TWI827473B - Processing machine of electronic component - Google Patents

Processing machine of electronic component Download PDF

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Publication number
TWI827473B
TWI827473B TW112106390A TW112106390A TWI827473B TW I827473 B TWI827473 B TW I827473B TW 112106390 A TW112106390 A TW 112106390A TW 112106390 A TW112106390 A TW 112106390A TW I827473 B TWI827473 B TW I827473B
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Taiwan
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guide
carrier
electronic components
electronic component
machine
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TW112106390A
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Chinese (zh)
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TW202434514A (en
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李子瑋
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鴻勁精密股份有限公司
大陸商鴻勁興業精密科技(蘇州)有限公司
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Abstract

The processing machine of electronic component has a receiving device, a carrying device, a transportation device, a testing device, and a control device. The receiving device has a receiving member and a moving member. The receiving member is adapted for receiving electronic components, and the moving member is adapted for moving the electronic components on the receiving member. The first and the second tables of the carrying device are adapted for carrying the electronic component between the receiving device and the transportation device. The second table has a dodging hole to enable to pick up the electronic component when the first and the second tables are aligned vertically. The transportation device has a pick-up member, a correction plate, and a guiding unit so as to adjust the horizontal position of the pick-up member in order to carry the electronic component between the transportation device and the testing device. The testing device is adapted for testing the electronic component. The floating unit of the pressing mechanism makes the pressing member conducting heat and is able to adjust the height position.

Description

電子元件作業機Electronic component working machine

本發明提供一種可提高作業效能之電子元件作業機。 The invention provides an electronic component working machine that can improve working efficiency.

在現今,電子元件測試裝置以供料盤盛裝複數個電子元件,並由移料器將供料盤之電子元件移載至一載台之承槽,單一載台往返於供料盤與測試器之間載送電子元件,再由下壓器將載台上之電子元件移入且壓接於測試器之承槽內而執行測試作業。然往往一批次待測之電子元件數量繁多,若以單一載台往返載送,相當耗費時間而降低產能。又由於電子元件精密微小,若載台或測試器因熱脹冷縮或位移誤差等因素而導致承槽之位置發生偏移時,移料器即無法準確於載台之承槽或測試器之承槽取放電子元件,不僅影響作業順暢性,亦會使電子元件之接點無法接觸測試器之探針而被誤判為不良品,以致影響作業品質。再者,部份電子元件於製作時,會發生厚薄度尺寸上之差異,下壓器以預設下壓力壓接正常厚度尺寸之電子元件時,並不會發生過壓使用狀態,一旦下壓器壓接較厚尺寸之電子元件時,即會發生過壓損壞電子元件之問題。 Nowadays, electronic component testing equipment uses a feed tray to hold multiple electronic components, and a feeder moves the electronic components in the feed tray to the trough of a carrier. A single carrier moves between the feed tray and the tester. The electronic components are carried between them, and then the electronic components on the carrier are moved by the press down device and pressed into the bearing groove of the tester to perform the testing operation. However, there are often a large number of electronic components to be tested in a batch. If a single carrier is used to transport them back and forth, it is quite time-consuming and reduces production capacity. In addition, due to the precision of electronic components, if the position of the carrier trough of the carrier or tester is shifted due to factors such as thermal expansion, contraction or displacement error, the material transfer device will not be able to accurately position the carrier trough or tester. Picking and placing electronic components in the trough not only affects the smoothness of the operation, but also makes the contacts of the electronic components unable to contact the probes of the tester and is mistakenly judged as defective, thus affecting the quality of the operation. Furthermore, some electronic components will have differences in thickness and size during production. When the press is pressed with the preset pressing force to press the electronic components of normal thickness and size, it will not cause over-voltage. Once pressed, When the device is used to crimp thicker electronic components, the problem of overvoltage damage to the electronic components will occur.

本發明之目的一,提供一種電子元件作業機,其於機台配置有置料裝置、載運裝置、移料裝置、測試裝置及中央控制裝置;置料裝置設有置料器及搬料器,置料器以供承置電子元件,搬料器以供於置料器搬移電子元件; 載運裝置以載運驅動單元驅動第一、二載台於置料裝置與移料裝置間載運電子元件,並於第二載台設有讓位孔,以供便利於疊置在第二載台下方之第一載台移入或移出電子元件;移料裝置設有拾取器、校位板及導引單元,能夠使拾取器作微調位置,以於載運裝置與測試裝置間移載電子元件;測試裝置設有測試器及接合機構,測試器以供測試電子元件,接合機構設有接合器及浮動單元,浮動單元之載座的腔室供容置導溫媒介及接合器之連結部,並以防洩件連結載座及連結部,而封閉腔室,使接合器之貼接部凸伸出防洩件而可作浮動微調高度位置,以利壓接測試器之電子元件;中央控制裝置以控制及整合各裝置作動而執行自動化作業。 The first object of the present invention is to provide an electronic component working machine, which is equipped with a material loading device, a carrying device, a material moving device, a testing device and a central control device on the machine platform; the material loading device is equipped with a material loading device and a material moving device. The loader is used to hold electronic components, and the loader is used to move electronic components in the loader; The carrier device uses a carrier drive unit to drive the first and second carrier stages to carry electronic components between the loading device and the material transfer device, and a clearance hole is provided on the second carrier platform to facilitate stacking under the second carrier platform. The first carrier moves in or out electronic components; the transfer device is equipped with a picker, a positioning plate and a guide unit, which can finely adjust the position of the picker to transfer electronic components between the carrying device and the test device; the test device It is equipped with a tester and a joint mechanism. The tester is used to test electronic components. The joint mechanism is equipped with a joint and a floating unit. The cavity of the floating unit is used to accommodate the heat transfer medium and the connecting part of the joint, and to prevent The leakage piece connects the carrier and the connecting part to close the chamber, so that the joint part of the connector protrudes from the leakage prevention piece and can be floated and finely adjusted in height to facilitate the crimping of the electronic components of the tester; the central control device controls And integrate the actions of various devices to perform automated operations.

本發明之目的二,提供一種電子元件作業機,其載運裝置之第一載台及第二載台可於同一作業區作上下重疊配置,以供移料裝置取放二批次電子元件,不僅有效縮短載台作動時序,並可一次供料或收料二倍電子元件,進而提高載運效能。 The second object of the present invention is to provide an electronic component working machine in which the first carrier platform and the second carrier platform of the carrier device can be arranged in an overlapping manner in the same operating area, so that the material transfer device can pick and place two batches of electronic components. It effectively shortens the movement sequence of the carrier, and can feed or receive twice the electronic components at one time, thus improving the carrying efficiency.

本發明之目的三,提供一種電子元件作業機,其載運裝置之載運驅動單元可驅動第一載台及第二載台分別承載複數個電子元件並列配置於測試裝置之一側,而可一次提供二批次複數個待測電子元件以供取料,同樣地,空的第一載台及第二載台可並列配置於測試裝置之另一側,以供一次收置二批次複數個已測電子元件,進而縮短作業時間及提高供收料產能。 The third object of the present invention is to provide an electronic component working machine, in which the carrying driving unit of the carrying device can drive the first carrier and the second carrier to respectively carry a plurality of electronic components and are arranged side by side on one side of the test device, so that it can be provided at one time Two batches of multiple electronic components to be tested are provided for picking up materials. Similarly, the empty first stage and the second stage can be arranged side by side on the other side of the test device to accommodate two batches of multiple electronic components at one time. Test electronic components, thereby shortening operation time and increasing material supply and receiving productivity.

本發明之目的四,提供一種電子元件作業機,其移料裝置之拾取器應用於因熱脹冷縮變形之載台或測試器時,可利用導引單元於載台或測試器設置之第二導引部件的導引力導引推抵拾取器之第一導引部件,並搭配校位板 之彈片,而可使拾取器位移微調位置,以利準確於載台或測試器取放電子元件,進而提高移料使用效能。 The fourth object of the present invention is to provide an electronic component working machine. When the picker of the material transfer device is applied to a stage or tester that is deformed due to thermal expansion and contraction, the guide unit can be used to install the guide unit on the stage or tester. The guiding force of the two guide parts guides and pushes against the first guide part of the pickup, and is matched with the alignment plate The elastic piece allows the picker to move and fine-tune its position to facilitate accurate picking and placing of electronic components on the stage or tester, thereby improving the efficiency of material transfer.

本發明之目的五,提供一種電子元件作業機,其測試裝置之浮動單元的載座與接合器之連結部間充填有導溫媒介,導溫媒介直接覆蓋貼接於連結部之表面,以利將載座之溫度迅速傳導至接合器,於接合器壓接電子元件時,確保電子元件於模擬日後應用場所溫度之測試環境執行測試作業,進而縮短導溫時間,並提高測試品質。 The fifth object of the present invention is to provide an electronic component operating machine in which a temperature-conducting medium is filled between the holder of the floating unit of the testing device and the connecting part of the connector, and the temperature-conducting medium directly covers and adheres to the surface of the connecting part to facilitate The temperature of the carrier is quickly transferred to the connector. When the connector is crimping electronic components, it ensures that the electronic components perform testing operations in a test environment that simulates the temperature of the future application site, thus shortening the temperature conduction time and improving test quality.

