TWI499629B - 半導體密封用環氧樹脂組成物及使用其之半導體裝置 - Google Patents
半導體密封用環氧樹脂組成物及使用其之半導體裝置 Download PDFInfo
- Publication number
- TWI499629B TWI499629B TW100118603A TW100118603A TWI499629B TW I499629 B TWI499629 B TW I499629B TW 100118603 A TW100118603 A TW 100118603A TW 100118603 A TW100118603 A TW 100118603A TW I499629 B TWI499629 B TW I499629B
- Authority
- TW
- Taiwan
- Prior art keywords
- epoxy resin
- group
- carbon atoms
- general formula
- resin composition
- Prior art date
Links
- 229920000647 polyepoxide Polymers 0.000 title claims description 166
- 239000003822 epoxy resin Substances 0.000 title claims description 164
- 239000000203 mixture Substances 0.000 title claims description 98
- 239000004065 semiconductor Substances 0.000 title claims description 92
- 125000004432 carbon atom Chemical group C* 0.000 claims description 136
- 150000001875 compounds Chemical class 0.000 claims description 116
- 125000000217 alkyl group Chemical group 0.000 claims description 69
- 229920001577 copolymer Polymers 0.000 claims description 49
- 229910052799 carbon Inorganic materials 0.000 claims description 48
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 47
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 47
- 239000010949 copper Substances 0.000 claims description 47
- 238000005538 encapsulation Methods 0.000 claims description 45
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 41
- 229910052802 copper Inorganic materials 0.000 claims description 41
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N diphenyl Chemical compound C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 claims description 38
- GLDOVTGHNKAZLK-UHFFFAOYSA-N octadecan-1-ol Chemical compound CCCCCCCCCCCCCCCCCCO GLDOVTGHNKAZLK-UHFFFAOYSA-N 0.000 claims description 37
- 125000003118 aryl group Chemical group 0.000 claims description 35
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 27
- 125000003545 alkoxy group Chemical group 0.000 claims description 20
- 239000004305 biphenyl Substances 0.000 claims description 19
- 235000010290 biphenyl Nutrition 0.000 claims description 19
- 125000003710 aryl alkyl group Chemical group 0.000 claims description 18
- GOQYKNQRPGWPLP-UHFFFAOYSA-N n-heptadecyl alcohol Natural products CCCCCCCCCCCCCCCCCO GOQYKNQRPGWPLP-UHFFFAOYSA-N 0.000 claims description 18
- 239000011256 inorganic filler Substances 0.000 claims description 13
- 229910003475 inorganic filler Inorganic materials 0.000 claims description 13
- ITMCEJHCFYSIIV-UHFFFAOYSA-N triflic acid Chemical compound OS(=O)(=O)C(F)(F)F ITMCEJHCFYSIIV-UHFFFAOYSA-N 0.000 claims description 9
- 239000004848 polyfunctional curative Substances 0.000 claims description 6
- 150000008064 anhydrides Chemical class 0.000 claims 1
- IAQRGUVFOMOMEM-ARJAWSKDSA-N cis-but-2-ene Chemical compound C\C=C/C IAQRGUVFOMOMEM-ARJAWSKDSA-N 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 description 50
- 238000003786 synthesis reaction Methods 0.000 description 50
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical compound O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 description 48
- JOXIMZWYDAKGHI-UHFFFAOYSA-N toluene-4-sulfonic acid Chemical compound CC1=CC=C(S(O)(=O)=O)C=C1 JOXIMZWYDAKGHI-UHFFFAOYSA-N 0.000 description 43
- -1 bis(methoxymethyl)biphenyl Oxide Chemical compound 0.000 description 40
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Natural products OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 32
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 24
- 229960003742 phenol Drugs 0.000 description 24
- 238000005227 gel permeation chromatography Methods 0.000 description 22
- 238000007789 sealing Methods 0.000 description 22
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 21
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 21
- 238000000034 method Methods 0.000 description 21
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 18
- 229920005989 resin Polymers 0.000 description 18
- 239000011347 resin Substances 0.000 description 18
- HFDVRLIODXPAHB-UHFFFAOYSA-N 1-tetradecene Chemical compound CCCCCCCCCCCCC=C HFDVRLIODXPAHB-UHFFFAOYSA-N 0.000 description 16
- 239000003054 catalyst Substances 0.000 description 16
- 238000005886 esterification reaction Methods 0.000 description 16
- 238000000465 moulding Methods 0.000 description 16
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 16
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 16
- 238000006243 chemical reaction Methods 0.000 description 15
- 230000032050 esterification Effects 0.000 description 15
- AFFLGGQVNFXPEV-UHFFFAOYSA-N 1-decene Chemical compound CCCCCCCCC=C AFFLGGQVNFXPEV-UHFFFAOYSA-N 0.000 description 14
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 13
- 239000002904 solvent Substances 0.000 description 12
- 125000001424 substituent group Chemical group 0.000 description 12
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 11
- 239000011342 resin composition Substances 0.000 description 11
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 10
- DIOQZVSQGTUSAI-UHFFFAOYSA-N n-butylhexane Natural products CCCCCCCCCC DIOQZVSQGTUSAI-UHFFFAOYSA-N 0.000 description 10
- RIOQSEWOXXDEQQ-UHFFFAOYSA-N triphenylphosphine Chemical compound C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 RIOQSEWOXXDEQQ-UHFFFAOYSA-N 0.000 description 10
- 239000003795 chemical substances by application Substances 0.000 description 9
- 238000009826 distribution Methods 0.000 description 9
- 238000011156 evaluation Methods 0.000 description 9
- 238000002156 mixing Methods 0.000 description 9
- 239000003960 organic solvent Substances 0.000 description 9
- 239000002244 precipitate Substances 0.000 description 9
- 239000000047 product Substances 0.000 description 9
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 9
- VQOXUMQBYILCKR-UHFFFAOYSA-N 1-Tridecene Chemical compound CCCCCCCCCCCC=C VQOXUMQBYILCKR-UHFFFAOYSA-N 0.000 description 8
- LIKMAJRDDDTEIG-UHFFFAOYSA-N 1-hexene Chemical compound CCCCC=C LIKMAJRDDDTEIG-UHFFFAOYSA-N 0.000 description 8
- 229910052782 aluminium Inorganic materials 0.000 description 8
- 229910052736 halogen Inorganic materials 0.000 description 8
- 239000000463 material Substances 0.000 description 8
- 239000000126 substance Substances 0.000 description 8
- 238000012360 testing method Methods 0.000 description 8
- AZQWKYJCGOJGHM-UHFFFAOYSA-N 1,4-benzoquinone Chemical compound O=C1C=CC(=O)C=C1 AZQWKYJCGOJGHM-UHFFFAOYSA-N 0.000 description 7
- KJCVRFUGPWSIIH-UHFFFAOYSA-N 1-naphthol Chemical compound C1=CC=C2C(O)=CC=CC2=C1 KJCVRFUGPWSIIH-UHFFFAOYSA-N 0.000 description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 7
- 150000002367 halogens Chemical class 0.000 description 7
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 7
- 125000004437 phosphorous atom Chemical group 0.000 description 7
- 229910052698 phosphorus Inorganic materials 0.000 description 7
- 229910000679 solder Inorganic materials 0.000 description 7
- 238000001721 transfer moulding Methods 0.000 description 7
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 6
- 239000005751 Copper oxide Substances 0.000 description 6
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 6
- 125000003277 amino group Chemical group 0.000 description 6
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 6
- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 description 6
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 6
- 229940125904 compound 1 Drugs 0.000 description 6
- 229940125773 compound 10 Drugs 0.000 description 6
- 229940126214 compound 3 Drugs 0.000 description 6
- 238000013329 compounding Methods 0.000 description 6
- 229910000431 copper oxide Inorganic materials 0.000 description 6
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 6
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 description 6
- ZLVXBBHTMQJRSX-VMGNSXQWSA-N jdtic Chemical compound C1([C@]2(C)CCN(C[C@@H]2C)C[C@H](C(C)C)NC(=O)[C@@H]2NCC3=CC(O)=CC=C3C2)=CC=CC(O)=C1 ZLVXBBHTMQJRSX-VMGNSXQWSA-N 0.000 description 6
- 239000007788 liquid Substances 0.000 description 6
- KJIFKLIQANRMOU-UHFFFAOYSA-N oxidanium;4-methylbenzenesulfonate Chemical compound O.CC1=CC=C(S(O)(=O)=O)C=C1 KJIFKLIQANRMOU-UHFFFAOYSA-N 0.000 description 6
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 6
- 125000003944 tolyl group Chemical group 0.000 description 6
- GHYOCDFICYLMRF-UTIIJYGPSA-N (2S,3R)-N-[(2S)-3-(cyclopenten-1-yl)-1-[(2R)-2-methyloxiran-2-yl]-1-oxopropan-2-yl]-3-hydroxy-3-(4-methoxyphenyl)-2-[[(2S)-2-[(2-morpholin-4-ylacetyl)amino]propanoyl]amino]propanamide Chemical compound C1(=CCCC1)C[C@@H](C(=O)[C@@]1(OC1)C)NC([C@H]([C@@H](C1=CC=C(C=C1)OC)O)NC([C@H](C)NC(CN1CCOCC1)=O)=O)=O GHYOCDFICYLMRF-UTIIJYGPSA-N 0.000 description 5
- QFLWZFQWSBQYPS-AWRAUJHKSA-N (3S)-3-[[(2S)-2-[[(2S)-2-[5-[(3aS,6aR)-2-oxo-1,3,3a,4,6,6a-hexahydrothieno[3,4-d]imidazol-4-yl]pentanoylamino]-3-methylbutanoyl]amino]-3-(4-hydroxyphenyl)propanoyl]amino]-4-[1-bis(4-chlorophenoxy)phosphorylbutylamino]-4-oxobutanoic acid Chemical compound CCCC(NC(=O)[C@H](CC(O)=O)NC(=O)[C@H](Cc1ccc(O)cc1)NC(=O)[C@@H](NC(=O)CCCCC1SC[C@@H]2NC(=O)N[C@H]12)C(C)C)P(=O)(Oc1ccc(Cl)cc1)Oc1ccc(Cl)cc1 QFLWZFQWSBQYPS-AWRAUJHKSA-N 0.000 description 5
- 239000004593 Epoxy Substances 0.000 description 5
- 150000001450 anions Chemical class 0.000 description 5
- 229940125797 compound 12 Drugs 0.000 description 5
- 229940125782 compound 2 Drugs 0.000 description 5
- 229940125898 compound 5 Drugs 0.000 description 5
- 238000007334 copolymerization reaction Methods 0.000 description 5
- 239000007822 coupling agent Substances 0.000 description 5
- 125000004093 cyano group Chemical group *C#N 0.000 description 5
- FHATWFATOZTOKS-UHFFFAOYSA-N decyl 4-methylbenzenesulfonate Chemical compound CCCCCCCCCCOS(=O)(=O)C1=CC=C(C)C=C1 FHATWFATOZTOKS-UHFFFAOYSA-N 0.000 description 5
- 150000002148 esters Chemical class 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 238000002347 injection Methods 0.000 description 5
- 239000007924 injection Substances 0.000 description 5
- CCCMONHAUSKTEQ-UHFFFAOYSA-N octadec-1-ene Chemical compound CCCCCCCCCCCCCCCCC=C CCCMONHAUSKTEQ-UHFFFAOYSA-N 0.000 description 5
- 150000003304 ruthenium compounds Chemical class 0.000 description 5
- VXUYXOFXAQZZMF-UHFFFAOYSA-N titanium(IV) isopropoxide Chemical compound CC(C)O[Ti](OC(C)C)(OC(C)C)OC(C)C VXUYXOFXAQZZMF-UHFFFAOYSA-N 0.000 description 5
- 125000005023 xylyl group Chemical group 0.000 description 5
- OZAIFHULBGXAKX-UHFFFAOYSA-N 2-(2-cyanopropan-2-yldiazenyl)-2-methylpropanenitrile Chemical compound N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 description 4
- JWAZRIHNYRIHIV-UHFFFAOYSA-N 2-naphthol Chemical compound C1=CC=CC2=CC(O)=CC=C21 JWAZRIHNYRIHIV-UHFFFAOYSA-N 0.000 description 4
- 125000000094 2-phenylethyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])C([H])([H])* 0.000 description 4
