JP2007186319A - Conveying system - Google Patents

Conveying system Download PDF

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Publication number
JP2007186319A
JP2007186319A JP2006007406A JP2006007406A JP2007186319A JP 2007186319 A JP2007186319 A JP 2007186319A JP 2006007406 A JP2006007406 A JP 2006007406A JP 2006007406 A JP2006007406 A JP 2006007406A JP 2007186319 A JP2007186319 A JP 2007186319A
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Prior art keywords
conveyor
stacker crane
tray
workpiece
workpieces
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JP2006007406A
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Japanese (ja)
Inventor
Hiroshi Fukazawa
博 深澤
Ryosuke Tawara
良祐 田原
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Murata Machinery Ltd
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Murata Machinery Ltd
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Priority to JP2006007406A priority Critical patent/JP2007186319A/en
Priority to TW095129092A priority patent/TW200728184A/en
Priority to KR1020060079856A priority patent/KR20070076369A/en
Priority to CNA2006101464174A priority patent/CN101003326A/en
Publication of JP2007186319A publication Critical patent/JP2007186319A/en
Pending legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0407—Storage devices mechanical using stacker cranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0407—Storage devices mechanical using stacker cranes
    • B65G1/0421—Storage devices mechanical using stacker cranes with control for stacker crane operations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/52—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
    • B65G47/53—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices between conveyors which cross one another
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/07—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for semiconductor wafers Not used, see H01L21/677
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C13/00—Other constructional features or details
    • B66C13/18—Control systems or devices
    • B66C13/48—Automatic control of crane drives for producing a single or repeated working cycle; Programme control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Jib Cranes (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To efficiently convey and store workpieces and change a conveyance form of the workpieces between racks and outside of the racks. <P>SOLUTION: A first stacker crane 8 is connected to a second stacker crane 14 by a conveyor, and this conveying system is constituted by a plurality of units of which stop/start is controllable independently of each other and which have transfer positions between the units and the stacker crane 14. The conveyor is arranged above the racks 12, 13 provided along the traveling route of the stacker crane 14, and the racks 12, 13 are provided with dispensing devices 23 and stacking devices 24. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

この発明は搬送システムに関し、特にワークをトレイに載置して搬送するシステムに関する。   The present invention relates to a transport system, and more particularly to a system for transporting a work placed on a tray.

出願人は液晶パネルやＥＬパネルなどのガラス基板や半導体ウェハーなどのワークをトレイに載せて搬送することを検討した。そして出願人は、積層が容易でかつワークの出し入れが自在なトレイの構造を提案した（特許文献１）。次に出願人は、このようなトレイの段積みと段ばらしとができる装置を提案した（特許文献２）。
特開２００５−９３５８５号公報 特開２００５−８９０４８号公報 The applicant studied to transport a work such as a glass substrate such as a liquid crystal panel or an EL panel or a semiconductor wafer on a tray. The applicant has proposed a tray structure that allows easy stacking and allows workpieces to be taken in and out (Patent Document 1). Next, the applicant proposed an apparatus capable of stacking and stacking such trays (Patent Document 2).
JP 2005-93585 A JP 2005-89048 A

この発明の課題は、ワークの搬送を効率的に行える搬送システムを提供することにある。
請求項２の発明での追加の課題は、ワークの搬送をさらに効率的にすることにある。
請求項３の発明での追加の課題は、第１の搬送装置からラックまでの間はワークを複数集積して搬送し、ラックの外部には個々のワークを切り出してあるいはより少ない集積枚数で供給できるようにすることにある。 The subject of this invention is providing the conveyance system which can convey a workpiece | work efficiently.
An additional problem in the invention of claim 2 is to make the transfer of the workpiece more efficient.
An additional problem in the invention of claim 3 is that a plurality of workpieces are stacked and transported from the first transport device to the rack, and individual workpieces are cut out from the rack or supplied in a smaller number of stacks. There is to be able to do it.

