TWI776412B - Transferring device for accommodating object - Google Patents
Transferring device for accommodating object Download PDFInfo
- Publication number
- TWI776412B TWI776412B TW110107572A TW110107572A TWI776412B TW I776412 B TWI776412 B TW I776412B TW 110107572 A TW110107572 A TW 110107572A TW 110107572 A TW110107572 A TW 110107572A TW I776412 B TWI776412 B TW I776412B
- Authority
- TW
- Taiwan
- Prior art keywords
- placing platform
- platform
- slide
- object container
- placing
- Prior art date
Links
Images
Landscapes
- Warehouses Or Storage Devices (AREA)
- Supplying Of Containers To The Packaging Station (AREA)
Abstract
Description
本發明涉及一種物件容器的移載裝置,特別是涉及一種設置於自動化倉儲系統的進出料處的物件容器的移載裝置。The invention relates to a transfer device for object containers, in particular to a transfer device for object containers arranged at the in-feed and out-feed positions of an automated storage system.
隨著半導體工業的發展,積體電路需經過多道繁複的處理程序,例如蝕刻、研磨、擴散及沈積等步驟,才能生產出來。半導體製程中的物件容器(如晶圓盒或光罩盒等),大多是利用天車輸送系統來搬運晶圓,使物件容器可進行各種半導體製程。另,由於自動化倉儲系統可充分利用儲存空間,且可透過電腦與製程設備作連線管控,並以先入先出的原則,迅速準確地進行取料與入庫作業,因此可達到高效率的庫存管理水準,符合新時代的產業需求。現有自動化倉儲系統可設置進料處與出料處,供放置待入庫與待出庫的物件容器,並利用移載裝置移載物件容器進料與出料,由於移載裝置不具有緩衝暫存的功能,無法存放較多的物件容器,造成使用上的不便。With the development of the semiconductor industry, integrated circuits need to go through many complicated processing procedures, such as etching, grinding, diffusion and deposition, etc. before they can be produced. Object containers (such as wafer boxes or mask boxes) in the semiconductor process mostly use a crane conveyor system to transport wafers, so that the object containers can be used for various semiconductor processes. In addition, since the automated storage system can make full use of the storage space, and can be controlled through the connection between the computer and the process equipment, and based on the principle of first-in, first-out, material retrieval and storage operations can be carried out quickly and accurately, so efficient inventory management can be achieved. standard, in line with the needs of the industry in the new era. The existing automatic storage system can set up feeding and discharging places for placing the object containers to be put in and out of the warehouse, and use the transfer device to move the object container for feeding and discharging, because the transfer device does not have buffer temporary storage. function, it is impossible to store more object containers, causing inconvenience in use.
本發明所要解決的技術問題在於,針對現有技術的不足提供一種物件容器的移載裝置,具有緩衝暫存的功能,可存放較多的物件容器,以便利於使用。The technical problem to be solved by the present invention is to provide a transfer device for object containers in view of the deficiencies of the prior art, which has the function of buffering and temporary storage, and can store more object containers for ease of use.
