TWI465379B - Traverse apparatus and substrate processing apparatus - Google Patents

Description

Traverse device and substrate processing device

The present invention relates to a device for moving a substrate in a state of being fixed upright, and more particularly to a traverse device capable of changing a substrate moving in a conveyance path to another transfer path, and a substrate processing using the traverse device Device.

The transport device of the vacuum processing apparatus described in Patent Document 1 is a transport tray that transports the substrate to be processed in an upright shape. The traverse device provided in the transport device fixes both sides of the tray along the transport direction of the tray, and is placed in parallel between the two transport lanes at the bottom of each processing chamber to move the transport tray to which the substrate to be processed is fixed .

This traverse device has a tray table on which a conveyance tray is placed, an elevating mechanism for elevating the tray table, and a slide mechanism for moving the elevating mechanism in the horizontal direction. Drive sources (motors M1 and M2) are provided in each of the lift mechanism and the slide mechanism (for example, refer to paragraphs [0032], [0033], FIGS. 2 and 3 of Patent Document 1).

[Advanced technical literature] [Patent Literature]

Patent Document 1: International Publication No. 2009/107728 Patent Specification

However, the traverse device moves the transport tray by the two-axis mechanism of the elevating mechanism and the slide mechanism, and the drive source is separately provided to complicate the mechanism. The complexity of the organization also increases the number of components and also makes the cost higher.

Moreover, the traverse device is caused by the lifting mechanism and the sliding mechanism There are three movements of the horizontal movement and the lowering of the lifting mechanism to move the transport tray, and there is also a problem that the operation time is long.

The present invention has been made in view of the above problems, and an object thereof is to provide a traverse device and a vacuum processing apparatus equipped with the same that can reduce the number of components by simplifying the structure and can shorten the movement time of the substrate.

In order to achieve the above object, a traverse device according to an aspect of the present invention includes a tray transfer mechanism and a drive unit.

The tray transfer mechanism has a holding base that fixes the tray of the fixed substrate in an upright state. The holding base is configured to rotate in a state of maintaining a posture of the tray fixed to the holding base; the tray transfer mechanism may have a fixed base and a crankshaft that is driven by the driving unit and coupled to the fixing Between the base and the aforementioned holding base.

The driving unit is configured to move the tray transfer mechanism between the first conveyance path and the second conveyance path for conveying the tray to form a movement path of the tray fixed to the holding base.

According to the present invention, the tray is moved between the first and second conveyance paths by rotating the holding base of the fixed tray by the tray transfer mechanism. Therefore, the two-axis moving operation of the elevating mechanism and the sliding mechanism as in the past is not required, and the movement of the tray can be moved by moving one driving portion of the tray transfer mechanism. That is, the structure of the traverse device can be simplified, and the number of components can be reduced. Further, by moving the holding base by the rotating tray transfer mechanism, the moving time can be shortened compared with the conventional traverse device.

The traverse device may further include an engaging member that is provided on the holding base and engaged with the engaging portion of the tray, and supports the tray. Thereby, the tray can be stabilized while the tray is moving posture.

The traverse device may further include a power transmission mechanism that transmits power of the tray transfer mechanism to the engagement member. The present invention simplifies the structure of the traverse device because the drive source for driving the engaging member is not required. As the power transmission mechanism, for example, a cam mechanism can also be used.

The engaging member has an engaging end portion that is engaged with a portion of the engaging portion of the tray, and the engaging member may be coupled to a position of the holding base adjacent to the upper end portion to place the engaging end portion Above the upper end of the aforementioned holding base. That is, since the size (or the height) of the holding base can be controlled to be reduced, the traverse device can be reduced in size and weight.

The holding base may also have a straight portion and a protruding portion. The aforementioned engaging member is rotatably coupled to the straight portion. The protruding portion includes a support portion on which the tray is placed and supported from below the tray, and is provided to protrude from a lower portion of the straight portion in a horizontal direction. In this case, the holding base is driven along the direction in which the first conveyance path and the second conveyance path are arranged in parallel, and the rotation center of the support portion of the holding base is disposed apart from the first conveyance path and the second conveyance. The road has a center line of equal distance.

