CN101003326A - Conveying system - Google Patents

Conveying system Download PDF

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Publication number
CN101003326A
CN101003326A CNA2006101464174A CN200610146417A CN101003326A CN 101003326 A CN101003326 A CN 101003326A CN A2006101464174 A CNA2006101464174 A CN A2006101464174A CN 200610146417 A CN200610146417 A CN 200610146417A CN 101003326 A CN101003326 A CN 101003326A
Authority
CN
China
Prior art keywords
conveyer
workpiece
mentioned
carriage
stakcer crane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA2006101464174A
Other languages
Chinese (zh)
Inventor
深泽博
田原良祐
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Machinery Ltd
Original Assignee
Murata Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Machinery Ltd filed Critical Murata Machinery Ltd
Publication of CN101003326A publication Critical patent/CN101003326A/en
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0407—Storage devices mechanical using stacker cranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0407—Storage devices mechanical using stacker cranes
    • B65G1/0421—Storage devices mechanical using stacker cranes with control for stacker crane operations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/52—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
    • B65G47/53—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices between conveyors which cross one another
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/07—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for semiconductor wafers Not used, see H01L21/677
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C13/00—Other constructional features or details
    • B66C13/18—Control systems or devices
    • B66C13/48—Automatic control of crane drives for producing a single or repeated working cycle; Programme control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Automation & Control Theory (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Jib Cranes (AREA)

Abstract

The invention provides a conveying system capable of high efficiently conveying workpiece, which is comprised by plural units, which connect a first stacking crane 8 and a second stacking crane 14 by employing conveyers and freely control stop/start independently from each other, and a transfer device disposed between the system and the stacking crane 14. The conveyers are arranged at the upper parts of racks 12, 14 disposed along the travel path of the second stacking crane 14, and a detaching stage loading device 23 and a stage loading device 24 are disposed on the racks 12, 14. The invention can high efficiently convey and keep workpiece, and can change the conveying form of conveying workpiece to/from the external of the racks.

