TWI497089B - Semiconductor device inspection apparatus - Google Patents

Description

Component detecting device

The present invention relates to a component detecting device, and more particularly to a component detecting device that detects electrical characteristics of an element.

After completing the packaging process, the semiconductor element (hereinafter referred to as "element") performs various kinds of detections such as electrical characteristics, reliability against heat or pressure, and the like by the semiconductor element detecting device.

For the detection of components, the detection is performed at room temperature according to the memory component and the non-memory components such as CPU (Central Processing Unit) and GPU (Graphic Processing Unit); LED components: photoelectric components. Various tests such as heating detection in a high temperature environment.

On the other hand, the types of IT components such as smart phones, smart tablets, and smart TVs are becoming more diverse and popular, such as non-memory components such as CPUs, that is, LSI (Large Scale Integration). Is increasing dramatically.

However, LSI has a problem that it is difficult to use an expensive detecting device because the number of detections is small because of its small amount and variety of characteristics compared to a standardized detecting device for a memory element.

The present invention has been made to solve the above-described problems of the prior art, and an object of the invention is to provide a component detecting device capable of quickly detecting a small number of LSI devices and detecting a plurality of types of LSI devices.

Further, another object of the present invention is to provide a component detecting device which can accurately perform horizontal and vertical movement of a component pressing tool for selecting an element to pressurize a test socket.

Further, still another object of the present invention is to provide a component detecting device which is easy to perform maintenance of components, thereby reducing maintenance costs to significantly reduce the production cost of components.

Further, it is still another object of the present invention to provide a component detecting device which can accurately set and confirm a pressurizing position of a component pressurizing tool for picking up an element to pressurize the test socket.

In order to achieve the above object, a component detecting apparatus according to an embodiment of the present invention may include: a loading unit that loads one or more trays that load a plurality of components; and a loading buffer that is received by the loading and transferring tool from the The component conveyed by the tray of the loading unit is temporarily loaded; the testing unit receives the component transmitted from the loading buffer to perform the test; the unloading buffer is centered on the testing section, and is loaded with the loading a position at which the buffer portion opposes to receive an element that is tested by the test portion; and an unloading portion that sorts and loads the components loaded in the unloading buffer portion by an unloading transfer tool according to a test result of the test portion; The above component press tool is used to transfer an element between the loading portion, the test portion, and the unloading portion.

Furthermore, the component detecting apparatus according to an embodiment of the present invention may include: a loading section that loads one or more trays that load a plurality of components; and a testing section that includes a plurality of test sockets for receiving from the loading section The component is tested for each component; the unloading section performs the sorting loading of the component that completes the test according to the test result of the testing section; one or more transfer tools, the loading section, the testing section, and the Transferring components between the unloading portions, the transfer tool includes a plurality of pickers, respectively, respectively, an adsorption plate is coupled at the end, and at least one of the transfer tools includes a suction plate replacement portion, and automatic replacement is respectively combined in the selection The adsorption plate on the device.

Furthermore, the component detecting apparatus according to an embodiment of the present invention may include: a loading section that loads one or more trays that load a plurality of components; and a testing section that includes a plurality of test sockets for receiving from the loading section The component is tested for each component; the unloading section performs the sorting loading of the component that completes the test according to the test result of the testing section; one or more transfer tools, the loading section, the testing section, and the The transfer member between the unloading portions may further include a cleaning portion disposed on one side of the test portion for removing foreign matter in the test socket by moving air in a state of covering the test socket.

Furthermore, the component detecting device according to the present invention may include: a loading portion that loads a plurality of components; and a testing portion that is configured to perform a test on components transferred from the loading portion a plurality of test sockets; an unloading unit that classifies components that have been tested in the test portion according to test results; and one or more pick-up portions that transfer components transmitted from the loading portion to the test portion side, Transferring the component transmitted from the testing unit to the unloading portion side, the pick-up portion may include: a pick-up plate for carrying the component; a board fixing portion, the pick-up plate being detachably coupled Here, a board loading and unloading portion is provided at the board fixing portion to fix the shuttle board to the board fixing portion.

Furthermore, the component detecting apparatus according to an embodiment of the present invention may include: loading Loading one or more trays loaded with a plurality of components; the test portion includes a plurality of test sockets for receiving components transmitted from the loading portion to test the respective components; and an unloading portion according to the testing portion As a result of the test, the components of the test are sorted and loaded; one or more transfer tools transfer the components between the loading portion, the test portion and the unloading portion, and the transfer tool includes a pair of components a tool for communicating an element from the loading portion to the test portion or communicating an element from the test portion to the unloading portion, the component pressing tool may include: a support portion movably disposed; The above selection module is detachably coupled to the support portion and combined with more than one selector.

A component detecting apparatus according to an embodiment of the present invention may include: a loading section, a plurality of components; a test portion having a plurality of test sockets for performing tests on components transferred from the loading portion; and an unloading portion for classifying loading of components for testing according to test results of the testing portion a component pressurizing portion that is selected to pressurize the test socket, the component pressurizing portion may include: one or more component pressurizing tools, the component is selected and moved to a linear movement to the component Pressurizing a position to pressurize the test socket; a horizontal moving device coupled to the component press tool to move the component press tool to the test socket; the first vertical moving device, according to the cam member, The component press tool is moved vertically to the pressurized position.

Furthermore, the component detecting apparatus according to an embodiment of the present invention may include: loading Loading a plurality of components; a test portion having a plurality of test sockets for performing tests on components transferred from the loading portion; and an unloading portion for performing components to be tested according to test results of the test portion Performing sorting loading; one or more pick-up units transferring the elements transmitted from the loading unit to the test unit side, and transferring the elements transmitted from the test unit to the unloading unit side; one or more loads Into the transfer tool, selecting components in the loading portion to communicate to the pick-up portion; one or more unloading transfer tools, selecting components in the pick-up portion to communicate to the An unloading portion; one or more component pressing tools, wherein an element is selected in the pick-up portion to pressurize the test socket, and an element that is tested by pressurizing the test socket is transmitted to the pick-up portion, The component pressurizing tool includes: a support portion movably disposed; one or more selection modules detachably coupled to the support portion, combined with more than one picker, the support portion and the One side of the selection module may be provided with a fastening unit for fastening the support portion and the selection module, and the support portion and the other side of the selection module may be provided on the support portion. Supporting the support unit of the selection module.

Furthermore, the component detecting apparatus according to an embodiment of the present invention may include: loading Loading a plurality of components; a test portion having a plurality of test sockets for performing tests on components transferred from the loading portion; and an unloading portion for performing components to be tested according to test results of the test portion Performing sorting loading; one or more component pressing tools having a picker for selecting the components, and selecting the components to pressurize the test socket, the component pressing tool may be provided with a heating portion according to the picker The selected elements are heated.

Furthermore, the component detecting apparatus according to an embodiment of the present invention may include: loading Loading a plurality of components; a test portion having a plurality of test sockets for performing tests on components transferred from the loading portion; and an unloading portion for performing components to be tested according to test results of the test portion Performing sorting loading; the component pressing portion includes one or more component pressing tools and a first vertical moving device, the component pressing tool picking the components and moving the components to a pressing position by linear movement to Pressurizing the test socket, the first vertical moving device linearly moves the component pressing tool to a pressing position by a cam member; and the second vertical moving device causes the component pressing portion to linearize the testing portion Moving the control unit to detect a load applied to the test portion by the second vertical moving device by the second vertical moving device to bring the component pressing tool into contact with the test portion, and to detect The position of the component pressing tool when the load reached reaches the set reference load is determined as the pressing position.

The component detecting device according to the embodiment of the present invention has an advantage that the detection of a small number of LSI components can be performed quickly, and various types of LSI components can be detected.

Further, the component detecting device according to the embodiment of the present invention, for moving in the vertical direction, the first vertical moving means for picking up the component to press the component pressurizing the test socket includes a cam member through rotation of the cam member The component pressing tool is moved in the vertical direction, thereby having an advantage that the moving position of the component pressing tool in the vertical direction can be accurately set.

Further, the component detecting device according to the embodiment of the present invention is easy to perform maintenance of the device, thereby having an advantage of significantly reducing the production cost of the component by reducing the maintenance cost of the device.

Further, according to the component detecting apparatus of the embodiment of the present invention, the component is selected to pressurize the component to press the test socket, and the support portion which is movably provided is detachably coupled to the support portion and combined with More than one selection module of the above selectors has the advantage that the component pressing tool is easy to maintain.

Further, the component detecting device according to the embodiment of the present invention supports the component pressing tool by providing a heater and one or more first connectors for supplying power and signal to the temperature sensor. When the unit and the selection module are combined, they are automatically connected to the second connector provided in the support portion, thereby having an advantage that an additional connection process for power supply and signal transmission is not required, so that maintenance of the manufacturing machine of the device is facilitated.

Further, the component detecting device according to the embodiment of the present invention, the component replacement for the test portion and the loading buffer portion, or the transfer plate for the component replacement between the test portion and the unloading portion is configured to pass The simple action of the plate attaching and detaching portion is detachable at the plate fixing portion, so that it has an advantage that the transfer plate for arranging the component can be easily replaced when the type of the component as the detecting article, particularly the size of the component, changes.

Further, according to the component detecting apparatus of the embodiment of the present invention, the heating element is heated by the selecting element on the picker of the component pressing tool pressed to the test socket to heat the selected component, not only the component can be rapidly heated, Moreover, the temperature drop of the element can be minimized, thereby having the advantage that component detection can be performed accurately.

Further, the component detecting device according to the embodiment of the present invention performs manual work as compared with the operation of stopping the device for replacing the adsorption plate, and the prior art of restarting the device after replacement, since the additional device can be automatically replaced from the picker The adsorption plate replacement portion of the adsorption plate has the advantage that the productivity of the equipment can be greatly improved.

Further, the component detecting device according to the embodiment of the present invention is provided on one side of the test portion by additionally including a cleaning portion for ejecting air in a state of covering the test socket by movement to remove foreign matter in the test socket. Therefore, the presence of foreign matter in the test socket is prevented from causing a test error or the test work cannot be performed, thereby having the advantage of greatly improving the performance of the device.

