JP6610518B2 - Inspection device - Google Patents

Description

  The present invention relates to an inspection apparatus that includes a detection body and a drive unit that moves the detection body, and that targets a storage container that stores a stored object.

  A conventional example of such an inspection apparatus is described in Japanese Unexamined Patent Application Publication No. 2009-128338 (Patent Document 1). In the inspection apparatus of Patent Document 1, a wire cassette that accommodates a glass substrate as an accommodation is used as an accommodation container to be inspected. The wire cassette to be inspected is provided with a plurality of wires for positioning the accommodated glass substrate. Each of the plurality of wires is installed along the left-right direction of the container, and the plurality of wires are arranged in a state of being aligned in the container up-down direction and the container front-rear direction.

In the inspection apparatus of Patent Document 1, a light projecting unit and a light receiving unit are provided in a state where they are arranged in the front-rear direction of the container, and a pair of the light projecting unit and the light receiving unit thus provided is detected at both ends of the wire. Three sets of light projecting parts and light receiving parts are provided, two sets for the purpose and one set for detecting the central part of the wire. Then, when the lifting platform supporting the wire cassette is moved up and down, the deflection of the wire, that is, the contained item is positioned from the deviation of the timing at which the wire is detected by the three sets of light projecting unit and light receiving unit. The distortion of the member for this is detected.
By the way, when the container is a wire cassette that is inspected by the inspection apparatus of Patent Document 1, since the wire cassette is heavy, the driving unit of the lifting platform used to raise and lower the wire cassette has a large output. Since it is necessary to use a thing, the manufacturing cost of a raising / lowering stand becomes high, and, thereby, the manufacturing cost of an inspection apparatus becomes high.
In addition, some storage containers include a plurality of rod-like bodies supported by a container body in a cantilever state instead of a plurality of wires. An inspection apparatus that can detect the distortion of a rod-shaped body in a storage container provided with such a plurality of rod-shaped bodies in a cantilever state has not been known so far.

JP 2009-128338 A

  Therefore, it is desired to realize an inspection apparatus that can suppress the manufacturing cost while detecting the distortion of the rod-like body provided in the storage container.

In view of the above, the characteristic configuration of the inspection apparatus is an inspection apparatus that includes a detection body and a drive unit that moves the detection body, and that targets a storage container that stores a stored object,
The storage container includes a container main body having a storage space for storing the storage material, and a plurality of rod-like bodies that are installed in the storage space and position the storage material stored in the storage space, Each of the rod-shaped bodies is installed in a posture along the first direction, a base end portion that is one end portion of the rod-shaped body is fixed to the container body, and a distal end portion that is the other end portion is fixed. The plurality of rod-shaped bodies are supported by the container body in a cantilever state that is not cantilevered, and the second direction orthogonal to the first direction and the second direction orthogonal to the first direction and the second direction The drive unit is arranged in a plurality of states in each of three directions, the drive unit moves the detection body in the third direction, and the detection unit has a light projecting unit and a light reception unit arranged in the second direction. The light projecting unit has a band-like detection having a width in the third direction. Is projected toward the light receiving unit, and the light projecting unit and the light receiving unit are disposed between the light projecting unit and the light receiving unit in a state where the container body is placed on the mounting unit for inspection. It exists in the point arrange | positioned in the position of the said 1st direction that the said front-end | tip part passes between.

According to these characteristic configurations, the storage container can store the stored item in a state of being positioned by the plurality of rod-shaped bodies. In such a container, the rod-shaped body may be distorted due to the load of the contained material or the weight of the rod-shaped body. However, the strain of the rod-shaped body is detected by inspection with an inspection device as follows. it can.
If the position of the tip of the rod-shaped body when the rod-shaped body is not distorted is an appropriate position, the position of the tip of the rod-shaped body is shifted from the proper position when the rod-shaped body is distorted. The detection device determines the position of the rod-shaped body in the third direction based on the position of the detection body in the third direction when the detection body is moved and the position blocked by the rod-shaped body in the band-shaped detection light. It is possible to detect and detect a position shifted from the appropriate position of the tip of the rod-shaped body, that is, it is possible to detect distortion in the rod-shaped body.
Further, it is not necessary to move the receiving container by moving the detection body in the third direction by the drive unit and detecting the position of the tip of the rod-shaped body. And since a detection body is lightweight compared with a storage container, the manufacturing cost of a test | inspection apparatus can be held down compared with the case where a storage container is moved.
As described above, it is possible to provide an inspection apparatus capable of suppressing the manufacturing cost while detecting the distortion of the rod-like body provided in the storage container.

