CN108120388B - Inspection apparatus - Google Patents
Inspection apparatus Download PDFInfo
- Publication number
- CN108120388B CN108120388B CN201711238042.9A CN201711238042A CN108120388B CN 108120388 B CN108120388 B CN 108120388B CN 201711238042 A CN201711238042 A CN 201711238042A CN 108120388 B CN108120388 B CN 108120388B
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- Prior art keywords
- container
- rod
- section
- light receiving
- light
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
- B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
- B65D85/48—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for glass sheets
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
Abstract
The storage container (1) is provided with a container main body (22) having a storage space (21), and a plurality of rod-shaped bodies (23A) provided in the storage space (21), wherein each of the plurality of rod-shaped bodies (23A) is provided in a posture along a 1 st direction (D1), the detection body (41) is provided with a light-projecting part (41A) and a light-receiving part (41B) in a state that the light-projecting part (41A) and the light-receiving part (41B) are arranged in the 2 nd direction (D2), the light-projecting part (41A) projects strip-shaped detection light having a width in the 3 rd direction to the light-receiving part (41B), and the light-projecting part (41A) and the light-receiving part (41B) are arranged at a position where the end part of the rod-shaped body (23A) passes through the 1 st direction (D1) between the light-projecting part (41A) and the light-receiving part (41B).
Description
Technical Field
The present invention relates to a test apparatus including a specimen and a drive unit for moving the specimen, and having a container for containing a content as a test object.
Background
A conventional example of such an inspection apparatus is described in japanese patent application laid-open No. 2009-128338 (patent document 1). In the inspection apparatus of patent document 1, a wire cassette accommodating a glass substrate as an object to be inspected is used as an accommodating container. The wire cassette to be inspected is provided with a plurality of wires for positioning the accommodated glass substrate. The plurality of wires are arranged in the horizontal direction of the container, and are arranged in the vertical direction of the container and the front-rear direction of the container.
In the inspection device of patent document 1, the light projecting portion and the light receiving portion are provided in a state of being arranged in the front-rear direction of the container, and the group of the light projecting portion and the light receiving portion provided in this way is provided as three groups of two groups for inspecting both end portions of the wire rod and one group for detecting the central portion of the wire rod. Further, the deflection of the wire rod, that is, the deflection of a member for positioning the contents is detected by the deviation of the timing of detecting the wire rod by the 3 sets of the light-emitting portions and the light-receiving portions when the elevating table for supporting the wire rod box is elevated.
However, in the case where the storage container is a wire rod cassette to be inspected in the inspection apparatus of patent document 1, the wire rod cassette is heavy, and a driving portion having a large output is required for a driving portion of the elevating table used for elevating and lowering the wire rod cassette, so that the manufacturing cost of the elevating table increases, and thus the manufacturing cost of the inspection apparatus increases.
The storage container includes a plurality of rod-like bodies supported by the container main body in a cantilever state instead of the plurality of wires. In such a storage container provided with a plurality of rod-shaped bodies in a cantilever state, an inspection device capable of detecting the distortion of the rod-shaped bodies has not been known.
Disclosure of Invention
Therefore, it is desirable to realize an inspection device capable of detecting the distortion of the rod-shaped body provided in the storage container and suppressing the manufacturing cost.
In view of the above circumstances, an inspection apparatus according to the present invention is an inspection apparatus including a container for containing a content, the container including a container body having a containing space for containing the content, and a plurality of rod-shaped bodies provided in the containing space to position the content contained in the containing space, the rod-shaped bodies being arranged in postures along a 1 st direction, the rod-shaped bodies being supported by the container body in a cantilever state in which a base end portion of one end portion of the rod-shaped bodies is fixed to the container body and a tip end portion of the other end portion of the rod-shaped bodies is not fixed, the rod-shaped bodies being arranged in a plurality of rows in a 2 nd direction and a 3 rd direction, respectively, the 2 nd direction is orthogonal to the 1 st direction, the 3 rd direction is orthogonal to the 1 st direction and the 2 nd direction, the drive unit moves the detection body in the 3 rd direction, the detection body includes a light projecting unit and a light receiving unit in a state where the light projecting unit and the light receiving unit are arranged in the 2 nd direction, the light projecting unit projects a strip-shaped detection light having a width in the 3 rd direction toward the light receiving unit, and the light projecting unit and the light receiving unit are arranged at a position in the 1 st direction where the end portion passes through a space between the light projecting unit and the light receiving unit in a state where the container body is placed on a placement portion for inspection.
According to these technical features, the container can contain the contents in a state of being positioned by the plurality of rods. In such a storage container, although there is a possibility that the rod-shaped member is distorted due to the load of the stored contents and the weight of the rod-shaped member, the distortion of the rod-shaped member can be detected as follows by performing inspection by the inspection device.
When the position of the distal end portion of the rod-shaped body is set to the proper position when the rod-shaped body is not distorted, the position of the distal end portion of the rod-shaped body is deviated from the proper position when the rod-shaped body is distorted. The detection device can detect the position of the distal end portion of the rod-shaped body in the 3 rd direction, and can detect a position deviated from an appropriate position of the distal end portion of the rod-shaped body, that is, a skew on the rod-shaped body, based on the position of the detection body in the 3 rd direction when the detection body is moved and the position of the band-shaped detection light blocked by the rod-shaped body.
Further, the position of the tip end portion of the rod-shaped body is detected by moving the detection body in the 3 rd direction by the driving unit, so that it is not necessary to move the storage container. Further, since the sample is lighter than the storage container, the manufacturing cost of the inspection apparatus can be reduced as compared with the case where the storage container is moved.
Thus, it is possible to provide an inspection device capable of detecting the distortion of the rod-shaped body provided in the storage container and suppressing the manufacturing cost.
