JP5287227B2 - Transport cart - Google Patents

Description

  The present invention relates to a transport carriage that transports a cassette that accommodates an object to be transported.

  Conventionally, in a semiconductor manufacturing factory, a liquid crystal display panel manufacturing factory, etc., a cassette for storing a plurality of objects to be conveyed is carried into a storage or a manufacturing apparatus, or the cassette is unloaded from a storage or a manufacturing apparatus. A transporting carriage (also referred to as a “stacker crane”) is known (see, for example, Patent Document 1).

  For example, in a liquid crystal display panel manufacturing factory, a liquid crystal glass substrate in the manufacturing process is conveyed to a storage or a manufacturing apparatus while being accommodated in a cassette. The size of the liquid crystal glass substrate accommodated in such a cassette is remarkably increased due to the recent increase in size and productivity of televisions. Therefore, the weight of the cassette that accommodates the liquid crystal glass substrate tends to increase more and more. Under such a background, it is necessary to cope with the transport cart appropriately for transporting the cassette that tends to increase in weight to the transferred portion.

JP 2008-1000077 A

  The present invention has been made in view of the above points, and can appropriately transport the cassette to the transferred portion with respect to an increase in the weight of the cassette accompanying an increase in the size of the transported object. It is an object to provide a transport cart.

  In one aspect of the present invention, a transport carriage that travels along a track and transports a cassette that accommodates an object to be transported includes a pair of columnar frames disposed at a distance in the extending direction of the track, A pair of elevating mechanisms provided corresponding to each of the pair of frames, a gantry supported by the pair of elevating mechanisms to be movable up and down, and supported by the gantry and configured to be extendable in the horizontal direction. A cassette transfer machine having a plurality of arms and transferring the cassette to and from the transferred portion by expansion and contraction of the plurality of arms, and the elevating mechanism extends along the frame A guide unit, and a pair of moving units configured to be movable along the guide unit and spaced from each other in the extending direction of the guide unit. Movable block mounted movably along And a shaft member that is attached to the movable block and protrudes on the opposite side to the movable block side, and a rotating member that is rotatably attached to the shaft member. Each of the rotating members is attached to the gantry via a connecting member.

  According to the above-described transport carriage, in order to transfer the cassette to the transferred part, a pair of moving parts are moved (lifted / lowered) along the guide part, and then a plurality of arms are extended. The arm bends or flexes in its extension direction. Accordingly, the pair of frames are also bent or bent in the extending direction of the plurality of arms, and the pair of guide portions are also bent or bent in the extending direction of the plurality of arms.

  At this time, in each of the pair of moving parts, the pair of rotating members attached to the gantry via the connecting member rotate or pivot about the shaft member as a base point in accordance with the degree of bending or the degree of bending of the guide part. For this reason, it is difficult for the movable block to generate a force for rotating the guide block, that is, a bending moment. Therefore, for example, it is possible to reduce the local load (uneven load) applied to the rolling members (balls, rollers, etc.) provided in the movable block. Thereby, the damage of this rolling member can be reduced and, as a result, it can reduce that the lifetime of a pair of raising / lowering mechanism falls.

  In one aspect of the transport carriage described above, a sliding bearing member having an annular shape or a cylindrical shape is disposed between the shaft member and the rotating member. According to this aspect, it is possible to reduce friction between the shaft member and the rotating member when the rotating member rotates around the shaft member. As a result, the rotating member can be smoothly rotated with respect to the shaft member.

  In another aspect of the transport carriage, a sliding member having an annular shape is disposed between the rotating member and the movable block. According to this aspect, when the rotating member rotates around the shaft member, friction between the movable block and the rotating member can be reduced. As a result, the rotating member can be smoothly rotated with respect to the shaft member.

  In another aspect of the transport carriage, a lid member that is attached to the movable block and that prevents the rotating member from being detached from the movable block is disposed on a side opposite to the movable block side of the rotating member. Has been. According to this aspect, when the rotating member rotates around the shaft member, it is possible to prevent the rotating member from being detached from the movable block.

  In another aspect of the conveyance carriage, a slip member having an annular shape is disposed between the rotating member and the lid member. According to this aspect, when the rotating member rotates around the shaft member, friction between the lid member and the rotating member can be reduced. As a result, the rotating member can be smoothly rotated with respect to the shaft member.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[Configuration of transport system]
First, with reference to FIG. 1 thru | or FIG. 3, the structure of a conveyance system provided with the conveyance trolley which concerns on embodiment of this invention is demonstrated.

