CN113581764A

CN113581764A - Transfer facility and method for transferring container

Info

Publication number: CN113581764A
Application number: CN202110442828.2A
Authority: CN
Inventors: 末广尚也
Original assignee: Daifuku Co Ltd
Current assignee: Daifuku Co Ltd
Priority date: 2020-05-01
Filing date: 2021-04-23
Publication date: 2021-11-02
Also published as: JP7400616B2; JP2021176155A; KR20210134498A; TW202144254A

Abstract

The present invention provides a transfer facility (10), which is provided with: a delivery table (30) which is provided above the vapor deposition device (80) and receives the magazine (90); and a transfer machine (20) which carries in and out the material box (90) relative to the receiving platform (30), and carries the material box (90) carried in and out up and down between the receiving platform (30) and the evaporation device (80), wherein the receiving platform (30), the transfer machine (20) and the evaporation device (80) are configured at the position overlapping each other when viewed from the plane. The delivery platform (30) is supported by a rotating shaft (35) as follows: can rotate between a magazine receiving position (U) located on the lifting path of the magazine (90) and a stand standby position (T) separated from the lifting path of the magazine (90). The delivery platform (30) receives the magazine (90) at a magazine receiving position (U).

Description

Transfer facility and method for transferring container

Technical Field

The present invention relates to a transfer facility and a transfer method for transferring a container in which an article is stored to a processing apparatus for processing the article.

Background

As the transfer facility, for example, there is a facility in which: a cassette (container) containing substrates can be transferred to a processing chamber as a processing apparatus (see, for example, korean patent registration No. 10-1511963).

In the transfer facility disclosed in korean registered patent No. 10-1511963, a magazine (container) on a transport carriage unit is carried into the facility by a magazine transport unit and is placed on a support stand (receiving stand) provided above a processing chamber (processing device). The magazine placed on the support base is transferred to the processing chamber by being lowered and conveyed by a magazine transfer unit (transfer machine).

The cassettes on the processing chamber are lifted and conveyed by the cassette transfer unit and placed on the support rack. The magazine placed on the support rack is carried out to a transport carriage unit outside the device by the magazine transport unit.

Disclosure of Invention

However, in the transfer facility as described above, when the magazine transfer unit (transfer machine) moves the magazine (container) up and down, the magazine interferes with the support stand (receiving stand). Therefore, in order to avoid interference with the support rack, the magazine needs to be rotated by the magazine transfer unit, and the time required for transferring the magazine between the support rack and the processing chamber (processing apparatus) is disadvantageously long.

Further, by performing the above operation, the cartridge transfer unit cannot hold the cartridge in a positioned state, and there is a problem that the transfer accuracy of the cartridge transfer unit is deteriorated.

Therefore, an object of the present invention is to provide a transfer facility for transferring a container containing an article to a processing apparatus for processing the article, which can efficiently perform: and a container transfer between the loading/unloading port of the processing device and a receiving platform provided above the loading/unloading port of the processing device.

The problems to be solved by the present invention are as described above, and means for solving the problems are described below.

That is, the transfer facility of the present invention includes: a receiving table which is provided above a processing device for processing an article and receives a container for accommodating the article; and a transfer unit that carries the container out of or into the receiving platform, and that transfers the container carried out of or into the receiving platform between the receiving platform and a loading/unloading port of the processing device in an ascending/descending manner, wherein the receiving platform, the transfer unit, and the loading/unloading port of the processing device are arranged at positions overlapping each other in a plan view, and the receiving platform is supported by a rotating shaft provided at a position away from a position on an ascending/descending path of the container: the container can rotate between a 1 st position located on a lifting path of the container and a 2 nd position separated from the lifting path of the container, and the container is received at the 1 st position.

According to the above configuration, the cargo bed is rotated between the 1 st position located on the elevation path of the container and the 2 nd position spaced from the elevation path of the container by the rotation of the rotating shaft.

The receiving platform of the transfer facility of the present invention is rotatably supported by the rotating shaft having an axis in a vertical direction.

According to the above configuration, the cargo bed is rotated between the 1 st position located on the elevation path of the container and the 2 nd position spaced from the elevation path of the container by the rotation of the rotation shaft having the shaft center in the vertical direction.

The receiving platform of the transfer facility of the present invention is rotatably supported by the rotating shaft having a horizontal axis.

According to the above configuration, the cargo bed is rotated between the 1 st position located on the elevation path of the container and the 2 nd position spaced from the elevation path of the container by the rotation of the rotation shaft having the axis in the horizontal direction.

The receiving platform of the transfer facility of the present invention includes a positioning member that positions the container on the receiving platform by coming into contact with the container supported by the receiving platform, and a contact surface of the positioning member with the container is a curved surface.

According to the above configuration, the curved surface portion of the positioning member abuts against the container.

A transfer method according to the present invention is a transfer method for transferring a container in a transfer facility, the transfer facility including: a receiving table which is provided above a processing device for processing an article and receives a container for accommodating the article; and a transfer unit that carries the container out of or into the receiving platform, and that transfers the container carried out of or into the receiving platform between the receiving platform and a loading/unloading port of the processing device by lifting, wherein the receiving platform, the transfer unit, and the loading/unloading port of the processing device are arranged at positions overlapping each other in a plan view, and the receiving platform is supported by a rotating shaft provided at a position away from a lifting path of the container: the container lifting/lowering device is configured to be rotatable between a 1 st position located on a lifting/lowering path of the container and a 2 nd position separated from the lifting/lowering path of the container, wherein the container supported by the receiving platform located at the 1 st position is carried out from the receiving platform by the transfer device, and the receiving platform is rotated from the 1 st position to the 2 nd position by the rotation of the rotating shaft, thereby forming a lifting/lowering path for lifting/lowering the container by the transfer device, and wherein the container carried out from the receiving platform is lowered and moved to a loading/unloading port of the processing device by the transfer device.

