TWI413610B - Substrate transport facility - Google Patents

Abstract

The invention provides a substrate conveying device which can accurately perform the transferring of substrates by a substrate transferring device; the substrate conveying device comprises a container, a container conveying device and a position adjusting mechanism; the container comprises a container body and a carrying support component, wherein the container body comprises an entrance for the substrate and a substrate containing space which can contain a plurality of substrates at intervals in vertical direction; the carrying support component can support the container body and comprises a fan filter unit supplying clean air to the substrate containing space while carrying and supporting the container body; the container conveying device conveys the container to a support platform in a manner that the carrying support component carrying and supporting the container body is carried and supported over the support platform; the position adjusting mechanism is directly abutted against the container body in the state that the container is carried and supported by the support platform, and the position adjusting mechanism adjusts the position of the container body in horizontal direction to the position for transferring the substrates where the substrate transferring device transfers the substrates via the entrance.

Description

Substrate transfer equipment Field of invention

The present invention relates to a substrate transfer apparatus including a container transfer device that transports a container to a substrate transfer support table, and the container has a state that can be arranged at intervals in the vertical direction The substrate for accommodating the plurality of substrates; and the substrate transfer device for loading and holding the substrate supported by the support table, and taking out the substrate and the substrate through the pick-and-place port formed at the side of the container.

Background of the invention

The substrate transfer apparatus is used when transporting a substrate such as a glass substrate used for a liquid crystal display or a plasma display. The substrate transfer apparatus transports the substrate according to the following configuration, that is, the substrate storage container that has the plurality of substrates stored therein is transported to the support table by the container transport device, and the substrate transfer device is placed on the support and supported by the substrate transfer device. In the substrate storage container, the substrate is taken out, or the substrate is placed in the substrate storage container supported by the support table by the substrate transfer device, and the plurality of substrates are accommodated from the support table by the container transfer device. The storage container for the substrate. In addition, when a substrate requiring high cleanliness such as a glass substrate is stored in a substrate storage container, a partial cleaning technique is employed, and the partial cleaning technique is provided with a fan filter unit (FFU) that supplies clean air to the substrate storage space. Further, the cleanliness of the substrate storage space inside the substrate storage container is improved compared to the outside.

A conventional example of such a substrate storage container is disclosed in Japanese Laid-Open Patent Publication No. 2008-094494. The storage container for a substrate disclosed in Japanese Laid-Open Patent Publication No. 2008-094494 is constituted by a container body that forms a pick-and-place port and a substrate storage space, and a cover frame that is provided with a switch. The cover of the pick-and-place port; and the frame for the FFU are provided with a fan filter unit that supplies clean air to the substrate storage space. Further, the cover frame system is detachably attached to one end side of the container body forming the pick-and-place port, and the FFU frame body is detachably attached to the other end side of the container body. Moreover, in this conventional example, the support stage mounts the support substrate storage container in the form of supporting the container main body which can form the bottom of the substrate storage container. The container transport apparatus transports the substrate storage container to the support base in such a manner that the container body is placed on the support from the upper side with respect to the support base.

In addition, in the substrate transfer apparatus, in order to improve the storage efficiency of the substrate storage container, the distance between the substrates is stored in the container body in a narrow state, and the substrate such as the glass substrate is easily broken by contact with other objects. Therefore, it is required to adjust the position when the substrate storage container is moved to the set position. In the substrate transfer apparatus of the Japanese Patent Publication No. 2008-094494, a centering device is provided, and the centering device is brought into contact with the substrate storage container in a state in which the substrate storage container is placed and supported by the support table. Thereby, the position of the substrate storage container in the horizontal direction is adjusted to the set position at which the substrate transfer device transfers the substrate.

In particular, the centering device of JP-A-2008-094494 is in contact with the four corners of the lower end portion of the rectangular storage container for a flat view, thereby adjusting the position of the substrate storage container in the horizontal direction. Accordingly, the substrate storage container is adjusted to the set position. Specifically, the cover frame or the FFU frame system is located at the four corners of the lower end portion of the substrate storage container. In addition, the centering device is in contact with the lower end portion of the FFU frame or the cover frame, thereby adjusting the position of the substrate storage container in the horizontal direction, whereby the substrate storage container is positioned at the set position.

Advanced technical literature Patent literature

[Patent Document 1] JP-A-2008-094494

In the Japanese Patent Application No. 2009-244754, the present invention discloses a substrate storage container as a substrate storage container that can separate the container body, and the substrate storage container is configured by the following members. The storage container, that is, the container body, is configured to form a pick-and-place port and a substrate storage space; and the support body is placed to support the container body and to be equipped with a fan filter unit. In the substrate storage container, the bottom of the substrate storage container is formed by the mounting support member, and the container body can be separated upward with respect to the placement support member. When the container body is separated, the placement support member is less likely to fall over. It is easy to automate the separation of the container body.

The centering device of the container body and the mounting support member is adjusted in the horizontal direction by the centering device of JP-A-2008-094494. However, the centering device is in contact with the substrate. The four corners of the lower end portion of the container are adjusted in the horizontal direction, and since the four corners of the mounting support member are located at the four corners of the lower end portion of the substrate storage container, the centering device is brought into contact with the load. The four corners of the support member are placed to adjust the position of the substrate storage container to the set position.

However, if the container storage container is configured by the container main body and the mounting support member, the container main body may be displaced in the horizontal direction with respect to the mounting support member due to vibration during transportation or the like. Adjusting the mounting support member to an appropriate position to adjust the substrate storage container to the set position, and if the mounting support member and the container body are displaced in the horizontal direction, the position of the container body is transferred from the substrate transfer device The substrate transfer position is shifted in the horizontal direction.

Further, when the substrate is transferred by the substrate transfer device in a state where the position of the container body is shifted from the substrate transfer position in the horizontal direction, the substrate transfer device is taken out with respect to the object to be taken out when the substrate stored in the container body is taken out. The position of the substrate is deviated, and there is a possibility that the transfer of the substrate using the substrate transfer device cannot be performed accurately.

The present invention has been made in view of the above problems, and an object thereof is to provide a substrate transfer apparatus capable of accurately transferring a substrate using a substrate transfer device.