1‧‧‧ components

100‧‧‧Loading Department

2‧‧‧Tray

2a‧‧‧storage trough

200‧‧‧Load buffer

210, 410‧‧‧ board parts

211, 411‧‧‧ loading slots

300‧‧‧Test Department

310‧‧‧ test socket

311‧‧‧ terminals

312‧‧‧Support framework

400‧‧‧Unloading buffer

500‧‧‧Unloading Department

610, 620‧‧‧ pick-up department

611, 621‧‧ ‧ rail

612, 622‧‧‧ pick-up board

613, 623‧‧ ‧ plate fixing department

614, 624‧‧‧ board loading and unloading department

614a, 624a‧‧‧Support

614b, 624b‧‧‧ fixed body

614c, 624c‧‧‧ first hinge shaft

614d, 624d‧‧‧ Elastomers

614i, 624i‧‧‧ Pressurized body

614e, 624e‧‧‧ mobile body

614g, 624g‧‧‧ handle

614f, 624f‧‧‧ second hinge shaft

614h, 624h‧‧‧ fixed hook

700‧‧‧Clean Department

710‧‧‧ Ontology

720‧‧‧ Drive Department

711‧‧‧Air flow path

712‧‧‧ nozzle

713‧‧‧Draining tube

801‧‧‧ horizontal mobile device

802‧‧‧Vertical mobile device

803‧‧‧ horizontal drive department

803a‧‧‧带

803b‧‧‧ Pulley

804‧‧‧ fixtures

805‧‧‧Second vertical mobile device

807‧‧‧Control Department

810, 814‧‧‧Loading transfer tool

820, 824‧‧‧ Unloading Transfer Tool

830, 840‧‧‧ component press tools

830a, 840a‧‧‧ support shaft

830b, 840b‧‧‧ connecting parts

830c, 840c‧‧‧through holes

830d, 840d‧‧‧ moving blocks

830e, 840e‧‧‧Cam follower

830g, 840g‧‧‧ cam parts

830f, 840f‧‧‧ cam slot

830h, 840h‧‧‧ lifting rail

830i, 840i‧‧‧ guide rail

830j, 840j‧‧‧ drive motor

831, 841‧‧‧ picker

833, 843‧‧‧ Support Department

833a, 843a‧‧‧ first support board

833b, 843b, 835b, 845b‧‧‧ pneumatic access

833c, 843c, 835c, 845c‧‧‧ vacuum connection path

834, 844‧‧‧Selection module

835, 845‧‧‧ second support board

836, 846‧‧‧ support modules

838, 848‧‧‧ heating module

838a, 848a‧‧‧ heater

838b, 848b‧‧‧temperature sensor

839, 849‧‧ ‧ damper

839a, 849a‧‧‧elastic film

839b, 849b‧‧‧ Pressurized parts

Room 839d, 849d‧‧

839c, 849c‧‧‧ pneumatic path

850‧‧‧ fastening unit

851‧‧‧ Ring

852‧‧‧ Ring moving parts

853‧‧‧ring hook parts

860‧‧‧ first support unit

861‧‧‧ protruding film

862‧‧‧Protruding piece fixing part

863‧‧‧First Supporting Parts

864‧‧‧Second support unit

865‧‧‧Flexible parts

866‧‧‧Fixed parts

870‧‧‧second support unit

871‧‧‧ protruding strip

872‧‧‧ Head Steering Department

873‧‧‧hanging board

874‧‧‧ head insertion hole

875‧‧‧ head

880‧‧‧Location Determination Unit

881‧‧‧ protruding stick

882‧‧‧ protruding rod insertion slot

889‧‧‧Induction sensor

891‧‧‧Combined parts

892‧‧‧Adsorption plate

892a‧‧‧protrusion

893‧‧‧Guide parts

899‧‧‧Inhalation flow path

894‧‧‧jet

895‧‧‧heating gas flow path

896‧‧‧heating gas feeder

900‧‧‧Adsorption plate replacement unit

910‧‧‧Adsorption plate accommodating department

920‧‧‧Adsorption board selection department

91‧‧‧First connector

911‧‧‧ accommodating space

912‧‧‧The body of the housing department

92‧‧‧Second connector

921‧‧‧moving parts

922‧‧‧through section

923‧‧‧ hook part

1 is a plan view schematically showing a component detecting device according to the present invention; and FIG. 2 is a plan view schematically showing an example of a plate member in which a buffer portion and an unloading buffer portion are loaded in the component inspection device of FIG. 1; 3 is a cross-sectional view schematically showing the first pick-up unit and the second pick-up unit in the component inspection device of FIG. 1; FIG. 4 is a view schematically showing the first pick-up unit and the second pick-up unit in FIG. FIG. 5 is a schematic view for explaining the operation of the plate attaching and detaching portion, and FIG. 7 is a schematic view showing the cleaning portion of the component detecting device of FIG. Fig. 8 is a plan view schematically showing a cleaning portion of the component detecting device of Fig. 1; and Fig. 9 is a cross-sectional view schematically showing a component pressing tool provided in the component detecting device of Fig. 1; Fig. 11 is an exploded perspective view showing the selector of the component pressurizing tool of Fig. 9; Fig. 11 is a perspective view showing the support portion of the component pressurizing tool of Fig. 9; and Fig. 12 is a view showing the selection mode of the component pressurizing tool of Fig. 9. Stereogram of group; first 3 is a cross-sectional view for explaining an operation of joining a selection module to a support portion in the component press tool of FIG. 1, and FIG. 14 is a cross-sectional view showing another example of the component pressurizing tool provided in the element detecting device of the first embodiment. Fig. 15 is a partial cross-sectional view showing the expansion of the component pressurizing tool of Fig. 14; Fig. 16 and Fig. 17 are diagrams showing the component pressing tool for moving the component detecting device of Fig. 1 in the horizontal direction and the vertical direction. FIG. 18 is a cross-sectional view schematically showing a horizontal moving device for moving a component pressurizing tool provided in the element detecting device of FIG. 1 in a horizontal direction; FIG. 18 is a schematic view showing a horizontal moving device and a first vertical moving device; 19 is a longitudinal cross-sectional view schematically showing a first vertical moving device for moving a component pressing tool provided in the element detecting device of the first drawing in the vertical direction; and FIG. 20 is a view showing the component detecting device of the first drawing, FIG. 21 is a schematic cross-sectional view showing a structure for setting a pressurizing position of the component pressurizing tool; FIG. 21 is a partial cross-sectional view showing the structure of the enlarged drawing 20; Figure 22 is a perspective view showing an adsorption plate replacement portion of the adsorption plate for automatically replacing the selector, the adsorption plate of the selector being disposed in the loading transfer tool, the unloading transfer tool or the component provided in the component detecting device of Figure 1. On the pressurizing tool; FIG. 23 to FIG. 25 are partial cross-sectional views showing the suction plate replacing portion of the process of automatically replacing the suction plate of the picker, the adsorbing plate of the picker being disposed in the component detecting device of FIG. Loading a transfer tool, an unloading transfer tool, or a component pressurizing tool; and Figs. 26 and 27 are partial plan views showing a suction plate replacing portion of a process of automatically replacing the adsorbing plate of the picker, the adsorbing plate of the picker It is provided in the loading transfer tool, the unloading transfer tool, or the component pressing tool provided in the component detecting device of Fig. 1.

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a component detecting device according to an embodiment of the present invention will be described with reference to the accompanying drawings.

As shown in FIG. 1, a component detecting apparatus according to an embodiment of the present invention may include: a loading unit 100 that loads a plurality of components 1; a testing section 300 that tests components 1 transmitted from the loading section 100; The unit 500 classifies and loads the component 1 based on the test result of the test unit 300.

The object element 1 to be tested may be a memory semiconductor or a non-memory element such as a CPU (Central Processing Unit), a GPU (Graphic Processing Unit), or a system LIS (Large Scale Integration). The element 1 may be a non-memory element, in particular, an element in which a spherical contact terminal is formed on the bottom surface.

The method of transferring the component 1 between the loading unit 100, the testing unit 300, and the unloading unit 500 can be performed by various methods.

The loading unit 100 and the unloading unit 500 have a configuration in which one or more trays 2 on which the plurality of elements 1 are loaded are loaded, and may have various configurations depending on the design. A tray loading unit (not shown) may be provided in the loading unit 100 and the unloading unit 500 to load a plurality of trays 2.

For example, a plurality of trays 2 are appropriately placed on the loading unit 100 to continuously select the components 1 for transfer. Furthermore, the tray 2 of the unloaded component 1 can be alternated with the tray 2 of the loading element 1. For example, a certain batch of trays 2 can be automatically or manually loaded into the tray loading section.

In the loading unit 100, the empty tray 2 after the element 1 is taken out can be passed through the tray The portion (not shown) is transferred to the unloading unit 500. Further, before the empty tray 2 is transferred to the unloading unit 500, the tray 2 can be rotated (reversed) in the tray inverting portion (not shown) to remove the element 1 that has not been taken out from the tray 2.

On the other hand, the structure of the unloading portion 500 can be similar to that of the loading portion 100. For example, in the unloading section 500, a plurality of empty trays 2 can be appropriately placed according to the classification level, so that the component 1 is continuously sorted and loaded according to the test result. In the unloading unit 500, the tray 2 on which the tested component 1 is loaded can be alternated with the empty tray 2.

Further, a tray buffer portion (not shown) for temporarily loading the empty tray 2 may be additionally provided between the loading unit 100 and the unloading unit 500 to temporarily load the empty tray 2.

A plurality of accommodation grooves 2a are formed in the tray 2 to load the plurality of elements 1. For example, the plurality of accommodation grooves 2a may be formed in the tray 2 in an array of 8 × 16.

As shown in FIGS. 1 and 2, a load buffer unit 200 for temporarily loading the component 1 conveyed from the tray 2 of the loading unit 100 may be provided between the loading unit 100 and the test unit 300 to increase the component 1 The transfer speed or the plurality of elements 1 is sufficiently heated. Further, an unloading buffer portion 400 for temporarily loading the component 1 that has been tested by the testing portion 300 may be provided between the test portion 300 and the unloading portion 500 to increase the transfer speed of the component 1. Thereby, the component 1 as the test object can be transferred from the loading unit 100 to the loading buffer unit 200 for temporary loading and then transferred to the testing unit 300, and the tested component 1 can be transferred from the testing unit 300 to the unloading buffer unit 400. The temporary loading is performed and then transferred to the unloading unit 500.

In particular, the loading buffer 200 and the unloading buffer 500 can carry a relatively large number of components 1 compared to the tray 2 loaded with a relatively small number of components 1.

As shown in FIG. 2, the loading unit 200 and the unloading unit 400 may include plate-shaped plate members 210 and 410 on which a plurality of loading grooves 211 and 411 are formed to load a plurality of elements 1.

The plate members 210 and 410 of the loading buffer unit 200 and the unloading buffer unit 400 have almost the same structure. However, when the test element 1 needs to be heated (preheated), a heating means such as a heater is attached to the plate member 210 of the loading buffer portion 200.

The loading grooves 211 and 411 of the plate members 210 and 410 of the loading buffer unit 200 and the unloading buffer unit 400 may be arranged in accordance with the interval of the test sockets 310 of the test unit 300 or may be arranged corresponding to the interval between the storage slots 2a of the tray 2. arrangement.

For example, the interval between the accommodation grooves 2a of the tray 2 is the same as the interval between the loading grooves 211, 411 of the plate members 210, 410 of the loading buffer portion 200 and the unloading buffer portion 400, and the test portion 300 The detection of the test socket 310 is formed by n times, for example, twice the interval of the housing groove 2a of the tray 2.

The plate members 210 and 410 are configured to temporarily load the components 1 to alternate elements with the test portion 300, and may be provided in a fixed state or movably provided inside the component detecting device.

As shown in FIG. 1, the test unit 300 is for testing the component 1 transmitted from the load buffer unit 200, and may have various configurations depending on the type of test. The test unit 300 is provided with a plurality of test sockets 310 that are pressurized by the element 1. For example, the plurality of test sockets 310 are provided with terminals that are connected to a power source, and the power-on test of the components 1 is performed by the process of pressing the components 1 to the terminals.

The test socket 310 can be placed in various rows and columns such as 8×2, 8×4, and the like. The test socket 310 serves as a test structure for the component 1 between the connection member 1 and the terminal, and can have various structures. Such a test socket 310 can be replaced according to the type of component, the type of test, and the like.

On the other hand, the test portion 300 can be a separate structure that is modularized with the test socket 310 and the remaining structure. As a simple structure, it can be realized by a PCB board on which the test socket 310 is disposed. In particular, when the test portion 300 is implemented by a PCB board on which the test socket 310 is disposed, the test socket 310 can be characterized in accordance with each test, so that the structural cost of the relatively expensive test portion 300 can be significantly reduced.

On the other hand, various tests can be performed at the test section 300. More preferably, the test unit 300 is configured to be capable of testing the element 1 at a temperature of room temperature or higher.

The test portion 300 may be provided with chamber components around its periphery to perform a temperature-related test such as a high temperature test to wrap a portion of the area including the test socket 310 to minimize temperature variations.