For example, the present invention is particularly effective when the height positions of the first and second conveyance lanes are substantially the same. That is, in the present invention, the arrangement of the traverse device can be made closest to the first and second conveyance paths as viewed from the direction in which the first and second conveyance lanes of the tray are conveyed. As a result, the entire structure of the first and second conveyance lanes and the traverse device can be reduced in size, and the movement path of the tray that does not hinder the conveyance of the tray can be formed.

The substrate processing apparatus of the present invention includes a processing chamber, first and second moving The track and the above traversing device.

The aforementioned processing chamber is used to process the substrate.

The first and second transport lanes are installed in the processing chamber, and the trays on which the substrates are fixed are transported in an upright state.

According to the present invention, the tray is moved between the first and second conveyance paths provided in the processing chamber by rotating the holding base of the fixed tray by the tray transfer mechanism. Therefore, it is not necessary to move the tray by one drive unit of the tray transfer mechanism as in the case of the two-axis movement of the lift mechanism and the slide mechanism in the past. That is, the structure of the traverse device can be simplified, and the number of components can be reduced. Moreover, the movement time can be shortened by the movement of the rotation of the tray transfer mechanism.

The processing chamber may maintain a vacuum state in the processing chamber, and the driving unit of the traverse device may have a motor disposed outside the processing chamber. Conventionally, a bellows for maintaining a vacuum in a processing chamber is required because the motor of the sliding mechanism is disposed outside the vacuum processing chamber. Further, if the motor of the conventional lifting mechanism is disposed outside the processing chamber, it is necessary to have a mechanism for sealing the periphery of the rotating shaft of the motor. On the other hand, the present invention does not require a linear drive mechanism such as a slide mechanism, that is, it is not necessary to provide the motor of the drive unit to the bellows tube outside the processing chamber, and the present invention is sufficient as long as the shaft seal mechanism around the rotary shaft of the motor is sufficient.

As described above, according to the present invention, the number of components can be reduced by simplifying the structure, and the cost can be controlled and the moving time of the substrate can be shortened.

[Formation of the Invention]

Embodiments of the present invention will be described below by way of drawings.

FIG. 1 is a schematic perspective view showing a vacuum processing apparatus 10 including a substrate processing apparatus including a traverse device 30. The vacuum processing apparatus 10 includes a plurality of processing chambers 11 to 15. In FIG. 1, the vacuum processing apparatus 10 is connected to the loading and unloading chamber 11, the load-lock chamber (hereinafter simply referred to as the LL chamber 12), the first processing chamber 13, and the second processing chamber 14 with the gate valve 16 interposed therebetween. Carrying room 15.

The vacuum processing apparatus 10 is provided with a first conveyance path extending from the loading and unloading chamber 11 to the conveyance chamber 15 (hereinafter simply referred to as a departure R1), and a second conveyance path extending from the conveyance chamber 15 to the loading and unloading chamber 11 (hereinafter simply referred to as Return trip R2). In the present embodiment, the outward path R1 and the return path R2 are parallel to each other.

Among the outgoing path R1 and the returning path R2, a plurality of transport trays 17 are transported by roller transport. For example, while the conveyance roller 19 that is rotationally driven by the Y-axis direction is supported and the lower surface of the conveyance tray 17 is supported, it is conveyed along the forward stroke R1 and the return stroke R2. Each of the transport trays 17 has a rectangular frame shape that surrounds the outer edge of the substrate to be processed (hereinafter simply referred to as a substrate) S. Further, the transport tray 17 may be transported by a rack and pinion mechanism instead of the transport roller 19. In this case, a rack is provided at a lower portion of the transport tray 17, and a plurality of gears that can engage the rack are provided along each of the transport lanes R1 and R2. Further, regardless of whether it is conveyed by any of the roller conveyance, the rack and the gear mechanism, it is only necessary to provide a guide roller (not shown) that is rotationally driven in the Z-axis direction as the rotation axis along each of the conveyance lanes R1 and R2. .