10:機台 10:Machine

20:置料裝置 20: Material loading device

211:第一置盤器 211:First disk drive

212:第二置盤器 212: Second disk setter

22:頂盤器 22: Top tray

23:交換器 23:Switcher

24:置料器 24: Feeder

251:第一搬料器 251:The first material mover

252:第二搬料器 252:Second material mover

253:第三搬料器 253: The third material mover

254:第四搬料器 254: The fourth material mover

261:第一轉運器 261:First transporter

262:第二轉運器 262:Second transporter

30、30A:載運裝置 30, 30A: Carrying device

31:第一載運驅動源 31: First carrier drive source

32:第二載運驅動源 32: Second carrier drive source

33:第一載台 33:First carrier

331:第一承槽 331:First groove

332:第一導引銷 332:First guide pin

34:第二載台 34: Second stage

341:第二承槽 341:Second groove

342:讓位孔 342: giving way hole

343:第二導引銷 343: Second guide pin

40、40A:移料裝置 40, 40A: Material transfer device

41:座體 41: base body

411:承置部 411:Acquisition Department

412:通孔 412:Through hole

42:拾取件 42: Pickup pieces

421:抽氣道 421: Air suction channel

422:凸板 422:convex plate

423:導引孔 423:Guide hole

43:校位板 43:School position board

431:第一連接部 431: First connection part

432:第二連接部 432: Second connection part

433A:第一彈片 433A:The first shrapnel

433B:第二彈片 433B:Second shrapnel

433C:第三彈片 433C: The third shrapnel

434A:第一空間 434A:First space

434B:第二空間 434B:Second space

434C:第三空間 434C:The third space

435A:第一肋 435A:First rib

435B:第二肋 435B:Second rib

435C:第三肋 435C:Third rib

44:封板 44:Seal the board

451:移料驅動源 451: Material transfer drive source

452:移料臂 452:Transfer arm

50、50A:測試裝置 50, 50A: Test device

511:電路板 511:Circuit board

512:測試座 512:Test seat

5121:承置部 5121:Acquisition Department

5122:第三導引銷 5122:Third guide pin

52:接合件 52:joint parts

521:連結部 521:Connection Department

522:貼接部 522: Adhering part

53:第一板件 53:First plate

531:板體 531:Plate body

532:凸部 532:convex part

533:第一穿孔 533:First piercing

534:直段部 534: Straight section

535:導斜面 535: Guide slope

536:承孔 536: Bearing hole

54:載座 54:Carrying seat

541:腔室 541: Chamber

55:第二板件 55:Second plate

551:桿體 551:rod body

552:擋部 552:Block

56:導溫媒介 56:Thermal medium

57:防洩件 57: Anti-leak parts

571:第一承接部 571:The first undertaking department

572:第二承接部 572:Second Undertaking Department

573:彎折部 573: Bending part

58:彈簧 58:Spring

591:機架 591:Rack

592:接合驅動源 592: Engage drive source

593:接合臂 593:joint arm

594:溫控器 594: Thermostat

61、61A:預溫盤 61, 61A: Preheating plate

圖1:本發明作業機之配置圖。 Figure 1: Configuration diagram of the working machine of the present invention.

圖2至圖3:本發明置料裝置之示意圖。 Figure 2 to Figure 3: Schematic diagram of the material loading device of the present invention.

圖4至圖6:本發明載運裝置之示意圖。 Figures 4 to 6: Schematic diagrams of the carrying device of the present invention.

圖7至圖11:本發明移料裝置之示意圖。 Figures 7 to 11: Schematic diagrams of the material transfer device of the present invention.

圖12至圖15:本發明測試裝置之示意圖。 Figures 12 to 15: Schematic diagrams of the testing device of the present invention.

為使 貴審查委員對本發明作更進一步之瞭解,茲舉一較佳實施例並配合圖式,詳述如後:請參閱圖1~15,本發明電子元件作業機包含機台10、置料裝置20、載運裝置30、移料裝置40、測試裝置50及中央控制裝置(圖未示出),中央控制裝置用以控制及整合各裝置作動,以執行自動化作業。 In order to enable your review committee to have a further understanding of the present invention, a preferred embodiment is cited and illustrated in detail below: Please refer to Figures 1 to 15. The electronic component working machine of the present invention includes a machine 10, a material loading The device 20, the carrying device 30, the material transfer device 40, the testing device 50 and the central control device (not shown) are used to control and integrate the actions of each device to perform automated operations.

置料裝置20(請配合參閱圖1~3)裝配於機台10,並設有至少一置料器及至少一搬料器,置料器以供承置電子元件,搬料器以供於置料器搬移電子 元件。依作業需求,置料器可配置於固定位置或不特定位置。置料裝置20更包含轉運機構,轉運機構設有至少一轉運器,以供轉運電子元件,至少一搬料器包含第一搬料器及第二搬料器,第一搬料器於置料器與轉運器間搬移電子元件,第二搬料器於轉運器與載運裝置30間搬移電子元件。置料裝置20更包含至少一置盤器、至少一頂盤器及至少一交換器,至少一置盤器可供盛裝至少一料盤,至少一頂盤器可供托移至少一置盤器之料盤,交換器可於置料器及置盤器間轉載料盤。 The loading device 20 (please refer to Figures 1 to 3) is assembled on the machine 10, and is provided with at least one loading device and at least one loading device. The loading device is used for holding electronic components, and the loading device is used for placing electronic components. Loader moving electronics element. Depending on the job requirements, the loader can be configured in a fixed position or in an unspecified position. The loading device 20 further includes a transfer mechanism. The transfer mechanism is provided with at least one transfer device for transferring electronic components. The at least one transfer device includes a first transfer device and a second transfer device. The first transfer device is used for loading materials. The electronic components are moved between the transporter and the transporter, and the second transporter transports the electronic components between the transporter and the carrying device 30 . The loading device 20 further includes at least one tray setter, at least one top tray and at least one exchanger. At least one tray setter can hold at least one tray, and at least one top tray can hold at least one tray. For material trays, the exchanger can transfer the material trays between the material loader and the tray setter.

於本實施例,置料裝置20於機台10之下方配置有第一列之複數個第一置盤器211及第二列之複數個第二置盤器212,依作業需求,複數個第一置盤器211及第二置盤器212可預先盛裝料盤或為空的狀態,複數個頂盤器22分別配置於複數個第一置盤器211的下方,而可作第三方向(如Z方向)位移,以將一第一置盤器211的料盤頂升至第二置盤器212,一可作第一、三方向(如X-Z方向)位移之交換器23,以於第二置盤器212夾持取出一具待測電子元件之料盤,複數個可作第三方向位移之置料器24,以供盛置料盤,於置料器24作Z方向向下位移時,交換器23可作X-Z方向位移至置料器24上方置放料盤,置料器24承載一具待測電子元件之料盤作Z方向向上位移而供料。置料裝置20於機台10之上方配置可作第一、二、三方向(如X-Y-Z方向)位移之第一搬料器251、第二搬料器252、第三搬料器253、第四搬料器254,以及配置可作第二方向(如Y方向)位移之第一轉運器261及第二轉運器262。第一搬料器251作X-Y-Z方向位移於置料器24之料盤取出待測電子元件,並移入第一轉運器261,第一轉運器261作Y方向位移將待測電子元件載送至載運裝置30之側方,第二搬料器252作X-Y-Z方向位移於第一轉運器261取出待測電子元件,並移載至機台10之第一作業區,且位於載運裝置30之上方。 In this embodiment, the material loading device 20 is configured with a plurality of first tray loaders 211 in a first row and a plurality of second tray loaders 212 in a second row under the machine 10. According to the operation requirements, a plurality of first tray loaders 211 are arranged in the second row. The first tray holder 211 and the second tray holder 212 can be filled with trays in advance or in an empty state. A plurality of tray tops 22 are respectively arranged below the plurality of first tray holders 211 and can be moved in a third direction ( (such as the Z direction) displacement to lift the material tray of a first tray 211 to the second tray 212, and an exchanger 23 that can move in the first and third directions (such as the X-Z direction) to The second tray 212 clamps and takes out a tray of electronic components to be tested. A plurality of trays 24 that can move in the third direction are used to hold the tray. The trays 24 move downward in the Z direction. At this time, the exchanger 23 can move in the X-Z direction to place a material tray above the feeder 24, and the feeder 24 carries a tray of electronic components to be tested and can move upward in the Z direction to supply materials. The material loading device 20 is disposed above the machine platform 10 and is equipped with a first material conveyor 251, a second material conveyor 252, a third material conveyor 253, and a fourth material conveyor 251 that can move in the first, second, and third directions (such as the X-Y-Z direction). The material mover 254 is equipped with a first transfer device 261 and a second transfer device 262 that can move in the second direction (such as the Y direction). The first loader 251 moves in the X-Y-Z direction to take out the electronic component to be tested from the tray of the loader 24, and moves it into the first transporter 261. The first transporter 261 moves in the Y direction to carry the electronic component to be tested to the carrier. On the side of the device 30 , the second transfer device 252 moves in the X-Y-Z direction to take out the electronic components to be tested on the first transfer device 261 , and transfers them to the first working area of the machine 10 , and is located above the carrying device 30 .

