201206806 六、發明說明： 【發明所屬之技術領域】 本發明係一種可使固定成直立之狀態下的基板來移動 之裝置，尤其係關於可將位於一搬運道之基板移動變更至 別的搬運道之橫動裝置，及搭載橫動裝置之基板處理裝置。 【先前技術】 才合載在專利文獻1所述之真空處理裝置的搬運裝置， 係搬運把被處理基板以固定成直立狀之搬運托盤。設置於 此搬運裝置之橫動裝置係沿著托盤的搬運方向而固定托盤 的兩側，於平行地鋪設於各處理室的底部的2個搬運道間， 讓固定有被處理基板之搬運托盤移動。 此検動裝置係具有載置搬運托盤之托盤台、用於升降 托盤台之升降機構及用於在水平方向移動該升降機構之滑 動機構。於彼等升降機構及滑動機構分別設置有驅動源（馬 達Ml及]VI2)(例如參照專利文獻1之說明書段落[〇〇32]、 [0033]、圖 2 及 3)。 [先行技術文獻] [專利文獻] 專利文獻1 :國際公開第2〇〇9/1〇7728號專利說明書 【發明内容】 [發明所欲解決之課題] 但是’此橫動裝置係藉由升降機構及滑動機構之2軸 機構來移動搬運托盤，又，因驅動源係分別設置 ，使彼等 之機構變複雜。機構變複雜亦增加了構件數量，亦使成本 變高。 又，此検動裝置因係以藉由升降機構上昇、滑動機構 4/22 201206806 水平移動及升降機構下降 亦有所謂動作時間長之個動作來移動搬運托盤，而 本發明係鑑於以上問韻 由簡化結構可減少構件數量明者’其目的係提供藉 動裝置及搭載它之真空處理裝置％短基板之移動時間横 用以解決課題之手段 為了達成上述目的，★父 備托盤移賊構與部本^之-形態的橫動裝置係具 立狀==機;::!將固定基板之托盤固定在直 前述固定底座之前述托固定於 及第2搬運道之間，驅t運;^托盤之第1搬運道 定於:T定底座之^：=來形成固 底座，使二機構來旋轉固定托盤之固定 要如過去之升降機構及=道間㈣。因此’不需 即，可簡化橫動裝個驅動部來移動托盤移動。 由以大m 、、、。構，並可減少構件數量。又 - 广托盤移載機構來移错 置相比，可縮短其移動時間。&㈣^去之松動震 前述橫動裝置係％罢狄& 有卡合於前触盤二述固定底座，亦可進-步具 件。藉此，站鱗讀之卡㈣ 珂述橫動裝置亦可進一： '"一文 動力傳導至前述卡備將前述托盤移载機構之 °構件的動力傳導機構。本發明因不需 5/22 201206806 $用2驅動卡合構件之驅動源’而可簡 。：::力傳導機構，例如亦可使用凸輪‘構竣置的結 合構件具有卡合於前述托盤 卡ί端部，亦可以將前述卡合構件連接之於卡前合十部的部分之 上端部的位置，以便使前述卡底座 小U降低高度)，而可實現 化、輕量化。 F、動放置的小型 别述固定底座亦可具有直長部盘 件=旋轉地連結至直長部。突出部係=載=合構 ，述托盤下方支撐的支撐部，以自述托盤 ^於水平方向之方式設置。於此情形，前过固長拉部的下部 著刖述第】搬運道刀‘. j处固持底座沿 動’使前述固持底庙：二"運道並排之方向而驅 離前述第1搬運道：上:部的旋轉令心配置於 心線上。€逼及别述弟2搬運道有等同距離之中 的第1及第2搬運道之搬、即在本發明令，自托盤 置最接近第】及第2搬運道&並=祭在可=動裝置之配 搬運道及横動裝置之整體η 1'第2 礙托盤的運送之托盤旋轉的移動路τ的叫’可形成不妨 驅動具有固定底座、以前述驅動部 二以== 6/22 201206806 前述處理室係用於處理基板。 前述第1及第2搬運道係設置於前述處理室内，將固 定基板之托盤以直立狀態運送。 本發明係藉由以托盤移載機構將固定托盤之固定底座 量 時間 旋轉’使該托盤於設置在處理室内之第1及第2搬運道間 矛夕動。因此’就不需如過去之升降機構及滑動機構的2軸 移動動作，藉由驅動托盤移载機構之丨個驅動部可實現抚 盤的移動。即，可簡化橫動裝置之結構，而可減少構件數 又’藉由托盤移載機構之旋轉的移動，可縮短其移動 别述處理室可在前述處理室内維持真空狀態，前述橫 動凌置的前述驅動部亦可具有配置於前述處理室外之馬 ，。習知技術上，因將滑動機構的馬達配置於該真空處理 至外，而需要用來維持處理室内的真空之蛇腹管(beU〇ws)。 此外，如將習知般之升降機構的馬達配置於處理室外，則 必頊具有將該馬達的旋轉軸周圍密封之機構。反之，本發 P因不需要如滑動機構之線型驅動機構，即不需要將驅動 P的馬達设置於處理室外之蛇腹管，本發明只要馬達的旋 轉轴周圍的軸封機構就足夠。 [發明效果] 以上，右依據本發明，則可藉由簡化結構來減少構件 文里，進而可控制成本並可縮短基板的移動時間。 【實施方式】 [實施發明之形態] 以下將藉由圖式來說明本發明之實施形態。 圖1係顯示具職域置3G之基板處理裝置的真空處 7/22 201206806 理裝置10之傾斜示意圖。真空處理裝置10係具備複數個 處理室11〜15。圖1中，真空處理裝置1〇係夾著閘閥16 刀別連結裝卸至11、承載室(丨〇ad_i〇ck chamber)(以下僅稱 為LL至12。）、第一處理室丨3、第二處理室14及搬運室 15。 真空處理裝置10設置有自裝卸室u向搬運室15延伸 之第1搬運道（以下僅稱為去程R1)，與自搬運室15向裝 卸室11延伸之第2搬運道（以下僅稱為回程R2)。本實施 形態中去程R1與回程R2係相互平行。 於去程R1及回程R2之中，分別藉由輥搬連來搬運複 數個搬運托盤17。例如一邊藉由以γ軸方向為旋轉軸來旋 轉驅動之搬運輥19且支撐著搬運托盤17的下面，一邊沿 著去程R1及回程R2予以搬運。各搬運托盤〗7係形成包圍 被處理基板（以下僅稱為基板）S的外緣之四角框體狀。又’ 亦可藉由齒執及齒輪(rack and pinion)機構取代搬運輥19 ’ 來搬運搬運托盤17。於此情形下，係在搬運托盤17的下部 設置有齒執，只要沿著各搬運道R1及R2設置複數個可咬 合此齒執之齒輪即可。又，無論藉由輥搬運、齒執及齒輪 機構任一者來搬運，只要沿著各搬運道R1及R2來設置以 Z軸方向為旋轉軸予以旋轉驅動之導輕（未圖示）即可。 於各搬運托盤17的左右兩側（搬運方向之前側及後側） 分別設置有作為卡合部之凸部17a。各凸部17a，於搬運托 盤17的搬運步驟中’係用來藉由如後述橫動裝置3〇，來鎖 定該搬運托盤17。又，於各搬運托盤π之上側係配置有托 盤磁鐵21。於各第一處理室π、第二處理室14及搬運室 15配置有固定裝置22，其與搬運托盤π之托盤磁鐵21有 8/22 201206806 磁氣作用。搬運托盤17之托盤磁鐵21在該搬運托盤ί?的 搬運過程尹’可藉由與各固定裝置22的固定磁鐵烈所產 生之作用，在各搬運_上方以非接龜拘束嫌運托盤 17 〇 固定裝置22如圖5 (Α)至（Ε)所示，具有設置於下 部的固定磁鐵23，藉由升降驅動部使此固定磁鐵烈得以升 降。固定磁鐵23係以去程R1及回程R2之間距為一致的間 距，在Y軸方向設置有2個。 在本案實施形態中，將去程幻中搬運托盤Η的輸送 向稱為X軸方向。又，對水平面垂直的方向為以由方向， 而=直於X軸方向及Z轴方向之方向、且去程則及回 私R2並排之方向稱為γ軸方向。 杯般Ττ卸至U係將自外部放入之處理前的基板§裝上搬運 又二主力二Ή“錄板S以直立之狀態搬到LL室12。201206806 VI. Description of the Invention: [Technical Field] The present invention relates to a device that can be moved in a state of being fixed in an upright state, and in particular to change the movement of a substrate located in a conveyance path to another conveyance path A traverse device and a substrate processing device equipped with a traverse device. [Prior Art] The transport device of the vacuum processing apparatus described in Patent Document 1 is a transport tray that transports the substrate to be processed in an upright shape. The traverse device provided in the transport device fixes both sides of the tray along the transport direction of the tray, and is placed in parallel between the two transport lanes at the bottom of each processing chamber to move the transport tray to which the substrate to be processed is fixed . This swaying device has a pallet table on which a conveyance tray is placed, an elevating mechanism for elevating the pallet table, and a sliding mechanism for moving the elevating mechanism in the horizontal direction. A drive source (Malay Ml and ] VI2) is provided in each of the lift mechanism and the slide mechanism (for example, refer to the specification paragraph [〇〇32], [0033], Figs. 2 and 3 of Patent Document 1). [Prior Art Document] [Patent Document] Patent Document 1: International Publication No. 2/9/7728 Patent Specification [Disclosure] [The problem to be solved by the invention] However, the traverse device is driven by a lifting mechanism The two-axis mechanism of the sliding mechanism moves the transport tray, and the drive sources are separately arranged to complicate their mechanisms. The complexity of the organization also increases the number of components and increases the cost. Moreover, the swaying device moves the transport tray by a movement in which the elevating mechanism is raised, the sliding mechanism 4/22 