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 4
- 125000001931 aliphatic group Chemical group 0.000 description 4
- 125000005907 alkyl ester group Chemical group 0.000 description 4
- SRSXLGNVWSONIS-UHFFFAOYSA-N benzenesulfonic acid Chemical compound OS(=O)(=O)C1=CC=CC=C1 SRSXLGNVWSONIS-UHFFFAOYSA-N 0.000 description 4
- 229940092714 benzenesulfonic acid Drugs 0.000 description 4
- 125000004106 butoxy group Chemical group [*]OC([H])([H])C([H])([H])C(C([H])([H])[H])([H])[H] 0.000 description 4
- YCIMNLLNPGFGHC-UHFFFAOYSA-N catechol Chemical compound OC1=CC=CC=C1O YCIMNLLNPGFGHC-UHFFFAOYSA-N 0.000 description 4
- 229910000420 cerium oxide Inorganic materials 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 238000009833 condensation Methods 0.000 description 4
- 125000002704 decyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 4
- 125000001301 ethoxy group Chemical group [H]C([H])([H])C([H])([H])O* 0.000 description 4
- OAKJQQAXSVQMHS-UHFFFAOYSA-N hydrazine Substances NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 4
- 238000004898 kneading Methods 0.000 description 4
- HZVOZRGWRWCICA-UHFFFAOYSA-N methanediyl Chemical compound [CH2] HZVOZRGWRWCICA-UHFFFAOYSA-N 0.000 description 4
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 description 4
- ZWRUINPWMLAQRD-UHFFFAOYSA-N nonan-1-ol Chemical compound CCCCCCCCCO ZWRUINPWMLAQRD-UHFFFAOYSA-N 0.000 description 4
- 229920003986 novolac Polymers 0.000 description 4
- QWVGKYWNOKOFNN-UHFFFAOYSA-N o-cresol Chemical compound CC1=CC=CC=C1O QWVGKYWNOKOFNN-UHFFFAOYSA-N 0.000 description 4
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 4
- 239000005011 phenolic resin Substances 0.000 description 4
- 125000002572 propoxy group Chemical group [*]OC([H])([H])C(C([H])([H])[H])([H])[H] 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- GHMLBKRAJCXXBS-UHFFFAOYSA-N resorcinol Chemical compound OC1=CC=CC(O)=C1 GHMLBKRAJCXXBS-UHFFFAOYSA-N 0.000 description 4
- 238000013022 venting Methods 0.000 description 4
- 238000005406 washing Methods 0.000 description 4
- CRSBERNSMYQZNG-UHFFFAOYSA-N 1-dodecene Chemical compound CCCCCCCCCCC=C CRSBERNSMYQZNG-UHFFFAOYSA-N 0.000 description 3
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 3
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 3
- BRLQWZUYTZBJKN-UHFFFAOYSA-N Epichlorohydrin Chemical compound ClCC1CO1 BRLQWZUYTZBJKN-UHFFFAOYSA-N 0.000 description 3
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 3
- UMHKOAYRTRADAT-UHFFFAOYSA-N [hydroxy(octoxy)phosphoryl] octyl hydrogen phosphate Chemical compound CCCCCCCCOP(O)(=O)OP(O)(=O)OCCCCCCCC UMHKOAYRTRADAT-UHFFFAOYSA-N 0.000 description 3
- MWPLVEDNUUSJAV-UHFFFAOYSA-N anthracene Natural products C1=CC=CC2=CC3=CC=CC=C3C=C21 MWPLVEDNUUSJAV-UHFFFAOYSA-N 0.000 description 3
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 3
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 3
- 229930003836 cresol Natural products 0.000 description 3
- 239000012954 diazonium Substances 0.000 description 3
- 150000001989 diazonium salts Chemical class 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 3
- 238000001746 injection moulding Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- IZSBVVGANRHKEE-UHFFFAOYSA-N octadecyl 4-methylbenzenesulfonate Chemical compound CCCCCCCCCCCCCCCCCCOS(=O)(=O)C1=CC=C(C)C=C1 IZSBVVGANRHKEE-UHFFFAOYSA-N 0.000 description 3
- FFQLQBKXOPDGSG-UHFFFAOYSA-N octadecyl benzenesulfonate Chemical compound CCCCCCCCCCCCCCCCCCOS(=O)(=O)C1=CC=CC=C1 FFQLQBKXOPDGSG-UHFFFAOYSA-N 0.000 description 3
- OGLOUCVTUZYEGZ-UHFFFAOYSA-N octadecyl trifluoromethanesulfonate Chemical compound CCCCCCCCCCCCCCCCCCOS(=O)(=O)C(F)(F)F OGLOUCVTUZYEGZ-UHFFFAOYSA-N 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- YWAKXRMUMFPDSH-UHFFFAOYSA-N pentene Chemical compound CCCC=C YWAKXRMUMFPDSH-UHFFFAOYSA-N 0.000 description 3
- 229920001568 phenolic resin Polymers 0.000 description 3
- 150000002989 phenols Chemical class 0.000 description 3
- 150000003003 phosphines Chemical group 0.000 description 3
- 239000011541 reaction mixture Substances 0.000 description 3
- 230000035484 reaction time Effects 0.000 description 3
- 238000005476 soldering Methods 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 125000003396 thiol group Chemical group [H]S* 0.000 description 3
- KBPLFHHGFOOTCA-UHFFFAOYSA-N 1-Octanol Chemical compound CCCCCCCCO KBPLFHHGFOOTCA-UHFFFAOYSA-N 0.000 description 2
- GQEZCXVZFLOKMC-UHFFFAOYSA-N 1-hexadecene Chemical compound CCCCCCCCCCCCCCC=C GQEZCXVZFLOKMC-UHFFFAOYSA-N 0.000 description 2
- KWKAKUADMBZCLK-UHFFFAOYSA-N 1-octene Chemical compound CCCCCCC=C KWKAKUADMBZCLK-UHFFFAOYSA-N 0.000 description 2
- PJLHTVIBELQURV-UHFFFAOYSA-N 1-pentadecene Chemical compound CCCCCCCCCCCCCC=C PJLHTVIBELQURV-UHFFFAOYSA-N 0.000 description 2
- HECLRDQVFMWTQS-RGOKHQFPSA-N 1755-01-7 Chemical compound C1[C@H]2[C@@H]3CC=C[C@@H]3[C@@H]1C=C2 HECLRDQVFMWTQS-RGOKHQFPSA-N 0.000 description 2
- RNFJDJUURJAICM-UHFFFAOYSA-N 2,2,4,4,6,6-hexaphenoxy-1,3,5-triaza-2$l^{5},4$l^{5},6$l^{5}-triphosphacyclohexa-1,3,5-triene Chemical compound N=1P(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP=1(OC=1C=CC=CC=1)OC1=CC=CC=C1 RNFJDJUURJAICM-UHFFFAOYSA-N 0.000 description 2
- LXFQSRIDYRFTJW-UHFFFAOYSA-N 2,4,6-trimethylbenzenesulfonic acid Chemical compound CC1=CC(C)=C(S(O)(=O)=O)C(C)=C1 LXFQSRIDYRFTJW-UHFFFAOYSA-N 0.000 description 2
- IRLYGRLEBKCYPY-UHFFFAOYSA-N 2,5-dimethylbenzenesulfonic acid Chemical compound CC1=CC=C(C)C(S(O)(=O)=O)=C1 IRLYGRLEBKCYPY-UHFFFAOYSA-N 0.000 description 2
- MFAWEYJGIGIYFH-UHFFFAOYSA-N 2-[4-(trimethoxymethyl)dodecoxymethyl]oxirane Chemical compound C(C1CO1)OCCCC(C(OC)(OC)OC)CCCCCCCC MFAWEYJGIGIYFH-UHFFFAOYSA-N 0.000 description 2
- CDAWCLOXVUBKRW-UHFFFAOYSA-N 2-aminophenol Chemical compound NC1=CC=CC=C1O CDAWCLOXVUBKRW-UHFFFAOYSA-N 0.000 description 2
- 125000005999 2-bromoethyl group Chemical group 0.000 description 2
- LBIHNTAFJVHBLJ-UHFFFAOYSA-N 3-(triethoxymethyl)undec-1-ene Chemical compound C(=C)C(C(OCC)(OCC)OCC)CCCCCCCC LBIHNTAFJVHBLJ-UHFFFAOYSA-N 0.000 description 2
- XRPCDXSRXPQUKT-UHFFFAOYSA-N 4-(2-bromoethyl)benzenesulfonic acid Chemical compound OS(=O)(=O)C1=CC=C(CCBr)C=C1 XRPCDXSRXPQUKT-UHFFFAOYSA-N 0.000 description 2
- GNPSQUCXOBDIDY-UHFFFAOYSA-N 4-(trimethoxymethyl)dodecane Chemical compound C(CCCCCCC)C(C(OC)(OC)OC)CCC GNPSQUCXOBDIDY-UHFFFAOYSA-N 0.000 description 2
- 239000005711 Benzoic acid Substances 0.000 description 2
- LSNNMFCWUKXFEE-UHFFFAOYSA-M Bisulfite Chemical compound OS([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-M 0.000 description 2
- KAKZBPTYRLMSJV-UHFFFAOYSA-N Butadiene Chemical compound C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 description 2
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- MHZGKXUYDGKKIU-UHFFFAOYSA-N Decylamine Chemical compound CCCCCCCCCCN MHZGKXUYDGKKIU-UHFFFAOYSA-N 0.000 description 2
- ROSDSFDQCJNGOL-UHFFFAOYSA-N Dimethylamine Chemical compound CNC ROSDSFDQCJNGOL-UHFFFAOYSA-N 0.000 description 2
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical compound C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 description 2
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 2
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- RRHGJUQNOFWUDK-UHFFFAOYSA-N Isoprene Chemical compound CC(=C)C=C RRHGJUQNOFWUDK-UHFFFAOYSA-N 0.000 description 2
- AFVFQIVMOAPDHO-UHFFFAOYSA-N Methanesulfonic acid Chemical compound CS(O)(=O)=O AFVFQIVMOAPDHO-UHFFFAOYSA-N 0.000 description 2
- AMQJEAYHLZJPGS-UHFFFAOYSA-N N-Pentanol Chemical compound CCCCCO AMQJEAYHLZJPGS-UHFFFAOYSA-N 0.000 description 2
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 2
- KFSLWBXXFJQRDL-UHFFFAOYSA-N Peracetic acid Chemical compound CC(=O)OO KFSLWBXXFJQRDL-UHFFFAOYSA-N 0.000 description 2
- NBBJYMSMWIIQGU-UHFFFAOYSA-N Propionic aldehyde Chemical compound CCC=O NBBJYMSMWIIQGU-UHFFFAOYSA-N 0.000 description 2
- SMWDFEZZVXVKRB-UHFFFAOYSA-N Quinoline Chemical compound N1=CC=CC2=CC=CC=C21 SMWDFEZZVXVKRB-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 239000007983 Tris buffer Substances 0.000 description 2
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Chemical compound NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 description 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 230000002378 acidificating effect Effects 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 125000003172 aldehyde group Chemical group 0.000 description 2
- 150000001336 alkenes Chemical class 0.000 description 2
- LJCFOYOSGPHIOO-UHFFFAOYSA-N antimony pentoxide Chemical compound O=[Sb](=O)O[Sb](=O)=O LJCFOYOSGPHIOO-UHFFFAOYSA-N 0.000 description 2
- ADCOVFLJGNWWNZ-UHFFFAOYSA-N antimony trioxide Chemical compound O=[Sb]O[Sb]=O ADCOVFLJGNWWNZ-UHFFFAOYSA-N 0.000 description 2
- 239000003849 aromatic solvent Substances 0.000 description 2
- HUMNYLRZRPPJDN-UHFFFAOYSA-N benzaldehyde Chemical compound O=CC1=CC=CC=C1 HUMNYLRZRPPJDN-UHFFFAOYSA-N 0.000 description 2
- WPYMKLBDIGXBTP-UHFFFAOYSA-N benzoic acid Chemical compound OC(=O)C1=CC=CC=C1 WPYMKLBDIGXBTP-UHFFFAOYSA-N 0.000 description 2
- 239000006229 carbon black Substances 0.000 description 2
- 239000003086 colorant Substances 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- 238000004132 cross linking Methods 0.000 description 2
- XKWRJEBRBGIQBA-UHFFFAOYSA-N deca-1,3,5,7,9-pentaene Chemical compound C=CC=CC=CC=CC=C XKWRJEBRBGIQBA-UHFFFAOYSA-N 0.000 description 2
- MWKFXSUHUHTGQN-UHFFFAOYSA-N decan-1-ol Chemical compound CCCCCCCCCCO MWKFXSUHUHTGQN-UHFFFAOYSA-N 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- VURFVHCLMJOLKN-UHFFFAOYSA-N diphosphane Chemical compound PP VURFVHCLMJOLKN-UHFFFAOYSA-N 0.000 description 2
- 125000003700 epoxy group Chemical group 0.000 description 2
- 239000003063 flame retardant Substances 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 125000001153 fluoro group Chemical group F* 0.000 description 2
- LNTHITQWFMADLM-UHFFFAOYSA-N gallic acid Chemical compound OC(=O)C1=CC(O)=C(O)C(O)=C1 LNTHITQWFMADLM-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 2
- BXWNKGSJHAJOGX-UHFFFAOYSA-N hexadecan-1-ol Chemical compound CCCCCCCCCCCCCCCCO BXWNKGSJHAJOGX-UHFFFAOYSA-N 0.000 description 2
- ZSIAUFGUXNUGDI-UHFFFAOYSA-N hexan-1-ol Chemical compound CCCCCCO ZSIAUFGUXNUGDI-UHFFFAOYSA-N 0.000 description 2
- 150000002430 hydrocarbons Chemical group 0.000 description 2
- BTFJIXJJCSYFAL-UHFFFAOYSA-N icosan-1-ol Chemical compound CCCCCCCCCCCCCCCCCCCCO BTFJIXJJCSYFAL-UHFFFAOYSA-N 0.000 description 2
- CBFCDTFDPHXCNY-UHFFFAOYSA-N icosane Chemical compound CCCCCCCCCCCCCCCCCCCC CBFCDTFDPHXCNY-UHFFFAOYSA-N 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 239000004850 liquid epoxy resins (LERs) Substances 0.000 description 2
