CN108807246B - Cartridge fixing device and vehicle having the same - Google Patents
Cartridge fixing device and vehicle having the same Download PDFInfo
- Publication number
- CN108807246B CN108807246B CN201810373649.6A CN201810373649A CN108807246B CN 108807246 B CN108807246 B CN 108807246B CN 201810373649 A CN201810373649 A CN 201810373649A CN 108807246 B CN108807246 B CN 108807246B
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- cartridge
- cassette
- supporting
- vehicle
- supporting member
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67346—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders characterized by being specially adapted for supporting a single substrate or by comprising a stack of such individual supports
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The cassette fixing device includes a support member and a driving part, the support member being provided inside a vehicle traveling along a traveling rail of the top plate, respectively supporting front and rear ends of side surfaces of a cassette held by the vehicle to prevent the cassette from vibrating, and configured to avoid interference when the cassette rotates; the driving portion is for reciprocating the supporting member in a horizontal direction perpendicular to the front-rear direction of the cartridge between a supporting position where the supporting member supports the side surface of the cartridge and a retracted position where the supporting member is retracted from the supporting position to receive the cartridge in the vehicle.
Description
Background
The invention relates to a box fixing device and a carrier with the same. More particularly, the present invention relates to a cassette fixing device for preventing a cassette held by a vehicle from vibrating and falling, and a vehicle having the same.
In general, semiconductor processing apparatuses for manufacturing semiconductor devices may be continuously arranged to perform various processes on a semiconductor substrate. The objects of the semiconductor device manufacturing process, such as wafers, may be provided to or removed from the respective semiconductor processing apparatuses in a state of being accommodated in the cassette.
The cassettes may be transported by OHT (Overhead Hoist Transport ). The OHT includes a travel rail provided along a ceiling (ceiling) of a semiconductor production line in which semiconductor processing apparatuses are continuously arranged and a carrier that holds cassettes and travels along the travel rail.
Vibrations may occur in the cassette as the vehicle travels, which may cause the cassette to fall out of the vehicle. Accordingly, the vehicle includes a cassette fixing device for preventing the cassette from vibrating and falling.
The cartridge fixing device has a support member for supporting a central portion of a side surface of the cartridge. The support member is reciprocable between a support position for supporting the cartridge and a retracted position.
However, as the cartridge increases in size, the cartridge and the support member may interfere with each other as the cartridge rotates, even if the support member is in the retracted position. Thus, rotation of the cartridge can be annoying.
It is also difficult to change the retracted position of the cassette fixture to prevent interference between the cassette and the support member due to space constraints of the vehicle.
Disclosure of Invention
The present invention provides a cartridge fixing device capable of preventing interference between a cartridge and a supporting member during rotation of the cartridge even if the size of the cartridge is changed.
The invention also provides a carrier with the cartridge fixing device.
According to an aspect of the present invention, the cassette fixing device may include a support member provided inside a vehicle traveling along a traveling rail of the top plate, supporting front and rear ends of side surfaces of a cassette held by the vehicle, respectively, to prevent the cassette from vibrating, and configured to avoid interference when the cassette rotates; the driving portion is for reciprocating the supporting member in a horizontal direction perpendicular to a front-rear direction of the cartridge between a supporting position where the supporting member supports a side surface of the cartridge and a retracted position where the supporting element is retracted from the supporting position to receive the cartridge in the vehicle.
According to some exemplary embodiments of the present invention, the cassette fixing device may further include a drop preventing member fixed to a lower surface of the supporting member and disposed below the cassette to support the lower surface of the cassette when the cassette drops.
According to some exemplary embodiments of the present invention, the cassette fixing device may further include a base plate fixed to the inside of the vehicle and a driving part mounted to the base plate, the movable plate being stacked and mounted to the base plate so as to be movable in a horizontal direction with respect to the base plate, and a support member mounted to the movable plate, wherein the driving part moves the movable plate in the horizontal direction to reciprocate the support member.
According to some exemplary embodiments of the present invention, the cassette fixing device may further include a fixing pin fixed to the supporting member through the movable plate and connecting the movable plate and the supporting member, and a coil spring disposed between the movable plate and the supporting member to surround the fixing pin to reduce an impact generated when the supporting member comes into contact with the cassette.
