsulated semiconductor device
US6295729B1 (en) * 1992-10-19 2001-10-02 International Business Machines Corporation Angled flying lead wire bonding process
US6835898B2 (en) * 1993-11-16 2004-12-28 Formfactor, Inc. Electrical contact structures formed by configuring a flexible wire to have a springable shape and overcoating the wire with at least one layer of a resilient conductive material, methods of mounting the contact structures to electronic components, and applications for employing the contact structures
US6836962B2 (en) * 1993-11-16 2005-01-04 Formfactor, Inc. Method and apparatus for shaping spring elements
US5421503A (en) * 1994-08-24 1995-06-06 Kulicke And Soffa Investments, Inc. Fine pitch capillary bonding tool
JPH09289276A (ja) * 1996-04-23 1997-11-04 Hitachi Ltd リードフレームおよびそれを用いた半導体装置
DE69739125D1 (de) * 1996-10-01 2009-01-02 Panasonic Corp Kapillare zum Drahtverbinden zur Herstellung von Höckerelektroden
JPH10135220A (ja) 1996-10-29 1998-05-22 Taiyo Yuden Co Ltd バンプ形成方法
JPH10135219A (ja) * 1996-10-29 1998-05-22 Taiyo Yuden Co Ltd バンプ形成方法
JP3189115B2 (ja) * 1996-12-27 2001-07-16 株式会社新川 半導体装置及びワイヤボンディング方法
US7032311B2 (en) * 2002-06-25 2006-04-25 Eli Razon Stabilized wire bonded electrical connections and method of making same
US7229906B2 (en) * 2002-09-19 2007-06-12 Kulicke And Soffa Industries, Inc. Method and apparatus for forming bumps for semiconductor interconnections using a wire bonding machine
JP3854232B2 (ja) * 2003-02-17 2006-12-06 株式会社新川 バンプ形成方法及びワイヤボンディング方法
US6815836B2 (en) * 2003-03-24 2004-11-09 Texas Instruments Incorporated Wire bonding for thin semiconductor package
US7227095B2 (en) * 2003-08-06 2007-06-05 Micron Technology, Inc. Wire bonders and methods of wire-bonding
CN1934691A (zh) * 2004-08-05 2007-03-21 精工爱普生株式会社 结合结构、引线结合方法、致动装置和液体喷射头
JP4298665B2 (ja) 2005-02-08 2009-07-22 株式会社新川 ワイヤボンディング方法
US7255538B2 (en) * 2005-02-09 2007-08-14 Hamilton Sundstrand Corporation Shrink-fit stress coupling for a shaft of differing materials
JP4744238B2 (ja) * 2005-08-29 2011-08-10 田中電子工業株式会社 ワイヤの切断方法
JP4530975B2 (ja) 2005-11-14 2010-08-25 株式会社新川 ワイヤボンディング方法
JP4509043B2 (ja) * 2006-02-14 2010-07-21 株式会社新川 スタッドバンプの形成方法
US8183684B2 (en) * 2007-03-23 2012-05-22 Semiconductor Components Industries, Llc Semiconductor device and method of manufacturing the same
KR102094563B1 (ko) * 2012-07-17 2020-03-27 쿨리케 앤드 소파 인더스트리즈, 인코포레이티드 와이어 상호접속 구조를 형성하는 방법

Also Published As

Publication number Publication date
US9865560B2 (en) 2018-01-09
JP6297553B2 (ja) 2018-03-20
US9502371B2 (en) 2016-11-22
US20170345787A1 (en) 2017-11-30
US20170040280A1 (en) 2017-02-09
CN104471693A (zh) 2015-03-25
CN104471693B (zh) 2018-05-08
JP2015533258A (ja) 2015-11-19
US20150132888A1 (en) 2015-05-14
TW201405683A (zh) 2014-02-01
WO2014014643A1 (en) 2014-01-23
US10153247B2 (en) 2018-12-11
KR102094563B1 (ko) 2020-03-27
KR20150036074A (ko) 2015-04-07

Similar Documents

Publication Publication Date Title
TWI531015B (zh) 形成導線互連結構的方法
JP5714195B2 (ja) 半導体装置の製造方法
JP3584930B2 (ja) 半導体装置及びその製造方法、回路基板並びに電子機器
JP2003243436A (ja) バンプの形成方法、バンプ付き半導体素子及びその製造方法、半導体装置及びその製造方法、回路基板並びに電子機器
JP2005268497A (ja) 半導体装置及び半導体装置の製造方法
JP2004247672A (ja) バンプ形成方法及びワイヤボンディング方法
JP2003243441A (ja) 半導体装置及びその製造方法、回路基板並びに電子機器
CN102187444B (zh) 导电凸部、引线环及导电凸部、引线环的形成方法
KR20070044812A (ko) 낮은 루프 와이어 접합을 위한 방법 및 시스템
CN103915423A (zh) 一种芯片三维堆叠封装结构及封装方法
US12300663B2 (en) Methods of forming wire interconnect structures and related wire bonding tools
US20170179065A1 (en) Electrical interconnections for semiconductor devices and methods for forming the same
US12374563B2 (en) Semiconductor device manufacturing method
CN106158778B (zh) 具有侧面接触垫和底部接触垫的集成电路封装
KR20090011564A (ko) 반도체 패키지 제조 방법
JP3813135B2 (ja) ワイヤボンディング方法
JP4616924B2 (ja) 半導体装置
JP2012146882A (ja) 半導体装置
KR100752664B1 (ko) 와이어 루프를 갖는 반도체 디바이스, 그 형성 방법 및와이어 루프를 형성하기 위한 와이어 본딩 장치
JP2007012642A (ja) ワイヤボンディング方法
CN117790447A (zh) 双针脚线键合
JP4558832B2 (ja) 半導体装置
JP2006324577A (ja) 半導体装置およびその製造方法
JP2008016668A (ja) 半導体装置の製造方法