The substrate transfer apparatus of the present invention for achieving the above object is characterized in that the substrate transport apparatus includes a container transport device that transports the container to the substrate transfer support table, and the container has a vertical direction a space for accommodating a plurality of substrates in a state of being arranged at intervals; and a substrate transfer device for placing the container transfer substrate supported on the support table via a pick-and-place port formed on a side portion of the container And removing the substrate and the substrate; the container includes: a container body having the pick-and-place port and the space; and a mounting support member for supporting the container body and having the container supported thereon a fan filter unit that supplies the clean air to the space in the state of the main body; the container transport device is configured to mount the support member on the support main body with the support support from above Transporting the container to the support station, and the substrate transfer device further includes a position adjustment mechanism, and the position The whole mechanism directly abuts the container body while the container is placed on the support table, thereby adjusting the position of the container body in the horizontal direction to the substrate transfer device for transferring the substrate The substrate transfer position.

That is, the container in which the substrate can be housed can be relatively raised from the mounting support member by the container body, and the container body can be separated from the mounting support member. In addition, since the mounting support member is formed substantially in the horizontal direction to mount the support container body, the placement support member does not easily fall over when the container body is separated.

The container conveying device transports the container to the support table in such a manner that the mounting support member that supports the container body is placed on the support table and supported from above. Further, the container is transported to the support table by the container transport device, and the mounting support member of the support container is placed on the support table, and the position adjustment mechanism directly abuts against the container body to adjust the position of the container body in the horizontal direction to The position for substrate transfer. According to this, in a state in which the container accommodating the substrate is placed on the support stand, the position adjustment mechanism directly abuts against the container body, whereby the position of the container body in the horizontal direction can be adjusted to the substrate transfer position. .

In other words, in the present feature, the position of the mounting support member supported on the support table is not adjusted in the horizontal direction, but the container body of the substrate is transferred directly by the substrate transfer device by the position adjustment mechanism. In this position, the position of the container body can be adjusted to the substrate transfer position even if a deviation occurs between the container body and the mounting support member. Therefore, the substrate transfer by the substrate transfer device can be accurately performed, and thus a substrate transfer device can be provided, and the substrate transfer device can accurately perform transfer of the substrate using the substrate transfer device.

In another feature of the substrate transfer apparatus of the present invention, the position adjustment mechanism includes a plurality of fitting bodies that are provided on the support table in a state of protruding upward from the support table, and the fitted portion includes The container body is recessed upward; the inclined surface portion is provided around the fitting portion of the container body, and the fitting body is guided to the fitted portion; and the lifting operation mechanism is The container body is moved up and down relative to the fitting body to switch between the fitting state in which the fitting body is fitted to the fitted portion, and the separating state in which the fitting body is separated downward from the fitting portion. By.

In other words, the container body is relatively lowered relative to the fitting body by the lifting and lowering operation mechanism, and the fitting body that is separated downward from the fitted portion is fitted to the fitted portion to be switched to the fitted state. Further, since the inclined surface portion for guiding the fitting body to the fitted portion is provided around the fitted portion, even when the lifting operation mechanism is switched from the separated state to the fitting state, even the container body is self-substrate. When the position for transfer is deviated in the horizontal direction and the position of the fitting portion is shifted from the directly upward side of the fitting body in the horizontal direction, the fitting body also moves upward while abutting against the inclined surface portion, thereby the container The system is moved to the substrate transfer position so that the fitted portion is positioned directly above the fitting, and the fitting system is fitted to the fitted portion. According to this, the position adjusting mechanism can adjust the position of the container body to the substrate transfer position by the action of the inclined surface when the container body is displaced from the substrate transfer position in the horizontal direction, and can be adjusted by the fitting body. The fitting of the fitting portion holds the position of the container body that has been adjusted to the transfer position of the substrate at this position.

According to still another feature of the substrate transfer apparatus of the present invention, the fitting system is provided in the fixing table in a fixed state, and the container conveying device also serves as the lifting operation mechanism.

In other words, the mounting support member that supports the container body is placed and supported by the container support device from above, and the container body can be moved downward with respect to the fitting body and switched to the fitting state. Moreover, the mounting support member on which the container body is supported is lifted by the container transfer device from the support stand, and the container body can be moved upward with respect to the fitting body, and switched to the separated state. Accordingly, it is not necessary to have a dedicated mechanism for moving the container body and the fitting body to move up and down, and the structure of the substrate transfer apparatus can be simplified.

According to still another feature of the substrate transfer apparatus of the present invention, the plurality of engagement systems are provided on the mounting support member in a state in which the mounting support member protrudes upward, and the plurality of cards are disposed in the container body. In the joint portion, the engaged portion is formed in a shape that is recessed upward, and the engaging body is engaged in a state in which the container body is supported by the mounting support member, and the lifting body is lifted by the lifting The operation mechanism is switched from the separated state to the fitting state, and the plurality of fitting systems respectively lift the container body with respect to the mounting support member in a state of receiving and supporting the fitted portion, and the fitting In the state, the container body is supported in a state in which the engaging body is separated downward from the engaged portion.

In other words, in a state in which the container body is placed and supported by the mounting support member, the engagement system is engaged with the engaged portion, and the container body is restricted from moving in the horizontal direction with respect to the placement support member, so that it can be prevented from being borrowed. When the container is transported by the container transporting device, the container body is dropped from the mounting support member until it is equal.

Further, in the state in which the engagement state is switched, the engagement system is separated downward from the engaged portion, and the engagement between the engagement body and the engaged body is released. Therefore, the configuration of the container system can be relative to The state in which the support member is moved in the horizontal direction. According to this, when the position of the container body is adjusted to the substrate transfer position by the position adjustment mechanism, the position of the container body can be adjusted to the substrate transfer position without moving the placement support member in the horizontal direction as much as possible. Therefore, it is possible to suppress the generation of dust caused by the mounting support member sliding in the horizontal direction on the container conveying device or the support table.

Simple illustration

Fig. 1 is a side view of a substrate transfer apparatus.

Fig. 2 is a plan view of the substrate transfer apparatus.

Figure 3 is a front view of the substrate transfer robot.

Fig. 4 is a perspective view of a storage container for a substrate.

Figures 5(a) and 5(b) are perspective views of the container body.

Figures 6(a) and 6(b) are perspective views of the supporting member.

Fig. 7 is a perspective view showing a state in which the substrate storage container is placed above the support table.

Fig. 8 is a perspective view showing a state in which a substrate storage container is placed and supported by a support table.

Figures 9(a) and 9(b) show the state of the fitted state and the separated state.

Figs. 10(a) and 10(b) are diagrams showing the fitting state and the separation state of the other embodiment (1).

Form for implementing the invention

Hereinafter, the substrate transfer apparatus of the present invention will be described based on the drawings.

