TWI820112B - Article transport facility - Google Patents

Article transport facility Download PDF

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Publication number
TWI820112B
TWI820112B TW108112121A TW108112121A TWI820112B TW I820112 B TWI820112 B TW I820112B TW 108112121 A TW108112121 A TW 108112121A TW 108112121 A TW108112121 A TW 108112121A TW I820112 B TWI820112 B TW I820112B
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Taiwan
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type
article
transfer device
aforementioned
conveyor
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TW108112121A
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Chinese (zh)
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TW201945264A (en
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坂本純一
吉岡秀郎
森下良治
高原史雄
花木高介
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日商大福股份有限公司
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67712—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrate being handled substantially vertically
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67751—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber vertical transfer of a single workpiece
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67757—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber vertical transfer of a batch of workpieces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers

Landscapes

  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Intermediate Stations On Conveyors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Control Of Conveyors (AREA)
  • Sewing Machines And Sewing (AREA)

Abstract

本發明具備第1搬送裝置與第2搬送裝置，第1搬送裝置具備第1移載裝置、第2移載裝置及升降體，第1種物品的搬送量是比第2種物品的搬送量與第3種物品的搬送量之合計更多，第2搬送裝置具備僅搬送第1種物品的第1輸送機及第2輸送機、及僅搬送第2種物品與第3種物品的第3輸送機，將第1輸送機與第2輸送機以可同時地執行由第1移載裝置所進行之第1種物品的移載、以及由第2移載裝置所進行之第1種物品的移載的間隔來設置，將第1輸送機與第3輸送機以可同時地執行由第1移載裝置所進行之第1種物品的移載、以及由第2移載裝置所進行之第2種物品及第3種物品的移載的間隔來設置。The present invention includes a first conveying device and a second conveying device. The first conveying device includes a first transfer device, a second transfer device and a lifting body. The conveying amount of the first type of article is greater than the conveying amount of the second type of article. The total conveyance amount of the third type of articles is larger, and the second conveying device includes a first conveyor and a second conveyor that convey only the first type of articles, and a third conveyor that conveys only the second and third types of articles. machine, the first conveyor and the second conveyor can simultaneously execute the transfer of the first type of article by the first transfer device and the transfer of the first type of article by the second transfer device. The first conveyor and the third conveyor are arranged at a loading interval such that the first conveyor and the third conveyor can simultaneously execute the transfer of the first type of articles by the first transfer device and the second transfer by the second transfer device. Set the transfer interval for the first type of items and the third type of items.

Description

物品搬送設備Item handling equipment

發明領域 Field of invention

本發明是有關於一種具備有第1搬送裝置與第2搬送裝置的物品搬送設備。 The present invention relates to article transport equipment including a first transport device and a second transport device.

發明背景 Background of the invention

以下，針對背景技術進行說明。在以下的說明中，括號中的符號或名稱是先前技術文獻中的符號或名稱。所述的物品搬送設備的以往的例子已記載在日本專利特開2018-039660號公報(專利文獻1)中。專利文獻1的物品搬送設備具備有第1搬送裝置(第2搬送裝置3)與第2搬送裝置(第1搬送裝置2)。第1搬送裝置(第2搬送裝置3)具備有第1移載裝置(下方移載部34a)、第2移載裝置(上方移載部34b)、及支撐第1移載裝置及第2移載裝置的升降體(第2升降體32)。第1移載裝置及第2移載裝置是同樣地構成，而構成為從下方支撐物品。第2搬送裝置(第1搬送裝置2)是設為沿著水平方向搬送物品的輸送機。 Hereinafter, background technology will be described. In the following description, symbols or names in parentheses are those in prior technical documents. A conventional example of the above-described article transport equipment is described in Japanese Patent Application Laid-Open No. 2018-039660 (Patent Document 1). The article conveying equipment of Patent Document 1 includes a first conveying device (second conveying device 3) and a second conveying device (first conveying device 2). The first transfer device (second transfer device 3) includes a first transfer device (lower transfer part 34a), a second transfer device (upper transfer part 34b), and supports the first transfer device and the second transfer device. The lifting body (the second lifting body 32) of the carrying device. The first transfer device and the second transfer device have the same configuration, and are configured to support the article from below. The second conveyance device (first conveyance device 2) is a conveyor configured to convey articles in the horizontal direction.

專利文獻1的第1搬送設備是構成為以第1移載裝置與第2移載裝置來搬送物品，藉此將2個物品集合到 一起來搬送，而可提高物品的搬送效率。 The first conveying equipment of Patent Document 1 is configured to convey the articles using the first transfer device and the second transfer device, thereby collecting the two articles. Moving them together can improve the efficiency of moving items.

發明概要 Summary of the invention

課題、用以解決課題之手段 Problem, means used to solve the problem

但是，專利文獻1的第1搬送裝置或第2搬送裝置雖然是將1個種類的物品設為搬送對象，但是有時會需要將不同種類的物品集合到一起來搬送。 However, although the first conveying device or the second conveying device in Patent Document 1 sets one type of article as a conveying target, it may be necessary to convey different types of articles together.

例如，雖然在專利文獻1的第1搬送裝置及第2搬送裝置中，是僅將FOUP設為搬送對象的物品，但是有時會需要搬送和此FOUP種類不同之收容倍縮光罩的倍縮光罩用容器或收容EUV用遮罩的EUV用容器。像這樣搬送FOUP、倍縮光罩用容器、及EUV用容器的情況下，一般而言，倍縮光罩用容器的搬送量與EUV用容器的搬送量之合計會比FOUP的搬送量更少。如此例所述，在搬送不同種類的物品之情況下，也有按每個物品種類的搬送量中存在偏差的情況。 For example, in the first conveying device and the second conveying device of Patent Document 1, only the FOUP is set as the object to be conveyed, but it may be necessary to convey the magnification of the storage magnification mask that is different from the type of the FOUP. A container for photomask or a container for EUV containing an EUV mask. When transporting a FOUP, a container for a shrink mask, and a container for an EUV like this, generally speaking, the total transport volume of the container for the shrink mask and the transport volume of the EUV container will be less than the transport volume of the FOUP. . As described in this example, when different types of articles are conveyed, there may be variations in the conveyance amount for each article type.

又，如上述，將複數個種類的物品設為搬送對象的情況下，是藉由讓第1移載裝置與第2移載裝置之雙方構成為可以保持複數個種類的物品，並且在第2搬送裝置具備複數個輸送機，而構成為該等複數個輸送機的每一個可以搬送複數個種類的物品，而變得可提高物品的搬送效率。但是，若針對第1搬送裝置及第2搬送裝置之整體，而構成為如上述地可以保持複數個種類的物品時，會有物品搬送設備的製造成本大幅地變高的問題。 Moreover, as described above, when plural types of articles are set as transfer objects, both the first transfer device and the second transfer device are configured to hold the plural types of articles, and the second transfer device The conveying device is provided with a plurality of conveyors, and each of the plurality of conveyors can convey a plurality of types of articles, thereby improving the efficiency of conveying articles. However, if the first conveying device and the second conveying device as a whole are configured to hold multiple types of articles as described above, there is a problem that the manufacturing cost of the article conveying equipment will increase significantly.

於是，所期望的是一種可以既將製造成本的上升抑制到較少並且提高物品的搬送效率之物品搬送設備的實現。 Therefore, what is desired is the realization of an article conveyance device that can suppress an increase in manufacturing costs to a small level and improve article conveyance efficiency.

有鑒於上述之物品搬送設備的特徵構成在於：具備第1搬送裝置與第2搬送裝置，並將外形尺寸彼此不同的第1種物品、第2種物品及第3種物品設為搬送對象，前述第1搬送裝置具備：第1移載裝置；第2移載裝置，設置在沿著上下方向的上下方向視角下與前述第1移載裝置重疊的位置；及升降體，支撐前述第1移載裝置及前述第2移載裝置並且沿著前述上下方向而移動，前述第1移載裝置是構成為在自身與前述第2搬送裝置之間僅可移載前述第1種物品、前述第2種物品及前述第3種物品當中的前述第1種物品，前述第2移載裝置是構成為在自身與前述第2搬送裝置之間可移載前述第1種物品、前述第2種物品及前述第3種物品，前述第1種物品的搬送量比前述第2種物品的搬送量與前述第3種物品的搬送量之合計更多，前述第2搬送裝置具備：第1輸送機及第2輸送機，沿著水平方向僅搬送前述第1種物品、前述第2種物品及前述第3種物品當中的前述第1種物品；及第3輸送機，沿著水平方向僅搬送前述第1種物品、前述第2種物品及前述第3種物品當中的前述第2種物品與前 述第3種物品，將前述上下方向中之相對於前述第1移載裝置而設置有前述第2移載裝置之側設為上下方向特定側，並相對於前述第1輸送機而在前述上下方向特定側設置前述第2輸送機與前述第3輸送機，前述第1輸送機與前述第2輸送機是以可同時地執行由前述第1移載裝置所進行之自身與前述第1輸送機之間的前述第1種物品的移載、以及由前述第2移載裝置所進行之自身與前述第2輸送機之間的前述第1種物品的移載的間隔來設置，前述第1輸送機與前述第3輸送機是以可同時地執行由前述第1移載裝置所進行之自身與前述第1輸送機之間的前述第1種物品的移載、以及由前述第2移載裝置所進行之自身與前述第3輸送機之間的前述第2種物品及前述第3種物品的移載的間隔來設置。 In view of the characteristic structure of the above-mentioned article conveying equipment, which is provided with a first conveying device and a second conveying device, and sets the first type of article, the second type of article, and the third type of article with mutually different external dimensions as the conveying objects, as mentioned above The first transfer device includes: a first transfer device; a second transfer device installed at a position overlapping the first transfer device in an up-down direction perspective; and an elevating body that supports the first transfer. The device and the above-mentioned second transfer device move along the above-mentioned up and down direction, and the above-mentioned first transfer device is configured to transfer only the above-mentioned first type of article and the above-mentioned second type between itself and the aforementioned second transfer device. Among the articles and the aforementioned first-category articles, the aforementioned second transfer device is configured to transfer the aforementioned first-category article, the aforementioned second-category article, and the aforementioned second transfer device between itself and the aforementioned second transfer device. For the third type of article, the transportation amount of the aforementioned first type article is greater than the total transportation amount of the aforementioned second type article and the aforementioned third type article, and the aforementioned second conveying device includes: a first conveyor and a second conveyor. A conveyor that conveys only the aforementioned Type 1 articles, the aforementioned Type 2 articles, and the aforementioned Type 3 articles in the horizontal direction; and a third conveyor that conveys only the aforementioned Type 1 articles in the horizontal direction. Among items, the aforementioned second type of item and the aforementioned third type of item, the aforementioned second type of item and the aforementioned In the third type of article, the side in the up-down direction where the second transfer device is provided with respect to the first transfer device is set as the up-down direction specific side, and the side in the up-down direction with respect to the first conveyor is The second conveyor and the third conveyor are provided on the direction-specific side, and the first conveyor and the second conveyor can simultaneously execute themselves and the first conveyor by the first transfer device. The distance between the transfer of the first type of article and the transfer of the first type of article between itself and the second conveyor by the second transfer device is set, and the first conveyor The machine and the above-mentioned third conveyor can simultaneously execute the transfer of the above-mentioned first type of articles between itself and the above-mentioned first conveyor by the above-mentioned first transfer device, and the above-mentioned second transfer device. The distance between the second conveyor and the third conveyor is set at an interval between the second conveyor and the third conveyor.

根據此特徵構成，即可以同時地執行由第1移載裝置所進行之自身與第1輸送機之間的第1種物品的移載、以及由第2移載裝置所進行之自身與第2輸送機之間的第1種物品的移載。又，可以同時地執行由第1移載裝置所進行之自身與第1輸送機之間的第1種物品的移載、以及由第2移載裝置所進行之自身與第3輸送機之間的第2種物品或第3種物品的移載。 According to this characteristic structure, it is possible to simultaneously execute the transfer of the first type of article between itself and the first conveyor by the first transfer device, and the transfer of the first type of article by the second transfer device between itself and the second conveyor. Transfer of type 1 items between conveyors. Furthermore, the transfer of the first type of article between itself and the first conveyor by the first transfer device, and the transfer of the first type of article by the second transfer device between itself and the third conveyor can be performed simultaneously. The transfer of type 2 items or type 3 items.

亦即，即使在第2移載裝置中保持第1種物品、第2種物品及第3種物品之任一種物品的情況下，仍然可以同時地執行由第1移載裝置所進行之移載與由第2移載裝置所進行之移載。並且，因為可以在未將搬送量比較少的第2 種物品或第3種物品保持於第2移載裝置的情況下，將搬送量比較多的第1種物品保持於此第2移載裝置，所以可以提高物品的搬送效率。又，因為可以只讓第2移載裝置與第3輸送機設成可以保持或搬送3個種類的物品之構成，而第1移載裝置是僅可保持第1種物品的構成，第1輸送機及第2輸送機是僅可搬送第1種物品的構成，所以可以將製造成本的上升抑制到較少。 That is, even if any of the first type of article, the second type of article, and the third type of article is held in the second transfer device, transfer by the first transfer device can still be performed simultaneously. and transfer by the second transfer device. In addition, because the second transport volume is relatively small, it is possible to When the first type of article or the third type of article is held in the second transfer device, the first type of article with a relatively large transport amount is held in the second transfer device, so the efficiency of conveying the articles can be improved. Furthermore, since only the second transfer device and the third conveyor can be configured to hold or transport three types of articles, and the first transfer device is configured to hold only the first type of articles, the first conveyor The machine and the second conveyor are configured to transport only the first type of articles, so the increase in manufacturing costs can be kept to a minimum.

從而，根據此構成，可以既將製造成本的上升抑制到較少並且提高物品的搬送效率。 Therefore, according to this configuration, it is possible to improve article transport efficiency while suppressing an increase in manufacturing costs to a small level.

