KR101588809B1 - Testing apparatus of device - Google Patents

Testing apparatus of device Download PDF

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Publication number
KR101588809B1
KR101588809B1 KR1020140147358A KR20140147358A KR101588809B1 KR 101588809 B1 KR101588809 B1 KR 101588809B1 KR 1020140147358 A KR1020140147358 A KR 1020140147358A KR 20140147358 A KR20140147358 A KR 20140147358A KR 101588809 B1 KR101588809 B1 KR 101588809B1
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KR
South Korea
Prior art keywords
disposed
vacuum
housing
regulator
lower plate
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Application number
KR1020140147358A
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Korean (ko)
Inventor
김왕태
안종찬
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(주)케이엔씨
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Priority to KR1020140147358A priority Critical patent/KR101588809B1/en
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Publication of KR101588809B1 publication Critical patent/KR101588809B1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2601—Apparatus or methods therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

A device testing apparatus of the present invention comprises: an upper plate (20) which has a plurality of compressed air fitting units (12) for supplying compressed air which are arranged at intervals; a plurality of first housings (40) and second housings (50) which are arranged at intervals under the upper plate (20); a lower plate (60) which is arranged under the second housings (50), has a vacuum pipe (64) formed on one side, and has a vacuum fitting unit (66) formed on the vacuum pipe (64) to provide a vacuum condition; a picker (55) which is arranged under the lower plate (60), has pin accommodation units (52) to have a gap between the same formed on both sides, and has a nozzle (56) having a vacuum pad (54) formed in the center; and a socket board (80) on which a plurality of test sockets (70) for individually accommodating a device (65) are arranged.

Description

[0001] Testing apparatus of device [0002]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device testing apparatus, and more particularly, to a device testing apparatus that performs stable testing of a device in accordance with the type of a device (semiconductor device) in a handler.

Conventionally, in a device testing apparatus, a certain number of devices are transported in a test step of a semiconductor device, connected to a test head so that a test is performed, and the devices are sorted according to the result of the test and classified.

The handler for performing the above operation is complicated in the structure of the test tray such as the addition of a lead for connection with the socket provided in the test tray for each of the devices accommodated in the test tray, In addition, this increases the production cost.

Korean Patent Registration No. 0197285 (Patent Document 1) discloses a semiconductor device having a test head provided with a plurality of test sockets through which semiconductor devices to be inspected are inserted and electrically connected; 1. A member for moving a plurality of semiconductor devices to a test position above the test head, comprising: a boat having a plurality of receiving grooves for receiving a device and a plurality of through holes formed between the receiving grooves; A contact picker assembly mounted on the test head so as to be vertically movable, for picking up the device on the boat and directly connecting the socket to the socket of the test head; And the boat is moved from the initial position to the device retracting groove pitch 1 in order to be able to descend to the test socket via the through hole of the boat in the state that the contact picker assembly picks up the device, / 2 pitch of the boat.

The conventional device testing apparatus such as Patent Document 1 has a problem that the pressure can not be uniformly adjusted at the time of contact even though it is directly connected to the socket of the test head, resulting in defective device.

Patent Document 1: Korean Utility Model No. 0197285 (Registered on September 15, 2000)

SUMMARY OF THE INVENTION An object of the present invention is to provide a device testing apparatus capable of contacting a device with a test head with high accuracy.

It is another object of the present invention to provide a method of manufacturing a magnetic recording medium in which an error is not generated even when a device is moved using an elastic member and a steel ball, So that the precision of the device testing apparatus can be improved.

The device testing apparatus of the present invention includes: an upper plate having a plurality of compressed air fitting portions for supplying compressed air with an interval; A plurality of first and second housings disposed at lower portions of the upper plate at respective intervals; A lower plate disposed at a lower portion of the second housing and having a vacuum tube at one side thereof and a vacuum fitting portion for supplying a vacuum to the vacuum tube; A picker having a nozzle disposed at a lower portion of the lower plate and having a guide pin receiving portion formed at an interval therebetween and having a vacuum pad at its center; And a socket board in which a plurality of test sockets accommodating devices are disposed. The second housing and the lower plate are provided with first and second magnet members spaced apart from each other in order to compensate for errors generated during contact. .

The first and second housings of the present invention include an air hole formed on an upper surface thereof, a piston disposed below the air hole, a plurality of elastic members disposed in the piston and performing a damping action corresponding to the operation of the piston, A steel ball disposed at a lower portion of the elastic member, and a thrust bearing disposed at a lower portion of the steel ball.

