TW201719796A - Conveying device capable of preventing foreign matters, such as dust, from entering the storage container for storing substrates and ensure the high cleanness - Google Patents

Abstract

The present invention provides a conveying device capable of preventing foreign matters, such as dust, from entering the storage container for storing substrates and ensure the high cleanness, and can also be constructed at a low cost with no need of highly flexible cables. When the storage container 20 is moved between the conveying trolley 50 and the storage rack 13, the container pad 28 for non-contact power supply of FFU (Fan Filter Unit) 224, which is used for supplying air to the storage container 20, is not only away from the conveying trolley pad 58 but also away from the storage rack pad 18, thereby stopping the air supply. During the process of stopping the air supply, the internal pressure of the storage container 20 raised by FFU 24 until the start of transfer may be used to prevent the introduction of external dust, so as to ensure the cleanness inside the storage container 20.

Description

Handling device

The present invention relates to an apparatus for transporting a container for storing articles, and more particularly to a transport apparatus for transporting a storage container for storing articles requiring high cleanliness such as a glass substrate or a semiconductor substrate.

In order to improve the yield in the manufacture of a precision panel such as a flat panel display or a semiconductor component, when used in a manufacturing apparatus for a glass substrate used in the manufacturing process of a flat panel display or in the manufacturing process of a semiconductor element When processing a material substrate such as a semiconductor wafer (such as a silicon wafer), it is required to ensure high cleanliness of the substrate so as to prevent an undesired external substance such as dust from adhering to the substrate.

Therefore, when the substrates are transported in a device such as a manufacturing plant, a rectangular storage container in which a plurality of substrates can be arranged in the vertical direction is used as disclosed in Patent Document 1. A fan filter unit (FFU) (air supply filter) is attached to one of the openings formed at both ends of the rectangular storage container. According to this method, the FFU continuously feeds the air cleaned by the filter into the storage container, thereby ensuring the cleanliness in the storage container.

However, in order for the FFU to continue to blow air into the storage container, it is necessary to supply electric power for driving the fan to the FFU. Therefore, in the transport device disclosed in Patent Document 1, the power receiving unit of the contactless power supply device is provided in the storage container, and the power receiving unit of the contactless power supply device supplies power to the FFU in a non-contact manner, and is further used for In the storage compartment in which the storage container is housed, the power supply unit of the contactless power supply device is provided, and the storage container is stored in the storage compartment, and the storage container is non-contacted from the power supply unit of the storage compartment. The power receiving unit supplies electric power, thereby securing the driving power of the FFU.

Here, in order to continue the power supply in the non-contact mode, it is necessary to maintain the state in which the power supply unit (power transmission unit) of the contactless power supply device is close to the power receiving unit, and the carrier device disclosed in Patent Document 1 is used to move within the device. Since the stacker crane transports the storage container, the power supply unit and the power receiving unit are separated while the storage container is being transported by the stacker crane. Therefore, in Patent Document 1, a battery that accumulates electric power supplied to the storage container is provided, and the FFU is driven by electric power stored in the battery while the power supply unit is separated from the power receiving unit.

However, if the battery is mounted one by one in the storage container that is used in a large amount in the device, the cost of the device construction will become high, and in the long term, the battery will have a function due to the life, so that it is necessary to replace the battery operation time, thereby operating the device. The cost also becomes higher.

Therefore, as shown in FIG. 8(a), a power feeding pad is provided in advance on a fork 85 that moves from the main body portion of the stacker crane 80 toward the storage compartment 81 at the time of transfer ( Pad) 89b (send appliances). During the transfer period, as long as power is supplied from the power transmission pad 89b on the fork 85 to the power receiving pad 89a (receiver) of the storage container 82, the FFU 84 can be continuously driven during the transfer period. According to this method, since it is not necessary to install a battery in each of the storage containers 82, the apparatus can be constructed at a lower cost than when the battery is used, and the number of man-hours for replacing the battery or the like is not required, and the operating cost of the apparatus can be reduced. Prior art literature

Patent Document 1: Japanese Patent Laid-Open Publication No. 2011-91270

[Problems to be Solved by the Invention] However, in the transfer operation of the storage container 82, when the fork 85 is closest to the storage compartment 81 (the fork 85 is further toward the storage compartment 81 side than the position shown in Fig. 8(a) In order to prevent the power feeding pad 89b on the side of the fork 85 from colliding with the power transmitting pad 88b on the side of the storage compartment 81, the fork 85 is closest to the position of the power feeding pad 89b on the side of the fork 85 when the compartment 81 is accommodated, and the storage compartment 81. The position of the side of the power transmission pad 88b must be different. Therefore, in the storage container 82, in addition to the power receiving pad 89a for receiving power supply to the fork 85, a power receiving pad 88a for receiving power supply in the storage compartment 81 is attached. The two power receiving pads 88a and 89a are disposed at spaced positions. In particular, as shown in FIGS. 8(a) and 8(b), when the power receiving pad 88a and the power receiving pad 89a are disposed apart from each other in the width direction of the fork 85, the storage compartment 81 for supplying power to each of them is provided. The power feeding pad 88b on the side and the power transmitting pad 89b on the side of the fork 85 are also disposed at positions different from each other in the width direction. Therefore, in the transfer operation of the storage container 82, the power feeding pad 89b on the side of the fork 85 does not overlap with the storage compartment 81. The side of the power feeding pad 88b collides.