201206806 is horizontally moved, and the elevating mechanism is lowered, and the so-called operating time is long, and the present invention is based on the above question. Simplified structure can reduce the number of components. The purpose is to provide a borrowing device and a vacuum processing device equipped with it. The moving time of the short substrate is used to solve the problem. In order to achieve the above purpose, the parent-child tray is moved to the thief. The traverse device of the present type has a vertical shape == machine;::! The tray of the fixed substrate is fixed to the fixed base of the fixed base and is fixed between the second transfer path and the second transfer path; The first transport path is set to: T: base = ^ = to form a solid base, so that the two mechanisms to rotate the fixed tray is fixed as in the past lifting mechanism and = road (four). Therefore, it is not necessary to simplify the traverse mounting of the drive unit to move the tray. From the big m, ,,. Structure and reduce the number of components. Also - the wide tray transfer mechanism can reduce the movement time compared to shifting the misalignment. & (4) ^ to loose vibrations The above-mentioned traversing device is a combination of the front and the second touch fixed base, can also enter the step. Therefore, the station scale reading card (4) can be further described in the following: '" The power is transmitted to the aforementioned power transmission mechanism of the member of the tray transfer mechanism. The present invention is simple because it does not require 5/22 201206806 $ to drive the driving source of the engaging member. ::: force transmission mechanism, for example, a coupling member that can also use a cam's structure has a latching engagement portion, and the engaging member can be connected to an upper end portion of a portion of the front portion of the card. The position is such that the aforementioned card base is reduced in height by a small U, and can be realized and lightened. F. Small moving parts The fixed base may also have a straight length plate = rotationally coupled to the straight portion. The protruding part system = load = structure, and the supporting portion supported under the tray is set in such a manner that the self-describing tray is horizontal. In this case, the lower part of the front over-length pull-up portion is described in the first section] The transporting path knife '. j holds the base along the movement' so that the aforementioned holding bottom temple: two " the way of the side-by-side direction drives away the first handling Road: Upper: The rotation of the part causes the heart to be placed on the heart. In the case of the present invention, the first and second transport lanes are separated from each other by the tray, and the second transport lane & = The whole of the moving device and the traversing device η 1' The second moving path τ of the tray rotation for transporting the tray can be formed by driving the fixed base, and the driving unit 2 is == 6/ 22 201206806 The aforementioned processing chamber is used to process the substrate. The first and second transport lanes are installed in the processing chamber, and the trays of the fixed substrate are transported in an upright state. According to the present invention, the fixed base of the fixed tray is rotated by the tray transfer mechanism, and the tray is moved between the first and second conveyance paths provided in the processing chamber. Therefore, there is no need for the two-axis movement of the elevating mechanism and the sliding mechanism as in the past, and the movement of the dial can be realized by driving one of the driving portions of the tray transfer mechanism. That is, the structure of the traverse device can be simplified, and the number of components can be reduced, and the movement of the rotation of the tray transfer mechanism can be shortened, and the processing chamber can be shortened to maintain a vacuum state in the processing chamber. The drive unit may have a horse disposed outside the processing chamber. Conventionally, since the motor of the sliding mechanism is disposed outside the vacuum processing, a bellows tube for maintaining a vacuum in the processing chamber is required. Further, if the motor of the conventional lifting mechanism is disposed outside the processing chamber, it is necessary to have a mechanism for sealing the periphery of the rotating shaft of the motor. On the other hand, since the present invention does not require a linear drive mechanism such as a slide mechanism, that is, it is not necessary to provide a motor for driving P to the bellows tube outside the processing chamber, the present invention is sufficient as long as the shaft seal mechanism around the rotary shaft of the motor is sufficient. [Effect of the Invention] As described above, according to the present invention, the structure can be reduced by simplifying the structure, and the cost can be controlled and the moving time of the substrate can be shortened. [Embodiment] [Embodiment of the Invention] Hereinafter, embodiments of the present invention will be described with reference to the drawings. Fig. 1 is a perspective view showing the vacuum of a substrate processing apparatus having a 3G field. 