CN110406871B - Article carrying apparatus - Google Patents

Article carrying apparatus Download PDF

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Publication number
CN110406871B
CN110406871B CN201910344514.1A CN201910344514A CN110406871B CN 110406871 B CN110406871 B CN 110406871B CN 201910344514 A CN201910344514 A CN 201910344514A CN 110406871 B CN110406871 B CN 110406871B
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China
Prior art keywords
article
transfer device
conveyor
transfer
type
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CN201910344514.1A
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CN110406871A (en
Inventor
坂本纯一
吉冈秀郎
森下良治
高原史雄
花木高介
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Daifuku Co Ltd
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Daifuku Co Ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67712—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrate being handled substantially vertically
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67751—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber vertical transfer of a single workpiece
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67757—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber vertical transfer of a batch of workpieces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers

Abstract

The first conveying device is provided with a1 st conveying device and a2 nd conveying device, the 1 st conveying device is provided with a1 st transferring device, a2 nd transferring device and a lifting body, the conveying amount of the 1 st article is more than the total of the conveying amount of the 2 nd article and the conveying amount of the 3 rd article, the 2 nd conveying device is provided with a1 st conveyor and a2 nd conveyor for conveying only the 1 st article and a3 rd conveyor for conveying only the 2 nd article and the 3 rd article, the 1 st conveyor and the 2 nd conveyor are arranged at intervals of simultaneously carrying out the transferring of the 1 st article by the 1 st transferring device and the transferring of the 1 st article by the 2 nd transferring device, and the 1 st conveyor and the 3 rd conveyor are arranged at intervals of simultaneously carrying out the transferring of the 1 st article by the 1 st transferring device and the transferring of the 2 nd article and the 3 rd article by the 2 nd transferring device.

Description

Article carrying apparatus
Technical Field
The present invention relates to an article transport facility including a1 st transport device and a2 nd transport device.
Background
The background art will be explained below. In the following description, the parenthetical reference numerals or names are those in the prior art documents. A conventional example of the article transport facility is described in japanese patent application laid-open No. 2018-039660 (patent document 1). The article transport facility of patent document 1 includes a1 st transport device (a 2 nd transport device 3) and a2 nd transport device (a 1 st transport device 2). The 1 st transport device (the 2 nd transport device 3) includes a1 st transfer device (a lower transfer unit 34a), a2 nd transfer device (an upper transfer unit 34b), and an elevating body (a 2 nd elevating body 32) for supporting the 1 st transfer device and the 2 nd transfer device. The 1 st transfer device and the 2 nd transfer device are configured similarly, and are configured to support an article from below. The 2 nd conveying device (the 1 st conveying device 2) is a conveyor for conveying an article in a horizontal direction.
The article transport facility of patent document 1 is configured to transport two articles together by transporting the articles by the 1 st transfer device and the 2 nd transfer device, thereby improving the efficiency of transporting the articles.
However, although the 1 st and 2 nd conveying devices of patent document 1 have one type of article as a conveying target, there are cases where different types of articles need to be conveyed together.
For example, in the 1 st and 2 nd transport devices of patent document 1, only a front opening FOUP (FOUP) is an object to be transported, but there is a case where it is necessary to transport a reticle container accommodating a reticle or an EUV container accommodating an EUV mask, which is different from the front opening FOUP. When the foup, the reticle container, and the EUV container are transported in this manner, the total transport amount of the reticle container and the EUV container is generally smaller than the transport amount of the foup. As in this example, even when different types of articles are conveyed, the conveyance amount for each article type may vary.
Further, as described above, when a plurality of types of articles are to be conveyed, the first transfer device 1 and the second transfer device 2 are both configured to be able to hold the plurality of types of articles, and the second conveying device 2 is configured to include a plurality of conveyors and each of the plurality of conveyors is configured to be able to convey the plurality of types of articles, thereby improving the efficiency of conveying the articles. However, if the entire 1 st and 2 nd conveying devices are configured to be able to hold a plurality of types of articles as described above, there is a problem in that the manufacturing cost of the article conveying facility is significantly increased.
Disclosure of Invention
Therefore, it is desirable to realize an article transport facility capable of improving the efficiency of transporting articles while suppressing an increase in manufacturing cost to a small extent.
In view of the above, the article transport facility includes a1 st transport device and a2 nd transport device, and the 1 st article, the 2 nd article, and the 3 rd article having different outer dimensions are transported, wherein the 1 st transport device includes a1 st transfer device, a2 nd transfer device, and an elevating body, the 2 nd transfer device is provided at a position overlapping with the 1 st transfer device when viewed in a vertical direction along a vertical direction, the elevating body supports the 1 st transfer device and the 2 nd transfer device and moves in the vertical direction, the 1 st transfer device is configured to be able to transfer only the 1 st article among the 1 st article, the 2 nd article, and the 3 rd article between itself and the 2 nd transport device, and the 2 nd transfer device is configured to be able to transfer the 1 st article, the 2 nd article, and the 3 rd article, The 2 nd article and the 3 rd article are transferred between themselves and the 2 nd conveying device, the conveying amount of the 1 st article is larger than the total of the conveying amount of the 2 nd article and the conveying amount of the 3 rd article, the 2 nd conveying device is provided with a1 st conveyor and a2 nd conveyor for conveying only the 1 st article among the 1 st article, the 2 nd article and the 3 rd article in the horizontal direction, a3 rd conveyor for conveying only the 2 nd article and the 3 rd article among the 1 st article, the 2 nd article and the 3 rd article in the horizontal direction, the side of the vertical direction where the 2 nd transferring device is provided with respect to the 1 st transferring device is set as a vertical direction specific side, the 2 nd conveyor and the 3 rd conveyor are provided on the vertical direction specific side with respect to the 1 st conveyor, the 1 st conveyor and the 2 nd conveyor are provided at an interval at which transfer of the 1 st article between the 1 st transfer device and the 1 st conveyor and transfer of the 1 st article between the 2 nd transfer device and the 2 nd conveyor can be simultaneously performed, and the 1 st conveyor and the 3 rd conveyor are provided at an interval at which transfer of the 1 st article between the 1 st transfer device and the 1 st conveyor and transfer of the 2 nd article and the 3 rd article between the 2 nd transfer device and the 3 rd conveyor can be simultaneously performed.
According to this aspect, the transfer of the 1 st article between the 1 st transfer device and the 1 st conveyor and the transfer of the 1 st article between the 2 nd transfer device and the 2 nd conveyor can be performed simultaneously. Further, the transfer of the 1 st article between the 1 st transfer device itself and the 1 st conveyor, and the transfer of the 2 nd article or the 3 rd article between the 2 nd transfer device itself and the 3 rd conveyor can be performed simultaneously.
That is, even when the 2 nd transfer device holds any one of the 1 st article, the 2 nd article, and the 3 rd article, the transfer by the 1 st transfer device and the transfer by the 2 nd transfer device can be simultaneously performed. Further, when the 2 nd and 3 rd articles having a relatively small conveying amount are not held by the 2 nd transfer device, the 1 st article having a relatively large conveying amount can be held by the 2 nd transfer device, so that the conveying efficiency of the articles can be improved. Further, the 1 st transfer device may be configured to hold only the 1 st article, the 1 st conveyor and the 2 nd conveyor may be configured to convey only the 1 st article, and the 2 nd transfer device and the 3 rd conveyor may be configured to hold or convey only the 3 rd article, so that an increase in manufacturing cost can be suppressed to a small extent.
Therefore, according to this aspect, the efficiency of transporting articles can be improved while suppressing an increase in manufacturing cost to a small extent.
Drawings
Fig. 1 is a front view of an article handling apparatus.
Fig. 2 is a side view of the article handling device.
Fig. 3 is a side view of the 1 st transfer device with the 1 st holding part at the lowered position and at the 1 st retracted position.
Fig. 4 is a side view of the 1 st transfer device with the 1 st holding part at the lowered position and the 1 st projecting position.
Fig. 5 is a side view of the 2 nd transfer device in which the 2 nd holding portion is at the raised position and at the 2 nd retracted position.
Fig. 6 is a side view of the 2 nd transfer device in which the 2 nd holding portion is at the raised position and at the 2 nd retracted position.
Fig. 7 is a side view of the 2 nd transfer device in which the 2 nd holding portion is at the raised position and at the 2 nd retracted position.
Fig. 8 is a side view of the 2 nd transfer device in which the 2 nd holding part is at the 1 st type lowering position and at the 2 nd projecting position.