As shown in the first and second drawings, the substrate transport apparatus includes a stacker 7 as a container transport device, and a container (a substrate storage container) 2 that can accommodate the substrate 1 is transported to the support table 8; In the substrate transfer robot 11 of the substrate transfer device, the substrate 1 is transferred, and the substrate 1 or the substrate 1 is taken out through the pick-and-place port 21 formed on the side of the substrate storage container 2. Furthermore, as shown in FIG. 9, the substrate transfer apparatus includes a position adjustment mechanism 51.

Specifically, the substrate transport apparatus includes a stacker 7 as a container transport device, and is disposed between the storage rack 10 for storing the substrate storage container 2 and the substrate transfer support 8 or the storage rack 10 is separated from the container. The substrate transfer container 11 is transferred between the mounting table 9 and the substrate transfer robot 11 as the substrate transfer device transfers the substrate 1 to the substrate storage container 2 supported by the substrate transfer support 8 The substrate 1 is taken out through the pick-and-place port 21 formed in the side of the substrate storage container 2, and the substrate 1 is housed; and the container separating device 12 is used to mount the substrate storage container 2 supported by the mounting table 9 Separator.

Further, as shown in Fig. 1, the substrate transfer apparatus includes a downflow type clean air ventilation mechanism 14, and the clean air ventilation mechanism 14 is provided in the cleaning space 13, and the clean air is ventilated from the top plate portion to the floor portion. The clean air ventilation mechanism 14 connects the space below the grille floor 15 constituting the floor portion to the space above the air filter 16 constituting the ceiling portion by the circulation path 19 including the ventilation fan 17 and the pre-filter 18. . In other words, the clean air ventilating mechanism 14 circulates the air in the cleaning space 13 by the pre-filter 18 and the air filter 16, and circulates the circulation air 19, and cleans the air from the top of the cleaning space 13. Ventilation to the floor.

[Substrate storage container]

As shown in FIG. 4, the substrate storage container 2 that is transported in the substrate transfer apparatus has a space (substrate storage space) S in which the plurality of substrates 1 can be accommodated in a state of being arranged at intervals in the vertical direction. The container storage container 2 includes a container main body 3 having a pick-and-place port 21 for picking up and placing the substrate 1 and a substrate storage space S therein, and a mounting support member 4 for supporting and supporting the container body 3; Further, the fan filter unit 5 (see FIG. 6) that supplies the clean air to the substrate storage space S while the container main body 3 is supported is placed. The container body 3 is separable from the mounting support member 4.

Fig. 5(a) is a perspective view showing the container body 3 obliquely upward from the front side, and a part of the container body 3 is notched, and the fifth (b) is a container body 3 obliquely downward from the rear side. Stereo view. As shown in FIG. 5, the container body 3 has a pick-and-place port 21 for receiving and detaching the substrate 1 at the side thereof, and a supply air for supplying the clean air supplied by the fan filter unit 5 to the substrate accommodating space S. Air supply port 22. The pick-and-place port 21 is formed on the front side of the container body 3, and the air supply port 22 is formed on the rear side of the container body 3. In the container body 3, the pick-and-place port 21 and the air supply port 22 are formed at positions facing each other.

The container main body 3 is formed by arranging a plurality of frame materials into a rectangular column shape to form the main body frame 23, and is formed in a door shape by closing the upper portion and the lateral sides of the main body frame 23 by the side plates 24. The front side portion of the container body 3 is not closed by the side plate 24, and the pick-and-place opening 21 is formed in the front side portion. The rear side portion of the container body 3 is also not closed by the side plate 24, and the air supply port 22 is formed at the rear side portion. The lower portion of the container body 3 is configured such that the lower frame forming frames 23a are arranged in a lattice shape. Since the container body 3 is not closed by the side plate 24, the lower portion of the container body 3 is opened. However, as shown in Fig. 4, in the state in which the support container body 3 is placed from below by the mounting support member 4, It is closed by the placement support member 4.

In other words, the container body 3 supplies the clean air supplied from the fan filter unit 5 to the air supply port 22, and the clean air is ventilated from the rear side to the front side in the substrate storage space S, and the clean air is taken from the intake port 21 exhaust. In addition, since the clean air is ventilated from the rear side to the front side in the substrate storage space S, the airflow can be used to prevent dust from adhering to the substrate 1, and the clean air is exhausted from the pick-and-place port 21 to prevent dust from being self-retained. The pick-and-place port 21 intrudes into the substrate accommodation space S.

Further, a substrate support 25 is provided inside the container body 3, and the substrate support 25 is used to mount the support substrate 1 in the substrate housing space S. The substrate support 25 is supported by the body frame 23 of the container body 3. Further, the substrate support 25 is provided in a plurality of rows in the vertical direction in accordance with the number of the plurality of substrates 1 arranged at intervals in the vertical direction, and the plurality of substrate supports 25 are respectively arranged by a plurality of bars arranged in the lateral direction. Come to form. Incidentally, the substrate housing space S is formed by the internal space of the container body 3.

Fig. 6(a) is a perspective view of the mounting support member 4 from the front left obliquely upward, and Fig. 6(b) is a perspective view of the mounting support member 4 obliquely downward from the rear side. As shown in Fig. 6, the mounting support member 4 includes a support portion 27 for mounting the support container body 3, and a mounting portion 28 for mounting the fan filter unit 5, and the fan filter unit 5 is placed at The holder 27 is placed at a position facing the air supply port 22 in a state where the support body 3 is placed. Incidentally, the support portion 27 on which the support member 4 is placed is formed to be larger in size in a plan view than the container body 3 so that the container body 3 to be supported does not protrude from the support portion 27 toward the lateral side.

The support portion 27 on which the support member 4 is placed is configured such that the frame material is framed in a rectangular lattice shape in a plan view, and the support frame 29 is formed, and the bottom plate 30 is attached to the support frame 29 to form a flat plate. Moreover, the mounting portion 28 on which the support member 4 is placed is coupled to the support portion 27 in a state where the rear end portion of the support member 27 is erected, and is mounted on the mounting portion 28 of the support member 4, and the fan filter unit 5 is attached. Three sets were installed in a state in which they were arranged in the horizontal direction of the container in a standing posture. Further, the mounting support member 4 is formed by combining the support portion 27 having a "-(negative sign)" shape in a side view and the mounting portion 28 having a letter "I" in a side view, and is viewed from the side. It has the letter "L". In the bottom plate 30, a total of 12 sheets are mounted so as to be arranged in four in the lateral direction, and the rows are arranged in three rows in the front-rear direction.