  FIG. 1 schematically illustrates a planar configuration of a transport system 100 including the transport cart 6 according to the present embodiment. In the transport system 100, one transport cart 6 is normally provided. In FIG. 1, a plurality of transport carts 6 are illustrated in order to facilitate understanding of an operation example of the transport cart 6. FIG. 2 is a perspective view showing an external configuration of the transport carriage 6. FIG. 3 shows a side view of the transport carriage 6.

  The transport system 100 is installed in a semiconductor manufacturing factory, a liquid crystal display panel manufacturing factory, or the like, and carries a cassette (accommodating body) 13 that accommodates at least one object to be transported 12 through the transporting carriage 6 into the transferred part, or On the contrary, it is a system that carries the cassette 13 out of the transferred part. Specifically, the transfer system 100 includes a storage 1, a manufacturing apparatus 3, an entry / exit port 4, a pair of tracks 5, and a transfer carriage 6. Here, the storage 1, the manufacturing apparatus 3, the acquisition warehouse port 4, and the like function as the above-mentioned transferred parts.

  The storage 1 includes a shelf 2 for temporarily storing or housing the cassette 13. A plurality of shelves 2 are arranged in the height direction and the horizontal direction of the storage 1. In this example, the storage 1 is provided on each side of the track 5.

  The manufacturing apparatus 3 performs various processes (cleaning, film formation, resist processing, etc.) on the object to be transported 12 accommodated in the cassette 13, or uses the transported object 12 on which various processes have been performed. Manufactures display panels. In this example, the manufacturing apparatus 3 is provided corresponding to the storage 1 provided on both sides of the track 5.

  The loading / unloading port 4 is a mounting table for delivering the cassette 13 between the transport cart 6 and the manufacturing apparatus 3, and a plurality of loading / unloading ports 4 are provided for each manufacturing apparatus 3.

  The pair of tracks 5 are rails for the transport carriage 6 to travel, and are laid on the floor located between the storages 1 facing each other.

  The transport carriage 6 travels along a pair of tracks 5 and transports a cassette 13 containing at least one transported object 12 to the storage 1 or the manufacturing apparatus 3. Specifically, the transport cart 6 includes a cart 7, a pair of frames 8, a pair of lifting mechanisms 9, a gantry 10, and a cassette transfer machine 11.

  The carriage 7 is configured to be able to travel along the pair of tracks 5. For example, the carriage 7 includes a plurality of wheels 7a that travel on the pair of tracks 5 along the extending direction (arrow Y1 direction), and a travel control unit (not shown) that controls the travel of each wheel 7a. Prepare.

  The pair of frames 8 are columnar casings (columns) that rise upward from the carriage 7, and are arranged at a distance or interval in the extending direction of the track 5. The lower ends of the pair of frames 8 are fixed on the carriage 7.

  The pair of elevating mechanisms 9 is configured to be able to elevate the gantry 10 along the extending direction of each frame 8 (arrow Y2 direction), and is provided corresponding to each of the pair of frames 8. The configuration of the lifting mechanism 9 will be described later.

  The gantry 10 is a mounting table provided between the pair of frames 8 and the pair of elevating mechanisms 9 and is supported by the pair of elevating mechanisms 9 via a connecting member (slider) 14 so as to be movable up and down.

  The cassette transfer machine 11 is disposed on the gantry 10 and includes a plurality of arms 11a configured to be extendable and contractable in the horizontal direction (the direction of the arrow Y3 intersecting the extending direction of the pair of tracks 5). The cassette 11 has a cassette mounting portion 11b that supports the cassette 13 and is supported by the tip of the arm 11a that is disposed on the opposite side to the gantry 10 side. The cassette transfer machine 11 transfers the cassette 13 between the storage 1 and the manufacturing apparatus 3 by extending and contracting the plurality of arms 11a.

  In the transport system 100 having the above configuration, the transport cart 6 travels on a pair of tracks 5 according to a manufacturing process (not shown), and transfers the cassette 13 to and from the storage 1 and the manufacturing apparatus 3.

(Configuration of lifting mechanism)
Next, with reference to FIGS. 3, 4, and 5, the configuration of the pair of lifting mechanisms 9 that are components of the transport carriage 6 will be described in detail.