Fig. 9 is a side view of the 2 nd transfer device in which the 2 nd holding portion is at the 2 nd type lowering position and at the 2 nd projecting position.
Fig. 10 is a side view of the 2 nd transfer device in which the 2 nd holding part is at the 3 rd type lowering position and at the 2 nd projecting position.
Fig. 11 is a top view of the 1 st conveyor.
Fig. 12 is a plan view of the 2 nd conveyor and the 3 rd conveyor.
Fig. 13 is a front longitudinal sectional view of the 2 nd and 3 rd conveyors.
Fig. 14 is a control block diagram.
Fig. 15 is an explanatory view of the transfer operation.
Detailed Description
1. Detailed description of the preferred embodiments
An embodiment of an article transport facility including an article transport device will be described with reference to the drawings.
As shown in fig. 1, the article transport facility includes an elevating type transport device 1 (corresponding to an article transport device) and a conveyor type transport device 2. The elevating type conveying device 1 conveys an article between a lower deck D and an upper deck U which is an upper deck than the lower deck D. The conveyor type conveying device 2 is provided on the lower layer D and the upper layer U, and conveys an article in a horizontal direction.
The objects to be conveyed by the elevating conveyor 1 and the conveyer conveyor 2 are the 1 st article K1 and the 2 nd article K2 of a different kind from the 1 st article K1. Type 1 item K1 is type 1 item T1. Type 2 item K2 includes type 2 item T2 and type 3 item T3. The 1 st article T1 is different from the 2 nd article T2 and the 3 rd article T3 in both outer dimensions. The 2 nd article T2 and the 3 rd article T3 have different outer dimensions from each other. That is, the elevating conveyor 1 and the conveyer conveyor 2 are to be conveyed with the 1 st article T1, the 2 nd article T2, and the 3 rd article T3 having different outer dimensions.
The conveying amount of the 1 st article K1 is larger than the conveying amount of the 2 nd article K2. That is, the conveying amount of article T1 of type 1 is larger than the sum of the conveying amount of article T2 of type 2 and the conveying amount of article T3 of type 3. In the present embodiment, 2 nd type item T2 and 3 rd type item T3, which are less transported than 1 st type item T1, are classified as type 2 item K2, and 1 st type item T1, which is more transported, is classified as type 1 item K1.
As shown in fig. 3 to 5, the 1 st article T1 includes a1 st held portion F1 at the upper portion. As shown in fig. 6 and 7, the 2 nd article T2 includes a2 nd held portion F2 at the upper portion. As shown in fig. 9 and 10, the 3 rd article T3 includes a3 rd held portion F3 at the upper portion. Further, the 1 st held portion F1 corresponds to the 1 st held portion R1 provided on the upper portion of the 1 st article K1, and the 2 nd held portion F2 and the 3 rd held portion F3 correspond to the 2 nd held portion R2 provided on the upper portion of the 2 nd article K2.
As shown in fig. 5 to 7, article T2 of type 2 has a larger dimension in the vertical direction Z than article T3 of type 3, and article T1 of type 1 has a larger dimension in the vertical direction Z than articles T2 and T3 of type 2 and 3. Therefore, the height of the lower end of the type 2 article T2 when the type 2 article T2 is held by the 2 nd holding unit 16 of the 2 nd transfer device 7 at the 2 nd held unit F2 is lower than the height of the lower end of the type 3 article T3 when the type 3 article T3 is held by the 2 nd holding unit 16 of the 2 nd transfer device 7 at the 3 rd held unit F3. Further, the height of the lower end of article T1 of type 1 in the case where 1 st held portion F1 of article T1 of type 1 is held by 2 nd holding unit 16 of 2 nd transfer device 7 is lower than the height of the lower end of article T2 of type 2 in the case where 2 nd held portion F2 of article T2 of type 2 is held by 2 nd holding unit 16 of 2 nd transfer device 7 and the height of the lower end of article T3 of type 3 in the case where 3 rd held portion F3 of article T3 of type 3 is held by 2 nd holding unit 16 of 2 nd transfer device 7.
In this embodiment, the 1 st article T1 is a wafer container for accommodating semiconductor wafers, the 2 nd article T2 is an EUV container for accommodating EUV masks, and the 3 rd article T3 is a reticle container for accommodating reticles. Specifically, the item T1 of item 1 is a Front Opening Unified Pod (FOUP) and a Front Opening Shipping Box (FOSB). Article T2 of type 2 was an EUV container according to SEMI standard E152. Article No. 3, article T3, was a reticle container according to SEMI standard E111. The 1 st held portion F1, the 2 nd held portion F2, and the 3 rd held portion F3 are flange portions provided in the upper surface portion of each container.
In the present embodiment, the "external dimensions are different" when the external dimensions of the portion that affects the operation of the 2 nd transfer device 7 of the elevating type transfer device 1 are different. That is, since the 2 nd transfer device 7 is configured to hold the flange portions of the containers, the "outer dimensions are the same" when the heights of the flange portions of the containers are the same and the shapes of the flange portions are the same, and the "outer dimensions are different" when the heights of the flange portions of the containers are different or the shapes of the flange portions are different. Although the 2 nd transfer device 7 can support all of the 1 st article T1, the 2 nd article T2, and the 3 rd article T3, when the bottom surface of the 1 st article T1, the bottom surface of the 2 nd article T2, and the bottom surface of the 3 rd article T3 are supported at the same height, the heights of the flange portions of these articles are different, so these articles "have different dimensions", and the transfer operation of the 1 st article T1, the 2 nd article T2, and the 3 rd article T3 is different. Therefore, the 1 st article T1, the 2 nd article T2, and the 3 rd article T3 are of different kinds. On the other hand, although the front opening unified pod and the front opening shipping box are known as the type 1 article T1, since the height of the flange of the container is the same and the shape of the flange is the same, they are not "different in outer dimension", but are articles having the same outer dimension, that is, articles of the same kind. In the present embodiment, the flange portions of the 2 nd article T2 and the 3 rd article T3 have the same shape. That is, in the present embodiment, article T2 of type 2 and article T3 of type 3, which have the same shape of the flange portion, are classified into article K2 of type 2, and article T1 of type 1, which has a different shape of the flange portion and a different height of the flange portion, is classified into article K1 of type 1.
As shown in fig. 2, the elevation type conveyance device 1 includes a1 st transfer device 6, a2 nd transfer device 7, and an elevation body 8, the 2 nd transfer device 7 is provided above the 1 st transfer device 6 and at a position overlapping the 1 st transfer device 6 when viewed in the vertical direction Z along the vertical direction Z, and the elevation body 8 supports the 1 st transfer device 6 and the 2 nd transfer device 7 and moves in the vertical direction Z by driving of an elevation motor 9 (see fig. 13). When the side of the vertical direction Z on which the 2 nd transfer device 7 is provided with respect to the 1 st transfer device 6 is set as the vertical direction specific side, the vertical direction specific side is the upper side in the vertical direction Z in the present embodiment.
The first transfer device 6 is configured to be able to transfer only the 1 st article K1 (the 1 st article T1) of the 1 st article K1 (the 1 st article T1) and the 2 nd article K2 (the 2 nd article T2 and the 3 rd article T3) between itself and the transfer target site 3. The 2 nd transfer device 7 is configured to be able to transfer both of the 1 st article K1 (the 1 st article T1) and the 2 nd article K2 (the 2 nd article T2 and the 3 rd article T3) between itself and the transfer target portion 3.
In the 1 st transfer device 6, "capable of transferring between itself and the transfer target site 3" means that the 1 st transfer device 6 is capable of transferring the 1 st article K1 from the 1 st transfer device 6 to the transfer target site 3, and the 1 st transfer device 6 is capable of transferring the 1 st article K1 from the transfer target site 3 to the 1 st transfer device 6. In addition, in the case of the 2 nd transfer device 7, "capable of transferring between itself and the transfer target site 3" means that the 2 nd transfer device 7 is capable of transferring the 1 st article K1 or the 2 nd article K2 from the 2 nd transfer device 7 to the transfer target site 3, and the 2 nd transfer device 7 is capable of transferring the 1 st article K1 or the 2 nd article K2 from the transfer target site 3 to the 2 nd transfer device 7.
