KR101155970B1 - A Convertible Saw Singulation Handler - Google Patents

Abstract

The present invention provides a semiconductor device having a conversion kit (KIT) as a physical means capable of singulation handling of various kinds of materials with one sour singulation handler. To this end, the first jig, the second jig, and the third jig composed of the fixed plate, the auxiliary plate and the conversion plate, the folder consisting of the fixed block and the folding block, the chuck table and the sorting table composed of the fixed plate, the auxiliary plate and the conversion plate are provided. It is configured to be replaced so that it can be used interchangeably according to the size of the material in one piece of equipment.

Description

A Convertible Saw Singulation Handler}

The present invention relates to a soaking Singulation Handler (Saw Singulation Handler), more specifically, by adopting a convertible means to have a compatibility function per unit (Unit), the singulation handling for a variety of materials with a single equipment A sour singulation handler designed to be possible.

Soo Singulation Handler cuts and cleans semiconductor chips packaged in strip or modular form in the post-process for semiconductor manufacturing, and then visualizes and sorts them as good or bad. Independent semiconductor equipment to perform.
Soo Singulation Handler is generally manufactured separately according to the size of the material, but the equipment price is high, so for mass production of a specific material, it must be compatible with the material size to achieve productivity and economic purposes. .
However, the conventional sour singing handler is manufactured only for the post-processing of a specific material, and if it is necessary to handle a different size or type of material, a separate sour singing handler had to be manufactured, thus increasing the cost and occupying a large area. There was a problem.
In particular, when the material to be handled is not just different in size but different in material, for example, in the case of strip type (metal material) and modular type (ceramic material), a single sour singulation handler is used to process materials of different materials. It was more difficult to have compatibility available.
Therefore, the price of expensive equipment eventually leads to a rise in the price of products (semiconductor chips), and consumers have no choice but to use expensive parts, and producers need to have a lot of equipment. The use of the migration handler was discontinued, resulting in a problem that the efficiency of using the equipment was lowered beyond the problem of space charging.

Patent number 932,042

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In order to solve the problem of the conventional sour singulation handler, the present invention provides a semiconductor device having a conversion kit (KIT) as a physical means capable of singulating a variety of materials with one sour singulation handler. do.

The present invention, the material supply loader 20 to cut the semiconductor material 10 by size in a semiconductor post-process; A first jig 30 for sucking the material 10 from the material supply loader 20 and transferring the material 10 to the dicing unit, and a chuck table for fixing and fixing the material 10 while dicing the material 10 ( 40), a dicing saw system (90) having a second jig (50) for transporting the diced material (10) from the chuck table (40); And a folder 60 which receives the washed material 10 from the second jig 50 and transfers the material 10 to a vision device for inspecting whether the material is defective or not, and the vision inspection finished material 10 from the folder 60. 70 is configured as a handler system 400 equipped with a picker for transferring the third jig 80 and the material 10 transferred to the sorting table 70 into good and bad parts to be transferred to the tray.
The first jig 30, the second jig 50, the third jig 80 is composed of a fixed plate 30a, an auxiliary plate 30b and a conversion plate 30c, respectively, each auxiliary plate 30b is fixed plate A spring is held against the 30a, and the conversion plate 30c is replaceably coupled from the auxiliary plate 30b using a fastener 36, and the folder 60 is folded with the fixed block 62. Composed of blocks 64, each block 62, 64 is composed of a fixed plate, an auxiliary plate and a conversion plate, and the conversion plates of each of the blocks 62 and 64 are replaceably bolted to the auxiliary plate. The chuck table 40 is also composed of a fixed plate, an auxiliary plate and a conversion plate is fixed to replace the bolt, the sorting table 70 is also characterized in that coupled to the bolt to be replaced according to the size of the material.

According to the compatible sous singulation handler according to the present invention, it is possible to post-process the various kinds of materials with a single equipment, reduce the cost, save space, and make the sour singulation handler according to the characteristics of each material. It is possible to replace and apply parts quickly and flexibly.

1 is an external view of a sour singulation handler to which the present invention is applied.
2 is an overall system flow of a sour singulation handler to which the present invention is applied.
3 and 4 are enlarged views of the jig.
5 is a view of a second jig.
6 is an enlarged view of a folder.
7 is a view illustrating a third jig and peripheral parts.
8 is a diagram illustrating an example in which a third jig is configured together with a vision system.
9 is an enlarged view of a classification table.
10 and 11 are diagrams illustrating an input rail.
12 is a configuration diagram of a track panel portion.

1 is an external view of a sour singulation handler to which the present invention is applied. As described above, the sour singulation handler is composed of a material transport loader 20, a dicing sour system 90, and a handler system 400.

2 is a total system flow of a sour singulation handler to which the present invention is applied, in which one material 10 is dicing, cleaning, visioning, and placing. It shows the whole process going through the process.

