TWI385390B - Applied to micro-sensing components of the test classification machine - Google Patents

Applied to micro-sensing components of the test classification machine Download PDF

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TWI385390B
TWI385390B TW98131401A TW98131401A TWI385390B TW I385390 B TWI385390 B TW I385390B TW 98131401 A TW98131401 A TW 98131401A TW 98131401 A TW98131401 A TW 98131401A TW I385390 B TWI385390 B TW I385390B
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micro
test
sensing
machine
sensing components
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TW201111789A (en
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Hon Tech Inc
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應用於微感測元件之測試分類機Test sorting machine for micro sensing components

本發明係提供一種可使微感測元件執行旋轉角度運動測試作業,並利用各裝置之時序搭配作動,而大幅增加測試產能,且立即依測試結果迅速分類收置,以有效提升測試分類收置作業效能之應用於微感測元件之測試分類機。The invention provides a micro-sensing component to perform a rotation angle motion test operation, and utilizes the timing matching of each device to greatly increase the test capacity, and immediately sorts and collects according to the test result, so as to effectively improve the test classification and collection. The performance of the test is applied to the test classifier of the micro-sensing component.

按,微感測IC係廣泛應用於各式電子產品,例如Wii、PS3或iPhone手機等,由於微感測IC應用之產品會執行動態之加速度運動及靜態之旋轉角度運動,目前業者於前段製程之微感測晶片製作完成後,為確保微感測晶片良率及避免後段封裝製程之成本浪費,係於執行後段封裝作業之前,均會對各微感測晶片執行角度運動測試作業,以測試微感測晶片是否受損,而角度運動測試作業係將複數個微感測晶片裝設於電路板上,再將電路板置放定位於探針卡測試機之治具上,並於治具之上方設有一連接測試器之探針卡,該探針卡則具有複數個探針,用以探測微感測晶片,進而治具可帶動複數個微感測晶片作旋轉角度運動之測試,並使探針卡將測試訊號傳輸至測試器,由測試器判斷測試之微感測晶片為良品或不良品,若為不良品,即於微感測晶片或資料庫上標註記號,以先行過濾出不良品之微感測晶片,於微感測晶片執行測試作業完畢後,再將完測之微感測晶片收置容器中,而移載至下一工作站;惟,由於複數個微感測晶片於測試完畢後,並無法直接將各完測之微感測晶片依測試等級而加以自動化分類收置,必須再以人工揀選方式將完測之微感測晶片一一分類收置,以致相當耗費時間,造成降低生產效能之缺失,再者,各微感測晶片於測試完畢後,係進入後段封裝製程,而製作成一微感測IC,由於微感測IC會歷經多道製程,為確保微感測IC之品質,亦必須對封裝後之微感測IC執行角度運動測試作業以確保品質,但目前業界卻無針對微感測IC測試用之測試分類機,以致無法將各微感測IC作一測試及揀選分類,造成無法確保微感測IC品質之缺失。According to the micro-sensing IC system, it is widely used in various electronic products, such as Wii, PS3 or iPhone. Since the product of micro-sensing IC application will perform dynamic acceleration motion and static rotation angle motion, the current industry is in the front-end process. After the micro-sensing wafer is completed, in order to ensure the micro-sensing wafer yield and avoid the waste of the post-packaging process, the angular motion test operation is performed on each micro-sensing wafer before performing the post-packaging operation to test The micro-sensing wafer is damaged, and the angular motion test operation is to install a plurality of micro-sensing chips on the circuit board, and then place the circuit board on the jig of the probe card testing machine, and Above the top there is a probe card connected to the tester, the probe card has a plurality of probes for detecting the micro-sensing wafer, and the fixture can drive a plurality of micro-sensing wafers for the rotation angle test, and The probe card transmits the test signal to the tester, and the tester judges that the tested micro-sensing chip is a good product or a defective product, and if it is a defective product, the mark is marked on the micro-sensing wafer or the database. The micro-sensing wafer of the defective product is filtered first, and after the micro-sensing wafer performs the testing operation, the finished micro-sensing wafer is placed in the container and transferred to the next workstation; however, due to the plural After the test, the micro-sensing chips can not be automatically sorted and sorted according to the test level. The micro-sensing chips must be sorted by manual sorting. Therefore, it is quite time consuming, resulting in a lack of production efficiency. Moreover, after the test is completed, each micro-sensing chip enters the post-packaging process to form a micro-sensing IC, and the micro-sensing IC will go through multiple channels. In order to ensure the quality of the micro-sensing IC, the angular motion test must be performed on the packaged micro-sensing IC to ensure the quality. However, there is no test sorting machine for the micro-sensing IC test in the industry, so that it cannot be Each micro-sensing IC is tested and sorted, which makes it impossible to ensure the lack of quality of the micro-sensing IC.

故在講求全面自動化及測試品質提升之趨勢下,如何設計一種可對微感測元件執行角度運動測試作業,並立即依測試結果,將微感測元件作一分類收置,而一貫化自動執行測試及分類,以提升作業便利性及生產效能之微感測元件測試分類機,即為業者致力研發之標的。Therefore, under the trend of full automation and improved test quality, how to design an angular motion test for micro-sensing components, and immediately according to the test results, the micro-sensing components are classified and automatically processed. Test and classification, to improve the convenience of operation and production efficiency of the micro-sensing component test classification machine, is the industry's dedication to research and development.