Description

Conveyer
Technical field
The present invention relates to conveyer, relate in particular to workpiece is placed on the system that carries out conveyance on the carriage.
Background technology
The applicant has studied the situation that workpiece such as glass board such as liquid crystal panel or EL panel or semiconductor wafer is placed into conveyance on the carriage.And, the structure of carriage (patent documentation 1) freely that the applicant proposed easy stacked and workpiece is come in and gone out.Then, the applicant proposed again and can adorn such carriage and take the device (patent documentation 2) that layer is adorned apart by layer.
[patent documentation 1] TOHKEMY 2005-93585 communique
[patent documentation 2] TOHKEMY 2005-89048 communique
Summary of the invention
Technical matters of the present invention is, a kind of conveyer of the workpiece of conveyance efficiently is provided.The technical matters of being appended in the invention of technical scheme 2 is to make the carrying of workpiece more efficient.The technical matters of being appended in the invention of technical scheme 3 is, a plurality of workpiece can be piled up at the 1st carrying device to conveyance between the shelf, can take out single workpiece or offer the outside of shelf with fewer stacked number.
Conveyer of the present invention possesses: the 1st carrying device, along the conveyance direction conveyance workpiece of regulation; Stakcer crane, advance with the rectangular direction of conveyance direction of the 1st carrying device in the edge, and the conveyance workpiece; And conveyer, constitute by a plurality of intervals, and direct of travel setting along above-mentioned stakcer crane, conveyance workpiece between above-mentioned the 1st carrying device and above-mentioned stakcer crane, in addition, above-mentioned each interval can stop independently mutually/start with the interval of other, and and above-mentioned stakcer crane between freely transfer workpiece.
Preferably, with of the roughly total length setting of above-mentioned conveyer along the travel path of above-mentioned stakcer crane.Here so-called roughly total length represents also can to remove near the position the end of an opposite side of travel path of stakcer crane.
In addition, preferably, above-mentioned the 1st carrying device and above-mentioned conveyer and above-mentioned stakcer crane are piled up conveyance with a plurality of workpiece, and above-mentioned conveyer is arranged on the shelf that workpiece is used certainly, by above-mentioned stakcer crane transfer workpiece between the dividing plate of conveyer and shelf, and be provided with and be used for taking out the withdrawing device that is deposited in the workpiece on the shelf and the piling apparatus that is used for piling up the workpiece that is taken out.
In the present invention, because conveyer and stakcer crane conveyance workpiece concurrently, so improved conveyance efficient.And,, therefore can keep in workpiece because conveyer can stop independently/start in each interval; In addition, owing to can transfer workpiece between each interval and stakcer crane, therefore can shorten the stakcer crane band the distance that workpiece is advanced.Therefore conveyance workpiece extremely effectively.
Here, if conveyer is set, then can further shortens the stakcer crane band and the distance that workpiece is advanced along the roughly total length of the travel path of stakcer crane.The action of stakcer crane be limited to and conveyer between transfer workpiece and with do not advance or mode that short range is advanced and conveyer beyond shelf etc. transfer workpiece.
If on the shelf that the keeping workpiece is used, conveyer is set, and be provided with and be used for taking out withdrawing device that is deposited in the workpiece on the shelf and the piling apparatus that is used for piling up the workpiece that is taken out, then can be before arriving stakcer crane, have the carriage of workpiece stacked or workpiece packed into carry out conveyance in the container mounting, can with single workpiece etc. be unit from the shelf conveyance to the outside.Like this, can change the conveyance form of workpiece on shelf.
Description of drawings
Fig. 1 is the planar view of layout of the conveyer of expression embodiment.
Fig. 2 be the 2nd automated warehouse among the embodiment and operation side conveyer want facial planes figure, the shelf that expression disconnects the 2nd automated warehouse are dismantled the device of layer dress.
Fig. 3 is the lateral plan of shelf of the 2nd automated warehouse of embodiment.
The specific embodiment
Narration is used for implementing the preferred embodiments of the present invention below.
[embodiment]
