CN103293426A - Apparatus for testing elements - Google Patents

Apparatus for testing elements Download PDF

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Publication number
CN103293426A
CN103293426A CN2013100625408A CN201310062540A CN103293426A CN 103293426 A CN103293426 A CN 103293426A CN 2013100625408 A CN2013100625408 A CN 2013100625408A CN 201310062540 A CN201310062540 A CN 201310062540A CN 103293426 A CN103293426 A CN 103293426A
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CN
China
Prior art keywords
adsorption plate
test department
loading
plate
test
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN2013100625408A
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Chinese (zh)
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CN103293426B (en
Inventor
柳弘俊
徐龙镇
金旻成
柳泰植
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JT Corp
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JT Corp
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Filing date
Publication date
Priority claimed from KR1020120071089A external-priority patent/KR102000949B1/en
Application filed by JT Corp filed Critical JT Corp
Publication of CN103293426A publication Critical patent/CN103293426A/en
Application granted granted Critical
Publication of CN103293426B publication Critical patent/CN103293426B/en
Expired - Fee Related legal-status Critical Current
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/01—Subjecting similar articles in turn to test, e.g. "go/no-go" tests in mass production; Testing objects at points as they pass through a testing station

Abstract

The present invention discloses an apparatus for testing elements comprising: a loading portion on which at least one tray, on which a plurality of elements are loaded, is loaded; a loading buffer portion for receiving the elements from the tray on the loading portion through a loading transport tool, and temporarily loading the elements; a test portion for receiving the elements from the loading buffer potion and carrying out a test; an unloading buffer portion, which is positioned opposite the loading buffer portion with the test portion at the center, for receiving the elements which have undergone testing by the test portion; and an unloading portion for categorizing and loading the elements that are loaded on the unloading buffer portions by means of the unloading transport tool, depending on the result of the test carried out by the test portion; and at least one element pressing tool for transporting the elements between the loading portion, the test portion, and the unloading portion.

Description

Inspection device for components
Technical field
The present invention relates to inspection device for components, relate to detect the inspection device for components to the electrical specification of element in more detail.
Background technology
Semiconductor element (below, be referred to as " element ") can carry out electrical specification by the semiconductor element pick-up unit, for the multiple detections such as reliability detection of heat or pressure after finishing packaging process.
For the detection of element, can be according to memory cell; And as CPU(Central Processing Unit), GPU(Graphic Processing Unit) etc. non-memory element; The LED element; The multiple detections such as heating detection that the kind of elements such as photovalve carries out carrying out under room temperature environment room temperature detects, carries out under hot environment.
On the other hand, along with the kind of IT elements such as smart mobile phone, intelligent panel computer, intelligent TV becomes varied and popular, as the non-memory element of CPU etc., namely, LSI(Large Scale Integration, large scale integrated circuit) demand increases severely.
But LSI is because the characteristic of the many kinds of its a small amount of than the pick-up unit of standardized memory cell, exists the problem that is difficult to use expensive pick-up unit because amount detection is little.
Summary of the invention
(technical matters that will solve)
The present invention proposes in order to solve aforesaid conventional art problem, and its purpose is to provide inspection device for components, can carry out the LSI element of the many kinds of a small amount of rapidly and detect, and can detect the LSI element of multiple kind.
In addition, another object of the present invention is to provide inspection device for components, can carry out exactly for selection element to come to the movement of the horizontal direction of the element pressurizing tool of testing jack pressurization and the movement of vertical direction.
In addition, another purpose again of the present invention is to provide inspection device for components, and it constitutes and to carry out the maintenance of parts easily, thereby the reduction maintenance expense is used for reducing significantly the production cost of element.
In addition, another purpose again of the present invention is to provide inspection device for components, can set exactly and confirm to come to the pressing position of the element pressurizing tool of testing jack pressurization for selection element.
(means of dealing with problems)
In order to reach purpose as mentioned above, inspection device for components can comprise: loading portion, the more than one pallet of a plurality of elements of loading loading according to an embodiment of the invention; Load buffer part, receive the element of passing on from the pallet of described loading portion and load temporarily by loading the handover instrument; Test department receives from the element of described loading buffer part reception and registration and carries out test; The unloading buffer part centered by described test department, is arranged at the position with described loading buffer part subtend, receives the element of finishing test by described test department; Unloading portion, according to the test result of described test department, by unloading handover instrument to the element that the is loaded into described unloading buffer part loading of classifying; More than one element pressurizing tool is used for transferring element between described loading portion, described test department and described unloading portion.
In addition, inspection device for components can comprise: loading portion, the more than one pallet of a plurality of elements of loading loading according to an embodiment of the invention; Test department comprises a plurality of testing jacks, be used for to receive the element of passing on from described loading portion and comes each element is tested; Unloading portion is according to the test result of described test department, to the element of the finishing test loading of classifying; More than one handover instrument, between described loading portion, described test department and described unloading portion, transfer element, described handover instrument comprises a plurality of Choosers, be combined with adsorption plate respectively endways, have at least one handover instrument to comprise adsorption plate replacement portion in the described handover instrument, replacement is combined in the described adsorption plate on the described Chooser respectively automatically.
In addition, inspection device for components can comprise: loading portion, the more than one pallet of a plurality of elements of loading loading according to an embodiment of the invention; Test department comprises a plurality of testing jacks, be used for to receive the element of passing on from described loading portion and comes each element is tested; Unloading portion is according to the test result of described test department, to the element of the finishing test loading of classifying; More than one handover instrument, between described loading portion, described test department and described unloading portion, transfer element, can also comprise cleaning section, be arranged at a side of described test department, be used for removing by movement injection air under the state that covers described testing jack the foreign matter of described testing jack.
In addition, according to inspection device for components of the present invention, can comprise: loading portion loads a plurality of elements; Test department possesses for to transfer a plurality of testing jacks that the element of coming is carried out test from described loading portion; Unloading portion comes the element of finishing test at described test department is classified according to test result; The more than one portion that picks will transfer to described test department side from the element that described loading portion passes on, and will transfer the side to described unloading portion from the element that described test department is passed on, and the described portion that picks can comprise: pick plate, be used for carrying described element; The plate fixed part describedly is incorporated into this with picking the removable loading and unloading of plate; The plate handling part is arranged at described plate fixed part, and the described plate of picking is fixed in described plate fixed part.
In addition, inspection device for components can comprise: loading portion, the more than one pallet of a plurality of elements of loading loading according to an embodiment of the invention; Test department comprises a plurality of testing jacks, be used for to receive the element of passing on from described loading portion and comes each element is tested; Unloading portion is according to the test result of described test department, to the element of the finishing test loading of classifying; More than one handover instrument, between described loading portion, described test department and described unloading portion, transfer element, described handover instrument comprises a pair of element pressurizing tool, element is communicated to described test department or element is communicated to described unloading portion from described test department from described loading portion, described element pressurizing tool can comprise: support sector arranges movably; The more than one module of choosing releasably is incorporated into described support sector, and is combined with more than one Chooser.
Inspection device for components according to an embodiment of the invention, can comprise: loading portion loads a plurality of elements; Test department possesses a plurality of testing jacks, is used for carrying out test to transferring the element of coming from described loading portion; Unloading portion is according to the test result of described test department, to the element of the finishing test loading of classifying; The element pressurization part, choosing described element comes to described testing jack pressurization, described element pressurization part can comprise: more than one element pressurizing tool, and choose described element and move to pressing position by the described element of linearity movement and pressurize to described testing jack; Horizontally moving device is connected with described element pressurizing tool described element pressurizing tool is moved to described testing jack; The first vertical mobile device, according to described cam part, that described element pressurizing tool is vertical mobile to pressing position.
In addition, inspection device for components according to an embodiment of the invention, can comprise: loading portion loads a plurality of elements; Test department possesses a plurality of testing jacks, is used for carrying out test to transferring the element of coming from described loading portion; Unloading portion is according to the test result of described test department, to the element of the finishing test loading of classifying; The more than one portion that picks will transfer to described test department side from the element that described loading portion passes on, and will transfer the side to described unloading portion from the element that described test department is passed on; Instrument is transferred in more than one loading, and selection element is passed on to the described portion that picks in described loading portion; Instrument is transferred in more than one unloading, passes on to described unloading portion in the described selection element of picking in the portion; More than one element pressurizing tool, come to described testing jack pressurization in the described selection element of picking in the portion, and will pass on to the described portion that picks by thinking the element that described testing jack pressurizes to finish test, described element pressurizing tool comprises: support sector arranges movably; The more than one module of choosing, releasably be incorporated into described support sector, and be combined with more than one Chooser, described support sector and a described side of choosing module can possess fastening described support sector and the described fastening unit of choosing module are arranged, described support sector and the described opposite side of choosing module can possess in described support sector the described supporter of choosing module of support is arranged.
In addition, inspection device for components according to an embodiment of the invention, can comprise: loading portion loads a plurality of elements; Test department possesses a plurality of testing jacks, is used for carrying out test to transferring the element of coming from described loading portion; Unloading portion is according to the test result of described test department, to the element of the finishing test loading of classifying; More than one element pressurizing tool possesses the Chooser of choosing described element, chooses described element and comes to described testing jack pressurization, and described element pressurizing tool can possess the heating part, comes the described element of choosing is heated according to described Chooser.
In addition, inspection device for components according to an embodiment of the invention, can comprise: loading portion loads a plurality of elements; Test department possesses a plurality of testing jacks, is used for carrying out test to transferring the element of coming from described loading portion; Unloading portion is according to the test result of described test department, to the element of the finishing test loading of classifying; The element pressurization part, comprise more than one element pressurizing tool and the first vertical mobile device, described element pressurizing tool is chosen described element and is moved to pressing position by the described element of linearity movement and pressurizes to described testing jack, and the described first vertical mobile device moves to pressing position by cam part with described element pressurizing tool linearity; The second vertical mobile device makes described element pressurization part carry out linearity for described test department and moves; Control part, when by the described second vertical mobile device described element pressurizing tool being contacted with described test department, the load that detection applies to described test department by the described second vertical mobile device, and the determining positions of the described element pressurizing tool when detected load reached the benchmark load of having set is pressing position.
(effect of invention)
Inspection device for components has and can carry out the advantage that detects and can detect the LSI element of multiple kind to the LSI element of a small amount of many kinds fast according to an embodiment of the invention.
In addition, inspection device for components according to an embodiment of the invention, be used for moving in the vertical direction, selection element is come to have comprised cam part to the first vertical mobile device of the element pressurizing tool of testing jack pressurization, rotation by cam part moves in the vertical direction the element pressurizing tool, thereby has the advantage of the shift position on the vertical direction of setting member pressurizing tool exactly.
In addition, inspection device for components constitutes the maintenance of carrying out device easily according to an embodiment of the invention, thereby has the advantage that maintenance expense by reduction device is used for reducing significantly the production cost of element.
In addition, inspection device for components according to an embodiment of the invention, the next element pressurizing tool that pressurizes to testing jack of selection element is by possessing, the support sector that arranges movably with releasably be incorporated into described support sector and be combined with the more than one module of choosing of more than one Chooser, thereby have the advantage that the element pressurizing tool is safeguarded easily.