Top view of goods storage equipment Side view of goods storage equipment Perspective view of the container Plan view of inspection section Side view of inspection unit Rear view of inspection unit Diagram showing support operation mechanism Diagram showing support operation mechanism Perspective view of detector The figure which shows the detection state of a detection object The figure which shows the detection state of a detection object The figure which shows the detection state of a detection object

1. Embodiment Embodiment which employ | adopted the test | inspection apparatus for the container storage equipment is described based on drawing.
As shown in FIGS. 1 and 2, the container storage facility includes a storage shelf 2 that stores the storage container 1, and a stacker crane 3 as a transport device that transports the storage container 1.
The storage shelf 2 is provided with a plurality of storage portions 4 that store the storage containers 1 in a state where they are arranged in the vertical direction Z and the longitudinal direction X of the shelf. In addition, the storage shelf 2 includes a substrate loading / unloading unit 5 for loading and unloading the plate-like body B with respect to the storage container 1, and a storage container 1 that does not contain the plate-like body B (hereinafter referred to as an empty storage container 1). A container loading / unloading section 6 for taking out the storage container 2 from the storage shelf 2 and an inspection section 7 for inspecting the empty storage container 1. Thus, the accommodation accommodated in the storage container 1 is the plate-like body B, and specifically, a glass substrate used for a liquid crystal television or the like. A fan filter unit 8 is installed in the article storage facility, and the storage rack 2 and the stacker crane 3 are installed in a space in which air (gas) flows downward from the ceiling side to the floor side.

  Next, the container housing facility will be described. In the vertical direction Z, the direction along the storage shelf 2 is defined as the shelf longitudinal direction X, and the direction perpendicular to the shelf longitudinal direction X is defined as the shelf depth direction Y. . In the shelf depth direction Y, the side where the stacker crane 3 is present with respect to the storage shelf 2 will be referred to as the front side Y1, and the side opposite to the front side Y1 will be described as the rear side Y2.

[Stacker crane]
The stacker crane 3 includes a traveling carriage 11 that travels along a shelf longitudinal direction X on a traveling path formed on the front side Y <b> 1 of the storage shelf 2, a mast 12 that is erected on the traveling carriage 11, and a vertical movement along the mast 12. An elevator 13 guided in the direction Z, and a transfer device 14 that is supported by the elevator 13 and transfers the storage container 1 between the storage shelf 2 and itself. Further, the elevator 13 is provided with a turning device (not shown) for turning the transfer device 14 around the axis along the vertical direction Z. By moving the transfer device 14 by 180 °, the transfer device 14 is moved. The mounting device 14 can transfer the storage container 1 between any of the pair of storage shelves 2. The stacker crane 3 is configured such that the storage unit 4, the substrate loading / unloading unit 5, the container loading / unloading unit 6, the inspection unit 7, and The container 1 is transported between them.

  In the container storage facility, the storage container 1 storing the plate-like body B is stored in the storage unit 4, and the storage container 1 is transported from the storage unit 4 to the substrate loading / unloading unit 5 by the stacker crane 3. In the substrate loading / unloading unit 5, the plate-like body B taken out by the transfer robot 16 in units of one sheet from the container 1 and placed on the transfer conveyor 17, and the plate-like body B that has been transferred by the transfer conveyor 17, The transfer robot 16 accommodates the storage container 1 in units of one sheet. The storage container 1 in which the loading and unloading of the plate-like body B in the substrate loading / unloading section 5 has been completed is transported from the substrate loading / unloading section 5 to the storage section 4 by the stacker crane 3.

  When the storage container 1 needs to be inspected, the storage container 1 is transported to the substrate loading / unloading section 5 by the stacker crane 3 and the plate-like body B is taken out by the transfer robot 16. Is conveyed to the inspection unit 7. When the container 1 needs to be cleaned, the container 1 is transported to the substrate loading / unloading unit 5 by the stacker crane 3 and the transfer robot 16 takes out all the plate-like bodies B. It is conveyed to the container entry / exit section 6 by the crane 3. When both the inspection and cleaning of the storage container 1 are necessary, the storage container 1 is transported to the substrate loading / unloading section 5 by the stacker crane 3 and all the plate-like bodies B are taken out by the transfer robot 16. After that, the stacker crane 3 transports the container 1 to the container loading / unloading section 6, and the washed container 1 is transported from the container loading / unloading section 6 to the inspection section 7 by the stacker crane 3. In the container entry / exit section 6, the container 1 is taken out from the storage shelf 2 to the rear side Y2, and the taken-out container 1 is washed by a cleaning device (not shown) and then placed in the container entry / exit section 6. Returned. Further, when both the inspection and cleaning of the storage container 1 are necessary, the order in which the container 1 is transported to the container loading / unloading unit 6 and the inspection unit 7 may be switched.

〔container〕
Next, the container 1 will be described. In the container storage facility, the container 1 has a container longitudinal direction D1 (first direction) along the shelf depth direction Y, a container left-right direction D2 (second direction) along the shelf longitudinal direction X, and the container vertical direction. Storage and transport are performed in a posture in which D3 (third direction) is along the vertical direction Z. Therefore, in the state where the container 1 is located in the inspection unit 7, the container front-rear direction D1 is the same direction as the shelf depth direction Y, the container left-right direction D2 is the same direction as the shelf longitudinal direction X, and the container up-down direction D3 is the up-down direction. The direction is the same as Z. Further, the front side in the container front-rear direction D1 and the front side Y1 in the shelf depth direction Y are the same direction, and the rear side in the container front-rear direction D1 and the rear side Y2 in the shelf depth direction Y are the same.