本發明之目的一,係提供一種應用於微感測元件之測試分類機,包含供料裝置、收料裝置、角度運動測試裝置及輸送裝置,該供料裝置係容納待測之微感測元件,收料裝置係容納不同等級完測之微感測元件,角度運動測試裝置係用以測試微感測元件之旋轉角度運動,輸送裝置係於供料裝置處取出待測之微感測元件,並移載至角度運動測試裝置處,角度運動測試裝置即對微感測元件執行旋轉角度運動測試,並將測試結果傳輸至中央控制單元,輸送裝置再依測試結果將完測之微感測元件移載至收料裝置而分類收置;藉此,可使微感測元件執行旋轉角度運動測試作業,並利用各裝置之時序搭配作動,而大幅增加測試產能,且立即依測試結果迅速分類收置,達到大幅提升作業便利性及生產效能之實用效益。A first object of the present invention is to provide a test sorting machine for a micro sensing component, comprising a feeding device, a receiving device, an angular motion testing device and a conveying device, and the feeding device is to accommodate the micro sensing component to be tested. The receiving device is for accommodating the micro-sensing components of different levels, the angular motion testing device is for testing the rotation angle movement of the micro-sensing component, and the conveying device is for taking out the micro-sensing component to be tested at the feeding device. And transferred to the angular motion testing device, the angular motion testing device performs a rotational angle motion test on the micro sensing component, and transmits the test result to the central control unit, and the transmitting device then completes the micro sensing component according to the test result. Transfer to the receiving device and sort and store; thereby, the micro sensing component can perform the rotation angle motion test operation, and use the timing matching of each device to greatly increase the test capacity, and immediately sort and collect according to the test result. Set, to achieve a practical effect of greatly improving the convenience of work and production efficiency.

本發明之目的二,係提供一種應用於微感測元件之測試分類機,該角度運動測試裝置係以機座架置一懸臂式第一承架,並以X軸向驅動源帶動第一承架作X軸向旋轉,第一承架則架置一可由Y軸向驅動源帶動作Y軸向旋轉之第二承架,並於第二承架上設有具複數個測試座之測試板,而可使第一、二承架作X-Y軸向旋轉對微感測元件進行不同軸向之角度運動測試,達到提升測試品質之效益。A second object of the present invention is to provide a test sorting machine for a micro-sensing component, wherein the tilt-type first carrier is mounted on the machine frame, and the first bearing is driven by the X-axis driving source. The first frame is mounted with a second frame that can be rotated by the Y-axis driving source belt Y, and a test board with a plurality of test seats is disposed on the second frame. The first and second frames can be used for XY axial rotation to perform different axial angular motion tests on the micro sensing components, thereby achieving the benefit of improving the test quality.

為使 貴審查委員對本發明作更進一步之瞭解,茲舉一較佳實施例並配合圖式,詳述如后:In order to make the reviewer further understand the present invention, a preferred embodiment will be described in conjunction with the drawings, as follows:

請參閱第1圖,本發明測試分類機係於機台10之前端設有供料裝置20、收料裝置30及空盤裝置40,該機台10之後端則設有角度運動測試裝置50,用以測試微感測元件,另於機台10上設有一可移動於供料裝置20、收料裝置30及角度運動測試裝置50間之輸送裝置60;該供料裝置20係容納至少一盛裝待測微感測元件之料盤21,收料裝置30係設有複數個空的料盤31,並可依測試結果分級盛裝良品之完測微感測元件、不良品之完測微感測元件及次級品之完測微感測元件,空盤裝置40則可接收供料裝置20處空的料盤21,或將空的料盤21補充於收料裝置30,請配合參閱第2、3圖,本實施例之角度運動測試裝置50係設有二角度測試機51、52,以角度測試機51為例,該角度測試機51係以機座511架置一懸臂式之第一承架512,並以一為馬達513之X軸向驅動源帶動第一承架512作X軸向旋轉(如±180度之角度旋轉),第一承架512之內側則架置第二承架514,並以一為馬達515之Y軸向驅動源帶動第二承架514作Y軸向旋轉(如±90度之角度旋轉),另於第二承架514上設有具複數個測試座517之測試板516,其中,測試板516上之測試座517可為常閉型測試座或常開型測試座,本實施例之測試座517係為常開型測試座,並於第二承架514上設有一可移動下壓常開型測試座內微感測元件之下壓件518,用以下壓定位微感測元件,若測試座517為常閉型測試座時,第二承架514上可移動下壓之下壓件518,則會先移動下壓開啟常閉型測試座,以供待測之微感測元件置入常閉型測試座,接著下壓件518移出脫離下壓常閉型測試座後,常閉型測試座即會自動關閉定位微感測元件,無論常閉型測試座或常開型測試座,皆可使微感測元件避免於旋轉角度運動測試的過程中自測試座517內脫出,進而第一承架512及第二承架514可分別帶動測試座517及待測之微感測元件執行旋轉角度運動測試作業,並使測試器(圖未示出)將測試結果傳輸至中央控制單元,由中央控制單元控制各裝置作動;請參閱第1、4圖,該輸送裝置60包含載送機構61、第一移料機構62及第二移料機構63,該載送機構61係設有至少一載台,本實施例係設有供料載台611及收料載台612,並以驅動結構613帶動供、收料載台611、612作Y-Z軸向位移,使供、收料載台611、612可交替循環位移於機台10之前、後端,用以分別載送待測之微感測元件及完測之微感測元件,第一移料機構62係設於供料裝置20、收料裝置30及空盤裝置40之上方,並設有第一取放器621及第二取放器622,且以驅動結構623帶動第一取放器621及第二取放器622作X-Y-Z軸向位移,使第一取放器621於供料載台611及供料裝置20間移載待測之微感測元件,並使第二取放器622於收料載台612及收料裝置30間移載完測之微感測元件,而第一、二取放器621、622亦可於供料裝置20、收料裝置30及空盤裝置40間移載空的料盤,第二移料機構63係設於角度運動測試裝置50之上方,並具有第一取放器631及第二取放器632,且以一驅動結構633帶動第一取放器631及第二取放器632作X-Z軸向位移,使第一、二取放器631、632可分別於供、收料載台611、612及二角度測試機51、52間移載待測/完測之微感測元件。Referring to FIG. 1, the test sorting machine of the present invention is provided with a feeding device 20, a receiving device 30 and an empty disk device 40 at the front end of the machine table 10. The rear end of the machine table 10 is provided with an angular motion testing device 50. For testing the micro-sensing component, the machine 10 is provided with a transport device 60 movable between the feeding device 20, the receiving device 30 and the angular motion testing device 50; the feeding device 20 is for accommodating at least one The tray 21 of the micro-sensing component to be tested is provided with a plurality of empty trays 31, and the micro-sensing components of the finished products are classified according to the test results, and the micro-sensing of the defective products is completed. For the micro-sensing component of the component and the secondary product, the empty disk device 40 can receive the tray 21 empty at the feeding device 20, or replenish the empty tray 21 to the receiving device 30, please refer to the second 3, the angle motion testing device 50 of the present embodiment is provided with a two-angle testing machine 51, 52. Taking the angle testing machine 51 as an example, the angle testing machine 51 is configured to mount a cantilever type with the base 511. The carrier 512 drives the first carrier 512 for X-axis rotation (for example, ±180 degrees) by an X-axis driving source of the motor 513. The inner side of the first frame 512 is mounted with the second frame 514, and the Y-axis is driven by the Y-axis driving source of the motor 515 for Y-axis rotation (eg, ±90 degrees). The test stand 516 having a plurality of test seats 517 is disposed on the second frame 514. The test stand 517 on the test board 516 can be a normally closed test stand or a normally open test stand. The test seat 517 of the embodiment is a normally open type test seat, and the second bearing frame 514 is provided with a lower pressing member 518 in the movable lower pressing type test seat, and the following pressure is used to locate the micro feeling. If the test seat 517 is a normally closed test seat, the second support 514 can move the lower pressing member 518, and then move down and open the normally closed test seat for the micrometer to be tested. The sensing element is placed in the normally closed test socket, and then the lower pressing member 518 is removed from the normally closed test seat, and the normally closed test seat automatically closes the positioning micro sensing component, regardless of the normally closed test seat or The open type test socket can prevent the micro sensing component from coming out of the test seat 517 during the rotation angle motion test, and further The carrier 512 and the second carrier 514 can respectively drive the test socket 517 and the micro sensing component to be tested to perform a rotation angle motion test operation, and cause the tester (not shown) to transmit the test result to the central control unit. The central control unit controls the operation of each device; referring to Figures 1 and 4, the transport device 60 includes a transport mechanism 61, a first transfer mechanism 62, and a second transfer mechanism 63, the carrier mechanism 61 being provided with at least one In the embodiment, the feeding stage 611 and the receiving stage 612 are provided, and the feeding and receiving stages 611 and 612 are driven by the driving structure 613 for YZ axial displacement, so that the feeding and receiving stage 611 is provided. The 612 can be alternately cyclically displaced before and after the machine 10 to carry the micro-sensing component to be tested and the micro-sensing component to be tested, and the first transfer mechanism 62 is disposed on the feeding device 20, The first pick-and-place device 621 and the second pick-and-place 622 are disposed above the receiving device 30 and the empty tray device 40, and the first pick-and-placer 621 and the second pick-and-place 622 are driven by the driving structure 623 as XYZ. The axial displacement causes the first pick-and-placer 621 to transfer the micro-sensing component to be tested between the feeding stage 611 and the feeding device 20, The second pick-and-placer 622 transfers the micro-sensing component between the receiving platform 612 and the receiving device 30, and the first and second pick-and-place devices 621, 622 can also be used in the feeding device 20 and receiving materials. An empty tray is transferred between the device 30 and the empty tray device 40. The second material moving mechanism 63 is disposed above the angle motion testing device 50, and has a first pick-and-placer 631 and a second pick-and-placer 632, and A driving structure 633 drives the first pick-and-placer 631 and the second pick-and-placer 632 to perform XZ axial displacement, so that the first and second pick-and-placers 631 and 632 can respectively be at the supply and receiving stages 611, 612 and two angles. The micro-sensing elements to be tested/completed are transferred between the testing machines 51 and 52.

請參閱第5圖,本發明於初始狀態時,第一移料機構62係以驅動結構623帶動第一取放器621作X-Y-Z軸向位移,於供料裝置20之料盤21上取出待測之微感測元件71、72,並移載置入於載送機構61之供料載台611上。Referring to FIG. 5, in the initial state, the first moving mechanism 62 drives the first pick-and-placer 621 for axial displacement in the XYZ by the driving structure 623, and is taken out on the tray 21 of the feeding device 20 to be tested. The micro sensing elements 71 and 72 are placed on the feeding stage 611 of the carrier mechanism 61.