On the other hand, the component exchange between the test unit 300 and the load buffer unit 200 or between the test unit 300 and the unload buffer unit 400 is performed directly by the pick-up unit 610, 620, and will be loaded from the load buffer unit. The element 1 transmitted by 200 is transferred to the side of the test unit 300, and the element 1 transmitted from the test unit 300 is moved to the side of the unloading buffer unit 400. The shuttle units 610 and 620 are configured to perform component exchange between the test unit 300 and the load buffer unit 200 or exchange elements between the test unit 300 and the unload buffer unit 400, and may have various configurations.

For example, as shown in FIGS. 1 and 3, the pick-up unit 610, 620 may include a first pick-up unit 610 for receiving the first component communication position of the component 1 conveyed by the loading unit 100, for testing and testing. The part 300 performs the component exchange position of the component 1 exchange, and is used for the unloading section The second component transfer position of the 500 communication component 1 is moved; the second shuttle component 620 is used to receive the first component communication position of the component 1 conveyed by the loading section 100, and is used for component 1 exchange with the test section 300. The component exchange position and the second component communication position for conveying the component 1 to the unloading unit 500 are moved. Here, the first component transfer position, the component exchange position, and the second component transfer position can be variously arranged according to the structure of the device, and can be sequentially arranged in a straight line.

The first pick-up unit 610 and the second pick-up unit 620 are tested in the test unit 300. Between the sockets 310, they are disposed on both sides of the test socket 310. The first pick-up unit 610 and the second pick-up unit 620 may include: guide rails 611 and 621 disposed opposite to the test unit 300; and one or more transfer boards 612 and 622 of the loading unit 1 are disposed along the guide rails 611 and 621. Moving horizontally to alternately move the first component communication position for receiving the component 1 conveyed by the loading buffer 200, the component exchange position with the test portion 300, and the second for transmitting the component 1 to the unloading buffer 400 Between the component transfer positions, the plate fixing portions 613, 623 detachably couple the shuttle plates 612, 622 and are arranged to be movable along the guide rails 611, 621.

The guide rails 611, 621, as a structure for guiding the movement of the transfer plates 612, 622, may have various configurations.

The transfer plates 612, 622 are formed with more than one component placement groove for the placement member 1, for performing component exchange between the test portion 300 and the load buffer portion 200, or for component exchange between the test portion 300 and the unloading buffer portion 400. .

The plate fixing portions 613 and 623 are provided in order to facilitate the exchange of the transfer plates 612 and 622, and may have various configurations and may be provided with a heater or the like for the heating element 1. The shuttle plates 612 and 622 are detachably provided to the plate fixing portions 613 and 623. Therefore, when the types of the components 1 to be detected, in particular, the sizes of the components 1 are different, the transfer plates 612 and 622 of the components 1 can be alternately placed.

The plate fixing portions 613 and 623 are provided with plate attaching and detaching portions 614 and 624, and the transfer plates 612 and 622 are detachably fixed to the plate fixing portions 613 and 623. The plate attaching and detaching portions 614 and 624 are configured to attach and detach the transfer plates 612 and 622 to the plate fixing portions 613 and 623, and may have various configurations, and may be configured to attach and detach the transfer plates 612 and 622 by a simple manual operation.

For example, as shown in FIGS. 4 to 6 , the plate attaching and detaching portions 614 and 624 may include support bodies 614 a and 624 a fixed to the plate fixing portions 613 and 623 , and fixing bodies 614 b and 624 b configured to be disposed on the support body 614 a. The first hinge shafts 614c, 624c of 624a are rotatably connected, and The shuttle plates 612, 622 are selectively fixed according to the rotation; the elastic bodies 614d, 624d elastically support the fixing bodies 614b, 624b to the first hinge shafts 614c, 624c; the pressing bodies 614i, 624i are in contact with the fixed bodies 614b, 624b, and The pressing faces of the fixed bodies 614b and 624b are formed into a curved surface to pressurize the fixed bodies 614b and 624b; the moving bodies 614e and 624e are connected to the pressurizing bodies 614i and 624i, and are disposed along the inside of the supporting bodies 614a and 624a. The upper and lower directions (Z-axis direction) are moved; the handles 614g and 624g are rotatably connected to the second hinge shafts 614f and 624f provided on the movable bodies 614e and 624e, and the fixed hooks 614h and 624h are provided on the support bodies 614a and 624a. Hanged at the ends of the handles 614g, 624g and fixed.

The fixed bodies 614b, 624b are formed in a shape that is roughly curved in the letter "L" In the shape, the curved portions are in contact with the corners of the transfer plates 612, 622 to fix the transfer plates 612, 622 to the plate fixing portions 613, 623.

The elastic bodies 614d, 624d can be exemplified by the use of a torsion spring.

The hooks 614h and 624h are preferably formed so as to be hooked to the ends of the handles 614g and 624g in accordance with the handles 614g and 624g rotated by the operator, and to be fixed or released from the ends of the handles 614g and 624g.

According to this configuration, the moving bodies 614e and 624e that move in the vertical direction in accordance with the change in the positions of the handles 614g and 624g move the pressing bodies 614i and 624i in the vertical direction, whereby the postures of the fixed bodies 614b and 624b follow The curved surfaces of the pressurizing surfaces of the pressurizing bodies 614i and 624i that the fixed bodies 614b and 624b are in contact with each other change. When the postures of the fixed bodies 614b and 624b are changed, the postures of the fixed bodies 614b and 624b can be kept constant due to the elastic forces of the elastic bodies 614d and 624d.

Further, the movement of the moving bodies 614e and 624e in the vertical direction can be performed in accordance with the handles 614g and 624g that are rotated about the second hinge shafts 614f and 624f. On the other hand, when the handles 614g, 624g are hung on the fixing hooks 614h, 624h, the rotation of the handles 614g, 624g is limited, whereby the movement of the moving bodies 614e, 624e and the pressing bodies 614i, 624i in the up and down direction is subject to Therefore, it is possible to prevent an arbitrary change in the posture of the fixed bodies 614b and 624b.

As shown in FIG. 5, in a state in which the transfer plates 612 and 622 are fixed according to the fixed bodies 614b and 624b, the handles 614g and 624g are separated from the fixed hooks 614h and 624h by the second hinge shafts 614f and 624f. When the clockwise direction in the figure is rotated, the elastic forces of the elastic bodies 614d and 624d act on the pressurizing bodies 614i and 624i and the moving bodies 614e and 624e, so that the pressurizing bodies 614i and 624i and the moving bodies 614e and 624e are directed toward each other. The lower side is moved, and the position of the pressing surface of the pressurizing bodies 614i and 624i that are in contact with the fixed bodies 614b and 624b is changed, whereby the fixed body 614b, 624b rotates in a direction away from the shuttle plates 612, 622 (clockwise in FIG. 5) around the first hinge shafts 614c, 624c according to the elastic force of the elastic bodies 614d, 624d, so as shown in Fig. 6. It is shown that the fixing of the transfer boards 612, 622 is released.

On the other hand, as shown in Fig. 6, in a state where the fixing of the transfer plates 612 and 622 is released, the handles 614g and 624g are hung in the direction of the fixed hooks 614h and 624h around the second hinge axes 614f and 624f (the first) 6 (counterclockwise in the figure) is rotated to fix the fixing hooks 614h, 624h, and the pressing bodies 614i, 624i and the moving bodies 614e, 624e are moved in the upward direction to contact the pressing bodies of the fixing bodies 614b, 624b. The positions of the pressing faces of the 614i, 624i are changed so that the fixed bodies 614b, 624b are rotated in the direction of contacting the shuttle plates 612, 622 (counterclockwise in Fig. 6) centering on the first hinge axes 614c, 624c. Thus, as shown in Fig. 5, the shuttle plates 612, 622 can be fixed according to the fixed bodies 614b, 624b. Further, in a state in which the transfer plates 612 and 622 are fixed in accordance with the fixed bodies 614b and 624b, the elastic forces of the elastic bodies 614d and 624d act on the fixed bodies 614b and 624b, whereby the arbitrary rotation of the fixed bodies 614b and 624b can be prevented.

As described above, according to the embodiment of the present invention, the board attaching and detaching portions 614 and 624 that detachably fix the pick-up boards 612 and 622 to the board fixing portions 613 and 623 are configured to perform the pick-up by simply rotating the handles 614g and 624g. The fixing and unfixing of the plates 612 and 622 can thereby achieve the effect of fixing and releasing the fixing of the 612 and 622 very easily and easily.

On the other hand, in the test unit 300, there is a possibility that a test cannot be performed due to a foreign matter flowing into the test socket 310. In this case, there is a case where it is necessary to stop the component detecting device and remove the foreign matter by manual work. A complicated process of starting the component detecting device.

Therefore, it is preferable to include the cleaning unit 700 provided on one side of the test unit 300 for ejecting air in a state of covering the test socket 310 by movement to remove foreign matter or the like in the test socket 310.

The cleaning portion 700 can have a variety of structures. For example, as shown in FIG. 7 and FIG. 8, the cleaning portion 700 may include a body 710 covering the test socket 310 and forming a cleaning space at an upper portion of the test socket 310, and a driving portion 720 for the body 710 in the testing portion. The side of the 300 and the upper portion of the test socket 310 are moved.

The body 710 is configured to cover the test socket 310 and form a cleaning space on the upper portion of the test socket 310. The structure may be a plurality of structures, and may have various shapes such as a bowl shape. a closed cleaning space, and an air flow path 711 may be provided, connected to an air supply device (not shown) to inject air to each test socket 310, and one or more nozzles 712 to receive the air conveyed from the air flow path 711. Air is injected to the test socket 310.

At the same time, the body 710 may be coupled to the discharge pipe 713 such that the air sprayed through the nozzle 712 is discharged together with the foreign matter from the cleaning space to the outside.

The drive unit 720 has a configuration for moving the body 710 between one side of the test unit 300 and the test socket 310, and may be of various configurations such as a hydraulic cylinder or a pneumatic cylinder.

Here, when the guide rails 611 and 621 are provided on the first pick-up unit 610 and the second pick-up unit 620, the cleaning unit 700 may be disposed in the first pick-up unit 610 and the second pick-up unit 620, and the drive unit 720 is configured to cause the body 710 to follow The guide rails 611 and 621 are linearly moved in a direction parallel to each other.

On the other hand, one or more load transfer tools 810 and 814 may be provided to move between the loading unit 100 and the pick-up units 610 and 620, and the component 1 is selected from the loading unit 100 to be transmitted to the pick-up unit 610. 620. In the case described above, one or more load transfer tools 810 and 814 may be moved between the loading unit 100 and the pick-up units 610 and 620 to select the component 1 from the loading unit 100 and transmit it to the pick-up unit. The structure of 610, 620. Further, as described above, in the case where the load buffer unit 200 is provided, the load transfer tool 810, 814 may include a first load transfer tool 810, and the component 1 is selected from the load unit 100 to be transmitted to the load buffer unit. 200; a second load transfer tool 814, which selects the component 1 from the load buffer unit 200 to be transmitted to the pick-up unit 610, 620.

Further, one or more unloading transfer tools 820, 824 may be provided, moving between the pick-up portions 610, 620 and the unloading portion 500, and the component 1 is selected from the pick-up portions 610, 620 to be communicated to the unloading portion 500. In the case as described above, one or more unloading transfer tools 820 and 824 may be moved between the pick-up units 610 and 620 and the unloading unit 500 to select the component 1 from the pick-up units 610 and 620 to be transmitted to the unloading unit 500. Structure. Further, as described above, in the case where the unloading buffer portion 400 is provided, the unloading transfer tool 820, 824 may include: a first unloading transfer tool 820, the component 1 is selected from the unloading buffer portion 400 to be conveyed to the unloading portion 500; The transfer tool 824 picks up the component 1 from the pick-up unit 610, 620 to communicate to the unloading buffer unit 400.

