KR20210134498A - Transfer facility and method for transferring container - Google Patents

Abstract

A transfer facility (10) includes: a carrying platform (30) installed above a deposition apparatus (80) to accept a cassette (90); and a transferer (20) carrying the cassette (90) into or out of the carrying platform (30), and lifting and returning the carried cassette (90) between the deposition apparatus (80) and the carrying platform (30). The carrying platform (30), the transferer (20) and the deposition apparatus (80) are placed on positions overlapped with each other when seen from a plane. The carrying platform (30) is supported to be rotatable through a rotary shaft (35) between a cassette collection position (U) located on a lifting path of the cassette (90), and a standby position (T) spaced apart from the lifting path of the cassette (90). The carrying platform (30) accepts the cassette (90) from the cassette collection position (U). Therefore, the present invention is capable of improving the transfer precision of the transferer.

Description

TRANSFER FACILITY AND METHOD FOR TRANSFERRING CONTAINER

The present invention relates to a transfer facility and a container transfer method for transferring a container containing the article to a processing apparatus that processes the article.

As the transfer facility, for example, there is a facility for transferring a cassette (container) accommodating a substrate in a chamber serving as a processing device (see, for example, Korean Patent No. 10-1511963). In the transfer facility of Korean Patent Registration No. 10-1511963, a cassette (container) on a conveying trolley unit is loaded into the facility by the cassette conveying unit, and a support pedestal (carrier rack) installed above the chamber (processing device)台)) is put in place. The cassette mounted on the support mount is transferred to the chamber by being lowered and conveyed by the cassette transfer unit (transfer machine).

In addition, the cassette on the chamber is mounted on the support mount by being lifted and conveyed by the cassette transfer unit. The cassette mounted on the support mount is carried out to the transport trolley unit outside the facility by the cassette transport unit.

However, in the above-described transfer facility, the cassette interferes with the support mount (carrying holder) when the cassette transfer unit (transfer machine) moves the cassette (container) up and down. Therefore, in order to avoid interference with the support mount, an operation such as turning the cassette by the cassette transfer unit is required, and there is a problem that it takes time to transfer the cassette between the support mount and the chamber (processing device).

In addition, by performing the above operation, there has been a problem that the cassette transfer unit cannot keep the cassette in a positioned state, and the transfer accuracy of the cassette transfer unit deteriorates.

Therefore, in a transfer facility for transferring a container accommodating an article to a processing device that processes an article, the present invention provides a method for transferring a container between a load port of the processing device and a receiver installed above the load port of the processing device. An object of the present invention is to provide a transfer equipment and a container transfer method that can be efficiently carried out.

The problem to be solved by the present invention is as described above, and means for solving the problem will be described next.

That is, the transfer facility of the present invention is installed above a processing device that processes articles and receives a container for accommodating the article, and the container is unloaded or carried in to the container, and the container is carried out or carried in. and a transfer device for lifting and conveying the container between the loading table and the load port of the processing device; a facility, wherein the unloading table is positioned between a first position located on the elevating path of the vessel by a rotation shaft formed at a position away from the elevating path of the vessel and a second position away from the elevating path of the vessel. It is rotatably supported and receives the said container in the said 1st position.

In the above configuration, the carrying arm rotates between the first position located on the elevating path of the container and the second position away from the elevating path of the container by rotation of the rotating shaft.

The transfer equipment of the present invention is to be rotatably supported by the rotation shaft whose shaft center is in a vertical direction.

In the above configuration, the cradle rotates between the first position located on the elevating path of the container and the second position away from the elevating path of the container by rotation of the pivot shaft whose shaft center is in the vertical direction.

The transfer equipment of the present invention is to be rotatably supported by the rotation shaft whose shaft center is in the horizontal direction.

In the above configuration, the cradle rotates between the first position located on the elevating path of the container and the second position away from the elevating path of the container by rotation of the rotating shaft whose shaft center is in the horizontal direction.

The transfer facility of the present invention includes a positioning member for positioning the container in the carrying arm by contacting the container with the container supported by the carrying arm, and the positioning member includes the container and the container. The contact surface of is a curved surface.

In the said structure, the curved-surface part in the said positioning part contacts a container.

The transfer method of the present invention includes: a container installed above a processing device for processing articles and receiving a container for accommodating the article; a transfer device for lifting and lowering between the load port and the load port of the handling device; A container transfer method in a container, wherein the first position is located on a lifting path of the container by a rotation shaft formed at a position away from the lifting path of the container, and a first position separated from the lifting path of the container. The container rotatably supported between the second positions, and supported by the receiver positioned at the first position, is unloaded from the receiver by the transfer machine, and the container is lifted by the rotation of the pivot shaft. A method of forming an elevating path of the container by the transfer machine by rotating it from the first position to the second position, and lowering and moving the container unloaded from the receiving table to a load port of the processing device by the transfer machine .

In the above method, by rotating the pivot shaft from a first position located on the elevating path of the container to a second position away from the elevating path of the container, a lifting path of the container is formed by the transfer machine, The container unloaded from the device is moved down to the load port of the processing device.

(Effects of the Invention)

According to the transfer facility and container transfer method of the present invention, the load port of the unloading table and the processing device because the unloading table can be rotated from a first position located on the lifting path of the container to a second position away from the lifting path of the container. When moving the container up and down between the two, the carrying arm can be moved to a position that avoids the lift path of the container. Therefore, when the container is moved up and down, the container does not interfere with the receiver (the container does not come into contact with the receiver). Therefore, operations such as turning the container by the transfer machine to avoid interference with the carrying bag are unnecessary, and the container can be efficiently transferred between the carrying bag and the load port of the processing device.