In addition, inspection device for components according to an embodiment of the invention, by well heater being set and being used for described temperature sensor is carried out more than one first connector that power supply is supplied with and signal is passed on, thereby the support sector of composed component pressurizing tool and choose module in conjunction with the time, automatically be connected with second connector that is arranged at support sector, have the other connection operation that need not for power supply supply and signal reception and registration thus and make the maker of device safeguard the easy advantage that becomes.
In addition, inspection device for components according to an embodiment of the invention, being used for the element replacement between test department and the loading buffer part or the plate of replacing for the element between test department and the unloading portion of picking constitutes, can load and unload at the plate fixed part by the simple action of plate handling part, thereby have in the kind as the element of detected object, particularly during the size variation of element, can replace the advantage of picking plate of settling element easily.
In addition, inspection device for components according to an embodiment of the invention, come the element of choosing is heated by come to possess the heating part to the Chooser of the element pressurizing tool of testing jack pressurization in selection element, thereby not only can promptly heat but also can be so that the temperature reduced minimum of element element, thereby have the advantage that executive component exactly detects.
In addition, inspection device for components according to an embodiment of the invention, carry out restarting again after the replacement of handwork the conventional art of device than the operation of the stop device in order to replace adsorption plate, the adsorption plate replacement portion of adsorption plate can be replaced from Chooser automatically because add to have possessed, the productive advantage of equipment can be promoted greatly thereby have.
In addition, inspection device for components according to an embodiment of the invention, comprise cleaning section by appending, be arranged at a side of test department, be used for coming under the state that covers described testing jack injection air to remove foreign matter at described testing jack by mobile, maybe can't carry out test job thereby prevent from existing in the testing jack foreign matter to cause taking place test errors, thereby have the advantage of lifting gear performance greatly.
Description of drawings
Fig. 1 is the planimetric map that schematically illustrates according to inspection device for components of the present invention.
Fig. 2 is the planimetric map of an example of the plate member of loading buffer part in the component detection device of schematically pictorial image 1 and unloading buffer part.
Fig. 3 is that first in the component detection device of schematically pictorial image 1 picked the cut-open view that portion and second picks portion.
Fig. 4 is first the picking portion and second and pick in the portion of pictorial image 3 schematically, will pick the stereographic map that plate is fixed in the dish handling part of plate fixed part.
Fig. 5 and Fig. 6 are the skeleton diagrams for the action that the plate handling part is described.
Fig. 7 is the cut-open view of the cleaning section of the inspection device for components of pictorial image 1 schematically.
Fig. 8 is the planimetric map of the cleaning section of the inspection device for components of pictorial image 1 schematically.
Fig. 9 schematically illustrates the cut-open view that possesses in the element pressurizing tool of the inspection device for components of Fig. 1.
Figure 10 is that expression possesses in the exploded perspective view of the Chooser of the element pressurizing tool of Fig. 9.
Figure 11 is the stereographic map of support sector of the element pressurizing tool of pictorial image 9.
Figure 12 is the stereographic map of choosing module of the element pressurizing tool of pictorial image 9.
Figure 13 is in the element pressurizing tool for key diagram 1, in support sector in conjunction with the cut-open view of choosing the action of module.
Figure 14 is that diagram possesses in another routine cut-open view of the element pressurizing tool of the inspection device for components of Fig. 1.
Figure 15 is the partial sectional view that expression enlarges the element pressurizing tool of Figure 14.
Figure 16 and Figure 17 are that diagram is used for along continuous straight runs and vertical direction and moves and possess in the horizontally moving device of the element pressurizing tool of the inspection device for components of Fig. 1 and the skeleton diagram of the first vertical mobile device.
Figure 18 schematically illustrates for along continuous straight runs to move the cross-sectional view that possesses in the horizontally moving device of the element pressurizing tool of the inspection device for components of Fig. 1.
Figure 19 schematically illustrates the longitudinal section that possesses in the first vertical mobile device of the element pressurizing tool of the inspection device for components of Fig. 1 be used to moving in the vertical direction.
Figure 20 is in the inspection device for components of pictorial image 1, is used for the skeleton diagram of structure of the pressing position of setting member pressurizing tool.
Figure 21 is that expression enlarges the partial sectional view in the structure of Figure 20.
Figure 22 is the stereographic map of the adsorption plate replacement portion of the diagram adsorption plate that is used for replacing automatically Chooser, and the adsorption plate of described Chooser is arranged at the loading that the inspection device for components of Fig. 1 possesses and transfers on instrument, unloading handover instrument or the element pressurizing tool.
Figure 23 to Figure 25 is the partial sectional view of adsorption plate replacement portion of the process of the diagram adsorption plate of automatically replacing Chooser, and the adsorption plate of described Chooser is arranged at the loading that the inspection device for components of Fig. 1 possesses and transfers on instrument, unloading handover instrument or the element pressurizing tool.
Figure 26 to Figure 27 is the partial plan layout of adsorption plate replacement portion of the process of the diagram adsorption plate of automatically replacing Chooser, and the adsorption plate of described Chooser is arranged at the loading that the inspection device for components of Fig. 1 possesses and transfers on instrument, unloading handover instrument or the element pressurizing tool.
(description of reference numerals)
1: element 310: testing jack
Pick portion 620: the second pick portion at 610: the first
611,621: guide rail 612,622: pick plate
613,623 plate fixed parts 614,624: plate handling part
801: 802: the first vertical mobile devices of horizontally moving device
805: the second vertical mobile devices 807: control part
830,840: element pressurizing tool 830b, 840b: link
830g, 840g: cam part 833,843: support sector
834,844: choose module 850: fastening unit
870: the second supporter of 860: the first supporter
880: determining positions unit 889: induction pick-up
891: bonded block 892: adsorption plate
893: guiding parts 894: injection orifice
895: heated air stream 896: the heated air feeder
Embodiment
With reference to the accompanying drawings the inspection device for components according to one embodiment of the invention is described.
As shown in Figure 1, inspection device for components according to an embodiment of the invention, can comprise: loading portion 100 loads a plurality of elements 1; Test department 300 is tested the element of passing on from loading portion 100 1; Unloading portion 500 is according to the test result of test department 300, to element 1 loading of classifying.
The test object elements 1 can for, the memory semiconductor or as CPU(Central Processing Unit), GPU(Graphic Processing Unit), system LIS(Large Scale Integration) etc. non-memory element.Element 1 can be non-memory element, and particularly, the bottom surface is formed with the element of the contact terminal of ball shape.
Between loading portion 100, test department 300 and unloading portion 500, transfer the method for element 1, can carry out by several different methods.
Loading portion 100 and unloading portion 500 as the structure that loads the more than one pallet 2 that loads a plurality of elements 1, can be multiple structure according to design.Tray loading portion (not shown) can be set in loading portion 100 and the unloading portion 500, load a plurality of pallets 2.
For example, can suitably settle a plurality of pallets 2 in the loading portion 100, with element 1 continuity choose to transfer.In addition, the pallet 2 of unloaded element 1 can replace with the pallet 2 of loading member 1.For example, certain pallet 2 automatic or manuals in batches can be loaded into tray loading portion.
In the loading portion 100, the empty pallet 2 behind the extraction elements 1 can be transplanted on unloading portion 500 by pallet reception and registration portion (not shown).In addition, empty pallet 2 is before being transplanted on unloading portion 500, and pallet 2 can be rotated (counter-rotating) in pallet counter-rotating portion (not shown), removes the element 1 of not drawing from pallet 2 as yet.
On the other hand, unloading portion 500, structure can be similar with loading portion 100.For example, in the unloading portion 500, a plurality of empty pallet 2 suitably can be settled according to classification grade, be loaded thereby make element 1 carry out the classification of continuity ground according to test result.In the unloading portion 500, loading the pallet 2 of testing the element 1 that finishes can replace with empty pallet 2.
In addition, between loading portion 100 and the unloading portion 500, can append the pallet buffer portion (not shown) that interim loading empty pallet 2 is set, load empty pallet 2 during arriving.
Be formed with a plurality of accepting groove 2a on the pallet 2, load a plurality of elements 1.For example, a plurality of accepting groove 2a can form 8 * 16 ranks in pallet 2.
As shown in Figures 1 and 2, can be provided for interim loading buffer part 200 of loading the element of passing on from the pallet 2 of loading portion 100 1 between loading portion 100 and the test department 300, increase the handover speed of element 1 or a plurality of elements 1 are heated fully.In addition, can possess the unloading buffer part 400 of loading the element of finishing by test department 300 tests 1 for interim between test department 300 and the unloading portion 500, increase the handover speed of element 1.Thus, element 1 as tested object, can be transplanted on from loading portion 100 and be transplanted on test department 300 after loading buffer part 200 is loaded temporarily, the element 1 that test finishes can be transplanted on from test department 300 and be transplanted on unloading portion 500 after unloading buffer part 400 is loaded temporarily.
Particularly, load buffer part 200 and unloading buffer part 500 than the pallet 2 of the element 1 that loads relative lesser amt, can load the element 1 of relative a greater number.
As shown in Figure 2, loading portion 200 and unloading portion 400 can comprise: the plate member 210,410 of plate shape, be formed with a plurality of loading chutes 211,411 above, and load a plurality of elements 1.
Load the plate member 210,410 of buffer part 200 and unloading buffer part 400, have almost identical structure mutually.Just, testing element 1 and need heat (preheating) time, loading can additional heating arrangement just like well heater on the plate member 210 of buffer part 200.
Load buffer part 200 and the plate member 210 of unloading buffer part 400,410 loading chute 211,422, arrange at the interval of testing jack 310 that can corresponding test department 300, or arrange at the interval of the accepting groove 2a of corresponding pallet 2.
For example, the interval of the accepting groove 2a of pallet 2 and the plate member 210 that loads buffer part 200 and unloading buffer part 400,410 loading chute 211,411 interval are identical, and the detection meeting of the testing jack 310 of test department 300 is with n times of the interval of pallet 2 accepting groove 2a, and for example, 2 times form.
Plate member 210,410 is carried out the structure that element replaces as being used for interim loading member 1 with test department 300, can be in the inside of inspection device for components with multiple structures such as fixing state arrange or arranges movably.
As shown in Figure 1, test department 300 is used for can being multiple structure to testing from the element 1 that loads buffer part 200 reception and registration according to the kind of testing.Test department 300 is provided with a plurality of testing jacks 310 that pressurizeed by element 1.For example, a plurality of testing jacks 310 possess the terminal that is connected with power supply are arranged, and are pressurized to the process of terminal by element 1, carry out the energising test to element 1.
Testing jack 310 can be settled with multiple ranks such as 8 * 2,8 * 4.Testing jack 310 as the test structure that carries out element 1 between Connection Element 1 and the terminal, can be multiple structure.This testing jack 310 can wait to replace according to kind, the test approaches of element.
On the other hand, test department 300 can be the absolute construction of testing jack 310 with the structural module that is left, and can be realized by the pcb board that testing jack 310 is set as simple structure.Particularly, test department 300 when being realized by the pcb board that testing jack 310 is set, thereby can test to carry out the construction expenditure that characterization can reduce relatively costly test department 300 significantly according to each with testing jack 310.