  FIG. 4A is a perspective view of a main part showing the configuration of the lifting mechanism 9 corresponding to the broken line area A1 of FIG. FIG. 4B is an exploded perspective view of the main part showing the configuration of the elevating mechanism 9 corresponding to FIG. FIG. 5 shows a cross-sectional view along the central axis L <b> 1 passing through the center of the lifting mechanism 9.

  Each of the pair of lifting mechanisms 9 includes a guide portion 91 and a pair of moving portions 90 arranged at a distance or interval in the extending direction of the guide portion 91.

  The guide portion 91 is a rail that extends along each of the pair of frames 8.

  The pair of moving units 90 is configured to be movable along the guide unit 91 in a state where a certain distance or interval is maintained. Each of the pair of moving portions 90 includes a movable block 92, a shaft member 93, a sliding member 94, a rotating member 95, a sliding bearing member 96, a sliding member 97, and a lid member 98.

  The movable block 92 is attached so as to be movable along the guide portion 91, and is configured so that the guide portion 91 can be moved by a drive portion (for example, a servo motor) (not shown). For example, although not shown, the movable block 92 is provided with a rolling member (such as a ball or a roller) that rolls along the groove of the guide portion 91, and the movable block 92 is guided by the rotation of the rolling member. It is possible to move along the portion 91. Examples of such a device include known linear motion devices such as a linear guide, a ball spline, a linear ball bearing, and a ball screw.

  The shaft member 93 includes a main body 93a having a plate shape, and a protruding portion (shaft portion) 93b having a cylindrical outer peripheral surface and a U-shaped cross-sectional shape. The shaft member 93 is attached to the movable block 92 using, for example, screws (not shown). The shaft portion 93b is formed integrally with the main body 93a and protrudes from the central portion of the main body 93a to the side opposite to the movable block 92 side. In addition, a thread groove 93ba that engages with the screw 30 is provided in the shaft portion 93b. In the present invention, the shaft portion 93b is not limited to a cylindrical shape, and may be an annular shape or a cylindrical shape.

  The sliding member 94 has an annular shape, and is fitted into the shaft portion 93 b of the shaft member 93 via the sliding bearing member 96. The sliding member 94 is disposed between the movable block 92 and the rotating member 95. The sliding member 94 has a role of reducing friction between the movable block 92 and the rotating member 95 when the rotating member 95 rotates around the shaft portion 93 b of the shaft member 93. For this reason, it is preferable that the sliding member 94 is made of a material that is not easily worn and has a small friction coefficient.

  The rotating member 95 includes a main body 95a having a plate shape and an annular portion 95b having an annular shape. The main body 95a has an opening having an inner diameter larger than the outer diameter of the sliding bearing member 96, and a thread groove 95aa. In this example, the screw grooves 95aa are provided at positions corresponding to the four corners of the main body 95a. For example, the rotating member 95 is connected to or attached to the connecting member 14 by the plurality of screws 30 engaging with the screw groove 95aa via the connecting member 14 (see FIG. 3) attached to the gantry 10. The annular portion 95 b is formed integrally with the main body 95 a and has an inner diameter larger than the outer diameter of the sliding bearing member 96.

  The sliding bearing member 96 has a cylindrical (or cylindrical or annular) shape, and is disposed between the inner peripheral surface of the rotating member 95 and the outer peripheral surface of the shaft portion 93 b of the shaft member 93. The sliding bearing member 96 has a role of reducing friction between the rotating member 95 and the shaft portion 93 b of the shaft member 93 when the rotating member 95 rotates around the shaft portion 93 b of the shaft member 93. For this reason, it is preferable that the sliding bearing member 96 is made of a material that is not easily worn and has a small friction coefficient.

  The sliding member 97 has an annular shape, and is fitted into the shaft portion 93 b of the shaft member 93 via the sliding bearing member 96. The sliding member 97 is disposed between the lid member 98 and the rotating member 95. The sliding member 97 has a role of reducing friction between the lid member 98 and the rotating member 95 when the rotating member 95 rotates around the shaft portion 93 b of the shaft member 93. For this reason, the sliding member 97 is preferably formed of the same material as the sliding bearing member 96.

  The lid member 98 has a plate shape or a disk shape, and has a plurality of screw grooves 98 a that engage with the plurality of screws 30. The lid member 98 is disposed on the side opposite to the movable block 92 side of the rotating member 95. Then, the lid member 98 is engaged with the screw groove 93ba of the shaft member 93 by the plurality of screws 30 via the sliding member 97, the sliding bearing member 96, the rotating member 95, and the sliding member 94. 93. For this reason, the lid member 98 is fixed to the shaft member 93 and the movable block 92. Accordingly, the lid member 98 serves to prevent the sliding member 97, the sliding bearing member 96, the rotating member 95, and the sliding member 94 from being detached from the shaft member 93 and the movable block 92.