The load transfer tools 810, 814 and the unload transfer tools 820, 824 may be configured to be identical or similar to each other. The loading transfer tools 810, 814 and the unloading transfer tools 820, 824 are respectively configured as the transfer component 1, and may include: a plurality of selectors for selecting the component 1; and a driving device for the up and down direction (Z direction) and Directional shift in the horizontal direction (XY direction) Move multiple pickers.

The picker is a structure for picking up the component 1 and transporting it to a specified position, and may have various structures, and may be composed of an adsorption plate that forms a vacuum pressure on the upper surface of the element 1 and a cylinder that transmits air pressure to the adsorption plate.

The selector takes into consideration that the interval between the storage grooves 2a of the trays 2 of the loading unit 100 and the unloading unit 500 and the intervals between the loading buffers 200 and the loading grooves 211 and 411 of the plate members 210 and 410 of the unloading buffer unit 400 are different from each other. In this case, it is possible to configure the structure in which the horizontal and vertical intervals can be adjusted, or to fix the horizontal and vertical intervals so that a larger number of semiconductor elements 1 can be transferred.

The driving device for moving the plurality of pickers may be of various structures according to the driving scheme of the picker, and the structure thereof may include: an up and down moving device for moving the picker up and down; and a left and right moving device for moving the picker left and right. The up and down moving means may be a structure for causing all of the pickers to move up and down in common, or individually connected to the respective pickers to cause the respective pickers to move up and down independently. The left and right moving devices may be of various structures according to the moving scheme of the picker, and may be a structure moving in a single direction in the X direction or the Y direction or a structure movable in the X-Y direction.

On the other hand, the component pressurizing tools 830, 840 may be provided to move between the test portion 300 and the pick-up portions 610, 620, and the component 1 is selected from the pick-up portions 610, 620 to pressurize the test socket 310, and will be The components of the test socket 310 that perform the pressurization completion test are communicated to the pick-up and drop parts 610, 620. The component pressurizing tools 830 and 840 are configured to transfer components between the test unit 300 and the first pick-up unit 610 and between the test unit 300 and the second pick-up unit 620, and may be configured according to the transfer scheme of the component 1. A variety of structures. The component pressurizing tools 830, 840 may include: a first component pressurizing tool 830 that moves between the first pick-up portion 610 and the test portion 300 to pick up components from the first pick-up portion 610 and pressurize the test socket 310, and The component that performs the pressurization completion test at the test socket 310 is transmitted to the first pick-up portion; the second component pressurizing tool 840 moves between the second pick-up portion 620 and the test portion 300 to select components from the second pick-up portion 620 1 and the test socket 310 is pressurized, and the component that is pressurized at the test socket 310 to complete the test is transmitted to the second pick-up unit 620. As described above, when the component pressurizing tools 830 and 840 are configured in a pair, the pair of component pressurizing tools 830 and 840 can move in conjunction with each other for the convenience of component exchange.

For example, as shown in FIGS. 9 through 15, the component press tools 830, 840 may have the same or similar structure as the load transfer tools 810, 814 and the unload transfer tools 820, 824. The component press tools 830, 840 may include a plurality of pickers 831 that select the component 1, 841.

On the other hand, in order to easily perform the component exchange between the plate members 210, 410 and the test portion 300, the interval between the loading grooves 211, 411 of the plate members 210, 410 may be formed as a selector of the component press tools 830, 840. 1/n of the interval between 831 and 841 is formed, for example, to 1/2. Here, n is a natural number of 2 or more.

Specifically, when the loading grooves 211, 411 of the plate members 210, 410 of the unloading buffer portion 400 are disposed at 16 × 8 and the test sockets 310 of the test portion 300 are disposed at 8 × 4, the component pressing tools 830, 840 are included to correspond. The intervals of the test sockets 310 of the test portion 300 are arranged as 8x4 pickers 831, 841 so that the 8x4 elements 1 can be transferred at once. In particular, in order to be able to transfer a larger number of semiconductor elements 1, when the picker of the first load transfer tool 810 is placed at 8x4 (8x2), the pickers 831, 841 of the component press tools 830, 840 can Placed at 8×4 (8×2).

Further, the component press tools 830, 840 are caused to be ejected or loaded one by one in the loading grooves 211, 411 of the plate members 210, 410 of the unloading buffer portion 400, thereby eliminating the need for the selectors 831, 841. The spacing between the two is adjusted so that component transfer can be made faster.

On the other hand, it is necessary for the component pressing tools 830 and 840 to replace the selectors 831 and 841 in accordance with the type, size, and the like of the components 1.

Therefore, as shown in FIGS. 9 to 15, the component pressing tools 830, 840 may include: support portions 833, 843 movably disposed inside the component detecting device; and one or more selection modules 834, 844, Removably coupled to the support portions 833, 843 and incorporating more than one selector 831, 841.

The support units 833 and 843 may have any structure as long as they can support the selection modules 834 and 844. The support portions 833 and 843 may be provided with first support plates 833a and 843b having a flat lower surface so that the selection modules 834 and 844 are detachably fixed.

The selection modules 834, 844 may include: second support plates 835, 845 having upper sides adhered to the lower sides of the first support plates 833a, 843b; dampers 839, 849 coupled to the second support plates 835, 845 The heating modules 838, 848 are coupled to the dampers 839, 849; the selector support modules 836, 846 are coupled to the heating modules 838, 848; the selectors 831, 841 are fixed to the selector support modules 836, 846 .

As shown in FIG. 10, the pickers 831, 841 can be supported by the picker. The hollow coupling member 891 of the modules 836, 846 is constructed with a hollow suction plate 892 that is detachably coupled to the end of the coupling member 891. The suction plate 892 can form a projection 892a that is more convex than the outer circumferential surface of the coupling member 891. The coupling member 891 can be detachably fixed to the picker support modules 836, 846 by the guiding member 893. The selectors 831, 841 are disposed in the selection modules 834, 844 in a state where the coupling member 891 is coupled to the suction plate 892. The suction plate 892 is coupled to the suction flow path 899 by a coupling member 891. The adsorption plate 892 can be made of a flexible material such as rubber or synthetic resin.

Dampers 839, 849, during the process of component 1 pressurizing test socket 310 While the adjustment element 1 acts on the contact force of the test socket 310, it also acts to apply a force to the selection modules 834, 844. For example, the dampers 839, 849 may include: chambers 839d, 849d, a certain space is formed inside, and air pressure passages 839c, 849c communicating with the space are formed; elastic films 839a, 849a are disposed inside the chambers 839d, 849d; The pressing members 839b, 849b are connected to the pickers 831, 841 through the heating modules 838, 848 to pressurize the elastic films 839a, 849a. According to this configuration, when the air pressure is applied to the internal spaces of the chambers 839d and 849d by the air pressure passages 839c and 849c, the elastic films 839a and 849a are elastically deformed to apply a predetermined pressure to the pressurizing members 839b and 849b. Thereby, when the element 1 pressurizes the test socket 310 in accordance with the air pressure acting on the inside of the chambers 839d, 849d and the elasticity of the elastic films 839a, 849a, the contact force of the element 1 with respect to the test socket 310 is determined. Further, according to the air pressure acting on the inside of the chambers 839d, 849d and the elasticity of the elastic films 839a, 849a, in the process of pressurizing the test socket 310 by the pressure acting on the pressing members 839b, 849b, the pair is applied to the selection. Modules 834, 844 force buffering.

On the other hand, when a plurality of selection modules 834, 844 are provided on the component pressing tools 830, 840, the air pressure acting on the internal spaces of the chambers 839d, 849d can be adjusted to each other according to the plurality of selection modules 834, 844. different. That is, in the process of using a plurality of selection modules 834, 844 to press a plurality of components 1 into a plurality of test sockets 310, a plurality of components 1 need to be pressurized to a plurality of test sockets 310 with a uniform contact force. A plurality of components 1 perform a uniform test. However, the specifications of the plurality of selection modules 834, 844, for example, the positions of the pickers 831, 841, the elastic force of the elastic films 839a, 849a, the assembly tolerances, the degree of aging of the components, etc., cannot be surely consistent, and thus the plurality of components 1 have The test socket 310 may be unevenly pressurized. Therefore, the air pressures acting on the internal spaces of the chambers 839d, 849d are individually adjusted according to the plurality of selection modules 834, 844, whereby the plurality of components 1 can be pressurized to the plurality of test sockets with a uniform contact force. 310.

On the other hand, considering that the selection modules 834, 844 are set to operate by air pressure The dampers 839 and 849, the support portions 833 and 843, and the selection modules 834 and 844 may be formed with air pressure connection passages 833b, 843b, 835b, and 845b, and are connected to the air pressure passages 839c and 849c of the dampers 839 and 849. The air pressure passages 833b, 843b, 835b, and 845b may include first air pressure passages 833b and 843b, and first support plates 833a and 843a formed on the support portions 833 and 843, and connected to an external air pressure generating source (not shown). The second air pressure passages 835b, 845b are formed on the second support plates 835, 845 of the selection modules 834, 844 such that the first air pressure passages 833b, 843b communicate with the air pressure passages 839c, 849c of the dampers 839, 849. Thus, the additional operation of connecting the air pressure generating source to the air pressure passages 839c, 849c of the dampers 839, 849 can be performed by the selection modules 834, 844 being coupled to the support portions 833, 843 to make the air pressure passages of the dampers 839, 849 839c, 849c are automatically connected.

The selector support modules 836 and 846 are provided as portions supporting the selectors 831 and 841, and a suction flow path 899 may be formed to communicate with the adsorption plates 892 of the selectors 831 and 841.

The suction flow path 899 is connected to a vacuum pressure generating source (not shown) to generate a function of a passage for sucking air. According to the suction air through the suction flow path 899, a negative pressure can be formed on the adsorption plate 892, and the negative pressure is caused by the negative pressure. 1 will adsorb to the adsorption plate 892. Such a suction flow path 899 may be formed inside the selection modules 834, 844, but the present invention is not limited thereto, and the suction flow path 899 may be constituted by a separate tube connected to the adsorption plate 892.

On the other hand, considering that the selection modules 834, 844 are provided with the selector support modules 836, 846, the suction flow path 899 is connected to the adsorption plate 892, and the support portions 833, 843 and the selection modules 834, 844 can be Vacuum pressure connection passages 833c, 843c, 835c, and 845c are formed, and are connected to a pipe or the like through the suction flow path 899. The vacuum pressure connection passages 833c, 843c, 835c, and 845c may include first vacuum pressure connection passages 833c, 843c, first support plates 833a, 843a formed on the support portions 833, 843, and external vacuum pressure generation sources ( The second vacuum pressure connection passages 835c and 845c are formed in the second support plates 835 and 845 of the selection modules 834 and 844 to communicate with the first vacuum pressure connection passages 833c and 843c. Thereby, the vacuum pressure generating source and the suction flow path 899 can be automatically connected by the selection modules 834 and 844 to the support portions 833 and 843 without additional work for connecting the vacuum pressure generating source to the suction flow path 899.

A heating module 838, 848 as a heating portion for the heating element 1 may be disposed between the dampers 839, 849 and the picker support modules 836, 846, thereby causing the test portion 300 to perform testing on the component 1 at a certain temperature. Heaters 838, 848 may be provided with heaters 838a, 848a.