- 239000011777 magnesium Substances 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- WSFSSNUMVMOOMR-NJFSPNSNSA-N methanone Chemical compound O=[14CH2] WSFSSNUMVMOOMR-NJFSPNSNSA-N 0.000 description 2
- 239000006082 mold release agent Substances 0.000 description 2
- 239000000178 monomer Substances 0.000 description 2
- WRDZMZGYHVUYRU-UHFFFAOYSA-N n-[(4-methoxyphenyl)methyl]aniline Chemical compound C1=CC(OC)=CC=C1CNC1=CC=CC=C1 WRDZMZGYHVUYRU-UHFFFAOYSA-N 0.000 description 2
- NXPPAOGUKPJVDI-UHFFFAOYSA-N naphthalene-1,2-diol Chemical compound C1=CC=CC2=C(O)C(O)=CC=C21 NXPPAOGUKPJVDI-UHFFFAOYSA-N 0.000 description 2
- KVBGVZZKJNLNJU-UHFFFAOYSA-N naphthalene-2-sulfonic acid Chemical compound C1=CC=CC2=CC(S(=O)(=O)O)=CC=C21 KVBGVZZKJNLNJU-UHFFFAOYSA-N 0.000 description 2
- 125000001624 naphthyl group Chemical group 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 125000004433 nitrogen atom Chemical group N* 0.000 description 2
- RNKVRSPPDXFUCN-UHFFFAOYSA-N octadecyl 2,5-dimethylbenzenesulfonate Chemical compound CCCCCCCCCCCCCCCCCCOS(=O)(=O)C1=CC(C)=CC=C1C RNKVRSPPDXFUCN-UHFFFAOYSA-N 0.000 description 2
- XMYKMBYILFYQLA-UHFFFAOYSA-N octadecyl naphthalene-2-sulfonate Chemical compound C1=CC=CC2=CC(S(=O)(=O)OCCCCCCCCCCCCCCCCCC)=CC=C21 XMYKMBYILFYQLA-UHFFFAOYSA-N 0.000 description 2
- JRZJOMJEPLMPRA-UHFFFAOYSA-N olefin Natural products CCCCCCCC=C JRZJOMJEPLMPRA-UHFFFAOYSA-N 0.000 description 2
- AICOOMRHRUFYCM-ZRRPKQBOSA-N oxazine, 1 Chemical compound C([C@@H]1[C@H](C(C[C@]2(C)[C@@H]([C@H](C)N(C)C)[C@H](O)C[C@]21C)=O)CC1=CC2)C[C@H]1[C@@]1(C)[C@H]2N=C(C(C)C)OC1 AICOOMRHRUFYCM-ZRRPKQBOSA-N 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 239000004209 oxidized polyethylene wax Substances 0.000 description 2
- 235000013873 oxidized polyethylene wax Nutrition 0.000 description 2
- 229920000768 polyamine Polymers 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 238000010298 pulverizing process Methods 0.000 description 2
- 230000009257 reactivity Effects 0.000 description 2
- 238000010992 reflux Methods 0.000 description 2
- SMQUZDBALVYZAC-UHFFFAOYSA-N salicylaldehyde Chemical compound OC1=CC=CC=C1C=O SMQUZDBALVYZAC-UHFFFAOYSA-N 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- HLZKNKRTKFSKGZ-UHFFFAOYSA-N tetradecan-1-ol Chemical compound CCCCCCCCCCCCCCO HLZKNKRTKFSKGZ-UHFFFAOYSA-N 0.000 description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 2
- 125000003866 trichloromethyl group Chemical group ClC(Cl)(Cl)* 0.000 description 2
- YWWDBCBWQNCYNR-UHFFFAOYSA-N trimethylphosphine Chemical compound CP(C)C YWWDBCBWQNCYNR-UHFFFAOYSA-N 0.000 description 2
- 238000009423 ventilation Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 239000008096 xylene Substances 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
- NAWXUBYGYWOOIX-SFHVURJKSA-N (2s)-2-[[4-[2-(2,4-diaminoquinazolin-6-yl)ethyl]benzoyl]amino]-4-methylidenepentanedioic acid Chemical compound C1=CC2=NC(N)=NC(N)=C2C=C1CCC1=CC=C(C(=O)N[C@@H](CC(=C)C(O)=O)C(O)=O)C=C1 NAWXUBYGYWOOIX-SFHVURJKSA-N 0.000 description 1
- 239000001714 (E)-hex-2-en-1-ol Substances 0.000 description 1
- BJEPYKJPYRNKOW-REOHCLBHSA-N (S)-malic acid Chemical compound OC(=O)[C@@H](O)CC(O)=O BJEPYKJPYRNKOW-REOHCLBHSA-N 0.000 description 1
- JHEPBQHNVNUAFL-AATRIKPKSA-N (e)-hex-1-en-1-ol Chemical compound CCCC\C=C\O JHEPBQHNVNUAFL-AATRIKPKSA-N 0.000 description 1
- AGGJWJFEEKIYOF-UHFFFAOYSA-N 1,1,1-triethoxydecane Chemical compound CCCCCCCCCC(OCC)(OCC)OCC AGGJWJFEEKIYOF-UHFFFAOYSA-N 0.000 description 1
- WOAHJDHKFWSLKE-UHFFFAOYSA-N 1,2-benzoquinone Chemical compound O=C1C=CC=CC1=O WOAHJDHKFWSLKE-UHFFFAOYSA-N 0.000 description 1
- AHBGXHAWSHTPOM-UHFFFAOYSA-N 1,3,2$l^{4},4$l^{4}-dioxadistibetane 2,4-dioxide Chemical compound O=[Sb]O[Sb](=O)=O AHBGXHAWSHTPOM-UHFFFAOYSA-N 0.000 description 1
- 229940005561 1,4-benzoquinone Drugs 0.000 description 1
- QYSXYAURTRCDJU-UHFFFAOYSA-N 1-(1-hydroxypropoxy)propan-1-ol Chemical compound CCC(O)OC(O)CC QYSXYAURTRCDJU-UHFFFAOYSA-N 0.000 description 1
- CMZYGFLOKOQMKF-UHFFFAOYSA-N 1-(3,5-dimethylphenyl)-3,5-dimethylbenzene Chemical group CC1=CC(C)=CC(C=2C=C(C)C=C(C)C=2)=C1 CMZYGFLOKOQMKF-UHFFFAOYSA-N 0.000 description 1
- MODAACUAXYPNJH-UHFFFAOYSA-N 1-(methoxymethyl)-4-[4-(methoxymethyl)phenyl]benzene Chemical group C1=CC(COC)=CC=C1C1=CC=C(COC)C=C1 MODAACUAXYPNJH-UHFFFAOYSA-N 0.000 description 1
- BVOSSZSHBZQJOI-UHFFFAOYSA-N 1-Hexen-3-ol Chemical compound CCCC(O)C=C BVOSSZSHBZQJOI-UHFFFAOYSA-N 0.000 description 1
- SMLNDVNTPWRZJH-UHFFFAOYSA-N 1-chloro-4-(trimethoxymethyl)dodecane Chemical compound ClCCCC(C(OC)(OC)OC)CCCCCCCC SMLNDVNTPWRZJH-UHFFFAOYSA-N 0.000 description 1
- 238000005160 1H NMR spectroscopy Methods 0.000 description 1
- BLBVJHVRECUXKP-UHFFFAOYSA-N 2,3-dimethoxy-1,4-dimethylbenzene Chemical group COC1=C(C)C=CC(C)=C1OC BLBVJHVRECUXKP-UHFFFAOYSA-N 0.000 description 1
- GZLYCCJFAOZSQA-UHFFFAOYSA-N 2-(16-methylheptadecoxycarbonyl)benzoic acid Chemical compound CC(C)CCCCCCCCCCCCCCCOC(=O)C1=CC=CC=C1C(O)=O GZLYCCJFAOZSQA-UHFFFAOYSA-N 0.000 description 1
- ZCHHRLHTBGRGOT-SNAWJCMRSA-N 2-Hexen-1-ol Natural products CCC\C=C\CO ZCHHRLHTBGRGOT-SNAWJCMRSA-N 0.000 description 1
- QNMCWJOEQBZQHB-UHFFFAOYSA-N 2-Hexyl-1-octanol Chemical compound CCCCCCC(CO)CCCCCC QNMCWJOEQBZQHB-UHFFFAOYSA-N 0.000 description 1
- OZRVXYJWUUMVOW-UHFFFAOYSA-N 2-[[4-[4-(oxiran-2-ylmethoxy)phenyl]phenoxy]methyl]oxirane Chemical group C1OC1COC(C=C1)=CC=C1C(C=C1)=CC=C1OCC1CO1 OZRVXYJWUUMVOW-UHFFFAOYSA-N 0.000 description 1
- GGJSWHVQHRPELC-UHFFFAOYSA-N 2-ethylnonan-1-ol Chemical compound CCCCCCCC(CC)CO GGJSWHVQHRPELC-UHFFFAOYSA-N 0.000 description 1
- ZCHHRLHTBGRGOT-UHFFFAOYSA-N 2-hexen-1-ol Chemical compound CCCC=CCO ZCHHRLHTBGRGOT-UHFFFAOYSA-N 0.000 description 1
- SJZAUIVYZWPNAS-UHFFFAOYSA-N 2-methoxy-1,4-dimethylbenzene Chemical group COC1=CC(C)=CC=C1C SJZAUIVYZWPNAS-UHFFFAOYSA-N 0.000 description 1
- LXBGSDVWAMZHDD-UHFFFAOYSA-N 2-methyl-1h-imidazole Chemical compound CC1=NC=CN1 LXBGSDVWAMZHDD-UHFFFAOYSA-N 0.000 description 1
- JZEUFFFBEMAJHS-UHFFFAOYSA-N 2-methyldecan-1-ol Chemical compound CCCCCCCCC(C)CO JZEUFFFBEMAJHS-UHFFFAOYSA-N 0.000 description 1
- OVRDLJJMKGWDHY-UHFFFAOYSA-N 2-methylpent-1-en-1-ol Chemical compound CCCC(C)=CO OVRDLJJMKGWDHY-UHFFFAOYSA-N 0.000 description 1
- AAMHBRRZYSORSH-UHFFFAOYSA-N 2-octyloxirane Chemical compound CCCCCCCCC1CO1 AAMHBRRZYSORSH-UHFFFAOYSA-N 0.000 description 1
- LSTZTHCEEPHCNQ-UHFFFAOYSA-N 3-(2,5-dioxabicyclo[2.1.0]pentan-3-yloxy)-2,5-dioxabicyclo[2.1.0]pentane Chemical compound C1(C2C(O2)O1)OC1C2C(O2)O1 LSTZTHCEEPHCNQ-UHFFFAOYSA-N 0.000 description 1
- ZGERENLZMCLSPF-UHFFFAOYSA-N 3-methyltetradec-1-ene Chemical compound CCCCCCCCCCCC(C)C=C ZGERENLZMCLSPF-UHFFFAOYSA-N 0.000 description 1
- VPWNQTHUCYMVMZ-UHFFFAOYSA-N 4,4'-sulfonyldiphenol Chemical compound C1=CC(O)=CC=C1S(=O)(=O)C1=CC=C(O)C=C1 VPWNQTHUCYMVMZ-UHFFFAOYSA-N 0.000 description 1
- SXPGQGNWEWPWQZ-UHFFFAOYSA-N 4-(triethoxymethyl)dodecan-1-amine Chemical compound NCCCC(C(OCC)(OCC)OCC)CCCCCCCC SXPGQGNWEWPWQZ-UHFFFAOYSA-N 0.000 description 1
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 1
- 241000208340 Araliaceae Species 0.000 description 1
- 229910052582 BN Inorganic materials 0.000 description 1
- KWIUHFFTVRNATP-UHFFFAOYSA-N Betaine Natural products C[N+](C)(C)CC([O-])=O KWIUHFFTVRNATP-UHFFFAOYSA-N 0.000 description 1
- 229930185605 Bisphenol Natural products 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- JZHKIUBMQMDQRG-UHFFFAOYSA-N C(=C)C(C(OC)(OC)OC)CCCCCCCC Chemical compound C(=C)C(C(OC)(OC)OC)CCCCCCCC JZHKIUBMQMDQRG-UHFFFAOYSA-N 0.000 description 1
- GKLXZYMUWOOVDQ-UHFFFAOYSA-N C(C1CO1)OCCCC(C(OC)(OC)C)CCCCCCCC Chemical compound C(C1CO1)OCCCC(C(OC)(OC)C)CCCCCCCC GKLXZYMUWOOVDQ-UHFFFAOYSA-N 0.000 description 1
- LKYCIZFMSSPSQN-UHFFFAOYSA-N C(CC)C(C(OC)(OC)C)CCCCCCCC Chemical compound C(CC)C(C(OC)(OC)C)CCCCCCCC LKYCIZFMSSPSQN-UHFFFAOYSA-N 0.000 description 1
- XRNDMACZMJPCRX-UHFFFAOYSA-N C(CC)C(C(OCC)(OCC)OCC)CCCCCCCC Chemical compound C(CC)C(C(OCC)(OCC)OCC)CCCCCCCC XRNDMACZMJPCRX-UHFFFAOYSA-N 0.000 description 1
- VPLKXGORNUYFBO-UHFFFAOYSA-N C1(CC2C(CC1)O2)CCC(C(OC)(OC)OC)CCCCCCCC Chemical compound C1(CC2C(CC1)O2)CCC(C(OC)(OC)OC)CCCCCCCC VPLKXGORNUYFBO-UHFFFAOYSA-N 0.000 description 1
- PKVQTRKMKVPYPJ-UHFFFAOYSA-N CC(C=C)C(CCCCCCCCCC)C Chemical compound CC(C=C)C(CCCCCCCCCC)C PKVQTRKMKVPYPJ-UHFFFAOYSA-N 0.000 description 1
- QHJSCTNRFWNYID-UHFFFAOYSA-N CCC=COCCCC(C(OC)(OC)OC)CCCCCCCC Chemical compound CCC=COCCCC(C(OC)(OC)OC)CCCCCCCC QHJSCTNRFWNYID-UHFFFAOYSA-N 0.000 description 1
- JSDDTSIZQROOSO-UHFFFAOYSA-N COC(CCCCCCCCCC(CC)NCCN)(OC)OC Chemical compound COC(CCCCCCCCCC(CC)NCCN)(OC)OC JSDDTSIZQROOSO-UHFFFAOYSA-N 0.000 description 1
- LHUDUIJCJOZICI-UHFFFAOYSA-N COC(OC)CC(C)(NCCN)CCCCCCCCCC Chemical compound COC(OC)CC(C)(NCCN)CCCCCCCCCC LHUDUIJCJOZICI-UHFFFAOYSA-N 0.000 description 1
- LXKNPJJJAINIPS-UHFFFAOYSA-N COCCOCCCCCCCCCC.C(=C)C1=C(C=CC=C1)C=CC1=CC=CC=C1 Chemical compound COCCOCCCCCCCCCC.C(=C)C1=C(C=CC=C1)C=CC1=CC=CC=C1 LXKNPJJJAINIPS-UHFFFAOYSA-N 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 229910052684 Cerium Inorganic materials 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- CLHYNYWPHZFHIN-UHFFFAOYSA-N N(C1=CC=CC=C1)CCCC(C(OC)(OC)C)CCCCCCCC Chemical compound N(C1=CC=CC=C1)CCCC(C(OC)(OC)C)CCCCCCCC CLHYNYWPHZFHIN-UHFFFAOYSA-N 0.000 description 1
- LFZAGIJXANFPFN-UHFFFAOYSA-N N-[3-[4-(3-methyl-5-propan-2-yl-1,2,4-triazol-4-yl)piperidin-1-yl]-1-thiophen-2-ylpropyl]acetamide Chemical compound C(C)(C)C1=NN=C(N1C1CCN(CC1)CCC(C=1SC=CC=1)NC(C)=O)C LFZAGIJXANFPFN-UHFFFAOYSA-N 0.000 description 1
- QZLZITSAKXSAMC-UHFFFAOYSA-N NCCCC(C(OC)(OC)C)CCCCCCCC Chemical compound NCCCC(C(OC)(OC)C)CCCCCCCC QZLZITSAKXSAMC-UHFFFAOYSA-N 0.000 description 1
- XJDCHDFUMGSEHD-UHFFFAOYSA-N NCCCC(C(OC)(OC)OC)CCCCCCCC Chemical compound NCCCC(C(OC)(OC)OC)CCCCCCCC XJDCHDFUMGSEHD-UHFFFAOYSA-N 0.000 description 1
- RPVOMLHFYVLIHB-UHFFFAOYSA-N NCCNCCCC(CCCCCCCCC)C(OC)OC Chemical compound NCCNCCCC(CCCCCCCCC)C(OC)OC RPVOMLHFYVLIHB-UHFFFAOYSA-N 0.000 description 1
- ZCQWOFVYLHDMMC-UHFFFAOYSA-N Oxazole Chemical compound C1=COC=N1 ZCQWOFVYLHDMMC-UHFFFAOYSA-N 0.000 description 1
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 1
- 235000003140 Panax quinquefolius Nutrition 0.000 description 1
- QOSMNYMQXIVWKY-UHFFFAOYSA-N Propyl levulinate Chemical compound CCCOC(=O)CCC(C)=O QOSMNYMQXIVWKY-UHFFFAOYSA-N 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 1
- ACIAHEMYLLBZOI-ZZXKWVIFSA-N Unsaturated alcohol Chemical compound CC\C(CO)=C/C ACIAHEMYLLBZOI-ZZXKWVIFSA-N 0.000 description 1
- IKHGUXGNUITLKF-XPULMUKRSA-N acetaldehyde Chemical compound [14CH]([14CH3])=O IKHGUXGNUITLKF-XPULMUKRSA-N 0.000 description 1
- 238000012644 addition polymerization Methods 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 125000003158 alcohol group Chemical group 0.000 description 1
- 125000002723 alicyclic group Chemical group 0.000 description 1