On the other hand, can carry out multiple test at test department 300.More preferably, test department 300 constitutes the structure that can test element 1 under the temperature more than the room temperature.
Test department 300 when the test of carrying out high temperature test etc. and temperature correlation, can arrange chamber component at its periphery, wraps up the part zone that comprises testing jack 310, minimizes temperature variation.
On the other hand, test department 300 and load between the buffer part 200 or test department 300 exchanges with element between the unloading buffer part 400, than directly carrying out, but by picking portion 610,620, to be transplanted on test department 300 sides from the element 1 that loads buffer part 200 reception and registration, will move to unloading buffer part 400 sides from the element 1 that test department 300 is passed on.Pick portion 610, the 620th, be used to carrying out test department 300 and loading element exchange or the test department 300 between the buffer part 200 and unload the structure that the element between the buffer part 400 exchanges, can be multiple structure.
For example, as Fig. 1 and shown in Figure 3, pick portion 610,620, can comprise: first picks portion 610, passes on the position at first element that be used for to receive the element 1 that loading portion 100 passes on, is used for and test department 300 carries out the element switch of element 1 exchange and be used for passing on second element of elements 1 to pass between the position to unloading portion 500 moving; Second picks portion 620, passes on the position at first element that be used for to receive the element 1 that loading portion 100 passes on, is used for and test department 300 carries out the element switch of element 1 exchange and be used for passing on second element of elements 1 to pass between the position to unloading portion 500 moving.Herein, first element passes on position, element switch and second element to pass on the position, can carry out diversified arrangement according to the structure of device, and can settle successively along straight line.
First picks portion 610 and second picks portion 620, between the testing jack 310 of test department 300, is placed in the both sides of testing jack 310.First picks portion 610 and second picks portion 620, can comprise: guide rail 611,621, and subtend ground arranges centered by test department 300; The more than one plate 612,622 of picking of loading member 1, move horizontally along guide rail 611,621, thus alternately be displaced into for first element that receive to load the element 1 that buffer part 200 passes on pass on the position, with the element switch of test department 300 and be used for passing between second element reception and registration position of elements 1 to unloading buffer part 400; Plate fixed part 613,623 releasably is combined with and picks plate 612,622, and is set to and can moves along guide rail 611,621.
Guide rail 611,621 is picked the structure that plate 612,622 moves as being used for guiding, can be multiple structure.
Pick plate 612,622, be formed with the component positioning groove of more than one arrangement element 1, come to be used for carrying out test department 300 and to exchange with the element that unloads between the buffer part 400 with the element exchange or the test department 300 that load between the buffer part 200.
Plate fixed part 613,623, for pick plate 612,622 alternately convenient and the structure that arranges can be multiple structure, and can possess for the well heater of heating element 1 etc.Therefore pick plate 612,622, releasably be arranged at plate fixed part 613,623, in the kind as the element 1 of detected object, particularly, during the varying in size of element 1, that can alternately settle element 1 picks plate 612,622.
Plate fixed part 613,623 possesses plate handling part 612,624 is arranged, and will pick plate 612,622 and releasably be fixed in plate fixed part 613,623.Plate handling part 614,624 is picked plate 612,622 structure as being used in plate fixed part 613,623 loading and unloading, can be multiple structure, can constitute by simple handwork and pick plate 612,622 loading and unloading.
For example, as shown in Figs. 4-6, plate handling part 614,624 can comprise: support 614a, 624a, be fixed in plate fixed part 613,623; Fixed body 614b, 624b rotatably connect by possessing in the first hinge axis 614c, the 624c of support 614a, 624a, and selectively fixedly pick plate 612,622 according to rotation; Elastic body 614d, 624d prop up described fixed body 614b, 624b elasticity and are held in the first hinge axis 614c, 624c; Press body 614i, 624i contact with fixed body 614b, 624b, and form curved surface and come fixed body 614b, 624b are pressurizeed with the pressure surface that adds of fixed body 614b, 624b; Moving body 614e, 624e are connected with press body 614i, 624i, and be set to along the vertical direction (Z-direction) moves in the inside of support 614a, 624a; Handle 614g, 624g rotatably are connected in the second hinge axis 614f, the 624f that possess at moving body 614e, 624e; Fixed hook 614h, 624h are arranged at support 614a, 624a, and the end that is hung on handle 614g, 624g is also fixing.
Fixed body 614b, 624b form, and probably with the shape of letter " L " font bending, the part by bending is contacted with to be picked plate 612,622 turning and make and pick plate 612,622 and be fixed in plate fixed part 613,623.
Elastic body 614d, 624d can exemplify the use torsion spring.
Hook 614h, 624h, be preferably formed into, be the handle 614g, the 624g that rotate according to the operator, be hung on the end of handle 614g, 624g and fixing or remove the degree of the state of the end that is hung on handle 614g, 624g.
According to this structure, according to the displacement of handle 614g, 624g and mobile along the vertical direction moving body 614e, 624e, press body 614i, 624i can move along the vertical direction, thus, the posture of fixed body 614b, 624b can be along the curve form change that adds pressure surface of the press body 614i, the 624i that contact with fixed body 614b, 624b.During the posture changing of fixed body 614b, 624b, because the elastic force of elastic body 614d, 624d, it is certain that the posture of fixed body 614b, 624b can keep.
In addition, the movement along the vertical direction of moving body 614e, 624e can be carried out according to the handle 614g, the 624g that rotate centered by the second hinge axis 614f, 624f.On the other hand, when handle 614g, 624g are hung on fixed hook 614h, 624h, the rotation meeting of handle 614g, 624g is limited, thus, the mobile meeting along the vertical direction of moving body 614e, 624e and press body 614i, 624i is limited, can prevent any change of the posture of fixed body 614b, 624b thus.
As shown in Figure 5, picking plate 612,622 according to fixed body 614b, under the state that 624b fixes, with handle 614g, 624g is with the second hinge axis 614f, centered by the 624f to breaking away from fixed hook 614h, when the direction of 624h (clockwise direction among Fig. 5) is rotated, elastic body 614d, the elastic force of 624d can act on press body 614i, 624i and moving body 614e, 624e, thereby make press body 614i, 624i and moving body 614e, the downward side direction of 624e moves, and make and be contacted with fixed body 614b, the press body 614i of 624b, the position change that adds pressure surface of 624i, thus, fixed body 614b, 624b can be according to elastic body 614d, the elastic force of 624d, with the first hinge axis 614c, centered by the 624c to from picking plate 612,622 direction (clockwise direction among Fig. 5) rotations that break away from, thereby as shown in Figure 6, remove and pick plate 612,622 fix.
Another invention face, as shown in Figure 6, picking plate 612, under the state that 622 static solution removes, handle 614g, 624g is with the second hinge axis 614f, centered by the 624f to being hung on fixed hook 614h, the direction of 624h (counter clockwise direction among Fig. 6) is rotated and is fixed in fixed hook 614h, in the process of 624h, press body 614i, 624i and moving body 614e, the 624e side direction that can make progress moves, be contacted with fixed body 614b, the press body 614i of 624b, the position that adds pressure surface of 624i can be changed, thereby make fixed body 614b, 624b can be with the first hinge axis 614c, pick plate 612 to contact centered by the 624c, 622 direction (counter clockwise direction among Fig. 6) is rotated, thus, as shown in Figure 5, pick plate 612,622 can be according to fixed body 614b, 624b fixes.In addition, pick plate 612,622 according under the fixing state of fixed body 614b, 624b, the elastic force of elastic body 614d, 624d can act on fixed body 614b, 624b, can prevent any rotation of fixed body 614b, 624b thus.
As mentioned above, according to embodiments of the invention, plate 612,622 releasably is fixed in plate fixed part 613,623 plate handling part 614,624 constitutes with picking, carry out by the simple action of turning handle 614g, 624g and to pick plate 612,622 fixing and to remove fixing structure, can have thus can be very simply and easily carry out 612,622 fixing and remove the effect of fixing action.
On the other hand, test department 300, might cause taking place the situation that to test because of flowing into foreign matter etc. in the testing jack 310, in this case, existed in the past and need stop inspection device for components, and removed numerous and diverse operation of restarting inspection device for components behind the foreign matter by handwork.
Therefore, be preferably and possess cleaning section 700, be arranged at a side of test department 300, be used for coming foreign matter that under the state of coverage test socket 310 injection air removes testing jack 310 etc. by mobile.
Cleaning section 700 can have multiple structure.For example, as shown in Figures 7 and 8, cleaning section 700 can comprise: body 710, and coverage test socket 310 also forms clean on the top of testing jack 310; Drive division 720 is used for making body 710 to move between the top of a side of test department 300 and testing jack 310.
Body 710 conducts, coverage test socket 310 also forms the structure of clean on the top of testing jack 310, can be multiple structure, can have multiple shapes such as bowl shape and form airtight clean, and can be provided with, air flow circuit 711 is connected to come to each testing jack 310 injection airs with air feeder (not shown); And more than one nozzle 712, receive the air of passing on from air flow circuit 711 and come to testing jack 310 injection airs.
Meanwhile, body 710 can be connected with vent pipe 713, and the air and the foreign matter that spray by nozzle 712 are together discharged to the outside from clean.
Drive division 720 conducts are used for the structure of mobile body 710 between a side of test department 300 and testing jack 310, can be multiple structures such as hydraulic cylinder, pneumatic cylinder.
Herein, first pick portion 610 and second pick possess guide rail 611 in the portion 620,621 o'clock, cleaning section 700 can be arranged at first and pick portion 610 and second and pick portion 620, and drive division 720 constitutes and makes body 710 along carrying out linearly moving structure with guide rail 611,621 parallel directions.
On the other hand, can be provided with more than one loading and transfer instrument 810,814, loading portion 100 and pick portion 610,620 between move and be communicated to the portion of picking 610,620 from loading portion 100 selection element 1.Under the aforesaid situation, can constitute, more than one loading transfer instrument 810,814 loading portion 100 with pick portion 610,620 between move from loading portion 100 selection element 1 and be communicated to the portion of picking 610,620 structure.In addition, as mentioned above, be provided with under the situation that loads buffer part 200, carrying handover instrument 810,814 can comprise: first loads handover instrument 810, is communicated to from loading portion 100 selection element 1 and loads buffer part 200; Second loads handover instrument 814, is communicated to the portion of picking 610,620 from loading buffer part 200 selection element 1.
In addition, can be provided with more than one unloading and transfer instrument 820,824, pick portion 610,620 and unloading portion 500 between move and from pick portion 610,620 selection element 1 are communicated to unloading portion 500.Under the aforesaid situation, can constitute, more than one unloading transfer instrument 820,824 pick portion 610,620 with unloading portion 500 between move from picking the structure that portion 610,620 selection element 1 are communicated to unloading portion 500.In addition, as mentioned above, be provided with under the situation of unloading buffer part 400, unloading handover instrument 820,824 can comprise: the first unloading handover instrument 820, pass to unloading portion 500 from unloading buffer part 400 selection element 1; The second unloading handover instrument 824, from pick portion 610,620 selection element 1 are communicated to unloading buffer part 400.