According to the above method, the receiving platform is rotated from the 1 st position located on the lifting path of the container to the 2 nd position separated from the lifting path of the container by the rotation of the rotating shaft, the lifting path of the container by the transfer device is formed, and then the container carried out of the receiving platform is lowered and moved to the loading/unloading port of the processing apparatus.

According to the transfer facility and the transfer method of the container of the present invention, since the receiving platform can be rotated from the 1 st position located on the ascending/descending path of the container to the 2 nd position spaced from the ascending/descending path of the container, when the container is moved up and down between the receiving platform and the loading/unloading port of the processing apparatus, the receiving platform can be moved to a position avoiding the ascending/descending path of the container. Thus, when the container is moved up and down, the container does not interfere with the storage table (the container does not contact the storage table). Therefore, it is not necessary: in order to avoid interference with the receiving table, the container is rotated by the transfer device, and the like, so that the container can be efficiently transferred between the receiving table and the loading/unloading port of the processing apparatus.

Further, since the transfer device is not required to perform the above operation, the transfer device can hold the container in a positioned state, and the transfer accuracy of the transfer device can be improved.

Further, since the cargo bed is rotatably supported by the rotating shaft, the mechanism for operating the cargo bed can be configured by a simple mechanism including a bearing, a rotating shaft, a motor, and the like. Further, since the bearing, the rotating shaft, the motor, and the like are covered with the housing and the like, dust from the operating mechanism of the cargo bed can be easily blocked, and the operating mechanism can be configured by a mechanism having a small number of dust sources or a mechanism that easily blocks the dust sources.

Drawings

Fig. 1 is a plan view of a transfer facility according to the present invention.

Fig. 2 is a front view of the transfer facility.

Fig. 3 is a plan view of the transfer facility.

Fig. 4 is a front view of the above-described transfer facility in which the magazine is transferred by the transfer unit.

Fig. 5A is a schematic plan view showing the rotation of the receiving platform in the transfer facility and a schematic enlarged plan view of the guide block.

Fig. 5B is a schematic plan view showing the rotation of the receiving platform and a schematic enlarged plan view of the guide block in another embodiment of the transfer facility.

Fig. 5C is a schematic plan view showing the rotation of the receiving platform and a schematic enlarged plan view of the guide block in another embodiment of the transfer facility.

Fig. 6A is a front view of a case where a magazine is placed on a cargo bed in a transfer facility according to another embodiment of the present invention.

Fig. 6B is a front view of the above-described transfer facility in a case where the magazine is transferred by the transfer unit.

Fig. 7 is a plan view of a transfer facility according to another embodiment of the present invention.

Fig. 8A is a plan view of a cargo bed in the transfer facility according to another embodiment of the present invention.

Fig. 8B is a side view of the cargo bed in the case where the cargo bed is located at the magazine receiving position.

Fig. 8C is a side view of the cargo bed in the state where the cargo bed is located at the bed standby position.

Fig. 9A is a plan view of a cargo bed in the transfer facility according to another embodiment of the present invention.

Fig. 9B is a side view of the cargo bed in the case where the cargo bed is located at the magazine receiving position.

Fig. 9C is a side view of the cargo bed in the state where the cargo bed is located at the bed standby position.

Description of the reference numerals

10 move equipment 20 and move machine of carrying

30 receiving platform 35 rotating shaft

80 vapor deposition device (treatment device) 83 attachment/detachment port

90 material box (container) 91 base plate (article)

U magazine receiving position (1 st position) T stand standby position (2 nd position)

Detailed Description

Next, the transfer facility 10 according to the present invention will be described.

As shown in fig. 1 and 2, the transfer means 10 is a means that is additionally provided in a vapor deposition device 80 (an example of a "processing means") for performing vapor deposition processing on a substrate 91 (an example of an "article") that is a semi-finished product of a semiconductor product or a liquid crystal display element product. In the transfer facility 10, the cassette 90 (an example of a "container") containing the plate-like substrate 91 is carried into the loading/unloading port 83 of the vapor deposition device 80 from the transport carriage 86 that travels along the carriage travel rail 85 outside the transfer facility 10, and is carried out to the transport carriage 86 outside the transfer facility 10 from the loading/unloading port 83 of the vapor deposition device 80.

The magazine 90 to be transported by the transfer device 10 is formed by a substantially box-shaped member having one or both side surfaces opened, and the magazine 90 is configured such that: a plurality of substrates 91 can be housed therein. In the upper portion of the magazine 90, there are formed: a plurality of flanges 92 to be locked to the transfer unit 20 described later. The flange portion 92 is formed of a hook-shaped member provided to protrude from the upper surface of the cartridge 90. The flange 92 is provided at a plurality of locations on the upper surface of the cartridge 90.

As shown in fig. 2, the transfer device 10 is additionally provided above the vapor deposition device 80. The entire device to which the vapor deposition device 80 provided in the transfer facility 10 is added is covered with a device case 81. The device case 81 includes: the internal space of the vapor deposition device 80 can be accommodated. The device case 81 has: and a magazine carrying port 82 for carrying the magazine 90 toward the inside.

In the internal space of the device case 81, there are provided: a loading/unloading port 83 for loading the magazine 90. Specifically, the loading/unloading port 83 is provided with: directly below the magazine loading port 82 (directly below the transfer device 20 described later and on the lifting path along which the magazine 90 is lifted by the transfer device 20).