- 150000001335 aliphatic alkanes Chemical class 0.000 description 1
- 239000004844 aliphatic epoxy resin Substances 0.000 description 1
- 125000005036 alkoxyphenyl group Chemical group 0.000 description 1
- BJEPYKJPYRNKOW-UHFFFAOYSA-N alpha-hydroxysuccinic acid Natural products OC(=O)C(O)CC(O)=O BJEPYKJPYRNKOW-UHFFFAOYSA-N 0.000 description 1
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical class [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 1
- WNROFYMDJYEPJX-UHFFFAOYSA-K aluminium hydroxide Chemical compound [OH-].[OH-].[OH-].[Al+3] WNROFYMDJYEPJX-UHFFFAOYSA-K 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- WGQKYBSKWIADBV-UHFFFAOYSA-N aminomethyl benzene Natural products NCC1=CC=CC=C1 WGQKYBSKWIADBV-UHFFFAOYSA-N 0.000 description 1
- 229910000411 antimony tetroxide Inorganic materials 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- BCZWPKDRLPGFFZ-UHFFFAOYSA-N azanylidynecerium Chemical compound [Ce]#N BCZWPKDRLPGFFZ-UHFFFAOYSA-N 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 235000010233 benzoic acid Nutrition 0.000 description 1
- 229960003237 betaine Drugs 0.000 description 1
- 125000002619 bicyclic group Chemical group 0.000 description 1
- LLEMOWNGBBNAJR-UHFFFAOYSA-N biphenyl-2-ol Chemical compound OC1=CC=CC=C1C1=CC=CC=C1 LLEMOWNGBBNAJR-UHFFFAOYSA-N 0.000 description 1
- VCCBEIPGXKNHFW-UHFFFAOYSA-N biphenyl-4,4'-diol Chemical compound C1=CC(O)=CC=C1C1=CC=C(O)C=C1 VCCBEIPGXKNHFW-UHFFFAOYSA-N 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- ZTQSAGDEMFDKMZ-UHFFFAOYSA-N butyric aldehyde Natural products CCCC=O ZTQSAGDEMFDKMZ-UHFFFAOYSA-N 0.000 description 1
- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- FNAQSUUGMSOBHW-UHFFFAOYSA-H calcium citrate Chemical compound [Ca+2].[Ca+2].[Ca+2].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O.[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O FNAQSUUGMSOBHW-UHFFFAOYSA-H 0.000 description 1
- 239000001354 calcium citrate Substances 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000004202 carbamide Substances 0.000 description 1
- DKVNPHBNOWQYFE-UHFFFAOYSA-N carbamodithioic acid Chemical compound NC(S)=S DKVNPHBNOWQYFE-UHFFFAOYSA-N 0.000 description 1
- ZMIGMASIKSOYAM-UHFFFAOYSA-N cerium Chemical compound [Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce] ZMIGMASIKSOYAM-UHFFFAOYSA-N 0.000 description 1
- WXANAQMHYPHTGY-UHFFFAOYSA-N cerium;ethyne Chemical compound [Ce].[C-]#[C] WXANAQMHYPHTGY-UHFFFAOYSA-N 0.000 description 1
- 229960000541 cetyl alcohol Drugs 0.000 description 1
- 239000003245 coal Substances 0.000 description 1
- 238000000748 compression moulding Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 125000004802 cyanophenyl group Chemical group 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- GDVKFRBCXAPAQJ-UHFFFAOYSA-A dialuminum;hexamagnesium;carbonate;hexadecahydroxide Chemical compound [OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[Mg+2].[Mg+2].[Mg+2].[Mg+2].[Mg+2].[Mg+2].[Al+3].[Al+3].[O-]C([O-])=O GDVKFRBCXAPAQJ-UHFFFAOYSA-A 0.000 description 1
- 150000005690 diesters Chemical class 0.000 description 1
- 235000014113 dietary fatty acids Nutrition 0.000 description 1
- 239000000539 dimer Substances 0.000 description 1
- HTDKEJXHILZNPP-UHFFFAOYSA-N dioctyl hydrogen phosphate Chemical compound CCCCCCCCOP(O)(=O)OCCCCCCCC HTDKEJXHILZNPP-UHFFFAOYSA-N 0.000 description 1
- XMQYIPNJVLNWOE-UHFFFAOYSA-N dioctyl hydrogen phosphite Chemical compound CCCCCCCCOP(O)OCCCCCCCC XMQYIPNJVLNWOE-UHFFFAOYSA-N 0.000 description 1
- PXRMLPZQBFWPCV-UHFFFAOYSA-N dioxasilirane Chemical compound O1O[SiH2]1 PXRMLPZQBFWPCV-UHFFFAOYSA-N 0.000 description 1
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 1
- ZZTCPWRAHWXWCH-UHFFFAOYSA-N diphenylmethanediamine Chemical compound C=1C=CC=CC=1C(N)(N)C1=CC=CC=C1 ZZTCPWRAHWXWCH-UHFFFAOYSA-N 0.000 description 1
- GPAYUJZHTULNBE-UHFFFAOYSA-N diphenylphosphine Chemical compound C=1C=CC=CC=1PC1=CC=CC=C1 GPAYUJZHTULNBE-UHFFFAOYSA-N 0.000 description 1
- NJLLQSBAHIKGKF-UHFFFAOYSA-N dipotassium dioxido(oxo)titanium Chemical compound [K+].[K+].[O-][Ti]([O-])=O NJLLQSBAHIKGKF-UHFFFAOYSA-N 0.000 description 1
- 238000004821 distillation Methods 0.000 description 1
- 239000012990 dithiocarbamate Substances 0.000 description 1
- LQZZUXJYWNFBMV-UHFFFAOYSA-N dodecan-1-ol Chemical compound CCCCCCCCCCCCO LQZZUXJYWNFBMV-UHFFFAOYSA-N 0.000 description 1
- 229940069096 dodecene Drugs 0.000 description 1
- 125000003438 dodecyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 238000006735 epoxidation reaction Methods 0.000 description 1
- 150000002118 epoxides Chemical class 0.000 description 1
- CCIVGXIOQKPBKL-UHFFFAOYSA-M ethanesulfonate Chemical compound CCS([O-])(=O)=O CCIVGXIOQKPBKL-UHFFFAOYSA-M 0.000 description 1
- JLHMVTORNNQCRM-UHFFFAOYSA-N ethylphosphine Chemical compound CCP JLHMVTORNNQCRM-UHFFFAOYSA-N 0.000 description 1
- 229930195729 fatty acid Natural products 0.000 description 1
- 239000000194 fatty acid Substances 0.000 description 1
- 150000004665 fatty acids Chemical class 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000009472 formulation Methods 0.000 description 1
- 229910052839 forsterite Inorganic materials 0.000 description 1
- 125000000524 functional group Chemical group 0.000 description 1
- 229940074391 gallic acid Drugs 0.000 description 1
- 235000004515 gallic acid Nutrition 0.000 description 1
- 238000002290 gas chromatography-mass spectrometry Methods 0.000 description 1
- 238000007429 general method Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical group [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 235000008434 ginseng Nutrition 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 125000005843 halogen group Chemical group 0.000 description 1
- 229940116364 hard fat Drugs 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910001701 hydrotalcite Inorganic materials 0.000 description 1
- 229960001545 hydrotalcite Drugs 0.000 description 1
- 150000004679 hydroxides Chemical class 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 150000002484 inorganic compounds Chemical class 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- ZFSLODLOARCGLH-UHFFFAOYSA-N isocyanuric acid Chemical compound OC1=NC(O)=NC(O)=N1 ZFSLODLOARCGLH-UHFFFAOYSA-N 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- VTHJTEIRLNZDEV-UHFFFAOYSA-L magnesium dihydroxide Chemical compound [OH-].[OH-].[Mg+2] VTHJTEIRLNZDEV-UHFFFAOYSA-L 0.000 description 1
- 239000000347 magnesium hydroxide Substances 0.000 description 1
- 229910001862 magnesium hydroxide Inorganic materials 0.000 description 1
- HCWCAKKEBCNQJP-UHFFFAOYSA-N magnesium orthosilicate Chemical compound [Mg+2].[Mg+2].[O-][Si]([O-])([O-])[O-] HCWCAKKEBCNQJP-UHFFFAOYSA-N 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 1
- 239000011976 maleic acid Substances 0.000 description 1
- 239000001630 malic acid Substances 0.000 description 1
- 235000011090 malic acid Nutrition 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229910000000 metal hydroxide Inorganic materials 0.000 description 1
- 150000004692 metal hydroxides Chemical class 0.000 description 1
- 229940098779 methanesulfonic acid Drugs 0.000 description 1
- 239000012778 molding material Substances 0.000 description 1
- 229910052863 mullite Inorganic materials 0.000 description 1
- 229940043348 myristyl alcohol Drugs 0.000 description 1
- TVMXDCGIABBOFY-UHFFFAOYSA-N n-Octanol Natural products CCCCCCCC TVMXDCGIABBOFY-UHFFFAOYSA-N 0.000 description 1
- 150000004780 naphthols Chemical class 0.000 description 1
- NIHNNTQXNPWCJQ-UHFFFAOYSA-N o-biphenylenemethane Natural products C1=CC=C2CC3=CC=CC=C3C2=C1 NIHNNTQXNPWCJQ-UHFFFAOYSA-N 0.000 description 1
- GZILKFWVRZZIDP-UHFFFAOYSA-N octadecyl ethanesulfonate Chemical compound CCCCCCCCCCCCCCCCCCOS(=O)(=O)CC GZILKFWVRZZIDP-UHFFFAOYSA-N 0.000 description 1
- KNPLQZXBTKKRAJ-UHFFFAOYSA-N octadecyl methanesulfonate Chemical compound CCCCCCCCCCCCCCCCCCOS(C)(=O)=O KNPLQZXBTKKRAJ-UHFFFAOYSA-N 0.000 description 1
- KSCKTBJJRVPGKM-UHFFFAOYSA-N octan-1-olate;titanium(4+) Chemical compound [Ti+4].CCCCCCCC[O-].CCCCCCCC[O-].CCCCCCCC[O-].CCCCCCCC[O-] KSCKTBJJRVPGKM-UHFFFAOYSA-N 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 239000012860 organic pigment Substances 0.000 description 1
- 150000002903 organophosphorus compounds Chemical class 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- AFEQENGXSMURHA-UHFFFAOYSA-N oxiran-2-ylmethanamine Chemical compound NCC1CO1 AFEQENGXSMURHA-UHFFFAOYSA-N 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- ACMVLJBSYFHILY-UHFFFAOYSA-N oxo-di(tridecoxy)phosphanium Chemical compound CCCCCCCCCCCCCO[P+](=O)OCCCCCCCCCCCCC ACMVLJBSYFHILY-UHFFFAOYSA-N 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- NFHFRUOZVGFOOS-UHFFFAOYSA-N palladium;triphenylphosphane Chemical compound [Pd].C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 NFHFRUOZVGFOOS-UHFFFAOYSA-N 0.000 description 1
- 125000000913 palmityl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- QNGNSVIICDLXHT-UHFFFAOYSA-N para-ethylbenzaldehyde Natural products CCC1=CC=C(C=O)C=C1 QNGNSVIICDLXHT-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- LHTVMBMETNGEAN-UHFFFAOYSA-N pent-1-en-1-ol Chemical compound CCCC=CO LHTVMBMETNGEAN-UHFFFAOYSA-N 0.000 description 1
- 125000002958 pentadecyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 125000000538 pentafluorophenyl group Chemical group FC1=C(F)C(F)=C(*)C(F)=C1F 0.000 description 1
- 150000004965 peroxy acids Chemical class 0.000 description 1
- 125000000843 phenylene group Chemical group C1(=C(C=CC=C1)*)* 0.000 description 1
- RPGWZZNNEUHDAQ-UHFFFAOYSA-N phenylphosphine Chemical compound PC1=CC=CC=C1 RPGWZZNNEUHDAQ-UHFFFAOYSA-N 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-N phosphoric acid Substances OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 1
- OJMIONKXNSYLSR-UHFFFAOYSA-N phosphorous acid Chemical compound OP(O)O OJMIONKXNSYLSR-UHFFFAOYSA-N 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 150000007519 polyprotic acids Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- MDOKDDVHMSMOOW-UHFFFAOYSA-N propan-2-yl 2,3,4-tridodecylbenzenesulfonate Chemical compound CCCCCCCCCCCCC1=CC=C(S(=O)(=O)OC(C)C)C(CCCCCCCCCCCC)=C1CCCCCCCCCCCC MDOKDDVHMSMOOW-UHFFFAOYSA-N 0.000 description 1
- BOQSSGDQNWEFSX-UHFFFAOYSA-N propan-2-yl 2-methylprop-2-enoate Chemical compound CC(C)OC(=O)C(C)=C BOQSSGDQNWEFSX-UHFFFAOYSA-N 0.000 description 1
- 239000007870 radical polymerization initiator Substances 0.000 description 1
- 229910000275 saponite Inorganic materials 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 230000001568 sexual effect Effects 0.000 description 1
- 229910052596 spinel Inorganic materials 0.000 description 1
- 239000011029 spinel Substances 0.000 description 1
