TWI488815B - 經改質顆粒及包含其之分散液 - Google Patents

經改質顆粒及包含其之分散液 Download PDF

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Publication number
TWI488815B
TWI488815B TW098129750A TW98129750A TWI488815B TW I488815 B TWI488815 B TW I488815B TW 098129750 A TW098129750 A TW 098129750A TW 98129750 A TW98129750 A TW 98129750A TW I488815 B TWI488815 B TW I488815B
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TW
Taiwan
Prior art keywords
particles
dispersion
metal
group
substrate
Prior art date
Application number
TW098129750A
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English (en)
Chinese (zh)
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TW201016614A (en
Inventor
Imme Domke
Andrey Karpov
Hartmut Hibst
Radoslav Parashkov
Ingolf Hennig
Marcel Kastler
Friederike Fleischhaker
Lothar Weber
Peter Eckerle
Original Assignee
Basf Se
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Basf Se filed Critical Basf Se
Publication of TW201016614A publication Critical patent/TW201016614A/zh
Application granted granted Critical
Publication of TWI488815B publication Critical patent/TWI488815B/zh

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    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09CTREATMENT OF INORGANIC MATERIALS, OTHER THAN FIBROUS FILLERS, TO ENHANCE THEIR PIGMENTING OR FILLING PROPERTIES ; PREPARATION OF CARBON BLACK  ; PREPARATION OF INORGANIC MATERIALS WHICH ARE NO SINGLE CHEMICAL COMPOUNDS AND WHICH ARE MAINLY USED AS PIGMENTS OR FILLERS
    • C09C1/00Treatment of specific inorganic materials other than fibrous fillers; Preparation of carbon black
    • C09C1/04Compounds of zinc
    • C09C1/043Zinc oxide
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02365Forming inorganic semiconducting materials on a substrate
    • H01L21/02518Deposited layers
    • H01L21/02521Materials
    • H01L21/02551Group 12/16 materials
    • H01L21/02554Oxides
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02365Forming inorganic semiconducting materials on a substrate
    • H01L21/02518Deposited layers
    • H01L21/02521Materials
    • H01L21/02565Oxide semiconducting materials not being Group 12/16 materials, e.g. ternary compounds
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02365Forming inorganic semiconducting materials on a substrate
    • H01L21/02518Deposited layers
    • H01L21/02587Structure
    • H01L21/0259Microstructure
    • H01L21/02601Nanoparticles
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02365Forming inorganic semiconducting materials on a substrate
    • H01L21/02612Formation types
    • H01L21/02617Deposition types
    • H01L21/02623Liquid deposition
    • H01L21/02628Liquid deposition using solutions
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/67Thin-film transistors [TFT]
    • H10D30/674Thin-film transistors [TFT] characterised by the active materials
    • H10D30/6755Oxide semiconductors, e.g. zinc oxide, copper aluminium oxide or cadmium stannate
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/60Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs wherein the TFTs are in active matrices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00Nanotechnology for materials or surface science, e.g. nanocomposites
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00Particle morphology
    • C01P2004/60Particles characterised by their size
    • C01P2004/62Submicrometer sized, i.e. from 0.1-1 micrometer
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00Particle morphology
    • C01P2004/60Particles characterised by their size
    • C01P2004/64Nanometer sized, i.e. from 1-100 nanometer
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/29Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/29Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
    • Y10T428/2982Particulate matter [e.g., sphere, flake, etc.]
    • Y10T428/2991Coated
    • Y10T428/2993Silicic or refractory material containing [e.g., tungsten oxide, glass, cement, etc.]
    • Y10T428/2995Silane, siloxane or silicone coating

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Composite Materials (AREA)
  • Materials Engineering (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
  • Pigments, Carbon Blacks, Or Wood Stains (AREA)
TW098129750A 2008-09-04 2009-09-03 經改質顆粒及包含其之分散液 TWI488815B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP08163703 2008-09-04

Publications (2)

Publication Number Publication Date
TW201016614A TW201016614A (en) 2010-05-01
TWI488815B true TWI488815B (zh) 2015-06-21

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
TW098129750A TWI488815B (zh) 2008-09-04 2009-09-03 經改質顆粒及包含其之分散液