As shown in fig. 1 and 2, the vapor deposition device 80 is provided, on a side of the transfer facility 10, above: the magazine 90 on the conveyance carriage 86 is conveyed to the fork unit 40 of the transfer facility 10. The fork unit 40 carries the magazine 90 out of the conveying carriage 86 by placing the magazine 90 on the placing surface 41a of the fork 41 and moving the fork 41 forward and backward in the horizontal direction, and carries the magazine 90 carried out into the transfer device 10. The fork unit 40 carries the magazine 90 out of the transfer facility 10 and carries the magazine 90 carried out into the transport carriage 86. In this way, the magazine 90 is carried in or out from the side of the transfer device 10 above the vapor deposition device 80.

As shown in fig. 2 to 4, the transfer facility 10 includes: a transfer machine 20 for lifting and conveying the magazine 90, a push rod 25 for positioning the magazine 90 with respect to the transfer machine 20, and a receiving table 30 for receiving the magazine 90 conveyed from the fork unit 40 and the transfer machine 20.

The transfer unit 20, the receiving platform 30, and the loading/unloading port 83 of the vapor deposition device 80 are disposed at positions overlapping each other in a plan view. Specifically, the transfer unit 20, the receiving platform 30, and the loading/unloading port 83 are arranged in this order from above (the top frame side) the transfer facility 10, and the receiving platform 30 and the loading/unloading port 83 are arranged: the magazine 90 is lifted and lowered by the transfer unit 20.

The transfer unit 20 is provided above the loading/unloading port 83 and is disposed at a position overlapping the receiving platform 30 and the loading/unloading port 83 in a plan view. The transfer unit 20 carries the magazine 90, which is conveyed to the receiving table 30 by the fork unit 40, out of the receiving table 30, and moves the carried magazine 90 downward in the vertical direction, thereby carrying the magazine 90 into the loading/unloading port 83. Further, the transfer unit 20 can carry the magazine 90 out of the loading/unloading port 83 and carry the magazine 90 carried out into the storage platform 30 by moving the magazine 90 on the loading/unloading port 83 to be raised in the vertical direction.

The transfer unit 20 is located above the vapor deposition device 80, and is configured to lock the upper portion of the magazine 90 and move the magazine 90 up and down in the vertical direction, thereby transferring the magazine 90. The transfer unit 20 is mainly composed of a lifting mechanism 21 for lifting and lowering the magazine 90 and a locking mechanism 24 for locking the upper part of the magazine 90.

The elevating mechanism 21 supports the locking mechanism 24 in a state of being suspended by the rotating shaft 22B. The lifting mechanism 21 includes a 1 st lifting part 22 for lifting and lowering the locking mechanism 24 (the magazine 90), and a 2 nd lifting part 23 for lifting and lowering the 1 st lifting part 22 and the locking mechanism 24 (the magazine 90). The elevating mechanism 21 elevates the magazine 90 by 2 stages of the elevating movement performed by the 1 st elevating part 22 and the 2 nd elevating part 23. The 1 st elevating unit 22 mainly includes: a plurality of lifting belts 22A for suspending and supporting the locking mechanism 24, a rotating shaft 22B for integrally winding and unwinding the lifting belts 22A, and a 1 st motor 22C for rotating the rotating shaft 22B. The 1 st elevating unit 22 rotates the rotating shaft 22B by driving of the 1 st motor 22C, and winds and unwinds the elevating belt 22A, thereby moving the locking mechanism 24 (magazine 90) up and down. The 1 st elevating portion 22 moves the locking mechanism 24 (the magazine 90) up and down by winding and unwinding the elevating belt 22A, and therefore, fine alignment of the magazine 90 with respect to the attaching and detaching port 83 can be easily performed.

The 2 nd elevating part 23 mainly includes: a support body 23A for rotatably supporting both ends of the rotating shaft 22B, a guide body 23B for guiding the support body 23A to be movable up and down, a drive belt 23C for moving the support body 23A up and down, and a 2 nd motor 23D for rotating the drive belt 23C.

The support 23A is formed of a pair of long members, and has an upper end portion standing in the vertical direction, rotatably supporting the rotating shaft 22B, and a lower end portion guided by the guide 23B to be movable up and down. The guide body 23B is formed of a pair of long members. The drive belt 23C is rotatably mounted between the upper end and the lower end of the guide body 23B. The 2 nd motor 23D is provided at the upper end portion of the guide body 23B.

The 2 nd elevating unit 23 drives the 2 nd motor 23D to rotate the driving belt 23C, thereby moving the support 23A up and down along the guide 23B. Accordingly, the rotating shaft 22B supported by the support 23A moves up and down, and the locking mechanism 24 (magazine 90) supported by the lifting belt 22A moves up and down by the up-and-down movement. The 2 nd elevating portion 23 elevates the rotating shaft 22B between a pair of elongated guide bodies 23B extending in the vertical direction, thereby performing approximate alignment of the magazine 90 with respect to the attachment/detachment port 83.

The locking mechanism 24 is supported by the plurality of lifting belts 22A, and locks the flange portion 92 on the upper portion of the magazine 90. The locking mechanism 24 includes: when cartridge 90 is locked, flange 92 of cartridge 90 is locked to locking portion 24A on the side opposite to cartridge 90. A plurality of locking portions 24A (4 in fig. 3) are provided at positions corresponding to the flange portion 92 of the cartridge 90. The locking portion 24A is formed by a hook-shaped member that can be locked to the flange portion 92, and is configured such that the hook-shaped member can rotate in a predetermined direction. The locking mechanism 24 locks the flange portion 92 by the locking portion 24A to support the cartridge 90 in a suspended state.