Fig. 1～Fig. 3 represents the conveyer 2 of embodiment.In each figure, 4 is the 1st automated warehouse, and 10 is the 2nd automated warehouse that links to each other with the 1st automated warehouse, and 6,7 is the shelf of the 1st automated warehouse 4, and 12,13 is the shelf of the 2nd automated warehouse 10.Dispose 1～many stakcer cranes 8 in the automated warehouse 4, this automated warehouse 4 is corresponding with the 1st carrying device.Dispose 1～many stakcer cranes 14 in the 2nd automated warehouse 10, dispose 2 stakcer cranes 14,14 in an embodiment.Also can on the 1st automated warehouse 4, at right angles be connected with a plurality of the 2nd automated warehouses 10, and shelf 6,7 are not set in the 1st automated warehouse 4, but stakcer crane 8 is advanced, only conveyance is placed with the duplexer 16 of the carriage of workpiece between the 2nd automated warehouse 10,10, perhaps also automated warehouse 4 can be set, and be provided with the conveyer of long distance simply.
The kind of workpiece is the substrate of the substrate of liquid crystal panel or EL panel or semiconductor wafer etc., and conveyer 2 is arranged in the dust free room.In the 2nd automated warehouse 10, along the whole length of the length direction of shelf 12,13 conveyer 18 (Fig. 2, Fig. 3) is set, preferably the top plate portion at shelf 12,13 is provided with conveyer 18.And, with for example vertical direction of the 2nd automated warehouse 10 on in- process conveyer 20,21 is set, in- process conveyer 20,21 is connected into annular, and the layer assembling device 24 in 10 go in ring and returned in 1 week from in-process conveyer 21 to automated warehouse for carriage duplexer 16b that provides from the dismounting layer assembling device 23 of automated warehouse 10 or single carriage.22 turntables for the band conveyer are arranged on the connecting portion of automated warehouse 4,10, and looking from stakcer crane 14 here is arranged on the position of anchor point 6,27 fronts that will narrate the back, make carriage duplexer 16 towards for example 90 ° of rotations in horizontal surface
In an embodiment, both are provided with the turntable 22 of band conveyer shelf 12,13, but also can be at least be provided with on one.
26,27 is the anchor point that is provided with on the shelf 6, and anchor point 26 be the anchor point of loading and unloading carriage duplexers 16 from stakcer crane 8, from anchor point 27 with 16 transfers of carriage duplexer to stakcer crane.And anchor point 26,27 is provided with conveyer, links to each other with conveyer on the shelf 12,13.
25 is controller, and control conveyer 2 is especially controlled stakcer crane 8,14, conveyer 18, turntable 22, dismounting layer assembling device 23 and layer assembling device 24 etc.On the conveyer 18 on stakcer crane 8,14 or the shelf 12,13, the conveyance form of workpiece is the container of carriage duplexer 16 or receptacle bracket duplexer, relative therewith, the carriage duplexer 16b of the carriage that to be single carriage or stacked number lack than carriage duplexer 16 of the form on conveyer 20,21.
As shown in Figure 2, stakcer crane 14 makes bay-lift 28 along pillar 29 liftings, possesses shifting apparatus 30 such as slider bar, transfer carriage duplexer 16.In addition, the stakcer crane 8 of the 1st automated warehouse 4 also adopts same structure.The conveyer 18 that is provided with on the shelf 12,13 is provided with electrical motor M1 along a plurality of conveyance directions conveyer unit 32 that is connected in series in each conveyer unit 32, and each unit is controlled the roller path of conveyer unit 32 independently.In addition, be preferably in each conveyer unit 32, in a plurality of conveyers unit, elevator 34 be set at least, and drive, can utilize the shifting apparatus 30 handing-over carriage duplexers of stakcer crane 14 with electrical motor M2.
Dismounting layer assembling device 23 is identical with the structure of layer assembling device 24, has a pair of advance and retreat conveyer 38,38 that utilizes power cylinder 39 along continuous straight runs advance and retreat, be arranged on the side of carriage and clamp the bottom of flange of carriage or the clamper 40 of the side of carriage, make the telescoping mechanism 46 of carriage duplexer lifting.36 is the carriage duplexer of upside, is supported by clamper 40,42 serve as reasons carriage that advance and retreat conveyer 38 supports, and 44 be the lower tray duplexer, by telescoping mechanism 46 supports.And shelf 12 are provided with and are divided into for example bilevel dividing plate.
