JP6601360B2 - Goods transport equipment - Google Patents

Description

  The present invention relates to an article conveying facility including a first conveying apparatus that conveys an article and a second conveying apparatus that conveys a container.

  An example of such an article conveyance facility is described in Japanese Patent Laid-Open No. 2000-091401 (Patent Document 1). In the article transport facility of Patent Document 1, one transport device (transfer robot 76), a carry-in port (inlet / outlet port 81) into which a container (cassette) containing the article (reticle) is carried, and an article A storage unit (shelf 72A) and a container storage unit (cassette shelf 72B) are provided. The transport device includes a cassette hand 77 and a reticle hand 78, and one transport device is a first transport device that is a transport device that transports articles and a second transport device that is a transport device that transports containers. It is used for both. Then, the transfer device uses the cassette hand 77 to transfer the container carried into the carry-in port to the container storage unit. Further, the conveying device takes out the article from the container being stored in the container storage unit using the reticle hand 78 and conveys the article to the article storage unit, and the article in the article storage unit. In a storage container.

It is conceivable to use such an article transport facility to clean articles and containers. That is, an article cleaning port is installed instead of the article storage section, and a container cleaning port is installed instead of the container storage section. The article washing port is a port installed at a position corresponding to the first washing machine for washing the article, and the container washing port is a port installed at a position corresponding to the second washing machine for washing the container. is there.
In other words, the container before cleaning is transported from the loading port to the container cleaning port using the cassette hand of the transport device, and is cleaned from within the container located at the container cleaning port using the reticle hand of the transport device. The previous article is taken out and the article before washing is transported to the article washing port, and the washed article washed by the first washing machine is accommodated in the container located at the container washing port from the article washing port. It is possible to do.

Japanese Unexamined Patent Publication No. 2000-091401

  However, as described above, when the container or the article is conveyed by the conveying device, both the article before washing and the article after washing are conveyed by the reticle hand. Therefore, when the article before cleaning is conveyed by the reticle hand, contaminants such as dust adhering to the article before cleaning adhere to the reticle hand, and the article after cleaning is conveyed by the reticle hand. In addition, it is conceivable that the contaminated substance adhered to the reticle hand adheres to the cleaned article, so that the cleaned article is contaminated.

  Therefore, it is desired to realize an article transport facility that can avoid contamination of articles after washing.

  In view of the above, the characteristic configuration of the article transporting facility is that the first washing machine is installed at a position corresponding to a carry-in port into which the container containing the article is carried and a first washing machine for washing the article. The first cleaning port that supports the container containing the article before being cleaned by the first cleaning port and the first cleaning port is installed at a position corresponding to the first cleaning machine, and is taken out from the container and cleaned by the first cleaning machine. A second cleaning port that supports the article after being moved, a first transport device that transports the article, and a second transport device that transports the container. The second transfer device is installed separately from the one cleaning port, and the second transfer device transfers the container from the carry-in port to the first cleaning port, and the first cleaning of the container after the article is taken out. From the port to the second transport destination Performed, the first transport device is that for conveying from the second cleaning port of the article to the first transport destination.

  With this configuration, the container carried into the carry-in port is transported from the carry-in port to the first cleaning port by the second transport device. At this time, the container transported by the second transport device is a container before being cleaned by the second cleaning machine, and an article before being cleaned by the first cleaning machine is accommodated in this container. Then, the article is taken out from the container located at the first cleaning port, cleaned by the first cleaning machine, and then placed on the second cleaning port. Then, the cleaned article is transported from the second cleaning port to the first transport destination by the first transport device. In addition, the container which has been emptied after being taken out is transported from the first cleaning port to the second transport destination by the second transport device.

  The article before being cleaned by the first cleaning machine is carried into the carry-in port while being accommodated in the container, and is conveyed from the carry-in port to the first washing port by the second conveyance device while being accommodated in the container. Is done. Then, the article after being cleaned by the first cleaning machine is transported from the second cleaning port to the transport destination by the first transport device. In this way, the first transport device does not transport the article before being cleaned by the first cleaning machine, but only transports the article after being cleaned, so by transporting the article before being cleaned, By conveying the article after being cleaned by the dirty second transfer device, it is possible to avoid contamination of the article after being cleaned.

Top view of the goods transport facility Side view of goods transport equipment Explanatory drawing of container conveyance by 2nd stacker crane Explanatory drawing of conveyance of plate-like body by the first stacker crane Explanatory drawing of conveyance of a plate-shaped object by a 1st stacker crane, and conveyance of a container by the 2nd stacker crane Explanatory drawing of conveyance of a plate-shaped object by a 1st stacker crane, and conveyance of a container by the 2nd stacker crane Explanatory drawing of container conveyance by 2nd stacker crane Explanatory drawing of conveyance of plate-like body by the first stacker crane

Hereinafter, an embodiment of an article conveyance facility according to the present invention will be described with reference to the drawings.
As shown in FIG. 1, the article transport facility includes a storage shelf 4 that stores the plate-like body 1 and the container 2, a first stacker crane 5 that transports the plate-like body 1, and a second stacker that transports the container 2. A crane 6, a carry-in port 7 for carrying in containers, and a carry-out port 8 for carrying out containers are provided. Further, the article transport facility is provided with a wall body W, and the storage shelf 4, the first stacker crane 5, and the second stacker crane 6 are installed inside the wall body W.

  A first cleaning machine CL1 and a second cleaning machine CL2 are installed outside the wall body W so as to be adjacent to the wall body W. The first cleaning machine CL1 is a cleaning machine for cleaning the plate-like body 1, and the second cleaning machine CL2 is a cleaning machine for cleaning the container 2 after the plate-like body 1 is taken out. In the article transport facility, a first cleaning port 11 and a second cleaning port 12 installed for the first cleaning machine CL1, and a third cleaning port installed for the second cleaning machine CL2. 13 and a fourth cleaning port 14 are provided. The first cleaning port 11 is installed separately from the second cleaning port 12, and the fourth cleaning port 14 is installed separately from the third cleaning port 13.