The opening portion 31 is formed in the support portion 27. Specifically, the support portion 27 is formed in the form of two base plates 30 which are respectively located at both ends in the lateral direction in the three rows of the array substrate 30, and the lift support 47 which can be inserted and removed in the vertical direction is formed. The opening portion 31. The opening 31 formed in this manner is formed in two rows at intervals in the lateral direction of the container, and is formed in a shape along the front-rear direction of the container. The portion of the placement support member 4 located between the two rows of openings 31 is supported by the stacker crane 7. The portion of the opening 31 located on the outer side in the lateral direction of the container is supported when it is housed in the storage rack 10, and is supported by being placed on the support table 8 or the mounting table 9.

The mounting portion 28 is provided with a mask portion 32 that covers the end portion of the container body 3 that has been supported by the mounting support member 4. The mask portion 32 is formed to cover the left and right lateral sides and the upper surface of the rear end portion of the container body 3. Further, as shown in FIG. 4, in a state in which the container body 3 is supported by the support portion 27, a gap in the vertical direction is formed between the upper portion of the container body 3 and the upper portion of the mask portion 32. By forming the gap, as shown in FIG. 8, when the container body 3 is separated upward from the placement support member 4, the container body 3 does not come into contact with the mask portion 32.

As shown in Fig. 6(b), the power receiving portion 33a of the contactless power supply device 33 is provided on the lower surface side of the mounting support member 4. In the state in which the substrate storage container 2 is stored in the storage rack 10, the fan filter unit 5 is activated by supplying electric power from the power supply unit 33b (see FIG. 1) of the contactless power supply device 33 of the storage rack 10. . Further, a battery (not shown) is also provided on the mounting support member 4, and the battery stores the electric power supplied to the power receiving unit 33a. In the state in which the power receiving unit 33a is separated from the power supply unit 33b and the power is not supplied to the substrate storage container 2 through the power supply unit 33b, the power receiving unit 33a can be supplied to the substrate storage container 2 during the period in which the substrate storage container 2 is transported by the stacker 7 The power stored in the battery causes the fan filter unit 5 to operate.

The substrate storage container 2 has a restriction mechanism 34 that restricts the horizontal movement of the container body 3 with respect to the placement support member 4 in a state where the container body 3 is placed and supported by the placement support member 4. . Specifically, a plurality of positioning pins 34a as the engaging members are provided on the mounting support member 4 in a state of being protruded upward from the upper surface of the mounting support member 4, and the container body 3 is provided with a plurality of the engaged portions. The engagement recessed portion 34b is formed in a shape that is recessed upward (that is, a shape in which the bottom surface is closed and closed downward), and the support container is placed on the mounting support member 4 The positioning pin 34a is engaged with the main body 3. Moreover, when the container main body 3 is placed on the mounting support member 4, the positioning pin 34a is engaged with the engagement recessed portion 34b, thereby restricting the movement of the container main body 3 with respect to the horizontal direction of the mounting support member 4. That is, the restriction mechanism 34 is configured by the positioning pin 34a and the engagement recess 34b.

The frame member 23a for forming the lower portion of the container body 3 is disposed such that a part of the frame body 23a is placed along the front-rear direction of the container in a state where the container body 3 is placed and supported by the mounting support member 4 (in the fifth (b) The frame material 23a) shown by the imaginary line in the figure is located directly above the opening 31 of the mounting support member 4. In addition, the container body 3 is lifted in a state in which the lower frame member 23a is received and supported by the lift-type support body 47, which has been inserted into the opening portion 31. In addition, the container main body 3 can be separated from the mounting support member 4 toward the upper side in a state in which the lower frame forming frame member 23a is received and supported by the elevating support body 47 into which the opening portion 31 has been inserted.

[stack crane]

As shown in the first and second figures, the storage rack 10 in which the accommodating portion 10a of the accommodating substrate storage container 2 is arranged in the vertical direction and the horizontal width direction is provided in a paired state, and the pair is provided. A stacker crane 7 is disposed between the pair of storage racks 10. The stacker crane 7 includes a traveling carriage 37 that moves along a long path along a traveling path 36 formed between the pair of storage racks 10, and a lifting platform 38 that guides the vehicle to stand upright. The lifting mast of the trolley 37 is freely movable; and the fork shifting device 39 is supported by the lifting platform 38. The transfer device 39 mounts the mounting support member 4 in the support substrate storage container 2, and the transfer device 39 can be placed between the pair of storage shelves 10 and the support table 8 or itself, or the mounting table 9 The storage container 2 for transfer substrate is transferred to itself and can be wound around the longitudinal axis. The substrate storage container 2 is housed in the storage portion 10a of the storage rack 10 in a state in which the end portion of the fan filter unit 5 is placed on the side of the traveling path 36 before the end of the nozzle opening 21 is formed.

The stacker 7 can transport the substrate storage container 2 to the support table 8, and the support table 8 is provided adjacent to the traveling path 36. Moreover, the stacker 7 can be rotated by the transfer device 39, and the direction of the substrate storage container 2 to be conveyed can be changed by 180°. Further, the stacker crane 7 may be wound by the transfer device 39 when the position of the support table 8 of the transfer destination is located on the side opposite to the travel path 36 with respect to the position of the storage portion 10a at the origin of the transfer. When the direction of the substrate storage container 2 is changed to 180° and transported to the support table 8 and the position of the support base 8 at the transfer destination is located on the same side of the travel path 36 with respect to the position of the storage unit 10a at the origin of the transfer, The substrate storage container 2 is transported to the support table 8 without changing the direction of the storage container 2 . Therefore, when the stacking storage container 2 is transferred to the support table 8, the stacking crane 7 can be placed in a state in which the end portion of the substrate storage container 2 is located on the side of the traveling path 36 with respect to the front end portion. In the same manner as in the case of the support table 8, the substrate storage container 2 can be transported to the mounting table 9 by the stacking crane 7.

[Substrate Transfer Robot]

As shown in FIGS. 1 to 3, the substrate transfer robot 11 includes a moving cart 41 that moves in the lateral direction of the rack on the back side of the storage rack 10, and a lifting and lowering unit 42 that supports the moving cart 41. The fork-shaped substrate support portion 43 is connected to the lift rotary portion 42 via the link mechanism 44.