請參閱第6圖,接著載送機構61之驅動結構613係帶動供料載台611及收料載台612作Y-Z軸向之交錯位移,使供料載台611將待測之微感測元件71、72由機台10之前端載送至機台10之後端,收料載台612則由機台10之後端位移至機台10之前端,第二移料機構63係以驅動結構633帶動第一、二取放器631、632作X-Z軸向位移,而分別於供料載台611上取出待測之微感測元件71、72。Referring to FIG. 6, the driving structure 613 of the carrier mechanism 61 drives the feeding stage 611 and the receiving stage 612 to be staggered in the YZ axial direction, so that the feeding stage 611 will be the micro sensing component to be tested. 71, 72 is carried by the front end of the machine table 10 to the rear end of the machine table 10. The receiving stage 612 is displaced from the rear end of the machine table 10 to the front end of the machine table 10, and the second material transfer mechanism 63 is driven by the driving structure 633. The first and second pick-and-placers 631 and 632 are axially displaced by XZ, and the micro-sensing elements 71 and 72 to be tested are respectively taken out on the feeding stage 611.

請參閱第7、8、9圖,第二移料機構63之第一、二取放器631、632係分別作X-Z軸向位移將待測之微感測元件71、72移載至角度測試機51、52處,以便執行旋轉角度運動之測試作業,以角度測試機51為例,當第二移料機構63之第一取放器631將待測之微感測元件71置入於測試座517後,下壓件518即移動下壓微感測元件71,使微感測元件71穩固的電性接觸於測試座517,之後,該角度測試機51以馬達513驅動第一承架512及裝配於上之第二承架514作X軸向旋轉,使第二承架514上之測試座517作X軸向之旋轉角度運動測試,由於第一承架512係為懸臂式設計,而可帶動待測之微感測元件71作±180度之X軸向旋轉角度運動測試作業,並使測試板516將待測微感測元件71之測試訊號傳輸至測試器,接著角度測試機51以馬達515驅動第二承架514作Y軸向旋轉,使測試座517及待測之微感測元件71作±90度之Y軸向旋轉角度運動之測試作業,並使測試板516將待測微感測元件71之測試訊號傳輸至測試器,進而以二個軸向的角度旋轉對微感測元件71進行角度運動的測試,測試器再將微感測元件71之測試結果傳輸至中央控制單元,此時,供料載台611即與收料載台612作交錯位移,由機台10之後端位移至機台10之前端,收料載台612則由機台10之前端位移至機台10之後端,由於第一移料機構62之第一取放器621已於供料裝置20之料盤21上取出下一批待測之微感測元件73、74,而可使第一取放器621將下一批待測之微感測元件73、74移載置入於供料載台611上。Referring to Figures 7, 8, and 9, the first and second pick-and-placers 631 and 632 of the second moving mechanism 63 respectively perform the XZ axial displacement to transfer the micro-sensing elements 71 and 72 to be tested to the angle test. At the machine 51, 52, in order to perform the test operation of the rotational angle motion, taking the angle tester 51 as an example, when the first pick-and-placer 631 of the second transfer mechanism 63 puts the micro-sensing component 71 to be tested into the test. After the seat 517, the lower pressing member 518 moves the micro sensing element 71 downward to electrically connect the micro sensing element 71 to the test socket 517. Thereafter, the angle testing machine 51 drives the first frame 512 with the motor 513. And the second bracket 514 assembled thereon is X-axis rotated, so that the test seat 517 on the second bracket 514 is tested for the X-axis rotational angle motion, since the first bracket 512 is a cantilever design, and The micro-sensing element 71 to be tested can be driven to perform an X-axis rotation angle motion test operation of ±180 degrees, and the test board 516 transmits the test signal of the micro-sensing element 71 to be tested to the tester, and then the angle tester 51 The second bracket 514 is driven by the motor 515 to rotate in the Y direction, so that the test socket 517 and the micro sensing element 71 to be tested are ±90 degrees. The test operation of the Y-axis rotation angle movement, and the test board 516 transmits the test signal of the micro-sensing element 71 to be tested to the tester, and then angularly moves the micro-sensing element 71 at two axial angles. In the test, the tester transmits the test result of the micro sensing element 71 to the central control unit. At this time, the feeding stage 611 is displaced from the receiving stage 612, and the rear end of the machine 10 is displaced to the machine 10. At the front end, the receiving stage 612 is displaced from the front end of the machine table 10 to the rear end of the machine table 10, since the first pick-and-place 621 of the first moving mechanism 62 has been taken out from the tray 21 of the feeding device 20. A plurality of micro-sensing elements 73, 74 to be tested are used, and the first pick-and-placer 621 can transfer the next batch of micro-sensing elements 73, 74 to be tested onto the feeding stage 611.

請參閱第10圖,當角度測試機51、52完成微感測元件71、72之角度運動測試作業後,第二移料機構63之第一、二取放器631、632係分別作X-Z軸向位移,於角度測試機51、52處取出完測之微感測元件71、72,並移載至收料載台612。Referring to FIG. 10, after the angle testing machines 51, 52 complete the angular motion testing operation of the micro sensing elements 71, 72, the first and second pick and placeers 631, 632 of the second moving mechanism 63 are respectively XZ axes. To the displacement, the measured micro-sensing elements 71, 72 are taken out at the angle testing machines 51, 52 and transferred to the receiving stage 612.