The push rod 25 abuts on the magazine 90 placed on the receiving platform 30 to regulate the movement of the magazine 90 on the receiving platform 30, and positions the magazine 90 with respect to the transfer unit 20. The push rods 25 are erected on a base 26 supported by the support body 23A, and the push rods 25 are disposed in the vicinity of diagonal positions of the magazine 90 placed on the cargo bed 30 so as to sandwich the magazine 90 placed on the cargo bed 30 by the pair of push rods 25. The push rod 25 includes: a plunger body portion 25A supported by the base 26, and an arm portion 25B supported by the plunger body portion 25A and movable forward and backward in the horizontal direction. The arm portion 25B is configured to be able to contact the magazine 90. The push rods 25 bring the arm portions 25B of the pair of push rods 25 into contact with the magazine 90 so as to sandwich the magazine 90 from diagonal positions of the magazine 90 on the delivery table 30, thereby aligning the magazine 90 with a predetermined position. Here, the predetermined position means: the transfer device 20 is locked in a position capable of being raised and lowered while maintaining the posture of the magazine 90 on the receiving table 30. When the transfer unit 20 carries the magazine 90 out of the delivery table 30, the arm portion 25B is driven by the air cylinder to extend toward the magazine 90, and comes into contact with the magazine 90. When the magazine 90 is lifted by the transfer unit 20, the arm 25B is driven by the air cylinder to contract and move in a direction away from the magazine 90, thereby moving in a direction avoiding the lifting path of the magazine 90.

As shown in fig. 1 to 4, the receiving platform 30 receives: a magazine 90 carried into the transfer facility 10 by the fork unit 40, and a magazine 90 carried out from the loading/unloading port 83 by the transfer unit 20.

The cargo bed 30 supports the bottom surface of the corner of the magazine 90. Specifically, the receiving platforms 30 are disposed at 4 corners of the magazine 90, respectively, and the bottom surfaces of the 4 corners of the magazine 90 are supported by the 4 receiving platforms 30. When the receiving table 30 is located at the magazine receiving position U ("1 st position" in the example) on the path along which the transfer unit 20 moves the magazine 90 up and down (the path along which the magazine 90 moves up and down), each of the receiving tables is arranged near 4 corners of the magazine 90. Here, the cartridge receiving position U means: in the transfer facility 10, the receiving table 30 is located at a position (a position where the magazine 90 is carried in and out in the transfer facility 10) where the magazine 90 is received from the fork unit 40 or the transfer machine 20, and above the loading/unloading port 83, where a path through which the magazine 90 is conveyed by the forks 41 of the fork unit 40 intersects with a path through which the magazine 90 is lifted by the transfer machine 20.

The receiving platform 30 includes: a base part 31, a placing part 32 for placing the magazine 90, a pair of guide blocks 33 (an example of "positioning means") for positioning the magazine 90 on the placing part 32, and a stopper 37 for restricting a rotation range of the storage table 30 (the base part 31).

The base portion 31 is formed of a plate-like member arranged in the horizontal direction, and supports the placement portion 32 and the guide block 33 on the upper surface thereof. One end of the base portion 31 is fixed to a rotating shaft 35 via a bearing 34, and is rotated in the horizontal direction by rotation of the rotating shaft 35. The bearing 34 is fixed to the base 26.

The rotating shaft 35 extends in the vertical direction at the axial center thereof: a position (a position away from the magazine receiving position U) on the lifting path where the magazine 90 is lifted by the transfer unit 20. The rotating shaft 35 is driven by a motor 36 provided at a lower end thereof.

Here, as a mechanism for operating the cargo bed (base part), a slide mechanism for sliding the cargo bed in a horizontal direction is exemplified, but in this slide mechanism, in addition to a motor for sliding the cargo bed, a guide rail or the like for driving the cargo bed to slide is required, and therefore, the operating mechanism of the cargo bed becomes large. Further, the sliding mechanism slides the cargo bed, and thus is a mechanism having a large dust emission source. Further, in order to seal the dust from the sliding mechanism, it is necessary to cover the motor and the like with a casing and the like, and also cover the guide rail and the like, and therefore, the dust source cannot be easily sealed.

On the other hand, since the mechanism for operating the receiving platform 30 of the transfer facility 10 is a turning mechanism including the bearing 34, the turning shaft 35, and the motor 36, the operating mechanism of the receiving platform 30 can be configured by a simple mechanism. Further, since the cargo bed 30 is operated by rotating the rotating shaft 35, the above-described rotating mechanism is a mechanism with less dust sources. Further, the rotating mechanism can be covered with the bearing 34, the rotating shaft 35, and the motor 36 by a housing or the like, whereby dust from the rotating mechanism can be blocked, and the dust source can be easily blocked.

The placement portion 32 is formed of a columnar member on the top of which the magazine 90 can be placed, and is provided upright on the other end portion (end portion on the opposite side to the side where the rotation shaft 35 is provided) of the base portion 31. The mounting portion 32 is formed with: a placement surface 32a for placing the magazine 90 on the top thereof.

The guide block 33 is formed of a columnar member having a substantially circular cross section, and is provided upright on the other end of the base portion 31. The guide block 33 positions the magazine 90 on the placement portion 32 and prevents the magazine 90 from falling off the placement portion 32. When the magazine 90 is placed on the placement portion 32, the guide blocks 33 are arranged at positions where the corners of the magazine 90 are sandwiched by the pair of guide blocks 33. The top of the guide block 33 is formed higher than the top of the placement portion 32 (placement surface 32 a). The guide block 33 has: the peripheral end of the top portion is formed as an inclined portion 33a (see fig. 5A to 5C).