The substrate transfer robot 11 is configured to transfer the substrate 1 one by one to the substrate transfer by mounting the substrate storage container 2 supported by the support table 8 by the lifting and rotating of the elevation rotary unit 42 and the expansion and contraction of the link mechanism 44. The storage rack side end portion of the conveyor 45 and the substrate 1 of the storage rack side end portion of the substrate conveyance conveyor 45 are transferred one by one to the substrate storage container 2 that is supported by the support table 8 . In the substrate storage container 2, a space in which the substrate supporting portion 43 can be inserted and removed is formed between the substrate supporting members 25 adjacent to each other in the lateral direction and between the substrates 1 adjacent to each other in the vertical direction. Therefore, the substrate supporting portion 43 can be inserted and removed in the space in which the substrate supporting portion 43 can be inserted and removed, and the substrate 1 can be taken out one by one from the substrate storage container 2, or the substrate 1 can be accommodated in the substrate storage container 2 one by one. .

The substrate conveyance conveyor 45 supports both ends in the lateral direction of the substrate 1 by the rotating roller, and conveys the substrate 1 by rotationally driving the rotating roller. As shown in Fig. 2, in the present embodiment, two substrate transport conveyors 45 are provided, and one of the substrate transport conveyors 45 feeds the substrate 1 received from the substrate transfer robot 11 toward the substrate processing apparatus (not In the substrate transfer conveyor 45 for the unprocessed substrate transporting, the other substrate transport conveyor 45 is a substrate transport conveyor 45 for transporting the substrate 1 that has been transported from the substrate processing apparatus to the storage rack 10 side. .

[container separation device]

As shown in Fig. 1, the container separating device 12 includes a lifting support 47 that can move the container body 3 in the horizontal direction and can be lifted and lowered, and a lifting mechanism 48 by which the lifting support is provided. 47 is composed of electric cylinders for lifting and lowering.

In the state in which the substrate storage container 2 is placed and supported by the mounting table 9, the elevating support body 47 is moved upward by the elevating mechanism 48, whereby the elevating support 47 is inserted from the lower side. The opening portion 31 of the support member 4 is placed, and the container body 3 is lifted upward, and the container body 3 is separated upward from the placement support member 4. In the separated state, the lower surface of the container body 3 is located above the upper end of the positioning pin 34a of the mounting support member 4, and the container body 3 is not limited to the restriction mechanism 34 to be configured to be relatively movable. The state in which the support member 4 is conveyed in the horizontal direction is set.

Further, in a state in which the mounting support member 4 is placed and supported by the mounting table 9 and the container body 3 is placed and supported by the elevating support 47, the elevating support body 47 is moved downward by the elevating mechanism 48, and the container is lowered. The main body 3 is lowered onto the mounting support member 4, and the positioning pin 34a is engaged with the engaging recessed portion 34b, and the elevating support 47 is pulled out from the opening 31 of the mounting support member 4 toward the lower side. The container body 3 that has landed on the mounting support member 4 is supported by the placement support member 4 and is coupled to the placement support member 4.

Moreover, the elevating support body 47 is placed and transported in the horizontal direction while being lifted up, whereby the container main body 3 can be transferred to and from the adjacent container transport conveyor 49. Incidentally, the container transport conveyor 49 transports the container body 3 to a washing device outside the figure of the washing container body 3.

[restricted institution]

As described above, the restriction mechanism 34 includes the positioning pin 34a and the engagement recess 34b. As shown in Fig. 6, the positioning pin 34a is provided at a central portion in the lateral direction of the front end portion of the support portion 27 on which the support member 4 is placed, and is provided with a pair in a state of being spaced apart in the lateral direction, and after the support portion 27 The center portion of the end portion in the lateral direction is provided in a pair in a state of being spaced apart in the lateral direction. The total of four positioning pins 34a are respectively provided in a state of being coupled to the support frame 29 that supports the supporting member 4. For example, one portion of the supporting frame 29 partially protrudes toward the bottom plate 30 side, and The extension portion is provided with a positioning pin 34a. Further, as shown in Fig. 9, the total of four positioning pins 34a are formed in a cylindrical shape, and the upper end portion is formed in a head shape.

As shown in Fig. 5, the engagement recessed portion 34b is provided at a central portion in the lateral direction of the front end portion of the lower surface of the container body 3, and is provided with a pair in a state of being spaced apart in the lateral direction and a rear end of the container body 3 In the central portion in the lateral direction of the portion, a pair is provided in a state of being spaced apart in the lateral direction. The total of four engagement recesses 34b are formed so as to correspond to the position of the positioning pin 34a so as to engage the positioning pin 34a in a state where the container body 3 is placed in a proper position to support the mounting member 4. Further, the engaging recessed portions 34b are formed into cylindrical cavities, respectively.

The diameter of each of the engaging recessed portions 34b is slightly larger than the diameter of the engaged positioning pin 34a, and is formed between the side surface of the positioning pin 34a and the side surface of the engaging recessed portion 34b in a state where the positioning pin 34a is engaged with the engaging recessed portion 34b. gap. The restriction mechanism 34 allows the container body 3 to move in the horizontal direction with respect to the placement support member 4 in a state in which the positioning pin 34a is engaged with the engagement recessed portion 34b. Further, as shown in Fig. 9, the engagement inclined surface 35 for guiding the positioning pin 34a to the engagement recessed portion 34b is formed in a conical shape around each of the engagement recessed portions 34b.

Moreover, the length of the positioning pin 34a and the depth of the engaging recessed portion 34b are set so that the upper surface of the supporting portion 27 of the mounting supporting member 4 is compared with the state in which the container body 3 is placed and supported by the mounting support member 4. The distance between the upper end of the upper end of the positioning pin 34a is such that the lower surface of the container main body 3 and the bottom surface of the engaging recessed portion 34b (that is, the upper closed surface) are widened in the vertical direction. In other words, in a state in which the container body 3 is placed and supported by the mounting support member 4, the upper end of the engaged positioning pin 34a does not come into contact with the bottom surface of the engaging recessed portion 34b. Incidentally, the lower surface of the container body 3 refers to a surface that comes into contact with the upper surface of the support portion 27 in a state where the container body 3 is placed and supported by the mounting support member 4.

[Location Adjustment Mechanism]

Next, the position adjustment mechanism 51 will be described.

The substrate transfer device includes a position adjustment mechanism 51 that directly abuts against the container body 3 while the substrate storage container 2 is placed and supported by the support base 8 , whereby the container body 3 is The position in the horizontal direction is adjusted to the substrate transfer robot 11 for transferring the substrate transfer position of the substrate 1.

