CN109928188B - Transfer facility and transfer method - Google Patents
Transfer facility and transfer method Download PDFInfo
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- CN109928188B CN109928188B CN201811298121.3A CN201811298121A CN109928188B CN 109928188 B CN109928188 B CN 109928188B CN 201811298121 A CN201811298121 A CN 201811298121A CN 109928188 B CN109928188 B CN 109928188B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
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- Microelectronics & Electronic Packaging (AREA)
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
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Abstract
The invention relates to a transfer equipment (10) for transferring a box body (90) between a fork unit (40) and a transfer machine (20), the pallet fork unit is provided with a pusher (25), the pusher (25) limits the position of a box body (90) on a carrying surface (41a) of a pallet fork unit (40), the pallet fork unit (40) is provided with a floating unit (50) on the carrying surface (41a), the floating unit (50) is a structure which can support and support a movable part (52) provided with a supporting part (51) for carrying and supporting articles in a freely moving way along the horizontal direction relative to a fixed part (53), the box body (90) is supported by the supporting part (51) for carrying and supporting the articles, the movable section (52) is movable in the horizontal direction relative to the fixed section (53), and the position of the cartridge (90) is regulated by the pusher (25), thereby positioning the cartridge (90).
Description
Technical Field
The present invention relates to a transfer facility for transferring an article between a first transfer machine on which the article is placed and which moves the article horizontally in and out of a transfer facility and a second transfer machine which supports an upper portion of the article and moves the article vertically in an up-and-down manner.
Background
As the transfer facility, for example, there is a facility that transfers a cassette (article) containing substrates to a chamber as a processing apparatus (see, for example, patent document 1). In the transfer facility of patent document 1, the cassette transport means (first transfer device) transfers the cassette transported by the transport carriage means into the facility, and the cassette transfer means (second transfer device) transfers the cassette transferred by the cassette transport means into the chamber. Alternatively, the cassette transfer unit outputs the cassette input into the chamber, and the cassette transport unit transfers the cassette transported by the cassette transfer unit to the transport carriage unit.
The cassette transferred from the transfer carriage unit by the cassette transfer unit is placed on a receiving table provided above the chamber before the cassette is input to the chamber by the cassette transfer unit. Similarly, the cassette output from the chamber by the cassette transfer unit is placed on the receiving table before the cassette is transferred to the transport carriage unit by the cassette transport unit.
The cassette transfer unit holds the cassette from above and moves the cassette up and down, thereby inputting the cassette placed on the receiving table into the chamber or inputting the cassette output from the chamber into the receiving table.
Patent document
Patent document 1: korean registered patent No. 10-1511963
Disclosure of Invention
However, in the transfer facility as described above, when transferring a cassette (article) between the cassette transport means (first transfer unit) and the cassette transfer means (second transfer unit), an operation of temporarily placing the cassette (article) on the receiving table during the transfer is required. Further, when the cassette transfer means (second transfer device) holds the cassette (article) and moves it up and down, the cassette (article) interferes with the receiving base, and therefore, in order to avoid interference with the receiving base, it is necessary to rotate the cassette (article) or the like. Therefore, there is a problem that it takes time to transfer the cassette (article) between the cassette conveying means (first transfer machine) and the cassette transfer means (second transfer machine).
Therefore, an object of the present invention is to provide a transfer facility capable of efficiently transferring an article between a first transfer machine on which the article is placed and which moves the article in a horizontal direction to enter or exit, and a second transfer machine which supports an upper portion of the article and moves the article in a vertical direction to move up and down.
The problems to be solved by the present invention are as described above, and a solution to the problems will be described below.
That is, the transfer facility of the present invention is a transfer facility for transferring an article between a first transfer machine on which the article is placed and which moves the article horizontally in and out, and a second transfer machine which supports an upper portion of the article and moves the article vertically in and out, wherein a position regulating device is provided which abuts a side surface of the article placed on a placement surface of the first transfer machine to regulate a position of the article on the placement surface, the first transfer machine is provided with a floating unit on the placement surface, the floating unit is configured to support a movable portion stopper having a support portion for supporting the article to be movable in a horizontal direction with respect to a fixed portion, the article is supported by the support portion for supporting the article placement support, and the movable portion is movable in the horizontal direction with respect to the fixed portion, And the position of the article is restricted by the position restricting device, whereby the article is positioned on the placing surface with respect to the elevation position of the second transfer unit.