Further, since the transfer machine does not need to perform the above operation, the transfer machine can keep the container in a positioned state, and the transfer accuracy of the transfer machine can be improved.

In addition, since the arm rest is rotatably supported by the pivot shaft, a mechanism for operating the arm arm can be constituted by a simple mechanism including a bearing, a rotating shaft, a motor, and the like. In addition, since the oscillation from the operating mechanism of the arm rest can be easily sealed by covering the bearing, the rotating shaft, and the motor with a housing or the like, the operation mechanism can be configured with a mechanism with few oscillation sources or a mechanism that easily encloses the oscillation sources. configurable.

1 is a plan view of a transfer equipment according to the present invention.
2 is a front view of the transfer equipment.
3 is a plan view of the copper transfer equipment.
4 is a front view when the cassette is transferred by the transfer machine in the transfer equipment.
5A is a schematic plan view and a schematic enlarged plan view of a guide block showing rotation of the receiving arm in the moving transfer facility.
Fig. 5B is a schematic plan view and a schematic enlarged plan view of a guide block showing rotation of the carrying arm of another embodiment in the moving transfer facility.
Fig. 5C is a schematic plan view and a schematic enlarged plan view of a guide block showing rotation of the carrying arm of another embodiment in the moving transfer facility.
Figure 6a is a front view when the cassette is placed on the luggage rack in the transfer facility according to another embodiment of the present invention.
6B is a front view when the cassette is transferred by the transfer machine in the transfer equipment.
7 is a plan view of a transfer equipment according to another embodiment of the present invention.
Fig. 8A is a plan view of a receiving table in a transfer facility according to another embodiment of the present invention.
Fig. 8b is a side view of the same luggage compartment when the same luggage compartment is positioned at the cassette collection position;
Fig. 8c is a side view of the same undercarriage when the same undercarriage is positioned in a stand-by position.
Fig. 9A is a plan view of a receiving table in a transfer facility according to another embodiment of the present invention.
Fig. 9b is a side view of the same luggage compartment when the same luggage compartment is positioned at the cassette collection position;
Fig. 9c is a side view of the same undercarriage when it is positioned in the stand-by position.

The transfer equipment 10 according to the present invention will be described.

As shown in Figs. 1 and 2, the transfer equipment 10 is a vapor deposition apparatus 80 (“processing”) that performs vapor deposition on a substrate 91 (an example of an “article”) that is a work-in-process of a semiconductor product or a liquid crystal display device product. equipment"). In the transfer equipment 10 , a cassette 90 (an example of a “container”) accommodating the plate-shaped substrate 91 is transported from a transport cart 86 traveling along a bogie traveling rail 85 other than the transfer equipment 10 . While being carried in to the load port 83 of the vapor deposition apparatus 80 , it is carried out from the load port 83 of the vapor deposition apparatus 80 to the conveyance cart 86 other than the transfer equipment 10 .

The cassette 90 conveyed in the transfer facility 10 is formed of a substantially box-shaped member having one or both sides open, and is configured to accommodate a plurality of substrates 91 therein. The cassette 90 has a plurality of flange portions 92 that are locked to a transfer device 20 to be described later on the upper portion thereof. The flange portion 92 is constituted by a hook-shaped member protruding from the upper surface of the cassette 90 , and is formed at a plurality of locations on the upper surface of the cassette 90 .

As shown in FIG. 2 , the transfer equipment 10 is installed above the vapor deposition apparatus 80 . As for the deposition apparatus 80 attached to the transfer equipment 10 , the entire apparatus is covered by the apparatus housing 81 . The apparatus housing 81 has an internal space capable of storing the deposition apparatus 80 therein. The apparatus housing 81 is provided with a cassette loading port 82 for conveying the cassette 90 therein at its upper portion.

The device housing 81 is provided with a load port 83 for mounting the cassette 90 in its internal space. Specifically, the load port 83 is installed just below the cassette inlet 82 (just below the transfer device 20 to be described later, on the elevating path of the cassette 90 lifted by the transfer device 20). have.

1 and 2, it is on the side of the transfer equipment 10, and above the deposition apparatus 80, a fork unit 40 that transfers the cassette 90 on the transfer cart 86 to the transfer equipment 10. this is installed The fork unit 40 places the cassette 90 on the mounting surface 41a of the fork 41 and moves the fork 41 back and forth in the horizontal direction to transport the cassette 90 from the transport cart 86, One cassette 90 is loaded into the transfer facility 10 . In addition, the fork unit 40 unloads the cassette 90 from the inside of the transfer facility 10 , and carries the unloaded cassette 90 into the transport cart 86 . In this way, the cassette 90 is above the vapor deposition apparatus 80 , and is loaded or unloaded from the side of the transfer equipment 10 .

2 to 4, the transfer facility 10 includes a transfer machine 20 for lifting and conveying the cassette 90, a pusher 25 for positioning the cassette 90 with respect to the transfer machine 20, The fork unit 40 and the receiving table 30 for receiving the cassette 90 conveyed from the transfer machine 20 are provided.