- 229940012831 stearyl alcohol Drugs 0.000 description 1
- 125000004079 stearyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical compound [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 150000003505 terpenes Chemical class 0.000 description 1
- 235000007586 terpenes Nutrition 0.000 description 1
- 229940095068 tetradecene Drugs 0.000 description 1
- 150000004867 thiadiazoles Chemical class 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 239000011135 tin Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 150000003609 titanium compounds Chemical class 0.000 description 1
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 150000003852 triazoles Chemical class 0.000 description 1
- TUQOTMZNTHZOKS-UHFFFAOYSA-N tributylphosphine Chemical compound CCCCP(CCCC)CCCC TUQOTMZNTHZOKS-UHFFFAOYSA-N 0.000 description 1
- 235000013337 tricalcium citrate Nutrition 0.000 description 1
- 125000002889 tridecyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- RXJKFRMDXUJTEX-UHFFFAOYSA-N triethylphosphine Chemical compound CCP(CC)CC RXJKFRMDXUJTEX-UHFFFAOYSA-N 0.000 description 1
- 125000002023 trifluoromethyl group Chemical group FC(F)(F)* 0.000 description 1
- DMEUUKUNSVFYAA-UHFFFAOYSA-N trinaphthalen-1-ylphosphane Chemical compound C1=CC=C2C(P(C=3C4=CC=CC=C4C=CC=3)C=3C4=CC=CC=C4C=CC=3)=CC=CC2=C1 DMEUUKUNSVFYAA-UHFFFAOYSA-N 0.000 description 1
- RMZAYIKUYWXQPB-UHFFFAOYSA-N trioctylphosphane Chemical compound CCCCCCCCP(CCCCCCCC)CCCCCCCC RMZAYIKUYWXQPB-UHFFFAOYSA-N 0.000 description 1
- BIKXLKXABVUSMH-UHFFFAOYSA-N trizinc;diborate Chemical compound [Zn+2].[Zn+2].[Zn+2].[O-]B([O-])[O-].[O-]B([O-])[O-] BIKXLKXABVUSMH-UHFFFAOYSA-N 0.000 description 1
- 238000005292 vacuum distillation Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 125000002256 xylenyl group Chemical class C1(C(C=CC=C1)C)(C)* 0.000 description 1
- RUDFQVOCFDJEEF-UHFFFAOYSA-N yttrium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Y+3].[Y+3] RUDFQVOCFDJEEF-UHFFFAOYSA-N 0.000 description 1
- XAEWLETZEZXLHR-UHFFFAOYSA-N zinc;dioxido(dioxo)molybdenum Chemical compound [Zn+2].[O-][Mo]([O-])(=O)=O XAEWLETZEZXLHR-UHFFFAOYSA-N 0.000 description 1
- 229910052845 zircon Inorganic materials 0.000 description 1
- GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L63/00—Compositions of epoxy resins; Compositions of derivatives of epoxy resins
- C08L63/04—Epoxynovolacs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
- H01L23/293—Organic, e.g. plastic
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F20/00—Homopolymers and copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride, ester, amide, imide or nitrile thereof
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F210/00—Copolymers of unsaturated aliphatic hydrocarbons having only one carbon-to-carbon double bond
- C08F210/14—Monomers containing five or more carbon atoms
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F222/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a carboxyl radical and containing at least one other carboxyl radical in the molecule; Salts, anhydrides, esters, amides, imides, or nitriles thereof
- C08F222/04—Anhydrides, e.g. cyclic anhydrides
- C08F222/06—Maleic anhydride
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F222/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a carboxyl radical and containing at least one other carboxyl radical in the molecule; Salts, anhydrides, esters, amides, imides, or nitriles thereof
- C08F222/10—Esters
- C08F222/12—Esters of phenols or saturated alcohols
- C08F222/16—Esters having free carboxylic acid groups, e.g. monoalkyl maleates or fumarates
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F222/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a carboxyl radical and containing at least one other carboxyl radical in the molecule; Salts, anhydrides, esters, amides, imides, or nitriles thereof
- C08F222/10—Esters
- C08F222/12—Esters of phenols or saturated alcohols
- C08F222/16—Esters having free carboxylic acid groups, e.g. monoalkyl maleates or fumarates
- C08F222/165—Esters having free carboxylic acid groups, e.g. monoalkyl maleates or fumarates the ester chains containing seven or more carbon atoms
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F8/00—Chemical modification by after-treatment
- C08F8/12—Hydrolysis
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F8/00—Chemical modification by after-treatment
- C08F8/14—Esterification
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K3/00—Use of inorganic substances as compounding ingredients
- C08K3/01—Use of inorganic substances as compounding ingredients characterized by their specific function
- C08K3/013—Fillers, pigments or reinforcing additives
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L61/00—Compositions of condensation polymers of aldehydes or ketones; Compositions of derivatives of such polymers
- C08L61/04—Condensation polymers of aldehydes or ketones with phenols only
- C08L61/06—Condensation polymers of aldehydes or ketones with phenols only of aldehydes with phenols
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L24/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2800/00—Copolymer characterised by the proportions of the comonomers expressed
- C08F2800/20—Copolymer characterised by the proportions of the comonomers expressed as weight or mass percentages
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32135—Disposition the layer connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/32145—Disposition the layer connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being stacked
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32245—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/4501—Shape
- H01L2224/45012—Cross-sectional shape
- H01L2224/45015—Cross-sectional shape being circular
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45144—Gold (Au) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45147—Copper (Cu) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
- H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00011—Not relevant to the scope of the group, the symbol of which is combined with the symbol of this group
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1301—Thyristor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/156—Material
- H01L2924/157—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2924/15738—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950 C and less than 1550 C
- H01L2924/15747—Copper [Cu] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- General Chemical & Material Sciences (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Epoxy Resins (AREA)
- Compositions Of Macromolecular Compounds (AREA)
Description
本發明係關於半導體密封用環氧樹脂組成物、及半導體裝置。更具體而言,係關於使用銅製引線框架時,對已進行氧化的銅之接著性、及在與成形模具間之脫模性均優異的半導體密封用環氧樹脂組成物、及使用該半導體密封用環氧樹脂組成物的半導體裝置。
半導體裝置(以下亦稱「封裝」)的組裝步驟中,在元件(以下亦稱「晶片」)的鋁電極、與引線框架的內引腳之間,藉由將焊接線施行熱壓接而進行電氣式耦接的手法,係當前的主流。又,近年,隨電子機器的小型化、輕量化、高性能化之市場動向,正逐年朝電子零件的高集聚化、多針腳化演進。因而,自以前起便要求複雜的焊接搭線步驟,當使用銅製引線框架的情況時,藉由長時間暴露於200~250℃的高溫狀態下,俾更加進行銅表面的氧化。
在此種狀況下,即便習知對未氧化銅表面的接著性呈優異之密封材料,對表面狀態不同且已進行氧化的銅,大多仍會有接著性較差的情況,導致在樹脂密封成形後的脫模時、或焊錫迴焊時,於密封樹脂硬化物與引線框架的界面處會出現引發剝離的問題。
為抑制剝離而提升引線框架等嵌鑲物與密封樹脂硬化物間之接著性一事,恰好與提升密封樹脂硬化物對成形模具的脫模性相反,若提升與引線框架等嵌鑲物間之接著性,便會有造成從成形模具上的脫模性變差,導致成形性降低的問題。
有提案在因電子零件的高集聚化導致銅製引線框架的氧化構成問題之前,為兼顧接著性與脫模性,而併用添加當作脫模劑用的氧化聚乙烯蠟、以及1-烯烴與順丁烯二酸之共聚物的酯化物之手法(例如參照專利文獻1、2)。根據該手法,雖對未氧化銅的接著性與脫模性較優異,但因為併用氧化聚乙烯蠟,因而會有對已氧化銅框架的密封樹脂接著力降低問題。又,若僅使用1-烯烴與順丁烯二酸酐的共聚物之酯化物,會有脫模性不足、連續成形性未必足夠的情況。
專利文獻1:日本專利第3975386號公報
專利文獻2:日本專利第4010176號公報
本發明係有鑑於此種狀況而完成,在於提供:對已進行氧化的銅製引線框架之接著性良好,且脫模性、連續成形性亦均優異的半導體密封用環氧樹脂組成物、及具備利用其施行密封之元件的半導體裝置。
本發明者等為解決上述問題經深入鑽研,結果發現在半導體密封用環氧樹脂組成物中,藉由使用將1-烯烴與順丁烯二酸酐的共聚物利用特定化合物以醇施行酯化的化合物,便可達成上述目的,遂完成本發明。
根據本發明,係提供半導體密封用環氧樹脂組成物,係含有:(A)環氧樹脂;(B)硬化劑;(C)無機填充材;以及(D)將碳數5~80之1-烯烴與順丁烯二酸酐的共聚物,在一般式(1)所示化合物存在下,利用碳數5~25之醇施行酯化的化合物;
(一般式(1)中,R1
係選自由碳數1~5之烷基、碳數1~5之鹵化烷基、及碳數6~10之芳香族基所構成群組)。
根據本發明一實施形態,上述環氧樹脂組成物係進一步含有碳數5~58之1-烯烴。
根據本發明一實施形態,上述環氧樹脂組成物中,相對於上述(D)成分100質量份,上述碳數5~58之1-烯烴的量係8質量份以上、且20質量份以下。
根據本發明一實施形態,上述環氧樹脂組成物係進一步含有一般式(2)所示化合物:
(一般式(2)中,R1
係選自由碳數1~5之烷基、碳數1~5之鹵化烷基、及碳數6~10之芳香族基所構成群組;R2
係表示碳數5~25之烷基)。
根據本發明一實施形態,上述環氧樹脂組成物中,上述一般式(2)所示化合物係在總環氧樹脂組成物中含有0.5ppm以上、且100ppm以下的量。
根據本發明一實施形態,上述環氧樹脂組成物中,上述一般式(1)所示化合物係三氟甲烷磺酸。
根據本發明一實施形態,上述環氧樹脂組成物中,上述一般式(1)所示化合物係一般式(3)所示化合物:
(一般式(3)中,R3
係選自碳數1~5之烷基、及碳數1~5之鹵化烷基,全部可為相同、亦可互異;a係0~5的整數)。
根據本發明一實施形態,上述環氧樹脂組成物中,上述一般式(2)所示化合物係一般式(4)所示化合物;
(一般式(4)中,R2
係表示碳數5~25之烷基;R3
係選自碳數1~5之烷基、及碳數1~5之鹵化烷基,全部可為相同、亦可互異;a係0~5的整數)。
根據本發明一實施形態,上述環氧樹脂組成物中,上述1-烯烴係碳數28~60之1-烯烴。
根據本發明一實施形態,上述環氧樹脂組成物中,上述醇係硬脂醇。
根據本發明一實施形態,上述環氧樹脂組成物中,上述(A)環氧樹脂係含有從一般式(5)所示聯苯型環氧樹脂、一般式(6)所示具伸苯基骨架之酚芳烷基型環氧樹脂、及一般式(7)所示具伸聯苯基骨架之酚芳烷基型環氧樹脂所構成群組中選擇之至少1種環氧樹脂;
(一般式(5),R4
~R7
係選自由氫原子、碳數1~10之烷基、碳數1~10之烷氧基、碳數6~10之芳基、及碳數6~10之芳烷基所構成群組,全部可為相同、亦可互異;n係表示0~3的整數)。
(一般式(6)中,R8
~R10
係選自由氫原子、碳數1~10之烷基、碳數1~10之烷氧基、碳數6~10之芳基、及碳數6~10之芳烷基所構成群組,全部可為相同、亦可互異;n係表示0~20的整數)。
(一般式(7)中,R11
~R19
係選自由氫原子、碳數1~10之烷基、碳數1~10之烷氧基、碳數6~10之芳基、及碳數6~10之芳烷基所構成群組,全部可為相同、亦可互異;n係表示0~3的整數)。
根據本發明,係提供半導體裝置,係包含利用上述環氧樹脂組成物施行密封的半導體元件。
根據本發明一實施形態,上述半導體裝置中,在銅製引線框架的晶粒墊上搭載上述半導體元件,並利用焊接線將上述半導體元件的電極墊、與上述銅製引線框架的內引腳予以耦接。
根據本發明一實施形態,上述半導體裝置中,在上述銅製引線框架的晶粒墊上,積層搭載著2個以上半導體元件。
根據本發明,可獲得對已進行氧化的銅製引線框架之接著性、成形時的脫模性、以及連續成形性均優異的半導體密封用環氧樹脂組成物。又,若使用該半導體密封用環氧樹脂組成物,將IC、LSI等半導體元件施行密封,便可獲得可靠性優異的半導體裝置。
本發明的半導體密封用環氧樹脂組成物,係含有:(A)環氧樹脂;(B)硬化劑;(C)無機填充材;以及(D)將碳數5~80之1-烯烴與順丁烯二酸酐的共聚物,在一般式(1)所示化合物存在下,利用碳數5~25的醇施行酯化的化合物。藉此,可獲得對已進行氧化的銅製引線框架之接著性、成形時之脫模性、以及連續成形性優異的半導體密封用環氧樹脂組成物。本發明半導體裝置的特徵在於:利用上述半導體密封用環氧樹脂組成物的硬化物,將元件施行密封。藉此,可獲得可靠性優異的半導體裝置。以下,針對本發明進行詳細說明。
首先,針對本發明的半導體密封用環氧樹脂組成物進行說明。本發明半導體密封用環氧樹脂組成物所使用(A)成分的環氧樹脂,在屬於半導體密封用環氧樹脂組成物中一般所使用者的前提下,其餘並無特別的限制,可舉例如:將使諸如酚酚醛型環氧樹脂、鄰甲酚酚醛型環氧樹脂等酚、甲酚、二甲酚、間苯二酚、兒茶酚、雙酚A、雙酚F等酚類及/或α-萘酚、β-萘酚、二羥基萘等萘酚類,與甲醛、乙醛、丙醛、苯甲醛、水楊醛等具有醛基的化合物,在酸性觸媒下進行縮合或共縮合而獲得的酚醛樹脂施行環氧化者;由雙酚A、雙酚F、雙酚S、雙酚A/D等二環氧丙基醚、屬於烷基取代或無取代的雙酚之二環氧丙基醚的聯苯型環氧樹脂、酚類及/或萘酚類,與二甲氧基對二甲苯或雙(甲氧基甲基)聯苯所合成的酚芳烷基樹脂之環氧化物;茋型環氧樹脂、氫醌型環氧樹脂;由酞酸、二聚酸等多元酸、與表氯醇的反應所獲得縮水甘油酯型環氧樹脂;由二胺基二苯基甲烷、異三聚氰酸等多元胺、與表氯醇的反應所獲得縮水甘油胺型環氧樹脂;屬於二環戊二烯與酚類的共縮合樹脂之環氧化物的二環戊二烯型環氧樹脂;具有萘環的環氧樹脂;三酚甲烷型環氧樹脂、三羥甲基丙烷型環氧樹脂、萜烯改質環氧樹脂;將1-烯烴鍵結利用過醋酸等過酸施行氧化而獲得的線狀脂肪族環氧樹脂;脂環族環氧樹脂、以及將該等環氧樹脂利用聚矽氧、丙烯腈、丁二烯、異戊二烯系橡膠、聚醯胺系樹脂等進行改質的環氧樹脂等,該等係可單獨使用、亦可組合使用2種以上。
其中,就從對已進行氧化的銅製引線框架之接著性觀點,較佳係一般式(5)所示聯苯型環氧樹脂、一般式(6)所示具有伸苯基骨架的酚芳烷基型環氧樹脂、及一般式(7)所示具有伸聯苯基骨架的酚芳烷基型環氧樹脂。
(一般式(5)中,R4
~R7
係選自由氫原子、碳數1~10之烷基、碳數1~10之烷氧基、碳數6~10之芳基、及碳數6~10之芳烷基所構成群組,全部可為相同、亦可互異;n係表示0~3的整數)。
(一般式(6)中,R8
~R10
係選自由氫原子、碳數1~10之烷基、碳數1~10之烷氧基、碳數6~10之芳基、及碳數6~10之芳烷基所構成群組,全部可為相同、亦可互異;n係表示0~20的整數)。
(一般式(7)中,R11
~R19
係選自由氫原子、碳數1~10之烷基、碳數1~10之烷氧基、碳數6~10之芳基、及碳數6~10之芳烷基所構成群組,全部可為相同、亦可互異;n係表示0~3的整數)。
一般式(5)中的R4
~R7
係選自由氫原子、碳數1~10之烷基、碳數1~10之烷氧基、碳數6~10之芳基、及碳數6~10之芳烷基所構成群組。碳數1~10之烷基係可舉例如:甲基、乙基、丙基、丁基、異丙基、異丁基等。碳數1~10之烷氧基係可舉例如:甲氧基、乙氧基、丙氧基、丁氧基等。碳數6~10之芳基可舉例如:苯基、甲苯基、二甲苯基等。碳數6~10之芳烷基係可舉例如:苄基、苯乙基等。關於上述取代基,氫原子亦可被鹵素、羥基、胺基、氰基等所取代。上述取代基中,較佳為氫原子或甲基。