為了解決上述的技術問題,本發明提供一種物件容器的移載裝置,其設置於自動化倉儲系統的進料處或出料處,該物件容器的移載裝置包括:一第一放置平台;至少一第二放置平台,該第二放置平台為中間站,能用以暫存物件容器;一第三放置平台,該第二放置平台設置於該第一放置平台與該第三放置平台之間;一移動滑台,該移動滑台沿著一移載方向延伸;一升降滑座,該升降滑座連接於該移動滑台,該升降滑座能由該移動滑台帶動沿著該移載方向移動,該升降滑座具有一升降驅動裝置及一承載台,該承載台連接於該升降驅動裝置,該升降驅動裝置能驅動該承載台升降,該承載台能用以承載該物件容器,該升降滑座能帶動該物件容器上升,並通過該移動滑台將該物件容器沿著該移載方向移動輸送至該第一放置平台、該第二放置平台或該第三放置平台處,且該升降滑座能帶動該物件容器下降,使該物件容器放置於該第一放置平台、該第二放置平台或該第三放置平台上。In order to solve the above-mentioned technical problems, the present invention provides a transfer device for an object container, which is arranged at the feeding or discharging position of an automated storage system. The transfer device for the object container includes: a first placing platform; at least one A second placing platform, which is an intermediate station and can be used to temporarily store object containers; a third placing platform, which is arranged between the first placing platform and the third placing platform; a a moving slide, the moving slide extends along a loading direction; a lifting slide, the lift slide is connected to the moving slide, the lift slide can be driven by the moving slide to move along the loading direction , the lift carriage has a lift drive device and a bearing platform, the bearing platform is connected to the lift drive device, the lift drive device can drive the bearing platform to rise and fall, the bearing platform can be used to carry the object container, the lift slide The seat can drive the object container to rise, and move the object container along the transfer direction to the first placing platform, the second placing platform or the third placing platform through the moving slide table, and the lifting slide The seat can drive the object container to descend, so that the object container is placed on the first placing platform, the second placing platform or the third placing platform.
本發明的有益效果在於,本發明所提供的物件容器的移載裝置,包括第一放置平台、第二放置平台、第三放置平台、移動滑台及升降滑座,第二放置平台設置於第一放置平台與第三放置平台之間,搬運車能將物件容器放置於第一放置平台,升降滑座能將物件容器上升,並通過移動滑台將物件容器沿著移載方向移動輸送至第二放置平台或第三放置平台,第二放置平台為中間站,能用以暫存物件容器,具有緩衝暫存的功能,可存放較多的物件容器。The beneficial effect of the present invention is that the object container transfer device provided by the present invention includes a first placing platform, a second placing platform, a third placing platform, a moving slide and a lifting slide, and the second placing platform is arranged on the first placing platform. Between the first placing platform and the third placing platform, the truck can place the object container on the first placing platform, the lifting slide can lift the object container, and move the object container along the transfer direction to the first placing platform through the moving slide. The second placing platform or the third placing platform, the second placing platform is an intermediate station, which can be used to temporarily store object containers, and has the function of buffering and temporary storage, which can store more object containers.
為使能更進一步瞭解本發明的特徵及技術內容,請參閱以下有關本發明的詳細說明與圖式,然而所提供的圖式僅用於提供參考與說明,並非用來對本發明加以限制。For a further understanding of the features and technical content of the present invention, please refer to the following detailed descriptions and drawings of the present invention. However, the drawings provided are only for reference and description, and are not intended to limit the present invention.
以下是通過特定的具體實施例來說明本發明所公開有關的實施方式,本領域技術人員可由本說明書所公開的內容瞭解本發明的優點與效果。本發明可通過其他不同的具體實施例加以施行或應用,本說明書中的各項細節也可基於不同觀點與應用,在不背離本發明的構思下進行各種修改與變更。另外,本發明的附圖僅為簡單示意說明,並非依實際尺寸的描繪,事先聲明。以下的實施方式將進一步詳細說明本發明的相關技術內容,但所公開的內容並非用以限制本發明的保護範圍。另外,本文中所使用的術語“或”,應視實際情況可能包括相關聯的列出項目中的任一個或者多個的組合。The following are specific specific examples to illustrate the embodiments disclosed in the present invention, and those skilled in the art can understand the advantages and effects of the present invention from the content disclosed in this specification. The present invention can be implemented or applied through other different specific embodiments, and various details in this specification can also be modified and changed based on different viewpoints and applications without departing from the concept of the present invention. In addition, the drawings of the present invention are merely schematic illustrations, and are not drawn according to the actual size, and are stated in advance. The following embodiments will further describe the related technical contents of the present invention in detail, but the disclosed contents are not intended to limit the protection scope of the present invention. In addition, the term "or", as used herein, should include any one or a combination of more of the associated listed items, as the case may be.
