TWI733940B - Inspection equipment - Google Patents

Abstract

The storage container includes: a container body with a storage space; and a plurality of rod-shaped bodies arranged in the storage space, and each of the plurality of rod-shaped bodies is arranged in a posture along the first direction, and is contained in a cantilever state The main body is supported, and a plurality of rod-shaped bodies are arranged, and the rod-shaped bodies are in a state of arranging plural rods in each of the second direction and the third direction, and the detection body has a light-emitting part and a light-receiving part, and The light-emitting part and the light-receiving part are arranged in the second direction. The light-emitting part will project a strip-shaped detection light with a width in the third direction toward the light-receiving part. The light-emitting part and the light-receiving part are arranged in the first direction. In the following position of the direction, this position is the position where the tip of the rod-shaped body passes between the light-emitting part and the light-receiving part.

Description

Check the device

FIELD OF THE INVENTION The present invention relates to an inspection device that includes a detection body and a drive unit that moves the detection body, and uses a storage container that stores the contents as an inspection object.

BACKGROUND OF THE INVENTION A conventional example of such an inspection device has been described in Japanese Patent Laid-Open No. 2009-128338 (Patent Document 1). In the inspection apparatus of Patent Document 1, a metal wire cassette is used as a storage container to be inspected, and the metal wire cassette is stored with a glass substrate as a storage object. In addition, the metal wire cassette of the inspection target is provided with a plurality of metal wires for positioning the contained glass substrate. Each of the plurality of metal wires is arranged along the left-right direction of the container, and the plurality of metal wires are arranged in a state of being arranged in the vertical direction of the container and the front-rear direction of the container.

SUMMARY OF THE INVENTION Problems and Means to Solve the Problems In the inspection device of Patent Document 1, a light projecting part and a light receiving part are provided, and the light projecting part and the light receiving part are arranged in the front and rear direction of the container, and are equipped like this The combination of the light-emitting part and the light-receiving part is equipped with a total of 3 groups, namely, 2 groups for detecting the two ends of the metal wire, and 1 group for detecting the center of the metal wire. In addition, when the lifting platform supporting the metal wire cassette is raised and lowered, the deviation of the time point when the metal wire is detected by the three sets of light-emitting parts and the light-receiving part will detect the bending of the metal wire, that is, the detection of the metal wire The skew of the component that positions the contents. However, when the storage container is the wire cassette of the inspection device of Patent Document 1 as the inspection object, since the wire cassette is a heavy object, the driving part of the lifting platform used to lift the wire cassette needs to use a higher output. For large products, the manufacturing cost of the lifting platform becomes higher, so that the manufacturing cost of the inspection device becomes higher. In addition, in the storage container, there is a storage container equipped with a plurality of rod-shaped bodies supported by the container body in a cantilever state instead of a plurality of metal wires. An inspection device that can detect the skew of the rod-shaped body in such a container equipped with a plurality of rod-shaped bodies in a cantilever state has not been known until now.

Therefore, it is desired to realize an inspection device that can detect the skew of the rod-shaped body provided in the storage container and can suppress the manufacturing cost.

The characteristic structure of the inspection device in view of the above is the following: An inspection device is provided with a detection body and a driving part for moving the detection body, and a storage container accommodating the contents as an inspection object, the storage container includes: a container The main body has a storage space for accommodating the aforementioned objects; and a plurality of rod-shaped bodies are arranged in the aforementioned storage space, and the aforementioned objects contained in the aforementioned storage space are positioned. The posture in the 1 direction is set, and the base end of the rod-shaped body is fixed to the container body in a cantilever state where the end of the rod-shaped body is not fixed, and the tip of the other side is not fixed. Support, the plurality of rod-shaped bodies are arranged in a state in which a plurality of rods are arranged in a second direction orthogonal to the first direction and a third direction orthogonal to the first direction and the second direction Is configured such that the driving unit moves the detecting body in the third direction, the detecting body includes a light emitting portion and a light receiving portion, and the light emitting portion and the light receiving portion are arranged in the second direction. The light projecting unit projects the strip-shaped detection light having a width in the third direction toward the light receiving unit, and the light projecting unit and the light receiving unit are arranged in the following position in the first direction. In a state where the container body is placed on the placement portion for inspection, the front end portion passes through the position between the light projecting portion and the light receiving portion.

According to these features, the storage container can store the contents in a state where it has been positioned by a plurality of rod-shaped bodies. In addition, in such a container, although the rod-shaped body may be skewed due to the load of the contained contents or the weight of the rod-shaped body, it is possible to detect as follows by inspecting with an inspection device The skewness of the rod-shaped body. If the position of the front end of the rod-shaped body when the rod-shaped body is not skewed is set to an appropriate position, when the rod-shaped body is skewed, the position of the front end of the rod-shaped body will deviate from the proper position. In addition, the detection device can detect the position of the tip portion of the rod-shaped body in the third direction based on the position of the detection body in the third direction when the detection body is moved or the position covered by the rod-shaped body in the band-shaped detection light. Therefore, the position where the tip of the rod-shaped body deviates from the proper position can be detected, that is, the skew of the rod-shaped body can be detected. In addition, by moving the detection body in the third direction by the drive unit to detect the position of the tip portion of the rod-shaped body, it is not necessary to move the storage container. In addition, since the detection body is lighter than the storage container, the manufacturing cost of the inspection device can be suppressed compared to when the storage container is moved. In this way, it is possible to provide an inspection device that can detect the skew of the rod-shaped body provided in the storage container and can suppress the manufacturing cost.