  In the present embodiment, the plate-like body 1 is a photomask, and the shape in plan view is formed in a rectangular shape. The plate-like body 1 corresponds to an article. The container 2 is a container that can accommodate a specified number of plate-like bodies 1. The container 2 may be any of a hermetically sealed container that is provided with a lid and needs to be opened and closed, and an open container that is not equipped with a lid and does not need to be opened and closed. Good. However, when a sealed container is used, an opening / closing device for opening / closing the lid of the container 2 needs to be provided at a position where the lid needs to be opened / closed (for example, an unloading port 8 described later).

  Hereinafter, although each structure of an article conveyance equipment is explained, seeing in the up-and-down direction Z, the direction where the 1st washing machine CL1 and the 2nd washing machine CL2 are arranged is made into arrangement direction Y, and it intersects perpendicularly with this arrangement direction Y. The direction will be described as the front-rear direction X. In the front-rear direction X, the direction in which the first stacker crane 5 and the second stacker crane 6 are present with respect to the storage shelf 4 will be referred to as the front X1, and the opposite direction will be described as the rear X2. Further, in the arrangement direction Y, the direction in which the first cleaning machine CL1 exists with respect to the second cleaning machine CL2 will be described as a first direction Y1, and the opposite direction will be described as a second direction Y2.

As shown in FIG. 2, a first fan filter unit 16 is installed on the ceiling of the article transport facility. The first fan filter unit 16 is installed above the storage shelf 4, the first stacker crane 5, and the second stacker crane 6, and sucks the upper air and discharges the air downward. Thereby, in the wall W, a downflow is formed in which clean air flows downward from the ceiling side to the floor side.
A second fan filter unit 17 is installed on the wall body W. The second fan filter unit 17 is installed so as to be positioned on the rear X2 side with respect to the storage shelf 4. And the 2nd fan filter unit 17 attracts | sucks the air of back X2, and discharges it to front X1. Thereby, a flow of clean air is formed in the storage shelf 4 from the rear X2 to the front X1.
The floor F where the article transporting facility is installed is composed of a lower floor F1 and an upper floor F2 disposed above the lower floor F1. A space is formed, and a work space is formed between the upper floor F2 and the ceiling. The upper floor F2 is a grating floor, and a plurality of ventilation holes penetrating in the vertical direction Z are formed. The lower floor F <b> 1 is a floor that does not have a vent hole, and is configured of non-porous concrete in the present embodiment.

[Conveyor for loading and unloading]
As shown in FIG. 1, each of the carry-in conveyor 19 and the carry-out conveyor 20 is installed in the article transport facility in a state of penetrating the wall body W. The carry-in conveyor 19 and the carry-out conveyor 20 convey the container 2 that houses the plate-like body 1.
The carry-in conveyor 19 conveys the container 2 from a first carry-in position located outside the wall body W to a second carry-in position located inside the wall body W. The carry-in port 7 is configured by the end portion of the front X1 of the carry-in conveyor 19 located inside the wall body W in the carry-in conveyor 19. In other words, the carry-in port 7 is a port for supporting the container 2 located at the second carry-in position. Then, the container 2 is carried into the carry-in port 7 by carrying the container 2 from the first carry-in position to the second carry-in position by the carry-in conveyor 19. As described above, the carry-in port 7 is a port into which the container 2 containing the plate-like body 1 is carried.
The carry-out conveyor 20 conveys the containers 2 from the first carry-out position located inside the wall body W to the second carry-out position located outside the wall body W. The unloading port 8 is configured by an end portion of the unloading conveyor 20 located on the inner side of the wall W from the front X1 of the unloading conveyor 20. In other words, the carry-out port 8 is a port for supporting the container 2 located at the first carry-out position. And the container 2 is carried out from the port 8 for carrying out by conveying the container 2 from the 1st carrying-out position to the 2nd carrying-out position by the carrying-out conveyor 20. As described above, the carry-out port 8 is a port for carrying out the container 2 containing the plate-like body 1.

[Cleaning conveyor]
As shown in FIG. 1, each of the article cleaning equipment includes a first cleaning conveyor 21, a second cleaning conveyor 22, a third cleaning conveyor 23, and a fourth cleaning conveyor 24. It is installed in a state of penetrating through. The first cleaning conveyor 21 and the second cleaning conveyor 22 are installed with respect to the first cleaning machine CL1, and the third cleaning conveyor 23 and the fourth cleaning conveyor 24 are with respect to the second cleaning machine CL2. Installed.

  The first cleaning conveyor 21 transports the container 2 from the first position P1 located inside the wall body W to a position in close contact with the first cleaning machine CL1, and from the position in close contact with the first cleaning machine CL1 to the first. The container 2 is conveyed to the position P1. The first cleaning machine CL1 is equipped with a robot (not shown) that takes out the plate-like body 1 from the container 2. For this reason, the plate-like body 1 is accommodated in the container 2 which is transported from the first position P1 to the position in close contact with the first washing machine CL1 by the first washing conveyor 21. The plate-like body 1 is not accommodated in the container 2 transported from the position in close contact with the first cleaning machine CL1 to the first position P1. Thus, the 1st washing conveyor 21 conveys both the container 2 which accommodated the plate-shaped body 1, and the container 2 which does not accommodate the plate-shaped body 1. FIG. In addition, the container 2 conveyed by the 1st cleaning conveyor 21 and the plate-shaped body 1 accommodated in this are the container 2 (container 2 before cleaning) and the plate-shaped body 1 (before cleaning). It is the plate-shaped body 1) before washing | cleaning. The first cleaning port 11 is configured by an end portion of the front X1 of the first cleaning conveyor 21 located on the inner side of the wall body W in the first cleaning conveyor 21. In other words, the first cleaning port 11 is a port for supporting the container 2 located at the first position P1. The first cleaning port 11 is installed at a position corresponding to the first cleaning machine CL1 for cleaning the plate-like body 1 and contains the plate-like body 1 before being cleaned by the first cleaning machine CL1. 2 corresponds to the port supporting 2.