Drawings
Fig. 1 is a plan view of an article storage apparatus.
Fig. 2 is a side view of the article storage apparatus.
Fig. 3 is a perspective view of the receiving container.
Fig. 4 is a plan view of the inspection unit.
Fig. 5 is a side view of the inspection portion.
Fig. 6 is a rear view of the inspection portion.
Fig. 7 is a view showing a support operation mechanism.
Fig. 8 is a view showing a support operation mechanism.
Fig. 9 is a perspective view of the detection unit.
Fig. 10 is a diagram showing a detection state of a detection object.
Fig. 11 is a diagram showing a detection state of a detection object.
Fig. 12 is a diagram showing a detection state of a detection object.
Detailed Description
1. Detailed description of the preferred embodiments
An embodiment in which an inspection device is used in a container storage facility will be described with reference to the drawings.
As shown in fig. 1 and 2, the container storage facility includes a storage rack 2 and a stacker crane 3, the storage rack 2 stores the storage containers 1, and the stacker crane 3 serves as a conveying device for conveying the storage containers 1.
The storage rack 2 is provided with a plurality of storage sections 4 for storing the storage containers 1 arranged in the vertical direction Z and the rack longitudinal direction X. The housing rack 2 includes a substrate loading/unloading portion 5 for loading/unloading the plate-like body B into/from the housing container 1, a container loading/unloading portion 6 for taking out the housing container 1 not housing the plate-like body B (hereinafter, referred to as an empty housing container 1) from the housing rack 2, and an inspection portion 7 for inspecting the empty housing container 1. The contents accommodated in the accommodating container 1 are plate-like bodies B, and more specifically, glass substrates used for liquid crystal televisions and the like. The article storage facility is provided with a fan filter unit 8, and the storage rack 2 and the stacker crane 3 are provided in a space in which air (gas) flows downward from the ceiling side to the ground side.
Next, the container housing facility will be described, but a direction along the storage rack 2 when viewed from the vertical direction Z will be referred to as a rack longitudinal direction X, and a direction orthogonal to the rack longitudinal direction X will be referred to as a rack depth direction Y. Note that, in the rack depth direction Y, the side of the stacker crane 3 located on the storage rack 2 is referred to as a front side Y1, and the side opposite to the front side Y1 is referred to as a rear side Y2.
[ stacker crane ]
The stacker crane 3 includes a traveling carriage 11, a rod 12, a lifting table 13, and a transfer device 14, wherein the traveling carriage 11 travels in a frame longitudinal direction X on a traveling path formed on a front side Y1 of the storage frame 2, the rod 12 is provided upright on the traveling carriage 11, the lifting table 13 is guided in a vertical direction Z along the rod 12, the transfer device 14 is supported by the lifting table 13, and the storage container 1 is transferred between the storage frame 2 and itself. The lifting table 13 is provided with a rotating device (not shown) that rotates the transfer device 14 about an axis along the vertical direction Z and rotates the transfer device 14 by 180 °, whereby the transfer device 14 can transfer the storage container 1 to and from any one of the pair of storage shelves 2. The stacker crane 3 transports the storage container 1 among the storage unit 4, the substrate loading/unloading unit 5, the container loading/unloading unit 6, and the inspection unit 7 by the travel of the traveling carriage 11, the elevation of the elevation table 13, and the retraction and rotation of the transfer device 14. The container 1 conveyed to the container loading/unloading unit 6 is taken out from the storage rack 2 to the rear Y2, and the taken-out container 1 is washed by a washing apparatus (not shown). The washed container 1 washed by the washing apparatus is returned to the container inlet/outlet portion 6.
In the container storage facility, the storage container 1 in which the plate-like body B is stored in the storage section 4, and the storage container 1 is transported from the storage section 4 to the substrate loading/unloading section 5 by the stacker crane 3. In the substrate loading/unloading section 5, the plate-like bodies B1 accommodated in the accommodation container 1 are taken out by the transfer robot 16 in 1 unit and placed on the transport conveyor 17, and the plate-like bodies B transported by the transport conveyor 17 are accommodated in the accommodation container 1 by 1 unit by the transfer robot 16. The storage container 1 in which the plate-like body B of the substrate loading and unloading section 5 is loaded and unloaded is conveyed from the substrate loading and unloading section 5 to the storage section 4 by the stacker crane 3.
When the storage container 1 needs to be inspected, the storage container 1 is conveyed to the substrate loading/unloading unit 5 by the stacker crane 3, and after all the plate-like bodies B are taken out by the transfer robot 16, the plate-like bodies B are conveyed to the inspection unit 7 by the stacker crane 3. When the storage container 1 needs to be washed, the storage container 1 is conveyed to the substrate loading/unloading unit 5 by the stacker crane 3, and the plate-like bodies B are all taken out by the transfer robot 16 and then conveyed to the container loading/unloading unit 6 by the stacker crane 3. When both the inspection and the washing are required for the storage container 1, the storage container 1 is conveyed to the substrate loading/unloading unit 5 by the stacker crane 3, the plate-like bodies B are all taken out by the transfer robot 16, and then conveyed to the container loading/unloading unit 6 by the stacker crane 3, and the washed storage container 1 is conveyed from the container loading/unloading unit 6 to the inspection unit 7 by the stacker crane 3. In addition, when both the inspection and the washing of the storage container 1 are required, the order of conveying the container loading/unloading unit 6 and the inspection unit 7 may be changed.