The transfer device 20 , the arm rest 30 , and the load port 83 of the vapor deposition apparatus 80 are arranged at positions overlapping each other in plan view. Specifically, from above (ceiling side) of the transfer equipment 10 , the transfer machine 20 , the receiver 30 , and the load port 83 are arranged in this order, and the receiver 30 and the load port 83 are It is arranged so as to be on the elevating path of the cassette 90 by the transfer device 20 .

The transfer device 20 is installed above the load port 83 , and is disposed at a position overlapping the arm rest 30 and the load port 83 in plan view. The transfer machine 20 unloads the cassette 90 conveyed to the receiver 30 by the fork unit 40 from the receiver 30, and moves the unloaded cassette 90 down in the vertical direction to move the cassette 90. ) is loaded into the load port 83 . In addition, the transfer machine 20 carries the cassette 90 out of the load port 83 by moving the cassette 90 on the load port 83 upward in the vertical direction, and the unloaded cassette 90 is placed on the receiving table 30 . bring it into

The transfer machine 20 conveys the cassette 90 by locking the upper part of the cassette 90 above the vapor deposition apparatus 80 and moving it up and down in the vertical direction. The transfer machine 20 is mainly composed of a lifting mechanism 21 for moving the cassette 90 up and down, and a locking mechanism 24 for locking the upper portion of the cassette 90 .

The lifting mechanism 21 supports the locking mechanism 24 in a suspended state by the rotation shaft 22B. The elevating mechanism 21 includes a first elevating section 22 for elevating and moving the locking mechanism 24 (cassette 90), the first elevating section 22 and the locking mechanism 24 (cassette 90). It is comprised by the 2nd raising/lowering part 23 which lifts and moves. The raising/lowering mechanism 21 raises/lowers the cassette 90 by the two-stage raising/lowering movement by the 1st raising/lowering part 22 and the 2nd raising/lowering part 23. As shown in FIG.

The first lifting unit 22 includes a plurality of lifting belts 22A for hanging and supporting the locking mechanism 24, a rotating shaft 22B for integrally winding and unwinding the lifting belt 22A, and a rotating shaft ( It is mainly comprised by the 1st motor 22C which rotates 22B. The first elevating unit 22 moves the locking mechanism 24 (cassette 90) up and down by rotating the rotating shaft 22B by driving the first motor 22C, and winding and unwinding the elevating belt 22A. make it The first elevating section 22 moves the locking mechanism 24 (cassette 90) up and down by winding and unwinding the elevating belt 22A, thereby precisely positioning the cassette 90 with respect to the load port 83. can be done easily.

The second lifting unit 23 includes a support body 23A for rotatably supporting both ends of the rotation shaft 22B, a guide body 23B for guiding the support body 23A so as to be able to move up and down, and lifting and lowering the support body 23A. It is mainly comprised by 23 C of drive belts to move, and the 2nd motor 23D for rotating 23 C of drive belts.

The support body 23A is comprised by a pair of elongate members, and while supporting the rotation shaft 22B rotatably in the upper end formed standing up in the vertical direction, the lower end part by the guide body 23B. Guided so that it can ascend and descend. The guide body 23B is comprised by a pair of elongate members. The drive belt 23C is rotatably bridged between the upper end and the lower end of the guide body 23B. The second motor 23D is installed at the upper end of the guide body 23B.

The second lifting unit 23 drives the second motor 23D to rotate the drive belt 23C to move the support body 23A up and down along the guide body 23B. Thereby, the rotation shaft 22B supported by the support body 23A moves up and down, and the locking mechanism 24 (cassette 90) supported via the raising/lowering belt 22A by the raising/lowering moves up and down. The second elevating part 23 moves the rotating shaft 22B up and down between a pair of elongated guide bodies 23B extending in the vertical direction, so that the cassette 90 relative to the load port 83 is roughly moved. Position alignment is performed.

The locking mechanism 24 is supported by the plurality of lifting belts 22A and locks the upper flange portion 92 of the cassette 90 . The locking mechanism 24 has a locking portion 24A for locking the flange portion 92 of the cassette 90 on the side opposite to the cassette 90 when the cassette 90 is locked. A plurality of locking portions 24A (four in Fig. 3) are formed at positions corresponding to the flange portions 92 of the cassette 90. As shown in Figs. The locking portion 24A is formed by a claw-shaped member lockable to the flange portion 92, and the claw-shaped member is configured to be rotatable in a predetermined direction. The locking mechanism 24 supports the cassette 90 in a suspended state by the locking portion 24A locking the flange portion 92 .

The pusher 25 regulates the movement of the cassette 90 on the receiver 30 by contacting the cassette 90 placed on the carrying arm 30 , thereby regulating the position of the cassette 90 with respect to the transfer machine 20 . make a decision The pusher 25 is installed standing up on the base 26 supported by the support 23A, and the cassette 90 placed on the arm rest 30 is inserted into the pair of pushers 25 on the arm rest 30. It is arranged in the vicinity of the diagonal position of the cassette 90 to be placed. The pusher 25 is provided with the pusher body part 25A supported by the base 26, and the arm part 25B supported by the pusher body part 25A and movable back and forth in a horizontal direction. The arm portion 25B is configured to be able to contact the cassette 90 . The pusher 25 is a cassette by contacting the cassette 90 so as to sandwich the arm portion 25B together with the arm portion 25B of the pair of pushers 25 from the diagonal position of the cassette 90 on the arm rest 30. (90) is set to a predetermined position. Here, the predetermined position is a position in which the transfer device 20 can be moved up and down by locking the cassette 90 on the arm rest 30 while maintaining the posture. The arm portion 25B contacts the cassette 90 by extending and moving toward the cassette 90 by driving the air cylinder when the transfer machine 20 unloads the cassette 90 from the receiving table 30 . When the cassette 90 is raised and lowered by the transfer device 20, the arm 25B contracts and moves away from the cassette 90 by driving the air cylinder in a direction avoiding the elevating path of the cassette 90. do.