一般式(5)所示聯苯型環氧樹脂係可舉例如:以4,4'-雙(2,3-環氧丙氧基)聯苯或4,4'-雙(2,3-環氧丙氧基)-3,3',5,5'-四甲基聯苯為主成分的環氧樹脂,或使表氯醇與4,4'-雙酚或4,4'-(3,3',5,5'-四甲基)雙酚進行反應而獲得的環氧樹脂等,其中,較佳係以4,4'-雙(2,3-環氧丙氧基)-3,3',5,5'-四甲基聯苯為主成分的環氧樹脂,例如YX-4000K、YX-4000H(Japan Epoxy Resins股份有限公司製,商品名)等可依市售物形式取得。當使用該聯苯型環氧樹脂時,會提升對已進行氧化的銅製引線框架之接著性。其調配量係為能發揮其性能,相對於環氧樹脂總量,較佳係設為20質量%以上、更佳係30質量%以上、再佳係50質量%以上。
一般式(6)中的R8
~R10
係選自由:氫原子、碳數1~10之烷基、碳數1~10之烷氧基、碳數6~10之芳基、及碳數6~10之芳烷基所構成群組。碳數1~10之烷基係可舉例如:甲基、乙基、丙基、丁基、異丙基、異丁基等。碳數1~10之烷氧基係可舉例如:甲氧基、乙氧基、丙氧基、丁氧基等。碳數6~10之芳基係可舉例如:苯基、甲苯基、二甲苯基等。碳數6~10之芳烷基係可舉例如:苄基、苯乙基等。關於上述取代基,氫原子亦可被鹵素、羥基、胺基、氰基等所取代。上述取代基中,較佳為氫原子或甲基。
一般式(6)所示具有伸苯基骨架的酚芳烷基型環氧樹脂較佳係以n=0為主成分的環氧樹脂,就市售物可取得例如NC2000(日本化藥股份有限公司製,商品名)等。當使用該具有伸苯基骨架的酚芳烷基型環氧樹脂時,因為交聯點間距離較寬,因而可降低硬化物的彈性模數。為能發揮性能,相對於環氧樹脂總量,調配量較佳係設為10質量%以上、更佳係20質量%以上。
一般式(7)中的R11
~R19
係選自由:氫原子、碳數1~10之烷基、碳數1~10之烷氧基、碳數6~10之芳基、及碳數6~10之芳烷基所構成群組。碳數1~10之烷基係可舉例如:甲基、乙基、丙基、丁基、異丙基、異丁基等。碳數1~10之烷氧基係可舉例如:甲氧基、乙氧基、丙氧基、丁氧基等。碳數6~10之芳基係可舉例如:苯基、甲苯基、二甲苯基等。碳數6~10之芳烷基係可舉例如:苄基、苯乙基等。關於上述取代基,氫原子亦可被鹵素、羥基、胺基、氰基等所取代。上述取代基中,較佳為氫原子或甲基。
一般式(7)所示具有伸聯苯基骨架的酚芳烷基型環氧樹脂較佳係以n=0為主成分的環氧樹脂,就市售物可取得例如NC-3000L(日本化藥股份有限公司製,商品名)等。當使用該具有伸聯苯基骨架的酚芳烷基型環氧樹脂時,因為交聯點間距離較寬,因而可降低硬化物的彈性模數。為能發揮性能,相對於環氧樹脂總量,調配量較佳係設為10質量%以上、更佳係20質量%以上。
一般式(5)所示聯苯型環氧樹脂、一般式(6)所示具有伸苯基骨架的酚芳烷基型環氧樹脂、及一般式(7)所示具有伸聯苯基骨架的酚芳烷基型環氧樹脂,分別係可單獨使用、亦可併用2種以上。當併用2種以上時,相對於環氧樹脂總量,該等的調配量合計較佳係設為50質量%以上、更佳係達70質量%以上。
本發明半導體密封用環氧樹脂組成物所使用(A)成分佔環氧樹脂整體的調配比例並無特別的限定,在總環氧樹脂組成物中,較佳係1質量%以上且15質量%以下、更佳係2質量%以上且10質量%以下。若(A)成分佔環氧樹脂整體的調配比例達上述下限值以上,則引發流動性降低等的可能性較低。若(A)成分佔環氧樹脂整體的調配比例在上述上限值以下,則引發耐焊接性降低等的可能性較低。
本發明半導體密封用環氧樹脂組成物所使用(B)成分的硬化劑,在屬於半導體密封用環氧樹脂組成物中一般所使用者的前提下,其餘並無特別的限制,可舉例如:使諸如酚酚醛樹脂、甲酚酚醛樹脂等酚、甲酚、間苯二酚、兒茶酚、雙酚A、雙酚F、苯基酚、胺基酚等酚類及/或α-萘酚、β-萘酚、二羥基萘等萘酚類、與甲醛等具醛基的化合物,在酸性觸媒下進行縮合或共縮合而獲得的樹脂;由酚類及/或萘酚類、與二甲氧基對二甲苯或雙(甲氧基甲基)聯苯所合成的酚芳烷基樹脂等,該等係可單獨使用、亦可組合使用2種以上。
其中,就從流動性、低吸濕性的觀點,較佳係一般式(8)所示具有伸聯苯基骨架的酚芳烷基樹脂:
(一般式(8)中,R20
~R28
係選自由:氫原子、碳數1~10之烷基、碳數1~10之烷氧基、碳數6~10之芳基、及碳數6~10之芳烷基所構成群組,全部可為相同、亦可為不同;n係表示0~10的整數)。
上述一般式(8)中的R20
~R28
係全部可為相同、亦可為不同,選自由:氫原子、碳數1~10之烷基、碳數1~10之烷氧基、碳數6~10之芳基、及碳數6~10之芳烷基所構成群組。碳數1~10之烷基係可舉例如:甲基、乙基、丙基、丁基、異丙基、異丁基等。碳數1~10之烷氧基係可舉例如:甲氧基、乙氧基、丙氧基、丁氧基等。碳數6~10之芳基係可舉例如:苯基、甲苯基、二甲苯基等。碳數6~10之芳烷基係可舉例如:苄基、苯乙基等。關於上述取代基,氫原子亦可被鹵素、羥基、胺基、氰基等所取代。上述取代基中,較佳係氫原子或甲基。
一般式(8)所示具有伸聯苯基骨架的酚芳烷基樹脂係可例如R20
~R28
全部均為氫原子的化合物等,其中就從熔融黏度的觀點,較佳係n為0之成分含有50質量%以上的縮合體之混合物。此種化合物就市售物可取得MEH-7851SS(明和化成股份有限公司製,商品名)。當使用該具有伸聯苯基骨架的酚芳烷基樹脂時,為能發揮性能,相對於硬化劑總量,調配量較佳係設為50質量%以上、更佳係70質量%以上。
本發明半導體密封用環氧樹脂組成物所使用(B)成分之硬化劑的調配比例並無特別的限定,總環氧樹脂組成物中,較佳為0.5質量%以上且12質量%以下、更佳為1質量%以上且9質量%以下。若(B)成分之硬化劑的調配比例達上述下限值以上,引發流動性降低等的可能性較低。若(B)成分之硬化劑的調配比例在上述上限值以下,則引發耐焊接性降低等的可能性較低。
(A)成分的環氧樹脂、與(B)成分的硬化劑之當量比(即,環氧樹脂中的環氧基數/硬化劑中的羥基數之比),並無特別的限制,為能將各自的未反應成分壓抑為較少,較佳為設定於0.5~2範圍內,更佳為設定於0.6~1.5範圍內。又,為能獲得成形性、耐迴焊性均優異的半導體密封用環氧樹脂組成物,特佳係設定於0.8~1.2範圍內。
本發明半導體密封用環氧樹脂組成物所使用(C)成分的無機填充材,係為能降低吸濕性、降低線膨脹係數、提升導熱性及提升強度,而調配於半導體密封用環氧樹脂組成物中者,可舉例如:熔融氧化矽、結晶氧化矽、氧化鋁、矽酸鈣、碳酸鈣、鈦酸鉀、碳化矽、氮化矽、氮化鋁、氮化硼、氧化鈹、氧化鋯、鋯石、鎂橄欖石、皂石、尖晶石、高鋁紅柱石、氧化鈦等粉體、或將該等施行球形化的球珠、玻璃纖維等。又,具難燃效果的無機填充材係可舉例如:氫氧化鋁、氫氧化鎂、硼酸鋅、鉬酸鋅等。該等無機填充材係可單獨使用、亦可組合使用2種以上。上述無機填充材中,就從降低線膨脹係數的觀點,較佳為熔融氧化矽,就從高導熱性的觀點,較佳為氧化鋁,而填充材形狀就從成形時的流動性與模具磨損性的觀點,較佳為球形。
無機填充材(C)的調配量就從成形性、降低吸濕性與線膨脹係數、以及提升強度的觀點,相對於半導體密封用環氧樹脂組成物,較佳為80質量%以上且96質量%以下的範圍內、更佳為82質量%以上且92質量%以下的範圍內、再佳為86質量%以上且90質量%以下的範圍內。若未滿下限值時會有可靠性降低的傾向,反之,若超過上限值時會有成形性降低的傾向。
本發明的半導體密封用環氧樹脂組成物係含有當作脫模劑用之(D)使碳數5~80的1-烯烴與順丁烯二酸酐的共聚物,在一般式(1)所示化合物存在下,使用碳數5~25的醇施行酯化之化合物。特別較佳係(D)成分在總脫模劑中含有55~100質量%。(D)成分的化合物係在(A)成分的環氧樹脂中之分散性高,且對已進行氧化的銅之接著力與脫模性間之均衡優異。
(一般式(1)中,R1
係選自由碳數1~5之烷基、碳數1~5之鹵化烷基、及碳數6~10之芳香族基所構成群組)。
本發明中,為提升對已進行氧化的銅之接著力與脫模性間之均衡,而將1-烯烴與順丁烯二酸酐的共聚物利用醇進行酯化時,重點在於觸媒係使用一般式(1)所示化合物。藉由觸媒係使用一般式(1)所示化合物,相較於習知方法未使用觸媒的情況、或使用其他觸媒情況等之下,將1-烯烴與順丁烯二酸酐的共聚物利用醇進行酯化時的酯化將可有效率地進行,因而未反應醇的殘留較少,當將所生成的(D)成分調配於環氧樹脂組成物中之時,可形成對已進行氧化的銅之接著力與脫模性間之均衡優異者,且可提升連續成形性。
一般式(1)中的R1
係選自由碳數1~5之烷基、碳數1~5之鹵化烷基、及碳數6~10之芳香族基所構成群組。碳數1~5之烷基係可舉例如:甲基、乙基、丙基、丁基、異丙基、異丁基等。碳數1~5之鹵化烷基係可舉例如:三氟甲基、三氯甲基、2-溴乙基等。碳數6~10之芳香族基係可舉例如:苯基、甲苯基、二甲苯基、萘基等。該等芳香族基的氫原子亦可被鹵素、羥基、胺基、氰基等所取代。此種具有取代基的芳香族基係可舉例如:甲苯基的甲基之氫原子被取代為氟的三氟甲基苯基、苯基的氫被取代為氟的五氟苯基、羥苯基、氰基苯基、胺基苯基等。
一般式(1)所示化合物係可舉例如:對甲苯磺酸、苯磺酸、間二甲苯-4-磺酸、對二甲苯-2-磺酸、均三甲苯磺酸(mesitylenesulfonic acid)、2-萘磺酸、4-(2-溴乙基)苯磺酸、甲烷磺酸、乙磺酸、三氟甲烷磺酸等。其中,較佳為三氟甲烷磺酸、及一般式(3)所示化合物。
(一般式(3)中,R3
係選自碳數1~5之烷基、及碳數1~5之鹵化烷基,全部可為相同、亦可互異;a係0~5的整數)。
一般式(3)中,a係0~5的整數,R3
係選自碳數1~5之烷基、及碳數1~5之鹵化烷基。碳數1~5之烷基係可舉例如:甲基、乙基、丙基、丁基、異丙基、異丁基等;碳數1~5之鹵化烷基係可舉例如:三氟甲基、三氯甲基、2-溴乙基等。
一般式(3)所示化合物係可舉例如:對甲苯磺酸、苯磺酸、間二甲苯-4-磺酸、對二甲苯-2-磺酸、均三甲苯磺酸、2-萘磺酸、4-(2-溴乙基)苯磺酸等。其中特佳為對甲苯磺酸,就市售物可取得例如對甲苯磺酸(東京化成股份有限公司製,商品名)等。當將該對甲苯磺酸使用為酯化觸媒時,因為酯化會特別有效率地進行,因而未反應醇的殘留更少,當將所生成(D)成分調配於環氧樹脂組成物中的情況時,可使對已氧化銅之接著力與脫模性間之均衡更優異,且可更加提升連續成形性。
一般式(1)所示化合物的調配量在為能發揮其性能的前提下,相對於1-烯烴與順丁烯二酸酐的共聚物與醇總量,較佳設為0.01~5質量%、更佳為0.02~2質量%。若低於上述下限值,則無法充分具酯化觸媒的機能,若超過上述上限值,則會有觸媒殘渣對Cu焊線耐濕可靠性造成不良影響的傾向。
在將1-烯烴與順丁烯二酸酐的共聚物利用醇進行酯化的化合物之合成時,所使用之1-烯烴單體在屬於碳數5~80之前提下,其餘並無特別的限制,可舉例如:1-戊烯、1-己烯、1-辛烯、1-癸烯、1-十二碳烯、1-十八碳烯、1-廿碳烯、1-廿二碳烯、1-四十碳烯、1-六十碳烯、1-廿八碳烯、1-三十碳烯、1-卅一碳烯、1-卅二碳烯、1-卅三碳烯、1-卅四碳烯、1-卅五碳烯、1-卅六碳烯、1-四十碳烯、1-四十一碳烯、1-四十二碳烯、1-四十三碳烯、1-四十四碳烯、1-五十碳烯、1-五十一碳烯、1-五十二碳烯、1-五十三碳烯、1-五十五碳烯、1-六十碳烯、1-七十碳烯、1-八十碳烯等直鏈型1-烯烴;3-甲基-1-三十碳烯、3,4-二甲基-三十碳烯、3-甲基-1-四十碳烯、3,4-二甲基-四十碳烯等分支型1-烯烴等,該等係可單獨使用、亦可組合使用2種以上。在將1-烯烴與順丁烯二酸酐的共聚物利用醇進行酯化的化合物之合成時,所使用1-烯烴單體的碳數,就從對已進行氧化的銅製引線框架之接著性觀點,較佳為10~70,就從連續成形性(脫模性)的觀點,較佳為碳數28~60,更佳為含有1-廿八碳烯、1-三十碳烯、1-四十碳烯、1-五十碳烯、1-六十碳烯的混合物。
本發明(D)成分的合成時所使用1-烯烴與順丁烯二酸酐的共聚物並無特別的限制,可舉例如一般式(9)所示化合物、一般式(10)所示化合物等,就市售物可取得以1-廿八碳烯、1-三十碳烯、1-四十碳烯、1-五十碳烯、1-六十碳烯等使用為原料的Diacarna(註冊商標)30(三菱化學股份有限公司製,商品名)。
一般式(9)及(10)中的R係碳數3以上的脂肪族烴基,n係1以上的整數。m係1-烯烴與順丁烯二酸酐的共聚合比,並無特別的限制,當將1-烯烴設為X莫耳、將順丁烯二酸酐設為Y莫耳時,X/Y(即m)較佳係1/4~5/1,m更佳係1/2~2/1,再佳係大致等莫耳程度的1/1左右。
1-烯烴與順丁烯二酸酐的共聚物之製造方法並無特別的限制,可使用使原材料進行反應等一般的共聚合方法。反應時,亦可使用能溶解1-烯烴與順丁烯二酸酐的有機溶劑等。有機溶劑並無特別的限制,較佳為甲苯,亦可使用芳香族系溶劑、醚系溶劑、鹵素系溶劑等。反應溫度係依照所使用有機溶劑的種類而有所差異,就從反應性、生產性的觀點,較佳設為50~200℃、更佳設為100~150℃。反應時間係在能獲得共聚物的前提下,其餘並無特別的限制,就從生產性的觀點,較佳設為1~30小時、更佳設為2~15小時、再佳設為4~10小時。反應結束後,視需要亦可在加熱減壓下等條件下,將未反應成分、溶劑等予以去除。其條件係將溫度較佳設為100~220℃、更佳為120~180℃,將壓力較佳設為13.3×103
Pa以下、更佳為8×103
Pa以下,將時間較佳設為0.5~10小時、又,反應時,視需要亦可添加偶氮雙異丁腈(AIBN)、過氧化苯甲醯(BPO)等自由基聚合系起始劑。
在1-烯烴與順丁烯二酸酐的共聚物利用醇進行酯化之化合物的合成時,所使用的醇係在碳數為5~25之前提下,其餘並無特別的限制,可舉例如:戊醇、己醇、辛醇、癸醇、月桂醇、肉荳蔻醇、鯨蠟醇、硬脂醇、二十烷醇、廿二烷基醇、2-甲基-癸烷-1-醇、2-乙基-癸烷-1-醇、2-己基-辛烷-1-醇等直鏈型或分支型脂肪族飽和醇;己烯醇、2-己烯-1-醇、1-己烯-3-醇、戊烯醇、2-甲基-1-戊烯醇等直鏈型或分支型脂肪族不飽和醇等,該等係可單獨使用、亦可組合使用2種以上。該等之中,就從脫模荷重的觀點,較佳為碳數10~25的直鏈型醇,就從連續成形性的觀點,更佳為碳數15~20的直鏈型脂肪族飽和醇。若1-烯烴與順丁烯二酸酐的共聚物利用醇進行酯化的化合物之合成時,所使用醇的碳數未滿上述下限值,則連續成形性(脫模性)差,若超過上述上限值,則會有對已進行氧化的銅製引線框架之接著性降低的傾向。
1-烯烴與順丁烯二酸酐的共聚物、與醇間之反應莫耳比並無特別的限制,可任意設定,但因為藉由調整該反應莫耳比,便可控制親水性的程度,因而最好配合目標半導體密封用環氧樹脂組成物而適當設定。反應時,亦可使用能溶解1-烯烴與順丁烯二酸酐的有機溶劑等。有機溶劑並無特別的限制,較佳為甲苯,亦可使用芳香族系溶劑、醚系溶劑、鹵素系溶劑等。反應溫度係依照所使用有機溶劑的種類而有所差異,就從反應性、生產性的觀點,較佳設為50~200℃、更佳為100~150℃。反應時間在能獲得共聚物的前提下,其餘並無特別的限制,就從生產性的觀點,較佳設為1~30小時、更佳為2~15小時、再佳為4~10小時。反應結束後,視需要亦可在加熱減壓下等條件下,將未反應成分、溶劑等予以去除。其條件係將溫度較佳設為100~220℃、更佳為120~180℃,將壓力較佳設為13.3×103
Pa以下、更佳為8×103
Pa以下,將時間較佳設為0.5~10小時。
(D)將1-烯烴與順丁烯二酸酐的共聚物,使用一般式(1)所示化合物,利用醇進行酯化的化合物,係可舉例如構造中含有以從一般式(11)的(a)或(b)所示二酯、及一般式(11)的(c)~(f)所示單酯中選擇之1種以上當作重複單元的化合物等,亦可構造中含有以一般式(11)的(g)或(h)所示非酯。此種化合物係可舉例如:(1)主鏈骨架中含有由一般式(11)的(a)~(f)任1種單獨構成者;(2)主鏈骨架中無規、或規則性、或嵌段狀含有一般式(11)的(a)~(f)任2種以上者;(3)主鏈骨架中無規、或規則性、或嵌段狀含有一般式(11)的(a)~(f)任1種或2種以上、與(g)及/或(h)者等,該等係可單獨使用、亦可組合使用2種以上。又,亦可為(4)主鏈骨架中無規、或規則性、或嵌段狀含有一般式(11)的(g)及(h)者、及/或(5)主鏈骨架中含有由一般式(11)的(g)或(h)分別單獨構成者。將1-烯烴與順丁烯二酸酐的共聚物利用醇進行酯化之化合物的酯化率,就從脫模性與接著性的觀點,較佳為35莫耳%以上,將1-烯烴與順丁烯二酸酐的共聚物利用醇進行酯化的化合物,較佳係一般式(11)的(c)~(f)所示單酯之任1種或2種以上合計含有70莫耳%以上的化合物、更佳係含有80莫耳%以上的化合物。
上述一般式(a)~(h)中,R係表示碳數3~78的脂肪族烴基,R2
係表示碳數5~25的烴基。n係1以上的整數。m係1-烯烴與順丁烯二酸酐的共聚合比,並無特別的限制,當將1-烯烴設為X莫耳、將順丁烯二酸酐設為Y莫耳時,X/Y(即m)較佳係1/4~5/1,m更佳係1/2~2/1,再佳係大致等莫耳程度的1/1左右。
(D)將1-烯烴與順丁烯二酸酐的共聚物,使用一般式(1)所示化合物,利用醇進行酯化的化合物之數量平均分子量,在一般式(11)的(a)~(f)構造重複單元為1以上之前提下,其餘並無特別的限制,不管哪一分子量區域,均可實現兼顧對已進行氧化的銅製引線框架之接著性與脫模性,較佳數量平均分子量係2000~10000。
(D)將1-烯烴與順丁烯二酸酐的共聚物,使用一般式(1)所示化合物,利用醇進行酯化的化合物之調配量並無特別的限制,相對於(A)成分的環氧樹脂100質量份,較佳係0.5質量份以上且10質量份以下、更佳係1質量份以上且5質量份以下。若調配量未滿上述下限值,會有脫模性降低之傾向,若超過上述上限值,則會有對已進行氧化之銅製引線框架的接著性不足之傾向。
本發明的半導體密封用環氧樹脂組成物,係由1-烯烴與順丁烯二酸酐的共聚物、與醇之酯化反應所副生成的化合物,亦可含有一般式(1)所示化合物與醇之酯化合物的一般式(2)所示化合物。當含有由1-烯烴與順丁烯二酸酐的共聚物利用醇進行酯化之化合物的半導體密封用環氧樹脂組成物,係含有一般式(2)所示化合物的情況,在將1-烯烴與順丁烯二酸酐的共聚物利用醇進行酯化之化合物的合成過程中,可認為當將1-烯烴與順丁烯二酸酐的共聚物利用醇進行酯化時,係將一般式(1)所示化合物使用為觸媒的意義。
(一般式(2)中,R1
係選自由碳數1~5之烷基、碳數1~5之鹵化烷基、及碳數6~10之芳香族基所構成群組;R2
係表示碳數5~25之烷基)。
一般式(2)中的R1
係選自由碳數1~5之烷基、碳數1~5之鹵化烷基、及碳數6~10之芳香族基所構成群組。與上述一般式(1)中的R1
同義。又,R2
係表示碳數5~25之烷基,此種取代基係可舉例如:癸基、十二烷基、十五烷基、十六烷基、十八烷基、二十烷基、廿二烷基、廿五烷基、2-甲基-辛基等。
一般式(2)所示化合物係可舉例如:對甲苯磺酸十八烷基酯、對甲苯磺酸癸酯、對甲苯磺酸廿二烷基酯、苯磺酸十八烷基酯、間二甲苯-4-磺酸十八烷基酯、對二甲苯-2-磺酸十八烷基酯、均三甲苯磺酸十八烷基酯、2-萘磺酸十八烷基酯、4-(2-溴乙基)苯磺酸十八烷基酯、甲烷磺酸十八烷基酯、乙磺酸十八烷基酯、三氟甲烷磺酸十八烷基酯等。
當一般式(1)所示化合物係使用一般式(3)所示化合物時,亦可含有一般式(3)所示化合物與醇之酯化合物的一般式(4)所示化合物。
(一般式(4)中,R2
係表示碳數5~25之烷基;R3
係選自碳數1~5之烷基、及碳數1~5之鹵化烷基,全部可為相同、亦可互異;a係0~5的整數)。
一般式(4)中,a係0~5的整數,R2
係表示碳數5~25之烷基,R3
係選自碳數1~5之烷基、及碳數1~5之鹵化烷基。一般式(4)中的R3
係與上述一般式(3)中的R3
同義,R2
係與上述一般式(2)中的R2
同義。
一般式(4)所示化合物係可舉例如:對甲苯磺酸十八烷基酯、對甲苯磺酸癸酯、對甲苯磺酸廿二烷基酯、苯磺酸十八烷基酯、間二甲苯-4-磺酸十八烷基酯、對二甲苯-2-磺酸十八烷基酯、均三甲苯磺酸十八烷基酯、2-萘磺酸十八烷基酯、4-(2-溴乙基)苯磺酸十八烷基酯等。
一般式(2)所示化合物的調配量上限值並無特別的限定,相對於總樹脂組成物中,較佳係設為100ppm以下、更佳係設為40ppm以下。若超過上述上限值,會有Cu焊線耐濕可靠性惡化的傾向。又,一般式(2)所示化合物的調配量下限值並無特別的限定,可為能定性地確認到其存在之程度,但相對於總樹脂組成物中較佳設定為0.4ppm以上。若低於上述下限值,便會有接著性、耐焊接性不足的傾向。
本發明的半導體密封用環氧樹脂組成物亦可含有碳數5~58之1-烯烴。該碳數5~58之1-烯烴係在1-烯烴與順丁烯二酸酐的共聚合步驟中,未反應而殘留的1-烯烴。本發明半導體密封用環氧樹脂組成物中所含碳數5~58之1-烯烴的量,相對於上述(D)成分100質量份,較佳為8質量份以上且20質量份以下。若在上述範圍內,便可獲得良好的連續成形性。若未滿上述下限值便會有脫模性降低的情況,若超過上述上限值便會有模具髒污、接著性降低的情況發生。
本發明半導體密封用環氧樹脂組成物中,在獲得硬化性與流動性均良好的環氧樹脂組成物之目的下,可使用硬化促進劑。本發明可使用的硬化促進劑在屬於半導體密封用環氧樹脂組成物一般所使用者的前提下,其餘並無特別的限制,可舉例如:有機膦、四取代鏻化合物、磷酸甜菜鹼化合物、膦化合物與醌化合物的加成物、鏻化合物與矽烷化合物的加成物等含磷原子之硬化促進劑;1,8-二氮雜雙環(5,4,0)月桂烯-7、苄基二甲胺、2-甲基咪唑等含氮原子的硬化促進劑,該等係可單獨使用、亦可組合使用2種以上。其中,就從成形性的觀點,較佳為有機磷化合物。
本發明半導體密封用樹脂組成物可使用的有機膦,係可舉例如:乙膦、苯膦等一級膦;二甲膦、二苯膦等二級膦;三甲膦、三乙膦、三丁膦、三苯膦等三級膦。
本發明半導體密封用樹脂組成物可使用的四取代鏻化合物係可舉例如一般式(12)所示化合物等。
(一般式(12)中,P係表示磷原子。R24
、R25
、R26
及R27
係表示芳香族基或烷基。A係表示芳香環上至少具有1個從羥基、羧基、硫醇基中選擇之任一官能基的芳香族有機酸之陰離子。AH係表示芳香環上至少具有1個從羥基、羧基、硫醇基中選擇之任一官能基的芳香族有機酸。x、y係1~3的整數,z係0~3的整數,且x=y)。
一般式(12)所示化合物係例如可依下述獲得,惟並不僅侷限於此。首先,將四取代鹵化鏻、與芳香族有機酸、及鹼混合於有機溶劑中並均勻混合,使該溶液系統內產生芳香族有機酸陰離子。接著,若添加水,便可使一般式(12)所示化合物沉澱。一般式(12)所示化合物中,較佳係磷原子上所鍵結的R24
、R25
、R26
及R27
為苯基,且AH為芳香環上具有羥基的化合物(即酚類),且A為該酚類的陰離子。
本發明半導體密封用樹脂組成物可使用的磷酸甜菜鹼化合物,係可舉例如一般式(13)所示化合物等。
(一般式(13)中,P係表示磷原子,X1係表示碳數1~3的烷基,Y1係表示羥基。f係0~5的整數,g係0~4的整數)。
一般式(13)所示化合物係例如可依如下述獲得。首先,經由使屬於三級膦的三芳香族取代膦、與重氮鎓鹽接觸,而使三芳香族取代膦、與重氮鎓鹽所具有重氮鎓基進行取代的步驟,便可獲得。惟並不僅侷限此。
本發明半導體密封用樹脂組成物可使用的膦化合物、與醌化合物之加成物,係可舉例如一般式(14)所示化合物等。
(一般式(14)中,P係表示磷原子。R34
、R35
及R36
係表示碳數1~12的烷基、或碳數6~12的芳基,相互可為相同、亦可為不同。R31
、R32
及R33
係表示氫原子或碳數1~12的烴基,相互可為相同、亦可為不同,亦可由R31
與R32
相鍵結形成環狀結構)。
膦化合物與醌化合物的加成物中所使用的膦化合物,較佳係例如:三苯膦、參(烷基苯基)膦、參(烷氧基苯基)膦、三萘膦、參(苄基)膦等芳香環上無取代、或存在有烷基、烷氧基等取代基者,而烷基、烷氧基等取代基係可舉例如具有1~6碳數者。就從取得容易度的觀點,較佳為三苯膦。
再者,膦化合物與醌化合物的加成物中所使用的醌化合物,係可舉例如:鄰苯醌、對苯醌、蒽醌類,其中就從保存安定性的觀點,較佳為對苯醌。
膦化合物與醌化合物的加成物之製造方法,係使在有機三級膦與苯醌類二者均能溶解的溶劑中進行接觸並混合,便可獲得加成物。溶劑可為丙酮、甲乙酮等酮類,對加成物的溶解性低者。惟並不僅侷限於此。
一般式(14)所示化合物中,就從可降低並維持半導體密封用樹脂組成物的硬化物之熱彈性模數觀點,較佳係磷原子上所鍵結的R34
、R35
及R36
為苯基、且R31
、R32
及R33
為氫原子的化合物,即,使1,4-苯醌與三苯膦進行加成的化合物。
硬化促進劑的調配量在屬於能達成硬化促進效果之量的前提下,其餘並無特別的限制,相對於環氧樹脂(A),較佳為0.1~10質量%、更佳為1~5質量%。若未滿下限值,則會有短時間內的硬化性差之傾向,若超過上限值,則硬化速度過於快速,會有因未填充等而導致較難獲得良好成形品的傾向。
本發明的半導體密封用環氧樹脂組成物中,在獲得耐焊接應力性、與流動性均良好的環氧樹脂組成物目的下,可添加矽氧烷加成聚合體。矽氧烷加成聚合體並無特別的限制,可使用習知公知物,例如將二甲基矽氧烷的部分甲基取代基,以烷基、環氧基、羧基、及胺基等取代基進行取代的改質聚矽氧油等等。
矽氧烷加成聚合體係1種或2種以上混合,可依相對於環氧樹脂組成物整體為0.1質量%以上且2質量%以下的比例使用。若調配量超過上限值時,會有容易發生表面污染、樹脂滲出變長之虞,若調配量未滿下限值時,會有無法獲得充分低彈性模數、與脫模劑分散性的問題點。