1:升降式搬送裝置(第1搬送裝置) 1: Elevating conveying device (first conveying device)

2:輸送機式搬送裝置(第2搬送裝置) 2: Conveyor type transfer device (second transfer device)

3:移載對象地點 3: Transfer target location

4:物品搬送車 4: Item transport vehicle

6:第1移載裝置 6: The first transfer device

7:第2移載裝置 7: The second transfer device

8:升降體 8:Lifting body

9:升降用馬達 9:Lifting motor

10:支撐體 10:Support

11:第1保持部 11: 1st maintenance department

12:第1進退機構 12: The first advance and retreat mechanism

13:第1升降機構 13: The first lifting mechanism

13A、18A:本體部 13A, 18A: Main body part

13B、18B:升降部 13B, 18B: Lifting part

14:第1旋繞機構 14: The first revolving mechanism

16:第2保持部 16:Second maintenance part

16A:把持爪 16A: Holding claw

17:第2進退機構 17: The second advance and retreat mechanism

18:第2升降機構 18: The second lifting mechanism

19:第2旋繞機構 19: The second revolving mechanism

21:第1輸送機 21: No. 1 conveyor

22:第2輸送機 22: 2nd conveyor

23:第3輸送機 23:3rd conveyor

24:第4輸送機 24: No. 4 conveyor

25:第5輸送機 25: No. 5 conveyor

27:第1類用台車 27: Category 1 trolley

28:第1種用內側支撐部 28: Inner support part for type 1

31:第2類用台車 31: Category 2 trolley

32:第2種用內側支撐部 32: Inner support part for type 2

33:第3種用內側支撐部 33: Inner support part for type 3

35:判別裝置 35: Identification device

A1:第1被檢測體 A1: The first subject

A2:第2被檢測體 A2: The second subject

A3:第3被檢測體 A3: The third subject

D:下階 D: Lower level

F1:第1被保持部 F1: The first held part

F2:第2被保持部 F2: The second held part

F3:第3被保持部 F3: The third retained part

H:上位控制器 H: Upper controller

H1:第1控制部 H1: 1st Control Department

H2:第2控制部 H2:Second Control Department

K1:第1類物品 K1: Category 1 items

K2:第2類物品 K2: Category 2 items

R1:第1類被保持部 R1: Category 1 retained part

R2:第2類被保持部 R2: Category 2 retained part

S1:第1存貨感測器 S1: 1st stock sensor

S2:上升感測器 S2: rising sensor

S3:下降感測器 S3: drop sensor

S4:第2存貨感測器(第1感測器) S4: 2nd stock sensor (1st sensor)

S5:第3存貨感測器(第2感測器) S5: 3rd stock sensor (2nd sensor)

S6:第1定位置感測器 S6: 1st fixed position sensor

S7:第2定位置感測器 S7: 2nd fixed position sensor

S8:第4存貨感測器 S8: 4th stock sensor

S9:第5存貨感測器 S9: 5th stock sensor

T1:第1種物品 T1: The first item

T2:第2種物品 T2: The second type of item

T3:第3種物品 T3: The third item

U:上階 U: Upper level

X:進退方向 X: forward and backward direction

Z:上下方向 Z: up and down direction

圖1是物品搬送設備的正面圖。 Fig. 1 is a front view of the article transport equipment.

圖2是物品搬送裝置的側面圖。 Fig. 2 is a side view of the article transport device.

圖3是第1保持部位於下降位置且位於第1退回位置的第1移載裝置的側面圖。 FIG. 3 is a side view of the first transfer device with the first holding part in the lowered position and the first retracted position.

圖4是第1保持部位於下降位置且位於第1突出位置的第1移載裝置的側面圖。 FIG. 4 is a side view of the first transfer device with the first holding part in the lowered position and the first protruding position.

圖5是第2保持部位於上升位置且位於第2退回位置的第2移載裝置的側面圖。 Fig. 5 is a side view of the second transfer device with the second holding portion in the raised position and the second retracted position.

圖6是第2保持部位於上升位置且位於第2退回位置的第2移載裝置的側面圖。 Fig. 6 is a side view of the second transfer device with the second holding portion in the raised position and the second retracted position.

圖7是第2保持部位於上升位置且位於第2退回位置的第2移載裝置的側面圖。 Fig. 7 is a side view of the second transfer device with the second holding portion in the raised position and the second retracted position.

圖8是第2保持部位於第1種用下降位置且位於第2突出位置的第2移載裝置的側面圖。 Fig. 8 is a side view of the second transfer device in which the second holding portion is in the first type lowered position and in the second protruding position.

圖9是第2保持部位於第2種用下降位置且位於第2突出位置的第2移載裝置的側面圖。 Fig. 9 is a side view of the second transfer device in which the second holding portion is in the second type lowered position and in the second protruding position.

圖10是第2保持部位於第3種用下降位置且位於第2突出位置的第2移載裝置的側面圖。 Fig. 10 is a side view of the second transfer device in which the second holding portion is in the third type lowered position and in the second protruding position.

圖11是第1輸送機的平面圖。 Fig. 11 is a plan view of the first conveyor.

圖12是第2輸送機及第3輸送機的平面圖。 Fig. 12 is a plan view of the second conveyor and the third conveyor.

圖13是第2輸送機及第3輸送機的縱截面正面圖。 Fig. 13 is a longitudinal cross-sectional front view of the second conveyor and the third conveyor.

圖14是控制方塊圖。 Figure 14 is a control block diagram.

圖15是移載動作的說明圖。 Fig. 15 is an explanatory diagram of the transfer operation.

用以實施發明之形態 Form used to implement the invention

1.實施形態 1. Implementation form

依據圖式來說明具備物品搬送裝置的物品搬送設備之實施形態。 An embodiment of an article transport facility including an article transport device will be described based on the drawings.

如圖1所示，物品搬送設備具備升降式搬送裝置1(相當於物品搬送裝置)及輸送機式搬送裝置2。升降式搬送裝置1是在下階D與階層比此下階D更上面的上階U之間搬送物品。輸送機式搬送裝置2是設置於下階D及上階U，並且沿著水平方向來搬送物品。 As shown in FIG. 1 , the article conveying equipment includes a lift-type conveying device 1 (equivalent to an article conveying device) and a conveyor-type conveying device 2 . The elevating transport device 1 transports articles between a lower level D and an upper level U that is higher than the lower level D. The conveyor-type transfer device 2 is installed on the lower stage D and the upper stage U, and conveys articles in the horizontal direction.

在升降式搬送裝置1及輸送機式搬送裝置2中，是第1類物品K1、以及種類和該第1類物品K1不同的第2類物品K2為搬送對象。第1類物品K1為第1種物品T1。在第2類物品K2中，包含有第2種物品T2與第3種物品T3。第1種物品T1是外形尺寸和第2種物品T2及第3種物品T3 之雙方不同。第2種物品T2與第3種物品T3是外形尺寸互相不同。亦即，升降式搬送裝置1及輸送機式搬送裝置2是將外形尺寸互相不同的第1種物品T1、第2種物品T2及第3種物品T3設為搬送對象。 In the lift-type transfer device 1 and the conveyor-type transfer device 2, the first type article K1 and the second type article K2 that are different in type from the first type article K1 are the transfer targets. The first type of item K1 is the first type of item T1. The second type of item K2 includes the second type of item T2 and the third type of item T3. The first type of item T1 is the overall size, the second type of item T2 and the third type of item T3 The two sides are different. The second type of item T2 and the third type of item T3 are different in external dimensions. That is, the lift-type transfer device 1 and the conveyor-type transfer device 2 set the first type of article T1, the second type of article T2, and the third type of article T3 whose external dimensions are different from each other as transportation objects.

並且，第1類物品K1的搬送量是比第2類物品K2的搬送量更多。亦即，第1種物品T1的搬送量比第2種物品T2的搬送量與第3種物品T3的搬送量之合計更多。在本實施形態中，是將和第1種物品T1相較之下搬送量較少的第2種物品T2與第3種物品T3集合到一起而設為第2類物品K2，並將搬送量較多的第1種物品T1分類為第1類物品K1。 Furthermore, the transportation amount of the first type article K1 is larger than the transportation amount of the second type article K2. That is, the conveyance amount of the first type article T1 is greater than the total conveyance amount of the second type article T2 and the third type article T3. In this embodiment, the second type of article T2 and the third type of article T3, which have a smaller transport amount than the first type of article T1, are grouped together as the second type of article K2, and the transport amount is The first type of items T1 that are more numerous are classified as type 1 items K1.

如圖3至圖5所示，第1種物品T1在上部具備第1被保持部F1。如圖6及圖7所示，第2種物品T2在上部具備第2被保持部F2。如圖9及圖10所示，第3種物品T3在上部具備第3被保持部F3。再者，第1被保持部F1是相當於設置於第1類物品K1的上部之第1類被保持部R1，第2被保持部F2及第3被保持部F3是相當於設置於第2類物品K2的上部之第2類被保持部R2。 As shown in FIGS. 3 to 5 , the first type article T1 is provided with a first held portion F1 in its upper portion. As shown in FIGS. 6 and 7 , the second type article T2 is provided with a second held portion F2 in its upper portion. As shown in FIGS. 9 and 10 , the third type article T3 is provided with a third held portion F3 in its upper portion. Furthermore, the first held part F1 is equivalent to the first held part R1 provided on the upper part of the first type article K1, and the second held part F2 and the third held part F3 are equivalent to the first held part R1 provided on the second The second type held portion R2 is the upper portion of the type article K2.

如圖5至圖7所示，第2種物品T2是上下方向Z的尺寸比第3種物品T3更大，第1種物品T1是上下方向Z的尺寸比第2種物品T2及第3種物品T3更大。因此，藉由第2移載裝置7的第2保持部16保持有第2種物品T2的第2被保持部F2的情況下的第2種物品T2的下端的高度，會變得比藉由第2移載裝置7的第2保持部16保持有第3種物品 T3的第3被保持部F3的情況下的第3種物品T3的下端的高度更低。又，藉由第2移載裝置7的第2保持部16保持有第1種物品T1的第1被保持部F1的情況下的第1種物品T1的下端的高度，會變得比藉由第2移載裝置7的第2保持部16保持有第2種物品T2的第2被保持部F2的情況下的第2種物品T2的下端的高度、以及藉由第2移載裝置7的第2保持部16保持有第3種物品T3的第3被保持部F3的情況下的第3種物品T3的下端的高度更低。 As shown in Figures 5 to 7, the size of the second type of item T2 in the vertical direction Z is larger than that of the third type of item T3. The size of the first type of item T1 in the vertical direction Z is larger than that of the second type of item T2 and the third type. Item T3 is larger. Therefore, when the second held part F2 of the second type article T2 is held by the second holding part 16 of the second transfer device 7, the height of the lower end of the second type article T2 becomes higher than that of the second held part F2 by the second holding part 16 of the second transfer device 7. The second holding part 16 of the second transfer device 7 holds the third type of article In the case of the third held portion F3 of T3, the height of the lower end of the third type article T3 is lower. In addition, when the first held part F1 of the first type article T1 is held by the second holding part 16 of the second transfer device 7, the height of the lower end of the first type article T1 becomes higher than by The height of the lower end of the second type article T2 when the second holding part 16 of the second transfer device 7 holds the second held part F2 of the second type article T2, and the height of the lower end of the second type article T2 by the second transfer device 7 When the second holding portion 16 holds the third held portion F3 of the third type article T3, the height of the lower end of the third type article T3 is lower.

在本實施形態中，第1種物品T1是收容半導體晶圓的晶圓用容器，第2種物品T2是收容EUV遮罩的EUV用容器，第3種物品T3是收容倍縮光罩的倍縮光罩用容器。具體而言，第1種物品T1是FOUP(前開式晶圓傳送盒，Front Opening Unified Pod)及FOSB(前開式晶圓運輸盒，Front Opening Shipping Box)。第2種物品T2是遵循SEMI規格的E152之EUV用容器。第3種物品T3是遵循SEMI規格的E111之倍縮光罩用容器。第1被保持部F1、第2被保持部F2及第3被保持部F3是設置於各容器的上表面部之凸緣部。 In this embodiment, the first type of article T1 is a wafer container for accommodating semiconductor wafers, the second type of article T2 is an EUV container for accommodating EUV masks, and the third type of article T3 is a multiplier for accommodating a reticle. Container for shrink mask. Specifically, the first item T1 is a FOUP (Front Opening Unified Pod) and a FOSB (Front Opening Shipping Box). The second type of article T2 is an EUV container that complies with the SEMI standard E152. The third item T3 is a container for E111 reticle reticle that complies with SEMI standards. The first held portion F1, the second held portion F2, and the third held portion F3 are flange portions provided on the upper surface portion of each container.

在本實施形態中，在對升降式搬送裝置1中的第2移載裝置7的動作造成影響之部位的外形尺寸不同的情況，是視為「外形尺寸不同」。亦即，因為第2移載裝置7是保持容器的凸緣部之構成，所以當容器中的凸緣部的高度位於相同高度，且該凸緣部的形狀為相同的情況下，是視為「外形尺寸相同」，當容器的凸緣部的高度不 同、或該凸緣部的形狀不同的情況下，是視為「外形尺寸不同」。雖然第2移載裝置7可支撐第1種物品T1、第2種物品T2及第3種物品T3之任一種物品，但是在將第1種物品T1的底面、第2種物品T2的底面及第3種物品T3的底面支撐於相同高度的情況下，因為這些物品的凸緣部的高度不同，因此這些物品為「外形尺寸不同」的物品，而成為第1種物品T1、第2種物品T2及第3種物品T3是移載的情況下的動作不同的物品。因此，這些第1種物品T1、第2種物品T2及第3種物品T3是視為不同的種類。另一方面，雖然作為第1種物品T1而有FOUP與FOSB，但是這些因為容器的凸緣的高度相同，且凸緣部的形狀也相同，所以這些並不是「外形尺寸不同」的物品，而是視為外形尺寸相同的物品，亦即，相同種類的物品。再者，在本實施形態中，第2種物品T2與第3種物品T3的凸緣部的形狀是相同的。亦即，在本實施形態中，凸緣部的形狀為相同之第2種物品T2與第3種物品T3是分類為第2類物品K2，而凸緣部的形狀和這些為不同並且凸緣部的高度也不同之第1種物品T1是分類為第1類物品K1。 In the present embodiment, when the external dimensions of the parts that affect the operation of the second transfer device 7 in the elevating transport device 1 are different, it is regarded as "different in external dimensions". That is, since the second transfer device 7 is configured to hold the flange portion of the container, when the heights of the flange portions in the container are at the same height and the shapes of the flange portions are the same, it is regarded as "The outer dimensions are the same", when the height of the flange part of the container is different If they are the same, or if the shape of the flange part is different, it is regarded as "different in external dimensions". Although the second transfer device 7 can support any one of the first type of article T1, the second type of article T2 and the third type of article T3, the bottom surface of the first type of article T1, the bottom surface of the second type of article T2 and When the bottom surface of the third type article T3 is supported at the same height, since the heights of the flange portions of these articles are different, these articles are articles with "different external dimensions" and become the first type article T1 and the second type article T2 and the third type of item T3 are items with different actions when transferred. Therefore, these first-type items T1, second-type items T2, and third-type items T3 are regarded as different types. On the other hand, although there are FOUP and FOSB as the first type of article T1, since the height of the flange of the container is the same and the shape of the flange portion is also the same, these are not articles with "different external dimensions". Items are considered to be items with the same appearance and dimensions, that is, items of the same type. Furthermore, in this embodiment, the shapes of the flange portions of the second type article T2 and the third type article T3 are the same. That is, in this embodiment, the second type article T2 and the third type article T3, which have the same shape of the flange portion, are classified as the second type article K2, but the shape of the flange portion is different from these and the flange The first type of article T1 is classified as the first type of article K1 because the height of the part is also different.

如圖2所示，升降式搬送裝置1具備有：第1移載裝置6；第2移載裝置7，設置在比第1移載裝置6更上方且在沿著上下方向Z的上下方向Z視角下與第1移載裝置6重疊的位置；及升降體8，支撐第1移載裝置6及第2移載裝置7，並且藉由升降用馬達9(參照圖13)的驅動而沿著上下方向Z移動。在將上下方向Z中的相對於第1移載裝置6 而設置有第2移載裝置7之側設為上下方向特定側的情況下，在本實施形態中，上下方向特定側是上下方向Z中的上側。 As shown in FIG. 2 , the lifting conveyor 1 is provided with a first transfer device 6 and a second transfer device 7 provided above the first transfer device 6 and in the up-down direction Z along the up-down direction Z. A position overlapping the first transfer device 6 from a visual angle; and an elevating body 8 that supports the first transfer device 6 and the second transfer device 7 and is driven along the elevating motor 9 (see Figure 13). Move Z in the up and down direction. With respect to the first transfer device 6 in the up-down direction Z When the side where the second transfer device 7 is installed is the up-down direction specific side, in this embodiment, the up-down direction specific side is the upper side in the up-down direction Z.

