TWI388479B - Warehousing - Google Patents

Warehousing Download PDF

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Publication number
TWI388479B
TWI388479B TW095142590A TW95142590A TWI388479B TW I388479 B TWI388479 B TW I388479B TW 095142590 A TW095142590 A TW 095142590A TW 95142590 A TW95142590 A TW 95142590A TW I388479 B TWI388479 B TW I388479B
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Taiwan
Prior art keywords
storage
conveyor belt
conveyor
entrance
roller
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TW095142590A
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Chinese (zh)
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TW200734256A (en
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Muratec Automation Co Ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02Storage devices
    • B65G1/04Storage devices mechanical
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769Storage means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02Storage devices
    • B65G1/04Storage devices mechanical
    • B65G1/0407Storage devices mechanical using stacker cranes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Description

倉儲Warehousing

本發明關於一種在液晶顯示裝置或半導體裝置等之製造程序中,暫時保管等待製程之卡匣或Front Opening Unified Pod(FOUP)等的倉儲。The present invention relates to a storage for temporarily storing a card waiting for a process or a Front Opening Unified Pod (FOUP) in a manufacturing process of a liquid crystal display device or a semiconductor device.

此種倉儲有在專利文獻1中所揭示者。該構成如本案之圖9所示,倉儲10具備有:料架12;存取機27(storage/retrieve machine;stacker crane,堆疊起重機);出入口(port)14;及外壁15等;作為主要的構成。存取機27具備有:移載機器人20;一對支柱25;一對平台升降手段26;一組車輪29;及一對軌道28;作為主要之構成。又,上述移載機器人20由:底座21;旋轉台22;臂23;及夾爪24所構成。料架12配置於存取機27之兩側,而可載置保管收納有液晶顯示裝置用玻璃基板或半導體裝置用矽基板等之卡匣11。Such storage is disclosed in Patent Document 1. The configuration is as shown in FIG. 9 of the present invention, and the storage 10 is provided with: a rack 12; a storage/retrieve machine; a stacker crane; a port 14; an outer wall 15; Composition. The access machine 27 is provided with a transfer robot 20, a pair of pillars 25, a pair of platform lifting means 26, a set of wheels 29, and a pair of rails 28; Further, the transfer robot 20 is composed of a base 21, a rotary table 22, an arm 23, and a jaw 24. The rack 12 is disposed on both sides of the access machine 27, and can store and store the cassette 11 for storing a glass substrate for a liquid crystal display device or a substrate for a semiconductor device.

在此構成中,卡匣11往倉儲10的搬入如以下方式進行。亦即,未圖示之搬送台車搭載卡匣11到達出入口14,使用搬送台車所裝備的移載手段將卡匣11載置於出入口14。接著,搭載於出入口14上的卡匣11被搭載於裝備在存取機27中的移載機器人20,被搬運到由未圖示之系統控制器所指示的料架位置,並載置於該料架12上。又,卡匣11從倉儲10的搬出(將卡匣11從料架12取出而移載至搬送台車的作業)以與上述相反的步驟進行。In this configuration, the loading of the cassette 11 into the storage 10 is performed as follows. In other words, the transporting cart mounting cassette 11 (not shown) reaches the entrance and exit 14, and the cassette 11 is placed on the entrance and exit 14 by the transfer means provided by the transporting cart. Then, the cassette 11 mounted on the inlet and outlet 14 is mounted on the transfer robot 20 provided in the access machine 27, and is transported to a rack position instructed by a system controller (not shown) and placed on the cassette. On the rack 12. Further, the cassette 11 is carried out from the storage 10 (the operation of taking out the cassette 11 from the rack 12 and transferring it to the transporting cart) in the reverse order.

(專利文獻1)日本專利特開2005-277326號公報(Patent Document 1) Japanese Patent Laid-Open Publication No. 2005-277326

又,專利文獻2揭示有其他構成的倉儲,在該專利文獻2中構成為:製作成與倉儲內部料架相同構造的艙櫃(container)由皮帶式輸送帶(belt conveyer)搬入.搬出出到設於存取機(stacker,其被設置於倉儲內部)之兩側的一對出入口,由設置於倉儲內的一台存取機器人(stacker robot),將卡匣搬入出至該艙櫃之料架,將從該等艙櫃搬入出的該卡匣搬入出至配置在存取機器人之兩側的倉儲側。Further, Patent Document 2 discloses a storage having another configuration. In Patent Document 2, a container which is formed in the same structure as a storage internal rack is carried by a belt conveyer. Moving out to a pair of entrances and exits provided on the sides of the access machine (stacker, which is placed inside the storage), and moving the cassette into and out of the cabin by a stacker robot installed in the storage The magazines of the cabinets carry the cassettes that are carried in and out of the cabinets into the storage side disposed on both sides of the access robot.

(專利文獻2)日本專利特開2003-163250號公報(Patent Document 2) Japanese Patent Laid-Open Publication No. 2003-163250

然而,上述專利文獻1和2之倉儲中,存取機器人為將卡匣搬入出於配置在存取機兩側的料架之構成,所以必須具備至少180°之旋轉功能(圖9之構成中的旋轉平台22)。例如在被搬送物為液晶顯示裝置用之玻璃基板的情況,被搬送物之卡匣重量達數百公斤以上,因而在機器人旋轉時需要較大的驅動力矩。因此,為實現此而使驅動源大型化、高重量化,而對存取機之精簡化、輕量化造成障礙。However, in the storage of Patent Documents 1 and 2, the access robot is configured to carry the cassette into the racks disposed on both sides of the access machine, and therefore must have a rotation function of at least 180° (in the configuration of Fig. 9) Rotating platform 22). For example, when the object to be conveyed is a glass substrate for a liquid crystal display device, since the weight of the object to be conveyed is several hundred kilograms or more, a large driving torque is required when the robot rotates. Therefore, in order to achieve this, the drive source is increased in size and weight, and the access machine is simplified and lighter.

又,伴隨裝置之大型化、高重量化,裝置之作業速度亦容易鈍化,為迴避此種情況反而需要更加增強驅動力,因此驅動源又更陷於大型化、高重量化之矛盾。因此,在由習知技術發展而產生裝置之大型化下,無法避免裝置作動效率之降低。Further, with the increase in size and weight of the device, the operating speed of the device is also easily passivated, and in order to avoid such a situation, it is necessary to further enhance the driving force. Therefore, the driving source is further confined to a large size and a high weight. Therefore, under the enlargement of the device generated by the development of the conventional technology, the reduction in the efficiency of the device operation cannot be avoided.

本案發明係有鑑於以上實情而完成者,其目的在於提供一種倉儲,在搬送大型液晶基板等卡匣時,可迴避存取機之大型化、高重量化,同時具有高移載速度和高作業效率。The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a storage device that can avoid large-scale and high-weight accessors when transporting cassettes such as large-sized liquid crystal substrates, and has high transfer speed and high work. effectiveness.