A convex portion 17a as an engaging portion is provided on each of the right and left sides (the front side and the rear side in the transport direction) of each of the transport trays 17. Each of the convex portions 17a is used to lock the transport tray 17 by the traverse device 30, which will be described later, in the transport step of the transport tray 17. Further, a tray magnet 21 is disposed on the upper side of each of the transport trays 17. In each of the first processing chamber 13, the second processing chamber 14, and the transfer chamber 15 is provided with a fixing device 22 which has a magnetic air function with the tray magnet 21 of the transport tray 17. The tray magnet 21 of the conveyance tray 17 can restrict the conveyance tray 17 non-contactly above the conveyance lanes by the action of the fixed magnets 23 of the respective fixing devices 22 during the conveyance of the conveyance trays 17.

As shown in Figs. 5(A) to (E), the fixing device 22 has a fixed magnet 23 provided at a lower portion, and the fixed magnet 23 is lifted and lowered by the elevation driving portion. The fixed magnet 23 has a pitch at which the distance between the outward route R1 and the return stroke R2 is uniform, and two are provided in the Y-axis direction.

In the embodiment of the present invention, the conveying direction of the conveyance tray 17 in the outward stroke R1 is referred to as an X-axis direction. Further, the direction perpendicular to the horizontal plane is the Z-axis direction, and the direction perpendicular to the X-axis direction and the Z-axis direction, and the direction in which the outward route R1 and the return stroke R2 are arranged side by side is referred to as the Y-axis direction.

In the loading and unloading chamber 11, the substrate S before being processed from the outside is attached to the transport tray 17 and fixed, and the substrate S is moved to the LL chamber 12 in an upright state. Further, the loading and unloading chamber 11 removes the processed substrate S fixed to the transport tray 17 from the transport tray 17 and transports it to the outside of the vacuum processing apparatus 10. The loading and unloading chamber 11 performs the loading and unloading operation of the substrate S under atmospheric pressure.

The LL chamber 12 is configured to allow the indoor pressure to be atmospheric pressure, and the transport tray 17 is carried in the loading and unloading chamber 11 along the travel path R1. Thereafter, the inside of the transport tray 17 is depressurized, and the transport tray 17 is transported to the first processing chamber along the travel path R1. 13. Further, the LL chamber 12 decompresses the room, and the transport tray 17 is carried into the room from the first processing chamber 13 along the return path R2. Thereafter, the chamber is released to the atmosphere, and the transport tray 17 is transported to the loading and unloading along the return path R2. Room 11.

The first processing chamber 13 carries the transport tray 17 from the LL chamber 12 along the forward path R1, and the fixing device 22 holds the transport tray 17 by the action of the magnetic gas. The beam is on the way to R1. After the first processing chamber 13 applies a film forming process and a heat treatment to the substrate S fixed to the transport tray 17, the fixing device 22 is released, and the transport tray 17 is transported to the second processing chamber 14 along the forward path R1. .

Further, the first processing chamber 13 carries the transport tray 17 from the second processing chamber 14 along the return path R2, and the fixing device 22 restrains the transport tray 17 on the return path R2 by the action of magnetic air. After the first processing chamber 13 applies a film forming process and a heat treatment to the substrate S fixed to the transport tray 17, the fixing device 22 is released, and the transport tray 17 is transported to the LL chamber 12 along the return path R2. The first processing chamber 13 carries in and out the transport tray 17 under reduced pressure.

The second processing chamber 14 also applies a film forming process and a heat treatment to the substrate S. The second processing chamber 14 is the same as the first processing chamber 13 by the operation of the fixing device 22, the loading and unloading of the transport tray 17, and the like. The second processing chamber 14 carries the substrate S from the first processing chamber 13 along the outward path R1, and carries the substrate S to the transfer chamber 15. Further, the second processing chamber 14 carries the substrate S from the transfer chamber 15 along the return path R2, and carries the substrate S to the first processing chamber 15.