第1移載裝置6是構成為僅可在自身與移載對象地點3之間移載第1類物品K1(第1種物品T1)與第2類物品K2(第2種物品T2及第3種物品T3)當中的第1類物品K1(第1種物品T1)。第2移載裝置7是構成為可在自身與移載對象地點3之間移載第1類物品K1(第1種物品T1)及第2類物品K2(第2種物品T2及第3種物品T3)之雙方。 The first transfer device 6 is configured to transfer only the first type of article K1 (the first type of article T1) and the second type of article K2 (the second type of article T2 and the third type of article) between itself and the transfer target point 3. The first type of item K1 (the first type of item T1) among the types of items T3). The second transfer device 7 is configured to transfer the first type of article K1 (the first type of article T1) and the second type of article K2 (the second type of article T2 and the third type of article) between itself and the transfer target point 3. Both sides of item T3).

再者，在第1移載裝置6中，「可在自身與移載對象地點3之間移載」是表示可進行下述移載：第1移載裝置6將第1類物品K1從第1移載裝置6移載至移載對象地點3、或第1移載裝置6將第1類物品K1從移載對象地點3移載至第1移載裝置6。又，在第2移載裝置7中，「可在自身與移載對象地點3之間移載」是表示可進行下述移載：第2移載裝置7將第1類物品K1或第2類物品K2從第2移載裝置7移載至移載對象地點3、或第2移載裝置7將第1類物品K1或第2類物品K2從移載對象地點3移載至第2移載裝置7。 Furthermore, in the first transfer device 6, "can transfer between itself and the transfer target point 3" means that the following transfer can be performed: the first transfer device 6 transfers the first type item K1 from the The 1 transfer device 6 transfers to the transfer target location 3, or the 1st transfer device 6 transfers the 1st type article K1 from the transfer target location 3 to the 1st transfer device 6. In addition, in the second transfer device 7, "can transfer between itself and the transfer target point 3" means that the following transfer can be performed: the second transfer device 7 transfers the first type article K1 or the second The class object K2 is transferred from the second transfer device 7 to the transfer target location 3, or the second transfer device 7 transfers the first class item K1 or the second class item K2 from the transfer target location 3 to the second transfer location. Loading device 7.

如圖11及圖12所示，在上下方向Z視角下，將移載對象地點3設置成位於升降體8的周圍。在此移載對象地點3中，具備有支撐物品的支撐體10及輸送機式搬送裝置2的一部分。第1移載裝置6是在自身與支撐體10之間移載第1種物品T1，並且在自身與輸送機式搬送裝置2之間移載第1種物品T1。第2移載裝置7是在自身與支撐體10之 間移載第1種物品T1、第2種物品T2及第3種物品T3，並且在自身與輸送機式搬送裝置2之間移載第1種物品T1、第2種物品T2及第3種物品T3。 As shown in FIGS. 11 and 12 , the transfer target point 3 is located around the elevating body 8 in the up-down direction Z viewing angle. This transfer target point 3 is provided with a support body 10 that supports articles and a part of the conveyor-type transfer device 2 . The first transfer device 6 transfers the first type of article T1 between itself and the support 10 , and also transfers the first type of article T1 between itself and the conveyor type transfer device 2 . The second transfer device 7 is between itself and the support body 10 The first type of article T1, the second type of article T2 and the third type of article T3 are transferred between itself and the conveyor type transfer device 2, and the first type of article T1, second type of article T2 and third type of article T3 are transferred between itself and the conveyor type transfer device 2 Item T3.

如圖2所示，第1移載裝置6具備有：第1保持部11，保持第1類物品K1(第1種物品T1)；第1進退機構12，使第1保持部11移動至第1退回位置與第1突出位置，其中前述第1突出位置是相對於第1退回位置而突出至移載對象地點3所存在之側的位置；第1升降機構13，使第1保持部11相對於第1進退機構12而在上下方向Z上移動；及第1旋繞機構14，使第1進退機構12繞著沿上下方向Z的軸心旋繞。 As shown in FIG. 2 , the first transfer device 6 is provided with: a first holding part 11 that holds the first type of article K1 (first type of article T1); and a first forward and backward mechanism 12 that moves the first holding part 11 to the first type of article. 1 retracted position and a first protruding position, wherein the first protruding position is a position protruding to the side where the transfer target point 3 exists relative to the first retracted position; the first lifting mechanism 13 makes the first holding part 11 face each other The first advance and retreat mechanism 12 moves in the up and down direction Z; and the first revolving mechanism 14 makes the first advance and retreat mechanism 12 revolve around the axis along the up and down direction Z.

在本實施形態中，第1進退機構12是由水平多關節機械手臂(SCARA arm)所構成。第1進退機構12的基部是以繞著沿上下方向Z的軸心旋轉自如的方式連結於升降體8，且第1進退機構12的前端部連結有第1升降機構13。第1進退機構12是藉由沿著進退方向X伸縮而使第1保持部11沿著進退方向X移動。第1升降機構13具備：本體部13A，固定於第1進退機構12；及升降部13B，以可升降的方式受本體部13A所支撐，並且固定於第1保持部11。第1升降機構13是使升降部13B相對於本體部13A而沿著上下方向Z移動，藉此使第1保持部11沿著上下方向Z移動。第1保持部11是構成為藉由從下方支撐第1類物品K1的底面來進行保持。 In this embodiment, the first forward and backward mechanism 12 is composed of a horizontal multi-joint robot arm (SCARA arm). The base of the first forward and backward mechanism 12 is rotatably connected to the lifting body 8 around the axis along the up-down direction Z, and the first lifting mechanism 13 is connected to the front end of the first forward and backward mechanism 12 . The first forward and backward mechanism 12 moves the first holding part 11 along the forward and backward direction X by extending and contracting along the forward and backward direction X. The first lifting mechanism 13 includes: a main body part 13A fixed to the first forward and backward mechanism 12; and a lifting part 13B supported by the main body part 13A in an elevating manner and fixed to the first holding part 11. The first lifting mechanism 13 moves the lifting part 13B along the up-down direction Z relative to the main body part 13A, thereby moving the first holding part 11 along the up-down direction Z. The first holding part 11 is configured to hold the first type article K1 by supporting the bottom surface thereof from below.

如圖3及圖4所示，第1移載裝置6是進行在自 身與移載對象地點3之間移載第1類物品K1的移載動作。第1移載裝置6是構成為進行下述動作來作為移載動作：沿著連結升降體8與移載對象地點3的方向(進退方向X)而突出及退回的進退動作、以及沿著上下方向Z而升降的升降動作。 As shown in Figures 3 and 4, the first transfer device 6 performs automatic The transfer action is to transfer the first category item K1 between the body and the transfer target location 3. The first transfer device 6 is configured to perform the following operations as a transfer operation: an advance and retreat operation of protruding and retracting in the direction connecting the elevating body 8 and the transfer target point 3 (advance and retreat direction X), and an up and down movement. The lifting action of lifting in direction Z.

第1移載裝置6的進退動作是藉由第1進退機構12使第1保持部11從第1退回位置突出至第1突出位置的第1突出動作、及藉由第1進退機構12使第1保持部11從第1突出位置退回至第1退回位置的第1退回動作。又，第1移載裝置6的升降動作是藉由第1升降機構13使第1保持部11從下降位置上升至上升位置的第1上升動作、及藉由第1升降機構13使第1保持部11從上升位置下降至下降位置的第1下降動作。 The forward and backward movement of the first transfer device 6 is a first protruding movement of the first holding part 11 from the first retracted position to the first protruding position by the first forward and backward mechanism 12, and the first protruding movement of the first forward and backward mechanism 12. 1. A first retracting action in which the holding part 11 retracts from the first protruding position to the first retracted position. Furthermore, the lifting operation of the first transfer device 6 is a first lifting operation in which the first holding part 11 is raised from a lowering position to an upward position by the first lifting mechanism 13, and the first holding part 11 is raised by the first lifting mechanism 13. The first descending movement of the part 11 is to descend from the ascending position to the descending position.

第1移載裝置6在要將第1種物品T1從自身移載至移載對象地點3的情況下，是從保持有第1種物品T1的第1保持部11在上下方向Z上位於上升位置且在進退方向X上位於第1退回位置的狀態，以第1突出動作、第1下降動作、第1退回動作的順序來進行。 When the first transfer device 6 wants to transfer the first type of article T1 from itself to the transfer target point 3, it is located upward in the up-down direction Z from the first holding part 11 holding the first type of article T1. position and is in the first retracted position in the advance and retreat direction X, the first protruding action, the first lowering action, and the first retracting action are performed in this order.

又，第1移載裝置6在要將第1種物品T1從移載對象地點3移載至自身的情況下，是從未保持有第1種物品T1的第1保持部11在上下方向Z上位於下降位置且在進退方向X上位於第1退回位置的狀態，以第1突出動作、第1上升動作、第1退回動作的順序來進行。 Moreover, when the first transfer device 6 wants to transfer the first type article T1 from the transfer target point 3 to itself, the first holding part 11 that has never held the first type article T1 moves in the up and down direction Z. The state in which the upper position is at the lowered position and the first retracted position in the advance and retreat direction X is performed in the order of the first protruding action, the first rising action, and the first retracting action.

並且，第1移載裝置6是構成為藉由使第1進 退機構12繞著沿上下方向Z的軸心旋轉，而可變更使第1進退機構12伸縮時之第1保持部11的進退方向X。藉此，變得能夠在與排列於周圍的5個移載對象地點3之間移載第1種物品T1。 Furthermore, the first transfer device 6 is configured to move the first The retraction mechanism 12 rotates around an axis along the up-down direction Z, and can change the advancement and retraction direction X of the first holding part 11 when the first advancement and retraction mechanism 12 is expanded and contracted. Thereby, it becomes possible to transfer the first type of article T1 between the five transfer target points 3 arranged around.

如圖5至圖11所示，第2移載裝置7具備：第2保持部16，可保持第1類物品K1(第1種物品T1)與第2類物品K2(第2種物品T2及第3種物品T3)之任一類的物品；第2進退機構17，使第2保持部16移動至第2退回位置與第2突出位置，其中前述第2突出位置是相對於第2退回位置而突出至移載對象地點3所存在之側的位置；第2升降機構18，使第2保持部16相對於第2進退機構17而在上下方向Z上移動；及第2旋繞機構19，使第2進退機構17繞著沿上下方向Z的軸心旋繞。 As shown in FIGS. 5 to 11 , the second transfer device 7 is provided with a second holding part 16 capable of holding the first type of article K1 (the first type of article T1 ) and the second type of article K2 (the second type of article T2 and Any type of article of the third type of article T3); the second forward and backward mechanism 17 moves the second holding part 16 to the second retracted position and the second protruding position, wherein the aforementioned second protruding position is relative to the second retracted position. protrudes to a position on the side where the transfer target point 3 exists; the second lifting mechanism 18 moves the second holding part 16 in the up-down direction Z relative to the second forward and backward mechanism 17; and the second rewinding mechanism 19 moves the second 2. The forward and backward mechanism 17 rotates around an axis along the up and down direction Z.

在本實施形態中，第2進退機構17是由水平多關節機械手臂所構成。第2進退機構17的基部是以繞著沿上下方向Z的軸心旋轉自如的方式連結於升降體8，且第2進退機構17的前端部連結有第2升降機構18。第2進退機構17是藉由沿著進退方向X伸縮而使第2保持部16沿著進退方向X移動。第2升降機構18具備：本體部18A，固定於第2進退機構17；及升降部18B，以可升降的方式受本體部18A所支撐，並且固定於第2保持部16。第2升降機構18是使升降部18B相對於本體部18A而沿著上下方向Z移動，藉此使第2保持部16沿著上下方向Z移動。第2保持部16是構成為可保持第1類物品K1的上部所配備的第1類被保持部 R1、及第2類物品K2的上部所配備的第2類被保持部R2之任一個。 In this embodiment, the second forward and backward mechanism 17 is composed of a horizontal multi-joint robot arm. The base of the second forward and backward mechanism 17 is rotatably connected to the lifting body 8 about the axis along the up-down direction Z, and the second lifting mechanism 18 is connected to the front end of the second forward and backward mechanism 17 . The second forward and backward mechanism 17 moves the second holding part 16 along the forward and backward direction X by extending and contracting along the forward and backward direction X. The second lifting mechanism 18 includes a main body portion 18A fixed to the second forward and backward mechanism 17 and a lifting portion 18B that is elevatingly supported by the main body portion 18A and fixed to the second holding portion 16 . The second lifting mechanism 18 moves the lifting part 18B along the up-down direction Z relative to the main body part 18A, thereby moving the second holding part 16 along the up-down direction Z. The second holding part 16 is a first-type held part provided on the upper part of the first-type article K1 and is configured to hold the first-type article K1 Either R1 or the second type held part R2 provided on the upper part of the second type article K2.

針對第2保持部16加以說明。第2保持部16具備沿著水平方向而互相接近遠離移動自如的一對把持爪16A。第2保持部16是構成為可切換成：使一對把持爪16A互相接近的接近狀態、以及使一對把持爪16A互相遠離的遠離狀態。在遠離狀態下，一對把持爪16A的間隔是比第1被保持部F1、第2被保持部F2、第3被保持部F3的寬度更寬，在接近狀態下，一對把持爪16A是比第1被保持部F1、第2被保持部F2、第3被保持部F3的任一個的寬度更狹窄。因此，第2保持部16是構成為可保持第1種物品T1的上部所具備的第1被保持部F1、第2種物品T2的上部所具備的第2被保持部F2、及第3種物品T3的上部所具備的第3被保持部F3之任一個。 The second holding portion 16 will be described. The second holding portion 16 is provided with a pair of holding claws 16A that can move toward and away from each other along the horizontal direction. The second holding portion 16 is configured to be switchable between an approaching state in which the pair of holding claws 16A is brought closer to each other, and a distanced state in which the pair of holding claws 16A are separated from each other. In the distanced state, the distance between the pair of holding claws 16A is wider than the width of the first held part F1, the second held part F2, and the third held part F3. In the close state, the distance between the pair of holding claws 16A is wider. It is narrower than the width of any one of the first held portion F1, the second held portion F2, and the third held portion F3. Therefore, the second holding part 16 is configured to hold the first held part F1 provided in the upper part of the first type article T1, the second held part F2 provided in the upper part of the second type article T2, and the third type Any one of the third held parts F3 provided on the upper part of the article T3.

第2移載裝置7是進行在自身與移載對象地點3之間移載第1類物品K1或第2類物品K2的移載動作。第2移載裝置7是構成為除了進退動作與升降動作之外，還進行保持第1類物品K1或第2類物品K2的保持動作來作為移載動作。 The second transfer device 7 performs a transfer operation of transferring the first type of article K1 or the second type of article K2 between itself and the transfer target point 3 . The second transfer device 7 is configured to perform a holding operation of holding the first type article K1 or the second type article K2 as a transfer operation in addition to the forward and backward movement and the lifting movement.