本發明欲解決之課題如上,其次說明用以解決該課題的手段及其效果。The problem to be solved by the present invention is as described above, and the means for solving the problem and the effects thereof will be described next.

根據本發明之第1觀點,提供一種如以下構成的倉儲。亦即,具備有多個可保管被搬送物的保管架,其排列在垂直方向及水平方向,同時具備有:軌道,被與上述保管架平行舖設;存取機,可在該軌道上移動;及出入口,用來對倉儲進行被搬送物之入出庫。上述存取機具備有:移載手段,具備可在垂直方向升降自如的平台,與設置於該平台上且可在對向於上述保管架之狀態下進退自如的線性滑動叉;及滾子式輸送帶,從該移載手段承接上述被搬送物並交接給上述出入口。According to a first aspect of the present invention, a storage having the following configuration is provided. That is, the storage rack having a plurality of objects to be transported is arranged in the vertical direction and the horizontal direction, and is provided with a rail which is placed in parallel with the storage rack, and the access machine is movable on the rail; And the entrance and exit, which is used to store and transport the goods to and from the warehouse. The access device includes: a transfer device, a platform that can be lifted and lowered in a vertical direction, and a linear slide fork that is disposed on the platform and can move forward and backward in a state opposite to the storage rack; and a roller type The conveyor belt receives the conveyed object from the transfer means and delivers the conveyance to the entrance.

如此在存取機之移載手段中,採用線性滑動叉,而省略旋轉功能,藉此可達到小型化、輕量化,同時可輕快地動作,而可縮短入出庫作業之時間。又,即使在出入口配置於保管架之相反側的情況下,亦可藉由滾子式輸送帶和出入口而交接被搬送物。因此,可發揮與具有如專利文獻1所示之旋轉功能的移載手段實質等同的效果。In the transfer device of the access machine, the linear sliding fork is used, and the rotation function is omitted, whereby the miniaturization and weight reduction can be achieved, and the operation can be performed briskly, and the time for entering and leaving the warehouse can be shortened. Moreover, even when the entrance and exit are disposed on the opposite side of the storage rack, the object to be conveyed can be delivered by the roller conveyor and the entrance and exit. Therefore, it is possible to exert an effect substantially equivalent to the transfer means having the rotation function as shown in Patent Document 1.

在上述之倉儲中,上述存取機之移載手段最好構成為可使上述線性滑動叉之被搬送物載置面下降至低於上述滾子式輸送帶之滾子上面的位置處。In the above-described storage, it is preferable that the transfer means of the access machine is configured to lower the object placement surface of the linear slide fork to a position lower than the roller upper surface of the roller conveyor.

藉由該構成,因為僅單純使移載手段下降就可使滾子式輸送帶承接被搬送物,所以可實現更簡素的構成。又,可將被搬送物快速從移載手段往滾子式輸送帶轉送,因此可更加縮短被搬送物入出庫時所必要的時間。According to this configuration, since the roller conveyor can receive the conveyed object simply by lowering the transfer means, a simpler configuration can be realized. Further, since the object to be transported can be quickly transferred from the transfer means to the roller conveyor, the time required for the conveyed material to enter and exit the warehouse can be further shortened.

根據本發明之第2觀點,提供一種如下構成的倉儲。亦即,具備有多個可保管被搬送物的保管架,其排列在垂直方向及水平方向,同時具備有:軌道,與上述保管架平行舖設;多個存取機,可在該軌道上移動;及出入口,用來對倉儲進行被搬送物之入出庫。上述軌道以構成互相平行且鄰接之多個移動路徑的方式舖設,同時上述多個存取機可互相獨立地在各移動路徑上移動。上述保管架配置在上述多個移動路徑之兩側。上述各個存取機具備有:移載手段,具備可在垂直方向升降自如的平台,與設置於該平台上而可在對向於上述保管架之狀態下進退自如的線性滑動叉;及滾子式輸送帶,從該移載手段承接上述被搬送物並交接給上述出入口。在上述移動路徑之一上移動的存取機之線性滑動叉,其配置方向與在與其鄰接之上述移動路徑上移動的存取機之線性滑動叉的配置方向相反。According to a second aspect of the present invention, a storage having the following configuration is provided. That is, the storage rack having a plurality of objects to be transported is arranged in the vertical direction and the horizontal direction, and is provided with a rail which is laid in parallel with the storage rack, and a plurality of access machines are movable on the rail And the entrance and exit, used to carry out the storage of the goods to and from the warehouse. The track is laid so as to form a plurality of moving paths that are parallel to each other and adjacent to each other, and the plurality of access machines are movable independently of each other on each moving path. The storage rack is disposed on both sides of the plurality of movement paths. Each of the access machines includes a transfer means, a platform that can be lifted and lowered in a vertical direction, and a linear slide fork that can be moved forward and backward in a state of being opposed to the storage rack, and a roller The conveyance belt receives the conveyed object from the transfer means and delivers the conveyance to the inlet and outlet. The linear slide fork of the access machine that moves on one of the above-described moving paths is arranged in a direction opposite to the arrangement direction of the linear slide fork of the access machine that moves on the moving path adjacent thereto.

如此構成之存取機之移載手段中,亦採用線性滑動叉,而省略旋轉功能,藉此可達到裝置之小型化、輕量化,同時可使裝置輕快地動作,而可縮短入出庫作業之時間。又,即使在出入口配置於保管架之相反側的情況下,亦可藉由滾子式輸送帶和出入口而交接被搬送物。更可提供收容能力高,入出庫所須作業時間短,並且設備成本低廉的倉儲。In the transfer device of the access device configured as described above, the linear sliding fork is also used, and the rotation function is omitted, whereby the device can be reduced in size and weight, and the device can be operated lightly, and the loading and unloading operation can be shortened. time. Moreover, even when the entrance and exit are disposed on the opposite side of the storage rack, the object to be conveyed can be delivered by the roller conveyor and the entrance and exit. It can also provide warehousing with high storage capacity, short working time for entering and leaving the warehouse, and low equipment cost.

在上述倉儲中,上述存取機之移載手段最好構成為可使上述線性滑動叉之被搬送物載置面下降至低於上述滾子式輸送帶之滾子上面的位置處。In the above storage, it is preferable that the transfer means of the access machine is configured to lower the object placement surface of the linear slide fork to a position lower than the roller upper surface of the roller conveyor.

藉由該構成,因為僅單純使移載手段下降就可使滾子式輸送帶承接被搬送物,所以可實現更簡素的構成。又,可將被搬送物快速從移載手段往滾子式輸送帶轉送,因此可更加縮短被搬送物入出庫時所必要的時間。According to this configuration, since the roller conveyor can receive the conveyed object simply by lowering the transfer means, a simpler configuration can be realized. Further, since the object to be transported can be quickly transferred from the transfer means to the roller conveyor, the time required for the conveyed material to enter and exit the warehouse can be further shortened.