[實施例][Example]
請參閱圖1至圖5,本發明提供一種物件容器的移載裝置,設置於自動化倉儲系統100(如圖6所示)的進料處或出料處,供暫存及移載待入庫或待出庫的物件容器,在本實施例的圖式中,揭示有兩組併列設置的物件容器的移載裝置200,以供分別設置於進料處及出料處。Please refer to FIG. 1 to FIG. 5 , the present invention provides a transfer device for object containers, which is arranged at the in-feed or out-feed position of the automated storage system 100 (as shown in FIG. 6 ) for temporary storage and transfer for storage or storage. The object containers to be released from the warehouse are disclosed in the drawings of this embodiment, and there are two sets of parallel-arranged object
該物件容器的移載裝置200包括一第一放置平台1、至少一第二放置平台2、一第三放置平台3、一移動滑台4及一升降滑座5,第一放置平台1、第二放置平台2及第三放置平台3可成直線排列,使物件容器能較快速的移載。第二放置平台2設置於第一放置平台1與第三放置平台3之間,第二放置平台2可設置一個,第二放置平台2亦可設置兩個、三個或四個等多個,第二放置平台2可做為中間站,可用以暫存物件容器。所述第一放置平台1、第二放置平台2及第三放置平台3能用以放置如晶圓盒或光罩盒等物件容器。The object
該些第一放置平台1、第二放置平台2及第三放置平台3的結構並不限制,第一放置平台1、第二放置平台2及第三放置平台3可固定設置於一底座6上,使第一放置平台1、第二放置平台2及第三放置平台3穩定的固定設置,第一放置平台1、第二放置平台2及第三放置平台3上可各設置有兩限位件10,兩限位件10呈長條狀且間隔的設置,可供物件容器的兩側抵觸限位。The structures of the first placing platform 1 , the second placing
第一放置平台1、第二放置平台2及第三放置平台3上亦可各設置有多個第一定位件20,該些第一定位件20分別凸設於第一放置平台1、第二放置平台2及第三放置平台3上,可供插置於物件容器的底部相對應的定位孔,用以定位物件容器,使物件容器可穩定的放置於第一放置平台1、第二放置平台2及第三放置平台3上。The first placing platform 1 , the second placing
第一放置平台1、第二放置平台2及第三放置平台3上亦可各設置有至少一第一感測器30,該第一感測器30可為按壓式感測器,可用以偵測物件容器是否放置於定位。The first placing platform 1, the second placing
該移動滑台4為一長型滑台,該移動滑台4沿著一移載方向A延伸,該移載方向A可為一水平方向。較佳的,該移動滑台4設置於第一放置平台1、第二放置平台2及第三放置平台3的下方,該移動滑台4亦可固定設置於底座6上。該移動滑台4為現有移動滑台機構,且本發明並不限制移動滑台4的結構,故不予以贅述。The moving sliding table 4 is a long sliding table, and the moving sliding table 4 extends along a transfer direction A, and the transfer direction A may be a horizontal direction. Preferably, the movable sliding table 4 is arranged below the first placing platform 1 , the second placing
該升降滑座5能用以承載物件容器,並帶動該物件容器升降,升降滑座5能將物件容器上升,使物件容器脫離第一放置平台1、第二放置平台2或第三放置平台3上,以方便通過移動滑台4將物件容器沿著移載方向A移動輸送至預定的第一放置平台1、第二放置平台2或第三放置平台3處,且升降滑座5亦能帶動物件容器下降,使物件容器放置於第一放置平台1、第二放置平台2或第三放置平台3上。The
該升降滑座5連接於該移動滑台4,該升降滑座5可由移動滑台4帶動沿著移載方向A移動,較佳的,該升降滑座5能由移動滑台4帶動沿著移載方向A在第一放置平台1、第二放置平台2及第三放置平台3的內側移動,使該升降滑座5能快速的承載及放下物件容器。該升降滑座5可具有一升降驅動裝置51及一承載台52,該承載台52連接於升降驅動裝置51,該升降驅動裝置51可驅動承載台52升降,該升降驅動裝置51的結構並不限制,可為各種現有的驅動機構。在本實施例中,該升降驅動裝置51包含一馬達511及一連桿組512,連桿組512連接於馬達511及承載台52之間,馬達511能通過連桿組512驅動承載台52升降。The
較佳的,該承載台52及底座6之間可設有導引機構7(如圖3所示),該導引機構7可包含豎立於底座6上的導軌71,及連接於承載台52的導座72,導座72滑動配合於導軌71上,用以導引承載台52穩定的升降移動。Preferably, a guiding mechanism 7 (as shown in FIG. 3 ) may be provided between the