The device testing apparatus of the present invention includes a plurality of solenoid valves connected to a compressed air fitting portion and a vacuum fitting portion, a vacuum generator connected to the solenoid valve and providing a vacuum to the vacuum fitting portion, And a control unit composed of a plurality of regulators for providing air of a predetermined pressure to the first and second regulators.

The device testing apparatus of the present invention is advantageous in that a predetermined pressure can be constantly maintained during device contact because the device testing apparatus is kept constant by using a regulator that automatically regulates the air pressure according to the size of the device.

The device testing apparatus of the present invention has an advantage that the device can be stably contacted and tested by allowing the device to be freely supported in fine movement using an elastic member and a steel ball and moving the device to its original position by using a magnet upon deformation have.

1 is a schematic perspective view of a device testing apparatus of the present invention,
FIG. 2 is a perspective view showing a contact device in which a top plate is removed from a device testing apparatus of the present invention,
3 is a cross-sectional view of a device testing apparatus of the present invention,
4 is a view showing a control part which is a main part of the present invention.

Hereinafter, an embodiment of a device testing apparatus according to the present invention will be described with reference to the accompanying drawings.

1 to 3, the device testing apparatus 100 of the present invention includes an upper plate 20, a plurality of first and second housings 40 and 50, a lower plate 60, A picker 55, and a socket board 80. 1, the device testing apparatus 100 of the present invention is formed in a pair, and is configured to correspond to a pair of solenoid valves 110 to be described later (that is, (100) corresponds to one of the precision contact unit alignment units (CCU) shown in FIG. 4).

As shown in FIG. 1, the upper plate 20 is provided with a plurality of compressed air fitting portions 12 spaced apart therefrom in order to supply compressed air. A square-shaped penetrating portion 18 for connecting to a guide shaft (not shown) is formed at an interval in the center.

As shown in FIGS. 2 and 3, the first and second housings 40 and 50 are spaced apart from each other at a lower portion of the upper plate 20, And is vertically disposed on the upper portion of the housing 50. The first housing 40 is provided with an air hole 10 on the upper surface 15 and a piston 25 is disposed below the air hole 10. The piston 25 is provided with four The elastic members 30 are disposed at intervals. The elastic member 30 serves to perform a damping action corresponding to the operation of the piston 25. [ A gap 33 is formed in the lower portion of the elastic member 30 and an extended portion 34 is formed in a predetermined portion of the gap 33. The extended portion 34 serves as a rolling bearing A steel ball 35 is disposed. Here, the clearance 33 corresponds to the damping clearance of the piston 25. A thrust bearing (45) is disposed under the steel ball (35). Here, the thrust bearing (45) is disposed in the second housing (50). The piston 25 is provided with a lip o-ring 48 at its outer periphery to prevent leakage generated during operation. Here, the first and second housings 40 and 50 may be separately formed as described above, but a single housing may be used to prevent leakage and impact.

As shown in FIGS. 2 and 3, the lower plate 60 is disposed at a lower portion of the second housing 50, and a vacuum tube 64 is formed at one side of the lower plate 60. A vacuum is supplied to the vacuum tube 64 A vacuum fitting portion 66 is disposed.

The first and second housings 40 and 50 are fastened together by a fastening member 75 such as a screw or a pin and the second housing 50 and the lower plate 60 are fastened together by fastening members 85 .

As shown in FIG. 3, the second housing 50 and the lower plate 60 are provided with first and second magnet members 90 and 92 having different polarities, respectively, Respectively. The first magnet member 90 is disposed on both sides of the second housing 50 and the second magnet member 92 is disposed on both sides of the lower plate 60. The first and second magnet members 90 and 92 are arranged in the vertical direction so as to face each other.
On the other hand, when the first magnet member 90 is an N pole, the second magnet member 92 is an S pole, and when the first magnet member 90 is an S pole, . The first and second magnet members 90 and 92 may be configured to change the elastic force of the elastic member 30 or to generate an impact upon contact of the device 65 when the contact operation is continuously performed for a predetermined time of the device 65. [ A phenomenon that the first and second housings 40 and 50 and the lower plate 60 do not coincide with each other occurs. This phenomenon is returned to the original position by using the first and second magnet members 90 and 92 So that it is possible to compensate for an error occurring at the time of contact. Here, the contact means that the nozzle 56 of the picker 55 is contacted with the device 65 and tested.

As shown in FIG. 3, the picker 55 is disposed at a lower portion of the lower plate 60. The picker 55 has guide pin receiving portions 52 formed at both sides thereof with a gap therebetween, and a vacuum pad 54 is formed at the center A nozzle 56 is provided. The picker 55 is fastened to each other by the lower plate 60 and the guide pin 72.