7/22 201206806. The vacuum processing apparatus 10 is provided with a plurality of processing chambers 11 to 15. In Fig. 1, the vacuum processing apparatus 1 is detachably attached to and detached from the gate valve 16 by a gate valve 16, and is placed in a load-bearing chamber (hereinafter referred to as LL to 12), and the first processing chamber 丨3, The second processing chamber 14 and the transfer chamber 15. The vacuum processing apparatus 10 is provided with a first conveyance path extending from the loading and unloading chamber u to the conveyance chamber 15 (hereinafter simply referred to as a departure R1), and a second conveyance path extending from the conveyance chamber 15 to the loading and unloading chamber 11 (hereinafter simply referred to as Return trip R2). In the present embodiment, the outward path R1 and the return path R2 are parallel to each other. Among the outgoing route R1 and the returning R2, a plurality of transport pallets 17 are transported by roller transport. For example, while the driving roller 19 is driven to rotate by the γ-axis direction as a rotating shaft and the lower surface of the transport tray 17 is supported, it is transported along the outward path R1 and the return path R2. Each of the transport trays 7 has a rectangular frame shape surrounding the outer edge of the substrate to be processed (hereinafter simply referred to as a substrate) S. Further, the transport tray 17 may be transported by a rack and pinion mechanism instead of the transport roller 19'. In this case, the lower portion of the transport tray 17 is provided with a tooth holder, and a plurality of gears that can engage the tooth holder are provided along each of the transport lanes R1 and R2. Further, regardless of whether it is conveyed by any of the roller conveyance, the tooth control, and the gear mechanism, it is only necessary to provide a guide light (not shown) that is rotationally driven in the Z-axis direction as the rotation axis along each of the conveyance paths R1 and R2. . The convex portions 17a as the engaging portions are provided on the left and right sides (the front side and the rear side in the conveyance direction) of the respective transport trays 17 respectively. Each of the convex portions 17a is used in the transporting step of the transport tray 17 to lock the transport tray 17 by a traverse device 3, which will be described later. Further, a tray magnet 21 is disposed on the upper side of each of the transport trays π. A fixing device 22 is disposed in each of the first processing chamber π, the second processing chamber 14, and the transfer chamber 15, and has a magnetic action of 8/22 201206806 with the tray magnet 21 of the transport tray π. In the conveyance process of the conveyance trays 17, the tray magnets 21 of the conveyance trays 17 can be restrained by the non-sucking turtles on the conveyance trays by the action of the fixed magnets of the respective fixing devices 22. As shown in FIGS. 5(Α) to (Ε), the fixing device 22 has a fixed magnet 23 provided at a lower portion, and the fixed magnet is lifted and lowered by the elevation driving portion. The fixed magnet 23 has a distance between the outward path R1 and the return path R2, and is provided in the Y-axis direction. In the embodiment of the present invention, the conveyance direction of the conveyance tray 去 in the illusion is referred to as the X-axis direction. Further, the direction perpendicular to the horizontal plane is the direction of the direction, and the direction perpendicular to the X-axis direction and the Z-axis direction, and the direction in which the outward route and the return R2 are arranged side by side is referred to as the γ-axis direction. When the cup is removed, the U-series is placed on the substrate before the processing, and the substrate is loaded and transported. The second board is moved to the LL chamber 12 in an upright state.