第2移載裝置7的進退動作是藉由第2進退機構17使第2保持部16從第2退回位置突出至第2突出位置的第2突出動作、及藉由第2進退機構17使第2保持部16從第2突出位置退回至第2退回位置的第2退回動作。又，第2移載裝置7的升降動作為下述動作：藉由第2升降機構18使第 2保持部16上升至上升位置的第2上升動作、藉由第2升降機構18使第2保持部16從上升位置下降至第1種用下降位置的第1種用下降動作、藉由第2升降機構18使第2保持部16從上升位置下降至第2種用下降位置的第2種用下降動作、或藉由第2升降機構18使第2保持部16從上升位置下降至第3種用下降位置的第3種用下降動作。又，第2移載裝置7的保持動作是將第2保持部16從接近狀態切換至遠離狀態的遠離動作、或將第2保持部16從遠離狀態切換至接近狀態的接近動作。 The forward and backward movement of the second transfer device 7 is a second protruding movement of the second holding part 16 from the second retracted position to the second protruding position by the second forward and backward mechanism 17, and the second protruding movement of the second forward and backward mechanism 17. 2. A second retracting action in which the holding portion 16 retracts from the second protruding position to the second retracted position. In addition, the lifting operation of the second transfer device 7 is an operation in which the second lifting mechanism 18 moves the second transfer device 7 up and down. 2. a second lifting operation in which the holding part 16 rises to a lifting position; a first-type downward movement in which the second holding part 16 is lowered from a lifting position to a first-type downward position by the second lifting mechanism 18; The lifting mechanism 18 lowers the second holding part 16 from the lifting position to the second type lowering position, or the second lifting mechanism 18 lowers the second holding part 16 from the lifting position to the third type. Use the third type of descending action in the descending position. In addition, the holding operation of the second transfer device 7 is a distance operation of switching the second holding part 16 from the close state to the distanced state, or the approach operation of switching the second holding part 16 from the distanced state to the close state.

第2移載裝置7在要將第1種物品T1從自身(第1移載裝置6)移載至移載對象地點3的情況下，是從保持有第1種物品T1的第2保持部16在上下方向Z上位於上升位置且在進退方向X上位於第2退回位置的狀態，依序進行第2突出動作、第1種用下降動作、遠離動作、第2上升動作、及第2退回動作。 When the second transfer device 7 wants to transfer the first type of article T1 from itself (the first transfer device 6 ) to the transfer target point 3 , it transfers the first type of article T1 from the second holding part holding the first type of article T1 16. While in the ascending position in the up-down direction Z and in the second retracted position in the forward and backward direction action.

又，第2移載裝置7在要將第1種物品T1從移載對象地點3移載至自身(第1移載裝置6)的情況下，是從未保持有第1種物品T1、第2種物品T2、第3種物品T3之任一種物品的第2保持部16在上下方向Z上位於上升位置且在進退方向X上位於第2退回位置的狀態，依序進行第2突出動作、第1種用下降動作、接近動作、第2上升動作、及第2退回動作。 Moreover, when the second transfer device 7 transfers the first type of article T1 from the transfer target point 3 to itself (the first transfer device 6), it never holds the first type of article T1 and the second transfer device 7. The second holding portion 16 of any one of the two types of articles T2 and the third type of article T3 is located in the raised position in the up-down direction Z and in the second retracted position in the forward and backward direction X, and sequentially performs the second protruding operation, The first type uses the descending movement, the approach movement, the second rising movement, and the second retreating movement.

第2移載裝置7在要將第2種物品T2從自身(第1移載裝置6)移載至移載對象地點3的情況下，是從保持有第2種物品T2的第2保持部16在上下方向Z上位於上升 位置且在進退方向X上位於第2退回位置的狀態，依序進行第2突出動作、第2種用下降動作、遠離動作、第2上升動作、及第2退回動作。 When the second transfer device 7 wants to transfer the second type of article T2 from itself (the first transfer device 6 ) to the transfer target point 3 , it transfers the second type of article T2 from the second holding part holding the second type of article T2 . 16 is located upward in the up and down direction Z position and is in the second retracted position in the advance and retreat direction

又，第2移載裝置7在要將第2種物品T2從移載對象地點3移載至自身(第1移載裝置6)的情況下，是從未保持有第1種物品T1、第2種物品T2、第3種物品T3之任一種物品的第2保持部16在上下方向Z上位於上升位置且在進退方向X上位於第2退回位置的狀態，依序進行第2突出動作、第2種用下降動作、接近動作、第2上升動作、及第2退回動作。 Furthermore, when the second transfer device 7 transfers the second type of article T2 from the transfer target point 3 to itself (the first transfer device 6), it never holds the first type of article T1, the second type of article T2, and the second type of article T2. The second holding portion 16 of any one of the two types of articles T2 and the third type of article T3 is located in the raised position in the up-down direction Z and in the second retracted position in the forward and backward direction X, and sequentially performs the second protruding operation, The second type uses the descending action, the approaching action, the second rising action, and the second retreating action.

第2移載裝置7在要將第3種物品T3從自身(第1移載裝置6)移載至移載對象地點3的情況下，是從保持有第3種物品T3的第2保持部16在上下方向Z上位於上升位置且在進退方向X上位於第2退回位置的狀態，依序進行第2突出動作、第3種用下降動作、遠離動作、第2上升動作、及第2退回動作。 When the second transfer device 7 wants to transfer the third kind of article T3 from itself (the first transfer device 6 ) to the transfer target point 3 , it transfers the third kind of article T3 from the second holding part holding the third kind of article T3 . 16. While in the ascending position in the up-down direction Z and in the second retracted position in the forward and backward direction action.

又，第2移載裝置7在要將第3種物品T3從移載對象地點3移載至自身(第1移載裝置6)的情況下，是從未保持有第1種物品T1、第2種物品T2、第3種物品T3之任一種物品的第2保持部16在上下方向Z上位於上升位置且在進退方向X上位於第2退回位置的狀態，依序進行第2突出動作、第3種用下降動作、接近動作、第2上升動作、及第2退回動作。 In addition, when the second transfer device 7 transfers the third type of article T3 from the transfer target point 3 to itself (the first transfer device 6), it never holds the first type of article T1, the first type of article T3, and the second type of article T3. The second holding portion 16 of any one of the two types of articles T2 and the third type of article T3 is located in the raised position in the up-down direction Z and in the second retracted position in the forward and backward direction X, and sequentially performs the second protruding operation, The third type uses the descending action, the approaching action, the second rising action, and the second retreating action.

第1移載裝置6是相較於第2移載裝置7，可在較短時間內執行第1類物品K1在自身與移載對象地點3之間的移載動作之構成。 The first transfer device 6 is configured to perform the transfer operation of the first type article K1 between itself and the transfer target point 3 in a shorter time than the second transfer device 7 .

亦即，第1移載裝置6將第1種物品T1從自身移載至移載對象地點3時所需要的時間(第1突出動作、第1下降動作、第1退回動作所需要的時間)，比第2移載裝置7將第1種物品T1從自身移載至移載對象地點3時所需要的時間(第2突出動作、第1種用下降動作、遠離動作、第2上升動作、第2退回動作所需要的時間)更短。 That is, the time required for the first transfer device 6 to transfer the first type of article T1 from itself to the transfer target location 3 (the time required for the first protruding action, the first lowering action, and the first retracting action) , compared with the time required for the second transfer device 7 to transfer the first type item T1 from itself to the transfer target location 3 (the second protruding action, the first type lowering action, the away action, the second rising action, The time required for the second return action) is shorter.

又，第1移載裝置6將第1種物品T1從移載對象地點3移載至自身時所需要的時間(第1突出動作、第1上升動作、第1退回動作所需要的時間)，比第2移載裝置7將第1種物品T1從移載對象地點3移載至自身時所需要的時間(第2突出動作、第1種用下降動作、接近動作、第2上升動作、第2退回動作所需要的時間)更短。 In addition, the time required for the first transfer device 6 to transfer the first type of article T1 from the transfer target location 3 to itself (the time required for the first protruding action, the first rising action, and the first retracting action), Compared with the time required for the second transfer device 7 to transfer the first type item T1 from the transfer target location 3 to itself (the second protruding action, the first type falling action, the approach action, the second rising action, 2The time required for the return action) is shorter.

並且，第2移載裝置7是構成為藉由使第2進退機構17繞著沿上下方向Z的軸心旋轉，而可變更使第2進退機構17伸縮時之第2保持部16的進退方向X。藉此，就變得能夠在與排列於周圍的5個移載對象地點3之間移載第1種物品T1、第2種物品T2、或第3種物品T3。 Furthermore, the second transfer device 7 is configured to change the advancement and retreat direction of the second holding portion 16 when the second advancement and retreat mechanism 17 is expanded and contracted by rotating the second advancement and retreat mechanism 17 around the axis along the up-down direction Z. X. This makes it possible to transfer the first type of article T1, the second type of article T2, or the third type of article T3 between the five transfer target locations 3 arranged around.

輸送機式搬送裝置2具備第1輸送機21、第2輸送機22及第3輸送機23。第1輸送機21及第2輸送機22是僅將第1種物品T1、第2種物品T2及第3種物品T3當中的第1種物品T1沿著水平方向來搬送。第3輸送機23是僅將第1種物品T1、第2種物品T2及第3種物品T3當中的第2種物品T2與第3種物品T3沿著水平方向來搬送。第2輸送機22與第3輸送機23是設置在比第1輸送機21更上方。 The conveyor type transfer device 2 includes a first conveyor 21, a second conveyor 22, and a third conveyor 23. The first conveyor 21 and the second conveyor 22 convey only the first article T1 among the first article T1, the second article T2, and the third article T3 in the horizontal direction. The third conveyor 23 conveys only the second article T2 and the third article T3 among the first article T1, the second article T2, and the third article T3 in the horizontal direction. The second conveyor 22 and the third conveyor 23 are provided above the first conveyor 21 .

作為第1輸送機21，有朝向移載對象地點3搬送第1種物品T1之搬入用的第1輸送機21、以及從移載對象地點3搬送第1種物品T1之搬出用的第1輸送機21。在圖11所示的例子中，是將搬入用的第1輸送機21與搬出用的第1輸送機21作為1組第1輸送機21，且在相同的高度上設置有2組第1輸送機21。 As the first conveyor 21, there is a first conveyor 21 for carrying in the first type of article T1 toward the transfer target point 3, and a first conveyor for carrying out the first type of article T1 from the transfer target point 3. Machine 21. In the example shown in FIG. 11 , the first conveyor 21 for carry-in and the first conveyor 21 for carry-out are used as one set of first conveyors 21 , and two sets of first conveyors are provided at the same height. Machine 21.

作為第2輸送機22，有朝向移載對象地點3搬送第1種物品T1之搬入用的第2輸送機22、以及從移載對象地點3搬送第1種物品T1之搬出用的第2輸送機22。又，作為第3輸送機23，有朝向移載對象地點3搬送第2種物品T2及第3種物品T3之搬入用的第3輸送機23、以及從移載對象地點3搬送第2種物品T2及第3種物品T3之搬出用的第3輸送機23。在圖12所示的例子中，是將搬入用的第2輸送機22與搬出用的第2輸送機22作為1組第2輸送機22，將搬入用的第3輸送機23與搬出用的第3輸送機23作為1組第3輸送機23，且在相同的高度上設置有1組第2輸送機22與1組第3輸送機23。 The second conveyor 22 includes a second conveyor 22 for carrying in the first type of article T1 toward the transfer target point 3, and a second conveyor for carrying out the first type of article T1 from the transfer target point 3. Machine 22. Moreover, as the third conveyor 23, there is a third conveyor 23 for carrying in the second type of article T2 and the third type of article T3 toward the transfer target point 3, and a third conveyor 23 for carrying the second type of article from the transfer target point 3. The third conveyor 23 is used for carrying out T2 and the third type of article T3. In the example shown in FIG. 12 , the second conveyor 22 for carry-in and the second conveyor 22 for carry-out are regarded as one set of second conveyors 22 , and the third conveyor 23 for carry-in and the second conveyor 22 for carry-out are The third conveyor 23 serves as a set of third conveyors 23, and a set of second conveyors 22 and a set of third conveyors 23 are provided at the same height.

針對第2輸送機22與第3輸送機23的設置高度加以說明。在本實施形態中，如圖13所示，第2輸送機22是設置成該第2輸送機22所搬送的第1種物品T1的第1被保持部F1的高度和第3輸送機23所搬送的第2種物品T2的第2被保持部F2的高度成為相同。 The installation height of the second conveyor 22 and the third conveyor 23 will be described. In this embodiment, as shown in FIG. 13 , the second conveyor 22 is installed so that the height of the first held portion F1 of the first type article T1 conveyed by the second conveyor 22 is different from the height of the third conveyor 23 . The heights of the second held portions F2 of the second type of article T2 to be conveyed are the same.

第1輸送機21與第2輸送機22是以可同時地執行下述移載的間隔來設置：由第1移載裝置6所進行之自 身與第1輸送機21之間的第1種物品T1的移載、以及由第2移載裝置7所進行之自身與第2輸送機22之間的第1種物品T1的移載。 The first conveyor 21 and the second conveyor 22 are installed at an interval such that the following transfers can be performed simultaneously: automatic transfer by the first transfer device 6 The first type of article T1 is transferred between itself and the first conveyor 21, and the first type of article T1 is transferred between itself and the second conveyor 22 by the second transfer device 7.

又，第1輸送機21與第3輸送機23是以可同時地執行下述移載的間隔來設置：由第1移載裝置6所進行之自身與第1輸送機21之間的第1種物品T1的移載、以及由第2移載裝置7所進行之自身與第3輸送機23之間的第2種物品T2及第3種物品T3的移載。 In addition, the first conveyor 21 and the third conveyor 23 are installed at an interval such that the following transfer can be performed simultaneously: the first transfer between itself and the first conveyor 21 by the first transfer device 6. The second transfer device 7 transfers the second type of article T1 and the second type of article T2 and the third type of article T3 between itself and the third conveyor 23 .

第2輸送機22具備：第1類用台車27，沿著水平方向移動以搬送第1類物品K1(第1種物品T1)；第1種用內側支撐部28，相對於第1類用台車27的移動路徑的一端部而設置；及第1種用外側支撐部(未圖示)，相對於第1類用台車27的移動路徑的另一端部而設置。第1種用內側支撐部28是位於移載對象地點3。 The second conveyor 22 is provided with: a first-type trolley 27 that moves in the horizontal direction to convey the first-type article K1 (first-type article T1); and a first-type inner support portion 28 that is opposite to the first-type trolley. and a first-type outer support portion (not shown) is provided with respect to the other end of the movement path of the first-type trolley 27. The first type inner support portion 28 is located at the transfer target point 3 .

對於第1種用內側支撐部28，是藉由升降式搬送裝置1來進行第1種物品T1的裝卸。又，對於第1種用外側支撐部，是藉由行走於天花板附近的物品搬送車4(參照圖1)來進行第1種物品T1的裝卸。並且，藉由第1類用台車27，而在第1種用內側支撐部28與第1種用外側支撐部之間搬送第1種物品T1。 Regarding the first type inner support portion 28 , the first type article T1 is loaded and unloaded by the lifting conveyor 1 . In addition, regarding the first-type outer support portion, the first-type article T1 is loaded and unloaded by the article transport vehicle 4 (see FIG. 1 ) running near the ceiling. And the first type article T1 is conveyed between the first type inner support part 28 and the first type outer support part by the first type trolley 27 .