Supply with carriage duplexer 16 from stakcer crane 14 to dismounting layer assembling device 23, dismounting layer assembling device 23 therefrom takes out a carriage arbitrarily of arbitrary height position, and offers conveyer 20.By telescoping mechanism 46 the carriage duplexer is risen during dismounting layer dress, clamper 40 is advanced to the bottom of the carriage that does not need to take out.In addition, if on short transverse, be arranged side by side a plurality of clampers 40, then can freely change the number of the carriage that once takes out.Telescoping mechanism 46 is descended, advance and retreat conveyer 38 is advanced to the flange bottom of the carriage that is taken out, the carriage duplexer 44 of its downside is descended by telescoping mechanism 46.Sort out carriage 42 then, single or multiple stacked cause advance and retreat conveyers 38 flow to conveyer 20.
Dismounting layer assembling device 23 and layer assembling device 24 also can use common structure, for example at the stacked new carriage of the midway location of the short transverse of carriage duplexer 16 time, support the carriage of its upside by clamper 40, the carriage of downside is descended with telescoping mechanism 46, carriage is moved into therebetween from conveyer 21, telescoping mechanism 46 is risen, the carriage newly moved into and the carriage duplexer of downside are combined into one.If make telescoping mechanism 46 continue to rise, and be combined into one, then the cambium layer dress with the carriage duplexer of keeping out of the way upside.Under situation, preferably the identical carriage in next conveyance destination is collected on short transverse with layer assembling device 24 with conveyer 20,21 individual carriages of conveyance.
The action of expression embodiment below.The carriage duplexer 16 that is come by stakcer crane 8 conveyances is discharged to anchor point 26, on the conveyer 18 of conveyance to the shelf 12.Here, then the same if the top of shelf 6,7 also is provided with the conveyer identical with conveyer 18 with stakcer crane 14, can alleviate the burden of stakcer crane 8.When the carriage duplexer 16 that is discharged to anchor point 26 by conveyer 18 along shelf 12 conveyances, and keeping to shelf 12,13 time, by stakcer crane 14 from the conveyer transfer to shelf on 12,13 the dividing plate.And, when taking out of in-process conveyer 20 1 sides, by stakcer crane 14 from the dividing plate transfer of conveyer 18 or shelf 12,13 to dismounting layer assembling device 23, take out needed carriage by dismounting layer assembling device 23, conveyance is to in-process conveyer 20 again.
Also can be during this period, 2 stakcer cranes 14 be advanced hardly, and conveyer 18 is transfer carriage duplexer 16 between shelf 12,13.And, each unit 32 can be used as the working area of carriage duplexer or with the anchor point that stakcer crane 14 carries out transfer.
From in-process conveyer 20 workpiece in the carriage is offered the processing equipment that does not have expression the figure, the workpiece mounting that processing is over offers layer assembling device 24 from in-process conveyer 21 and carries out stacked to carriage.Take out carriage duplexer 16 by stakcer crane 14 from layer assembling device 24, transfer is to the conveyer of shelf 13 1 sides.As shown in Figure 1, turn back to shelf 13 1 sides carriage duplexer 16 towards having changed 90 ° with comparing at first.Therefore, with the conveyer 22 of band turntable with for example 90 ° of carriage duplexer 16 rotations, make carriage duplexer 16 towards alignment.Then, to anchor point 27, assigned position or the next anchor point in the shelf 6,7 arrived in 8 conveyances of usefulness stakcer crane with 16 conveyances of carriage duplexer.
In an embodiment, conveyer unit 32 is freely and carry out the transfer of carriage duplexer 16 between the stakcer crane 14 arbitrarily.The carriage duplexer 16 that offers the stakcer crane on Fig. 1 right side also can directly provide from conveyer 18.Unit 32 is interval corresponding with conveyer 18, freely in each is interval between stakcer crane 14,14 transfer carriage duplexer 16.And, because each unit 32 can start independently/stop, therefore and stakcer crane 14 between transfer carriage duplexer 16 during, all conveyers 18 are all stopped.And each unit 32 can use as the working area of carriage duplexer 16.In addition, when the processing speed of dismounting layer assembling device 23, layer assembling device 24 is slower than the conveyance speed of stakcer crane 14 or conveyer 18, also their quantity can be provided with manyly than the quantity of conveyer 20,21.
Can obtain following effect in an embodiment: (1) is owing to carry out the conveyance of carriage duplexer 16 in the two at conveyer and stakcer crane 14, so the efficient height; (2) owing to be provided with conveyer on the top of shelf 12,13, so the space availability ratio height; (3) can utilize the band turntable conveyer 22 make carriage duplexer 16 towards alignment; (4) can utilize the conveyance form of dismantling layer assembling device 23 or layer assembling device 24 change carriage before arriving stakcer crane 8,14 and on the in- process conveyer 20,21.