自搬U111係將固定在搬運托盤17之經處理後的基板S 室11 f/117取下’搬到真空處理裝置10的外部。裝卸 至1，在大氣壓下進行上述基板s之裝卸工作。 托室内成為域壓力，自裝㈣u將搬運 =::==’_室内減壓，將該 12係將室内減壓，自王第—，二第;;處理室13。又，匕室 程R2讲入4 第處理至13將搬運托盤17沿著回 托般17、、4 後，經室_放至大氣，將該搬運 托盤y沿者回程幻搬到裝卸室η。 R1搬H至—13係自11室12將搬運托盤17沿著去程 束於去程R二定Ϊ置22藉由磁氣作用將該搬運托盤17拘 束於去㈣上。弟_處理室13在_定於搬運托盤η之 9/22 201206806 基板s施加成膜處理及加熱處理等處理後，解除固定裝置 22之拘束，將該搬運托盤17沿著去程R1搬至第二處理室 14。 又，第一處理室13係自第二處理室14將搬運托盤17 沿著回程R2搬入，以固定裝置22藉由磁氣作用將該搬運 托盤17拘束於回程R2上。第一處理室13在對固定於搬運 托盤17之基板S施加成臈處理及加熱處理等處理後，解除 固定裝置22之拘束，將該搬運托盤17沿著回程R2搬至 LL室〗2。第一處理室13係在減壓下進行上述搬運托盤17 之搬入及搬出。 第一處理室14亦對基板s施加成膜處理及加熱處理等 處理。第二處理室14中係利用固定裝置22之動作及搬運 托盤17的搬入及搬出手法等，其與第一處理室13相同。 第-處理室14係沿著去程自第—處理室13將基板請 入’並將基板s搬至搬運室15。χ，第二處理室14係沿著 回私R2自搬運室15將基搬入，並將基板§搬至第一 處理室15。 方；搬運至15之X軸方向的兩側（搬運方向之前側及後 側）搭載有一對橫動裝置3〇。搬運室15係自第二處理室 14將搬運托盤17沿著去程Ri搬人，㈣定裝置u藉由 磁氣么作用將馳運托盤17暫時拘束於去程R1上。搬運室 15，-邊解除去程R1上的搬運托盤的磁氣拘束，一邊使 用橫動裝置30將邊搬運托盤17自去程幻朝回程上搬 運搬運至15係將往回程R2移動之搬運托盤17，沿著回 程R2搬至第二處理室丨4。 搬運至15係在減壓下進行自去程幻往回程R2之搬運 10/22 201206806 托盤17的搬運。又，搬運室15在將搬運托舨口自 R!往回程R2搬運期間，以橫動裝置30的鎖^能將= 運托盤17鎖定。 圖2係顯示-對橫動裝置3G中的！個橫動裝置之 圖。-對橫動裝置30係使用詳述於後之固定底座，將搬運 托盤17的兩側分綱定。兩橫動裝置3G係具有相同 能及構造（形狀係例如在X轴方向對稱）。 、 如圖2所示，橫動裝置30係具備有驅動部5〇、及平疒 連結機構40，此平行連結機構40係用來作為包含可保^ 固定基板S之搬運托盤17的固定底座32之托盤移載機構。 平行連結機構40被驅動部50之驅動所驅動。例如， 平行連結機構40係具有形成直長形且垂直設立之固定底 座31、可旋轉地連結在此固定底座31及固定底座32之間 的曲軸36及37、連結於此等曲軸36及37之直長狀的^ 疋底座32。驅動部50具有馬達33、夾著未圖式之聯轴器 (coupling)連結於馬達33的輸出軸34的變速箱％。於馬^ 33的輸出軸34中間配置隔開大氣與真空之搬運室的阻隔 壁。即’馬達33配置於大氣側。 變速箱35例如設置於固定底座31，將馬達33的驅動 力減速至預定的旋轉速度，傳導至下部側的曲軸37，將馬 達33環繞Y軸的旋轉動力轉換為環繞X軸的旋轉動力。 為了使平行連結機構40的動作穩定，於固定底座32 的一侧設置有連結2個西軸36及37之輔助鍊環44。輔助 鍊％< 44係可旋轉的連結於分別一體成形的設置於曲軸36 及37之轴部及37a。輔助鍊環44亦可可旋轉地連結在 曲抽36及37之靠近固定底座31 側的端部。 11/22 201206806 二定底座32係將搬運托盤17固定成直立狀態。固定 底座32係域直長的L字狀，_ :與7成自該直長部仏的下部突出於水平方向ί 車向之大出部32b的前端部的支撑部32c。接著，作為 合構件的掛勾構件38係卡合於上述搬運托盤” 之=17a。如此，搬運托盤17的下方被支撐部32c支標， 二挂卜勾構件38糟由卡合在凸部m，於固定底座 動時，可穩定搬運托盤17的姿勢。 多 狀能广為待機狀態(圖5 (A)及㈤中所示之 時’固疋底座32的支樓部32e被配 ^回㈣的各路面（搬運托盤17的下端部）還要下= 定底二以旋轉轴39為中心，可旋轉地連結於固 :座壯&部。掛勾構件38具有於其設置於其上 二卡合端部38a之缺口 ’此缺口係用來卡 /。' ::係如接下來的說明，利用平行連、一 圖，：自3 tit部Ϊ曲轴36附近’顯示橫動農置30之 圖為自Υ軸方向觀察之圖。將上述平行 ^卜勾構件38的動力傳導機構45，係_ 底座32的固定底座31側。圖2中省略動力傳 圖示14為動力傳導機構45的正面圖。 4 動力傳導機構45主要係以凸輪機 具有固定於曲軸36之凸輪41、 =从機構仏 ::動件連結桿-的-端部連 結桿Μ㈣—端部連結於連結在掛勾構㈣之連結轴 12/22 201206806 結轴48係連結於掛勾構件38的卡合端部地之相 二側的端部，插入設置於固定底座32、未圖示之長孔。相 係於固定底座32的内側(配置有動力】 45之側）與連結桿43連結。 ^構 設置示，彈簧46係連結於掛勾構件38的下部邀 。又置於固定底座32之彈簧支架47 、 箐你及彈箬支牟47纽圖中將此寺彈 件38、#/、支 _略。此彈黃46係設置為，在掛勾構 ^ =于欲卡合於搬運把盤17的凸部17a之動作時（圖$ ^ (D)中所示狀態時）或在平常時，張力（例如嗤 黃46收縮方向之力）得以運作。 ，泮 糟由如此之彈簧46白勺張力，凸輪從動件42在例如凸 =的凹部❿上運轉時，連結桿43會下降，掛勾構件 稭由往箭頭A的方向旋轉，解除掛勾構件％與搬運托 ，之凸部17a的卡合。也就是以將凸輪從動件幻在凸 輪/1的凹部41a上運轉的正時，為與橫動裝置30在待機 狀態之正時（也就是固定底座32在待機位置時（圖5 (A) 及（E)所示狀態）的正時）一致的方式，來設計動力傳導 機構45的動作（凸輪41的正時）。 說明如上構成之橫動裝置30的動作。圖5係用於說明 其動作之示意圖，為自X軸方向觀察之圖。圖6係用來說 明固定底座32之支撐部32c的旋轉執跡之圖。又，在圖5 及6中省略輔助鍊環44之圖示。 圖5 (A)中，如上述之橫動裝置3〇係在待機狀態， 固定底座32係在待機位置。於此狀態下，如上述之掛勾構 件38不在搬運道R1及R2上，而是歸位。於待機位置之固 定底座32的支撐部32c的旋轉角度位置如圖6所示為〇。。 13/22 201206806 此時，固定褒置22的固定磁鐵23已經下降， 的上部以非接觸固定，其姿勢穩定。 如圖5⑻所示，藉由平行連結機構4〇之動作，使 固疋底座32在圖5及6中順時鐘旋轉，其支撐部32c 一來 IS Γ，9。。位置Γ搬運托盤]7與支擇部如妾觸 亚被載置。此時，掛勾構件38藉由動力傳導機構45 (知 圖3及4)的作用來旋轉，且掛勾構件％的卡合端部撕 被配置於搬運托盤17之凸部17a的正下方之位置。其後， 接著固定底座32藉由開始順時鐘旋轉，掛勾構件％、之卡 =端部38項缺口卡合於凸部】7a並被鎖定，於如此之鎖 定狀態，固定底座32 —邊固定著搬運托盤17 一邊旋轉。 被鎖定後，固定裝置22的固定磁鐵23藉由上昇解除非接 觸之固定。 μ 如圖5 (C)所示，順時鐘旋轉固定底座32，固定底座 32之支撐部32c係通過180。的旋轉位置（參照圖且如 圖5 (D)所示’在支撐部32c到達270。之旋轉位置為止， 藉由固定裝置22開始非接觸之固定。且一旦支撐部32c到 達270°之旋轉位置’搬運托盤17便被載置於回程R2。支 樓部32c在通過270。的旋轉位置後，因動力傳導機構45的 作用使掛勾構件38開始旋轉，掛勾構件38之鎖定狀態被 解除。 藉由如此動作’橫動裝置30在維持固定於固定底座32 之搬運托盤17的姿勢的同時，也藉由平行連結機構4〇的 作用來旋轉固定底座32，使搬運托盤17自去程R1往回程 R2移動°即’在去程R1及回程R2間，形成搬運托盤17 的移動路徑。 14/22 201206806 如圖5⑻所示，在圖5⑻之狀態後，藉由逆時鐘 旋轉固定底座32，使固定底座32回到待機位置，掛勾構件 3 8亦歸位。 如上所述，本貫施形態中，固定搬運托盤17之固定底 座32藉由以平行連結機構4Q扣旋轉，讓搬運把盤在 去程R1及回程R2間移動。從而就不需要如過去之升降機 構及滑動機構的2軸移軸作，以,_平行·連結機構之 1個驅動部50即可實現搬運托盤17之移動。即，可簡化橫 動裝置30的結構，而可減少構件數量。藉此可減低成本了 亦可減少維修頻率。又，經由以平行連結機構4〇之旋轉的 移動’與過去的橫動裝置相比，可驗其移動時間。 於本實施形態中使用為了使掛勾構件38動作之動力傳 導機構45。即，因不需要用於驅動掛勾構件％之其他驅動 源，而可簡化橫動裝置3〇之結構。 -欠熱此疋底座32㈣時為了穩定搬運托盤17的 亦考慮不使用掛勾構件38，由搬運托盤Π之旋轉動 : = 但是，若使固定_的構 w為可紅轉動作之結構，則自翻定1置2 變多的可能，一旦產生的粉應生之減有 之基板s的處理帶來不良影塑。=而釘，則會對下部 部之上h⑽μ 、β 口此，位於搬運托盤17上 使搬運托盤Π的姿勢穩定而被裝備。冓件38 k為了 的上鈿4之位置上，使得掛勾 可位在比固定底座32之更上 、卡5端部38a ’ 與過去的橫動裝置相比，可心；=置。藉此，因例如 几制，％小固定底座32的大小（或 15/22 201206806 者降低高度），而可實現橫動襄置3G的小 本實施形態中，如圖6所+ ^ 1化。 R1及回程R2相等距離之中 Y輪方向的去程 柳2c之旋轉中心軸上=置％ 固定底座32旋轉。例如，藉此|χ轴 臾。機構40讓 裝置30的配置最接近搬運道Rl及R2。其结^可使橫動 搬運道R1、R2及橫動裝置30之整體結構各 可形成不妨礙搬運域17之搬__托$同時， 移動路徑。此外，固定底座32的支樓部3二轉的 〇係和去㈣及回㈣平行。概㈣，在2中心轴 旋轉時，關定底座32所固定之基板s所七二底座32 成的立體容錢得⑸、，將包含各贿所構 置30之全體結構小型化的效果達到最高。尺2及杈動裝 本實施形態中馬達33係配置⑽; 上，係將魏機構㈣動馬達配置 技術 為了維持真空處理室内的真空，而必須要:外’且 輸出軸設置蛇腹管。❹卜，切如動馬達的 升降馬達配置於真空處理室外的情形^升=構的 轉轴39周圍的機構，例如魏軸封等為必要4^的旋 本實施形態中因不需要如滑動機構ϋ對於此’ 將馬達33設置於搬運室外也不需要蛇管，口要，升:便 達的旋轉關__機構就足夠。 ，、要有升降馬 [其它實施形態] 可實 本發明之實施形態不限於以 現其他各種實施形態。 Λ。兄明之貫施形態 機構45、 驅動部5〇、變速箱35 , 36、動力傳導 16/22 201206806 凸輪機構、掛勾構件38等配置及結構等可適當變更。例如 可有如下述變更。 w戈 亦可在2個曲軸36及37中，上部的曲轴 軸，下部的曲轴37作為傳為鶴 軸36或I”亦'可设置2個驅動部5〇 ’此等驅動部5〇係將曲 刀別同步，予以驅動。於此情形，就不需要 述之辅助鍊環44。 而要上 2以使掛勾構件38之旋轉軸％的高度位置定位 比^卜勾構件38的卡合端部％ 構件38。 更上方的方式’來配置掛勾 、㈣j實施形態中，作為托盤移載機構雖僅舉例出平行 Ϊ；：機構’㈣可使料錢構。例如，亦可設置引導固 ，之物動的引導構件卿所示之曲二 :月y於固疋底座32連結著如滾輪之旋轉體，今、 :=:=:='_定底座的： 上所述，可適㈣1¥構件即可。於此情形亦如 設置二Π 動部5〇、變速箱35等配置及構成。 件·，該支撐構件”干42之動作支樓構 情形，凸輪於固定底座32°例如在此 分，連結於固5牛二係可旋轉地連結在支撐構件的-部 :讓。切構件係使其旋轉軸可在的 如此之結構轉件細，支撐構件。藉由 讓凸輪從動件m错由其彈力而可沿著凸輪41的形狀 如轉’可使掛勾構件38動作。 Μ形態’動力傳導機構45不限於使掛勾構件 17/22 201206806 掛=7㈣5 (A)至（E)所示 固… 動邛，亦可另外設置驅動部5〇。 亦卜岐底座32、掛勾構件38等的形狀等 若固實施形態上，設置有掛勾構件38之構成。但是， 造，=座32為類似也可將搬運托盤17側面固定之構 則亦可不設置掛勾構件38。 同。及回程R2亦可分別予以配置成高度位置不 =情形’固定底座32之支撐部32c的旋轉中心亦可 个在圖6之上述中心線c上。 【圖式簡單說明】 處理^ _示作為具織動裝置之基域理裝置的真空 忒置之示意傾斜圖。 圖圖2係顯示一對橫動裝置中之】組橫動裝置之傾斜 係自之曲軸附近之橫動裝置•其 圖4為動力傳導機構之正面圖。 圖=至⑹為麟酬橫動裝置之動作的示意圖，其 自X軸方向觀察之圖。 u::=r座之支標〜跡圖。 