請參閱第11、12圖,該供料載台611與收料載台612再作作Y-Z軸向之交替位移,該供料載台611係將待測之微感測元件73、74載送至機台10之後端,以供第二移料機構63之第一、二取放器631、632取出待測之微感測元件73、74,並分別移載至角度測試機51、52,而接續執行旋轉角度運動之測試作業,該收料載台612則將完測之微感測元件71、72載送至機台10之前端,第一移料機構62以第二取放器622於收料載台612上取出完測之微感測元件71、72,並依測試結果(如良品微感測元件、不良品微感測元件或次級品微感測元件),將完測之微感測元件71、72移載收置於收料裝置30之料盤31上,以完成分類收置作業。Referring to Figures 11 and 12, the feeding stage 611 and the receiving stage 612 are alternately displaced in the YZ axial direction. The feeding stage 611 carries the micro sensing elements 73 and 74 to be tested. To the rear end of the machine 10, the first and second pick-and-placers 631, 632 of the second transfer mechanism 63 take out the micro-sensing elements 73, 74 to be tested, and transfer them to the angle testing machines 51, 52, respectively. And the test operation of the rotation angle movement is continued, the receiving stage 612 carries the measured micro sensing elements 71, 72 to the front end of the machine table 10, and the first material moving mechanism 62 uses the second pick-up unit 622. The measured micro-sensing elements 71, 72 are taken out on the receiving stage 612, and the test results (such as good micro-sensing elements, defective micro-sensing elements or secondary micro-sensing elements) will be completed. The micro-sensing elements 71, 72 are transferred and placed on the tray 31 of the receiving device 30 to complete the sorting and collecting operation.

據此,本發明可自動化之對微感測元件進行角度運動之測試,並利用各裝置之時序搭配作動,而大幅增加測試產能,且立即依測試結果迅速分類收置,以有效提升測試分類收置作業效能,實為一深具實用性及進步性之設計,然未見有相同之產品及刊物公開,從而允符發明專利申請要件,爰依法提出申請。Accordingly, the present invention can automatically test the angular motion of the micro-sensing component, and utilize the timing matching of each device to greatly increase the test capacity, and immediately sort and collect according to the test result, so as to effectively improve the test classification. The performance of the operation is actually a practical and progressive design. However, the same products and publications are not disclosed, so that the requirements for invention patent applications are allowed, and the application is filed according to law.

[本發明][this invention]

10...機台10. . . Machine

20...供料裝置20. . . Feeding device

21...料盤twenty one. . . Trays

30...收料裝置30. . . Receiving device

31...料盤31. . . Trays

40...空盤裝置40. . . Empty disk device

50...角度運動測試裝置50. . . Angle motion test device

51...角度測試機51. . . Angle tester

511...機座511. . . Machine base

512...第一承架512. . . First carrier

513...馬達513. . . motor

514...第二承架514. . . Second carrier

515...馬達515. . . motor

516...測試板516. . . Test board

517...測試座517. . . Test stand

518...下壓件518. . . Lower pressing piece

52...角度測試機52. . . Angle tester

60...輸送裝置60. . . Conveyor

61...載送機構61. . . Carrier mechanism

611...供料載台611. . . Feeding platform

612...收料載台612. . . Receiving platform

613...驅動結構613. . . Drive structure

62...第一移料機構62. . . First transfer mechanism

621...第一取放器621. . . First pick and place

622...第二取放器622. . . Second pick and place

623...驅動結構623. . . Drive structure

63...第二移料機構63. . . Second transfer mechanism

631...第一取放器631. . . First pick and place

632...第二取放器632. . . Second pick and place

633...驅動結構633. . . Drive structure

71、72、73、74...微感測元件71, 72, 73, 74. . . Micro sensing component

第1圖:本發明測試分類機之各裝置配置圖。Fig. 1 is a view showing the configuration of each device of the test sorting machine of the present invention.

第2圖:本發明測試分類機之角度運動測試裝置之示意圖(一)。Figure 2: Schematic diagram (I) of the angular motion test device of the test sorter of the present invention.

第3圖:本發明測試分類機之角度運動測試裝置之示意圖(二)。Figure 3: Schematic diagram of the angular motion test device of the test sorter of the present invention (2).

第4圖:本發明輸送裝置之載送機構示意圖。Fig. 4 is a schematic view showing the carrying mechanism of the conveying device of the present invention.

第5圖:本發明測試分類機之使用示意圖(一)。Figure 5: Schematic diagram of the use of the test sorter of the present invention (1).

第6圖:本發明測試分類機之使用示意圖(二)。Figure 6: Schematic diagram of the use of the test sorter of the present invention (2).

第7圖:本發明測試分類機之使用示意圖(三)。Figure 7: Schematic diagram of the use of the test sorter of the present invention (3).

第8圖:本發明測試分類機之使用示意圖(四)。Figure 8: Schematic diagram of the use of the test sorter of the present invention (4).

第9圖:本發明測試分類機之使用示意圖(五)。Figure 9: Schematic diagram of the use of the test sorter of the present invention (5).

第10圖:本發明測試分類機之使用示意圖(六)。Figure 10: Schematic diagram of the use of the test sorter of the present invention (6).

第11圖:本發明測試分類機之使用示意圖(七)。Figure 11: Schematic diagram of the use of the test sorter of the present invention (7).

第12圖:本發明測試分類機之使用示意圖(八)。Figure 12: Schematic diagram of the use of the test sorter of the present invention (8).