以下說明本發明之實施形態。圖1為表示本發明一實施形態之倉儲整體構成的上方立體圖,圖2為說明存取機的滾子式輸送帶(roller conveyor)之動作的要部側面剖視圖。Embodiments of the present invention will be described below. Fig. 1 is a top perspective view showing the overall configuration of a storage container according to an embodiment of the present invention, and Fig. 2 is a side cross-sectional view showing an essential part of the operation of a roller conveyor of an access machine.

圖1中,本實施形態之倉儲6具備有:保管架之架本體7;存取機5;輸送帶出入口(conveyor port)(出入口)17;及軌道28;作為主要的構成。架本體7配置在軌道28之一側,輸送帶出入口17隔著架本體7和軌道28配置在對向之位置處。In Fig. 1, the storage 6 of the present embodiment is provided with a rack main body 7 of a storage rack, an access machine 5, a conveyor port (inlet and exit) 17 and a rail 28; as a main configuration. The frame body 7 is disposed on one side of the rail 28, and the conveyor belt inlet and outlet 17 is disposed at a position opposite to each other via the frame body 7 and the rail 28.

架本體7具備有:設有缺口38的料架12;及倉儲外壁15;可將多個卡匣(被搬送物)35排列在垂直方向及水平方向上而保管。The rack main body 7 is provided with a rack 12 provided with a notch 38, and a storage outer wall 15; a plurality of cassettes (conveyed objects) 35 can be arranged in a vertical direction and a horizontal direction for storage.

軌道28構成為以2條為一對與架本體7平行而舖設,1台上述存取機5可在該軌道28上移動。該存取機5具備有:移載手段36;輸送帶平台(滾子式輸送帶)34;支柱37;及車輪29;作為主要的構成。The rail 28 is configured such that two of the two are laid in parallel with the frame body 7, and one of the access machines 5 is movable on the rail 28. The access machine 5 is provided with a transfer means 36, a conveyor belt platform (roller type conveyor) 34, a support 37, and a wheel 29; as a main configuration.

又,輸送帶出入口17為用來對於倉儲6進行上述卡匣35之入出庫者,具備有出入口框架13與滾子16。滾子16以適宜之間隔配設有多個,可由未圖示之馬達驅動。Further, the conveyor entrance/exit 17 is provided for the entrance and exit of the cassette 35 to the storage 6, and includes an entrance frame 13 and a roller 16. A plurality of rollers 16 are disposed at appropriate intervals, and are driven by a motor (not shown).

上述移載手段36具備有:升降框架(平台)32;線性滑動叉33;與平台升降手段26。升降框架32構成為可由平台升降手段26於垂直方向上升降自如。線性滑動叉33設置在上述升降框架32上,同時可對保管架(架本體7)突出而伸長且可縮退。此外,因為該線性滑動叉33以無法旋轉之方式相對於上述升降框架32而設置,所以無法使其在偏離架本體7之方向上進出。於線性滑動叉33之前端部的上面,構成有可載置上述卡匣35的載置面。The transfer means 36 includes a lifting frame (platform) 32, a linear sliding fork 33, and a platform lifting and lowering means 26. The lifting frame 32 is configured to be vertically movable in the vertical direction by the platform lifting and lowering means 26. The linear slide fork 33 is provided on the above-described lifting frame 32, and at the same time, the storage rack (frame body 7) can be protruded and elongated and can be retracted. Further, since the linear slide fork 33 is provided so as not to be rotatable relative to the lift frame 32, it cannot be moved in and out of the frame body 7. On the upper surface of the front end portion of the linear slide fork 33, a mounting surface on which the cassette 35 can be placed is formed.

又,輸送帶平台(conveyor table)34為用來從上述移載手段36中承接卡匣35並交接給輸送帶出入口17者,具備有:上方呈開放形狀之輸送帶框架31,設置在存取機5之下部;及多個滾子30,可旋轉自如地支持在該輸送帶框架31。該滾子30其上面之高度設置為與上述輸送帶出入口17之滾子16上面之高度一致。滾子30可由未圖示之馬達所驅動,可將載置於滾子30上的卡匣35,在沿上述線性滑動叉33之伸縮方向(質言之,線性滑動叉33之退避方向)上移送。Further, a conveyor table 34 is a conveyor belt frame 31 for receiving the cassette 35 from the transfer unit 36 and delivering it to the conveyor inlet/outlet port 17, and is provided with an open-shaped conveyor belt frame 31. The lower portion of the machine 5; and a plurality of rollers 30 are rotatably supported by the conveyor belt frame 31. The height of the upper surface of the roller 30 is set to coincide with the height of the roller 16 above the conveyor inlet and outlet port 17. The roller 30 can be driven by a motor (not shown), and the cassette 35 placed on the roller 30 can be in the retracting direction of the linear sliding fork 33 (in other words, the retracting direction of the linear sliding fork 33). Transfer.

輸送帶平台34相對於上述升降框架32及線性滑動叉33構成為不干涉的形狀。亦即,於輸送帶平台34之輸送帶框架31的側壁部處,形成可容納構成框體狀之升降框架32的間隙部,同時於側壁部之間形成有可收容上述線性滑動叉33的空間。The conveyor belt platform 34 is configured to have no interference with respect to the above-described lifting frame 32 and the linear sliding fork 33. That is, at the side wall portion of the conveyor belt frame 31 of the conveyor belt platform 34, a gap portion that can accommodate the frame-like lifting frame 32 is formed, and a space for accommodating the linear sliding fork 33 is formed between the side wall portions. .

其次,使用圖3至圖6說明在存取機5中輸送帶平台34之功能。此外,在圖3至圖6之各圖中,(A)表示前視圖,(B)表示側面剖視圖。Next, the function of the conveyor belt platform 34 in the access machine 5 will be described using Figs. In addition, in each of FIGS. 3 to 6, (A) shows a front view, and (B) shows a side cross-sectional view.

圖3表示將卡匣35從料架12中取出,隨即欲使線性滑動叉33縮退的狀況。當線性滑動叉33退避完畢時,如圖4所示,卡匣35、線性滑動叉33位在升降框架32之正上方。其次,存取機5使平台升降手段26作動而將升降框架32下降。因為升降框架32及線性滑動叉33如上述不干涉於輸送帶平台34,所以升降框架32從上往下鑽進輸送帶平台34,而可侵入並下降至輸送帶平台34之下部(嚴格說來,為上述輸送帶框架31之內部)。Fig. 3 shows a state in which the cassette 35 is taken out of the rack 12, and then the linear slide fork 33 is intended to be retracted. When the linear slide fork 33 is retracted, as shown in FIG. 4, the cassette 35 and the linear slide fork 33 are positioned directly above the lift frame 32. Next, the access machine 5 causes the platform lifting and lowering means 26 to actuate to lower the lifting frame 32. Since the lifting frame 32 and the linear sliding fork 33 do not interfere with the conveyor belt platform 34 as described above, the lifting frame 32 is drilled into the conveyor belt platform 34 from above, and can invade and descend to the lower portion of the conveyor belt platform 34 (strictly speaking , is the inside of the above conveyor belt frame 31).