Load handover instrument 810,814 and unload handover instrument 820,824 and can constitute identical or similar structure mutually.Load handover instrument 810,814 and unloading handover instrument 820,824 respectively as the structure of transferring element 1, can comprise: a plurality of Choosers, selection element 1; And drive unit, being used for along the vertical direction, direction such as (Z direction) and the horizontal direction (XY direction) moves a plurality of Choosers.
Chooser as being used for the structure that selection element 1 is transplanted on assigned address, can be multiple structure, can pass on the cylinder of air pressure to constitute by the adsorption plate that forms the vacuum pressure on element 1 and to adsorption plate.
Chooser, consider loading portion 100 and unloading portion 500 pallet 2 accepting groove 2a the interval and load the plate member 210 of buffer part 200 and unloading buffer part 400,410 loading chute 211,411 the mutual different situation in interval, can constitute and to regulate the structure at interval anyhow, also can fix anyhow at interval the semiconductor element 10 of greater number is transferred.
The drive unit of mobile a plurality of Choosers can be multiple structure according to the drive scheme of Chooser, and its structure can comprise: move up and down device, be used for moving up and down Chooser; And the move left and right device, be used for the move left and right Chooser.Move up and down device and can be the structure that all Choosers are jointly moved up and down, or be connected to make each Chooser to move up and down independently with each Chooser individual ground.The move left and right device according to the mobile scheme of Chooser, can be multiple structure, the structure that can move for the single direction along directions X or Y-direction or the structure that can move along the X-Y direction.
On the other hand, can be provided with element pressurizing tool 830,840, at test department 300 and pick between the portion 610,620 and move, and add and press to testing jack 310 from picking portion 610,620 selection element 1, and will pass on to picking portion 610,620 at the element that testing jack 310 pressurize to finish test.Element pressurizing tool 830,840 conducts reach the structure that test department 300 and second is picked handover element between the portion 620 for picking at test department 300 and first between the portion 610, according to the handover scheme of element 1, can be multiple structure.Element pressurizing tool 830,840, can comprise: the first element pressurizing tool 830, pick to move between portion 610 and the test department 300 to pick portion's 610 selection element and add from first first and press to testing jack 310, and will pass at the element that testing jack 310 pressurizes to finish test and pick portion to first; The second element pressurizing tool 840, pick to move between portion 620 and the test department 300 to pick portion's 620 selection element 1 and add from second second and press to testing jack 310, and will pass at the element that testing jack 310 pressurizes to finish test and pick portion 620 to second.As mentioned above, constitute when a pair of at element pressurizing tool 830,840, for the facility of element exchange, a pair of element pressurizing tool 830,840 can move mutually in linkage.
For example, to shown in Figure 15, element pressurizing tool 830,840 can have and loading handover instrument 810,814 and unloading handover instrument 820,824 mutual identical or similar structures as Fig. 9.Element pressurizing tool 830,840 can comprise a plurality of Choosers 831,841 of selection element 1.
On the other hand, for carry out easily plate member 210,410 with test department 300 between element exchange, interval between plate member 210,410 the loading chute 211,411 can form the 1/n at element pressurizing tool 830,840 Chooser 831,841 interval, for example forms 1/2.Herein, n is the natural number more than 2.
Particularly, the plate member 210 of unloading buffer part 400,410 loading chute 211,411 are arranged as 16 * 8, the testing jack 310 of test department 300 is arranged as at 8 * 4 o'clock, element pressurizing tool 830,840, can comprise with the interval corresponding to the testing jack 310 of test department 300 being arranged as 8 * 4 Chooser 831,841, thus element 1 that can disposable handover 8 * 4.Particularly, the Chooser that loads handover instruments 810 for the semiconductor element 10, the first that can transfer greater number is arranged as 8 * 4(8 * 2) time, element pressurizing tool 830,840 Chooser 831,841 can be arranged as 8 * 4(8 * 2).
In addition, element pressurizing tool 830,840 by in the plate member 210 of unloading buffer part 400,410 loading chute 211,411, makes element 1 derive or load in a lattice ground at interval, thereby need not to carry out Chooser 831,841 interval is regulated, thereby it is more quick that element is transferred.
On the other hand, element pressurizing tool 830,840 is necessary that kind, size according to element 1 waits to carry out Chooser 831,841 replacement.
Therefore, to shown in Figure 15, element pressurizing tool 830,840 can comprise as Fig. 9: support sector 833,843 is arranged on the inside of inspection device for components movably; The more than one module 834,844 of choosing releasably is incorporated into support sector 833,843, and is combined with more than one Chooser 831,841.
Support sector 833,843 so long as can support to choose module 834,844 structure, can be any structure.Can possess in the support sector 833,843 downside is arranged is the first support plate 833a, the 843b on plane, makes to choose module 834,844 and releasably fix.
Choose module 834,844, can comprise: second support plate 835,845, have upper side, adherence is in the downside of the first support plate 833a, 843b; Damper 839,849 is incorporated into second support plate 835,845; Heating module 838,848 is incorporated into damper 839,849; Chooser support module 836,846 is incorporated into heating module 838,848; Chooser 831,841 is fixed in Chooser support module 836,846.
As shown in figure 10, Chooser 831,841 can by, be fixed in Chooser support module 836,846 hollow combination portion part 891 constitutes with the adsorption plate 892 of the hollow of the end that releasably is incorporated into bonded block 891.Adsorption plate 892 can form the protuberance 892a that the outer peripheral face than bonded block 891 more protrudes.Bonded block 891 can releasably be fixed in Chooser support module 836,846 by guide member 893.This Chooser 831,841 possesses in choosing module 834,844 under the state of bonded block 891 and adsorption plate 892 combinations.Adsorption plate 892 is connected with suction passage 899 by bonded block 891.Adsorption plate 892 can be made of the pliability material of rubber, synthetic resin etc.
Damper 839,849 adds in the process of pressing to testing jack 310 at element 1, when playing the effect of contact force of 1 pair of testing jack 310 of regulating element, plays buffering to the effect of choosing the power that module 834,844 applies.For example, damper 839,849 can comprise: chamber 839d, 849d inner form certain space, and are formed with air pressure path 839c, 849c with space UNICOM; Elastic membrane 839a, 849a are placed in the inside of chamber 839d, 849d; Pressure-producing part 839b, 849b are connected with Chooser 831,841 by heating module 838,848, come elastic membrane 839a, 849a are pressurizeed.According to this structure, by air pressure path 839c, 849c during to the inner space of chamber 839d, 849d effect air pressure, elastic membrane 839a, 849a can elastic deformation come pressure that pressure-producing part 839b, 849b effect are stipulated.Thus, when element 1 being added press to testing jack 310 according to the elasticity of the air pressure of the inside that acts on chamber 839d, 849d and elastic membrane 839a, 849a, determine element 1 for the contact force of testing jack 310.In addition, elasticity according to air pressure and elastic membrane 839a, the 849a of the inside that acts on chamber 839d, 849d, by the pressure that acts on pressure-producing part 839b, 849b element 1 is added to press in testing jack 310 processes, choose module 834 to being applied to, 844 power cushion.
On the other hand, possess a plurality of modules 834, chosen on the element pressurizing tool 830,840 at 844 o'clock, act on the air pressure of the inner space of chamber 839d, 849d, can be adjusted to mutual difference according to a plurality of modules 834,844 of choosing.That is, utilize a plurality of modules 834,844 of choosing that a plurality of elements 1 are added in the process of pressing to a plurality of testing jacks 310, most elements 1 need be pressurized to a plurality of testing jacks 310 with uniform contact force, could carry out test uniformly to a plurality of elements 1 simultaneously.But, a plurality of module 834, specifications of 844 chosen, that is, for example, the degree of aging of the elastic force of Chooser 831,841 position, elastic membrane 839a, 849a, assembling tolerance, parts etc. can't be affirmed unanimity, and therefore a plurality of elements 1 might add unevenly and press to testing jack 310.Therefore, according to a plurality ofly choose module 834,844 air pressure to the inner space that acts on chamber 839d, 849d carry out individual ground and regulate, come that air pressure is carried out individual ground and regulate according to a plurality of modules 834,844 specification chosen, can make a plurality of elements 1 be pressurized to a plurality of testing jacks 310 with uniform contact force thus.
On the other hand, consider to choose the damper 839,849 that moves by air pressure is set on the module 834,844, support sector 833,843 and choose and can be formed with air pressure connecting path 833b, 843b, 835b, 845b on the module 834,844 is connected with damper 839,849 air pressure path 839c, 849c.This air pressure connecting path 833b, 843b, 835b, 845b can comprise: the first air pressure connecting path 833b, 843b, be formed at support sector 833,843 the first plate 833a, 843a, and with the air pressure of outside source (not shown) taking place is connected; The second air pressure connecting path 835b, 845b are formed at and choose module 834,844 second plate 835,845, make the first air pressure connecting path 833b, 843b and damper 839,849 air pressure path 839c, 849c UNICOM.Thus, need not to make air pressure that the source takes place and can be incorporated into support sector 833,843 by choosing module 834,844 with damper 839,849 air pressure path 839c, the extra assignment that 849c is connected, oneself is dynamically connected to make damper 839,849 air pressure path 839c, 849c.
Chooser support module 836,846 can be formed with suction passage 899 as supporting Choosers 831,841 part, comes and Chooser 831,841 adsorption plate 892 UNICOMs.
Suction passage 899 is connected to play the function of the path that sucks air with vacuum Hair Fixer source of students (not shown), according to sucking air by suction passage 899, can be formed with negative pressure on the adsorption plate 892, can be adsorbed in adsorption plate 892 by this negative pressure element 1.This suction passage 899 can be formed at chooses module 834,844 inside, but the present invention is not limited thereto, and suction passage 899 can be made of the independently pipe that is connected with adsorption plate 892.
On the other hand, consider that choosing module 834,844 is provided with Chooser support module 836,846, has the suction passage 899 with adsorption plate 892 UNICOMs, support sector 833,843 and choose and can be formed with vacuum on the module 834,844 and press connecting path 833c, 843c, 835c, 845c waits to be connected by suction passage 899 and pipe.This vacuum is pressed connecting path 833c, 843c, 835c, 845c, can comprise: first vacuum is pressed connecting path 833c, 843c, is formed at support sector 833,843 the first plate 833a, 843a, is connected with the vacuum Hair Fixer source of students (not shown) of outside; Second vacuum is pressed connecting path 835c, 845c, is formed to choose module 834,844 second plate 835,845, comes to press connecting path 833c, 843c UNICOM with first vacuum.Thus, the extra assignment that need not vacuum Hair Fixer source of students is connected with suction passage 899 can be incorporated into support sector 833,843 by choosing module 834,844, makes vacuum Hair Fixer source of students and suction passage 899 from being dynamically connected.
Damper 839,849 and Chooser support module 836,846 between can be provided with, as the heating module 838,848 of the heating part that is used for heating element 1, thereby make test department 300 carry out test to element 1 at a certain temperature.Can be provided with well heater 838a, 848a on the heating module 838,848.