Country Status (7)

Country Link
US (1) US8734899B2 (cg-RX-API-DMAC7.html)
EP (1) EP2321373A1 (cg-RX-API-DMAC7.html)
JP (1) JP5599797B2 (cg-RX-API-DMAC7.html)
KR (1) KR20110066162A (cg-RX-API-DMAC7.html)
CN (1) CN102144004B (cg-RX-API-DMAC7.html)
TW (1) TWI488815B (cg-RX-API-DMAC7.html)
WO (1) WO2010026102A1 (cg-RX-API-DMAC7.html)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2376230B1 (de) 2008-12-11 2014-07-30 Basf Se Anreicherung von werterzen aus minenabfall (tailings)
WO2010066768A2 (de) * 2008-12-12 2010-06-17 Basf Se Dispersionen enthaltend funktionalisierte oxidische nanopartikel
PE20120730A1 (es) 2009-03-04 2012-06-15 Basf Se Separacion magnetica de minerales metalicos no ferrosos por acondicionamiento en multiples etapas
CN102612406A (zh) * 2009-11-20 2012-07-25 巴斯夫欧洲公司 用于制备羧酸和/或羧酸酐的在至少一个催化剂层中具有锑酸钒的多层催化剂及具有低热点温度的制备邻苯二甲酸酐的方法
KR20120123343A (ko) 2009-12-18 2012-11-08 바스프 에스이 저온에서 용액으로부터 가공될 수 있는 유전체를 갖는 기계적 가요성 중합체 기판 상의 금속 산화물 전계 효과 트랜지스터
US20110230668A1 (en) * 2010-03-19 2011-09-22 Basf Se Catalyst for gas phase oxidations based on low-sulfur and low-calcium titanium dioxide
TW201206896A (en) 2010-04-13 2012-02-16 Basf Se Process for controlling a gas phase oxidation reactor for preparation of phthalic anhydride
KR20180100248A (ko) 2010-04-23 2018-09-07 픽셀리전트 테크놀로지스 엘엘씨 나노결정의 합성, 캐핑 및 분산
KR20130057439A (ko) 2010-04-28 2013-05-31 바스프 에스이 아연 착물 용액의 제조 방법
US8865000B2 (en) 2010-06-11 2014-10-21 Basf Se Utilization of the naturally occurring magnetic constituents of ores
US8859459B2 (en) 2010-06-30 2014-10-14 Basf Se Multilayer catalyst for preparing phthalic anhydride and process for preparing phthalic anhydride
US9212157B2 (en) 2010-07-30 2015-12-15 Basf Se Catalyst for the oxidation of o-xylene and/or naphthalene to phthalic anhydride
US9376457B2 (en) 2010-09-03 2016-06-28 Basf Se Hydrophobic, functionalized particles
JP2014503446A (ja) 2010-10-27 2014-02-13 ピクセリジェント・テクノロジーズ,エルエルシー ナノ結晶の合成、キャップ形成および分散
US9359689B2 (en) 2011-10-26 2016-06-07 Pixelligent Technologies, Llc Synthesis, capping and dispersion of nanocrystals
KR101978835B1 (ko) * 2012-03-16 2019-05-15 한국전자통신연구원 박막 트랜지스터
JP6108563B2 (ja) * 2013-02-04 2017-04-05 国立研究開発法人産業技術総合研究所 抵抗体、誘電体等の電子部品用無機材料ペースト及び該無機材料ペーストの製造方法
FI130559B (en) * 2021-06-23 2023-11-21 Turun Yliopisto Semiconductor structure, semiconductor device, and method
KR102756449B1 (ko) * 2022-02-11 2025-01-21 한인정밀화학(주) 양자점 조성물, 이로부터 형성된 경화 패턴, 및 이를 포함하는 디스플레이 장치
CN118039856A (zh) * 2024-02-19 2024-05-14 贵州大学 锂电池用包覆及掺杂改性的高镍正极材料和低温电解液

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030161959A1 (en) * 2001-11-02 2003-08-28 Kodas Toivo T. Precursor compositions for the deposition of passive electronic features
CN1747783A (zh) * 2003-02-06 2006-03-15 布勒潘泰克有限公司 官能胶体的化学机械制备

