KR20080077121A - Stocker - Google Patents

Abstract

A stocker comprises a rack body (7)(storage rack) capable of storing a plurality of cassettes (35) arranged in the vertical and horizontal directions, rails (28) provided parallel with the rack body (7), a stacker crane (5) capable of traveling on the rails (28), and a conveyor port (17) for loading and unloading the cassettes (35) to and from the stocker (6). The stacker crane (5) includes a transfer means (36) having a lift frame (32) movable in the vertical direction, and a linear slide fork (33) installed on the lift frame (32) and movable forward and backward in the direction facing to the rack body (7) and a conveyor table (34) with rollers (30) for receiving the cassettes (35) from the transfer means (36) and delivering them to the conveyor port (17).

Description

Stalker {STOCKER}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a stocker that temporarily stores a cassette, a Front Opening Unified Pod (FOUP), or the like waiting for a process in a manufacturing process such as a liquid crystal display device or a semiconductor device.

As this kind of stocker, there is one disclosed in Patent Document 1. This configuration is shown in FIG. 9 of the present application, and the stocker 10 includes a shelf 12, a stacker crane 27, a port 14, an outer wall 15, and the like as main components. . The stacker crane 27 carries a transfer robot 20, a pair of struts 25, a pair of table lifting means 26, a set of wheels 29, and a pair of rails 28. It is equipped as a main structure. Moreover, the said transfer robot 20 is comprised from the base 21, the turning table 22, the arm 23, and the gripper 24. As shown in FIG. The shelf 12 is arrange | positioned at the both sides of the stacker crane 27, and can hold and hold | maintain the cassette 11 in which the glass substrate for liquid crystal display devices, the silicon substrate for semiconductor devices, etc. were accommodated.

In this configuration, the carrying of the cassette 11 into the stocker 10 is performed as follows. That is, a conveyance trolley (not shown) mounts the cassette 11 and arrives at the port 14, and the cassette 11 is loaded into the port 14 using a conveying means equipped with the conveyance trolley. Subsequently, the cassette 11 mounted on the port 14 is mounted on the transfer robot 20 equipped with the stacker crane 27 and transported to the shelf position indicated by a system controller (not shown). It is loaded on the shelf 12. In addition, the carrying out of the cassette 11 from the stocker 10 (the operation | movement which takes out the cassette 11 from the shelf 12 and conveys it to a conveyance trolley) is performed in the reverse order to the above.

Patent Document 1: Japanese Patent Laid-Open No. 2005-277326

In addition, Patent Document 2 discloses a stocker having a different configuration. In Patent Document 2, a container made of the same structure as a stocker inner shelf is carried in a belt conveyor to a pair of ports provided on both sides of a stacker provided inside the stocker. And a stacker robot installed in the stocker, which imports and unloads cassettes into the shelf of the container, and imports and unloads the cassettes loaded and unloaded from these containers to the stocker side disposed on both sides of the stacker robot. have.

Patent Document 2: Japanese Patent Laid-Open No. 2003-163250

However, in the stocker of Patent Documents 1 and 2, the stacker robot has a rotation function of at least 180 ° because the stacker robot is configured to carry and unload cassettes to the lathes arranged on both sides of the stacker crane (Fig. 9). Turning table 22]. For example, when the object to be conveyed is a glass substrate for a liquid crystal display device, the cassette weight of the object to be conveyed is several hundred kilos or more, and a large driving torque is required for turning the robot. Therefore, the drive source for realizing this becomes large sized and large-weighted, and it becomes the obstacle of the compaction and weight reduction of a stacker crane.

In addition, the working speed of the apparatus tends to be slowed down with the increase in size and the weight of the apparatus, and if this is to be avoided, the driving force needs to be further increased, leading to the contradiction that the driving source becomes large and large. Therefore, a reduction in the operating efficiency of the apparatus is inevitable due to the enlargement of the apparatus on the extension of the prior art.