當線性滑動叉33在搭載有卡匣35的狀態下侵入並下降至輸送帶平台34之下部時,如圖5所示,卡匣35被輸送帶平台34之滾子30持取,而殘留在滾子30上。其次,輸送帶平台34使支持在輸送帶框架31的滾子30旋轉驅動,將卡匣輸送至鄰接於輸送帶平台34而對向的輸送帶出入口17(圖6及圖2)。在卡匣35被移送至輸送帶平台34之升降動作區域外時,輸送帶平台34成為可升降自如。When the linear slide fork 33 intrudes in the state in which the cassette 35 is mounted and descends to the lower portion of the conveyor belt platform 34, as shown in FIG. 5, the cassette 35 is held by the roller 30 of the conveyor belt platform 34, and remains in the Roller 30. Next, the conveyor belt platform 34 rotationally drives the rollers 30 supported on the conveyor belt frame 31, and conveys the cassettes to the conveyor belt entrances and exits 17 (Figs. 6 and 2) which are adjacent to the conveyor belt platform 34. When the cassette 35 is transferred outside the lifting operation area of the conveyor platform 34, the conveyor platform 34 is freely movable.

又,於圖7所示俯視圖之倉儲6與圖1基本上為相同之構成,與圖1不同之處在於,在共通之軌道28上設置有多個(3台)存取機5,且除輸送帶出入口17以外尚具備3個鄰接架本體7的線內出入口(inline port)18。線內出入口18為在液晶製造裝置8直接對倉儲6進行卡匣35之入出庫時所使用的出入口。Further, the storage 6 of the plan view shown in FIG. 7 has substantially the same configuration as that of FIG. 1, and differs from FIG. 1 in that a plurality of (3) access machines 5 are provided on the common track 28, and In addition to the conveyor entrance and exit 17, there are three inline ports 18 that abut the frame body 7. The in-line entrance/exit 18 is an entrance and exit used when the liquid crystal manufacturing apparatus 8 directly performs the loading and unloading of the cassette 6 into the storage.

該線內出入口18設在與架本體7相同之側,與存取機5間卡匣35之交接,由移載手段36之線性滑動叉33進行。例如,若同上述料架12般於線內出入口18設置缺口38,則在線性滑動叉33與線內出入口18間可進行卡匣35之交接。此外,液晶製造裝置8之線內出入口18為連接倉儲6和液晶製造裝置8的出入口,可考慮由滾子式輸送帶直接連結,或透過搬送機器人而連接。The in-line inlet and outlet 18 is provided on the same side as the rack main body 7, and is connected to the cassette 35 between the accessing machines 5, and is carried out by the linear sliding fork 33 of the transfer means 36. For example, if the notch 38 is provided in the in-line entrance and exit 18 like the above-described rack 12, the cassette 35 can be transferred between the linear slide fork 33 and the in-line entrance 18. Further, the in-line inlet and outlet 18 of the liquid crystal manufacturing apparatus 8 is an inlet and outlet for connecting the storage 6 and the liquid crystal manufacturing apparatus 8, and may be directly connected by a roller conveyor or connected by a transfer robot.

其次,說明有關利用圖1和圖7所示之倉儲6對料架12實施之卡匣35入庫動作和出庫動作。Next, the loading and unloading operations of the cassette 35 implemented by the storage rack 6 of the storage rack shown in Figs. 1 and 7 will be described.

以下說明入庫動作,首先,於圖1等所示之輸送帶出入口17上,載置由未圖示之無人搬送台車或升降機(lifter)等其他搬送手段搬送而來的卡匣35。然後,存取機5移動至輸送帶出入口17之對向位置處而停止,同時使升降框架32下降至升降範圍之下限。此時,如圖2所示,輸送帶出入口17之滾子16上面的高度與輸送帶平台34之滾子30上面的高度略為一致。In the following, the accommodating operation will be described. First, the cassette 35, which is transported by another transport means such as an unmanned transfer cart or a lifter (not shown), is placed on the conveyor entrance 17 shown in FIG. Then, the access machine 5 is moved to the opposite position of the conveyor entrance and exit 17 to stop, and the elevating frame 32 is lowered to the lower limit of the lifting range. At this time, as shown in FIG. 2, the height above the roller 16 of the conveyor belt inlet and outlet 17 slightly coincides with the height above the roller 30 of the conveyor belt platform 34.

緊接著,輸送帶出入口17之滾子16與存取機5中輸送帶平台34之滾子30被驅動,載置在輸送帶出入口17上的卡匣被移送至存取機5之輸送帶平台34上。移送之完成為安裝於輸送帶平台34的省略圖式之感測器所檢測,藉由該感測器,卡匣35在輸送帶平台34上被正確定位。Immediately thereafter, the rollers 16 of the conveyor belt inlet and outlet 17 and the rollers 30 of the conveyor belt platform 34 of the access machine 5 are driven, and the cassettes placed on the conveyor belt inlet and outlet 17 are transferred to the conveyor belt platform of the access machine 5. 34. The completion of the transfer is detected by an analytic sensor mounted on the conveyor platform 34, by which the cassette 35 is properly positioned on the conveyor platform 34.

緊接著,存取機5使升降框架32從下限位置上升,此時,載置於輸送帶平台34上的卡匣35被與升降框架32一體上升的線性滑動叉33持取。之後,存取機5在軌道28上沿料架12水平移動,同時使升降框架32上升,在使移載手段36對向於作為目的之料架位置的狀態下停止。Immediately thereafter, the access machine 5 raises the elevating frame 32 from the lower limit position. At this time, the cassette 35 placed on the conveyor belt platform 34 is held by the linear slide fork 33 which is integrally raised with the elevating frame 32. Thereafter, the access machine 5 moves horizontally along the rack 12 on the rail 28, and at the same time, the elevating frame 32 is raised, and the transfer means 36 is stopped in a state in which the transfer rack 36 is oriented toward the intended rack position.

在存取機5停止後,移載手段36在維持將卡匣35載置於線性滑動叉33的狀態下,使叉伸長至料架12之載置位置,同時將叉前端部(即卡匣35)對位。其次,當使升降框架32下降少量時,則叉之前端部往下方通過上述缺口38,叉之前端部上面低於架面,同時卡匣35被料架12持取而殘留於料架12上。依照以上方式完成卡匣35往倉儲6的收納,之後存取機5使線性滑動叉33之叉縮退,前進下個動作。After the access machine 5 is stopped, the transfer means 36 extends the fork to the loading position of the rack 12 while maintaining the loading of the cassette 35 in the state of the linear slide fork 33, and at the same time the front end of the fork (ie, the cassette 35) Matching. Next, when the lifting frame 32 is lowered by a small amount, the front end of the fork passes downward through the notch 38, and the front end of the fork is lower than the frame surface, and the cassette 35 is held by the rack 12 and remains on the rack 12. . The storage of the cassette 35 into the magazine 6 is completed in the above manner, and then the access machine 5 retracts the fork of the linear slide fork 33 to advance the next operation.