Possess a plurality of modules 834, chosen on the element pressurizing tool 830,840 at 844 o'clock, a plurality of well heater 838a, 848a can possess respectively in a plurality of modules 834,844 of choosing.Under the aforesaid situation, a plurality of well heater 838a, 848a can independently control according to a plurality of modules 834,844 of choosing.
As mentioned above, choose on the module 834,844 and can also possess temperature sensor 838b, 848b, be connected with well heater 838a, 848a to come direct induction heater 838a, 848a temperature or be connected other objects that well heater 838a, 848a be connected and connect the temperature of indirect induction heater 838a, 848a.A plurality of well heater 838a, 848a possess respectively in a plurality of modules 834,844 o'clock chosen, and a plurality of temperature sensor 838b, 848b can possess respectively in a plurality of modules 834,844 of choosing.A plurality of temperature sensor 838b, 848b respond to the temperature of a plurality of well heater 838a, 848a, according to the result by a plurality of temperature sensor 838b, 848b induction, control the temperature of a plurality of well heater 838a, 848a.
As mentioned above, each is chosen module 834,844 and all possesses well heater 838a, 848a and temperature sensor 838b, 848b, according to the result by a plurality of temperature sensor 838b, 848b induction, the temperature of control heater 838a, 848a independently, thus can be according to the characteristic of a plurality of elements 1 of being chosen by element pressurizing tool 830,840, independent temperature adjustment carries out more exactly the test for element 1.
At this moment, consider to choose to be provided with well heater 838a, 848a or temperature sensor 838b, 848b on the module 834,844, support sector 833,843 the first plate 833a, 843a and choose module 834,844 second plate 835,845 can be made of heat insulation material.In addition, heating module 838,848 and damper 839,849 between and can be provided with heat insulating member (not shown) between the damper 839,849 and second plate 835,845.In addition, choose and to be provided with more than one first connector 91 on the module 834,844, be used for well heater 838a, 848a or temperature sensor 838b, 848b supply power or reception and registration signal.
In addition, can be provided with second connector 92 in the described support sector 833,843, with choose module 834,844 in conjunction with the time, by with first connector 91 in conjunction with coming well heater 838a, 848a or temperature sensor 838b, 848b supply power and passing on signal.
The terminal of the terminal of first connector 91 and second connector 92 can wait by the mode of mutual insertion to be electrically connected mutually etc., can be multiple structure.
Structure according to aforesaid first connector 91 and second connector 92, can need not extra connection operation, can be by choosing module 834,844 and support sector 833,843 combination comes well heater 838a, 848a or temperature sensor 838b, 848b supply power and pass on signal.That is, first connector 91 and second connector 92, choose module 834,844 and support sector 833,843 in conjunction with the time, be arranged at the part that is in contact with one another, thus choose module 834,844 and support sector 833,843 when mutually combining from being dynamically connected.
On the other hand, be used for other examples of the heating part of heating element 1, as Figure 14 and shown in Figure 15, on the element pressurizing tool 830,840, can possess the heated air injection unit is arranged, spray heated air to the element of choosing on the Chooser 831,841 1.By the heated air injection unit, element 1 can be heated by the heated air of spraying to element 1, thus, can carry out high temperature test to element 1.Possess a plurality of modules 834, chosen on the element pressurizing tool 830,840 at 844 o'clock, a plurality of heated air injection units can possess respectively in a plurality of modules 834,844 of choosing.Under the aforesaid situation, the temperature of the heated air of spraying by a plurality of heated air injection units can independently be controlled according to a plurality of modules 834,844 of choosing.
The heated air injection unit can comprise: track segment 893, be placed in the periphery of adsorption plate 892, and together be formed with the injection orifice 894 that sprays heated air with adsorption plate 892; Heated air stream 895 is connected with heated air feeder 896, and described heated air feeder and injection orifice 894 UNICOMs supply with heated air.Heated air stream 895 can be formed at heating module 838,848 inside.The shape of heating injection orifice 894 can form, the multiple shape that will spray to the element 1 that is adsorbed in adsorption plate 892 by the heated air that injection orifice 894 sprays.The periphery of adsorption plate 892 is in order to form injection orifice 894, and track segment 893 under the state separated by a certain interval along the outer peripheral face of adsorption plate 892, is incorporated into the periphery that Chooser support module 836,846 wraps up adsorption plate 892.Injection orifice 894 is connected with heated air feeder 896 by heated air stream 895.Heated air stream 895 can be formed at chooses module 834,844 inside, but the present invention is not limited thereto, and heated air stream 895 can be made of the independently pipe that is connected with adsorption plate 892.
According to aforesaid structure, element pressurizing tool 830,840 Chooser 831,841 adsorption plate 892 are under the state that is adsorbed in element 1, operation according to heated air feeder 896, spray heated air from the injection orifice 894 of the periphery that is formed at adsorption plate 892, the heated air of injection is collided on the element 1 that is adsorbed in adsorption plate 892 and is made element 1 heating.As mentioned above, the heating of element 1 is directly to carry out by heated air, therefore with utilize well heater 838a, 848a to come the situation of element 1 heating is compared choosing module 834,844, the heat that is used for heating element 1 passes on efficient to increase, thereby heating element 1 promptly not only, and the temperature that can minimize element 1 descends, and can make element 1 carry out detection accurately thus under the temperature of having set.
Be formed with when spraying the injection orifice 894 of heated air from the periphery of adsorption plate 892, choose module 834,844 and can not be provided with well heater 838a, 848a, thus, can remove for choosing that module 834,844 arranges well heater 838a, 848a and the complicacy of the design that causes and the difficulty of assembling.Certainly, choose on the module 834,844 and can possess having heaters 838a, 848a and heated air injection unit simultaneously.
In addition, element pressurizing tool 830,840 is adding element 1 in the process of pressing to testing jack 310, can spray heated air from injection orifice 894, and the heated air of injection is collided to testing jack 310 and made testing jack 310 heating.As mentioned above, the heating of testing jack 310 is directly to carry out by heated air, therefore with on the testing jack 310, well heater is set and uses it to the situation of testing jack 310 heating is compared, can remove the complicacy of the design that causes at testing jack 310 well heater being set and the difficulty of assembling.
On the other hand, choose and to possess temperature sensor 838b, the 848b that is useful on the induction heating gas temperature on the module 834,844.Thus, can control to the temperature of the heated air of element 1 injection according to the result by a plurality of temperature sensor 838b, 848b induction.Possess respectively in a plurality of at a plurality of heated air injection units and to choose under module 834,844 the situation, a plurality of temperature sensor 838b, 848b can possess respectively in a plurality of modules 834,844 of choosing.A plurality of temperature sensor 838b, 848b induction according to the result who responds to by a plurality of temperature sensor 838b, 848b, can be controlled the temperature of heated air to each temperature of choosing the heated air that element 1 that module 834,844 chooses sprays.
As mentioned above, all possess respectively heated air injection unit and temperature sensor 838b, 848b are arranged because each chooses module 834,844, and according to the result by a plurality of temperature sensor 838b, 848b induction, independently control to the temperature of the heated air of element 1 injection, thus can be according to the characteristic of a plurality of elements 1 of being chosen by element pressurizing tool 830,840, independent temperature adjustment carries out more exactly the test for element 1.
Support sector 833,843 and choose module 834, a side of 844 can possess that fastening support sector 833 is arranged, 843 and choose module 834,844 fastening unit 850, make and choose module 834,844 and releasably be incorporated into support sector 833,843, support sector 833,843 and choose module 834,844 opposite side and can possess to have to make and choose module 834,844 and be held in support sector 833,843 first supporter 860.According to aforesaid structure, support sector 833,843 and choose module 834,844 and can under the states of supporting mutually by first supporter 860, be undertaken fastening mutually by fastening unit 850.
Fastening unit 850 can comprise: ring 851 is arranged at and chooses module 834, a side of 844; Ring moving-member 852 moves hook 851 along the vertical direction; Ring hook part 853 is arranged at support sector 833, a side of 843 makes ring 851 be hung on ring hook part 853.According to aforesaid structure, will encircle 851 and be hung on ring hook part 853, and by utilizing ring moving-member 852 to pull down rotating ring 851, make support sector 833,843 and to choose module 834,844 fastening mutually.
First supporter 860 can comprise: protrude sheet 861, choose module 834,844 opposite side protrudes with certain-length; Protrude sheet fixed part 862, be arranged at and choose module 834,844 opposite side and make and protrude that sheet 861 inserts and fixing.Protruding sheet fixed part 862 can be by, first holding components 863, at support sector 833,843 downside, that is, protrudes with certain-length at the downside of the first plate 833a, 843a, inserts the space of protruding sheet 861 thereby provide; Second holding components 864 is supported by first holding components 863, and settles from support sector 833,843 downside separated by a certain intervally.Second holding components 864 is preferably, and forms curved surface with protruding the face that sheet 861 contact, makes protrusion sheet 861 be inserted into support sector 833,843 downside and the space between second holding components 864 easily.In addition, protrude sheet fixed part 862, can comprise: elastomeric element 865, elasticity are supported second holding components 864; Fixed part 866 is fixed in support sector 833,843 with elastomeric element 865.Therefore because second holding components 864 comes the elasticity support by elastomeric element 865, protrude sheet 861 and be inserted into support sector 833,843 downside and the space between second holding components 864 easily.In addition, after protruding sheet 861 and being inserted into support sector 833,843 downside and the space between second holding components 864, elastomeric element 865 can be to 864 pressurizations of second holding components, make that to protrude sheet 861 firmly fixing, thereby not from support sector 833,843 downside and the disengaging of the space between second holding components 864.
According to aforesaid structure, protrude that sheet 861 is inserted into support sector 833,843 downside and the space between second holding components 864 and the state fixed under, ring 851 is hung on ring hook part 853, and by utilizing ring moving-member 852 to pull down the simple action of rotating ring 851, can make support sector 833,843 and choose module 834,844 and mutually combine.
On the other hand, support sector 833,843 and choose to be preferably on the module 834,844 to possess second supporter 870 is arranged, guiding support sector 833,843 downside and choose module 834,844 upper side, namely, second plate 835,845 the mutual adherence of upper side, make thus support sector 833,843 and choose module 834,844 the action that mutually combines is more prone to carry out.
Second supporter 870 can comprise: protrude bar 871, from choose module 834,844 upper side protrudes, and forms the head 875 with end-edge part on top; Caving at support sector 833,843 downside in head resettlement section 872, accommodates the head 875 that protrudes bar 871; And link plate 873, be formed with the head patchhole 874 that inserts head 875.According to aforesaid structure, in support sector 833,843 and choose in the process that module 834,844 mutually combines, head 875 is contained in the inside of head resettlement section 872 by head patchhole 874, by for support sector 833,843 choose module 834,844 move horizontally relatively, the end-edge part of head 875 is hung on link plate 873, makes thus to choose module 834,844 and be held in support sector 833,843.
Aforesaid second supporter 870 is together carried out and is made support sector 833,843 and choose the effect that module 834,844 interfixes, and therefore, can only possess any one structure in first supporter 860 and second supporter 870 and get final product.