This invention is made | formed in view of the above situation, The objective is to avoid the enlargement and the large weight of a stacker crane when conveying cassettes, such as a large-size liquid crystal substrate, and to provide the stocker with a high conveyance efficiency with a high transfer speed. To provide.

The problem to be solved of the present invention is as described above. Next, the means for solving the problem and its effects will be described.

According to the 1st viewpoint of this invention, the stocker comprised as follows is provided. That is, a storage shelf capable of storing a plurality of conveyed objects arranged in a vertical direction and a horizontal direction, the rail laid in parallel with the storage shelf, a stacker crane capable of traveling on the rail, and the transported object with respect to the stocker It has a port for receiving and leaving the goods. The stacker crane includes a table capable of lifting up and down in a vertical direction, a transporting means provided on the table, and a linear slide fork that can move back and forth against the storage shelf, and transfer the conveyed object from the transporting means. It is equipped with a roller conveyor which takes over and delivers to the said port.

Thus, by employing a linear slide fork as the transfer means of the stacker crane and omitting the turning function, it is possible to achieve miniaturization and light weight, to be able to operate lightly, and to shorten the time for receiving and discharging work. Moreover, even if the port is arrange | positioned on the opposite side to a storage shelf, a conveyed object can be delivered to a roller conveyor and a port. Therefore, the effect which is substantially equivalent to the conveying means which has a turning function as shown by patent document 1 can be exhibited.

In said stocker, it is preferable that the conveyance means of the said stacker crane is comprised so that the conveyed object loading surface of the said linear slide fork can be lowered to the position lower than the roller upper surface of the said roller conveyor.

This configuration enables the conveyed object to be transferred to the roller conveyor simply by lowering the conveying means, so that a simpler structure can be realized. In addition, the conveyed object can be relayed quickly from the conveying means to the roller conveyor, so that the time required for receiving and leaving the conveyed object can be further shortened.

According to the 2nd viewpoint of this invention, the stocker comprised as follows is provided. That is, a storage shelf having a storage shelf capable of storing a plurality of conveyed objects arranged in a vertical direction and a horizontal direction, and a rail provided in parallel with the storage shelf, a plurality of stacker cranes capable of traveling on the rail, and a transported object It has a port for receiving and shipping. The rails are laid so as to constitute a plurality of travel paths parallel and adjacent to each other, and the plurality of stacker cranes may travel independently of each other on the travel paths. The storage shelf is disposed on both sides of the plurality of travel paths. Each of the stacker cranes includes a transfer means including a table that can be elevated in a vertical direction, a linear slide fork provided on the table, and capable of advancing and retreating from the storage shelf. It is provided with a roller conveyor for transferring to the port. The arrangement direction of the linear slide fork of the stacker crane traveling one of the travel paths is opposite to the arrangement direction of the linear slide fork of the stacker crane traveling the travel path adjacent thereto.

Also in this configuration, by adopting a linear slide fork as the transfer means of the stacker crane and omitting the turning function, it is possible to reduce the size and weight, to operate lightly, and to shorten the time for the receipt and delivery work. . In addition, even when the port is arranged on the side opposite to the storage shelf, the conveyed object can be simply transferred to the roller conveyor and the port. In addition, it is possible to provide a stocker having a high capacity, a short time required for receipt and release, and a low installation cost.

In said stocker, it is preferable that the conveying means of the said stacker crane is comprised so that the conveyed object loading surface of the said linear slide fork can be lowered to a position lower than the roller upper surface of the said roller conveyor.

This configuration enables the conveyed object to be transferred to the roller conveyor simply by lowering the conveying means, so that a simpler structure can be realized. In addition, the conveyed object can be quickly relayed from the conveying means to the roller conveyor, so that the time required for receiving and leaving the conveyed object can be further shortened.

1 is an upward perspective view showing the overall configuration of a stocker according to an embodiment of the present invention.

FIG. 2 is a sectional view of an essential part showing the operation of the roller conveyor section of the stacker crane. FIG.