以下說明出庫動作,該出庫動作以與上述入庫動作完全相反的步驟進行。首先,存取機5使移載手段36移動至收納有作為目的之卡匣35的料架位置,使線性滑動叉33進出後,線性滑動叉33之前端部以從下往上通過上述缺口38的方式使升降框架32上升若干,將卡匣35撈起於載置面上(圖3)。然後,使線性滑動叉33如圖4般縮退而將卡匣35拉入存取機5內部,移動至輸送帶出入口17位置。The following describes the delivery operation, which is performed in the exact opposite of the above-described storage operation. First, the access machine 5 moves the transfer means 36 to the rack position in which the target cassette 35 is accommodated, and after the linear slide fork 33 comes in and out, the front end of the linear slide fork 33 passes through the notch 38 from the bottom to the top. In a manner, the lifting frame 32 is raised a little, and the cassette 35 is picked up on the mounting surface (Fig. 3). Then, the linear slide fork 33 is retracted as shown in Fig. 4, and the cassette 35 is pulled into the inside of the access machine 5, and moved to the position of the conveyor entrance/outlet 17.

在往輸送帶出入口17移動之中,存取機5使升降框架32下降,在到達輸送帶出入口17之後,使升降框架32更下降至輸送帶平台34之下,使卡匣35由輸送帶出入口17承接(圖5)。接著,輸送帶平台34和輸送帶出入口17之滾子30、16被驅動,卡匣35從輸送帶平台34交接給輸送帶出入口(圖6)。載置於輸送帶出入口17的卡匣35被載置於搬送台車等,而往外部搬出。During the movement to the conveyor entrance 17 , the access machine 5 lowers the lifting frame 32. After reaching the conveyor entrance 17 , the lifting frame 32 is lowered further below the conveyor platform 34 , so that the cassette 35 is transported from the conveyor. 17 undertake (Figure 5). Next, the rollers 30, 16 of the conveyor belt platform 34 and the conveyor inlet and outlet 17 are driven, and the cassettes 35 are transferred from the conveyor belt platform 34 to the conveyor inlet and outlet (Fig. 6). The cassette 35 placed on the conveyor entrance/outlet 17 is placed on a transporting cart or the like and carried out to the outside.

此外,該等一連串之移載搬送動作係根據來自掌控生產管理的MCS和統括管理搬送系統的MES等控制裝置的指令信號而進行。又,離線時倉儲6之控制器亦可發出同樣的指令信號。Further, the series of transfer operations are performed based on command signals from a control device such as an MCS that controls production management and a MES that manages the transfer system. In addition, the controller of the offline storage 6 can also issue the same command signal.

如上所示,本實施形態之倉儲6具備多個且可保管卡匣35的架本體7,其排列在垂直方向及水平方向,同時尚具備:軌道28,與該架本體7平行舖設;存取機5,可在該軌道28上移動;及輸送帶出入口17,用來相對於倉儲6進行上述卡匣35之入出庫。而且,上述存取機5具備有:移載手段36,其具備可在垂直方向上升降自如的升降框架32,與設置於該升降框架32上而可在對向於上述架本體7之狀態下進退自如的線性滑動叉33;以及輸送帶平台34,可從該移載手段36中承接上述卡匣35而交接給上述輸送帶出入口17。As described above, the storage unit 6 of the present embodiment includes a plurality of rack main bodies 7 capable of storing the cassettes 35, which are arranged in the vertical direction and the horizontal direction, and are provided with a rail 28 in parallel with the rack main body 7; The machine 5 is movable on the rail 28; and the conveyor belt inlet and outlet 17 is configured to perform the loading and unloading of the cassette 35 with respect to the storage 6. Further, the access machine 5 includes a transfer mechanism 36 including a lift frame 32 that can be lifted and lowered in the vertical direction, and a state in which the lift frame 32 is provided on the lift frame 32 so as to be opposite to the frame body 7. A linear sliding fork 33 that can move forward and backward; and a conveyor platform 34 from which the cassette 35 can be received and delivered to the conveyor inlet and outlet 17.

如以上在存取機5之移載手段36中採用線性滑動叉33,省略旋轉功能,因而可達到小型化、輕量化,同時可輕快動作,縮短入出庫作業的時間。此效果尤其在卡匣35為高重量時顯著發揮。又,如圖1或圖7所示,即使於在輸送帶出入口17配置於與架本體7相反側處時,亦可藉由輸送帶平台34與輸送帶出入口17而交接卡匣35。因此,可發揮與如專利文獻1等所示具有旋轉功能之移載手段實質同等的效果。As described above, the linear sliding fork 33 is used in the transfer means 36 of the access machine 5, and the rotation function is omitted, so that the size and weight can be reduced, and the movement can be performed lightly, and the time for entering and leaving the warehouse can be shortened. This effect is particularly exerted when the cassette 35 is of high weight. Further, as shown in FIG. 1 or FIG. 7, even when the conveyance belt entrance/exit 17 is disposed on the side opposite to the rack main body 7, the cassette 35 can be transferred by the conveyance belt platform 34 and the conveyance belt entrance/exit 17. Therefore, it is possible to achieve substantially the same effect as the transfer method having the rotation function as shown in Patent Document 1 or the like.

又,在上述之倉儲6中,存取機5之移載手段36構成為可使線性滑動叉33之前端上面(卡匣載置面)下降至低於上述輸送帶平台34之滾子30上面的位置處。Further, in the above-described storage 6, the transfer means 36 of the access machine 5 is configured to lower the upper end surface (the cassette mounting surface) of the linear slide fork 33 to be lower than the roller 30 of the above-mentioned conveyor belt platform 34. The location.

藉此,因為僅單純使升降框架32下降就可使輸送帶平台34承接卡匣35,所以可實現更簡素的構成。又,可將卡匣35快速從移載手段36往輸送帶平台34轉送,因此可更加縮短卡匣35出庫所必要的時間。又在入庫時,亦僅將升降框架32從下限位置上升就可將卡匣35從輸送帶平台34往移載手段36轉送,因此入庫之必要時間當然亦可縮短。Thereby, since the belt platform 34 can be received by the cassette 35 simply by lowering the elevating frame 32, a simpler configuration can be realized. Further, the cassette 35 can be quickly transferred from the transfer means 36 to the conveyor belt platform 34, so that the time required for the cassette 35 to be taken out can be further shortened. At the time of storage, the cassette 35 can be transferred from the conveyor platform 34 to the transfer means 36 only by raising the lift frame 32 from the lower limit position. Therefore, the time required for storage can of course be shortened.