S 基板 R1 去程（搬運道） R2 回程（搬運道） C 中心線 18/22 201206806 0 旋轉中心 10 真空處理裝置 11 裝卸室 12 LL室 13 第一處理室 14 第二處理室 15 搬運室 16 閘閥 17 搬運托盤 17a 凸部 19 搬運輥 21 托盤磁鐵 22 固定裝置 23 固定磁鐵 30 橫動裝置 31 固定底座 32 固定底座 32a 直長部 32b 突出部 32c 支撐部 33 馬達 34 輸出軸 35 變速箱 36、37 曲軸 36a、37a 曲軸之軸部 38 掛勾構件 19/22 201206806 38a 卡合端部 39 旋轉軸 40 平行連結機構 41 凸輪 41a 凹部 42 凸輪從動件 43 連結桿 44 輔助鍊環 45 動力傳導機構 46 彈簧 47 彈簧支架 48 連結軸 50 驅動部 20/22The self-moving U111 removes the processed substrate S chamber 11 f/117 fixed to the transport tray 17 and carries it to the outside of the vacuum processing apparatus 10. Loading and unloading to 1, the loading and unloading operation of the above substrate s is performed under atmospheric pressure. The inside of the room becomes the domain pressure, and the self-loading (four) u will carry the =::=='_ indoor decompression, the 12 series will decompress the room, from the king - two; the processing room 13. Further, the chamber R2 is referred to as 4th to 13th, and the transport tray 17 is returned to the atmosphere 17 and 4, and then the transport tray y is moved back to the loading and unloading room η. The R1 moves H to -13 from the 11th chamber 12, and the transport tray 17 is carried along the outgoing path to the outgoing R setting device 22 to restrain the transport tray 17 on the (4) by the action of the magnetic gas. After the treatment processing such as the film forming process and the heat treatment is applied to the substrate s of the transport tray η 9/22 201206806, the fixing device 22 is released, and the transport tray 17 is moved to the first step along the travel path R1. Two processing chambers 14. Further, the first processing chamber 13 carries the transport tray 17 from the second processing chamber 14 along the return path R2, and the fixing device 22 restrains the transport tray 17 on the return path R2 by the action of magnetic air. After the first processing chamber 13 applies a process such as enthalpy treatment and heat treatment to the substrate S fixed to the transport tray 17, the fixing device 22 is released, and the transport tray 17 is transported to the LL chamber 〖2 along the return path R2. The first processing chamber 13 carries in and out the transport tray 17 under reduced pressure. The first processing chamber 14 also applies a film forming process, a heat treatment, and the like to the substrate s. The second processing chamber 14 is the same as the first processing chamber 13 by the operation of the fixing device 22, the loading and unloading of the transport tray 17, and the like. The first processing chamber 14 takes in the substrate from the first processing chamber 13 along the way, and transports the substrate s to the transfer chamber 15. Then, the second processing chamber 14 carries the substrate from the transfer chamber 15 along the smuggling R2, and moves the substrate § to the first processing chamber 15. A pair of traverse devices 3〇 are mounted on both sides of the X-axis direction (the front side and the rear side in the conveyance direction). The transfer chamber 15 carries the transport tray 17 from the second processing chamber 14 along the departure path Ri, and (4) the fixed device u temporarily binds the transport tray 17 to the outgoing path R1 by the action of the magnetic gas. In the transfer chamber 15, the magnetic carrier of the transport tray on the process R1 is removed, and the transport tray 17 is transported by the traverse device 30 to the transport tray that is moved to the return route R2. 17. Moves to the second processing chamber 丨4 along the return path R2. Carrying to the 15 series, the self-descending movement to the return trip R2 is carried out under reduced pressure. 10/22 201206806 The transport of the tray 17 is carried out. Further, the transport chamber 15 locks the transport tray 17 with the lock of the traverse device 30 while transporting the transport tray from R! to the return R2. Figure 2 shows the - in the traverse device 3G! A diagram of a traversing device. - For the traverse device 30, the fixed bases described later are used, and the both sides of the transport tray 17 are divided. The two traverse devices 3G have the same energy and structure (the shape is, for example, symmetrical in the X-axis direction). As shown in FIG. 2, the traverse device 30 is provided with a driving unit 5A and a flat connecting mechanism 40 for use as a fixing base 32 including a carrying tray 17 capable of securing the fixed substrate S. The tray transfer mechanism. The parallel link mechanism 40 is driven by the drive of the drive unit 50. For example, the parallel coupling mechanism 40 has a fixed base 31 formed vertically and vertically, a crankshaft 36 and 37 rotatably coupled between the fixed base 31 and the fixed base 32, and the crankshafts 36 and 37 coupled thereto. Straight long ^ 疋 base 32. The drive unit 50 has a motor 33 and a transmission % connected to the output shaft 34 of the motor 33 with a coupling (not