  As shown in FIGS. 3 to 6, the storage container 1 includes a container body 22 having a storage space 21 for storing the plate-like body B, and a support portion 23 that supports the plate-like body B stored in the storage space 21 from below. And. The storage container 1 is provided with a plurality of support portions 23 arranged in the container vertical direction D3. And in the storage container 1, the plate-shaped object B is accommodated in the storage space 21 with the attitude | position along the container front-back direction D1 and the container left-right direction D2.

  The container body 22 is positioned between the upper frame 26, the lower frame 27 positioned below the upper frame 26 in the container vertical direction D 3, and the upper frame 26 and the lower frame 27. And an intermediate frame 28 fixed to. Each of the upper frame 26, the lower frame 27, and the intermediate frame 28 is configured by combining rod-shaped frame members.

The upper frame 26 includes an upper outer frame 26A that is formed in a rectangular shape when viewed in the container vertical direction D3, and an upper inner frame that is provided in a lattice shape in a space surrounded by the upper outer frame 26A and is fixed to the upper outer frame 26A. 26B. The lower frame 27 includes a lower outer frame 27A formed in a rectangular shape when viewed in the container vertical direction D3, and a lower inner frame that is provided in a lattice shape in a space surrounded by the lower outer frame 27A and is fixed to the lower outer frame 27A. 27B.
The intermediate frame 28 has a front frame 28A positioned on the front side of the container front-rear direction D1 with respect to the storage space 21, a right frame 28B positioned on the right side of the container left-right direction D2 with respect to the storage space 21, and the storage space 21. And a left frame 28C located on the left side of the container left-right direction D2. The front frame 28A is composed of a single frame member that is fixed to the upper outer frame 26A and the lower outer frame 27A and extends in the container vertical direction D3. A plurality of front frames 28A are arranged in the container horizontal direction D2 (3 in this embodiment). Book). Each of the right frame 28B and the left frame 28C is configured by a single frame member extending in the container vertical direction D3, and a plurality (five in the present embodiment) are provided in a state of being aligned in the container front-rear direction D1.
The intermediate frame 28 is not provided on the rear side of the container front-rear direction D1 with respect to the accommodation space 21. Accordingly, the storage container 1 is formed with an inlet / outlet 29 through which the plate-like body B is taken in and out of the storage space 21 on the rear side which is one side of the storage space 21 in the container front-rear direction D1.

  A plurality of first rod-like bodies 23A are connected to each of the plurality of front frames 28A in a state of being aligned in the container up-down direction D3, and the plurality of first rod-like bodies 23A are arranged in the container left-right direction D2 and the container up-down direction D3. It is arranged in multiple rows. Each of the first rod-like bodies 23A is installed in a posture along the container front-rear direction D1, and a base end portion that is a front end portion (one end portion) of the first rod-like body 23A is a front frame of the container body 22. It is fixed to 28A and is supported by the container main body 22 in a cantilever state in which the tip end portion which is the rear end portion (the other end portion) is not fixed. Each of the plurality of first rod-like bodies 23A is formed so as to be thinner from the proximal end portion toward the distal end portion side. Each of the plurality of first rod-like bodies 23A has a front end portion located in front of the rear end of the container main body 22, and the second rod-like body 23B and the third rod-like body 23C located most rearward in the container front-rear direction D1. Is located at the same position. The plurality of first rod-like bodies 23 </ b> A correspond to rod-like bodies that are arranged in the accommodation space 21 and position the plate-like body B accommodated in the accommodation space 21.

A plurality of second rod-like bodies 23B are connected to each of the plurality of right frames 28B in a state of being aligned in the container vertical direction D3, and the plurality of second rod-like bodies 23B are arranged in the container front-rear direction D1 and the container vertical direction D3. It is arranged in multiple rows. Each of the plurality of second rod-like bodies 23B is installed in a posture along the container left-right direction D2, and a base end portion which is a right end portion of the second rod-like body 23B is fixed to the right frame 28B of the container main body 22. The left end of the container is supported by the container body 22 in a cantilever state in which the tip is not fixed.
Each of the plurality of left frames 28C is connected to a plurality of third rod-like bodies 23C in a state of being aligned in the container vertical direction D3, and the plurality of third rod-like bodies 23C are arranged in the container front-rear direction D1 and the container vertical direction D3. It is arranged in multiple rows. Each of the plurality of third rod-like bodies 23C is installed in a posture along the container left-right direction D2, and the base end portion, which is the left end portion of the third rod-like body 23C, is fixed to the left frame 28C of the container main body 22. The right side end portion is supported by the container body 22 in a cantilever state in which the tip end portion is not fixed.

  And the area | region (arrangement area | region E) where the several 1st rod-shaped body 23A is arrange | positioned is formed in the center part of the container left-right direction D2 in the accommodation space 21. As shown in FIG. A region in which the plurality of second rod-like bodies 23 </ b> B are arranged is formed on the right side of the central portion in the accommodation space 21. An area in which the plurality of third rod-like bodies 23 </ b> C are arranged is formed on the left side of the central portion in the accommodation space 21.