第3輸送機23具備：第2類用台車31，沿著水平方向移動以搬送第2類物品K2(第2種物品T2及第3種物品T3)；第2種用內側支撐部32及第3種用內側支撐部33，相對於第2類用台車31的移動路徑的一端部而設置；及第2 種用外側支撐部(未圖示)及第3種用外側支撐部(未圖示)，相對於第2類用台車31的移動路徑的另一端部而設置。第2種用內側支撐部32及第3種用內側支撐部33是位於移載對象地點3。 The third conveyor 23 includes: a second type trolley 31 that moves in the horizontal direction to convey the second type of article K2 (the second type of article T2 and the third type of article T3); the second type of inner support part 32 and the third type of article K2; The inner support part 33 for type 3 is provided with respect to one end of the movement path of the trolley 31 for type 2; and the second type The first type outer support part (not shown) and the third type outer support part (not shown) are provided with respect to the other end of the movement path of the second type trolley 31 . The second type inner support part 32 and the third type inner support part 33 are located at the transfer target point 3 .

對於第2種用內側支撐部32，是藉由升降式搬送裝置1來進行第2種物品T2的裝卸，對於第3種用內側支撐部33，是藉由升降式搬送裝置1來進行第3種物品T3的裝卸。對於第2種用外側支撐部，是藉由物品搬送車4(參照圖1)來進行第2種物品T2的裝卸，對於第3種用外側支撐部，是藉由物品搬送車4來進行第3種物品T3的裝卸。並且，藉由第2類用台車31，而在第2種用內側支撐部32與第2種用外側支撐部之間搬送第2種物品T2，並且在第3種用內側支撐部33與第3種用外側支撐部之間搬送第3種物品T3。再者，由於第1輸送機21是與第2輸送機22同樣地構成，因此省略說明。 The inner support part 32 for the second type is used to load and unload the second article T2 by the lifting conveyor 1, and the inner support part 33 for the third type is loaded and unloaded by the lifting conveyor 1. Loading and unloading of items T3. For the second type outer support part, the second type article T2 is loaded and unloaded by the article transfer vehicle 4 (see FIG. 1 ), and for the third type outer support part, the second type article T2 is loaded and unloaded by the article transfer vehicle 4 (see FIG. 1 ). Loading and unloading of 3 types of items T3. Furthermore, the second type article T2 is conveyed between the second type inner support part 32 and the second type outer support part by the second type trolley 31, and between the third type inner support part 33 and the second type outer support part The third type of article T3 is transported between the three types of outer support parts. In addition, since the 1st conveyor 21 has the same structure as the 2nd conveyor 22, description is abbreviate|omitted.

又，如圖1所示，輸送機式搬送裝置2具備：第4輸送機24，沿著水平方向僅搬送第1種物品T1、第2種物品T2及第3種物品T3當中的第1種物品T1；及第5輸送機25，沿著水平方向僅搬送第1種物品T1、第2種物品T2及第3種物品T3當中的第2種物品T2與第3種物品T3。 Furthermore, as shown in FIG. 1 , the conveyor-type transfer device 2 includes a fourth conveyor 24 that transports only the first type of article T1 , the second type of article T2 , and the third type of article T3 in the horizontal direction. The article T1; and the fifth conveyor 25 convey only the second article T2 and the third article T3 among the first article T1, the second article T2 and the third article T3 in the horizontal direction.

第4輸送機24及第5輸送機25是相對於第1輸送機21、第2輸送機22及第3輸送機23而設置在下方的地板面附近。此第4輸送機24及第5輸送機25的一側之端部是位於移載對象地點3。並且，作業人員是對於第4輸送機24的 另一側的端部來進行第1種物品T1的裝卸，作業人員是對於第5輸送機25的另一側的端部來進行第2種物品T2或第3種物品T3的裝卸。 The fourth conveyor 24 and the fifth conveyor 25 are installed near the floor surface below the first conveyor 21 , the second conveyor 22 and the third conveyor 23 . One end of the fourth conveyor 24 and the fifth conveyor 25 is located at the transfer target point 3 . Moreover, the operator is working on the fourth conveyor 24 The first type of article T1 is loaded and unloaded at the other end of the fifth conveyor 25 , and the operator loads and unloads the second type of article T2 or the third type of article T3 with respect to the other end of the fifth conveyor 25 .

如圖14所示，具備有第1控制部H1及第2控制部H2，前述第1控制部H1是依據來自上位控制器H的指令而控制升降式搬送裝置1的動作，前述第2控制部H2是依據來自上位控制器H的指令而控制輸送機式搬送裝置2的動作。第1控制部H1是相當於控制第1移載裝置6、第2移載裝置7、及升降體8的動作之控制部。 As shown in FIG. 14 , it is provided with a first control part H1 and a second control part H2. The first control part H1 controls the operation of the lifting conveyor 1 according to the instruction from the upper controller H. The second control part H2 H2 controls the operation of the conveyor-type transfer device 2 based on the instruction from the upper-level controller H. The first control unit H1 is equivalent to a control unit that controls the operations of the first transfer device 6 , the second transfer device 7 , and the elevating body 8 .

第1移載裝置6具備第1存貨感測器S1、上升感測器S2、及下降感測器S3。第2移載裝置7具備第2存貨感測器S4、第3存貨感測器S5、第1定位置感測器S6、及第2定位置感測器S7。再者，第2存貨感測器S4是相當於用於檢測第1種物品T1的第1感測器，第3存貨感測器S5是相當於用於檢測第2種物品T2及第3種物品T3的第2感測器。 The first transfer device 6 includes a first stock sensor S1, an ascending sensor S2, and a descending sensor S3. The second transfer device 7 includes a second stock sensor S4, a third stock sensor S5, a first fixed position sensor S6, and a second fixed position sensor S7. Furthermore, the second inventory sensor S4 is equivalent to the first sensor for detecting the first type of item T1, and the third inventory sensor S5 is equivalent to the first sensor for detecting the second type of item T2 and the third type. The second sensor of item T3.

如圖3所示，第1存貨感測器S1是設置成朝向第1保持部11所載置的第1種物品T1所存在的區域投射檢測光。第1控制部H1是依據第1存貨感測器S1的檢測資訊，來判別第1保持部11是否保持有第1種物品T1。 As shown in FIG. 3 , the first inventory sensor S1 is installed to project the detection light toward the area where the first type of article T1 placed on the first holding part 11 is present. The first control part H1 determines whether the first holding part 11 holds the first type of article T1 based on the detection information of the first inventory sensor S1.

上升感測器S2是設置成：當升降體8位於對應於第1輸送機21的高度，且第1保持部11在上升位置且對應於第1輸送機21的旋繞位置之狀態下，朝向設置於第1輸送機21的第1被檢測體A1投射檢測光。第1控制部H1是依據上升感測器S2的檢測資訊，來判別第1保持部11是否相 對於移載對象地點3而位於適當的上升位置。再者，在第2輸送機22中也和第1輸送機21同樣地設置有第1被檢測體A1。 The rising sensor S2 is installed so as to face when the lifting body 8 is located at a height corresponding to the first conveyor 21 and the first holding part 11 is in a raised position corresponding to the revolving position of the first conveyor 21 The detection light is projected on the first object A1 of the first conveyor 21 . The first control part H1 determines whether the first holding part 11 is in phase based on the detection information of the rising sensor S2. It is located at an appropriate ascending position for the transfer target point 3. In addition, similarly to the first conveyor 21 , the second conveyor 22 is also provided with the first subject A1 .

下降感測器S3是設置成：當升降體8位於對應於第1輸送機21的高度，且第1保持部11在下降位置且對應於第1輸送機21的旋繞位置之狀態下，朝向設置於第1輸送機21的第1被檢測體A1投射檢測光。第1控制部H1是依據下降感測器S3的檢測資訊，來判別第1保持部11是否相對於移載對象地點3而位於適當的下降位置。 The descent sensor S3 is disposed so as to face when the lifting body 8 is at a height corresponding to the first conveyor 21 and the first holding part 11 is in a descending position corresponding to the revolving position of the first conveyor 21 The detection light is projected on the first object A1 of the first conveyor 21 . The first control part H1 determines whether the first holding part 11 is located at an appropriate descending position relative to the transfer target point 3 based on the detection information of the descending sensor S3.

如圖5~圖10所示，第2存貨感測器S4是設置於：存在有第2移載裝置7所保持的第1種物品T1的高度且不存在有第2移載裝置7所保持的第2種物品T2及第3種物品T3的高度。並且，第2存貨感測器S4是設置成朝向以下區域投射檢測光：存在有第2保持部16所保持的第1種物品T1的區域且不存在有第2保持部16所保持的第2種物品T2或第3種物品T3的區域。第1控制部H1是依據第2存貨感測器S4的檢測資訊，來判別第2保持部16是否保持有第1種物品T1。 As shown in FIGS. 5 to 10 , the second stock sensor S4 is installed at a height where the first type of article T1 held by the second transfer device 7 exists and is not held by the second transfer device 7 . The height of the second type of item T2 and the third type of item T3. Furthermore, the second stock sensor S4 is disposed to project detection light toward an area where the first type of article T1 held by the second holding part 16 is present and where the second type of article T1 held by the second holding part 16 is not present. Area for item T2 or item T3 for the third type. The first control part H1 determines whether the second holding part 16 holds the first type of article T1 based on the detection information of the second stock sensor S4.

第3存貨感測器S5是設置於：存在有第2移載裝置7所保持的第2種物品T2的高度且存在有第2移載裝置7所保持的第3種物品T3的高度。並且，第3存貨感測器S5是設置成朝向以下區域投射檢測光：存在有第2保持部16所保持的第2種物品T2的區域且存在有第2保持部16所保持的第3種物品T3的區域。又，在本實施形態中，此第3 存貨感測器S5是由距離感測器所構成，並且構成為測量到第2保持部16所保持的物品之距離。第1控制部H1是依據第3存貨感測器S5的檢測資訊，來判別第2保持部16是否保持有第2種物品T2，並且判別第2保持部16是否保持有第3種物品T3。 The third stock sensor S5 is installed at a height where the second type article T2 held by the second transfer device 7 exists and at a height where the third type article T3 held by the second transfer device 7 exists. Furthermore, the third stock sensor S5 is provided to project detection light toward an area where the second type of article T2 held by the second holding part 16 is present and where the third type of article T2 held by the second holding part 16 is present. Area of item T3. Furthermore, in this embodiment, the third The stock sensor S5 is composed of a distance sensor, and is configured to measure the distance to the article held by the second holding part 16 . The first control part H1 determines whether the second holding part 16 holds the second type of article T2 based on the detection information of the third stock sensor S5, and determines whether the second holding part 16 holds the third type of article T3.

第1定位置感測器S6是設置成：當升降體8位於對應於第2輸送機22的高度，且在對應於第2輸送機22的旋繞位置之狀態下，朝向設置於第2輸送機22的第2被檢測體A2投射檢測光。第1控制部H1是依據第1定位置感測器S6的檢測資訊，來判別第2保持部16是否相對於第2輸送機22而位於適當的位置。再者，對於第1輸送機21，也是和第2輸送機22同樣地設置有第2被檢測體A2。 The first fixed position sensor S6 is configured to face the second conveyor when the lifting body 8 is located at a height corresponding to the second conveyor 22 and in a state corresponding to the revolving position of the second conveyor 22 The second object A2 of 22 projects detection light. The first control part H1 determines whether the second holding part 16 is located at an appropriate position relative to the second conveyor 22 based on the detection information of the first fixed position sensor S6. In addition, similarly to the second conveyor 22, the first conveyor 21 is also provided with the second object A2.

第2定位置感測器S7是設置成：當升降體8位於對應於第3輸送機23的高度，且在對應於第3輸送機23的旋繞位置之狀態下，朝向設置於第3輸送機23的第3被檢測體A3投射檢測光。第1控制部H1是依據第2定位置感測器S7的檢測資訊，來判別第2保持部16是否相對於第3輸送機23而位於適當的位置。 The second fixed position sensor S7 is disposed so as to face the third conveyor when the lifting body 8 is located at a height corresponding to the third conveyor 23 and in a state corresponding to the revolving position of the third conveyor 23 The third object A3 of 23 projects detection light. The first control part H1 determines whether the second holding part 16 is located at an appropriate position relative to the third conveyor 23 based on the detection information of the second fixed position sensor S7.

如圖13所示，第3輸送機23具備判別裝置35，前述判別裝置35是判別搬送中的物品為第2種物品T2或第3種物品T3。判別裝置35是由第4存貨感測器S8、第5存貨感測器S9、及第2控制部H2所構成。第4存貨感測器S8是設置成朝向第2種用內側支撐部32所載置的第2種物品T2所存在的區域投射檢測光。又，第5存貨感測器S9是 設置成朝向第3種用內側支撐部33所載置的第3種物品T3所存在的區域投射檢測光。第2控制部H2是根據第4存貨感測器S8的檢測資訊及第5存貨感測器S9的檢測資訊，來判別第2種用內側支撐部32是否支撐有第2種物品T2，並且判別第3種用內側支撐部33是否支撐有第3種物品T3。 As shown in FIG. 13 , the third conveyor 23 is provided with a discriminating device 35 that determines whether the article being conveyed is the second type of article T2 or the third type of article T3. The identification device 35 is composed of the fourth stock sensor S8, the fifth stock sensor S9, and the second control unit H2. The fourth stock sensor S8 is installed to project the detection light toward the area where the second type article T2 placed on the second type inner support portion 32 is present. Also, the fifth stock sensor S9 is It is installed so that the detection light may be projected toward the area where the third type article T3 placed on the third type inner support part 33 is present. The second control unit H2 determines whether the second type inner support part 32 supports the second type item T2 based on the detection information of the fourth inventory sensor S8 and the detection information of the fifth inventory sensor S9, and determines whether Whether the third type article T3 is supported by the third type inner support portion 33 .

第1控制部H1是執行：升降控制，使升降體8升降至對應於移載對象地點3的位置；及移載控制，在與移載對象地點3之間移載物品。第1控制部H1是執行下述控制來作為移載控制：將第1種物品T1從第1輸送機21移載至第1移載裝置6的移載控制、將第1種物品T1從第2輸送機22移載至第2移載裝置7的移載控制、將第2種物品T2從第3輸送機23移載至第2移載裝置7的移載控制、將第3種物品T3從第3輸送機23移載至第2移載裝置7的移載控制、及將第1種物品T1從第2輸送機22移載至第1移載裝置6的移載控制。此外，第1控制部H1是執行下述控制來作為移載控制：將第1種物品T1從第1移載裝置6移載至第1輸送機21的移載控制、將第1種物品T1從第2移載裝置7移載至第2輸送機22的移載控制、將第2種物品T2從第2移載裝置7移載至第3輸送機23的移載控制、將第3種物品T3從第2移載裝置7移載至第3輸送機23的移載控制、及將第1種物品T1從第1移載裝置6移載至第2輸送機22的移載控制。 The first control unit H1 executes lifting control to raise and lower the lifting body 8 to a position corresponding to the transfer target point 3 and transfer control to transfer items to and from the transfer target point 3 . The first control unit H1 executes the following control as transfer control: transfer control of transferring the first type article T1 from the first conveyor 21 to the first transfer device 6 , transfer control of the first type article T1 from the first conveyor 21 2 transfer control of the conveyor 22 to the second transfer device 7, transfer control of the second type article T2 from the third conveyor 23 to the second transfer device 7, transfer control of the third type article T3 Transfer control from the third conveyor 23 to the second transfer device 7 and transfer control of the first type article T1 from the second conveyor 22 to the first transfer device 6 . In addition, the first control unit H1 executes the following control as transfer control: transfer control of transferring the first type article T1 from the first transfer device 6 to the first conveyor 21 , transfer control of the first type article T1 transfer control from the second transfer device 7 to the second conveyor 22, transfer control of the second type article T2 from the second transfer device 7 to the third conveyor 23, transfer control of the third type article T2 from the second transfer device 7 to the third conveyor 23, Transfer control of the article T3 from the second transfer device 7 to the third conveyor 23, and transfer control of the first type article T1 from the first transfer device 6 to the second conveyor 22.