載運裝置30(請配合參閱圖1、4~6),配置於機台10,包含載運驅動單元、第一載台及第二載台,載運驅動單元以供驅動第一、二載台作第二方向位移,第一、二載台分別設有第一、二承槽,以供承置電子元件,並於第二載台之第二承槽一側設有讓位孔,於讓位孔相對第一承槽,以供移入或移出電子元件。更進一步,載運驅動單元設有至少一載運驅動源,載運驅動源可為線性馬達、壓缸或包含馬達及至少一載運傳動組,載運傳動組可為皮帶輪組或螺桿螺座組。 The carrying device 30 (please refer to Figures 1, 4-6) is configured on the machine 10 and includes a carrying driving unit, a first carrying platform and a second carrying platform. The carrying driving unit is used to drive the first and second carrying platforms for the third step. Displacement in two directions, the first and second stages are respectively provided with first and second grooves for holding electronic components, and a relief hole is provided on one side of the second groove of the second carrier. Relative to the first receiving groove, electronic components are moved in or out. Furthermore, the carrier driving unit is provided with at least one carrier drive source. The carrier drive source can be a linear motor, a pressure cylinder, or a motor and at least one carrier transmission group. The carrier transmission group can be a pulley group or a screw screw seat group.

於本實施例,作業機於測試裝置50之兩側分別設有相同設計之載運裝置30、30A,茲以載運裝置30作一說明,載運驅動單元之至少一載運驅動源包含二個呈Y方向配置之第一載運驅動源31及第二載運驅動源32,第一載運驅動源31及第二載運驅動源32分別包含馬達及由馬達驅動之皮帶輪組。第一載台33設有複數列第一承槽331,以供承置複數個電子元件,並由第一載運驅動源31驅動作Y方向位移。第二載台34設有複數列第二承槽341及複數列讓位孔342,複數列第二承槽341以供承置複數個電子元件,複數列第二承槽341與複數列第一承槽331相互錯位,複數列讓位孔342位於複數列第二承槽341之一側,各讓位孔342的內徑尺寸大於第一承槽331之內徑尺寸,第二載台34之高度高於第一載台33而具有高低位差,第二載台34由第二載運驅動源32驅動作Y方向位移。 In this embodiment, the operating machine is equipped with carrying devices 30 and 30A of the same design on both sides of the testing device 50. The carrying device 30 is used as an illustration. At least one carrying driving source of the carrying driving unit includes two carrying devices in the Y direction. The first carrying driving source 31 and the second carrying driving source 32 are configured. The first carrying driving source 31 and the second carrying driving source 32 respectively include a motor and a pulley set driven by the motor. The first carrier 33 is provided with a plurality of rows of first receiving grooves 331 for receiving a plurality of electronic components, and is driven by the first carrying driving source 31 to perform displacement in the Y direction. The second stage 34 is provided with a plurality of rows of second receiving grooves 341 and a plurality of rows of relief holes 342. The plurality of rows of second receiving grooves 341 are used to receive a plurality of electronic components. The plurality of rows of second receiving grooves 341 and a plurality of rows of first receiving grooves are The receiving grooves 331 are misaligned with each other, and the plurality of rows of relief holes 342 are located on one side of the plurality of rows of the second receiving grooves 341 . The inner diameter of each relief hole 342 is larger than the inner diameter of the first receiving groove 331 . The height is higher than the first stage 33 and has a height difference. The second stage 34 is driven by the second carrying driving source 32 to move in the Y direction.

第一載台33及第二載台34同時位於機台10之第一作業區,且第二載台34沿Z方向重疊位於第一載台33之上方,使複數列讓位孔342相對於複數列第一承槽331,置料裝置20之第二搬料器252除了將待測電子元件直接移入位於上方之第二載台34的第二承槽341外,並可通過讓位孔342將待測電子元件移入位於下方之第一載台33的第一承槽331,不僅便利承載電子元件,而提高載運產能;第 一載運驅動源31及第二載運驅動源32分別驅動第一載台33及第二載台34作Y方向位移將複數個待測電子元件載送至機台10之第二作業區,並置排列位於二移料裝置40之下方,進而可一次供應二倍數量之待測電子元件。 The first carrier 33 and the second carrier 34 are located in the first working area of the machine 10 at the same time, and the second carrier 34 overlaps above the first carrier 33 along the Z direction, so that the plurality of rows of relief holes 342 are relative to In addition to the plurality of rows of first receiving grooves 331 and the second conveying device 252 of the loading device 20, in addition to directly moving the electronic components to be tested into the second receiving grooves 341 of the second carrier stage 34 located above, they can also pass through the relief holes 342. Moving the electronic component to be tested into the first receiving groove 331 of the first carrier 33 located below not only facilitates the loading of the electronic component, but also improves the carrying capacity; the second A carrying driving source 31 and a second carrying driving source 32 respectively drive the first carrying stage 33 and the second carrying stage 34 to move in the Y direction to carry a plurality of electronic components to be tested to the second operating area of the machine 10 and arrange them side by side. It is located below the two transfer devices 40 and can supply twice the number of electronic components to be tested at one time.

移料裝置40(請配合參閱圖1、5、7~11)配置於機台10,包含拾取器、校位板及導引單元,拾取器以供於載運裝置30與測試裝置50之間移載電子元件。校位板供彈性連結拾取器,更進一步,校位板設有第一連接部及至少一彈片,第一連接部供裝配拾取器,彈片以供第一連接部及拾取器作彈性位移。導引單元設於拾取器,並受一導引力導引推抵,而能夠使拾取器牽動校位板彈性變形而位移微調位置。更進一步,導引單元於拾取器設有第一導引部件,第一導引部件受一導引力導引推抵,能夠使拾取器牽動彈片變形而位移微調位置。 The material transfer device 40 (please refer to Figures 1, 5, 7~11) is configured on the machine 10 and includes a picker, a calibration board and a guide unit. The picker is used for moving between the carrying device 30 and the testing device 50. loaded electronic components. The calibration plate is used to elastically connect the pickup. Furthermore, the calibration plate is provided with a first connection part and at least one elastic piece. The first connection part is used for assembling the pickup, and the elastic piece is used for elastic displacement of the first connection part and the pickup. The guide unit is arranged on the pickup and is guided and pushed by a guiding force, so that the pickup can affect the elastic deformation of the calibration plate and thereby displace and finely adjust the position. Furthermore, the guide unit is provided with a first guide component on the pickup. The first guide component is guided and pushed by a guiding force, which can cause the pickup to deform the spring piece and shift the fine-tuning position.

承上述,拾取器設有座體及拾取件,座體以供承置校位板之第二連接部,拾取件以供移載電子元件,並連接校位板之第一連接部,以及供導引單元設有第一導引部件。更進一步,校位板的第一連接部與第二連接部之間設有複數層呈環圈狀且由內向外逐層尺寸漸增之彈片,複數層彈片之間構成複數層空間,複數層空間以呈第一方向配置或呈第二方向配置之複數層肋分別連結第一連接部、複數層彈片及第二連接部。第一方向與第二方向不平行。 Based on the above, the pickup is provided with a base body and a pickup piece. The base body is used to hold the second connection part of the calibration board. The pickup part is used to transfer electronic components and connect to the first connection part of the calibration board. The guide unit is provided with a first guide part. Furthermore, a plurality of layers of elastic pieces in annular shape and gradually increasing in size from the inside to the outside are provided between the first connection part and the second connection part of the calibration board. A plurality of layers of space are formed between the plurality of layers of elastic pieces. The space uses a plurality of layers of ribs arranged in the first direction or in the second direction to connect the first connecting part, the plurality of layers of elastic pieces and the second connecting part respectively. The first direction and the second direction are not parallel.

依作業需求,導引單元於載運裝置30之第一、二載台33、34或測試裝置50之測試器的其中一者或前述各者設有第二導引部件,以使第一導引部件承受第二導引部件之導引力導引推抵,能夠使拾取器位移微調位置。更進一步,第一導引部件與第二導引部件可為相互配合之導引銷或導引孔。 Depending on the operation requirements, the guide unit is provided with a second guide component on one or each of the first and second stages 33 and 34 of the carrier device 30 or the tester of the test device 50, so that the first guide unit The component bears the guiding force of the second guiding component and is pushed against it, thereby enabling the pickup to move and fine-tune its position. Furthermore, the first guide component and the second guide component may be guide pins or guide holes that cooperate with each other.

依作業需求,移料裝置更包含移料驅動單元,移料驅動單元設有作至少一方向位移之移料臂,移料臂以供帶動拾取器位移。 According to the operation requirements, the material transfer device further includes a material transfer drive unit. The material transfer drive unit is provided with a transfer arm that can move in at least one direction. The transfer arm is used to drive the pickup to move.