Modes for Carrying Out the Invention 1. Embodiments A description will be given of embodiments in which an inspection device is used in a container storage facility based on the drawings. As shown in FIG. 1 and FIG. 2, the container storage facility includes: a storage rack 2 to store the storage container 1; and a stacker crane 3 as a transport device for transporting the storage container 1. The storage rack 2 includes a plurality of storage portions 4 for storing the storage containers 1, and the storage portions 4 are arranged in the vertical direction Z and the rack length direction X. In addition, the storage rack 2 is provided with: a board access portion 5 for taking out the storage container 1 into the plate-shaped body B; a container access portion 6 for storing the storage container 1 (hereinafter sometimes referred to as The empty storage container 1) is taken out from the storage rack 2; and the inspection part 7 is used to inspect the empty storage container 1. In this way, the storage object stored in the storage container 1 is the plate-shaped body B, and in detail, it is a glass substrate used for a liquid crystal television or the like. In the article storage facility, a fan filter unit 8 is installed, and the storage rack 2 and the stacker crane 3 are installed in a space where air (gas) flows downward from the ceiling side to the floor side.

Next, the container storage facility will be described. From the vertical direction Z, the direction along the storage rack 2 is taken as the rack length direction X, and the direction perpendicular to the rack length direction X is taken as the rack depth direction Y. . In the rack depth direction Y, the side where the stacker crane 3 exists with respect to the storage rack 2 is referred to as the front side Y1, and the side opposite to the front side Y1 is referred to as the rear side Y2.

[Stacker crane] The stacker crane 3 is provided with: a traveling trolley 11, which travels along the shed length direction X on a traveling path formed on the front side Y1 of the storage rack 2, and a pole 12, which is erected on the traveling trolley 11 The lifting platform 13, which is guided in the vertical direction Z along the pole 12; and the transfer device 14, is supported on the lifting platform 13, and will transfer the container 1 between the storage rack 2 and itself. In addition, the lifting platform 13 is equipped with a rotating device (not shown), which makes the transfer device 14 orbit around the axis in the vertical direction Z. By rotating the transfer device 14 by 180°, it can move The carrying device 14 can transfer the storage container 1 regardless of whether it is between the storage rack 2 and any one of the pair of storage racks 2. In addition, the stacker crane 3 uses the traveling of the traveling trolley 11, the raising and lowering of the lifting platform 13, and the forwarding and retreating and turning of the transfer device 14. The storage container 1 is transferred between 7. Furthermore, the storage container 1 conveyed to the container access portion 6 is taken out from the storage rack 2 in the rear direction Y2, and the taken-out storage container 1 is cleaned by a washing device (not shown). The container 1 after washing, which has been washed by the washing device, returns to the container access part 6.

In the container storage facility, the storage container 1 accommodating the plate-shaped body B is stored in the storage portion 4, and the storage container 1 is transferred from the storage portion 4 to the board entrance and exit portion 5 by the stacker crane 3. In the board access section 5, the plate-shaped body B1 contained in the storage container 1 is taken out by the transfer robot 16 in units of one piece, is placed on the conveying conveyor 17, and is conveyed by the conveying conveyor 17 The plate-shaped body B of is stored in the storage container 1 by the transfer robot 16 in units of one piece. The plate-shaped body B is taken out and put into the completed storage container 1 in the board access portion 5, and is transported from the board access portion 5 to the storage portion 4 by the stacker crane 3.

When the storage container 1 needs to be inspected, the storage container 1 will be transported to the board access section 5 by the stacker crane 3, and after all the plate-shaped bodies B are taken out by the transfer robot 16 The crane 3 is transported to the inspection unit 7. In addition, when the storage container 1 needs to be cleaned, the storage container 1 will be transported to the board access section 5 by the stacker crane 3, and after all the plate-shaped bodies B are taken out by the transfer robot 16 It is transported to the container access part 6 by the stacker crane 3. In addition, when it is necessary to inspect and clean the storage container 1, the storage container 1 is transported to the board access section 5 by the stacker crane 3, and all the plate-shaped bodies B are taken out by the transfer robot 16 After that, it is transported to the container access section 6 by the stacker crane 3, and the cleaned storage container 1 is transported from the container access section 6 to the inspection section 7 by the stacker crane 3. In addition, when both inspection and washing of the storage container 1 are required, the order of conveyance to the container access section 6 and the inspection section 7 may be alternated.

[Container] Next, the storage container 1 will be described. Furthermore, in the container storage facility, the container 1 has the container front and rear direction D1 (first direction) along the shelf depth direction Y, the container left and right direction D2 (second direction) along the shelf length direction X, and the container vertical direction D3. (3rd direction) The storage or transportation is carried out along the posture of the vertical direction Z. Therefore, when the container 1 is in the inspection section 7, the container front and rear direction D1 will be the same direction as the rack depth direction Y, the container left and right direction D2 will be the same direction as the rack length direction X, and the container vertical direction D3 will be the same as the vertical direction D3. The direction Z becomes the same direction. In addition, the front side of the container in the front-rear direction D1 is the same as the front side Y1 in the rack depth direction Y, and the rear side of the container in the front-rear direction D1 is the same as the rear side Y2 in the rack depth direction Y.

As shown in FIGS. 3 to 6, the storage container 1 includes a container body 22 having a storage space 21 for accommodating a plate-shaped body B, and a support part 23 that supports the plate-shaped body B contained in the storage space 21 from below. The storage container 1 is provided with a plurality of support portions 23, and the support portions 23 are in a state of being arranged in the container vertical direction D3. In addition, in the storage container 1, the plate-shaped body B is stored in the storage space 21 in a posture along the container front-rear direction D1 and the container left-right direction D2.

The container body 22 has: an upper frame 26; a lower frame 27, which is located below the upper frame 26 in the vertical direction D3 of the container; a middle frame 28, which is located between the upper frame 26 and the lower frame 27, and is fixed to Upper frame 26 and lower frame 27. The upper frame 26, the lower frame 27, and the middle frame 28 are each constituted by combining rod-shaped frame materials.