In the above-described configuration, the article placed on the placement surface of the first transfer device is positioned at the elevation position of the second transfer device.
The transfer facility according to the present invention further includes a positioning mechanism for positioning a lifting position of the first transfer unit with respect to the second transfer unit.
In the above configuration, the first transfer unit is positioned at the elevation position of the second transfer unit.
In the transfer facility of the present invention, the article has a substantially box-like structure in which a locking portion to be locked to the second transfer unit is formed at an upper portion of the article, and the locking portion is formed in a hook shape.
In the above-described configuration, the substantially box-shaped article having the hook-shaped engagement portion is transferred between the first transfer unit and the second transfer unit.
According to the transfer facility of the present invention, since the transfer of the article between the first transfer unit and the second transfer unit can be performed directly without the aid of the receiving table, there is no need for an operation of placing the article on the receiving table during the transfer, an operation of rotating the article when the article is moved up and down by the second transfer unit, or the like. Therefore, the transfer of the article between the first transfer unit and the second transfer unit can be performed efficiently.
Drawings
Fig. 1 is a plan view of a transfer facility according to the present invention.
Fig. 2 is a front view of the transfer facility.
Fig. 3 is a side sectional view of a floating unit (floating unit) of the transfer facility.
Fig. 4 is a side sectional view showing an outline of the case where the fork unit of the transfer facility delivers the cassette from the transport vehicle.
Fig. 5A is a side view showing an outline of the case where the fork unit of the transfer facility inputs the case to the transfer facility.
Fig. 5B is a plan view showing an outline of the case where the fork unit of the transfer facility inputs the case to the transfer facility.
Fig. 6 is a side sectional view showing an outline of the case where the fork unit of the transfer facility inputs the case to the transfer facility.
Fig. 7A is a side view showing an outline of the case when the transfer unit of the transfer facility outputs the cassette from the fork unit.
Fig. 7B is a plan view showing an outline of the case when the transfer unit of the transfer facility outputs the cassette from the fork unit.
Fig. 8 is a front cross-sectional view showing an outline of the case when the transfer unit of the transfer device transfers the cartridge to the loading port of the vapor deposition device.
Description of the reference numerals:
10 … transfer equipment, 20 … transfer machine (second transfer machine), 25 … pusher (position limiting device), 40 … fork unit (first transfer machine), 41a … carrying surface, 50 … floating unit, 51 … supporting part, 52 … movable part, 53 … fixed part and 90 … box.
Detailed Description
The transfer facility 10 according to the present invention will be explained.
As shown in fig. 1 and 2, the transfer means 10 is a means provided in addition to the vapor deposition device 80, and the vapor deposition device 80 performs vapor deposition processing on a substrate 91 that is a semi-finished product of a semiconductor product or a liquid crystal display element product. The transfer facility 10 transfers the cassette 90 (an example of an "article") containing the substrate 91 in the form of a plate to the loading port 83 of the vapor deposition device 80. The transfer device 10 transfers the cartridge 90 input to the transfer device 10 to the loading port 83 of the vapor deposition device 80, and outputs the cartridge 90 output from the loading port 83 of the vapor deposition device 80 to the outside of the transfer device 10.
The cassette 90 conveyed to the transfer apparatus 10 is formed of a substantially box-shaped member having one or both sides opened. The case 90 is configured to be able to accommodate a plurality of substrates 91 therein. The case 90 has a plurality of flanges 92 ("engagement portions" are an example) formed on an upper portion thereof to engage with a transfer unit 20, which will be described later. The flange portion 92 is formed of a hook-shaped member provided to protrude from the upper surface of the case 90. The flange 92 is provided at a plurality of positions on the upper surface of the case 90.
The transfer facility 10 is additionally provided above the vapor deposition device 80. The entire device provided with the vapor deposition device 80 of the transfer device 10 is covered with a device case 81. The device case 81 has an internal space capable of accommodating the vapor deposition device 80 therein. The apparatus housing 81 is formed at an upper portion thereof with a cartridge input port 82 for feeding the cartridge 90 inward.