[ Container ]
Next, the storage container 1 will be described. In the container storage facility, the storage containers 1 are stored and transported in a posture in which the container front-rear direction D1 (1 st direction) is along the rack depth direction Y, the container left-right direction D2 (2 nd direction) is along the rack longitudinal direction X, and the container up-down direction D3 (3 rd direction) is along the up-down direction Z. Therefore, in the state where the storage container 1 is positioned in the inspection unit 7, the container front-rear direction D1 is the same direction as the rack depth direction Y, the container left-right direction D2 is the same direction as the rack longitudinal direction X, and the container up-down direction D3 is the same direction as the up-down direction Z. The front side in the container front-rear direction D1 is the same as the front side Y1 in the shelf depth direction Y, and the rear side in the container front-rear direction D1 is the same as the rear side Y2 in the shelf depth direction Y.
As shown in fig. 3 to 6, the container 1 includes a container body 22 and a support portion 23, the container body 22 has a storage space 21 for storing the plate-like body B, and the support portion 23 supports the plate-like body B stored in the storage space 21 from below. The storage container 1 includes a plurality of support portions 23 in a state where the support portions 23 are arranged in the container vertical direction D3. In the storage container 1, the plate-like body B is stored in the storage space 21 in a posture along the container front-rear direction D1 and the container left-right direction D2.
The container main body 22 includes an upper frame 26, a lower frame 27 located below the upper frame 26 in the container vertical direction D3, and an intermediate frame 28 located between the upper frame 26 and the lower frame 27 and fixed to the upper frame 26 and the lower frame 27. The upper frame 26, the lower frame 27, and the intermediate frame 28 are combined to form a rod-shaped frame material.
The upper frame 26 is composed of an upper outer frame 26A and an upper inner frame 26B, the upper outer frame 26A is formed in a rectangular shape as viewed in the container vertical direction D3, and the upper inner frame 26B is provided in a lattice shape in a space surrounded by the upper outer frame 26A and fixed to the upper outer frame 26A. The lower frame 27 is composed of a lower outer frame 27A and a lower inner frame 27B, the lower outer frame 27A is formed in a rectangular shape as viewed in the container vertical direction D3, and the lower inner frame 27B is provided in a lattice shape in a space surrounded by the lower outer frame 27A and fixed to the lower outer frame 27A.
The intermediate frame 28 is constituted by a front frame 28A, a right frame 28B, and a left frame 28C, the front frame 28A being positioned on the front side of the container longitudinal direction D1 with respect to the accommodating space 21, the right frame 28B being positioned on the right side of the container lateral direction D2 with respect to the accommodating space 21, and the left frame 28C being positioned on the left side of the container lateral direction D2 with respect to the accommodating space 21. The front frame 28A is formed of one frame member fixed to the upper frame 26A and the lower frame 27A and extending in the container vertical direction D3, and includes a plurality of (3 in the present embodiment) frames arranged in the container horizontal direction D2. The right frame 28B and the left frame 28C are each formed of one frame member extending in the container vertical direction D3, and a plurality of frames (5 frames in the present embodiment) are provided in a state of being arranged in the container front-rear direction D1.
The intermediate frame 28 is not provided on the rear side of the container front-rear direction D1 with respect to the accommodation space 21. Thus, the storage container 1 has an access opening 29 for allowing the plate-like body B to enter and exit the storage space 21, formed on the rear side of the storage space 21, which is the one side in the container longitudinal direction D1.
A plurality of (3 in the present embodiment) 1 st rod-shaped bodies 23A are connected to each of the plurality of front frames 28A in a state of being arranged in the container vertical direction D3, and a plurality of 1 st rod-shaped bodies 23A are arranged in a state of being arranged in the container horizontal direction D2 and the container vertical direction D3. Each of the 1 st rod-shaped bodies 23A is provided in a posture along the container longitudinal direction D1, and is supported by the container main body 22 in a cantilever state in which a base end portion, which is a front-side end portion (one-side end portion) of the 1 st rod-shaped body 23A, is fixed to the front frame 28A of the container main body 22 and a tip end portion, which is a rear-side end portion (the other-side end portion), is not fixed. Each of the plurality of 1 st rod-shaped bodies 23A is formed in a shape that becomes thinner from the base end portion toward the tip end portion. Each of the plural 1 st rod-shaped bodies 23A has a tip end portion located forward of the rear end of the container main body 22 and located at the same position as the 2 nd and 3 rd rod-shaped bodies 23B and 23C located at the rearmost in the container front-rear direction D1. The plurality of 1 st rod-shaped bodies 23A correspond to rod-shaped bodies that are arranged in the storage space 21 and position the plate-shaped bodies B stored in the storage space 21.
A plurality of (5 in the present embodiment) 2 nd rod-shaped bodies 23B are connected to each of the right frames 28B in a state of being arranged in the container vertical direction D3, and a plurality of the 2 nd rod-shaped bodies 23B are arranged in a state of being arranged in the container front-rear direction D1 and the container vertical direction D3. The plurality of 2 nd rod-shaped bodies 23B are respectively provided in a posture along the container left-right direction D2, and are supported by the container main body 22 in a cantilever state in which the base end portion, which is the right end portion of the 2 nd rod-shaped body 23B, is fixed to the right frame 28B of the container main body 22, and the tip end portion, which is the left end portion, is not fixed.
A plurality of (5 in the present embodiment) 3 rd rod-shaped bodies 23C are connected to each of the plurality of left frames 28C in a state of being arranged in the container vertical direction D3, and a plurality of the 3 rd rod-shaped bodies 23C are arranged in a state of being arranged in the container longitudinal direction D1 and the container vertical direction D3. Each of the 3 rd rod-shaped bodies 23C is provided in a posture extending in the container left-right direction D2, and is supported by the container main body 22 in a cantilever state in which a base end portion, which is a left end portion of the 3 rd rod-shaped body 23C, is fixed to the left frame 28C of the container main body 22 and a tip end portion, which is a right end portion, is not fixed.