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2303330A (en) * 1942-02-02 1942-12-01 New Jersey Zinc Co Zinc oxide
DE19907704A1 (de) * 1999-02-23 2000-08-24 Bayer Ag Nanopartikuläres, redispergierbares Fällungszinkoxid
DE10063092A1 (de) 2000-12-18 2002-06-20 Henkel Kgaa Nanoskalige Materialien in Hygiene-Produkten
JP2003073122A (ja) * 2001-09-04 2003-03-12 Mitsui Chemicals Inc 無機微粒子分散液及びそれを用いて製造される複合材料組成物
JP2004010807A (ja) * 2002-06-10 2004-01-15 Toyo Ink Mfg Co Ltd 水性分散体の製造方法
CN1330559C (zh) * 2002-06-12 2007-08-08 日本板硝子株式会社 薄片形式的多孔金属氧化物材料、其生产方法和包含它的化妆品、涂布材料、树脂组合物、油墨组合物和纸张
JP2004182483A (ja) * 2002-11-29 2004-07-02 Mitsubishi Chemicals Corp 酸化亜鉛超微粒子の製造方法
DE10257388A1 (de) 2002-12-06 2004-06-24 Sustech Gmbh & Co. Kg Nanopartikuläres redispergierbares Zinkoxidpulver
US20060264520A1 (en) 2003-03-31 2006-11-23 Shuji Sonezaki Surface-modified titanium dioxide fine particles and dispersion comprising the same, and method for producing the same
JP5014796B2 (ja) * 2004-09-30 2012-08-29 株式会社カネカ ポリマー修飾金属カルコゲン化物ナノ粒子の製造方法
DE102004048230A1 (de) * 2004-10-04 2006-04-06 Institut für Neue Materialien Gemeinnützige GmbH Verfahren zur Herstellung von Nanopartikeln mit maßgeschneiderter Oberflächenchemie und entsprechenden Kolloiden
DE102005007374A1 (de) 2005-02-17 2006-08-24 Universität Ulm Nanopartikel und deren Verwendung
JP4918994B2 (ja) * 2005-05-30 2012-04-18 住友電気工業株式会社 金属被膜の形成方法および金属配線
DE102005047807A1 (de) 2005-06-04 2006-12-07 Solvay Infra Bad Hönningen GmbH Modifizierte Nanopartikel
US7691666B2 (en) * 2005-06-16 2010-04-06 Eastman Kodak Company Methods of making thin film transistors comprising zinc-oxide-based semiconductor materials and transistors made thereby
US7402506B2 (en) 2005-06-16 2008-07-22 Eastman Kodak Company Methods of making thin film transistors comprising zinc-oxide-based semiconductor materials and transistors made thereby
JP4738931B2 (ja) * 2005-07-29 2011-08-03 富士フイルム株式会社 ナノ粒子分散液、それを用いた半導体デバイスの製造方法及び半導体デバイス
KR100768632B1 (ko) * 2006-10-30 2007-10-18 삼성전자주식회사 나노입자의 분산방법 및 이를 이용한 나노입자 박막의제조방법
KR20080108767A (ko) * 2007-06-11 2008-12-16 삼성에스디아이 주식회사 전극 단자부 코팅재 및 이를 구비한 플라즈마 디스플레이패널

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030161959A1 (en) * 2001-11-02 2003-08-28 Kodas Toivo T. Precursor compositions for the deposition of passive electronic features
CN1747783A (zh) * 2003-02-06 2006-03-15 布勒潘泰克有限公司 官能胶体的化学机械制备

Also Published As

Publication number Publication date
US20110163278A1 (en) 2011-07-07
TW201016614A (en) 2010-05-01
CN102144004B (zh) 2014-11-26
EP2321373A1 (de) 2011-05-18
US8734899B2 (en) 2014-05-27
JP2012501941A (ja) 2012-01-26
KR20110066162A (ko) 2011-06-16
WO2010026102A1 (de) 2010-03-11
JP5599797B2 (ja) 2014-10-01
CN102144004A (zh) 2011-08-03

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