Each of the plurality of support portions 23 includes a plurality of (three) first rod-like bodies 23A, a plurality (five) second rod-like bodies 23B, and a plurality (five) third rod-like bodies provided at the same height. 23C. As described above, each of the plurality of support portions 23 includes a plurality of first rod-like bodies 23A arranged in a line in the container left-right direction D2. The plurality (three) of first rod-like bodies 23A, the plurality (five) of second rod-like bodies 23B, and the plurality of (five) third rod-like bodies 23C provided at the same height are arranged in a container vertical direction D3. A plurality of support parts 23 are provided in a state where they are arranged in the vertical direction Z.
The support part 23 supports the center part in the container left-right direction D2 in the plate-like body B from the lower side with a plurality of first rod-like bodies 23A, and the right-side part in the container left-right direction D2 in the plate-like body B (the container left-right direction from the center part). The portion located on the right side in the direction D2) is supported from below by the plurality of second rod-like bodies 23B, and the left side in the container left-right direction D2 in the plate-like body B (the part located on the left in the container left-right direction D2 from the center) Is supported from below by the third rod-like body 23C. And by supporting the plate-like body B from below by the support portion 23 in this way, the plate-like body B accommodated in the accommodation space 21 is positioned by the support portion 23 (particularly, the plurality of first rod-like bodies 23A). It is configured.

〔Inspection unit〕
As shown in FIGS. 5 and 6, the inspection unit 7 includes a support base 31 that supports the storage container 1 from below and an inspection device 19 for inspecting the storage container 1. The inspection unit 7 and the container entry / exit unit 6 are installed in a range in which one stacker crane 3 travels in the longitudinal direction X of the shelf, and are installed in a positional relationship that can be directly conveyed by one stacker crane 3. ing. In this embodiment, the inspection unit 7 and the container loading / unloading unit 6 are provided in the same storage shelf 2, and the inspection unit 7 and the container loading / unloading unit 6 are adjacent to each other. In addition, the support base 31 corresponds to a mounting portion for inspection.

The support base 31 is provided with a centering device 32. In the centering device 32, the position of the container 1 placed on the support base 31 in the vertical direction Z is shifted from the appropriate position (position shown in FIG. 4) to the horizontal direction (the shelf longitudinal direction X and the shelf depth direction Y). If it is, the container 1 is moved to an appropriate position.
The centering device 32 includes a plurality of support operation mechanisms 33 that support the container 1 and push and operate the side surface of the container 1. In the present embodiment, the centering device 32 includes four support operation mechanisms 33. That is, the centering device 32 has a support operation mechanism 33 that pushes and operates the side surface of the container 1 from one direction of the shelf longitudinal direction X, and a support operation mechanism that pushes and operates the side surface of the container 1 from the other direction of the shelf longitudinal direction X. 33, a support operation mechanism 33 that pushes and operates the side surface of the container 1 from one direction of the shelf depth direction Y, and a support operation mechanism 33 that pushes and operates the side surface of the container 1 from the other direction of the shelf depth direction Y. I have.

  As shown in FIGS. 7 and 8, the support operation mechanism 33 pushes and operates the base portion 36 fixed to the support base 31, the container support portion 37 that supports the storage container 1 from below, and the side surface of the storage container 1. The pressing part 38 and the interlocking part 39 which interlocks the container support part 37 and the pressing part 38 are provided. The container support portion 37 is supported by the base portion 36 so as to be movable along the vertical direction Z. The pressing portion 38 is supported by the base portion 36 so as to be movable along the horizontal direction (the shelf longitudinal direction X or the shelf depth direction Y) so as to move far and away with respect to the container 1 located in the inspection portion 7. Then, the interlocking portion 39 is pressed as the container support portion 37 moves downward, the pressing portion 38 moves toward the side closer to the container 1, and the container support portion 37 moves upward. The container support part 37 and the pressing part 38 are interlocked so that the part 38 moves to the side away from the storage container 1.

A description will be given of each component of the support operation mechanism 33.
The interlocking portion 39 is supported by the base portion 36 so as to be swingable around a swing axis along the horizontal direction. The container support portion 37 is configured by a roller body that is rotatably supported by the interlocking portion 39, and is supported by the base portion 36 via the interlocking portion 39. The pressing portion 38 is configured by a roller body that is rotatably supported by the interlocking portion 39, and is supported by the base portion 36 via the interlocking portion 39. Then, the interlocking portion 39 swings around the swing axis to change the posture between a standby posture (see FIG. 7) and a support posture (see FIG. 8). The interlocking portion 39 is biased from the support posture to the standby posture by an urging member (not shown), and the interlocking portion 39 is in the standby posture when the support base 31 does not support the storage container 1. It has become. Thus, in the state where the interlocking portion 39 is in the standby posture, as shown in FIG. 7, the container support portion 37 is located at the upper position, and the pressing portion 38 is located at the separated position.