According to some exemplary embodiments of the present invention, the cassette fixing device may further include a plurality of sensors disposed on the base plate for sensing a position of the movable plate to detect a position of the support member.
According to some exemplary embodiments of the present invention, the support member may be made of a material having a low friction coefficient to prevent particles from being generated due to friction between the support member and the cartridge.
According to an aspect of the present invention, a vehicle may include a traveling device traveling along a traveling rail of a top plate, a conveyor connected to the traveling device and holding a cassette therein to transfer the cassette, and a cassette fixing device including a support member disposed inside the conveyor, supporting front and rear ends of side surfaces of the cassette to prevent the cassette from vibrating, respectively, and configured to avoid interference when the cassette rotates, and a driving part for reciprocating the support member between a support position where the support member supports the side surface of the cassette and a retracted position where the support member is retracted from the support position to receive the cassette in the conveyor, in a horizontal direction perpendicular to the front-rear direction of the cassette.
According to an exemplary embodiment of the present invention, the supporting member of the cartridge fixing device may support the front and rear ends of the side surface of the cartridge, so that the rotation radius of the cartridge may be increased. Accordingly, a larger-sized cassette can be accommodated in the housing of the vehicle, and the larger-sized cassette can be rotated without interfering with the support member. The vehicle can then accommodate and transport various sizes of cassettes.
Further, the movable plate can be moved in the horizontal direction with respect to the base plate by the driving part in a state where the base plate and the movable plate are stacked, and thus the cassette fixing device can be easily installed in the housing even if the housing of the vehicle has a relatively narrow inner space.
In addition, the supporting position of the supporting member may be changed according to the size of the cartridge and may be accurately detected by the sensor, so that cartridges of various sizes may be stably supported by the supporting member.
The above summary of the present invention is not intended to describe each illustrated embodiment or every implementation of the present invention. The following detailed description and claims more particularly exemplify these embodiments.
Drawings
Exemplary embodiments can be understood in more detail from the following description, taken in conjunction with the accompanying drawings, in which:
FIG. 1 is a front view of a vehicle according to an exemplary embodiment of the invention;
FIG. 2 is a plan view of the cartridge holder shown in FIG. 1;
fig. 3 is an enlarged view of the connection between the movable plate and the support member as shown in fig. 2; and
fig. 4 is a plan view of the operation of the cassette fixture shown in fig. 1.
While various embodiments are amenable to various modifications and alternative forms, specifics thereof have been shown by way of example in the drawings and will be described in detail. It should be understood, however, that the intention is not to limit the claimed invention to the particular embodiments described. On the contrary, the intention is to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the subject matter as defined by the appended claims.
Detailed Description
Hereinafter, specific embodiments of the cassette fixing device and the vehicle having the same will be described in detail with reference to the accompanying drawings. This invention may, however, be embodied in different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. Like numbers refer to like elements throughout. In the drawings, the size of layers and regions are exaggerated for clarity of illustration.
Terms such as first, second, etc. may be used to describe various elements, but the above elements described by the above terms should not be limited. The above terms are used only to distinguish one element from another. For example, a first component could be similarly named as a second component, and a second component could also be named as a first component, without departing from the scope of the invention.
The terminology used herein is for the purpose of describing particular example embodiments only and is not intended to be limiting of the inventive concepts. As used herein, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof.
Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this inventive concept belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the relevant art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
Fig. 1 is a front view of a vehicle according to an exemplary embodiment of the present invention.
Referring to fig. 1, a vehicle 400 may have a traveling device 100, a transfer device 200, and a cassette fixture 300.
The traveling wheel 110 may be rotated by an additional driving part (not shown), whereby the traveling device 100 may travel along the traveling rail 10 on the ceiling.
The transfer device 200 may be connected to the traveling device 100 and hold and transfer the cartridges 20 therein.
The transfer device 200 may include a housing 210, a moving part 220, a lifting part 230, and a clamping part 240.
The housing 210 is connected to the lower portion of the traveling device 100 in a hanging manner. The housing 210 may be open at the lower side and the front side to facilitate vertical and horizontal movement of the cartridge 20. Here, the front side direction may be a direction perpendicular to the traveling direction of the vehicle 400.