As shown in fig. 11 and 12, the transfer target site 3 is provided so as to be positioned around the vertically movable body 8 when viewed in the vertical direction Z. The transfer target portion 3 includes a support 10 for supporting an article and a part of the conveyor type conveying device 2. The 1 st transfer device 6 transfers the 1 st article T1 between itself and the support 10, and transfers the 1 st article T1 between itself and the conveyor-type conveying device 2. The 2 nd transfer device 7 transfers the 1 st article T1, the 2 nd article T2, and the 3 rd article T3 between itself and the support 10, and transfers the 1 st article T1, the 2 nd article T2, and the 3 rd article T3 between itself and the conveyor-type conveying device 2.
As shown in fig. 2, the 1 st transfer device 6 includes a1 st holding part 11, a1 st protrusion/retraction mechanism 12, a1 st elevation mechanism 13, and a1 st rotation mechanism 14, wherein the 1 st holding part 11 holds a1 st type article K1 (a 1 st type article T1), the 1 st protrusion/retraction mechanism 12 moves the 1 st holding part 11 to a1 st retraction position and a1 st protrusion position protruding to a side where the transfer target portion 3 exists with respect to the 1 st retraction position, the 1 st elevation mechanism 13 moves the 1 st holding part 11 in the vertical direction Z with respect to the 1 st protrusion/retraction mechanism 12, and the 1 st rotation mechanism 14 rotates the 1 st protrusion/retraction mechanism 12 about an axial center in the vertical direction Z.
In the present embodiment, the 1 st projection/retraction mechanism 12 is constituted by a joint arm (スカラーアーム). The base of the 1 st protrusion/retraction mechanism 12 is connected to the vertically movable body 8 so as to be rotatable about an axial center in the vertical direction Z, and the 1 st lifting/lowering mechanism 13 is connected to the tip of the 1 st protrusion/retraction mechanism 12. The 1 st protrusion/retraction mechanism 12 moves the 1 st holding part 11 in the protrusion/retraction direction X by extending and contracting in the protrusion/retraction direction X. The 1 st elevation mechanism 13 includes a main body 13A fixed to the 1 st projection/retraction mechanism 12, and an elevation part 13B supported by the main body 13A so as to be able to be elevated and fixed to the 1 st holding part 11. The 1 st elevation mechanism 13 moves the 1 st holding portion 11 in the vertical direction Z by moving the elevation portion 13B in the vertical direction Z with respect to the main body portion 13A. The 1 st holding portion 11 is configured to hold the bottom surface of the 1 st article K1 by being supported from below.
As shown in fig. 3 and 4, the 1 st transfer device 6 performs a transfer operation of transferring the 1 st type article K1 between itself and the transfer target site 3. The first transfer device 6 is configured to perform, as transfer operations, a projecting and retracting operation for projecting and retracting in a direction (projecting and retracting direction X) for connecting the vertically movable body 8 and the transfer target portion 3, and a lifting and lowering operation for lifting and lowering in the vertical direction Z.
The 1 st projecting and retracting operation of the 1 st transfer device 6 is a1 st projecting operation of projecting the 1 st holding part 11 from the 1 st retracted position to the 1 st projecting position by the 1 st projecting and retracting mechanism 12, and a1 st retracting operation of retracting the 1 st holding part 11 from the 1 st projecting position to the 1 st retracted position by the 1 st projecting and retracting mechanism 12. The first lifting operation of the 1 st transfer device 6 is a1 st lifting operation in which the 1 st holding part 11 is lifted from the lowered position to the raised position by the 1 st lifting mechanism 13, and a1 st lowering operation in which the 1 st holding part 11 is lowered from the raised position to the lowered position by the 1 st lifting mechanism 13.
When the 1 st transfer device 6 transfers the 1 st article T1 from itself to the transfer target site 3, the 1 st holding part 11 holding the 1 st article T1 is operated in the order of the 1 st projecting operation, the 1 st lowering operation, and the 1 st retracting operation from the state of being at the raised position in the vertical direction Z and at the 1 st retracting position in the projecting and retracting direction X.
Further, when the 1 st article T1 is transferred from the transfer target location 3 to the 1 st transfer device 6, the 1 st holding part 11 which does not hold the 1 st article T1 is in the order of the 1 st projecting motion, the 1 st raising motion, and the 1 st retracting motion from the state of being in the lowered position in the vertical direction Z and being in the 1 st retracting position in the projecting and retracting direction X.
The 1 st transfer device 6 is configured to be able to change the projecting and retracting direction X of the 1 st holding unit 11 when the 1 st projecting and retracting mechanism 12 is extended and retracted by rotating the 1 st projecting and retracting mechanism 12 about the axial center in the vertical direction Z. This enables transfer of the 1 st article T1 between the 5 transfer target sites 3 arranged along the periphery.
As shown in fig. 5 to 11, the 2 nd transfer device 7 includes a2 nd holding unit 16, a2 nd projecting and retracting mechanism 17, a2 nd lifting and lowering mechanism 18, and a2 nd rotating mechanism 19, the 2 nd holding unit 16 can hold both the 1 st type article K1 (the 1 st type article T1) and the 2 nd type article K2 (the 2 nd type article T2 and the 3 rd type article T3), the 2 nd projecting and retracting mechanism 17 can move the 2 nd holding unit 16 to a2 nd retracted position and a2 nd projecting position projecting to the side where the transfer target portion 3 exists with respect to the 2 nd retracted position, the 2 nd lifting and lowering mechanism 18 can move the 2 nd holding unit 16 in the vertical direction Z with respect to the 2 nd projecting and retracting mechanism 17, and the 2 nd rotating mechanism 19 can rotate the 2 nd projecting and retracting mechanism 17 about an axial center in the vertical direction Z.
In the present embodiment, the 2 nd protrusion/retraction mechanism 17 is constituted by an articulated arm. The base of the 2 nd protrusion/retraction mechanism 17 is connected to the vertically movable body 8 so as to be rotatable about an axial center in the vertical direction Z, and the 2 nd vertically movable mechanism 18 is connected to the tip of the 2 nd protrusion/retraction mechanism 17. The 2 nd protrusion/retraction mechanism 17 moves the 2 nd holding part 16 in the protrusion/retraction direction X by extending and contracting in the protrusion/retraction direction X. The 2 nd elevating mechanism 18 includes a main body 18A fixed to the 2 nd protrusion/retraction mechanism 17, and an elevating portion 18B supported by the main body 18A so as to be capable of elevating and lowering and fixed to the 2 nd holding portion 16. The 2 nd elevating mechanism 18 moves the 2 nd holding portion 16 in the vertical direction Z by moving the elevating portion 18B in the vertical direction Z with respect to the main body portion 18A. The 2 nd holding portion 16 is configured to be able to hold both the 1 st group held portion R1 provided above the 1 st group article K1 and the 2 nd group held portion R2 provided above the 2 nd group article K2.
The 2 nd holding portion 16 will be described. The 2 nd holding portion 16 includes a pair of gripping claws 16A that are movable away from each other in the horizontal direction. The 2 nd holding portion 16 is configured to be switchable between an approaching state in which the pair of gripping claws 16A are brought close to each other and a separated state in which the pair of gripping claws 16A are separated from each other. In the separated state, the interval between the pair of gripping claws 16A is wider than the width of the 1 st held portion F1, the 2 nd held portion F2, and the 3 rd held portion F3, and in the approaching state, the pair of gripping claws 16A is narrower than the width of any of the 1 st held portion F1, the 2 nd held portion F2, and the 3 rd held portion F3. Therefore, the 2 nd holding portion 16 is configured to be able to hold any of the 1 st held portion F1 provided on the upper portion of the 1 st type article T1, the 2 nd held portion F2 provided on the upper portion of the 2 nd type article T2, and the 3 rd held portion F3 provided on the upper portion of the 3 rd type article T3.
The 2 nd transfer device 7 performs a transfer operation of transferring the 1 st article K1 and the 2 nd article K2 between itself and the transfer target site 3. The 2 nd transfer device 7 is configured to perform, as a transfer operation, a holding operation for holding the 1 st article K1 or the 2 nd article K2 in addition to the protrusion/retraction operation and the lifting operation.
The projecting and retracting operation of the 2 nd transfer device 7 is a2 nd projecting operation in which the 2 nd holding part 16 is projected from the 2 nd retracted position to the 2 nd projecting position by the 2 nd projecting and retracting mechanism 17, and a2 nd retracting operation in which the 2 nd holding part 16 is retracted from the 2 nd projecting position to the 2 nd retracted position by the 2 nd projecting and retracting mechanism 17. The up-and-down operation of the 2 nd transfer device 7 is performed by the 2 nd up-and-down operation of raising the 2 nd holding portion 16 to the up position by the 2 nd up-and-down mechanism 18, the 1 st down-and-down operation of lowering the 2 nd holding portion 16 from the up position to the 1 st down position by the 2 nd up-and-down mechanism 18, the 2 nd down-and-down operation of lowering the 2 nd holding portion 16 from the up position to the 2 nd down position by the 2 nd up-and-down mechanism 18, and the 3 rd down-and-down operation of lowering the 2 nd holding portion 16 from the up position to the 3 rd down position by the 2 nd up-and-down mechanism 18. The holding operation of the 2 nd transfer device 7 is a separating operation for switching the 2 nd holding unit 16 from the close state to the separated state, and an approaching operation for switching the 2 nd holding unit 16 from the separated state to the close state.