於本實施例,作業機於測試裝置50之兩側分別配置二個相同設計之移料裝置40、40A,茲以移料裝置40作一說明,拾取器之座體41由頂面朝底面開設複數個承置部411,承置部411開設通孔412,通孔412供容置一為吸嘴之拾取件42,拾取件42之內部設有抽氣道421,抽氣道421之第一端連通抽氣設備(圖未示出),第二端為吸取部,以供吸取或釋放電子元件,拾取件42之外環面設有凸板422。校位板43由彈性材質製作,並設有第一連接部431、第二連接部432及複數層第一彈片433A、第二彈片433B、…第三彈片433C,校位板43以第二連接部432跨置且固設於座體41之承置部411,第二連接部432與第一連接部431之間設有複數層呈環圈狀且由內向外逐層尺寸漸增之第一彈片433A、第二彈片433B、…第三彈片433C,複數層之第一彈片433A、第二彈片433B、…第三彈片433C之間構成複數層之第一空間434A、第二空間434B、…第三空間434C,複數層之第一空間434A、第二空間434B、…第三空間434C以複數層呈X方向配置或呈Y方向配置之複數層的第一肋435A、第二肋435B、…第三肋435C分別連結第一連接部431、第二連接部432及複數層之第一彈片433A、第二彈片433B、…第三彈片433C,校位板43之第一連接部431連結固設拾取件42之凸板422,進而校位板43以複數層第一彈片433A、第二彈片433B、…第三彈片433C供拾取件42作X-Y方向微調位移,更佳者,校位板43可供拾取件42作X-Y-Z方向微調位移及傾斜角度微調。移料裝置更包含至少一封板44,封板44裝配於拾取器之座體41,以供限位該校位板43。導引單元於拾取件42之凸板422設有二為導引孔423且呈Z方向配置之第一導引部件,並於第一載台33之第一承槽331周側設有二為第一導引銷332且呈Z方向配置之第二導引部件,以及第二載台34之第二承槽341周側設有二為第二導引銷343且呈Z方向配置之第二導引部件,以及於測試裝置50之測 試座(容後再述)設有二為導引銷且呈Z方向配置之第二導引部件。移料驅動單元設有移料驅動源451以供驅動移料臂452作X-Z方向位移,移料臂452以供裝配拾取器之座體41,使得移料驅動源451能夠帶動拾取器作X-Z方向位移。 In this embodiment, the operating machine is equipped with two material transfer devices 40 and 40A of the same design on both sides of the test device 50. The material transfer device 40 is used as an explanation. The base 41 of the picker is opened from the top to the bottom. A plurality of receiving parts 411. The receiving part 411 is provided with a through hole 412. The through hole 412 is used to accommodate a pickup part 42 that is a suction nozzle. An air extraction channel 421 is provided inside the pickup part 42, and the first end of the air extraction channel 421 is connected. The second end of the air extraction device (not shown) is a suction part for sucking or releasing electronic components. A convex plate 422 is provided on the outer ring surface of the pickup part 42 . The calibration plate 43 is made of elastic material and is provided with a first connecting part 431, a second connecting part 432 and a plurality of layers of first elastic pieces 433A, second elastic pieces 433B, ... third elastic pieces 433C. The calibration plate 43 is connected by a second connection part. The portion 432 straddles and is fixed on the receiving portion 411 of the base 41. There are a plurality of layers of first connecting portions 432, 432, and the first connecting portion 431, which are in an annular shape and gradually increase in size from the inside to the outside. The elastic pieces 433A, the second elastic pieces 433B,... the third elastic pieces 433C, and the plurality of layers of the first elastic pieces 433A, the second elastic pieces 433B,... the third elastic pieces 433C form a plurality of layers of first spaces 434A, second spaces 434B,... The three spaces 434C include a plurality of layers of first space 434A, a second space 434B, ... and a third space 434C arranged in a plurality of layers in the X direction or in a plurality of layers of first ribs 435A, second ribs 435B, ... arranged in the Y direction. The three ribs 435C are respectively connected to the first connecting part 431, the second connecting part 432 and a plurality of layers of first elastic pieces 433A, second elastic pieces 433B, ... third elastic pieces 433C. The first connecting part 431 of the calibration plate 43 is connected to the fixed pickup. The convex plate 422 of the component 42, and then the calibration plate 43 uses a plurality of layers of first elastic pieces 433A, second elastic pieces 433B,... third elastic pieces 433C to provide the pick-up piece 42 with fine-tuning displacement in the X-Y direction. Better yet, the calibration plate 43 can provide The pick-up part 42 is capable of fine-tuning displacement in the X-Y-Z direction and fine-tuning the tilt angle. The material transfer device further includes at least a sealing plate 44. The sealing plate 44 is assembled on the base 41 of the picker for limiting the positioning plate 43. The guide unit is provided with two guide holes 423 on the protruding plate 422 of the pickup part 42 and a first guide member arranged in the Z direction, and is provided with two first guide members on the circumference of the first receiving groove 331 of the first carrier 33 . The first guide pin 332 is a second guide member arranged in the Z direction, and the second receiving groove 341 of the second stage 34 is provided with two second guide pins 343 arranged on the peripheral side of the Z direction. guide components, and testing on the test device 50 The test seat (described later) is provided with two second guide parts that are guide pins and are arranged in the Z direction. The material transfer drive unit is provided with a material transfer drive source 451 for driving the material transfer arm 452 to move in the X-Z direction. The material transfer arm 452 is used to assemble the base 41 of the picker, so that the material transfer drive source 451 can drive the picker to move in the X-Z direction. Displacement.

第一、二載台33、34位移並列於第二作業區,且載送二批次之複數個待測電子元件分別位於二移料裝置40之下方,各移料裝置40以移料驅動源451驅動移料臂452及拾取件42作Z方向向下位移,由於第一、二載台33、34會因熱測作業之溫度升高而熱脹變形,導致第一、二承槽331、341之位置發生些微偏移,以第一載台33為例,移料裝置40之拾取件42朝向第一載台33位移時,拾取件42利用導引單元之導引孔423接觸第一載台33上之第一導引銷332,第一導引銷332於逐漸嵌入導引孔423之過程中,會以一導引力(如側向分力)推抵導引孔423,由於導引孔423設於拾取件42之凸板422,凸板422又連結校位板43之第一連接部431,使得此一導引力經由凸板422及第一連接部431而牽動校位板43之第一彈片433A、第二彈片433B、…第三彈片433C沿導引力之推抵方向作彈性變形,使拾取件42作被動式之水平浮動位移微調位置,拾取件42之位移量為第一承槽331之偏移量,使拾取件42可補償偏移量,於第一載台33之第一導引銷332嵌入拾取件42之導引孔423後,即可使拾取件42的中心校正對位第一載台33之第一承槽331的中心,進而使拾取件42精確地於第一載台33之第一承槽331取出電子元件。於移料驅動源451帶動移料臂452、拾取件42及電子元件作Z方向向上位移,拾取件42上之導引孔423脫離第一載台33上之第一導引銷332的限位,在無第一導引銷332之導引力推抵導引孔423的狀態下,校位板43之第一彈片433A、第二彈片433B、…第三彈片433C即可利用復位彈力帶動拾取件42作水平位移復位。因此,拾取件 42搭配校位板43及第一導引部件而可作位移微調位置,以利作業器(如載台、預溫盤或測試器等)準確取放電子元件,進而提高移料效能。 The first and second stages 33 and 34 are displaced and juxtaposed in the second operating area, and carry a plurality of electronic components to be tested in the second batch, respectively located below the two material transfer devices 40. Each material transfer device 40 is driven by a material transfer source. 451 drives the material transfer arm 452 and the pick-up part 42 to move downward in the Z direction. Since the first and second stages 33 and 34 will be thermally expanded and deformed due to the increase in temperature during the thermal measurement operation, the first and second bearing grooves 331 and 34 will be deformed due to thermal expansion. The position of 341 is slightly shifted. Taking the first stage 33 as an example, when the pickup part 42 of the material transfer device 40 is displaced toward the first stage 33, the pickup part 42 uses the guide hole 423 of the guide unit to contact the first stage. The first guide pin 332 on the platform 33 will push against the guide hole 423 with a guide force (such as a lateral component force) during the process of gradually inserting into the guide hole 423. The guide hole 423 is provided in the convex plate 422 of the pickup part 42, and the convex plate 422 is connected to the first connecting part 431 of the calibration plate 43, so that this guiding force affects the calibration plate through the convex plate 422 and the first connecting part 431. The first elastic piece 433A, the second elastic piece 433B, and the third elastic piece 433C of 43 are elastically deformed along the pushing direction of the guiding force, so that the pickup part 42 performs passive horizontal floating displacement fine-tuning position, and the displacement of the pickup part 42 is An offset of the groove 331 allows the pickup 42 to compensate for the offset. After the first guide pin 332 of the first stage 33 is inserted into the guide hole 423 of the pickup 42, the pickup 42 can be The center correction aligns the center of the first receiving groove 331 of the first carrier 33 , thereby allowing the pickup 42 to accurately pick out the electronic component from the first receiving groove 331 of the first carrier 33 . The material moving driving source 451 drives the material moving arm 452, the pickup part 42 and the electronic component to move upward in the Z direction, and the guide hole 423 on the pickup part 42 is separated from the limit of the first guide pin 332 on the first stage 33. , without the guiding force of the first guide pin 332 pushing against the guide hole 423, the first elastic piece 433A, the second elastic piece 433B, and the third elastic piece 433C of the alignment plate 43 can use the reset elastic force to drive the pickup. Part 42 performs horizontal displacement reset. Therefore, the pickup 42 can be used with the calibration plate 43 and the first guide component to adjust the position of the displacement finely, so as to facilitate the accurate picking and placing of electronic components by the operator (such as a carrier, a pre-warming tray or a tester, etc.), thereby improving the material transfer efficiency.