10...機台10. . . Machine

20...供料裝置20. . . Feeding device

21...料盤twenty one. . . Trays

30...收料裝置30. . . Receiving device

31...料盤31. . . Trays

40...空盤裝置40. . . Empty disk device

50...角度運動測試裝置50. . . Angle motion test device

51...角度測試機51. . . Angle tester

52...角度測試機52. . . Angle tester

60...輸送裝置60. . . Conveyor

61...載送機構61. . . Carrier mechanism

62...第一移料機構62. . . First transfer mechanism

611...供料載台611. . . Feeding platform

612...收料載台612. . . Receiving platform

613...驅動結構613. . . Drive structure

621...第一取放器621. . . First pick and place

622...第二取放器622. . . Second pick and place

623...驅動結構623. . . Drive structure

63...第二移料機構63. . . Second transfer mechanism

631...第一取放器631. . . First pick and place

632...第二取放器632. . . Second pick and place

633...驅動結構633. . . Drive structure

Claims (31)

一種應用於微感測元件之測試分類機,包含:機台;供料裝置:係設於機台上,用以容納待測之微感測元件;收料裝置:係設於機台上,用以容納完測之微感測元件;角度運動測試裝置:係設於機台上,並設有具測試座之懸臂式角度測試機,該角度測試機係可作X軸向旋轉及Y軸向旋轉,以測試微感測元件;輸送裝置:係設於機台上,並設有載送機構、第一移料機構及第二移料機構,用以分別於供、收料裝置及角度運動測試裝置間載送待測/完測之微感測元件;中央控制單元:係用以控制及整合各裝置作動,以執行自動化作業。A test sorting machine applied to a micro sensing component, comprising: a machine table; a feeding device: disposed on the machine platform for accommodating the micro sensing component to be tested; and the receiving device: being disposed on the machine platform The micro-sensing component for accommodating the measurement; the angular motion testing device is arranged on the machine table, and is provided with a cantilever angle tester with a test seat, which can be used for X-axis rotation and Y-axis Rotating to test the micro sensing component; the conveying device is disposed on the machine table, and is provided with a carrying mechanism, a first moving mechanism and a second moving mechanism for respectively supplying and receiving devices and angles The motion testing device carries the micro sensing component to be tested/completed; the central control unit is used to control and integrate the actuation of each device to perform an automated operation. 依申請專利範圍第1項所述之應用於微感測元件之測試分類機,其中,該收料裝置係設有複數個料盤,用以承置不同測試結果之完測微感測元件。The test sorting machine for micro-sensing components according to claim 1, wherein the receiving device is provided with a plurality of trays for receiving the micro-sensing components of different test results. 依申請專利範圍第1項所述之應用於微感測元件之測試分類機,其中,該角度運動測試裝置之角度測試機係設有可作X軸向旋轉之第一承架及可作Y軸向旋轉之第二承架,並於第二承架上設有具至少一測試座之測試板,用以對微感測元件進行角度運動測試。The test sorting machine for micro-sensing components according to claim 1, wherein the angle tester of the angular motion test device is provided with a first frame that can be rotated in the X-axis and can be used as Y. The second frame is axially rotated, and a test plate having at least one test seat is disposed on the second frame for performing an angular motion test on the micro sensing component. 依申請專利範圍第3項所述之應用於微感測元件之測試分類機,其中,該角度測試機係以機座架置一懸臂式之第一承架,並以X軸向驅動源帶動第一承架作X軸向旋轉,第一承架上則架設一由Y軸向驅動源帶動作Y軸向旋轉之第二承架。The test sorting machine for micro-sensing components according to the third aspect of the patent application scope, wherein the angle tester mounts a cantilever-type first carrier with a machine base, and is driven by an X-axis driving source. The first carrier is rotated in the X-axis direction, and the first carrier is provided with a second carrier that is axially rotated by the Y-axis driving source belt. 依申請專利範圍第4項所述之應用於微感測元件之測試分類機,其中,該角度測試機之X軸向驅動源係為馬達,該Y軸向驅動源則為另一馬達。The test sorting machine for micro-sensing components according to claim 4, wherein the X-axis driving source of the angle testing machine is a motor, and the Y-axis driving source is another motor. 依申請專利範圍第3項所述之應用於微感測元件之測試分類機,其中,該測試板上之測試座係為常開型測試座。The test classification machine for micro-sensing components according to item 3 of the patent application scope, wherein the test socket on the test board is a normally open test socket. 依申請專利範圍第6項所述之應用於微感測元件之測試分類機,其中,該第二承架上係設有一可移動下壓微感測元件之下壓件。The test sorting machine for micro-sensing components according to claim 6, wherein the second bracket is provided with a movable lower pressing micro-sensing element lower pressing member. 依申請專利範圍第3項所述之應用於微感測元件之測試分類機,其中,該測試板上之測試座係為常閉型測試座。The test classification machine for micro-sensing components according to item 3 of the patent application scope, wherein the test socket on the test board is a normally closed test socket. 依申請專利範圍第8項所述之應用於微感測元件之測試分類機,其中,該第二承架上係設有一可移動下壓開啟常閉型測試座之下壓件。The test sorting machine for micro-sensing components according to item 8 of the patent application scope, wherein the second bracket is provided with a movable lower pressing open normally closed type test seat lower pressing member. 依申請專利範圍第1項所述之應用於微感測元件之測試分類機,其中,該輸送裝置係設有載送機構、第一移料機構及第二移料機構,該載送機構係用以於供、收料裝置及角度運動測試裝置間載送待測/完測之微感測元件,第一移料機構係用以於載送機構及供、收料裝置間移載待測/完測之微感測元件,第二移料機構則用以於載送機構及角度運動測試裝置間移載待測/完測之微感測元件。