  The second washing conveyor 22 conveys the plate-like body 1 from the first washing machine CL1 to the second position P2 located inside the wall body W. In the first cleaning machine CL1, the plate-like body 1 (washed plate-like body 1) after being cleaned by the first cleaning machine CL1 is placed on the second cleaning conveyor 22. Therefore, the plate-like body 1 transported from the first washing machine CL1 to the second position P2 by the second washing conveyor 22 is the washed plate-like body 1. The second cleaning port 12 is configured by the end portion of the front X1 of the second cleaning conveyor 22 located inside the wall body W in the second cleaning conveyor 22. In other words, the second cleaning port 12 is a port for supporting the plate-like body 1 located at the second position P2. The second cleaning port 12 is installed at a position corresponding to the first cleaning machine CL1, and is a port that supports the plate-like body 1 after being removed from the container 2 and cleaned by the first cleaning machine CL1. Equivalent to.

  The third cleaning conveyor 23 conveys the containers 2 from the third position P3 located inside the wall body W into the second cleaning machine CL2. The container 2 conveyed by the third cleaning conveyor 23 is the container 2 (container 2 before cleaning) before being cleaned by the second cleaning machine CL2. The third cleaning port 13 is configured by an end portion of the third cleaning conveyor 23 located on the inner side of the wall body W and located in front of the third cleaning conveyor 23. In other words, the third cleaning port 13 is a port for supporting the container 2 located at the third position P3. The third cleaning port 13 corresponds to a port that is installed at a position corresponding to the second cleaning machine CL2 and supports the container 2 before being cleaned by the second cleaning machine CL2.

  The fourth cleaning conveyor 24 conveys the containers 2 from the second cleaning machine CL2 to the fourth position P4 positioned inside the wall body W. The container 2 transported by the fourth cleaning conveyor 24 is the container 2 (cleaned container 2) after being cleaned by the second cleaning machine CL2. The fourth cleaning port 14 is configured by the end portion of the front X1 of the fourth cleaning conveyor 24 located inside the wall body W in the fourth cleaning conveyor 24. In other words, the fourth cleaning port 14 is a port for supporting the container 2 located at the fourth position P4. The fourth cleaning port 14 corresponds to a port that is installed at a position corresponding to the second cleaning machine CL2 and supports the container 2 after being cleaned by the second cleaning machine CL2.

[Storage shelf]
The storage shelf 4 includes a plurality of storage units 26. The storage shelf 4 includes storage units 26 in a state where a plurality of storage shelves 4 are arranged in the vertical direction Z and the alignment direction Y. The storage shelf 4 includes a first storage unit 27 for storing the plate-like body 1 and a second storage unit 28 for storing the container 2 as the storage unit 26. The storage shelf 4 includes a first storage unit 27 and a second storage unit 28 such that the first storage unit 27 is positioned in the first direction Y1 with respect to the second storage unit 28 in the arrangement direction Y.
The storage shelf 4 further includes a carry-in port 7 (carry-in conveyor 19), a carry-out port 8 (carry-out conveyor 20), a first washing port 11 (first washing conveyor 21), and a second washing. Port 12 (second cleaning conveyor 22), third cleaning port 13 (third cleaning conveyor 23), fourth cleaning port 14 (fourth cleaning conveyor 24), and an inspection unit 29 described later. ing.

  In the present embodiment, a pair of storage shelves 4 are installed in a state of being aligned in the front-rear direction X, and in the front-rear direction X, the first stacker crane 5 and the second stacker crane 6 are installed between the pair of storage shelves 4. Yes. One storage shelf 4 of the pair of storage shelves 4 is provided with a carry-in port 7 and a carry-out port 8, and the other storage shelf 4 of the pair of storage shelves 4 has a first cleaning port. 11, a second cleaning port 12, a third cleaning port 13, a fourth cleaning port 14, and an inspection unit 29 are provided. Each of the first storage unit 27 and the second storage unit 28 is provided in both of the pair of storage shelves 4. In the present embodiment, the inspection unit 29 includes two inspection units 29, a first inspection unit 30 and a second inspection unit 31. The first inspection unit 30 inspects the appearance of the plate-like body 1 such as particles or pattern defects. The second inspection unit 31 measures (measures) the size of the plate-like body 1 such as the length, width, and thickness of the plate-like body 1.

  As shown in FIG. 2, as the second storage unit 28, the second storage unit 28 </ b> A after cleaning for storing the container 2 after cleaning and the second before cleaning for storing the container 2 before cleaning. And a storage unit 28B. The second storage unit 28B for before cleaning is provided below the second storage unit 28A after cleaning. The second storage unit 28A for post-cleaning and the second storage unit 28B for pre-cleaning that are adjacent to each other in the vertical direction Z are partitioned by a partition 32. The partition 32 is formed of a non-porous plate-like material so that air does not flow between the second storage unit 28A for cleaning and the second storage unit 28B for cleaning adjacent to each other in the vertical direction Z. ing.