Fig. 3 is an explanatory diagram showing a state in which a cassette is lifted and retracted by a linear slide fork for shipment, (A) is a front view, and (B) is a side sectional view.

4A is a front view showing a state of lowering a cassette inserted into a stacker crane.

4B is a side cross-sectional view showing a state of lowering a cassette inserted into a stacker crane.

Fig. 5A is a front view showing the state where the cassette is transferred from the conveying means to the roller conveyor.

FIG. 5B is a side sectional view showing a state where the cassette is transferred from the conveying means to the roller conveyor. FIG.

FIG. 6A is a front view illustrating the transfer of a cassette from a roller conveyor to a conveyor port. FIG.

FIG. 6B is a side cross-sectional view illustrating the transfer of a cassette from a roller conveyor to a conveyor port. FIG.

7 is a plan view illustrating a stocker of another configuration.

8 is a plan view illustrating another modification of the stocker of FIG. 7.

9 is a top perspective view showing a conventional configuration of a stocker.

<Explanation of symbols for the main parts of the drawings>

5: stacker crane 6: stalker

7: shelf body (storage shelf) 17: conveyor port (port)

18: Inline port (port) 28: Rail

32: lifting frame (table) 33: linear slide fork

34: conveyor table (roller conveyor) 36: transfer means

Embodiment of this invention is described. BRIEF DESCRIPTION OF THE DRAWINGS The upper perspective view which shows the whole structure of the stocker which concerns on one Embodiment of this invention, and FIG. 2 is a sectional side view of the principal part which shows the operation description of the roller conveyor of a stacker crane.

In FIG. 1, the stocker 6 of this embodiment is equipped with the shelf main body 7 of the storage shelf, the stacker crane 5, the conveyor port (port) 17, and the rail 28 as main structures. Doing. The shelf main body 7 is arrange | positioned at one side of the rail 28, and the conveyor port 17 is arrange | positioned in the opposing position with the shelf main body 7 and the rail 28 interposed.

The shelf body 7 includes a shelf 12 on which a notch 38 is formed, and a stocker outer wall 15, and stores a plurality of cassettes (conveyed material) 35 arranged in a vertical direction and a horizontal direction. It is possible.

The rails 28 are provided in pairs in parallel with the shelf main body 7, and one said stacker crane 5 is comprised so that a run on the rails 28 is possible. This stacker crane 5 is equipped with the conveying means 36, the conveyor table (roller conveyor) 34, the support | pillar 37, and the wheel 29 as main structures.

In addition, the conveyor port 17 is for receiving and discharging the cassette 35 with respect to the stocker 6, and is provided with a port frame 13 and a roller 16. A plurality of rollers 16 are arranged at appropriate intervals and are configured to be driven by a motor (not shown).

The conveying means 36 includes a lifting frame (table) 32, a linear slide fork 33, and a table lifting means 26. The lifting frame 32 is configured to be capable of lifting up and down in the vertical direction by the table lifting means 26. The linear slide fork 33 is provided on the lifting frame 32, extends to protrude from the storage shelf (the shelf main body 7), and is configured to be degenerate. Moreover, since this linear slide fork 33 is provided with respect to the said lifting frame 32 so that it cannot turn, it cannot advance in the direction away from the shelf main body 7. As shown in FIG. On the upper surface of the tip end portion of the linear slide fork 33, a stacking surface on which the cassette 35 can be stacked is formed.

In addition, the conveyor table 34 is to transfer the cassette 35 from the conveying means 36 to the conveyor port 17, and the conveyor frame 31 having an upward open shape installed under the stacker crane 5. ) And a plurality of rollers 30 rotatably supported by the conveyor frame 31. This roller 30 is provided so that the height of the upper surface may correspond with the height of the upper surface of the roller 16 of the said conveyor port 17. As shown in FIG. The roller 30 is able to be driven by a motor (not shown), and the cassette 35 mounted on the roller 30 is oriented along the expansion and contraction of the linear slide fork 33 (in other words, the linear slide fork). In the retraction direction of (33).