In addition, an area (arrangement area E) in which the plurality of 1 st rod-shaped bodies 23A are arranged is formed in the center portion of the container horizontal direction D2 of the accommodation space 21. A region in which a plurality of the 2 nd rod-shaped bodies 23B are arranged is formed on the right side of the central portion of the accommodation space 21. A region in which the plurality of 3 rd rod-shaped bodies 23C are arranged is formed on the left side of the central portion of the accommodation space 21.
Each of the plurality of support portions 23 is configured by a plurality of (3 in the present embodiment) 1 st rod-shaped bodies 23A, a plurality of (5 in the present embodiment) 2 nd rod-shaped bodies 23B, and a plurality of (5 in the present embodiment) 3 rd rod-shaped bodies 23C provided at the same height. In this way, each of the plurality of support portions 23 includes a plurality of 1 st rod-shaped bodies 23A aligned in the container left-right direction D2. Further, a plurality of (3 in the present embodiment) 1 st rod-shaped bodies 23A, a plurality of (5 in the present embodiment) 2 nd rod-shaped bodies 23B, and a plurality of (5 in the present embodiment) 3 rd rod-shaped bodies 23C provided at the same height are arranged in the container vertical direction D3, and thus a plurality of support portions 23 are provided in a state of being arranged in the vertical direction Z.
The support portion 23 supports the central portion in the container left-right direction D2 of the plate-like body B from below via the plurality of 1 st rod-like bodies 23A, supports the right side portion (portion positioned on the right side in the container left-right direction D2 with respect to the central portion) of the container left-right direction D2 of the plate-like body B from below with the plurality of 2 nd rod-like bodies 23B, and supports the left side portion (portion positioned on the left side in the container left-right direction D2 with respect to the central portion) of the container left-right direction D2 of the plate-like body B from below with the plurality of 3 rd rod-like bodies 23C. In this way, the plate-like body B is supported from below by the support portion 23, and the plate-like body B accommodated in the accommodation space 21 is positioned by the support portion 23 (particularly, the plurality of 1 st rod-like bodies 23A).
[ inspection section ]
As shown in fig. 5 and 6, the inspection unit 7 includes a support base 31 for supporting the storage container 1 from below, and an inspection device 19 for inspecting the storage container 1. The inspection unit 7 and the container loading/unloading unit 6 are provided in a range in which one stacker crane 3 travels in the rack longitudinal direction X, and are provided in a positional relationship in which they can be directly transported by the one stacker crane 3. In the present embodiment, the same storage rack 2 is provided with the inspection unit 7 and the container loading/unloading unit 6, and the inspection unit 7 and the container loading/unloading unit 6 are adjacent to each other in the rack longitudinal direction X. The support table 31 corresponds to a mounting portion for inspection.
A centering device 32 is provided at the support table 31. The centering device 32 moves the storage container 1 to an appropriate position when a position of the storage container 1 placed on the support table 31 as viewed in the vertical direction Z is displaced from the appropriate position (the position shown in fig. 4) in the horizontal direction (the rack longitudinal direction X and the rack depth direction Y).
The centering device 32 includes a plurality of support operation mechanisms 33 that support the storage container 1 and press the side surface of the storage container 1. In the present embodiment, the centering device 32 includes 4 support operation mechanisms 33. That is, the centering device 32 includes a support operation mechanism 33 for pressing the side surface of the storage container 1 from the right side in the rack longitudinal direction X, a support operation mechanism 33 for pressing the side surface of the storage container 1 from the left side in the rack longitudinal direction X, a support operation mechanism 33 for pressing the side surface of the storage container 1 from the front side in the rack depth direction Y, and a support operation mechanism 33 for pressing the side surface of the storage container 1 from the rear side in the rack depth direction Y.
As shown in fig. 7 and 8, the support operation mechanism 33 includes a base 36 fixed to the support base 31, a container support portion 37 for supporting the storage container 1 from below, a pressing portion 38 for pressing the side surface of the storage container 1, and an interlocking portion 39 for interlocking the container support portion 37 and the pressing portion 38. The container support portion 37 is supported by the base portion 36 so as to be movable in the vertical direction Z. The pressing portion 38 is supported by the base portion 36 so as to be movable in the horizontal direction (the rack longitudinal direction X or the rack depth direction Y) so as to move toward and away from the storage container 1 located in the inspection portion 7. The interlocking portion 39 interlocks the container support portion 37 and the pressing portion 38 such that the pressing portion 38 moves toward the side closer to the storage container 1 as the container support portion 37 moves downward, and the pressing portion 38 moves toward the side farther from the storage container 1 as the container support portion 37 moves upward.
The respective structures of the support operation mechanism 33 will be explained.
The linkage portion 39 is supported by the base portion 36 so as to be swingable about a swing axis in the horizontal direction. The container support portion 37 is constituted by a roller body rotatably supported by the interlocking portion 39, and is supported by the base portion 36 via the interlocking portion 39. The pressing portion 38 is constituted by a roller body rotatably supported by the interlocking portion 39, and is supported by the base portion 36 via the interlocking portion 39. Then, the interlocking section 39 swings around the swing shaft center, and thereby the posture changes to the standby posture (see fig. 7) and the support posture (see fig. 8). The interlocking section 39 is biased from the supporting posture to the standby posture by a biasing member (not shown), and the interlocking section 39 assumes the standby posture in a state where the support base 31 does not support the storage container 1. In the state where the interlocking portion 39 assumes the standby posture, the container support portion 37 is located at the upper position and the pressing portion 38 is located at the separated position as shown in fig. 7.
As shown in fig. 8, in a state where the storage container 1 is supported by the support base 31 in the inspection unit 7, the height of the storage container 1 is set as a support height, and when the storage container 1 is conveyed to the inspection unit 7 by the stacker crane 3, the stacker crane 3 moves the storage container 1 to the rear side in the rack depth direction Y in a state where the storage container 1 is supported at a conveyance height (see fig. 7) higher than the support height, and then lowers the storage container 1 from the conveyance height to the support height. As the storage container 1 is lowered from the transport height to the support height in this way, the container support portion 37 moves from the upper position to the lower position by the load of the storage container 1, and the storage container 1 is supported at the support height by the container support portion 37 located at the lower position.