該承載台52能用以承載物件容器,該承載台52的結構並不限制,承載台52上可設置有多個第二定位件40,該些第二定位件40凸設於該承載台52上,可供插置於物件容器的底部相對應的定位孔,用以定位物件容器,使物件容器可穩定的放置於該承載台52上。在本實施例中,該承載台52呈三角狀,該些第二定位件40分別設置於承載台52上靠近三角處,而能提供較佳的定位效果。The carrying table 52 can be used to carry object containers. The structure of the carrying table 52 is not limited. A plurality of
該承載台52上亦可設置有至少一第二感測器50,第二感測器50較佳為設置多個,該些第二感測器50可為按壓式感測器,可用以偵測物件容器是否放置於定位。在本實施例中,第二感測器50設置有三個,該些第二感測器50分別設置於承載台52上靠近一角及兩邊處,以具有較佳的偵測效果。At least one
在本實施例中,該升降滑座5的一側連接於該移動滑台4,該升降滑座5的一側可通過一連接件60連接於移動滑台4的一移動部41,使該移動滑台4的移動部41可通過連接件60帶動升降滑座5沿著移載方向A移動,使該升降滑座5的承載台52上所承載的物件容器沿著移載方向A移動。In this embodiment, one side of the
該升降滑座5的另一側可滑動配合於一支撐滑軌70上,該支撐滑軌70可固定於底座6上,該支撐滑軌70沿著移載方向A延伸,該支撐滑軌70與移動滑台4相互平行,可利用支撐滑軌70與移動滑台4共同支撐升降滑座5,可使升降滑座5的移動更加穩定。在本實施例中,該升降滑座5的另一側設置有滑塊80(如圖5所示),該滑塊80滑動配合於支撐滑軌70上。另,該物件容器的移載裝置200還可包括多個第三感測器90,該些第三感測器90可分別設置於第一放置平台1、第二放置平台2及第三放置平台3的外側,該些第三感測器90可為光電式感測器,可用以偵測物件容器的移動及定位。The other side of the
在進料時,可利用第一放置平台1承接由搬運車(例如天車)運送而來的物件容器,以便將該物件容器通過移動滑台4及升降滑座5的帶動沿著移載方向A移動至第二放置平台2或第三放置平台3。第三放置平台3可與自動化倉儲系統100銜接(如圖6所示),以便將放置於第三放置平台3上的物件容器通過機械手臂等裝置輸送至自動化倉儲系統100內,進行入料的操作。反之,亦可通過該物件容器的移載裝置200,將自動化倉儲系統100內的物件容器沿著移載方向A移動,進行出料的動作。During feeding, the first placing platform 1 can be used to receive the object container transported by a pallet truck (such as a crane), so that the object container can be driven along the transfer direction by the moving
[實施例的有益效果][Advantageous effects of the embodiment]
本發明的有益效果在於,本發明所提供的物件容器的移載裝置,包括第一放置平台、第二放置平台、第三放置平台、移動滑台及升降滑座,第二放置平台設置於第一放置平台與第三放置平台之間,搬運車能將物件容器放置於第一放置平台,升降滑座能將物件容器上升,並通過移動滑台將物件容器沿著移載方向移動輸送至第二放置平台或第三放置平台,第二放置平台為中間站,能用以暫存物件容器,具有緩衝暫存的功能,可存放較多的物件容器。The beneficial effect of the present invention is that the object container transfer device provided by the present invention includes a first placing platform, a second placing platform, a third placing platform, a moving slide and a lifting slide, and the second placing platform is arranged on the first placing platform. Between the first placing platform and the third placing platform, the truck can place the object container on the first placing platform, the lifting slide can lift the object container, and move the object container along the transfer direction to the first placing platform through the moving slide. The second placing platform or the third placing platform, the second placing platform is an intermediate station, which can be used to temporarily store object containers, and has the function of buffering and temporary storage, which can store more object containers.