此外,於圖8表示變形例,該倉儲6為互為對向地配置2個圖7之倉儲的構成。在圖8之倉儲6中,軌道48和軌道47由輸送帶出入口17分斷而配置在直線上,分別平行於軌道28而舖設。軌道48和軌道28之間隔與軌道47和軌道28之間隔為相同,存取機5可在軌道28、軌道47、軌道48之各軌道上互相獨立移動。而且,保管架之架本體7a、7b以隔著上述3對軌道28、軌道47、軌道48的方式配置在3對軌道之兩側。In addition, FIG. 8 shows a modification in which the storage 6 is configured such that two storages of FIG. 7 are arranged opposite each other. In the storage 6 of Fig. 8, the rails 48 and the rails 47 are separated by the conveyor entrances and exits 17 and arranged on a straight line, which are laid parallel to the rails 28, respectively. The spacing between the track 48 and the track 28 is the same as the spacing between the track 47 and the track 28, and the access machine 5 can move independently of each other on the tracks of the track 28, the track 47, and the track 48. Further, the rack main bodies 7a and 7b of the storage rack are disposed on both sides of the three pairs of rails so as to sandwich the three pairs of rails 28, the rails 47, and the rails 48.

例如,在從一側之架本體7a往另一側之架本體7b交接卡匣35時,在軌道28上移動的存取機5從既定之料架12中取出卡匣35,而對位並停止於輸送帶出入口17。卡匣經由存取機5之輸送帶平台34、輸送帶出入口17、輸送帶45而搬送至輸送帶出入口44,交接給在軌道48上移動的存取機5。又,在從架本體7b交接給架本體7a時,則經其相反路徑交接卡匣35。For example, when the cassette body 35 is transferred from the rack body 7a on one side to the rack body 7b on the other side, the access machine 5 moving on the rail 28 takes out the cassette 35 from the predetermined rack 12, and is aligned. Stop at the conveyor inlet and outlet 17. The cassette is conveyed to the conveyor entrance/outlet 44 via the conveyor belt platform 34 of the access machine 5, the conveyor entrance/outlet 17, and the conveyor belt 45, and is delivered to the access machine 5 that moves on the rail 48. Further, when the carrier body 7b is delivered to the holder body 7a, the cassette 35 is delivered via the opposite path.

此外,在從軌道48所對向的架本體7b中將卡匣35交接給軌道47所對向的架本體7b時,在軌道48上移動的存取機5從既定之料架12中取出卡匣35。卡匣35經由存取機5之輸送帶平台34、輸送帶出入口44、輸送帶46、輸送帶出入口17、輸送帶45而被搬送至輸送帶出入口43,並交接給在軌道47上移動的存取機5。Further, when the cassette 35 is transferred from the holder body 7b opposed to the rail 48 to the holder body 7b opposed to the rail 47, the access machine 5 moving on the rail 48 takes out the card from the predetermined magazine 12.匣35. The cassette 35 is conveyed to the conveyor entrance/exit 43 via the conveyor belt platform 34 of the access machine 5, the conveyor entrance/exit 44, the conveyor belt 46, the conveyor entrance/exit 17, and the conveyor belt 45, and is transferred to the storage on the rail 47. Take the machine 5.

然後,於圖8中在上側之軌道28上移動的存取機5中,其移載手段36之線性滑動叉33相對於圖中上側之架本體7設置成為可進出,在下側之軌道28移動的存取機5之線性滑動叉33相對於圖中下側之架本體7設置成為可進出。直截了當地說,存取機5之線性滑動叉33,其配設方向在圖中上側與下側互為相反。藉此,對於配設在軌道28兩側的架本體7可容易地交接卡匣35。Then, in the access machine 5 which moves on the upper rail 28 in Fig. 8, the linear slide fork 33 of the transfer means 36 is provided to be movable in and out with respect to the upper frame body 7 in the figure, and is moved on the lower side rail 28. The linear slide fork 33 of the access machine 5 is provided to be accessible in relation to the frame body 7 on the lower side in the drawing. Straightforwardly, the linear sliding fork 33 of the access machine 5 is disposed opposite to each other in the upper side and the lower side in the drawing. Thereby, the cassette 35 can be easily transferred to the holder body 7 disposed on both sides of the rail 28.

如上所示,在圖8之構成的倉儲6中,軌道以構成互相平行且鄰接之多個移動路徑的方式而舖設,同時多個存取機5可互相獨立地在各個移動路徑上移動。而且,架本體7配置於上述多個移動路徑之兩側,同時在上述移動路徑之一上移動的存取機5之線性滑動叉33,其配置方向與在與其鄰接之上述移動路徑上移動的存取機5之線性滑動叉33而配置方向互為相反。As described above, in the storage 6 constructed as shown in Fig. 8, the rails are laid in such a manner as to constitute a plurality of moving paths which are parallel and adjacent to each other, and the plurality of accessing machines 5 are movable independently of each other on the respective moving paths. Further, the frame body 7 is disposed on both sides of the plurality of moving paths, and the linear sliding fork 33 of the accessing machine 5 that moves on one of the moving paths is disposed in a direction and a moving path adjacent thereto The linear sliding forks 33 of the access machine 5 are arranged opposite to each other.

藉由如此構成,可達到與圖1和圖7之構成實質同樣的效果,同時可容易地提高收容能力。此外,此圖8之構成在功能上與圖9之習知構成類似,但根據本案發明者之實務經驗,比起習知之構成,可確認圖8之構成在裝置大小、入出庫所須時間、設備成本等任一方面上均具有優越性。With such a configuration, substantially the same effects as those of the configurations of Figs. 1 and 7 can be achieved, and the accommodation ability can be easily improved. In addition, the configuration of FIG. 8 is similar in function to the conventional configuration of FIG. 9. However, according to the practical experience of the inventor of the present invention, it can be confirmed that the configuration of FIG. 8 is in the size of the device, the time required to enter and exit the library, It is superior in any aspect such as equipment cost.

以上表示適合於本發明之實施形態及變形例,但以上構成為一例,例如可照以下方式進行變更。The above description is suitable for the embodiment and the modification of the present invention, but the above configuration is an example, and can be changed as follows, for example.

輸送帶出入口17亦可配設於架本體7之同側,而非在架本體7之相反側。又,輸送帶出入口17不限於入庫兼出庫的情況,可分為入庫專用之出入口與出庫專用之出入口而配置。更進一步,被搬送物可採用上述之FOUP等以代替卡匣35。The conveyor inlet and outlet 17 may also be disposed on the same side of the frame body 7 instead of on the opposite side of the frame body 7. Further, the conveyance belt entrance/exit 17 is not limited to the case where the storage is out of the warehouse, and may be divided into an entrance for exclusive use of the storage and an entrance and exit for the delivery. Further, the object to be transported may be the FOUP or the like described above instead of the cassette 35.

升降框架32和輸送帶平台34不限於圖1等所示之形狀,可變更為適當的形狀。但是,當移載手段36與輸送帶平台34構成不互相產生干涉的形狀,而可將移載手段36下降至輸送帶平台34之滾子30上面以下時,則如上述為有利。The lifting frame 32 and the conveyor belt platform 34 are not limited to the shapes shown in FIG. 1 and the like, and may be more appropriately shaped. However, when the transfer means 36 and the conveyor belt platform 34 are formed in a shape that does not interfere with each other, and the transfer means 36 can be lowered below the upper surface of the rollers 30 of the conveyor belt platform 34, it is advantageous as described above.