When a plurality of selection modules 834 and 844 are disposed on the component pressing tools 830 and 840, The plurality of heaters 838a, 848a may be disposed in the plurality of selection modules 834, 844, respectively. In the case described above, the plurality of heaters 838a, 848a can be independently controlled in accordance with the plurality of selection modules 834, 844.

As noted above, the selection modules 834, 844 may also be provided with temperature sensors 838b, 848b coupled to the heaters 838a, 848a to directly sense the temperature of the heaters 838a, 848a, or to the heaters 838a, 848a. Other objects are connected to indirectly sense the temperature of the heaters 838a, 848a. When the plurality of heaters 838a, 848a are respectively disposed in the plurality of selection modules 834, 844, the plurality of temperature sensors 838b, 848b may be respectively disposed in the plurality of selection modules 834, 844. The plurality of temperature sensors 838b, 848b sense the temperatures of the plurality of heaters 838a, 848a, and control the temperatures of the plurality of heaters 838a, 848a based on the results sensed by the plurality of temperature sensors 838b, 848b.

As described above, each of the selection modules 834, 844 is provided with heaters 838a, 848a and temperature sensors 838b, 848b. According to the results of sensing by the plurality of temperature sensors 838b, 848b, the heater 838a can be independently controlled. The temperature of 848a, whereby the temperature can be independently adjusted according to the characteristics of the plurality of elements 1 selected by the element pressing tools 830, 840 to perform the test for the element 1 more accurately.

At this time, it is considered that the selection modules 834, 844 are provided with heaters 838a, 848a or temperature sensors 838b, 848b, first support plates 833a, 843a of the support portions 833, 843 and selection modules 834, 844 The second support plates 835, 845 may be constructed of a heat insulating material. Further, a heat insulating member (not shown) may be disposed between the heating modules 838, 848 and the dampers 839, 849, and between the dampers 839, 849 and the second support plates 835, 845. In addition, one or more first connectors 91 may be provided on the selection modules 834, 844 for supplying power or signaling signals to the heaters 838a, 848a or the temperature sensors 838b, 848b.

In addition, a second connector 92 can be disposed on the support portions 833, 843. When combined with the selection modules 834, 844, by combining with the first connector 91 to the heaters 838a, 848a or the temperature sensors 838b, 848b Supply power and communicate signals.

The terminal of the first connector 91 and the terminal of the second connector 92 can be electrically connected to each other by being inserted into each other or the like, and can have various configurations.

According to the structures of the first connector 91 and the second connector 92 as described above, the modules 834, 844 and the support portions 833, 843 can be selected without additional connection work. The combination provides power to the heaters 838a, 848a or temperature sensors 838b, 848b and signals. That is, the first connector 91 and the second connector 92 are disposed at portions that are in contact with each other when the combination of the selection modules 834, 844 and the support portions 833, 843, so that the selection modules 834, 844 and the support portion 833 When 843 is combined with each other, it is automatically connected.

On the other hand, another example of the heating portion for the heating element 1 is as shown in Fig. 14. As shown in Fig. 15, on the component pressurizing tools 830, 840, a heated gas ejecting unit may be provided to eject the heating gas to the element 1 selected on the pickers 831, 841. By heating the gas ejecting unit, the element 1 can be heated by injecting a heating gas to the element 1, whereby the high temperature test can be performed on the element 1. When a plurality of selection modules 834, 844 are provided on the component pressing tools 830, 840, a plurality of heating gas spraying units may be respectively disposed in the plurality of selection modules 834, 844. In the case as described above, the temperature of the heating gas injected by the plurality of heated gas injection units can be independently controlled according to the plurality of selection modules 834, 844.

The heating gas spraying unit may include: a guiding member 893 disposed on the adsorption plate An outer periphery of the 892 is formed with an injection port 894 for injecting a heated gas together with a suction plate 892; a heating gas flow path 895 is connected to the heating gas supplier 896, and the heating gas supplier is connected to the injection port 894 to supply the heating gas. The heating gas flow path 895 may be formed inside the heating modules 838, 848. The shape of the heating injection port 894 may be formed in various shapes in which the heating gas injected through the injection port 894 is ejected toward the element 1 adsorbed to the adsorption plate 892. In order to form the injection port 894, the guide member 893 is coupled to the picker support modules 836, 846 to wrap the outer periphery of the suction plate 892 with a certain interval along the outer peripheral surface of the suction plate 892. The injection port 894 is connected to the heating gas supplier 896 by a heating gas flow path 895. The heating gas flow path 895 may be formed inside the selection modules 834, 844, but the present invention is not limited thereto, and the heating gas flow path 895 may be constituted by a separate tube connected to the adsorption plate 892.

According to the structure as described above, the selector 831 of the component pressurizing tools 830, 840, In the state of the adsorption element 1, the adsorption plate 892 of the 841 ejects the heating gas from the injection port 894 formed on the outer periphery of the adsorption plate 892 in accordance with the operation of the heating gas supplier 896, and the injected heating gas collides against the adsorption plate 892. Element 1 is used to heat element 1. As described above, the heating of the element 1 is directly performed by heating the gas, so that the heat transfer for the heating element 1 is compared with the case where the heaters 838a, 848a are used to heat the element 1 on the selection modules 834, 844. The efficiency is increased so that not only the element 1 can be heated quickly, but also the temperature drop of the element 1 can be minimized, whereby the element 1 can be subjected to accurate detection at a set temperature.

When the injection port 894 that ejects the heating gas from the outer periphery of the adsorption plate 892 is formed, The selection modules 834, 844 may not be provided with heaters 838a, 848a, thereby eliminating the complexity of the design and the difficulty of assembly caused by the heaters 838a, 848a being provided in the selection modules 834, 844. Of course, the selection modules 834, 844 can be provided with heaters 838a, 848a and a heated gas injection unit at the same time.

In addition, the component press tools 830, 840 pressurize the component 1 to test the socket 310. During the process, the heated gas may be injected from the injection port 894, and the injected heated gas collides with the test socket 310 to heat the test socket 310. As described above, the heating of the test socket 310 is performed directly by heating the gas, and thus can be released for setting on the test socket 310 as compared with the case where the heater is set on the test socket 310 and used to heat the test socket 310. Design complexity and assembly difficulties caused by heaters.

On the other hand, the selection modules 834, 844 can be provided with induction heating gas. Body temperature temperature sensors 838b, 848b. Thereby, the temperature of the heating gas injected to the element 1 can be controlled based on the result of induction by the plurality of temperature sensors 838b, 848b. In the case where the plurality of heating gas spraying units are respectively disposed in the plurality of selection modules 834, 844, the plurality of temperature sensors 838b, 848b may be respectively disposed in the plurality of selection modules 834, 844. The plurality of temperature sensors 838b, 848b sense the temperature of the heated gas ejected by the component 1 selected by each of the selection modules 834, 844, and the temperature of the heated gas can be controlled based on the results of the sensing by the plurality of temperature sensors 838b, 848b. .

As described above, since each of the selection modules 834 and 844 are respectively provided with heating gas The body ejection unit and the temperature sensors 838b, 848b, and independently control the temperature of the heating gas injected to the element 1 based on the result of being induced by the plurality of temperature sensors 838b, 848b, whereby the pressing device 830 can be pressed according to the element The characteristics of the plurality of components 1 selected by 840 are independently adjusted to perform the test for the component 1 more accurately.

One side of the support portions 833, 843 and the selection modules 834, 844 can be set tightly The fastening portions 833 and 843 and the fastening units 850 of the selection modules 834 and 844 are configured to detachably couple the selection modules 834 and 844 to the support portions 833 and 843, the support portions 833 and 843, and the selection modules 834 and 844. The other side may be provided with a first support unit 860 that enables the selection modules 834, 844 to be supported by the support portions 833, 843. According to the configuration as described above, the support portions 833, 843 and the selection modules 834, 844 can be fastened to each other by the fastening unit 850 in a state of being mutually supported by the first support unit 860.

The fastening unit 850 can include a ring 851 disposed on the selection module 834, 844 One side; the ring moving member 852 moves the hook in the up and down direction; the ring hook member 853 is disposed on one side of the support portions 833, 843 to hook the ring 851 to the ring hook member 853. According to the above configuration, the ring 851 is hung on the ring hook member 853, and the support portions 833, 843 and the selection modules 834, 844 are fastened to each other by pulling the ring 851 downward by the ring moving member 852.

The first support unit 860 can include: a protruding piece 861, in the selection module 834, The other side of the 844 is protruded by a certain length; the protruding piece fixing portion 862 is disposed on the other side of the selection modules 834, 844 to insert and fix the protruding piece 861. The protruding piece fixing portion 862 may be provided on the lower side of the supporting portions 833, 843 by the first supporting member 863, that is, protruded at a length on the lower side of the first supporting plates 833a, 843a, thereby providing the insertion protruding piece 861. The second support member 864 is supported by the first support member 863 and disposed at a certain interval from the lower side of the support portions 833, 843. The second supporting member 864 is preferably selected such that the surface in contact with the protruding piece 861 is formed into a curved surface so that the protruding piece 861 can be easily inserted into the space between the lower side of the supporting portions 833, 843 and the second supporting member 864. . Further, the protruding piece fixing portion 862 may include an elastic member 865 that elastically supports the second supporting member 864, and the fixing member 866 fixes the elastic member 865 to the supporting portions 833, 843. Since the second support member 864 is elastically supported by the elastic member 865, the protruding piece 861 is easily inserted into the space between the lower side of the support portions 833, 843 and the second support member 864. Further, after the protruding piece 861 is inserted into the space between the lower side of the supporting portions 833, 843 and the second supporting member 864, the elastic member 865 pressurizes the second supporting member 864 so that the protruding piece 861 is firmly It is fixed so as not to be separated from the space between the lower side of the support portions 833, 843 and the second support member 864.

According to the structure as described above, the protruding piece 861 is inserted into the support portions 833, 843 In a state in which the space between the lower side surface and the second support member 864 is fixed, the ring 851 is hung on the ring hook member 853, and the support portion can be pulled by the simple action of pulling the ring 851 by the ring moving member 852. 833, 843 and selection modules 834, 844 are combined with each other.

On the other hand, the support portions 833, 843 and the selection modules 834, 844 are preferably The second supporting unit 870 is selected to have the lower side of the guiding support portions 833 and 843 and the upper side surfaces of the selection modules 834 and 844, that is, the upper sides of the second supporting plates 835 and 845 are adhered to each other, thereby The combined action of the support units 833, 843 and the selection modules 834, 844 is easier to perform.

The second supporting unit 870 can include: a protruding strip 871, from the selection module 834, a top surface of the 844 is protruded, and a head portion 875 having an end ridge portion is formed at an upper portion; the head receiving portion 872 is recessed at a lower side surface of the support portions 833, 843 to receive the head portion 875 of the protruding strip 871; The plate 873 is formed with a head insertion hole 874 into which the head 875 is inserted. According to the above configuration, in the process in which the support portions 833, 843 and the selection modules 834, 844 are coupled to each other, the head portion 875 is received in the inside of the head housing portion 872 through the head insertion hole 874, and passes through the support portion 833. The relative modules of the selection modules 834 and 844 move horizontally, and the end ridges of the head 875 are hung on the hanging plate 873, thereby enabling the selection modules 834, 844 to be supported by the support portions 833, 843.

The second supporting unit 870 as described above performs the function of fixing the supporting portions 833 and 843 and the selecting modules 834 and 844 to each other. Therefore, only one of the first supporting unit 860 and the second supporting unit 870 can be provided. Just fine.