この発明の搬送システムは、所定の搬送方向に沿ってワークを搬送する第１の搬送装置と、第１の搬送装置の搬送方向と直角な方向に走行してワークを搬送するスタッカークレーンと、複数の区間からなりかつ前記スタッカークレーンの走行方向に沿って設けられ、前記第１の搬送装置と前記スタッカークレーンとの間でワークを搬送し、さらに前記各区間が、他の区間と独立して停止／起動できかつ前記スタッカークレーンとの間でワークを受渡し自在なコンベヤ、とを備えたものである。   A transport system according to the present invention includes a first transport device that transports a workpiece along a predetermined transport direction, a stacker crane that travels in a direction perpendicular to the transport direction of the first transport device, and transports the workpiece, And is provided along the traveling direction of the stacker crane, transports the workpiece between the first transport device and the stacker crane, and each section stops independently of the other sections. A conveyor that can be activated and can transfer workpieces to and from the stacker crane.

好ましくは、前記コンベヤを、前記スタッカークレーンの走行経路のほぼ全長に渡って設ける。ここにほぼ全長とは、スタッカークレーンの走行経路の反対側の端部付近などの位置を除いても良いことを意味する。   Preferably, the conveyor is provided over substantially the entire length of the travel path of the stacker crane. Here, “substantially full length” means that a position such as the vicinity of the opposite end of the travel path of the stacker crane may be excluded.

また好ましくは、前記第１の搬送装置と前記コンベヤ並びに前記スタッカークレーンはワークを複数集積して搬送すると共に、前記コンベヤをワーク保管用のラックに設けて、前記スタッカークレーンによりコンベヤとラックの棚との間でワークを移載し、さらにラックに集積されたワークを切り出すための切り出し装置と、切り出されたワークを集積するための集積装置とを設ける。   Preferably, the first transfer device, the conveyor, and the stacker crane collect and transfer a plurality of workpieces, and the conveyor is provided in a workpiece storage rack. A cutting device for transferring the workpieces between them and cutting out the workpieces accumulated in the rack and a stacking device for stacking the cut workpieces are provided.

この発明ではスタッカークレーンと並行にコンベヤがワークを搬送するので、搬送効率が向上する。そしてコンベヤは区間毎に独立して停止／起動できるので、ワークをバッファでき、また区間毎にスタッカークレーンとの間でワークを受け渡しできるので、スタッカークレーンがワークを持って走行する距離を短くできる。このため極めて効率的にワークを搬送できる。   In this invention, since a conveyor conveys a workpiece | work in parallel with a stacker crane, conveyance efficiency improves. Since the conveyor can be stopped / started independently for each section, the work can be buffered and the work can be transferred to and from the stacker crane for each section, so that the distance that the stacker crane travels with the work can be shortened. For this reason, a workpiece | work can be conveyed very efficiently.

ここでスタッカークレーンの走行経路のほぼ全長に渡ってコンベヤを設けると、スタッカークレーンがワークを持って走行する距離をさらに短くできる。スタッカークレーンの作業は、コンベヤとの間でワークを受け渡しすることと、無走行であるいは短距離走行で、コンベヤ以外のラックなどにワークを受け渡しすることに限られる。   Here, if the conveyor is provided over almost the entire length of the travel path of the stacker crane, the distance traveled by the stacker crane with the workpiece can be further shortened. The work of the stacker crane is limited to delivering a workpiece to and from a conveyor and delivering a workpiece to a rack or the like other than the conveyor without traveling or traveling a short distance.

コンベヤをワーク保管用のラックに設け、ラックに集積されたワークを切り出すための切り出し装置と、切り出されたワークを集積するための集積装置とを設けると、スタッカークレーンまではワークを載置したトレイを積層してあるいはワークをカセットに収容して搬送し、ラックから外部へは個々のワークなどの単位で搬送できる。このようにラックでワークの搬送形態を変更できる。   If a conveyor is provided in a rack for storing workpieces and a cutting device for cutting out the workpieces accumulated in the rack and a stacking device for collecting the cut workpieces are provided, the tray on which the workpieces are placed up to the stacker crane The workpieces can be stacked or conveyed in a cassette and conveyed from the rack to the outside in units of individual workpieces. In this way, the work conveyance mode can be changed by the rack.

以下に本発明を実施するための最適実施例を示す。   In the following, an optimum embodiment for carrying out the present invention will be shown.