A pair of traverse devices 30 are mounted on both sides of the transfer chamber 15 in the X-axis direction (the front side and the rear side in the conveyance direction). The transport chamber 15 carries the transport tray 17 from the second processing chamber 14 along the travel path R1, and the transport device 17 temporarily binds the transport tray 17 to the travel R1 by the action of the magnetic gas. The transport chamber 15 transports the transport tray 17 from the forward path R1 to the return path R2 using the traverse device 30 while removing the magnetic air restraint of the transport tray on the process R1. The transfer chamber 15 is a transport tray 17 that moves to the return path R2, and is transported to the second processing chamber 14 along the return path R2.

The transfer chamber 15 carries the conveyance tray 17 from the travel R1 to the return R2 under reduced pressure. Further, the transport chamber 15 locks the transport tray 17 by the locking function of the traverse device 30 while transporting the transport tray 17 from the forward path R1 to the return path R2.

2 is a perspective view showing one of the pair of traverse devices 30. The pair of traverse devices 30 are fixed to both sides of the transport tray 17 by using a holding base which is described in detail later. The two traverse devices 30 have the same function and configuration (the shape is, for example, symmetrical in the X-axis direction).

As shown in FIG. 2, the traverse device 30 is provided with a drive unit 50 and a parallel connection mechanism 40 for transferring the tray as the holding base 32 including the transport tray 17 capable of holding the fixed substrate S. mechanism.

The parallel link mechanism 40 is driven by the drive of the drive unit 50. For example, the parallel coupling mechanism 40 has a fixed base 31 formed vertically and vertically, a crankshaft 36 and 37 rotatably coupled between the fixed base 31 and the holding base 32, and the crankshafts 36 and 37 coupled thereto. Straight-length holding base 32. The drive unit 50 has a motor 33 and a gearbox 35 that is coupled to the output shaft 34 of the motor 33 with a coupling (not shown). A barrier wall separating the transfer chamber of the atmosphere and the vacuum is disposed between the output shafts 34 of the motor 33. That is, the motor 33 is disposed on the atmosphere side.

The transmission case 35 is provided, for example, in the fixed base 31, decelerates the driving force of the motor 33 to a predetermined rotational speed, and is transmitted to the crankshaft 37 on the lower side to convert the rotational power of the motor 33 around the Y axis into rotational power around the X axis.

In order to stabilize the operation of the parallel coupling mechanism 40, an auxiliary link 44 that connects the two crankshafts 36 and 37 is provided on one side of the holding base 32. The auxiliary link 44 is rotatably coupled to the shaft portions 36a and 37a of the crankshafts 36 and 37 which are integrally formed. The auxiliary link 44 can also be rotatably coupled to The ends of the crankshafts 36 and 37 are close to the side of the fixed base 31.

The holding base 32 holds the conveyance tray 17 in an upright state. The holding base 32 is formed in a straight L shape, and the transport tray 17 is placed on the straight portion 32a and the front end of the protruding portion 32b that protrudes from the lower portion of the straight portion 32a in the horizontal direction (Y-axis direction). The support portion 32c of the portion. Next, the hook member 38, which is an engaging member to be described later, is engaged with the convex portion 17a of the transport tray 17. In this manner, the lower portion of the transport tray 17 is supported by the support portion 32c, and the hook member 38 is engaged with the convex portion 17a, and when the holding base 32 is rotationally moved, the posture of the transport tray 17 can be stably maintained.

When the traverse device 30 is in the standby state (the state shown in FIGS. 5(A) and (E)), the support portion 32c of the holding base 32 is disposed on each road surface than the outward route R1 and the return path R2 (the conveyance tray 17) The lower end) also has the lower side.

The hook member 38 is rotatably coupled to the upper end portion of the holding base 32 around the rotating shaft 39. The hook member 38 has a notch formed in the engaging end portion 38a provided at the upper portion thereof, and the notch is used to engage the convex portion 17a. The hook member 38 is operated by the power of the parallel coupling mechanism 40 as will be described later.