3 and 4 are enlarged views of the jig 30, 50, 80 as the suction plate to transfer the material 10 in Figure 2, all the jig is the same as the configuration of the first jig (30) Looking at the configuration, the first jig 30 is a fixed plate 30a fixed to the support 32 to reciprocate by the robot, so that the negative pressure is formed through the negative pressure hose 34 while being in close contact with the fixed plate (30a) An auxiliary plate 30b having a negative pressure line formed therein and a conversion plate 30c having a negative pressure hole so as to be in close contact with the auxiliary plate 30b to form a negative pressure line to suck the individual material 10. In addition, the conversion plate 30c forms a portion of the negative pressure hole on which the material 10 is adsorbed by an elastic material such as rubber or engineering plastic, so that the material 10 is easily and surely adsorbed, and the conversion plate 30c ) Is fastened to the auxiliary plate 30b using fasteners 36 (also called cicada rings) installed at both long sides of the auxiliary plate 30b so as to be easily separated from each other.

The attached chuck table 40 of FIG. 4 shows a state in which the material 10 is seated on the chuck table 40 by the first jig 30. The chuck table 40 is formed by the conversion plate 44 is fastened to the support plate 42 with the bolt 46, so that the conversion plate coupled to the support plate 42 in accordance with the rotation and movement of the chuck table 40 44 is also rotated and moved. The conversion plate 44 is combined so as to be replaced by loosening the bolt 46 by size for the material.

FIG. 5 illustrates a second jig 50, which is configured in the same structure as the first jig 30 in FIG. 3, and adsorbs the diced materials 10 on the chuck table 40. Transfer to cleaning device and wash. After the cleaning is completed, the folder 60 moves to the lower side of the second jig 50 to receive the material 10 adsorbed on the second jig 50 onto the fixed block 62.

6 is an enlarged view of the folder 60. After the folder 60, which has received the materials 10 from the second jig 50, is rotated 90 degrees and the camera of the vision system 82 photographs the upper surface of the material and transmits the data as data, the defect degree is input in advance. Compared with the reference value to determine whether or not to determine whether this part is beyond the scope of the present invention, detailed description thereof will be omitted.
Since the materials 10 on the fixed block 62 which have been photographed on one side should also be checked whether or not the back surface is defective, the folding block 64 is configured to be stacked on the fixed block 62 to be folded (folding operation), and the fixed block ( By breaking the negative pressure formed in the 62 and forming the negative pressure in the folding block 64, the material 10 on the fixed block 62 is absorbed by the folding block 64 and is configured to be photographed. The conversion plate of the fixed block 62 and the folding block 64 is fastened with bolts 68 on the fixed plate so as to be replaced.

7 is a view showing a third jig and peripheral parts, wherein the third jig 80 moves between the folder 60 and the sorting table 70 and is placed on the folding block 64 of the folder 60. 10 are seated on the sorting table 70.

8 is a view showing an example in which a third jig is configured together with a vision system, wherein the third jig 80 is combined to be supported and moved to a support with the vision system 82 including a camera and lighting. Since the structure of the 3 jig 80 is the same as the 1st jig 30, duplication description is abbreviate | omitted.

9 is a material seating groove in the shape of a flag in the car racing (Car racing) to facilitate the sorting and transport of the material 10 in order to separate the material (10) into good and defective goods, and to avoid interference between neighboring materials The enlarged classification table 70 is formed. When the materials 10 are seated on the sorting table 70, the sorting table 70 moves backward to the picker (not shown) by the robot, and the picker separates the good and bad materials and transports them to a tray (not shown). The handling process is completed by the structure that finishes the post process by loading it. The sorting table 70 is also replaceable by bolting.

Meanwhile, in the above example, the case of only one type of material that differs only in size is illustrated, but the material 10 is a different type or material such as a strip type or a ceramic type of modular type. The present invention includes a material supply means in the form of a cartridge so that it can be utilized even in cases.

To this end, in the present invention, as shown in Figure 10 and 11, the input rail 100 is temporarily provided before the material 10 supplied from the material supply loader 20 is transferred to the chuck table 40 by suction, The input rail 100 is formed at a position where the dicing saw system 90 of FIG. 1 is in contact with the loader 20 for material supply.

10 and 11 are diagrams illustrating an input rail. The input rail 100 is a plate 101 installed horizontally with the supply position of the material 10, and a pair of input tracks horizontally formed in the supply direction of the material 10 so as to have a variable width. The variable support 103 is coupled to the connecting piece through the through groove of the plate 101 to support the input track 102 in the lower portion of the plate 101, the variable support to adjust the interval of the variable support 103 (103) a screw bar 104 orthogonal to the lower portion, a pulley 106 installed on the motor 105 shaft to rotate the screw bar 104, and one of the pair of input tracks 102 The sensor 108 is installed on the sensing groove 107 formed in the piece and the sensor support piece 109 for supporting the sensor 108 to be movable horizontally.