shown). A barrier wall separating the transfer chamber of the atmosphere and the vacuum is disposed between the output shafts 34 of the horses 33. That is, the motor 33 is disposed on the atmosphere side. The gearbox 35 is provided, for example, in the fixed base 31, and decelerates the driving force of the motor 33 to a predetermined rotational speed, and is transmitted to the crankshaft 37 on the lower side to convert the rotational power of the motor 33 around the Y-axis into the rotational power around the X-axis. In order to stabilize the operation of the parallel coupling mechanism 40, an auxiliary link 44 that connects the two west shafts 36 and 37 is provided on one side of the fixed base 32. The auxiliary chain % < 44 is rotatably coupled to the shaft portions 37a of the crankshafts 36 and 37 which are integrally formed. The auxiliary link 44 may also be rotatably coupled to the ends of the curved draws 36 and 37 on the side close to the fixed base 31. 11/22 201206806 Two fixed bases 32 are used to fix the transport tray 17 in an upright position. The fixed base 32 has a straight L-shape in the system, and _: and a support portion 32c which protrudes from the lower portion of the straight portion 于 in the front end portion of the large portion 32b in the horizontal direction. Then, the hook member 38 as a joint member is engaged with the transport tray "=17a. Thus, the lower portion of the transport tray 17 is supported by the support portion 32c, and the hook member 38 is stuck to the convex portion m. When the fixed base is moved, the posture of the tray 17 can be stably conveyed. The multi-shape can be widely used in the standby state (when shown in Figs. 5(A) and (5), the branch portion 32e of the solid base 32 is equipped (4) Each of the road surfaces (the lower end portion of the conveyance tray 17) is also lower = the bottom 2 is centered on the rotation shaft 39, and is rotatably coupled to the solid: seat and the portion. The hook member 38 has the second member disposed thereon. The notch of the engaging end portion 38a is used for the card/.' :: as explained in the following, using the parallel connection, a picture, from the vicinity of the crankshaft 36 from the 3 titer section, the display of the traverse agricultural device 30 The figure is a view from the direction of the yaw axis. The power transmission mechanism 45 of the parallel hook member 38 is _ the fixed base 31 side of the base 32. The power transmission diagram 14 is omitted in Fig. 2 as the front side of the power transmission mechanism 45. Fig. 4 The power transmission mechanism 45 is mainly composed of a cam machine having a cam 41 fixed to the crankshaft 36, and a slave mechanism:: The connecting rod - the end connecting rod 四 (4) - the end portion is connected to the connecting shaft 12/22 connected to the hook structure (4) 201206806 The shaft shaft 48 is coupled to the opposite side of the engaging end portion of the hook member 38 The end portion is inserted into the fixed base 32 and a long hole (not shown). The inner side of the fixed base 32 (on the side where the power is disposed) 45 is connected to the connecting rod 43. The structure is shown, and the spring 46 is coupled to The lower part of the hook member 38 is invited. It is placed in the spring bracket 47 of the fixed base 32, and the temple bullets 38, #/, 支_略. Therefore, when the hook structure is to be engaged with the movement of the convex portion 17a of the transporting tray 17 (in the state shown in Fig. (^), or in the normal state, the tension (for example, the contraction direction of the yellow 46) The force is operated. The tension of the spring 46 is such that when the cam follower 42 is operated on the concave portion 例如, for example, the connecting rod 43 is lowered, and the hook member is moved in the direction of the arrow A. Rotate to release the hook member % and the carrier, and the convex portion 17a is engaged. That is, the cam follower is stunned in the cam/1 recess. The timing of the operation on 41a is the same as the timing of the traverse device 30 in the standby state (that is, the timing at which the fixed base 32 is at the standby position (the state shown in FIGS. 5(A) and (E)). The operation of the power transmission mechanism 45 (the timing of the cam 41) is designed. The operation of the traverse device 30 configured as above will be described. Fig. 5 is a schematic view for explaining the operation, and is a view as seen from the X-axis direction. It is a diagram for explaining the rotation of the support portion 32c of the fixed base 32. Further, the illustration of the auxiliary link 44 is omitted in Figs. 5 and 6. In Fig. 5 (A), the traverse device 3 as described above In the standby state, the fixed base 32 is in the standby position. In this state, the hook member 38 as described above is not on the transport lanes R1 and R2, but is returned. The rotational angle position of the support portion 32c of the fixed base 32 in the standby position is 〇 as shown in Fig. 6. . 