The device case 81 has a loading port 83 for placing the cartridge 90 in its inner space. Specifically, the loading port 83 is provided directly below the cassette input port 82 (directly below the transfer unit 20 described later, on the path of the cassette 90 that is lifted by the transfer unit 20).
A fork unit 40 (an example of a "first transfer unit") that conveys the cassettes 90 to the transfer means 10 is provided on the side of the transfer means 10 and above the vapor deposition device 80. That is, the cassette 90 is input or output from above the vapor deposition device 80 and from the side of the transfer means 10.
As shown in fig. 1, the fork unit 40 is placed on the cassette body 90 and moves the cassette body 90 in and out in a horizontal direction. The fork unit 40 outputs the cassette 90 from the transport carriage 86 moving along the carriage moving rail 85, and inputs the output cassette 90 to the transfer device 10. The fork unit 40 also outputs the cassette 90 from the transfer facility 10, and transfers the output cassette 90 to the transport carriage 86.
The fork unit 40 is constituted to mainly include: a fork 41 having a mounting surface 41a on the upper surface thereof for mounting the case 90; a flexible arm 42 for moving the fork 41 in and out in the horizontal direction; and a swivel table 43 that swivels the flexion-extension arm 42.
The fork 41 is formed of a substantially rectangular plate on which the case 90 can be placed and transferred. The retractable arm 42 is retracted to cause the fork 41 to move in and out of the transport carriage 86 or the transfer apparatus 10 (transfer unit 20).
The flexible arm 42 is constituted by: the pair of arms are extended to horizontally move the forks 41 to the output and input position 45 for outputting or inputting the magazine 90 to the transport carriage 86, or to the magazine output and input position 11 for outputting or inputting the magazine 90 to the transfer unit 20 with respect to the forks 41.
As shown in fig. 1, 5A, and 5B, the floating unit 50 is provided on the mounting surface 41a of the fork 41. The floating unit 50 is used to support the cassette 90 placed on the placement surface 41a to be movable in all horizontal directions. The floating units 50 are disposed on the mounting surface 41a in a state where a plurality of units (2 units in each of fig. 1, 5A, and 5B, and 4 units in total) are arranged along the longitudinal direction of the forks 41 (the direction in which the forks enter or exit) at both end portions in the width direction of the forks 41 (the direction horizontally orthogonal to the entering or exiting direction of the forks 41).
As shown in fig. 3, the floating unit 50 is housed inside a frame constituting the fork 41. The floating unit 50 has the following configuration: the movable portion 52 including the support portion 51 for placing the cartridge 90 and supporting the cartridge 90 is supported by the holder so as to be movable in the horizontal direction with respect to the fixed portion 53. The floating unit 50 is configured to: the movable portion 52 having the support portion 51 for supporting and placing the article is supported so as to be movable in all horizontal directions with respect to the fixed portion 53 and rotatable in a plan view by a rotatable support 56 provided in a state in which the plurality of rotating members 54 are rotatably held by the holder 55.
The rotatable support 56 is provided to be movable in all horizontal directions with respect to the movable portion 52 and the fixed portion 53 as follows: the plurality of rotating members 54 are positioned between the flat fixed-portion-side contact surface forming member 57a provided in the fixed portion 53 in an upward facing state and the flat movable-portion-side contact surface forming member 57b provided in the movable portion 52 in a downward facing state.
The floating unit 50 has: a position fixing mechanism KF that fixes the position of the movable portion 52 with respect to the fixed portion 53 in the horizontal direction; and a support body returning mechanism SF that moves the rotatable support body 56 so as to return to the reference position in the horizontal direction with respect to the fixed portion 53.
The position fixing mechanism KF is a fixing mechanism that fixes the horizontal position of the movable portion 52 with respect to the fixed portion by the magnetic attraction force generated by the electromagnet 58 a. The position fixing mechanism KF fixes the position of the movable portion 52 in a plan view by engaging the electromagnet 58a on the fixed portion 53 side and the ferromagnetic body 58b on the movable portion 52 side with a magnetic force.
The support body returning mechanism SF is a returning mechanism of an elastic force type using an elastic urging force of the coil spring 59. The support body returning mechanism SF is provided with a plurality of pressing operation type coil springs 59 at equal intervals in the circumferential direction on the radially outer side of the annular rotary support body 56, and moves the rotary support body 56 so as to return to the reference position by holding the radially outer side of the coil springs 59 by spring brackets 59a provided in the fixed portion 53 in a fixed state and pressing the rotary support body 56 toward the radially inner side.