In addition, in order to dice the modular material, a separate modular track panel 900 is sandwiched between the pair of input tracks 102 of the input rail 100 as shown in FIG. 12.
12 is a configuration diagram of a track panel portion. The track panel unit 900 adsorbs the track unit 910 having an inverted “C” shape in which one modular material 10M is placed and the material 10M of the track unit 910 by the suction jig 1000. After the transfer, the alignment unit 930 is moved into the positioner and seated in three pairs.
Here, the suction jig 1000 is formed at the lower end of the clamper 1100, the upper end of the clamping material to reduce the one end of the material 10 in order to withdraw the material 10 of the strip form from the material supply loader 20 ( A jawing (Jaw, 1110) is provided, the stir (1100) is composed of an upper clamp 1112 and a lower clamp 1114, the vertical bar (1120) is installed through the two clamps vertically withdrawal The material 10 is pushed back to a predetermined position and then retracted so that the sensor 107 detects the correct seating position of the material 10, and is combined so as to be returned to its original position. Therefore, description of the driving method is omitted.

The compatible sous singulation handler according to the present invention can be applied to equipment used in post processing for semiconductor production.

10 Materials 10M Modular Materials
20 Material supply loader 30 First jig
30a fixing plate 30b baffle plate
30c, 44 Conversion Plate 32 Support
34 negative pressure hose 36 fasteners
40 Chuck Table 42 Support Plate
46, 68 Volt 50 2nd Jig
60 Folder 62 Fixed Block
64 Folding Block 70 Sorting Table
80 Third Jig 82 Vision System
90 Dicing Saw System
100 Input Rail 101 Plate
102 Input Tracks 103 Adjustable Supports
104 screw bar 105 motor
106 Pulley 107 Sensing Home
108 Sensor 109 Sensor Support
400 Handler System 900 Track Panel Section
910 Track section 930 Alignment section
1000 Suction Jig 1100 Clamper
1110 Stir 1112 Upper Clamp
1114 Lower clamp 1120 Vertical bar

Claims (4)

Material supply loader;
A first jig for absorbing material from the material supply loader and transporting the material to a dicing unit, a chuck table for fixing and fixing the material while the material is dicing, and transporting for cleaning the diced material from the chuck table A dicing saw system having a second jig to allow; And
A folder which receives the washed materials from the second jig and transfers them to a vision device for checking for defects, a third jig for transferring the vision inspection finished materials from the folder to a sorting table, and materials transferred to the sorting table In the sourcing handler which consists of a handler system which has a picker which separates and defective parts into a tray,
The first jig, the second jig and the third jig are respectively composed of a fixed plate, an auxiliary plate and a conversion plate, each auxiliary plate is carried with a spring against the fixed plate, the conversion plate is coupled to replace the replacement plate using a fastener ,
The folder is composed of a fixed block and a folding block, the fixed block and the folding block is composed of a fixed plate, an auxiliary plate and a conversion plate, each conversion plate is coupled to the sub-plate replaceable with bolts,
The chuck table is composed of a fixed plate, an auxiliary plate and a conversion plate is fastened to replace the bolt,
The sorting table is fastened to be replaceable by being bolted,
The first jig, second jig, third jig, folder, chuck table and sorting table, characterized in that the replaceable sour sing handler. The method according to claim 1,
An input rail is provided at the front end of the dicing saw system in which the material supplied from the material supply loader is suction-transferred to the chuck table.
The input rail plate is installed horizontally with the supply position of the strip material;
A pair of input tracks formed horizontally in the supply direction of the material such that the width thereof is variable;
A variable support coupled to the connecting piece through a through hole of the plate so as to support the input track at the bottom of the plate;
A screw bar installed penetrating orthogonal to a lower portion of the variable support so as to adjust an interval of the variable support;
A pulley installed on a motor shaft to rotate the screw bar;
A sensor installed on a sensing groove formed at one track piece of the input track; And
Soo singulation handler, characterized in that consisting of a sensor support for supporting the sensor to move horizontally. The method according to claim 2,
The input rail is provided with a modular type track panel to be detachable between the pair of input tracks,
The track panel portion includes a track portion of an inverted "C" shape in which one modular material is placed;
Soo singulation handler, characterized in that consisting of an alignment unit for transporting the modular material of the track unit by the adsorption jig and then moved into the positioner to be seated in three pairs. The method according to claim 3,
The suction jig is formed at the lower end of the clamper, the upper part of the clamper is provided with a jaw (Jawing) for the end of the (Jawing) to take out the strip of material in order to withdraw the strip-shaped material from the material supply loader, the stir The vertical bar, which consists of a lower clamp and vertically penetrates the upper clamp and the lower clamp, touches one end of the drawn material and pushes the material back to a predetermined position so that the sensor retracts when the sensor detects an accurate seating position of the material. Soong singulation handler, characterized in that the combination.

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