On the other hand, support sector 833,843 and choose between the module 834,844 is preferably and possesses determining positions unit 880, determines support sector 833,843 and choose binding site between the module 834,844.
For example, determining positions unit 880 can comprise: protrude rod 881, from choose module 834,844 upper side protrudes; Protrude excellent insertion groove 882, cave in from support sector 833,843 downside.According to aforesaid structure, in support sector 833,843 and choose in the process that module 834,844 mutually combines, protrude rod 881 and be inserted into and protrude excellent insertion groove 882, decide support sector 833,843 and choose module 834,844 binding site.
On the other hand, in support sector 833,843 and choose under the state that module 834,844 mutually combines, support sector 833,843 downside and choose module 834,844 the mutual adherence of upper side.Therefore support sector 833,843 and choose to be preferably on the module 834,844 and possess induction pick-up 889 responds to support sector 833,843 downside and chooses the mutual adherence of module 834,844 upper side.Among the figure, though disclose the structure that induction pick-up 889 is placed in support sector 833,843 downside, the present invention is not limited thereto, and induction pick-up 889 can possess in choosing module 834,844 upper side.Induction pick-up 889 can be made of the pressure transducer of sensitive surface contact.Whether the mutual adherence that utilizes this induction pick-up 889 can respond to support sector 833,843 downside and choose module 834,844 upper side can judge support sector 833,843 and choose module 834,844 and whether mutually combine according to its induction result.
Element pressurizing tool 830,840, along continuous straight runs (Y direction) and vertical direction (X-direction) move, to be loaded into first and pick element 1 that portion 610 and second picks portion 620 and move testing jack 310 to test department, and the element 1 that will finish test moves from testing jack 310 and picks portion 610 and second to first and pick portion 620.
For example, shown in Figure 16 to 19, possess horizontally moving device 801, be connected with element pressurizing tool 830,840 respectively, along continuous straight runs (Y direction) is mobile respectively to make element pressurizing tool 830,840; Possess the first vertical mobile device 802, be connected with element pressurizing tool 830,840 respectively, (Z-direction) moves to make element pressurizing tool 830,840 distinguish vertically.
Horizontally moving device 801 can comprise: link 830b, 840b are connected to moving and it can be moved in the vertical direction on supporting axis 830a that constraint vertically prolongs from element pressurizing tool 830,840, the 840a horizontal direction.Horizontal drive portion 803, along continuous straight runs moves link 830b, 840b.
Link 830b, 840b are last can be formed with through hole 830c, 840c, vertically connect supporting axis 830a, 840a are inserted, thereby but make the restrained and along continuous straight runs of movement on supporting axis tool 830,840 vertical direction be connected in link 830b, 840b movably.Be inserted into through hole 830c, the 840c of link 830b, 840b along with supporting axis 830a, 840a, mobile meeting on the horizontal direction of supporting axis 830a, 840a comes restrained by link 830b, 840b, but the movement of the vertical direction of supporting axis 830a, 840a can be not restrained.Through hole 830c, 840c play the effect of the movement on the vertical direction that guides supporting axis 830a, 840a simultaneously.
Horizontal drive portion 803 can comprise: for example, band 803a is connected with link 830b, 840b; Belt pulley 803b has batched band 803a; Electric rotating machine (not shown), 803b is connected with belt pulley.According to aforesaid structure, belt pulley 803b is rotated according to the revolving force of electric rotating machine (not shown), rotation according to belt pulley 803b, band 803a and the link 830b, the 840b that are connected with band 803a can move by along continuous straight runs, are thus connected in supporting axis 830a, 840a and the element pressurizing tool 830,840 of link 830b, 840b and can move by along continuous straight runs.On the other hand, disclose according to embodiments of the invention and to have possessed band 803a and belt pulley 803b as the structure of horizontal drive portion 803, but the present invention is not limited thereto, as horizontal drive portion 803, can use by the multiple level such as actuator, linear electric motors or ball screw device of hydraulic pressure or air pressure running and transfer utensil.
The first vertical mobile device 802 can comprise: movable block 830d, 840d are connected to moving and it can be moved in the vertical direction on supporting axis 830a that constraint vertically prolongs from element pressurizing tool 830,840, the 840a horizontal direction respectively; The driven joint of cam 830e, 840e are connected in movable block 830d, 840d; Cam part 830g, 840g are formed with the cam path 830f, the 840f that insert the driven joint of cam 830e, 840e; Riser guide 830h, 840h are connected with movable block 830d, 840d, guide the movement on the vertical direction of movable block 830d, 840d.
Movable block 830d, 840d are last can be provided with guiding rail 830i, 840i, is connected with the end of supporting axis 830a, 840a and along continuous straight runs prolongs to guide movement on the horizontal direction of supporting axis 830a, 840a.Thus, supporting axis 830a, 840a can carry out the movement of horizontal direction along guiding rail 830i, 840i.
On cam part 830g, the 840g, be connected with drive motor 830j, 840j respectively, thus, the driving by drive motor 830j, 840j is rotated cam part 830g, 840g.This cam part 830g, 840g can be connected to possess for a pair of with a pair of element pressurizing tool 830,840 respectively.
Cam path 830f, 840f can form and comprise: have between first radial regions of certain radius and between second radial regions; Connect between the variable region that reaches between first radial regions between second radial regions.When cam path 830f, 840f had as mentioned above structure, when the driven joint of cam 830e, 840e were positioned between first radial regions of minor radius, element pressurizing tool 830,840 can be in the state that is positioned at upside; The driven joint of cam 830e, when 840e is positioned between the variable region, element pressurizing tool 830,840 is side shifting or side shifting downwards upwards; The driven joint of cam 830e, 840e are positioned at radius greater than between second radial regions between first radial regions time, and element pressurizing tool 830,840 can be kept the state that is positioned at downside.
Movable block 830d, 840d insert cam path 830f, 840f by the driven joint of cam 830e, 840e and are connected with channel parts 830g, 840g.In addition, movable block 830d, 840d can be connected in riser guide 830h, 840h and carry out lifting along the vertical direction.Thus, when channel parts 830g, 840g rotate, the driven joint of cam 830e, 840e can move in the vertical direction along the shape of cam path 830f, 840f, thus, the movable block 830d, the 840d that are connected with the driven joint of cam 830e, 840e can move in the vertical direction, and the element pressurizing tool 830,840 that is connected with movable block 830d, 840d by supporting axis 830a, 840a can move in the vertical direction.
Riser guide 830h, 840h can be fixed on the fixture 804 that the top of movable block 830d, 840d possesses.But the present invention is not limited thereto, so long as can guide the lifting of movable block 830d, 840d, riser guide 830h, 840h can use multiple structure.
According to aforesaid structure, element pressurizing tool 830,840, come along continuous straight runs to move by horizontally moving device 801, thus, element pressurizing tool 830,840 can be picked between portion 610 and the testing jack 310 and second picks that along continuous straight runs moves between portion 620 and the testing jack 310 first.In addition, element pressurizing tool 830,840, can pass through the first vertical mobile device 802, come to pick the top of portion 620 on first top, second of picking portion 610 and the top of testing jack 310 is vertically moved, and selection element 1 or loading member 1.This element pressurizing tool 830,840 vertically moves on the top of testing jack 310 and in order to make element 1 firmly be incorporated into testing jack 310, the while can be carried out by certain power and element 1 be added the effect of pressing to testing jack 310.
As mentioned above, element pressurizing tool 830,840 vertically moves according to the rotation of cam part 830g, 840g, thus the shift position on setting member pressurizing tool 830,840 the vertical direction exactly.
In addition, add at element 1 and to press in the process that testing jack 310 tests, keep the pressurized state to the element 1 of testing jack 310 of certain hour.For this reason, do not utilize cam part 830g, 840g, and only be to utilize the electric rotating machine of ball screw device or move when using motor as the straight line of linear electric motors, need lasting the movement with motor to straight line to apply the big voltage that pressurizes for element 1, come to apply constant power to element 1 always, but when utilizing cam part 830g, 840g, the variation of the voltage that applies on the pressurized state of 310 pairs of elements 1 of testing jack and drive motor 830j, the 840j is irrelevant, is to keep according to the shape between second radial regions of cam part 830g, 840g.Therefore, at the first vertical mobile device 802 that is used for element pressurizing tool 830,840 is moved in the vertical direction, when its structure comprises cam part 830g, 840g, only utilize straight line to move with the situation of motor and compare with not utilizing cam part 830g, 840g, have the effect of reduction energy.
On the other hand, the kind of the kind of Ce Shi element 1 or testing jack 310 as required, can change element pressurizing tool 830,840 Chooser 831,841 pressing positions that need be positioned at, carry out test to element 1 exactly thereby make element 1 be pressurized to testing jack 310 exactly.In addition, be necessary to element pressurizing tool 830,840 that whether descending exactly makes element 1 be pressurized to testing jack 310 to confirm and check.
Therefore, in order to change or to confirm element pressurizing tool 830,840 pressing position, at first the horizontally moving devices 801 that connect for element pressurizing tool 830,840 and the first vertical mobile device 802 are along the vertical direction after the lifting, whether rotating cam parts 830g, 840g and decision element pressurizing tool 830,840 pressing position be consistent with the pressing position that needs are set, that is reference position unanimity.
For this reason, as Figure 20 and shown in Figure 21, inspection device for components according to an embodiment of the invention, can comprise: the second vertical mobile device 805, be connected with the element pressurization part that is constituted by element pressurizing tool 830,840, horizontally moving device 801 and the first vertical mobile device 802, make the element pressurization part vertically linear mobile; Control part 807, when by the second vertical mobile device 805 element pressurizing tool 830,840 being contacted with test department 300, detection is applied to the load of test department 300 by the second vertical mobile device 805, and the described element pressurizing tool 830 when detected load reached the benchmark load of having set, 840 determining positions are pressing position.
The second vertical mobile device 805, can be connected with the first vertical mobile device 802 and horizontally moving device 801, under the aforesaid situation, the first vertical mobile device 802 and horizontally moving device 801 can together carry out lifting by the second vertical mobile device 805, thereby make element pressurizing tool 830,840 carry out lifting.
Be contacted with the part of test department 300 in the element pressurizing tool 830,840, can for be positioned at Chooser 831,841 around choose module 834,844 downside, that is, can be Chooser support module 836,846 downside.For this reason, in Chooser support module 836,846 the downside, the part that contacts with test department 300 can be made of the metal as aluminium.
And the part that contacts with element pressurizing tool 830,840 in the test department 300 can be the upper side of the supporting frame 312 of supporting testing jack 310.For this reason, the metal of the part that contacts with element pressurizing tool 830,840 in the upper side of supporting frame 312 such as aluminium constitutes.Carry out in the process of test element 1 being pressurized to testing jack 310, choose the upper side that module 834,844 downside are contacted with supporting frame 312, come limiting element pressurizing tool 830,840 decline to decide pressing position for the element 1 of testing jack 310.
Therefore, the change of kind of the terminal 311 that possesses along with the inside of the kind of the kind of element 1, testing jack 310 or testing jack 310 etc., and when making the Level Change of supporting frame 312, whether be contacted with the upper side of supporting frame 312 by decision element pressurizing tool 830,840 downside, come decision element 1 whether to be positioned at pressing position.