以上所公開的內容僅為本發明的優選可行實施例,並非因此侷限本發明的申請專利範圍,所以凡是運用本發明說明書及圖式內容所做的等效技術變化,均包含於本發明的申請專利範圍內。The contents disclosed above are only preferred feasible embodiments of the present invention, and are not intended to limit the scope of the present invention. Therefore, any equivalent technical changes made by using the contents of the description and drawings of the present invention are included in the application of the present invention. within the scope of the patent.
1:第一放置平台 2:第二放置平台 3:第三放置平台 4:移動滑台 41:移動部 5:升降滑座 51:升降驅動裝置 511:馬達 512:連桿組 52:承載台 6:底座 7:導引機構 71:導軌 72:導座 10:限位件 20:第一定位件 30:第一感測器 40:第二定位件 50:第二感測器 60:連接件 70:支撐滑軌 80:滑塊 90:第三感測器 A:移載方向 100:自動化倉儲系統 200:物件容器的移載裝置 1: The first placement platform 2: Second placement platform 3: Third Placement Platform 4: Mobile slide 41: Mobile Department 5: Lifting slide 51: Lifting drive device 511: Motor 512: Connecting rod group 52: Bearing platform 6: base 7: Guiding mechanism 71: Rails 72: Guide seat 10: Limiter 20: The first positioning piece 30: First sensor 40: Second positioning piece 50: Second sensor 60: Connector 70: Support rail 80: Slider 90: Third sensor A: Transfer direction 100: Automated Warehousing System 200: Transfer device for object container
圖1為本發明物件容器的移載裝置的立體圖。FIG. 1 is a perspective view of a transfer device for an object container according to the present invention.
圖2為本發明物件容器的移載裝置的立體分解圖(一)。FIG. 2 is an exploded perspective view (1) of the transfer device for the object container according to the present invention.
圖3為本發明物件容器的移載裝置的立體分解圖(二)。FIG. 3 is an exploded perspective view (2) of the transfer device for the object container according to the present invention.
圖4為本發明物件容器的移載裝置的俯視圖。FIG. 4 is a top view of the transfer device for the object container according to the present invention.
圖5為本發明物件容器的移載裝置的側視圖。FIG. 5 is a side view of the transfer device of the object container according to the present invention.
圖6為本發明物件容器的移載裝置的使用狀態示意圖。FIG. 6 is a schematic diagram of the use state of the transfer device for the object container according to the present invention.