As shown in FIG. 3, the socket board 80 has a plurality of test receptacles 70, which accommodate the devices 65, disposed at intervals. When the device 65 is tested (or contacted), the picker 55 is positioned on the upper side of the device 65 accommodated in the test socket 70 disposed on the socket board 80.

4, the device testing apparatus 100 includes a plurality of solenoid valves 110 connected to the compressed air fitting unit 12 and the vacuum fitting unit 66, and a solenoid valve 110 connected to the solenoid valve 110 A vacuum generator 120 for providing a vacuum to the vacuum fitting part 66 and a plurality of regulators 130, 140 and 150 connected to the solenoid valve 110 and providing compressed air to the compressed air fitting part 12 And further includes a control unit 200.

In the plurality of regulators 130, 140 and 150, the regulator 150 is a main regulator and is connected to a plurality of solenoid valves 110 connected to the compressed air fitting portion 12 and the vacuum fitting portion 66. The regulator 140 is connected to the main regulator 150 and is a primary vacuum regulator for regulating the pressure of the primary air from the main regulator 150. The regulator 130 is connected to the main regulator 150, and corresponds to a secondary regulator that regulates the pressure of air (i. E., It is an electropneumatic regulator). Here, although the three regulators 130, 140 and 150 are applied to three regulators, only two regulators may be used depending on the user. That is, the main regulator 150 also functions as the vacuum breakdown regulator 140, and the regulator 130 functions as an electropneumatic regulator so that only two regulators can be used (only two regulators 150 and 130 are used) You may).

Accordingly, the plurality of regulators of the present invention are configured to control the pressure of the air more precisely because the regulator is used to reduce the pressure or to break the vacuum while adjusting the pressure of the air according to the size of the device 65.

Hereinafter, the operation of the device testing apparatus of the present invention will be described in detail.

First, the device 65 is stored (accommodated) in a plurality of test sockets 70 disposed in the socket board 80. Then, a guide shaft connected to a mobile device (robot apparatus) not shown moves the device testing apparatus 100 to the test socket 70 of the socket board 80. That is, the device testing apparatus 100 moves to the socket board 80 side in order to perform the test of the device 65.

When the device testing apparatus 100 moves toward the socket board 80, the regulator 150 of the regulator 130, 140, 150 of the controller 200 adjusts the pressure to a predetermined pressure, . Here, the main regulator 150 is adjusted to a preset pressure according to the type of the device 65, and the primary regulator 140 destroys the vacuum to remove the device 65 as described later, The regulator 130 serves as a pneumatic regulator. The secondary regulator 130 calculates the air pressure based on the optimum load according to the type of the device 65 and supplies an electric signal to the solenoid valve 110 to switch the air supply and discharge . Here, the pneumatic regulator means a regulator that controls the air pressure or the air amount based on an electric signal.

The air compressed at the predetermined pressure pushes the piston 25 through the air hole 10. When the piston 25 is pressed, the plurality of elastic members 30 relaxes the impact. Since the steel ball 35 is disposed in the enlarged portion 34 of the gap 33, centering can be facilitated while serving as a rolling bearing.

The picker 55 disposed at the lower portion of the lower plate 60 descends to test the device 65 of the test socket 70 while maintaining a predetermined predetermined pressure. At this time, the air passing through the main regulator 150 of the control unit 200 is supplied to the nozzle 56 through the secondary regulator 130, and is tested while being in contact with the nozzle. That is, the vacuum pad 54 formed on the nozzle 56 of the picker 55 performs the test while the device 65 is pressed (contacted).

On the other hand, when the test of the device 65 is completed, the air passing through the main regulator 150 of the control unit 200 is broken through the primary regulator 140. Providing a vacuum to the vacuum fitting portion 66 disposed in the lower plate 66 from the vacuum generator 120 of the controller 200 causes the vacuum pad 54 of the picker 55 to pick up the device 65 that has been tested And then moves to a predetermined position and places the device 65 on a tray (not shown). When the device 65 is flashed, the vacuum is broken through the primary regulator 140. Here, the description of the process of classifying and storing the devices 65 by grade is omitted.

If the test operation of the device 65 is repeatedly performed as described above, the first and second housings 40 and 50 and the lower plate 60 are subjected to an impact due to an impact. However, The first and second magnet members 90 and 92 are disposed on the upper and lower plates 50 and 60, respectively, so that this error can be corrected by itself. That is, the upward and downward impacts generated in the test of the device 65 are mitigated by the plurality of elastic members 30, and the left and right deviations caused by the impact are transmitted to the first and second magnet members (90, 92).

As described above, the device testing apparatus of the present invention has an advantage that the device test can be stably performed by moving the deformation caused by the impact in the device testing to the original position using the first and second magnet members .