As shown in Fig. 8(a), when the storage container 82 is placed on the fork 85, power is supplied from the power transmission pad 89b on the fork 85 side to the power receiving pad 89a for the fork 85, as shown in Fig. 8(b). In the case where the storage container 82 is located in the storage compartment 81, power is supplied from the power transmission pad 88b on the storage compartment 81 side to the power receiving pad 88a for the storage compartment 81, and the power supply to the FFU 84 is continuously supplied. .

However, in order to reduce the cost of each storage container 82, it is assumed that the battery is not mounted. However, in this configuration, two power receiving pads 88a and 89a are required for one storage container 82, so that the cost of each storage container 82 is finally consumed. The cost becomes higher.

Further, when the power transmission pad 89b is provided on the fork 85 that moves between the main body portion of the stacker crane 80 and the storage compartment 81 during the transfer operation, the cable for supplying power to the power transmission pad 89b must be Following the movement of the fork 85, it is necessary to guide an expensive cable having high flexibility over a long distance, and the cost of the cable wiring is also high.

As described above, in the conventional method, in order to ensure high cleanliness in the storage container 82, there is a problem that the cost of the apparatus for constructing the conveyance device becomes high. Therefore, an object of the present invention is to provide a transport device that can ensure high cleanliness in a storage container for storing articles such as a substrate, and can be constructed at low cost. [Means for solving the problem]

In order to solve the problem, the transport device of the present invention transports a storage container for storing articles, wherein the transport device includes a transport member that transports the storage container, and a storage unit that stores the storage container. The transporting member has a transfer device that transfers the storage container between the transport member and the storage unit, the storage container having the cleaned air sent to the storage container In the air blowing device, a power transmitting member is provided in each of the transporting member and the storage unit, and the power transmitting member stores the storage container while the transport member is transported by the storage unit During the storage of the container, the operating power is supplied from the transporting member or the storage unit to the air blowing device, and the storage container is received between the transporting member and the storage unit by the transfer device. During the transfer, the air blower can maintain the state in which the internal pressure is higher than the surrounding environment by the air blow performed until the start of the transfer, thereby being able to be transferred. Preventing a foreign substance within the room from the surroundings flows. More specifically, the transport device according to the present invention includes a transport member that transports the storage container, and a storage unit that stores the storage container, the storage container having a container main body and having a storage for storing the inside of the container a ventilation device that sends the cleaned air into the storage space; and a container receiver for receiving the operating power of the air blowing device that is supplied in a non-contact manner, the carrying member having: support And a transfer member that moves the support portion between the transport position on the transport member side and the storage position on the storage unit side; and transporting the component feeder, the transporting The component feeder supplies power to the container receiver of the storage container supported by the support portion at the transport position by a non-contact method, and the storage unit has a storage rack for storage The storage container; and the storage unit power transmitter, the container power receiver of the storage container stored in the storage rack is not connected Providing power transmission, wherein the transfer member moves the support portion in a state in which the storage container is supported between the transfer position and the storage position, thereby allowing the storage container to be in the The transporting member and the storage unit are mutually transferred, and the storage container is movable by the air blowing device while being moved between the transport position and the storage position by the transfer member. The air blown up to the time before the start of the movement maintains the state in which the internal pressure is higher than the surrounding environment, thereby preventing the inflow of foreign matter from the surrounding environment during the movement. According to this configuration, while the storage container is being transferred, the internal pressure in the storage space prevents the inflow of foreign matter such as dust. Therefore, even if the air blower such as the FFU is not stopped by the power supply during the transfer, the storage space can be secured. High cleanliness inside.

Further, in addition to the above configuration, the conveying device of the present invention may have a first opening connected to the storage space on the first surface of the outer surface of the container body, and facing the first surface. A second opening facing the first opening is formed on the second surface, and the first opening is opened or closed by attaching and detaching the cover to the first surface, and the air blowing device is attached to the first opening. In the second surface, the air blowing device blows air from the second opening toward the first opening closed by the lid, whereby the internal pressure of the storage space is higher than the surrounding environment. According to this configuration, the air sent from the air blowing device is the first opening that is sent to the position facing the air blowing device. However, since the first opening is closed by the lid, the air cannot flow out of the storage space. The air sent to the first opening does not flow out of the outside, and the air is continuously supplied from the second opening by the air blowing device, so that the density of the air in the storage space becomes higher than the surrounding environment. Thus, the internal pressure in the storage space is reliably improved. Further, the outflow of the air in the nano space toward the surrounding environment is blocked by the cover body, so that the internal pressure does not immediately drop even if the air supply of the air blowing device is stopped.