[Stacker crane]
As shown in FIG. 1, each of the first stacker crane 5 and the second stacker crane 6 is configured to be movable in the alignment direction Y. The first stacker crane 5 is a stacker crane that conveys the plate-like body 1. The second stacker crane 6 is a stacker crane that conveys the container 2. The first stacker crane 5 is on the first direction side with respect to the second stacker crane 6. The moving path M1 of the first stacker crane 5 and the moving path M2 of the second stacker crane 6 have portions that overlap in the alignment direction Y. The first stacker crane 5 corresponds to a first transfer device that transfers the plate-like body 1, and the second stacker crane 6 corresponds to a second transfer device that transfers the container 2.

  As shown in FIG. 2, the second stacker crane 6 includes a traveling carriage 33 that travels in the alignment direction Y, a mast 34 that is erected on the traveling carriage 33, a lifting body 35 that moves up and down along the mast 34, A transfer device 36 supported by the body 35. Although detailed description is omitted, the transfer device 36 includes a support body that supports the container 2 and a link mechanism that moves the support body in the front-rear direction X. The transfer device 36 is configured to be able to transfer the container 2 from the second transfer source S2 to itself and to transfer the container 2 from the second transfer source S2 to the second transfer destination G2. The first stacker crane 5 is configured in the same manner as the second stacker crane 6 except that the plate-like body 1 is supported by the support body of the transfer device 36.

[Port positional relationship]
Of the first cleaning port 11, the second cleaning port 12, the third cleaning port 13, the fourth cleaning port 14, the carry-in port 7, and the carry-out port 8, the second cleaning port 12 is the first. The fourth cleaning port 14 is installed closest to the second direction Y2 while being installed on the first direction Y1 side. In the present embodiment, the first cleaning port 11, the second cleaning port 12, the third cleaning port 13, and the fourth cleaning port 14 are directed to the second cleaning port 12, The first cleaning port 11, the third cleaning port 13, and the fourth cleaning port 14 are arranged in this order. Thus, the 2nd washing port 12 which the 1st stacker crane 5 makes a transportation origin or a transportation destination is the 1st washing port 11 and the 3rd washing port which the 2nd stacker crane 6 makes a transportation source or a transportation destination. 13 and the fourth cleaning port 14 so as to be positioned in the first direction Y1.

  The carry-in port 7 and the carry-out port 8 are arranged in the order of the carry-in port 7 and the carry-out port 8 in the second direction Y2. The carry-in port 7 and the carry-out port 8 are arranged in the alignment direction Y, the end on the first direction Y1 side of the second cleaning port 12, and the end on the second direction Y2 side of the fourth cleaning port 14, It is installed to be located between. Since the carry-in port 7 and the carry-out port 8 serve as the conveyance source or conveyance destination of both the first stacker crane 5 and the second stacker crane 6, the movement path of the first stacker crane 5 in the alignment direction Y. It is installed in a region where M1 and the movement path M2 of the second stacker crane 6 overlap. In the first direction Y 1 from the second cleaning port 12, only the first storage unit 27 of the first storage unit 27 and the second storage unit 28 is installed. Only the second storage unit 28 of the first storage unit 27 and the second storage unit 28 is installed in the direction Y2.

[Transport form]
The first stacker crane 5 conveys the plate-like body 1 from the first conveyance source S1 to the first conveyance destination G1. The first stacker crane 5 uses the second cleaning port 12, the first inspection unit 30, the second inspection unit 31, and the first storage unit 27 as the first transport source S1, and the first inspection unit 30 and the second inspection unit 31. The first storage unit 27 and the carry-out port 8 are set as the first transfer destination G1. That is, as a specific example, the first stacker crane 5 conveys the plate-like body 1 from the first conveyance source S1 to the first conveyance destination G1 as follows.
As shown in FIG. 4, the first stacker crane 5 uses the second cleaning port 12 as the first transport source S1 and the first inspection unit 30 as the first transport destination G1 for the second cleaning of the plate-like body 1. Transport from the port 12 to the first inspection unit 30 is performed. As shown in FIG. 5, the first stacker crane 5 includes the first inspection unit 30 of the plate-like body 1 with the first inspection unit 30 as the first conveyance source S1 and the second inspection unit 31 as the first conveyance destination G1. To the second inspection unit 31. As shown in FIG. 6, the 1st stacker crane 5 makes the 2nd test | inspection part 31 the 1st conveyance source S1, the 1st storage part 27 the 1st conveyance destination G1, and the 2nd inspection part 31 of the plate-shaped body 1. As shown in FIG. To the first storage unit 27. As shown in FIG. 8, the first stacker crane 5 starts from the first storage unit 27 of the plate-like body 1 with the first storage unit 27 as the first transport source S1 and the unloading port 8 as the first transport destination G1. Transport to the port 8 for unloading. Specifically, the first stacker crane 5 performs the first storage of the plate-like body 1 with the first storage unit 27 as the first transport source S1 and the container 2 positioned at the unloading port 8 as the first transport destination G1. Transport from the section 27 to the container 2 of the port 8 for unloading is performed.
Moreover, the 1st stacker crane 5 makes the 2nd test | inspection part 31 the 1st conveyance source S1, the port 8 for carrying out is made into the 1st conveyance destination G1, and the plate-shaped body 1 is taken from the 2nd inspection part 31 to the port 8 for carrying out. In some cases, the plate 1 is transported by the first stacker crane 5 and the combination of the transport source and the transport destination is not limited to the illustrated one.