The moving part 220 may be disposed on an inner upper surface of the housing 210 and horizontally move through an open front side of the housing 210.
The lifting part 230 may be fixed to a lower surface of the moving part 220. The lifting part 230 may move the clamping part 240 in the vertical direction by winding or unwinding the belt 232.
The clamping portion 240 may be connected to a lower end portion of the belt 232 and may clamp the cartridge 20.
The cassette 20 held by the holding part 240 is vertically movable by the lifting part 230 and horizontally movable by the moving part 220.
The cartridge holder 300 can prevent the cartridge 20 from vibrating and falling due to the travel of the vehicle 400. The cartridge fixtures 300 may be disposed at both sides of the inside of the case 210, respectively.
Fig. 2 is a plan view of the cassette fixing device shown in fig. 1, fig. 3 is an enlarged view of the connection between the movable plate and the support member shown in fig. 2, and fig. 4 is a plan view of the operation of the cassette fixing device shown in fig. 1.
Referring to fig. 2 to 4, the cartridge fixture 300 may include a support member 310, a drop preventing member 320, and a driving part 330.
The support member 310 may be disposed inside the vehicle 400, specifically inside the housing 210. A pair of support members 310 may be provided to support the front and rear ends of the side surfaces of the cassette 20 held by the holding part 240, respectively. At this time, the support member 310 may support the lower end of the side surface of the cartridge 20. Since the support member 310 supports the side surface of the cartridge 20, the cartridge 20 can be prevented from vibrating.
The support members 310 may be spaced apart from each other in the front-rear direction such that front and rear ends of the side surfaces of the cartridge 20 are supported by the support members 310. Since the side edge portions of the cartridge 20 can pass through the space between the supporting members 310 when the cartridge 20 held by the holder 240 is rotated, the rotation radius (r) of the cartridge 20 can be increased as compared with the conventional art in which one supporting member supports the central portion of the side surface of the cartridge 20.
As the radius of rotation (r) of the cartridge 20 increases, a relatively large-sized cartridge 20 may be received in the housing 210. Also, the large-sized cassette 20 can be rotated without interfering with the support member 310. Accordingly, the vehicle 400 can receive and transport cartridges 20 of various sizes.
Meanwhile, the support member 310 may be made of a material having a low friction coefficient. Exemplary materials include teflon, nylon, and the like. Accordingly, friction between the support member 310 and the cartridge 20 can be minimized. Thus, particles generated due to friction between the support member 310 and the cartridge 20 can be prevented.
The falling preventing member 320 may be fixed to a lower surface of the supporting member 310. For example, a pair of anti-falling members 320 may be respectively fixed to lower surfaces of the support members 310. Alternatively, the falling preventing member 320 may extend in the front-rear direction of the cartridge 20 while being fixed to the lower surface of the supporting member 310.
The drop prevention member 320 may be disposed under the cartridge 20 to support a lower surface of the cartridge 20 when the cartridge 20 drops during the travel of the vehicle 400. Therefore, even if the cassette 20 is separated from the clamping portion 240, the cassette 20 can be prevented from falling.
The driving part 330 may reciprocate the support member 310 between the support position and the retracted position. For example, the driving part 330 may move the support member 310 in a horizontal direction perpendicular to the front-rear direction.
The support position is a position where the support member 310 supports the side surface of the cartridge 20. The retracted position is a position retracted from the supporting position such that the cartridge 20 is lifted up and received in the housing 210 of the vehicle 400.
Since the falling preventing member 320 is fixed to the supporting member 310, the falling preventing member 320 moves together with the supporting member 320 when the supporting member 310 is moved by the driving part 330.
The cartridge fixture 300 may further include a base plate 340, a movable plate 350, a guide member 360, and a connection member 370.
The base 340 may be secured to an inside surface of the vehicle 400, specifically an inside surface of the housing 210.
The movable plate 350 may be stacked on the base plate 340 and coupled to the base plate 340 so as to be movable in a horizontal direction with respect to the base plate 340. The movable plate 350 may be disposed at a lower portion or an upper portion of the base plate 340.