Then, as the container support portion 37 moves to the lower position, the pressing portion 38 moves from the spaced position (see fig. 7) to the close position (see fig. 8). When the position of the storage container 1 as viewed in the vertical direction Z is deviated from the proper position in the horizontal direction when the storage container 1 is lowered from the conveyance height to the support height, the side surface of the storage container 1 is pressed by the pressing portion 38 moving to the close position, and the position of the storage container 1 is corrected to the proper position.
[ inspection apparatus ]
As shown in fig. 4, 6, and 9, the inspection apparatus 19 includes a detection body 41, a guide body 42 that guides the detection body 41 in the vertical direction Z, a drive unit 43 that moves the detection body 41, and a control unit H (see fig. 5) that controls the drive unit 43, and the storage container 1 that stores the plate-like body B is set as an inspection target. The control unit H determines whether or not the 1 st rod-shaped body 23A is distorted based on the detection information of the detector 41.
The specimen 41 includes the light projecting section 41A and the light receiving section 41B in a state where the light projecting section 41A and the light receiving section 41B are arranged in the rack longitudinal direction X (container left-right direction D2). The light projecting section 41A projects the band-shaped detection light L having a width in the vertical direction Z (container vertical direction D3) toward the light receiving section 41B. The light projecting section 41A and the light receiving section 41B are connected to a common connecting body 44, and the relative positions thereof are fixed. The driving unit 43 moves the detection body 41 in the vertical direction Z. The control unit H determines whether or not the plurality of 1 st rod-shaped bodies 23A included in the storage container 1 are distorted, based on the information indicating the heights of the light projecting unit 41A and the light receiving unit 41B and the information of the detection light L received by the light receiving unit 41B. The control unit H stores height information indicating the height of each of the plurality of 1 st rod-shaped bodies 23A arranged in the vertical direction Z in a state where the storage container 1 is placed on the support base 31, and thickness information indicating the thickness of the 1 st rod-shaped body 23A in the vertical direction Z.
Next, the following description will be given of the position of the sample 41, but when the positional relationship between the sample 41 and the container 1 is described, the state where the container 1 is supported on the support base 31 will be described as a precondition unless otherwise described. Further, one side (right side) in the rack longitudinal direction X is a 1 st side X1, the opposite side (left side) is a 2 nd side X2, and the arrangement region E is defined as a range from the 1 st rod-shaped body 23A located closest to the 1 st side X1 to the 1 st rod-shaped body 23A located closest to the 2 nd side X2 among the plurality of 1 st rod-shaped bodies 23A provided in the storage container 1 at the same height in the rack longitudinal direction X.
The light projector 41A is located on the 2 nd side X2 with respect to the arrangement area E, and the light receiver 41B is located on the 1 st side X1 with respect to the arrangement area E. In this way, the light projecting unit 41A and the light receiving unit 41B are disposed outside the shelf longitudinal direction X (container left-right direction D2) including the disposition region E of the plurality of 1 st rod-shaped bodies 23A included in the support unit 23.
In a state where the light projecting section 41A and the light receiving section 41B are raised to a height corresponding to the 1 st rod-shaped body 23A, the light projecting section 41A and the light receiving section 41B are disposed at a position in the rack depth direction Y in the 1 st direction through which the tip end portion of the 1 st rod-shaped body 23A passes between the light projecting section 41A and the light receiving section 41B in a state where the storage container 1 is placed on the support base 31. Therefore, in a state where the light projecting section 41A and the light receiving section 41B are raised and lowered to a height corresponding to the 1 st rod-shaped body 23A, the strip-shaped detection light L projected from the light projecting section 41A is partially blocked by the distal end portion of the 1 st rod-shaped body 23A.
The light projecting section 41A is positioned between the 1 st rod-shaped body 23A and the 3 rd rod-shaped body 23C in the rack longitudinal direction X, and the light receiving section 41B is positioned between the 1 st rod-shaped body 23A and the 2 nd rod-shaped body 23B in the rack longitudinal direction X. That is, the light projecting section 41A and the light receiving section 41B are located between the 2 nd rod-shaped body 23B and the 3 rd rod-shaped body 23C, and are arranged outside the arrangement region E of the plurality of 1 st rod-shaped bodies 23A in the rack longitudinal direction X. Therefore, the light projecting unit 41A and the light receiving unit 41B can move in the vertical direction Z without interfering with the 1 st rod-shaped body 23A, the 2 nd rod-shaped body 23B, and the 3 rd rod-shaped body 23C.
Next, the inspection control performed by the control unit H will be described.
Before the control unit H executes the inspection control, the detection body 41 is located at the standby height (the height shown in fig. 5). The standby height is a height higher than the lower frame 27 of the storage container 1 at the conveyance height, and is a height lower than the upper frame 26 of the storage container 1 at the support height. When the presence sensor (not shown) detects that the carriage is placed on the support table 31, the control unit H performs inspection control.
By the inspection control, the height is lowered from the standby height to the start height, then raised to the end height, and then lowered to the standby height. The starting height is a height corresponding to the 1 st rod 23A positioned lowermost among the plurality of 1 st rods 23A arranged in the vertical direction Z. In a state where the detection body 41 is positioned at the starting height, the distal end portion of the 1 st rod-shaped body 23A positioned at the lowermost appropriate posture is positioned at the center portion in the vertical direction Z of the detection light L. The end height is a height corresponding to the 1 st rod-shaped body 23A positioned uppermost among the plurality of 1 st rod-shaped bodies 23A arranged in the vertical direction Z. In a state where the detection body 41 is positioned at the end height, the distal end portion of the 1 st rod-shaped body 23A positioned at the uppermost appropriate posture is positioned at the center portion in the vertical direction Z of the detection light L.