When the 2 nd transfer device 7 transfers the 1 st article T1 from itself (the 1 st transfer device 6) to the transfer target site 3, the 2 nd projecting operation, the 1 st lowering operation, the separating operation, the 2 nd raising operation, and the 2 nd retracting operation are performed in this order from a state where the 2 nd holding part 16 holding the 1 st article T1 is at the raised position in the vertical direction Z and at the 2 nd retracting position in the projecting and retracting direction X.
Further, when the 1 st article T1 is transferred from the transfer target location 3 to the 2 nd transfer device 7 (the 1 st transfer device 6), the 2 nd projecting operation, the 1 st lowering operation, the approaching operation, the 2 nd raising operation, and the 2 nd retracting operation are performed in this order from the state where the 2 nd holding part 16, which does not hold any of the 1 st article T1, the 2 nd article T2, and the 3 rd article T3, is at the raised position in the vertical direction Z and at the 2 nd retracting position in the projecting and retracting direction X.
When the 2 nd article T2 is transferred from the 2 nd transfer device 7 (the 1 st transfer device 6) to the transfer target site 3, the 2 nd projecting operation, the 2 nd lowering operation for the 2 nd article, the separating operation, the 2 nd raising operation, and the 2 nd retracting operation are performed in this order from a state where the 2 nd holding part 16 holding the 2 nd article T2 is at the raised position in the vertical direction Z and at the 2 nd retracting position in the projecting and retracting direction X.
Further, when the 2 nd article T2 is transferred from the transfer target location 3 to itself (the 1 st transfer device 6), the 2 nd transfer device 7 performs the 2 nd projecting operation, the 2 nd lowering operation, the approaching operation, the 2 nd raising operation, and the 2 nd retracting operation in this order from the state where the 2 nd holding part 16, which does not hold any of the 1 st article T1, the 2 nd article T2, and the 3 rd article T3, is at the raised position in the vertical direction Z and at the 2 nd retracting position in the projecting and retracting direction X.
When the 3 rd article T3 is transferred from the 2 nd transfer device 7 (the 1 st transfer device 6) to the transfer target site 3, the 2 nd projecting operation, the 3 rd lowering operation, the separating operation, the 2 nd raising operation, and the 2 nd retracting operation are performed in this order from a state where the 2 nd holding part 16 holding the 3 rd article T3 is at the raised position in the vertical direction Z and at the 2 nd retracting position in the projecting and retracting direction X.
Further, when transferring the 3 rd article T3 from the transfer target location 3 to itself (the 1 st transfer device 6), the 2 nd transfer device 7 performs the 2 nd projecting operation, the 3 rd lowering operation, the approaching operation, the 2 nd raising operation, and the 2 nd retracting operation in this order from the state where the 2 nd holding part 16, which does not hold any of the 1 st article T1, the 2 nd article T2, and the 3 rd article T3, is at the raised position in the vertical direction Z and at the 2 nd retracting position in the projecting and retracting direction X.
The 1 st transfer device 6 is configured to be able to perform the transfer operation of the 1 st type article K1 between itself and the transfer target site in a shorter time than the 2 nd transfer device 7.
That is, the time required for the 1 st transfer device 6 to transfer the 1 st article T1 from itself to the transfer target site 3 (the time required for the 1 st projecting operation, the 1 st lowering operation, and the 1 st retracting operation) is shorter than the time required for the 2 nd transfer device 7 to transfer the 1 st article T1 from itself to the transfer target site 3 (the time required for the 2 nd projecting operation, the 1 st lowering operation, the separating operation, the 2 nd raising operation, and the 2 nd retracting operation).
The time required for the 1 st transfer device 6 to transfer the 1 st article T1 from the transfer target site 3 to itself (the time required for the 1 st projecting operation, the 1 st raising operation, and the 1 st retracting operation) is shorter than the time required for the 2 nd transfer device 7 to transfer the 1 st article T1 from the transfer target site 3 to itself (the time required for the 2 nd projecting operation, the 1 st lowering operation, the approaching operation, the 2 nd raising operation, and the 2 nd retracting operation).
The 2 nd transfer device 7 is configured to be able to change the projecting and retracting direction X of the 2 nd holding unit 16 when the 2 nd projecting and retracting mechanism 17 is extended and retracted by rotating the 2 nd projecting and retracting mechanism 17 about the axial center in the vertical direction Z. This enables transfer of article T1 of type 1, article T2 of type 2, and article T3 of type 3 between 5 transfer target sites 3 arranged along the periphery.
The conveyor transport device 2 includes a1 st conveyor 21, a2 nd conveyor 22, and a3 rd conveyor 23. The 1 st conveyor 21 and the 2 nd conveyor 22 convey only the 1 st article T1 among the 1 st article T1, the 2 nd article T2, and the 3 rd article T3 in the horizontal direction. The 3 rd conveyor 23 carries only the 2 nd article T2 and the 3 rd article T3 among the 1 st article T1, the 2 nd article T2, and the 3 rd article T3 in the horizontal direction. The 2 nd conveyor 22 and the 3 rd conveyor 23 are provided above the 1 st conveyor 21.
The 1 st conveyor 21 includes a1 st conveyor 21 for carrying in the 1 st type article T1 to the transfer target site 3, and a1 st conveyor 21 for carrying out the 1 st type article T1 from the transfer target site 3. In the example shown in fig. 11, the 1 st conveyor 21 for carrying in and the 1 st conveyor 21 for carrying out are set as a set of the 1 st conveyor 21, and two sets of the 1 st conveyors 21 are provided at the same height.
The 2 nd conveyor 22 for carrying in the 1 st type article T1 to the transfer target site 3 and the 2 nd conveyor 22 for carrying out the 1 st type article T1 from the transfer target site 3 are included as the 2 nd conveyor 22. Further, as the 3 rd conveyor 23, there are a3 rd conveyor 23 for carrying in the 2 nd type article T2 and the 3 rd type article T3 to the transfer target site 3, and a3 rd conveyor 23 for carrying out the 2 nd type article T2 and the 3 rd type article T3 from the transfer target site 3. In the example shown in fig. 12, the 2 nd conveyor 22 for carrying in and the 2 nd conveyor 22 for carrying out are set as a set of the 2 nd conveyor 22, the 3 rd conveyor 23 for carrying in and the 3 rd conveyor 23 for carrying out are set as a set of the 3 rd conveyor 23, and the set of the 2 nd conveyor 22 and the set of the 3 rd conveyor 23 are provided at the same height.
The installation heights of the 2 nd conveyor 22 and the 3 rd conveyor 23 will be explained. In the present embodiment, as shown in fig. 13, the 2 nd conveyor 22 is arranged so that the height of the 1 st held portion F1 of the 1 st article T1 conveyed by the 2 nd conveyor 22 is the same as the height of the 2 nd held portion F2 of the 2 nd article T2 conveyed by the 3 rd conveyor 23.
The 1 st conveyor 21 and the 2 nd conveyor 22 are disposed at an interval such that transfer of the 1 st article T1 between the 1 st transfer device and the 1 st conveyor 21 and transfer of the 1 st article T1 between the 2 nd transfer device 7 and the 2 nd conveyor 22 can be performed simultaneously.
The 1 st conveyor 21 and the 3 rd conveyor 23 are disposed at intervals such that transfer of the 1 st article T1 between the 1 st transfer device 6 itself and the 1 st conveyor 21 and transfer of the 2 nd article T2 and the 3 rd article T3 between the 2 nd transfer device 7 itself and the 3 rd conveyor 23 can be performed simultaneously.
The 2 nd conveyor 22 includes a1 st type carriage 27 that moves in the horizontal direction to convey a1 st type article K1 (a 1 st type article T1), a1 st type inner support 28 provided to one end of the movement path of the 1 st type carriage 27, and a1 st type outer support (not shown) provided to the other end of the movement path of the 1 st type carriage 27. The inner support part 28 for type 1 is located at the transfer target site 3.