  In the pair of moving portions 90 having such a configuration, as shown in the direction of the arrow Y4 in FIGS. 4A and 5, the rotating member 95 is connected to the shaft member 93 via the slide bearing member 96 and the slide members 97 and 94. This shaft portion 93b is configured to be rotatable around the central axis L1 of each moving portion 90.

  Next, advantages of the transport carriage 6 according to the present embodiment compared to the transport carriage according to the comparative example will be described.

  First, with reference to FIG. 6, the structure of the conveyance cart 6x which concerns on a comparative example is demonstrated.

  FIG. 6A is a side view of the main part of the transport carriage 6x viewed from the direction of the arrow Y5 in FIG. 3, and particularly shows the configuration of the lifting mechanism 9x. FIG. 6B is a configuration diagram of the lifting mechanism 9x corresponding to FIG. 6A, and particularly shows an operation example of the lifting mechanism 9x when the cassette 13 is transferred to the transferred portion. In FIGS. 6A and 6B, a straight line L2 indicated by a one-dot chain line indicates a center line passing through the center of the frame 8 and the guide portion 91 in the width direction.

  The transport cart 6x according to the comparative example is different from the transport cart 6 according to the present embodiment in the configuration of the pair of moving units in the pair of lifting mechanisms, and is otherwise the same. Therefore, below, the same code | symbol is attached | subjected about the element same as this embodiment, and the description is abbreviate | omitted suitably.

  In the transport cart 6x according to the comparative example, each of the pair of elevating mechanisms 9x includes a guide portion 91 and a pair of movable blocks 92 arranged at a certain distance in the extending direction of the guide portion 91. Composed. In each of the pair of lifting mechanisms 9x, each movable block 92 is fixed to the connecting member 14 attached to the gantry 10 while maintaining a certain distance from each other. Here, each movable block 92 is attached to the connecting member 14 so as not to rotate.

  In the transport carriage 6x according to the comparative example having the above-described configuration, the pair of lifting mechanisms 9 are operated as follows in order to transfer the cassette 13 to a transfer unit (not shown).

  First, as shown in the direction of arrow Y21 in FIG. 6A, the pair of movable blocks 92 and the like are raised along the guide portion 91 in a state where each arm 11a is contracted. Next, as shown in the direction of arrow Y31 in FIG. 6B, the plurality of arms 11a are extended in order to transfer the cassette 13 to the transferred portion. As a result, a force that causes the cassette transfer machine 11 to rotate clockwise with the connection portion between the gantry 10 and each frame 8 as a base point acts. In other words, as shown in the direction of the oblique arrow Y22 in the figure, a force directed in an oblique direction acts on the cassette transfer machine 11 with respect to the floor of the factory. This is because a load corresponding to the own weight of the plurality of arms 11a and the weight of the cassette 13 is applied to the distal ends of the plurality of arms 11a. As a result, the pair of frames 8 at the position of the one-dot chain line in the figure are bent or bent in the direction of the arrow Y31 that is the extension direction of the arms 11a, as shown by the position of the solid line in the figure. Further, since each guide portion 91 is fixed so as to be integrated with each frame 8, each guide portion 91 is also bent or bent in accordance with the curved shape of each frame 8.

  Here, the size of the liquid crystal glass substrate or the like as an example of the object to be transported accommodated in the cassette 13 is significantly increased due to the recent increase in size and productivity of televisions and the like. Therefore, the total weight of the object to be transported and the cassette that accommodates it tends to increase. Further, if the width of the pair of frames 8 (the length corresponding to the extending and contracting direction of the arm 11a) is large while the transport cart 6x is traveling, the surrounding air is disturbed to disperse dust and the like in the factory. Will reduce the cleanliness. For this reason, the width of the pair of frames 8 is designed to be as small as possible. For this reason, the strength of the pair of guide portions 91 tends to be low.

  Against the background of these various circumstances, the pair of guide portions 91 is more easily bent when the cassette 13 is transferred to the transferred portion.