As shown in FIGS. 9 and 10, the position adjustment mechanism 51 includes a plurality of adjustment pins 52 as a fitting body, and is provided on the support table 8 in a state in which the support table 8 protrudes upward; The fitting recessed portion 53 is provided in the container body 3 and recessed upward (that is, the bottom surface is closed to be closed and opened downward); and the inclined surface 54 for fitting the inclined surface is provided in the container body 3 The fitting recess 52 is guided to the fitting recess 53 and the lifting and lowering mechanism 56 (in the present embodiment, the stacker 7), the container body 3 and the adjusting pin 52 are provided. In the state in which the adjustment pin 52 is fitted to the fitting concave portion 53 of the container body 3 and the adjustment pin 52 is separated from the fitting concave portion 53 of the container body 3, the adjustment pin 52 is switched to be separated.

As shown in Fig. 7, the adjustment pins 52 are provided at four corners of the support table 8 in a fixed state. Specifically, four support posts 8a are provided on the support base 8 in accordance with the four corners of the storage container 2 for supporting the substrate. A support plate 8b is attached to each of the upper ends of the four pillars 8a, and the support plate 8b is provided with a corner portion of the support substrate storage container 2 individually. Further, the adjustment pin 52 is fixed to the upper surface of each of the support plates 8b, and is provided in a state of being fixed to the four corners of the support table 8 so as to protrude upward from the support table 8. Further, as shown in Fig. 9, the adjustment pin 52 is formed in a cylindrical shape, and the upper end portion is formed in a head shape.

The fitting recesses 53 are provided at the four corners of the lower surface of the container body 3, and the total fitting recesses 53 are formed to correspond to the positions of the adjusting pins 52 so as to position the container body 3 in the horizontal direction. The adjustment pin 52 is engaged in a state in which the substrate transfer position of the substrate 1 is transferred. Further, the fitting recesses 53 are formed in a shape corresponding to the shape of the adjustment pin 52. For example, the fitting recesses 53 are formed in a cylindrical shape in the lower portion (near the opening portion of the recess), and the upper portion (the bottom portion of the recess) The vicinity is formed into a thin shape in which the diameter of the upper side is smaller.

The diameter of each of the fitting recesses 53 is substantially the same as the diameter of the engagement adjustment pin 52. In a state in which the adjustment pin 52 is engaged with the fitting recess 53 , a gap is hardly formed between the side surface of the adjustment pin 52 and the side surface of the fitting recess 53 . In the state in which the adjustment pin 52 is fitted into the fitting recessed portion 53, the position adjusting mechanism 51 hardly allows the container body 3 to move in the horizontal direction with respect to the support table 8, and the position of the container body 3 can be accurately placed on the substrate. Use location.

The length of the adjustment pin 52 and the depth of the fitting recessed portion 53 are set to be larger than the upper surface of the upper end of the adjustment pin 52 in the upper surface of the support table 8 in a state in which the support substrate 8 is supported by the substrate storage container 2 The distance between the lower surface of the mounting support member 4 and the bottom surface of the fitting recess 53 in the state where the container body 3 is supported by the mounting support member 4 is narrowed. In other words, as shown in Fig. 9(b), in the state in which the substrate storage container 2 is placed and supported by the support table 8, only the mounting support member 4 in the substrate storage container 2 is placed on the support table. 8. The container body 3 is supported by the adjustment pin 52. Incidentally, the lower surface of the mounting support member 4 is a surface that comes into contact with the upper surface of the support plate 8b while the substrate storage container 2 is placed and supported by the support table 8.

As shown in Fig. 9, as the stacking crane 7 is switched from the disengaged state to the fitted state, the plurality of adjustment pins 52 are respectively received and supported by the fitting recess 53 (that is, the adjustment pin 52 is fitted to In the state of the fitting recessed portion 53, the container body 3 is lifted with respect to the mounting support member 4. In other words, as shown in Fig. 9(b), when the adjustment pin 52 is fitted into the fitting concave portion 53 of the container body 3, the positioning pin 34a is formed to be separated downward from the engagement recess 34b. Status (non-engaged state). Further, in this state, the adjustment pin 52 supports the container body 3 from below. Accordingly, in a state of being switched to the fitting state and the container body 3 is supported by the adjustment pin 52, the lower surface of the container body 3 is located above the upper end of the positioning pin 34a, and the container body 3 is not limited. The restriction mechanism 34 is configured to be movable in the horizontal direction with respect to the placement support member 4.

The fitting inclined surface 54 is formed around each of the fitting recesses 53 and formed in a conical shape having a smaller diameter on the upper side. In other words, when the container body 3 is moved downward with respect to the adjustment pin 52 and is switched from the separated state to the fitted state, the container body 3 is displaced in the horizontal direction from the substrate transfer position, and the position of the fitting recess 53 is located. When the upper side of the adjustment pin 52 is displaced in the horizontal direction, the adjustment pin 52 is also in a state of being in contact with the fitting inclined surface 54 (that is, the adjustment pin 52 is guided while being in contact with the fitting inclined surface 54). ) move up and down relatively. Therefore, the container body 3 is guided so that the fitting recess 53 is positioned directly above the adjustment pin 52, and the container body 3 is moved to the substrate transfer position, and the adjustment pin 52 is fitted to the fitting recess 53. Accordingly, the position adjustment mechanism 51 has a function of adjusting the position of the container body 3 to the substrate by the action of the fitting inclined surface 54 even if the container body 3 is displaced from the substrate transfer position in the horizontal direction. Transfer position.

The insertion member 55 is formed in the mounting support member 4, and the opening portion 55 is formed in correspondence with the fitting recess 53 and the adjustment pin 52 can be inserted and removed in the vertical direction. The opening portion 55 is formed in a state where the container body 3 supported by the mounting support member 4 is placed at an appropriate position on the mounting support member 4 (the center of the positioning pin coincides with the center of the engagement recess). It is located directly below the fitting recess 53 and is formed as a circular hole in a plan view. Further, the opening portion 55 is formed to have a diameter larger than the diameter of the lower end portion of the fitting inclined surface 54, so that the container body 3 is properly placed on the supporting member 4 even when the positioning pin 34a is engaged with the engaging recess portion 34b. When the position is shifted in the horizontal direction, the upper end portion of the adjustment pin 52 may be in contact with the outer peripheral edge portion of the fitting inclined surface 54. Incidentally, the diameter of the lower end portion of the fitting inclined surface 54 is set in consideration of the maximum amount of deviation, that is, the storage container 2 for the substrate which is caused by the conveyance accuracy of the support table 8 by the stacking crane 7 with respect to the set position The maximum deviation amount in the horizontal direction and the maximum deviation amount of the container body 3 with respect to the horizontal direction of the appropriate position on the mounting support member 4 due to the difference between the diameter of the positioning pin 34a and the diameter of the engaging recess portion 34b.