The conveyor table 34 is comprised in the shape which does not interfere with the said lifting frame 32 and the linear slide fork 33. As shown in FIG. That is, a space portion is formed in the side wall portion of the conveyor frame 31 of the conveyor table 34 to accommodate the lifting frame 32 having a frame shape, and a space in which the linear slide fork 33 can be accommodated between the side wall portions. Is formed.

Next, the function of the conveyor table 34 in the stacker crane 5 is demonstrated using FIGS. 3-6B. 3-6B, (A) is a front view, (B) has shown the side sectional drawing.

FIG. 3 shows a situation where the cassette 35 is taken out of the shelf 12 and the linear slide fork 33 is retracted therefrom. When the linear slide fork 33 completes evacuation, as shown in FIGS. 4A and 4B, the cassette 35 and the linear slide fork 33 are located immediately above the lifting frame 32. The stacker crane 5 then operates the table lifting means 26 to lower the lifting frame 32. Since the lifting frame 32 and the linear slide fork 33 are configured so as not to interfere with the conveyor table 34 as described above, the lifting frame 32 passes through the conveyor table 34 from the top to the bottom of the conveyor. The lower part of the table 34 (strictly speaking, the inside of the conveyor frame 31) can penetrate and descend.

When the linear slide fork 33 enters and descends to the lower portion of the conveyor table 34 in the state where the cassette 35 is mounted, the cassette 35 is moved to the conveyor table 34 as shown in FIGS. 5A and 5B. On the roller 30 and remain on the roller 30. Subsequently, the conveyor table 34 rotationally drives the roller 30 supported by the conveyor frame 31 to transport the cassette 35 to the conveyor port 17 facing and adjacent to the conveyor table 34 (Fig. 6a, 6b and 2). When the cassette 35 is transferred out of the lifting operation area of the conveyor table 34, the conveyor table 34 can be lifted and lowered.

In addition, although the stocker 6 which shows the top view in FIG. 7 is basically the same structure as FIG. 1, a plurality (three) of stacker cranes 5 are provided on the common rail 28, and the conveyor port 17 In addition, the structure of FIG. 1 differs in that three inline ports 18 are provided adjacent to the shelf main body 7. The inline port 18 is a port used when the liquid crystal manufacturing device 8 directly loads and leaves the cassette 35 with respect to the stocker 6.

This inline port 18 is provided on the same side as the shelf main body 7, and the transfer of the cassette 35 between the stacker crane 5 is carried out by the linear slide fork 33 of the transfer means 36. Is done. For example, when the notch 38 is formed in the inline port 18 in the same manner as the shelf 12, the cassette 35 can be transferred between the linear slide fork 33 and the inline port 18. Moreover, the inline port 18 of the liquid crystal manufacturing apparatus 8 is a port which connects the stocker 6 and the liquid crystal manufacturing apparatus 8, and it is considered to connect directly with a roller conveyor or to connect via a conveyance robot.

Next, the receipt operation | movement operation of the cassette 35 to the shelf 12 by the stocker 6 shown in FIG. 1, and FIG. 7 is demonstrated.

Referring to the receiving operation, first, the cassette 35 conveyed by another conveying means such as an unmanned conveyance trolley or a lifter, which is not shown, is loaded on the conveyor port 17 shown in FIG. 1 and the like. Then, the stacker crane 5 travels to the opposite position of the conveyor port 17, stops, and lowers the lifting frame 32 to the lower limit of the lifting range. At this time, as shown in FIG. 2, the height of the upper surface of the roller 16 of the conveyor port 17 and the height of the upper surface of the roller 30 of the conveyor table 34 correspond substantially.