測試裝置50(請配合參閱圖1、12~15),配置於機台10,包含測試器及接合機構,測試器以供測試電子元件,並供移料裝置40移入或移出電子元件,接合機構設有接合器及浮動單元,接合器以供貼接電子元件,浮動單元設有載座、導溫媒介及防洩件,載座以供容置導溫媒介及接合器,導溫媒介覆蓋貼接該接合器,而能夠將載座之溫度傳導至接合器,防洩件連結載座及接合器,以防止導溫媒介外洩。 The testing device 50 (please refer to Figures 1, 12-15) is configured on the machine 10 and includes a tester and a joining mechanism. The tester is used to test electronic components, and the material transfer device 40 is used to move in or out electronic components and the joining mechanism. It is equipped with a connector and a floating unit. The connector is used for attaching electronic components. The floating unit is equipped with a carrier, a thermal conductive medium and a leak-proof piece. The carrier is used to accommodate the thermal conductive medium and the connector. The thermal conductive medium covers the sticker. The connector is connected to conduct the temperature of the carrier to the connector, and the anti-leakage component connects the carrier and the connector to prevent leakage of the temperature-conducting medium.

更進一步,接合器之一端具有連結部,另一端具有貼接部,貼接部以供貼接電子元件,浮動單元之載座設有腔室,腔室供容置導溫媒介及接合器之連結部,導溫媒介覆蓋貼接該連結部;防洩件連結載座及接合器之連結部,以封閉腔室;接合器之貼接部凸伸出防洩件而供壓接測試器之電子元件;藉以可迅速將載座之溫度傳導至接合器,並使接合器能夠作浮動位移。 Furthermore, one end of the connector has a connecting part, and the other end has a bonding part. The bonding part is used for bonding electronic components. The carrier of the floating unit is provided with a cavity, and the cavity is used to accommodate the temperature-conducting medium and the connector. The connecting part is covered with the thermal conductive medium and attached to the connecting part; the anti-leakage piece connects the connecting part of the carrier and the adapter to close the chamber; the adhering part of the adapter protrudes out of the anti-leakage piece for the pressure tester Electronic component; it can quickly conduct the temperature of the carrier to the joint and enable the joint to float.

接合機構除了可應用於壓接電子元件外,依作業需求,接合器可設有抽氣道,用以移載電子元件,或者移載及壓接電子元件。 In addition to being used for crimping electronic components, the splicing mechanism can also be equipped with an air extraction channel to transfer electronic components, or transfer and crimp electronic components, depending on the operation requirements.

於本實施例,作業機於移料裝置40之側方配置二個相同設計之測試裝置50、50A,茲以測試裝置50作一說明,測試器包含電性連接之電路板511及測試座512,測試座512設有具探針之承置部5121,以承置且測試電子元件。接合機構配置於測試器之上方,並設有接合器及浮動單元,接合器設有一概呈T型之接合件52,其一端具有較大直徑且呈水平配置之連結部521,另一端具有較小直徑且呈立桿(如Z方向)配置之貼接部522,貼接部522以供壓接電子元件。接合器更包含第一板件53,第一板件53於板體531之頂面設有呈Z方向配置之凸部 532,並於第一板件53開設有貫通頂面及底面之第一穿孔533,以供穿置接合件52之貼接部522,使第一板件53裝配於接合件52之連結部521下方。 In this embodiment, the operating machine is equipped with two test devices 50 and 50A of the same design on the side of the material transfer device 40. The test device 50 is used as an illustration. The tester includes an electrically connected circuit board 511 and a test socket 512. , the test socket 512 is provided with a receiving portion 5121 with a probe to receive and test electronic components. The coupling mechanism is arranged above the tester and is provided with a coupling and a floating unit. The coupling is provided with a T-shaped coupling piece 52, one end of which has a larger diameter and horizontally arranged connecting portion 521, and the other end has a larger The adhering portion 522 has a small diameter and is arranged in a vertical pole (eg, Z direction). The adhering portion 522 is used for crimping electronic components. The adapter further includes a first plate member 53. The first plate member 53 is provided with a protrusion arranged in the Z direction on the top surface of the plate body 531. 532, and a first through hole 533 penetrating the top surface and the bottom surface is opened in the first plate member 53 for passing through the adhering portion 522 of the joint member 52, so that the first plate member 53 is assembled on the connecting portion 521 of the joint member 52. below.

浮動單元之載座54設有複數個腔室541,腔室541的底面具有開口,以供置入接合件52之連結部521,腔室541之內壁面與連結部521之周側具有適當間隔。浮動單元更包含第二板件55,第二板件55配置於載座54之下方,並於相對腔室541之開口位置設有通孔,以供接合件52及第一板件53作Z方向位移。導溫媒介56可為液體、膏狀體、粉體、顆粒體或可被壓縮之固體,並具有不導電特性;於本實施例,導溫媒介56為不導電液,並可傳導溫度,導溫媒介56充填於載座54之腔室541,且分佈覆蓋於接合件52之連結部521表面,亦即導溫媒介56直接接觸載座54之腔室541及接合件52之連結部521,而為一中介傳導件。防洩件57設有第一承接部571及第二承接部572以供分別連結接合器及載座54,第一承接部571與第二承接部572之間成型有彎折部573;於本實施例,防洩件57為可變形之彈性膜片,並以第一承接部571供穿置接合件52之貼接部522,接合件52之連結部521與第一板件53之凸部532夾持連結防洩件57之第一承接部571定位,防洩件57之第二承接部572配置於載座54之底面,載座54與第二板件55夾持防洩件57之第二承接部572定位,使防洩件57將導溫媒介56封閉於載座54之腔室541而防止外洩,並使接合件52之連結部521位於腔室541之內部,且供接合件52可作Z方向浮動位移。又防洩件57之第一承接部571與第二承接部572之間成型有概呈U型之彎折部573,彎折部573之位置相對於腔室541與連結部521之間隔位置,彎折部573可供盛裝導溫媒介56,並依實際盛裝狀態而可作膨脹變形。 The carrier 54 of the floating unit is provided with a plurality of chambers 541. The bottom surface of the chambers 541 has an opening for inserting the connecting portion 521 of the joint 52. There is an appropriate distance between the inner wall of the chamber 541 and the peripheral side of the connecting portion 521. . The floating unit further includes a second plate 55. The second plate 55 is arranged below the carrier 54, and has a through hole at an opening position opposite to the chamber 541 for the connecting member 52 and the first plate 53 to operate. Directional displacement. The temperature-conducting medium 56 can be liquid, paste, powder, granular or compressible solid, and has non-conductive properties; in this embodiment, the temperature-conducting medium 56 is a non-conductive liquid, and can conduct temperature and conduct electricity. The temperature medium 56 is filled in the cavity 541 of the carrier 54, and is distributed and covered on the surface of the connecting portion 521 of the joint 52, that is, the thermal medium 56 directly contacts the cavity 541 of the carrier 54 and the connecting portion 521 of the joint 52. It is an intermediary conductor. The leakage prevention part 57 is provided with a first receiving part 571 and a second receiving part 572 for respectively connecting the adapter and the carrier 54. A bending part 573 is formed between the first receiving part 571 and the second receiving part 572; in this article In the embodiment, the leakage prevention member 57 is a deformable elastic diaphragm, and the first receiving portion 571 is used to pass through the adhering portion 522 of the joint member 52 , the connecting portion 521 of the joint member 52 and the convex portion of the first plate member 53 532 clamps and connects the first receiving portion 571 of the leakage prevention component 57 in position, and the second receiving portion 572 of the leakage prevention component 57 is disposed on the bottom surface of the carrier 54 , and the carrier 54 and the second plate 55 clamp the leakage prevention component 57 The second receiving portion 572 is positioned so that the anti-leakage member 57 seals the temperature-conducting medium 56 in the cavity 541 of the carrier 54 to prevent leakage, and the connecting portion 521 of the joint member 52 is located inside the cavity 541 for jointing. The piece 52 can make floating displacement in the Z direction. In addition, a generally U-shaped bending portion 573 is formed between the first receiving portion 571 and the second receiving portion 572 of the leakage prevention component 57. The position of the bending portion 573 is relative to the distance between the chamber 541 and the connecting portion 521. The bent portion 573 can hold the heat conductive medium 56 and can expand and deform according to the actual holding state.