The test sorting machine for micro-sensing components according to claim 1, wherein the conveying device is provided with a carrying mechanism, a first moving mechanism and a second moving mechanism, and the carrying mechanism is The utility model is used for carrying the micro sensing component to be tested/completed between the feeding and receiving device and the angle motion testing device, and the first moving material mechanism is used for transferring between the carrying mechanism and the feeding and receiving device. / The micro-sensing element is completed, and the second material-feeding mechanism is used to transfer the micro-sensing element to be tested/completed between the carrying mechanism and the angular motion testing device. 依申請專利範圍第10項所述之應用於微感測元件之測試分類機,其中,該輸送裝置之載送機構係設有至少一載台,用以載送微感測元件。The test sorting machine for micro-sensing components according to claim 10, wherein the transport mechanism of the transport device is provided with at least one carrier for carrying the micro-sensing component. 依申請專利範圍第11項所述之應用於微感測元件之測試分類機,其中,該載送機構係設有供料載台及收料載台,並以驅動結構帶動供、收料載台作Y-Z軸向位移,而交替循環位移於機台之前、後端,用以載送待測/完測之微感測元件。The test sorting machine for micro-sensing components according to claim 11 of the patent application scope, wherein the carrying mechanism is provided with a feeding carrier and a receiving carrier, and drives the feeding and receiving loads with the driving structure. The stage is YZ axial displacement, and alternately cyclically displaced to the front and rear ends of the machine to carry the micro-sensing components to be tested/completed. 依申請專利範圍第10項所述之應用於微感測元件之測試分類機,其中,該輸送裝置之第一移料機構係設有至少一取放器,用以移載微感測元件。The test sorting machine for micro-sensing components according to claim 10, wherein the first transfer mechanism of the transport device is provided with at least one pick-and-place device for transferring the micro-sensing elements. 依申請專利範圍第13項所述之應用於微感測元件之測試分類機,其中,該第一移料機構係設有第一取放器及第二取放器,並以驅動結構帶動第一、二取放器作X-Y-Z軸向位移,用以移載待測/完測之微感測元件。The test sorting machine for micro-sensing components according to claim 13 , wherein the first pick-up mechanism is provided with a first pick-and-place device and a second pick-and-place device, and is driven by a driving structure. The first and second pick-and-place devices are used for XYZ axial displacement to transfer the micro-sensing components to be tested/completed. 依申請專利範圍第10項所述之應用於微感測元件之測試分類機,其中,該輸送裝置之第二移料機構係設有至少一取放器,用以移載微感測元件。The test sorting machine for micro-sensing components according to claim 10, wherein the second transfer mechanism of the transport device is provided with at least one pick-and-place device for transferring the micro-sensing elements. 依申請專利範圍第15項所述之應用於微感測元件之測試分類機,其中,該第二移料機構係設有第一取放器及第二取放器,並以驅動結構帶動第一、二取放器作X-Z軸向位移,用以移載待測/完測之微感測元件。The test sorting machine for micro-sensing components according to claim 15, wherein the second material-feeding mechanism is provided with a first pick-and-place device and a second pick-and-place device, and is driven by a driving structure. The first and second pick-and-place devices are used for XZ axial displacement to transfer the micro-sensing components to be tested/completed. 依申請專利範圍第1項所述之應用於微感測元件之測試分類機,更包含於機台上設有空盤裝置,用以收置空的料盤,並依需要將空的料盤補充於收料裝置。The test sorting machine applied to the micro-sensing component according to the first aspect of the patent application scope includes an empty disk device on the machine table for collecting the empty tray and emptying the tray as needed. Supplemented to the receiving device. 一種應用於微感測元件之測試分類機,包含:機台;供料裝置:係設於機台上,用以容納待測之微感測元件;收料裝置:係設於機台上,用以容納完測之微感測元件;角度運動測試裝置:係設於機台上,並設有至少一角度測試機,該角度測試機係以機座架置一懸臂式之第一承架,並以X軸向驅動源帶動第一承架作X軸向旋轉,第一承架上則架置一由Y軸向驅動源帶動作Y軸向旋轉之第二承架,第二承架上則設有具至少一測試座之測試板,用以對微感測元件進行角度運動測試;輸送裝置:係設於機台上,並設有載送機構、第一移料機構及第二移料機構,該載送機構係用以於供、收料裝置及角度運動測試裝置間載送待測/完測之微感測元件,第一移料機構係用以於載送機構及供、收料裝置間移載待測/完測之微感測元件,第二移料機構則用以於載送機構及角度運動測試裝置間移載待測/完測之微感測元件;中央控制單元:係用以控制及整合各裝置作動,以執行自動化作業。A test sorting machine applied to a micro sensing component, comprising: a machine table; a feeding device: disposed on the machine platform for accommodating the micro sensing component to be tested; and the receiving device: being disposed on the machine platform The micro-sensing component for accommodating the measurement; the angular motion testing device is disposed on the machine, and is provided with at least one angle testing machine, wherein the angle testing machine is configured to mount a cantilever-type first carrier And the X-axis driving source drives the first carrier to rotate in the X-axis direction, and the first carrier mounts a second frame that is rotated by the Y-axis driving source belt Y-axis, and the second carrier The upper part is provided with a test board having at least one test seat for performing an angular motion test on the micro sensing component; the conveying device is disposed on the machine table, and is provided with a carrying mechanism, a first moving mechanism and a second a transfer mechanism for carrying a micro-sensing component to be tested/finished between the supply and receiving device and the angular motion test device, the first transfer mechanism being used for the carrier mechanism and the supply mechanism The micro-sensing component to be tested/completed is transferred between the receiving devices, and the second moving mechanism is used for the carrying mechanism and the angle Transfer means movable between the measured test / End of micro-sensing element sensing; a central control unit: system for controlling the actuation and integration of each apparatus to perform automated operations. 