Fig. 3 is a view showing the vicinity of the crankshaft 36 in the upper portion, showing the traverse device 30, as viewed from the Y-axis direction. The power transmission mechanism 45 that conducts the power of the parallel coupling mechanism 40 to the hook member 38 is provided on the fixed base 31 side of the holding base 32. The illustration of the power transmission mechanism 45 is omitted in FIG. 4 is a front elevational view of the power transmission mechanism 45.

The power transmission mechanism 45 is mainly constituted by a cam mechanism. The cam mechanism has a cam 41 fixed to the crankshaft 36 and a convex follower 42 that is actuated by the cam 41. One end of the connecting rod 43 is coupled to the cam follower 42 . The other end of the connecting rod 43 is coupled to a connecting shaft 48 that is coupled to the hook member 38. The connecting shaft 48 is coupled to an end portion of the hooking member 38 opposite to the engaging end portion 38a, and is inserted into the holding base 32 and a long hole (not shown). The connecting shaft 48 is coupled to the connecting rod 43 on the inner side of the holding base 32 (on the side where the power transmitting mechanism 45 is disposed).

As shown in FIG. 4, the spring 46 is coupled between the lower portion of the hook member 38 and the spring holder 47 disposed on the holding base 32. These springs 46 and spring brackets 47 are omitted in FIG. This spring 46 is provided such that when the hook member 38 performs the action of engaging the convex portion 17a of the transport tray 17 (in the state shown in FIGS. 5(B) to (D)) or in normal times, the tension ( For example, the force of the spring 46 contracting direction is operational.

When the cam follower 42 is operated, for example, on the concave portion 41a of the cam 41 by the tension of the spring 46, the connecting rod 43 is lowered, and the hook member 38 is rotated in the direction of the arrow A to release the hook member 38 and The engagement of the convex portion 17a of the conveyance tray 17 is performed. That is, the timing at which the cam follower 42 is operated on the concave portion 41a of the cam 41 is at the timing of the standby state with the traverse device 30 (that is, when the holding base 32 is in the standby position (Fig. 5(A) and The operation of the power transmission mechanism 45 (the timing of the cam 41) is designed in such a manner that the timing of the state (E) is the same.

The operation of the traverse device 30 configured as above will be described. Fig. 5 is a schematic view for explaining the operation thereof, and is a view as seen from the X-axis direction. FIG. 6 is a view for explaining a rotation locus of the support portion 32c of the holding base 32. Further, the illustration of the auxiliary link 44 is omitted in FIGS. 5 and 6.

In FIG. 5(A), as described above, the traverse device 30 is in the standby state, and the holding base 32 is in the standby position. In this state, the hook member 38 as described above is not on the conveyance paths R1 and R2 but is returned. Solid in standby position The rotational angular position of the support portion 32c holding the base 32 is 0° as shown in FIG. At this time, the fixed magnet 23 of the fixing device 22 has been lowered, and the upper portion of the transport tray 17 is fixed in a non-contact manner, and its posture is stabilized.

As shown in FIG. 5(B), the holding base 32 is rotated clockwise in FIGS. 5 and 6 by the action of the parallel coupling mechanism 40, and the support portion 32c is carried as soon as it reaches the 90° position shown in FIG. The tray 17 is in contact with the support portion 32c and placed thereon. At this time, the hook member 38 is rotated by the action of the power transmission mechanism 45 (see FIGS. 3 and 4), and the engagement end portion 38a of the hook member 38 is disposed directly below the convex portion 17a of the conveyance tray 17. position. Thereafter, the holding base 32 is rotated by the clock, and the notch of the engaging end portion 38a of the hook member 38 is engaged with the convex portion 17a and locked. In such a locked state, the holding tray 32 is fixed to the carrying tray. 17 rotates on one side. After being locked, the fixed magnet 23 of the fixing device 22 is lifted and released by non-contact fixing.