図１〜図３に、実施例の搬送システム２を示す。各図において４は第１の自動倉庫で、１０はこれに接続した第２の自動倉庫で、６，７は第１の自動倉庫４のラックで、１２，１３は第２の自動倉庫１０のラックである。自動倉庫４には１台〜複数台のスタッカークレーン８を配置し、これが第１の搬送装置に対応する。第２の自動倉庫１０には１台〜複数台のスタッカークレーン１４を配置し、実施例では２台のスタッカークレーン１４，１４を配置する。第１の自動倉庫４に第２の自動倉庫１０を直角に複数接続し、また第１の自動倉庫４にはラック６，７を設けず、単にスタッカークレーン８を走行させて、第２の自動倉庫１０，１０の間でワークを載置したトレイの積層体１６を搬送するだけでも良いあるいは自動倉庫４に代えて単に長距離コンベヤを設けても良い。   The conveyance system 2 of an Example is shown in FIGS. In each figure, 4 is a first automatic warehouse, 10 is a second automatic warehouse connected thereto, 6 and 7 are racks of the first automatic warehouse 4, and 12 and 13 are of the second automatic warehouse 10. It is a rack. One to a plurality of stacker cranes 8 are arranged in the automatic warehouse 4 and correspond to the first transfer device. One to a plurality of stacker cranes 14 are arranged in the second automatic warehouse 10, and in the embodiment, two stacker cranes 14 and 14 are arranged. A plurality of second automatic warehouses 10 are connected to the first automatic warehouse 4 at a right angle, and the racks 6 and 7 are not provided in the first automatic warehouse 4, and the stacker crane 8 is simply run to make the second automatic The tray stack 16 on which the workpieces are placed may be merely transported between the warehouses 10 and 10, or a long-distance conveyor may be simply provided in place of the automatic warehouse 4.

ワークの種類は液晶パネルの基板やＥＬパネルの基板、あるいは半導体ウェハーなどとし、搬送システム２はクリーンルーム内に設ける。第２の自動倉庫１０ではラック１２，１３の長手方向に沿ってその全長に渡るコンベヤ１８（図２，図３）を設け、好ましくはラック１２，１３の天井部にコンベヤ１８を設ける。また第２の自動倉庫１０と例えば直角な方向に工程内コンベヤ２０，２１を設け、工程内コンベヤ２０，２１をループ状に接続し、自動倉庫１０の段ばらし装置２３から供給されたトレイ積層体１６ｂあるいは個々のトレイが工程内コンベヤ２１から自動倉庫１０内の段積み装置２４へと１周して戻るようにする。２２はコンベヤ付きターンテーブルで、自動倉庫４，１０の接続部に、ここではスタッカークレーン１４から見て後述のステーション６，２７の手前の位置に設け、トレイ積層体１６の向きを例えば９０°水平面内で回転させる。実施例ではラック１２，１３の双方にコンベヤ付きターンテーブル２２を設けたが、少なくともその一方に設ければよい。   The type of workpiece is a liquid crystal panel substrate, an EL panel substrate, or a semiconductor wafer, and the transfer system 2 is provided in a clean room. In the second automatic warehouse 10, a conveyor 18 (FIGS. 2 and 3) is provided along the longitudinal direction of the racks 12 and 13, and the conveyor 18 is preferably provided on the ceiling of the racks 12 and 13. Further, for example, in-process conveyors 20 and 21 are provided in a direction perpendicular to the second automatic warehouse 10, the in-process conveyors 20 and 21 are connected in a loop shape, and the tray stack supplied from the leveling device 23 of the automatic warehouse 10. 16b or individual trays return from the in-process conveyor 21 to the stacking device 24 in the automatic warehouse 10 by one round. Reference numeral 22 denotes a turntable with a conveyor, which is provided at a connecting portion of the automatic warehouses 4 and 10, here in front of the stations 6 and 27 to be described later when viewed from the stacker crane 14. Rotate within. In the embodiment, the turntables 22 with conveyors are provided on both the racks 12 and 13, but they may be provided on at least one of them.

２６，２７はラック６に設けたステーションで、ステーション２６はスタッカークレーン８からトレイ積層体１６を積み下ろすステーションで、ステーション２７からトレイ積層体１６をスタッカークレーンへ移載する。またステーション２６，２７にはコンベヤが設けられ、ラック１２，１３上のコンベヤと接続してある。   26 and 27 are stations provided on the rack 6, and the station 26 is a station for loading and unloading the tray stack 16 from the stacker crane 8, and the tray stack 16 is transferred from the station 27 to the stacker crane. The stations 26 and 27 are provided with conveyors and are connected to the conveyors on the racks 12 and 13.