On the other hand, between the support portions 833 and 843 and the selection modules 834 and 844, it is preferable to include the position determining unit 880 to determine the bonding position between the support portions 833 and 843 and the selection modules 834 and 844.

For example, the position determining unit 880 may include a protruding bar 881 protruding from the upper side of the selection modules 834, 844, and a protruding bar insertion slot 882 that is recessed from the lower side of the support portions 833, 843. According to the structure as described above, in the process in which the supporting portions 833, 843 and the selection modules 834, 844 are coupled to each other, the protruding rod 881 is inserted into the protruding rod insertion groove 882 to determine the supporting portions 833, 843 and the selection module. The combined position of 834 and 844.

On the other hand, in a state in which the support portions 833 and 843 and the selection modules 834 and 844 are coupled to each other, the lower side surfaces of the support portions 833 and 843 and the upper side surfaces of the selection modules 834 and 844 are closely adhered to each other. Therefore, the support portions 833 and 843 and the selection modules 834 and 844 are preferably selected to have an inductive sensor 889 to sense the lower sides of the support portions 833 and 843 and the upper sides of the selection modules 834 and 844. . In the figure, although the structure in which the inductive sensor 889 is disposed on the lower side of the supporting portions 833 and 843 is disclosed, the present invention is not limited thereto, and the inductive sensor 889 may be disposed on the upper side of the selecting modules 834 and 844. . The inductive sensor 889 can be constructed of a pressure sensor that is in contact with the sensing surface. The inductive sensor 889 can sense the closeness of the lower side of the support portions 833 and 843 and the upper sides of the selection modules 834 and 844, and can determine the support portions 833, 843 and the selection module according to the sensing result. Whether 834, 844 are combined with each other.

The component pressurizing tools 830 and 840 are moved in the horizontal direction (Y-axis direction) and the vertical direction (X-axis direction) to move the components 1 loaded on the first pick-up unit 610 and the second pick-up unit 620 to the test portion. Socket 310, and the component 1 that has completed testing from the test socket 310 moves to the first pick-up unit 610 and the second pick-up unit 620.

For example, as shown in FIGS. 16 to 19, a horizontal moving device 801 is provided, which is respectively connected to the component pressing tools 830 and 840 to move the component pressing tools 830 and 840 in the horizontal direction (Y-axis direction), respectively; The first vertical moving means 802 is provided, and is connected to the element pressing tools 830, 840, respectively, so that the element pressing tools 830, 840 are respectively moved in the vertical direction (Z-axis direction).

The horizontal moving device 801 may include connecting members 830b, 840b that are connected to restrict movement in the horizontal direction of the support shafts 830a, 840a extending from the element pressing tools 830, 840 in the vertical direction and to be movable in the vertical direction. The horizontal drive unit 803 moves the connecting members 830b and 840b in the horizontal direction.

The connecting members 830b and 840b may be formed with through holes 830c and 840c penetrating in the vertical direction to insert the support shafts 830a and 840a, so that the movement of the support shafts 830a and 840a in the vertical direction is restricted and movable in the horizontal direction. Connected to the connecting members 830b, 840b. As the support shafts 830a, 840a are inserted into the through holes 830c, 840c of the connecting members 830b, 840b, the movement of the support shafts 830a, 840a in the horizontal direction is restricted by the connecting members 830b, 840b, but the vertical of the support shafts 830a, 840a The movement of the direction is not constrained. The through holes 830c and 840c simultaneously function to guide the movement of the support shafts 830a and 840a in the vertical direction.

The horizontal drive unit 803 may include, for example, a belt 803a connected to the connecting members 830b and 840b, a pulley 803b, a take-up belt 803a, and a rotary motor (not shown) connected to the pulley 803b. According to the configuration described above, the pulley 803b is rotated in accordance with the rotational force of the rotary motor (not shown), and the belt 803a and the connecting members 830b and 840b connected to the belt 803a are moved in the horizontal direction in accordance with the rotation of the pulley 803b. The support shafts 830a, 840a and the component press tools 830, 840 connected to the connecting members 830b, 840b are movable in the horizontal direction. On the other hand, according to the embodiment of the present invention, the configuration in which the belt 803a and the pulley 803b are provided as the horizontal driving portion 803 is disclosed, but the present invention is not limited thereto, and as the horizontal driving portion 803, execution by hydraulic or pneumatic operation may be used. A variety of horizontal transfer devices such as a linear motor or a ball screw device.

The first vertical moving device 802 may include moving blocks 830d, 840d respectively connected to restrict the movement of the support shafts 830a, 840a extending from the element pressing tools 830, 840 in the vertical direction in the horizontal direction and making them movable in the vertical direction Moving; cam followers 830e, 840e are coupled to moving blocks 830d, 840d; cam members 830g, 840g are formed with inserted cam followers The cam grooves 830f, 840f of 830e, 840e; and the lifting rails 830h, 840h are connected to the moving blocks 830d, 840d to guide the movement of the moving blocks 830d, 840d in the vertical direction.

The moving blocks 830d, 840d may be provided with guide rails 830i, 840i connected to the ends of the support shafts 830a, 840a and extended in the horizontal direction to guide the movement of the support shafts 830a, 840a in the horizontal direction. Thereby, the support shafts 830a, 840a can be moved in the horizontal direction along the guide rails 830i, 840i.

The drive motors 830j and 840j are connected to the cam members 830g and 840g, respectively, whereby the cam members 830g and 840g are rotated by the drive of the drive motors 830j and 840j. Such cam members 830g, 840g may be connected to a pair of element pressing tools 830, 840, respectively, to form a pair.

The cam grooves 830f and 840f may be formed to include a first radius section and a second radius section having a certain radius, and a variable section connecting the first radius section and the second radius section. When the cam grooves 830f, 840f have the above configuration, when the cam followers 830e, 840e are located in the first radius section of the small radius, the component press tools 830, 840 are in the upper side; the cam followers 830e, 840e When the variable section is located, the component pressing tools 830, 840 move to the upper side or move to the lower side; when the cam follower 830e, 840e is located in the second radius section of the radius larger than the first radius section, the component pressing tool 830, The 840 will remain in the lower side.

The moving blocks 830d, 840d are inserted into the cam grooves 830f, 840f through the cam followers 830e, 840e to be coupled to the cam members 830g, 840g. Further, the moving blocks 830d and 840d may be connected to the elevation rails 830h and 840h to be raised and lowered in the vertical direction. Thereby, when the cam members 830g, 840g rotate, the cam followers 830e, 840e move in the vertical direction along the shape of the cam grooves 830f, 840f, whereby the moving block 830d connected to the cam followers 830e, 840e 840d can be moved in the vertical direction, and the component press tools 830, 840 connected to the moving blocks 830d, 840d by the support shafts 830a, 840a can be moved in the vertical direction.

The lifting rails 830h and 840h may be fixed to the fixture 804 provided on the upper portion of the moving blocks 830d and 840d. However, the present invention is not limited thereto, and as long as the lifting and lowering of the moving blocks 830d and 840d can be guided, the lifting rails 830h and 840h can have various configurations.

According to the configuration as described above, the component pressurizing tools 830, 840 are moved in the horizontal direction by the horizontal moving means 801, whereby the component pressurizing tools 830, 840 can be between the first pick-up portion 610 and the test socket 310, And moving between the second pick-up unit 620 and the test socket 310 in the horizontal direction. In addition, the component press tools 830, 840 can pass the first vertical The mobile device 802 moves in the vertical direction at the upper portion of the first pick-up portion 610, the upper portion of the second pick-up portion 620, and the upper portion of the test socket 310, and selects the component 1 or the loading member 1. The component pressurizing tools 830, 840 are moved in the vertical direction at the upper portion of the test socket 310 in order to allow the component 1 to be firmly coupled to the test socket 310 while performing a certain force to press the component 1 into the test socket 310. .

As described above, the component pressing tools 830, 840 are moved in the vertical direction in accordance with the rotation of the cam members 830g, 840g, whereby the moving position of the component pressing tools 830, 840 in the vertical direction can be accurately set.

Further, during the process in which the component 1 pressurizes the test socket 310 for testing, the pressurized state of the component 1 of the test socket 310 is maintained for a certain period of time. For this reason, when the cam members 830g and 840g are not used, and only the rotary motor using the ball screw device or the linear motion motor such as a linear motor is used, it is necessary to continuously apply a large voltage for the element 1 to the linear motion motor. A constant force is applied to the element 1 all the time, but when the cam members 830g, 840g are utilized, the pressurization state of the element 1 by the test socket 310 is independent of the change of the voltage applied to the drive motors 830j, 840j, but according to the cam member 830g. The shape of the second radius section of 840 g is maintained. Therefore, when the first vertical moving means 802 for moving the element pressing tools 830, 840 in the vertical direction has the structure including the cam members 830g, 840g, and only the linear moving motor is used without using the cam members 830g, 840g Compared with the case, it has the effect of reducing energy.

On the other hand, depending on the type of the component 1 to be tested or the type of the test socket 310, the pressing positions required by the selectors 831, 841 of the component pressing tools 830, 840 can be changed, so that the component 1 is accurately pressurized to the test. The socket 310 performs the test of the component 1 accurately. In addition, it is necessary to accurately lower the component pressing tools 830, 840 to press the component 1 to the test socket 310 for confirmation and inspection.

Therefore, in order to change or confirm the pressing position of the component pressing tools 830 and 840, first, the horizontal moving device 801 and the first vertical moving device 802 connected to the component pressing tools 830 and 840 are vertically moved up and down, and then the rotating cam member 830g is rotated. 840g and determine whether the pressing position of the component pressing tools 830, 840 coincides with the pressing position to be set, that is, the reference position is the same.

To this end, as shown in FIG. 20 and FIG. 21, the component detecting apparatus according to the embodiment of the present invention may include: a second vertical moving device 805, and the component pressing tools 830, 840, The component pressing portion of the horizontal moving device 801 and the first vertical moving device 802 are connected to linearly move the component pressing portion in the vertical direction; the control portion 807 passes the second vertical moving device 805 to cause the component pressing tool 830, When the 840 is in contact with the test portion 300, the load applied to the test portion 300 by the second vertical moving device 805 is detected, and the position of the component pressurizing tools 830, 840 when the detected load reaches the set reference load is detected. It is a pressurized position.

The second vertical moving device 805 can be horizontally shifted from the first vertical moving device 802 The moving device 801 is connected. As described above, the first vertical moving device 802 and the horizontal moving device 801 can be lifted and lowered together by the second vertical moving device 805, thereby causing the component pressing tools 830, 840 to ascend and descend.

The portion of the component pressurizing tools 830, 840 that is in contact with the test portion 300 may be The undersides of the selection modules 834, 844 located around the pickers 831, 841, that is, the lower sides of the picker support modules 836, 846. To this end, the portion of the lower side of the picker support modules 836, 846 that is in contact with the test portion 300 may be constructed of a metal such as aluminum.

Moreover, the portion of the test portion 300 that is in contact with the component pressurizing tools 830 and 840 may be The upper side of the support frame 312 of the test socket 310 is considered to be supported. To this end, the portion of the upper side of the support frame 312 that is in contact with the component pressurizing tools 830, 840 may be made of a metal such as aluminum. During the process of pressurizing the component 1 to the test socket 310 to perform the test, the lower sides of the selection modules 834, 844 are in contact with the upper side of the support frame 312 to limit the drop of the component press tools 830, 840 to determine the test socket. The pressurized position of element 1 of 310.

Therefore, with the type of component 1, the type of test socket 310, or the test socket When the height of the support frame 312 is changed by changing the type of the terminal 311 provided in the 310, etc., it is judged whether or not the component 1 is judged by whether or not the lower side surface of the component press tools 830 and 840 is in contact with the upper side surface of the support frame 312. Located in a pressurized position.