  The second stacker crane 6 transports the container 2 from the second transport source S2 to the second transport destination G2. The second stacker crane 6 uses the carry-in port 7, the first washing port 11, the fourth washing port 14, and the second storage unit 28 as the second transfer source S <b> 2, the carry-out port 8, and the first washing port 11. The third cleaning port 13 and the second storage unit 28 are the second transport destination G2. The second stacker crane 6 has the unloading port 8 and the second storage unit 28 as the third transport destination, and the fourth cleaning port 14 of the second transport destination G2 is the second transport source S2. In addition, the port to which the container is transported and the storage unit 26 are the third transport destination.

That is, as a specific example, the second stacker crane 6 transports the container 2 from the second transport source S2 to the second transport destination G2 as follows. As shown in FIG. 3, the second stacker crane 6 has a first port from the carry-in port 7 of the container 2 with the carry-in port 7 as the second transport source S2 and the first cleaning port 11 as the second transport destination G2. Transport to the cleaning port 11 is performed. As shown in FIG. 5, the second stacker crane 6 uses the first cleaning port 11 as the second transport source S2 and the third cleaning port 13 as the second transport destination G2. The container 2 is transported to the cleaning port 13. As shown in FIG. 6, the second stacker crane 6 uses the fourth cleaning port 14 as the second transport source S2 and the second storage unit 28 as the second transport destination G2 (third transport destination). Transport from the fourth cleaning port 14 to the second storage unit 28 is performed. As shown in FIG. 7, the second stacker crane 6 is used for carrying out from the second storage unit 28 of the container 2 with the second storage unit 28 as the second transfer source S2 and the carry-out port 8 as the second transfer destination G2. Transport to port 8.
In addition, when the container 2 is carried into the carry-in port 7 but another container 2 exists in the first washing port 11, the container 2 in the carry-in port 7 cannot be conveyed to the first washing port 11. The second stacker crane 6 conveys the container 2 from the carry-in port 7 to the second storage unit 28 using the carry-in port 7 as the second conveyance source S2 and the second storage unit 28 as the second conveyance destination G2. When the container 2 can be transported to the first cleaning port 11, the second stacker crane 6 uses the second storage unit 28 as the second transport source S2 and sets the first cleaning port 11 to the first cleaning port 11. As the second transport destination G2, the container 2 is transported from the second storage unit 28 to the first cleaning port 11. Thus, the combination of the conveyance source and the conveyance destination to which the container 2 is conveyed by the second stacker crane 6 is not limited to the illustrated one.

As shown in FIG. 1, the article transport facility includes a control unit H that controls the first stacker crane 5 and the second stacker crane 6. The first stacker crane 5 and the second stacker crane 6 are controlled by the control unit H so as to transport the plate-like body 1 and the container 2 as follows.
As indicated by a virtual line (two-dot chain line) in FIG. 3, the container 2 is carried into the carry-in port 7 by the carry-in conveyor 19. The container 2 carried into the carry-in port 7 is the container 2 before washing, and the container 2 accommodates the plate-like body 1 before washing. And the control part H controls the 2nd stacker crane 6 so that the container 2 carried in to the carrying-in port 7 may be conveyed from the carrying-in port 7 to the 1st washing | cleaning port 11 (refer FIG. 3). Execute container transfer control. The container 2 transported to the first cleaning port 11 is transported to a position in close contact with the first cleaning machine CL1 by the first cleaning conveyor 21, and then the container is transported by a robot (not shown) of the first cleaning machine CL1. The plate-like body 1 is taken out from 2, and the plate-like body 1 is cleaned by the first cleaning machine CL1. The plate-like body 1 after being cleaned by the first cleaning machine CL1 is placed on the second cleaning conveyor 22 by the robot of the first cleaning machine CL1, and as shown in FIG. 3, the second cleaning conveyor 22 is placed. Is transferred to the second cleaning port 12. The container 2 from which all of the plate-like body 1 has been taken out is transported to the first cleaning port 11 from the position where it is in close contact with the first cleaning machine CL1 by the first cleaning conveyor 21.

  The controller H controls the second stacker crane 6 so as to transport the container 2 of the first cleaning port 11 from the first cleaning port 11 to the third cleaning port 13 (see FIG. 5). Execute transport control. The container 2 transported by the second stacker crane 6 by the second container transport control is the container 2 before cleaning, and the container 2 accommodates the plate-shaped body 1 before cleaning. Then, as shown in FIG. 5, the uncleaned container 2 conveyed to the third cleaning port 13 is transported into the second cleaning machine CL2 by the third cleaning conveyor 23 and cleaned by the second cleaning machine CL2. Is done. The container 2 after being washed by the second washing machine CL2 is conveyed to the fourth washing port 14 by the fourth washing conveyor 24.

  The controller H controls the second stacker crane 6 so as to transport the container 2 of the fourth cleaning port 14 from the fourth cleaning port 14 to the second storage unit 28 (see FIG. 6). Execute control. Then, when the plate-like body 1 is accommodated in the container 2 and the container 2 is carried out, the control unit H carries the second stacker so as to carry it from the second storage unit 28 to the carrying-out port 8 (see FIG. 7). 4th container conveyance control which controls the crane 6 is performed. The container 2 transported by the second stacker crane 6 by the third container transport control and the fourth container transport control is the container 2 after cleaning, and the plate 2 is not accommodated in the container 2.