13/22 201206806 At this time, the fixed magnet 23 of the fixed device 22 has been lowered, and the upper portion is fixed in a non-contact manner, and its posture is stabilized. As shown in Fig. 5 (8), the fixed base 32 is rotated clockwise in Figs. 5 and 6 by the action of the parallel link mechanism 4, and the support portion 32c is IS Γ9. . The position Γ conveyance tray] 7 is placed on the side of the support unit. At this time, the hook member 38 is rotated by the action of the power transmission mechanism 45 (see FIGS. 3 and 4), and the engagement end portion of the hook member % is torn and disposed directly below the convex portion 17a of the conveyance tray 17. position. Then, after the fixed base 32 starts to rotate clockwise, the hook member %, the card=end portion 38 notch is engaged with the convex portion 7a and is locked, and in such a locked state, the fixed base 32 is fixed at the side. The transport tray 17 is rotated while rotating. After being locked, the fixed magnet 23 of the fixing device 22 is lifted to release the non-contact fixing. As shown in Fig. 5(C), the fixed base 32 is rotated clockwise, and the support portion 32c of the fixed base 32 passes through 180. The rotational position (refer to the figure and as shown in FIG. 5(D) 'Before the support portion 32c reaches the rotational position of 270. The non-contact fixation is started by the fixing device 22. And once the support portion 32c reaches the rotational position of 270° The conveyance tray 17 is placed on the return path R2. After the branch portion 32c passes the rotational position of 270, the hook member 38 starts to rotate due to the action of the power transmission mechanism 45, and the locked state of the hook member 38 is released. By doing so, the traverse device 30 maintains the posture of the transport tray 17 fixed to the fixed base 32, and also rotates the fixed base 32 by the action of the parallel connection mechanism 4, so that the transport tray 17 is moved from the travel R1 to The return path R2 moves °, that is, 'between the outward path R1 and the return path R2, the movement path of the transport tray 17 is formed. 14/22 201206806 As shown in Fig. 5 (8), after the state of Fig. 5 (8), the base 32 is fixed by counterclockwise rotation. The fixed base 32 is returned to the standby position, and the hook member 38 is also returned. As described above, in the present embodiment, the fixed base 32 of the fixed transport tray 17 is rotated by the parallel joint mechanism 4Q, so that the transport tray is placed Departure R 1 and the movement between the return strokes R2, so that the two-axis shifting shaft of the conventional lifting mechanism and the sliding mechanism is not required, so that the movement of the transport tray 17 can be realized by one driving unit 50 of the parallel-connecting mechanism. The structure of the traverse device 30 can be simplified, and the number of components can be reduced, thereby reducing the cost and reducing the maintenance frequency. Moreover, the movement through the rotation of the parallel coupling mechanism 4' is compared with the past traverse device. The movement time can be checked. In the present embodiment, the power transmission mechanism 45 for operating the hook member 38 is used. That is, since the other drive source for driving the hook member % is not required, the traverse device 3 can be simplified. In the case of underheating the base 32 (4), in order to stabilize the conveyance tray 17, it is also considered that the hook member 38 is not used, and the rotation of the conveyance tray is: = However, if the configuration of the fixed_w is red-turnable The structure can be changed from 1 to 2, and once the powder produced should be reduced, the processing of the substrate s will bring about a bad shadow. If the nail is nailed, it will be h(10)μ and β on the lower part. , located on the transport tray 17 for handling The posture of the cymbal is stable and equipped. The position of the upper part 4 of the cymbal 38 k is such that the hook can be positioned higher than the fixed base 32, and the end portion 38a of the card 5 is compared with the past traverse device. According to the system, for example, the size of the small fixed base 32 (or the height of 15/22 201206806 is lowered), and the traverse device 3G can be realized in the small embodiment, as shown in the figure. 