Further, in addition to the above configuration, the transporting device of the present invention may further include a rotating table that rotates the support portion and the transfer member in a horizontal plane, and the rotating table is mounted on the rotating table. An extension frame in which the transfer member extends in a direction opposite to the moving direction of the support portion, and the transfer member power transmitter is mounted to the extension frame. According to this configuration, the transporting member power transmitter can be provided outside the turntable or even outside the support portion. Therefore, even when the storage container is supported by the support portion, the arrangement of the container receiver is located outside the support portion, and the power supply to the container receiver can be supplied from the carrier member to the outside of the support portion without any problem. Further, since the extending direction of the extension frame and the moving direction of the support portion are reversed, the expansion frame does not hinder the movement of the support portion.

Further, in addition to the above-described configuration, the transport device of the present invention may be arranged such that the container power receiver, the storage unit power transmitter, and the transport member power transmitter are disposed, and the storage unit power transmitter is connected to the container power receiver of the storage container stored in the storage unit. The relative position of the transport member is the same as the relative position of the container receiver of the storage container supported by the support portion of the transport member at the transport position. According to this configuration, the storage container is in the state of being stored by the storage unit or in the state of being transported by the transport member, and the positional relationship between the power transmitter for the non-contact power supply and the power receiver is the same, and therefore the storage unit can be stored in the storage unit. The non-contact power supply in the non-contact power supply in the handling component makes the electromagnetic condition uniform. Therefore, in addition to the transfer operation, the operation of the air blowing device can be kept constant, and the internal pressure in the storage space can be ensured, thereby ensuring that the cleanliness is fixed. [Effects of the Invention]

According to the present invention, even when the air blowing device is stopped during the transfer of the storage container, the high cleanliness in the storage container can be ensured. Therefore, it is also possible to provide the support portion that moves in the transfer direction while supporting the storage container during the transfer. Electrical appliances. Therefore, it is not necessary to guide the high-flexible cable which can follow the movement of the support portion over a long distance, so that the wiring cost can be suppressed low. Further, if the power transmitter is not provided in the support portion that moves between the transport member and the storage unit during the transfer operation, the power transmitter on the support portion side and the power transmitter on the storage unit side may not be collided during the transfer operation. Since it is possible, the conveying member power transmitter and the storage unit power transmitter can be disposed in the same width direction position. According to this configuration, the air blowing device can receive power supply by the same container power receiver during transportation by the transport member or during storage by the storage unit, and thus the power receiver mounted in the storage container Only one container can be powered. That is, since it is no longer necessary to install two power receivers in the storage container, the cost of each storage container can be kept low. Therefore, the construction of the transport device can be performed at low cost.

An example of an embodiment of the conveying device of the present invention will be described with reference to Figs. 1 to 7 . (Transportation Device) In the transport device 10 schematically shown in FIG. 1 , a flat article such as a glass substrate is transported while being stored in the storage container 20 . The transport carriage 50 (stack crane), which is a transport member for transporting the storage container 20, moves in the transport device 10 along a transport path extending in the transport direction W. A rack 11 as a storage portion for storing the storage container 20 is disposed on the side of the transfer direction Y that intersects the conveyance direction W at a right angle to the conveyance path of the conveyance cart 50. Further, in the drawings, in order to facilitate understanding of the positional relationship between the members, the storage container 20 and the members attached to the storage container 20 may be indicated by imaginary lines.