As shown in Fig. 5(C), the holding base 32 is rotated clockwise, and the supporting portion 32c of the holding base 32 passes through a 180° rotation position (refer to Fig. 6). As shown in FIG. 5(D), the non-contact fixing is started by the fixing device 22 until the support portion 32c reaches the rotational position of 270°. And once the support portion 32c reaches the rotational position of 270°, the transport tray 17 is placed on the return path R2. After the support portion 32c passes the 270° rotation position, the hook member 38 starts to rotate due to the action of the power transmission mechanism 45, and the locked state of the hook member 38 is released.

By doing so, the traverse device 30 maintains the posture of the transport tray 17 fixed to the holding base 32, and also rotates the holding base 32 by the action of the parallel coupling mechanism 40, so that the transport tray 17 is returned to the return path R1. R2 moves. That is, the transport tray 17 is formed between the outward route R1 and the return route R2. The path of the move.

As shown in FIG. 5(E), after the state of FIG. 5(D), the holding base 32 is held by the counterclockwise rotation, the holding base 32 is returned to the standby position, and the hook member 38 is also returned.

As described above, in the present embodiment, the holding base 32 of the fixed transport tray 17 is rotated by the parallel connecting mechanism 40, and the transport tray 17 is moved between the outward path R1 and the return path R2. Therefore, the two-axis moving operation of the elevating mechanism and the sliding mechanism in the past is not required, and the movement of the transport tray 17 can be realized by driving one driving unit 50 of the parallel connecting mechanism 40. That is, the structure of the traverse device 30 can be simplified, and the number of components can be reduced. This can reduce costs and reduce the frequency of repairs. Moreover, the movement time by the rotation of the parallel connection mechanism 40 can shorten the movement time compared with the past traverse device.

In the present embodiment, the power transmission mechanism 45 for operating the hook member 38 is used. That is, since the other driving source for driving the hook member 38 is not required, the structure of the traverse device 30 can be simplified.

Here, in order to stabilize the posture of the conveyance tray 17 when the holding base 32 rotates, it is also considered that the operation of the fixing device 22 is tracked by the rotation operation of the conveyance tray 17 without using the hook member 38. However, if the structure of the fixing device 22 is configured to be rotatable, the dust generated from the fixing device 22 may be increased. If the generated dust falls due to gravity, the processing tape of the lower substrate S may be applied. Bad influence. Therefore, the structure located on the upper portion of the conveyance tray 17 is preferably a very simple object, and the hook member 38 is equipped to stabilize the posture of the conveyance tray 17.

In the present embodiment, the hook member 38 is connected to a position closer to the upper end portion of the holding base 32 so that the engaging end portion 38a of the hook member 38 can be positioned closer to the upper end portion than the holding base 32. Because of this, for example Compared with the conventional traverse device, the size (or the height) of the holding base 32 can be controlled to be reduced, and the traverse device 30 can be reduced in size and weight.

In the present embodiment, as shown in FIG. 6, the rotation center axis O of the support portion 32c of the base 32 is placed on the center line C at the same distance from the outward path R1 and the return path R2 in the Y-axis direction so as to be parallel. The link mechanism 40 rotates the holding base 32. For example, by arranging from the X-axis direction, the arrangement of the traverse device 30 can be made closest to the transport lanes R1 and R2. As a result, the entire structure including the respective conveyance lanes R1, R2 and the traverse device 30 can be reduced in size, and a movement path of the rotation of the conveyance tray 17 that does not interfere with the conveyance of the conveyance tray 17 can be formed. Further, the rotation center axis O of the support portion 32c of the holding base 32 is parallel to the outward path R1 and the return path R2. In this case, when the holding base 32 rotates, the three-dimensional volume formed by the trajectory drawn by the substrate S fixed by the holding base 32 is minimized, and the entire structure including the respective conveying lanes R1, R2 and the traverse device 30 is small. The effect is highest.