The guide member 360 may be disposed between the base plate 340 and the movable plate 350 to guide the movable plate 350 to horizontally move. In particular, the guide member 360 may be disposed between the base plate 340 and the movable plate 350 on both ends in the front-rear direction. Accordingly, the guide member 360 can stably guide the movable plate 350 to horizontally move. In addition, the guide member 360 may be configured as shown in fig. 2 so as not to interfere with the rotation of the cartridge 20.
The connection member 370 may connect the movable plate 350 and the support member 310.
The connection member 370 may include a fixing pin 372 and a coil spring 374, respectively.
The fixing pin 372 may be fixed to the support member 310 by a protrusion 352 protruding upward from the upper surface of the movable plate 350. At this time, the fixing pin 372 may be provided to be movable with respect to the projection 352. Here, the fixing pin 372 may have a locking protrusion at the other end opposite to the one fixed to the support member 310. Accordingly, the fixing pin 372 can be prevented from being separated from the protrusion 352 in the fixing direction of the support member 310.
A coil spring 374 may be disposed between the protrusion 352 of the movable plate 350 and the support member 310 to surround the fixing pin 372. When the support member 310 comes into contact with the cartridge 20, the coil spring 374 may contract as the fixed pin 372 moves past the projection 352. Accordingly, the coil spring 374 may reduce the impact caused by the support member 310 contacting the cartridge 20.
The driving part 330 may be mounted on the base plate 340 and move the movable plate 350 in a horizontal direction to reciprocate the support member 310 between the support position and the retracted position.
More particularly, the drive portion 330 may include a motor 332, a belt 334, a ball screw 336, and a connection block 338.
The motor 332 is mounted on the base plate 340 and provides a rotational force for moving the movable plate 350. The motor 332 may be rotated stepwise by a certain angle according to the moving distance of the movable plate 350.
The belt 334 may transmit the rotational force of the motor 332 to the ball screw 336.
The ball screw 336 may be provided on any one of both ends of the base plate 34 in the front-rear direction. Therefore, the ball screw 336 can be prevented from interfering with the rotating cartridge 20.
The screw shaft of the ball screw 336 is rotated by the rotational force transmitted from the belt 334, and thus the nut is linearly moved with the rotation of the screw shaft.
The connection block 338 connects the movable plate 350 with the nut of the ball screw 336. Then, when the nut moves straight, the movable plate 350 moves straight with the nut.
The driving part 330 may be changed into various forms as long as the driving part 330 can move the movable plate 350 in a horizontal direction with respect to the base plate 340 in a state where the base plate 340 and the movable plate 350 are stacked.
Since the driving part 330 can move the movable plate 350 in the horizontal direction with respect to the base plate 340 in a state where the base plate 340 and the movable plate 350 are stacked, the guide member 360 and the ball screw 336 are provided on both ends of the base plate 34 in the front-rear direction, and thus a stroke of moving the support member 310 can be realized in a narrow space.
The cartridge holder 300 can also include a plurality of sensors 380.
The sensor 380 may be disposed on the substrate 340 in a horizontal direction. When the size of the cartridge 20 is changed, the supporting position of the supporting member 310 is changed. Thus, the sensor 380 may be spaced apart a distance between the plurality of support positions and the retracted position.
Since the support member 310 is spaced apart from the base plate 340 in the horizontal direction, it is difficult for the sensor 380 to directly detect the support member 310. Thus, the sensor 380 may sense the position of the movable plate 350 to detect the position of the support member 310.
Alternatively, the sensor 380 may sense the position of the connection block 338, or may sense the position of the slider in the guide member 360 to check the position of the support member 310.
When the sensor 380 is provided on the base plate 340 to accurately sense the supporting position and the retracted position of the supporting member 310, the stroke of the cartridge fixture 300 can be accurately achieved using the motor 332 of the driving device 330 and the sensor 380 so as to support the cartridges 20 of various sizes.
Although the cartridge fixing device and the vehicle having the same have been described with reference to the specific embodiments, they are not limited thereto. Accordingly, it will be readily appreciated by those skilled in the art that various modifications and changes may be made without departing from the spirit and scope of the present invention as defined by the appended claims.