亦即，例如，以第1輸送機21的第1種用內側支撐部28支撐第1種物品T1，且以第2移載裝置7支撐第2種物品T2的情況下，首先，第1控制部H1是執行升降控 制，前述升降控制是使升降體8升降成使第1移載裝置6移動至對應於第1輸送機21的位置。藉此，藉由像這樣執行升降控制，而讓第1移載裝置6移動至對應於第1輸送機21的位置，且讓第2移載裝置7移動至對應於第2輸送機22的位置。並且，第1控制部H1是同時地執行將第1種物品T1從第1輸送機21移載至第1移載裝置6的移載控制、及將第2種物品T2從第2移載裝置7移載至第3輸送機23的移載控制。 That is, for example, when the first type article T1 is supported by the first type inner support portion 28 of the first conveyor 21 and the second type article T2 is supported by the second transfer device 7, first, the first control Part H1 is to perform lifting control The aforementioned lifting control is to raise and lower the lifting body 8 so as to move the first transfer device 6 to a position corresponding to the first conveyor 21 . Thereby, by executing the lifting control in this way, the first transfer device 6 is moved to a position corresponding to the first conveyor 21, and the second transfer device 7 is moved to a position corresponding to the second conveyor 22. . Furthermore, the first control unit H1 simultaneously executes the transfer control of transferring the first type of article T1 from the first conveyor 21 to the first transfer device 6 and the transfer control of the second type of article T2 from the second transfer device. 7. Transfer control to the third conveyor 23.

又，例如，第2輸送機22的第1種用內側支撐部28支撐有第1種物品T1，第1輸送機21的第1種用內側支撐部28未支撐有第1種物品T1，且第1移載裝置6及第2移載裝置7之雙方未保持物品的情況下，僅移載第2輸送機22的第1種用內側支撐部28所支撐的第1種物品T1即可。在像這樣的情況下，第1移載裝置6與第2移載裝置7之任一個都可以移載第1種物品T1。亦即，可以執行下述移載控制之雙方：將第1種物品T1從第2輸送機22移載至第1移載裝置6的移載控制、及將第1種物品T1從第2輸送機22移載至第2移載裝置7的移載控制。在像這樣的情況下，第1控制部H1是執行升降控制，前述升降控制是使升降體8升降成使第1移載裝置6移動至對應於第2輸送機22的位置。之後，執行將第1種物品T1從第2輸送機22移載至第1移載裝置6的移載控制。像這樣，在可以執行將第1種物品T1從第2輸送機22移載至第1移載裝置6的移載控制、及將第1種物品T1從第2輸送機22移載至第2移載裝置7的移載控制之情 況下，第1控制部H1優先地執行將第1種物品T1從第2輸送機22移載至第1移載裝置6的移載控制。 Furthermore, for example, the first type article T1 is supported by the first type inner support portion 28 of the second conveyor 22, the first type article T1 is not supported by the first type inner support portion 28 of the first conveyor 21, and When both the first transfer device 6 and the second transfer device 7 do not hold articles, only the first type article T1 supported by the first type inner support part 28 of the second conveyor 22 may be transferred. In such a case, either the first transfer device 6 or the second transfer device 7 can transfer the first type article T1. That is, both of the following transfer controls can be executed: transfer control to transfer the first type article T1 from the second conveyor 22 to the first transfer device 6, and transfer control to transfer the first type article T1 from the second conveyor 22 to the first transfer device 6. Transfer control of the machine 22 to the second transfer device 7. In such a case, the first control unit H1 executes lifting control for raising and lowering the lifting body 8 so as to move the first transfer device 6 to a position corresponding to the second conveyor 22 . Thereafter, transfer control of transferring the first type article T1 from the second conveyor 22 to the first transfer device 6 is executed. In this way, the transfer control of transferring the first type article T1 from the second conveyor 22 to the first transfer device 6 and the transfer control of the first type article T1 from the second conveyor 22 to the second transfer device 6 can be executed. Transfer control of the transfer device 7 In this case, the first control unit H1 prioritizes the transfer control of transferring the first type article T1 from the second conveyor 22 to the first transfer device 6 .

再者，將第1種物品T1從第1輸送機21移載至第1移載裝置6的移載控制相當於第1控制，將第1種物品T1從第2輸送機22移載至第2移載裝置7的移載控制相當於第2控制，將第2種物品T2或第3種物品T3從第3輸送機23移載至第2移載裝置7的移載控制相當於第3控制，將第1種物品T1從第2輸送機22移載至第1移載裝置6的移載控制相當於第4控制。 In addition, the transfer control of transferring the first type article T1 from the first conveyor 21 to the first transfer device 6 is equivalent to the first control, and the transfer control of the first type article T1 from the second conveyor 22 to the first transfer device 6 is equivalent to the first control. 2 The transfer control of the transfer device 7 is equivalent to the second control, and the transfer control of transferring the second type of article T2 or the third type of article T3 from the third conveyor 23 to the second transfer device 7 is equivalent to the third The transfer control of transferring the first type article T1 from the second conveyor 22 to the first transfer device 6 corresponds to the fourth control.

2.其他的實施形態 2. Other implementation forms

接著，針對物品搬送設備的其他實施形態進行說明。 Next, other embodiments of the article transport equipment will be described.

(1)在上述實施形態中，雖然是將第1種物品T1設為FOUP及FOSB，將第2種物品T2設為EUV用容器，且將第3種物品T3設為倍縮光罩用容器，但是亦可適當地變更第1種物品T1、第2種物品T2及第3種物品T3。例如，亦可將第1種物品T1設為FOUP與FOSB當中的任一種，且亦可將第2種物品T2及第3種物品T3的至少一種設為倍縮光罩用容器及EUV用容器以外的容器。又，第1種物品T1、第2種物品T2及第3種物品T3並不限定於以半導體製造設備搬送的該等物品，亦可為例如貨櫃(container)或托板(pallet)等之容器，且亦可為各種製品本身。 (1) In the above embodiment, the first type of article T1 is set as FOUP and FOSB, the second type of article T2 is set as the container for EUV, and the third type of article T3 is set as the container for the zoom mask. , but the first type of item T1, the second type of item T2, and the third type of item T3 can also be changed appropriately. For example, the first type of article T1 may be either FOUP or FOSB, and at least one of the second type of article T2 and the third type of article T3 may be a container for a zoom mask and a container for EUV. other containers. In addition, the first type of article T1, the second type of article T2, and the third type of article T3 are not limited to those items transported by semiconductor manufacturing equipment, and may also be containers such as containers or pallets. , and can also be various products themselves.

(2)在上述實施形態中，是將第1種物品T1設為FOUP及FOSB，將第2種物品T2設為EUV容器，且將第3種物品T3設為倍縮光罩用容器，而以收容物的用途不同 之情況為例來說明。但是並不限定於此，亦可設成例如以第1種物品T1、第2種物品T2及第3種物品T3來收容尺寸不同的半導體晶圓等，而讓收容物的用途在第1種物品T1、第2種物品T2及第3種物品T3中為相同。 (2) In the above embodiment, the first type of article T1 is set as FOUP and FOSB, the second type of article T2 is set as the EUV container, and the third type of article T3 is set as the container for the multiplication mask, and Depends on the purpose of the container Take the situation as an example to illustrate. However, it is not limited to this. For example, the first type of article T1, the second type of article T2, and the third type of article T3 may be used to store semiconductor wafers of different sizes, so that the purpose of the stored items is the first type. Item T1, the second type of item T2, and the third type of item T3 are the same.

(3)在上述實施形態中，雖然第1控制部H1在可執行第2控制與第4控制之雙方的情況下，會優先地執行第4控制，但亦可優先地執行第2控制。 (3) In the above embodiment, when the first control unit H1 can execute both the second control and the fourth control, the fourth control is executed with priority, but the second control may be executed with priority.

(4)在上述實施形態中，雖然是以第1升降機構13為相對於第1進退機構12使第1保持部11沿著上下方向Z移動的構成之情況為例來說明，但是並不限定於此，第1升降機構13亦可為藉由相對於升降體8使第1進退機構12沿著上下方向Z移動，而使第1保持部11沿著上下方向Z移動的構成。又，同樣地，第2升降機構18亦可為藉由相對於升降體8使第2進退機構17沿著上下方向Z移動，而使第2保持部16沿著上下方向Z移動的構成。 (4) In the above embodiment, the case where the first lifting mechanism 13 is configured to move the first holding part 11 in the up-down direction Z relative to the first forward and backward mechanism 12 is explained as an example, but this is not limiting. Here, the first lifting mechanism 13 may be configured to move the first holding part 11 in the vertical direction Z by moving the first forward and backward mechanism 12 in the vertical direction Z relative to the lifting body 8 . Similarly, the second lifting mechanism 18 may be configured to move the second holding part 16 in the vertical direction Z by moving the second forward and backward mechanism 17 in the vertical direction Z relative to the lifting body 8 .

(5)在上述實施形態中，雖然是相對於第1移載裝置6而將第2移載裝置7設置於上方側，但是亦可相對於第1移載裝置6而將第2移載裝置7設置於下方側。 (5) In the above embodiment, the second transfer device 7 is disposed above the first transfer device 6 , but the second transfer device 7 may be disposed above the first transfer device 6 . 7 is installed on the lower side.

(6)在上述實施形態中，雖然是以第1移載裝置6是構成為進行進退動作與升降動作來作為移載動作，第2移載裝置7是構成為進行進退動作、升降動作及保持動作來作為移載動作，而使移載動作在第1移載裝置6與第2移載裝置7不同之情況為例來說明，但是並非限定於此，亦可將移載動作設成在第1移載裝置6與第2移載裝置7上 相同。例如，第1移載裝置6與第2移載裝置7之雙方亦可構成為進行進退動作與升降動作來作為移載動作。在此情況下，亦可設成例如以水平多關節機械手臂來構成第1進退機構12與第2進退機構17當中的一個，並且以滑動叉(slide fork)來構成另一個。在此情況下，亦可根據水平多關節機械手臂與滑動叉的移載動作之不同，而使第1移載裝置6為相較於第2移載裝置7可在較短時間內執行移載動作的構成。 (6) In the above embodiment, the first transfer device 6 is configured to perform the forward and backward motion and the lifting and lowering motion as the transfer operation, but the second transfer device 7 is configured to perform the forward and backward motion, the lifting and lowering motion, and the holding motion. The case where the transfer operation is performed as a transfer operation and the transfer operation is performed on the first transfer device 6 and the second transfer device 7 will be described as an example. However, the present invention is not limited to this and the transfer operation may also be performed on the first transfer device 6 and the second transfer device 7 . 1 transfer device 6 and 2nd transfer device 7 same. For example, both the first transfer device 6 and the second transfer device 7 may be configured to perform forward and backward movements and lifting movements as transfer operations. In this case, for example, one of the first forward and backward mechanism 12 and the second forward and backward mechanism 17 may be configured as a horizontal multi-joint robot arm, and the other may be configured as a slide fork. In this case, based on the difference in the transfer actions of the horizontal multi-joint robot arm and the sliding fork, the first transfer device 6 can perform the transfer in a shorter time than the second transfer device 7 The composition of the action.

(7)在上述實施形態中，雖然是設成第2移載裝置7為具備用於檢測第1種物品T1的第2存貨感測器S4、及用於檢測第2種物品T2及第3種物品T3的第3存貨感測器S5的構成，但是第2移載裝置7所具備的感測器的位置及數量亦可作適當變更。亦即，亦可設成在第1種物品T1、第2種物品T2及第3種物品T3所存在的高度具備感測器，而藉由1個感測器來檢測第1種物品T1、第2種物品T2及第3種物品T3之構成，亦可設成對於第1種物品T1、第2種物品T2及第3種物品T3的每一個個別地設置感測器，而藉由3個感測器來檢測第1種物品T1、第2種物品T2及第3種物品T3之構成。 (7) In the above embodiment, the second transfer device 7 is configured to include the second stock sensor S4 for detecting the first type of article T1, and the second stock sensor S4 for detecting the second type of article T2 and the third type. The structure of the third stock sensor S5 of the item T3 is the same, but the position and number of the sensors provided in the second transfer device 7 can also be appropriately changed. That is, it is also possible to provide sensors at the heights where the first type of article T1, the second type of article T2, and the third type of article T3 exist, and to detect the first type of article T1, T2, and T3 with one sensor. The structure of the second type of article T2 and the third type of article T3 can also be set such that a sensor is provided individually for each of the first type of article T1, the second type of article T2 and the third type of article T3. A sensor is used to detect the composition of the first type of item T1, the second type of item T2 and the third type of item T3.

(8)再者，上述之各實施形態所揭示的構成，只要沒有發生矛盾，也可與其他實施形態所揭示的構成組合來適用。關於其他的構成，在本說明書中所揭示的實施形態在全部之點上均只不過是例示。從而，在不脫離本揭示的主旨之範圍內，可進行適當的、各種的改變。 (8) Furthermore, the configuration disclosed in each of the above embodiments may be combined with the configuration disclosed in other embodiments as long as there is no contradiction. Regarding other structures, the embodiments disclosed in this specification are merely illustrations in all points. Therefore, appropriate and various changes can be made without departing from the gist of the present disclosure.

3.上述實施形態的概要 3. Summary of the above embodiments

以下，針對在上述所說明之物品搬送設備的概要進行說明。 Hereinafter, an outline of the article conveying equipment described above will be described.