Then, as shown in FIG. 8, in the state where the support table 31 supports the storage container 1 in the inspection unit 7, the storage container 1 is inspected by the stacker crane 3 with the height of the storage container 1 as the support height. 7, the stacker crane 3 moves the storage container 1 to the rear side in the shelf depth direction Y in a state where the stacker crane 3 is supported at a transport height higher than the support height (see FIG. 7), and then the storage container 1. Is lowered from the conveying height to the supporting height. By lowering the storage container 1 from the transport height to the support height in this way, the container support portion 37 moves from the upper position to the lower position due to the load of the storage container 1, and the container support portion 37 positioned at the lower position. Thus, the container 1 is supported at the support height.
As the container support portion 37 moves to the lower position in this way, the pressing portion 38 moves from the separated position to the approach position. When the storage container 1 is lowered from the conveyance height to the support height, if the position of the storage container 1 viewed in the vertical direction Z is shifted from the appropriate position in the horizontal direction, the pressing portion 38 that moves to the approach position is used. The side surface of the storage container 1 is pushed and the position of the storage container 1 is corrected to an appropriate position.

[Inspection equipment]
As shown in FIGS. 4, 6, and 9, the inspection device 19 includes a detection body 41, a guide body 42 that guides the detection body 41 in the vertical direction Z, a drive unit 43 that moves the detection body 41, And a control unit H (see FIG. 5) that controls the drive unit 43, and the storage container 1 that stores the plate-like body B is an inspection target. And the control part H discriminate | determines whether the distortion has arisen in 23 A of 1st rod-shaped bodies based on the detection information of the detection body 41. FIG.

  The detection body 41 includes a light projecting unit 41A and a light receiving unit 41B in a state in which they are arranged in the shelf longitudinal direction X (container left-right direction D2). The light projecting unit 41A projects the band-shaped detection light L having a width in the vertical direction Z (container vertical direction D3) toward the light receiving unit 41B. The light projecting unit 41A and the light receiving unit 41B are connected to a common connecting body 44 and fixed in relative positions. The drive unit 43 moves the detection body 41 in the vertical direction Z. And the control part H is equipped with several 1st rod-shaped with which the container 1 is equipped from the information which shows the height of 41 A of light projection parts, and the light-receiving part 41B, and the information of the detection light L which the light-receiving part 41B received. It is determined whether or not the body 23A is distorted. The control unit H includes height information indicating the height of each of the plurality of first rod-like bodies 23A arranged in the vertical direction Z in a state where the container 1 is placed on the support base 31, and the first rod-like body 23A. Thickness information indicating the thickness in the vertical direction Z is stored.

  Next, the detection body 41 will be described. However, when the positional relationship between the detection body 41 and the storage container 1 is described, and there is no special description, it is assumed that the storage container 1 is supported by the support base 31. Explained. And the 1st side X1 of the shelf longitudinal direction X is made into the 1st side X1, and the other side is made into the 2nd side X2, and in the shelf longitudinal direction X, several 1st rod-shaped body 23A with the same height provided in the storage container 1 is provided. A range from the first rod-like body 23A located closest to the first side X1 to the first rod-like body 23A located closest to the second side X2 in FIG.

The light projecting unit 41A is located on the first side X1 with respect to the arrangement region E, and the light receiving unit 41B is located on the second side X2 with respect to the arrangement region E. As described above, the light projecting unit 41A and the light receiving unit 41B are arranged outside the shelf longitudinal direction X (container left-right direction D2) including the arrangement region E of the plurality of first rod-like bodies 23A included in the support unit 23. Yes.
Further, in a state where the light projecting unit 41A and the light receiving unit 41B are raised and lowered to a height corresponding to the first rod-shaped body 23A, the light projecting unit 41A and the light receiving unit 41B place the container 1 on the support base 31. In this state, the first rod-shaped body 23A is disposed between the light projecting unit 41A and the light receiving unit 41B at a position in the shelf depth direction Y in the first direction such that the tip of the first rod-shaped body 23A passes through. Therefore, in a state where the light projecting unit 41A and the light receiving unit 41B are raised and lowered to a height corresponding to the first rod-like body 23A, the belt-like detection light L projected from the light projecting unit 41A is the tip of the first rod-like body 23A. Is partly blocked.

  The light projecting portion 41A is located between the first rod-like body 23A and the second rod-like body 23B in the shelf longitudinal direction X, and the light receiving portion 41B is the first rod-like body 23A and the third rod-like shape in the shelf longitudinal direction X. It is located between the body 23C. That is, the light projecting unit 41A and the light receiving unit 41B are positioned between the second rod-like body 23B and the third rod-like body 23C, and the shelf longitudinal direction X with respect to the arrangement area E of the plurality of first rod-like bodies 23A. It is arranged outside. Therefore, the light projecting unit 41A and the light receiving unit 41B can be moved in the vertical direction Z without interfering with the first rod-like body 23A, the second rod-like body 23B, and the third rod-like body 23C.