Then, by the inspection control, the light receiving state of the detection light L by the light receiving unit 41B is confirmed at the set heights of the 1 st rod-shaped bodies 23A arranged in the vertical direction Z, and it is determined whether or not the 1 st rod-shaped body 23A is distorted at the 1 st rod-shaped body 23A. Specifically, for example, with respect to the lowermost 5 1 st rod-shaped bodies 23A of the plurality of 1 st rod-shaped bodies 23A arranged in the vertical direction Z, the light receiving state of the detection light L by the light receiving unit 41B is confirmed in a state where the detection body 41 is positioned at a height (starting height) corresponding to the lowermost 5 1 st rod-shaped bodies 23A. At this time, as shown in fig. 10, when the range in the vertical direction Z in which the light receiving unit 41B does not receive the detection light L is equal to or less than the width obtained by adding the allowable deviation amount to the width in the vertical direction Z of the 1 st rod-shaped body 23A and the position in the vertical direction Z in which the detection light L is not received is a predetermined position, it is determined that no distortion occurs in the 5 1 st rod-shaped bodies 23A located at the lowermost position. As shown in fig. 11 and 12, the range in the vertical direction Z in which the light receiving unit 41B does not receive the detection light L is larger than the range in which the width in the vertical direction Z of the 1 st rod-shaped body 23A is increased by the allowable deviation amount, and the range in the vertical direction Z in which the light receiving unit 41B does not receive the detection light L is determined to cause distortion in the 5 lowermost 1 st rod-shaped bodies 23A when the position in the vertical direction Z is deviated from the preset position. Such determination is performed for the plurality of 1 st rod-shaped bodies 23A arranged in the vertical direction Z in accordance with the increase of the detection body 41 from the start height to the end height.
2. Other embodiments
Next, another embodiment of the inspection apparatus will be described.
(1) In the above embodiment, the container main body 22 is combined and configured as a frame member, but the structure of the container main body 22 may be changed as appropriate. Specifically, for example, the container body 22 may be configured in a cylindrical shape in which plate members are provided on the left and right side surfaces, the upper surface, and the lower surface of the container body 22 combined with the frame members, and the container body 22 is laid sideways. In the case of the cylindrical structure in which the container main body 22 is arranged to be laterally inclined, the fan filter unit may be attached so as to close the front surface of the container main body 22, and the outside air cleaned by the fan filter unit may be sucked into the housing space 21.
(2) In the above embodiment, the light projecting section 41A and the light receiving section 41B are disposed at positions that enter the housing space 21 from the entrance 29 in a state where the housing container 1 is supported by the support table 31, but the arrangement of the light projecting section 41A and the light receiving section 41B may be appropriately changed. Specifically, for example, the light projecting unit 41A and the light receiving unit 41B may be arranged so as to be positioned outside the container body 22 in the container right-left direction D2, the light projecting unit 41A may project the detection light L from outside the housing space 21 to the light receiving unit 41B, and the light receiving unit 41B may receive the detection light L passing through the housing space 21 outside the housing space 21.
(3) In the above embodiment, the light projecting section 41A and the light receiving section 41B are connected to the common connecting body 44, and the light projecting section 41A and the light receiving section 41B are integrally moved in the container vertical direction D3 by the single driving section 43, but the driving section 43 may be provided with a driving section 43 for moving the light projecting section 41A in the container vertical direction D3 and a driving section 43 for moving the light receiving section 41B in the container vertical direction D3, and the light projecting section 41A and the light receiving section 41B may be moved in the container vertical direction D3, respectively.
(4) In the above embodiment, the light projecting section 41A and the light receiving section 41B are provided to enter the housing space 21 from the doorway 29 by the operation when the housing container 1 is conveyed to the support table 31 by the stacker crane 3, but the light projecting section 41A and the light receiving section 41B may be provided with a 2 nd driving section that moves the light projecting section 41A and the light receiving section 41B in the container longitudinal direction D1, and the light projecting section 41A and the light receiving section 41B may be moved in the container longitudinal direction D1 by the 2 nd driving section, the light projecting section 41A and the light receiving section 41B may be moved to a position on the rear side of the container longitudinal direction D1 (position outside the housing space 21) with respect to the housing space 21, and the light projecting section 41A and the light receiving section 41B may be moved to a position on the front side of the container longitudinal direction D1 (position entering the housing space 21) with respect to the housing space 21 in a state where the housing container 1 is supported by the support table 31.
(5) In the above embodiment, the support portion 23 is constituted by the plurality of 1 st rod-shaped bodies 23A, the plurality of 2 nd rod-shaped bodies 23B, and the plurality of 3 rd rod-shaped bodies 23C, but the support portion 23 may be constituted by only the plurality of 1 st rod-shaped bodies 23A, or only the support portion 23 may be constituted by any one of the plurality of 1 st rod-shaped bodies 23A, the plurality of 2 nd rod-shaped bodies 23B, or the plurality of 3 rd rod-shaped bodies 23C.
Further, the receiving container 1 is provided with the supporting portion 23 including the 1 st rod-shaped body 23A, but the receiving container 1 may not be provided with the supporting portion 23 including the 1 st rod-shaped body 23A. Specifically, the bottom surface of the container 1 may be provided with a support plate, the plate-like body B may be accommodated in the posture (vertical posture) along the container front-rear direction D1 and the container vertical direction D3 in the support plate, and the position of the plate-like body B in the container horizontal direction D2 may be positioned by the plurality of 1 st rod-like bodies 23A located on both sides of the plate-like body B in the container horizontal direction D2.