As shown in FIGS. 1 to 4 , the luggage rack 30 includes a cassette 90 carried into the transfer facility 10 by the fork unit 40 and a cassette carried out from the load port 83 by the transfer machine 20 . (90) is accepted.

The carrying arm 30 supports the bottom surface of the corner part of the cassette 90 . Specifically, the armrests 30 are respectively disposed at the four corners of the cassette 90 , and the bottom surfaces of the four corners of the cassette 90 are supported by the four armrests 30 . When the carrying arm 30 is located at the cassette collecting position U (example of "first position") on the path (elevating path of the cassette 90) on which the transfer device 20 raises and lowers the cassette 90, They are respectively arranged in the vicinity of the four corners of the cassette 90 . Here, the cassette collecting position U is a position in the transfer facility 10 where the receiving table 30 receives the cassette 90 from the fork unit 40 or the transfer machine 20 (in the transfer facility 10 ). of the cassette 90 ), a path through which the fork 41 of the fork unit 40 transports the cassette 90 above the load port 83 , and the transfer device 20 is connected to the cassette 90 . It refers to the location where the paths for raising and lowering intersect.

The arm rest 30 includes a base 31, a mounting unit 32 for placing the cassette 90, and a pair of guide blocks for positioning the cassette 90 in the mounting unit 32 ( 33) (an example of the "positioning member") and a stopper 37 for limiting the rotation range of the arm rest 30 (the base part 31).

The base part 31 is comprised by the plate-shaped member arrange|positioned in the horizontal direction, and supports the mounting part 32 and the guide block 33 in the upper surface. As for the base part 31, the one end is fixed to the rotation shaft 35 via the bearing 34, and it rotates horizontally by rotation of the rotation shaft 35. As shown in FIG. The bearing 34 is fixed to the base 26 .

The rotation shaft 35 is extended and provided so that its shaft center may be in the vertical direction at a position away from the lifting path of the cassette 90 by the transfer device 20 (a position away from the cassette collecting position U). The rotation shaft 35 is driven by a motor 36 installed at its lower end.

Here, as a mechanism for operating the arm rest (base part), a sliding mechanism for sliding the arm rest in the horizontal direction is mentioned. Since a back is required, the operating mechanism of the armrest becomes large-scale. Moreover, the said sliding mechanism is a mechanism with many oscillation sources in that it slides the armrest. In addition, in order to contain the oscillation from the sliding mechanism, it is necessary to cover the rail or the like in addition to covering the motor or the like with the housing or the like, so that the oscillation source cannot be easily enclosed.

On the other hand, since the mechanism for operating the carrying arm 30 of the transfer equipment 10 is a rotation mechanism comprising a bearing 34 , a rotating shaft 35 and a motor 36 , the operating mechanism of the carrying arm 30 is operated. It can be configured by a simple mechanism. Moreover, the said rotation mechanism is a mechanism with few oscillation sources in that the armrest 30 is operated by rotating the rotation shaft 35. As shown in FIG. In addition, in the rotation mechanism, since the bearing 34, the rotation shaft 35, and the motor 36 are covered with a housing or the like, oscillation from the rotation mechanism can be sealed, so that the oscillation source can be easily enclosed. have.

The mounting portion 32 is formed of a pillar material on which the cassette 90 can be mounted on the top portion, and is formed by standing on the other end of the base 31 (the end opposite to the side on which the rotational shaft 35 is formed). has been As for the mounting part 32, the mounting surface 32a for mounting the cassette 90 is formed in the top part.

The guide block 33 is constituted by a substantially circular pillar material when viewed from a cross section, and is provided upright at the other end of the base part 31 . The guide block 33 prevents the cassette 90 from falling from the mounting unit 32 while positioning the cassette 90 in the mounting unit 32 . The guide block 33 is disposed at a position such that when the cassette 90 is placed on the mounting unit 32 , the corners of the cassette 90 are sandwiched between the pair of guide blocks 33 . As for the guide block 33, the top part is formed higher than the top part (mounting surface 32a) of the mounting part 32. As shown in FIG. The guide block 33 has an inclined portion 33a (see Figs. 5A to 5C) in which the peripheral end of the top portion is formed in an inclined shape.

The guide block 33 performs positioning of the cassette 90 on the mounting unit 32 by bringing the side surface of the corner portion of the cassette 90 into contact with the side surface, and the cassette 90 from the mounting unit 32 . prevent the fall of In addition, the guide block 33 is the cassette 90 to be placed on the mounting unit 32, when the cassette 90 to be placed on the top of the guide block 33, the cassette 90 is the inclined portion 33a of the guide block 33. ) to guide the cassette 90 to a predetermined position on the mounting unit 32 by sliding. In addition, when the cassette 90 is held by the guide block 33 while sitting on the top of the guide block 33 , an abnormal transfer of the cassette 90 to the mounting unit 32 is detected.