As shown in fig. 2 and 4, the fork 41 has a roller fitting portion 41b formed at an end in the longitudinal direction thereof (a front end in the extending direction of the fork 41) to be fitted to a positioning guide roller 26 described later. The roller fitting portion 41b is an elongated member that is formed along the width direction of the fork 41 and is recessed in a side view. The roller fitting portion 41b is formed in a state in which the concave portion faces downward.
As shown in fig. 1, buffer stations (buffer stations) 95 for temporarily storing the cassettes 90 are provided on both sides of the fork unit 40. The buffer station 95 is provided with a mounting table 96 on which the cassette 90 is mounted.
As shown in fig. 1 and 2, the transfer device 10 is provided at a lower portion thereof with a cassette output port 14 for outputting a cassette 90 to the loading port 83 of the vapor deposition device 80. The cartridge output port 14 is provided in communication with the cartridge input port 82 of the device case 81.
The transfer facility 10 includes: a transfer unit 20 (an example of a "second transfer unit") which is a transport unit for the cassettes 90 of the transfer apparatus 10; a pusher (pusher)25 (an example of a "position regulating means") that regulates the position of the magazine 90 placed on the placement surface 41a of the fork 41 of the fork unit 40; and a positioning guide roller 26 (an example of a "positioning mechanism") for positioning the elevation position of the fork 41 of the fork unit 40 with respect to the transfer unit 20.
As shown in fig. 2, the transfer unit 20 outputs or inputs the cassette 90 to or from the fork 41 of the fork unit 40, and moves the cassette 90 to be output or input up and down between the fork 41 and the loading port 83 of the vapor deposition device 80. That is, in the transfer facility 10, the transfer unit 20 directly outputs the cassette 90 conveyed by the fork unit 40 from the fork unit 40 without temporarily placing it on a receiving table or the like, and the transfer unit 20 directly inputs the cassette 90 output from the loading port 83 of the vapor deposition device 80 to the fork unit 40 without temporarily placing it on the receiving table or the like.
The transfer unit 20 is provided above the loading port 83 of the vapor deposition device 80 and is disposed at a position overlapping the loading port 83 of the vapor deposition device 80 in a plan view. The transfer unit 20 outputs the cassette 90 conveyed to the cassette output/input position 11 from the forks 41, or inputs the cassette 90 to the forks 41 moved to the cassette output/input position 11. The transfer unit 20 is configured to: the cartridge 90 is transported by engaging the upper portion of the cartridge 90 above the vapor deposition device 80 and moving the cartridge 90 up and down in the vertical direction. The transfer machine 20 mainly includes: a lifting mechanism 21 for lifting and lowering the cartridge 90; and a locking mechanism 24 for locking the upper portion of the case 90.
The lifting mechanism 21 supports the locking mechanism 24 in a suspended state by the support frame 22A. The lifting mechanism 21 includes: a first lifting unit 22 that moves the locking mechanism 24 (the case 90) up and down; and a second lifting unit 23 that moves the first lifting unit 22 and the locking mechanism 24 (the box 90) up and down. That is, the elevating mechanism 21 elevates the cassette 90 by two stages of elevating movement.
The first elevating unit 22 mainly includes: a support frame 22A that supports the locking mechanism 24 in a suspended manner; a ball screw 22B for raising and lowering the support frame 22A; and a first motor 22C that rotates the threaded shaft 22d of the ball screw 22B.
The support frame 22A is a frame member formed in an inverted U shape in front view. The support frame 22A rotatably supports the threaded shaft 22d by a pair of leg portions 22A provided at both ends thereof, and supports the locking mechanism 24 in a suspended state by a support portion 22b provided on the pair of leg portions 22A. The ball screw 22B is configured to: the screw shaft 22d is supported by the support frame 22A, and the nut 22e is supported by the second elevating portion 23. The first motor 22C is provided at the upper part of both ends of the support frame 22A.