The upper frame 26 is composed of an upper outer frame 26A and an upper inner frame 26B. The upper outer frame 26A is formed in a rectangular shape when viewed from the vertical direction D3 of the container. The upper inner frame 26B is arranged on the upper outer frame 26A in a lattice shape. In the enclosed space, it is fixed to the upper outer frame 26A. The lower frame 27 is composed of a lower outer frame 27A and a lower inner frame 27B. The lower outer frame 27A is formed in a rectangular shape when viewed from the vertical direction D3 of the container. The lower inner frame 27B is arranged in a lattice shape on the lower outer frame 27A. In the enclosed space, and fixed to the lower outer frame 27A. The middle frame 28 is composed of a front frame 28A, a right frame 28B, and a left frame 28C. The front frame 28A is positioned on the front side of the container in the front-to-rear direction D1 relative to the storage space 21, and the right frame 28B is 21 relative to the storage space. On the right side of the container left-right direction D2, the left frame 28C is positioned on the left side of the container left-right direction D2 with respect to the storage space 21. The front frame 28A is composed of one frame material that is fixed to the upper outer frame 26A and the lower outer frame 27A and extends in the vertical direction D3 of the container. The frame 28A is arranged in the container left-right direction D2. The right frame 28B and the left frame 28C are each composed of a frame material extending in the vertical direction D3 of the container, and are provided with a plurality of frames (5 in this embodiment). The right frame 28B and the left frame 28C are It is in a state of being arranged in the front-rear direction D1 of the container. The intermediate frame 28 is not provided on the rear side of the container front-rear direction D1 with respect to the storage space 21. Thereby, the storage container 1 is formed with a doorway 29 on one side of the container in the front-rear direction D1, that is, on the rear side with respect to the storage space 21.

A plurality of (three in this embodiment) first rod-shaped bodies 23A are connected to each of the plurality of front frames 28A. The first rod-shaped bodies 23A are arranged in the vertical direction D3 of the container. The 1st rod-shaped body 23A is arrange|positioned in the state in which plural pieces were arranged in the container left-right direction D2 and the container up-down direction D3. The first rod-shaped bodies 23A are each installed in a posture along the container front-rear direction D1, and are fixed to the container body 22 at the front end (one-side end) of the first rod-shaped body 23A. The front frame 28A is supported by the container body 22 in a cantilever state where the rear end (the other end), that is, the front end, is not fixed. The plurality of first rod-shaped bodies 23A are each formed in a shape that becomes thinner from the base end to the distal end side. The front end of each of the plurality of first rod-shaped bodies 23A is located forward of the rear end of the container body 22 and at the same position as the second rod-shaped body 23B or the third rod-shaped body 23C. The body 23B or the third rod-shaped body 23C is located rearmost in the container front-rear direction D1. In addition, the plurality of first rod-shaped bodies 23A correspond to a rod-shaped body that is arranged in the accommodating space 21 and positions the plate-shaped body B accommodated in the accommodating space 21.

Each of the plurality of right frames 28B is connected with a plurality of (5 in this embodiment) second rod-shaped bodies 23B. The second rod-shaped bodies 23B are arranged in the vertical direction D3 of the container. The second rod-shaped body 23B is arranged in a state in which a plurality of rods are arranged in the container front-rear direction D1 and the container vertical direction D3. Each of the plurality of second rod-shaped bodies 23B is installed in a posture along the container left-right direction D2, and is fixed to the right frame 28B of the container body 22 at the right end of the second rod-shaped body 23B, that is, the base end. , And the left end, that is, the front end, is supported by the container body 22 in a cantilever state where the front end is not fixed. Each of the plural left frames 28C is connected with plural (5 in this embodiment) third rod-shaped bodies 23C. The third rod-shaped bodies 23C are arranged in the vertical direction D3 of the container. The third rod-shaped body 23C is arranged in a state in which a plurality of rods are arranged in the container front-rear direction D1 and the container vertical direction D3. The plurality of third rod-shaped bodies 23C are each installed in a posture along the container left-right direction D2, and are fixed to the left frame 28C of the container body 22 at the left end of the third rod-shaped body 23C, that is, the base end. , And the right end, that is, the front end, is supported by the container body 22 in a cantilever state where the front end is not fixed.

In addition, a region (arrangement region E) in which a plurality of first rod-shaped bodies 23A can be arranged is formed in the center portion of the container in the left-right direction D2 of the storage space 21. In the center portion of the storage space 21 facing to the right, an area where a plurality of second rod-shaped bodies 23B can be arranged is formed. In the accommodating space 21, the center part faces to the left, and there is formed an area in which a plurality of third rod-shaped bodies 23C can be arranged.

Each of the plurality of support portions 23 is composed of a plurality of (three in this embodiment) first rod-shaped body 23A, and a plurality of (5 in this embodiment) second rod-shaped body arranged at the same height. 23B and a plurality of (5 in this embodiment) third rod-shaped body 23C. In this manner, each of the plurality of support portions 23 includes a plurality of first rod-shaped bodies 23A arranged in a row in the container left-right direction D2. In addition, a plurality of (three in this embodiment) first rod-shaped body 23A, a plurality of (five in this embodiment) second rod-shaped body 23B, and plural (5 in this embodiment) and the third rod-shaped body 23C is arranged in the vertical direction D3 of the container, and the third rod-shaped body 23C can be provided with a plurality of supporting parts 23, and the supporting parts 23 are arranged in the vertical direction Z state. The support part 23 supports the central part of the container in the plate-shaped body B in the left-right direction D2 with a plurality of first rod-shaped bodies 23A from below, and supports the right part of the container in the plate-shaped body B in the left-right direction D2 (in the container In the left-right direction D2, the part located on the right side of the central part) is supported from below by a plurality of second rod-shaped bodies 23B, and the left part of the plate-shaped body B in the left-right direction D2 of the container (in the left-right direction D2 of the container) The upper part is located on the left side of the central part) with a plurality of third rod-shaped bodies 23C supported from below. In addition, it is configured such that the plate-shaped body B is supported from below by the support portion 23, so that the support portion 23 (especially the plurality of first rod-shaped bodies 23A) can be housed in the plate-like shape of the accommodating space 21 Body B is positioned.