(Storage Unit) In the transport apparatus 10 shown in FIG. 1 and FIG. 2, the two racks 11 as the storage unit are provided to face each other so as to be spaced apart from each other by the transport path of the transport vehicle 50. In other words, when the transport carriage 50 is oriented in the transport direction W along the transport path, the shelves 11 are provided on the left and right sides, and the travel path of the transport carriage 50 is set between the left and right shelves 11 . In the rack 11, a plurality of storage racks 13 are provided so as to be arranged along the conveyance direction W, and the storage racks 13 can store the storage containers 20, respectively. Moreover, as shown in the schematic side view of FIG. 2, in the vertical direction H, the storage rack 13 of the upper and lower stages is also superimposed. The shelf 11 has a plurality of columns 16 extending in the vertical direction H. As shown in FIG. 1, the respective storage shelves 13 are divided by the columns 16 with respect to the conveying direction W. Further, the shelf plate 17 is provided so as to be placed between the two columns 16 arranged along the transfer direction Y, and as shown in FIG. 2, the vertical direction H is divided by the shelf plate 17. Each storage rack 13 is taken out. As shown in FIG. 1, the shelf plate 17 is not greatly expanded in the conveyance direction W, but extends only to the end of the conveyance direction W formed in the space between the pillars 16 arranged in the conveyance direction W (shelf pillar) Near 16). Accordingly, the one storage rack 13 includes the two shelf plates 17 of the shelf plate 17 on the left side and the shelf plate 17 on the right side when the transfer direction Y is viewed from the transport carriage 50, and the two shelf shelves are provided in the two shelves The plates 17 are spaced apart from each other. When the transfer direction Y is viewed from the transport carriage 50, the distance between the left and right columns 16 is larger than the width of the storage container 20, and the interval between the shelf plates 17 is smaller than the width of the storage container 20. Therefore, when the storage container 20 is stored in the storage rack 13, the both end portions in the width direction are supported by the two shelf plates 17 respectively. Further, on one side of the two shelf plates 17 included in one storage rack 13 (here, the right side from the conveyance carriage 50 toward the transfer direction Y), the side closer to the conveyance path of the conveyance carriage 50 (from The end portion of the front side when the transport vehicle 50 is viewed is provided as a storage unit power transmission unit (power transmission member), and a storage rack mat 18 for contactless power supply is provided. The storage shelf pad 18 is formed by a plate in which a coil is embedded, which generates a magnetic flux by flowing a current from an external power source.

(Storage Container) FIG. 3 shows a configuration of the storage container 20 to be transported in the transport device 10. The storage container 20 has a rectangular tubular container body 25 that is open to the opposite sides in a substantially rectangular parallelepiped shape, and the inside of the container body 25 serves as a storage space for accommodating articles in the substrate storage space 27 so as to be vertically movable. A plurality of flat articles (not shown) such as a glass substrate are arranged in a plurality of sheets, and a plurality of substrate mounting cells 27a capable of supporting the substrates in a mounted state are vertically disposed. A shutter 21 as a lid body and an FFU 24 (fan filter unit) as a blowing device are attached to the two openings of the container body 25, that is, the first opening portion 25a and the second opening portion 25b. The substrate to be stored is introduced into and out of the substrate housing space 27 from the first opening 25a. Further, the first opening portion 25a is closed by the shutter 21 during a period other than the entry and exit of the substrate. When the FFU 24 is attached to the FFU mounting plate 22 that can cover the second opening 25b, the FFU 24 is oriented from the second opening 25b toward the first state when the second opening 25b is covered by the FFU mounting plate 22. The opening 25a is in a posture to blow air. Further, on the FFU mounting plate 22, as a container receiver, a container pad 28 is attached, and the container pad 28 receives driving power to the fan of the FFU 24 from the outside by a contactless power supply method. The container pad 28 is formed by a plate in which a coil is embedded, and the coil generates a current corresponding to fluctuations in external magnetic flux. Each of the baffle 21 and the FFU mounting plate 22 includes a plurality of engaging portions 21a and 22a, and the baffle 21 and the FFU mounting plate 22 are lowered downward in the vertical direction H, and the engaging portions 21a and 22a are hooked. The first opening portion 25a and the second opening portion 25b are closed by the flap 21 and the FFU mounting plate 22, respectively, by being hooked to the locking portions 26a and 26b provided on the side surface of the container body 25.

(Transporting Carriage) The transporting carriage 50 as a transporting member shown in FIG. 1 is a traveling crane such as a stacker crane that can travel in the transport direction W on a rail that is laid along a predetermined transport path in the transport device 10. . The transport vehicle 50 includes a fork 55 as a support portion for supporting the storage container 20, and the transport vehicle 50 is moved on the rail while the storage container 20 is supported by the fork 55, thereby performing the inside of the transport device 10. The storage container 20 is transported. Further, the transport carriage 50 has two masts 51 arranged in the transport direction W, and the mast 51 extends in the vertical direction H as shown in FIG. The fork 55 can be moved up and down along the mast 51 in the vertical direction H, and the transport carriage 50 can be moved up and down in the vertical direction H by the fork 55 supporting the storage container 20, whereby the storage container 20 can be moved in the vertical direction H. The position is aligned with each of the upper and lower storage racks 13. In addition, during the period in which the fork 55 is moved up and down in the vertical direction H or during the rotation described later, the movement of the transport carriage 50 in the transport direction W may be temporarily stopped. However, such a temporary stop state is also reached as a destination. In the present embodiment, it is considered that not only the period in which the transport carriage 50 travels in the transport direction W but also the period in which the lift/rotate is performed is supported on the fork 55 in the present embodiment. In the state in which the container 20 is accommodated, the storage container 20 is being transported by the transport vehicle 50 except for the transfer operation described later.