The first elevating unit 22 is configured to: the screw shaft 22d is rotated by driving of the first motor 22C, and thereby the screw shaft 22d is moved up and down with respect to the nut 22e supported by the second elevating portion 23. Thus, the support frame 22A rotatably supporting the screw shaft 22d is moved up and down, and the locking mechanism 24 (the case 90) is moved up and down by the up and down movement of the support frame 22A. Since the first elevating portion 22 elevates the locking mechanism 24 (the cartridge 90) by the rotation of the screw shaft 22d, the cartridge 90 can be easily precisely aligned with the loading port 83 of the vapor deposition device 80.
The second elevating unit 23 mainly includes: a guide body 23A that guides the nut 22e of the ball screw 22B so as to be able to move up and down; a driving belt 23B for moving the nut 22e up and down; and a second motor 23C for rotating the drive belt 23B.
The guide body 23A is formed of a pair of long members. The drive belt 23B is rotatably mounted between the upper end and the lower end of the guide body 23A. The second motor 23C is provided at the lower end of the guide body 23A.
The second elevating unit 23 is configured to: the second motor 23C drives and rotates the drive belt 23B, thereby moving the nut 22e of the ball screw 22B up and down. As a result, the support frame 22A (threaded shaft 22d) supporting the nut 22e is moved up and down, and the locking mechanism 24 (box 90) is moved up and down by the up and down movement of the support frame 22A. The second elevating section 23 elevates and moves the guide frame 23A between a pair of elongated guide bodies 23A extending in the vertical direction, thereby roughly aligning the cartridge 90 with respect to the loading port 83 of the vapor deposition device 80.
In this way, the elevating mechanism 21 can perform the alignment of the cartridge 90 with respect to the loading port 83 of the vapor deposition device 80 by lowering the cartridge 90 to a substantially accurate position with respect to the loading port 83 of the vapor deposition device 80 by the second elevating section 23, and then lowering the cartridge 90 to a position close to the loading port 83 of the vapor deposition device 80 by the first elevating section 22.
As shown in fig. 1 and 2, the locking mechanism 24 is supported by the support frame 22A (support portion 22b) of the first elevating portion 22, and locks the flange portion 92 on the upper portion of the case 90. The locking mechanism 24 has a locking portion 24A for locking the flange portion 92 of the case 90 to the side facing the case 90 when the case 90 is locked. A plurality of (4 in fig. 1) locking portions 24A are provided at positions corresponding to the flange portion 92 of the case 90. The locking portion 24A is formed of a hook-shaped member that can be locked to the flange portion 92. The locking portion 24A is configured to: the hook-shaped member is rotatable in a predetermined direction. The locking mechanism 24 locks the flange portion 92 by the locking portion 24A to support the case 90 in a suspended state.
As shown in fig. 1 and 7B, the pusher 25 regulates the position of the magazine 90 placed on the placement surface 41a of the fork 41 of the fork unit 40. The pusher 25 abuts against a corner 90A (a side surface of a lower corner) of the case 90 placed on the fork 41, thereby regulating the position of the case 90 on the fork 41. The pusher 25 is disposed near a diagonal position of the magazine 90 that clamps the magazine 90 conveyed to the magazine output/input position 11 together with the pair of pushers 25. The pusher 25 includes: pusher body 25A; and an arm portion 25B supported by the pusher body 25A and capable of moving in and out in the horizontal direction. The arm portion 25B is configured to: can abut against corner 90A (side surface of lower corner) of case 90. The pusher 25 causes the arm portion 25B to abut against the corner portion 90A (side surface of the lower corner portion) of the case 90 so as to be sandwiched from the diagonal position of the case 90 on the fork 41 together with the arm portion 25B of the pair of pushers 25, thereby restricting the position of the case 90 on the fork 41 to a predetermined position. Here, the predetermined position means: the transfer unit 20 can be locked to a position (a cassette output/input position 11) where it can be raised and lowered while maintaining the posture of the cassette 90 on the fork 41. When the transfer unit 20 carries out or inputs the case 90 to or from the fork 41, the arm 25B extends toward the case 90 and abuts against the corner 90A (side surface of the lower corner) of the case 90. When the cassette 90 is lifted by the transfer unit 20, the arm 25B contracts so as to be separated from the cassette 90 and moves in a direction avoiding the lifting path of the cassette 90.