[Inspection part] As shown in FIGS. 5 and 6, the inspection part 7 includes a support table 31 for supporting the storage container 1 from below, and an inspection device 19 for inspecting the storage container 1. The inspection part 7 and the container access part 6 are installed in the range of a stack crane 3 in the rack length direction X, and are in a positional relationship that can be directly transported by a stack crane 3 set up. In this embodiment, the inspection section 7 and the container access section 6 are provided in the same storage rack 2, and the inspection section 7 and the container access section 6 are adjacent to each other in the rack length direction X. In addition, the support table 31 is equivalent to the mounting part for inspection.

The support table 31 is provided with a centering device 32. The centering device 32 has shifted from the appropriate position (position shown in FIG. 4) to the horizontal direction (the rack length direction X and the rack depth direction Y) from the appropriate position (the position shown in FIG. 4) in the storage container 1 placed on the support table 31 as viewed from the vertical direction Z. When the position is moved, the storage container 1 will be moved to an appropriate position. The centering device 32 is provided with a plurality of support operation mechanisms 33 that support the storage container 1 and push and operate the side surface of the storage container 1. In this embodiment, the centering device 32 is provided with four support operation mechanisms 33. That is, the centering device 32 includes: a support operation mechanism 33 that pushes and operates the side surface of the container 1 from the right side of the rack length direction X; a support operation mechanism 33 that pushes and operates the side surface of the container 1 from the left side of the rack length direction X; The support operation mechanism 33 that pushes and operates the side surface of the storage container 1 from the front side in the rack depth direction Y, and the support operation mechanism 33 that pushes and operates the side surface of the storage container 1 from the rear side in the rack depth direction Y.

As shown in FIGS. 7 and 8, the support operation mechanism 33 includes a base 36, which is fixed to the support table 31; a container support 37, which supports the storage container 1 from below; and a pressing portion 38, which pushes and operates the storage container 1. The side; and the interlocking portion 39, so that the container support portion 37 and the pressing portion 38 interlock. The container support portion 37 is supported by the base portion 36 so as to be movable in the vertical direction Z. The pressing portion 38 is supported by the base portion 36 so as to be movable in the horizontal direction (the rack length direction X or the rack depth direction Y), and the container 1 positioned in the inspection portion 7 can be moved far and near. In addition, the interlocking portion 39 links the container support portion 37 with the pressing portion 38, and can move downward with the container support portion 37, so that the pressing portion 38 moves to the side close to the container 1, and can follow The container supporting portion 37 moves upward, so that the pressing portion 38 moves to the side away from the storage container 1.

The description of each configuration of the support operation mechanism 33 will be added. The interlocking part 39 is supported by the base 36 so as to be able to swing freely around a swing axis in the horizontal direction. The container support portion 37 is constituted by a roller that is rotatably supported by the interlocking portion 39 and is supported by the base 36 through the interlocking portion 39. The pressing portion 38 is composed of a roller body rotatably supported by the interlocking portion 39 and is supported by the base 36 through the interlocking portion 39. In addition, the interlocking portion 39 changes its posture to the standby posture (see FIG. 7) and the support posture (see FIG. 8) by swinging around the swing axis. The interlocking part 39 is applied with potential energy from the supporting posture to the standby posture by an applying potential energy member (not shown). When the supporting table 31 does not support the storage container 1, the interlocking part 39 will be in the standby posture. In such a state where the interlocking portion 39 is in the standby posture, as shown in FIG. 7, the container support portion 37 will be located at the upper position, and the pressing portion 38 will be located at the separated position.

And, as shown in FIG. 8, in the inspection unit 7, in the state where the supporting table 31 supports the storage container 1, the height of the storage container 1 is taken as the supporting height, and the storage container 1 is transported by the stacker crane 3 to In the inspection section 7, the stacker crane 3 moves the storage container 1 to the rear side of the rack depth direction Y while supporting it at a transport height (refer to FIG. 7) higher than the support height, and then moves the storage container 1 Lower from the transport height to the support height. If the container 1 is lowered from the conveying height to the supporting height in this way, the container support part 37 will move from the upper position to the lower position due to the load of the container 1, and the container 1 will be moved by the container support part located in the lower position. 37 while being supported at the supporting height. And, as the container support part 37 moves to the lower position in this way, the pressing part 38 moves from the separated position (refer to FIG. 7) to the approach position (refer to FIG. 8). When the container 1 is lowered from the conveying height to the supporting height, when the position of the container 1 viewed from the vertical direction Z is shifted from the appropriate position to the horizontal direction, the pushing portion 38 moved to the close position is used to push the container. On the side of the container 1, the position of the container 1 will be corrected to an appropriate position.

[Inspection Device] As shown in FIGS. 4, 6 and 9, the inspection device 19 includes: a detection body 41; a guide body 42 that guides the detection body 41 in the vertical direction Z; and a driving unit 43 that moves the detection body 41; And the control part H (refer to FIG. 5) controls the drive part 43, and makes the storage container 1 which accommodates the plate-shaped body B as an inspection object. In addition, the control unit H determines whether or not the first rod-shaped body 23A is skewed based on the detection information of the detection body 41.

