JP4406592B2 - Device inspection apparatus and device inspection method - Google Patents

Description

  The present invention relates to a device inspection apparatus and a device inspection method, and more particularly to a device inspection apparatus capable of inspecting a large number of devices at once and a device inspection method using the device inspection apparatus.

In the conventional member delivery apparatus, two movable parts having two contact hands capable of sucking and pressing the IC device are provided, and the two movable parts alternately take the IC device from the shuttle to the inspection socket. The IC device was inspected (for example, see Patent Document 1).
Japanese Patent Laid-Open No. 10-82830 (FIGS. 1 to 4)

  In the conventional member delivery apparatus, all contact hands provided on the two movable parts can suck and press the IC device. Therefore, after the IC device that has been inspected is taken out from the inspection socket, the IC to be measured next It is possible to shorten the time (so-called index time) until the device is mounted on the inspection socket and the external terminal of the IC device is brought into a stable contact state with the inspection socket.

  However, for example, when trying to improve the inspection processing capability of an IC device having a relatively long inspection time in the inspection socket, it is necessary to increase the number of IC devices that can be inspected at one time. In this case, in the conventional member delivery device, the number of contact hands of the movable part is increased. However, the contact hand requires a mechanism such as a vacuum chuck, and it is expensive to add the contact hands. There was a problem.

  Further, if an attempt is made to add a contact hand capable of attracting and pressing an IC device to an existing member delivery device, the device needs to be greatly improved. However, it was difficult to increase the number of contact hands that could be used.

  The present invention provides a device inspection apparatus capable of inspecting a large number of devices at once and easily increasing the number of devices that can be inspected at a time from existing devices, and a device having a high inspection processing capability using the device inspection apparatus The purpose is to provide an inspection method.

The device inspection apparatus according to the present invention is configured to be movable between 2n (n is a natural number) inspection sockets for inspecting devices, two shuttles for supplying and discharging devices, and between the shuttle and the inspection socket. and a two measurement hand having n adsorption and pressing mechanism, the measurement hand, the same number of n and suction and pressing mechanism, in which a pressing mechanism for pressing only is provided.
Since the measurement hand is provided with one or a plurality of suction and pressing mechanisms, and the same number of pressing mechanisms as the suction and pressing mechanisms are provided, for example, after the device is filled in the inspection socket by the suction and pressing mechanisms, The device can be inspected by pressing the device against the inspection socket with the pressing mechanism and the pressing mechanism. As a result, the number of devices that can be inspected at a time is twice that of the conventional device inspection apparatus, and the inspection processing capability can be improved. Moreover, the device inspection apparatus of the present invention can be realized simply by adding a simple pressing mechanism to the existing device inspection apparatus and increasing the number of inspection sockets that can be inspected, and the inspection processing capability can be increased at low cost.
In a device inspection apparatus having two shuttles and two measuring hands, the device inspection apparatus having a high inspection processing capability of the present invention can be realized in a typical form.

In the device inspection apparatus according to the present invention, when the device is inspected in the inspection socket, one of the measurement hands presses the device by the suction / pressing mechanism and the pressing mechanism.
When inspecting a device in an inspection socket, one of the measuring hands presses the device with the suction and pressing mechanism and the pressing mechanism, so that it is possible to inspect twice as many devices as a conventional device inspection apparatus in one inspection. it can.

Further, in the device inspection apparatus according to the present invention, the above two measurement hands supply the device from the shuttle to the inspection socket, and after one of the measurement hands supplies the device to the inspection socket, The other is to supply the device to the inspection socket.
In the device inspection apparatus of the present invention, in one measurement hand, since only half of the suction and pressing mechanism of the device can be examined in a socket, the supply of the device to the test source Kek bets in one examination requires twice Become. Here, if one of the measurement hands supplies the device to the inspection socket and then the other of the measurement hand supplies the device to the inspection socket, the efficiency of supplying the device to the inspection socket increases. .

In the device inspection apparatus according to the present invention, after the other of the measurement hands supplies the device to the inspection socket, the other of the measurement hands presses the device to inspect the device.
Since one measuring hand has an adsorption and pressing mechanism and the same number of pressing mechanisms, one of the measuring hands supplies the device to the inspection socket, and the other of the measuring hands supplies the device to the inspection socket. Later, when the other of the measuring hands presses the device to inspect the device, the device can be efficiently inspected.