(Rotating Table) As shown in FIGS. 4 and 5, the transporting carriage 50 has a rotating table 53 between the masts 51, and the fork 55 is attached to the rotating table 53 via a flexing arm 52 as a transfer member. The transfer device is constituted by the flexing arm 52 and the fork 55. The turntable 53 rotates the flexing arm 52 and the fork 55 in a horizontal plane, whereby the posture of the flexing arm 52 and the fork 55 can be changed. Moreover, the turntable 53, the flexing arm 52, and the fork 55 are mounted on the elevating table 57, and the whole is raised and lowered in the vertical direction H. By rotating the fork 55 and the flexing arm 52 by the turntable 53, it is possible to switch which one of the shelves 11 provided on the left and right sides of the conveyance direction W is to be transferred. In FIG. 1, the fork 55 has a posture in which the longitudinal direction thereof coincides with the conveyance direction W. However, in FIG. 4, the fork 55 is rotated by 90° from the posture in FIG. 1 by the rotary table 53, and becomes a long-side direction and shift. A posture in which the direction Y is uniform.

(Fork) The fork 55 includes a substantially rectangular plate having a short side dimension smaller than the interval between the two shelf plates 17 of the storage rack 13. The fork 55 can be moved in the horizontal direction by bending the extension arm 52. In particular, when the flexion arm 52 is flexed and extended in the posture in which the longitudinal direction of the fork 55 shown in FIG. 4 coincides with the transfer direction Y, the fork 55 is moved in the transfer direction Y. When the fork 55 is moved in the transfer direction Y by the flexion and extension of the flexion arm 52, as shown in FIGS. 5 and 7, the conveyance position 55a of the fork 55 on the rotary table 53 (on the conveyance member side) and the storage rack 13 The storage position 55b of the inside (the storage unit side) moves between. When the fork 55 supporting the storage container 20 is rotated as shown in FIG. 4 and the longitudinal direction is aligned with the transfer direction Y, the fork 55 is moved from the conveyance position 55a to the storage position 55b. The fork 55 is inserted between the shelf plates 17 as shown in Fig. 6, whereby the storage container 20 can be fed into the storage rack 13.

(Expansion Frame) As shown in FIGS. 1 to 7, the expansion frame 59 is attached to the turntable 53 in addition to the flexion arm 52. The extension frame 59 has a T-shaped shape as shown in FIG. 6, and the tip end of the T-shaped vertical side portion is attached to the turntable 53. Further, as shown in Fig. 7, the T-shaped longitudinal side portion extends to the side opposite to the direction in which the flexing and extending arm 52 projects, and is bent upward to be connected in a side view in an L shape to be connected to the T-shaped lateral side portion. Further, as shown in FIG. 6, a transporting vehicle pad 58 for contactless power supply is provided as a transporting member power transmitting unit (power transmitting member) on one end side of the T-shaped lateral side portion. The transport carriage pad 58 is formed by a plate in which a coil is embedded, which generates a magnetic flux by flowing a current from an external power source.

(Transfer Operation) Here, the transfer operation when the storage container 20 conveyed by the transport carriage 50 is transferred to the storage rack 13 will be described. First, the fork 55 that supports the storage container 20 is raised in the vertical direction H to a position slightly above the shelf plate 17, and is rotated so that the longitudinal direction of the fork 55 coincides with the transfer direction Y. Therefore, as shown in FIG. 5, the storage container 20 is placed in the state of the entrance of the storage rack 13. Subsequently, when the flexing arm 52 is extended to move the fork 55 from the carrying position 55a to the storage position 55b, and then the fork 55 is lowered to the lower side of the shelf plate 17, due to the shelving plates 17 between each other The interval is larger than the short-side direction of the fork 55 and shorter than the width of the storage container 20, so that the fork 55 passes between the shelf plates 17 and on the other hand, the storage container 20 is placed on the shelf plate 17 to become FIG. The state shown. Thus, the storage container 20 supported by the fork 55 is transferred to the shelf plate 17 as shown in FIG. The transfer of the storage container 20 is completed by itself, but the flexing arm 52 is contracted to return the fork 55 to the carrying position 55a, and the fork 55 and the flexing arm 52 are rotated by the rotating table 53 to return to the fork 55. The posture in which the long-side direction coincides with the conveyance direction W is such that the conveyance trolley 50 can be turned to the next work. Moreover, in order to take out the storage container 20 stored in the storage rack 13, and transfer it to the conveyance trolley 50, the fork 55 is inserted in the vertical direction H, and the shelf board 17 is inserted in the position below the shelf board 17 slightly. After the state (the state of FIG. 7), the fork 55 is raised, whereby the storage container 20 can be transferred from the shelf plate 17 to the fork 55. Then, the flexing and contraction arm 52 is contracted to pull the fork 55 in a state in which the storage container 20 is supported at the storage position 55b into the transport position 55a on the transport carriage 50 side (the state of FIG. 5), whereby the storage container 20 is removed from the storage container 20 The storage rack 13 is transferred to the transport carriage 50.