一種物品搬送設備，具備第1搬送裝置與第2搬送裝置，並將外形尺寸彼此不同的第1種物品、第2種物品及第3種物品設為搬送對象，前述第1搬送裝置具備：第1移載裝置；第2移載裝置，設置在沿著上下方向的上下方向視角下與前述第1移載裝置重疊的位置；及升降體，支撐前述第1移載裝置及前述第2移載裝置並且沿著前述上下方向而移動，前述第1移載裝置是構成為在自身與前述第2搬送裝置之間僅可移載前述第1種物品、前述第2種物品及前述第3種物品當中的前述第1種物品，前述第2移載裝置是構成為在自身與前述第2搬送裝置之間可移載前述第1種物品、前述第2種物品及前述第3種物品，前述第1種物品的搬送量比前述第2種物品的搬送量與前述第3種物品的搬送量之合計更多，前述第2搬送裝置具備：第1輸送機及第2輸送機，沿著水平方向僅搬送前述第1種物品、前述第2種物品及前述第3種物品當中的前述第1種物品；及第3輸送機，沿著水平方向僅搬送前述第1種物品、前述第2種物品及前述第3種物品當中的前述第2種物品與前述第3種物品，將前述上 下方向中的相對於前述第1移載裝置而設置有前述第2移載裝置之側設為上下方向特定側，並相對於前述第1輸送機而在前述上下方向特定側設置前述第2輸送機與前述第3輸送機，前述第1輸送機與前述第2輸送機是以可同時地執行由前述第1移載裝置所進行之自身與前述第1輸送機之間的前述第1種物品的移載、以及由前述第2移載裝置所進行之自身與前述第2輸送機之間的前述第1種物品的移載的間隔來設置，前述第1輸送機與前述第3輸送機是以可同時地執行由前述第1移載裝置所進行之自身與前述第1輸送機之間的前述第1種物品的移載、以及由前述第2移載裝置所進行之自身與前述第3輸送機之間的前述第2種物品及前述第3種物品的移載的間隔來設置。 An article conveying equipment is provided with a first conveying device and a second conveying device, and sets first, second, and third kinds of articles with mutually different external dimensions as conveying objects, and the first conveying device is provided with: 1 transfer device; a second transfer device disposed at a position overlapping the first transfer device from an up-down direction perspective; and an elevating body supporting the first transfer device and the second transfer device The device moves along the up-and-down direction, and the first transfer device is configured to transfer only the first type of article, the above-mentioned second type of article, and the above-mentioned third type of article between itself and the aforementioned second transfer device. Among them, the aforementioned first type of article, the aforementioned second transfer device is configured to transfer the aforementioned first type of article, the aforementioned second type of article, and the aforementioned third kind of article between itself and the aforementioned second conveying device. The transportation amount of one type of article is greater than the total transportation amount of the aforementioned second type of article and the aforementioned third type of article. The aforementioned second conveying device includes: a first conveyor and a second conveyor, along the horizontal direction Conveys only the first type of article among the aforementioned first type of articles, the aforementioned second type of article and the aforementioned third type of article; and the third conveyor transports only the aforementioned first type of article and the aforementioned second type of article in the horizontal direction and the aforementioned second type of item and the aforementioned third type of item among the aforementioned third type of items, combine the aforementioned The side in the lower direction where the second transfer device is provided with respect to the first transfer device is defined as a specific side in the vertical direction, and the second conveyor is provided on the specific side in the vertical direction with respect to the first conveyor. machine and the above-mentioned third conveyor, the above-mentioned first conveyor and the above-mentioned second conveyor are capable of simultaneously executing the above-mentioned first type of article between itself and the above-mentioned first conveyor by the above-mentioned first transfer device. The transfer of the first type of articles by the second transfer device and the transfer of the first type of articles between itself and the second conveyor are provided, and the first conveyor and the third conveyor are It is possible to simultaneously execute the transfer of the first type of article between itself and the first conveyor by the first transfer device, and the transfer of the first type of article by the second transfer device between itself and the third conveyor. The interval between the conveyors for transferring the aforementioned second type of article and the aforementioned third type of article is provided.

根據此構成，即可以同時地執行由第1移載裝置所進行之自身與第1輸送機之間的第1種物品的移載、以及由第2移載裝置所進行之自身與第2輸送機之間的第1種物品的移載。又，可以同時地執行由第1移載裝置所進行之自身與第1輸送機之間的第1種物品的移載、以及由第2移載裝置所進行之自身與第3輸送機之間的第2種物品或第3種物品的移載。 According to this configuration, it is possible to simultaneously execute the transfer of the first type of article between itself and the first conveyor by the first transfer device, and the transfer of the first type of article by the second transfer device between itself and the second conveyor. Transfer of Type 1 items between machines. Furthermore, the transfer of the first type of article between itself and the first conveyor by the first transfer device, and the transfer of the first type of article by the second transfer device between itself and the third conveyor can be performed simultaneously. The transfer of type 2 items or type 3 items.

亦即，即使在第2移載裝置中保持第1種物品、第2種物品及第3種物品之任一種物品的情況下，仍然可以同時地執行由第1移載裝置所進行之移載與由第2移載裝置所進行之移載。並且，因為可以在未將搬送量比較少的第2種物品或第3種物品保持於第2移載裝置的情況下，將搬送 量比較多的第1種物品保持於此第2移載裝置，所以可以提高物品的搬送效率。又，因為可以只讓第2移載裝置與第3輸送機設成可以保持或搬送3個種類的物品之構成，而第1移載裝置是僅可保持第1種物品的構成，又，第1輸送機及第2輸送機是僅可搬送第1種物品的構成，所以可以將製造成本的上升抑制到較少。 That is, even if any of the first type of article, the second type of article, and the third type of article is held in the second transfer device, transfer by the first transfer device can still be performed simultaneously. and transfer by the second transfer device. Furthermore, this is because the second type of article or the third type of article with a relatively small amount of transportation can be transported without holding it in the second transfer device. A relatively large amount of the first type of articles is held in this second transfer device, so the efficiency of conveying articles can be improved. Furthermore, since only the second transfer device and the third conveyor can be configured to hold or transport three types of articles, the first transfer device can only hold the first type of articles, and the first transfer device can only hold or convey the first type of articles. The first conveyor and the second conveyor are configured to convey only the first type of article, so the increase in manufacturing cost can be suppressed to a small level.

從而，根據此構成，可以既將製造成本的上升抑制到較少並且提高物品的搬送效率。 Therefore, according to this configuration, it is possible to improve article transport efficiency while suppressing an increase in manufacturing costs to a small level.

在此，較理想的是，前述上下方向特定側為前述上下方向中的上側。 Here, it is preferable that the specific side in the vertical direction is an upper side in the vertical direction.

根據此構成，即可相對於第1移載裝置而將第2移載裝置設置於上側。從而，可相對於第1輸送機而將第2輸送機與第3輸送機設置於上側。 According to this structure, the second transfer device can be provided above the first transfer device. Therefore, the second conveyor and the third conveyor can be installed above the first conveyor.

又，較理想的是，前述第1種物品之前述上下方向的尺寸比前述第2種物品及前述第3種物品更大，前述第2移載裝置具備用於檢測前述第1種物品的第1感測器、及用於檢測前述第2種物品及前述第3種物品的第2感測器，前述第1感測器是設置於：存在有前述第2移載裝置所保持的前述第1種物品的高度且不存在有前述第2移載裝置所保持的前述第2種物品及前述第3種物品的高度，前述第2感測器是設置於：存在有前述第2移載裝置所保持的前述第2種物品的高度且存在有前述第2移載裝置所保持的第3種物品的高度。 Furthermore, preferably, the dimension of the first type article in the up-down direction is larger than that of the above-mentioned second type article and the above-mentioned third type article, and the above-mentioned second transfer device is provided with a third device for detecting the above-mentioned first type article. 1 sensor, and a second sensor for detecting the above-mentioned second type of article and the above-mentioned third type of article, the above-mentioned first sensor is installed where: there is the above-mentioned second type of article held by the above-mentioned second transfer device. The height of one type of article and the height of the above-mentioned second type of article and the above-mentioned third type of article held by the aforementioned second transfer device do not exist, and the aforementioned second sensor is installed where: the aforementioned second transfer device exists The height of the second type of article held is also the height of the third type of article held by the second transfer device.

根據此構成，在第2移載裝置保持有第1種物 品的情況下，是第1感測器及第2感測器檢測物品。另一方面，在第2移載裝置保持有第2種物品或第3種物品的情況下，是第2感測器檢測物品，而第1感測器不檢測物品。從而，根據此構成，可以適當地檢測第2移載裝置所保持的物品為第1種物品、或為第2種物品或第3種物品。 According to this configuration, the first object is held in the second transfer device In the case of goods, the first sensor and the second sensor detect the goods. On the other hand, when the second transfer device holds the second type of article or the third type of article, the second sensor detects the article and the first sensor does not detect the article. Therefore, according to this configuration, it is possible to appropriately detect whether the article held by the second transfer device is the first type of article, the second type of article, or the third type of article.

又，較理想的是，前述第1移載裝置具備：第1進退機構，使保持前述第1種物品的第1保持部移動至第1退回位置與第1突出位置，前述第1突出位置是相對於前述第1退回位置而突出至前述第2搬送裝置所存在之側的位置；及第1升降機構，使前述第1保持部相對於前述第1進退機構而在前述上下方向上移動，前述第2移載裝置具備：第2進退機構，使可保持前述第1種物品、前述第2種物品及前述第3種物品之任一種物品的第2保持部移動至第2退回位置與第2突出位置，前述第2突出位置是相對於前述第2退回位置而突出至前述第2搬送裝置所存在之側的位置；及第2升降機構，使前述第2保持部相對於前述第2進退機構而在前述上下方向上移動。 Furthermore, preferably, the first transfer device is provided with a first forward and backward mechanism that moves the first holding portion holding the first type of article to a first retracted position and a first protruding position, and the first protruding position is A position protruding from the first retracted position to the side where the second conveying device exists; and a first lifting mechanism that moves the first holding part in the up-down direction relative to the first forward and backward mechanism, the above-mentioned The second transfer device is provided with: a second forward and backward mechanism that moves the second holding part capable of holding any one of the aforementioned first type article, the aforementioned second type article, and the aforementioned third type article to the second retracted position and the second a protruding position, the second protruding position being a position protruding to the side where the second conveying device exists relative to the second retracted position; and a second lifting mechanism that positions the second holding portion relative to the second forward and backward mechanism And move in the aforementioned up and down direction.

根據此構成，因為第1升降機構是僅使第1進退機構與第1保持部當中的第1保持部升降，所以和使第1進退機構與第1保持部之雙方升降的情況相較之下，可以將藉由第1升降機構升降的對象之重量減輕，因此可以謀求第1升降機構的小型化或輕量化。同樣地，因為針對第2升降機構，也可以將藉由第2升降機構升降的對象之重量減輕，所以可以謀求第2升降機構的小型化或輕量化。 According to this configuration, since the first lifting mechanism raises and lowers only the first holding portion among the first forward and backward mechanism and the first holding portion, compared with the case of raising and lowering both the first forward and backward mechanism and the first holding portion, , the weight of the object raised and lowered by the first lifting mechanism can be reduced, so the first lifting mechanism can be made smaller or lighter. Similarly, with respect to the second lifting mechanism, the weight of the object raised and lowered by the second lifting mechanism can be reduced, so that the second lifting mechanism can be made smaller or lighter.

又，較理想的是，前述第3輸送機具備判別裝置，前述判別裝置是判別搬送中的物品為前述第2種物品或前述第3種物品。 Furthermore, preferably, the third conveyor is provided with a discriminating device that determines whether the article being conveyed is the second type of article or the third type of article.

根據此構成，可以在第3輸送機中適當地判別搬送中的物品為第2種物品或第3種物品。從而，變得可因應於在第3輸送機中搬送中的物品為第2種物品或第3種物品，而適當地進行之後的搬送。 According to this configuration, the third conveyor can appropriately determine whether the article being conveyed is the second type of article or the third type of article. Therefore, it becomes possible to perform subsequent transportation appropriately depending on whether the article being conveyed on the third conveyor is the second type of article or the third type of article.

又，較理想的是，前述第1移載裝置具備第1保持部，前述第1保持部是構成為從下方支撐前述第1種物品的底面來進行保持，前述第2移載裝置具備第2保持部，前述第2保持部是構成為可以保持前述第1種物品的上部所具備的第1被保持部、前述第2種物品的上部所具備的第2被保持部、及前述第3種物品的上部所具備的第3被保持部之任一個。 Furthermore, preferably, the first transfer device includes a first holding part configured to support the bottom surface of the first type article from below to hold it, and the second transfer device includes a second holding part. The holding part, the aforementioned second holding part is configured to hold the first held part provided in the upper part of the aforementioned first type article, the second held part provided in the upper part of the aforementioned second type article, and the aforementioned third type Any of the third held parts provided on the upper part of the article.

根據此構成，可以分別適當地構成第1移載裝置及第2移載裝置，其中前述第1移載裝置是僅移載第1種物品、第2種物品及第3種物品當中的第1種物品，前述第2移載裝置是移載第1種物品、第2種物品及第3種物品。又，根據此構成，可以將第1移載裝置的第1保持部相對於第1移載裝置所保持的第1種物品而配置在下方，並且將第2移載裝置的第2保持部相對於第2移載裝置所保持的第1種物品、第2種物品、或第3種物品而配置在上方。因此，如上述地將第2移載裝置配置在比第1移載裝置更上方的情況下，可以將第1保持部與第2保持部上下分離來配置， 並且在其等之間形成用於保持物品的空間。因此，可以將第1移載裝置所保持的物品與第2移載裝置所保持的物品之上下方向的間隔形成得較狹窄。從而，可以將第1移載裝置的移載對象地點與第2移載裝置的移載對象地點之上下方向的間隔也形成得較狹窄，而易於謀求移載對象地點的省空間化。 According to this configuration, the first transfer device and the second transfer device can be configured appropriately respectively, wherein the first transfer device transfers only the first type of article, the second type of article, and the third type of article. Types of items, the aforementioned second transfer device transfers the first type of items, the second type of items, and the third type of items. Furthermore, according to this structure, the first holding part of the first transfer device can be arranged below the first type of article held by the first transfer device, and the second holding part of the second transfer device can be arranged opposite to the first kind of article held by the first transfer device. The first type of article, the second type of article, or the third type of article held in the second transfer device is arranged above. Therefore, when the second transfer device is arranged above the first transfer device as described above, the first holding part and the second holding part may be arranged vertically separated, And a space for holding items is formed between them. Therefore, the distance in the vertical direction between the article held by the first transfer device and the article held by the second transfer device can be formed narrow. Therefore, the distance in the vertical direction between the transfer target point of the first transfer device and the transfer target point of the second transfer device can be narrowed, making it easy to save space at the transfer target point.

又，較理想的是，前述第2輸送機是設置成該第2輸送機所搬送的前述第1種物品的前述第1被保持部的高度和前述第3輸送機所搬送的前述第2種物品的前述第2被保持部的高度成為相同。 Furthermore, preferably, the second conveyor is provided such that the height of the first held portion of the first type article conveyed by the second conveyor is equal to the height of the second type article conveyed by the third conveyor. The heights of the second held portions of the article are the same.

根據此構成，第2移載裝置即能夠以相同的動作來移載第1種物品T1與第2種物品T2。因此，易於讓第2移載裝置的構成簡單化，並且也易於謀求第2移載裝置的控制構成之簡單化。 According to this configuration, the second transfer device can transfer the first type of article T1 and the second type of article T2 in the same operation. Therefore, it is easy to simplify the structure of the second transfer device, and it is also easy to simplify the control structure of the second transfer device.

又，較理想的是，前述第1種物品是收納半導體晶圓的晶圓用容器，前述第2種物品是收納EUV遮罩的EUV用容器，前述第3種物品是收納倍縮光罩的倍縮光罩用容器。 Furthermore, preferably, the first item is a wafer container for storing semiconductor wafers, the second item is an EUV container for storing EUV masks, and the third item is for storing a reduction mask. Container for reticle.