  The controller H controls the first stacker crane 5 so as to transport the plate-like body 1 of the second cleaning port 12 from the second cleaning port 12 to the first inspection unit 30 (see FIG. 4). The plate-shaped body conveyance control is executed. The control unit H controls the first stacker crane 5 so as to transport the plate-like body 1 that has been inspected by the first inspection unit 30 from the first inspection unit 30 to the second inspection unit 31 (see FIG. 5). 2nd plate-shaped object conveyance control is performed. The control unit H controls the first stacker crane 5 so that the plate-like body 1 that has been inspected by the second inspection unit 31 is transported from the second inspection unit 31 to the first storage unit 27 (see FIG. 6). 3rd plate-shaped object conveyance control is performed. Then, when the control unit H accommodates the plate-like body 1 in the container 2 and carries out the container 2, the control unit H conveys the plate-like body 1 of the first storage unit 27 from the first storage unit 27 to the unloading port 8 ( As shown in FIG. 8, the fourth plate-like body conveyance control for controlling the first stacker crane 5 is executed. The plate 1 conveyed by the first stacker crane 5 by the first plate conveyance control, the second plate conveyance control, the third plate conveyance control, and the fourth plate conveyance control is It is a plate-like body 1. In the fourth plate-shaped body conveyance control, when the plate-shaped body 1 is conveyed to the unloading port 8 by the first stacker crane 5, the first stacker crane 5 positions the plate-shaped body 1 at the unloading port 8. The plate-like body 1 is conveyed to the carry-out port 8 so as to be accommodated in the container 2 to be carried out.

2. Other Embodiments Next, other embodiments of the article transport facility will be described.

(1) In the above embodiment, the first cleaning port 11 is installed on the first direction Y1 side with respect to the second cleaning port 12, but the first cleaning port 11 and the second cleaning port 12 are installed. The position may be changed as appropriate. For example, the first cleaning port 11 may be installed in the second direction Y2 with respect to the second cleaning port 12, and when viewed in the vertical direction Z, the first cleaning port 11 and the second cleaning port. 12 may be installed so as to overlap, and the first cleaning port 11 and the second cleaning port 12 may be installed at the same position in the alignment direction Y. In addition, the installation positions of the third cleaning port 13 and the fourth cleaning port 14 and the installation positions of the carry-in port 7 and the carry-out port 8 are the same as the first cleaning port 11 and the second cleaning port 12. Similarly, you may change suitably.
In the above embodiment, the fourth cleaning port 14 is provided separately from the third cleaning port 13. However, the third cleaning port 13 is provided with the function of the fourth cleaning port 14, and the third cleaning port 14 is provided. The cleaning port 13 may be shared with the fourth cleaning port 14. Further, although the carry-out port 8 is provided separately from the carry-in port 7, the carry-in port 7 may be provided with the function of the carry-out port 8, and the carry-in port 7 may be shared with the carry-out port 8. .

(2) In the above embodiment, the second stacker crane 6 transports the container 2 that has been cleaned by the second cleaning machine CL2 and does not contain the plate-like body 1 to the unloading port 8, and the first stacker crane 5 The plate-like body 1 after being cleaned by the first cleaning machine CL1 is transported to the carry-out port 8 so that the plate-like body 1 is accommodated in the container 2 located at the carry-out port 8, and the container 2 Although the plate-like body 1 is accommodated in the container 2, the plate-like body 1 may be accommodated in the container 2 by another configuration. Specifically, for example, the container stacking port is provided separately from the unloading port 8, and the second stacker crane 6 cleans the container 2 that is cleaned by the second cleaning machine CL2 and does not store the plate-like body 1. The first stacker crane 5 transports the container 1 to the container accommodating port, and the first stacker crane 5 accommodates the plate 1 after being cleaned by the first washing machine CL1 in the container 2 located at the container accommodating port. May be conveyed to the container accommodating port. In this case, the container 2 in which the plate-like body 1 is accommodated by the second stacker crane 6 is conveyed from the container accommodation port to the carry-out port 8. In addition, for example, a plate-like body port is provided separately from the carry-out port 8, and the second stacker crane 6 is used for carrying out the container 2 that has been washed by the second washing machine CL2 and does not contain the plate-like body 1. The first stacker crane 5 is transported to the port 8 and transports the plate-like body 1 after being cleaned by the first washing machine CL1 to the plate-like body port. Then, the plate-like body 1 is transported from the plate-like body port to the carry-out port 8 so that the plate-like body 1 is housed in the container 2 positioned at the carry-out port 8 by the separately provided housing robot. Also good.

(3) In the above embodiment, the first stacker crane 5 is configured to support the bottom surface of the plate-like body 1 from below, but the configuration for supporting the plate-like body 1 in the first stacker crane 5 is appropriately changed. For example, the first stacker crane 5 may be configured to support the upper surface of the plate-like body 1 from above by suction.
Although the 2nd stacker crane 6 was constituted so that the bottom of container 2 may be supported from the lower part, the composition which supports container 2 in the 2nd stacker crane 6 may be changed suitably, for example, the 2nd stacker crane 6 is changed. The upper part of the container 2 may be supported and the container 2 may be supported so as to be suspended.

(4) In the above embodiment, among the first cleaning port 11, the second cleaning port 12, the third cleaning port 13, the fourth cleaning port 14, the carry-in port 7, and the carry-out port 8, Only the first storage unit 27 of the first storage unit 27 and the second storage unit 28 is installed in the first direction Y1 from the port positioned on the one direction Y1 side. You may install both the 1st storage part 27 and the 2nd storage part 28 in the 1st direction Y1 from the port to carry out. Of the first cleaning port 11, the second cleaning port 12, the third cleaning port 13, the fourth cleaning port 14, the carry-in port 7, and the carry-out port 8, it is located closest to the second direction Y 2. Only the second storage unit 28 of the first storage unit 27 and the second storage unit 28 is installed in the second direction Y2 from the port to be operated, but the second direction from the port located closest to the second direction Y2 side You may install both the 1st storage part 27 and the 2nd storage part 28 in Y2.