Next, inspection control executed by the control unit H will be described.
Before the control unit H executes the inspection control, the detection body 41 is positioned at the standby height (height shown in FIG. 5). This standby height is higher than the lower frame 27 in the storage container 1 at the transport height and is lower than the upper frame 26 in the storage container 1 at the support height. And the control part H will perform test | inspection control, if it is detected by the presence sensor (not shown) having been mounted in the support stand 31. FIG.
In the inspection control, the height is lowered from the standby height to the start height, then raised to the end height, and then lowered to the standby height. The starting height is a height corresponding to the first rod-like body 23A located at the lowest position among the plurality of first rod-like bodies 23A arranged in the vertical direction Z. In a state where the detection body 41 is located at the start height, the tip of the first rod-like body 23A in the proper posture positioned at the lowest position is located at the center in the vertical direction Z of the detection light L. The end height is a height corresponding to the uppermost first rod-like body 23A among the plurality of first rod-like bodies 23A arranged in the vertical direction Z. In the state where the detection body 41 is located at the end height, the tip of the first rod-like body 23A in the proper posture positioned at the uppermost position is located at the center of the detection light L in the vertical direction Z.

  In the inspection control, the light receiving state of the detection light L in the light receiving unit 41B is confirmed at each of the set heights of the plurality of first rod-like bodies 23A arranged in the vertical direction Z, and a plurality of first bars installed at the respective set heights are confirmed. It is determined whether or not the first rod-like body 23A is distorted with respect to one rod-like body 23A. Specifically, for example, for the five first rod-like bodies 23A located at the lowermost position among the plurality of first rod-like bodies 23A arranged in the vertical direction Z, the detection bodies 41 are arranged at the five lowermost positions. The light receiving state of the detection light L in the light receiving unit 41B is confirmed in a state of being positioned at a height (starting height) corresponding to the first rod-like body 23A. At this time, the range in the vertical direction Z in which the light receiving unit 41B does not receive the detection light L is equal to or smaller than the width obtained by adding an allowable deviation amount to the width in the vertical direction Z of the first rod-shaped body 23A, as shown in FIG. When the position in the up-down direction Z that does not receive the detection light L is a preset position, it is determined that the five first rod-like bodies 23A positioned at the bottom are not distorted. Further, the range in the vertical direction Z in which the light receiving unit 41B does not receive the detection light L is wider than the width obtained by adding an allowable deviation amount to the width in the vertical direction Z of the first rod-shaped body 23A, as shown in FIGS. In this case, or when the position in the vertical direction Z that does not receive the detection light L is shifted from the preset position in the vertical direction Z, the five first rod-like bodies 23A positioned at the bottom are distorted. Is determined. Such determination is performed on the plurality of first rod-like bodies 23A arranged in the vertical direction Z as the detection body 41 is raised from the start height to the end height.

2. Other Embodiments Next, other embodiments of the inspection apparatus will be described.

(1) In the above embodiment, the container body 22 is configured by combining frame materials, but the configuration of the container body 22 may be changed as appropriate. Specifically, for example, plate bodies may be provided on the left and right side surfaces, the upper surface, and the lower surface of the container main body 22 combined with the frame material, and the container main body 22 may be configured in a tubular shape. In addition, when the container body 22 is configured in a cylindrical shape that falls sideways in this way, a fan filter unit is attached so as to close the front surface of the container body 22, and the outside air purified by the fan filter unit is taken into the accommodation space 21. You may comprise as follows.

(2) In the above embodiment, the light projecting unit 41A and the light receiving unit 41B are arranged at positions where they enter the housing space 21 from the entrance 29 while the housing container 1 is supported by the support base 31. The arrangement of the light part 41A and the light receiving part 41B may be changed as appropriate. Specifically, for example, the light projecting unit 41 </ b> A and the light receiving unit 41 </ b> B are arranged so as to be positioned outside the container left-right direction D <b> 2 with respect to the container main body 22, and the light projecting unit 41 </ b> A is disposed from the outside of the accommodation space 21. The detection light L may be projected toward the light receiving unit 41B, and the light receiving unit 41B may receive the detection light L that has passed through the accommodation space 21 outside the accommodation space 21.

(3) In the above embodiment, the light projecting unit 41A and the light receiving unit 41B are coupled to the common connector 44, and the light projecting unit 41A and the light receiving unit 41B are integrally formed by a single drive unit 43. Although moved in the container up-and-down direction D3, the drive unit 43 includes a drive unit 43 that moves the light projecting unit 41A in the container up-and-down direction D3 and a drive unit 43 that moves the light receiving unit 41B in the container up-and-down direction D3. The light projecting unit 41A and the light receiving unit 41B may be moved separately in the container vertical direction D3.

(4) In the embodiment described above, the light projecting unit 41 </ b> A and the light receiving unit 41 </ b> B enter the accommodation space 21 from the entrance / exit 29 using the movement when the storage container 1 is transported to the support base 31 by the stacker crane 3. However, the second drive unit includes a second drive unit that moves the light projecting unit 41A and the light receiving unit 41B in the container front-rear direction D1, and the second drive unit projects the light in the state where the container 1 is supported by the support base 31. By moving the light part 41A and the light receiving part 41B in the container front-rear direction D1, the light projecting part 41A and the light receiving part 41B are positioned on the rear side of the container front-rear direction D1 with respect to the housing space 21 (inside the housing space 21). Position), and the light projecting unit 41A and the light receiving unit 41B may move to the front position in the container front-rear direction D1 with respect to the storage space 21 (the position that has entered the storage space 21).