As shown in FIG. 5A , the guide block 33 has a contact surface 33b in contact with the side surface of the corner portion of the cassette 90 along the rotation trajectory K of the armrest 30 centered on the rotation axis 35 . It is made up of curved surfaces. Specifically, the outer peripheral side surface of the guide block 33 constituting the contact surface 33b of the guide block 33 is formed in a curved shape so as to follow the rotation trajectory K. In this way, by making the contact surface 33b of the guide block 33 a curved surface along the rotation trajectory (K) of the arm rest 30 centered on the rotation shaft 35, the arm rest 30 rotates around the rotation axis 35 as the center. The cassette 90 can be positioned at an appropriate position on the mounting unit 32 even when the distance between the carrying arm 30 and the cassette 90 is changed by rotating to the . In addition, if the contact surface 33b of the guide block 33 is formed in a curved surface, for example, as in the guide block 33A shown in Fig. 5B, the contact surface 33b of the guide block 33 is placed on the cradle 30 ( When viewed from the cross section formed in a curved shape along the rotation track K of the base part 31), you may comprise it with the arc-shaped pillar material. Further, like the guide block 33B shown in Fig. 5C, the contact surface 33b of the guide block 33 is formed in a curved shape along the rotation trajectory K of the arm rest 30 (the base 31). It does not matter whether it is composed by

As shown in FIG. 3 , the carrying arm 30 rotates the rotation shaft 35 in accordance with the lifting and lowering movement of the cassette 90 by the transfer device 20 to the cassette collecting position U (example of “first position”) It rotates horizontally between the stand-by position T (an example of a "2nd position"). Here, the stand-by position (T) is a position where the unloading table 30 does not come into contact with the cassette 90 that is moved up and down by the transfer machine 20, and the fork unit 40 is located at the cassette collecting position U. It is a position where the carrying arm 30 does not contact the fork 41 of the fork unit 40 when conveying to (90).

When receiving the cassette 90 from the fork unit 40 or the transfer machine 20 , the arm rest 30 rotates to the cassette collection position U by the rotation of the rotation shaft 35 . Specifically, to the position where the mounting surface 32a of the loading unit 32 of the luggage rack 30 contacts the bottom surface of the corner of the cassette 90 located at the cassette collection position U, the The base 31 rotates. On the other hand, when the transfer machine 20 moves the cassette 90 up and down, the unloading table 30 is located at the stand-by position T away from the lift path of the cassette 90 . Specifically, the base 31 of the armrest 30 to a position where the mounting part 32 and the guide block 33 of the armrest 30 do not contact the cassette 90 located at the cassette collection position U. ) rotates.

In the armrest 30 , the rotation range of the base 31 is limited by the stopper 37 . Specifically, the stopper 37 stops the base part 31, which rotates in the horizontal direction, at the cassette collecting position U and the stand-by position T, so that the rotation range of the base part 31 is adjusted to the cassette collecting position (U). is constrained between and versus the standby position (T). The stopper 37 includes a pair of movable-side blocks 37A fixed to the base 31 (movable side), and a fixed-side stopper 37B fixed to the base 26 (fixed side).

The movable-side block 37A is a member horizontally protruding from the side of the base 31 , and rotates with the rotation of the base 31 .

The fixed-side stopper 37B is a member protruding upward from the base 26 , and when the movable-side block 37A comes into contact with either end of the base 26 , rotation of the base 31 is stopped.

As for the stopper 37, when the base part 31 rotates from the cassette collection position U and is located in the stand-by position T, one of the movable-side blocks 37A of the pair of movable-side blocks 37A is fixed. By contacting one end of the side stopper 37B, the base portion 31 is held at the stand-by position T. On the other hand, when the base part 31 rotates from the stand-by position T and is positioned at the cassette collection position U, the stopper 37 is the other movable block 37A of the pair of movable-side blocks 37A. By contacting the other end of the fixed-side stopper 37B, the base 31 is held at the cassette collecting position U. As shown in FIG. In this way, when the pair of movable-side blocks 37A come into contact with the fixed-side stopper 37B, the rotation range of the base 31 is limited between the cassette collection position U and the stand-by position T, and the base portion ( 31) is prevented from rotating outside the rotation range.

Next, the transfer method of the cassette 90 in the transfer facility 10 is demonstrated.

As shown in FIG. 1 , when the cassette 90 is transported to a predetermined position by the transport cart 86 , the fork unit 40 horizontally moves the fork 41 with respect to the transport cart 86 on the transport cart 86 . The cassette 90 is placed and supported on the fork 41 .

When the cassette 90 is placed on the fork 41 , the fork unit 40 turns the fork 41 while the cassette 90 is placed on the fork 41 . In addition, the fork unit 40 horizontally moves the fork 41 to the upper side of the receiver 30 of the transfer equipment 10 . At this time, the armrest 30 rotates to the cassette collection position U by the rotation of the rotation shaft 35 . Specifically, as shown in FIG. 3, the base part 31 of the arm rest 30 rotates in the horizontal direction by the rotation of the rotation shaft 35, so that the mounting part 32 of the arm rest 30 and the guide block ( 33) rotates from the stand-by position (T) to the cassette collection position (U). The base 31 of the arm rest 30 is positioned at the cassette collecting position U by the one movable block 37A of the pair of movable block 37A in contact with one end of the stationary stopper 37B. stop

As shown in FIG. 2 , the fork unit 40 lowers the fork 41 when the cassette 90 is conveyed to the upper side of the cradle 30 to place the cassette 90 on the cradle 30 . Accordingly, the cassette 90 is transferred from the fork unit 40 to the mounting unit 32 of the receiving table 30 . Here, the guide block 33 of the carrying arm 30 contacts the cassette 90 to roughly position the cassette 90 on the mounting unit 32 .