The stacking crane 7 transports the substrate storage container 2 to the support table 8 in such a manner that the mounting support member 4 on which the container main body 3 is supported is placed on the support table 8 from above. The support table 8 holds the support member 4, and transports the substrate storage container 2 from the support table 8. Further, the stacker 7 is lowered from the upper side with respect to the support base 8 by the storage container 2 for the substrate, and the container main body 3 is moved downward with respect to the adjustment pin 52, and the substrate storage container 2 is supported by the support container 2 The table 8 is lifted upward, and the container body 3 is moved upward with respect to the adjustment pin 52, and also serves as the elevation operating mechanism 56.

In the case where the container body 3 is not displaced from the substrate transfer position, when the substrate storage container 2 is lowered from the upper side with respect to the support table 8 by the stacker 7, the adjustment pin 52 does not abut the fitting. Since the inclined surface 54 is fitted to the fitting recess 53 , the adjustment by the position adjusting mechanism 51 is not performed. Further, the substrate storage container 2 is set to be displaced in the horizontal direction from the set position on the support table 8 of the substrate transfer robot 11, or the container body 3 supported by the placement support member 4 is placed on the support member 4 When the appropriate position on the upper side is offset in the horizontal direction, or the container body 3 is displaced from the substrate transfer position in the horizontal direction due to the factors of the two, the substrate storage container 2 is opposed to the support table by the stacker crane 7. When the landing pin 8 is brought into contact with the fitting inclined surface 54 and fitted into the fitting recessed portion 53, the position of the container body 3 is adjusted to the substrate transfer position by the position adjusting mechanism 51. . Accordingly, when the container body 3 is displaced from the substrate transfer position, the adjustment pin 52 of the position adjustment mechanism 51 is directly brought into contact with the container body 3, and it is not necessary to adjust the placement supported on the support table 8. The position of the support member 4 can be adjusted to adjust the position of the container body 3 to the substrate transfer position.

[Other Embodiments]

(1) In the above embodiment, the container transporting device 7 also serves as the elevating operation mechanism 56. However, the elevating operation mechanism 56 or the like for moving the fitting body up and down may be provided, and the elevating operation mechanism may be provided separately from the container transporting device 7. 56. For example, as shown in FIG. 10, a lifting cylinder 58 that moves the adjusting pin 52 up and down with respect to the support table 8 may be provided as the lifting operation mechanism 56. At this time, in a state where the substrate storage container 2 is placed and supported by the support table 8, the adjustment pin 52 can be moved up and down by the elevation cylinder 58 to switch the fitting state (see FIG. 10(b)). Separation state (refer to Figure 10(a)).

(2) In the above embodiment, the position adjusting mechanism 51 is configured to include the fitting body, the fitted body, the inclined surface portion, and the lifting operation mechanism, and the container body is moved up and down relative to the fitting body to adjust the container body to The substrate transfer position may be changed, however. For example, the position adjusting mechanism 51 may be configured such that the abutting member is provided, and the abutting member abuts against the container body 3 on which the substrate storage container 2 supported by the support table 8 is placed, and The abutting member is moved farther and closer to the horizontal direction with respect to the container body to adjust the container body to the substrate transfer position.

(3) In the above-described embodiment, the engagement system 52 is fitted in the fitting recessed portion 53 of the container body 3, and the engagement system is configured to be separated from the engaged portion by the non-engaged state. However, the engagement and non-engagement state between the engaging body and the engaged portion in the fitted state are changeable. For example, the amount of lift of the container body 3 relative to the mounting support member 4 required for the fitting state in which the adjustment pin 52 is fitted into the fitting recess 53 of the container body 3 can be reduced, and In the fitted state, the engagement of the engaging body with the engaged portion is also maintained. At this time, when the position of the container main body 3 is adjusted in the horizontal direction by the position adjusting mechanism 51, the engaging support body 4 is brought into the horizontal direction by following the movement of the container main body 3 by engaging the engaging body with the engaged body. mobile. Further, in the above embodiment, the engaging body and the engaged portion are provided, but these may not be provided.

(4) In the above embodiment, the fitting portion is provided at the four corners of the lower surface of the container main body 3, and the support table 8 has four fitting bodies. However, the position or the number of the fitting portions or the fitting body is required. It can also be changed as appropriate. For example, the frame body may have a fitting portion at the four sides of the container body, so that the both end portions in the lateral direction of the lower surface of the container body 3 have the fitted portions in the front and rear direction central portions, and the container body 3 The center portion in the lateral direction of each of the rear end portions in the front-rear direction has a fitted portion. Moreover, the fitting portion may be provided at three places of the container body, and both end portions in the lateral direction of the rear end portion of the lower surface of the container body 3 may be fitted with the fitting portion, and the front end portion of the lower surface of the container body 3 may be provided. The central portion in the lateral direction has a fitted portion. Further, the center portion of the lower surface of the container body 3 may have a fitted portion instead of a peripheral portion, or may have a fitted portion at five or more of the container body. Further, the fitting body may have a corresponding number in the support table corresponding to the fitted portion.

(5) In the above-described embodiment, the fitting body is provided on the support table 8 on which the storage substrate storage container is placed. However, the fitting body may not be provided on the support table 8, and the fitting body may be provided in a separate dedicated table.

(6) In the above-described embodiment, the bottom portion of the fitted portion is formed into a thin shape having a smaller diameter on the upper side, and a portion below the bottom portion of the fitted portion is formed into a cylindrical shape. The entire portion to be fitted may be formed into a thin shape having a smaller diameter as the upper side is smaller.

1. . . Substrate

2. . . Storage container for substrate (container)

3. . . Container body

4. . . Mounting support member

5. . . Fan filter unit

7. . . Stacking crane (container conveying device)

8. . . Support desk

8a. . . pillar

8b. . . Support board

9. . . Mounting table

10. . . Storage rack

10a. . . Storage department

11. . . Substrate transfer robot (substrate transfer device)

12. . . Container separation device

13. . . Clean space

14. . . Clean air ventilation mechanism

15. . . Grill floor

16. . . air filter

17. . . Ventilation fan

18. . . Prefilter

19. . . Cycle road

twenty one. . . Pick and place

twenty two. . . Air supply port

twenty three. . . Ontology framework

23a. . . Frame material

twenty four. . . Side panel

25. . . Substrate support

27. . . Support section

28. . . Installation part

29. . . Support framework

30. . . Bottom plate

31. . . Opening

32. . . Mask

33. . . Contactless power supply

33a. . . Power receiving department

33b. . . Power supply department

34. . . Restricted institution

34a. . . Locating pin (engagement body)

34b. . . Engagement recess (engaged portion)

35. . . Clamping inclined surface

36. . . Walking path

37. . . Walking trolley

38. . . Lifts

39. . . Transfer device

41. . . Mobile trolley

42. . . Lifting and rotating part

43. . . Substrate support

44. . . Linkage

45. . . Substrate transfer conveyor

47. . . Lifting support

48. . . Lifting mechanism

49. . . Container conveyor

51. . . Position adjustment mechanism

52. . . Adjustment pin (chimera)

53. . . Concave recess (fitted portion)

54. . . Slanted face for fitting (inclined face)

55. . . Opening

56. . . Lifting mechanism

58. . . Lifting cylinder

S. . . Substrate storage space (space)

Fig. 1 is a side view of a substrate transfer apparatus.