6 + ^ 1. The R1 and the return R2 are equal distances in the Y-direction direction of the stroke center 2c on the central axis of rotation = set% The fixed base 32 is rotated. For example, by means of the axis 臾. The mechanism 40 allows the device 30 The configuration is closest to the transport lanes R1 and R2. The structure of the traverse path R1, R2 and the traverse device 30 can be formed so as not to interfere with the movement of the transport area 17 while moving. Further, the tethers of the branch portion 3 of the fixed base 32 are parallel to the (four) and back (four). (4), when the two central axes are rotated, the three-dimensional base 32 of the base plate s fixed by the base 32 is fixed (5), and the effect of miniaturizing the entire structure including each bribe 30 is achieved. . Ruler 2 and tilting device In the present embodiment, the motor 33 is arranged (10); in the above, the Wei mechanism (four) moving motor arrangement technique is required to maintain the vacuum in the vacuum processing chamber, and the outer shaft is required to be provided with the bellows. In other words, if the hoisting motor of the motor is disposed outside the vacuum processing chamber, the mechanism around the rotating shaft 39, such as a Wei shaft seal, is necessary. ϋ For this, the motor 33 is not required to be placed outside the handling room, and the mouth is required to be lifted. The present invention is not limited to the other various embodiments. Hey. The mechanism of the brothers and the likes, the drive unit 5, the gearbox 35, 36, and the power transmission 16/22 201206806 The arrangement and structure of the cam mechanism and the hook member 38 can be appropriately changed. For example, the following changes can be made. w戈 can also be in the two crankshafts 36 and 37, the upper crankshaft, the lower crankshaft 37 as a crane shaft 36 or I" can also be provided with two drive parts 5 〇 'the drive part 5 The cutter is driven synchronously. In this case, the auxiliary link 44 is not required. The upper end is required to position the height of the rotary shaft of the hook member 38 by the engagement end of the hook member 38. Part % member 38. In the upper embodiment, the hook is arranged, and (4) in the embodiment, as the tray transfer mechanism, only the parallel Ϊ is exemplified; the mechanism '(4) can make the money structure. For example, the guide can be set, The guiding member of the moving object is shown in the second song: the month y is connected to the rotating body such as the roller at the base 32 of the solid foundation. Today, :=:=:=== the base: The above, the appropriate (four) 1 ¥ In this case, the arrangement and configuration of the second movable portion 5, the gearbox 35, etc. are also provided. The support member "dry" is in the action of the support structure, and the cam is fixed at the base 32, for example. The part that is connected to the solid 5 cow is rotatably coupled to the part of the support member: let. The cutting member is such that its rotating shaft can be such that the structural member is thin and supports the member. The hook member 38 can be moved along the shape of the cam 41 by the elastic force of the cam follower m by its elastic force. The Μ shape 'power transmission mechanism 45 is not limited to the hook member 17/22 201206806 hang = 7 (four) 5 (A) to (E) as shown in the figure, the drive unit 5 亦可 can be additionally provided. The shape of the base 32, the hook member 38, and the like are also provided, and the hook member 38 is provided as a solid embodiment. However, the structure in which the seat 32 is similar or the side of the transport tray 17 can be fixed or the hook member 38 is not provided. with. And the return path R2 can also be configured to be respectively positioned at a height position. No. The rotation center of the support portion 32c of the fixed base 32 can also be on the above-mentioned center line c of Fig. 6. BRIEF DESCRIPTION OF THE DRAWINGS The processing is shown as a schematic tilt diagram of a vacuum device as a base device of a weaving device. Figure 2 is a cross-sectional view showing the tilt of the traverse device of the pair of traversing devices from the vicinity of the crankshaft. Fig. 4 is a front view of the power transmission mechanism. Fig. = to (6) are schematic diagrams showing the operation of the lining device, which is viewed from the X-axis direction. u::======================= S Substrate R1 Outbound (Transportation) R2 Return (Transportation) C Centerline 18/22 201206806 0 Rotary Center 10 Vacuum Processing Unit 11 Loading and Unloading Room 12 LL Room 13 First Processing Room 14 Second Processing Room 15 Transmitting Room 16 Gate Valve 17 Transport tray 17a Projection 19 Transport roller 21 Pallet magnet 22 Fixing device 23 Fixing magnet 30 Traverse device 31 Fixing base 32 Fixing base 32a Straight portion 32b Projection 32c Support portion 33 Motor 34 Output shaft 35 Gearbox 36, 37 Crankshaft 36a, 37a Crankshaft shaft portion 38 Hook member 19/22 201206806 38a Engagement end 39 Rotary shaft 40 Parallel coupling mechanism 41 Cam 41a Recess 42 Cam follower 43 Connecting rod 44 Auxiliary link 45 Power transmission mechanism 46 Spring 47 Spring bracket 48 connecting shaft 50 driving part 20/22