依申請專利範圍第18項所述之應用於微感測元件之測試分類機,其中,該收料裝置係設有複數個料盤,用以承置不同測試結果之完測微感測元件。The test sorting machine for micro-sensing components according to claim 18, wherein the receiving device is provided with a plurality of trays for receiving the micro-sensing components of different test results. 依申請專利範圍第18項所述之應用於微感測元件之測試分類機,其中,該角度運動測試裝置之X軸向驅動源係為馬達,Y軸向驅動源則為另一馬達。The test sorting machine for micro-sensing components according to claim 18, wherein the X-axis driving source of the angular motion testing device is a motor, and the Y-axis driving source is another motor. 依申請專利範圍第18項所述之應用於微感測元件之測試分類機,其中,該測試板上之測試座係為常開型測試座。The test classification machine for micro-sensing components according to claim 18, wherein the test socket on the test board is a normally open test socket. 依申請專利範圍第21項所述之應用於微感測元件之測試分類機,其中,該第二承架上係設有一可移動下壓微感測元件之下壓件。The test sorting machine for micro-sensing components according to claim 21, wherein the second bracket is provided with a movable pressing micro-sensing element lower pressing member. 依申請專利範圍第18項所述之應用於微感測元件之測試分類機,其中,該測試板上之測試座係為常閉型測試座。The test classification machine for micro-sensing components according to claim 18, wherein the test socket on the test panel is a normally closed test socket. 依申請專利範圍第23項所述之應用於微感測元件之測試分類機,其中,該第二承架上係設有一可移動下壓開啟常閉型測試座之下壓件。The test sorting machine for micro-sensing components according to claim 23, wherein the second bracket is provided with a movable lower pressing open normally-closed test seat lower pressing member. 依申請專利範圍第18項所述之應用於微感測元件之測試分類機,其中,該輸送裝置之載送機構係設有至少一載台,用以載送微感測元件。The test sorting machine for micro-sensing components according to claim 18, wherein the transport mechanism of the transport device is provided with at least one carrier for carrying the micro-sensing component. 依申請專利範圍第25項所述之應用於微感測元件之測試分類機,其中,該載送機構係設有供料載台及收料載台,並以驅動結構帶動供、收料載台作Y-Z軸向位移,而交替循環位移於機台之前、後端,用以載送待測/完測之微感測元件。The test sorting machine for micro-sensing components according to claim 25, wherein the carrying mechanism is provided with a feeding stage and a receiving stage, and drives and receives the load by the driving structure. The stage is YZ axial displacement, and alternately cyclically displaced to the front and rear ends of the machine to carry the micro-sensing components to be tested/completed. 依申請專利範圍第18項所述之應用於微感測元件之測試分類機,其中,該輸送裝置之第一移料機構係設有至少一取放器,用以移載微感測元件。The test sorting machine for micro-sensing components according to claim 18, wherein the first moving mechanism of the conveying device is provided with at least one pick-and-place device for transferring the micro sensing elements. 依申請專利範圍第27項所述之應用於微感測元件之測試分類機,其中,該第一移料機構係設有第一取放器及第二取放器,並以驅動結構帶動第一、二取放器作X-Y-Z軸向位移,用以移載待測/完測之微感測元件。The test sorting machine for micro-sensing components according to claim 27, wherein the first pick-up mechanism is provided with a first pick-and-placer and a second pick-and-placer, and is driven by a driving structure. The first and second pick-and-place devices are used for XYZ axial displacement to transfer the micro-sensing components to be tested/completed. 依申請專利範圍第18項所述之應用於微感測元件之測試分類機,其中,該輸送裝置之第二移料機構係設有至少一取放器,用以移載微感測元件。The test sorting machine for micro-sensing components according to claim 18, wherein the second transfer mechanism of the transport device is provided with at least one pick-and-place device for transferring the micro-sensing components. 依申請專利範圍第29項所述之應用於微感測元件之測試分類機,其中,該第二移料機構係設有第一取放器及第二取放器,並以驅動結構帶動第一、二取放器作X-Z軸向位移,用以移載待測/完測之微感測元件。The test sorting machine for micro-sensing components according to claim 29, wherein the second material-feeding mechanism is provided with a first pick-and-placer and a second pick-and-placer, and is driven by a driving structure. The first and second pick-and-place devices are used for XZ axial displacement to transfer the micro-sensing components to be tested/completed. 依申請專利範圍第18項所述之應用於微感測元件之測試分類機,更包含於機台上設有空盤裝置,用以收置空的料盤,並依需要將空的料盤補充於各收料裝置。The test sorting machine for micro-sensing components according to item 18 of the patent application scope includes an empty disk device on the machine table for collecting empty trays and empty trays as needed. Supplemented to each receiving device.
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US5209132A (en) * 1990-02-23 1993-05-11 Kabushiki Kaisha Toshiba Semiconductor handling device having a self-check function and method of self-checking a semiconductor handling device
TWM299296U (en) * 2005-12-01 2006-10-11 Chip Right Corp IC testing and classifying machine
TWI283649B (en) * 2005-08-10 2007-07-11 Hon Tech Inc IC test sorting machine

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US5209132A (en) * 1990-02-23 1993-05-11 Kabushiki Kaisha Toshiba Semiconductor handling device having a self-check function and method of self-checking a semiconductor handling device
TWI283649B (en) * 2005-08-10 2007-07-11 Hon Tech Inc IC test sorting machine
TWM299296U (en) * 2005-12-01 2006-10-11 Chip Right Corp IC testing and classifying machine

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