(Before the start of the transfer) The case where the storage container 20 is transferred from the transport carriage 50 to the storage rack 13 in the substrate storage space 27 will be described. As shown in FIG. 4 and FIG. 5, the transporting carriage mat 58 on the power transmitting side that is the contactless power supply is in a state of being close to the container mat 28 on the power receiving side, so that the FFU is supplied by contactless power supply. 24 continues to supply drive power. Therefore, the fan of the FFU 24 continuously feeds the cleaned air through the filter into the substrate housing space 27. In this state, air is supplied into the substrate housing space 27 by the FFU 24, whereby the internal pressure of the storage container 20 is higher than the surrounding environment, and external substances such as dust cannot enter the substrate housing space 27 from the surrounding environment. Therefore, high cleanliness in the substrate accommodation space 27 is ensured, and dust or the like does not adhere to the substrate housed in the storage container 20.

(Transfer) During the movement of the fork 55 from the transport position 55a to the storage position 55b for transfer, the container pad 28 mounted in the storage container 20 on the fork 55 will be away from the transport carriage pad 58, so the FFU 24 does not The supply of the driving power is again received, and the air supply of the FFU 24 is stopped. However, as shown in FIG. 3, the storage container 20 has the first opening 25a and the second opening 25b which are connected to the substrate housing space 27, and are closed by the shutter 21 and the FFU mounting plate 22, respectively, and have a sealed structure. The air inside 27 cannot escape to the outside. Therefore, the internal pressure of the substrate accommodation space 27 which is raised by the FFU 24 on the fork 55 of the conveyance position 55a is maintained higher than the surrounding environment until the start of the transfer. Since the internal pressure of the substrate housing space 27 is still higher than the surrounding environment, even if the air blowing of the FFU 24 is stopped during the transfer, the foreign matter cannot enter the substrate housing space 27 from the surrounding environment, thereby ensuring high cleanliness in the substrate housing space 27. Sex.

(After completion of the transfer) When the transfer container is completed and the storage container 20 is supported by the shelf plate 17 in the storage rack 13 as shown in Figs. 6 and 7, the storage tray of the power transmission side of the non-contact power supply is provided. 18 is close to the container pad 28, so the drive power is supplied to the FFU 24 again. Therefore, after the transfer is completed, the FFU 24 restarts the air supply in the substrate accommodation space 27, so that the substrate accommodation space 27 continues to maintain a high internal pressure, thereby ensuring the cleanliness in the substrate accommodation space 27. As described above, in the transport apparatus 10 of the present embodiment, although the air blow of the FFU 24 is interrupted during the transfer, the height in the substrate storage space 27 can be ensured from the start of the transfer until the completion of the transfer. Cleanliness.

(Advantages of the present embodiment) In the transport device 10 of the present embodiment, even if the FFU 24 is stopped during transfer, the cleanliness in the substrate housing space 27 can be ensured, so that it is not necessary to continuously supply power to the FFU 24 during transfer. . Therefore, the transport carriage mat 58 on the extension frame 59 does not have to follow the movement of the fork 55 in the transfer direction toward the transfer direction Y. Therefore, it is not necessary to use a highly flexible cable for wiring, and the transport device 10 can be constructed at low cost. Further, in the present embodiment, the non-contact power supply pad attached to the storage container 20 for the supply of the driving power of the FFU 24 may be one container pad 28, and it is not necessary to use FIG. 8(a) and FIG. 8(b). Two power pads 88a, 89a are provided in the prior art as shown. Therefore, the cost required to prepare each of the storage containers 20 can be suppressed to be low.

Further, in the present embodiment, the first opening 25a and the second opening 25b which are connected to the substrate housing space 27 are closed, and the storage container 20 is in a sealed state. Therefore, the substrate storage space 27 is opened by the air blow by the FFU 24. When the internal pressure is increased, then even if the air supply is stopped, the internal pressure is hard to fall. Therefore, even if it takes a little time to transfer, there is no possibility that the internal pressure drops and the external matter flows into the substrate accommodation space 27 during this period.