The detector 41 includes a light projecting unit 41A and a light receiving unit 41B, and the light projecting unit 41A and the light receiving unit 41B are arranged in the rack longitudinal direction X (container left-right direction D2). In addition, the light projecting section 41A projects the strip-shaped detection light L having a width in the vertical direction Z (container vertical direction D3) toward the light receiving section 41B. The light projecting unit 41A and the light receiving unit 41B are connected to a common connecting body 44 to fix their relative positions. The driving unit 43 moves the detection body 41 in the vertical direction Z. In addition, the control unit H is configured to determine the plurality of first rod-shaped rods provided in the storage container 1 from the information on the heights of the light projecting unit 41A and the light receiving unit 41B, and the information of the detection light L received by the light receiving unit 41B. Whether the body 23A is skewed. Furthermore, height information and thickness information are memorized in the control unit H, and the height information is displayed on the plurality of first rod-shaped bodies 23A arranged in the vertical direction Z in the state where the storage container 1 is placed on the support table 31 The height information of each is information indicating the thickness of the first rod-shaped body 23A in the vertical direction Z.

Next, an additional description will be given for the detection body 41. When the positional relationship between the detection body 41 and the storage container 1 is described, the description will be made on the premise that the storage container 1 is supported by the support table 31 when there is no special description. In addition, the one side (right side) in the rack length direction X is referred to as the first side X1, and the opposite side (left side) is referred to as the second side X2. Among the first rod-shaped bodies 23A, the range from the first rod-shaped body 23A positioned closest to the first side X1 to the first rod-shaped body 23A positioned closest to the second side X2 is referred to as the arrangement area E.

In addition, the light projecting portion 41A is located on the second side X2 with respect to the arrangement area E, and the light receiving portion 41B is located on the first side X1 with respect to the arrangement area E. In this way, the light emitting portion 41A and the light receiving portion 41B are arranged outside the rack length direction X (container left and right direction D2) including the arrangement area E, and the arrangement area E is the plurality of first rod-shaped bodies contained in the support portion 23 23A configuration area. Furthermore, in the state where the light projecting section 41A and the light receiving section 41B are raised and lowered to a height corresponding to the first rod-shaped body 23A, the light projecting section 41A and the light receiving section 41B are arranged in the first direction of the frame depth direction Y as follows In terms of position, this position is a position where the front end portion of the first rod-shaped body 23A passes between the light projecting portion 41A and the light receiving portion 41B when the storage container 1 is placed on the support table 31. Therefore, in the state where the light projecting section 41A and the light receiving section 41B are raised and lowered to a height corresponding to the first rod-shaped body 23A, the band-shaped detection light L projected from the light projecting section 41A will be absorbed by the first rod-shaped body 23A. The front end part covers a part.

In addition, the light projecting portion 41A is located between the first rod-shaped body 23A and the third rod-shaped body 23C in the rack length direction X, and the light receiving portion 41B is located between the first rod-shaped body 23A and the third rod-shaped body 23A in the rack length direction X. Between the second rod-shaped bodies 23B. That is, the light projecting portion 41A and the light receiving portion 41B are located between the second rod-shaped body 23B and the third rod-shaped body 23C, and in the frame length direction X, relative to the arrangement area of the plurality of first rod-shaped bodies 23A E is arranged on the outside. Therefore, the light projecting part 41A or the light receiving part 41B does not interfere with the first rod-shaped body 23A, the second rod-shaped body 23B, and the third rod-shaped body 23C, and can move in the vertical direction Z.

Next, the inspection control performed by the control unit H will be described. Before the control unit H executes the inspection control, the detection body 41 is positioned at the standby height (the height shown in FIG. 5). The standby height is a height higher than the lower frame 27 in the container 1 of the conveying height, and a height lower than the upper frame 26 in the container 1 of the supporting height. In addition, the control unit H performs inspection control after detecting that it has been placed on the support table 31 by the presence sensor (not shown). In the inspection control, after descending from the standby height to the starting height, it will rise to the completion height, and then descend to the standby height. The starting height is the height corresponding to the first rod-shaped body 23A located at the lowest position among the plurality of first rod-shaped bodies 23A arranged in the vertical direction Z. In a state where the detection body 41 is positioned at the starting height, the tip portion of the first rod-shaped body 23A in the lowermost proper posture will be positioned at the center portion of the detection light L in the vertical direction Z. The completed height is a height corresponding to the first rod-shaped body 23A positioned at the uppermost among the plurality of first rod-shaped bodies 23A arranged in the vertical direction Z. In the state where the detection body 41 is positioned at the complete height, the tip portion of the first rod-shaped body 23A in the uppermost proper posture will be positioned at the center portion of the detection light L in the vertical direction Z.

In addition, in the inspection control, at each set height of the plurality of first rod-shaped bodies 23A arranged in the vertical direction Z, the light receiving state of the detection light L in the light receiving unit 41B is confirmed, and the light receiving state of the detection light L in the light receiving unit 41B is checked, and the It is judged whether the first rod 23A is skewed or not. Specifically, for example, for the five first rod-shaped bodies 23A positioned at the bottom among the plurality of first rod-shaped bodies 23A arranged in the vertical direction Z, the detection body 41 is positioned at the bottom and the detection body 41 is positioned at the bottom. In a state corresponding to the height (starting height) of the five first rod-shaped bodies 23A, the light-receiving state of the detection light L in the light-receiving portion 41B is confirmed. At this time, if the light receiving unit 41B does not receive the detection light L, the range in the vertical direction Z is as shown in FIG. When the position in the vertical direction Z receiving the detection light L is a preset position, it is determined that the five first rod-shaped bodies 23A positioned at the bottom are not skewed. In addition, if the light receiving unit 41B does not receive the detection light L, the range in the vertical direction Z is larger than the width of the first rod-shaped body 23A in the vertical direction Z plus the allowable offset, as shown in FIG. 11 or FIG. When it is large, or when the position in the vertical direction Z that does not receive the detection light L is shifted from the preset position to the vertical direction Z, it is determined that the five first rod-shaped bodies 23A located at the bottom are skewed. In response to the detection body 41 rising from the starting height to the finishing height, this discrimination is performed on the plurality of first rod-shaped bodies 23A arranged in the vertical direction Z.