As shown in fig. 2, 7A, and 7B, the positioning guide roller 26 is a long roller that is provided so as to be orthogonal in the horizontal direction with respect to the entering or exiting movement direction of the forks 41 of the fork unit 40. The positioning guide roller 26 is provided at a position where the roller fitting portion 41b of the fork 41 can be fitted when the fork 41 is moved to the cassette body output and input position 11. The roller fitting portions 41b of the forks 41 moved to the cassette output and input position 11 are fitted to the positioning guide rollers 26, whereby the forks 41 can be positioned at a position (cassette output and input position 11) where the transfer unit 20 outputs or inputs the cassette 90 to or from the forks 41. The positioning guide roller 26 is configured according to a roller diameter corresponding to the shape of the recessed portion of the roller fitting portion 41 b. The positioning guide roller 26 is rotated by a rotation shaft supported to be rotatable. The positioning guide roller 26 is configured to be rotatable via a rotation shaft, and thus the roller fitting portion 41b that moves toward the positioning guide roller 26 is easily guided by the positioning guide roller 26 and fitted thereto.
Next, a method of transferring the cassettes 90 in the transfer facility 10 will be described.
As shown in fig. 4, when the cassette 90 is transported to a predetermined position by the transport carriage 86, the fork unit 40 extends the retractable arm 42 to horizontally move the fork 41 with respect to the transport carriage 86, thereby placing and supporting the cassette 90 on the transport carriage 86 on the fork 41. When the case 90 is placed on the fork 41, the floating unit 50 operates (the movable portion 52 cannot move in the horizontal direction with respect to the fixed portion 53) so that the case 90 is in a state of being unable to move on the fork 41.
As shown in fig. 5A, 5B, and 6, when the floating unit 50 operates, the fork unit 40 bends the flexible arms 42 and rotates the forks 41 in a state where the box body 90 is placed on the forks 41. In addition, the fork unit 40 extends the telescopic arm 42 to horizontally move the fork 41 to the cassette output and input position 11 of the transfer apparatus 10. Thereby, the cartridge 90 is conveyed to the cartridge output and input position 11.
As shown in fig. 6, 7A, and 7B, when the cassette 90 is conveyed to the cassette output and input position 11, the fork 41 is lowered, and the roller fitting portion 41B of the fork 41 is fitted to the positioning guide roller 26. Thereby, the forks 41 are positioned at the cassette output input position 11. When the forks 41 are positioned at the cassette output and input position 11, the operation of the floating unit 50 is released (the movable portion 52 is movable in the horizontal direction with respect to the fixed portion 53), and the cassette 90 is formed in a state of being movable on the forks 41. Next, arm portion 25B of pusher 25 extends toward case 90 and abuts against corner portion 90A of case 90. This allows the pair of opposite corner portions of the case 90 to be sandwiched between the pair of arm portions 25B.
The pusher 25 moves the pair of arms 25B in the telescopic movement with respect to each other, thereby moving the cartridge 90 in four directions. Then, pusher 25 moves cassette 90 to a position (cassette output/input position 11) where flange 92 of cassette 90 can be locked by locking portion 24A (locking mechanism 24) of transfer unit 20. That is, the pusher 25 moves the magazine 90 in four directions to position the magazine 90 at the elevation position with respect to the transfer unit 20. When the positioning of the magazine 90 is completed by the pusher 25, the floating unit 50 operates (the movable portion 52 cannot move in the horizontal direction with respect to the fixed portion 53) so that the magazine 90 is in a state of being unable to move on the fork 41. Thereby, the cartridge 90 is held at the cartridge output and input position 11.
When the cassette 90 is held at the cassette output/input position 11, the second lifting/lowering unit 23 of the transfer unit 20 is driven to lower the locking mechanism 24 of the transfer unit 20 to a position above the cassette 90. Then, the locking portion 24A of the locking mechanism 24 is turned in a predetermined direction, and the flange portion 92 of the case 90 is locked by the locking portion 24A. When flange portion 92 is locked to locking portion 24A, the operation of floating unit 50 is released (movable portion 52 is movable in the horizontal direction with respect to fixed portion 53). This allows the cassette 90 to be moved up and down by the transfer unit 20.
When the floating unit 50 is deactivated, the fork unit 40 bends the retractable arms 42 such that the forks 41 move horizontally away from the cassette output and input position 11. The pusher 25 contracts and moves the arm 25B in a direction away from the cassette 90 (in a direction avoiding the path of the cassette 90 being lifted and lowered).