(5) In the above-described embodiment, the third cleaning port 13 and the fourth cleaning port 14 are installed at a position where the second stacker crane 6 can deliver the container 2. You may change suitably the position which installs the port 14 for washing | cleaning. Specifically, for example, the third cleaning port 13 and the fourth cleaning port 14 are installed outside the wall body W, and the container 2 that does not contain the plate-like body 1 before cleaning is carried out. 8 and the container 2 unloaded from the unloading port 8 is transported to the third cleaning port 13 by an external transport device, and the container 2 that does not contain the plate-like body 1 after cleaning is externally transferred. The container 2 may be transported from the fourth cleaning port 14 by a transport device, and the container 2 may be transported from the transport port 7. Further, the second cleaning machine CL2, the third cleaning port 13 and the fourth cleaning port 14 may not be provided.

(6) In the above embodiment, the article is a photomask, but other plate-like bodies 1 such as wafers may be used, and the shape of the article is other than a plate-like shape such as a cubic shape or a round bar shape. But you can.

(7) Note that the configurations disclosed in the above-described embodiments can be applied in combination with the configurations disclosed in other embodiments as long as no contradiction arises. Regarding other configurations, the embodiments disclosed herein are merely examples in all respects. Accordingly, various modifications can be made as appropriate without departing from the spirit of the present disclosure.

3. Outline of the above-described embodiment Hereinafter, an outline of the article transport facility described above will be described.

  The article transport facility is installed at a position corresponding to a first port for carrying in the article containing the article and the first washing machine for washing the article, and the article before being washed by the first washing machine. A first cleaning port that supports the container containing the container and a position corresponding to the first cleaning machine, and supports the article that has been removed from the container and cleaned by the first cleaning machine A second cleaning port; a first transport device for transporting the article; and a second transport device for transporting the container. The second cleaning port is installed separately from the first cleaning port. The second transport device transports the container from the carry-in port to the first cleaning port, and from the first cleaning port of the container after the article is taken out to the second transport destination. The first transfer device , To convey from the second cleaning port of the article to the first transport destination.

  With this configuration, the container carried into the carry-in port is transported from the carry-in port to the first cleaning port by the second transport device. At this time, an article before being cleaned by the first cleaning machine is accommodated in the container transported by the second transport device. Then, the article is taken out from the container located at the first cleaning port, cleaned by the first cleaning machine, and then placed on the second cleaning port. Then, the cleaned article is transported from the second cleaning port to the first transport destination by the first transport device. In addition, the container which has been emptied after being taken out is transported from the first cleaning port to the second transport destination by the second transport device.

  The article before being cleaned by the first cleaning machine is carried into the carry-in port while being accommodated in the container, and is conveyed from the carry-in port to the first washing port by the second conveyance device while being accommodated in the container. Is done. Then, the article after being cleaned by the first cleaning machine is transported from the second cleaning port to the transport destination by the first transport device. In this way, the first transport device does not transport the article before being cleaned by the first cleaning machine, but only transports the article after being cleaned, so by transporting the article before being cleaned, By conveying the article after being cleaned by the dirty second transfer device, it is possible to avoid contamination of the article after being cleaned.

  A third cleaning port installed at a position corresponding to a second cleaning machine for cleaning the container after the article is taken out and supporting the container before being cleaned by the second cleaning machine; A fourth cleaning port installed at a position corresponding to the second cleaning machine and supporting the container after being cleaned by the second cleaning machine, wherein the fourth cleaning port is The second cleaning device is installed separately from the third cleaning port or shared with the third cleaning port, and the second transfer device is configured to transfer the second transfer from the first cleaning port of the container after the article is taken out. It is preferable that the transfer to the third cleaning port as the destination and the transfer of the container from the fourth cleaning port to the third transfer destination are performed.

  According to this configuration, the container transported from the first cleaning port to the third cleaning port by the second transport device and cleaned by the second cleaning machine is removed from the fourth cleaning port by the second transport device. It is transported to the third transport destination. In this way, the container can be cleaned by the second cleaning machine, and the container is transported from the fourth cleaning port to the third transport destination by the second transport device, compared to a case where a separate transport device is provided, Simplification of the configuration of the article transport facility can be achieved.

  Here, the direction in which the first washing machine and the second washing machine are arranged is an arrangement direction, and the direction in which the first washing machine exists with respect to the second washing machine in the arrangement direction is the first direction, With the opposite direction as the second direction, each of the first transfer device and the second transfer device is configured to be movable in the alignment direction, and the first transfer device is configured to move the first transfer device relative to the second transfer device. Preferably, the moving path of the first transfer device and the moving path of the second transfer device have a portion that overlaps in the arrangement direction.

  According to this configuration, the first transport device and the second transport device are the same by disposing the transport destination in a portion where the travel path of the first transport device and the travel path of the second transport device overlap in the alignment direction. Articles and containers can be transported to the transport destination. Therefore, for example, the container cleaned by the second transport device can be transported to the transport destination, and the cleaned article can be transported to the transport destination so as to be accommodated in the container positioned at the transport destination. In this way, it is possible to provide an article conveyance facility that is easy to use.

  In addition, a first storage unit for storing the article, and a second storage unit for storing the container, the first transport device from the second cleaning port of the article Transport to the first storage unit as a first transport destination is also performed, and the second transport device also transports the container from the fourth cleaning port to the second storage unit as the third transport destination. It is preferred to do so.

  According to this configuration, the cleaned article can be stored in the first storage unit, and the cleaned container can be stored in the second storage unit. The first storage unit or the second storage unit is used when the cleaned article is stored in the cleaned container and the timing for completing the cleaning of the article is different from the timing for completing the cleaning of the container. Can be used as a buffer for temporarily storing articles and containers.