依作業需求,接合機構更包含接合驅動單元及導正單元。導正單元於載座54與接合器之間設有相互配合之第一導正部件及第二導正部件,能夠 導正接合器。更進一步,第一導正部件及第二導正部件為相互配合之導正銷及導正孔,導正孔具有直段部及導斜面,導正銷具有桿體及擋部。依作業需求,導正單元於第一板件53與第二板件55之間設有至少一彈性件。於本實施例,導正單元於第一板件53之板體531設有複數個為導正孔之第一導正部件,導正孔具有一由板體531之底面朝向頂面貫通之直段部534,並設有一由板體531底面朝向直段部534作尺寸漸縮之導斜面535,另於板體531設有由頂面朝向底面凹設之承孔536,承孔536相通導正孔之直段部534,且承孔536之直徑尺寸大於直段部534之直徑尺寸,使承孔536與直段部534構成一階級孔。一為彈簧58之彈性件,其一端置入承孔536,另一端頂抵第二板件55之底面。導正單元於第二板件55裝配複數個為導正銷之第二導正部件,導正銷之桿體551一端具有螺紋,另一端成型有具斜面之擋部552,導正銷之桿體551穿置導正孔的直段部534及承孔536,並穿套彈簧58,令桿體551鎖固於第二板件55而組裝定位,第一板件53受彈簧58之頂推而作Z方向向下位移,並以導斜面535頂抵於導正銷之擋部552,而導正限位接合件52。接合驅動單元設有作至少一方向位移之接合臂,接合臂以供帶動接合器位移。於本實施例,接合驅動單元設有機架591、接合驅動源592及接合臂593,機架591配置於機台10,以供裝配接合驅動源592,接合驅動源592包含馬達、皮帶輪組及螺桿螺座組,馬達驅動一呈Y方向配置之皮帶輪組,皮帶輪組傳動螺桿螺座組,螺桿螺座組之螺座帶動接合臂593作Z方向位移,接合臂593帶動接合器及浮動單元作Z方向位移,以供接合器之接合件52可下壓電子元件。依作業需求,接合機構更包含至少一溫控器,以供溫控電子元件。更進一步,溫控器可為加熱件、致冷晶片或具流體之座體。於本實施例,接合機構於接合臂593與浮 動單元之載座54間配置有溫控器594,溫控器594為加熱件,以供溫控電子元件於模擬日後使用場所之環境溫度執行熱測作業。 Depending on the operation requirements, the joint mechanism further includes a joint drive unit and a guiding unit. The guide unit is provided with a first guide component and a second guide component that cooperate with each other between the carrier 54 and the adapter. Guide the adapter. Furthermore, the first guide component and the second guide component are guide pins and guide holes that cooperate with each other. The guide hole has a straight section and a guide inclined surface, and the guide pin has a rod body and a stopper. According to the operation requirements, the guide unit is provided with at least one elastic member between the first plate member 53 and the second plate member 55 . In this embodiment, the guide unit is provided with a plurality of first guide components that are guide holes on the plate body 531 of the first plate member 53. The guide holes have a straight line penetrating from the bottom surface of the plate body 531 to the top surface. The segment portion 534 is provided with a guide inclined surface 535 whose size is tapered from the bottom surface of the plate body 531 toward the straight segment portion 534. In addition, the plate body 531 is provided with a bearing hole 536 recessed from the top surface toward the bottom surface. The bearing holes 536 communicate with each other and guide the segment portion 534. The straight section 534 of the front hole, and the diameter of the receiving hole 536 is larger than the diameter of the straight section 534, so that the receiving hole 536 and the straight section 534 form a first-class hole. One is an elastic member of the spring 58 , one end of which is inserted into the socket 536 , and the other end is against the bottom surface of the second plate member 55 . The guide unit is assembled with a plurality of second guide components that are guide pins on the second plate 55. One end of the guide pin's rod 551 has a thread, and the other end is formed with a beveled stop 552. The guide pin's rod The body 551 passes through the straight section 534 of the guide hole and the bearing hole 536, and passes through the spring 58, so that the rod body 551 is locked in the second plate 55 and assembled and positioned. The first plate 53 is pushed by the spring 58. Then, it moves downward in the Z direction, and the guide inclined surface 535 is pressed against the stopper 552 of the guide pin to guide the limiting joint 52 . The joint driving unit is provided with a joint arm that can move in at least one direction, and the joint arm is used to drive the joint to move. In this embodiment, the joint drive unit is provided with a frame 591, a joint drive source 592 and a joint arm 593. The frame 591 is disposed on the machine 10 for assembling the joint drive source 592. The joint drive source 592 includes a motor, a pulley set and a screw. The screw seat group, the motor drives a pulley group arranged in the Y direction, the pulley group drives the screw screw seat group, the screw seat of the screw screw seat group drives the engagement arm 593 to move in the Z direction, and the engagement arm 593 drives the adapter and the floating unit to move in the Z direction The direction displacement allows the coupling member 52 of the coupling to press down the electronic component. Depending on the operating requirements, the joint mechanism further includes at least one temperature controller for temperature control electronic components. Furthermore, the thermostat can be a heating element, a cooling chip or a fluid-containing base. In this embodiment, the coupling mechanism is between the coupling arm 593 and the floating A thermostat 594 is disposed between the carriers 54 of the moving unit. The thermostat 594 is a heating element for the temperature control electronic components to perform thermal testing operations by simulating the ambient temperature of the future use location.

移料裝置40於第一載台33取出待測電子元件後,若作業機配置有預溫盤,可於預溫盤設有第二導引部件,以利移料裝置40將待測電子元件先行置放於預溫盤而預溫電子元件,若無,移料裝置40可將待測電子元件移載至測試裝置50。於本實施例,作業機於測試裝置50之兩側分別配置複數個具有第二導引部件(圖未示出)之預溫盤61、61A,以預溫盤61為例,預溫盤61之第二導引部件可導引移料裝置40之拾取件42準確移入待測電子元件,於預溫盤61預溫待測電子元件完畢後,移料裝置40將預溫盤61之待測電子元件移載至測試裝置50;然移料裝置40之導引單元於測試座512之承置部5121兩側分別設有可為第三導引銷5122之第二導引部件。若測試座512因升溫熱脹變形而導致承置部5121之位置些微偏移時,移料裝置40即以測試座512上之第三導引銷5122對拾取件42上之導引孔423施以導引力推抵,並利用校位板43之第一彈片433A、第二彈片433B、…第三彈片433C而使拾取件42作被動式之水平浮動位移微調位置,於測試座512之第三導引銷5122嵌入拾取件42上之導引孔423,進而使拾取件42準確將待測電子元件移入測試座512之承置部5121。 After the material transfer device 40 takes out the electronic components to be tested on the first stage 33, if the operating machine is equipped with a pre-warming plate, a second guide component can be provided on the pre-warming plate to facilitate the material transfer device 40 to transfer the electronic components to be tested. The electronic components are first placed on the pre-warming tray to pre-warm them. If not, the electronic components to be tested can be transferred by the transfer device 40 to the testing device 50 . In this embodiment, the operating machine is configured with a plurality of pre-warming trays 61 and 61A having second guide components (not shown) on both sides of the testing device 50. Taking the pre-warming tray 61 as an example, the pre-warming tray 61 The second guiding component can guide the pick-up part 42 of the material transfer device 40 to accurately move into the electronic component to be tested. After the electronic component to be tested is preheated in the pre-warming tray 61, the material transfer device 40 will move the electronic component to be tested in the pre-warming tray 61. The electronic components are transferred to the test device 50; however, the guide unit of the transfer device 40 is provided with second guide components, which may be third guide pins 5122, on both sides of the receiving portion 5121 of the test seat 512. If the position of the receiving portion 5121 is slightly shifted due to thermal expansion and deformation of the test seat 512 due to heating, the material transfer device 40 will use the third guide pin 5122 on the test seat 512 to align the guide hole 423 on the pick-up piece 42 Apply a guiding force to push it, and use the first elastic piece 433A, the second elastic piece 433B, and the third elastic piece 433C of the calibration plate 43 to make the pick-up part 42 perform passive horizontal floating displacement and fine-adjust the position at the third position of the test seat 512 The three guide pins 5122 are embedded in the guide holes 423 on the pick-up part 42, thereby allowing the pick-up part 42 to accurately move the electronic component to be tested into the receiving part 5121 of the test seat 512.