Further, in the present embodiment, since the transporting carriage mat 58 is provided on the extension frame 59 attached to the turntable 53, the transporting carriage mat 58 can be provided outside the fork 55 as shown in Figs. 4 and 5 . Therefore, the position of the transport carriage cushion 58 can be adjusted by appropriately designing the shape of the extension frame 59 such that the container cushion 28 is located outside the fork 55 even when the storage container 20 is supported on the fork 55 as shown in FIG. The container pad 28 can also be contactlessly powered at the outer position of the fork 55. Further, the expansion frame 59 extends in a direction opposite to the direction in which the flexion and extension arms 52 are bent, that is, the direction in which the forks 55 move. Therefore, the extension frame 59 does not interfere with the flexion and extension of the flexion and extension arms 52 and the movement of the forks 55. Further, since the extension frame 59 and the conveyance pad 58 are rotated together with the fork 55, power supply to the container mat 28 can be continued until the transfer operation is started by the flexion and extension of the flexion arm 52. Further, as long as the shape of the extension frame 59 is appropriate, the positional relationship between the conveyance pad 58 and the container pad 28 in a state in which the storage container 20 shown in FIGS. 4 and 5 is supported by the fork 55 of the conveyance position 55a can be obtained. The positional relationship between the storage shelf pad 18 and the container pad 28 in the state in which the storage container 20 shown in FIGS. 6 and 7 is stored in the storage rack 13 is the same. Therefore, the electromagnetic conditions of the contactless power supply can be made the same regardless of whether the storage container 20 is stored in the storage rack 13 or in the state of being transported by the transport carriage 50. The operation of the FFU 24 can be fixed, and the internal pressure and the cleanliness in the substrate housing space 27 can be stably maintained.

(Modification) In the present embodiment, as shown in FIG. 3, the FFU 24 blows air from the second opening 25b that faces the first opening 25a that serves as the substrate entrance and exit. However, the air blowing direction is not limited thereto. The internal pressure in the substrate housing space 27 can be increased by blowing air. For example, air can be blown from the upper surface side of the storage container 20. Further, in the present embodiment, both the FFU 24 and the container pad 28 are attached to the second opening 25b side. However, if the FFU 24 is connected to the container pad 28 by a cable, the FFU 24 may be attached to the container pad 28. Face (such as the upper surface). Further, in the present embodiment, the FFU 24 is attached to the FFU mounting plate 22, and the FFU mounting plate 22 is detachably attached to the second opening 25b, whereby the second opening 25b can be opened or closed. However, the surface on the side where the FFU 24 is mounted in the storage container 20 can also be always closed. That is, a configuration may be adopted in which the FFU mounting plate 22 is formed on one surface of the container body 25, and the FFU 24 is attached to the FFU mounting plate 22 integrated with the container body 25.

Further, in the present embodiment, the positional relationship between the power transmitting side and the power receiving side of the contactless power supply is the same in the storage rack 13 or on the fork 55 of the transport position 55a, but the relative positions may not be strict. In the same manner, the pads (the storage tray pad 18 and the transporting carriage pad 58) on the power transmitting side are placed in close contact with the power receiving side pad (container pad 28) so as to be in the transfer operation (the flexing arm 52) The non-contact power supply to the FFU 24 may be performed during periods other than the expansion and contraction period.

Further, in the present embodiment, the transport carriage pad 58 is attached to the turntable 53 via the extension frame 59. However, it is not always necessary to provide the extension frame 59, and the configuration of the transport carriage 50, the storage container 20, the storage rack 13 and the like may be changed, in particular The arrangement of the conveyance carriage mat 58 is changed in accordance with the arrangement of the container mat 28 and the storage rack mat 18. For example, when the turntable 53 has a shape that expands to the outside of the fork 55 in plan view, the conveyance pad 58 can be directly attached to the turntable 53 that is outside the fork 55.

Further, in the present embodiment, the container pad 28, the storage shelf pad 18, and the transporting carriage pad 58 are configured to be powered and received by the contactless power supply method, but the generation of dust or sparks accompanying the mechanical contact is to be taken. The countermeasures and the measures for performing the accurate alignment may also be such that the pads are configured to be in contact with the power supply mode, that is, the power supply is performed by, for example, bringing the metal terminal land that is expanded into a planar shape into contact with each other. .

Further, in the present embodiment, the transporting vehicle 50 that travels on the rail that is laid along the transport path is used as the transporting member to transport the storage container 20, but the transporting member is not limited thereto, and may be, for example, a slave device. A top transport vehicle or the like that carries the storage container 20 in a state in which the top side is suspended. In addition, the storage unit is not limited to the storage rack 13 of the present embodiment. For example, the storage container 20 may be placed on a pallet provided with a contactless power supply device. Further, instead of the storage unit being constituted by the plurality of storage racks 13 as in the present embodiment, a single storage rack may be used.

10‧‧‧Transportation device
11‧‧‧ Shelf
13‧‧‧Safety rack
16‧‧‧ column
17‧‧‧Shelf board
18‧‧‧Custody mat
20, 82‧‧‧ storage containers
21‧‧‧Baffle
21a, 22a‧‧‧Clocking Department
22‧‧‧FFU mounting plate
24, 84‧‧‧FFU
25‧‧‧ container body
25a‧‧‧1st opening
25b‧‧‧2nd opening
26a, 26b‧‧‧ carding
27‧‧‧Substrate storage space
27a‧‧‧Substrate placement grid
28‧‧‧Container pad
50‧‧‧Transportation trolley
51‧‧‧ mast
52‧‧‧Flexible arm
53‧‧‧Rotating table
55, 85‧‧‧ fork
55a‧‧‧Transportation location
55b‧‧‧Custody location
58‧‧‧Transportation trolley mat
59‧‧‧Extension framework
80‧‧‧Head height crane
81‧‧‧ Storage compartment
88a, 89a‧‧‧electric pads
88b, 89b‧‧‧ power pad
H‧‧‧Down direction
W‧‧‧Transportation direction
Y‧‧‧Transfer direction