For this reason, can consider to possess the scheme of sensor, come the downside of sensing element pressurizing tool 830 whether to be contacted with the upper side of supporting frame 312, under the aforesaid situation, the shortcoming that can have the expense increase along with possessing of sensor, consider sensor position etc. is set the time, can have element pressurizing tool 830,840 and the structure of testing jack 310 complicated problems that becomes.
Therefore, possess control part 807 is arranged, when element pressurizing tool 830,840 contacts with test department 300, the load variation amount of the induction second vertical mobile device 805, and the variable quantity that utilizes load detects the load that applies on the test department 300, and the described element pressurizing tool 830 when detected load is arrived the benchmark load of having set, 840 determining positions are pressing position.
As shown in figure 20, control part 807 is to comprise the ball screw device of motor 806 or during the band handover utensil that is connected with belt pulley by motor 806, can be connected to respond to the load as motor 806 moments of torsion with motor 806 at the second vertical mobile device 805.According to aforesaid structure, element pressurizing tool 830,840 is under the state that is not contacted with test department 300, when by the second vertical mobile device 805 element pressurizing tool 830,840 being descended, variable quantity in the load of the motor 806 of control part 807 induction is little, or element pressurizing tool 830,840 is when being contacted with test department 300, and the load meeting of induction increases in the control part 807.Thus, control part 807, the load of meeting induction motor 806, and the load of utilization induction, when element pressurizing tool 830,840 contacts with test department 300, detection is applied to the load of test department 300 by the second vertical mobile device 805, and the described element pressurizing tool 830 when detected load arrived the benchmark load of having set, 840 determining positions are pressing position.
As another example, the second vertical mobile device 805 is during for the linear electric motors that utilize the electromagnetic interaction between permanent magnet and electromagnet and turn round, and control part 807 constitutes the load of induction linear electric motor.
Below, to utilizing aforesaid structure, the method for setting member pressurizing tool 830,840 pressing position describes.
At first, in the element pressurizing tool 830,840, make the first element pressurizing tool 830 be positioned at the top of the test department 300 with height of having set, namely, after being positioned at the top of supporting frame 312, the cam part 830g that is connected with the first element pressurizing tool 830 of rotation makes the first element pressurizing tool 830 be positioned at the extreme lower position that the rotation first element pressurizing tool 830 by cam part 830a can descend.
Afterwards, the running second vertical mobile device 805, the descending member pressurization part is carried out the process that the first element pressurizing tool 830 is descended slowly inchmeal.Meanwhile, control part 807 is carried out the process of the load that the induction first element pressurizing tool 830 pairs of test departments 300 apply by the load of responding to second mobile device 805.
As Figure 20 and shown in Figure 21, along with the first element pressurizing tool 830 is descended, the first element pressurizing tool 830 can be contacted with test department 300, and thus, the load meeting that the first element pressurizing tool 830 is applied to test department 300 changes.At this moment, control part 807 when the load that applies at 830 pairs of test departments 300 of the first element pressurizing tool reaches the benchmark load, is judged that the position of the first element pressurizing tool 830 is consistent with the pressing position of having set, thereby is stopped the running of the second vertical mobile device 805.
As mentioned above, finish the process of the pressing position of setting the first element pressurizing tool 830 after, carry out the process of the pressing position of setting the second element pressurizing tool 840 by the process identical with the process of the pressing position of setting the first element pressurizing tool 830.
By aforesaid process, when setting member pressurizing tool 830,840 pressing position, by element pressurizing tool 830,840 selection element 1, carry out adding the test process of the element 1 of pressing to testing jack 310.
As mentioned above, inspection device for components according to an embodiment of the invention, be necessary according to the kind of element 1 or the kind regulating element pressurizing tool 830 of testing jack 310, during 840 pressing position, perhaps, be necessary to confirm and check element pressurizing tool 830, whether 840 drop to this pressing position exactly when making element 1 be pressurized to testing jack 310, induction is turned round the second vertical mobile device 805 and is made element pressurizing tool 830, the load of 840 descend when the being contacted with test department 300 induction second vertical mobile device 805, utilize the load of induction to detect the load that is applied to test department 300, when detected load arrives the benchmark load of having set, by with element pressurizing tool 830,840 determining positions is pressing position, thereby can be easily and determine element pressurizing tool 830 exactly, 840 pressing position.
On the other hand, as shown in figure 10, be used for transferring loading handover instrument 810,814, unloading handover instrument 820,824 or the element pressurizing tool 830 of element 1,840 Chooser 891, be combined with the adsorption plate 892 with materials such as rubber at its end, make the absorption of element 1 easy, when element 1 change, because wearing and tearing exist when bad in absorption, during through maintaining etc., need alternately adsorption plate 892.
But in the past, the replacement of adsorption plate 892 is to be made of handwork, needs to separate that Chooser 891 is replaced one by one etc., has very not convenient problem.
For this reason, the present invention can also comprise: adsorption plate replacement portion 900, replacement is incorporated into respectively and loads the adsorption plate 892 at least one Chooser 891 in handover instrument 810,814, unloading handover instrument 820,824 or the element pressurizing tool 830,840 automatically.Herein, Chooser 891 can load the Chooser on handover instrument 810,814 and the unloading handover instrument 820,824 and possess Chooser 831,841 on element pressurizing tool 830,840 for possessing.
Extremely shown in Figure 27 as Figure 22, adsorption plate replacement portion 900, by consider to load handover instrument 810,814, unloading handover instrument 820,824 or element pressurizing tool 830,840 mobile route is placed in suitable position, can comprise: adsorption plate resettlement section 910 is formed with a plurality of adsorption plate receiving spaces 911 that the adsorption plate 892 that makes Chooser 891 inserts; Adsorption plate is chosen portion 920, is arranged at least a portion in the adsorption plate resettlement section 910, chooses the adsorption plate that is contained in the adsorption plate receiving space 911.
Herein, being provided with adsorption plate chooses in the adsorption plate resettlement section 910 of portion 920 and has a part at least, idle adsorption plate receiving space 911, thereby choosing portion 920 by adsorption plate comes from Chooser 891 to separate adsorption plate 892 and accommodates, adsorption plate is chosen the adsorption plate resettlement section 892 that has a part in the portion 920 at least, inserts new adsorption plate 892 on the Chooser 891 of having removed adsorption plate 892.
Adsorption plate resettlement section 910 is formed with a plurality of adsorption plates 892, constitute, choose portion 920 by adsorption plate and separate from Chooser 891 that adsorption plates 892 are accommodated or insert new adsorption plate 892 structures to the Chooser 891 of having removed adsorption plate 892, can be multiple structure.
As an example, adsorption plate resettlement section 910 can comprise the resettlement section body 912 that is formed with a plurality of adsorption plate receiving spaces 911.
Resettlement section body 912, the structure as forming adsorption plate receiving space 911 can be multiple structure.
Adsorption plate receiving space 911 as taking in the adsorption plate 892 that separates from Chooser 891 or taking in the structure that will be incorporated into the new adsorption plate 892 on the Chooser 891 of having removed adsorption plate 892, so long as accommodate adsorption plate 892, can be multiple structures such as groove.
Adsorption plate is chosen portion 920, as choose the structure that portion 920 separates adsorption plate 892 from Chooser 891 by adsorption plate, can be for being arranged on the resettlement section body 912, and after adsorption plate 892 inserts adsorption plate receiving space 911 in conjunction with the state with Chooser 891, choose the multiple structures such as structure of adsorption plate.
For example, described adsorption plate choose portion 920 can be according to by hook and remove the clamper of choosing/removes the clamper of choosing, utilize annular attitude etc. of hook and by contacting choosing/remove to choose etc. and choosing mode of clamping, can be multiple structure.
As another example again, adsorption plate is chosen portion 920, can comprise: moving-member 921, when covering resettlement section body 912 top, can along with top parallel direction, that is, horizontal direction arranges movably.
At this moment, moving-member 921, as choosing/remove the structure of choosing by what move horizontally to be used for hook and remove hook, can be multiple structure, for example,, comprising: a plurality of perforation parts 922 to shown in Figure 27 as Figure 22, the state that is incorporated into Chooser 891 at adsorption plate 892 connects, and can move along adsorption plate receiving space 911 thereby form; A plurality of hook portions 923 are connected to and connect part 922, are incorporated under the state of Chooser 891 when moving from adsorption plate receiving space 911 at adsorption plate 892, hook adsorption plate 892, and Chooser 891 can be moved.
Particularly, in order to improve the hook effect according to moving-member 921, adsorption plate 892 can be formed with protuberance 892a, outer peripheral face than described Chooser 891 protrudes more, at this moment, hook portion 923 forms greater than the outer peripheral face of Chooser 891 and less than the outer peripheral face of protuberance 892a, thereby when side direction moves on Chooser 891, hook adsorption plate 892.
The moving-member 921 that adsorption plate is chosen portion 920 is considered adsorption plate 892 and is combined with varying in size of radius in the Chooser 891 of adsorption plate 892, by possessing greater than the little hook portion 923 of radius at least a portion of the perforation part 922 of the maximum radius of adsorption plate 892 and adsorption plate 892, constitute thus when adsorption plate 892 inserts adsorption plate receiving space 911, perforation part 922 is positioned on the adsorption plate receiving space 911; When separating adsorption plate 892 from Chooser 891, be positioned at hook portion 923.
On the other hand, adsorption plate is chosen the moving-member 921 of portion 920, it is characterized in that, move to the hook of adsorption plate 892 and the position of removing hook, though not shown, can carry out linearity movement etc. by linear mobile device, drive it by multiple drive source and move.
On the other hand, when from load handover instrument 810,814, unloading handover instrument 820,824 or element pressurizing tool 830,840 Chooser 891, replacing adsorption plate 892, the position of adsorption plate replacement portion 900, at first move to and be combined with adsorption plate and choose the adsorption plate resettlement section 910 of portion 920 and separate (Figure 23 to Figure 25) after the adsorption plate 892, move to accommodate new adsorption plate 892 adsorption plate resettlement section 910 in conjunction with new adsorption plate 892(Figure 24 and Figure 25), finish adsorption plate 892 and replace back executive components 1 and transfer operation.
On the other hand, be used for transferring loading handover instrument 810,814, unloading handover instrument 820,824 or the element pressurizing tool 830 of aforesaid element 1,840 structure, beyond inspection device for components, according to the classification operation of the classification of executed testing result executive component or, carry out detecting element and detect the detection of minute class component and the element handling procedure of classification operation according to it, can certainly be applicable to that element is loaded into pallet to load, and transfer by more than one handover instrument in the element processing journey of element.
More than, the preferred embodiments of the present invention have been carried out explanation illustratively, but scope of the present invention is not limited to aforesaid specific embodiment, can carry out suitable change in technical scope.