The side surface of the guide block 33 abuts against the side surface of the corner of the magazine 90, thereby positioning the magazine 90 on the placement portion 32 and preventing the magazine 90 from falling off from the placement portion 32. When the magazine 90 to be placed on the placement portion 32 is dropped on the top of the guide block 33, the magazine 90 slides down the inclined portion 33a of the guide block 33, and the guide block 33 guides the magazine 90 to a predetermined position on the placement portion 32. When the magazine 90 is held by the guide block 33 in a state of being dropped on the top of the guide block 33, it is detected that an abnormality has occurred in the transfer of the magazine 90 to the placement portion 32.

As shown in fig. 5A, the contact surface 33b of the guide block 33 that contacts the side surface of the corner of the magazine 90 is formed by a curved surface along the rotational orbit K of the cargo bed 30 around the rotational axis 35. Specifically, the outer circumferential surface of the guide block 33 constituting the abutment surface 33b of the guide block 33 is formed with: along the curve of the rotation trajectory K. In this way, the abutment surface 33b of the guide block 33 is made: even when the distance between the cargo bed 30 and the magazine 90 varies due to the rotation of the cargo bed 30 about the rotation shaft 35 along the curved surface of the rotation orbit K of the cargo bed 30 about the rotation shaft 35, the magazine 90 can be positioned at an appropriate position on the placement portion 32. Further, as long as the contact surface 33B of the guide block 33 is formed into a curved surface, the contact surface 33B of the guide block 33 may be configured by forming a columnar member having a curved cross section with an arc shape along the turning track K of the cargo bed 30 (base part 31), as in the guide block 33A shown in fig. 5B, for example. As shown in the guide block 33B of fig. 5C, the contact surface 33B of the guide block 33 may be formed by a plate material formed in a curved shape along the turning rail K of the cargo bed 30 (base portion 31).

As shown in fig. 3, the receiving table 30 is rotatable in the horizontal direction between a magazine receiving position U (an example of "1 st position") and a table standby position T (an example of "2 nd position") by rotating the rotating shaft 35 in accordance with the vertical movement of the magazine 90 by the transfer unit 20. Here, the stage standby position T means: the receiving platform 30 is not in contact with the magazine 90 that is moved up and down by the transfer unit 20, and the receiving platform 30 is not in contact with the forks 41 of the fork unit 40 when the fork unit 40 conveys the magazine 90 to the magazine receiving position U.

When the receiving table 30 receives the magazine 90 from the fork unit 40 or the transfer unit 20, the rotation shaft 35 rotates to the magazine receiving position U. Specifically, the base portion 31 of the cargo bed 30 is rotated to: the placement surface 32a of the placement portion 32 of the cargo bed 30 is in contact with the bottom surface of the corner of the magazine 90 located at the magazine receiving position U. On the other hand, when the transfer unit 20 moves the magazine 90 up and down, the receiving table 30 is located at the table standby position T apart from the path of the magazine 90 up and down. Specifically, the base portion 31 of the cargo bed 30 is rotated to: the placement portion 32 and the guide block 33 of the delivery table 30 are not in contact with the magazine 90 located at the magazine receiving position U.

The cargo bed 30 limits the range of rotation of the base portion 31 by the stopper 37. Specifically, the stopper 37 stops the base portion 31 that rotates in the horizontal direction at the cartridge receiving position U and the table standby position T, thereby limiting the range of rotation of the base portion 31 between the cartridge receiving position U and the table standby position T. The stopper 37 is composed of a pair of movable side blocks 37A fixed to the base portion 31 (movable side) and a fixed side stopper 37B fixed to the base 26 (fixed side).

The movable side block 37A is a member horizontally protruding from a side of the base portion 31, and rotates together with the rotation of the base portion 31.

The fixed-side stopper 37B is a member that protrudes upward from the base 26, and brakes the rotation of the base portion 31 by contacting one of both ends of the fixed-side stopper with the movable-side block 37A.

When the base portion 31 is rotated from the cartridge receiving position U to the stand standby position T, one movable side piece 37A of the pair of movable side pieces 37A comes into contact with one end portion of the fixed side stopper 37B, and the stopper 37 stops the base portion 31 at the stand standby position T. On the other hand, when the base part 31 is rotated from the stand standby position T to the cartridge receiving position U, the other movable side piece 37A of the pair of movable side pieces 37A comes into contact with the other end of the fixed side stopper 37B, whereby the stopper 37 stops the base part 31 at the cartridge receiving position U. In this way, the pair of movable side blocks 37A abut against the fixed side stoppers 37B, and the range of rotation of the base portion 31 is restricted between the cartridge receiving position U and the table standby position T, whereby the base portion 31 can be prevented from rotating outside the range of rotation.

Next, a method of transferring the magazine 90 on the transfer device 10 will be described.

As shown in fig. 1, when the magazine 90 is transported to a predetermined position by the transport carriage 86, the fork unit 40 can place and support the magazine 90 on the transport carriage 86 on the fork 41 by horizontally moving the fork 41 with respect to the transport carriage 86.

When the magazine 90 is placed on the forks 41, the fork unit 40 rotates the forks 41 in a state where the magazine 90 is placed on the forks 41. The fork unit 40 moves the forks 41 horizontally above the receiving platform 30 of the transfer facility 10. At this time, the receiving table 30 is rotated to the magazine receiving position U by the rotation of the rotating shaft 35. Specifically, as shown in fig. 3, the base portion 31 of the delivery table 30 is rotated in the horizontal direction by the rotation of the rotation shaft 35, and the placement portion 32 and the guide block 33 of the delivery table 30 are thereby rotated from the table standby position T to the magazine receiving position U. The base portion 31 of the cargo bed 30 is stopped at the cartridge receiving position U by one of the pair of movable side pieces 37A contacting one end of the fixed side stopper 37B.