2. Other embodiments Next, other embodiments of the inspection device will be described.

(1) In the above-mentioned embodiment, although the container main body 22 is constructed by combining frame materials, the structure of the container main body 22 may be appropriately changed. Specifically, for example, plate materials may be provided on the left and right side surfaces or the upper and lower surfaces of the container body 22 made of frame materials, and the container body 22 may be configured as a horizontal cylindrical shape. In addition, when the container body 22 is configured as a horizontal cylindrical shape, a fan filter unit is installed to block the front surface of the container body 22, and the outside air cleaned by the fan filter unit is sucked into the storage space 21 It's also possible.

(2) In the above-mentioned embodiment, although the light-emitting portion 41A and the light-receiving portion 41B are arranged in a position that has entered the storage space 21 from the entrance 29 with the storage container 1 supported by the support table 31, it is suitable The arrangement of the light projecting unit 41A and the light receiving unit 41B may be changed accordingly. Specifically, for example, the light projecting unit 41A and the light receiving unit 41B are configured to be positioned outside the container body 22 in the left-right direction D2 of the container, and the light projecting unit 41A projects and detects from the outside of the storage space 21 toward the light receiving unit 41B. For the light L, the light receiving unit 41B may receive the detection light L passing through the accommodating space 21 outside the accommodating space 21.

(3) In the above embodiment, although the light projecting unit 41A and the light receiving unit 41B are connected to the common connecting body 44, the light projecting unit 41A and the light receiving unit 41B are integrated up and down the container by a single drive unit 43. It moves in the direction D3, but is configured to include a driving unit 43 that moves the light emitting portion 41A in the container vertical direction D3, and a driving portion 43 that moves the light receiving portion 41B in the container vertical direction D3, as the driving portion 43, The light part 41A and the light receiving part 41B may move in the container vertical direction D3, respectively.

(4) In the above-mentioned embodiment, although the structure is such that the light projecting unit 41A and the light receiving unit 41B enter the storage space 21 from the entrance 29 by the operation when the storage container 1 is transferred to the support platform 31 by the stacker crane 3, It is configured to include a second driving unit that moves the light projecting unit 41A and the light receiving unit 41B in the container front-rear direction D1. When the storage container 1 is supported by the support table 31, the light projecting unit 41A and The light receiving portion 41B moves in the container front-rear direction D1, so that the light-emitting portion 41A and the light-receiving portion 41B move to a position on the rear side of the container front-rear direction D1 (a position outside the storage space 21) relative to the storage space 21, and cause the projection The light portion 41A and the light receiving portion 41B may be moved to a position (a position that has entered the storage space 21) on the front side of the container in the front-rear direction D1 with respect to the storage space 21.

(5) In the above embodiment, although the supporting portion 23 is composed of a plurality of first rod-shaped bodies 23A, a plurality of second rod-shaped bodies 23B, and a plurality of third rod-shaped bodies 23C, the supporting portion 23 consists only of A plurality of first rod-shaped bodies 23A may be constituted, and the supporting portion 23 may be constituted by any one of a plurality of first rod-shaped bodies 23A, a plurality of second rod-shaped bodies 23B, or a plurality of third rod-shaped bodies 23C. . In addition, although the storage container 1 includes the support portion 23 including the first rod-shaped body 23A, the storage container 1 may not include the support portion 23 including the first rod-shaped body 23A. Specifically, it is configured to include a support plate on the bottom surface of the container 1, and on the support plate, the plate-shaped body B is housed in a vertical posture along the container front-rear direction D1 and the container up-down direction D3. The position of the plate-shaped body B in the container left-right direction D2 may be positioned with respect to the plural first rod-shaped bodies 23A whose plate-shaped body B is located on both sides of the container left-right direction D2.

(6) In the above embodiment, although the first direction is the container front-rear direction D1, the second direction is the container left-right direction D2, and the third direction is the container vertical direction D3, it is also possible to appropriately change the relationship between these directions. Can. Specifically, for example, the first direction may be the container vertical direction D3, and the plurality of first rod-shaped bodies 23A may be arranged in a posture along the container vertical direction D3, and the second direction may be the container vertical direction D3. The light projecting unit 41A and the light receiving unit 41B may be provided, and the light projecting unit 41A and the light receiving unit 41B may be arranged in a state in which the light projecting unit 41A and the light receiving unit 41B are arranged in the vertical direction D3 of the container.

(7) In the above embodiment, although the contents stored in the storage container 1 are referred to as the plate-shaped body B, the contents stored in the storage container 1 may be other plate-shaped objects such as wafers. Other shapes such as box shape or cylindrical shape are also acceptable.

(8) Furthermore, the configuration disclosed in each of the above-mentioned embodiments can be applied in combination with the configuration disclosed in other embodiments as long as there is no contradiction. Regarding other configurations, the embodiments disclosed in this specification are merely illustrative in all points. Therefore, various changes can be appropriately made without departing from the gist of the present disclosure.

3. Outline of the above-mentioned embodiment The outline of the inspection device described above will be described below.