(5) In the above embodiment, the support portion 23 is configured by the plurality of first rod-like bodies 23A, the plurality of second rod-like bodies 23B, and the plurality of third rod-like bodies 23C. You may comprise only 1 rod-shaped body 23A, and you may comprise the support part 23 in any one of several 1st rod-shaped body 23A and several 2nd rod-shaped body 23B, or several 3rd rod-shaped body 23C. Good.
Further, although the storage container 1 includes the support portion 23 including the first rod-shaped body 23A, the storage container 1 may not include the support portion 23 including the first rod-shaped body 23A. Specifically, a support plate is provided on the bottom surface of the storage container 1, and the plate body B is stored on the support plate in a posture (vertical posture) along the container front-rear direction D1 and the container vertical direction D3. You may make it position the position in the container left-right direction D2 of the plate-shaped body B with the some 1st rod-shaped body 23A located in the both sides of the container left-right direction D2 with respect to the body B.

(6) In the above embodiment, the first direction is the container front-rear direction D1, the second direction is the container left-right direction D2, and the third direction is the container up-down direction D3. However, the relationship between these directions may be changed as appropriate. . Specifically, for example, the first direction may be the container vertical direction D3, and each of the plurality of first rod-like bodies 23A may be installed in a posture along the container vertical direction D3, and the second direction is the container vertical direction. As D3, the light projecting unit 41A and the light receiving unit 41B may be provided in a state of being aligned in the container vertical direction D3.

(7) In the above embodiment, the material to be stored in the storage container 1 is the plate-like body B. However, the storage material to be stored in the storage container 1 may be another plate-like body such as a wafer. The shape of may be other shapes such as a box shape or a cylindrical shape.

(8) It should be noted that the configurations disclosed in the above-described embodiments can be applied in combination with the configurations disclosed in other embodiments as long as no contradiction arises. Regarding other configurations, the embodiments disclosed herein are merely examples in all respects. Accordingly, various modifications can be made as appropriate without departing from the spirit of the present disclosure.

3. Outline of the above embodiment Hereinafter, an outline of the inspection apparatus described above will be described.

The inspection device includes a detection body and a drive unit that moves the detection body, and is an inspection device that targets a storage container that stores a stored object,
The storage container includes a container main body having a storage space for storing the storage material, and a plurality of rod-like bodies that are installed in the storage space and position the storage material stored in the storage space, Each of the rod-shaped bodies is installed in a posture along the first direction, a base end portion that is one end portion of the rod-shaped body is fixed to the container body, and a distal end portion that is the other end portion is fixed. The plurality of rod-shaped bodies are supported by the container body in a cantilever state that is not cantilevered, and the second direction orthogonal to the first direction and the second direction orthogonal to the first direction and the second direction The drive unit is arranged in a plurality of states in each of three directions, the drive unit moves the detection body in the third direction, and the detection unit has a light projecting unit and a light reception unit arranged in the second direction. The light projecting unit has a band-like detection having a width in the third direction. Is projected toward the light receiving unit, and the light projecting unit and the light receiving unit are disposed between the light projecting unit and the light receiving unit in a state where the container body is placed on the mounting unit for inspection. It is arrange | positioned in the position of the said 1st direction that the said front-end | tip part passes through.

With such a configuration, the storage container can store the storage object in a state where the storage container is positioned by the plurality of rod-shaped bodies. In such a container, the rod-shaped body may be distorted due to the load of the contained material or the weight of the rod-shaped body. However, the strain of the rod-shaped body is detected by inspection with an inspection device as follows. it can.
If the position of the tip of the rod-shaped body when the rod-shaped body is not distorted is an appropriate position, the position of the tip of the rod-shaped body is shifted from the proper position when the rod-shaped body is distorted. The detection device determines the position of the rod-shaped body in the third direction based on the position of the detection body in the third direction when the detection body is moved and the position blocked by the rod-shaped body in the band-shaped detection light. It is possible to detect the position shifted from the proper position of the tip of the rod-shaped body, that is, to detect the distortion of the rod-shaped body.
Further, it is not necessary to move the receiving container by moving the detection body in the third direction by the drive unit and detecting the position of the tip of the rod-shaped body. And since a detection body is small and lightweight compared with a storage container, the manufacturing cost of a test | inspection apparatus can be held down compared with the case where a storage container is moved.
As described above, it is possible to provide an inspection apparatus capable of suppressing the manufacturing cost while detecting the distortion of the rod-like body provided in the storage container.

  Here, the first direction is the container front-rear direction, the second direction is the container left-right direction, and the third direction is the container up-down direction, and the contents are in a posture along the container front-rear direction and the container left-right direction. A plate-like body housed in a housing space, wherein the housing container includes a plurality of support portions that support the plate-like body housed in the housing space from below in a state of being arranged in the vertical direction of the container; Each of the support portions includes a plurality of the rod-like bodies arranged in a line in the left-right direction of the container, and the light projecting portion and the light-receiving portion are arrangement regions of the plurality of rod-like bodies included in each of the support portions. It is suitable if it is arrange | positioned with respect to the said container left-right direction.