As shown in fig. 2, when the fork unit 40 transports the magazine 90 to the upper side of the receiving table 30, the fork 41 is lowered and the magazine 90 is placed on the receiving table 30. Accordingly, the magazine 90 is transferred from the fork unit 40 to the placement portion 32 of the receiving table 30. Here, the guide block 33 of the cargo bed 30 roughly positions the magazine 90 on the placement portion 32 by coming into contact with the magazine 90.

When the magazine 90 is loaded on the receiving table 30, the fork unit 40 horizontally moves the forks 41 to a position away from the receiving table 30. Then, the arm portion 25B of the push rod 25 is extended toward the magazine 90 and abuts against a corner of the magazine 90. Accordingly, the magazine 90 is held diagonally by the pair of arms 25B.

The push rod 25 moves the magazine 90 around by extending and contracting the pair of arm portions 25B. Furthermore, the push rod 25 moves the magazine 90: the locking portion 24A (locking mechanism 24) of the transfer unit 20 can lock the position of the flange portion 92 of the magazine 90. That is, the pusher 25 performs positioning of the magazine 90 with respect to the elevation position of the transfer unit 20 by moving the magazine 90 all around.

When the positioning of the magazine 90 with respect to the elevation position of the transfer unit 20 is completed, the 2 nd elevation part 23 of the transfer unit 20 is driven, and the locking mechanism 24 of the transfer unit 20 is lowered to a position above the magazine 90. Then, the locking portion 24A of the locking mechanism 24 rotates in a predetermined direction, and the locking portion 24A locks the flange portion 92 of the cartridge 90. Accordingly, the magazine 90 can be moved up and down by the transfer unit 20.

The push rod 25 contracts and moves in a direction of separating the arm 25B from the magazine 90 (a direction of avoiding the ascending/descending path of the magazine 90).

When the arm portion 25B contracts, the rotation shaft 35 is rotated by driving of the motor 36, and thereby the cargo bed 30 is rotated in the horizontal direction. Specifically, as shown in fig. 3, the base portion 31 of the delivery table 30 is horizontally rotated from the cartridge receiving position U toward the table standby position T. The base portion 31 of the cargo bed 30 is stopped at the bed standby position T by the other movable side block 37A of the pair of movable side blocks 37A coming into contact with the other end portion of the fixed side stopper 37B. Accordingly, the placement portion 32 and the guide block 33 of the cargo bed 30 move in a direction avoiding the lifting path of the magazine 90, and a lifting path for lifting the magazine 90 by the transfer unit 20 is formed at a position where the magazine 90 is placed on the placement portion 32 of the cargo bed 30.

When the base portion 31 of the storage table 30 is separated from the cartridge receiving position U, the 2 nd elevating portion 23 of the transfer unit 20 is driven to lower the locking mechanism 24 that locks the cartridge 90 toward the vapor deposition device 80. Specifically, the drive belt 23C is operated by driving the 2 nd motor 23D, and the support body 23A is lowered along the guide body 23B by operating the drive belt 23C. Then, the rotating shaft 22B supported by the support 23A is lowered together with the support 23A, and by this lowering, the locking mechanism 24 (magazine 90) supported by the lifting belt 22A is lowered to a predetermined position.

As shown in fig. 4, when the locking mechanism 24 is lowered to the predetermined position, the driving of the 2 nd raising/lowering unit 23 is stopped, and the 1 st raising/lowering unit 22 is driven. Accordingly, the cartridge 90 locked by the locking mechanism 24 is transferred to the loading/unloading port 83 of the vapor deposition device 80. Specifically, when the driving of the 2 nd motor 23D is stopped, the 1 st motor 22C is driven to rotate the rotation shaft 22B. Accordingly, the lifting belt 22A suspending and supporting the locking mechanism 24 is wound downward by the rotation shaft 22B, and the locking mechanism 24 (magazine 90) is lowered in accordance with the winding.

On the other hand, in the vapor deposition device 80, when the processing for the substrate 91 is completed, the locking portion 24A of the locking mechanism 24 of the transfer unit 20 locks the flange portion 92 of the cartridge 90. Then, the 1 st motor 22C is driven to rotate the rotation shaft 22B. Accordingly, the lifting belt 22A suspending and supporting the locking mechanism 24 is wound upward by the rotation shaft 22B, and the locking mechanism 24 is lifted up in accordance with the winding, and the magazine 90 is carried out from the loading/unloading port 83. When the locking mechanism 24 is raised to a predetermined position, the 1 st motor 22C is stopped from being driven and the 2 nd motor 23D is driven. Accordingly, the drive belt 23C operates, and the support body 23A is raised along the guide body 23B by the operation of the drive belt 23C. The turning shaft 22B supported by the support 23A is raised together with the support 23A, and the locking mechanism 24 supported by the lifting belt 22A is raised by the raising.

When the magazine 90 locked by the locking mechanism 24 is raised above the receiving table 30, the receiving table 30 is rotated from the table standby position T to the magazine receiving position U by the rotation of the rotating shaft 35. Specifically, as shown in fig. 3, the base portion 31 of the delivery table 30 is rotated in the horizontal direction by the rotation of the rotation shaft 35, and thereby the placement portion 32 and the guide block 33 of the delivery table 30 are moved from the table standby position T to the magazine receiving position U. The base portion 31 of the cargo bed 30 is stopped at the cartridge receiving position U by one of the pair of movable side pieces 37A coming into contact with one end of the fixed side stopper 37B through the movable side piece 37A.