The type 1 article T1 is attached to and detached from the type 1 inner support 28 by the elevating conveyor 1. Further, the article transport vehicle 4 (see fig. 1) traveling near the ceiling is used to attach and detach the 1 st article T1 to and from the 1 st outer support portion. Then, the 1 st article T1 is conveyed between the 1 st inner support 28 and the 1 st outer support by the 1 st cart 27.
The 3 rd conveyor 23 includes a2 nd type carriage 31 that moves in the horizontal direction to convey a2 nd type article K2 (a 2 nd type article T2 and a3 rd type article T3), a2 nd type inner support portion 32 and a3 rd type inner support portion 33 provided to one end portion of a movement path of the 2 nd type carriage 31, and a2 nd type outer support portion (not shown) and a3 rd type outer support portion (not shown) provided to the other end portion of the movement path of the 2 nd type carriage 31. The inner support parts 32 for type 2 and the inner support parts 33 for type 3 are located at the transfer target site 3.
The second type article T2 is attached to and detached from the second type inner support 32 by the elevating conveyor 1, and the third type article T3 is attached to and detached from the third type inner support 33 by the elevating conveyor 1. The article transport vehicle 4 (see fig. 1) is used to transport the 2 nd article T2 to and from the 2 nd outer support section, and the article transport vehicle 4 is used to transport the 3 rd article T3 to and from the 3 rd outer support section. Then, the 2 nd type article T2 is conveyed between the 2 nd type inner support portion 32 and the 2 nd type outer support portion by the 2 nd type cart 31, and the 3 rd type article T3 is conveyed between the 3 rd type inner support portion 33 and the 3 rd type outer support portion.
The 1 st conveyor 21 is configured similarly to the 2 nd conveyor 22, and therefore, description thereof is omitted.
As shown in fig. 1, conveyor transfer device 2 includes 4-th conveyor 24 for horizontally transferring only 1 st article T1 among 1 st article T1, 2 nd article T2, and 3 rd article T3, and 5-th conveyor 25 for horizontally transferring only 2 nd article T2 and 3 rd article T3 among 1 st article T1, 2 nd article T2, and 3 rd article T3.
The 4 th conveyor 24 and the 5 th conveyor 25 are provided in the vicinity of the ground below the 1 st conveyor 21, the 2 nd conveyor 22, and the 3 rd conveyor 23. One end of the 4 th conveyor 24 and the 5 th conveyor 25 is positioned at the transfer target site 3. The operator loads and unloads the 1 st article T1 to and from the other end of the 4 th conveyor 24, and the operator loads and unloads the 2 nd article T2 or the 3 rd article T3 to and from the other end of the 5 th conveyor 25.
As shown in fig. 14, the lifting/lowering type transport apparatus includes a1 st control unit H1 for controlling the operation of the lifting/lowering type transport apparatus 1 based on a command from the upper controller H, and a2 nd control unit H2 for controlling the operation of the conveyor type transport apparatus 2 based on a command from the upper controller H. The 1 st control unit H1 corresponds to a control unit that controls the operations of the 1 st transfer device 6, the 2 nd transfer device 7, and the vertically movable body 8.
The 1 st transfer device 6 includes a1 st stock sensor S1, an elevation sensor S2, and a descent sensor S3. The 2 nd transfer device 7 includes a2 nd stock sensor S4, a3 rd stock sensor S5, a1 st registration sensor S6, and a2 nd registration sensor S7. In addition, the 2 nd inventory sensor S4 corresponds to the 1 st sensor for detecting the 1 st item T1, and the 3 rd inventory sensor S5 corresponds to the 2 nd sensor for detecting the 2 nd item T2 and the 3 rd item T3.
As shown in fig. 3, the 1 st stock sensor S1 is provided to project detection light to the area where the 1 st item T1 placed on the 1 st holding part 11 exists. The 1 st control part H1 determines whether the 1 st holding part 11 holds the 1 st item T1 based on the detection information of the 1 st stock sensor S1.
The elevation sensor S2 is provided to project detection light to the 1 st object a1 provided on the 1 st conveyor 21 in a state where the elevation body 8 is located at a height corresponding to the 1 st conveyor 21, and the 1 st holding part 11 is located at an elevation position and at a rotation position corresponding to the 1 st conveyor 21. The 1 st controller H1 determines whether or not the 1 st holding part 11 is at an appropriate elevated position with respect to the transfer target site 3 based on the detection information of the elevation sensor S2. The 1 st object a1 is also provided on the 2 nd conveyor 22 in the same manner as the 1 st conveyor 21.
The descending sensor S3 is provided to project the detection light to the 1 st object a1 provided on the 1 st conveyor 21 in a state where the ascending/descending body 8 is located at a height corresponding to the 1 st conveyor 21, and the 1 st holding part 11 is located at the descending position and at the rotation position corresponding to the 1 st conveyor 21. The 1 st controller H1 determines whether or not the 1 st holding part 11 is at an appropriate lowered position with respect to the transfer target site 3 based on the detection information of the lowering sensor S3.
As shown in fig. 5 to 10, the 2 nd inventory sensor S4 is provided at a height at which the 1 st article T1 held by the 2 nd transfer device 7 is present and at which the 2 nd articles T2 and the 3 rd articles T3 held by the 2 nd transfer device 7 are absent. Further, the 2 nd stock sensor S4 is provided to project detection light to the area where the 1 st item T1 held by the 2 nd holding unit 16 exists and the area where the 2 nd items T2 and the 3 rd item T3 held by the 2 nd holding unit 16 do not exist. The 1 st controller H1 determines whether the 1 st item T1 is held by the 2 nd holding unit 16 based on the detection information of the 2 nd stock sensor S4.
The 3 rd stock sensor S5 is provided at a height at which the 2 nd article T2 held by the 2 nd transfer device 7 is present and at a height at which the 3 rd article T3 held by the 2 nd transfer device 7 is present. Further, the 3 rd stock sensor S5 is provided to project detection light to the area where the 2 nd item T2 held by the 2 nd holding part 16 exists and the area where the 3 rd item T3 held by the 2 nd holding part 16 exists. In the present embodiment, the 3 rd stock sensor S5 is a distance sensor and is configured to measure the distance to the article held by the 2 nd holding portion 16. The 1 st control unit H1 determines whether the 2 nd holding unit 16 holds the 2 nd item T2 and determines whether the 2 nd holding unit 16 holds the 3 rd item T3 based on the detection information of the 3 rd inventory sensor S5.
The 1 st registration sensor S6 is provided to project detection light to the 2 nd object a2 provided on the 2 nd conveyor 22 in a state where the vertically movable body 8 is at a height corresponding to the 2 nd conveyor 22 and at a rotational position corresponding to the 2 nd conveyor 22. The 1 st control part H1 determines whether the 2 nd holding part 16 is in an appropriate position with respect to the 2 nd conveyor 22 based on the detection information of the 1 st registration sensor S6. Further, the 1 st conveyor 21 is also provided with a2 nd object a2, similarly to the 2 nd conveyor 22.
The 2 nd registration sensor S7 is provided to project detection light onto the 3 rd detected object A3 provided on the 3 rd conveyor 23 in a state where the lifting body 8 is located at a height corresponding to the 3 rd conveyor 23 and at a rotational position corresponding to the 3 rd conveyor 23. The 1 st control part H1 determines whether the 2 nd holding part 16 is in an appropriate position with respect to the 3 rd conveyor 23 based on the detection information of the 2 nd registration sensor S7.
As shown in fig. 13, the 3 rd conveyor 23 includes a determination device 35 that determines whether the article being conveyed is the 2 nd article T2 or the 3 rd article T3. The judging device 35 is composed of a 4 th stock sensor S8, a 5 th stock sensor S9, and a2 nd controller H2. The 4 th stock sensor S8 is provided to project detection light to the area where the 2 nd article T2 placed on the 2 nd inner support 32 exists. Further, the 5 th stock sensor S9 is provided to project detection light to the region where the 3 rd item T3 placed on the 3 rd inner support 33 exists. The 2 nd controller H2 determines whether the 2 nd type inner support 32 supports the 2 nd type item T2 and determines whether the 3 rd type inner support 33 supports the 3 rd type item T3 based on the detection information of the 4 th stock sensor S8 and the detection information of the 5 th stock sensor S9.