To this end, a sensor arrangement can be considered to sense the component pressurization tool 830. Whether the lower side of the support is in contact with the upper side of the support frame 312. As described above, there is a disadvantage that the cost increases as the sensor is disposed. When the position of the sensor is set, etc., there is a component pressurizing tool. The structure of 830, 840 and test socket 310 becomes complicated.

Therefore, it is equipped with a control unit 807, and the component pressurizing tools 830, 840 and the test When the portion 300 is in contact, the amount of load change of the second vertical moving device 805 is sensed, and the load applied to the test portion 300 is detected by the amount of change in the load, and the component when the detected load reaches the set reference load is added. The position of the pressing tools 830, 840 is set to the pressing position.

As shown in FIG. 20, the control unit 807 is included in the second vertical moving device 805. When the ball screw device of the motor 806 or the belt transfer device connected to the pulley by the motor 806 is connected to the motor 806, a load such as the torque of the motor 806 can be sensed. According to the configuration as described above, when the component pressurizing tools 830, 840 are lowered by the second vertical moving means 805 in the state where the component pressing tools 830, 840 are not in contact with the test portion 300, the motor sensed at the control portion 807 When the amount of change in the load of 806 is not large, or when the component pressurizing tools 830 and 840 are in contact with the test unit 300, the load induced in the control unit 807 is increased. Thereby, the control unit 807 senses the load of the motor 806, and detects the load applied to the test unit 300 by the second vertical moving device 805 when the component press tools 830 and 840 come into contact with the test unit 300 by the induced load. The position of the component pressurizing tools 830 and 840 when the detected load reaches the set reference load is set as the pressurizing position.

As another example, the second vertical moving device 805 utilizes a permanent magnet and an electromagnetic When a linear motor that operates by electromagnetic interaction between irons is used, the control unit 807 is configured to sense the load of the linear motor.

Next, the component pressurizing tools 830, 840 are set by using the structure as described above. The method of pressing the position will be described.

First, in the component pressurizing tools 830, 840, the first component pressurizing tool 830 is caused After the upper portion of the test portion 300 having the set height, that is, after the upper portion of the support frame 312, the cam member 830g connected to the first component pressurizing tool 830 is rotated, so that the first component pressurizing tool 830 is positioned to pass the cam member. The rotation of 830g causes the first component pressing tool 830 to lower the lowest position.

Running the second vertical moving device 805, slowly lowering the component pressing portion to perform The process of slowly lowering the first component pressing tool 830 is performed. At the same time, the control section 807 performs a process of sensing the load applied to the test section 300 by the first component pressurizing tool 830 by sensing the load of the second moving device 805.

As shown in FIGS. 20 and 21, as the second vertical moving device 805 passes When the first component pressing tool 830 is lowered, the first component pressing tool 830 comes into contact with the testing portion 300, whereby the load applied to the testing portion 300 by the first component pressing tool 830 changes. At this time, when the load applied to the test unit 300 by the first component pressurizing tool 830 reaches the reference load, the control unit 807 determines that the position of the first component pressurizing tool 830 coincides with the set pressurization position, thereby terminating the second vertical. The operation of the mobile device 805.

As described above, the setting of the pressing position of the first component pressing tool 830 is completed. After the process, the process of setting the pressing position of the second component pressing tool 840 is performed by the same process as setting the pressing position of the first component pressing tool 830.

The pressing position of the component pressing tools 830, 840 is set by the process as described above. At the time, the component 1 is selected by the component pressurizing tools 830, 840, and the test process of the component 1 of the pressurization test socket 310 is performed.

As described above, the component detecting device according to the embodiment of the present invention is necessary to When the type of the component 1 or the type of the test socket 310 adjusts the pressing position of the component pressing tools 830, 840, or it is necessary to confirm and verify whether the component pressing tools 830, 840 are accurately lowered to the pressing position to make the component 1 When the test socket 310 is pressurized, the component pressurizing tools 830, 840 are lowered by inductively operating the second vertical moving device 805 to contact the test portion 300 while sensing the load of the second vertical moving device 805, using the induction The load is applied to detect the load applied to the test portion 300, and when the detected load reaches the set reference load, the position of the component press tools 830, 840 is set to the pressurizing position, so that the component pressurization can be easily and accurately set. The pressurized position of the tools 830, 840.

On the other hand, as shown in Fig. 10, the loading transfer tool for the transfer member 1 810, 814, the unloading transfer tool 820, 824 or the selector of the component pressing tools 830, 840, and an adsorption plate 892 having a material such as rubber is bonded to the end of the coupling member 891 to facilitate the adsorption of the component 1 in the component 1 When the change is caused by abrasion, when the suction is poor, or when maintenance is performed, the adsorption plate 892 needs to be alternately replaced.

However, in the past, the replacement of the adsorption plate 892 was composed of manual work, and was required. Separating the picker 891 to perform one-to-one replacement or the like has a problem of being extremely inconvenient.

To this end, the present invention may further include: an adsorption plate replacement portion 900, which automatically replaces the points The slabs 892 on at least one of the load transfer tools 810, 814, the unload transfer tool 820, 824, or the component press tools 830, 840 are not incorporated. Here, the picker may be a picker disposed on the load transfer tools 810, 814 and the unload transfer tools 820, 824, and pickers 831, 841 disposed on the component press tools 830, 840.

As shown in Figs. 22 to 27, the adsorption plate replacement portion 900 is loaded by consideration. The moving paths of the transfer tools 810, 814, the unloading transfer tools 820, 824 or the component press tools 830, 840 are disposed at appropriate positions, and may include: an adsorption plate receiving portion 910 formed with the insertion plate 892 of the picker inserted a plurality of adsorption plate accommodating spaces 911; an adsorption plate selection portion 920, The adsorption plate accommodated in the adsorption plate accommodating space 911 is selected on at least a part of the adsorption plate accommodating portion 910.

Here, at least the adsorption plate housing portion 910 provided with the adsorption plate selecting portion 920 is at least In some cases, the suction plate accommodating space 911 is vacated, and the adsorption plate 892 is separated from the coupling member 891 by the adsorption plate selecting portion 920 for storage, and at least a part of the adsorption plate accommodating portion 892 of the adsorption plate selecting portion 920 is directed to A new suction plate 892 is inserted into the coupling member 891 from which the suction plate 892 is removed.

The adsorption plate accommodating portion 910 is formed with a plurality of adsorption plates 892 configured to pass The adsorption plate selecting portion 920 separates the adsorption plate 892 from the coupling member 891 to accommodate or insert a new adsorption plate 892 structure to the coupling member 891 from which the adsorption plate 892 is removed, and can have various structures.

As an example, the adsorption plate accommodating portion 910 may include a plurality of adsorption plates formed The housing portion 912 of the housing 911.

The accommodating portion body 912 has a structure in which the adsorption plate accommodating space 911 is formed, and Thought a variety of structures.

The adsorption plate accommodating space 911 serves as an adsorption plate 892 that is separated from the picker. Alternatively, the structure of the new adsorption plate 892 to be attached to the picker from which the adsorption plate 892 is removed may be a plurality of structures such as grooves as long as the adsorption plate 892 is housed.

The adsorption plate selecting portion 920 is divided from the picker by the adsorption plate selecting portion 920. The structure of the suction plate 892 may be provided on the accommodating portion main body 912, and after the suction plate 892 is coupled to the coupling member 891, the suction plate accommodating space 911 may be inserted, and various structures such as the structure of the suction plate may be selected.

For example, the adsorption plate selection unit 920 can utilize the hook and the selection of the release hook. The selection/deselection, the use of the ring shape and the like, and the selection/deselection of the contact grip can be various structures.

As still another example, the adsorption plate selecting portion 920 may include: a moving member 921, The upper surface of the accommodating portion body 912 is covered, and is disposed to be movable in a direction parallel to the upper surface, that is, in a horizontal direction.

At this time, the moving member 921 is used for hooking and releasing as a horizontal movement. The structure of the selection/deselection of the hooks may be of various structures. For example, as shown in FIGS. 22 to 27, the plurality of through portions 922 are formed to penetrate through the state in which the adsorption plate 892 is coupled to the picker, thereby forming To be movable along the adsorption plate accommodating space 911; a plurality of hook portions 923, When it is moved from the adsorption plate accommodating space 911 in a state where the adsorption plate 892 is coupled to the picker, the suction plate 892 is hooked, and only the picker can be moved.

In particular, in order to improve the hooking effect of the moving member 921, the suction plate 892 can The protrusion 892a is formed to protrude more than the outer peripheral surface of the picker 891. At this time, the hook portion 923 is formed to be larger than the outer peripheral surface of the joint member 891 and smaller than the outer peripheral surface of the projection 892a, thereby being in the picker When moving in the upper direction, the suction plate 892 is hooked.

The moving member 921 of the adsorption plate selecting portion 920 takes into consideration the adsorption plate 892 and the combination The size of the radius of the picker having the suction plate 892 is different, and the through portion 922 having a larger radius than the maximum diameter of the adsorption plate 892 and the hook portion 923 having a radius of at least a portion of the suction plate 892 are used to insert the adsorption plate 892 into the suction plate accommodating space. At 911, the through portion 922 is placed on the suction plate accommodating space 911; when the suction plate 892 is separated from the picker, it is located at the hook portion 923.

On the other hand, the moving member 921 of the suction plate selecting portion 920 is characterized in that The position of the hook that has moved to the suction plate 892 and the position where the hook is released is not shown, but can be linearly moved by the linear motion device, and the movement is driven by a plurality of driving sources.

On the other hand, in the load transfer tool 810, 814, the unloading transfer tool 820, When the suction plate 892 is replaced by the picker 892 or the picker of the component pressurizing tools 830, 840, the position of the suction plate replacing portion 900 is first moved to the adsorption plate receiving portion 910 to which the adsorption plate selecting portion 920 is bonded to separate the adsorption plate 892 ( 23 to 25), moving to the adsorption plate accommodating portion 910 accommodating the new adsorption plate 892 to bond the new adsorption plate 892 (Figs. 24 and 25), and ending the transfer of the actuator 1 after the adsorption plate 892 is replaced. operation.

On the other hand, a load transfer tool 810 for transferring the component 1 as described above, 814. The structure of the unloading transfer tool 820, 824 or the component pressurizing tools 830, 840, in addition to being the component detecting device, may perform the sorting process of the component according to the executed detection result, or perform the detecting component and classify according to the detection thereof. The component can of course also be adapted to load the component onto the tray for loading, and the processing of the transfer component is performed by one or more transfer tools.

The preferred embodiments of the present invention have been exemplarily described above, but The scope of the invention is not limited to the specific embodiments described above, and may be appropriately modified within the technical scope.