According to this configuration, the plate-like body can be accommodated in the storage container in a state in which the plate-like bodies are arranged in the vertical direction by supporting the plate-like body on each of the plurality of support portions. And by accommodating a plate-shaped body in this way, the plate-shaped body is supported from below by rod-shaped bodies arranged in a line in the left-right direction of the container. The rod-shaped body may be distorted so that the tip of the rod-shaped body falls downward due to the load of the plate-shaped body or the weight of the rod-shaped body, but the strain of the rod-shaped body is detected by inspecting with an inspection device it can.
Since the light projecting unit and the light receiving unit are arranged on the outer side in the left-right direction of the container with respect to the arrangement area of the plurality of rod-shaped bodies included in each of the support units, one light projecting unit and one light receiving unit support It is possible to collectively detect the positions of the tip portions of the plurality of rod-shaped bodies included in the portion. Therefore, since it is not necessary to provide a plurality of sets of light projecting units and light receiving units, the cost of the detecting unit can be suppressed.

  In addition, it is preferable that the light projecting unit and the light receiving unit are coupled to a common coupling body and fixed in relative positions.

  According to this configuration, since the relative position of the light projecting unit and the light receiving unit is fixed by the coupling body, when the light projecting unit and the light receiving unit are moved in the third direction by the drive unit, There is no relative displacement from the light receiving portion. Therefore, it can be avoided that an error occurs in the detection of the rod-shaped body due to the light projecting unit and the light receiving unit being relatively displaced in the third direction.

  In addition, the storage container has an inlet / outlet formed on one side of the first direction with respect to the storage space, through which the storage object is taken in and out, and the light projecting unit and the light receiving unit are In a state where the storage container is placed on the placement portion, it is preferable that the storage container is disposed at a position where the storage container enters the storage space from the entrance.

  According to this configuration, in a state where the storage container is placed on the placement unit, the light projecting unit and the light receiving unit are located inside the container body in the second direction. Therefore, for example, in the case where the light projecting unit and the light receiving unit are located outside the container body in the second direction, the shape of the container or It is necessary to consider the installation position of the detection unit, but by positioning the light projecting unit and the light receiving unit inside the container body in the second direction, the shape of the storage container and the installation position of the detection unit as described above No need to consider.

  The technology according to the present disclosure can be used for an inspection apparatus that uses a storage container that stores a storage object as an inspection target.

1: storage container 19: inspection device 21: storage space 22: container main body 23: support portion 23A: first rod-shaped body (bar-shaped body)
29: Entrance 31: Support base (mounting part)
41: Detection body 41A: Light projecting unit 41B: Light receiving unit 43: Drive unit B: Plate-shaped body (contained item)
D1: Container longitudinal direction (first direction)
D2: Container left-right direction (second direction)
D3: Vertical direction of container (third direction)
E: Placement area

Claims (4)

An inspection apparatus comprising a detection body and a drive unit that moves the detection body, and a storage container that stores a storage object, which is an inspection target,
The storage container includes a container main body having a storage space for storing the storage material, and a plurality of rod-shaped bodies that are installed in the storage space and position the storage material stored in the storage space,
Each of the plurality of rod-shaped bodies is installed in a posture along the first direction, and a proximal end portion which is one end portion of the rod-shaped body is fixed to the container body, and a distal end portion which is the other end portion Is supported by the container body in a cantilever state that is not fixed,
The plurality of rod-shaped bodies are arranged in a state of being arranged in a plurality in each of a second direction orthogonal to the first direction and a third direction orthogonal to the first direction and the second direction,
The drive unit moves the detection body in the third direction,
The detector includes a light projecting unit and a light receiving unit arranged in the second direction, and the light projecting unit projects a band-shaped detection light having a width in the third direction toward the light receiving unit. And
The light projecting unit and the light receiving unit are configured such that the tip portion passes between the light projecting unit and the light receiving unit in a state where the container main body is placed on the mounting unit for inspection. An inspection device arranged at a position in the first direction. The first direction is the container front-rear direction, the second direction is the container left-right direction, and the third direction is the container vertical direction,
The container is a plate-like body that is housed in the housing space in a posture along the container front-rear direction and the container left-right direction,
The storage container includes a plurality of support portions that support the plate-like body stored in the storage space from below in a state of being arranged in the vertical direction of the container,
Each of the plurality of support portions includes the plurality of rod-shaped bodies arranged in a line in the left-right direction of the container,
The inspection device according to claim 1, wherein the light projecting unit and the light receiving unit are disposed on the outer side in the left-right direction of the container with respect to an arrangement region of the plurality of rod-shaped bodies included in each of the support units.   The inspection apparatus according to claim 1, wherein the light projecting unit and the light receiving unit are coupled to a common coupling body and have a relative position fixed. The storage container has an inlet / outlet formed on one side in the first direction with respect to the storage space, through which the stored items are taken in and out of the storage space,
4. The projector according to claim 1, wherein the light projecting unit and the light receiving unit are disposed at a position where the light receiving unit enters the housing space from the doorway in a state where the housing container is placed on the placing unit. The inspection device according to claim 1.

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