Further, in the device inspection apparatus according to the present invention, the above two measurement hands discharge the device from the inspection socket, and after one of the measurement hands discharges the device from the inspection socket, the other of the measurement hands detects the inspection. The device is ejected from the socket.
In the device inspection apparatus of the present invention, in one measurement hand, since there is only the suction and pressing mechanism of the half of the device can be examined in a socket, the discharge device from the test source Kek bets in one examination requires twice Become. Here, if one of the measurement hands discharges the device from the inspection socket and then the other of the measurement hand discharges the device from the inspection socket, the efficiency of discharging the device to the inspection socket increases.

In the device inspection apparatus according to the present invention, the two measuring hands are attached to a single drive system so as to operate in the same direction and at the same speed.
If two measuring hands are attached to a single drive system so as to operate in the same direction and at the same speed, the device can be supplied and discharged by a simple reciprocating motion of the drive system, and the inspection processing capacity is reduced. improves.

A device inspection method according to the present invention is a device inspection method for inspecting a device using any one of the above-described device inspection apparatuses, and picks up an uninspected device from one shuttle on one of n measuring hands. A process of feeding and holding n devices sucked and held by the cum pressing mechanism onto the inspection socket, and n untested devices from the other shuttle by the other n sucking and pressing mechanisms of the measuring hand. The process of supplying the n number of devices held by suction and sucking and holding them onto the inspection socket after one of the measuring hands supplies the device to the inspection socket, and the state where 2n devices are supplied onto the inspection socket In the above, there is a step of performing an inspection by pressing 2n devices by n suction and pressing mechanisms and n pressing mechanisms of the other measuring hand.
The above-described device inspection apparatus is a device inspection method having a high inspection processing capability because it can inspect twice as many devices as in the past with a single inspection.

Embodiment 1. FIG.
FIG. 6 is a schematic top view showing the overall configuration of the device inspection apparatus according to Embodiment 1 of the present invention. In FIG. 6, the overall configuration of the device inspection apparatus 1 according to the first embodiment will be described. However, the device inspection apparatus 1 according to the first embodiment is characterized by the test site 2 portion. Will be described in detail later.

A device inspection apparatus 1 shown in FIG. 6 is for inspecting electrical characteristics of a device such as an IC device at a test site 2. The test site 2 is supplied with an inspection socket 3 in which an external terminal of the device is fitted and an inspection is performed, an uninspected device is supplied to the inspection socket 3, and two devices for discharging the inspected device from the inspection socket 3 A shuttle 4 is provided. As shown in FIG. 6, in the first embodiment, two shuttles 4 are provided on both sides of the inspection socket 3. Each shuttle 4 is provided with, for example, a feed stage and a gradual material stage that are movable along the rail in the horizontal direction of FIG.
Further, the test site 2 can move between the shuttle 4 and the inspection socket 3 and can suck and press the device (not shown in FIG. 6) and the same number of suction and pressure mechanisms. Two measuring hands 5 provided with a pressing mechanism (not shown in FIG. 6) are provided.

  A part other than the test site 2 of the device inspection apparatus 1 is provided with a supply robot hand 7, a recovery robot hand 8, a supply robot Y axis 9, a recovery robot Y axis 10, and a robot X axis 11. The device inspection apparatus 1 also includes a tray loader 13 for supplying untested devices to the test site 2, three tray unloaders 14 for recovering the inspected devices from the test site 2, and an empty tray of the tray loader 13. An empty tray unloader 15 for discharging the hot plate, a hot plate 16 for heating the device used for the temperature test of the device, and a fixed tray 17 used as an auxiliary are provided.

  Here, the operation of the device inspection apparatus 1 according to the first embodiment will be briefly described. The supply robot hand 7 can move along the supply robot Y axis 9, and the supply robot Y axis 9 can move along the robot X axis 11. For this reason, the supply robot hand 7 can move in the up, down, left and right directions of FIG. Similarly to the supply robot hand 7, the collection robot hand 8 can move along the collection robot Y axis 10, and the collection robot Y axis 10 can move along the robot X axis 11.