Then, the roller 16 of the conveyor port 17 and the roller 30 of the conveyor table 34 of the stacker crane 5 are driven, and the cassette 35 loaded on the conveyor port 17 is a stacker crane. It is conveyed on the conveyor table 34 of (5). The completion of the transfer is detected by a sensor (not shown) attached to the conveyor table 34, by which the cassette 35 is accurately positioned on the conveyor table 34.

The stacker crane 5 then raises the elevating frame 32 from the lower limit position. At this time, the cassette 35 mounted on the conveyor table 34 is linear slide fork which rises integrally with the elevating frame 32. It is lifted by 33. Then, the stacker crane 5 horizontally moves on the rail 28 along the shelf 12, raises the lifting frame 32, and faces the transfer means 36 to the desired shelf position. Stop.

After the stacker crane 5 stops, the transfer means 36 extends the fork to the stacking position of the shelf 12 with the cassette 35 mounted on the linear slide fork 33, so that the fork tip (i.e., the cassette ( 35)]. Next, when the lifting frame 32 is lowered by a small amount, the tip of the fork passes through the notch 38 downward, the upper surface of the tip of the fork is lower than the shelf surface, and the cassette 35 is raised on the shelf 12. And remain on the shelf 12. The storage of the cassette 35 to the stocker 6 is completed by the above, and the stacker crane 5 degenerates the fork of the linear slide fork 33 after that, and transfers to a next operation.

Next, the shipping operation will be described, and the shipping operation proceeds in a completely opposite order to the above-mentioned wearing operation. First, the stacker crane 5 moves the conveyance means 36 to the shelf position in which the target cassette 35 was accommodated, advances the linear slide fork 33, and then the front end portion of the linear slide fork 33 The lifting frame 32 is slightly raised to pass the notch 38 from the bottom up, and the cassette 35 is placed on the loading surface (FIG. 3). Then, the linear slide fork 33 is retracted as shown in Figs. 4A and 4B to draw the cassette 35 into the stacker crane 5 and travel to the conveyor port 17 position.

The stacker crane 5 lowers the lifting frame 32 while traveling to the conveyor port 17, and after arriving at the conveyor port 17, lowers the lifting frame 32 further down the conveyor table 34 to form a cassette. Transfer 35 to conveyor port 17 (FIGS. 5A and 5B). Subsequently, the rollers 30 · 16 of the conveyor table 34 and the conveyor port 17 are driven so that the cassette 35 is transferred from the conveyor table 34 to the conveyor port (FIGS. 6A and 6B). The cassette 35 mounted on the conveyor port 17 is conveyed by a conveyance trolley etc., and is carried out outside.

Moreover, these series of conveyance conveyance operations are performed based on the command signal from control apparatuses, such as MCS which is in charge of production management, and MES which collectively manages a conveyance system. In addition, it is also possible that the controller of the stocker 6 issues the same command signal when offline.

As shown above, the stocker 6 of this embodiment is equipped with the shelf main body 7 which can hold | maintain the cassette 35 arrange | positioned in the vertical direction and the horizontal direction, and is parallel with this shelf main body 7 A rail 28, a stacker crane 5 capable of traveling on the rail 28, and a conveyor port 17 for loading and unloading the cassette 35 to and from the stocker 6. . The stacker crane 5 includes an elevating frame 32 that can be elevated in a vertical direction, and a linear slide fork 33 that is provided on the elevating frame 32 and that can move back and forth against the shelf main body 7. The conveying means 36 provided, and the conveyor table 34 which inherits the said cassette 35 from this conveying means 36, and can transfer to the said conveyor port 17 are provided.

As described above, by adopting the linear slide fork 33 in the transfer means 36 of the stacker crane 5 and omitting the turning function, it is possible to reduce the size and weight, and to operate lightly. The time for outgoing work can be shortened. This effect is particularly remarkable when the cassette 35 is large in weight. In addition, even when the conveyor port 17 is arrange | positioned on the opposite side to the shelf main body 7, as shown in FIG. 1 or FIG. 7, the cassette 35 can be delivered to the conveyor table 34 and the conveyor port 17. FIG. Can be. Therefore, the effect substantially equivalent to the conveying means which has a turning function as shown to patent document 1 etc. can be exhibited.