測試裝置50於拾取件42離開測試座512後,接合機構以接合驅動源592驅動接合臂593帶動接合器、浮動單元及溫控器594作Z方向向下位移,接合器之接合件52的貼接部522以預設下壓力壓接測試座512內之電子元件執行測試作業;由於導溫媒介56充填載座54的整個腔室541,而接觸載座54及接合件52之連結部521,在導溫媒介56包覆接觸接合件52之連結部521的狀態下,而可大幅增加導溫媒介56之傳熱面積,以提高溫控效果,使溫控器594的溫度迅速經由載座54 及導溫媒介56傳導至接合件52,接合件52即可使電子元件於模擬日後使用場所之環境溫度執行熱測作業。電子元件下壓測試座512之複數支探針時,會承受複數支探針之反作用力,並以反作用力頂推接合件52,由於載座54之腔室541內盛裝可流動且為不導電液之導溫媒介56,以及接合件52連結可彈性變形之防洩件57,利用防洩件57之彎折部573隨著接合件52之上拉牽動變形,使得接合件52被動式作Z方向向上浮動位移,接合件52之連結部521頂推導溫媒介56向四周流動而讓位,導溫媒介56流入於防洩件57之彎折部573,且頂撐彎折部573膨脹變形而擴增容置空間,使接合件52順利浮動位移而微調高度位置,進而防止壓損電子元件及提高測試良率。然接合件52帶動第一板件53作Z方向向上浮動位移時,第一板件53壓縮彈簧58,令第一板件53之導正孔的直段部534沿導正銷之桿體551位移,並使導正孔的導斜面535脫離導正銷之擋部552,以利接合件52隨電子元件之頂面斜度作適當微傾擺置,使接合件52之貼接部522全面貼合電子元件之頂面,進而均勻壓接電子元件以提高測試品質。於測試完畢,接合機構之接合驅動源592驅動接合臂593帶動接合件52、浮動單元及電子元件作Z方向向上位移,在無外力頂推接合件52之狀態下,利用彈簧58之復位彈力頂推第一板件53帶動接合件52作Z方向向下位移,接合件52以第一板件53之導正孔的導斜面535沿導正銷之擋部552的斜面導引,使導正孔的導斜面535與導正銷之擋部552相互貼合,以導正且限位接合件52。 After the pick-up part 42 leaves the test seat 512 of the test device 50, the joint mechanism uses the joint drive source 592 to drive the joint arm 593 to drive the joint, the floating unit and the temperature controller 594 to move downward in the Z direction. The connecting portion 522 presses the electronic component in the test seat 512 with a preset lower pressure to perform the test operation; because the temperature-conducting medium 56 fills the entire cavity 541 of the carrier 54 and contacts the connecting portion 521 of the carrier 54 and the joint 52, When the thermal conductive medium 56 covers the connecting portion 521 of the contact joint 52 , the heat transfer area of the thermal conductive medium 56 can be greatly increased to improve the temperature control effect, so that the temperature of the thermostat 594 can quickly pass through the carrier 54 And the heat conduction medium 56 is transmitted to the joint 52, and the joint 52 allows the electronic component to perform thermal testing operations at a simulated ambient temperature of the future use site. When the electronic component presses down the plurality of probes of the test seat 512, it will bear the reaction force of the plurality of probes and push the joint 52 with the reaction force. Since the cavity 541 of the carrier 54 contains fluid and is non-conductive, The liquid temperature-conducting medium 56 and the joint part 52 are connected to the elastically deformable leak-proof part 57. The bending part 573 of the leak-proof part 57 is used to deform as the joint part 52 is pulled up, so that the joint part 52 passively moves in the Z direction. Floating upward, the connecting portion 521 of the joint 52 pushes the temperature-conducting medium 56 to flow around and gives way. The temperature-conducting medium 56 flows into the bending portion 573 of the leak-proof member 57, and the supporting bending portion 573 expands, deforms and expands. The increased accommodation space allows the joint member 52 to float and move smoothly to fine-tune the height position, thereby preventing pressure damage to the electronic components and improving the test yield. However, when the joint member 52 drives the first plate member 53 to float upward in the Z direction, the first plate member 53 compresses the spring 58 so that the straight section 534 of the guide hole of the first plate member 53 moves along the rod 551 of the guide pin. displacement, and the guide inclined surface 535 of the guide hole is separated from the stopper 552 of the guide pin, so that the joint part 52 can be appropriately slightly tilted according to the slope of the top surface of the electronic component, so that the joint part 522 of the joint part 52 can be fully Fits the top surface of electronic components and presses them evenly to improve test quality. After the test is completed, the joint driving source 592 of the joint mechanism drives the joint arm 593 to drive the joint member 52, the floating unit and the electronic components to move upward in the Z direction. In the state where there is no external force to push the joint member 52, the return elastic force of the spring 58 is used to push the joint member 52. Pushing the first plate member 53 drives the joint member 52 to move downward in the Z direction. The joint member 52 is guided by the guide slope 535 of the guide hole of the first plate member 53 along the slope of the stop portion 552 of the guide pin, so that the guide member 52 is guided downward. The guide inclined surface 535 of the hole and the stop portion 552 of the guide pin fit together to guide and limit the joint 52 .

於測試完畢後,移料裝置40A於測試裝置50取出已測電子元件,並移載至預溫盤61A回溫,再將預溫盤61A之已測電子元件移載至載運裝置30A,載運裝置30A載送已測電子元件至轉運機構側方,以供轉運機構之第三搬料器253將載運裝置30A之已測電子元件搬移至第二轉運器262,第二轉運器262載送已 測電子元件至第四搬料器254之下方,以供第四搬料器254取出已測電子元件,並依測試結果,而搬移至置料器24分類收置。 After the test is completed, the material transfer device 40A takes out the tested electronic components from the testing device 50 and transfers them to the pre-warming tray 61A for recovery, and then transfers the tested electronic components in the pre-warming tray 61A to the carrying device 30A. 30A carries the measured electronic components to the side of the transfer mechanism, so that the third transporter 253 of the transfer mechanism moves the measured electronic components of the carrying device 30A to the second transporter 262, and the second transporter 262 carries the tested electronic components. The electronic components are tested to the bottom of the fourth loader 254, so that the fourth loader 254 can take out the measured electronic components, and move them to the loader 24 for sorting and storage according to the test results.

10:機台 10:Machine

20:置料裝置 20: Material loading device

24:置料器 24: Feeder

251:第一搬料器 251:The first material mover

252:第二搬料器 252:Second material mover

253:第三搬料器 253: The third material mover

254:第四搬料器 254: The fourth material mover

261:第一轉運器 261:First transporter

262:第二轉運器 262:Second transporter

30、30A:載運裝置 30, 30A: Carrying device

33:第一載台 33:First carrier

34:第二載台 34: Second stage

40、40A:移料裝置 40, 40A: Material transfer device

452:移料臂 452:Transfer arm

50、50A:測試裝置 50, 50A: Test device

591:機架 591:Rack

592:接合驅動源 592: Engage drive source

61、61A:預溫盤 61, 61A: Preheating plate

Claims (12)