  The tray loader 13 is configured to move in the direction of the arrow in FIG. 6 (upward on the paper surface in FIG. 6) when a tray in which an uninspected device is inserted is set. The supply robot hand 7 picks up the device in the tray of the tray loader 13 and transfers the device to the supply stages of the two shuttles 4. Note that the supply stages of the two shuttles 4 are squares drawn on the left side of the page of the shuttle 4. When the device temperature test is performed, the device is heated by the hot plate 16 and then transferred to the supply stage of the shuttle 4.

After the device is transferred to the supply stage of the shuttle 4 and placed in the supply stage, the supply stage and the gradual material stage of the shuttle 4 move, for example, along the rail, and the supply stage measures either one. Try to come underneath hand 5.
Each of the two measuring hands 5 is movable between one shuttle 4 and the inspection socket 3 and moves in the vertical direction of the drawing in FIG. One measuring hand 5 sucks the device from the supply stage of one shuttle 4 by the suction and pressing mechanism and supplies the device to the inspection socket 3. Thereafter, the other measuring hand 5 sucks the device from the supply stage of the other shuttle 4 with the suction and pressing mechanism and supplies the device to the inspection socket 3, and then directly checks the device with the suction and pressing mechanism and the pressing mechanism. 3 is inspected.

  Then, the measuring hand 5 that has pressed the device against the inspection socket 3 by the suction and pressing mechanism and the pressing mechanism transfers the tested device that has been sucked by the suction and pressing mechanism to the slow material stage of the other shuttle 4. . Thereafter, one measuring hand 5 picks up the remaining inspected devices by the suction and pressing mechanism and transfers them to the slow material stage of one shuttle 4. The gradual material stages of the two shuttles 4 are squares drawn on the right side of the page of the shuttle 4.

Next, the supply stage and the gradual material stage of the two shuttles 4 move to the right side of the drawing sheet of FIG. 6 along the rail, for example, and the recovery robot hand 8 picks up the inspected device from the gradual material stage of the shuttle 4. . The collection robot hand 8 accommodates the inspected devices in the tray unloader 14 according to quality, and the tray unloader 14 moves in the direction of the arrow in FIG. 6 (the lower side of the drawing in FIG. 6) to collect the inspected device collection place (FIG. 6). The tested devices are stacked on (not shown). The fixed tray 17 is used to collect a relatively small number of defective devices. Further, the empty tray unloader 15 transfers the empty tray of the tray loader 13 by an empty tray transfer device (not shown in FIG. 6), and empty it in the direction of the arrow in FIG. 6 (the lower side in FIG. 6). Eject the tray.
Here, the flow of device inspection in the device inspection apparatus 1 has been roughly described, but the sequence (operation procedure) of the shuttle 4 and the measurement hand 5 at the test site 2 will be described in detail later.

1 and 2 are perspective views showing a peripheral portion of the test site 2 of the device inspection apparatus 1 according to the first embodiment. 1 and 2 show one specific example of the device delivery mechanism in the test site 2 of FIG. 6, the device delivery mechanism is not limited to that shown in FIGS.
The test site 2 (see FIG. 6) of the device inspection apparatus 1 according to the first embodiment is provided with a device delivery mechanism shown in FIGS. In this device delivery mechanism, a servo motor 21 fixed to a frame 30 is configured to rotationally drive a ball screw 22 extending in the left-right direction (hereinafter referred to as A direction) in FIG. Two guide rails 30a extending in the A direction in FIG. 1 are fixed to the frame 30, and the A drive unit 32 is attached to the guide rails 30a so as to be movable in the A direction. The A drive unit 32 engages with the ball screw 22 and moves in the A direction by the rotation of the ball screw 22.

A pair of left and right movable parts 27 is attached to the A drive part 32 so as to be movable in the vertical direction (hereinafter referred to as the B direction) in FIG. Measuring hands 5a and 5b are attached to these movable parts 27, respectively, and the measuring hands 5a and 5b have suction and pressing mechanisms and the same number of pressing mechanisms on the lower surface side. The adsorption / pressing mechanism and the pressing mechanism will be described later.
A B drive unit 26 is attached to the movable unit 27 so as to be slidable in the A direction. The B drive unit 26 engages with a ball screw 24, and the ball screw 24 is connected to a servo motor 23 fixed to the frame 30. When the ball screw 24 is rotated by the servo motor 23, the B drive unit 26 moves in the vertical direction in FIG. 1 and moves the movable unit 27 up and down.

In the following description, the mechanism including the movable unit 27, the B drive unit 26, the ball screw 24, and the servo motor 23 on the left side of FIG. 1 is referred to as an a-axis drive system, and the movable unit 27 and the B drive unit 26 on the right side of FIG. A mechanism including the ball screw 24 and the servo motor 23 is referred to as a b-axis drive system.
An inspection socket 3 is arranged at the center below each of the above mechanisms. The inspection socket 3 can simultaneously inspect a total number of devices including the suction and pressing mechanism and the pressing mechanism provided in one measuring hand 5a (or 5b). The inspection socket 3 includes an inspection pad corresponding to the external terminal of each device such as an IC device. When the external terminal of the device contacts the inspection pad of the inspection socket 3, the electrical characteristics of the device can be inspected. It has become. FIG. 1 shows a state in which the measuring hand 5a is inspecting the device by pressing the device against the inspection socket 3 by the suction / pressing mechanism and the pressing mechanism, and FIG. 2 shows the measuring hand 5b by the suction / pressing mechanism and the pressing mechanism. A state in which the device is inspected by pressing it against the inspection socket 3 is shown.

  On the other hand, shuttles 4a and 4b are disposed on both sides of the inspection socket 3 in the left and right (A direction) in FIGS. 1 and 2, respectively, and configured to reciprocate in the front-rear direction in FIGS. . The inspection socket 3 is disposed at an exactly middle position between the shuttle 4a and the shuttle 4b. Each of the shuttles 4a and 4b is provided with a material supply stage 43 and a gradual material stage 44. Both the feed stage 43 and the gradual material stage 44 can accommodate a number of devices corresponding to the suction and pressing mechanism of the measuring hands 5a and 5b attached to the movable portion 27. The supply stage 43 accommodates, for example, eight untested devices and supplies the eight devices to the measurement hands 5a and 5b. The gradual material stage 44 is for receiving and discharging the inspected devices from the measuring hands 5a and 5b.

  The a-axis drive system and the measurement hand 5a are configured to transfer devices between the shuttle 4a and the inspection socket 3, and the b-axis drive system and the measurement hand 5b are provided between the shuttle 4b and the inspection socket 3. Configured to transfer devices between them. For example, when the A drive unit 32 moves in the A direction and the measurement hand 5a moves from the shuttle 4a to the inspection socket 3, the measurement hand 5b moves from the inspection socket 3 to the shuttle 4b. As described with reference to FIG. 6, an uninspected device is supplied from the supply robot hand 7 to the supply stage 43 of the shuttles 4 a and 4 b, and an inspection is performed by the recovery robot hand 8 from the slow material stage 44 of the shuttles 4 a and 4 b. Used devices are collected.

FIG. 3 is a schematic diagram for explaining the two measuring hands 5a and 5b and the inspection socket 3 according to the first embodiment. In FIG. 3, the supply stage 43 and the gradual material stage 44 of the shuttles 4a and 4b are also shown. 3 shows the lower surfaces of the measuring hands 5a and 5b for the measuring hands 5a and 5b, and shows the upper surfaces of the feeding stage 43 and the gradual material stage 44 of the inspection socket 3 and the shuttles 4a and 4b. ing. The feed material stage 43 and the gradual material stage 44 of the shuttles 4a and 4b are shown with their positions shifted for convenience.
The measurement hands 5a and 5b shown in FIG. 3 each include eight suction / press mechanisms 50 and eight press mechanisms 51. The suction and pressing mechanism 50 includes, for example, a vacuum chuck and can suck the device, and can press the device against the inspection portion 52 of the inspection socket. On the other hand, the pressing mechanism 51 is made of, for example, an elastic body such as rubber, and can only press the device against the inspection portion 52 of the inspection socket.

The inspection socket 3 is provided with a total of 16 inspection units 52 at positions corresponding to the suction and pressing mechanisms 50 and the pressing mechanisms 51 of the measuring hands 5a and 5b. Each of the supply stages 43 and the gradual material stages 44 (four in total) of the shuttles 4a and 4b is provided with eight storage sections 53, respectively.
The measuring hand 5a can supply eight devices from the supply stage 43 of the shuttle 4a to the inspection unit 52 of the inspection socket 3 by the suction and pressing mechanism 50. Further, the measuring hand 5b can supply eight devices from the supply stage 43 of the shuttle 4b to the remaining inspection units 52 of the inspection socket 3 by the suction and pressing mechanism 50. At the time of device inspection, all devices are pressed against the inspection portion 52 of the inspection socket 3 by the suction and pressing mechanism 50 and the pressing mechanism 51 of either the measurement hand 5a or the measurement hand 5b so that the inspection can be performed. It has become.
In the case of device discharge, as in the case of supply, the measurement hand 5a discharges eight devices from the inspection socket 3 to the slow material stage 44 of the shuttle 4a, and the measurement hand 5b discharges the remaining eight devices to the inspection socket. 3 is discharged to the slow material stage 44 of the shuttle 4b.
Note that the number of the suction and pressing mechanisms 50 of the measuring hands 5a and 5b can be n (n is a natural number), the number of the pressing mechanisms 51 can be n, and the number of the inspection units 52 of the inspection socket 3 can be 2n. .

FIG. 4 is a diagram illustrating a sequence when a device inspection is performed by the device inspection apparatus 1 according to the first embodiment. In addition, the inside of the dotted line shown by TEST SITE of FIG. 4 shows that it exists in the inside of the test site 2, and means that the material supply stage 43 and the gradual material stage 44 of the shuttles 4a and 4b are in the supply / discharge position. Yes. FIG. 4 shows a half cycle of the sequence, and the remaining half cycle is performed when the measurement hands 5a, 5b, etc. move in the reverse direction.
In the initial state of FIG. 4, the measurement hand 5b (HAND 5b) presses the device against the inspection socket 3 by the suction and pressing mechanism 50 and the pressing mechanism 51 to perform the inspection, and the measurement hand 5a (HAND 5a) is in the shuttle 4a. Waiting on (WAITING). At this time, all the inspection units 52 of the inspection socket 3 are equipped with devices, and the suction and pressing mechanism 50 of the measuring hand 5b is inspecting with the devices being sucked. In addition, an untested device is supplied to the supply stage 43 of the shuttle 4a by the supply robot hand 7 shown in FIG. 6 (UNTEST DEVICE LOADING), and the supply robot hand 7 does not supply the supply stage 43 of the shuttle 4b to the supply stage 43. Inspection device is supplied.

  Thereafter, when the inspection of the device in the inspection socket 3 is completed, the A drive unit 32 of FIG. 1 moves, and the measuring hand 5b transfers the inspected device adsorbed by the adsorption and pressing mechanism 50 to the shuttle 4b. The material is discharged (RELEASE). At this time, the measuring hand 5a moves to the position of the inspection socket 3 and sucks (CHUCK) the device remaining in the inspection socket 3. Then, the supply stage 43 of the shuttle 4b comes to the supply position of the test site 2, and the measurement hand 5b sucks the device from the supply stage 43 of the shuttle 4b. At this time, collection of the inspected device (TESTED DEVICE UNLOADING) is started by the collection robot 8 of FIG. 6 from the slow material stage 44 of the shuttle 4b.

Then, the A drive unit 32 moves, the measuring hand 5b comes to the position of the inspection socket 3, and supplies the adsorbed device to the inspection socket 3 (DROP). At this time, the measuring hand 5a comes on the shuttle 4a and discharges the inspected device adsorbed on the slow material stage 44 of the shuttle 4a.
Then, the supply stage 43 of the shuttle 4a comes to the supply position of the test site 2, and the measuring hand 5a sucks an uninspected device from the supply stage 43 of the shuttle 4a. At this time, collection of the inspected device is started by the collection robot 8 from the slow material stage 44 of the shuttle 4a.

  After that, the A drive unit 32 moves so that the measuring hand 5a comes to the position of the inspection socket 3 and the sucked uninspected device is supplied to the inspection socket 3, and then is already supplied by the measuring hand 5b. The uninspected device and the supplied device are pressed against the inspection socket 3 by the suction / pressing mechanism 50 and the pressing mechanism 51 for inspection. At this time, the measuring hand 5b stands by on the shuttle 4b.

  FIG. 5 is a diagram illustrating another example of the device delivery mechanism according to the first embodiment. The structure of the device inspection apparatus 1 according to the first embodiment is not only that in which the measurement hands 5a and 5b move linearly with the A drive unit 32, but also a device in which the measurement hand rotates as shown in FIG. The present invention can also be applied to a device inspection apparatus having a delivery mechanism. Further, as shown in FIG. 5B, the present invention can be applied to a device inspection apparatus having two or more measuring hands (three in FIG. 5B) and a rotating delivery mechanism.

  In the first embodiment, the two measuring hands 5a and 5b are provided with a plurality of suction and pressing mechanisms 50, and the same number of pressing mechanisms 51 as the suction and pressing mechanisms 50 are provided. After the device is filled in the inspection socket 3 by 50, the device can be inspected by pressing the device against the inspection socket 3 by the suction and pressing mechanism 50 and the pressing mechanism 51. As a result, the number of devices that can be inspected at a time is twice that of the conventional device inspection apparatus, and the inspection processing capability can be improved. This effect is particularly remarkable in a device having a relatively long inspection time. In addition, a simple pressing mechanism 51 is added to the existing device inspection apparatus, and the device inspection apparatus 1 of the present invention can be realized only by increasing the number of inspection portions 52 of the inspection socket 3, and the inspection processing capability can be reduced at a low cost. Can be raised.

FIG. 3 is a perspective view illustrating a peripheral portion of a test site of the device inspection apparatus according to the first embodiment. FIG. 3 is a perspective view illustrating a peripheral portion of a test site of the device inspection apparatus according to the first embodiment. The schematic diagram for demonstrating the two measurement hands and test | inspection socket of Embodiment 1. FIG. FIG. 3 is a diagram illustrating a sequence when performing an inspection by the device inspection apparatus according to the first embodiment. The figure which showed the other example of the delivery mechanism of the device of this Embodiment 1. FIG. 1 is a schematic top view showing the overall configuration of a device inspection apparatus according to Embodiment 1 of the present invention.

Explanation of symbols

1 Device inspection device, 2 Test site, 3 Inspection socket, 4 Shuttle, 5 Measuring hand, 7 Supply robot hand, 8 Recovery robot hand, 9 Supply robot Y axis, 10 Recovery robot Y axis, 11 Robot X axis, 13 Tray loader , 14 Tray unloader, 15 Empty tray unloader, 16 Hot plate, 17 Fixed tray, 21 Servo motor, 22 Ball screw, 23 Servo motor, 24 Ball screw, 26 B drive unit, 27 Movable unit, 30 frame, 30a Guide rail, 32 A Drive part, 43 Feeding stage, 44 Gradual material stage, 50 Adsorption / pressing mechanism, 51 Pressing mechanism, 52 Inspection part, 53 Storage part.

Claims (7)

2n (n is a natural number) test sockets for testing devices;
Two shuttles for supplying and discharging the device;
Two measuring hands configured to be movable between the shuttle and the inspection socket and having n suction and pressing mechanisms ;
A device inspection apparatus, wherein the measuring hand is provided with n pressing mechanisms that perform only pressing, the same number as the suction and pressing mechanism. 2. The device inspection apparatus according to claim 1 , wherein when the device is inspected in the inspection socket, any one of the measurement hands presses the device by the suction and pressing mechanism and the pressing mechanism . The two measurement hands supply devices from the shuttle to the inspection socket, and after one of the measurement hands supplies a device to the inspection socket, the other of the measurement hands transfers to the inspection socket. The device inspection apparatus according to claim 1, wherein the device is supplied . The device inspection apparatus according to claim 3, wherein after the other of the measurement hands supplies the device to the inspection socket, the other of the measurement hands presses the device to inspect the device. The two measurement hands eject the device from the inspection socket, and after one of the measurement hands ejects the device from the inspection socket, the other of the measurement hands ejects the device from the inspection socket. The device inspection apparatus according to any one of claims 1 to 4 . The device inspection apparatus according to claim 1, wherein the two measuring hands are attached to a single drive system so as to operate in the same direction and at the same speed . A device inspection method for inspecting a device using the device inspection apparatus according to any one of claims 1 to 6,
A step of sucking and holding an uninspected device from one shuttle by one of the n suction and pressing mechanisms of the measurement hand, and supplying the n devices held by suction onto the inspection socket;
The other n suction / pressing mechanisms of the measurement hand suck and hold n uninspected devices from the other shuttle, and one of the measurement hands is a device to the inspection socket. Supplying the inspection socket after supplying
In a state where 2n devices are supplied onto the inspection socket, the inspection is performed by pressing 2n devices with n suction and pressing mechanisms and n pressing mechanisms of the other measuring hand.
A device inspection method characterized by comprising:

Images