The 1 st control unit H1 executes elevation control for elevating the vertically movable body 8 to a position corresponding to the transfer target locations 3, and transfer control for transferring articles between the transfer target locations 3. The 1 st controller H1 executes, as transfer controls, transfer control for transferring the 1 st article T1 from the 1 st conveyor 21 to the 1 st transfer device 6, transfer control for transferring the 1 st article T1 from the 2 nd conveyor 22 to the 2 nd transfer device 7, transfer control for transferring the 2 nd article T2 from the 3 rd conveyor 23 to the 2 nd transfer device 7, transfer control for transferring the 3 rd article T3 from the 3 rd conveyor 23 to the 2 nd transfer device 7, and transfer control for transferring the 1 st article T1 from the 2 nd conveyor 22 to the 1 st transfer device 6. Further, the 1 st control unit H1 executes, as transfer controls, transfer control for transferring the 1 st article T1 from the 1 st transfer device 6 to the 1 st conveyor 21, transfer control for transferring the 1 st article T1 from the 2 nd transfer device 7 to the 2 nd conveyor 22, transfer control for transferring the 2 nd article T2 from the 2 nd transfer device 7 to the 3 rd conveyor 23, transfer control for transferring the 3 rd article T3 from the 2 nd transfer device 7 to the 3 rd conveyor 23, and transfer control for transferring the 1 st article T1 from the 1 st transfer device 6 to the 2 nd conveyor 22.
That is, for example, when the 1 st article T1 is supported by the 1 st inner support 28 of the 1 st conveyor 21 and the 2 nd article T2 is supported by the 2 nd transfer device 7, first, the 1 st controller H1 performs lift control for raising and lowering the vertically movable body 8 so that the 1 st transfer device 6 moves to a position corresponding to the 1 st conveyor 21. Thus, by performing the elevation control in this manner, the 1 st transfer device 6 moves to a position corresponding to the 1 st conveyor 21, and the 2 nd transfer device 7 moves to a position corresponding to the 2 nd conveyor 22. The 1 st controller H1 simultaneously performs transfer control for transferring the 1 st article T1 from the 1 st conveyor 21 to the 1 st transfer device 6 and transfer control for transferring the 2 nd article T2 from the 2 nd transfer device 7 to the 3 rd conveyor 23.
For example, when the article T1 of the 1 st type is supported by the inner support 28 for the 1 st type of the 2 nd conveyor 22 and the article T1 of the 1 st type is not supported by the inner support 28 for the 1 st type of the 1 st conveyor 21, the 1 st transfer device 6, and the 2 nd transfer device 7, all of which do not hold an article, only the article T1 of the 1 st type supported by the inner support 28 for the 1 st type of the 2 nd conveyor 22 may be transferred. In this case, the 1 st article T1 of the 1 st kind can be transferred by either the 1 st transfer device 6 or the 2 nd transfer device 7. That is, both transfer control for transferring the 1 st type article T1 from the 2 nd conveyor 22 to the 1 st transfer device 6 and transfer control for transferring the 1 st type article T1 from the 2 nd conveyor 22 to the 2 nd transfer device 7 can be executed. In this case, the 1 st control unit H1 performs the elevation control for moving the vertically movable body 8 up and down so that the 1 st transfer device 6 moves to the position corresponding to the 2 nd conveyor 22. Thereafter, transfer control is performed to transfer the 1 st article T1 from the 2 nd conveyor 22 to the 1 st transfer device 6. In this way, when both transfer control for transferring the 1 st type article T1 from the 2 nd conveyor 22 to the 1 st transfer device 6 and transfer control for transferring the 1 st type article T1 from the 2 nd conveyor 22 to the 2 nd transfer device 7 can be executed, the 1 st controller H1 preferably executes transfer control for transferring the 1 st type article T1 from the 2 nd conveyor 22 to the 1 st transfer device 6.
Further, transfer control for transferring the 1 st article T1 from the 1 st conveyor 21 to the 1 st transfer device 6 corresponds to the 1 st control, transfer control for transferring the 1 st article T1 from the 2 nd conveyor 22 to the 2 nd transfer device 7 corresponds to the 2 nd control, transfer control for transferring the 2 nd article T2 or the 3 rd article T3 from the 3 rd conveyor 23 to the 2 nd transfer device 7 corresponds to the 3 rd control, and transfer control for transferring the 1 st article T1 from the 2 nd conveyor 22 to the 1 st transfer device 6 corresponds to the 4 th control.
2. Other embodiments
Next, another embodiment of the article transport facility will be described.
(1) In the above embodiment, the 1 st article T1 is a foup and a foup, the 2 nd article T2 is an EUV container, and the 3 rd article T3 is a reticle container, but the 1 st article T1, the 2 nd article T2, and the 3 rd article T3 may be changed as appropriate. For example, the 1 st article T1 may be one of a front opening unified pod and a front opening carrying case, or at least one of the 2 nd article T2 and the 3 rd article T3 may be a container other than a container for reticle and a container for EUV. The 1 st article T1, the 2 nd article T2, and the 3 rd article T3 are not limited to those transported by semiconductor manufacturing equipment, and may be containers such as containers and trays, or various products themselves.
(2) In the above embodiment, the case where the 1 st article T1 is used as a front opening foup and a front opening shipping box, the 2 nd article T2 is used as an EUV container, and the 3 rd article T3 is used as a reticle container, and the contents are used in different applications has been described as an example. For example, the 1 st, 2 nd and 3 rd kinds of articles T1, T2 and T3 may be configured to accommodate semiconductor wafers of different sizes, and the contents of the 1 st, 2 nd and 3 rd articles T1, T2 and T3 may be used in the same manner.
(3) In the above embodiment, when the 1 st control unit H1 can execute both the 2 nd control and the 4 th control, the 4 th control is preferentially executed, but the 2 nd control may be preferentially executed.
(4) In the above embodiment, the case where the 1 st elevation mechanism 13 moves the 1 st holding part 11 in the vertical direction Z with respect to the 1 st projection/retraction mechanism 12 has been described as an example, but the present invention is not limited to this, and the 1 st elevation mechanism 13 may move the 1 st holding part 11 in the vertical direction Z by moving the 1 st projection/retraction mechanism 12 in the vertical direction Z with respect to the elevator body 8. Similarly, the 2 nd elevating mechanism 18 may move the 2 nd holding part 16 in the vertical direction Z by moving the 2 nd protrusion/retraction mechanism 17 in the vertical direction Z with respect to the elevating body 8.
(5) In the above embodiment, the 2 nd transfer device 7 is provided on the upper side with respect to the 1 st transfer device 6, but the 2 nd transfer device 7 may be provided on the lower side with respect to the 1 st transfer device 6.
(6) In the above embodiment, the case where the 1 st transfer device 6 is configured to perform the protrusion/retreat operation and the elevation operation as the transfer operation, the 2 nd transfer device 7 is configured to perform the protrusion/retreat operation, the elevation operation, and the holding operation as the transfer operation, and the transfer operations of the 1 st transfer device 6 and the 2 nd transfer device 7 are different has been described as an example, but the present invention is not limited thereto, and the transfer operations of the 1 st transfer device 6 and the 2 nd transfer device 7 may be the same. For example, both the 1 st transfer device 6 and the 2 nd transfer device 7 may be configured to perform the protrusion/retraction operation and the lifting/lowering operation as the transfer operation. In this case, for example, one of the 1 st projection/retraction mechanism 12 and the 2 nd projection/retraction mechanism 17 may be constituted by a joint arm, and the other may be constituted by a slide fork. In this case, the first transfer device 6 may be configured to perform the transfer operation in a shorter time than the second transfer device 7, depending on the difference in the transfer operations between the articulated arm and the slide fork.
(7) In the above embodiment, the 2 nd transfer device 7 is configured to include the 2 nd stock sensor S4 for detecting the 1 st item T1 and the 3 rd stock sensor S5 for detecting the 2 nd item T2 and the 3 rd item T3, but the position and number of the sensors included in the 2 nd transfer device 7 may be changed as appropriate. That is, sensors may be provided at the heights where 1 st article T1, 2 nd article T2, and 3 rd article T3 are present, and 1 st article T1, 2 nd article T2, and 3 rd article T3 may be detected by one sensor, or sensors may be provided for each of 1 st article T1, 2 nd article T2, and 3 rd article T3, and 1 st article T1, 2 nd article T2, and 3 rd article T3 may be detected by three sensors.
(8) The configurations disclosed in the above embodiments can be combined with the configurations disclosed in the other embodiments as long as no contradiction occurs. The embodiments disclosed in the present specification are merely exemplary in all aspects with respect to other structures. Therefore, various changes can be made as appropriate without departing from the spirit and scope of the present application.