At this time, the load Ptr from the plurality of arms 11a and the reaction force Pta from the guide portion 92 opposed thereto act on the pair of movable blocks 92. That is, for a pair of movable blocks 92, the bending moment M _B acts to rotate the same. As a result, the pair of movable blocks 92 also bends along the curved shapes of the pair of guide portions 91 and the pair of frames 8. For this reason, in the comparative example, there is a problem that a local load (uneven load) is applied to the rolling members of the pair of movable blocks 92, and the life of the pair of lifting mechanisms 9x is significantly reduced.

  In this regard, in the transport cart 6 according to the present embodiment, each of the pair of lifting mechanisms 9 is configured to be guided along the frame 8 and movable along the guiding portion 91 (movable up and down). A pair of moving parts 90 arranged at intervals in the extending direction of the part 91, and each of the pair of moving parts 90 is attached to be movable (can be raised and lowered) along the guide part 91. A movable block 92; a shaft member 93 that is attached to the movable block 92 and has a shaft portion 93b that protrudes on the opposite side of the movable block 92; and a rotary member 95 that is rotatably attached to the shaft portion 93b as a base point. In the pair of moving parts 95, each rotating member 95 is attached to the gantry 10 via the connecting member 14.

  With such a configuration, in the transport carriage 6 according to the present embodiment, when the cassette 13 is transferred to the transferred portion, the pair of lifting mechanisms 9 can be operated as follows. Compared with the transport cart 6x, the following advantageous effects can be obtained.

  This point will be described below with reference to FIGS. FIG. 7A is a side view of the main part of the transport carriage 6 viewed from the direction of the arrow Y5 in FIG. 3, and particularly shows the configuration of the lifting mechanism 9. FIG. 7B is a configuration diagram of the elevating mechanism 9 corresponding to FIG. 7A, and particularly shows an operation example of the elevating mechanism 9 when the cassette 13 is transferred to the transferred portion. 7A and 7B, a straight line L2 indicated by a one-dot chain line indicates a center line passing through the center of the frame 8 and the guide portion 91 in the width direction. FIG. 8 shows an enlarged schematic configuration diagram of the lifting mechanism 9 of FIG. In FIG. 8, only the minimum elements necessary for explanation are shown.

  In the present embodiment, first, as shown in the direction of arrow Y21 in FIG. 7A, the pair of movable blocks 92 and the like are raised along the guide portion 91 in a state where each arm 11a is contracted. At this time, the arrangement position of each arm 11 a with respect to each frame 8 is a position where the center of gravity (not shown) of the cassette transfer machine 11 can move along the center line L <b> 2 of each frame 8.

Next, as shown in the direction of arrow Y31 in FIG. 7B, the plurality of arms 11a are extended in order to transfer the cassette 13 to the transferred portion. As a result, as shown in the direction of the oblique arrow Y22 in the figure, a force directed in the oblique direction acts on the cassette transfer machine 11 with respect to the floor of the factory.
As a result, in each of the pair of lifting mechanisms 9, one movable block 92 and the other movable block 92 are arranged in a direction substantially perpendicular to the center line L2, as indicated by the hatching arrow in FIG. In addition, a force (hereinafter referred to as “lateral load”) acts in opposite directions. For this reason, the pair of frames 8 are bent or bent in the direction of the arrow Y31 that is the extension direction of the plurality of arms 11a in response to the lateral load, and accordingly, the pair of guide portions 91 are also bent in the direction of the arrow Y31. Bend.

  Therefore, the length d2 of the pair of guide portions 91 between the straight line L3 and the straight line L4 is larger than the length d1 between the pair of movable blocks 92, as shown in FIGS. Here, the length d <b> 1 is a length connecting the center O of one movable block 92 and the center O ′ of the other movable block 92.

  At this time, the pair of rotating members 95 in each of the pair of moving parts 90 are train bogie mechanisms in accordance with the degree of bending or bending of the guide part 91, as indicated by arrows Y10 and Y11 in FIG. As described above, the shaft member 93 is rotated or turned around the shaft portion 93b of the shaft member 93. Accordingly, one rotating member 95 is inclined by an angle α with respect to the straight line L3, and the other rotating member 95 is inclined by an angle β with respect to the straight line L4. Here, the straight line L3 is a straight line passing through the center O of one movable block 92 and orthogonal to the guide portion 91, and the straight line L4 is a straight line passing through the center O ′ of the other movable block 92 and parallel to the straight line L3. It is.