The inspection device is an inspection device that is provided with a detection body and a drive unit that moves the detection body, and uses a storage container containing the content as an inspection object. The storage container includes a container body and a storage space for containing the content; And a plurality of rod-shaped bodies are installed in the storage space, and the storage objects contained in the storage space are positioned. Each of the plurality of rod-shaped bodies is installed in a posture along the first direction and is located The base end of one side of the rod-shaped body is fixed to the container body, and the other end of the rod-shaped body is supported by the container body in a cantilever state where the front end is not fixed. The second direction orthogonal to the first direction and the third direction orthogonal to the second direction are arranged in a state where a plurality of branches are arranged in each direction, and the drive unit makes the detection body Moving in the third direction, the detection body is equipped with a light-emitting portion and a light-receiving portion, and the light-emitting portion and the light-receiving portion are aligned in the second direction, and the light-emitting portion will move in the third direction. The band-shaped detection light having the upper width is projected toward the light-receiving part, and the light-emitting part and the light-receiving part are arranged at the following position in the first direction, which is when the container body is placed on the inspection mount In the state of the part, the front end part passes through the position between the light projecting part and the light receiving part.

With such a configuration, the storage container can store the contents in a state where it has been positioned by a plurality of rod-shaped bodies. In addition, in such a container, although the rod-shaped body may be skewed due to the load of the contained contents or the weight of the rod-shaped body, it is possible to detect as follows by inspecting with an inspection device The skewness of the rod-shaped body. If the position of the front end of the rod-shaped body when the rod-shaped body is not skewed is set to an appropriate position, when the rod-shaped body is skewed, the position of the front end of the rod-shaped body will deviate from the proper position. In addition, the detection device can detect the position of the tip portion of the rod-shaped body in the third direction based on the position of the detection body in the third direction when the detection body is moved or the position covered by the rod-shaped body in the band-shaped detection light. Therefore, the position where the tip of the rod-shaped body deviates from the proper position can be detected, that is, the skew of the rod-shaped body can be detected. In addition, by moving the detection body in the third direction by the drive unit to detect the position of the tip portion of the rod-shaped body, it is not necessary to move the storage container. In addition, since the detection body is smaller and lighter than the storage container, the manufacturing cost of the inspection device can be suppressed compared to when the storage container is moved. In this way, it is possible to provide an inspection device that can detect the skew of the rod-shaped body provided in the storage container and can suppress the manufacturing cost.

Here, it is preferable that the first direction is the container front and rear direction, the second direction is the container left and right direction, the third direction is the container vertical direction, and the container is along the container front and rear direction and The container is housed in the plate-shaped body of the storage space in a left-right orientation, and the storage container is provided with a plurality of support parts which are arranged in the vertical direction of the container and will be housed in the storage space. The plate-shaped body is supported from below, each of the plurality of support portions includes a plurality of the rod-shaped bodies arranged in a row in the left-right direction of the container, and the light-emitting portion and the light-receiving portion are opposed to each of the supporting portions. The arrangement area of the plurality of rod-shaped bodies included is arranged on the outer side of the container in the left-right direction.

According to this structure, by supporting the plate-shaped bodies by each of the plurality of support parts, a plurality of plate-shaped bodies can be accommodated in the storage container, and the plate-shaped bodies are arranged in the vertical direction of the container. In addition, by accommodating the plate-shaped body in this manner, the plate-shaped body can be supported from below by the rod-shaped bodies arranged in a row in the left-right direction of the container. Although the rod-shaped body may be skewed due to the load of the plate-shaped body or the weight of the rod-shaped body, the tip of the rod-shaped body may fall downward and the rod-shaped body may be skewed. However, it can be detected by the inspection device. The skewness of the rod-shaped body. Since the light-emitting part and the light-receiving part are placed on the outer side of the container in the left-right direction with respect to the plural rod-shaped bodies contained in each of the supporting parts, one support can be detected by combining the light-emitting part and the light-receiving part. The position of the tip of the plural rod-shaped bodies included in the section. Therefore, it is not necessary to provide a combination of a plurality of light-emitting units and light-receiving units, so that the cost of the detection unit can be suppressed.

Furthermore, it is preferable that the light projecting part and the light receiving part are connected to a common connecting body to fix the relative position.

According to this configuration, since the relative position of the light-emitting part and the light-receiving part is fixed by the connecting body, when the light-emitting part and the light-receiving part are moved in the third direction by the driving part, the light-emitting part and the light-receiving part The relative position of will not shift. Therefore, it is possible to avoid the occurrence of errors in the detection of the rod-shaped body due to the relative displacement of the light projecting part and the light receiving part in the third direction.

Furthermore, it is more preferable that the storage container is formed with an entrance and exit on one side of the first direction with respect to the storage space, and the entrance is an entrance and exit for taking out and putting the contents into the storage space, and the light projecting part and the light receiving unit The portion is arranged at a position where the storage container has entered the storage space from the entrance and exit in a state where the storage container is placed on the placement portion.

According to this configuration, in a state where the storage container is placed on the placement section, the light projecting section and the light receiving section are positioned inside the container body in the second direction. Therefore, for example, when the light-emitting part and the light-receiving part are located outside the container body in the second direction, the shape of the container or the installation position of the detection part must be considered so that the detection light projected from the light-emitting part does not interfere. The container body, however, since the light emitting part and the light receiving part are positioned inside the container body in the second direction, there is no need to consider the shape of the container or the installation position of the detecting part as described above. Industrial availability

The technology related to the present disclosure can be used in an inspection device that uses a container for storing contents as an inspection object.