1:第一放置平台 1: The first placement platform
2:第二放置平台 2: Second placement platform
3:第三放置平台 3: Third Placement Platform
4:移動滑台 4: Mobile slide
5:升降滑座 5: Lifting slide
52:承載台 52: Bearing platform
6:底座 6: base
10:限位件 10: Limiter
20:第一定位件 20: The first positioning piece
30:第一感測器 30: First sensor
40:第二定位件 40: Second positioning piece
50:第二感測器 50: Second sensor
70:支撐滑軌 70: Support rail
90:第三感測器 90: Third sensor
A:移載方向 A: Transfer direction
200:物件容器的移載裝置 200: Transfer device for object container
Claims (9)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW110107572A TWI776412B (en) | 2021-03-03 | 2021-03-03 | Transferring device for accommodating object |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW110107572A TWI776412B (en) | 2021-03-03 | 2021-03-03 | Transferring device for accommodating object |
Publications (2)
Publication Number | Publication Date |
---|---|
TWI776412B true TWI776412B (en) | 2022-09-01 |
TW202235343A TW202235343A (en) | 2022-09-16 |
Family
ID=84957322
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW110107572A TWI776412B (en) | 2021-03-03 | 2021-03-03 | Transferring device for accommodating object |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI776412B (en) |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6481558B1 (en) * | 1998-12-18 | 2002-11-19 | Asyst Technologies, Inc. | Integrated load port-conveyor transfer system |
TWM441929U (en) * | 2012-06-13 | 2012-11-21 | Santa Phoenix Technology Inc | Wafer-box load port with air filling structure |
TW201636173A (en) * | 2015-03-16 | 2016-10-16 | 大福股份有限公司 | Robot for transferring article |
TW201821342A (en) * | 2016-10-28 | 2018-06-16 | 日商大福股份有限公司 | Article transport facility |
TW201936471A (en) * | 2018-02-28 | 2019-09-16 | 日商斯庫林集團股份有限公司 | Substrate transfer apparatus and substrate transfer method |
TWM594801U (en) * | 2019-12-25 | 2020-05-01 | 佳宸科技有限公司 | Wafer cassette cleaning equipment and system |
TWM613277U (en) * | 2021-03-03 | 2021-06-11 | 迅得機械股份有限公司 | Article container transfer device |
-
2021
- 2021-03-03 TW TW110107572A patent/TWI776412B/en active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6481558B1 (en) * | 1998-12-18 | 2002-11-19 | Asyst Technologies, Inc. | Integrated load port-conveyor transfer system |
TWM441929U (en) * | 2012-06-13 | 2012-11-21 | Santa Phoenix Technology Inc | Wafer-box load port with air filling structure |
TW201636173A (en) * | 2015-03-16 | 2016-10-16 | 大福股份有限公司 | Robot for transferring article |
TW201821342A (en) * | 2016-10-28 | 2018-06-16 | 日商大福股份有限公司 | Article transport facility |
TW201936471A (en) * | 2018-02-28 | 2019-09-16 | 日商斯庫林集團股份有限公司 | Substrate transfer apparatus and substrate transfer method |
TWM594801U (en) * | 2019-12-25 | 2020-05-01 | 佳宸科技有限公司 | Wafer cassette cleaning equipment and system |
TWM613277U (en) * | 2021-03-03 | 2021-06-11 | 迅得機械股份有限公司 | Article container transfer device |
Also Published As
Publication number | Publication date |
---|---|
TW202235343A (en) | 2022-09-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TW546234B (en) | Load storage equipment | |
US9548230B2 (en) | Temporary storage device, transport system, and temporary storage method | |
JP6256702B2 (en) | Container lifting and lowering transport device for article transport | |
JP5088468B2 (en) | Conveying system using a suspended conveying cart | |
US9659802B2 (en) | Method for overhead cross-system transportation | |
KR20180121953A (en) | Temporary storage system | |
TWI807055B (en) | Article transport device | |
TWI660903B (en) | Article transport facility | |
US20080240892A1 (en) | Storage buffer device for automated material handling systems | |
TW201810496A (en) | Conveyance system | |
JP7467789B2 (en) | Item storage unit transfer system | |
TWI820116B (en) | Article transport apparatus and article transport facility | |
EP1845552B1 (en) | Transportation system and transportation method | |
JP2019006517A (en) | Package delivery system | |
TWM613277U (en) | Article container transfer device | |
TWI776412B (en) | Transferring device for accommodating object | |
TWI820112B (en) | Article transport facility | |
JP2010241547A (en) | Traveling vehicle system | |
WO2023061103A1 (en) | Container taking and conveying assembly, loading and unloading device, picking system, logistics sorting system, and container taking and conveying method | |
JP2005136294A (en) | Transfer apparatus | |
TWM634000U (en) | Board loading and unloading device | |
JP5420286B2 (en) | Transport device | |
US11802010B2 (en) | Article transport facility | |
WO2021215132A1 (en) | Automated warehouse system | |
JP5532340B2 (en) | Goods transport equipment |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
GD4A | Issue of patent certificate for granted invention patent |