When the cassette 90 is placed on the receiver 30 , the fork unit 40 horizontally moves the fork 41 to a position away from the receiver 30 . Then, the arm portion 25B of the pusher 25 extends and moves toward the cassette 90 and comes into contact with the corner portion of the cassette 90 . Thereby, the cassette 90 is in a state held diagonally by the pair of arm portions 25B.

The pusher 25 moves the cassette 90 in all directions by expanding and contracting the pair of arm portions 25B to each other. Then, the pusher 25 moves the cassette 90 to a position where the locking portion 24A (locking mechanism 24) of the transfer machine 20 can lock the flange portion 92 of the cassette 90 . That is, the pusher 25 determines the position of the cassette 90 with respect to the raising/lowering position of the transfer machine 20 by moving the cassette 90 in all directions.

When the positioning of the cassette 90 with respect to the lifting position of the transfer machine 20 is completed, the second lifting unit 23 of the transfer machine 20 is driven, and the locking mechanism 24 of the transfer machine 20 moves the cassette 90 . Descend to the upper position. And when the locking part 24A of the locking mechanism 24 turns in a predetermined direction, the flange part 92 of the cassette 90 is locked by the locking part 24A. As a result, the cassette 90 is in a state capable of being moved up and down by the transfer device 20 .

The pusher 25 retracts and moves the arm portion 25B in a direction away from the cassette 90 (a direction avoiding the elevating path of the cassette 90 ).

When the arm part 25B contracts and moves, the rotation shaft 35 rotates by driving the motor 36 so that the arm rest 30 rotates in the horizontal direction. Specifically, as shown in FIG. 3 , the base part 31 of the armrest 30 rotates horizontally from the cassette collection position U to the stand-stand position T. As shown in FIG. The base 31 of the arm rest 30 is positioned at the stand-by position T when the other movable block 37A of the pair of movable blocks 37A comes into contact with the other end of the fixed-side stopper 37B. stop Accordingly, the mounting unit 32 and the guide block 33 of the armrest 30 move in a direction avoiding the elevating path of the cassette 90 , and the mounting unit 32 of the armrest 30 moves to the cassette 90 . A lift path of the cassette 90 by the transfer device 20 is formed at a position where the .

When the base part 31 of the carrying arm 30 moves away from the cassette collecting position U, the second lifting part 23 of the transfer machine 20 is driven, and the locking mechanism 24 locking the cassette 90 is activated. It descends toward the vapor deposition apparatus 80 . Specifically, when the second motor 23D drives, the drive belt 23C operates, and when the drive belt 23C operates, the support body 23A descends along the guide body 23B. And the rotation shaft 22B supported by the support body 23A descend|falls together with the support body 23A, and the locking mechanism 24 (cassette 90) supported by the lifting belt 22A by the descending|falling to a predetermined position. descend

As shown in FIG. 4, when the locking mechanism 24 descend|falls to a predetermined position, the drive of the 2nd raising/lowering part 23 stops, and the 1st raising/lowering part 22 is driven. Accordingly, the cassette 90 locked by the locking mechanism 24 is transferred to the load port 83 of the deposition apparatus 80 . Specifically, when the driving of the second motor 23D is stopped, the first motor 22C is driven and the rotation shaft 22B rotates. Thereby, the lifting belt 22A which hangs and supports the locking mechanism 24 is unwound downward by the rotation shaft 22B, and the locking mechanism 24 (cassette 90) descends in accordance with the unwinding.

On the other hand, when the processing of the substrate 91 in the deposition apparatus 80 is completed, the locking portion 24A of the locking mechanism 24 of the transfer device 20 locks the flange portion 92 of the cassette 90 . And 22 C of 1st motors drive, and the rotation shaft 22B rotates. As a result, the lifting belt 22A for hanging and supporting the locking mechanism 24 is wound upward by the rotation shaft 22B, the locking mechanism 24 rises in accordance with the winding, and the cassette 90 is connected to the load port 83. ) is withdrawn from When the locking mechanism 24 rises to a predetermined position, the driving of the first motor 22C is stopped, and the second motor 23D is driven. As a result, the drive belt 23C is actuated, and when the drive belt 23C is actuated, the support body 23A rises along the guide body 23B. And the rotation shaft 22B supported by the support body 23A rises together with the support body 23A, and the locking mechanism 24 supported by the raising/lowering belt 22A by the raise rises.

When the cassette 90 locked by the locking mechanism 24 rises to the upper side of the armrest 30, the armrest 30 moves from the stand-by position (T) to the cassette collection position (U) by the rotation of the pivot shaft 35 . ) to rotate. Specifically, as shown in FIG. 3, the base part 31 of the arm rest 30 rotates in the horizontal direction by the rotation of the rotation shaft 35, so that the mounting part 32 of the arm rest 30 and the guide block ( 33) moves from the stand-by position (T) to the cassette collection position (U). The base 31 of the arm rest 30 is positioned at the cassette collecting position U by the one movable block 37A of the pair of movable block 37A in contact with one end of the stationary stopper 37B. stop