When the delivery table 30 is rotated to the magazine receiving position U, the 2 nd motor 23D is driven to lower the locking mechanism 24. Accordingly, as shown in fig. 2, the magazine 90 is lowered and placed on the placement portion 32 of the cargo bed 30. Here, the guide block 33 of the cargo bed 30 roughly positions the magazine 90 on the placement portion 32 by coming into contact with the magazine 90. When the cartridge 90 is placed on the placement portion 32, the locking portion 24A of the locking mechanism 24 rotates in a predetermined direction, and the locking of the flange portion 92 by the locking portion 24A is released. When the locking of the flange portion 92 by the locking portion 24A is released, the fork unit 40 extends the bendable arm 42, and horizontally moves the fork 41 to the cartridge receiving position U. Next, the fork unit 40 raises the forks 41, and thereby supports the magazine 90 placed on the cargo bed 30 on the forks 41. As shown in fig. 1, the fork unit 40 bends the flexible arms 42 and rotates the forks 41 on which the magazine 90 is placed. Then, the fork unit 40 extends the flexible arm 42, horizontally moves the fork 41 to the transfer carriage 86, and transfers the magazine 90 on the fork 41 to the transfer carriage 86.

As described above, the transfer facility 10 according to the present invention can rotate the receiving platform 30 from the magazine receiving position U located on the elevating path of the magazine 90 to the platform standby position T spaced apart from the elevating path of the magazine 90, and therefore, when the magazine 90 is moved up and down between the receiving platform 30 and the loading/unloading port 83 of the vapor deposition device 80, the receiving platform 30 can be moved to a position avoiding the elevating path of the magazine 90. Therefore, when the magazine 90 is moved up and down, the magazine 90 does not interfere with the cargo bed 30 (the magazine 90 does not contact the cargo bed 30). Therefore, it is not necessary to: in order to avoid interference with the receiving table 30, the magazine 90 is rotated by the transfer unit 20, and the magazine 90 can be efficiently transferred between the receiving table 30 and the loading/unloading port 83 of the vapor deposition device 80. Further, since the transfer unit 20 is not required to perform the above operation, the transfer unit 20 can hold the magazine 90 in a positioned state, and the transfer accuracy of the transfer unit 20 can be improved.

Further, since the cargo bed 30 is rotatably supported by the rotating shaft 35, the mechanism for operating the cargo bed 30 can be configured by a simple mechanism including the bearing 34, the rotating shaft 35, and the motor 36. Further, since the bearing 34, the rotating shaft 35, and the motor 36 are covered with a case or the like, dust from the operating mechanism of the cargo bed 30 can be easily blocked, and the operating mechanism can be configured by a mechanism having a small number of dust sources or a mechanism that easily blocks the dust sources.

In the present embodiment, the base portion 31 of the cargo bed 30 is rotated in the horizontal direction by the rotating shaft 35 whose axial center is in the vertical direction, and the placement portion 32 of the cargo bed 30 is rotated between the magazine receiving position U and the bed standby position T, but the present invention is not limited to this, and the placement portion 32A and the guide block 33A may be rotated by the rotating shaft 35A whose axial center is in the horizontal direction as in the cargo bed 30A shown in fig. 6A to 8C, and the horizontal base portion 31A is sprung upward. In this case, one end of the base portion 31A of the horizontal cargo bed 30A is fixed to the pivot shaft 35A via the bearing 34A, and the base portion 31A of the horizontal cargo bed 30A is sprung upward around the pivot shaft 35A by the pivot of the pivot shaft 35A. The bearing 34A is fixed to the base 26, and supports the base portion 31A from below. The rotating shaft 35A extends in a horizontal direction at the axis thereof: the motor 36A is provided at the other end of the rotating shaft 35A from a position (position away from the magazine receiving position U) on the lifting path of the transfer unit 20 for lifting the magazine 90.

As shown in fig. 8B and 8C, in the cargo bed 30A, the base portion 31A held horizontally by the bearing 34A is sprung upward by the rotation of the rotation shaft 35A, and the placement portion 32A and the guide block 33A located at the cartridge receiving position U are rotated to the bed standby position T in a state of being sprung upward.

The cargo bed 30A is restricted in the range of rotation of the base portion 31A by fixed-

side stoppers

38A and 38B (stoppers 38) fixed to the base 26 (fixed side). Specifically, as shown in fig. 8B, the 1 st fixed-side stopper 38A abuts against the lower surface of the base portion 31A located at the cartridge receiving position U, whereby the base portion 31A is braked at the cartridge receiving position U. As shown in fig. 8C, the 2 nd fixing-side stopper 38B abuts against the upper surface of the base portion 31A that bounces from the cartridge receiving position U to the table standby position T, whereby the base portion 31A is braked at the table standby position T. The 1 st fixed-side stopper 38A has a function of braking the base portion 31A at the cartridge receiving position U, and a function of supporting a load of the base portion 31A.

As in the case of the storage table 30B shown in fig. 9A to 9C, the placing section 32A and the guide blocks 33A and 33B may be rotated by tilting the horizontal base section 31A downward by the rotating shaft 35A whose axis is in the horizontal direction. As shown in fig. 9B and 9C, the delivery table 30B is rotated by the rotating shaft 35A, the base portion 31A held horizontally by the bearing 34A is tilted downward, and the placement portion 32A and the guide blocks 33A and 33B located at the cartridge receiving position U are rotated to the table standby position T in a state of being tilted downward.