雖詳細或參照特定的實施態樣說明本發明,但在不脫離本發明之精神和範圍之下可增加各種的變更和修正,對於發明所屬之技術領域者而言當可明瞭。The present invention will be described in detail with reference to the specific embodiments thereof, and various modifications and changes can be made without departing from the spirit and scope of the invention.

本案為根據2000年11月18日申請之日本專利特願(特願2005-334037)者,其內容取入於此作為參考。The present application is based on Japanese Patent Application No. 2005-334037, filed on Nov. 18, 2000, the content of which is hereby incorporated by reference.

(產業上之可利用性)(industrial availability)

本發明之存取機之移載手段中,採用線性滑動叉,而省略旋轉功能。藉由該構造可達到裝置之小型化、輕量化,同時可使裝置輕快地動作,而可縮短入出庫作業之時間。又,即使在出入口配置於保管架之相反側的情況下,亦可藉由滾子式輸送帶和出入口而交接被搬送物。因此,即便沒有旋轉功能,本發明亦可發揮與具有習知旋轉功能之移載手段實質同等的效果。In the transfer method of the access machine of the present invention, a linear sliding fork is used, and the rotation function is omitted. With this configuration, the size and weight of the device can be reduced, and the device can be operated lightly, and the time for entering and leaving the warehouse can be shortened. Moreover, even when the entrance and exit are disposed on the opposite side of the storage rack, the object to be conveyed can be delivered by the roller conveyor and the entrance and exit. Therefore, even if there is no rotation function, the present invention can exert substantially the same effect as the transfer method having the conventional rotation function.

5...存取機5. . . Access machine

6...倉儲6. . . Warehousing

7...架本體(保管架)7. . . Shelf body

7a...架本體7a. . . Frame body

7b...架本體7b. . . Frame body

8...液晶製造裝置8. . . Liquid crystal manufacturing device

10...倉儲10. . . Warehousing

11...卡匣11. . . Card

12...料架12. . . Rack

13...出入口框架13. . . Entrance and exit frame

14...出入口14. . . Entrance and exit

15...外壁15. . . Outer wall

16...滾子16. . . Roller

17...輸送帶出入口17. . . Conveyor belt entrance

18...線內出入口18. . . Inline access

20...移載機器人20. . . Transfer robot

21...底座twenty one. . . Base

22...旋轉台twenty two. . . Rotary table

23...臂twenty three. . . arm

24...夾爪twenty four. . . Jaws

25...支柱25. . . pillar

26...平台升降手段26. . . Platform lifting method

27...存取機27. . . Access machine

28...軌道28. . . track

29...車輪29. . . wheel

30...滾子30. . . Roller

31...輸送帶框架31. . . Conveyor belt frame

32...升降框架(平台)32. . . Lifting frame (platform)

33...線性滑動叉33. . . Linear sliding fork

34...輸送帶平台(滾子式輸送帶)34. . . Conveyor belt platform (roller conveyor belt)

35...卡匣35. . . Card

36...移載手段36. . . Transfer means

37...支柱37. . . pillar

38...缺口38. . . gap

43...輸送帶出入口43. . . Conveyor belt entrance

44...輸送帶出入口44. . . Conveyor belt entrance

45...輸送帶45. . . conveyor

46...輸送帶46. . . conveyor

47...軌道47. . . track

48...軌道48. . . track

圖1為表示本發明一實施形態之倉儲整體構成的上方立體圖。Fig. 1 is a top perspective view showing the overall configuration of a storage according to an embodiment of the present invention.

圖2為說明存取機中滾子式輸送帶之動作的要部側面剖視圖。Fig. 2 is a side cross-sectional view showing the main part of the operation of the roller conveyor in the access machine.

圖3A為說明基於出庫之目的而藉由線性滑動叉撈起並拉入卡匣之情況的前視圖。Fig. 3A is a front elevational view showing the case where the cassette is picked up and pulled in by a linear sliding fork for the purpose of delivery.

圖3B為說明基於出庫之目的而藉由線性滑動叉撈起並拉入卡匣之情況的側面剖視圖。Fig. 3B is a side cross-sectional view showing the case where the cassette is picked up by a linear sliding fork and pulled in by the purpose of the delivery.

圖4A為表示使被拉入於存取機後之卡匣下降的情況之前視圖。Fig. 4A is a front view showing a state in which a cassette that has been pulled in the access machine is lowered.

圖4B為表示使被拉入於存取機後之卡匣下降的情況之側面剖視圖。Fig. 4B is a side cross-sectional view showing a state in which the cassette after being pulled in the access machine is lowered.

圖5A為表示將卡匣從移載手段承接於滾子式輸送帶後之情況的前視圖。Fig. 5A is a front elevational view showing a state in which a cassette is taken from a transfer belt by a roller conveyor.

圖5B為表示將卡匣從移載手段承接於滾子式輸送帶後之情況的側面剖視圖。Fig. 5B is a side cross-sectional view showing a state in which the cassette is received by the transfer means from the roller conveyor.

圖6A為表示將卡匣從滾子式輸送帶往輸送帶出入口交接之情況的前視圖。Fig. 6A is a front elevational view showing the state in which the cassette is transferred from the roller conveyor to the conveyor entrance and exit.

圖6B為表示將卡匣從滾子式輸送帶往輸送帶出入口交接之情況的側面剖視圖。Fig. 6B is a side cross-sectional view showing a state in which the cassette is transferred from the roller conveyor to the conveyor entrance and exit.

圖7為表示其他構成之倉儲的俯視圖。Fig. 7 is a plan view showing a storage of another configuration.

圖8為表示圖7倉儲之更進一步變形例的俯視圖。Fig. 8 is a plan view showing a further modification of the storage of Fig. 7.

圖9為表示倉儲習知之構成的上方立體圖。Fig. 9 is a top perspective view showing the configuration of a conventional storage.