When the arm rest 30 rotates to the cassette collecting position U, the second motor 23D is driven to lower the locking mechanism 24 . As a result, as shown in FIG. 2 , the cassette 90 is lowered and placed on the mounting unit 32 of the receiving table 30 . Here, the guide block 33 of the carrying arm 30 contacts the cassette 90 to roughly position the cassette 90 on the mounting unit 32 . When the cassette 90 is placed on the mounting portion 32 , the locking portion 24A of the locking mechanism 24 pivots in a predetermined direction, so that the locking by the locking portion 24A to the flange portion 92 is released. When the locking to the flange portion 92 by the locking portion 24A is released, the fork unit 40 extends the extensible arm 42 to horizontally move the fork 41 to the cassette collecting position U. Subsequently, the fork unit 40 raises the fork 41 to place and support the cassette 90 placed on the receiver 30 on the fork 41 . Moreover, as shown in FIG. 1, while the fork unit 40 bends the retractable arm 42, it makes the fork 41 which mounted the cassette 90 rotate. Then, the fork unit 40 extends the retractable arm 42 to horizontally move the fork 41 to the transport cart 86 , and transfer the cassette 90 on the fork 41 to the transport cart 86 .

As described above, the transfer facility 10 according to the present invention sets the unloading table 30 away from the cassette collecting position U located on the elevating path of the cassette 90 on the elevating path of the cassette 90 to the standby position. Since it is rotatable up to (T), when moving the cassette 90 up and down between the arm rest 30 and the load port 83 of the deposition apparatus 80, the arm rest 30 moves the cassette 90 along the elevating path. It can be moved to an avoidable position. Therefore, when the cassette 90 is moved up and down, the cassette 90 does not interfere with the luggage holder 30 (the cassette 90 does not come into contact with the luggage holder 30 ). Therefore, in order to avoid interference with the carrying arm 30 , an operation such as turning the cassette 90 by the transfer device 20 becomes unnecessary, and between the carrying arm 30 and the load port 83 of the deposition apparatus 80 . of the cassette 90 can be efficiently transferred. Further, since the transfer machine 20 does not need to perform the above operation, the transfer machine 20 can hold the cassette 90 in a positioned state, and the transfer accuracy of the transfer machine 20 can be improved.

In addition, since the arm rest 30 is rotatably supported by the rotation shaft 35 , the mechanism for operating the arm rest 30 is a bearing 34 , a rotation shaft 35 , and a motor 36 . It can be configured by a simple mechanism consisting of In addition, since the bearing 34, the rotation shaft 35, and the motor 36 are covered with a housing or the like, oscillation from the operating mechanism of the arm rest 30 can be easily sealed, so that the operating mechanism is used as an oscillation source. This small mechanism or a mechanism for easily enclosing the oscillation source can be configured.

Moreover, in this embodiment, by rotating the base part 31 of the armrest 30 in the horizontal direction by the rotation shaft 35 whose axial center is a vertical direction, the mounting part 32 of the armrest 30 is a cassette. Although it is rotated between the collection position U and the stand-by position T, it is not limited to this, It is the rotation shaft 35A whose axial center is a horizontal direction like the armrest 30A shown to FIGS. 6A-8C. You may rotate the mounting part 32A and the guide block 33A by raising 31 A of horizontal base parts upward by this. In this case, the base 31A of the horizontal arm rest 30A has one end fixed to the rotation shaft 35A via a bearing 34A, and the rotation shaft 35A is rotated by the rotation of the rotation shaft 35A. centered upwards. While being fixed to the base 26, the bearing 34A supports the base part 31A from below. The rotation shaft 35A is extended and installed so that its axial center is in the horizontal direction at a position away from the lifting path of the cassette 90 by the transfer device 20 (a position away from the cassette collecting position U), and at the other end thereof A motor 36A is installed.

As shown in FIGS. 8B and 8C , in the armrest 30A, when the rotation shaft 35A rotates, the base 31A held horizontally by the bearing 34A is raised upward, and the cassette collecting position ( The mounting part 32A and the guide block 33A located in U) rotate to the stand-by position T in the state raised upward.

In addition, as for the arm rest 30A, the rotation range of the base part 31A is limited by the stationary side stoppers 38A, 38B (stopper 38) fixed to the base 26 (fixed side). Specifically, as shown in Fig. 8B, the first fixed-side stopper 38A is in contact with the lower surface of the base portion 31A located at the cassette collecting position U, so that the base 31A is moved from the cassette collecting position U. is restrained Further, as shown in Fig. 8C, the second fixed-side stopper 38B is brought into contact with the upper surface of the base portion 31A raised from the cassette collection position U to the stand-by position T, so that the base portion 31A is raised. It is restrained in the standby position T. Further, the first fixed-side stopper 38A has a function of holding the base portion 31A at the cassette collecting position U, and has a function of supporting the load of the base portion 31A.

Moreover, like the armrest 30B shown to FIG. 9A - FIG. 9C, by knocking down the horizontal base part 31A downward with the rotation shaft 35A whose axial center is a horizontal direction, 32 A of mounting parts and a guide You may rotate blocks 33A, 33B. As shown in Figs. 9B and 9C, in the armrest 30B, when the rotation shaft 35A rotates, the base portion 31A held horizontally by the bearing 34A is knocked down to the cassette collecting position ( It rotates to the stand-by position T in the state in which the mounting part 32A and guide blocks 33A, 33B located in U) were knocked down in the downward direction.