  Due to the rotating operation of the pair of rotating members 95, it is difficult for each movable block 92 to generate a force that rotates the guide block 91, that is, a bending moment. Therefore, it is possible to suppress a local load (uneven load) from being applied to the rolling member of each movable block 92. Thereby, damage to a rolling member can be suppressed and, as a result, it can reduce that the lifetime of a pair of raising / lowering mechanism 9 falls.

  Further, in the transport carriage 6 according to this embodiment, an annular or cylindrical shape is formed between the inner peripheral portion of the rotating member 95 and the outer peripheral surfaces of the shaft portion 93b and the sliding members 94 and 97 of the shaft member 93. A sliding bearing member 96 having the above is disposed. According to this, when the rotating member 95 rotates around the shaft portion 93b of the shaft member 93, friction between the shaft portion 93b of the shaft member 93 and the rotating member 95 can be reduced. As a result, the rotating member 95 can be smoothly rotated with respect to the shaft portion 93 b of the shaft member 93.

  Further, in the transport carriage 6 according to the present embodiment, a sliding member 94 having an annular shape is disposed between the rotating member 95 and the movable block 92. According to this, when the rotating member 95 rotates around the shaft portion 93 b of the shaft member 93, friction between the movable block 92 and the rotating member 95 can be reduced. As a result, the rotating member 95 can be smoothly rotated with respect to the shaft portion 93 b of the shaft member 93.

  Further, in the transport carriage 6 according to the present embodiment, a sliding member 97 having an annular shape is disposed between the rotating member 95 and the lid member 98. According to this, when the rotating member 95 rotates around the shaft portion 93b of the shaft member 93, friction between the lid member 98 and the rotating member 95 can be reduced. As a result, the rotating member 95 can be smoothly rotated with respect to the shaft portion 93 b of the shaft member 93.

The top view which shows the structural example of the conveyance system containing the conveyance trolley which concerns on embodiment of this invention. The perspective view which shows the structure of the conveyance trolley which concerns on this embodiment. The side view which shows the structure of the conveyance trolley | bogie which concerns on this embodiment. The principal part perspective view and the principal part exploded perspective view which show the structure of the raising / lowering mechanism which comprises a conveyance trolley. The principal part sectional view along the central axis which passes along the center of a raising / lowering mechanism. Each side view which shows the operation example of the raising / lowering mechanism which concerns on a comparative example. Each side view which shows the operation example of the raising / lowering mechanism which concerns on this embodiment. The schematic block diagram which expanded the raising / lowering mechanism of FIG.7 (b).

Explanation of symbols

  1 storage, 2 shelves, 3 manufacturing equipment, 4 entry / exit port, 5 track, 6 transport cart, 7 cart, 8 frame, 9 lifting mechanism, 10 mount, 11 cassette transfer machine, 12 transported object, 13 cassette, 14 connecting members, 91 guide portions, 92 movable blocks, 93 shaft members, 93b shaft portions, 94, 97 sliding members, 95 rotating members, 96 sliding bearing members, 98 lid members, 100 transport systems

Claims (5)

A traveling carriage that travels along a track and transports a cassette that accommodates an object to be transported,
The transport carriage includes a pair of columnar frames arranged at a distance in the extending direction of the track, a pair of lifting mechanisms provided corresponding to each of the pair of frames, and the pair of lifting mechanisms And a plurality of arms that are supported by the platform and configured to be extendable and contractible in the horizontal direction, and between the transferred portion by extension and contraction of the plurality of arms. A cassette transfer machine for transferring the cassette,
The elevating mechanism includes a guide portion extending along the frame and a pair of moving portions configured to be movable along the guide portion and arranged at intervals in the extending direction of the guide portion. And
The moving part is a movable block attached to be movable along the guide part, a shaft member attached to the movable block and projecting on the opposite side to the movable block side, and rotating with respect to the shaft member. A rotating member attached in a possible manner,
In the pair of moving units, each of the rotating members is attached to the gantry via a connecting member.   The transport carriage according to claim 1, wherein a sliding bearing member having an annular shape or a cylindrical shape is disposed between the shaft member and the rotating member.   The conveyance cart according to claim 1 or 2, wherein a sliding member having an annular shape is disposed between the rotating member and the movable block.   The lid member that is attached to the movable block and that prevents the rotating member from being detached from the movable block is disposed on a side opposite to the movable block side of the rotating member. The conveyance cart as described in any one of 1 thru | or 3.   The conveyance cart according to claim 4, wherein a sliding member having an annular shape is disposed between the rotating member and the lid member.

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