Further, in the stocker 6, the transfer means 36 of the stacker crane 5 moves the top end surface (cassette loading surface) of the linear slide fork 33 to the roller 30 upper surface of the conveyor table 34. It can be configured to be lowered to a lower position.

Thereby, since the cassette 35 can be transferred to the conveyor table 34 only by lowering the lifting frame 32, a simpler structure can be realized. In addition, the cassette 35 can be quickly relayed from the conveying means 36 to the conveyor table 34, so that the time required for shipping the cassette 35 can be further shortened. In addition, since the cassette 35 can be transferred from the conveyor table 34 to the conveying means 36 only by raising the lifting frame 32 from the lower limit position, the time required for wearing is also shortened. .

8 shows a modified example, and this stocker 6 has a structure in which two stockers of FIG. 7 are disposed to face each other. In the stocker 6 of FIG. 8, the rails 48 and rails 47 are divided into conveyor ports 17 and arranged in a straight line, respectively, and are laid parallel to the rails 28. The distance between the rail 48 and the rail 28 and the distance between the rail 47 and the rail 28 are the same, and the stacker crane 5 has each rail of the rail 28, the rail 47, and the rail 48. The above can run independently of each other. And the shelf main body 7a, 7b of a storage shelf is arrange | positioned at the both sides of the three pairs of rail between the said three pairs of rail 28, the rail 47, and the rail 48.

For example, when the cassette 35 is transferred from one shelf main body 7a to the other shelf main body 7b, the stacker crane 5 traveling on the rails 28 is a cassette on a predetermined shelf 12. The 35 is taken out and positioned at the conveyor port 17 to stop. The cassette is conveyed to the conveyor port 44 via the conveyor table 34, the conveyor port 17, and the conveyor 45 of the stacker crane 5, to the stacker crane 5 traveling on the rail 48. Delivered. In the case where the cassette 35 is transferred from the shelf main body 7b to the shelf main body 7a, the cassette 35 is transferred via the opposite path.

Moreover, when transferring the cassette 35 from the shelf main body 7b which the rail 48 opposes to the shelf main body 7b which the rail 47 opposes, the stacker crane which runs on the rail 48 ( 5) The cassette 35 is taken out of the predetermined shelf 12. The cassette 35 is conveyed to the conveyor port 43 via the conveyor table 34, the conveyor port 44, the conveyor 46, the conveyor port 17, and the conveyor 45 of the stacker crane 5, and is railed. 47 is transmitted to the stacker crane 5 traveling above.

And in the stacker crane 5 which runs the upper rail 28 in FIG. 8, the linear slide fork 33 of the conveying means 36 is able to advance with respect to the upper shelf main body 7 in the figure. The linear slide fork 33 of the stacker crane 5 which is installed and travels on the lower rail 28 is provided to be able to enter the lower shelf body 7 in the drawing. In short, the arrangement direction of the linear slide fork 33 of the stacker crane 5 is reversed in the upper side and the lower side in the figure. Thereby, the cassette 35 can be easily transmitted with respect to the shelf main body 7 arrange | positioned at the both sides of the rail 28. As shown in FIG.

As shown above, in the stocker 6 of the structure of FIG. 8, a rail is provided so that the several path | route path | route which may be parallel and adjacent to each other may be provided, and each of the several path | route stacker crane 5 may mutually independently. It is possible to run. And the shelf main body 7 is arrange | positioned at the both sides of the said several travel path | route, and the arrangement direction of the linear slide fork 33 of the stacker crane 5 which travels one said travel path | route, and the said travel path | route adjacent to it The arrangement direction of the linear slide fork 33 of the stacker crane 5 which travels is reversed.