When the fork 41 and the arm 25B are moved to a position away from the cassette output/input position 11, the second elevating portion 23 of the transfer unit 20 is driven to lower the locking mechanism 24 to which the cassette 90 is locked toward the loading port 83 of the vapor deposition device 80. Specifically, the second motor 23C drives and operates the drive belt 23B, and the drive belt 23B operates and lowers the nut 22e of the ball screw 22B along the guide body 23A. Then, the support frame 22A (the screw shaft 22d) supporting the nut 22e is lowered, and the locking mechanism 24 (the case 90) is lowered to a predetermined position by the lowering of the support frame 22A.
As shown in fig. 8, when the locking mechanism 24 is lowered to the predetermined position, the second raising/lowering unit 23 stops driving, and the first raising/lowering unit 22 drives. This causes the cassette 90 locked to the locking mechanism 24 to be transferred to the loading port 83 of the vapor deposition device 80. Specifically, when the driving of the second motor 23C is stopped, the first motor 22C is driven to rotate the screw shaft 22d of the ball screw 22B. Thereby, the support frame 22A supporting the screw shaft 22d is lowered, and the locking mechanism 24 (the case 90) is lowered by the raising and lowering of the support frame 22A.
On the other hand, when the processing of the substrate 91 in the vapor deposition device 80 is completed, the locking portion 24A of the locking mechanism 24 locks the flange portion 92 of the case 90. Then, the first motor 22C is driven to rotate the threaded shaft 22d of the ball screw 22B. Thereby, the support frame 22A is raised, the locking mechanism 24 is raised in accordance with the raising of the support frame 22A, and the cassette 90 is discharged from the loading port 83. When the locking mechanism 24 is raised to the predetermined position, the first motor 22C stops driving and the second motor 23C drives. Thereby, the drive belt 23B operates, and the nut 22e of the ball screw 22B is raised along the guide body 23A by the operation of the drive belt 23B. Then, the support frame 22A (the screw shaft 22d) supporting the nut 22e is raised, and the locking mechanism 24 (the case 90) is raised by the raising of the support frame 22A.
When the case 90 latched to the latch mechanism 24 is raised to the case output and input position 11, the fork unit 40 moves the forks 41 horizontally to the case output and input position 11. At this time, the roller fitting portion 41b is fitted to the positioning guide roller 26.
When the fork 41 moves horizontally to the cassette output/input position 11, the second motor 23C is driven to lower the locking mechanism 24. Thereby, the box body 90 is lowered and placed on the fork 41. When the case 90 is placed on the fork 41, the locking portion 24A of the locking mechanism 24 is turned in a predetermined direction, and the locking of the flange portion 92 by the locking portion 24A is released. When the locking of the locking portion 24 to the flange portion 92 is released, the fork unit 40 raises the fork 41 with the cassette 90 placed thereon, releases the engagement of the roller engagement portion 41b with the positioning guide roller 26 to bend the flexible arm 42, and also rotates the fork 41 with the cassette 90 placed thereon. Further, the fork unit 40 extends the retractable arm 42 to horizontally move the fork 41 to the transport carriage 86, and transfers the cassette 90 on the fork 41 to the transport carriage 86.
As described above, the transfer facility 10 according to the present invention can directly transfer the cassettes 90 between the fork units 40 and the transfer unit 20 without using a receiving table, and therefore, there is no need for an operation of placing the cassettes 90 on the receiving table during transfer or an operation of rotating the cassettes 90 when the transfer unit 20 moves the cassettes 90 up and down. Therefore, the cassettes 90 can be efficiently transferred between the fork unit 40 and the transfer unit 20. Further, since the receiving table is not required, the cassette 90 can be transferred even if the transfer device 10 is covered with the device case.
In the present embodiment, the article to be transferred to the transfer facility 10 is not limited to the box 90, and may be any article as long as it can be transferred between the fork unit 40 and the transfer unit 20.
In the present embodiment, the transfer unit 20 moves the magazine 90 up and down while the hook-shaped flange portion 92 on the upper portion of the magazine 90 is locked by the locking portion 24A of the transfer unit 20, but the present invention is not limited thereto, and the transfer unit 20 may move the magazine 90 up and down while holding the side surface of the magazine 90, for example.