(6) In the above embodiment, the 1 st direction is the container front-rear direction D1, the 2 nd direction is the container left-right direction D2, and the 3 rd direction is the container up-down direction D3, but the relationship between these directions may be changed as appropriate. Specifically, for example, the 1 st direction may be set to the container vertical direction D3, and each of the 1 st rod-shaped bodies 23A may be provided in a posture along the container vertical direction D3, or the 2 nd direction may be set to the container vertical direction D3, and the light projecting section 41A and the light receiving section 41B may be provided in a state of being arranged in the container vertical direction D3.
(7) In the above embodiment, the contents stored in the storage container 1 are the plate-like bodies B, but the contents stored in the storage container 1 may be other plate-like bodies such as wafers, or the shape of the contents may be other shapes such as a box shape or a cylindrical shape.
(8) The configurations disclosed in the above embodiments can be combined with the configurations disclosed in the other embodiments as long as no contradiction occurs. With respect to the other structures, the embodiments disclosed in the present specification are merely exemplary in all aspects. Therefore, various modifications can be made as appropriate within the scope not departing from the gist of the present invention.
3. Summary of the above embodiments
The outline of the inspection apparatus described above will be described below.
An inspection apparatus comprising a container for containing a content, the container comprising a container body having a containing space for containing the content, and a plurality of rod-shaped bodies provided in the containing space for positioning the content contained in the containing space, wherein the rod-shaped bodies are arranged in postures along a 1 st direction and supported by the container body in a cantilever state in which a base end portion of one end portion of the rod-shaped bodies is fixed to the container body and a tip end portion of the other end portion is not fixed, wherein the rod-shaped bodies are arranged in a plurality of rows in a 2 nd direction and a 3 rd direction, respectively, and wherein the 2 nd direction is orthogonal to the 1 st direction, the 3 rd direction is orthogonal to the 1 st direction and the 2 nd direction, the drive unit moves the detection body in the 3 rd direction, the detection body includes a light projecting unit and a light receiving unit in a state where the light projecting unit and the light receiving unit are arranged in the 2 nd direction, the light projecting unit projects a band-shaped detection light having a width in the 3 rd direction toward the light receiving unit, and the light projecting unit and the light receiving unit are arranged at a position in the 1 st direction where the end portion passes through between the light projecting unit and the light receiving unit in a state where the container body is placed on a placement portion for inspection.
According to such a configuration, the storage container can store the contents in a state of being positioned by the plurality of rod-shaped bodies. In such a storage container, although there is a possibility that the rod-shaped member is distorted due to the load of the stored contents and the weight of the rod-shaped member, the distortion of the rod-shaped member can be detected as follows by performing inspection by the inspection device.
When the position of the distal end portion of the rod-shaped body is set to the proper position when the rod-shaped body is not distorted, the position of the distal end portion of the rod-shaped body is deviated from the proper position when the rod-shaped body is distorted. The detection device can detect the position of the distal end portion of the rod-shaped body in the 3 rd direction, and can detect a position deviated from an appropriate position of the distal end portion of the rod-shaped body, that is, a skew of the rod-shaped body, based on the position of the detection body in the 3 rd direction when the detection body is moved and the position of the band-shaped detection light blocked by the rod-shaped body.
Further, the position of the tip end portion of the rod-shaped body is detected by moving the detection body in the 3 rd direction by the driving unit, so that it is not necessary to move the storage container. Further, since the sample is smaller and lighter than the storage container, the manufacturing cost of the inspection apparatus can be reduced as compared with the case where the storage container is moved.
Thus, it is possible to provide an inspection device capable of detecting the distortion of the rod-shaped body provided in the storage container and suppressing the manufacturing cost.
Here, it is preferable that the 1 st direction be a container front-rear direction, the 2 nd direction be a container left-right direction, and the 3 rd direction be a container up-down direction, the contents be a plate-like body accommodated in the accommodation space in a posture along the container front-rear direction and the container left-right direction, the accommodation container include a plurality of support portions arranged in the container up-down direction, the support portions support the plate-like body accommodated in the accommodation space from below, the plurality of support portions include a plurality of rod-like bodies arranged in a line in the container left-right direction, and the light projecting portion and the light receiving portion be disposed outside the container left-right direction with respect to an arrangement region of the plurality of rod-like bodies included in each of the support portions.
According to this aspect, the plurality of plate-like bodies can be accommodated in the accommodating container in a state aligned in the vertical direction of the container by supporting the plate-like bodies by the plurality of supporting portions. By housing the plate-like bodies in this manner, the rod-like bodies aligned in a row in the left-right direction of the container are supported from below. The rod-shaped body may be distorted so that the tip end portion of the rod-shaped body descends downward due to the load of the plate-shaped body and the weight of the rod-shaped body.
Since the light projecting section and the light receiving section are disposed outside the arrangement region of the plurality of rod-shaped bodies included in each of the support sections in the left-right direction of the container, the positions of the tip end sections of the plurality of rod-shaped bodies included in one support section can be collectively detected by the light projecting section and the light receiving section. Therefore, it is not necessary to provide a plurality of light-projecting sections and light-receiving sections, and therefore the cost of the detection section can be reduced.
Preferably, the light projecting section and the light receiving section are connected to a common connecting body, and the relative positions are fixed.
According to this aspect, since the relative positions of the light projecting section and the light receiving section are fixed by the coupling body, the relative positions of the light projecting section and the light receiving section do not deviate when the light projecting section and the light receiving section are moved in the 3 rd direction by the driving section. Therefore, it is possible to avoid the occurrence of an error in the detection of the rod-shaped body due to the relative displacement of the light projecting section and the light receiving section in the 3 rd direction.
Further, it is preferable that the housing container has an access opening for allowing the housing object to enter and exit the housing space on one side in the 1 st direction with respect to the housing space, and the light projecting section and the light receiving section are disposed at positions that enter the housing space from the access opening in a state where the housing container is placed on the placement section.