The cargo bed 30B is restricted in the range of rotation of the base portion 31A by fixed-

side stoppers

39A and 39B (stoppers 39) fixed to the base 26 (fixed side). Specifically, as shown in fig. 9B, the 1 st fixed-side stopper 39A abuts against a side surface (a side surface on the bearing 34 side) of the base portion 31A located at the cartridge receiving position U, whereby the base portion 31A is stopped at the cartridge receiving position U. As shown in fig. 9C, the 2 nd fixed-side stopper 39B abuts against the lower surface of the base portion 31A that has fallen from the cartridge receiving position U toward the stand standby position T, whereby the base portion 31A is braked at the stand standby position T.

In the cargo bed 30B, the contact surface 33B of the guide block 33B that contacts the side surface of the corner of the magazine 90 is formed by a curved surface that is a surface along the rotational orbit K of the cargo bed 30B. Specifically, the top of the guide block 33B constituting the contact surface 33B of the guide block 33B is inclined in a curved shape.

In the present embodiment, the base portion 31 of the cargo bed 30 is rotated, but the present invention is not limited thereto, and the placement portion 32 of the cargo bed 30 may be directly rotated. That is, the portion of the storage box 90 on the cargo bed 30 may be directly rotated. In this case, the cargo bed 30 is constituted only by the loading unit 32, and the loading unit 32 is rotated by rotating the rotating shaft 35 provided in the loading unit 32.

In the present embodiment, the article to be transferred by the transfer facility 10 is not limited to the magazine 90, and may be any article as long as it can be transferred between the receiving platform 30 and the transfer machine 20.

In the present embodiment, the transfer unit 20 moves the magazine 90 up and down while the locking portion 24A of the transfer unit 20 locks the hook-shaped flange portion 92 on the upper portion of the magazine 90, but the present invention is not limited to this, and the magazine 90 may be moved up and down while the transfer unit 20 holds the side surface of the magazine 90.

In the present embodiment, the transfer unit 20 moves the magazine 90 up and down by 2 stages of up-and-down movement performed by the 1 st elevating unit 22 and the 2 nd elevating unit 23, but the present invention is not limited to this, and the magazine 90 may be moved up and down by only one of the 1 st elevating unit 22 and the 2 nd elevating unit 23, that is, by 1 stage of up-and-down movement. The first elevating unit 22 raises and lowers the magazine 90 by winding and unwinding the elevating belt 22A attached to the locking mechanism 24 around the rotating shaft 22B, but is not limited to this, and the magazine 90 may be raised and lowered by raising and lowering a support bracket suspending and supporting the locking mechanism 24 by a ball screw.

In the present embodiment, the transfer means 10 is a means provided in addition to the vapor deposition device 80 that performs the vapor deposition process on the substrate 91, but is not limited to this, and may be a means provided in addition to the vapor deposition device 80 as long as it is a transfer means for transferring a container containing an article to a processing device that processes the article.

In the present embodiment, the rotation range of the cargo bed 30 is limited by the stopper 37, but the rotation range of the cargo bed 30 is not limited to this, and the rotation range of the cargo bed 30 may be limited by detecting the position of the cargo bed 30 (base part 31) by a sensor or the like without providing the stopper 37.

Claims

1. A transfer facility is provided with:

a receiving platform which is arranged above a processing device for processing articles and receives a container for accommodating the articles; and

a transfer unit for carrying the container out of or into the receiving table and for vertically moving and conveying the container carried out of or into the receiving table and a loading/unloading port of the processing apparatus,

the receiving platform, the transfer machine, and the loading/unloading port of the processing device are arranged at positions overlapping each other in a plan view,

it is characterized in that the preparation method is characterized in that,

the cargo receiving platform is supported by a rotating shaft arranged at a position separated from the lifting path of the container: the container can rotate between a 1 st position located on a lifting path of the container and a 2 nd position separated from the lifting path of the container, and the container is received at the 1 st position.

2. The transfer facility according to claim 1,

the cargo bed is rotatably supported by the rotating shaft having an axis in a vertical direction.

3. The transfer facility according to claim 1,

the cargo bed is supported to be rotatable by the rotating shaft having an axis in a horizontal direction.

4. Transfer facility according to one of claims 1 to 3,

the receiving table includes a positioning member that is brought into contact with the container supported by the receiving table to position the container on the receiving table,

the abutting surface of the positioning component abutting against the container is a curved surface.

5. Transfer facility according to one of claims 1 to 4,

the cargo receiving platform is provided with a stop piece for limiting the rotation range of the cargo receiving platform.

6. A method for transferring a container in a transfer facility, the transfer facility comprising: a receiving platform which is arranged above a processing device for processing articles and receives a container for accommodating the articles; and a transfer machine for carrying the container out of or into the receiving table and for vertically moving and conveying the container carried out of or into the receiving table between the receiving table and a loading/unloading port of the processing apparatus,

the receiving platform, the transfer machine, and the loading/unloading port of the processing device are disposed at positions overlapping each other in a plan view,

it is characterized in that the preparation method is characterized in that,

supporting the receiving table by a rotating shaft provided at a position apart from the elevating path of the container, as: capable of rotating between a 1 st position located on the lifting path of the container and a 2 nd position spaced from the lifting path of the container,

carrying out the container supported by the receiving platform located at the 1 st position from the receiving platform by the transfer machine,

the receiving platform is rotated from the 1 st position to the 2 nd position by the rotation of the rotating shaft, thereby forming a lifting path for the transfer machine to lift the container,

the container carried out of the receiving platform is lowered and moved to a loading/unloading port of the processing apparatus by the transfer machine.