Claims (5)
1. A cartridge holding device comprising:
a pair of support members provided inside a vehicle traveling along a traveling rail of a top plate, respectively supporting front and rear ends of side surfaces of a cassette held by the vehicle to prevent the cassette from vibrating, and provided to be spaced apart from each other in a front-rear direction of the cassette to avoid interference when the cassette rotates;
a driving portion for reciprocating the supporting member in a horizontal direction perpendicular to a front-rear direction of the cartridge between a supporting position at which the supporting member supports the side surface of the cartridge and a retracted position at which the supporting member is retracted from the supporting position to receive the cartridge in the vehicle;
a base plate fixed to an inside of the vehicle and to which the driving part is mounted;
a movable plate configured to be movable in the horizontal direction on the substrate and to be movable in the horizontal direction by the driving section;
a pair of protrusions protruding upward from an upper surface of the movable plate;
a pair of fixing pins respectively connected to the supporting members through the protrusions; and
a pair of coil springs disposed between the protrusions and the supporting members to surround the fixing pins, respectively, to reduce impacts generated when the supporting members come into contact with the cartridge.
2. A cartridge fixing device according to claim 1, further comprising a drop preventing member fixed to a lower surface of said supporting member and provided below said cartridge to support said lower surface of said cartridge when said cartridge drops.
3. A cartridge holder according to claim 1, further comprising a plurality of sensors provided on said base plate for sensing a position of said movable plate to detect a position of said supporting member.
4. A cartridge fixing device according to claim 1, wherein the supporting member is made of a material having a low friction coefficient to prevent generation of particles due to friction between the supporting member and the cartridge.
5. A vehicle, comprising:
a traveling device traveling along a traveling rail of the top plate;
a conveying device connected to the advancing device and holding a cassette therein to convey the cassette; and
a cartridge holding device, comprising:
a pair of supporting members provided inside the conveying device, respectively supporting front and rear ends of side surfaces of the cassette to prevent the cassette from vibrating, and provided to be spaced apart from each other in a front-rear direction of the cassette to avoid interference when the cassette rotates;
a driving section for reciprocating the supporting member in a horizontal direction perpendicular to a front-rear direction of the cassette between a supporting position at which the supporting member supports the side surface of the cassette and a retracted position at which the supporting member is retracted from the supporting position to receive the cassette in the conveying device;
a base plate fixed to an inside of the conveyor and to which the driving part is mounted;
a movable plate configured to be movable in the horizontal direction on the substrate and to be movable in the horizontal direction by the driving section;
a pair of protrusions protruding upward from an upper surface of the movable plate;
a pair of fixing pins respectively connected to the supporting members through the protrusions; and
a pair of coil springs disposed between the protrusions and the supporting members to surround the fixing pins, respectively, to reduce impacts generated when the supporting members come into contact with the cartridge.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2017-0053774 | 2017-04-26 | ||
| KR1020170053774A KR102247036B1 (en) | 2017-04-26 | 2017-04-26 | Unit for supporting cassette and vehicle having the unit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108807246A CN108807246A (en) | 2018-11-13 |
| CN108807246B true CN108807246B (en) | 2023-07-07 |
Family
ID=64093834
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810373649.6A Active CN108807246B (en) | 2017-04-26 | 2018-04-24 | Cartridge fixing device and vehicle having the same |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR102247036B1 (en) |
| CN (1) | CN108807246B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102508500B1 (en) * | 2021-04-22 | 2023-03-08 | 시너스텍 주식회사 | OHT grip unit with wafer guard |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003165687A (en) * | 2001-11-30 | 2003-06-10 | Murata Mach Ltd | Ceiling conveying vehicle |
| JP4089613B2 (en) | 2003-12-26 | 2008-05-28 | 村田機械株式会社 | Overhead traveling car |
| WO2009141976A1 (en) * | 2008-05-22 | 2009-11-26 | 村田機械株式会社 | Overhead conveying vehicle |
| KR20150130850A (en) * | 2014-05-14 | 2015-11-24 | 삼성전자주식회사 | Overhead Hoist Transfer System and Factory System employing the same |
-
2017
- 2017-04-26 KR KR1020170053774A patent/KR102247036B1/en active IP Right Grant
-
2018
- 2018-04-24 CN CN201810373649.6A patent/CN108807246B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| KR20180119970A (en) | 2018-11-05 |
| KR102247036B1 (en) | 2021-04-30 |
| CN108807246A (en) | 2018-11-13 |
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