  The first cleaning port, the second cleaning port, and the third cleaning direction are defined as a first direction in which the first cleaning machine exists with respect to the second cleaning machine, and a direction opposite to the first direction. Of the cleaning port, the fourth cleaning port, and the carry-in port, the second cleaning port is installed closest to the first direction and the fourth cleaning port is positioned closest to the second direction. In the first direction from the second cleaning port, only the first storage unit of the first storage unit and the second storage unit is installed, and from the fourth cleaning port It is preferable that only the second storage unit among the first storage unit and the second storage unit is installed in the second direction.

  According to this configuration, in the arrangement direction, the first cleaning port, the second cleaning port, the third cleaning port, the fourth cleaning port, and the carry-in port are disposed between the first storage unit and the second storage unit. These ports can be integrated and installed. Therefore, when an article or container is conveyed from a port to another port, the article or container can be efficiently conveyed. Further, since only the first storage unit for storing articles is installed in the first direction from the second cleaning port installed on the most first direction side, the second transport for transporting the container is performed. The movement path of the second transport device can be shortened by preventing the apparatus from moving in the first direction from the second cleaning port. Further, since only the first storage unit for storing the container is installed in the second direction from the fourth cleaning port installed on the most second direction side, the first transport for transporting the articles is performed. The movement path of the first transport device can be shortened by preventing the apparatus from moving in the second direction from the fourth cleaning port. Thus, since the movement path | route of a 1st conveying apparatus and a 2nd conveying apparatus can be shortened, the conveyance of the articles | goods by a 1st conveying apparatus and the conveyance of a container by a 2nd conveying apparatus can be performed efficiently.

  In addition, the apparatus further includes a carry-out port for carrying out the container containing the article, and the second transfer device is used for carrying out the container that has been washed by the second washing machine and does not contain the article. Preferably, the first conveying device conveys the article to the carry-out port so that the article cleaned by the first washing machine is accommodated in the container positioned at the carry-out port. is there.

  According to this structure, after the container which has not accommodated the article is conveyed to the port for unloading by the second conveying device, and the article is accommodated in the container, The article is transported to the unloading port. In this way, by storing the article in the container using the unloading port, the container storing the article, for example, when the cleaned article is stored in the container at a place other than the unloading port. The container can be efficiently carried out because the carrying process of carrying the container to the carrying-out port is not necessary.

  The technology according to the present disclosure can be used for an article conveyance facility for conveying an article or a container to a port installed at a position corresponding to a cleaning machine.

1: Plate-shaped body (article)
2: Container 5: First stacker crane (first transport device)
6: Second stacker crane (second transport device)
7: carrying-in port 8: carrying-out port 11: first washing port 12: second washing port 13: third washing port 14: fourth washing port 27: first storage unit 28: second storage unit CL1: First cleaning machine CL2: Second cleaning machine M1: Movement path M2: Movement path Y: Arrangement direction Y1: First direction Y2: Second direction

Claims (6)

A port for carrying in a container containing an article;
A first cleaning port that supports the container that houses the article before being cleaned by the first cleaning machine installed at a position corresponding to the first cleaning machine that cleans the article;
A second cleaning port that is installed at a position corresponding to the first cleaning machine and supports the article after being taken out of the container and cleaned by the first cleaning machine;
A first transport device for transporting the article;
A second transport device for transporting the container,
The second cleaning port is installed separately from the first cleaning port,
The second transport device transports the container from the carry-in port to the first cleaning port, and transports the container after the article is taken out from the first cleaning port to the second transport destination. And
The first transfer device is an article transfer facility for transferring the article from the second cleaning port to a first transfer destination. A third cleaning port installed at a position corresponding to a second cleaning machine for cleaning the container after the article is taken out and supporting the container before being cleaned by the second cleaning machine;
A fourth cleaning port installed at a position corresponding to the second cleaning machine and supporting the container after being cleaned by the second cleaning machine;
The fourth cleaning port is installed separately from the third cleaning port or shared with the third cleaning port,
The second transport device transports the container after the article is taken out from the first cleaning port to the third cleaning port as the second transport destination, and the fourth of the container. The article conveyance facility according to claim 1, wherein conveyance is performed from the cleaning port to the third conveyance destination. The direction in which the first washing machine and the second washing machine are arranged is an arrangement direction, the direction in which the first washing machine is present with respect to the second washing machine in the arrangement direction is the first direction, and the opposite direction is the direction. As the second direction,
Each of the first transport device and the second transport device is configured to be movable in the alignment direction,
The first transport device is on the first direction side with respect to the second transport device,
The article conveyance facility according to claim 2, wherein a movement path of the first conveyance device and a movement path of the second conveyance device have a portion overlapping in the arrangement direction. A first storage unit for storing the article; and a second storage unit for storing the container;
The first transport device also transports the article from the second cleaning port to the first storage unit as the first transport destination,
The said 2nd conveying apparatus is an article conveyance equipment of Claim 2 or 3 which also conveys to the said 2nd storage part as said 3rd conveyance destination from the said 4th washing | cleaning port of the said container. The direction in which the first cleaner is present with respect to the second cleaner is the first direction, and the opposite direction is the second direction.
Of the first cleaning port, the second cleaning port, the third cleaning port, the fourth cleaning port, and the carry-in port, the second cleaning port is closest to the first direction side. And the fourth cleaning port is installed closest to the second direction side,
Only the first storage part of the first storage part and the second storage part is installed in the first direction from the second cleaning port,
5. The article conveying facility according to claim 4, wherein only the second storage unit among the first storage unit and the second storage unit is installed in the second direction from the fourth cleaning port. It further comprises a carry-out port for carrying out the container containing the article,
The second transport device transports the container that does not contain the article to the unloading port,
The said 1st conveying apparatus conveys the said goods to the said port for carrying out so that the said goods wash | cleaned by the said 1st washing machine may be accommodated in the said container located in the said port for carrying out. The article conveying facility according to claim 1.

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