In addition, as for the arm rest 30B, the rotation range of the base part 31A is limited by the stationary side stoppers 39A, 39B (stoppers 39) fixed to the base 26 (fixed side). Specifically, as shown in Fig. 9B, the first fixed-side stopper 39A contacts the side surface (the bearing 34 side side) of the base portion 31A positioned at the cassette collecting position U, whereby the base portion 31A is formed. ) is restrained at the cassette collection position (U). Moreover, as shown in FIG. 9C, the 2nd fixed side stopper 39B contacts with the lower surface of the base part 31A knocked down toward the stand-by position T from the cassette collection position U, and the base part 31A. The stand is restrained in the stand-by position (T).

In addition, the arm rest 30B has a curved surface along the rotation trajectory K of the arm rest 30B in which the contact surface 33b in contact with the side surface of the corner of the cassette 90 in the guide block 33B is formed. . Specifically, the top of the guide block 33B constituting the contact surface 33b of the guide block 33B is inclined in a curved shape.

Although the base part 31 of the arm rest 30 is rotated in this embodiment, it is not limited to this, You may rotate the mounting part 32 of the arm rest 30 directly. That is, it is not cared about by directly rotating the portion of the carrying table 30 on which the cassette 90 is placed. In this case, the arm rest 30 is configured only with the mounting unit 32 , and the mounting unit 32 is rotated by rotating the rotation shaft 35 formed on the mounting unit 32 .

In the present embodiment, the article to be transferred in the transfer facility 10 is not limited to the cassette 90 , and any article that can be transferred between the unloading table 30 and the transfer machine 20 may be used.

In the present embodiment, the transfer machine 20 moves the cassette 90 up and down in a state in which the locking portion 24A of the transfer machine 20 locks the hook-shaped flange portion 92 of the upper portion of the cassette 90. The present invention is not limited thereto, and for example, the transfer device 20 may move the cassette 90 up and down while holding the side surface of the cassette 90 .

In the present embodiment, the transfer device 20 raises and lowers the cassette 90 by two-stage lifting and lowering movements by the first lifting unit 22 and the second lifting unit 23, but the present invention is not limited thereto. You may raise/lower the cassette 90 by only either one of the 1st raising/lowering part 22 and the 2nd raising/lowering part 23, ie, one-step raising/lowering movement. Further, the first lifting unit 22 raises and lowers the cassette 90 by winding and unwinding the lifting belt 22A attached to the locking mechanism 24 with respect to the rotation shaft 22B, but is not limited thereto. , You may raise/lower the cassette 90 by raising/lowering the support frame which hangs and supports the locking mechanism 24 with a ball screw.

In the present embodiment, the transfer equipment 10 is a facility attached to the vapor deposition apparatus 80 for performing vapor deposition on the substrate 91 , but the present invention is not limited thereto. As long as it is a transfer facility for transferring one container, it may be a facility attached to an apparatus other than the vapor deposition apparatus 80 .

In the present embodiment, the range of rotation of the arm rest 30 is limited by the stopper 37, but it is not limited to this, and the arm rest 30 (base part) is not provided with the stopper 37, but a sensor or the like. (31)), the rotation range of the arm rest 30 may be limited by detecting the position.

10: Lee Jae-gi equipment 20: Lee Jae-gi
30: armrest 35: pivot shaft
80: deposition apparatus (processing apparatus) 83: load port
90: cassette (container) 91: substrate (article)
U: Cassette collection position (1st position) T: Stand-by position (2nd position)

Claims (6)

a receiving table installed above a processing device for processing an article to receive a container for accommodating the article;
and a transfer device for unloading or loading the container with respect to the loading cradle, and lifting and transporting the container to be unloaded or carried in between the loading pod and a load port of the processing device;
A transfer facility in which the load-bearing table, the transfer machine, and a load port of the processing device are disposed at positions overlapping each other in a plan view,
The cargo stand,
It is rotatably supported between a first position located on the elevating path of the vessel and a second position separated from the elevating path of the vessel by a rotation shaft formed at a position away from the elevating path of the vessel,
and receiving the container in the first position. The method of claim 1,
The load transfer equipment, characterized in that the shaft center is supported rotatably by the rotation shaft in the vertical direction. The method of claim 1,
The load transfer facility, characterized in that the hoist is rotatably supported by the rotation shaft whose shaft center is in a horizontal direction. 4. The method according to any one of claims 1 to 3,
the armrest includes a positioning member for positioning the container in the armrest by contacting the container supported by the armrest;
The positioning member is a transfer equipment, characterized in that the contact surface with the container is a curved surface. 5. The method according to any one of claims 1 to 4,
Transfer equipment, characterized in that provided with a stopper for limiting the range of rotation of the carrying arm. a receiving table installed above a processing device for processing an article to receive a container for accommodating the article;
and a transfer device for unloading or loading the container with respect to the loading cradle, and lifting and transporting the container to be unloaded or carried in between the loading pod and a load port of the processing device;
A method for transferring a container in a transfer facility, wherein the loader, the transfer machine, and a load port of the processing device are disposed at positions overlapping each other in a plan view,
Rotatably between a first position located on the elevating path of the container and a second position away from the elevating path of the container by a rotation shaft formed at a position distant from the elevating path of the container support,
unloading the container supported by the receiver located at the first position from the receiver by the transfer device;
forming a lifting path of the container by the transfer device by rotating the arm rest from the first position to the second position by the rotation of the rotation shaft;
The container transferring method according to claim 1, wherein the container unloaded from the receiving table is moved down to a load port of the processing device by the transfer device.

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