3. Summary of the above embodiments
The outline of the article transport facility described above will be described below.
An article transport facility comprising a1 st transport device and a2 nd transport device, wherein the 1 st transport device comprises a1 st transfer device, a2 nd transfer device, and a lifting body, wherein the 2 nd transfer device is provided at a position overlapping the 1 st transfer device when viewed in a vertical direction, the lifting body supports the 1 st transfer device and the 2 nd transfer device and moves in the vertical direction, the 1 st transfer device is configured to be able to transfer only the 1 st article among the 1 st article, the 2 nd article, and the 3 rd article between itself and the 2 nd transport device, the 2 nd transfer device is configured to be able to transfer the 1 st article, the 2 nd article, and the 3 rd article between itself and the 2 nd transport device, the conveying amount of the 1 st article is larger than the total of the conveying amount of the 2 nd article and the conveying amount of the 3 rd article, the 2 nd conveying device includes a1 st conveyor and a2 nd conveyor for conveying only the 1 st article among the 1 st article, the 2 nd article, and the 3 rd article in the horizontal direction, a3 rd conveyor for conveying only the 2 nd article and the 3 rd article among the 1 st article, the 2 nd article, and the 3 rd article in the horizontal direction, a side of the 1 st transfer device in the vertical direction where the 2 nd transfer device is provided is set as a specific vertical side, the 2 nd conveyor and the 3 rd conveyor are provided on the specific vertical side with respect to the 1 st conveyor, and the 1 st conveyor and the 2 nd conveyor are capable of simultaneously performing front conveyance between the 1 st transfer device itself and the 1 st conveyor by the 1 st transfer device The 1 st article transfer and the 1 st article transfer between the 2 nd transfer device itself and the 2 nd conveyor are arranged at intervals, and the 1 st conveyor and the 3 rd conveyor are arranged at intervals at which the 1 st article transfer between the 1 st transfer device itself and the 1 st conveyor and the 2 nd article transfer between the 2 nd transfer device itself and the 3 rd conveyor can be simultaneously performed.
According to this aspect, the transfer of the 1 st article between the 1 st transfer device and the 1 st conveyor and the transfer of the 1 st article between the 2 nd transfer device and the 2 nd conveyor can be performed simultaneously. Further, the transfer of the 1 st article between the 1 st transfer device itself and the 1 st conveyor, and the transfer of the 2 nd article or the 3 rd article between the 2 nd transfer device itself and the 3 rd conveyor can be performed simultaneously.
That is, even when the 2 nd transfer device holds any one of the 1 st article, the 2 nd article, and the 3 rd article, the transfer by the 1 st transfer device and the transfer by the 2 nd transfer device can be simultaneously performed. Further, when the 2 nd and 3 rd articles having a relatively small conveying amount are not held by the 2 nd transfer device, the 1 st article having a relatively large conveying amount can be held by the 2 nd transfer device, so that the conveying efficiency of the articles can be improved. Further, the 1 st transfer device may be configured to hold only the 1 st article, the 1 st conveyor and the 2 nd conveyor may be configured to convey only the 1 st article, and the 2 nd transfer device and the 3 rd conveyor may be configured to hold or convey only the 3 rd article, so that an increase in manufacturing cost can be suppressed to a small extent.
Therefore, according to this aspect, the efficiency of transporting articles can be improved while suppressing an increase in manufacturing cost to a small extent.
Here, it is preferable that the vertical direction specific side is an upper side in the vertical direction.
According to this embodiment, the 2 nd transfer device is provided above the 1 st transfer device. Therefore, the 2 nd conveyor and the 3 rd conveyor are disposed on the upper side with respect to the 1 st conveyor.
Further, it is preferable that the 1 st article has a larger vertical dimension than the 2 nd article and the 3 rd article, the 2 nd transfer device includes a1 st sensor for detecting the 1 st article and a2 nd sensor for detecting the 2 nd article and the 3 rd article, the 1 st sensor is provided at a height at which the 1 st article held by the 2 nd transfer device exists and at which the 2 nd article and the 3 rd article held by the 2 nd transfer device do not exist, and the 2 nd sensor is provided at a height at which the 2 nd article held by the 2 nd transfer device exists and at which the 3 rd article held by the 2 nd transfer device exists.
According to this embodiment, the 1 st sensor and the 2 nd sensor detect the article when the 2 nd transfer device holds the 1 st article. On the other hand, when the 2 nd transfer device holds the 2 nd article or the 3 rd article, the 2 nd sensor detects the article, and the 1 st sensor does not detect the article. Therefore, according to this embodiment, it is possible to appropriately detect whether the article held by the 2 nd transfer device is the 1 st article, the 2 nd article, or the 3 rd article.
Further, it is preferable that the 1 st transfer device includes a1 st protrusion/retraction mechanism and a1 st elevation mechanism, the 1 st protrusion/retraction mechanism moves a1 st holder holding the 1 st article to a1 st retraction position and a1 st protrusion position protruding to a side where the 2 nd transport device is present with respect to the 1 st retraction position, the 1 st elevation mechanism moves the 1 st holder in the up-down direction with respect to the 1 st protrusion/retraction mechanism, the 2 nd transfer device includes a2 nd protrusion/retraction mechanism and a2 nd elevation mechanism, the 2 nd protrusion/retraction mechanism moves a2 nd holder capable of holding any one of the 1 st article, the 2 nd article, and the 3 rd article to a2 nd retraction position and a2 nd protrusion position protruding to a side where the 2 nd transport device is present with respect to the 2 nd retraction position, the 2 nd elevating mechanism moves the 2 nd holding part in the up-down direction with respect to the 2 nd protrusion/retraction mechanism.
According to this aspect, since the 1 st elevation mechanism elevates only the 1 st holding part of the 1 st protrusion/retraction mechanism and the 1 st holding part, the weight of the object elevated and lowered by the 1 st elevation mechanism can be reduced as compared with a case where both the 1 st protrusion/retraction mechanism and the 1 st holding part are elevated and lowered, and therefore, the 1 st elevation mechanism can be reduced in size and weight. Similarly, the 2 nd elevating mechanism can also reduce the weight of the object to be elevated by the 2 nd elevating mechanism, so that the 2 nd elevating mechanism can be reduced in size and weight.
Preferably, the 3 rd conveyor includes a determination device for determining whether the article being conveyed is the 2 nd article or the 3 rd article.
According to this aspect, the 3 rd conveyor can appropriately determine whether the article being conveyed is the 2 nd article or the 3 rd article. Therefore, the 3 rd conveyor can appropriately perform conveyance after the conveyance depending on whether the article being conveyed is the 2 nd article or the 3 rd article.
Further, it is preferable that the 1 st transfer device includes a1 st holding portion, the 1 st holding portion is configured to hold the bottom surface of the 1 st type article by being supported from below, the 2 nd transfer device includes a2 nd holding portion, and the 2 nd holding portion is configured to be capable of holding any of the 1 st held portion provided on the upper portion of the 1 st type article, the 2 nd held portion provided on the upper portion of the 2 nd type article, and the 3 rd held portion provided on the upper portion of the 3 rd type article.
According to this aspect, the 1 st transfer device for transferring only the 1 st article of the 1 st article, the 2 nd article, and the 3 rd article, and the 2 nd transfer device for transferring the 1 st article, the 2 nd article, and the 3 rd article can be configured appropriately. Further, according to this embodiment, the 1 st holding part of the 1 st transfer device can be disposed below the 1 st article held by the 1 st transfer device, and the 2 nd holding part of the 2 nd transfer device can be disposed above the 1 st article, the 2 nd article, and the 3 rd article held by the 2 nd transfer device. Therefore, in the case where the 2 nd transfer device is disposed above the 1 st transfer device as described above, the 1 st holding portion and the 2 nd holding portion can be disposed vertically apart from each other, and a space for holding an article can be formed therebetween. Therefore, the vertical distance between the article held by the first transfer device 1 and the article held by the second transfer device 2 can be narrowed. Therefore, the vertical distance between the transfer target site of the 1 st transfer device and the transfer target site of the 2 nd transfer device can be narrowed, and the space can be easily saved in the transfer target site.
Further, it is preferable that the 2 nd conveyor is provided so that the height of the 1 st held portion of the 1 st type article conveyed by the 2 nd conveyor is the same as the height of the 2 nd held portion of the 2 nd type article conveyed by the 3 rd conveyor.
According to this embodiment, the 2 nd transfer device can transfer the 1 st article T1 and the 2 nd article T2 in the same operation. Therefore, the configuration of the 2 nd transfer device can be easily simplified, and the control configuration of the 2 nd transfer device can also be easily simplified.