２５はコントローラで、搬送システム２を制御し、特にスタッカークレーン８，１４，コンベヤ１８，ターンテーブル２２，段ばらし装置２３，段積み装置２４などを制御する。ワークの搬送形態は、スタッカークレーン８，１４やラック１２，１３上のコンベヤ１８では、トレイ積層体１６もしくはこれを収容したカセットである。これに対してコンベヤ２０，２１での搬送形態は、個々のトレイもしくはトレイ積層体１６よりも少ない枚数だけトレイを積層したトレイ積層体１６ｂである。   Reference numeral 25 denotes a controller that controls the transport system 2, and in particular controls the stacker cranes 8, 14, the conveyor 18, the turntable 22, the stacking device 23, the stacking device 24, and the like. The workpiece is transported in the stacker cranes 8 and 14 and the conveyors 18 on the racks 12 and 13 by the tray stack 16 or a cassette accommodating the same. On the other hand, the conveyance form by the conveyors 20 and 21 is a tray stacked body 16 b in which trays are stacked by a smaller number than individual trays or tray stacked bodies 16.

図２に示すように、スタッカークレーン１４は昇降台２８をマスト２９に沿って昇降させ、スライドフォークなどの移載装置３０を備えて、トレイ積層体１６を移載する。なお第１の自動倉庫４のスタッカークレーン８も同様の構成とする。ラック１２，１３に設けるコンベヤ１８はコンベヤユニット３２を複数搬送方向に沿って直列に接続したもので、各コンベヤユニット３２にはモータＭ１を設けて、コンベヤユニット３２のローラコンベヤをユニット毎に独立して制御する。また好ましくは各コンベヤユニット３２に、少なくとも複数のコンベヤユニットに、リフタ３４を設けてモータＭ２で駆動し、スタッカークレーン１４の移載装置３０でトレイ積層体の受け渡しができるようにする。   As shown in FIG. 2, the stacker crane 14 raises and lowers a lift 28 along a mast 29, and includes a transfer device 30 such as a slide fork to transfer the tray stack 16. The stacker crane 8 of the first automatic warehouse 4 has the same configuration. The conveyors 18 provided in the racks 12 and 13 are formed by connecting conveyor units 32 in series along a plurality of conveying directions. Each conveyor unit 32 is provided with a motor M1 so that the roller conveyor of the conveyor unit 32 is independent for each unit. Control. Preferably, each conveyor unit 32 is provided with a lifter 34 on at least a plurality of conveyor units and is driven by a motor M2, so that the tray stack can be transferred by the transfer device 30 of the stacker crane 14.

段ばらし装置２３と段積み装置２４は構造は同じもので、シリンダ３９により水平方向に出退する一対の出退コンベヤ３８，３８と、トレイの側面に設けられトレイのフランジの底部あるいはトレイの側面をチャックするチャック４０と、トレイ積層体を昇降させるパンタグラフ機構４６とを備えている。３６は上側のトレイ積層体で、チャック４０により支持され、４２は出退コンベヤ３８で支持されたトレイで、４４は下部のトレイ積層体で、パンタグラフ機構４６により支持されている。そしてラック１２には例えば上下２段に棚を設ける。   The stacking device 23 and the stacking device 24 have the same structure, and a pair of exit / retreat conveyors 38 and 38 which are horizontally retracted by a cylinder 39, and the bottom of the tray flange or the side surface of the tray provided on the side surface of the tray. And a pantograph mechanism 46 for raising and lowering the tray stack. Reference numeral 36 denotes an upper tray stack, which is supported by a chuck 40, 42 is a tray supported by a retractable conveyor 38, and 44 is a lower tray stack, which is supported by a pantograph mechanism 46. The rack 12 is provided with shelves in two upper and lower stages, for example.