By configuring in this way, the effect substantially the same as the structure of FIG. 1 or FIG. 7 can be exhibited, and the improvement of a storage capacity can be aimed at easily. In addition, although the structure of FIG. 8 is similar in function to the conventional structure of FIG. 9, according to the inventor's knowledge, compared with the conventional structure, the structure of FIG. 8 requires time for apparatus size, goods receipt, and shipment. It is confirmed that it is excellent in any of facility cost.

As mentioned above, although preferred embodiment and the modification of this invention were shown, the above structure is an example and can be changed as follows, for example.

The conveyor port 17 can be arranged not only on the side opposite to the shelf body 7 but also on the same side as the shelf body 7. In addition, the conveyor port 17 is not limited to when receiving and leaving the goods, but can be arranged by dividing it into a port dedicated to goods receipt and a port dedicated to goods issue. In addition, as the object to be conveyed, the above-described FOUP or the like may be employed instead of the cassette 35.

The lifting frame 32 and the conveyor table 34 are not limited to the shape shown in FIG. 1 and the like, and can be changed to an appropriate shape. However, if the conveying means 36 and the conveyor table 34 are formed in a shape that does not interfere with each other, the conveying means 36 can be lowered below the upper surface of the roller 30 of the conveyor table 34. It's as easy as that.

Although this invention was detailed also demonstrated with reference to the specific embodiment, it is clear for those skilled in the art that various changes and correction can be added without deviating from the mind and range of this invention.

This application is based on the JP Patent application (Japanese Patent Application No. 2005-334037) of an application on November 18, 2000, The content is taken in here as a reference.

In this invention, the linear slide fork was employ | adopted as the transfer means of a stacker crane, and the turning function was abbreviate | omitted. This configuration can reduce the size and weight of the device, make it possible to operate the device lightly, and shorten the time for receiving and leaving the product. Moreover, even if the port is arrange | positioned on the opposite side to a storage shelf, a conveyed object can be delivered to a roller conveyor and a port. Therefore, even if there is no turning function, the effect which is substantially equivalent to the conveying means which has a conventional turning function can be exhibited.

Claims (4)

A stocker comprising a storage shelf capable of storing a plurality of conveyed objects arranged in a vertical direction and a horizontal direction, A rail laid parallel to the storage shelf, A stacker crane capable of traveling on the rail, A port for receiving and leaving the conveyed object against the stocker, The stacker crane, A conveying means having a table which can be elevated in a vertical direction, and a linear slide fork provided on the table and capable of moving forward and backward facing the storage shelf; A stocker comprising: a roller conveyor for receiving the conveyed object from the conveying means and transferring the conveyed object to the port. 2. The stocker according to claim 1, wherein the transfer means of the stacker crane is configured to lower the conveyed object loading surface of the linear slide fork to a position lower than the roller upper surface of the roller conveyor. A stocker having a storage shelf capable of storing a plurality of conveyed objects arranged in a vertical direction and a horizontal direction, A rail laid parallel to the storage shelf, With a plurality of stacker cranes which can run on this rail, A port for receiving and leaving the conveyed object against the stocker, The rails are laid so as to constitute a plurality of travel paths parallel to and adjacent to each other, and the plurality of stacker cranes can travel independently of each other on the travel paths, The storage shelf is disposed on both sides of the plurality of travel paths, Each stacker crane, Transfer means having a table which can be elevated in a vertical direction, and a linear slide fork provided on the table and capable of moving forward and backward facing the storage shelf; And a roller conveyor which takes the conveyed object from the conveying means and delivers it to the port, The stocker of claim 1, wherein the arrangement direction of the linear slide fork of the stacker crane traveling one of the traveling paths is opposite to the arrangement direction of the linear slide fork of the stacker crane traveling the adjacent traveling path thereof. The stocker according to claim 3, wherein the transfer means of the stacker crane is configured to lower the conveyed object loading surface of the linear slide fork to a position lower than the roller upper surface of the roller conveyor.

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