Preferably, the article of the 1 st type is a wafer container for housing a semiconductor wafer, the article of the 2 nd type is an EUV container for housing an EUV mask, and the article of the 3 rd type is a reticle container for housing a reticle.
According to this aspect, in the semiconductor manufacturing apparatus, the wafer container having a relatively large general carrying amount, the EUV container having a relatively small carrying amount, and the reticle container can be appropriately carried while suppressing a decrease in carrying efficiency.
Further, it is preferable that the apparatus further includes a control unit for controlling operations of the 1 st transfer device, the 2 nd transfer device, and the lifting body, wherein the 1 st transfer device is configured to be capable of performing a transfer operation between the 1 st article and the 2 nd conveying device in a shorter time than the 2 nd transfer device, the control unit performs a1 st control for transferring the 1 st article from the 1 st conveyor to the 1 st transfer device, a2 nd control for transferring the 1 st article from the 2 nd conveyor to the 2 nd transfer device, a3 rd control for transferring the 2 nd article or the 3 rd article from the 3 rd conveyor to the 2 nd transfer device, a 4 th control for transferring the 1 st article from the 2 nd conveyor to the 1 st transfer device, and when both the 2 nd control and the 4 th control can be performed, the aforementioned control 4 is preferentially executed.
According to this aspect, when both of the 2 nd control and the 4 th control can be executed, the 4 th control is preferentially executed. Further, the 1 st transfer device can perform the transfer operation in a shorter time than the 2 nd transfer device. Therefore, according to this aspect, the conveyance of the 1 st article having a relatively large conveyance amount can be performed more efficiently.
Industrial applicability
The technology of the present application can be used for an article transport facility including a1 st transport device and a2 nd transport device.
Description of the reference numerals
1: lifting type carrying device (the 1 st carrying device)
2: conveyor type carrying device (No. 2 carrying device)
3: transfer target part
6: no. 1 transfer device
7: no. 2 transfer device
8: lifting body
11: 1 st holding part
12: 1 st projection retraction mechanism
13: 1 st lifting mechanism
16: 2 nd holding part
17: no. 2 protrusion retracting mechanism
18: 2 nd lifting mechanism
21: no. 1 conveyor
22: 2 nd conveyor
23: no. 3 conveyor
F1: 1 st held part
F2: 2 nd held part
F3: no. 3 held part
H: control unit
S4: no. 2 inventory sensor (No. 1 sensor)
S5: no. 3 inventory sensor (No. 2 sensor)
T1: item 1
T2: item No. 2
T3: item No. 3
Z: and (4) the up-down direction.

Claims (9)

1. An article carrying facility comprising a1 st carrying device and a2 nd carrying device, wherein the 1 st article, the 2 nd article, and the 3 rd article having different outer dimensions are objects to be carried,
the 1 st transfer device includes a1 st transfer device, a2 nd transfer device, and an elevating body, the 2 nd transfer device is disposed at a position overlapping the 1 st transfer device when viewed in the vertical direction, the elevating body supports the 1 st transfer device and the 2 nd transfer device and moves in the vertical direction,
the 1 st transfer device is configured to be able to transfer only the 1 st article among the 1 st article, the 2 nd article, and the 3 rd article between itself and the 2 nd conveying device,
the 2 nd transfer device is configured to be capable of transferring the 1 st article, the 2 nd article, and the 3 rd article between itself and the 2 nd conveying device,
the conveying amount of the type 1 article is larger than the sum of the conveying amount of the type 2 article and the conveying amount of the type 3 article,
the 2 nd conveying device includes a1 st conveyor, a2 nd conveyor, and a3 rd conveyor, the 1 st conveyor and the 2 nd conveyor convey only the 1 st article of the 1 st article, the 2 nd article, and the 3 rd article in a horizontal direction, the 3 rd conveyor convey only the 2 nd article and the 3 rd article of the 1 st article, the 2 nd article, and the 3 rd article in a horizontal direction,
setting a side of the vertical direction on which the 2 nd transfer device is provided with respect to the 1 st transfer device as a vertical direction specific side, and setting the 2 nd conveyor and the 3 rd conveyor on the vertical direction specific side with respect to the 1 st conveyor,
the 1 st conveyor and the 2 nd conveyor are provided at an interval at which transfer of the 1 st article between the 1 st transfer device and the 1 st conveyor and transfer of the 1 st article between the 2 nd transfer device and the 2 nd conveyor can be simultaneously performed,
the 1 st conveyor and the 3 rd conveyor are provided at an interval at which transfer of the 1 st article between the 1 st transfer device and the 1 st conveyor and transfer of the 2 nd article and the 3 rd article between the 2 nd transfer device and the 3 rd conveyor can be simultaneously performed.
2. The article handling apparatus of claim 1,
the vertical specific side is an upper side in the vertical direction.
3. The article handling apparatus of claim 1 or 2,
the 1 st article is larger in the vertical direction than the 2 nd article and the 3 rd article,
the 2 nd transfer device includes a1 st sensor for detecting the 1 st article, a2 nd sensor for detecting the 2 nd article and the 3 rd article,
the 1 st sensor is provided at a height where the 1 st article held by the 2 nd transfer device is present and at a height where the 2 nd article and the 3 rd article held by the 2 nd transfer device are absent,
the 2 nd sensor is provided at a height at which the 2 nd article held by the 2 nd transfer device exists and at a height at which the 3 rd article held by the 2 nd transfer device exists.
4. The article handling apparatus of claim 1 or 2,
the 1 st transfer device includes a1 st protrusion retracting mechanism and a1 st elevating mechanism, the 1 st protrusion retracting mechanism moves a1 st holding part holding the 1 st type article to a1 st retracted position and a1 st protrusion position protruding toward the 2 nd transfer device side with respect to the 1 st retracted position, the 1 st elevating mechanism moves the 1 st holding part in the vertical direction with respect to the 1 st protrusion retracting mechanism,
the 2 nd transfer device includes a2 nd protrusion/retraction mechanism and a2 nd lift mechanism, the 2 nd protrusion/retraction mechanism moves a2 nd holding part capable of holding any one of the 1 st article, the 2 nd article, and the 3 rd article to a2 nd retraction position and a2 nd protrusion position protruding toward the 2 nd conveyance device side with respect to the 2 nd retraction position, and the 2 nd lift mechanism moves the 2 nd holding part in the up-down direction with respect to the 2 nd protrusion/retraction mechanism.
5. The article handling apparatus of claim 1 or 2,
the 3 rd conveyor includes a determination device for determining whether the article being conveyed is the 2 nd article or the 3 rd article.
6. The article handling apparatus of claim 1 or 2,
the 1 st transfer device includes a1 st holding unit, the 1 st holding unit being configured to hold the 1 st article by supporting a bottom surface of the 1 st article from below,
the 2 nd transfer device includes a2 nd holding portion, and the 2 nd holding portion is configured to be capable of holding any one of a1 st held portion provided on an upper portion of the 1 st type article, a2 nd held portion provided on an upper portion of the 2 nd type article, and a3 rd held portion provided on an upper portion of the 3 rd type article.
7. The article handling apparatus of claim 6,
the 2 nd conveyor is provided so that the height of the 1 st held portion of the 1 st article conveyed by the 2 nd conveyor is the same as the height of the 2 nd held portion of the 2 nd article conveyed by the 3 rd conveyor.
8. The article handling apparatus of claim 1 or 2,
the article of the type 1 is a wafer container for housing semiconductor wafers,
the article of the aforementioned type 2 is an EUV mask storage container,
the article of type 3 is a reticle container for housing a reticle.
9. The article handling apparatus of claim 1 or 2,
further comprising a control part for controlling the operations of the 1 st transfer device, the 2 nd transfer device and the lifting body,
the 1 st transfer device is configured to be capable of performing a transfer operation between the 1 st article and the 2 nd conveying device in a shorter time than the 2 nd transfer device,
the control unit executes a1 st control of transferring the 1 st article from the 1 st conveyor to the 1 st transfer device, a2 nd control of transferring the 1 st article from the 2 nd conveyor to the 2 nd transfer device, a3 rd control of transferring the 2 nd article or the 3 rd article from the 3 rd conveyor to the 2 nd transfer device, and a 4 th control of transferring the 1 st article from the 2 nd conveyor to the 1 st transfer device, and if both the 2 nd control and the 4 th control can be executed, the 4 th control is preferentially executed.
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