The device testing apparatus of the present invention can be widely applied to a handler for testing various kinds of semiconductor devices and a semiconductor testing apparatus like this.

10: Air hole 12: Compressed air fitting part
20: upper plate 25: piston
30: elastic member 40: first housing
50: second housing 55:
60: Lower plate 65: Device
70: test socket 110; Solenoid valve
120: Vacuum generator 130, 140, 150: Regulator

Claims (9)

A device testing apparatus for testing a device accommodated in a test socket of a socket board by a picker disposed on the upper side of the device,
An upper plate having a plurality of pressurized air fitting portions for supplying compressed air and spaced apart from each other;
A plurality of first and second housings disposed at intervals below the upper plate, the first housing being vertically disposed on an upper portion of the second housing;
A lower plate disposed at a lower portion of the second housing and having a vacuum tube at one side thereof and a vacuum fitting portion for supplying a vacuum to the vacuum tube;
A picker having a nozzle disposed at a lower portion of the lower plate and having a guide pin receiving portion formed at an interval therebetween and having a vacuum pad at its center;
And a socket board in which a plurality of test sockets accommodating devices are arranged,
Wherein the first housing includes an air hole formed in an upper surface thereof, a piston disposed below the air hole, and a plurality of elastic members disposed in the piston and performing a damping action corresponding to the operation of the piston, A steel ball is disposed between the housing and the second housing, and the second housing has a thrust bearing disposed at a lower portion of the steel ball,
The first and second magnet members are disposed on the second housing and the lower plate at intervals so as to compensate for an error generated when the picker nozzle and the device are in contact with each other and the first magnet member is disposed on both sides of the second housing And the second magnet member is disposed on both sides of the lower plate, and the first and second magnet members are disposed in the vertical direction so as to face each other.
delete The method according to claim 1,
Wherein a piston of the first housing is provided with a lip o-ring at an outer periphery thereof.
The method according to claim 1,
Wherein the steel ball is disposed inside the extended portion formed in the gap to be centered while acting as a rolling bearing.
The method according to claim 1,
Wherein the first and second housings are fastened together by a fastening member and the second housing and the lower plate are fastened together by fastening members.
The method according to claim 1,
Wherein the first and second magnet members are formed of different magnetic poles.
The method according to claim 1,
The device testing apparatus includes a plurality of solenoid valves connected to a compressed air fitting portion and a vacuum fitting portion, a vacuum generator connected to the solenoid valve and providing a vacuum to the vacuum fitting portion, and a vacuum generator connected to the solenoid valve, Further comprising a control unit comprising a plurality of regulators for providing air of predetermined pressure or breaking vacuum.
8. The method of claim 7,
The plurality of regulators are for setting a pressure according to the type of the device. The plurality of regulators include a main regulator, a primary regulator connected to the main regulator and breaking the vacuum, and a secondary regulator connected to the main regulator The device testing apparatus comprising:
8. The method of claim 7,
Wherein the plurality of regulators are for setting a pressure according to the type of the device, and are constituted by a main regulator and a secondary regulator which is connected to the main regulator and which is an electropneumatic regulator.

KR1020140147358A 2014-10-28 2014-10-28 Testing apparatus of device KR101588809B1 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20240012951A (en) * 2022-07-21 2024-01-30 주식회사 티에프이 Picker assembly for adsorbing semiconductor package

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100197285B1 (en) 1994-05-31 1999-06-15 아다찌 마사루 Clutch cover assembly having clutch disk wear compensation means
KR200197285Y1 (en) * 2000-04-14 2000-09-15 삼성전자주식회사 Apparatus for testing semi-conductor device of test handler
JP2001135649A (en) * 1999-08-25 2001-05-18 Ckd Corp Lock device and tracing device using it
KR20130099826A (en) * 2012-02-29 2013-09-06 (주)제이티 Semiconductor device inspection apparatus

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100197285B1 (en) 1994-05-31 1999-06-15 아다찌 마사루 Clutch cover assembly having clutch disk wear compensation means
JP2001135649A (en) * 1999-08-25 2001-05-18 Ckd Corp Lock device and tracing device using it
KR200197285Y1 (en) * 2000-04-14 2000-09-15 삼성전자주식회사 Apparatus for testing semi-conductor device of test handler
KR20130099826A (en) * 2012-02-29 2013-09-06 (주)제이티 Semiconductor device inspection apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20240012951A (en) * 2022-07-21 2024-01-30 주식회사 티에프이 Picker assembly for adsorbing semiconductor package
KR102679460B1 (en) * 2022-07-21 2024-06-28 주식회사 티에프이 Picker assembly for adsorbing semiconductor package

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