一種電子元件作業機,包含: 機台; 置料裝置:配置於該機台,並設有至少一置料器及至少一搬料器,該置料器以 供承置電子元件,該搬料器作至少一方向位移,以供於該置料器搬移電子元件; 載運裝置:配置於該機台,並設有載運驅動單元、第一載台及第二載台,該載 運驅動單元以供驅動該第一、二載台位移,該第一、二載台分別設有第一、二承槽,以供承置電子元件,該第二載台之該第二承槽一側設有讓位孔,於該讓位孔相對該第一承槽,以供移入或移出電子元件; 移料裝置:配置於該機台,並設有拾取器、校位板及導引單元,該拾取器以供 於該載運裝置移載電子元件,該校位板供彈性連結該拾取器,該導引單元設於該拾取器,並受一導引力導引推抵,而能夠使該拾取器牽動該校位板彈性變形而位移微調位置; 測試裝置:配置於該機台,並設有測試器及接合機構,該測試器以供測試電子 元件,並供該移料裝置移入或移出電子元件,該接合機構設有接合器及浮動單元,該接合器以供貼接電子元件,該浮動單元設有載座 、導溫媒介及防洩件,該載座以供容置該導溫媒介及該接合器,該導溫媒介覆蓋貼接該接合器,而能夠將該載座之溫度傳導至該接合器,該防洩件連結該載座及該接合器,以防止該導溫媒介外洩; 中央控制裝置:以控制及整合各裝置作動而執行自動化作業。 An electronic component working machine, including: machine; Material loading device: It is configured on the machine and is equipped with at least one material loading device and at least one material moving device. The loading device is For holding electronic components, the loader moves in at least one direction to move the electronic components on the loader; Carrier device: It is configured on the machine and is provided with a carrier drive unit, a first carrier platform and a second carrier platform. The driving unit is used to drive the displacement of the first and second carriers. The first and second carriers are respectively provided with first and second grooves for holding electronic components. The second groove of the second carrier is A relief hole is provided on one side, opposite to the first receiving groove, for moving in or out electronic components; Material transfer device: It is configured on the machine and is equipped with a picker, a calibration board and a guide unit. The picker is used for When electronic components are transferred to the carrying device, the school positioning plate is used to elastically connect the picker. The guide unit is provided on the picker and is guided and pushed by a guiding force so that the picker can pull the school. The position plate elastically deforms and shifts to fine-tune its position; Test device: It is configured on the machine and is equipped with a tester and a joint mechanism. The tester is used to test electronics. components, and for the moving device to move in or out electronic components. The joining mechanism is provided with an adapter and a floating unit. The adapter is used for attaching electronic components. The floating unit is provided with a carrier. , Thermal conductive media and leak-proof parts, the carrier is used to accommodate the thermal conductive medium and the connector, the thermal conductive medium covers and adheres to the connector, and can conduct the temperature of the carrier to the connector, The anti-leakage component connects the carrier and the adapter to prevent the heat-conducting medium from leaking; Central control device: controls and integrates the actions of various devices to perform automated operations. 如請求項1所述之電子元件作業機,其該置料裝置更包含轉運機構 ,該轉運機構設有至少一轉運器,以供轉運電子元件,該至少一搬料器包含第一搬料器及第二搬料器,該第一搬料器於該置料器與該轉運器間搬移電子元件 ,該第二搬料器於該轉運器與該載運裝置間搬移電子元件。 As claimed in claim 1, the electronic component working machine further includes a transfer mechanism. , the transfer mechanism is provided with at least one transfer device for transferring electronic components. The at least one transfer device includes a first transfer device and a second transfer device. The first transfer device is between the loader and the transfer device. Moving electronic components between devices , the second material mover moves electronic components between the transporter and the carrying device. 如請求項1所述之電子元件作業機,其該置料裝置更包含至少一置盤器、至少一頂盤器及至少一交換器,該至少一置盤器可供盛裝至少一料盤,該至少一頂盤器可供托移該至少一置盤器之該料盤,該交換器可於該置料器及該置盤器間轉載該料盤。The electronic component working machine of claim 1, wherein the material loading device further includes at least one tray setter, at least one top tray and at least one exchanger, and the at least one tray setter can hold at least one material tray, The at least one top tray can hold the material tray of the at least one tray setter, and the exchanger can transfer the material tray between the stocker and the tray setter. 如請求項1所述之電子元件作業機,其該移料裝置之該校位板設有第一連接部及至少一彈片,該第一連接部供裝配該拾取器,該彈片以供該第一連接部及該拾取器作彈性位移,該導引單元於該拾取器設有第一導引部件,該第一導引部件受該導引力導引推抵,而能夠使該拾取器位移微調位置。As for the electronic component operating machine described in claim 1, the positioning plate of the material transfer device is provided with a first connection part and at least one elastic piece. The first connection part is used to assemble the picker, and the elastic piece is used for the third A connecting part and the pickup are elastically displaced, and the guide unit is provided with a first guide component on the pickup. The first guide component is guided and pushed by the guide force, so that the pickup can be displaced. Fine-tune the position. 如請求項4所述之電子元件作業機,其該拾取器設有座體及拾取件 ,該座體以供承置該校位板之第二連接部,該拾取件以供移載電子元件,並連接該校位板之該第一連接部,以及供該導引單元設有該第一導引部件。 The electronic component working machine as described in claim 4, wherein the pick-up device is provided with a base and a pick-up piece , the base is used to hold the second connection part of the school position board, the pick-up piece is used to transfer electronic components and connect the first connection part of the school position board, and the guide unit is provided with the First guide component. 如請求項5所述之電子元件作業機,其該校位板的該第一連接部與該第二連接部之間設有複數層呈環圈狀且由內向外逐層尺寸漸增之該彈片,複數層該彈片之間構成複數層空間,該複數層空間以不同方向配置之複數層肋分別連結該第一連接部、複數層該彈片及該第二連接部。As claimed in claim 5, the electronic component operating machine has a plurality of layers of ring-shaped rings with gradually increasing sizes from the inside to the outside between the first connection part and the second connection part of the calibration board. A plurality of layers of elastic pieces form a plurality of spaces between the plurality of layers of elastic pieces. The plurality of layers of space respectively connect the first connecting part, a plurality of layers of the elastic pieces and the second connecting part with a plurality of layers of ribs arranged in different directions. 如請求項4所述之電子元件作業機,其該導引單元於該第一、二載台或該測試器的其中一者或前述各者設有第二導引部件,以對該第一導引部件施以該導引力。As claimed in claim 4, the electronic component operating machine has a second guide component provided in the guide unit on one of the first and second stages or the tester, so as to guide the first The guide member applies the guide force. 如請求項1所述之電子元件作業機,其該移料裝置更包含移料驅動 單元,該移料驅動單元設有作至少一方向位移之移料臂,以供帶動該拾取器位移。 As claimed in claim 1 of the electronic component working machine, the material transfer device further includes a material transfer drive unit, the material transfer driving unit is provided with a material transfer arm that can move in at least one direction to drive the pickup to move. 如請求項1所述之電子元件作業機,其該測試裝置更包含接合驅動單元,該接合驅動單元設有作至少一方向位移之接合臂,以供帶動該接合器位移。As in the electronic component working machine of claim 1, the test device further includes a joint drive unit, and the joint drive unit is provided with a joint arm that can move in at least one direction to drive the jointer to move. 如請求項1所述之電子元件作業機,其該測試裝置之該接合機構的該接合器一端具有連結部,另一端具有貼接部,該載座設有腔室供容置該導溫媒介及該接合器之該連結部,該導溫媒介覆蓋貼接該連結部,該防洩件連結該載座及該接合器之該連結部,以封閉該腔室,該接合器之該貼接部凸伸出該防洩件而供貼接電子元件。As claimed in claim 1, the electronic component operating machine has a connecting part at one end of the jointing mechanism of the testing device and a bonding part at the other end, and the carrier is provided with a chamber for accommodating the temperature-conducting medium. And the connecting part of the adapter, the thermal conductive medium covers and attaches to the connecting part, the leakage prevention piece connects the carrier and the connecting part of the adapter to close the chamber, the attached part of the adapter A portion protrudes out of the anti-leakage component for attaching electronic components. 如請求項1所述之電子元件作業機,其該測試裝置之該防洩件設有第一承接部及第二承接部以供分別連結該接合器及該載座,該第一承接部與該第二承接部之間設有彎折部。As claimed in claim 1 of the electronic component operating machine, the leakage prevention part of the testing device is provided with a first receiving part and a second receiving part for connecting the adapter and the carrier respectively, and the first receiving part and A bending part is provided between the second receiving parts. 如請求項1所述之電子元件作業機,其該測試裝置更包含導正單元 ,該導正單元於該載座與該接合器之間設有相互配合之第一導正部件及第二導正部件,能夠導正該接合器。 The electronic component operating machine as claimed in claim 1, wherein the testing device further includes a guidance unit , The guide unit is provided with a first guide component and a second guide component that cooperate with each other between the carrier and the adapter, and can guide the adapter.
TW112106390A 2023-02-22 2023-02-22 Processing machine of electronic component TWI827473B (en)

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Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5345107A (en) * 1989-09-25 1994-09-06 Hitachi, Ltd. Cooling apparatus for electronic device
TW533316B (en) * 1998-12-08 2003-05-21 Advantest Corp Testing device for electronic device
TW200848760A (en) * 2007-06-15 2008-12-16 Hon Tech Inc Pressing mechanism provided with a plurality of press heads
CN101535822A (en) * 2006-11-01 2009-09-16 佛姆法克特股份有限公司 Method and apparatus for providing active compliance in a probe card assembly
WO2013129873A1 (en) * 2012-02-29 2013-09-06 (주)제이티 Apparatus for testing elements
TW201614246A (en) * 2014-10-03 2016-04-16 Hon Tech Inc Temperature control device of crimping device of test equipment and temperature control method thereof
TW201715239A (en) * 2015-10-16 2017-05-01 Hon Tech Inc Temperature control device of connector of test equipment and temperature control method thereof comprising a joint block contacting on an electronic component to be tested, a thermoelectric cooling chip mounted on a heating plate of the joint block, and a heat dissipater mounted on the thermoelectric cooling chip
TW201816405A (en) * 2016-10-25 2018-05-01 致茂電子股份有限公司 Anti-mist module for testing apparatus and electronic element inspection device provided with the same preserves and insulates heat, and reduces energy consumption
TW201835587A (en) * 2017-03-06 2018-10-01 韓商泰克元股份有限公司 Pushing apparatus of handler for testing semiconductor devices and operating method thereof enabling the semiconductor devices to appropriately contact the test socket, respectively, and improving the processing capability and the test reliability
TW202028761A (en) * 2019-01-18 2020-08-01 鴻勁精密股份有限公司 Crimper of test device and test classification apparatus using the same capable of improving the test quality and saving the cost
TW202202428A (en) * 2020-07-10 2022-01-16 鴻勁精密股份有限公司 Electronic component forwarding apparatus and operational equipment using the same
TW202226931A (en) * 2020-12-18 2022-07-01 鴻勁精密股份有限公司 Temperature controlling unit and operating apparatus using the same

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5345107A (en) * 1989-09-25 1994-09-06 Hitachi, Ltd. Cooling apparatus for electronic device
TW533316B (en) * 1998-12-08 2003-05-21 Advantest Corp Testing device for electronic device
CN101535822A (en) * 2006-11-01 2009-09-16 佛姆法克特股份有限公司 Method and apparatus for providing active compliance in a probe card assembly
TW200848760A (en) * 2007-06-15 2008-12-16 Hon Tech Inc Pressing mechanism provided with a plurality of press heads
WO2013129873A1 (en) * 2012-02-29 2013-09-06 (주)제이티 Apparatus for testing elements
TW201614246A (en) * 2014-10-03 2016-04-16 Hon Tech Inc Temperature control device of crimping device of test equipment and temperature control method thereof
TW201715239A (en) * 2015-10-16 2017-05-01 Hon Tech Inc Temperature control device of connector of test equipment and temperature control method thereof comprising a joint block contacting on an electronic component to be tested, a thermoelectric cooling chip mounted on a heating plate of the joint block, and a heat dissipater mounted on the thermoelectric cooling chip
TW201816405A (en) * 2016-10-25 2018-05-01 致茂電子股份有限公司 Anti-mist module for testing apparatus and electronic element inspection device provided with the same preserves and insulates heat, and reduces energy consumption
TW201835587A (en) * 2017-03-06 2018-10-01 韓商泰克元股份有限公司 Pushing apparatus of handler for testing semiconductor devices and operating method thereof enabling the semiconductor devices to appropriately contact the test socket, respectively, and improving the processing capability and the test reliability
TW202028761A (en) * 2019-01-18 2020-08-01 鴻勁精密股份有限公司 Crimper of test device and test classification apparatus using the same capable of improving the test quality and saving the cost
TW202202428A (en) * 2020-07-10 2022-01-16 鴻勁精密股份有限公司 Electronic component forwarding apparatus and operational equipment using the same
TW202226931A (en) * 2020-12-18 2022-07-01 鴻勁精密股份有限公司 Temperature controlling unit and operating apparatus using the same

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