段ばらし装置２３はスタッカークレーン１４からトレイ積層体１６を供給され、そのうち任意の高さ位置のトレイを任意の枚数だけ切り出して、コンベヤ２０へと供給する。段ばらしではトレイ積層体をパンタグラフ機構４６で上昇させ、次いで切り出しが不要なトレイの底部に向けてチャック４０を前進させる。なおチャック４０を高さ方向に複数並列に設けると、１回に切り出すトレイの枚数を自由に変更できる。次にパンタグラフ機構４６を下降させ、切り出すトレイのフランジ底部へ向けて出退コンベヤ３８を進出させ、これよりも下側のトレイ積層体４４をパンタグラフ機構４６で下降させる。この後、出退コンベヤ３８でトレイ４２を１枚あるいは複数枚積層してコンベヤ２０へと切り出す。   The stacking device 23 is supplied with the tray stack 16 from the stacker crane 14, cuts out an arbitrary number of trays at an arbitrary height, and supplies them to the conveyor 20. In stacking, the tray stack is raised by the pantograph mechanism 46, and then the chuck 40 is advanced toward the bottom of the tray that does not require cutting. If a plurality of chucks 40 are provided in parallel in the height direction, the number of trays cut out at a time can be freely changed. Next, the pantograph mechanism 46 is lowered, the exit / retreat conveyor 38 is advanced toward the bottom of the flange of the tray to be cut out, and the lower tray stack 44 is lowered by the pantograph mechanism 46. Thereafter, one or a plurality of trays 42 are stacked on the exit / retreat conveyor 38 and cut out to the conveyor 20.

段ばらし装置２３も段積み装置２４も構造は共通にでき、例えばトレイ積層体１６の高さ方向の中間位置に新たなトレイを段積みする場合、これよりも上側のトレイをチャック４０で支持し、下側のトレイをパンタグラフ機構４６と共に下降させ、その間にコンベヤ２１からトレイを搬入して、パンタグラフ機構４６を上昇させて、新たに搬入したトレイと下側のトレイ積層体とを合体する。パンタグラフ機構４６をさらに上昇させて上側に待避させたトレイ積層体と合体させると、段積みができる。コンベヤ２０，２１でトレイを枚葉搬送する場合、段積み装置２４では次の搬送先が共通のトレイを高さ方向に集めるのが好ましい。   The stacking device 23 and the stacking device 24 can have the same structure. For example, when stacking a new tray at an intermediate position in the height direction of the tray stack 16, the upper tray is supported by the chuck 40. The lower tray is lowered together with the pantograph mechanism 46, and the tray is loaded from the conveyor 21 during that time, the pantograph mechanism 46 is raised, and the newly loaded tray and the lower tray stack are combined. When the pantograph mechanism 46 is further raised and combined with the tray stack that is retracted upward, stacking is possible. When the trays are conveyed by the conveyors 20 and 21, it is preferable that the stacking device 24 collects common trays in the height direction as the next conveyance destination.

実施例の動作を示す。スタッカークレーン８により搬送されたトレイ積層体１６はステーション２６へ荷下ろしされ、ラック１２上のコンベヤ１８へと搬送される。ここでラック６，７の上部にも、コンベヤ１８と同様のコンベヤを設けると、スタッカークレーン１４と同様に、スタッカークレーン８の負担も軽減できる。ステーション２６へ荷下ろしされたトレイ積層体１６はラック１２に沿ってコンベヤ１８により搬送され、ラック１２，１３に保管する場合、スタッカークレーン１４によりコンベヤからラック１２，１３の棚内への移載を行う。また工程内コンベヤ２０側へ搬出する場合、スタッカークレーン１４によりコンベヤ１８やラック１２，１３の棚から段ばらし装置２３へと移載し、段ばらし装置２３で所要のトレイを切り出して工程内コンベヤ２０へと搬送する。   The operation of the embodiment will be described. The tray stack 16 transported by the stacker crane 8 is unloaded to the station 26 and transported to the conveyor 18 on the rack 12. Here, if the same conveyor as the conveyor 18 is provided also on the upper part of the racks 6 and 7, the burden of the stacker crane 8 can be reduced similarly to the stacker crane 14. When the tray stack 16 unloaded to the station 26 is conveyed along the rack 12 by the conveyor 18 and stored in the racks 12 and 13, the stacker crane 14 transfers the racks 12 and 13 from the conveyor to the shelves. Do. Further, when carrying out to the in-process conveyor 20 side, the stacker crane 14 transfers the conveyor 18 and the racks 12 and 13 from the shelves to the leveling device 23, cuts out a required tray by the leveling device 23, and in-process conveyor 20. Transport to.