In the present embodiment, the transfer unit 20 moves the magazine 90 up and down by two stages of the up-and-down movement of the first lifting unit 22 and the second lifting unit 23, but the present invention is not limited thereto, and the magazine 90 may be moved up and down only by one stage of the up-and-down movement of either the first lifting unit 22 or the second lifting unit 23. Further, the first lifting unit 22 lifts and lowers the cassette 90 by the ball screw 22B, but is not limited to this, and the cassette 90 may be lifted and lowered by winding and unwinding a lifting belt attached to the locking mechanism 24.
In the present embodiment, the floating units 50 are disposed on the mounting surface 41a in a state where a plurality of floating units are arranged in the longitudinal direction of the fork 41 at both ends in the width direction of the fork 41, but the positions and the number of the floating units 50 are not limited as long as the case 90 can be sufficiently supported by the fork 41.
In the present embodiment, the support body returning mechanism SF is formed of an elastic force type returning mechanism, but may be formed of a magnet type returning mechanism.
In the present embodiment, pusher 25 abuts on corner 90A of case 90 to regulate the position of case 90, but is not limited to this, and as long as the position of case 90 can be regulated when abutting on the side surface of case 90, the configuration may be such that: so that the central portion of the side surface of the case 90 abuts against the pusher 25. The position of cassette 90 is limited by 2 pushers 25, but the position is not limited to this, and may be limited by 1 or 3 or more pushers 25.
In the present embodiment, the positioning of the lifting position of the forks 41 of the fork unit 40 with respect to the transfer unit 20 is performed by the positioning guide rollers 26 as rollers, but the present invention is not limited to this, and the positioning guide rollers may be configured as long as the forks 41 can be held at the cassette output and input position 11, and may be configured by, for example, convex members capable of fitting the roller fitting portions 41b of the forks 41.
Claims (3)
1. A transfer facility for transferring an article between a first transfer machine on which the article is placed and which moves the article horizontally in and out of the transfer machine and a second transfer machine which supports the upper part of the article and moves the article vertically in and out of the transfer machine,
the transfer facility is characterized in that the transfer facility is provided with a transfer mechanism,
a position regulating device which abuts against a side surface of the article placed on the placement surface of the first transfer unit to regulate the position of the article on the placement surface,
the first transfer unit is provided with a floating unit on the carrying surface,
the floating unit is a structure for supporting the movable part stopper with the supporting part for loading and supporting the article to be freely movable in the horizontal direction relative to the fixed part,
the article is supported by a support part for supporting the article,
the movable portion is movable in a horizontal direction with respect to the fixed portion, and the position of the article is restricted by the position restricting device, whereby the article is positioned on the placement surface at the elevation position with respect to the second transfer device.
2. The transfer facility according to claim 1,
the positioning mechanism is provided for positioning the elevation position of the first transfer unit with respect to the second transfer unit.
3. The transfer facility according to claim 1 or 2,
the article is formed in a substantially box-like shape with a locking portion that locks with the second transfer unit formed on an upper portion of the article, and the locking portion is formed in a hook shape.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017240108A JP6794976B2 (en) | 2017-12-15 | 2017-12-15 | Transfer equipment, transfer method |
| JP2017-240108 | 2017-12-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109928188A CN109928188A (en) | 2019-06-25 |
| CN109928188B true CN109928188B (en) | 2021-11-16 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811298121.3A Active CN109928188B (en) | 2017-12-15 | 2018-11-02 | Transfer facility and transfer method |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP6794976B2 (en) |
| KR (1) | KR102535626B1 (en) |
| CN (1) | CN109928188B (en) |
| TW (1) | TWI756449B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117401417B (en) * | 2023-12-01 | 2024-03-22 | 济南诺洁清洁用品有限公司 | Conveying device for washing powder production |
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Also Published As
| Publication number | Publication date |
|---|---|
| TWI756449B (en) | 2022-03-01 |
| CN109928188A (en) | 2019-06-25 |
| JP6794976B2 (en) | 2020-12-02 |
| TW201927667A (en) | 2019-07-16 |
| JP2019106517A (en) | 2019-06-27 |
| KR20190072407A (en) | 2019-06-25 |
| KR102535626B1 (en) | 2023-05-23 |
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