Claims (3)

1. a conveyer possesses: the 1st carrying device, the conveyance direction conveyance workpiece of edge regulation; Stakcer crane, advance with the rectangular direction of conveyance direction of the 1st carrying device in the edge, and the conveyance workpiece; And conveyer, constitute by a plurality of intervals, and direct of travel setting along above-mentioned stakcer crane, conveyance workpiece between above-mentioned the 1st carrying device and above-mentioned stakcer crane, in addition, above-mentioned each interval can stop independently mutually/start with the interval of other, and and above-mentioned stakcer crane between freely transfer workpiece.
2. conveyer as claimed in claim 1 is characterized in that, with the roughly total length setting of above-mentioned conveyer along the travel path of above-mentioned stakcer crane.
3. conveyer as claimed in claim 2, it is characterized in that, above-mentioned the 1st carrying device and above-mentioned conveyer and above-mentioned stakcer crane are piled up conveyance with a plurality of workpiece, and above-mentioned conveyer is arranged on the shelf that workpiece is used certainly, by above-mentioned stakcer crane transfer workpiece between the dividing plate of conveyer and shelf, and be provided with and be used for taking out the withdrawing device that is deposited in the workpiece on the shelf and the piling apparatus that is used for piling up the workpiece that is taken out.
CNA2006101464174A 2006-01-16 2006-11-13 Conveying system Pending CN101003326A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP007406/2006 2006-01-16
JP2006007406A JP2007186319A (en) 2006-01-16 2006-01-16 Conveying system

Publications (1)

Publication Number Publication Date
CN101003326A true CN101003326A (en) 2007-07-25

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Application Number Title Priority Date Filing Date
CNA2006101464174A Pending CN101003326A (en) 2006-01-16 2006-11-13 Conveying system

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JP (1) JP2007186319A (en)
KR (1) KR20070076369A (en)
CN (1) CN101003326A (en)
TW (1) TW200728184A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104245541A (en) * 2012-04-05 2014-12-24 村田机械株式会社 Conveyance system
CN108820755A (en) * 2018-07-17 2018-11-16 苏州富纳艾尔科技有限公司 The automatic charging device of intelligence manufacture flexible production line

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007186319A (en) * 2006-01-16 2007-07-26 Murata Mach Ltd Conveying system
CN104709686B (en) * 2013-12-12 2017-01-25 中联重科股份有限公司 Landing leg storage working station and landing leg storage method
CN106144597A (en) * 2016-08-31 2016-11-23 佛山市世诚同创玻璃建材有限公司 The handling material guide rail platform that doubling glass high temperature precompressed processes
CN108190404A (en) * 2018-02-12 2018-06-22 王健 Refrigerant sealing cover injecting glue dries track

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JPS60128102A (en) * 1983-12-13 1985-07-09 Kawasaki Steel Corp Entry/exit method of automatic warehouse
EP0444626A3 (en) * 1990-03-01 1992-03-04 Industria Grafica Meschi S.R.L. Automatic service apparatus for fast printers, particularly laser printer
DE4120923A1 (en) * 1991-06-25 1993-01-07 Krupp Industrietech PIECE HANDLING DEVICE
JPH07315512A (en) * 1994-05-30 1995-12-05 Toyo Kanetsu Kk Method and equipment for picking in automatic warehouse
WO2004080852A1 (en) * 2003-03-10 2004-09-23 Hirata Corporation Automatic storage system
JP4348520B2 (en) * 2003-09-16 2009-10-21 村田機械株式会社 Transport system
JP4269222B2 (en) * 2003-09-16 2009-05-27 村田機械株式会社 Tray transport system
JP4329034B2 (en) * 2004-08-09 2009-09-09 株式会社ダイフク Article conveying device
JP4329035B2 (en) * 2004-08-18 2009-09-09 株式会社ダイフク Article conveying device
JP2007186319A (en) * 2006-01-16 2007-07-26 Murata Mach Ltd Conveying system

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104245541A (en) * 2012-04-05 2014-12-24 村田机械株式会社 Conveyance system
CN104245541B (en) * 2012-04-05 2016-03-23 村田机械株式会社 Delivery system
CN108820755A (en) * 2018-07-17 2018-11-16 苏州富纳艾尔科技有限公司 The automatic charging device of intelligence manufacture flexible production line

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Publication number Publication date
TW200728184A (en) 2007-08-01
KR20070076369A (en) 2007-07-24
JP2007186319A (en) 2007-07-26

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