1‧‧‧ components

100‧‧‧Loading Department

2‧‧‧Tray

2a‧‧‧storage trough

200‧‧‧Load buffer

300‧‧‧Test Department

310‧‧‧ test socket

400‧‧‧Unloading buffer

500‧‧‧Unloading Department

610, 620‧‧‧ pick-up department

611, 621‧‧ ‧ rail

612, 622‧‧‧ pick-up board

613, 623‧‧ ‧ plate fixing department

614, 624‧‧‧ board loading and unloading department

700‧‧‧Clean Department

710‧‧‧ Ontology

713‧‧‧Draining tube

720‧‧‧ Drive Department

810, 814‧‧‧Loading transfer tool

820, 824‧‧‧ Unloading Transfer Tool

830, 840‧‧‧ component press tools

900‧‧‧Adsorption plate replacement unit

Claims (25)

A component detecting device includes: a loading portion that loads one or more trays loaded with a plurality of components; and a testing portion that includes a plurality of test sockets for receiving components transmitted from the loading portion to test the respective components And an unloading unit that classifies and loads the components that complete the test according to the test result of the testing unit; and one or more transfer tools, and transfers the component between the loading unit, the testing unit, and the unloading unit. The transfer tool includes a plurality of pickers respectively coupled to the adsorption plate at the end, and at least one of the transfer tools further includes an adsorption plate replacement portion for automatically replacing the adsorption plate respectively coupled to the picker a loading buffer portion that receives an element transmitted from the tray of the loading portion by a loading transfer tool and performs temporary loading; and an unloading buffer portion that is disposed at the loading buffer center centering on the testing portion The opposite position to receive the component that completed the test through the test section. A component detecting device comprising: a loading portion that loads one or more trays loaded with a plurality of components; a testing portion that receives components transmitted from a loading buffer portion for testing; and an unloading portion that tests according to the testing portion As a result, the components loaded in the unloading buffer are sorted and loaded by the unloading transfer tool; one or more transfer tools transfer the components between the loading section, the testing section, and the unloading section, the transfer The tool includes a plurality of pickers respectively coupled to the adsorption plate at the end, and at least one of the transfer tools further includes an adsorption plate replacement portion for automatically replacing the adsorption plate respectively coupled to the picker; The adsorption plate replacing portion includes: two or more adsorption plate accommodating portions, and a plurality of adsorption plate accommodating spaces for inserting the adsorption plates of the selector; and an adsorption plate selection portion disposed in the adsorption plate accommodating portion At least one Separatingly, the adsorption plate accommodated in the accommodating space of the adsorption plate is selected, and at least a part of the adsorption plate accommodating portion of the suction plate selection portion is provided, and the accommodating plate accommodating space is vacated, thereby passing The adsorption plate selecting portion separates the adsorption plate from the picker for receiving, and at least a part of the adsorption plate receiving portion of the adsorption plate receiving portion is inserted into the adsorption plate to be replaced to make the adsorption plate Combined with the removed picker. The component detecting device according to the second aspect of the invention, wherein the absorbing plate accommodating portion includes: a accommodating portion main body, wherein the plurality of absorbing plate accommodating spaces are formed, and the absorbing plate selecting portion is disposed in the The body of the accommodating portion is inserted into the accommodating space of the absorbing plate in a state where the absorbing plate is coupled to the picker, and the absorbing plate is selected. The component detecting device according to claim 3, wherein the adsorption plate selecting portion includes: a moving member covering the upper surface of the receiving portion body and configured to be movable in a direction parallel to the upper surface, The moving member includes: a plurality of penetrating portions that are penetrated in a state in which the suction plate is coupled to the picker, and are formed to be movable to the suction plate accommodating space; and the plurality of hook portions are formed to be respectively The through portion is connected to hook the adsorption plate when the adsorption plate is moved to the adsorption plate accommodating space in a state where the adsorption plate is coupled to the picker, and only the picker is moved. The component detecting device according to claim 4, wherein the adsorption plate is formed with a convex portion that is more convex than an outer peripheral surface of the picker, and the hook portion is formed to be larger than the picker The outer peripheral surface is smaller than the outer peripheral surface of the projection so as to hook the suction plate when moving in the upper direction of the picker. The component detecting device according to any one of claims 2 to 5, further comprising: a loading buffer portion that receives an element transmitted from the tray of the loading portion by a loading transfer tool and Temporary loading is performed; the unloading buffer portion is disposed at a position opposed to the loading buffer portion around the test portion to receive an element that is tested by the testing portion. The component detecting device according to claim 2, further comprising: a first pick-up unit and a second pick-up unit, the component to be received from the loading buffer by the one or more transfer tools Communicating to the test portion or communicating an element received from the test portion to the unloading buffer. The component detecting device according to claim 7, wherein the first pick-up unit and the second pick-up unit are oppositely disposed with the test unit as a center, and the first pick-up unit and the second pick-up unit Each of the sections includes: a guide rail; and one or more shuttle plates that are moved along the guide rail for receiving a first component communication position of the communicated component from the loading buffer, and a component replacement position of the test section, The second component transfer position of the unloading buffer communication element is alternately moved. The component detecting device according to claim 7, wherein the transfer tool comprises: a pair of component pressing tools, the component is transmitted from the loading portion to the testing portion, or the component is The test unit is communicated to the unloading unit, and the pair of component pressurizing tools are respectively moved between the first pick-up unit and the test unit, and between the second pick-up unit and the test unit, Thereby, the components loaded from the shuttle board are communicated to the test section or the components are communicated from the test section to the shuttle board. A component detecting device includes: a loading portion that loads one or more trays loaded with a plurality of components; and a testing portion that includes a plurality of test sockets for receiving components transmitted from the loading portion to test the respective components And an unloading unit that classifies and loads the components that complete the test according to the test result of the testing unit; and one or more transfer tools that transfer the components between the loading unit, the testing unit, and the unloading unit, and a cleaning portion disposed on one side of the test portion for injecting air in a state of covering the test socket by movement to remove foreign matter in the test socket; loading a buffer portion by loading a transfer tool Receiving components communicated from the tray of the loading portion And performing temporary loading; and unloading the buffer portion, centered on the test portion, at a position opposite to the loading buffer portion to receive an element that is tested by the test portion. A component detecting device includes: a loading portion that loads one or more trays loaded with a plurality of components; and a testing portion that includes a plurality of test sockets for receiving components transmitted from the loading portion to test the respective components And an unloading unit that performs classified loading on the components that complete the test according to the test result of the testing unit; one or more transfer tools that transfer the components between the loading portion, the testing portion, and the unloading portion, and Further including a cleaning portion disposed on one side of the test portion for removing foreign matter in the test socket by spraying air in a state of covering the test socket; the cleaning portion includes: a body covering The test socket forms a cleaning space at an upper portion of the test socket; and a driving portion for driving the body between one side of the test portion and an upper portion of the test socket. The component detecting device according to claim 11, wherein the body is provided with an air flow path connected to the air supply device to inject air to the respective test sockets; and one or more nozzles from the air The flow path receives the communicated air to inject air into the test socket. The component detecting device according to claim 11, wherein the body is formed to maintain a state in which the cleaning space is sealed, and the body is connected to a discharge pipe to discharge air blown through the nozzle together with foreign matter. The cleaning space is discharged to the outside. The component detecting device according to any one of claims 11 to 13, further comprising: a loading buffer portion that receives a component conveyed from the tray of the loading portion by a loading transfer tool And temporarily loading; the unloading buffer portion is disposed at a position opposite to the loading buffer portion around the test portion to receive an element that is tested by the testing portion. The component detecting device according to claim 10 or 14, further comprising: a first pick-up unit and a second pick-up unit, wherein the components received from the loading buffer are transmitted by the one or more transfer tools To the test section, or to transmit an element received from the test section to the unloading buffer. The component detecting device according to claim 15, wherein the first pick-up unit and the second pick-up unit are disposed opposite to each other by the test unit, the first pick-up unit and the second The pick-up portions each include: a guide rail; and one or more transfer plates that move along the guide rail for receiving a first component transfer position of the communicated component from the load buffer portion and a component replacement position of the test portion The second component transfer position of the unloading buffer communication element is alternately moved. The component detecting device according to claim 15, wherein the cleaning unit is provided between the first pick-up unit and the second pick-up unit. The component detecting device according to claim 15, wherein the transfer tool comprises: a pair of component pressing tools between the first pick-up portion and the test portion, and the second Movement between the pick-up portion and the test portion to communicate the components loaded on the shuttle board to the test portion or to communicate components from the test portion to the shuttle board. A component detecting device comprising: a loading portion for loading a plurality of components; a testing portion having a plurality of test sockets for performing tests for transferring components from the loading portion; and an unloading portion, according to the test result Classifying the components that have been tested in the test section; And one or more pick-up units that transfer components transmitted from the loading unit to the test portion side, and transfer components transmitted from the test portion to the unloading portion side, the pick-up portion including: pick-up a plate for mounting the component; a plate fixing portion, the transfer plate is detachably coupled thereto; a plate loading and unloading portion is disposed at the plate fixing portion to fix the transfer plate to the plate fixing portion; The pick-up unit is provided with a guide rail, and the board fixing portion can be connected to move horizontally. A component detecting device includes: a loading portion that loads a plurality of components; a testing portion that includes a plurality of test sockets for testing components that are transferred from the loading portion; and an unloading portion that is based on the test result Sorting the components that have been tested in the test portion; and one or more pick-up portions, transferring the components transmitted from the loading portion to the test portion side, and transferring the components transmitted from the test portion to the The loading and unloading unit includes: a pick-up plate for carrying the component; a board fixing portion, the pick-up board is detachably coupled thereto; and a board loading and unloading portion disposed at the board fixing portion, Fixing the shuttle board to the board fixing portion; the board loading and unloading portion includes: a support body fixed to the board fixing portion; and a fixing body rotatable by a first hinge shaft provided on the support body Connecting to selectively fix the shuttle plate; an elastic body elastically connecting the fixing body to the first hinge shaft; and a pressing body, the pressing surface contacting the fixing body is formed into a curved surface to The fixed body a moving body coupled to the pressing body and configured to be movable in an up and down direction; a handle to rotatably connect the second hinge shaft disposed on the moving body; and a fixing hook disposed on the The support body is hung on the end of the handle and fixed. The component detecting device according to claim 20, wherein the pick-up portion is provided with a guide rail, and the plate fixing portion can be connected to be horizontally moved. A component detecting device includes: a loading portion that loads a plurality of components; a testing portion that includes a plurality of test sockets for testing components that are transferred from the loading portion; and an unloading portion that is based on the test result Sorting the components that have been tested in the test portion; and one or more pick-up portions, transferring the components transmitted from the loading portion to the test portion side, and transferring the components transmitted from the test portion to the The loading and unloading unit includes: a pick-up plate for carrying the component; a board fixing portion, the pick-up board is detachably coupled thereto; and a board loading and unloading portion disposed at the board fixing portion, The transfer board is fixed to the board fixing portion; the board fixing portion is provided with a heater for heating the element. A component detecting device includes: a loading portion that loads a plurality of components; a testing portion that includes a plurality of test sockets for testing components that are transferred from the loading portion; and an unloading portion that is based on the test result Sorting the components that have been tested in the test section; one or more pick-up sections, transferring the components transmitted from the loading section to the test section side, and transferring the components transmitted from the test section to the a loading and unloading portion, the pick-up portion includes: a pick-up plate for carrying the component; a board fixing portion, the pick-up board is detachably coupled thereto; and a board loading and unloading portion disposed at the board fixing portion Fixing the transfer plate to the plate fixing portion; and one or more component pressing tools, selecting components from the pick-up plate of the pick-up portion to pressurize the The test socket is described, and the component that is pressurized at the test socket to complete the test is transmitted to the shuttle board of the pick-up section. The component detecting device according to claim 23, wherein the pick-up unit comprises: a first pick-up unit and a second pick-up unit disposed on both sides of the test socket of the test portion. The component detecting device according to claim 24, wherein the component pressing tool comprises: a first component pressing tool, and selecting a component on the shuttle board of the first pick-up section to pressurize the test a socket, and transmitting an element for performing the test on the test socket to the transfer board of the first pick-up unit; and a second component press tool for selecting a component on the transfer board of the second pick-up unit The test socket is pressurized, and the component that is pressurized at the test socket to complete the test is transmitted to the transfer board of the second pick-up unit.