Claims (26)

1. an inspection device for components is characterized in that, comprising:
Loading portion loads the more than one pallet that loads a plurality of elements;
Load buffer part, receive the element of passing on from the pallet of described loading portion and load temporarily by loading the handover instrument;
Test department receives from the element of described loading buffer part reception and registration and carries out test;
The unloading buffer part centered by described test department, is arranged at the position with described loading buffer part subtend, receives the element of finishing test by described test department;
Unloading portion, according to the test result of described test department, by unloading handover instrument to the element that the is loaded into described unloading buffer part loading of classifying;
More than one element pressurizing tool is used for transferring element between described loading portion, described test department and described unloading portion.
2. an inspection device for components is characterized in that, comprising:
Loading portion loads the more than one pallet that loads a plurality of elements;
Test department comprises a plurality of testing jacks, be used for to receive the element of passing on from described loading portion and comes each element is tested;
Unloading portion is according to the test result of described test department, to the element of the finishing test loading of classifying;
More than one handover instrument is transferred element between described loading portion, described test department and described unloading portion,
Described handover instrument comprises a plurality of Choosers, is combined with adsorption plate respectively endways,
Have at least in the described handover instrument on one the handover instrument also to comprise adsorption plate replacement portion, replacement is combined in the described adsorption plate on the described Chooser respectively automatically.
3. inspection device for components according to claim 2 is characterized in that, described adsorption plate replacement portion comprises:
Plural adsorption plate resettlement section is formed with a plurality of adsorption plate receiving spaces that the adsorption plate that makes described Chooser inserts; Adsorption plate is chosen portion, is arranged at least a portion in the described adsorption plate resettlement section, chooses the adsorption plate that is contained in the described adsorption plate receiving space,
Being provided with described adsorption plate chooses in the described adsorption plate resettlement section of portion and has a part at least, idle described adsorption plate receiving space, thereby coming to separate described adsorption plate by the described adsorption plate portion of choosing from described Chooser accommodates, have the adsorption plate resettlement section of a part in the described adsorption plate resettlement section at least, the adsorption plate that insertion will be replaced is incorporated on the Chooser of removal described adsorption plate.
4. inspection device for components according to claim 3 is characterized in that,
Described adsorption plate resettlement section comprises: the resettlement section body, be formed with described a plurality of adsorption plate receiving space,
Described adsorption plate is chosen portion, is arranged at described resettlement section body, and described adsorption plate is chosen described adsorption plate after being incorporated into and being inserted into described adsorption plate receiving space under the state of described Chooser.
5. inspection device for components according to claim 4 is characterized in that,
The described adsorption plate portion of choosing comprises: moving-member, cover above the body of described resettlement section, and be set to can be along moving with top parallel direction,
Described moving-member comprises: a plurality of perforation parts, and be incorporated at described adsorption plate under the state of described Chooser and connect, can move to described adsorption plate receiving space thereby form; A plurality of hook portions form respectively with the described part that connects and are connected at described adsorption plate and are incorporated under the state of described Chooser when moving to described adsorption plate receiving space, hook described adsorption plate, and described Chooser is moved.
6. inspection device for components according to claim 5 is characterized in that,
Described adsorption plate is formed with protuberance, protrudes more than the outer peripheral face of described Chooser,
Described hook portion forms greater than the outer peripheral face of described Chooser and less than the outer peripheral face of described protuberance, thereby when side direction moves on described Chooser, hooks described adsorption plate.
7. according to any described inspection device for components in the claim 2 to 6, it is characterized in that, also comprise:
Load buffer part, receive the element of passing on from the pallet of described loading portion and load temporarily by loading the handover instrument;
The unloading buffer part centered by described test department, is arranged at the position with described loading buffer part subtend, receives the element of finishing test by described test department.
8. inspection device for components according to claim 7 is characterized in that, comprising:
First picks portion and second picks portion, by described more than one handover instrument, will be communicated to described test department from the element that described loading buffer part receives and maybe will be communicated to described unloading buffer part from the element that described test department receives.
9. inspection device for components according to claim 8 is characterized in that,
Described first picks portion and second portion of picking carries out the subtend setting with described test department as the center,
Described first picks portion and second portion of picking comprises separately: guide rail; And the more than one plate of picking, move along described guide rail, pass on the position, pass on second element reception and registration position of element to replace mobile with the element replacement position of described test department to described unloading buffer part for first element of the element that receives reception and registration from described loading buffer part.
10. inspection device for components according to claim 8 is characterized in that,
Described handover instrument comprises: a pair of element pressurizing tool, and element is communicated to described test department or element is communicated to described unloading portion from described test department from described loading portion,
Described a pair of element pressurizing tool is picked between portion and the described test department described first respectively, and
Described second picks between portion and the described test department and moves, thereby will pick the element that plate loads and be communicated to test department or element is communicated to the described plate of picking from described test department from described.
11. an inspection device for components is characterized in that, comprising:
Loading portion loads the more than one pallet that loads a plurality of elements;
Test department comprises a plurality of testing jacks, be used for to receive the element of passing on from described loading portion and comes each element is tested;
Unloading portion is according to the test result of described test department, to the element of the finishing test loading of classifying;
More than one handover instrument is transferred element between described loading portion, described test department and described unloading portion,
Also comprise cleaning section, be arranged at a side of described test department, be used for removing by movement injection air under the state that covers described testing jack the foreign matter of described testing jack.
12. inspection device for components according to claim 11 is characterized in that, described cleaning section comprises:
Body covers described testing jack and forms clean on the top of described testing jack; Drive division is used for driving body between the top of a side of described test department and described testing jack.
13. inspection device for components according to claim 12 is characterized in that,
Described body is provided with air flow circuit, is connected with air feeder to come to described each testing jack injection air; And more than one nozzle, receive the air of passing on from described air flow circuit and come to described testing jack injection air.
14. inspection device for components according to claim 12 is characterized in that,
Described body forms the airtight state of described clean of keeping, and described body is connected with vent pipe and will together discharges to the outside from described clean by air and the foreign matter of described nozzle ejection.
15. any described inspection device for components according in the claim 11 to 14 is characterized in that, also comprises:
Load buffer part, receive the element of passing on from the pallet of described loading portion and load temporarily by loading the handover instrument;
The unloading buffer part centered by described test department, is arranged at the position with described loading buffer part subtend, receives the element of finishing test by described test department.
16. inspection device for components according to claim 15 is characterized in that, comprising:
First picks portion and second picks portion, by described more than one handover instrument, will be communicated to described test department from the element that described loading buffer part receives and maybe will be communicated to described unloading buffer part from the element that described test department receives.
17. inspection device for components according to claim 16 is characterized in that,
Described first picks portion and second portion of picking carries out the subtend setting with described test department as the center,
Described first picks portion and second portion of picking comprises separately: guide rail; And the more than one plate of picking, move along described guide rail, pass on the position, pass on second element reception and registration position of element to replace mobile with the element replacement position of described test department to described unloading buffer part for first element of the element that receives reception and registration from described loading buffer part.
18. inspection device for components according to claim 16 is characterized in that,
Described cleaning section is arranged at described first and picks portion and described second and pick between the portion.
19. inspection device for components according to claim 16 is characterized in that, comprising:
Described handover instrument comprises: a pair of element pressurizing tool, pick between portion and the described test department and described second pick between portion and the described test department and move described first respectively, pick the element that plate loads and be communicated to described test department or element is communicated to the described plate of picking from described test department described.
20. an inspection device for components is characterized in that, comprising:
Loading portion loads a plurality of elements;
Test department possesses for transferring a plurality of testing jacks that the element of coming is carried out test from described loading portion;
Unloading portion comes the element of finishing test at described test department is classified according to test result; And
The more than one portion that picks will be transplanted on described test department side from the element that described loading portion passes on, and will be transplanted on described unloading portion side from the element that described test department is passed on,
The described portion of picking comprises: pick plate, be used for carrying described element; The plate fixed part, the described plate of picking releasably is incorporated into this; The plate handling part is arranged at described plate fixed part, and the described plate of picking is fixed in described plate fixed part.
21. inspection device for components according to claim 20 is characterized in that, described plate handling part comprises:
Support is fixed in described plate fixed part;
Fixed body is optionally fixed the described plate of picking by possessing first hinge axis in described support, rotatably connecting;
Elastic body is connected in described first hinge axis with described fixed body elasticity;
Press body, the pressure surface that adds that contacts with described fixed body forms curved surface and comes the pressurization of described fixed body;
Moving body is connected with described press body, is set to and can moves along the vertical direction;
Handle rotatably connects second hinge axis that is arranged at described moving body; And
Fixed hook is arranged at described support, and the end that is hung on described handle is also fixing.
22. according to claim 20 or 21 described inspection device for components, it is characterized in that,
The described portion of picking possesses guide rail is arranged, and described plate fixed part is connected with moving horizontally.
23. according to claim 20 or 21 described inspection device for components, it is characterized in that,
Described plate fixed part possesses having heaters, is used for the described element of heating.
24. according to claim 20 or 21 described inspection device for components, it is characterized in that, comprising:
More than one element pressurizing tool adds and presses to described testing jack from the described plate selection element of picking of picking portion, and will pass on to the described plate of picking of picking portion at the element that described testing jack pressurize to finish test.
25. inspection device for components according to claim 24 is characterized in that,
The described portion of picking comprises: first picks portion and second picks portion, is placed in the both sides of the testing jack of described test department.
26. inspection device for components according to claim 25 is characterized in that, described element pressurizing tool comprises:
The first element pressurizing tool adds and presses to described testing jack in described first selection element of picking on the plate of picking portion, and will pass on the plate of picking of picking portion to described first at the element that described testing jack pressurizes to finish test; And
The second element pressurizing tool adds and presses to described testing jack in described second selection element of picking on the plate of picking portion, and will pass on the plate of picking of picking portion to described second at the element that described testing jack pressurizes to finish test.
CN201310062540.8A 2012-02-29 2013-02-28 Inspection device for components Expired - Fee Related CN103293426B (en)

Applications Claiming Priority (16)

Application Number Priority Date Filing Date Title
KR20120021447 2012-02-29
KR10-2012-0021447 2012-02-29
KR1020120071089A KR102000949B1 (en) 2012-02-29 2012-06-29 Semiconductor device inspection apparatus
KR10-2012-0071086 2012-06-29
KR10-2012-0071098 2012-06-29
KR1020120071098A KR102000950B1 (en) 2012-02-29 2012-06-29 Semiconductor device inspection apparatus
KR1020120071086A KR102000948B1 (en) 2012-02-29 2012-06-29 Semiconductor device inspection apparatus
KR10-2012-0071089 2012-06-29
KR1020130009888A KR101430101B1 (en) 2012-02-29 2013-01-29 Semiconductor device inspection apparatus
KR1020130009887A KR101436028B1 (en) 2012-02-29 2013-01-29 Semiconductor device inspection apparatus
KR10-2013-0009890 2013-01-29
KR1020130009890A KR101417773B1 (en) 2012-02-29 2013-01-29 Semiconductor device inspection apparatus and semiconductor device pressing tool
KR1020130009889A KR101417772B1 (en) 2012-02-29 2013-01-29 Semiconductor device inspection apparatus
KR10-2013-0009889 2013-01-29
KR10-2013-0009887 2013-01-29
KR10-2013-0009888 2013-01-29

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CN103293458A (en) 2013-09-11
WO2013129872A1 (en) 2013-09-06

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