根據此構成，可以在半導體製造設備中，既抑制搬送效率的降低並且適當地搬送一般而言搬送量比較多的晶圓用容器、以及搬送量比較少的EUV用容器及倍縮光罩用容器。 According to this configuration, in semiconductor manufacturing equipment, it is possible to appropriately transport wafer containers, which generally have a relatively large transport volume, and EUV containers and shrink mask containers, which have a relatively small transport volume, while suppressing a decrease in transport efficiency. .

又，較理想的是更具備控制部，前述控制部控制前述第1移載裝置、前述第2移載裝置及前述升降體的 動作，前述第1移載裝置是相較於前述第2移載裝置可在較短時間內執行前述第1種物品在自身與前述第2搬送裝置之間的移載動作之構成，前述控制部執行下述控制：將前述第1種物品從前述第1輸送機移載至前述第1移載裝置的第1控制；將前述第1種物品從前述第2輸送機移載至前述第2移載裝置的第2控制；將前述第2種物品或前述第3種物品從前述第3輸送機移載至前述第2移載裝置的第3控制；及將前述第1種物品從前述第2輸送機移載至前述第1移載裝置的第4控制，並且在可執行前述第2控制與前述第4控制之雙方的情況下，優先地執行前述第4控制。 Furthermore, it is preferable that the control unit further includes a control unit that controls the first transfer device, the second transfer device, and the lifting body. In operation, the first transfer device is configured to perform the transfer operation of the first type of article between itself and the second transfer device in a shorter time than the second transfer device, and the control unit Execute the following control: the first control of transferring the aforementioned first type of article from the aforementioned first conveyor to the aforementioned first transfer device; and the first control of transferring the aforementioned first type of article from the aforementioned second conveyor to the aforementioned second transfer device. the second control of the carrying device; the third control of transferring the aforementioned second type of article or the aforementioned third type of article from the aforementioned third conveyor to the aforementioned second transfer device; and the third control of transferring the aforementioned first type of article from the aforementioned second conveyor The conveyor is transferred to the fourth control of the first transfer device, and when both the second control and the fourth control can be executed, the fourth control is executed with priority.

根據此構成，在可執行第2控制與第4控制之雙方的情況下，是形成為優先地執行第4控制。並且，第1移載裝置是相較於第2移載裝置可在短時間內執行移載動作。因此，根據此構成，可以更有效率地進行搬送量比較多的第1種物品的搬送。 According to this configuration, when both the second control and the fourth control can be executed, the fourth control is executed with priority. Furthermore, the first transfer device can perform the transfer operation in a shorter time than the second transfer device. Therefore, according to this configuration, the first type of article with a relatively large amount of transportation can be transported more efficiently.

產業上之可利用性 industrial availability

本揭示之技術可以利用於具備第1搬送裝置與第2搬送裝置的物品搬送設備。 The technology of the present disclosure can be used in article conveying equipment including a first conveying device and a second conveying device.

1‧‧‧升降式搬送裝置(第1搬送裝置) 1‧‧‧Elevating conveying device (1st conveying device)

2‧‧‧輸送機式搬送裝置(第2搬送裝置) 2‧‧‧Conveyor type transfer device (2nd transfer device)

3‧‧‧移載對象地點 3‧‧‧Transfer target location

4‧‧‧物品搬送車 4‧‧‧Item transfer vehicle

6‧‧‧第1移載裝置 6‧‧‧The first transfer device

7‧‧‧第2移載裝置 7‧‧‧The second transfer device

21‧‧‧第1輸送機 21‧‧‧No.1 Conveyor

22‧‧‧第2輸送機 22‧‧‧2nd Conveyor

23‧‧‧第3輸送機 23‧‧‧3rd Conveyor

24‧‧‧第4輸送機 24‧‧‧4th Conveyor

25‧‧‧第5輸送機 25‧‧‧No. 5 Conveyor

D‧‧‧下階 D‧‧‧lower level

K1‧‧‧第1類物品 K1‧‧‧Class 1 items

K2‧‧‧第2類物品 K2‧‧‧Class 2 items

T1‧‧‧第1種物品 T1‧‧‧Item 1

T2‧‧‧第2種物品 T2‧‧‧The second item

T3‧‧‧第3種物品 T3‧‧‧The third item

U‧‧‧上階 U‧‧‧Upper Level

Z‧‧‧上下方向 Z‧‧‧up and down direction

Claims (9)

一種物品搬送設備，具備第1搬送裝置與第2搬送裝置，並將外形尺寸彼此不同的第1種物品、第2種物品及第3種物品設為搬送對象：前述物品搬送設備具有以下之特徵：前述第1搬送裝置具備：第1移載裝置；第2移載裝置，設置在沿著上下方向的上下方向視角下與前述第1移載裝置重疊的位置；及升降體，支撐前述第1移載裝置及前述第2移載裝置並且沿著前述上下方向而移動，前述第1移載裝置是構成為在自身與前述第2搬送裝置之間僅可移載前述第1種物品、前述第2種物品及前述第3種物品當中的前述第1種物品，前述第2移載裝置是構成為在自身與前述第2搬送裝置之間可移載前述第1種物品、前述第2種物品及前述第3種物品，前述第1種物品的搬送量比前述第2種物品的搬送量與前述第3種物品的搬送量之合計更多，前述第2搬送裝置具備：第1輸送機及第2輸送機，沿著水平方向僅搬送前述第1種物品、前述第2種物品及前述第3種物品當中的前述第1種物品；及第3輸送機，沿著水平方向僅搬送前述第1種物 品、前述第2種物品及前述第3種物品當中的前述第2種物品與前述第3種物品，將前述上下方向中的相對於前述第1移載裝置而設置有前述第2移載裝置之側設為上下方向特定側，並相對於前述第1輸送機而在前述上下方向特定側設置前述第2輸送機與前述第3輸送機，前述第1輸送機與前述第2輸送機是以可同時地執行由前述第1移載裝置所進行之自身與前述第1輸送機之間的前述第1種物品的移載、以及由前述第2移載裝置所進行之自身與前述第2輸送機之間的前述第1種物品的移載的間隔來設置，前述第1輸送機與前述第3輸送機是以可同時地執行由前述第1移載裝置所進行之自身與前述第1輸送機之間的前述第1種物品的移載、以及由前述第2移載裝置所進行之自身與前述第3輸送機之間的前述第2種物品及前述第3種物品的移載的間隔來設置。 An article conveying equipment is provided with a first conveying device and a second conveying device, and sets the first type of article, the second type of article and the third type of article with mutually different external dimensions as conveying objects: the aforementioned article conveying equipment has the following characteristics : The first transfer device includes: a first transfer device; a second transfer device installed at a position overlapping the first transfer device from an up-down direction perspective; and an elevating body that supports the first transfer device. The transfer device and the second transfer device move in the up-down direction, and the first transfer device is configured to transfer only the first type of article, the above-mentioned second transfer device between itself and the second transfer device. Among the two types of articles and the above-mentioned third type of article, the above-mentioned second transfer device is configured to transfer the aforementioned first-type article and the aforementioned second-type article between itself and the aforementioned second transfer device. and the aforementioned third type of article, the conveyance volume of the aforementioned first type article is greater than the total conveyance volume of the aforementioned second type article and the aforementioned third type article, and the aforementioned second conveyance device includes: a first conveyor and The second conveyor conveys only the first type of article, the second type of article and the third type of article in the horizontal direction; and the third conveyor conveys only the first type of article in the horizontal direction. 1 kind of thing The second type of article and the aforementioned third type of article among the aforementioned second type of article and the aforementioned third type of article are provided with the aforementioned second transfer device relative to the aforementioned first transfer device in the up and down direction. The side is set as the vertical specific side, and the second conveyor and the third conveyor are provided on the specific vertical side relative to the first conveyor, and the first conveyor and the second conveyor are The transfer of the first type of article between itself and the first conveyor by the first transfer device, and the transfer of the first type of article by the second transfer device between itself and the second conveyor can be performed simultaneously The first conveyor and the third conveyor are arranged at intervals for transferring the first type of articles between the machines, and the first conveyor and the third conveyor are capable of simultaneously executing themselves and the first conveyance by the first transfer device. The distance between the transfer of the first type of articles between machines, and the transfer of the aforementioned second type of articles and the aforementioned third type of articles between the second transfer device and the aforementioned third conveyor to set. 如請求項1之物品搬送設備，其中前述上下方向特定側是前述上下方向中的上側。 The article conveying equipment of claim 1, wherein the up-down direction specific side is an upper side in the up-down direction. 如請求項1或2之物品搬送設備，其中與前述第2種物品及前述第3種物品相比，前述第1種物品在前述上下方向的尺寸更大，前述第2移載裝置具備用於檢測前述第1種物品的第1感測器、及用於檢測前述第2種物品及前述第3種物品的第2感測器， 前述第1感測器是設置於：存在有前述第2移載裝置所保持的前述第1種物品的高度且不存在有前述第2移載裝置所保持的前述第2種物品及前述第3種物品的高度，前述第2感測器是設置於：存在有前述第2移載裝置所保持的前述第2種物品的高度且存在有前述第2移載裝置所保持的前述第3種物品的高度。 For example, in claim 1 or 2, the article transporting equipment is provided, wherein the size of the aforementioned first type article in the aforementioned up-down direction is larger than the aforementioned second type article and the aforementioned third type article, and the aforementioned second transfer device is provided with a a first sensor for detecting the aforementioned first type of article, and a second sensor for detecting the aforementioned second type of article and the aforementioned third type of article, The first sensor is installed at a height where the first type of article held by the second transfer device exists and the second type of article and the third type of article held by the second transfer device do not exist. The height of the second type of article, and the second sensor is installed at the height of the second type of article held by the second transfer device and the height of the third type of article held by the second transfer device. the height of. 如請求項1或2之物品搬送設備，其中前述第1移載裝置具備：第1進退機構，使保持前述第1種物品的第1保持部移動至第1退回位置與第1突出位置，前述第1突出位置是相對於前述第1退回位置而突出至前述第2搬送裝置所存在之側的位置；及第1升降機構，使前述第1保持部相對於前述第1進退機構而在前述上下方向上移動，前述第2移載裝置具備：第2進退機構，使可以保持前述第1種物品、前述第2種物品及前述第3種物品之任一種物品的第2保持部移動至第2退回位置與第2突出位置，前述第2突出位置是相對於前述第2退回位置而突出至前述第2搬送裝置所存在之側的位置；及第2升降機構，使前述第2保持部相對於前述第2進退機構而在前述上下方向上移動。 The article transport equipment of claim 1 or 2, wherein the first transfer device is provided with: a first forward and backward mechanism to move the first holding part holding the first type of article to the first retracted position and the first protruding position, the aforementioned The first protruding position is a position protruding to the side where the second conveying device exists relative to the first retracted position; and a first lifting mechanism causes the first holding portion to move up and down relative to the first forward and backward mechanism. direction, the second transfer device is provided with: a second forward and backward mechanism to move the second holding portion that can hold any one of the aforementioned first type of article, the aforementioned second type of article, and the aforementioned third type of article to the second The retracted position and the second protruding position, the second protruding position is a position protruding to the side where the second conveying device exists relative to the second retracted position; and a second lifting mechanism to make the second holding part relative to the second protruding position. The second forward and backward mechanism moves in the up and down direction. 如請求項1或2之物品搬送設備，其中前述第3輸送機具備有判別裝置，前述判別裝置是判別搬送中 的物品為前述第2種物品或前述第3種物品。 For example, the article conveying equipment of claim 1 or 2, wherein the aforementioned third conveyor is equipped with a discriminating device, and the aforementioned discriminating device is discriminating when conveying. The items are the aforementioned 2nd type of items or the aforementioned 3rd type of items. 如請求項1或2之物品搬送設備，其中前述第1移載裝置具備第1保持部，前述第1保持部是構成為以從下方支撐前述第1種物品的底面的方式來進行保持，前述第2移載裝置具備有第2保持部，前述第2保持部是構成為可以保持前述第1種物品的上部所具備的第1被保持部、前述第2種物品的上部所具備的第2被保持部、及前述第3種物品的上部所具備的第3被保持部之任一個。 The article transport equipment of claim 1 or 2, wherein the first transfer device is provided with a first holding part, and the first holding part is configured to hold the bottom surface of the first type article by supporting it from below, and the above-mentioned The second transfer device is provided with a second holding part configured to hold a first held part provided on the upper part of the first type article and a second held part provided on the upper part of the second type article. Any one of the held part and the third held part provided on the upper part of the aforementioned third type of article. 如請求項1或2之物品搬送設備，其中前述第2輸送機是設置成該第2輸送機所搬送的前述第1種物品的第1被保持部的高度，和前述第3輸送機所搬送的前述第2種物品的第2被保持部的高度成為相同。 The article conveying equipment of claim 1 or 2, wherein the second conveyor is installed at a height of a first held portion of the first type article conveyed by the second conveyor, and a height of the first held portion conveyed by the third conveyor. The heights of the second held portions of the aforementioned second type articles are the same. 如請求項1或2之物品搬送設備，其中前述第1種物品是收納半導體晶圓的晶圓用容器，前述第2種物品是收納EUV遮罩的EUV用容器，前述第3種物品是收納倍縮光罩的倍縮光罩用容器。 The article transporting equipment of claim 1 or 2, wherein the first article is a wafer container for storing semiconductor wafers, the second article is an EUV container for storing EUV masks, and the third article is a storage container. Container for the reticle of the reticle. 如請求項1或2之物品搬送設備，其更具備控制部，前述控制部控制前述第1移載裝置、前述第2移載裝置、及前述升降體的動作，前述第1移載裝置是相較於前述第2移載裝置可在較短時間內執行前述第1種物品在自身與前述第2搬送裝置之間的移載動作之構成，前述控制部執行下述控制：將前述第1種物品從前述第1輸送機移載至前述第1移 載裝置的第1控制；將前述第1種物品從前述第2輸送機移載至前述第2移載裝置的第2控制；將前述第2種物品或前述第3種物品從前述第3輸送機移載至前述第2移載裝置的第3控制；及將前述第1種物品從前述第2輸送機移載至前述第1移載裝置的第4控制，並且在可執行前述第2控制與前述第4控制之雙方的情況下，優先地執行前述第4控制。 The article transport equipment of claim 1 or 2 further includes a control unit, the control unit controls the movements of the first transfer device, the second transfer device, and the lifting body, and the first transfer device is a corresponding Compared with the structure in which the second transfer device can perform the transfer operation of the first type of article between itself and the second transfer device in a shorter time, the aforementioned control unit performs the following control: transfer the first type of article to the second transfer device. The items are transferred from the aforementioned first conveyor to the aforementioned first conveyor The first control of the carrying device; the second control of transferring the aforementioned first type of article from the aforementioned second conveyor to the aforementioned second transfer device; the aforementioned conveying of the aforementioned second type of article or the aforementioned third type of article from the aforementioned third conveyor The third control of transferring the aforementioned first type of items from the aforementioned second conveyor to the aforementioned second transfer device; and the fourth control of transferring the aforementioned first type of items from the aforementioned second conveyor to the aforementioned first transfer device, and the aforementioned second control can be executed In the case of both of the above-mentioned fourth control, the above-mentioned fourth control is executed with priority.
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