In the present embodiment, the motor 33 is disposed outside the conveyance chamber. In the prior art, the sliding motor of the sliding mechanism is disposed outside the vacuum processing chamber, and in order to maintain the vacuum in the vacuum processing chamber, it is necessary to provide a bellows tube on the output shaft of the sliding motor. Further, in the case where the elevating motor of the elevating mechanism of the prior art is disposed outside the vacuum processing chamber, a mechanism for sealing the periphery of the rotating shaft 39 of the motor 33, such as a magnetic shaft seal or the like, is necessary. On the other hand, in the present embodiment, since the linear drive mechanism such as the slide mechanism is not required, the bellows tube is not required even if the motor 33 is installed outside the conveyance chamber, and it is sufficient to have a shaft seal mechanism around the rotary shaft of the lift motor.

[Other Embodiments]

The embodiment of the present invention is not limited to the embodiment described above, and various other embodiments can be realized.

The arrangement, configuration, and the like of the drive unit 50, the transmission 35, the crankshaft 36, the power transmission mechanism 45, the cam mechanism, and the hook member 38 can be appropriately changed. For example, the following changes can be made.

Alternatively, in the two crankshafts 36 and 37, the upper crankshaft 36 serves as a drive shaft, and the lower crankshaft 37 serves as a drive shaft.

Alternatively, two drive units 50 may be provided. These drive units 50 drive the crankshafts 36 and 37, respectively, in synchronization. In this case, the auxiliary link 44 described above is not required.

The hook member 38 may be disposed such that the height position of the rotating shaft 39 of the hook member 38 is positioned higher than the engaging end portion 38a of the hook member 38.

In the above embodiment, the parallel transfer mechanism is exemplified as the tray transfer mechanism, but other mechanisms may be used. For example, a guide member that guides the rotational movement of the holding base 32 may be provided instead of the crankshaft 36 shown in FIG. In this case, a rotating body such as a roller is coupled to the holding base 32, and the roller is rotatably coupled to the guiding member such as a rail member (a curved object along a moving path of the holding base). In this case as well, as described above, the arrangement and configuration of the drive unit 50, the gearbox 35, and the like can be appropriately changed.

An actuating support member of the cam follower 42 that can support the cam mechanism is provided, and the support member can also be elastically disposed on the retaining base 32. For example, in this case, the cam follower 42 is rotatably coupled to a part of the support member, and the rotating shaft 39 coupled to the holding base 32 is coupled to other portions of the support member. The support member is such that its rotating shaft can be rotated (rotated) at the center, and the connecting rod 43 and the rod member are coupled to the supporting member. With such a configuration, the support member can operate the cam follower 42 along the shape of the cam 41 by its elastic force, and the hook member 38 can be operated.

In the above embodiment, the power transmission mechanism 45 is not limited to the operation of the hook member 38, and the hook member 38 is driven by the driving unit as shown in Figs. 5(A) to (E), and may be separately provided. Department 50.

The shape of the fixed base 31, the holding base 32, the hook member 38, and the like can be appropriately changed.

In the above embodiment, the hook member 38 is provided. However, if the holding base 32 is similar to the structure in which the side surface of the conveyance tray 17 can be fixed, the hook member 38 may not be provided.

The outbound R1 and the backhaul R2 can also be configured to have different height positions. In this case, the center of rotation of the support portion 32c of the holding base 32 may not be on the above-mentioned center line C of FIG.

S‧‧‧Substrate

R1‧‧‧ going (transportation)

R2‧‧‧Return (transportation)