According to this aspect, in a state where the storage container is placed on the placement portion, the light projecting portion and the light receiving portion are located inside the container body in the 2 nd direction. Therefore, for example, when the light projecting section and the light receiving section are located outside the container body in the 2 nd direction, it is necessary to take into account the shape of the container and the installation position of the detection section so that the detection light projected from the light projecting section does not interfere with the container body, but by locating the light projecting section and the light receiving section inside the container body in the 2 nd direction, it is not necessary to take into account the shape of the container and the installation position of the detection section as described above.
Industrial applicability
The technique of the present invention can be used in an inspection apparatus that uses a container for storing contents as an inspection target.
Description of the reference numerals
1: accommodating container
19: inspection apparatus
21: accommodation space
22: container body
23: support part
23A: stick type 1 (stick type)
29: entrance and exit
31: supporting table (carrying part)
41: detecting body
41A: light projecting part
41B: light receiving part
43: driving part
B: plate-shaped body (containing)
D1: front and rear direction of container (1 st direction)
D2: left and right direction of container (2 nd direction)
D3: vertical direction of the container (3 rd direction)
E: and configuring the area.
Claims (5)
1. A testing device comprising a specimen and a driving unit for moving the specimen, characterized in that,
the container for containing the contents is used as the object to be inspected,
the container includes a container body having a storage space for storing the contents, and a plurality of rod-shaped bodies provided in the storage space for positioning the contents stored in the storage space,
the plurality of rod-shaped bodies are respectively arranged along the 1 st direction, and are supported on the container main body in a cantilever state in which the base end part of one end part of the rod-shaped bodies is fixed to the container main body and the tip end part of the other end part is not fixed,
a plurality of the rod-shaped bodies are arranged in a 2 nd direction and a 3 rd direction, respectively, the 2 nd direction being orthogonal to the 1 st direction, the 3 rd direction being orthogonal to the 1 st direction and the 2 nd direction,
the driving unit moves the detecting body in the 3 rd direction,
the detecting body includes a light projecting section and a light receiving section in a state where the light projecting section and the light receiving section are arranged in the 2 nd direction, the light projecting section projects a strip-shaped detection light having a width in the 3 rd direction toward the light receiving section,
the light projecting section and the light receiving section are arranged outside the arrangement region of the plurality of rod-shaped bodies in the 2 nd direction and at a position in the 1 st direction such that the end section passes between the light projecting section and the light receiving section in a state where the container body is placed on a placement section for inspection.
2. The inspection apparatus of claim 1,
the 1 st direction is a container front-rear direction, the 2 nd direction is a container left-right direction, and the 3 rd direction is a container up-down direction,
the container is a plate-like body accommodated in the accommodating space in a posture extending in the front-rear direction of the container and in the left-right direction of the container,
the container includes a plurality of support portions arranged in a vertical direction of the container, the support portions supporting the plate-like body accommodated in the accommodation space from below,
the plurality of support portions each include a plurality of rod-shaped bodies aligned in a row in the left-right direction of the container.
3. The inspection apparatus of claim 1 or 2,
the light projecting section and the light receiving section are connected to a common connecting body, and the relative positions thereof are fixed.
4. The inspection apparatus of claim 1 or 2,
the storage container is formed with an entrance for allowing the contents to enter and exit the storage space on one side in the 1 st direction with respect to the storage space,
the light projecting section and the light receiving section are disposed at positions that enter the accommodating space from the entrance and exit in a state where the accommodating container is placed on the placement section.
5. The inspection apparatus of claim 3,
the storage container is formed with an entrance for allowing the contents to enter and exit the storage space on one side in the 1 st direction with respect to the storage space,
the light projecting section and the light receiving section are disposed at positions that enter the accommodating space from the entrance and exit in a state where the accommodating container is placed on the placement section.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111183031.1A CN113758436A (en) | 2016-11-30 | 2017-11-30 | Inspection apparatus |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016-233192 | 2016-11-30 | ||
| JP2016233192A JP6610518B2 (en) | 2016-11-30 | 2016-11-30 | Inspection device |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111183031.1A Division CN113758436A (en) | 2016-11-30 | 2017-11-30 | Inspection apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108120388A CN108120388A (en) | 2018-06-05 |
| CN108120388B true CN108120388B (en) | 2022-01-14 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111183031.1A Pending CN113758436A (en) | 2016-11-30 | 2017-11-30 | Inspection apparatus |
| CN201711238042.9A Active CN108120388B (en) | 2016-11-30 | 2017-11-30 | Inspection apparatus |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111183031.1A Pending CN113758436A (en) | 2016-11-30 | 2017-11-30 | Inspection apparatus |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP6610518B2 (en) |
| KR (1) | KR102412923B1 (en) |
| CN (2) | CN113758436A (en) |
| TW (1) | TWI733940B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020152750A1 (en) | 2019-01-21 | 2020-07-30 | Ｊｆｅスチール株式会社 | Design assistance method for metal material, prediction model generation method, metal material manufacturing method, and design assistance device |
| CN112644841B (en) * | 2020-12-03 | 2022-09-09 | Tcl华星光电技术有限公司 | Cartridge and automatic cleaning storage |
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Also Published As
| Publication number | Publication date |
|---|---|
| JP2018091657A (en) | 2018-06-14 |
| TW201823668A (en) | 2018-07-01 |
| CN108120388A (en) | 2018-06-05 |
| KR20180062398A (en) | 2018-06-08 |
| JP6610518B2 (en) | 2019-11-27 |
| KR102412923B1 (en) | 2022-06-23 |
| CN113758436A (en) | 2021-12-07 |
| TWI733940B (en) | 2021-07-21 |
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