TWI465379B - 橫動裝置及基板處理裝置 - Google Patents

橫動裝置及基板處理裝置 Download PDF

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Publication number
TWI465379B
TWI465379B TW100118753A TW100118753A TWI465379B TW I465379 B TWI465379 B TW I465379B TW 100118753 A TW100118753 A TW 100118753A TW 100118753 A TW100118753 A TW 100118753A TW I465379 B TWI465379 B TW I465379B
Authority
TW
Taiwan
Prior art keywords
tray
holding base
fixed
base
traverse device
Prior art date
Application number
TW100118753A
Other languages
English (en)
Chinese (zh)
Other versions
TW201206806A (en
Inventor
Daisuke Yoshida
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Publication of TW201206806A publication Critical patent/TW201206806A/zh
Application granted granted Critical
Publication of TWI465379B publication Critical patent/TWI465379B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Chemical Vapour Deposition (AREA)
TW100118753A 2010-05-27 2011-05-27 橫動裝置及基板處理裝置 TWI465379B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010121964 2010-05-27

Publications (2)

Publication Number Publication Date
TW201206806A TW201206806A (en) 2012-02-16
TWI465379B true TWI465379B (zh) 2014-12-21

Family

ID=45003632

Family Applications (1)

Application Number Title Priority Date Filing Date
TW100118753A TWI465379B (zh) 2010-05-27 2011-05-27 橫動裝置及基板處理裝置

Country Status (5)

Country Link
JP (1) JP5463417B2 (ja)
KR (1) KR101477370B1 (ja)
CN (1) CN102859677B (ja)
TW (1) TWI465379B (ja)
WO (1) WO2011148633A1 (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI514501B (zh) * 2013-09-17 2015-12-21 Hon Tech Inc Electronic component moving mechanism and its application of the picking methods and test equipment
KR101983895B1 (ko) * 2017-05-29 2019-05-29 한국알박(주) 회전 클램핑 장치
CN109790618B (zh) * 2017-08-25 2022-10-04 应用材料公司 用于提升或降低载体的组件、用于在真空腔室中运输载体的设备、以及用于提升或降低载体的方法
CN212517117U (zh) * 2017-11-20 2021-02-09 应用材料公司 磁悬浮系统、真空系统
JP7015182B2 (ja) 2018-02-09 2022-02-02 ナカ工業株式会社 天井点検口
JP7425701B2 (ja) 2020-09-16 2024-01-31 芝浦メカトロニクス株式会社 基板搬送装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55161718A (en) * 1979-05-29 1980-12-16 Yooken:Kk Transfer unit for conveyor line
JP2000286320A (ja) * 1999-03-31 2000-10-13 Shibaura Mechatronics Corp 基板搬送装置
TW200940430A (en) * 2008-02-28 2009-10-01 Ulvac Inc Transfer apparatus, vacuum processing apparatus, and transfer method

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6259616U (ja) * 1985-09-30 1987-04-13
JP3517845B2 (ja) * 1992-10-07 2004-04-12 日本電気硝子株式会社 ガラス管の梱包装置
JPH06179504A (ja) * 1992-12-14 1994-06-28 Daifuku Co Ltd 荷搬送移載装置
JPH06338465A (ja) * 1993-05-31 1994-12-06 Mitsubishi Heavy Ind Ltd プラズマｃｖｄ装置
JP3617860B2 (ja) * 1994-09-16 2005-02-09 株式会社東芝 基板処理方法および基板処理装置
JP3068768B2 (ja) * 1995-06-30 2000-07-24 日立造船株式会社 連続鋳造−圧延ライン用シフトテーブル装置
JP2963683B2 (ja) * 1998-01-14 1999-10-18 共和機械株式会社 卵移載装置
JP4096404B2 (ja) * 1998-04-15 2008-06-04 神鋼電機株式会社 半導体製造装置における外部設置型ロードポート装置
JP2002203885A (ja) * 2000-12-27 2002-07-19 Anelva Corp インターバック型基板処理装置
JP4711770B2 (ja) * 2005-08-01 2011-06-29 株式会社アルバック 搬送装置、真空処理装置および搬送方法
DE102005061563A1 (de) * 2005-12-22 2007-07-19 Applied Materials Gmbh & Co. Kg Anlage zur Behandlung von Substraten und Verfahren

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55161718A (en) * 1979-05-29 1980-12-16 Yooken:Kk Transfer unit for conveyor line
JP2000286320A (ja) * 1999-03-31 2000-10-13 Shibaura Mechatronics Corp 基板搬送装置
TW200940430A (en) * 2008-02-28 2009-10-01 Ulvac Inc Transfer apparatus, vacuum processing apparatus, and transfer method

Also Published As

Publication number Publication date
CN102859677B (zh) 2015-04-01
KR20130018806A (ko) 2013-02-25
JPWO2011148633A1 (ja) 2013-07-25
CN102859677A (zh) 2013-01-02
KR101477370B1 (ko) 2014-12-30
WO2011148633A1 (ja) 2011-12-01
TW201206806A (en) 2012-02-16
JP5463417B2 (ja) 2014-04-09

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