この間２台のスタッカークレーン１４はほとんど走行せずに、コンベヤ１８トラック１２，１３間でトレイ積層体１６を移載すれば良い。また各ユニット３２をトレイ積層体のバッファやスタッカークレーン１４との間の移載ステーションとして使用できる。   During this time, the two stacker cranes 14 may hardly move and the tray stack 16 may be transferred between the conveyor tracks 12 and 13. Each unit 32 can be used as a transfer station between the tray stack buffer and the stacker crane 14.

工程内コンベヤ２０から図示しない処理装置へとトレイ内のワークを供給し、処理済みのワークをトレイに載置して工程内コンベヤ２１から段積み装置２４へと供給して段積みする。段積み装置２４からスタッカークレーン１４によりトレイ積層体１６を取り出し、ラック１３側のコンベヤへ移載する。図１に示すように、ラック１３側に戻ってきたトレイ積層体１６は、最初と向きが９０°変わっている。そこでターンテーブル付きコンベヤ２２でトレイ積層体１６を例えば９０°回転させて、トレイ積層体１６の向きを揃える。この後トレイ積層体１６をステーション２７へと搬出し、スタッカークレーン８でラック６，７内の所定位置や、次のステーションへと搬送する。   The work in the tray is supplied from the in-process conveyor 20 to a processing device (not shown), and the processed work is placed on the tray and supplied from the in-process conveyor 21 to the stacking device 24 for stacking. The tray stack 16 is taken out from the stacking device 24 by the stacker crane 14 and transferred to the conveyor on the rack 13 side. As shown in FIG. 1, the orientation of the tray stack 16 that has returned to the rack 13 side is changed by 90 ° from the beginning. Therefore, the tray stack 16 is rotated by, for example, 90 ° with the conveyor 22 with the turntable so that the directions of the tray stack 16 are aligned. Thereafter, the tray stack 16 is carried out to the station 27 and conveyed to a predetermined position in the racks 6 and 7 or to the next station by the stacker crane 8.

実施例では、任意のコンベヤユニット３２でスタッカークレーン１４との間でトレイ積層体１６の移載が自在である。図１の右側のスタッカークレーンへ供給するトレイ積層体１６も、コンベヤ１８から直接供給できる。ユニット３２がコンベヤ１８の区間に対応し、各区間毎にスタッカークレーン１４、１４との間でトレイ積層体１６の移載が自在である。さらに各ユニット３２は独立して起動／停止できるので、スタッカークレーン１４とトレイ積層体１６を移載する間、コンベヤ１８全体を停止させる必要がない。また各ユニット３２は、トレイ積層体１６のバッファとして利用できる。なお段ばらし装置２３，段積み装置２４の処理速度がスタッカークレーン１４やコンベヤ１８の搬送速度に比べて遅い場合、これらをコンベヤ２０，２１よりも多数設けても良い。   In the embodiment, the tray stack 16 can be transferred to and from the stacker crane 14 by an arbitrary conveyor unit 32. The tray stack 16 fed to the stacker crane on the right side of FIG. 1 can also be fed directly from the conveyor 18. The unit 32 corresponds to the section of the conveyor 18, and the tray stack 16 can be transferred between the stacker cranes 14 and 14 for each section. Furthermore, since each unit 32 can be started / stopped independently, it is not necessary to stop the entire conveyor 18 while the stacker crane 14 and the tray stack 16 are transferred. Each unit 32 can be used as a buffer for the tray stack 16. In addition, when the processing speed of the stacking device 23 and the stacking device 24 is slower than the transport speed of the stacker crane 14 and the conveyor 18, a larger number of these may be provided than the conveyors 20 and 21.

実施例では以下の効果が得られる。
(1) トレイ積層体１６の搬送を、コンベヤとスタッカークレーン１４の双方で行えるので効率的である。
(2) ラック１２，１３の上部にコンベヤを設けるので、スペース効率が高い。
(3) ターンテーブル付きコンベヤ２２によりトレイ積層体１６の向きを揃えることができる。
(4) 段ばらし装置２３や段積み装置２４により、スタッカークレーン８，１４までと、工程内コンベヤ２０，２１とで、トレイの搬送形態を変更できる。
In the embodiment, the following effects can be obtained.
(1) Since the tray stack 16 can be transported by both the conveyor and the stacker crane 14, it is efficient.
(2) Since a conveyor is provided above the racks 12 and 13, space efficiency is high.
(3) The direction of the tray stack 16 can be aligned by the conveyor 22 with a turntable.
(4) With the stacking device 23 and the stacking device 24, the tray transport mode can be changed between the stacker cranes 8 and 14 and the in-process conveyors 20 and 21.