本發明的半導體密封用環氧樹脂組成物中,就從提升IC等元件的耐濕性、高溫放置特性之觀點,亦可添加陰離子交換體。陰離子交換體並無特別的限制,可使用習知公知物,例如:水滑石、或從銻、鉍、鋯、鈦、錫、鎂、鋁中所選擇元素的含水氧化物等,該等係可單獨使用、或組合使用2種以上。其中,較佳係一般式(15)所示水滑石及鉍的含水氫氧化物。
Mg1-x
Alx
(OH)2
(CO3
)x/2
‧mH2
O (15)
(一般式(15)中,0<X≦0.5,m係正整數)。
陰離子交換體的調配量在屬於能捕捉鹵離子等離子性雜質之充分量的前提下,其餘並無特別的限制,相對於(A)成分的環氧樹脂100質量份,較佳為0.1質量份以上且30質量份以下、更佳為1質量份以上且10質量份以下、再佳為2質量份以上且5質量份以下。若調配量未滿下限值,則會有離子性雜質的捕捉嫌不足之傾向,若超過上限值時,相較於少於此含量之下,在效果上並無大差異,因而不符經濟效益。
本發明的半導體密封用環氧樹脂組成物中,為提高樹脂成分與無機填充材間之接著性,視需要可添加:環氧基矽烷、硫醇基矽烷、胺基矽烷、烷基矽烷、脲基矽烷、乙烯基矽烷等各種矽烷系化合物、鈦系化合物、鋁螯合類、鋁/鋯系化合物等公知偶合劑。若例示該等,可舉例如:乙烯基三乙氧基矽烷、乙烯基參(β-甲氧基乙氧基)矽烷、γ-甲基丙烯醯氧基丙基三甲氧基矽烷、β-(3,4-環氧環己基)乙基三甲氧基矽烷、γ-環氧丙氧基丙基三甲氧基矽烷、γ-環氧丙氧基丙基甲基二甲氧基矽烷、γ-環氧丙氧基丙基三乙氧基矽烷、乙烯基三乙醯氧基矽烷、γ-硫醇基丙基三甲氧基矽烷、γ-硫醇基丙基甲基二甲氧基矽烷、γ-硫醇基丙基三乙氧基矽烷、γ-胺丙基三甲氧基矽烷、γ-胺丙基甲基二甲氧基矽烷、γ-胺丙基三乙氧基矽烷、γ-苯胺丙基三甲氧基矽烷、γ-苯胺丙基甲基二甲氧基矽烷、N-β-(胺乙基)-γ-胺丙基三甲氧基矽烷、γ-(β-胺乙基)胺丙基二甲氧基甲基矽烷、N-(三甲氧基矽烷基丙基)乙二胺、N-(二甲氧基甲基矽烷基異丙基)乙二胺、N-β-(N-乙烯基苄基胺乙基)-γ-胺丙基三甲氧基矽烷、γ-氯丙基三甲氧基矽烷、六甲基二矽烷、乙烯基三甲氧基矽烷等矽烷系偶合劑;三異硬脂醯基鈦酸異丙酯、參(二辛基焦磷酸酯)鈦酸異丙酯、三(N-胺乙基-胺乙基)鈦酸異丙酯、雙(二(十三烷基)亞磷酸酯)鈦酸四辛酯、四(2,2-二烯丙氧基甲基-1-丁基)雙(二(十三烷基))亞磷酸酯鈦酸酯、雙(二辛基焦磷酸酯)氧基醋酸酯鈦酸酯、雙(二辛基焦磷酸酯)乙烯鈦酸酯、三辛醯基鈦酸異丙酯、二甲基丙烯基異硬脂醯基鈦酸異丙酯、三(十二烷基)苯磺醯基鈦酸異丙酯、異硬脂醯基二丙烯基鈦酸異丙酯、三(二辛基磷酸酯)鈦酸異丙酯、三異丙苯基苯基鈦酸異丙酯、雙(二辛基亞磷酸酯)鈦酸四異丙酯等鈦酸酯系偶合劑等等,該等係可單獨使用、亦可組合使用2種以上。
偶合劑的調配量係相對於(C)成分的無機填充材100質量份,較佳為0.05質量份以上且5質量份以下、更佳為0.1質量份以上且2.5質量份以下。若未滿下限值,則會有耐濕性降低的傾向,若超過上限值,則會有封裝的成形性降低之傾向。
再者,本發明的半導體密封用環氧樹脂組成物中,視需要尚可調配其他添加劑,例如:溴化環氧樹脂、三氧化銻、四氧化銻、五氧化銻等含有鹵原子、銻原子、氮原子或磷原子的公知有機或無機化合物;金屬氫氧化物等難燃劑;碳黑、有機染料、有機顏料、氧化鈦、鉛丹、氧化鐵紅等著色劑;咪唑、三唑、四唑、三等及該等的衍生物、鄰胺苯甲酸、沒食子酸、丙二酸、蘋果酸、順丁烯二酸、胺基酚、喹啉等及該等的衍生物、脂肪族酸醯胺化合物、二硫代胺基甲酸鹽、噻二唑衍生物等接著促進劑等等。
本發明的半導體密封用環氧樹脂組成物在能將各種原材料進行均勻分散混合的前提下,可使用任何手法進行調製,一般的手法係可舉例如將既定調配量的原材料利用混合機等進行充分混合後,再利用輥式混練機、捏合機、擠出機等施行熔融混練後,經冷卻、粉碎的方法。若依照配合成形條件的尺寸與質量施行打錠化,便較容易使用。
再者,本發明的半導體密封用環氧樹脂組成物亦可溶解於各種有機溶劑中,以液狀環氧樹脂組成物形式使用,亦可以將該液狀環氧樹脂組成物薄薄地塗佈於板或薄膜上,並在樹脂的硬化反應不太會進行之條件,使有機溶劑進行飛散而獲得的薄片或薄膜狀環氧樹脂組成物形式使用。
其次,針對本發明半導體裝置進行說明。利用本發明所獲得半導體密封用環氧樹脂組成物,將元件施行密封而獲得的半導體裝置,係可舉例如在銅製引線框架的支撐構件上,搭載著半導體晶片、電晶體、二極體、閘流體等主動元件、電容器、電阻體、線圈等被動元件等等元件,再將必要的部分利用本發明半導體密封用環氧樹脂組成物施行密封而獲得的半導體裝置等。此種半導體裝置係可例如將元件固定於銅製引線框架上,再將焊墊等元件的端子部、與導線部,利用焊接搭線或凸塊進行耦接後,使用本發明半導體密封用環氧樹脂組成物利用轉印成形等施行密封而獲得的DIP(Dual Inline Package,雙列直插式封裝)、PLCC(Plastic Leaded Chip Carrier,塑膠有腳晶片封裝)、QFP(Quad Flat Package,四方形扁平封裝)、SOP(Small Outline Package,小外型封裝)、SOJ(Small Outline J-lead package,J型引腳小外型封裝)、TSOP(Thin Small Outline Package,薄型小外型封裝)、TQFP(Thin Quad Flat Package,薄型四方形扁平封裝)等一般的樹脂密封型IC。又,亦可舉例如MCP(Multi Chip Stacked Package,多晶片堆疊式封裝)等晶片呈多層積層的封裝。
圖1係顯示使用本發明半導體密封用環氧樹脂組成物的半導體裝置一例之剖面構造之圖。在晶粒墊3上經由黏晶材硬化體2,將元件1呈2層積層並固定。元件1的電極墊與銅製引線框架5之間,利用焊接線4進行耦接。元件1係利用密封用樹脂組成物的硬化體6進行密封。
使用本發明半導體密封用環氧樹脂組成物將元件予以密封的方法,低壓轉印成形法係屬最一般性,但亦可使用射出成形法、壓縮成形法等。當半導體密封用環氧樹脂組成物在常溫呈液狀或糊狀時,亦可舉例如:點膠方式、注模方式、印刷方式等。
再者,並不僅只有直接將元件施行樹脂密封的一般密封方法,亦有使元件不直接接觸到環氧樹脂組成物之形態的中空封裝方式,而可適用為中空封裝用的密封用環氧樹脂組成物。
以下,針對本發明列舉實施例進行詳細說明,惟本發明不受該等的任何限制。
合成例1:將碳數28~60之1-烯烴與順丁烯二酸酐的共聚物,使用對甲苯磺酸,利用碳數18的醇施行酯化之化合物1的合成
將1-廿八碳烯、1-三十碳烯、1-四十碳烯、1-五十碳烯、1-六十碳烯等的混合物、與順丁烯二酸酐的共聚物[三菱化學股份有限公司製,商品名Diacarna(註冊商標)30]300g、硬脂醇(東京化成製)140g、及對甲苯磺酸一水合物(東京化成製)4g,溶解於甲苯500ml中,在110℃進行8小時反應後,一邊階段性升溫至160℃一邊去除甲苯,在減壓下於160℃施行6小時反應而去除溶劑,便獲得436g的化合物1。分子量係以四氫呋喃為析出液,利用聚苯乙烯換算的凝膠滲透色層分析儀進行測定,結果數量平均分子量(Mn)=4100、分子量分佈(Mw/Mn)=3.51,從未反應的硬脂醇殘留量中所計算化合物1的單酯化率係100莫耳%。從GPC的面積比,化合物1中所含1-烯烴量係12%。分取GPC的保持時間17.2~17.8分之尖峰,以1
H-NMR、IR、GC/MS進行分析,結果可確認到對甲苯磺酸十八烷基酯在化合物1中含有2.0質量%。又,未反應的硬脂醇殘留量係化合物1整體的1質量%以下。
合成例2:將碳數28~60之1-烯烴、與順丁烯二酸酐的共聚物,使用苯磺酸,利用碳數18的醇進行酯化之化合物2的合成
除取代對甲苯磺酸,改為使用苯磺酸(東京化成製)4g之外,其餘均利用合成例1所記載方法獲得單酯化率100莫耳%的化合物2(428g)。分子量係以四氫呋喃為析出液,利用聚苯乙烯換算的凝膠滲透色層分析儀進行測定,結果數量平均分子量(Mn)=4100、分子量分佈(Mw/Mn)=3.72,苯磺酸十八烷基酯含有1.9質量%,未反應的硬脂醇殘留量係化合物2整體的1質量%以下。從GPC的面積比確認到化合物2中所含1-烯烴量係12%。
合成例3:將碳數28~60之1-烯烴、與順丁烯二酸酐的共聚物,使用三氟甲烷磺酸,利用碳數18的醇施行酯化之化合物3的合成
除取代對甲苯磺酸,改為使用三氟甲烷磺酸(東京化成製)0.1g之外,其餘均利用合成例1所記載方法獲得單酯化率100莫耳%的化合物3(438g)。分子量係以四氫呋喃為析出液,利用聚苯乙烯換算的凝膠滲透色層分析儀進行測定,結果數量平均分子量(Mn)=4100、分子量分佈(Mw/Mn)=3.53,三氟甲烷磺酸十八烷基酯含有480ppm,未反應的硬脂醇殘留量係化合物3整體的1%以下。從GPC的面積比確認到化合物3中所含1-烯烴量係14%。
合成例4:將碳數28~60之1-烯烴、與順丁烯二酸酐的共聚物,使用對甲苯磺酸,利用碳數10的醇施行酯化之化合物4的合成
除取代硬脂醇,改為使用1-癸醇(東京化成製)68g之外,其餘均利用合成例1所記載方法獲得單酯化率100莫耳%的化合物4(340g)。分子量係以四氫呋喃為析出液,利用聚苯乙烯換算的凝膠滲透色層分析儀進行測定,結果數量平均分子量(Mn)=3700、分子量分佈(Mw/Mn)=3.84,對甲苯磺酸癸酯含有1.7%,未反應的1-癸醇殘留量係化合物4整體的1%以下。從GPC的面積比確認到化合物4中所含1-烯烴量係12%。
合成例5:將碳數28~60之1-烯烴、與順丁烯二酸酐的共聚物,使用對甲苯磺酸,利用碳數22的醇施行酯化之化合物5的合成
除取代硬脂醇,改為使用廿二烷基醇(花王製)170g之外,其餘均利用合成例1所記載方法獲得單酯化率100莫耳%的化合物5(340g)。分子量係以四氫呋喃為析出液,利用聚苯乙烯換算的凝膠滲透色層分析儀進行測定,結果數量平均分子量(Mn)=4400、分子量分佈(Mw/Mn)=3.85,對甲苯磺酸廿二烷基酯含有2.1%,未反應的廿二烷基醇殘留量係化合物5整體的1%以下。從GPC的面積比確認到化合物5中所含1-烯烴量係12%。
合成例6:將碳數20~24的1-烯烴、與順丁烯二酸酐的共聚物,使用對甲苯磺酸,利用碳數18的醇施行酯化之化合物6的合成
將1-廿碳烯、1-廿二碳烯、1-廿四碳烯的混合物(出光興產股份有限公司製,商品名:LINEALENE 2024)180g、與順丁烯二酸酐58g,溶解於甲苯500ml中,一邊依110℃施行加熱,一邊每隔20分鐘分3次添加過氧化苯甲醯(BPO)0.16g。BPO添加結束後,再將反應溶液於110℃加熱7小時。在該共聚物235g的甲苯溶液中,添加硬脂醇160g、對甲苯磺酸4.0g,在110℃進行8小時反應後,一邊階段性升溫至160℃一邊去除甲苯,在減壓下於160℃施行6小時反應而去除未反應成分,便獲得單酯化率100莫耳%的化合物6(380g)。分子量係以四氫呋喃為析出液,利用聚苯乙烯換算的凝膠滲透色層分析儀進行測定,結果數量平均分子量(Mn)=9800、分子量分佈(Mw/Mn)=2.66,對甲苯磺酸十八烷基酯含有2.3%,未反應的硬脂醇殘留量係化合物6整體的1%以下。從GPC的面積比確認到化合物6中所含1-烯烴量係12%。
合成例7:將碳數28~60之1-烯烴、與順丁烯二酸酐的共聚物,使用對甲苯磺酸(添加量:減量),利用碳數18的醇施行酯化之化合物7的合成
除將對甲苯磺酸的添加量變更為2g之外,其餘均利用合成例1所記載方法獲得單酯化率85莫耳%的化合物7(340g)。分子量係以四氫呋喃為析出液,利用聚苯乙烯換算的凝膠滲透色層分析儀進行測定,結果數量平均分子量(Mn)=4000、分子量分佈(Mw/Mn)=3.87,對甲苯磺酸十八烷基酯含有1.0%,未反應的硬脂醇殘留量係化合物7整體的5%。從GPC的面積比確認到化合物7中所含1-烯烴量係12%。
合成例8:將碳數28~60之1-烯烴、與順丁烯二酸酐的共聚物,使用對甲苯磺酸(添加量:增量),利用碳數18的醇施行酯化之化合物8的合成
除將對甲苯磺酸的添加量變更為8g之外,其餘均利用合成例1所記載方法獲得單酯化率85莫耳%的化合物8(340g)。分子量係以四氫呋喃為析出液,利用聚苯乙烯換算的凝膠滲透色層分析儀進行測定,結果數量平均分子量(Mn)=4100、分子量分佈(Mw/Mn)=3.88,對甲苯磺酸十八烷基酯含有4.0%,未反應的硬脂醇殘留量係化合物8整體的1%以下。從GPC的面積比確認到化合物8中所含1-烯烴量係12%。
合成例9:將碳數20~24的1-烯烴、與順丁烯二酸酐的共聚物,在未使用觸媒的情況下,利用碳數18的醇施行酯化之化合物9的合成
除未添加酯化觸媒的對甲苯磺酸之外,其餘均依照合成例6所記載方法獲得單酯化率75莫耳%的化合物9(380g)。分子量係以四氫呋喃為析出液,利用聚苯乙烯換算的凝膠滲透色層分析儀進行測定,結果數量平均分子量(Mn)=9300、分子量分佈(Mw/Mn)=2.62,未反應的硬脂醇殘留量係化合物9整體的7%。從GPC的面積比確認到化合物9中所含1-烯烴量係12%。
以下合成例10係改變合成例3的酯化觸媒殘渣除去方法,調查使磺酸酯等減少時的影響。
合成例10:將碳數28~60之1-烯烴、與順丁烯二酸酐的共聚物300.0g、及硬脂醇141g,在70℃進行熔融後,添加10wt%三氟甲烷磺酸水溶液1g。所獲得反應混合物依150℃施行5小時攪拌。
然後,將液溫冷卻至120℃,在30Torr減壓下施行3小時減壓蒸餾,而將游離的三氟甲烷磺酸與水予以除去,獲得化合物10(435g)。化合物10係含有三氟甲烷磺酸十八烷基酯480ppm。從GPC的面積比確認到化合物10中所含1-烯烴量係14%。
以下合成例11係在合成例1中導入將酯化觸媒利用溶劑洗淨而除去的步驟,而調查使磺酸酯等減少時的影響
合成例11:將碳數28~60之1-烯烴、與順丁烯二酸酐的共聚物300.0g、及硬脂醇141g,在70℃進行熔融。然後,添加對甲苯磺酸一水合物4g,並將混合物在150℃進行8小時攪拌。將所獲得反應混合物冷卻至80℃,歷時60分鐘在回流下滴下丙酮500g。滴下後便停止攪拌,在液溫70℃靜置60分鐘,反應母液便分離為2層。將含有未反應硬脂醇與磺酸成分的上層之丙酮層予以除去。重複此項洗淨操作計2次後,將殘餘的下層在30Torr減壓下,在90℃施行6小時減壓餾除,藉此便將殘存的丙酮除去,而獲得對甲苯磺酸十八烷基酯含有600ppm的化合物11(420g)。從GPC的面積比確認到化合物11中所含1-烯烴量係9%。
以下合成例12係藉由在合成例11中過量重複施行溶劑洗淨步驟,而調查使含1-烯烴的低分子量成分減少時之影響。
合成例12:將碳數28~60之1-烯烴、與順丁烯二酸酐的共聚物300.0g、及硬脂醇141g,在70℃進行熔融。然後,添加對甲苯磺酸一水合物4g,並將混合物在150℃進行8小時攪拌。將所獲得反應混合物冷卻至80℃,歷時60分鐘在回流下滴下丙酮500g。滴下後便停止攪拌,在液溫70℃靜置60分鐘,反應母液便分離為2層。將含有未反應硬脂醇與磺酸成分的上層之丙酮層予以除去。重複此項洗淨操作計5次後,將殘餘的下層在30Torr減壓下,在90℃施行6小時減壓餾除,藉此便將殘存的丙酮除去,而獲得對甲苯磺酸十八烷基酯含有300ppm的化合物12(390g)。從GPC的面積比確認到化合物12中所含1-烯烴量係3%。
關於實施例1~14及比較例1所使用的成分,如下示。
環氧樹脂1:環氧當量185g/eq、熔點108℃的聯苯型環氧樹脂(Japan Epoxy股份有限公司製,商品名EPIKOTE YX-4000K)
環氧樹脂2:環氧當量237g/eq、軟化點52℃之具有伸苯基骨架的酚芳烷基型環氧樹脂(日本化藥製,商品名NC2000)
環氧樹脂3:環氧當量273g/eq、軟化點52℃之具有伸聯苯基骨架的酚芳烷基型環氧樹脂(日本化藥製,商品名NC-3000L)
環氧樹脂4:環氧當量220g/eq、軟化點52℃之鄰甲酚酚醛型環氧樹脂(日本化藥製,商品名EOCN-104S)
酚樹脂系硬化劑1:羥基當量199g/eq、軟化點64℃之具有伸聯苯基骨架的酚芳烷基型酚樹脂(明和化成股份有限公司製,商品名MEH-7851SS)
無機填充材1:平均粒徑10.8μm、比表面積5.1m2
/g的球狀熔融氧化矽
化合物1:依合成例1所獲得的化合物1
化合物2:依合成例2所獲得的化合物2
化合物3:依合成例3所獲得的化合物3
化合物4:依合成例4所獲得的化合物4
化合物5:依合成例5所獲得的化合物5
化合物6:依合成例6所獲得的化合物6
化合物7:依合成例7所獲得的化合物7
化合物8:依合成例8所獲得的化合物8
化合物9:依合成例9所獲得的化合物9
化合物10:依合成例10所獲得的化合物10
化合物11:依合成例11所獲得的化合物11
化合物12:依合成例12所獲得的化合物12
硬化促進劑:
硬化促進劑1:三苯膦與對苯醌的加成物
其他添加劑:
偶合劑1:γ-環氧丙氧基丙基三甲氧基矽烷(CHISSO製,商品名S510=GPS-M)
著色劑1:碳黑(三菱化學股份有限公司製,商品名Carbon#5)
將上述成分分別依表1及表2所示質量份進行調配,在混練溫度100℃、混練時間30分鐘的條件下施行雙軸混練,經冷卻後施行粉碎,製得環氧樹脂組成物。
將所製得實施例及比較例的環氧樹脂組成物,利用下述各項試驗施行評估。評估結果如表1及表2所示。
將經在220℃熱盤上加熱2分鐘而使氧化的氧化銅基材,與經打錠化的環氧樹脂組成物,在175℃、6.9MPa、2分鐘的條件施行一體成形,便在氧化銅基材(直徑3.6mm、厚度0.5mm)上獲得圓錐梯形狀成形品(上徑3mm×下徑3.6mm×厚度3mm,氧化銅基材與樹脂硬化物的接觸面積10mm2
)後,將所獲得各成形品的基材予以固定,從橫向推擠環氧樹脂組成物的硬化部位,測定其轉矩(N)。本評估係相關半導體到底具有何種程度的耐焊錫迴焊性,判定結果係將14N以上者評為「◎」,將12N以上且未滿14N者評為「○」,未滿12N者評為「×」。
關於脫模時荷重評估用模具,轉印成形模係由上模、中模、下模構成。圖2係顯示成形後的中模平面概略圖,圖3係顯示圖2的A部分之橫剖面圖。經成形後,在中模上所附著的成形品形狀,係直徑14.0mm、高1.5mm厚。圖2及圖3中,11係表示中模,12係表示殘料廢品,13係表示流道。14係表示成形品,15係表示通風孔。16係表示把手,17係表示推拉力計插入用孔。
使用低壓轉印成形機(TOWA(股)製,Y-series手壓機),在上述脫模時荷重評估用模具中,於模具溫度175℃、注入壓力6.9MPa、硬化時間60秒的條件下注入環氧樹脂組成物,並轉印成形8個/射膠的成形品14。經成形後在中模11上所附著的圓形成形品14上,從中模上部的孔17碰抵推拉力計(參照圖3),測定成形品出現突出時所施加的荷重。接著,將評估用材料施行20射膠成形,並針對後半段的10射膠之成形品進行測定,將其平均值視為「脫模荷重」。評估係相關量產成形時到底具有何種程度的安定生產性,判定結果係將15N以下者評為「◎」,將超過15N且未滿20N者評為「○」,將20N以上者評為「×」。
使用低壓轉印自動成形機(第一精工(股)製,GP-ELF),在模具溫度175℃、注入壓力9.8MPa、硬化時間70秒的條件下,利用環氧樹脂組成物對晶片等施行密封,並連續施行至400射膠,直到形成80針腳方形扁平封裝(80pQFP;銅製引線框架,封裝外觀尺寸:14mm×20mm×厚2mm、焊墊尺寸:6.5mm×6.5mm、晶片尺寸6.0mm×6.0mm×厚0.35mm)為止。
關於通風孔阻塞的評估,每隔50射膠依目視觀察模具,確認有無通風孔阻塞[通風孔(寬0.5mm、厚度50μm)部有樹脂硬化物固著,導致通風孔遭堵塞狀態],接著,依下述4階段施行評估。依照良莠順序為A、B、C‧‧‧的順序,若達C等級以上便屬可實用範圍。評估結果如下述所示。
A:直到400射膠仍無問題
B:直到300射膠便產生通風孔阻塞
C:直到200射膠便產生通風孔阻塞
D:直到100射膠便產生通風孔阻塞
關於模具髒污,係觀察經400射膠成形後的模具,從澆口的髒污擴大狀況程度,依下述5階段施行評估。依照良莠順序為A、B、C‧‧‧的順序,若達C等級以上便屬可實用範圍。
A:無髒污情形
B:髒污擴大係模穴表面的20面積%以下
C:髒污擴大係超過模穴表面的20面積%~40面積%以下
D:髒污擴大係超過模穴表面的40面積%~60面積%以下
E:髒污擴大,超過模穴表面的60面積%
Au焊線可靠性試驗用PKG之成形:
耐濕可靠性:將已形成鋁電路的TEG晶片(3mm×3.5mm、鋁電路係無保護膜呈露出狀態),黏合於16針腳SOP引線框架(封裝尺寸係7.2mm×11.5mm、厚度1.95mm)的晶粒墊部上,將鋁焊墊與基板側端子使用Au焊線(焊線徑25μm、純度99.99%)依焊線間距80μm施行焊接搭線。將其使用低壓轉印成形機(KOHTAKI精機股份有限公司製,KTS-125),依模具溫度175℃、注入壓力9.8MPa、硬化時間2分鐘的條件,利用環氧樹脂組成物施行密封成形,而製作16針腳SOP封裝。所製得的封裝以175℃、4小時施行後硬化。
Cu焊線可靠性試驗用PKG之成形:
耐濕可靠性:將已形成鋁電路的TEG晶片(3.5mm×3.5mm、鋁電路係無保護膜呈露出狀態),黏合於16針腳SOP引線框架(封裝尺寸係7.2mm×11.5mm、厚度1.95mm)的晶粒墊部上,將鋁焊墊與基板側端子使用Cu焊線(焊線徑25μm、純度99.99%)依焊線間距80μm施行焊接搭線。將其使用低壓轉印成形機(KOHTAKI精機股份有限公司製,KTS-125),依模具溫度175℃、注入壓力9.8MPa、硬化時間2分鐘的條件,利用環氧樹脂組成物施行密封成形,而製作16針腳SOP封裝。所製得的封裝以175℃、4小時施行後硬化。
耐濕可靠性試驗:
使用所製作的封裝,根據IEC68-2-66施行HAST(Highly Accelerated temperature and humidity Stress Test,高加速溫度及濕度應力試驗)試驗。施行試驗條件為130℃、85%RH、施加20V、240小時(Cu焊線時係480小時)處理,並測定電路有無出現斷路不良。結果依15個封裝中的不良個數表示。
耐焊接性試驗:
使用低壓轉印成形機(第一精工(股)製,GP-ELF),為重現氧化狀態,便在將半導體元件(矽晶片)所搭載的引線框架等安裝於180℃模具上之後,施行2分鐘預熱,在模具溫度180℃、注入壓力7.4MPa、硬化時間120秒鐘的條件下,注入環氧樹脂組成物,而將半導體元件(矽晶片)所搭載的引線框架等施行密封成形,便製得由80pQFP(銅製引線框架,尺寸係14×20mm×厚度2.00mm,半導體元件係7×7mm×厚度0.35mm,半導體元件與引線框架的內引腳部係利用25μm徑的金線施行焊接)構成的半導體裝置。後硬化係將在175℃施行4小時加熱處理的半導體裝置12個於60℃、相對濕度60%施行120小時加濕處理後,再施行IR迴焊處理(依照260℃,JEDEC‧等級3的條件)。利用超音波探傷裝置(日立建機精密科技製,mi-scope10)觀察該等半導體裝置內部有無剝離及龜裂情形,將只要有出現剝離或龜裂中任一情形者評為「不良」。結果係依n=6中的不良半導體裝置個數表示。若不良個數在1以下便屬可實用範圍。
實施例1~14係含有:(A)環氧樹脂、(B)硬化劑、(C)無機填充材、以及(D)將1-烯烴與順丁烯二酸酐的共聚物使用一般式(1)所示化合物利用醇施行酯化之化合物,包括有經改變(A)成分的種類、(D)成分的種類與調配量者。實施例1~14均可獲得與氧化銅間之接著強度高,且使用已進行氧化的銅製引線框架施行加濕處理後,利用IR迴焊處理所獲得耐焊接性呈優異的結果。特別係實施例1~13均可獲得脫模荷重低,且將元件等施行密封成形時的連續成形性(通風孔阻塞及模具髒污)、耐濕可靠性均優異的結果。
其中,(A)成分係使用一般式(5)所示聯苯型環氧樹脂的環氧樹脂1、一般式(6)所示具有伸苯基骨架的酚芳烷基型環氧樹脂的環氧樹脂2、及一般式(7)所示具有伸聯苯基骨架的酚芳烷基型環氧樹脂的環氧樹脂3中至少1種以上,且相對於(A)成分總量50質量%以上,(D)成分係使用將碳數28~60之1-烯烴、與順丁烯二酸酐的共聚物,使用對甲苯磺酸,利用碳數18的醇施行酯化之化合物1的實施例1、9、10及11,可獲得對氧化銅的接著強度、耐濕可靠性、耐焊接性、與脫模性(脫模荷重)、連續成形性(通風孔阻塞及模具髒污)間之均衡優異的結果。雖觸媒殘渣的除去方法有所不同,但使用含有與化合物3同量之三氟甲烷磺酸十八烷基酯之化合物10的實施例12,係呈與實施例3同等的特性。使用經追加溶劑洗淨步驟而降低觸媒殘渣的化合物11之實施例13,相較於實施例1之下,獲得經提升Cu焊線耐濕可靠性的結果。
另一方面,使用(D)將碳數20~24的1-烯烴、與順丁烯二酸酐的共聚物,在未使用觸媒情況下,利用碳數18的醇施行酯化之化合物9的比較例1,雖耐濕可靠性良好,但對氧化銅的接著強度、耐焊接性、脫模荷重、連續成形性的模具髒污與通風孔阻塞均呈較差的結果。使用1-烯烴含量較少的化合物12之實施例14,雖耐濕可靠性、對氧價銅的接著性、耐焊接性呈良好,但連續成形性的通風孔阻塞、脫模荷重卻呈較差的結果。
根據本發明,如實施例所示,可獲得對已進行氧化的銅製引線框架之接著性、脫模性、連續成形性等均優異的半導體密封用環氧樹脂組成物,因而使用該環氧樹脂組成物,可適用於對IC、LSI等電子零件,特別係晶片呈多層積層的MCP(Multi Chip Stacked Package)等,銅製引線框架較容易進行氧化的封裝。