C‧‧‧ center line

O‧‧‧ Rotation Center

10‧‧‧Vacuum treatment unit

11‧‧‧ loading and unloading room

12‧‧‧LL room

13‧‧‧First Processing Room

14‧‧‧Second treatment room

15‧‧‧Transportation room

16‧‧‧ gate valve

17‧‧‧Handling tray

17a‧‧‧ convex

19‧‧‧Transport roller

21‧‧‧Tray magnet

22‧‧‧Fixed devices

23‧‧‧Fixed magnet

30‧‧‧ traverse device

31‧‧‧Fixed base

32‧‧‧holding base

32a‧‧‧ Straight Department

32b‧‧‧Protruding

32c‧‧‧Support

33‧‧‧Motor

34‧‧‧ Output shaft

35‧‧‧Transmission

36, 37‧‧‧ crankshaft

36a, 37a‧‧‧ shaft section of the crankshaft

38‧‧‧hook components

38a‧‧‧Cart end

39‧‧‧Rotary axis

40‧‧‧ parallel link mechanism

41‧‧‧ cam

41a‧‧‧ recess

42‧‧‧Cam followers

43‧‧‧ Connecting rod

44‧‧‧Auxiliary link

45‧‧‧Power transmission mechanism

46‧‧‧ Spring

47‧‧‧Spring Bracket

48‧‧‧Connected shaft

50‧‧‧ Drive Department

Fig. 1 is a schematic perspective view showing a vacuum processing apparatus as a substrate processing apparatus including a traverse device.

Figure 2 is a perspective view showing a set of traverse devices of a pair of traversing devices.

Fig. 3 is a view showing, in an enlarged manner, a traverse device in the vicinity of the upper crankshaft, which is viewed from the Y-axis direction.

Figure 4 is a front elevational view of the power transmission mechanism.

5(A) to 5(E) are schematic views for explaining the operation of the traverse device, which are viewed from the X-axis direction.

Fig. 6 is a view showing a rotation locus of a support portion for holding a base.

30‧‧‧ traverse device

31‧‧‧Fixed base

32‧‧‧holding base

32a‧‧‧ Straight Department

32b‧‧‧Protruding

32c‧‧‧Support

33‧‧‧Motor

34‧‧‧ Output shaft

35‧‧‧Transmission

36, 37‧‧‧ crankshaft

36a, 37a‧‧‧ shaft section of the crankshaft

38‧‧‧hook components

38a‧‧‧Cart end

39‧‧‧Rotary axis

40‧‧‧ parallel link mechanism

44‧‧‧Auxiliary link

48‧‧‧Connected shaft

50‧‧‧ Drive Department

Claims (7)

A traverse device comprising: a tray transfer mechanism having a holding base for fixing a tray of a fixed substrate in an upright state, and being provided in a state of maintaining a posture of the tray fixed to the holding base; The driving base is rotated between the first transport path and the second transport path for transporting the tray, and the tray transfer mechanism is driven to form a movement path of the tray fixed to the holding base; The transfer mechanism further includes: a fixed base; and a crankshaft driven by the driving portion and coupled between the fixed base and the holding base. The traverse device of claim 1, further comprising an engaging member that is disposed on the holding base and engaged with the engaging portion of the tray, and supports the tray. The traverse device of claim 2, further comprising a power transmission mechanism that transmits power generated by the tray transfer mechanism to the engaging member. The traverse device of claim 2, wherein the engaging member has an engaging end portion that is engaged with a portion of the engaging portion of the tray, and the engaging member is coupled to the holding base. The position near the upper end portion is such that the engaging end portion is placed above the aforementioned upper end portion of the holding base. The traversing device of claim 2 or 3, wherein the holding base has: a straight portion that rotatably couples the engaging member; and a protruding portion that includes a supporting portion that mounts the tray and supports the tray from below, and is provided to protrude from a lower portion of the straight portion in a horizontal direction, the holding base Driving along the direction in which the first conveyance path and the second conveyance path are arranged in parallel, the rotation center of the support portion of the holding base is disposed on a center line that is equidistant from the first conveyance path and the second conveyance path . A substrate processing apparatus including: a processing chamber for processing a substrate; and a first transport path and a second transport path for transporting a tray of the fixed substrate in an upright state and disposed in the processing chamber; and a traverse device Further, the tray transfer mechanism has a holding base that fixes the tray in an upright state, and is provided to rotate the holding base while maintaining a posture fixed to the tray of the holding base, and The driving unit is configured to drive the tray transfer mechanism between the first conveyance path and the second conveyance path to form a movement path of the tray fixed to the holding base, and the tray transfer mechanism further includes a fixed base; The crankshaft is driven by the driving portion and coupled between the fixed base and the holding base. The substrate processing apparatus of claim 6, wherein the processing chamber is capable of maintaining a vacuum state in the processing chamber; and the driving portion of the traversing device is disposed at the foregoing Outside the motor.