Fig. 2 is a plan view of the substrate transfer apparatus.

Figure 3 is a front view of the substrate transfer robot.

Fig. 4 is a perspective view of a storage container for a substrate.

Figures 5(a) and 5(b) are perspective views of the container body.

Figures 6(a) and 6(b) are perspective views of the supporting member.

Fig. 7 is a perspective view showing a state in which the substrate storage container is placed above the support table.

Fig. 8 is a perspective view showing a state in which a substrate storage container is placed and supported by a support table.

Figures 9(a) and 9(b) show the state of the fitted state and the separated state.

Figs. 10(a) and 10(b) are diagrams showing the fitting state and the separation state of the other embodiment (1).

2. . . Storage container for substrate (container)

3. . . Container body

4. . . Mounting support member

8. . . Support desk

8a. . . pillar

8b. . . Support board

23a. . . Frame material

27. . . Support section

30. . . Bottom plate

34. . . Restricted institution

34a. . . Locating pin (engagement body)

34b. . . Engagement recess (engaged portion)

35. . . Clamping inclined surface

51. . . Position adjustment mechanism

52. . . Adjustment pin (chimera)

53. . . Concave recess (fitted portion)

54. . . Slanted face for fitting (inclined face)

55. . . Opening

Claims (5)

A substrate transporting apparatus includes: a container transporting device that transports a container to a substrate transfer support stand, and the container has a space in which a plurality of sheets can be accommodated in a state in which the substrates are arranged at intervals in the vertical direction; and the substrate The transfer device is configured to mount the container supported by the support table, and transfer the substrate to be taken out and the substrate to be stored via a pick-and-place port formed at a side portion of the container, wherein the container includes a container body. And the mounting support member is configured to mount the fan filter unit that supports the container body and that supplies the clean air to the space while supporting the container body The container transporting device transports the container to the support table in a state in which the mounting support member that supports the container body is placed and supported from above, and the substrate transporting device Furthermore, the position adjustment mechanism is included, and the position adjustment mechanism is configured to mount the container in a state of being supported by the support table. Abutting the container body, thereby adjusting the position of the container body in the horizontal direction to a substrate transfer position for transferring the substrate by the substrate transfer device, wherein the position adjustment mechanism has a plurality of chimeras Provided in the support stand in a state in which the support stand is protruded upward; the fitted portion is provided in the container body and is recessed upward; and the inclined surface The portion is provided around the fitting portion in the container body, and the fitting body is guided to the fitted portion, and the opening supporting portion is formed in the mounting support member, and the opening portion is formed in the corresponding portion The mating body is inserted and removed in the vertical direction, and the substrate transporting apparatus is configured such that the fitting body penetrates the opening portion while the container is placed and supported by the support base. The fitting is fitted to the fitted portion. The substrate transfer apparatus of the first aspect of the invention, wherein the position adjustment mechanism further includes: a lifting operation mechanism that moves the container body up and down relative to the fitting body to switch the fitting body to the aforementioned The fitting state of the fitting portion and the state in which the fitting body is separated from the fitting portion downward. The substrate transfer apparatus of claim 2, wherein the fitting system is provided in a fixed state on the support table, and the container transfer device also serves as the lift operation mechanism. The substrate transfer apparatus of claim 2, wherein the plurality of engagement systems are disposed on the mounting support member in a state in which the mounting support member protrudes upward, and the plurality of cards are disposed in the container body. In the joint portion, the engaged portion is formed in a shape that is recessed upward, and the engaging body is engaged in a state in which the container body is supported by the mounting support member, and the lifting body is lifted by the lifting The operating mechanism switches from the separated state to the aforementioned fitting state, the plurality of chimeric systems Lifting the container body with respect to the mounting support member in a state of receiving and supporting the fitted portion, and in the fitting state, the engaging body faces downward with respect to the engaged portion The aforementioned container body is supported in a separated state. A substrate transporting apparatus includes: a container transporting device that transports a container to a substrate transfer support stand, and the container has a space in which a plurality of sheets can be accommodated in a state in which the substrates are arranged at intervals in the vertical direction; and the substrate The transfer device is configured to mount the container supported by the support table, and transfer the substrate to be taken out and the substrate to be stored via a pick-and-place port formed at a side portion of the container, wherein the container includes a container body. And the mounting support member is configured to mount the fan filter unit that supports the container body and that supplies the clean air to the space while supporting the container body The container transporting device is configured to transport the container to the support table while the mounting support member that supports the container body is placed on the support table, and the substrate is transported to the support table. The conveying device has a position adjusting mechanism, and the position adjusting mechanism is configured to mount the container on the support table Then it abuts against the container body, whereby the position of the container body in the horizontal direction, adjustment of the substrate to the substrate transfer means for transferring the substrate transferring position, The position adjustment mechanism includes a plurality of fitting bodies that are provided on the support base in a state in which the support stand is protruded upward; the fitted portion is provided in the container body and is recessed upward; the inclined surface portion is The fitting body is guided to the fitting portion around the fitting portion of the container body, and the lifting operation mechanism is configured to move the container body up and down relative to the fitting body to switch to The fitting body is fitted into the fitting state of the fitted portion, and the fitting body is separated from the fitting portion downward, and the plurality of engaging systems protrude upward from the placing support member. The mounting support member is provided in the state in which the plurality of engaged portions are provided in the container body, and the engaged portion is formed in a shape that is recessed upward, and is supported by the mounting support member. The engaging body is engaged with the container body, and the plurality of chimeras are switched from the separated state to the fitting state by the lifting and lowering operation mechanism. Lifting the container body with respect to the mounting support member in a state of receiving and supporting the fitted portion, and in the fitting state, the engaging body faces downward with respect to the engaged portion The aforementioned container body is supported in a separated state.