1...元件
2...黏晶材硬化體
3...晶粒墊
4...焊接線
5...銅製引線框架
6...密封用樹脂組成物的硬化體
11...中模
12...殘料廢品
13...流道
14...成形品
15...通風孔
16...把手
17...推拉力計插入用孔
圖1係顯示使用本發明半導體密封用環氧樹脂組成物的半導體裝置一例之剖面構造之圖。
圖2係顯示利用對本發明半導體密封用環氧樹脂組成物的脫模時荷重施行評估用之評估用模具進行成形後,中模狀態的平面概略圖。
圖3係顯示圖2之中模的成形品附近之A部分剖面構造之概略圖。
1...元件
2...黏晶材硬化體
3...晶粒墊
4...焊接線
5...銅製引線框架
6...密封用樹脂組成物的硬化體
Claims (14)
- 一種半導體密封用環氧樹脂組成物,係含有:(A)環氧樹脂;(B)硬化劑;(C)無機填充材;以及(D)將碳數5~80之1-烯烴與順丁烯二酸酐的共聚物,在一般式(1)所示化合物存在下,利用碳數5~25之醇施行酯化的化合物;
- 如申請專利範圍第1項之環氧樹脂組成物,其中,進一步含有碳數5~58之1-烯烴。
- 如申請專利範圍第2項之環氧樹脂組成物,其中,相對於上述(D)成分100質量份,上述碳數5~58之1-烯烴的量係8質量份以上、且20質量份以下。
- 如申請專利範圍第1項之環氧樹脂組成物,其中,進一步含有一般式(2)所示化合物:
- 如申請專利範圍第4項之環氧樹脂組成物,其中,上述一般式(2)所示化合物係在總環氧樹脂組成物中含有0.5ppm以上、且100ppm以下的量。
- 如申請專利範圍第1項之環氧樹脂組成物,其中,上述一般式(1)所示化合物係三氟甲烷磺酸。
- 如申請專利範圍第1項之環氧樹脂組成物,其中,上述一般式(1)所示化合物係一般式(3)所示化合物:
- 如申請專利範圍第4項之環氧樹脂組成物,其中,上述一般式(2)所示化合物係一般式(4)所示化合物;
- 如申請專利範圍第1項之環氧樹脂組成物,其中,上述1-烯烴係碳數28~60之1-烯烴。
- 如申請專利範圍第1項之環氧樹脂組成物,其中,上述醇係硬脂醇。
- 如申請專利範圍第1項之環氧樹脂組成物,其中,上述(A)環氧樹脂係含有從一般式(5)所示聯苯型環氧樹脂、一般式(6)所示具伸苯基骨架之酚芳烷基型環氧樹脂、及一般式(7)所示具伸聯苯基骨架之酚芳烷基型環氧樹脂所構成群組中選擇之至少1種環氧樹脂;
- 一種半導體裝置,係包含利用申請專利範圍第1項之環氧樹脂組成物施行密封的半導體元件。
- 如申請專利範圍第12項之半導體裝置,其中,在銅製引線框架的晶粒墊上搭載上述半導體元件,並利用焊接線將上述半導體元件的電極墊、與上述銅製引線框架的內引腳予以耦接。
- 如申請專利範圍第13項之半導體裝置,其中,在上述銅製引線框架的晶粒墊上,積層搭載著2個以上半導體元件。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010122191 | 2010-05-28 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201211138A TW201211138A (en) | 2012-03-16 |
TWI499629B true TWI499629B (zh) | 2015-09-11 |
Family
ID=45003627
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW100118605A TWI520972B (zh) | 2010-05-28 | 2011-05-27 | 酯化物之製造方法 |
TW100118603A TWI499629B (zh) | 2010-05-28 | 2011-05-27 | 半導體密封用環氧樹脂組成物及使用其之半導體裝置 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW100118605A TWI520972B (zh) | 2010-05-28 | 2011-05-27 | 酯化物之製造方法 |
Country Status (7)
Country | Link |
---|---|
US (2) | US8648479B2 (zh) |
JP (2) | JP5874633B2 (zh) |
KR (2) | KR101835902B1 (zh) |
CN (3) | CN102918106B (zh) |
SG (2) | SG185503A1 (zh) |
TW (2) | TWI520972B (zh) |
WO (2) | WO2011148628A1 (zh) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20140148417A (ko) * | 2012-03-27 | 2014-12-31 | 스미또모 베이크라이트 가부시키가이샤 | 광 반사용 수지 조성물, 광 반도체 소자 탑재용 기판 및 광 반도체 장치 |
TWI494339B (zh) | 2012-10-23 | 2015-08-01 | Ind Tech Res Inst | 部分酯化環氧樹脂及應用其製成之環氧樹脂組成物及其製法 |
JP2014091744A (ja) * | 2012-10-31 | 2014-05-19 | 3M Innovative Properties Co | アンダーフィル組成物、半導体装置およびその製造方法 |
CN104276938B (zh) * | 2013-07-02 | 2017-02-08 | 北京大学 | 制备γ‑羰基羧酸、氨基酸、氨基酸酯及酰胺类化合物的方法 |
JP6803138B2 (ja) * | 2014-10-22 | 2020-12-23 | 三星エスディアイ株式会社Samsung SDI Co., Ltd. | ホスホニウム系化合物、それを含むエポキシ樹脂組成物、およびそれを用いて製造された半導体装置 |
RU2626412C1 (ru) * | 2016-02-25 | 2017-07-27 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Уфимский государственный авиационный технический университет" | Магнитотепловой генератор для космического аппарата |
JP6900749B2 (ja) * | 2017-04-04 | 2021-07-07 | 住友ベークライト株式会社 | カーボンブラック分散フェノール樹脂組成物、エポキシ樹脂組成物およびこれらの製造方法 |
TWI672764B (zh) * | 2018-11-07 | 2019-09-21 | 國立成功大學 | 晶片封裝裝置及其對位壓合方法 |
US11107791B2 (en) * | 2019-03-14 | 2021-08-31 | Advanced Semiconductor Engineering, Inc. | Semiconductor package structure and method for manufacturing the same |
TW202231146A (zh) * | 2021-01-25 | 2022-08-01 | 優顯科技股份有限公司 | 電子裝置及其製造方法 |
CN116444273A (zh) * | 2022-01-10 | 2023-07-18 | 山东圣泉新材料股份有限公司 | 树脂炭素阳极生坯及制备方法、生坯中间体及制备方法、炭素阳极及制备方法 |
CN116535568B (zh) * | 2023-06-15 | 2024-02-27 | 长江大学 | 一种防蜡剂及其制备方法和应用 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW396175B (en) * | 1996-12-16 | 2000-07-01 | Shell Int Research | Electronic package and process for preparing same |
TW200508316A (en) * | 2003-08-04 | 2005-03-01 | Hitachi Chemical Co Ltd | Epoxy resin composition for sealing and electronic part device |
Family Cites Families (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3051562A (en) * | 1960-01-20 | 1962-08-28 | Socony Mobil Oil Co | Stabilized jet combustion fuels |
US3854893A (en) * | 1972-06-14 | 1974-12-17 | Exxon Research Engineering Co | Long side chain polymeric flow improvers for waxy hydrocarbon oils |
US4151069A (en) * | 1974-10-17 | 1979-04-24 | Exxon Research & Engineering Co. | Olefin-dicarboxylic anhydride copolymers and esters thereof are dewaxing aids |
JPS52145496A (en) | 1976-05-10 | 1977-12-03 | Hitachi Chem Co Ltd | Preparation of maleic anhydride half ester copolymers |
JP2706580B2 (ja) | 1991-02-07 | 1998-01-28 | 東洋インキ製造株式会社 | 活性エネルギー線硬化性樹脂および樹脂組成物 |
JP3268829B2 (ja) | 1992-06-15 | 2002-03-25 | 株式会社クラレ | 感光性樹脂組成物 |
US5612444A (en) | 1995-03-28 | 1997-03-18 | Arco Chemical Technology, L.P. | Process for making polyetheresters with high aromatic ester content |
SG63803A1 (en) * | 1997-01-23 | 1999-03-30 | Toray Industries | Epoxy-resin composition to seal semiconductors and resin-sealed semiconductor device |
JP3976386B2 (ja) | 1997-12-22 | 2007-09-19 | 株式会社アルバック | フッ素ガスを用いた選択cvd方法 |
US6140458A (en) | 1998-04-28 | 2000-10-31 | Mitsui Chemicals, Inc. | Preparation process of polyester |
CN1067712C (zh) * | 1998-08-13 | 2001-06-27 | 中国石油化工总公司 | 柴油流动改进剂组合物 |
JP3975386B2 (ja) * | 1999-12-28 | 2007-09-12 | 日立化成工業株式会社 | 封止用エポキシ樹脂成形材料及び電子部品装置 |
JP3823828B2 (ja) * | 2000-01-28 | 2006-09-20 | 株式会社日立製作所 | 無溶剤型熱硬化性樹脂組成物とその製造方法及び製品 |
JP2002053649A (ja) | 2000-08-09 | 2002-02-19 | Mitsubishi Gas Chem Co Inc | ポリエステル製造用触媒及びポリエステルの製造方法 |
JP4010176B2 (ja) * | 2001-06-15 | 2007-11-21 | 日立化成工業株式会社 | 封止用エポキシ樹脂成形材料及び電子部品装置 |
AU2003202139A1 (en) * | 2002-02-27 | 2003-09-09 | Hitachi Chemical Co., Ltd. | Encapsulating epoxy resin composition, and electronic parts device using the same |
JP4404050B2 (ja) * | 2003-03-11 | 2010-01-27 | 住友ベークライト株式会社 | 半導体封止用樹脂組成物およびこれを用いた半導体装置 |
US7846998B2 (en) * | 2004-03-03 | 2010-12-07 | Hitachi Chemical Co., Ltd. | Sealant epoxy-resin molding material, and electronic component device |
JP2005298647A (ja) | 2004-04-09 | 2005-10-27 | Hitachi Chem Co Ltd | 封止用エポキシ樹脂成形材料及び電子部品装置 |
JP4421972B2 (ja) * | 2004-04-30 | 2010-02-24 | 日東電工株式会社 | 半導体装置の製法 |
JP2005325159A (ja) | 2004-05-12 | 2005-11-24 | Hitachi Chem Co Ltd | 封止用エポキシ樹脂成形材料及び電子部品装置 |
WO2006006592A1 (ja) * | 2004-07-13 | 2006-01-19 | Hitachi Chemical Co., Ltd. | 封止用エポキシ樹脂成形材料及び電子部品装置 |
JP2006036930A (ja) * | 2004-07-27 | 2006-02-09 | Nitto Denko Corp | 光半導体素子封止用樹脂 |
CN102617981B (zh) * | 2004-11-30 | 2016-12-14 | 住友电木株式会社 | 环氧树脂组合物及半导体器件 |
JP2006182913A (ja) | 2004-12-27 | 2006-07-13 | Hitachi Chem Co Ltd | 封止用エポキシ樹脂成形材料及び電子部品装置 |
MY144047A (en) * | 2005-01-20 | 2011-07-29 | Sumitomo Bakelite Co | Epoxy resin composition, process for providing latency to the composition and a semiconductor device |
DE102005010109A1 (de) * | 2005-03-02 | 2006-09-07 | Basf Ag | Modifizierte Polyolefinwachse |
CN101278234B (zh) * | 2005-09-05 | 2011-07-13 | 旭化成电子材料株式会社 | 正型感光性树脂组合物 |
JP2007119563A (ja) | 2005-10-27 | 2007-05-17 | Kaneka Corp | 含フッ素(メタ)アクリル酸エステル系重合体、及びその製造方法 |
JP4890872B2 (ja) * | 2006-01-30 | 2012-03-07 | ルネサスエレクトロニクス株式会社 | 光半導体封止用透明エポキシ樹脂組成物及びそれを用いた光半導体集積回路装置 |
JP4982558B2 (ja) * | 2006-04-20 | 2012-07-25 | イー・アイ・デュポン・ドウ・ヌムール・アンド・カンパニー | 無水マレイン酸系ポリマーと併用する熱転写用ドナー要素 |
TW200940571A (en) * | 2008-02-07 | 2009-10-01 | Constr Res & Tech Gmbh | Vinyl ester/maleic acid derivative copolymers |
KR20110049921A (ko) * | 2008-09-11 | 2011-05-12 | 스미토모 베이클리트 컴퍼니 리미티드 | 반도체 장치 및 반도체 장치에 이용되는 수지 조성물 |
-
2011
- 2011-05-25 SG SG2012082749A patent/SG185503A1/en unknown
- 2011-05-25 KR KR1020127033965A patent/KR101835902B1/ko active IP Right Grant
- 2011-05-25 WO PCT/JP2011/002906 patent/WO2011148628A1/ja active Application Filing
- 2011-05-25 CN CN201180026238.6A patent/CN102918106B/zh not_active Expired - Fee Related
- 2011-05-25 CN CN201180025950.4A patent/CN103080144B/zh active Active
- 2011-05-25 US US13/698,462 patent/US8648479B2/en not_active Expired - Fee Related
- 2011-05-25 JP JP2012517140A patent/JP5874633B2/ja active Active
- 2011-05-25 KR KR1020127033026A patent/KR101756499B1/ko active IP Right Grant
- 2011-05-25 CN CN201410406413.XA patent/CN104250313A/zh active Pending
- 2011-05-25 JP JP2012517139A patent/JP5782434B2/ja active Active
- 2011-05-25 WO PCT/JP2011/002905 patent/WO2011148627A1/ja active Application Filing
- 2011-05-25 SG SG2012082772A patent/SG185505A1/en unknown
- 2011-05-25 US US13/698,363 patent/US9070628B2/en not_active Expired - Fee Related
- 2011-05-27 TW TW100118605A patent/TWI520972B/zh active
- 2011-05-27 TW TW100118603A patent/TWI499629B/zh not_active IP Right Cessation
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW396175B (en) * | 1996-12-16 | 2000-07-01 | Shell Int Research | Electronic package and process for preparing same |
TW200508316A (en) * | 2003-08-04 | 2005-03-01 | Hitachi Chemical Co Ltd | Epoxy resin composition for sealing and electronic part device |
Also Published As
Publication number | Publication date |
---|---|
CN102918106A (zh) | 2013-02-06 |
KR20130124175A (ko) | 2013-11-13 |
TW201211076A (en) | 2012-03-16 |
CN104250313A (zh) | 2014-12-31 |
US20130059983A1 (en) | 2013-03-07 |
JP5782434B2 (ja) | 2015-09-24 |
CN103080144A (zh) | 2013-05-01 |
CN103080144B (zh) | 2015-02-25 |
WO2011148627A1 (ja) | 2011-12-01 |
WO2011148628A1 (ja) | 2011-12-01 |
KR101835902B1 (ko) | 2018-03-07 |
JPWO2011148628A1 (ja) | 2013-07-25 |
CN102918106B (zh) | 2015-09-16 |
TWI520972B (zh) | 2016-02-11 |
US9070628B2 (en) | 2015-06-30 |
KR20130113335A (ko) | 2013-10-15 |
SG185503A1 (en) | 2012-12-28 |
JPWO2011148627A1 (ja) | 2013-07-25 |
US8648479B2 (en) | 2014-02-11 |
SG185505A1 (en) | 2012-12-28 |
US20130062748A1 (en) | 2013-03-14 |
KR101756499B1 (ko) | 2017-07-10 |
TW201211138A (en) | 2012-03-16 |
JP5874633B2 (ja) | 2016-03-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TWI499629B (zh) | 半導體密封用環氧樹脂組成物及使用其之半導體裝置 | |
TWI500688B (zh) | 半導體密封用環氧樹脂組成物,半導體裝置及離型劑 | |
JP4010176B2 (ja) | 封止用エポキシ樹脂成形材料及び電子部品装置 | |
TWI488912B (zh) | 半導體密封用環氧樹脂組成物及使用其之半導體裝置 | |
JP2004175842A (ja) | 封止用エポキシ樹脂成形材料及び電子部品装置 | |
JP6277611B2 (ja) | 素子封止用エポキシ樹脂成形材料及び電子部品装置 | |
JP2006028264A (ja) | 封止用エポキシ樹脂成形材料及び電子部品装置 | |
JP2006193618A (ja) | 封止用エポキシ樹脂組成物及び電子部品装置 | |
JP2006160855A (ja) | 封止用エポキシ樹脂組成物及び電子部品装置 | |
JP2005325159A (ja) | 封止用エポキシ樹脂成形材料及び電子部品装置 | |
JP2010018668A (ja) | エポキシ樹脂組成物及びこれを用いた電子部品装置 | |
JP2006104416A (ja) | 封止用エポキシ樹脂成形材料及び電子部品装置 | |
JP2005350500A (ja) | 封止用エポキシ樹脂成形材料及び電子部品装置 | |
JP2006291038A (ja) | 封止用エポキシ樹脂成形材料及び電子部品装置 | |
JP2006182913A (ja) | 封止用エポキシ樹脂成形材料及び電子部品装置 | |
JP5970975B2 (ja) | 封止用エポキシ樹脂成形材料及び電子部品装置 | |
JP2006104415A (ja) | 封止用エポキシ樹脂成形材料及び電子部品装置 | |
JP2005255790A (ja) | 封止用エポキシ樹脂成形材料及び電子部品装置 | |
JP2006104334A (ja) | 封止用エポキシ樹脂成形材料及び電子部品装置 | |
JP2005298647A (ja) | 封止用エポキシ樹脂成形材料及び電子部品装置 | |
JP2006016525A (ja) | 封止用エポキシ樹脂成形材料及び電子部品装置 | |
JP2005272811A (ja) | 封止用エポキシ樹脂成形材料及び電子部品装置 | |
JP2005255978A (ja) | 封止用エポキシ樹脂成形材料及び電子部品装置 | |
JP2005232268A (ja) | 封止用エポキシ樹脂成形材料及び電子部品装置 | |
JP2005298645A (ja) | 封止用エポキシ樹脂成形材料及び電子部品装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |