CN103293426B - Inspection device for components - Google Patents

Abstract

The open inspection device for components of the present invention is it is characterised in that include：Loading unit, loads the more than one pallet loading multiple element；Load buffer part, by loading the element of the pallet reception and registration from described loading unit for the transfer instrument reception and being loaded temporarily；Test department, receives to execute test from the described element loading buffer part reception and registration；Unloading buffer part, centered on described test department, be arranged at described load buffer part to position, to receive by described test department complete test element；Uninstalling portion, according to the test result of described test department, carries out classification loading by unloading transfer instrument to the element being loaded into described unloading buffer part；More than one element pressurizing tool, comes for transferring element between described loading unit, described test department and described uninstalling portion.

Description

Inspection device for components

Technical field

The present invention relates to inspection device for components, it is the element testing being related to detect the electrical characteristic to element in more detail Device.

Background technology

Semiconductor element (below, referred to as " element "), after completing packaging process, can detect dress by semiconductor element Put to carry out electrical characteristic, for heat or pressure reliability detection etc. multiple detections.

For the detection of element, can be according to memory cell；And as CPU (Central Processing Unit), GPU The non-memory element of (Graphic Processing Unit) etc.；LED element；The species of the elements such as photoelectric cell is carrying out Multiple detections such as the room temperature detection of execution under room temperature environment, the heating detection executing in high temperature environments.

On the other hand, the species with IT elements such as smart mobile phone, Intelligent flat computer, intelligent TV become varied and Popular, the such as non-memory element of CPU etc., i.e. the need of LSI (Large Scale Integration, large scale integrated circuit) Ask and increase severely.

But, LSI because its a small amount of multi items characteristic, compared to the detection means of standardized memory cell because The problem that amount detection is little and there is the detection means of costliness difficult to use.

Content of the invention

(technical problem to be solved)

The present invention proposes to solve the problems, such as conventional art as above, its object is to provide element testing Device, LSI element perform detection that can rapidly to a small amount of multi items, and the LSI element of multiple species can be detected.

Additionally, another object of the present invention is to providing inspection device for components, can execute for selection element exactly Carry out the movement of horizontal direction of element pressurizing tool and the movement of vertical direction to testing jack pressurization.

Additionally, the another object again of the present invention is to provide inspection device for components, it constitutes the maintenance easily carrying out part, Thus reducing maintenance expense for significantly reducing the production cost of element.

Additionally, the another object again of the present invention is to provide inspection device for components, can set exactly and confirm to be used for Selection element carrys out the pressing position of the element pressurizing tool to testing jack pressurization.

(means of solve problem)

In order to reach object indicated above, inspection device for components according to an embodiment of the invention, can include：Load Portion, loads the more than one pallet loading multiple element；Load buffer part, received from described loading by loading transfer instrument The element of pallet reception and registration in portion is simultaneously loaded temporarily；Test department, receives to execute from the described element loading buffer part reception and registration Test；Unloading buffer part, centered on described test department, be arranged at described load buffer part to position, to receive logical Cross the element that described test department completes to test；Uninstalling portion, according to the test result of described test department, by unloading transfer instrument pair The element being loaded into described unloading buffer part carries out classification loading；More than one element pressurizing tool, in described loading unit, institute State and come for transferring element between test department and described uninstalling portion.

Additionally, inspection device for components according to an embodiment of the invention, can include：Loading unit, loads and loads multiple units The more than one pallet of part；Test department, including multiple testing jacks, it is right that the element passed on from described loading unit for reception comes Each element is tested；Uninstalling portion, according to the test result of described test department, carries out classification dress to the element completing to test Carry；More than one transfer instrument, transfers element, described shifting between described loading unit, described test department and described uninstalling portion Send instrument to include multiple Choosers, be combined with adsorption plate in end respectively, the transfer work of at least in described transfer instrument Tool includes adsorption plate replacement portion, automatically replaces the described adsorption plate being bonded respectively on described Chooser.

Additionally, inspection device for components according to an embodiment of the invention, can include：Loading unit, loads and loads multiple units The more than one pallet of part；Test department, including multiple testing jacks, it is right that the element passed on from described loading unit for reception comes Each element is tested；Uninstalling portion, according to the test result of described test department, carries out classification dress to the element completing to test Carry；More than one transfer instrument, transfers element between described loading unit, described test department and described uninstalling portion, acceptable Including cleaning section, it is arranged at the side of described test department, for spraying in the state of covering described testing jack by mobile Penetrate air to remove the foreign body in described testing jack.

Additionally, according to the inspection device for components of the present invention, can include：Loading unit, loads multiple element；Test department, tool It is ready for use on the multiple testing jacks to the element execution test coming from the transfer of described loading unit；Uninstalling portion, according to test result The element completing to test in described test department is classified；More than one pick portion, by pass on from described loading unit Element is transferred to described test department side, and the element passed on from described test department is transferred to described uninstalling portion side, described picks Portion, can include：Pick plate, for carrying described element；Plate fixed part, described pick plate removable handling be hereby incorporated by；Plate Handling part, is arranged at described plate fixed part, and described plate of picking is fixed on described plate fixed part.

Additionally, inspection device for components according to an embodiment of the invention, can include：Loading unit, loads and loads multiple units The more than one pallet of part；Test department, including multiple testing jacks, it is right that the element passed on from described loading unit for reception comes Each element is tested；Uninstalling portion, according to the test result of described test department, carries out classification dress to the element completing to test Carry；More than one transfer instrument, transfers element, described shifting between described loading unit, described test department and described uninstalling portion Send instrument to include a pair of element pressurizing tool, element is communicated to described test department or by element from described survey from described loading unit Examination portion is communicated to described uninstalling portion, and described element pressurizing tool can include：Support sector, is movably configured；One with On selection module, be releasably incorporated into described support sector, and be combined with more than one Chooser.

Inspection device for components according to an embodiment of the invention, can include：Loading unit, loads multiple element；Test department, Possess multiple testing jacks, for test is executed to the element coming from the transfer of described loading unit；Uninstalling portion, according to described test The test result in portion, carries out classification to the element completing to test and loads；Element pressurization part, chooses described element and comes to described test Socket pressurizes, and described element pressurization part can include：More than one element pressurizing tool, chooses described element and by linear For movement, described element moves to pressing position and pressurizes to described testing jack；Horizontally moving device, is added with described element Pressure instrument connects described element pressurizing tool movement to described testing jack；First vertical movement apparatus, according to described convex Wheel component, described element pressurizing tool is vertically moved to pressing position.

Additionally, inspection device for components according to an embodiment of the invention, can include：Loading unit, loads multiple element；Survey Examination portion, possesses multiple testing jacks, for executing test to the element coming from the transfer of described loading unit；Uninstalling portion, according to institute State the test result of test department, classification is carried out to the element completing to test and loads；More than one pick portion, will be from described loading The element that portion passes on is transferred to described test department side, and the element passed on from described test department is transferred to described uninstalling portion side； More than one loading transfer instrument, in described loading unit, selection element picks portion to pass on to described；More than one unload Carry transfer instrument, pick selection element in portion and to pass on to described uninstalling portion described；More than one element pressurizing tool, Described pick selection element in portion to pressurize to described testing jack, and will complete to test by thinking that described testing jack pressurizes Element pass on and pick portion to described, described element pressurizing tool includes：Support sector, is movably configured；More than one Selection module, be releasably incorporated into described support sector, and be combined with more than one Chooser, described support sector and described The side choosing module can possess fastening unit, described support sector and the institute having the described support sector of fastening and described selection module State the opposite side choosing module, described support sector can possess have and support the described supporter choosing module.

Additionally, inspection device for components according to an embodiment of the invention, can include：Loading unit, loads multiple element；Survey Examination portion, possesses multiple testing jacks, for executing test to the element coming from the transfer of described loading unit；Uninstalling portion, according to institute State the test result of test department, classification is carried out to the element completing to test and loads；More than one element pressurizing tool, possesses choosing Take the Chooser of described element, choose described element to pressurize to described testing jack, described element pressurizing tool can possess Heating part, heats to the described element chosen according to described Chooser.

Additionally, inspection device for components according to an embodiment of the invention, can include：Loading unit, loads multiple element；Survey Examination portion, possesses multiple testing jacks, for executing test to the element coming from the transfer of described loading unit；Uninstalling portion, according to institute State the test result of test department, classification is carried out to the element completing to test and loads；Element pressurization part, including more than one element Pressurizing tool and the first vertical movement apparatus, described element pressurizing tool chooses described element and by described for linearly moving Element moves to pressing position and pressurizes to described testing jack, and described first vertical movement apparatus will be described by cam part Element pressurizing tool is linearly moved to pressing position；Second vertical movement apparatus, make described element pressurization part for described test Portion is linearly moved；Control unit, makes described element pressurizing tool and described test by described second vertical movement apparatus During portion's contact, detect the load that applies by described second vertical movement apparatus to described test department, and by the load detecting Reach setting baseline load when the position of described element pressurizing tool be determined as pressing position.

(The effect of invention)

Inspection device for components according to an embodiment of the invention, has and can quickly the LSI element of a small amount of multi items be held Row detection the advantage that the LSI element of multiple species can be detected.

Additionally, inspection device for components according to an embodiment of the invention, be used for moving in the vertical direction, selection element come to First vertical movement apparatus of the element pressurizing tool of testing jack pressurization include cam part, by the rotation of cam part Transfer and so that element pressurizing tool is moved in the vertical direction, thus having the vertical direction that can set element pressurizing tool exactly On shift position advantage.

Additionally, inspection device for components according to an embodiment of the invention, it is configured to easily carry out the maintenance of device, thus having Have the advantages that by the maintenance expense of reduction device for significantly reducing the production cost of element.

Additionally, inspection device for components according to an embodiment of the invention, selection element carrys out the element to testing jack pressurization By possessing, the support sector being movably configured with being releasably incorporated into described support sector and is combined with one to pressurizing tool The more than one selection module of individual above Chooser, thus have the advantages that element pressurizing tool is easily safeguarded.

Additionally, inspection device for components according to an embodiment of the invention, by arranging heater and for described temperature Sensor carries out more than one first adapter that power supply supply and signal are passed on, thus propping up in composed component pressurizing tool Hold portion and choose module when combining, be automatically connected with the second adapter being arranged at support sector, thus have without the need for power supply Supply and signal pass on other connections operation come to make device manufacturing machine maintenance become easy advantage.

Additionally, inspection device for components according to an embodiment of the invention, for test department and load the unit between buffer part The plate of picking that the element replacement between test department and uninstalling portion was replaced or be used for part is configured to, and can pass through the simple of plate handling part Action to be loaded and unloaded in plate fixed part, thus having the species in the element as detection object, particularly element is big During little change, can easily replace the advantage picking plate disposing element.

Additionally, inspection device for components according to an embodiment of the invention, by selection element come to testing jack pressurization The Chooser of element pressurizing tool on possess heating part come to choose element heat, thus element not only can be entered Row promptly heating and so that element temperature drop minimize, thus have can exactly executive component detection Advantage.

Additionally, inspection device for components according to an embodiment of the invention, compared in order to replace adsorption plate and arresting stop Operation carrying out restarting the conventional art of device after the replacement of manual work again because additional, possess can be from selection The adsorption plate replacement portion of adsorption plate replaced automatically by device, thus have to greatly promote the productive advantage of equipment.

Additionally, inspection device for components according to an embodiment of the invention, include cleaning section by adding, be arranged at test department Side, for by mobile come in the state of covering described testing jack injection air remove in described testing jack Foreign body, thus prevent from existing foreign body in testing jack and leading to test errors or cannot be carried out test job, thus have big The advantage of big lifting device performance.

Brief description

Fig. 1 is the plane graph being schematically illustrated the inspection device for components according to the present invention.

Fig. 2 is loading buffer part and the plate member unloading buffer part in the component detection device be schematically illustrated Fig. 1 The plane graph of.

Fig. 3 is first to pick the sectional view that portion and second picks portion in the component detection device be schematically illustrated Fig. 1.

Fig. 4 is to be schematically illustrated the first of Fig. 3 and pick portion and second to pick in portion, will pick plate and be fixed on plate fixed part Disk handling part axonometric chart.

Fig. 5 and Fig. 6 illustrates that the skeleton diagram of the action of plate handling part.

Fig. 7 is the sectional view of the cleaning section of the inspection device for components being schematically illustrated Fig. 1.

Fig. 8 is the plane graph of the cleaning section of the inspection device for components being schematically illustrated Fig. 1.

Fig. 9 is the sectional view being schematically illustrated the element pressurizing tool possessing the inspection device for components in Fig. 1.

Figure 10 is the exploded perspective view representing the Chooser possessing the element pressurizing tool in Fig. 9.

Figure 11 is the axonometric chart of the support sector of element pressurizing tool of diagram Fig. 9.

Figure 12 is the axonometric chart of the selection module of element pressurizing tool of diagram Fig. 9.

Figure 13 illustrates that in the element pressurizing tool of Fig. 1, combines the section view of the action choosing module in support sector Figure.

Figure 14 is the sectional view of another that diagram possesses the element pressurizing tool of inspection device for components in Fig. 1.

Figure 15 is the partial sectional view representing the element pressurizing tool expanding Figure 14.

Figure 16 and Figure 17 is that diagram is used in the horizontal direction and vertical direction movement possesses the inspection device for components in Fig. 1 The horizontally moving device of element pressurizing tool and the skeleton diagram of the first vertical movement apparatus.

Figure 18 is to be schematically illustrated for moving the element pressurization possessing the inspection device for components in Fig. 1 in the horizontal direction The cross-sectional view of the horizontally moving device of instrument.

Figure 19 is to be schematically illustrated for moving in the vertical direction the element pressurization possessing the inspection device for components in Fig. 1 The longitudinal section of the first vertical movement apparatus of instrument.

Figure 20 is in the inspection device for components of diagram Fig. 1, for setting the structure of the pressing position of element pressurizing tool Skeleton diagram.

Figure 21 is the partial sectional view representing in the structure expanding Figure 20.

Figure 22 is the axonometric chart for the automatic adsorption plate replacement portion of adsorption plate replacing Chooser for the diagram, described Chooser Adsorption plate be arranged at loading transfer instrument, unloading transfer instrument or the element pressurizing tool that the inspection device for components of Fig. 1 possesses On.

Figure 23 to Figure 25 is the broken section that diagram replaces the adsorption plate replacement portion of the process of adsorption plate of Chooser automatically Figure, the adsorption plate of described Chooser be arranged at the loading transfer instrument that the inspection device for components of Fig. 1 possesses, unloading transfer instrument or On element pressurizing tool.

Figure 26 to Figure 27 is the part plan that diagram replaces the adsorption plate replacement portion of the process of adsorption plate of Chooser automatically Figure, the adsorption plate of described Chooser be arranged at the loading transfer instrument that the inspection device for components of Fig. 1 possesses, unloading transfer instrument or On element pressurizing tool.

(description of reference numerals)

1：Element 310：Testing jack

610：First picks portion 620：Second picks portion

611、621：Guide rail 612,622：Pick plate

613rd, 623 plate fixed part 614,624：Plate handling part

801：Horizontally moving device 802：First vertical movement apparatus

805：Second vertical movement apparatus 807：Control unit

830、840：Element pressurizing tool 830b, 840b：Connection member

830g、840g：Cam part 833,843：Support sector

834、844：Choose module 850：Fastening unit

860：First supporter 870：Second supporter

880：Position determining means 889：Inductive transducer

891：Bonded block 892：Adsorption plate

893：Guiding parts 894：Jet

895：Hot gas stream 896：Hot gas feeder

Specific embodiment

With reference to the accompanying drawings the inspection device for components according to one embodiment of the invention is illustrated.

As shown in figure 1, inspection device for components according to an embodiment of the invention, can include：Loading unit 100, loads many Individual element 1；Test department 300, tests to the element 1 passed on from loading unit 100；Uninstalling portion 500, according to test department 300 Test result, carries out classification and loads to element 1.

The object elements 1 of test can be to remember quasiconductor or as CPU (Central Processing Unit), GPU The non-memory element of (Graphic Processing Unit), system LIS (Large Scale Integration) etc..Element 1 can be non-memory element, and particularly, bottom surface is formed with the element of the contact terminal of spherical shape.

The method transferring element 1 between loading unit 100, test department 300 and uninstalling portion 500, can be by multiple methods To execute.

Loading unit 100 and uninstalling portion 500, as the structure loading the more than one pallet 2 loading multiple element 1, root Can be various structures according to design.Tray loading portion (not shown) can be arranged on loading unit 100 and uninstalling portion 500, to load Multiple pallets 2.

For example, loading unit 100 can suitably dispose multiple pallets 2, element 1 seriality is chosen and moved Send.Additionally, the pallet 2 of unloaded element 1 can be replaced with the pallet 2 of loading member 1.For example, it is possible to by certain batch Pallet 2 automatic or manual is loaded into tray loading portion.

In loading unit 100, empty pallet 2 after extraction elements 1, unloading can be transplanted on by pallet communication portion (not shown) Portion 500.Additionally, empty pallet 2 is before being transplanted on uninstalling portion 500, pallet 2 can be rotated pallet inversion portion (not shown) (reversion), to remove the element 1 not yet drawn from pallet 2.

On the other hand, uninstalling portion 500, structure can be similar with loading unit 100.For example, in uninstalling portion 500, can will be many Individual empty pallet 2 is suitably disposed according to classification grade, so that element 1 divides according to test result with entering Line Continuity Class loads.In uninstalling portion 500, the pallet 2 loading the element 1 being completed can be replaced with empty pallet 2.

Additionally, between loading unit 100 and uninstalling portion 500, the interim pallet buffer portion loading empty pallet 2 of setting can be added (not shown), loads empty pallet 2 during arriving.

Multiple accepting groove 2a are formed with pallet 2, to load multiple element 1.For example, multiple accepting groove 2a can be in pallet Be formed as 8 × 16 ranks in 2.

As shown in Figures 1 and 2, can be provided between loading unit 100 and test department 300 loading from loading unit temporarily The loading buffer part 200 of the element 1 that 100 pallet 2 is passed on, to increase the screen of element 1 or multiple element 1 is carried out Fully heat.Additionally, can possess between test department 300 and uninstalling portion 500 being tested by test department 300 for interim loading The unloading buffer part 400 of the element 1 completing, to increase the screen of element 1.Thus, as the element 1 of test object, can It is transplanted on test department 300 to be transplanted on after loading buffer part 200 is loaded from loading unit 100 temporarily, the element being completed 1, can be transplanted on after unloading buffer part 400 is loaded from test department 300 temporarily be transplanted on uninstalling portion 500.

Particularly, load the support that buffer part 200 and unloading buffer part 400 are compared to the element 1 loading relatively small number Disk 2, can load relatively greater number of element 1.

As shown in Fig. 2 loading unit 100 and uninstalling portion 500, can include：The plate member 210,410 of plate shape, above shape Become to have multiple loading chutes 211,411, to load multiple element 1.

Load buffer part 200 and the plate member 210,410 of unloading buffer part 400, there is mutually almost identical structure.Only Be, testing element 1 and need when being heated (preheating), the plate member 210 of loading buffer part 200 can be added just like heater Heater.

Load the loading chute 211,411 of the plate member 210,410 of buffer part 200 and unloading buffer part 400, survey can be corresponded to The interval of the testing jack 310 in examination portion 300 is being arranged, or the interval of the accepting groove 2a of corresponding pallet 2 is being arranged.

For example, the accepting groove 2a of pallet 2 interval with load buffer part 200 and unloading buffer part 400 plate member 210, The interval of 410 loading chute 211,411 is identical, and the detection of the testing jack 310 of test department 300 can be with pallet 2 accepting groove 2a N times of interval, for example, 2 times forming.

Plate member 210,410, enters the alternate structure of units as interim loading member 1 and test department 300, can To be configured or to be movably configured etc. various structures with fixing state in the inside of inspection device for components.

As shown in figure 1, test department 300, for testing to from the element 1 loading buffer part 200 reception and registration, according to test Species can be various structures.The multiple testing jacks 310 being pressurizeed by element 1 are provided with test department 300.For example, multiple Testing jack 310 possesses the terminal being connected with power supply, is pressurized to the process of terminal, the energising to element 1 for the execution by element 1 Test.

Testing jack 310 can be disposed with multiple ranks such as 8 × 2,8 × 4.Testing jack 310, first as connecting To enter the test structure of units 1 between part 1 and terminal, can be various structures.This testing jack 310, can be according to unit The species of part, test approaches etc. are being replaced.

On the other hand, test department 300, can be the absolute construction of testing jack 310 and remaining structural module, make Can be realized by the pcb board of setting testing jack 310 for simple structure.Particularly, test department 300, by setting testing jack When 310 pcb board is realized, testing jack 310 can be characterized such that it is able to significantly reduce according to each test The construction expenditure of relatively costly test department 300.

On the other hand, multiple tests can be executed in test department 300.More preferably, test department 300 is configured to can be in room The structure at a temperature of temperature is above, element 1 tested.

Test department 300, when carrying out the test related to temperature such as high temperature test, can in its periphery setting room part, To wrap up a part of region including testing jack 310, to minimize temperature change.

On the other hand, between test department 300 and loading buffer part 200 or between test department 300 and unloading buffer part 400 Element exchanges, and compared to directly carrying out, but by picking portion 610,620, will move from loading the element 1 that buffer part 200 passes on Deliver to test department 300 side, the element 1 passed on from test department 300 is moved to unloading buffer part 400 side.Picking portion 610,620 is For carrying out between the element exchange between test department 300 and loading buffer part 200 or test department 300 and unloading buffer part 400 Element exchange structure, can be various structures.

For example, as shown in Figures 1 and 3, pick portion 610,620, can include：First picks portion 610, is adding for receiving First element of the element 1 that load portion 100 passes on is passed on position, is exchanged position for being entered the element of units 1 exchange with test department 300 Put and move for passing on the second element of element 1 to pass between position to uninstalling portion 500；Second picks portion 620, with Pass on position, the unit for entering units 1 exchange with test department 300 in the first element receiving the element 1 that loading unit 100 is passed on Part exchange position and for uninstalling portion 500 pass on element 1 second element pass on position between move.Herein, first Element passes on position, element exchange position and the second element to pass on position, and the structure according to device can carry out diversified Dispose, and can dispose successively along straight line.

First picks portion 610 and second picks portion 620, between the testing jack 310 of test department 300, is placed in test The both sides of socket 310.First picks portion 610 and second picks portion 620, can include：Guide rail 611,621, with test department 300 be Center is configured to ground；The more than one of loading member 1 picks plate 612,622, carries out level shifting along guide rail 611,621 Dynamic, thus be alternately displaced into passing on position and test for receiving the first element loading the element 1 that buffer part 200 is passed on The element exchange position in portion 300 and the second element being used for passing on element 1 to unloading buffer part 400 are passed between position；Plate is solid Determine portion 613,623, be releasably combined with and pick plate 612,622, and be set to move along guide rail 611,621.

Guide rail 611,621, as the structure picking plate 612,622 movements for guiding, can be various structures.

Pick plate 612,622, be formed with the more than one component positioning groove disposing element 1, to be used for carrying out test department Element between element exchange between 300 and loading buffer part 200 or test department 300 and unloading buffer part 400 exchanges.

Plate fixed part 613,623, the structure arranging to pick the alternately convenient of plate 612,622, can be multiple knots Structure, and can possess heater for heating element heater 1 etc..Pick plate 612,622, be releasably arranged at plate fixed part 613, 623, therefore in the species of the element 1 as detection object, particularly, element 1 of different sizes when, element can be alternately placed 1 pick plate 612,622.

Plate fixed part 613,623, possesses and has plate handling part 614,624, will pick plate 612,622 and be removably secured to plate Fixed part 613,623.Plate handling part 614,624, as the knot for picking plate 612,622 in plate fixed part 613,623 handling Structure, can be various structures, be configured to carry out by simple manual work picking the handling of plate 612,622.

For example, as shown in Figs. 4-6, plate handling part 614,624, can include：Support 614a, 624a, are fixed on plate solid Determine portion 613,623；Fixed body 614b, 624b, can by first axle axle 614c, the 624c possessing in support 614a, 624a Rotatably it is attached, and selectively plate 612,622 is picked in fixation according to rotation；Elastomer 614d, 624d, by described fixed body 614b, 624b elasticity is supported in first axle axle 614c, 624c；Press body 614i, 624i, are contacted with fixed body 614b, 624b, And be formed as curved surface that fixed body 614b, 624b are pressurizeed with the pressurized plane of fixed body 614b, 624b；Moving body 614e, 624e, is connected with press body 614i, 624i, and being set in the inside of support 614a, 624a can along the vertical direction (Z-direction) Move；Handle 614g, 624g, be pivotably coupled to possess moving body 614e, 624e second hinge axle 614f, 624f；Fixed hook 614h, 624h, are arranged at support 614a, 624a, are hung on the end of handle 614g, 624g and fix.

Fixed body 614b, 624b are formed as, probably with the shape of alphabetical "L" shaped bending, by the part contact of bending To make to pick plate 612,622 in the turning picking plate 612,622 and to be fixed on plate fixed part 613,623.

Elastomer 614d, 624d, can enumerate and use torsion spring.

Hook 614h, 624h, are preferably formed into, and are handle 614g, the 624g being rotated according to operator, to be hung on handle The end of 614g, 624g degree that is fixing or releasing the state of end being hung on handle 614g, 624g.

According to this structure, the displacement according to handle 614g, 624g and move along the vertical direction moving body 614e, 624e, press body 614i, 624i can move along the vertical direction, and thus, the posture of fixed body 614b, 624b can edge and fixed body The curve form change of the pressurized plane of press body 614i, 624i of 614b, 624b contact.The posture of fixed body 614b, 624b becomes When more, due to the elastic force of elastomer 614d, 624d, the posture of fixed body 614b, 624b can keep certain.

Additionally, the movement along the vertical direction of moving body 614e, 624e, can be according to second hinge axle 614f, 624f Centered on handle 614g, 624g of rotating executing.On the other hand, handle 614g, 624g is hung on fixed hook 614h, 624h When, the rotation of handle 614g, 624g can be limited, thus, the vertically side of moving body 614e, 624e and press body 614i, 624i To mobile meeting limited by, thus it can be prevented that any change of the posture of fixed body 614b, 624b.

As shown in figure 5, pick plate 612,622 according to fixed body 614b, 624b fixing in the state of, by handle 614g, 624g is centered on second hinge axle 614f, 624f to the direction (side clockwise in Fig. 5 departing from fixed hook 614h, 624h To) rotate when, the elastic force of elastomer 614d, 624d can act on press body 614i, 624i and moving body 614e, 624e, from And make press body 614i, 624i and moving body 614e, 624e to lower side to movement, and make to be contacted with fixed body 614b, 624b The pressurized plane of press body 614i, 624i location change, thus, fixed body 614b, 624b can be according to elastomer 614d, 624d Elastic force, centered on first axle axle 614c, 624c to from pick plate 612,622 disengaging direction (clockwise in Fig. 5 Direction) rotation, thus as shown in fig. 6, releasing the fixation picking plate 612,622.

Another invention face, as shown in fig. 6, in the state of the fixing releasing picking plate 612,622, handle 614g, 624g Turned to the direction (counter clockwise direction in Fig. 6) being hung on fixed hook 614h, 624h centered on second hinge axle 614f, 624f Move during being fixed on fixed hook 614h, 624h, press body 614i, 624i and moving body 614e, 624e can be to upsides Direction is moved, and the position being contacted with the pressurized plane of press body 614i, 624i of fixed body 614b, 624b can be changed, so that solid Determine body 614b, 624b can centered on first axle axle 614c, 624c to contact pick plate 612,622 direction (inverse in Fig. 6 Clockwise) rotate, thus, as shown in figure 5, pick plate 612,622 can be fixed according to fixed body 614b, 624b.This Outward, pick plate 612,622 according to fixed body 614b, 624b fixing in the state of, the elastic force of elastomer 614d, 624d can be made For fixed body 614b, 624b, thus it can be prevented that any rotation of fixed body 614b, 624b.

As described above, according to embodiments of the invention, will pick plate 612,622 be removably secured to plate fixed part 613, 623 plate handling part 614,624 is configured to, executed by the simple action of turning handle 614g, 624g pick plate 612, 622 fixation and release fixing structure, thus can have the fixation that can simply and readily execute very much 612,622 and Release the effect of fixing action.

On the other hand, test department 300 is it is possible to can lead to generation cannot enter because flowing into foreign body etc. in testing jack 310 The situation of row test, in this case, was existed in the past and needs to stop inspection device for components, and removed by manual work different Restart numerous and diverse operation of inspection device for components after thing.

It is therefore preferable that for possessing cleaning section 700, being arranged at the side of test department 300, for covering survey by mobile Spray air to remove foreign body in testing jack 310 etc. in the state of examination socket 310.

Cleaning section 700 can have various structures.For example, as shown in Figures 7 and 8, cleaning section 700, can include：Body 710, coverage test socket 310 simultaneously forms clean space on the top of testing jack 310；Drive division 720, is used for making body 710 Move between the top of the side of test department 300 and testing jack 310.

Body 710 conduct, coverage test socket 310 structure in the top of testing jack 310 formation clean space, can Think various structures, can have the various shapes such as bowl shape to form airtight clean space, and can be provided with, air Stream 711, is connected to come with air feeder (not shown) and sprays air to each testing jack 310；And more than one spray Mouth 712, receives the air passed on to spray air to testing jack 310 from air flow circuit 711.

Meanwhile, body 710 can be connected with discharge pipe 713, to make air and the foreign body one spraying by nozzle 712 Discharge to outside with from clean space.

Drive division 720 conduct, for the knot of body 710 mobile between the side of test department 300 and testing jack 310 Structure, can be the various structures such as hydraulic cylinder, pneumatic cylinder.

Herein, first pick portion 610 and second and pick when guide rail 611,621 are possessed on portion 620, cleaning section 700 can set It is placed in first and picks portion 610 and second and pick portion 620, drive division 720 is configured to make body 710 along parallel with guide rail 611,621 Direction carry out linearly moving structure.

On the other hand, can be provided with more than one loading transfer instrument 810,814, loading unit 100 with pick portion 610th, move between 620 and to be communicated to the portion of picking 610,620 from loading unit 100 selection element 1.Feelings as above Under condition, it is configured to, more than one loading transfer instrument 810,814 in loading unit 100 and is picked between portion 610,620 Move the structure to be communicated to the portion of picking 610,620 from loading unit 100 selection element 1.Additionally, as described above, setting In the case of having loading buffer part 200, carrying transfer instrument 810,814 can include：First loading transfer instrument 810, from loading Portion 100 selection element 1 loads buffer part 200 to be communicated to；Second loading transfer instrument 814, chooses unit from loading buffer part 200 Part 1 is being communicated to the portion of picking 610,620.

Furthermore, it is possible to be provided with more than one unloading transfer instrument 820,824, in the portion that picks 610,620 and uninstalling portion Move between 500 and to be communicated to uninstalling portion 500 from the portion that picks 610,620 selection element 1.In the case of as mentioned above, It is configured to, more than one unloading transfer instrument 820,824 is moved between the portion that picks 610,620 and uninstalling portion 500 Move the structure to be communicated to uninstalling portion 500 from the portion that picks 610,620 selection element 1.Additionally, as described above, being provided with unloading In the case of buffer part 400, unloading transfer instrument 820,824 can include：First unloading transfer instrument 820, from unloading buffering Portion 400 selection element 1 is passing to uninstalling portion 500；Second unloading transfer instrument 824, from the portion that picks 610,620 selection element 1 To be communicated to unloading buffer part 400.

Load transfer instrument 810,814 and unloading transfer instrument 820,824 is configured to mutually same or similar knot Structure.Load transfer instrument 810,814 and unloading transfer instrument 820,824 respectively as the structure of transfer element 1, can include： Multiple Choosers, selection element 1；And driving means, for the side of (Z-direction) and the horizontal direction (XY direction) etc. along the vertical direction To mobile multiple Choosers.

Chooser, as the structure to be transplanted on specified location for selection element 1, can be various structures, Ke Yiyou Form the adsorption plate of vacuum pressure and the cylinder passing on air pressure to adsorption plate is constituted above element 1.

Chooser it is contemplated that the interval of accepting groove 2a of the pallet 2 of loading unit 100 and uninstalling portion 500 and load buffer part 200 situations mutually different with the interval of the loading chute 211,411 of plate member 210,410 of unloading buffer part 400, may be constructed Anyhow the structure being spaced for scalable is it is also possible to fixing be spaced to make greater number of semiconductor element 1 be moved anyhow Send.

The driving means of mobile multiple Choosers, the drive scheme according to Chooser can be various structures, and its structure can To include：Move up and down device, be used for moving up and down Chooser；And move left and right device, it is used for moving left and right Chooser.Up and down Mobile device can for making the structure that all Choosers jointly move up and down, or with each Chooser individual carry out Connecting to make each Chooser independently move up and down.Move left and right device, according to the mobile scheme of Chooser, Ke Yiwei Various structures, can in X direction or Y-direction the structure of single direction movement or can be along the structure of X-Y direction movement.

On the other hand, element pressurizing tool 830,840 can be provided with, in test department 300 and pick between portion 610,620 Move, and to pressurize to testing jack 310 from the portion that picks 610,620 selection element 1, and will carry out in testing jack 310 Pressurization is passed on to the portion that picks 610,620 come the element to complete to test.Element pressurizing tool 830,840 conducts, in test department 300 and first pick between portion 610 and test department 300 and second pick between portion 620 transfer element structure, according to element 1 Transfer scheme, can be various structures.Element pressurizing tool 830,840, can include：First element pressurizing tool 830, First picks to move between portion 610 and test department 300 and picks portion 610 selection element and pressurize to testing jack from first 310, and will pass on and pick portion to first in testing jack 310 element to complete testing that carries out pressurizeing；Second element pressure H Tool 840, picks to move between portion 620 and test department 300 second and picks portion 620 selection element 1 and pressurize from second To testing jack 310, and will pass on and pick portion 620 to second in testing jack 310 element to complete testing that carries out pressurizeing.As Upper described, when element pressurizing tool 830,840 is configured to a pair, for the facility of element exchange, a pair of element pressurizing tool 830th, 840 can mutually move in linkage.

For example, as shown in Fig. 9 to Figure 15, element pressurizing tool 830,840, can have with load transfer instrument 810, 814 and unloading the mutually same or similar structure of transfer instrument 820,824.Element pressurizing tool 830,840, can include choosing Multiple Choosers 831,841 of element 1.

On the other hand, exchange to easily perform the element between plate member 210,410 and test department 300, plate member 210th, the interval between 410 loading chute 211,411 can be formed as the Chooser 831,841 of element pressurizing tool 830,840 Interval 1/n, for example formed as 1/2.Herein, n is more than 2 natural number.

Particularly, the loading chute 211,411 of the plate member 210,410 of unloading buffer part 400 is arranged as 16 × 8, test department When 300 testing jack 310 is arranged as 8 × 4, element pressurizing tool 830,840, can include with the survey corresponding to test department 300 The interval of examination socket 310 is arranged as 8 × 4 Chooser 831,841, such that it is able to the element 1 of disposable transfer 8 × 4.Especially It is that, in order to transfer greater number of semiconductor element 1, the Chooser of the first loading transfer instrument 810 is arranged as 8 × 4 (8 × 2), when, the Chooser 831,841 of element pressurizing tool 830,840 can be arranged as 8 × 4 (8 × 2).

Additionally, element pressurizing tool 830,840, by the loading chute of the plate member 210,410 in unloading buffer part 400 211st, in 411, element 1 is made to be derived or load with being spaced lattice, thus the interval that need not carry out between Chooser 831,841 is adjusted Section, more quick such that it is able to make element transfer.

On the other hand, element pressurizing tool 830,840 is necessary species according to element 1, size etc. and carries out Chooser 831st, 841 replacement.

Therefore, as shown in Fig. 9 to Figure 15, element pressurizing tool 830,840, can include：Support sector 833,843, removable It is arranged on the inside of inspection device for components dynamicly；More than one selection module 834,844, is releasably incorporated into support sector 833rd, 843, and it is combined with more than one Chooser 831,841.

Support sector 833,843, as long as can support to choose the structure of module 834,844, can be any structure.Support Can possess in portion 833,843 and have first support plate 833a, 843b that downside is plane, to make the selection module 834,844 can Handling it is fixed.

Choose module 834,844, can include：Second support plate 835,845, has upper side, and adherence is in the first support The downside of plate 833a, 843b；Antivibrator 839,849, is incorporated into the second support plate 835,845；Heating module 838,848, knot Together in antivibrator 839,849；Chooser support module 836,846, is incorporated into heating module 838,848；Chooser 831,841, It is fixed on Chooser support module 836,846.

As shown in Figure 10, Chooser 831,841 can be by being fixed on the knot of the hollow of Chooser support module 836,846 Close part 891 to constitute with the adsorption plate 892 of the hollow of the end being releasably incorporated into bonded block 891.Adsorption plate 892 is permissible Form the protuberance 892a of the outer peripheral face more protrusion than bonded block 891.Bonded block 891, can by guide member 893 Handling ground is fixed on Chooser support module 836,846.This Chooser 831,841, in bonded block 891 and adsorption plate 892 In conjunction with the state of possess in choose module 834,844.Adsorption plate 892, by bonded block 891 with suction passage 899 even Connect.Adsorption plate 892, can be made up of the pliability material of rubber, synthetic resin etc..

Antivibrator 839,849, pressurizes to during testing jack 310 in element 1, plays regulating element 1 and test is inserted While the effect of contact force of mouth 310, play the effect buffering to choosing the power that module 834,844 applies.For example, antivibrator 839th, 849, can include：Room 839d, 849d, are internally formed certain space, and are formed with the air pressure passageway with space UNICOM 839c、849c；Elastica 839a, 849a, is placed in the inside of room 839d, 849d；Pressure-producing part 839b, 849b, by heating Module 838,848 is connected with Chooser 831,841, elastica 839a, 849a is pressurizeed.According to this structure, by air pressure Path 839c, 849c to room 839d, 849d inner space acting pneumatic when, elastica 839a, 849a can elastic deformation come right The pressure of pressure-producing part 839b, 849b effect regulation.Thus, the air pressure according to the inside acting on room 839d, 849d and elasticity The elasticity of film 839a, 849a and when so that element 1 is pressurizeed to testing jack 310, determine the contact for testing jack 310 for the element 1 Power.Additionally, according to the air pressure of the inside acting on room 839d, 849d and the elasticity of elastica 839a, 849a, by acting on The pressure of pressure-producing part 839b, 849b and so that element 1 is pressurizeed to during testing jack 310, to be applied to choose module 834, 844 power enter row buffering.

On the other hand, element pressurizing tool 830,840 possesses multiple selection module 834,844 when, act on room 839d, The air pressure of the inner space of 849d, can be adjusted to mutually different according to multiple selection modules 834,844.That is, using multiple Choose module 834,844 and multiple element 1 is pressurizeed to during multiple testing jacks 310, how several element 1 needs with equal Even contact force is pressurized to multiple testing jacks 310, and could multiple element 1 be executed with uniform test simultaneously.But, Duo Gexuan The specification of delivery block 834,844, i.e. for example, the position of Chooser 831,841, the elastic force of elastica 839a, 849a, assembling Tolerance, degree of aging of part etc. cannot affirm that unanimously, therefore multiple element 1 is possible to unevenly to pressurize to testing jack 310.Therefore, according to multiple selection modules 834,844, the air pressure of the inner space acting on room 839d, 849d is carried out individually Property ground adjust, according to multiple choose modules 834,844 specifications air pressure is adjusted with carrying out individual, thus can make multiple Element 1 is pressurized to multiple testing jacks 310 with uniform contact force.

On the other hand it is contemplated that choosing, in module 834,844, the antivibrator 839,849 being run by air pressure is set, Hold and could be formed with air pressure connecting path 833b, 843b, 835b, 845b, with resistance in portion 833,843 and selection module 834,844 Air pressure passageway 839c, 849c of Buddhist nun's device 839,849 connects.This air pressure connecting path 833b, 843b, 835b, 845b, can wrap Include：First air pressure connecting path 833b, 843b, is formed at first plate 833a, 843a of support sector 833,843, with outside gas Pressure source of students is (not shown) to be connected；Second air pressure connecting path 835b, 845b, is formed at the second plate choosing module 834,844 835th, 845, to make air pressure passageway 839c, 849c UNICOM of first air pressure connecting path 833b, 843b and antivibrator 839,849. Thus, the extra assignment that air pressure occurring source is connected with air pressure passageway 839c, 849c of antivibrator 839,849 need not be made can to pass through Choose module 834,844 and be incorporated into support sector 833,843, so that air pressure passageway 839c, 849c of antivibrator 839,849 is automatically connected Connect.

Chooser support module 836,846, as the part supporting Chooser 831,841, could be formed with suction passage 899, come adsorption plate 892 UNICOM with Chooser 831,841.

Suction passage 899, is connected the function to play the path sucking air with vacuum pressure source of students (not shown), according to Air is sucked by suction passage 899, adsorption plate 892 could be formed with negative pressure, suction can be adsorbed in by this negative pressure element 1 Attached plate 892.This suction passage 899 can be formed at the inside choosing module 834,844, but the present invention is not limited to This, suction passage 899 can be made up of the independent pipe being connected with adsorption plate 892.

On the other hand being provided with Chooser support module 836,846 it is contemplated that choosing in module 834,844, having and inhaling Could be formed with vacuum pressure in the suction passage 899 of attached plate 892 UNICOM, support sector 833,843 and selection module 834,844 to connect Path 833c, 843c, 835c, 845c, to be attached by suction passage 899 and pipe etc..This vacuum presses connecting path 833c, 843c, 835c, 845c, can include：First vacuum pressure connecting path 833c, 843c, is formed at support sector 833,843 First plate 833a, 843a, be connected with outside vacuum pressure source of students (not shown)；Second vacuum pressure connecting path 835c, 845c, is formed at the second plate 835,845 choosing module 834,844, to press connecting path 833c, 843c connection with the first vacuum Logical.Thus, the extra assignment that vacuum pressure source of students is connected with suction passage 899 need not be made can to pass through to choose module 834,844 It is incorporated into support sector 833,843, so that vacuum pressure source of students is certainly dynamically connected with suction passage 899.

Can be provided between antivibrator 839,849 and Chooser support module 836,846, as heating element heater 1 Heating part heating module 838,848 so that test department 300 executes test to element 1 at a certain temperature.Heating module 838th, having heaters 838a, 848a can be set on 848.

When possessing multiple selection module 834,844 on element pressurizing tool 830,840, multiple heater 838a, 848a can To possess respectively in multiple selection modules 834,844.In the case of as mentioned above, multiple heater 838a, 848a can bases Multiple selection modules 834,844 carry out independent control.

As described above, choose module 834,844 on can also possess temperature sensor 838b, 848b, with heater 838a, 848a connect come direct sensing heater 838a, 848a temperature or be connected to other things that heater 838a, 848a are connected Body connects to come the temperature of indirect sensing heater 838a, 848a.Multiple heater 838a, 848a possess respectively in multiple selection moulds During block 834,844, multiple temperature sensor 838b, 848b can possess respectively in multiple selection modules 834,844.Multiple temperature Sensor 838b, 848b, sense the temperature of multiple heater 838a, 848a, according to by multiple temperature sensor 838b, 848b The result of sensing, to control the temperature of multiple heater 838a, 848a.

As described above, each choose module 834,844 all possess heater 838a, 848a and temperature sensor 838b, 848b, according to being sensed by multiple temperature sensor 838b, 848b as a result, it is possible to independently controlled heater 838a, 848a Temperature, thus can according to the characteristic of the multiple element 1 chosen by element pressurizing tool 830,840, independent temperature adjustment come More accurately execute the test for element 1.

Now it is contemplated that choose can arrange in module 834,844 having heaters 838a, 848a or temperature sensor 838b, Second plate 835,845 of 848b, first plate 833a, 843a of support sector 833,843 and selection module 834,844 can be by heat-insulated Material is constituted.Additionally, between heating module 838,848 and antivibrator 839,849 and antivibrator 839,849 and second plate 835, Heat insulating member (not shown) can be provided between 845.Additionally, can be provided with more than one in selection module 834,844 First adapter 91, for heater 838a, 848a or temperature sensor 838b, 848b supply power supply or reception and registration signal.

Additionally, the second adapter 92 can be provided with described support sector 833,843, tying with selection module 834,844 During conjunction, by with the first adapter 91 be combined heater 838a, 848a or temperature sensor 838b, 848b are supplied power supply and Pass on signal.

The terminal of the first adapter 91 and the terminal of the second adapter 92, can be carried out by way of being mutually inserted etc. It is electrically connected to each other, can be various structures.

According to the structure of the first adapter 91 as above and the second adapter 92, connection that can be extra is made Industry, you can by choosing the combination of module 834,844 and support sector 833,843 come to heater 838a, 848a or temperature sensing Device 838b, 848b supply power supply and reception and registration signal.That is, the first adapter 91 and the second adapter 92, is choosing module 834,844 And support sector 833,843 combination when, be arranged at the part contacting with each other, thus choosing module 834,844 and support sector 833rd, 843 certainly it is dynamically connected when be combineding with each other.

On the other hand, for the other examples of the heating part of heating element heater 1, as shown in Figure 14 and Figure 15, element pressure H On tool 830,840, can possess and have hot gas injection unit, to the element 1 injection heating chosen on Chooser 831,841 Gas.By hot gas injection unit, element 1 can be heated from the hot gas sprayed to element 1, thus, can So that high temperature test is executed to element 1.When multiple selection module 834,844 are possessed on element pressurizing tool 830,840, multiple heating Gas injector unit can possess respectively in multiple selection modules 834,844.In the case of as mentioned above, by multiple heating gas The temperature of the hot gas of body injection unit injection, can carry out independent control according to multiple selection modules 834,844.

Hot gas injection unit, can include：Track segment 893, is placed in the periphery of adsorption plate 892, with adsorption plate 892 jets 894 being together formed with injection hot gas；Hot gas stream 895, is connected with hot gas feeder 896, Described hot gas feeder to supply hot gas with jet 894 UNICOM.Hot gas stream 895 can be formed at heating The inside of module 838,848.The shape of heating jet 894 can be formed as, the hot gas that will be sprayed by jet 894 The various shapes spraying to the element 1 being adsorbed in adsorption plate 892.The periphery of adsorption plate 892 is in order to form jet 894, guide rail Part 893, along adsorption plate 892 outer peripheral face separated by a certain interval in the state of, be incorporated into Chooser support module 836,846 To wrap up the periphery of adsorption plate 892.Jet 894, is connected with hot gas feeder 896 by hot gas stream 895. Hot gas stream 895 can be formed at the inside choosing module 834,844, but the present invention is not limited to this, heats gas Body stream 895 can be made up of the independent pipe being connected with adsorption plate 892.

According to structure as above, the adsorption plate 892 of the Chooser 831,841 of element pressurizing tool 830,840 is being inhaled In the state of investing element 1, according to the operation of hot gas feeder 896, from the jet of the periphery being formed at adsorption plate 892 894 injection hot gas, the hot gas of injection collide to make element 1 heat on the element 1 be adsorbed in adsorption plate 892.As Upper described, the heating of element 1 is directly to be executed by hot gas, therefore utilizes heating with selection module 834,844 Device 838a, 848a the situation of element 1 heating is compared, and the heat for heating element heater 1 passes on efficiency to increase, thus not only can Promptly heating element heater 1, and the temperature drop of element 1 can be minimized, thus can make element 1 at a temperature of setting Execution accurately detects.

It is formed with when the jet 894 of hot gas is sprayed in the periphery of adsorption plate 892, choose module 834,844 permissible Be not provided with heater 838a, 848a, thus, it is possible to release for choose module 834,844 setting heater 838a, 848a and the difficulty of the complexity of design that leads to and assembling.Certainly, choose and can be provided simultaneously with adding in module 834,844 Hot device 838a, 848a and hot gas injection unit.

Additionally, element pressurizing tool 830,840, element 1 is being pressurizeed to during testing jack 310, can be from spray Loophole 894 sprays hot gas, and the hot gas of injection collide to make testing jack 310 heat to testing jack 310.As above institute State, the heating of testing jack 310 is directly to be executed by hot gas, therefore with setting heater on testing jack 310 simultaneously The situation to testing jack 310 heating that uses it to is compared, and can release for setting heater on testing jack 310 and lead The complexity of design causing and the difficulty of assembling.

On the other hand, choose and can possess, in module 834,844, the temperature sensor having for sensing heating gas temperature 838b、848b.Thus, it is possible to according to the result being sensed by multiple temperature sensor 838b, 848b, to control and to spray to element 1 The temperature of the hot gas penetrated.Possess respectively in multiple situations choosing module 834,844 in multiple hot gas injection units Under, multiple temperature sensor 838b, 848b can possess respectively in multiple selection modules 834,844.Multiple temperature sensors 838b, 848b sense the temperature of the hot gas that the element 1 choosing module 834,844 selection to each sprays, according to by many Individual temperature sensor 838b, 848b sensing as a result, it is possible to control the temperature of hot gas.

As described above, having hot gas injection unit and temperature to pass because each selection module 834,844 all possesses respectively Sensor 838b, 848b, and according to the result sensing by multiple temperature sensor 838b, 848b, carry out independent control to element 1 Injection hot gas temperature, thus can according to the characteristic of the multiple element 1 chosen by element pressurizing tool 830,840, Independent temperature adjustment more accurately to execute the test for element 1.

The side of support sector 833,843 and selection module 834,844 can possess to be had fastening support sector 833,843 and chooses The fastening unit 850 of module 834,844, to make selection module 834,844 releasably be incorporated into support sector 833,843, supports Portion 833,843 and choose module 834,844 opposite side can possess make selection module 834,844 be supported in support sector 833, 843 the first supporter 860.According to structure as above, support sector 833,843 and choose module 834,844 can be In the state of mutually being supported by the first supporter 860, mutually fastened by fastening unit 850.

Fastening unit 850, can include：Ring 851, is arranged at the side choosing module 834,844；Ring moving parts 852, so that hook 851 is moved along the vertical direction；Ring hook part 853, is arranged at the side of support sector 833,843 to make ring 851 are hung on ring hook part 853.According to structure as above, ring 851 is hung on ring hook part 853, and by using ring Moving parts 852 pulling down rotating ring 851, Lai Shi support sector 833,843 and choose module 834,844 and mutually fasten.

First supporter 860, can include：Convex sheet 861, is choosing the opposite side of module 834,844 with a fixed length Degree protrudes；Convex sheet fixed part 862, is arranged at the opposite side choosing module 834,844 making convex sheet 861 be inserted and fixed. Convex sheet fixed part 862 can be by the first support part 863, in the downside of support sector 833,843, i.e. in the first plate The downside of 833a, 843a is protruded with certain length, thus providing the space of insertion convex sheet 861；Second support part 864, Supported by the first support part 863, and from the downside of support sector 833,843 separated by a certain interval disposed.Second Hold part 864 to be preferably, the face contacting with convex sheet 861 is formed as curved surface, to make convex sheet 861 be easily inserted into support sector 833rd, the space between 843 downside and the second support part 864.Additionally, convex sheet fixed part 862, can include：Elasticity Part 865, elasticity supports the second support part 864；Fixed component 866, elastomeric element 865 is fixed on support sector 833,843. Because by elastomeric element 865 elastic support, therefore convex sheet 861 is easily inserted into support sector to the second support part 864 833rd, the space between 843 downside and the second support part 864.Additionally, convex sheet 861 be inserted into support sector 833, Behind space between 843 downside and the second support part 864, elastomeric element 865 can pressurize to the second support part 864, To make convex sheet 861 firmly fixing, thus not between the downside of support sector 833,843 and the second support part 864 Space departs from.

According to structure as above, it is inserted into downside and second support sector of support sector 833,843 in convex sheet 861 Space between part 864 in the state of being fixed, ring 851 is hung on ring hook part 853, and by using ring moving parts 852, to pull down the simple action of rotating ring 851, can make support sector 833,843 and selection module 834,844 be combined with each other.

On the other hand, support sector 833,843 and choose and preferably possess and have the second supporter 870 in module 834,844, The downside of guiding support sector 833,843 and the upper side choosing module 834,844, i.e. the upper side phase of the second plate 835,845 Mutually adherence, the thus action that be combined with each other of Lai Shi support sector 833,843 and selection module 834,844 is more prone to execute.

Second supporter 870, can include：Protrude bar 871, protrude from the upper side choosing module 834,844, upper Portion forms the head 875 with end-edge part；Head resettlement section 872, caves in the downside of support sector 833,843, to house convex The head 875 of shaping 871；And link plate 873, it is formed with the head patchhole 874 of insertion head 875.Tied according to as above Structure, during support sector 833,843 and selection module 834,844 be combined with each other, head 875 passes through head patchhole 874 It is contained in the inside of head resettlement section 872, moved by the relative level of the selection module 834,844 for support sector 833,843 Dynamic, the end-edge part of head 875 is hung on link plate 873, thus makes selection module 834,844 be supported in support sector 833,843.

Second supporter 870 as above together executes makes support sector 833,843 and selection module 834,844 mutual Fixing effect, therefore, it can only to possess any one structure in the first supporter 860 with the second supporter 870 and is Can.

On the other hand, between support sector 833,843 and selection module 834,844, preferably possesses position determining means 880, determine support sector 833,843 and choose the binding site between module 834,844.

For example, position determining means 880, can include：Protrude rod 881, convex from the upper side choosing module 834,844 Go out；Protrude excellent insertion groove 882, cave in from the downside of support sector 833,843.According to structure as above, in support sector 833rd, 843 and choose during module 834,844 be combined with each other, protrude rod 881 and be inserted into the excellent insertion groove 882 of protrusion, to determine The binding site determined support sector 833,843 and choose module 834,844.

On the other hand, in the state of support sector 833,843 and selection module 834,844 be combined with each other, support sector 833, 843 downside and the mutual adherence of upper side choosing module 834,844.Therefore support sector 833,843 and choose module 834, Preferably possess inductive transducer 889 on 844, to sense the downside of support sector 833,843 and to choose the upper of module 834,844 The mutual adherence of side.In figure although disclosing the structure that inductive transducer 889 is placed in the downside of support sector 833,843, But the present invention is not limited to this, inductive transducer 889 can possess in the upper side choosing module 834,844.Sensing passes The pressure transducer that sensor 889 can be contacted by sensitive surface is constituted.Support sector can be sensed using this inductive transducer 889 833rd, whether the mutual adherence of the upper side of 843 downside and selection module 834,844, senses result according to it and may determine that Whether support sector 833,843 and selection module 834,844 be combined with each other.

Element pressurizing tool 830,840, in the horizontal direction (Y direction) and vertical direction (X-direction) move, come Pick, by being loaded into first, the mobile testing jack 310 to test department of element 1 that portion 610 and second picks portion 620, and will complete The element 1 of test is picked portion 610 and second from testing jack 310 movement to first and is picked portion 620.

For example, as shown in Figure 16 is to 19, possesses horizontally moving device 801, respectively with element pressurizing tool 830,840 even Connect, (Y direction) is mobile in the horizontal direction to make element pressurizing tool 830,840 difference；Possess the first vertical movement apparatus 802, it is connected with element pressurizing tool 830,840 respectively, to make element pressurizing tool 830,840 difference vertically (Z axis side To) mobile.

Horizontally moving device 801, can include：Connection member 830b, 840b, is connected as constraint from element pressurizing tool Moving in supporting axis 830a, 840a horizontal direction that the 830th, 840 vertically extend and make it can carry out in vertical direction Mobile.Horizontal drive portion 803, mobile link part 830b, 840b in the horizontal direction.

Through hole 830c, 840c be could be formed with connection member 830b, 840b, vertically insertion is making supporting axis 830a, 840a insert, so that the movement that supporting axis has in 830,840 vertical direction is restrained and can in the horizontal direction movably It is connected to connection member 830b, 840b.It is inserted into the through hole of connection member 830b, 840b with supporting axis 830a, 840a 830c, 840c, in the horizontal direction of supporting axis 830a, 840a mobile can by connection member 830b, 840b Lai restrained, but The movement being the vertical direction of supporting axis 830a, 840a will not be restrained.Through hole 830c, 840c, simultaneously work as guiding and support The effect of the movement in the vertical direction of axle 830a, 840a.

Horizontal drive portion 803, can include：For example, carry 803a, be connected with connection member 830b, 840b；Belt pulley 803b, has batched band 803a；Electric rotating machine (not shown), is connected with belt pulley 803b.According to structure as above, belt pulley 803b is rotated according to the revolving force of electric rotating machine (not shown), according to the rotation of belt pulley 803b, carry 803a and with band Connection member 830b, 840b that 803a connects can move in the horizontal direction, is thereby coupled to the support of connection member 830b, 840b Axle 830a, 840a and element pressurizing tool 830,840 can move in the horizontal direction.On the other hand, the enforcement according to the present invention Example discloses possesses the structure as horizontal drive portion 803 with 803a and belt pulley 803b, but the present invention is not limited to this, As horizontal drive portion 803, it is possible to use by the executor of hydraulic pressure or air pressure operating, linear electric motors or ball screw device etc. Multiple levels transfer utensil.

First vertical movement apparatus 802, can include：Movable block 830d, 840d, are connected as constraining from element pressurization respectively Moving in supporting axis 830a, 840a horizontal direction that instrument 830,840 vertically extends and make it can be in vertical direction Move；Cam driven section 830e, 840e, are connected to movable block 830d, 840d；Cam part 830g, 840g, are formed with slotting Enter cam path 830f, 840f of cam driven section 830e, 840e；Riser guide 830h, 840h, with movable block 830d, 840d even Connect, to guide the movement in the vertical direction of movable block 830d, 840d.

Movable block 830d, 840d are upper can be provided with guiding rail 830i, 840i, the end with supporting axis 830a, 840a Connect and extend in the horizontal direction to guide the movement in the horizontal direction of supporting axis 830a, 840a.Thus, supporting axis 830a, 840a can carry out the movement of horizontal direction along guiding rail 830i, 840i.

On cam part 830g, 840g, it is connected to motor 830j, 840j, thus, by motor The driving of 830j, 840j makes cam part 830g, 840g be rotated.This cam part 830g, 840g can be respectively with one Element pressurizing tool 830,840 is connected to possess for a pair.

Cam path 830f, 840f, can be formed as including：There are the first radius interval and second radial regions of certain radius Between；Connect the variable interval that the first radius is interval and the second radius is interval.Cam path 830f, 840f have configuration as described above When, when cam driven section 830e, 840e are located at the first radius interval of minor radius, element pressurizing tool 830,840 can be in position State in upside；When cam driven section 830e, 840e are located at variable interval, element pressurizing tool 830,840 meeting sidesway upwards Dynamic or downward side shifting；When cam driven section 830e, 840e are located at the second radius interval that radius is more than the first radius interval, unit Part pressurizing tool 830,840 can maintain the state positioned at downside.

Movable block 830d, 840d, by cam driven section 830e, 840e insert cam path 830f, 840f come with channel parts 830g, 840g connect.Additionally, movable block 830d, 840d can be connected to riser guide 830h, 840h to carry out along the vertical direction Lifting.Thus, when channel parts 830g, 840g rotate, cam driven section 830e, 840e can be along the shapes of cam path 830f, 840f Moving in the vertical direction, thus, movable block 830d, 840d of being connected with cam driven section 830e, 840e can be along vertical for shape Direction is moved, and the element pressurizing tool 830,840 being connected with movable block 830d, 840d by supporting axis 830a, 840a can edge Vertical direction moves.

Riser guide 830h, 840h can be fixed on the fixture 804 that the top of movable block 830d, 840d possesses.But It is that the present invention is not limited to this, as long as the lifting of movable block 830d, 840d can be guided, riser guide 830h, 840h can To use various structures.

According to structure as above, element pressurizing tool 830,840, by horizontally moving device 801 along level side To moving, thus, element pressurizing tool 830,840 can be picked between portion 610 and testing jack 310 and second first Pick and move in the horizontal direction between portion 620 and testing jack 310.Additionally, element pressurizing tool 830,840, Ke Yitong Cross the first vertical movement apparatus 802, to pick the top in portion 610, the second top and testing jack picking portion 620 first 310 top vertically moves, and selection element 1 or loading member 1.This element pressurizing tool 830,840, The top of testing jack 310 vertically moves and in order that element 1 is firmly incorporated into testing jack 310, simultaneously Effect element 1 pressurizeed to testing jack 310 by certain power can be executed.

As described above, element pressurizing tool 830,840, the rotation according to cam part 830g, 840g is come vertically Move, thus can set the shift position in the vertical direction of element pressurizing tool 830,840 exactly.

Additionally, element 1 pressurize to testing jack 310 to be tested during, maintain certain time to test The pressurized state of the element 1 of socket 310.For this reason, not utilizing cam part 830g, 840g, and only with ball screw dress The electric rotating machine put or as linear electric motors rectilinear movement motor when, need to continue to apply for unit to rectilinear movement motor The larger voltage of part 1 pressurization, to apply constant power to element 1 always, but during using cam part 830g, 840g, test Socket 310 is unrelated with the change of the voltage applying on motor 830j, 840j to the pressurized state of element 1, is according to cam The interval shape of second radius of part 830g, 840g is maintaining.Therefore, it is being used for making element pressurizing tool 830,840 edge hang down Nogata, to the first vertical movement apparatus 802 of movement, when its structure includes cam part 830g, 840g, and does not utilize cam part Part 830g, 840g and the situation just with rectilinear movement motor is compared, have reduction energy effect.

On the other hand, the species of element 1 tested as needed or the species of testing jack 310, can change element and add The pressing position that Chooser 831,841 needs of pressure instrument 830,840 are located at, so that element 1 is pressurized to test exactly and inserts Mouth 310 to execute the test to element 1 exactly.Additionally, it is necessary to element pressurizing tool 830,840, if under exactly Fall is confirmed and is checked making element 1 be pressurized to testing jack 310.

Therefore, in order to change or confirming the pressing position of element pressurizing tool 830,840, firstly for element pressurizing tool 830th, horizontally moving devices 801 of 840 connections and after the first vertical movement apparatus 802 lifts along the vertical direction, rotation cam part Whether the pressing position of part 830g, 840g judgment component pressurizing tool 830,840 is consistent with needing the pressing position setting, That is, reference position is consistent.

For this reason, as shown in Figure 20 and Figure 21, inspection device for components according to an embodiment of the invention, can include：Second Vertical movement apparatus 805, and by element pressurizing tool 830,840, horizontally moving device 801 and the first vertical movement apparatus 802 The element pressurization part constituting connects, and so that element pressurization part is vertically linearly moved；Control unit 807 is vertical by second When mobile device 805 is to make element pressurizing tool 830,840 contact with test department 300, the second vertical movement apparatus are passed through in detection 805 loads being applied to test department 300, and the load detecting is reached the described element pressurization during baseline load of setting The position of instrument 830,840 is determined as pressing position.

Second vertical movement apparatus 805, can be connected with the first vertical movement apparatus 802 and horizontally moving device 801, as above In the case of described, the first vertical movement apparatus 802 and horizontally moving device 801 can together pass through the second vertical movement apparatus 805 being lifted, so that element pressurizing tool 830,840 is lifted.

It is contacted with the part of test department 300 in element pressurizing tool 830,840, can be positioned at Chooser 831,841 The downside of the selection module 834,844 of surrounding, i.e. can be the downside of Chooser support module 836,846.For this reason, choosing Take in the downside of device support module 836,846, the part contacting with test department 300, can be made up of the metal of such as aluminum.

And, the part contacting with element pressurizing tool 830,840 in test department 300, can be for supporting testing jack 310 Supporting frame 312 upper side.For this reason, the portion contacting with element pressurizing tool 830,840 in the upper side of supporting frame 312 The metal as aluminum is divided to constitute.Element 1 is being pressurized to during testing jack 310 to execute test, is choosing module 834,844 Downside be contacted with the upper side of supporting frame 312, carry out the decline of restriction element pressurizing tool 830,840 to determine for survey The pressing position of the element 1 of examination socket 310.

Therefore, the terminal possessing with the inside of the species of element 1, the species of testing jack 310 or testing jack 310 The change of 311 species etc., and when making the Level Change of supporting frame 312, by under judgment component pressurizing tool 830,840 Whether side is contacted with the upper side of supporting frame 312, comes whether judgment component 1 is located at pressing position.

For this reason, the scheme possessing sensor can be considered, whether the downside carrying out sensing element pressurizing tool 830 is contacted with The upper side of supporting frame 312, as mentioned above in the case of, can have the shortcomings that expense increases with possessing of sensor, examine When considering set location of sensor etc., can there is element pressurizing tool 830,840 and the structure of testing jack 310 becomes complexity Problem.

Therefore, possessing has control unit 807, when element pressurizing tool 830,840 is contacted with test department 300, senses second The load variation amount of vertical movement apparatus 805, and using the variable quantity of load, the load applying is detected on test department 300, will Detect load reach the baseline load of setting when described element pressurizing tool 830,840 position be determined as pressurize Position.

As shown in figure 20, control unit 807, are the ball screw device including motor 806 in the second vertical movement apparatus 805 Or the band being connected with belt pulley by motor 806 is when transferring utensil, can be connected to sense as motor 806 moment of torsion with motor 806 Load.According to structure as above, element pressurizing tool 830,840, in the state of not being contacted with test department 300, passes through When second vertical movement apparatus 805 are to make element pressurizing tool 830,840 decline, control unit 807 sensing motor 806 negative The variable quantity carrying is little, or when element pressurizing tool 830,840 is contacted with test department 300, the load meeting of sensing in control unit 807 Increase.Thus, control unit 807, can induction machine 806 load, and using sensing load, element pressurizing tool 830, 840 when contacting with test department 300, and detection is applied to the load of test department 300 by the second vertical movement apparatus 805, and will examine Measure load reach the baseline load of setting when described element pressurizing tool 830,840 position be determined as pressurize position Put.

As another example, the second vertical movement apparatus 805 are using the electromagnetic interaction between permanent magnet and electric magnet Come to operate linear electric motors when, control unit 807 is configured to the load of induction linear electric motor.

Below, to using structure as above, the method setting the pressing position of element pressurizing tool 830,840 is carried out Explanation.

First, in element pressurizing tool 830,840, the first element pressurizing tool 830 is made to be located at the height with setting Test department 300 top, i.e. behind the top of supporting frame 312, rotation is connected with the first element pressurizing tool 830 Cam part 830g, makes the first element pressurizing tool 830 be located at rotation the first element pressurizing tool by cam part 830a 830 extreme lower positions that can decline.

Afterwards, operate the second vertical movement apparatus 805, and descending member pressurization part insensibly to execute and so that the first element is added The process that pressure instrument 830 declines slowly.Meanwhile, control unit 807, are held by sensing the load of the second mobile device 805 The row sensing process to the load that test department 300 applies for the first element pressurizing tool 830.

As shown in Figure 20 and Figure 21, make under the first element pressurizing tool 830 with by the second vertical movement apparatus 805 Fall, the first element pressurizing tool 830 can be contacted with test department 300, and thus, the first element pressurizing tool 830 is applied to test department 300 load can change.Now, control unit 807, load test department 300 being applied in the first element pressurizing tool 830 reaches During baseline load, judge that the position of the first element pressurizing tool 830 is consistent with the pressing position of setting, thus terminate second hanging down The operating of straight mobile device 805.

As described above, after completing to set the process of pressing position of the first element pressurizing tool 830, by with set first The process identical process of the pressing position of element pressurizing tool 830 sets the pressurization of the second element pressurizing tool 840 to execute The process of position.

By process as above, during the pressing position of setting element pressurizing tool 830,840, by element pressure H Tool 830,840 selection element 1, the test process of execution element 1 to testing jack 310 to pressurization.

As described above, inspection device for components is it is necessary to according to the species of element 1 or test according to an embodiment of the invention During the pressing position of species regulating element pressurizing tool 830,840 of socket 310, or it is necessary to confirmation and check element add When whether pressure instrument 830,840 drops to this pressing position exactly to make element 1 be pressurized to testing jack 310, sensing operating Second vertical movement apparatus 805 and make element pressurizing tool 830,840 decline to be contacted with while test department 300 sense second The load of vertical movement apparatus 805, the load using sensing detects the load being applied to test department 300, negative detect It is downloaded to when reaching the baseline load of setting, by the position of element pressurizing tool 830,840 is determined as pressing position, thus can Easily and securely to determine the pressing position of element pressurizing tool 830,840.

On the other hand, as shown in Figure 10, the loading for transferring element 1 transfer instrument 810,814, unloading transfer instrument 820th, 824 or element pressurizing tool 830,840 Chooser 891, be combined with the adsorption plate with materials such as rubber in its end 892, to make the absorption of element 1 easily, when element 1 change, due to abrasion have bad on adsorbing when, through maintaining Deng when, need alternating sorbent plate 892.

But, conventional, the replacement of adsorption plate 892 is to be made up of manual work, needs to separate Chooser 891 to carry out Replace one by one etc., there is a problem of very not convenient.

For this reason, the present invention, can also include：Adsorption plate replacement portion 900, replaces automatically respectively in connection with loading transfer instrument 810th, the adsorption plate at least one Chooser 891 in 814, unloading transfer instrument 820,824 or element pressurizing tool 830,840 892.Herein, Chooser 891, can load the choosing on transfer instrument 810,814 and unloading transfer instrument 820,824 for possessing Take device and possess the Chooser 831,841 on element pressurizing tool 830,840.

As shown in Figure 22 to Figure 27, adsorption plate replacement portion 900, by consider to load transfer instrument 810,814, unloading transfer The mobile route of instrument 820,824 or element pressurizing tool 830,840, to be placed in suitable position, can include：Adsorption plate Resettlement section 910, is formed with the multiple adsorption plate receiving spaces 911 making the adsorption plate 892 of Chooser 891 insert；Adsorption plate is chosen Portion 920, is arranged at least a portion in adsorption plate resettlement section 910, to choose and to be contained in adsorption plate receiving space 911 Adsorption plate.

Herein, it is provided with least part of in the adsorption plate resettlement section 910 in adsorption plate selection portion 920, idle absorption Plate receiving space 911, thus adsorption plate 892 is separated from Chooser 891 by adsorption plate selection portion 920 being housed, At least part of adsorption plate resettlement section 892 in adsorption plate selection portion 920, on the Chooser 891 eliminating adsorption plate 892 Insert new adsorption plate 892.

Adsorption plate resettlement section 910 is formed with multiple adsorption plates 892, is configured to, by adsorption plate selection portion 920 from Chooser 891 separate adsorption plate 892 to house or to insert new adsorption plate 892 structure on the Chooser 891 eliminating adsorption plate 892, Can be various structures.

As one, adsorption plate resettlement section 910 can include the resettlement section basis being formed with multiple adsorption plate receiving spaces 911 Body 912.

Resettlement section body 912, as the structure forming adsorption plate receiving space 911, can be various structures.

Adsorption plate receiving space 911, will be incorporated into from the detached adsorption plate 892 of Chooser 891 or storage as storage Except the structure of the new adsorption plate 892 on the Chooser 891 of adsorption plate 892, as long as housing adsorption plate 892, can be groove Deng various structures.

Adsorption plate selection portion 920, as the knot separating adsorption plate 892 by adsorption plate selection portion 920 from Chooser 891 Structure, can be for being arranged on resettlement section body 912, and the state in adsorption plate 892 combination and Chooser 891 to insert adsorption plate After receiving space 911, choose the various structures such as the structure of adsorption plate.

For example, described adsorption plate selection portion 920 can be according to the selection/de-select by linking up with and releasing hook, profit The clamper of the clamper with annular state etc. and by contacting the selection modes such as the selection/de-select clamping, can be multiple Structure.

As another example, adsorption plate selection portion 920 again, can include：Moving parts 921, covers resettlement section body 912 While above, can along with direction parallel above, i.e. horizontal direction is movably configured.

Now, moving parts 921, as by moving horizontally the selection/de-select for linking up with and releasing hook Structure, can be various structures, for example, as shown in Figure 22 to Figure 27, including：Multiple insertion portion 922, in adsorption plate 892 The state being incorporated into Chooser 891 carrys out insertion, thus being formed as to move along adsorption plate receiving space 911；Multiple hooks Part 923, is connected to insertion portion 922, houses from adsorption plate in the state of adsorption plate 892 is incorporated into Chooser 891 When space 911 is mobile, hooks adsorption plate 892, so that Chooser 891 can be moved.

Particularly, in order to improve the hook effect according to moving parts 921, adsorption plate 892 could be formed with protuberance 892a, more protrudes than the outer peripheral face of described Chooser 891, now, hook portion 923, it is formed larger than the outer of Chooser 891 Side face and the outer peripheral face less than protuberance 892a, thus when the upside direction of Chooser 891 is mobile, hook adsorption plate 892.

The moving parts 921 in adsorption plate selection portion 920 considers adsorption plate 892 and the Chooser being combined with adsorption plate 892 In 891, radius is of different sizes, by possessing insertion portion 922 and the adsorption plate 892 of the maximum radius more than adsorption plate 892 The little hook portion of radius 923 at least a portion, is thus configured to, in adsorption plate 892 insertion adsorption plate receiving space 911, make Insertion portion 922 is located on adsorption plate receiving space 911；When separating adsorption plate 892 from Chooser 891, positioned at hook portion 923.

On the other hand, the moving parts 921 in adsorption plate selection portion 920 is it is characterised in that move to the extension of adsorption plate 892 Hook and the position releasing hook, although not shown, but can be by linear shifter and are linearly moved, by multiple drives Dynamic source come to drive its movement.

On the other hand, from loading transfer instrument 810,814, unloading transfer instrument 820,824 or element pressurizing tool When the 830th, replacing adsorption plate 892 in 840 Chooser 891, the position in adsorption plate replacement portion 900, it is firstly moved to be combined with suction The adsorption plate resettlement section 910 in attached plate selection portion 920, to separate (Figure 23 to Figure 25) after adsorption plate 892, moves to collecting new The adsorption plate resettlement section 910 of adsorption plate 892 is come with reference to new adsorption plate 892 (Figure 24 and Figure 25), after terminating adsorption plate 892 replacement Executive component 1 transfers operation.

On the other hand, the loading for transferring element 1 as above transfer instrument 810,814, unloading transfer instrument 820th, 824 or element pressurizing tool 830,840 structure, beyond inspection device for components, according to executed testing result The classification operation of the classification of executive component or, perform detection element and according to its detection come the detection of element of classifying and classification operation Element processing routine loaded naturally it is also possible to being applied to and element being loaded into pallet, and by more than one shifting Instrument is sent to process in journey the element to transfer element.

More than, the preferred embodiments of the present invention are illustratively illustrated, but the scope of the present invention is not limited In specific embodiment as above, suitable change can be carried out in technical scope.

Claims (22)

1. a kind of inspection device for components is it is characterised in that include：

Loading unit, loads the more than one pallet loading multiple element；

Test department, including multiple testing jacks, each element is surveyed for receiving the element passed on from described loading unit Examination；

Uninstalling portion, according to the test result of described test department, carries out classification to the element completing to test and loads；

More than one transfer instrument, transfers element between described loading unit, described test department and described uninstalling portion,

Described transfer instrument includes multiple Choosers, is combined with adsorption plate in end respectively,

Adsorption plate replacement portion is also included on the transfer instrument of at least in described transfer instrument, automatically replaces and be bonded respectively to Described adsorption plate on described Chooser；

Described adsorption plate replacement portion includes：

Plural adsorption plate resettlement section, is formed with and makes multiple adsorption plates that the adsorption plate of described Chooser inserts house sky Between；Adsorption plate selection portion, is arranged at least a portion in described adsorption plate resettlement section, to choose and to be contained in described adsorption plate Adsorption plate in receiving space,

It is provided with least part of in the described adsorption plate resettlement section in described adsorption plate selection portion, idle described adsorption plate and receive Hold space, thus described adsorption plate is separated from described Chooser by described adsorption plate selection portion being housed, described At least part of adsorption plate resettlement section in adsorption plate resettlement section, inserts adsorption plate to be replaced to make described adsorption plate combine On the Chooser removing.

2. inspection device for components according to claim 1 it is characterised in that

Described adsorption plate resettlement section includes：Resettlement section body, is formed with the plurality of adsorption plate receiving space,

Described adsorption plate selection portion, is arranged at described resettlement section body, in the state of described adsorption plate is incorporated into described Chooser After being inserted into described adsorption plate receiving space, choose described adsorption plate.

3. inspection device for components according to claim 2 it is characterised in that

Described adsorption plate selection portion includes：Moving parts, covers above described resettlement section body, and be set to can along with put down above The direction of row moves,

Described moving parts includes：Multiple insertion portion, are passed through in the state of described adsorption plate is incorporated into described Chooser Logical, thus being formed as to move to described adsorption plate receiving space；Multiple hook portions, be formed as respectively with described insertion Part connects to come in the state of described adsorption plate is incorporated into described Chooser to during the movement of described adsorption plate receiving space, hooks Described adsorption plate, only makes described Chooser move.

4. inspection device for components according to claim 3 it is characterised in that

Described adsorption plate is formed with protuberance, more protrudes than the outer peripheral face of described Chooser,

Described hook portion, is formed larger than outer peripheral face and the outer peripheral face less than described protuberance of described Chooser, thus When the upside direction of described Chooser is mobile, hook described adsorption plate.

5. the inspection device for components according to any one in Claims 1-4 is it is characterised in that also include：

Load buffer part, by loading the element of the pallet reception and registration from described loading unit for the transfer instrument reception and being filled temporarily Carry；

Unloading buffer part, centered on described test department, be arranged at described load buffer part to position, to receive and to pass through Described test department completes the element tested.

6. inspection device for components according to claim 5 is it is characterised in that include：

First picks portion and second picks portion, by one above transfer instrument, will receive from described loading buffer part Element be communicated to described test department or the element receiving from described test department be communicated to described unloading buffer part.

7. inspection device for components according to claim 6 it is characterised in that

Described first to pick portion and second portion of picking be to be arranged oppositely using described test department as center,

Described first picks portion and second portion of picking each includes：Guide rail；And more than one pick plate, carry out along described guide rail Mobile, for receiving the first element reception and registration position of the element passed on and the element of described test department from the described buffer part that loads Replace and alternately moved on the second element reception and registration position that element is passed on to described unloading buffer part in position.

8. inspection device for components according to claim 7 it is characterised in that

Described transfer instrument includes：A pair of element pressurizing tool, element is communicated to described test department from described loading unit or incites somebody to action Element is communicated to described uninstalling portion from described test department,

The pair of element pressurizing tool is picked between portion and described test department described first respectively, and

Described second picks and moves between portion and described test department, thus will pass on from the described element that pick plate loading Plate is picked described in being communicated to test department or by element from described test department.

9. a kind of inspection device for components is it is characterised in that include：

Loading unit, loads the more than one pallet loading multiple element；

Test department, including multiple testing jacks, each element is surveyed for receiving the element passed on from described loading unit Examination；

Uninstalling portion, according to the test result of described test department, carries out classification to the element completing to test and loads；

More than one transfer instrument, transfers element between described loading unit, described test department and described uninstalling portion,

Also include cleaning section, be arranged at the side of described test department, for by moving in the shape covering described testing jack Spray air under state to remove the foreign body in described testing jack；

Described cleaning section includes：

Body, covers described testing jack and forms clean space on the top of described testing jack；Drive division, for described Body is driven between the top of the side of test department and described testing jack；

Described body is provided with air flow circuit, is connected to come with air feeder and sprays air to each testing jack described；And More than one nozzle, receives the air passed on to spray air to described testing jack from described air flow circuit.

10. inspection device for components according to claim 9 it is characterised in that

Described body is formed as maintaining the airtight state of described clean space, and described body is connected with discharge pipe will be by described The air of nozzle injection and foreign body are together discharged to outside from described clean space.

11. inspection device for components according to claim 9 or 10 are it is characterised in that also include：

Load buffer part, by loading the element of the pallet reception and registration from described loading unit for the transfer instrument reception and being filled temporarily Carry；

Unloading buffer part, centered on described test department, be arranged at described load buffer part to position, to receive and to pass through Described test department completes the element tested.

12. inspection device for components according to claim 11 are it is characterised in that include：

First picks portion and second picks portion, by one above transfer instrument, will receive from described loading buffer part Element be communicated to described test department or the element receiving from described test department be communicated to described unloading buffer part.

13. inspection device for components according to claim 12 it is characterised in that

Described first to pick portion and second portion of picking be to be arranged oppositely using described test department as center,

Described first picks portion and second portion of picking each includes：Guide rail；And more than one pick plate, carry out along described guide rail Mobile, for receiving the first element reception and registration position of the element passed on and the element of described test department from the described buffer part that loads Replace and alternately moved on the second element reception and registration position that element is passed on to described unloading buffer part in position.

14. inspection device for components according to claim 12 it is characterised in that

Described cleaning section, is arranged at described first and picks portion and described second and pick between portion.

15. inspection device for components according to claim 13 it is characterised in that

Described transfer instrument includes：A pair of element pressurizing tool, respectively described first pick between portion and described test department with And described second pick and move between portion and described test department, the element picking plate loading is communicated to described test department Or pick plate described in element is communicated to from described test department.

A kind of 16. inspection device for components are it is characterised in that include：

Loading unit, loads multiple element；

Test department, possesses the multiple testing jacks for the element execution test that will come from the transfer of described loading unit；

Uninstalling portion, classifies to the element completing to test in described test department according to test result；And

More than one pick portion, the element passed on from described loading unit is transplanted on described test department side, and will be from described survey The element that examination portion passes on is transplanted on described uninstalling portion side,

The described portion of picking includes：Pick plate, for carrying described element；Plate fixed part, described plate of picking releasably is incorporated into This；Plate handling part, is arranged at described plate fixed part, and described plate of picking is fixed on described plate fixed part；

Described plate handling part includes：

Support, is fixed on described plate fixed part；

Fixed body, by possessing the first axle axle in described support, is rotatably attached optionally fixing institute State and pick plate；

Press body, the pressurized plane contacting with described fixed body is formed as curved surface that described fixed body is pressurizeed；

Moving body, is connected with described press body, is set to move along the vertical direction.

17. inspection device for components according to claim 16 are it is characterised in that described plate handling part also includes：

Elastomer, described fixed body is resiliently attached to described first axle axle；

Handle, makes the second hinge axle being arranged at described moving body rotatably be attached；And

Fixed hook, is arranged at described support, is hung on the end of described handle and fixes.

18. inspection device for components according to claim 16 it is characterised in that

The described portion of picking possesses and has guide rail, and described plate fixed part can be made to be attached with moving horizontally.

19. inspection device for components according to claim 16 it is characterised in that

Described plate fixed part possesses having heaters, for heating described element.

20. inspection device for components according to claim 16 are it is characterised in that include：

More than one element pressurizing tool, to pressurize to described testing jack from the described plate selection element of picking picking portion, And by described testing jack carry out pressurizeing the element to complete testing pass on to described pick portion pick plate.

21. inspection device for components according to claim 20 it is characterised in that

The described portion of picking includes：First picks portion and second picks portion, is placed in the both sides of the testing jack of described test department.

22. inspection device for components according to claim 21 are it is characterised in that described element pressurizing tool includes：

First element pressurizing tool, to pressurize to described testing jack in the described first selection element on plate of picking picking portion, And by described testing jack carry out pressurizeing the element to complete testing pass on to described first pick portion pick plate；And

Second element pressurizing tool, to pressurize to described testing jack in the described second selection element on plate of picking picking portion, And by described testing jack carry out pressurizeing the element to complete testing pass on to described second pick portion pick plate.