5...存取機5. . . Access machine

6...倉儲6. . . Warehousing

7...架本體(保管架)7. . . Shelf body

12...料架12. . . Rack

13...出入口框架13. . . Entrance and exit frame

15...外壁15. . . Outer wall

16...滾子16. . . Roller

17...輸送帶出入口17. . . Conveyor belt entrance

26...平台升降手段26. . . Platform lifting method

28...軌道28. . . track

29...車輪29. . . wheel

30...滾子30. . . Roller

31...輸送帶框架31. . . Conveyor belt frame

32...升降框架(平台)32. . . Lifting frame (platform)

33...線性滑動叉33. . . Linear sliding fork

34...輸送帶平台34. . . Conveyor belt platform

35...卡匣35. . . Card

36...移載手段36. . . Transfer means

37...支柱37. . . pillar

38...缺口38. . . gap

Claims (4)

一種倉儲,其係具備有多個排列在垂直方向及水平方向並可保管被搬送物的保管架之倉儲(stocker),其特徵在於具備有:軌道,與上述保管架平行舖設;存取機(storage/retrieve machine;stacker crane,堆疊起重機),可在上述軌道上移動;及輸送帶出入口(conveyor port),具備有出入口框架、與可由上述出入口框架驅動地配設之多個滾子,並包夾上述軌道而配設於與上述保管架相對向之位置,用來對倉儲進行被搬送物之入出庫;而上述存取機具備有:移載手段,具備可在垂直方向升降自如的平台、與設置於該平台上而可在對向於配設在上述保管架或該保管架之相同側用以對倉儲進行上述被搬送物之入出庫之線內出入口之狀態下進退自如的線性滑動叉(linear slide fork);及滾子式輸送帶(roller conveyor),具備有設置於上述存取機下部之上方開放形狀的輸送帶框架、及旋轉自如地支持於上述輸送帶框架之多個滾子,以使上述滾子之上表面的高度與上述輸送帶出入口之上面的高度一致之方式固定而設置,從上述移載手段承接上述被搬送物並交接予上述輸送帶出入口。 A stocker having a plurality of stockers arranged in a vertical direction and a horizontal direction and capable of storing a transported object, wherein the stocker is provided with a rail, which is laid in parallel with the storage rack; and an access machine ( a storage/retrieve machine; a stacker crane, which can be moved on the track; and a conveyor port, having an inlet and outlet frame, and a plurality of rollers that can be driven by the inlet and outlet frames, and And the rail is disposed at a position facing the storage rack for storing and transporting the transported object to the storage; and the accessor is provided with a transfer means, and has a platform that can be vertically moved up and down, And a linear sliding fork that can be moved forward and backward in a state in which the above-mentioned storage rack or the storage rack is disposed on the same side of the storage rack or the storage rack for carrying in and out of the in-line entrance and exit of the conveyed object. (linear slide fork); and a roller conveyor having a conveyor belt frame disposed above the lower portion of the access machine, and rotating from The plurality of rollers supported by the conveyor belt frame are fixedly disposed such that the height of the upper surface of the roller matches the height of the upper surface of the conveyor belt entrance and exit, and the conveyed object is received from the transfer means And handed over to the above conveyor belt entrance and exit. 如申請專利範圍第1項之倉儲,其中,上述滾子式輸 送帶之上述輸送帶框架具有於側壁部形成為可收容上述平台之間隙部、及於側壁部之間形成為可容納上述線性滑動叉之空間,並構成為不會對上述移載手段之上述平台及上述線性滑動叉干涉之形狀,上述移載手段構成為可使上述線性滑動叉之被搬送物載置面下降至低於上述滾子式輸送帶之滾子上面的位置處。 For example, the storage of the first item of the patent scope, wherein the above roller type The belt frame of the feeding belt has a space formed in a side wall portion so as to accommodate the platform, and a space formed between the side wall portions to accommodate the linear sliding fork, and is configured not to be the same as the transfer means In the shape of the platform and the linear sliding fork interference, the transfer means is configured to lower the object placement surface of the linear slide fork to a position lower than the roller upper surface of the roller conveyor. 一種倉儲,其係具備有多個排列於垂直方向及水平方向並可保管被搬送物的保管架之倉儲,其特徵在於具備有:軌道,與上述保管架平行並以構成互相平行且相鄰接之多個移動路徑之方式舖設;多個存取機,可在上述多個移動路徑之各者互相獨立地移動;輸送帶出入口,具備有出入口框架、及可由上述出入口框架驅動地配設之多個滾子,並包夾上述軌道而配設於與上述保管架相對向之位置,用來對倉儲進行被搬送物之入出庫;上述保管架配置在上述多個移動路徑之兩側,上述各個存取機具備有:移載手段,具備可在垂直方向升降自如的平台、與設置於該平台上而可在對向於配設在上述保管架或該保管架之相同側用以對倉儲進行上述被搬送物之入出庫之線內出入口之狀態下進退自如的線性滑動叉;及 滾子式輸送帶,具備有設置於上述存取機下部之上方開放形狀的輸送帶框架、及旋轉自如地支持於上述輸送帶框架之多個滾子,以使上述滾子之上表面的高度與上述輸送帶出入口之上面的高度一致之方式固定而設置,從上述移載手段承接上述被搬送物並交接予上述輸送帶出入口;而在上述移動路徑之一進行移動的存取機之線性滑動叉的配置方向、和在與其鄰接之上述移動路徑上進行移動的存取機之線性滑動叉的配置方向互為相反。 A storage device comprising a plurality of storage racks arranged in a vertical direction and a horizontal direction and capable of storing the objects to be transported, characterized in that: a rail is provided, which is parallel to the storage rack and configured to be parallel and adjacent to each other a plurality of access paths are provided; the plurality of access machines are movable independently of each other in the plurality of moving paths; the conveyor entrance and exit are provided with an entrance and exit frame, and the plurality of access frames can be driven by the entrance and exit frames And a roller disposed at a position facing the storage rack for holding the storage object into and out of the storage; the storage rack is disposed on both sides of the plurality of movement paths, and each of the rollers The access machine is provided with a transfer means, a platform that can be lifted and lowered in a vertical direction, and a platform that is disposed on the platform and can be disposed on the same side of the storage rack or the storage rack for storing the storage. a linear sliding fork that is movable forward and backward in a state in which the conveyed object enters and exits the line in and out of the line; and The roller conveyor belt includes a conveyor belt frame that is disposed above the lower portion of the access machine, and a plurality of rollers that are rotatably supported by the conveyor belt frame to increase the height of the upper surface of the roller. Provided to be fixed to the height of the upper surface of the conveyor belt entrance and exit, and to receive the conveyed object from the transfer means and deliver the same to the conveyor entrance and exit; and linearly slide the access machine that moves in one of the movement paths The arrangement direction of the fork and the arrangement direction of the linear slide fork of the access machine moving on the above-mentioned moving path adjacent thereto are opposite to each other. 如申請專利範圍第3項之倉儲,其中,上述滾子式輸送帶之上述輸送帶框架具有於側壁部形成為可收容上述平台之間隙部、及於側壁部之間形成為可容納上述線性滑動叉之空間,並構成為不會對上述移載手段之上述平台及上述線性滑動叉干涉之形狀,上述移載手段構成為可使上述線性滑動叉之被搬送物載置面下降至低於上述滾子式輸送帶之滾子上面的位置處。 The hopper of the third aspect of the invention, wherein the conveyor belt frame of the roller conveyor belt has a gap portion formed in the side wall portion to receive the platform, and is formed between the side wall portions to accommodate the linear sliding The space of the fork is configured not to interfere with the platform of the transfer means and the linear slide fork, and the transfer means is configured to lower the conveyance surface of the linear slide fork to be lower than the above The position above the roller of the roller conveyor.
TW095142590A 2005-11-18 2006-11-17 Warehousing TWI388479B (en)

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