1‧‧‧Container 2‧‧‧Storage rack 3‧‧‧Stacker crane 4‧‧‧Receiving part 5‧‧‧Substrate access part6‧‧‧Container access part7‧‧‧Inspection part8‧‧‧ Fan filter unit 11‧‧‧Walking trolley 12‧‧‧Pole 13‧‧‧Elevating platform 14‧‧‧Transfer device 16‧‧‧Transfer robot 17‧‧‧Transfer conveyor 19‧‧‧Inspection device 21 Storage space 22 ‧‧‧Upper frame 26A‧‧‧Upper frame 26B‧‧‧Upper frame 27‧‧‧Lower frame 27A‧‧‧Lower frame 27B‧‧‧Lower frame 28‧‧‧Middle frame 28A‧‧‧Front Frame 28B‧‧‧Right frame 28C‧‧‧Left frame 29‧‧‧Entrance and exit 31‧‧‧Support platform (loading part) 32‧‧‧Centering device 33‧‧‧Support operating mechanism 36‧‧‧Base 37‧ ‧‧Container support part 38‧‧‧Pushing part 39‧‧‧Interlocking part 41‧‧‧Detection body 41A‧‧‧Light emitting part 41B‧‧‧Light receiving part 42‧‧‧Guiding body 43‧‧‧Drive part 44 ‧‧‧Connected body B‧‧‧Plate body (container) D1‧‧‧Container front and rear direction (first direction) D2‧‧‧Container left and right direction (second direction) D3‧‧‧Container vertical direction (third Direction) E‧‧‧Arrangement area H‧‧‧Control part L‧‧‧Detection light X‧‧Frame length direction X1‧‧‧First side X2‧‧‧Second side Y‧‧‧Frame depth direction Y1‧ ‧‧Front side Y2‧‧‧Back side Z‧‧‧Up and down direction

Fig. 1 is a plan view of the article storage facility. Fig. 2 is a side view of the article storage facility. Fig. 3 is a perspective view of the storage container. Fig. 4 is a plan view of the inspection section. Fig. 5 is a side view of the inspection unit. Fig. 6 is a rear view of the inspection unit. Fig. 7 is a diagram showing a supporting operating mechanism. Fig. 8 is a diagram showing a supporting operating mechanism. Fig. 9 is a perspective view of a detection unit. Fig. 10 is a diagram showing the detection state of the sample. Fig. 11 is a diagram showing the detection state of the sample. Fig. 12 is a diagram showing the detection state of the sample.

1‧‧‧Container

7‧‧‧Inspection Department

19‧‧‧Inspection device

21‧‧‧Containment space

22‧‧‧Container body

23‧‧‧Support

23A‧‧‧The first rod (rod)

23B‧‧‧The second rod

23C‧‧‧The third rod

27A‧‧‧Lower frame

27B‧‧‧ Lower inner frame

28‧‧‧Middle frame

28A‧‧‧Front frame

28B‧‧‧Right frame

28C‧‧‧Left Frame

29‧‧‧Entrance and exit

32‧‧‧Centering device

33‧‧‧Support operating mechanism

41‧‧‧Detection body

41A‧‧‧Light Projection Department

41B‧‧‧Light receiving part

42‧‧‧Guiding Body

44‧‧‧Connected body

D1‧‧‧Container front and rear direction (1st direction)

D2‧‧‧Container left and right direction (2nd direction)

E‧‧‧Configuration area

X‧‧‧Frame length direction

X1‧‧‧Side 1

X2‧‧‧Second side

Y‧‧‧Frame depth direction

Y1‧‧‧Front side

Y2‧‧‧Back

Claims (4)

An inspection device comprising: a detection body; and a driving part to move the detection body, the inspection device has the following characteristics: a storage container accommodating the contents is used as an inspection object, and the storage container includes: a container body having the storage container A storage space for objects; and a plurality of rod-shaped bodies are installed in the storage space, and the storage objects stored in the storage space will be positioned. Each of the plurality of rod-shaped bodies is installed in a posture along the first direction , And the base end of the rod-shaped body on one side is fixed to the container body, and the end at the other side, the front end, is supported by the container body in a cantilever state where the tip is not fixed, and a plurality of the rods The shape body is arranged in a state in which plural branches are arranged in each direction in a second direction orthogonal to the first direction and a third direction orthogonal to the first direction and the second direction, the drive section The detection body is moved in the third direction, and the detection body is equipped with a light-emitting part and a light-receiving part, and the light-emitting part and the light-receiving part are arranged in the state of the second direction, and the light-emitting part will The strip-shaped detection light having a width in the third direction is projected toward the light receiving section, and the light projecting section and the light receiving section are arranged in the following position in the first direction, which is when the container body is placed on In the state of the mounting part for inspection, the front end part passes through the position between the light projecting part and the light receiving part. The inspection device of claim 1, wherein the first direction is the container front and rear direction, the second direction is the container left and right direction, and the third direction is the container vertical direction, and the contents are along the front and rear of the container. The direction and the posture of the container in the left and right direction are accommodated in the plate-shaped body of the storage space. The storage container is provided with a plurality of support parts which are arranged in the vertical direction of the container and will be accommodated in the container. The plate-shaped body in the space is supported from below, and the plurality of support portions each include a plurality of the rod-shaped bodies arranged in a row in the left-right direction of the container, and the light-emitting portion and the light-receiving portion are opposed to the supporting portion The arrangement area of the plurality of rod-shaped bodies contained in each is arranged on the outer side of the container in the left-right direction. The inspection device according to claim 1 or 2, wherein the light projecting part and the light receiving part are connected to a common connecting body to fix the relative position. According to the inspection device of claim 1 or 2, wherein the storage container has an access port formed on one side of the storage space in the first direction, and the access port is an access port for taking out the storage space and putting the storage items into the storage space. The light portion and the light receiving portion are arranged at a position where the storage container has entered the storage space from the entrance and exit in a state where the storage container is placed on the placement portion.

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