Fig. 1 is a plan view showing an example of an embodiment of a conveying device according to the present invention. Fig. 2 is a schematic side view of the conveying device shown in Fig. 1; Fig. 3 is a perspective view showing a storage container used in the conveying device of the embodiment. 4 is a schematic plan view showing a state before the transporting carriage is placed in the storage unit in the transport device according to the embodiment. Figure 5 is a view of the arrow A-A of Figure 4; Fig. 6 is a schematic plan view showing a state in which the flexing arms of the transporting trolley shown in Figs. 4 and 5 are extended. Figure 7 is a B-B arrow view of Figure 6. 8(a) and 8(b) are schematic plan views showing a state of power supply to the FFU of the storage container in the prior art, and Fig. 8(a) is a view showing a state in which the storage container is loaded while being supported by the fork. Fig. 8(b) is a view showing a state in which the storage container is placed in the storage compartment.

10‧‧‧Transportation device

11‧‧‧ Shelf

13‧‧‧Safety rack

16‧‧‧ column

17‧‧‧Shelf board

18‧‧‧Custody mat

20‧‧‧ storage container

24‧‧‧FFU

28‧‧‧Container pad

50‧‧‧Transportation trolley

51‧‧‧ mast

52‧‧‧Flexible arm

53‧‧‧Rotating table

55‧‧‧ fork

58‧‧‧Transportation trolley mat

59‧‧‧Extension framework

W‧‧‧Transportation direction

Y‧‧‧Transfer direction

Claims (5)

A transporting device for transporting articles, wherein the transporting device includes a transporting member that transports the storage container, and a storage unit that stores the storage container, wherein the transporting member has a transfer device The transfer device transfers the storage container between the transport member and the storage unit, and the storage container has a blower that sends cleaned air to the storage container. Each of the transporting member and the storage unit is provided with a power transmitting member that is configured to transport the storage container by the transport member and to store the storage container by the storage unit. The transporting member or the storage unit supplies operating power to the air blowing device, and the storage container is capable of being transferred between the transporting member and the storage unit by the transfer device. By the blowing of the air blowing device until the start of the transfer, the internal pressure is maintained higher than the surrounding environment, thereby preventing the transfer from being carried out during the transfer. Since the external material flow into the surrounding environment. The transport device according to claim 1, wherein the storage container further includes: a container body having a storage space capable of accommodating articles therein; and a container power receiver for receiving the supply by a non-contact method The operation power of the air blowing device, the transfer device includes a support portion for supporting the storage container, and a transfer member that moves the support portion on the transport member side and the storage portion Moving between the storage positions on the side, the conveying member has a conveying member feeding device, and the conveying member feeding device is the container receiving device of the storage container supported by the support portion at the conveying position. Power transmission by a non-contact method includes: a storage rack for storing the storage container; and a storage unit power supply for the container of the storage container stored in the storage rack The power receiver transmits power by a non-contact method, and the transfer member moves the support portion in a state in which the storage container is supported Moving between the position and the storage position, the storage container can be transferred between the transport member and the storage unit, and the storage container is transported by the transfer member During the period of movement between the position and the storage position, the air blower can maintain the state in which the internal pressure is higher than the surrounding environment by the air blow performed until the start of the movement, thereby preventing the coming from being moved during the movement. The external matter in the surrounding environment flows in. The conveying device according to the second aspect of the invention, wherein the first surface of the outer surface of the container body is formed with a first opening connected to the storage space, and the first opening facing the first surface A second opening facing the first opening is formed on the second surface, and the first opening is opened or closed by attaching and detaching the lid to the first surface, and the air blowing device is attached to the first opening. In the second surface, the air blowing device blows air from the second opening toward the first opening that is closed by the lid, whereby the internal pressure of the storage space is higher than the surrounding environment. The conveying device according to claim 2, wherein the conveying member has a rotary table that rotates the support portion and the transfer member in a horizontal plane, and the rotary table is mounted on the rotary table An extension frame in which the transfer member extends in the opposite direction to the moving direction of the support portion, and the transfer member power transmitter is attached to the extension frame. The transport device according to any one of the above-mentioned claims, wherein the container power receiver, the storage unit power transmitter, and the transport member power transmitter are disposed in the storage unit. a relative position of the appliance to the container receiver of the storage container stored in the storage unit, and the support portion of the conveyance member at the conveyance position with respect to the conveyance member The relative positions of the container receivers of the supported storage containers are the same.