実施例の搬送システムのレイアウトを示す平面図The top view which shows the layout of the conveyance system of an Example 実施例での第２の自動倉庫及び工程側コンベヤの要部平面図で、第２の自動倉庫のラックを切り欠いて段ばらし装置を示す。It is a principal part top view of the 2nd automatic warehouse in a Example, and the process side conveyor, The rack of a 2nd automatic warehouse is notched and the staging apparatus is shown. 実施例での第２の自動倉庫のラックの側面図Side view of the rack of the second automatic warehouse in the embodiment

符号の説明Explanation of symbols

２ 搬送システム
４，１０ 自動倉庫
６，７，１２，１３ ラック
８，１４ スタッカークレーン
１６ トレイ積層体
１８〜２１ コンベヤ
２２ コンベヤ付きターンテーブル
２３ 段ばらし装置
２４ 段積み装置
２５ コントローラ
２６，２７ ステーション
２８ 昇降台
２９ マスト
３０ 移載装置
３２ コンベヤユニット
３４ リフタ
３６，４４ トレイ積層体
３８ 出退コンベヤ
３９ シリンダ
４０ チャック
４２ トレイ
４６ パンタグラフ機構
Ｍ１，Ｍ２ モータ 2 Transport system 4, 10 Automatic warehouse 6, 7, 12, 13 Rack 8, 14 Stacker crane 16 Tray stack 18-21 Conveyor 22 Turntable with conveyor 23 Stacking device 24 Stacking device 25 Controller 26, 27 Station 28 Elevating Table 29 Mast 30 Transfer device 32 Conveyor unit 34 Lifters 36, 44 Tray stack 38 Exit conveyor 39 Cylinder 40 Chuck 42 Tray 46 Pantograph mechanism M1, M2 Motor

Claims (3)

所定の搬送方向に沿ってワークを搬送する第１の搬送装置と、
第１の搬送装置の搬送方向と直角な方向に走行してワークを搬送するスタッカークレーンと、
複数の区間からなりかつ前記スタッカークレーンの走行方向に沿って設けられ、前記第１の搬送装置と前記スタッカークレーンとの間でワークを搬送し、さらに前記各区間が、他の区間と独立して停止／起動できかつ前記スタッカークレーンとの間でワークを受渡し自在なコンベヤ、とを備えた搬送システム。 A first transfer device for transferring a workpiece along a predetermined transfer direction;
A stacker crane that travels in a direction perpendicular to the transport direction of the first transport device and transports the workpiece;
It consists of a plurality of sections and is provided along the traveling direction of the stacker crane, transports workpieces between the first transport device and the stacker crane, and each section is independent of other sections. A conveyor system comprising: a conveyor that can be stopped / started and that can transfer workpieces to and from the stacker crane. 前記コンベヤを、前記スタッカークレーンの走行経路のほぼ全長に渡って設けたことを特徴とする、請求項１の搬送システム。 2. The transport system according to claim 1, wherein the conveyor is provided over substantially the entire length of the travel path of the stacker crane. 前記第１の搬送装置と前記コンベヤ並びに前記スタッカークレーンはワークを複数集積して搬送すると共に、
前記コンベヤをワーク保管用のラックに設けて、前記スタッカークレーンによりコンベヤとラックの棚との間でワークを移載し、さらにラックに集積されたワークを切り出すための切り出し装置と、切り出されたワークを集積するための集積装置とを設けたことを特徴とする、請求項１または２の搬送システム。
The first conveying device, the conveyor and the stacker crane are configured to convey a plurality of workpieces,
The conveyor is provided in a rack for workpiece storage, the workpiece is transferred between the conveyor and the rack shelf by the stacker crane, and further, a cutting device for cutting out the workpiece accumulated in the rack, and the cut workpiece A transport system according to claim 1 or 2, further comprising a stacking device for stacking the stack.
JP2006007406A 2006-01-16 2006-01-16 Conveying system Pending JP2007186319A (en)

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CNA2006101464174A CN101003326A (en) 2006-01-16 2006-11-13 Conveying system

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